CN119650388A - A high voltage feedthrough component and a scanning electron microscope having the same - Google Patents
A high voltage feedthrough component and a scanning electron microscope having the same Download PDFInfo
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- CN119650388A CN119650388A CN202411751236.9A CN202411751236A CN119650388A CN 119650388 A CN119650388 A CN 119650388A CN 202411751236 A CN202411751236 A CN 202411751236A CN 119650388 A CN119650388 A CN 119650388A
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Abstract
The invention relates to the technical field of scanning electron microscopes and discloses a high-voltage punch-through assembly and a scanning electron microscope with the same. The high-voltage punching assembly is suitable for being installed on a scanning electron microscope in a sealing mode and comprises a punching sleeve, a conductive cable, a connecting piece and a connecting piece, wherein one end of the punching sleeve is provided with a concave socket, the other end of the punching sleeve is closed, one closed end of the punching sleeve is fixedly provided with a plurality of conductive electrodes, the conductive cable is installed in the punching sleeve and extends along the axial direction of the punching sleeve and is suitable for extending out of the conductive cable, the conductive cable is connected with the conductive electrodes in a conductive mode, the connecting piece is fixedly installed on the outer side wall of the punching sleeve, and the connecting piece is suitable for being matched with a matching piece on the scanning electron microscope in a vacuum sealing mode. The high-voltage punching assembly is detachably arranged on the scanning electron microscope, and when the scanning electron microscope is maintained and carried, the connecting piece and the matching piece are mutually separated, so that the electron gun cavity and the conductive cable are respectively carried and maintained.
Description
Technical Field
The invention relates to the technical field of scanning electron microscopes, in particular to a high-voltage punch-through assembly and a scanning electron microscope with the same.
Background
The scanning electron microscope emits electron beams through an electron gun, the electron beams are focused through a magnetic lens, then raster scanning is carried out on the surface of the sample, and signals generated by interaction between electrons and the surface of the sample are detected, so that the purposes of analyzing the components, the morphology and the structure of the sample are achieved. The scanning electron microscope is a precise scientific instrument and can perform high-resolution observation in the microcosmic field. To achieve higher resolution, field emission cathodes are typically used as electron sources. The field emission electron gun is required to work under ultra-high vacuum conditions and is generally composed of five electrodes, namely a cathode, a grid electrode, an extraction electrode, a focusing electrode and an anode. The highest voltage can reach tens of kilovolts, so that electrons acquire certain energy and are focused to form an electron beam.
However, the internal environment of the scanning electron microscope needs to meet both strict vacuum conditions and high voltage feed-through, i.e. ensure that high voltage electricity can be efficiently introduced between ultra-high vacuum and atmospheric environment. Therefore, the scanning electron microscope in the prior art generally adopts an integral encapsulation design, and the high-voltage transmission line and the scanning electron microscope shell are encapsulated and molded into an integral structure so as to realize high-voltage feed-through under the ultra-high vacuum condition. However, the high voltage power line will be non-detachable after being potted with the housing, resulting in a cable connection at all times when the scanning microscope is disassembled. Not only is it inconvenient to handle and transport, but also increases the complexity of maintenance.
Disclosure of Invention
In view of the above, the present invention provides a high-voltage feedthrough assembly and a scanning electron microscope with the same, so as to solve the technical problem of irremovable high-voltage microscope in the prior art.
In a first aspect, the present invention provides a high pressure feedthrough assembly adapted for sealed mounting on a scanning electron microscope, the high pressure feedthrough assembly comprising:
one end of the through sleeve is provided with a concave socket, the other end of the through sleeve is closed, and a plurality of conductive electrodes are fixedly arranged at the closed end of the through sleeve;
the conductive cable is inserted and installed in the concave socket, extends along the axial direction of the through sleeve and is suitable for extending to the outside of the conductive cable, and the conductive cable is in conductive connection with the conductive electrode;
the connecting piece is fixedly arranged on the outer side wall of the through sleeve and is suitable for being matched with the matching piece on the scanning electron microscope for vacuum sealing.
When in use, the high-voltage feedthrough assembly is hermetically mounted on the scanning electron microscope to introduce high-voltage electricity into the scanning electron microscope under vacuum sealing conditions. When the scanning electron microscope is installed, one end of the through sleeve, which is provided with the conductive electrode, extends into an electron gun cavity of the scanning electron microscope, one end of the conductive cable is connected with the conductive electrode, the other end of the conductive cable extends to the outside to be connected with a power supply, and high-voltage power is provided for an electron gun in the electron gun cavity by the conductive electrode. Sealing between the conductive cable and the through sleeve by means of encapsulation and the like, and then vacuum sealing and matching between the connecting piece and a matching piece on the scanning electron microscope are achieved, so that vacuum sealing of the electron gun cavity is achieved. In the high-voltage punching assembly, through punching sleeve, conductive cable, conductive electrode and connecting piece cooperation, guaranteed that the high-voltage punching assembly provides high-voltage power supply for the inside of the electron gun cavity when sealing cooperation with the electron gun cavity. When the scanning electron microscope is maintained and carried, the connecting piece and the matching piece are mutually separated, and the high-voltage punching assembly can be taken down from the electron gun cavity, so that the conductive cable for supplying power is separated from the electron gun cavity, and the electron gun cavity and the conductive cable are respectively carried and maintained.
In an alternative embodiment, a connecting ring is fixedly arranged at one end, close to the outlet end of the concave socket, in the through sleeve, and the connecting ring is sleeved outside the conductive cable, and the axis of the connecting ring coincides with the axis of the through sleeve. The extending direction of the conductive cable is limited through the connecting ring, and the failure of the sealing effect between the conductive cable and the through sleeve caused by bending of the conductive cable is prevented.
In an alternative embodiment, the connection ring is fixedly connected to the conductive cable. The conductive cable is prevented from driving the conductive electrode to move in the moving process, and the stability of the conductive electrode in the electron gun cavity and the electron gun body in matched conductive connection is ensured.
In an alternative embodiment, a plurality of conductive electrodes are circumferentially spaced apart. The thermal field emission electron gun of a field emission electron microscope typically comprises five electrodes, a cathode, a grid, a suction electrode, a focusing electrode and an anode. Wherein, the anode is grounded, and the cathode needs to be connected with two electrodes to ensure the power-on. The voltage between the five electrodes needs to be tightly controlled while considering the distance between the electrodes to avoid discharge. Therefore, the plurality of conductive electrodes are arranged along the circumferential direction, and the spacing between the adjacent conductive electrodes is ensured to be above the safe spacing, thereby ensuring the electrical safety. Preferably, the centers of the five conductive electrodes are uniformly arranged along the same circumference.
In an alternative embodiment, the conductive electrode is cylindrical, the end of the conductive electrode is provided with a round corner, the conductive electrode is designed into a round corner shape, so that the corner angle is avoided, the surface roughness of the conductive electrode reaches a good standard, the formation of a tip discharge on the conductive electrode can be avoided, and the discharge risk is further reduced.
In an alternative embodiment, the through sleeve is a ceramic part, the connecting part is a metal part, and the through sleeve is connected with the connecting part through welding of transition metal, and the transition metal is selected as a connecting material because of large difference of thermal expansion coefficients between the ceramic part and the metal part, so that thermal stress is effectively relieved, and the reliability of connection between the ceramic part and the metal part is improved.
In an alternative embodiment, the open end of the through sleeve is provided with a limit step, the conductive cable is provided with a matching step, and the matching step is in butt fit with the limit step so as to limit the length of the conductive cable entering the inside of the through sleeve, ensure that the length of the conductive cable in the through sleeve is matched with the length of the through sleeve, avoid the conductive cable from generating internal stress in the through sleeve, and ensure the sealing stability between the through sleeve and the conductive cable.
In a second aspect, the present invention also provides a scanning electron microscope having a high voltage feedthrough assembly of the present invention. Since the scanning electron microscope includes the high voltage feedthrough assembly, the same effect as the high voltage feedthrough assembly is achieved, and the description thereof is omitted.
In an alternative embodiment, the electronic gun further comprises an electronic gun chamber, wherein a mounting sleeve is arranged on the electronic gun chamber, the through sleeve is coaxially arranged in the mounting sleeve, the through sleeve is in sealing fit with the mounting sleeve, and one end of the through sleeve, provided with the conductive electrode, extends into the electronic gun chamber. Through setting up the installation sleeve pipe and installing the punching through sleeve pipe, the cooperation installation length of extension punching through sleeve pipe when installing on the electron gun cavity promotes the sealing stability of punching through sleeve pipe installation on the electron gun cavity.
In an alternative embodiment, the fitting is fixedly mounted outside the mounting sleeve and is connected with the connecting piece in a vacuum sealing manner. Through installing the fitting on the installation sleeve for sealing fit on the installation sleeve between connecting piece and the fitting, extension punch through sleeve and electron gun cavity sealing fit's connection length, increase the sealing stability between punch through sleeve and the electron gun cavity.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a high-voltage feedthrough assembly and an electron gun chamber according to an embodiment of the present invention.
Fig. 2 is a schematic end structure of a high-voltage feedthrough assembly according to an embodiment of the present invention.
Fig. 3 is a cross-sectional view taken along the direction A-A in fig. 2.
The reference numerals indicate 1, a through sleeve, 2, a conductive cable, 3, a conductive electrode, 4, a connecting piece, 5, a connecting ring, 6, an electron gun chamber, 7, a mounting sleeve, 8, a matching piece and 9, and transition metal.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Embodiments of the present invention are described below with reference to fig. 1 to 3.
According to an embodiment of the present invention, in one aspect, there is provided a high voltage feedthrough assembly adapted for detachable mounting on a scanning electron microscope, the high voltage feedthrough assembly comprising a feedthrough sleeve 1, a conductive cable 2, and a connector 4.
The high-voltage feedthrough assembly is mounted on the scanning electron microscope to realize high-voltage electrical access of the scanning electron microscope in a vacuum sealing environment. The high-voltage punching assembly comprises a punching sleeve 1 with one end provided with a concave socket and the other end closed, and a plurality of conductive electrodes 3 are fixedly arranged at the closed end of the punching sleeve 1. The conductive cable 2 is inserted and installed inside the concave socket of the through sleeve 1, the conductive cable 2 extends along the axial direction of the through sleeve 1, one end of the conductive cable 2 is in conductive connection with the conductive electrode 3, and the other end of the conductive cable 2 extends out of the through sleeve 1 and is in conductive connection with a power supply. The conductive cable 2 is in sealing engagement with the open end of the feedthrough sleeve 1. A knife edge flange serving as a connecting piece 4 is fixedly arranged on the outer side wall of the through sleeve 1, and the connecting piece 4 is used for being tightly matched with the other knife edge flange serving as a matching piece 8 on the scanning electron microscope so as to realize vacuum sealing.
The end of the feedthrough sleeve 1 with the conductive electrode 3 extends into the electron gun chamber 6 when the high voltage feedthrough assembly is mounted on a scanning electron microscope. One end of the conductive cable 2 is connected to the conductive electrode 3, and the other end extends to the outside to be connected to a power supply, so that a required high voltage power is supplied to the electron gun in the electron gun chamber 6 through the conductive electrode 3. In order to ensure the sealing property, sealing treatment is performed between the conductive cable 2 and the through sleeve 1 by means of potting or the like. And meanwhile, the connecting piece 4 is matched with the matching piece 8 of the scanning electron microscope in a vacuum sealing way, so that the vacuum environment of the electron gun chamber 6 is not influenced. The high-voltage feedthrough assembly ensures sealing fit with the electron gun chamber 6 through the synergism of the feedthrough sleeve 1, the conductive cable 2, the conductive electrode 3 and the connector 4, and also provides stable high-voltage power supply for the interior of the electron gun chamber 6. When the scanning electron microscope needs to be maintained or carried, the connecting piece 4 and the matching piece 8 are separated, and the high-voltage punching assembly can be easily detached from the electron gun chamber 6, so that the conductive cable 2 for power supply is separated from the electron gun chamber 6, and the electron gun chamber 6 and the conductive cable 2 are convenient to carry and maintain respectively. On the premise of ensuring the stability and reliability of the scanning electron microscope in the aspects of high-voltage power supply and vacuum sealing, the convenience of carrying and maintaining operation of the scanning electron microscope is improved.
In order to prevent the conductive cable 2 or the conductive electrode 3 from generating electric leakage or short circuit during operation, and to ensure that the through sleeve 1 is fixedly welded with the metal piece, the through sleeve 1 is provided as a ceramic piece in the embodiment. In order to reduce the outgassing rate of the material, the inside of the through sleeve 1 is coated with a glaze coating by a glaze coating process to ensure the vacuum maintenance performance of the through sleeve 1. The conductive electrode 3 is a metal electrode, and the conductive electrode 3 is fixedly connected with the through sleeve 1 in a transition metal welding mode.
In one embodiment, a connecting ring 5 is fixedly arranged at one end of the interior of the through sleeve 1 adjacent to the outlet end of the female socket. The connecting ring 5 is tightly wrapped on the periphery of the conductive cable 2, and the axis of the connecting ring 5 coincides with the axis of the through sleeve 1 so as to ensure that the connecting ring 5 and the through sleeve 1 are coaxially arranged, so that the connecting ring 5 can effectively limit the extending direction of the conductive cable 2, avoid disordered movement of the conductive cable 2 in the through sleeve 1 and strengthen the structural integrity between the conductive cable 2 and the through sleeve 1. More importantly, by arranging the connecting ring 5, weakening or failure of the sealing effect of the encapsulation between the conductive cable 2 and the through sleeve 1 caused by improper bending of the conductive cable 2 can be effectively prevented, and the safety performance and long-term reliability of an electrical system formed by the conductive cable 2 and the through sleeve 1 can be maintained. As an alternative embodiment, a layer of elastic buffer material, such as a silica gel sleeve, may be further added between the connection ring 5 and the conductive cable 2, so as to further improve the protection effect on the conductive cable 2, and provide a better sealing effect.
In one embodiment, the connection ring 5 is fixedly connected with the conductive cable 2, so as to prevent the displacement phenomenon of the conductive electrode 3, which may be caused when the conductive cable 2 moves or is subjected to external force, thereby ensuring that the conductive electrode 3 can maintain stable and reliable conductive connection with the electron gun body in the electron gun chamber 6. The working stability of the electron gun body is improved, and the performance degradation or the failure risk of the electron gun caused by poor connection is reduced. Specifically, the connection ring 5 and the conductive cable 2 may be tightly fixed by welding, mechanical locking or bonding with an adhesive, so as to ensure the stability of the high-voltage feedthrough assembly.
In one embodiment, the plurality of conductive electrodes 3 are arranged in a circumferential direction, and a thermal field emission electron gun in a field emission electron microscope generally includes five key electrodes of a cathode, a grid, a suction electrode, a focus electrode, and an anode. The anode acts as a ground electrode, ensuring an efficient conduction of current, and the cathode is connected to both electrodes to maintain the energized state. In order to ensure the high-efficiency operation and the stability of the electrical performance of the electron gun, the voltage regulation and control between the five electrodes needs to be strictly controlled, and meanwhile, the direct spacing between the adjacent electrodes also needs to strictly adhere to the safety standard so as to avoid the discharge phenomenon. For this purpose, the conductive electrodes 3 are uniformly arranged along the circumference, and the adjacent electrodes are kept larger than the safety pitch. In an alternative embodiment, the centers of the five electrodes are located on the same circumference but are unevenly distributed, and by fine-adjusting the positions of the electrodes, more compact and efficient electric field distribution is realized, so that the overall performance and stability of the electron gun are further improved while the electrical safety is ensured.
In one embodiment, the conductive electrode 3 is provided in a cylindrical shape, and the end portion thereof is rounded to eliminate the corner angle of the conductive electrode 3 while ensuring that the roughness of the surface of the conductive electrode 3 is well-standardized. By adopting the rounded shape design, the formation of the tip discharge on the surface of the conductive electrode 3 can be effectively prevented, thereby reducing the discharge risk. Alternatively, the conductive electrode 3 may have a bar-like structure such as a truncated cone, a prism, or a truncated pyramid, and rounded corners of the conductive electrode 3.
In one embodiment, the through sleeve 1 is a ceramic piece, the connecting piece 4 is a metal piece, the through sleeve 1 and the connecting piece 4 are welded and connected through a transition metal 9, and the transition metal 9 is selected as a connecting material because of large difference of thermal expansion coefficients between the ceramic piece and the metal piece, so that thermal stress is effectively relieved, and the reliability of connection between the ceramic piece and the metal piece is improved.
In one embodiment, the opening end of the through sleeve 1 is provided with a limit step, the conductive cable 2 is provided with a matching step, and the matching step is in butt fit with the limit step so as to limit the length of the conductive cable 2 entering into the inside of the through sleeve 1, ensure that the length of the conductive cable 2 in the through sleeve 1 is matched with the length of the through sleeve 1, avoid the internal stress generated by the conductive cable 2 in the through sleeve 1, and ensure the sealing stability between the through sleeve 1 and the conductive cable 2.
The high-voltage feedthrough assembly provided by the embodiment can meet the high-voltage feedthrough requirement of the field emission electron gun in an ultrahigh vacuum environment, has good stability, and is convenient to transport and maintain. The high-voltage punching assembly is designed according to the following requirements that the five electrodes are required to be electrified, the safety distance between the five electrodes is ensured, the safety between the five power-on posts and the zero-potential shell is ensured, the baking operation is required to be carried out for obtaining the ultrahigh vacuum, the temperature is generally 200 ℃, the high-temperature resistance is fully considered in the aspects of material selection and processing of the high-voltage punching assembly, the high-temperature resistance can be realized, the electron gun is required to work in the ultrahigh vacuum environment, the high-voltage punching assembly is required to have certain tightness, the leakage rate meets the use condition of the ultrahigh vacuum, the maintenance and the transportation are facilitated, the high-voltage punching assembly can be plugged and pulled out, and the maintenance and the transportation are facilitated. The high-pressure punching assembly not only can realize vacuum sealing, but also has the characteristics of high pressure resistance and high temperature resistance. The centers of the five conductive electrodes 3 in the form of the connecting posts are distributed on the porcelain insulator serving as the through sleeve 1 in a circumferential manner, and safe distances between the conductive electrodes 3 and between the conductive electrodes and the outer side wall of the through sleeve 1 are ensured through calculation so as to be used stably under high voltage. The through sleeve 1 is welded to a knife edge flange as a connecting piece 4, ensuring good tightness. In the use process, the electron gun is positioned in the electron gun chamber 6, and when the scanning electron microscope works, the electron gun chamber 6 keeps an ultrahigh vacuum environment, and the high-pressure punching assembly is connected with the other knife edge flange which is welded on the electron gun chamber 6 and serves as the matching piece 8 through the knife edge flange which serves as the connecting piece 4. The cathode, grid, sucking pole and focusing pole of the electron gun are connected with the electron gun in the vacuum electron gun chamber 6 through special wires in the vacuum, and the power supply is realized by connecting one side outside the through sleeve 1 with a high-voltage power supply through a conductive cable 2.
According to an embodiment of the present invention, in another aspect, there is also provided a scanning electron microscope having the high voltage feedthrough assembly of the present invention. The high-voltage feedthrough assembly is used for being detachably arranged on the scanning electron microscope to introduce high-voltage electricity to the scanning electron microscope under the vacuum sealing condition. When the electron gun is mounted on a scanning electron microscope, one end of the through sleeve 1 provided with the conductive electrode 3 extends into the electron gun chamber 6 of the scanning electron microscope, one end of the conductive cable 2 is connected with the conductive electrode 3, the other end extends to the outside and is connected with a power supply, and high-voltage electricity is provided for an electron gun in the electron gun chamber 6 by the conductive electrode 3. The vacuum sealing of the electron gun chamber 6 is realized by sealing the conductive cable 2 with the through sleeve 1 by means of encapsulation and the like and then vacuum sealing and matching the conductive cable with the matching piece 8 on the scanning electron microscope by using the connecting piece 4. In the high-voltage feedthrough assembly, the feedthrough sleeve 1, the conductive cable 2, the conductive electrode 3 and the connecting piece 4 are matched, so that high-voltage power supply is ensured to be provided for the inside of the electron gun chamber 6 when the high-voltage feedthrough assembly is in sealing fit with the electron gun chamber 6. When the scanning electron microscope is maintained and carried, the connecting piece 4 and the matching piece 8 are mutually separated, and the high-voltage punching assembly can be taken down from the electron gun chamber 6, so that the conductive cable 2 for supplying power is separated from the electron gun chamber 6, and the electron gun chamber 6 and the conductive cable 2 are respectively carried and maintained.
In one embodiment, an electron gun chamber 6 is arranged in the scanning electron microscope, a mounting sleeve 7 is arranged on the electron gun chamber 6, a through sleeve 1 is coaxially arranged inside the mounting sleeve 7, wherein the through sleeve 1 is in sealing fit with the mounting sleeve 7, and one end of the through sleeve 1 provided with the conductive electrode 3 extends into the electron gun chamber 6. By introducing the mounting sleeve 7 as an intermediary, the mounting length of the mating structure when the through sleeve 1 is mounted in the electron gun chamber 6 is extended. The mounting stability between the through sleeve 1 and the electron gun chamber 6 is enhanced, and the reliability of sealing fit between the through sleeve and the electron gun chamber is improved. In some other embodiments, in order to further improve the sealing effect of the mating connection between the through sleeve 1 and the mounting sleeve 7, an elastic sealing ring is added between the through sleeve 1 and the mounting sleeve 7 on the basis of keeping the coaxial mounting of the through sleeve 1 and the mounting sleeve 7, so as to ensure that stable sealing performance can be maintained under various working conditions.
In one embodiment, the other knife edge flange serving as the matching piece 8 is fixedly arranged outside the mounting sleeve 7, and sealing connection is realized between the matching piece 8 and the two knife edge flanges of the connecting piece 4. By fixing the fitting 8 on the mounting sleeve 7, the connecting element 4 and the fitting 8 form a tight and reliable sealing fit on the mounting sleeve 7, the sealing stability between the two is enhanced.
Although embodiments of the present invention have been described in connection with the accompanying drawings, various modifications and variations may be made by those skilled in the art without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope of the invention as defined by the appended claims.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411751236.9A CN119650388A (en) | 2024-12-02 | 2024-12-02 | A high voltage feedthrough component and a scanning electron microscope having the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411751236.9A CN119650388A (en) | 2024-12-02 | 2024-12-02 | A high voltage feedthrough component and a scanning electron microscope having the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN119650388A true CN119650388A (en) | 2025-03-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202411751236.9A Pending CN119650388A (en) | 2024-12-02 | 2024-12-02 | A high voltage feedthrough component and a scanning electron microscope having the same |
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| Country | Link |
|---|---|
| CN (1) | CN119650388A (en) |
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- 2024-12-02 CN CN202411751236.9A patent/CN119650388A/en active Pending
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