CN119618108A - Workpiece loading plate tilt detection system and method for coating machine and coating equipment - Google Patents
Workpiece loading plate tilt detection system and method for coating machine and coating equipment Download PDFInfo
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Abstract
The invention discloses a workpiece loading plate inclination detection system and method for a coating machine and coating equipment, wherein the system comprises a reference module, a detection module and a detection module, wherein the reference module is arranged in a vacuum cavity; the image processing module is used for carrying out image processing on the first characteristic area and the second characteristic area, and the image processing module at least comprises edge extraction and straight line fitting, and the inclination analysis module is used for determining the inclination angle of the workpiece loading plate according to the straight line fitting result. According to the invention, the reference module is arranged, and the workpiece loading plate of the coating machine is detected and identified based on the image identification technology, so that the automatic detection of the inclination angle is realized, and the detection efficiency and accuracy are improved.
Description
Technical Field
The invention relates to the technical field of coating machine detection, in particular to a workpiece loading plate inclination detection system and method for a coating machine and coating equipment.
Background
The vacuum coating machine is a device for coating a film under a higher vacuum degree. When the optical coating is carried out, a substrate to be coated is placed on a workpiece loading plate, the substrate is conveyed into a vacuum cavity by the workpiece loading plate, and the film is formed after the workpiece loading plate is placed.
Detection of the angular deflection of the workpiece loading plate is required before the workpiece loading plate enters the vacuum chamber. In the prior art, a clamping groove is usually arranged on a trolley for installing a workpiece loading plate for positioning, and whether the workpiece loading plate in the cavity is inclined or not is manually detected through an observation window beside a coating machine. The defect of positioning through the clamping groove is that errors caused by primary and secondary abrasion and human factors are not obvious, and the manual inspection result is limited by the level of the inspection personnel, so that misjudgment is easy to occur, and the inspection efficiency is low.
Disclosure of Invention
The invention provides a workpiece loading plate inclination detection system, a workpiece loading plate inclination detection method and a workpiece loading plate inclination detection device for a coating machine.
According to one aspect of the invention, a workpiece loading plate inclination detection system of a film plating machine is provided, the film plating machine comprises a vacuum cavity and a window, the vacuum cavity comprises a reference module, an image acquisition module and an inclination analysis module, the reference module is arranged in the vacuum cavity, the image acquisition module is used for synchronously acquiring the workpiece loading plate and the reference module to obtain image data, the image data comprises a first characteristic area of the reference module and a second characteristic area of the workpiece loading plate, the image processing module is used for carrying out image processing on the first characteristic area and the second characteristic area, the image processing at least comprises edge extraction and straight line fitting, and the inclination analysis module is used for determining an inclination angle of the workpiece loading plate according to a straight line fitting result.
Optionally, the image acquisition module comprises a camera and a light source, wherein the camera and the light source are fixedly arranged outside the window, at least part of areas of the reference module are located in an imaging area of the camera, the light source is used for emitting preset light rays to the reference module and the workpiece loading plate, and the preset light rays are used for enhancing the light and shade contrast ratio of the first characteristic area and the second characteristic area to surrounding areas.
Optionally, the camera is an area array camera, and the light source is an annular light source.
Optionally, the reference module is a cube module or a rectangular module, and a rectangular reflective material is arranged on one side of the reference module facing the window, and the rectangular reflective material is used for enhancing the light-dark contrast ratio between the first characteristic area and the surrounding area.
Optionally, the inclination detection system for the workpiece loading plate of the coating machine comprises an alarm module and a cleaning module, wherein the alarm module is used for sending corresponding alarm information according to an inclination angle, and the cleaning module is used for cleaning the reference module and the image acquisition module.
Optionally, the image processing module is configured to filter the image data based on a preset filtering algorithm to obtain a filtered image, perform contrast adjustment on the filtered image based on a preset image enhancement algorithm to obtain a contrast enhanced image, perform feature region interception on the contrast enhanced image based on preset coordinates, and perform sub-pixel extraction on edge information of the feature region based on a preset edge algorithm.
Optionally, the image processing module is further configured to perform data processing on edge information of the first feature area and the second feature area based on a preset length threshold, perform straight line fitting on the edge information after data processing based on a preset weighted least square method, and establish a first edge line corresponding to the first feature area and a second edge line corresponding to the second feature area.
Optionally, the inclination analyzing module is configured to acquire a first end point coordinate and a second end point coordinate of the first edge line, and a third end point coordinate and a fourth end point coordinate of the second edge line, calculate an angle difference between the first edge line and the second edge line according to the first end point coordinate, the second end point coordinate, the third end point coordinate and the fourth end point coordinate, and determine an inclination angle of the workpiece loading plate according to the angle difference.
According to the other aspect of the invention, a workpiece loading plate inclination detection method for a coating machine is provided, the coating machine comprises a vacuum cavity and a window, the workpiece loading plate inclination detection system for the coating machine is adopted to execute the method, the method comprises the steps of setting a reference module in the vacuum cavity, synchronously collecting the workpiece loading plate and the reference module to obtain image data, wherein the image data comprises a first characteristic area of the reference module and a second characteristic area of the workpiece loading plate, performing image processing on the first characteristic area and the second characteristic area, and determining the inclination angle of the workpiece loading plate according to a straight line fitting result, wherein the image processing at least comprises edge extraction and straight line fitting.
According to another aspect of the invention, a coating device is provided, which comprises the workpiece loading plate inclination detection system for the coating machine.
The technical scheme of the embodiment of the invention provides an inclination detection system, which is provided with a reference module, an image acquisition module, an image processing module and an inclination analysis module, wherein the reference module is arranged in a vacuum cavity, the image acquisition module is used for synchronously acquiring a workpiece loading plate and the reference module to obtain image data, the image data comprises a first characteristic area of the reference module and a second characteristic area of the workpiece loading plate, the image processing module is used for carrying out image processing on the first characteristic area and the second characteristic area, such as edge extraction and straight line fitting, and the inclination analysis module is used for determining the inclination angle of the workpiece loading plate according to a straight line fitting result. The automatic detection of the inclination angle of the workpiece loading plate in the coating machine is realized by carrying out edge extraction and straight line fitting on the reference module and the workpiece loading plate, so that the real-time performance is high, and the detection efficiency and the accuracy are improved.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the invention or to delineate the scope of the invention. Other features of the present invention will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural diagram of a coating machine according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a workpiece loading plate inclination detection system for a film plating machine according to a first embodiment of the present invention;
FIG. 3 is a side view of a mounting structure of a workpiece loading plate tilt detection system for a coating machine according to a first embodiment of the present invention;
FIG. 4 is a top view of a mounting structure of a workpiece loading plate tilt detection system for a coating machine according to a first embodiment of the present invention;
fig. 5 is a schematic structural diagram of a workpiece loading plate inclination detection system for a film plating machine according to a second embodiment of the present invention;
Fig. 6 is a schematic structural diagram of a workpiece loading plate inclination detection system for a film plating machine according to a third embodiment of the present invention;
fig. 7 is a flowchart of a method for detecting inclination of a workpiece loading plate of a coating machine according to an embodiment of the invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a schematic structural diagram of a film plating machine according to an embodiment of the present invention, and fig. 2 is a schematic structural diagram of a workpiece loading plate inclination detection system of a film plating machine according to a first embodiment of the present invention, where the embodiment is applicable to an application scenario for detecting an inclination angle of a workpiece loading plate in a film plating machine based on an edge straight line fitting method.
As shown in fig. 1, the coating machine comprises a vacuum chamber 01, a window 02 and a workpiece loading plate 03. Wherein the workpiece loading plate 03 can be fixed on the carrying trolley. In the film forming operation, the workpiece loading plate 03 is transported into the vacuum chamber 01 by the transport carriage. The window 02 is arranged on any side wall of the vacuum cavity 01, and the window 02 is provided with a sight glass so that an operator can observe the condition inside the vacuum cavity 01 through the window 02 or can shoot the condition inside the vacuum cavity 01 through the window 02 by utilizing a camera.
As shown in fig. 1 and 2, the inclination detection system for the workpiece loading plate of the coating machine comprises a reference module 100, an image acquisition module 200, an image processing module 300 and an inclination analysis module 400.
Referring to fig. 1, a reference module 100 is provided in a vacuum chamber 01. In an embodiment of the present invention, the reference module 100 may be fixedly installed at a side of the workpiece loading plate 03 facing the window 02. In some embodiments, the reference module 100 is positioned on a first plane toward the window 02 side and the workpiece load plate 03 is positioned on a second plane toward the window 02 side, the first plane being coplanar or approximately coplanar with the second plane. In other embodiments, the separation distance between the first plane and the image acquisition module 200 is less than the separation distance between the second plane and the image acquisition module 200. Typically, the dimension of the separation between the first plane and the second plane is less than or equal to 35 millimeters.
The image acquisition module 200 is disposed outside the window 02, and is configured to acquire images of the workpiece loading plate 03 and the reference module 100 in a synchronous acquisition manner, thereby obtaining image data. Wherein the image data includes a first characteristic area A1 of the reference module 100 and a second characteristic area A2 of the monolithic workpiece loading plate 03. In an embodiment of the present invention, the image acquisition module 200 may acquire images at regular time according to the moving speed of the cart.
The image processing module 300 is configured to perform image processing on the first feature area A1 and the second feature area A2, where the image processing includes at least edge extraction and straight line fitting. In the embodiment of the invention, the images of the first characteristic area A1 and the second characteristic area A2 can be subjected to sub-pixel level edge detection, and the weighted least square method is adopted to perform straight line fitting on the edge detection result so as to remove abnormal values.
And the inclination analysis module 400 is used for determining the inclination angle of the workpiece loading plate according to the straight line fitting result. In the embodiment of the invention, two straight lines corresponding to the first characteristic area A1 and the second characteristic area A2 can be obtained through straight line fitting, and the inclination angle of the workpiece loading plate is calculated according to the angle difference between the two straight lines.
Specifically, after the workpiece loading plate 03 enters the vacuum chamber 01, the reference module 100 and the workpiece loading plate 03 disposed in the vacuum chamber 01 are placed back and forth with respect to the direction of the image acquisition module 200, and the reference module 100 is spaced 35 mm from the plane in which the workpiece loading plate 03 is located. The image acquisition module 200 is controlled to acquire images at regular time according to the moving speed of the carrying trolley, and a single image contains a first characteristic area A1 of the reference module 100 and a second characteristic area A2 of the single workpiece loading plate 03. Each image acquired is transmitted to the image processing module 300 for real-time processing. The image processing module 300 respectively performs edge extraction and straight line fitting on the first feature area A1 and the second feature area A2, performs straight line fitting on the edge of the first feature area A1 to obtain a reference object edge straight line, performs straight line fitting on the edge of the second feature area A2 to obtain a workpiece loading plate edge straight line, and can use an included angle between the two straight lines as an inclination angle of the current workpiece loading plate 03. If the inclination angle of the workpiece loading plate 03 is smaller than or equal to the preset inclination angle threshold, image processing and inclination angle analysis are continuously performed on the image data obtained at the next sampling moment, and if the inclination angle of the workpiece loading plate 03 is larger than the preset inclination angle threshold, the placement angle of the workpiece loading plate 03 is adjusted. The automatic detection of the inclination angle of the workpiece loading plate in the film plating machine is realized by carrying out edge extraction and straight line fitting on the image data, the inclination angle is not influenced by the image sampling position, the system adaptability is strong, and the improvement of the detection efficiency and the accuracy is facilitated.
In other embodiments, the image processing module 300 and the tilt resolution module 400 may be integrated in the same programmable logic controller (Programmable Logic Controller, PLC for short).
Fig. 3 is a side view of a mounting structure of a workpiece loading plate tilt detection system of a coating machine according to a first embodiment of the present invention, and fig. 4 is a top view of a mounting structure of a workpiece loading plate tilt detection system of a coating machine according to a first embodiment of the present invention.
As shown in fig. 3 and 4, the image acquisition module 200 includes a camera 201 and a light source 202, the camera 201 and the light source 202 are fixedly installed outside the window 02, at least a partial region of the reference module 100 is located in an imaging region of the camera 201, and the light source 202 is used for emitting preset light to the reference module 100 and the workpiece loading plate, wherein the preset light is used for enhancing the brightness contrast ratio of the first characteristic region and the second characteristic region to surrounding regions.
In an embodiment of the present invention, the image data acquired by the camera 201 may be a black-and-white picture, and the effect of light-dark contrast is enhanced by binarizing the image.
In one embodiment, the camera 201 is an area camera.
In particular, for stationary detection or detection with a slower speed, an area camera is generally preferred to make the display of the photographed picture more intuitive, which is beneficial to extracting two-dimensional image information. The resolution of the camera 201 may be set to 3840×2748. Illustratively, the lens model number is AZURE-0414M5M, the resolution is 150lp/mm, the focal length is 4mm, and the rear intercept is 10.33mm.
Illustratively, the camera 201 may be a large constant image camera collocated with a corresponding lens. The camera 201 has a synchronous acquisition function.
As shown in connection with fig. 3, the light source 202 may be provided as a ring light source. The annular light source 202, the camera 201 and the lens matched with the camera 201 are all arranged outside the sight glass at the side surface of the vacuum cavity 01 to form the image acquisition module 200 of the detection system.
With continued reference to fig. 3 and 4, the reference module 100 is a cube module or a rectangular module, and a rectangular reflective material is disposed on a side of the reference module 100 facing the window 02, where the rectangular reflective material is used to enhance the light-dark contrast ratio between the first feature area A1 and the surrounding area.
In the embodiment of the present invention, the reflective material may be the same material as the workpiece loading plate 03. Under the irradiation of the annular light source 202, the rectangular reflective material presents a highlight state, so that the light and shade contrast ratio of the first characteristic region A1 and surrounding regions is improved, and the image edge extraction effect is improved.
Optionally, fig. 5 is a schematic structural diagram of a workpiece loading board inclination detection system for a film plating machine according to a second embodiment of the present invention, and an alarm function is added on the basis of the embodiment shown in fig. 2.
As shown in FIG. 5, the system for detecting the inclination of the workpiece loading plate of the coating machine further comprises a warning module 500 for sending corresponding warning information according to the inclination angle.
In one embodiment, the alert module 500 includes, but is not limited to, any one or more of a display screen, an audible and visual alarm, or a smart terminal device.
Specifically, when the inclination analyzing module 400 determines that the inclination angle is greater than the preset inclination angle threshold, a trigger signal may be sent to the warning module 500 to control the warning module 500 to send out warning information, for example, display a warning sign or send out a warning voice, so as to remind the operator to check the workpiece loading plate 03. Through setting up the slope detecting system that has alarming function, improved the interactivity of slope testing result, avoid work piece loading board slope to leak to examine.
Optionally, fig. 6 is a schematic structural diagram of a workpiece loading plate inclination detection system for a film plating machine according to a third embodiment of the present invention, and a system cleaning function is added on the basis of the embodiment shown in fig. 2.
In one embodiment, the coating machine workpiece loading plate inclination detection system further comprises a cleaning module 600, wherein the cleaning module 600 is used for cleaning the reference module 100 and the image acquisition module 200. By cleaning the reference object and the camera lens, the identifiability of the reference module 100 is improved, the image quality is improved, and the tilt detection effect is improved.
In the embodiment of the invention, after the hardware module is cleaned, the initial angle of the reference module 100 can be acquired before the workpiece loading plate 03 enters the vacuum chamber 01, and after the workpiece loading plate 03 enters the vacuum chamber 01, the angle between the workpiece loading plate 03 and the reference module 100 is acquired through an image recognition technology, and whether the workpiece loading plate is inclined or not is judged according to the angle. The influence of the position change before and after the camera is cleaned on the detection result is small, and the system adaptability is strong. The convenience and the working efficiency of system maintenance are improved while the detection result is ensured.
In one embodiment, the image processing module 300 is configured to filter the image data based on a preset filtering algorithm to obtain a filtered image, perform contrast adjustment on the filtered image based on a preset image enhancement algorithm to obtain a contrast enhanced image, perform feature region clipping on the contrast enhanced image based on preset coordinates, and perform sub-pixel extraction on edge information of the feature region based on a preset edge algorithm.
In an embodiment of the present invention, the preset filtering algorithm includes, but is not limited to, a mean filtering algorithm and a bilateral filtering algorithm. The bilateral filtering traverses the whole image based on the size of a set window, compares all pixel values in the window with the pixel of a central point, obtains the size of a spatial domain kernel and the size of the pixel domain kernel of the image, multiplies the spatial domain kernel and the size of the pixel domain kernel of the image to be used as the characteristic value of the point, adds the multiplication product of the characteristic value of each point and the pixel value of the point, and divides the sum of all the characteristic values to obtain the result which is the pixel value of the central point.
For example, the calculation formula of the mean filtering may be expressed as the following formula one:
Where f (x, y) represents the average value of the pixels within the filter window to be solved, g (x, y) represents the input pixel value, γ is used to represent the filter window size, and if γ is defined as1, the filter window size is 3×3.
The bilateral filtering algorithm uses a two-dimensional Gaussian function to generate a spatial domain template and uses a one-dimensional Gaussian function to generate a value domain template. Accordingly, the calculation formula is divided into two parts, namely a space domain kernel (also called space coefficient) and a value domain kernel (also called value domain coefficient).
Illustratively, the calculation formula of the spatial domain kernel is shown as formula two:
Where (i, j) represents the coordinates of other coefficients of the template window, (k, l) is the coordinates of the center point of the template window, σ d is the standard deviation of the gaussian function, and the weight ω d represents the spatial domain kernel.
The calculation formula of the value domain kernel is shown as a formula III:
Where f (i, j) represents the pixel value of the image at coordinates (i, j), f (k, l) represents the pixel value at the center point (k, l), ω r represents the value range kernel.
Multiplying the two templates to obtain a bilateral filtered template weight, as shown in a formula IV:
Therefore, the calculation formula of the bilateral filtering is as follows:
Where g (i, j) represents the pixel mean value within the filter window to be solved and f (k, l) represents the pixel value at the center point (k, l).
In an embodiment of the present invention, the preset image enhancement algorithm may be Emphasize image enhancement algorithms. Under the irradiation of a light source, the second characteristic area A2 of the workpiece loading plate has obvious light reflection, the gray value of the image edge information shot by the camera has obvious change, and the linear gray conversion is carried out on the image edge and the corner based on Emphasize image enhancement algorithm, so that the bright position in the image is brighter, the dark position is darker, the local contrast is enhanced without influencing the overall contrast, and the edge is clearer.
For example, the calculation formula of the preset image enhancement algorithm may be expressed as the following formula six:
res =round (origin-mean) +factor (equation six)
Wherein the new pixel value res is equal to the pixel value of the point of the original image minus the average pixel value of the pixel values of all points in the kernel size range, and the result is approximately rounded, the result may be positive or negative, and the pixel value of the original point is added to the result, so as to obtain the final result to replace the pixel value of the original point.
In the embodiment of the invention, the upper left corner of a single image is taken as an origin, the lower left corner is taken as an X axis, the right corner is taken as a Y axis, a coordinate system is established, the preset coordinates can be rectangular vertex coordinates set based on the actual positions of the workpiece loading plate and the reference module in the coordinate system, the characteristic region of the enhanced image is intercepted based on the preset coordinates, two interested regions are obtained, one interested region is a first characteristic region A1 positioned on the reference module 100, and the other interested region is a second characteristic region A2 positioned on the workpiece loading plate 03.
In embodiments of the present invention, a Canny edge detection operator may be employed for sub-pixel extraction of edge information.
In an embodiment, the image processing module 300 is further configured to perform data processing on edge information of the first feature area A1 and the second feature area A2 based on a preset length threshold, perform straight line fitting on the edge information after the data processing based on a preset weighted least square method, and establish a first edge line corresponding to the first feature area A1 and a second edge line corresponding to the second feature area A2.
Specifically, the preset length threshold is the minimum edge line length required for straight line fitting. If the length of the edge line extracted from the edge of the sub-pixel is smaller than a preset length threshold value, deleting the edge data, and eliminating the influence of abnormal values. In the straight line fitting algorithm, the principle of light weight is adopted, the sum of squares of the deviations is weighted, and the straight line fitting is respectively carried out on sub-pixel edge data reserved by the workpiece loading plate 03 and the reference module 100 by combining a weighted least square method, so as to obtain a first edge line and a second edge line. Abnormal value elimination is carried out by setting a preset length threshold value, straight line fitting is carried out on data after abnormal value elimination, and the accuracy of straight line fitting can be improved by combining a weighted least square method, so that the accuracy of an inclination detection result is improved, and the inclination detection effect is improved.
In one embodiment, the tilt resolution module 400 is configured to obtain a first end point coordinate and a second end point coordinate of a first edge line, and a third end point coordinate and a fourth end point coordinate of a second edge line, calculate an angle difference between the first edge line and the second edge line according to the first end point coordinate, the second end point coordinate, the third end point coordinate and the fourth end point coordinate, and determine a tilt angle of the workpiece loading plate according to the angle difference.
Specifically, a coordinate system is established with the upper left corner of the single image as the origin, the downward X axis and the rightward Y axis, and the start point coordinate (i.e., the first end point coordinate) and the end point coordinate (i.e., the second end point coordinate) of the first edge line, and the start point coordinate (i.e., the third end point coordinate) and the end point coordinate (i.e., the fourth end point coordinate) of the second edge line are respectively output. Calculating the slope of a first edge line according to the first end point coordinate and the second end point coordinate, calculating the slope of a second edge line according to the third end point coordinate and the fourth end point coordinate, further calculating the angle between the two edge lines according to the slope, and if the angle difference between the two edge lines is smaller than or equal to a preset inclination angle threshold value, determining that the inclination angle of the workpiece loading plate meets the requirement. The inclination angle is calculated by referring to the angle difference between the module and the workpiece loading plate, so that the automatic detection of the inclination angle of the workpiece loading plate in the film plating machine is realized, the inclination angle identified based on the included angle of the edge line is not influenced by the position change of system hardware, and the system adaptability is strong.
Based on the same inventive concept, the embodiment of the invention also provides a method for detecting the inclination of the workpiece loading plate of the coating machine, which is implemented by adopting the system for detecting the inclination of the workpiece loading plate of the coating machine provided by any embodiment.
Fig. 7 is a flowchart of a method for detecting inclination of a workpiece loading plate of a coating machine according to an embodiment of the invention.
As shown in fig. 7, the method for detecting the inclination of the workpiece loading plate specifically includes the following steps:
S1, setting a reference module in the vacuum cavity.
In some embodiments, the reference module is located in a first plane toward the window side and the workpiece load plate is located in a second plane toward the window side, the first plane being coplanar or approximately coplanar with the second plane.
In other embodiments, the separation distance between the first plane and the image acquisition module is less than the separation distance between the second plane and the image acquisition module. Typically, the dimension of the separation between the first plane and the second plane is less than or equal to 35 millimeters.
S2, synchronously collecting the workpiece loading plate and the reference module to obtain image data.
Wherein the image data includes a first characteristic region of the reference module and a second characteristic region of the workpiece loading plate.
And S3, performing image processing on the first characteristic region and the second characteristic region.
In this embodiment, the image processing includes at least edge extraction and straight line fitting.
And S4, determining the inclination angle of the workpiece loading plate according to the straight line fitting result.
In one embodiment, when the workpiece loading plate and the reference module are synchronously collected, the method further comprises the steps of setting a light source, and emitting preset light to the reference module and the workpiece loading plate based on the light source, wherein the preset light is used for enhancing the brightness contrast ratio of the first characteristic area and the second characteristic area to surrounding areas.
In one embodiment, the light source is a ring light source.
In one embodiment, the method for detecting the inclination of the workpiece loading plate further comprises the step of arranging a rectangular reflecting material on one side of the reference module, which faces the window, wherein the rectangular reflecting material is used for enhancing the light-dark contrast ratio between the first characteristic area and the surrounding area.
In one embodiment, the method for detecting the inclination of the workpiece loading plate further comprises the step of sending corresponding warning information according to the inclination angle.
In one embodiment, the workpiece loading plate inclination detection method further comprises the steps of cleaning the reference module and the image acquisition module, and recording and storing the initial angle of the reference module after cleaning is completed.
In one embodiment, the workpiece loading plate inclination detection method further comprises the steps of filtering image data based on a preset filtering algorithm to obtain a filtered image, carrying out contrast adjustment on the filtered image based on a preset image enhancement algorithm to obtain a contrast enhanced image, carrying out characteristic region interception on the contrast enhanced image based on preset coordinates, and carrying out sub-pixel extraction on edge information of the characteristic region based on a preset edge algorithm.
In one embodiment, the workpiece loading plate inclination detection method further comprises the steps of carrying out data processing on edge information of the first characteristic region and the second characteristic region based on a preset length threshold value, carrying out straight line fitting on the edge information after data processing based on a preset weighted least square method, and establishing a first edge line corresponding to the first characteristic region and a second edge line corresponding to the second characteristic region.
In one embodiment, the workpiece loading plate inclination detection method further comprises the steps of obtaining a first end point coordinate and a second end point coordinate of a first edge line, a third end point coordinate and a fourth end point coordinate of a second edge line, calculating an angle difference between the first edge line and the second edge line according to the first end point coordinate, the second end point coordinate, the third end point coordinate and the fourth end point coordinate, and determining an inclination angle of the workpiece loading plate according to the angle difference.
Based on the same inventive concept, the embodiment of the invention also provides a coating device, which comprises the coating machine workpiece loading plate inclination detection system provided by any embodiment, and the coating machine workpiece loading plate inclination detection system has corresponding functional modules and beneficial effects.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present invention may be performed in parallel, sequentially, or in a different order, so long as the desired results of the technical solution of the present invention are achieved, and the present invention is not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (10)
1. The utility model provides a work piece loading board inclination detecting system for coating machine, the coating machine includes vacuum chamber, window and work piece loading board, its characterized in that includes:
the reference module is arranged in the vacuum cavity;
The image acquisition module is used for synchronously acquiring the workpiece loading plate and the reference module to obtain image data, wherein the image data comprises a first characteristic area of the reference module and a second characteristic area of the workpiece loading plate;
The image processing module is used for carrying out image processing on the first characteristic region and the second characteristic region, and the image processing at least comprises edge extraction and straight line fitting;
and the inclination analysis module is used for determining the inclination angle of the workpiece loading plate according to the straight line fitting result.
2. The workpiece loading plate inclination detection system for a film plating machine according to claim 1, wherein the image acquisition module comprises a camera and a light source, the camera and the light source being fixedly installed outside the window;
At least a partial region of the reference module is located within an imaging region of the camera;
The light source is used for emitting preset light rays to the reference module and the workpiece loading plate, and the preset light rays are used for enhancing the light-dark contrast ratio of the first characteristic area, the second characteristic area and surrounding areas.
3. The workpiece loading plate inclination detection system for a film plating machine according to claim 2, wherein the camera is an area camera, and the light source is an annular light source.
4. The workpiece loading plate inclination detection system for a film plating machine according to claim 1, wherein the reference module is a cube module or a rectangular module, and a rectangular reflecting material is arranged on one side of the reference module facing the window;
the rectangular reflective material is used for enhancing the light-dark contrast ratio of the first characteristic region and surrounding regions.
5. The workpiece loading plate inclination detection system for a film plating machine according to claim 1, further comprising a warning module and a cleaning module;
The warning module is used for sending corresponding warning information according to the inclination angle;
the cleaning module is used for cleaning the reference module and the image acquisition module.
6. The tool loading plate tilt detection system for a coating machine according to any one of claims 1 to 5, wherein the image processing module is configured to filter the image data based on a preset filtering algorithm to obtain a filtered image, to perform contrast adjustment on the filtered image based on a preset image enhancement algorithm to obtain a contrast enhanced image, and to perform feature region clipping on the contrast enhanced image based on preset coordinates and to perform sub-pixel extraction on edge information of the feature region based on a preset edge algorithm.
7. The tool loading plate tilt detection system for a coating machine according to any one of claims 1 to 5, wherein the image processing module is further configured to perform data processing on edge information of the first feature area and the second feature area based on a preset length threshold, perform straight line fitting on the edge information after data processing based on a preset weighted least square method, and establish a first edge line corresponding to the first feature area and a second edge line corresponding to the second feature area.
8. The tool load plate tilt detection system of claim 7, wherein the tilt resolution module is configured to obtain first and second end point coordinates of the first edge line, and third and fourth end point coordinates of the second edge line, and calculate an angle difference between the first and second edge lines based on the first, second, third, and fourth end point coordinates, and determine the tilt angle of the tool load plate based on the angle difference.
9. A method for detecting the inclination of a workpiece loading plate for a coating machine, the coating machine comprising a vacuum chamber, a window and a workpiece loading plate, characterized in that the method is performed by using the workpiece loading plate inclination detection system for a coating machine according to any one of claims 1 to 8;
the method comprises the following steps:
A reference module is arranged in the vacuum cavity;
synchronously acquiring the workpiece loading plate and the reference module to obtain image data, wherein the image data comprises a first characteristic area of the reference module and a second characteristic area of the workpiece loading plate;
performing image processing on the first characteristic region and the second characteristic region, wherein the image processing at least comprises edge extraction and straight line fitting;
and determining the inclination angle of the workpiece loading plate according to the straight line fitting result.
10. A coating apparatus comprising the workpiece loading plate inclination detection system for a coating machine according to any one of claims 1 to 8.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311151816.XA CN119618108A (en) | 2023-09-07 | 2023-09-07 | Workpiece loading plate tilt detection system and method for coating machine and coating equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311151816.XA CN119618108A (en) | 2023-09-07 | 2023-09-07 | Workpiece loading plate tilt detection system and method for coating machine and coating equipment |
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