CN119480590A - Electron beam control device and method, scanning electron microscope - Google Patents

Abstract

The present application discloses an electron beam control device and method, and a scanning electron microscope, wherein the electron beam control device includes: an aperture member, the aperture member has a plurality of aperture holes arranged at intervals, wherein the aperture sizes of the aperture holes are different; a worm gear assembly, which includes a worm gear and a worm matched with the worm gear, and the aperture member is placed on the upper surface of the worm gear; a first driving device, which is connected to the worm gear and drives the worm gear to move forward or backward in a first direction, wherein the first direction is parallel to the extension direction of the worm gear; and a second driving device, which is connected to the worm gear and drives the worm gear to rotate, so that the worm gear drives the aperture member to rotate. This solution drives the worm gear to move by the first driving device, so that the electron beam is aligned with the aperture member, and then drives the worm gear to rotate by the second driving device, thereby driving the worm gear to rotate, and then can quickly locate the aperture hole that meets the imaging and analysis conditions. This solution is simple to operate and has high efficiency.

Description

Electron beam control device and method and scanning electron microscope

Technical Field

The present application relates generally to the field of scanning electron microscope technology. More specifically, the present application relates to an electron beam control apparatus. Further, the application also relates to a control method of the electron beam. Further, the application also relates to a scanning electron microscope.

Background

At the moment of rapid development of semiconductor technology, electron beam inspection technology is commonly adopted in wafer inspection equipment on the market. The technology can accurately identify microscopic defects on a wafer by utilizing the high-resolution characteristic of an electron beam. In order to achieve high definition imaging for electron beam inspection, a diaphragm device is required between the electron beam source and the wafer to be inspected for screening the electron beam. That is, the diaphragm device only allows the most concentrated and finest part of the electron beam to pass through, and intercepts the other peripheral electron beams. And further, the scattering and diffraction of the electron beam can be reduced, so that the resolution and accuracy of detection are improved.

In the field of scanning electron microscopy, the use of a porous diaphragm plays a critical role in optimizing the imaging effect. Currently, the prior art is largely divided into mechanical rectilinear and variable optical axis solutions. In the mechanical linear type porous diaphragm scheme, the position of the diaphragm is usually adjusted in a linear movement mode so as to realize the selection of different apertures. However, this approach is relatively complex to operate and it is difficult to precisely match the diaphragm aperture. In practical applications, multiple adjustments may be required to find the appropriate aperture, which is not only time consuming, but may also affect the efficiency and accuracy of the experiment. While the variable optical axis multi-aperture approach, while providing some degree of flexibility, has some problems. For example, its structure is relatively complex, manufacturing costs are high, and operating specifications are high in practical use. Meanwhile, due to variability of an optical axis thereof, stability of imaging may be affected to some extent. The variable optical axis solution has high requirements on environmental stability, and small vibration or temperature change can have adverse effects on imaging effects.

In view of the foregoing, there is a need for an electron beam control apparatus and method, and a scanning electron microscope, so as to improve the convenience of operation and the accuracy of matching aperture holes, and further improve the operation efficiency.

Disclosure of Invention

In order to solve at least the above-mentioned technical problems, the application provides an electron beam control device and method and a scanning electron microscope scheme.

In a first aspect, the electron beam control device comprises a diaphragm member, a worm wheel assembly, a first driving device and a second driving device, wherein the diaphragm member is provided with a plurality of diaphragm holes which are arranged at intervals, the aperture sizes of the diaphragm holes are different, the worm wheel assembly comprises a worm wheel and a worm which is matched with the worm wheel, the diaphragm member is arranged on the upper surface of the worm wheel, the first driving device is connected with the worm wheel and drives the worm wheel to advance or retreat in a first direction, the first direction is parallel to the extending direction of the worm, and the second driving device is connected with the worm and drives the worm to rotate, so that the worm wheel drives the diaphragm member to rotate.

In some embodiments, the electron beam control device further comprises a bellows assembly comprising a bellows having a hollow cavity therein, a first end plate fixedly connected to a first end of the bellows, a first drive shaft on a first drive device and a second drive shaft on a second drive device passing through the first end plate and extending into the bellows;

The worm wheel is arranged on the diaphragm rod, the first end plate is fixedly connected with the first end of the bellows, the second end plate is fixedly connected with the second end of the bellows, the second driving shaft penetrates through the second end plate and is connected with the worm, the extending tail end of the first driving shaft is connected with the inner surface of the second end plate, the inner surface of the second end plate faces the first end plate, and the diaphragm rod is fixedly connected with the outer surface of the second end plate, and the worm wheel is arranged on the diaphragm rod.

In some embodiments, the diaphragm rod is provided with a support shaft in rotary connection with the diaphragm rod, and one end of the support shaft away from the diaphragm rod is fixedly connected with the worm wheel, wherein the worm wheel is arranged at intervals with the diaphragm rod.

In some embodiments, a sealing assembly is further connected to the outer surface of the second end plate, the sealing assembly has a through hole thereon, and the central axis of the through hole coincides with the central axis of the through hole on the second end plate.

In some embodiments, the seal assembly includes a fixed portion, a first diameter section, a variable diameter section, and a second diameter section connected in sequence and having an outer diameter that decreases in sequence.

In some embodiments, the diaphragm member is further covered with a diaphragm cap, and the diaphragm cap comprises a groove structure, wherein the groove structure comprises a circular top wall and a sleeve, one end of the sleeve is connected with the top wall, the top wall is provided with a circular light transmission hole, and the extending part is connected with the other end of the sleeve and extends away from the sleeve along the radial direction of the sleeve.

In some embodiments, the upper surface of the worm gear is provided with a first groove for limiting the diaphragm, and a second groove which is arranged on the periphery of the first groove and limits the extension part on the diaphragm cap, and the second groove is annular.

In some embodiments, the electron beam control device further comprises a connecting piece matched with the scanning electron microscope, a through hole is formed in the middle of the connecting piece, the end face, close to the corrugated pipe assembly, of the connecting piece comprises a first sealing face and a second sealing face, an annular limiting groove extending towards the direction away from the corrugated pipe assembly is formed between the first sealing face and the second sealing face, the first sealing face is fixedly connected with the outer surface, away from the second end plate, of the first end plate, the second sealing face is abutted to a shell on the scanning electron microscope, and the annular limiting groove is clamped with a limiting piece on the scanning electron microscope.

In a second aspect, an electron beam control method, which is applied to the electron beam control device, includes operating a first driving device to drive a worm wheel to advance or retract in a first direction so as to align a diaphragm on the worm wheel with an electron beam, and operating a second driving device to drive the worm to rotate so as to drive the worm wheel to rotate the diaphragm to rotate by a predetermined angle.

In a third aspect, the present application provides a scanning electron microscope comprising the electron beam control device described above.

By the electron beam control device provided by the embodiment of the application, the first driving device drives the worm wheel to advance or retreat in the first direction, so that the position of the diaphragm piece can be accurately adjusted, and the diaphragm piece on the worm wheel is ensured to be aligned with the electron beam. The second driving device drives the worm to rotate, so that the worm wheel drives the diaphragm to rotate, and further, the diaphragm holes meeting imaging and analysis conditions can be rapidly positioned. This scheme convenient operation, and the precision is high. Further, in some embodiments, a diaphragm cap is further mounted on the diaphragm member, which helps to reduce scattering and reflection of the electron beam when passing through the diaphragm member, so as to improve the concentration of the electron beam and the definition of the image.

Drawings

The above, as well as additional purposes, features, and advantages of exemplary embodiments of the present application will become readily apparent from the following detailed description when read in conjunction with the accompanying drawings. In the drawings, embodiments of the application are illustrated by way of example and not by way of limitation, and like reference numerals refer to similar or corresponding parts and in which:

Fig. 1 is a schematic view showing a structure of an electron beam control device according to an embodiment of the present application;

FIG. 2 is a schematic view showing another angle of the electron beam controlling apparatus according to the embodiment of the present application;

FIG. 3 shows a cross-sectional view of an electron beam control device in a horizontal direction according to an embodiment of the present application;

fig. 4 is a schematic view showing the structure of a worm wheel of the electron beam control device according to the embodiment of the present application;

fig. 5 shows a schematic structural view of a diaphragm cap of the electron beam control apparatus according to the embodiment of the present application;

Fig. 6 shows a schematic structural view of a diaphragm member of the electron beam control apparatus according to the embodiment of the present application.

100, An electron beam control device;

The diaphragm member, 102, diaphragm cap, 103, worm gear assembly, 104, first driving device, 105, second driving device, 106, bellows assembly, 107, sealing assembly, 108, connecting member, 109, first mounting plate, 110, second mounting plate, 111, protective cover, 1011, diaphragm aperture, 1021, mounting hole, 1022, top wall, 1023, sleeve, 1024, light transmitting hole, 1025, extension, 1031, worm gear, 1032, worm, 1033, first groove, 1034, second groove, 1041, first motor, 1042, first coupler, 1043, first driving shaft, 1051, second motor, 1052, second coupler, 1053, second driving shaft, 1061, bellows, 1062, first end plate, 1063, second end plate, 1064, diaphragm rod, 1065, support shaft, 1071, fixed portion, 1072, first diameter section, 1073, variable diameter section, 1074, second diameter section, 1081, first sealing surface 1082, second sealing surface 1083, annular limiting groove.

Detailed Description

The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

It should be understood that the terms "comprises" and "comprising," when used in this specification and in the claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

It is also to be understood that the terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the specification and claims, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should be further understood that the term "and/or" as used in the present specification and claims refers to any and all possible combinations of one or more of the associated listed items, and includes such combinations.

As used in this specification and the claims, the term "if" may be interpreted as "when..once" or "in response to a determination" or "in response to detection" depending on the context. Similarly, the phrase "if a determination" or "if a [ described condition or event ] is detected" may be interpreted in the context of meaning "upon determination" or "in response to determination" or "upon detection of a [ described condition or event ]" or "in response to detection of a [ described condition or event ]".

Specific embodiments of the present application are described in detail below with reference to the accompanying drawings.

As shown in fig. 1-3, the present application provides an electron beam control device 100, where the electron beam control device 100 includes a diaphragm member 101, where the diaphragm member 101 has a plurality of diaphragm holes 1011 disposed at intervals, where the aperture sizes of the diaphragm holes 1011 are different, a worm wheel assembly 103 including a worm wheel 1031 and a worm 1032 adapted to the worm wheel 1031, the diaphragm member 101 is disposed on an upper surface of the worm wheel 1031, a first driving device 104 connected to the worm wheel 1031 and driving the worm wheel 1031 to advance or retract in a first direction, where the first direction is parallel to an extending direction of the worm 1032, and a second driving device 105 connected to the worm 1032 and driving the worm 1032 to rotate, so that the worm wheel 1031 drives the diaphragm member 101 to rotate.

The electron beam control device 100 in this embodiment comprises a diaphragm member 101, a worm gear assembly 103, a first drive means 104 and a second drive means 105. As shown in fig. 6, specifically, the diaphragm member 101 has a cylindrical structure with a preset thickness, a circle of diaphragm holes 1011 with different sizes are uniformly distributed on the end surface, and the centers of the diaphragm holes 1011 are all located on the same circumference. Such a design not only provides a plurality of aperture stop holes to accommodate different imaging and analysis conditions. And through scientific calculation and reasonable layout, the spacing and distribution among the diaphragm holes can meet the imaging requirements under various different experimental conditions. Compared with the traditional square or other shapes, the circular diaphragm piece 101 in the scheme has better mechanical stability and uniformity in the rotation process, and can effectively reduce the position offset possibly caused by irregular shapes. In addition, the cost of the circular porous diaphragm member 101 in the processing process is low, and the processing difficulty is relatively low, so that the production cost is reduced, the processing efficiency and the processing precision are improved, and the circular diaphragm becomes an economic and efficient solution.

The worm wheel assembly 103 in this embodiment includes a worm wheel 1031 and a worm 1032 adapted to the worm wheel 1031, and the diaphragm 101 is fixed to an upper surface of the worm wheel. First drive 104 is coupled to worm gear 1031 to drive worm gear 1031 in a forward or reverse motion in a first direction that is parallel to the direction of extension of worm 1032. This arrangement of linear movement allows for precise positional adjustment of the diaphragm member 101 in a direction parallel to the worm 1032. In addition, the second driving device 105 is directly connected to the worm 1032, and is mainly used for driving the worm 1032 to rotate. When the worm 1032 rotates, it can drive the worm wheel 1031 to rotate by the meshing action between the worm wheel and the worm, thereby realizing the rotation of the diaphragm 101 and driving the diaphragm to rotate by a predetermined angle.

In use, the first drive means 104 is controlled to drive the worm wheel in a first direction either forward or backward parallel to the direction in which the worm 1032 extends. During this process, the image on the scanning electron microscope is closely observed. With the movement of the diaphragm rods, the image will show significant changes in brightness, which are direct feedback of the alignment of the diaphragm 101 to the electron beam. At the start of the operation, the diaphragm aperture 1011 on the diaphragm member 101 is not perfectly aligned with the path of the electron beam. At this time, the electron beam may not pass through the diaphragm aperture smoothly, resulting in a dark image of the scanning electron microscope. When the operator controls the first driving device 104 to move the worm wheel 1031 to the electron beam direction by driving the diaphragm member 101, the diaphragm aperture 1011 starts to be aligned with the path of the electron beam. As the alignment improves, more electron beams can pass through the aperture, and the image will lighten from dark. At this time, it is sufficient that the operator controls the first driving device 104 to stop moving, indicating that the diaphragm member 101 is accurately aligned with the electron beam.

Subsequently, the operator controls the second driving device 105 to drive the worm 1032 to rotate. The rotation of the worm 1032 drives the worm wheel to rotate through a gear engagement mechanism, and then drives the diaphragm member 101 to rotate, so that the diaphragm hole 1011 matched with imaging and analysis conditions is rapidly positioned.

It will be appreciated by those skilled in the art that in the application of the electron beam control device, the size of the diaphragm aperture 1011 has a significant impact on the suitability of the imaging and analysis conditions. Each of the different sized diaphragm apertures 1011 is designed to meet specific imaging and analysis requirements. Thus, during actual use, an operator can select and align the corresponding diaphragm aperture 1011 by rotating the diaphragm member 101, depending on the imaging and analysis conditions desired.

Specifically, the operator needs to determine the required size and characteristics of the diaphragm aperture 1011 based on the imaged and analyzed targets. Then, by accurate calculation, the angle and position at which the diaphragm member 101 needs to be rotated are determined so as to align the required diaphragm aperture 1011 with the path of the electron beam. The operator precisely controls the rotation of the worm 1032 by using the second driving device 105 of the electron beam control device, and further drives the worm wheel to rotate, so as to drive the diaphragm member 101 to rotate by a predetermined angle, and the electron beam is correspondingly arranged to the diaphragm hole 1011 matching the imaging and analysis conditions.

Further, if the operator does not determine which size of the diaphragm aperture 1011 is best suited for the current imaging and analysis conditions at the beginning, different diaphragm apertures 1011 may be tried one by rotating the diaphragm member 101 step by step. During rotation, the operator can identify the diaphragm aperture 1011 that best matches the current conditions by observing the image changes of the scanning electron microscope. When the image quality reaches an optimum state, it is indicated that a suitable diaphragm aperture 1011 has been found.

In the solution provided by the present application, the first driving device 104 drives the worm wheel 1031 to make a linear motion, so that the diaphragm member 101 is aligned with the electron beam. Compared with other schemes, the scheme is convenient to operate and can improve efficiency and accuracy. Due to the precise matching of the worm wheel 1031 and the worm 1032, the diaphragm piece 101 on the worm wheel can not shake and jam in the rotating process, the accuracy and stability of the operation of the matched diaphragm hole are ensured, and the high-precision control of the rotating angle can be realized. That is, whether fine adjustment of a small angle is performed to meet the fine demand or rapid large-angle rotation is performed to improve the operation efficiency, the mechanism can ensure that the diaphragm is positioned to the target aperture position without error. The high-precision motion control technology greatly improves the matching efficiency and precision, so that the whole operation process is more reliable and efficient.

In the above-described solution, for better fixation of the first drive means 104 and the second drive means 105, mounting plates are purposely provided, wherein the mounting plates comprise a first mounting plate 109 and a second mounting plate 110, which are interconnected. Specifically, the first mounting plate 109 is horizontally disposed, the second mounting plate 110 is vertically disposed with respect to the first mounting plate 109, and a through hole is provided in the middle of the second mounting plate 110.

As shown in the cross-sectional view of the control device in the horizontal direction in fig. 3, the first driving device 104 in this embodiment is disposed on the first mounting plate 109, and includes a first motor 1041, a first coupling 1042, and a first driving shaft 1043, which are sequentially connected, and the first driving shaft 1043 is connected to the worm wheel 1031 through a through hole in the second mounting plate 110. The second driving device 105 is also provided on the first mounting plate 109, and includes a second motor 1051, a second coupling 1052, and a second driving shaft 1053, which are sequentially connected, and the second driving shaft 1053 is connected to the worm 1032 through a through hole in the second mounting plate 110.

As shown in fig. 1, in this embodiment, in order to improve the safety and stability of the first driving device 104 and the second driving device 105, a protective cover 111 is provided exclusively on the mounting plate, and the protective cover is abutted against the first mounting plate 109 and the second mounting plate 110, respectively, to form a housing chamber. The shield 111 prevents the ingress of dust, liquids and other contaminants that interfere with the proper operation of the drive.

In addition, the protective cover 111 provides an important safety protection function. It is possible to prevent an operator from accidentally touching moving parts during operation, thereby significantly reducing the risk of injury. The design not only ensures the safety of operators, but also makes the electron beam control device 100 more suitable for use in various environments, including those with high requirements for cleanliness and safety.

As shown in fig. 2 and 3, in one specific embodiment, the electron beam control apparatus 100 further includes a bellows assembly 106, the bellows assembly 106 including a bellows 1061 having a hollow cavity therein, a first end plate 1062 fixedly connected to a first end of the bellows 1061, a first drive shaft 1043 on the first drive apparatus 104 and a second drive shaft 1053 on the second drive apparatus 105 passing through the first end plate 1062 and extending inward of the bellows 1061, a second end plate 1063 fixedly connected to a second end of the bellows 1061, the second drive shaft 1053 passing through the second end plate 1063 and being connected to the worm 1032, an extending end of the first drive shaft 1043 being connected to an inner surface of the second end plate 1063, wherein the inner surface of the second end plate 1063 is disposed toward the first end plate 1062, and a diaphragm rod 1064 fixedly connected to an outer surface of the second end plate 1063, the diaphragm 1031 being mounted on the worm gear rod 4.

The electron beam control apparatus 100 provided in this embodiment further includes a bellows assembly 106. Specifically, the bellows assembly 106 includes a bellows 1061, first and second end plates 1062 and 1063 disposed at opposite ends of the bellows 1061, respectively, and diaphragm rods 1064 disposed on the second end plate 1063. More specifically, the bellows 1061 is a tubular member having a predetermined extension length and having a hollow cavity inside. The bellows 1061 is stretchable in a longitudinal direction thereof. One end of the bellows 1061 in the length direction is fixedly connected to the first end plate 1062, and the first end plate 1062 is provided with two through holes, and the two through holes are respectively used for the first driving shaft 1043 of the first driving device 104 and the second driving shaft 1053 of the second driving device 105 to pass through and extend into the bellows 1061, so that the through holes play a role in ensuring stable guiding and protection of the driving shafts.

The other end of the bellows 1061 in the length direction is fixedly connected to a second end plate 1063, and the second end plate 1063 is provided with a through hole for the second driving shaft 1053 to pass through and be connected to the worm 1032, so as to achieve power transmission. The extended tip of the first drive shaft 1043 is connected with the inner surface of the second end plate 1063, where the inner surface of the second end plate 1063 refers to a side surface facing the first end plate 1062. That is, the extended end of the first drive shaft 1043 in this embodiment is located inside the bellows 1061 and is connected to the second end plate 1063, and the extended end of the second drive shaft 1053 is connected to the worm 1032 through the bellows 1061.

The bellows assembly 106 further includes a diaphragm rod 1064, the diaphragm rod 1064 being fixedly coupled to an outer surface of the second end plate 1063 and having a worm gear 1031 mounted thereon. When the first motor 1041 is operated, the first drive shaft 1043 applies a force to the bellows 1061, causing the bellows 1061 to flex. This telescopic movement is transmitted to the diaphragm rods 1064 via the second end plate 1063, so that the diaphragm rods 1064 also advance or retract accordingly. Such a design allows the bellows assembly 106 to protect the inner drive shaft while also enabling the position of the diaphragm rods 1064 to be controlled by telescoping movement of the first drive shaft 1043, thereby precisely adjusting the position of the worm gear 1031 for precise control of the diaphragm 101.

It will be appreciated by those skilled in the art that in the above-described embodiment, the first end plate 1062 is provided with two through holes, each of which is sized to precisely fit the diameter of the corresponding drive shaft, ensuring that the first drive shaft 1043 and the second drive shaft 1053 pass smoothly and extend inwardly of the bellows 1061. In other embodiments, the first end plate 1062 may be configured as a ring with a large cylindrical through hole disposed therebetween. This design allows the large throughbore to accommodate both the first drive shaft 1043 and the second drive shaft 1053, providing a more space efficient solution. Such a design not only simplifies the construction of the first end plate 1062, but also potentially reduces complexity and cost in the manufacturing process while ensuring smooth passage of the drive shaft and functional implementation of the device.

In a specific embodiment, as shown in fig. 1 and 4, the diaphragm rod 1064 has a support shaft 1065 rotatably connected thereto, and an end of the support shaft 1065 remote from the diaphragm rod 1064 is fixedly connected to the worm wheel 1031, wherein the worm wheel 1031 is spaced apart from the diaphragm rod.

In this embodiment, the diaphragm rod 1064 has a support shaft 1065 mounted thereon, and the support shaft 1065 is rotatably connected to the diaphragm rod 1064 to provide a stable support point. The other end of the support shaft 1065, i.e., the end remote from the diaphragm rod 1064, is fixedly coupled to the worm gear 1031 to ensure stability and accuracy of the worm gear 1031 during operation. In addition, the worm wheel 1031 and the supporting shaft 1065 are connected through the supporting shaft 1065, and this arrangement enables the worm wheel 1031 to freely rotate on the supporting shaft 1065 while maintaining a proper distance, so as to reduce friction and wear with the diaphragm rod 1064, and improve the operation efficiency and lifetime of the whole device.

It should be noted that the diaphragm rods 1064 in this embodiment have parallel upper and lower bearing surfaces at the end remote from the end connected to the second end plate 1063, the upper and lower bearing surfaces being provided to facilitate mounting of the support shaft 1065.

In a specific embodiment, as shown in fig. 2, the electron beam control device 100 further includes a connecting piece 108 matched with the scanning electron microscope, a through hole is formed in the middle of the connecting piece 108, an end surface of the connecting piece 108 close to the bellows assembly 106 includes a first sealing surface 1081 and a second sealing surface 1082, an annular limit groove 1083 extending away from the bellows assembly 106 is formed between the first sealing surface 1081 and the second sealing surface 1082, the first sealing surface 1081 is fixedly connected with an outer surface of the first end plate 1062 away from the second end plate 1063, the second sealing surface 1082 abuts against a housing on the scanning electron microscope, and the annular limit groove 1083 is clamped with a limit piece on the scanning electron microscope.

In this embodiment, a sealed chamber is formed to allow connection between the electron beam control apparatus 100 and the scanning electron microscope. For this purpose, the device is specifically designed and integrated with a connecting piece 108. The core of this connection 108 is to create a sealed interface between the two devices, thereby ensuring a sealing effect during use. Specifically, the connecting member 108 has a cylindrical structure with a predetermined thickness, and a through hole is formed in the middle of the connecting member and is coaxially disposed with the through hole on the second mounting plate 110. In addition, one end surface of the connecting member 108 is fixedly connected to the second mounting plate 110, and two sealing surfaces, namely a first sealing surface 1081 and a second sealing surface 1082, are provided on the other end surface. Between the first and second sealing surfaces 1081, 1082, an annular limiting groove 1083 is provided, the annular limiting groove 1083 extending away from the bellows assembly 106. Such a design allows the connector 108 to mate with the housing of the scanning electron microscope when installed.

More specifically, the first sealing surface 1081 is fixedly coupled to an outer surface of the first end plate 1062, where the outer surface of the first end plate 1062 refers to a side remote from the second end plate 1063. The second sealing surface 1082 directly abuts the housing of the scanning electron microscope to form a sealed cavity.

In addition, the annular limiting groove 1083 on the connector 108 is engaged with a limiting member on the scanning electron microscope, and the design not only ensures the correct positioning of the connector 108, but also enhances the stability of the device. With such a precise fit, the connection 108 plays a critical role in connection and protection between the electron beam control device 100 and the scanning electron microscope, ensuring efficient operation and long-term stability of the electron beam control device 100.

In a specific embodiment, as shown in fig. 1 and 2, a sealing component 107 is further connected to the outer surface of the second end plate 1063, where the sealing component 107 has a through hole, and a central axis of the through hole coincides with a central axis of the through hole on the second end plate 1063.

The seal assembly 107 includes a fixed portion 1071, a first diameter section 1072, a variable diameter section 1073, and a second diameter section 1074 that are sequentially connected and sequentially reduced in outer diameter.

In this embodiment, the electron beam control apparatus 100 further includes a sealing assembly 107, and a through hole is disposed in the middle of the sealing assembly 107, and a central axis of the through hole coincides with a central axis of the through hole on the second end plate 1063, so as to ensure that the through hole and the through hole of the second end plate 1063 can be perfectly abutted when mounted. In order to enhance the sealing effect, the inside of the through hole of the scheme is also provided with a sealing ring.

Specifically, the seal assembly 107 includes a fixed portion 1071, a first diameter section 1072, a variable diameter section 1073, and a second diameter section 1074 that are connected in sequence and that decrease in outer diameter in sequence. More specifically, the fixing portion 1071 is a ring member having a predetermined thickness and having fixing holes provided at intervals thereon, through which screws or other fasteners pass to fix the sealing assembly 107 to the outer surface of the second end plate 1063. The first diameter section 1072 has a cylindrical structure, one end of which is connected to the fixed portion 1071, and the other end of which is connected to the variable diameter section 1073. The variable diameter section 1073 is bell mouth-shaped, and its large diameter end is connected with the first diameter section 1072, and its small diameter end is connected with the second diameter section 1074.

With respect to the location of the connection of the second drive shaft 1053 to the worm 1032, the present solution provides a flexible design to accommodate different installation and operational requirements. Those skilled in the art will appreciate that there are two possible configurations of the extension end of the second drive shaft 1053, depending on the particular application and design requirements. In one embodiment, the extended end of the second drive shaft 1053 may be located entirely within the seal assembly 107, and such a design may ensure that the drive shaft operates in a sealed environment, thereby providing greater protection and reducing the effects of the external environment on the drive shaft. In another embodiment, the extended end of the second drive shaft 1053 may also extend beyond the second diameter section 1074 of the seal assembly 107 and be coupled to the worm 1032. This design allows the drive shaft to be coupled to the worm 1032 outside of the seal assembly 107, which may facilitate installation and maintenance, as well as to those situations where more frequent adjustments or inspections at the junction are required.

The design of the seal assembly 107 provided by the present solution not only provides a sealed environment for the second drive shaft 1053, but also provides stable support and protection for the second drive shaft 1053, thereby improving the reliability and durability of the overall device.

In a specific embodiment, the diaphragm member 101 is further covered with a diaphragm cap 102, and the diaphragm cap 102 includes a groove structure including a circular top wall 1022 and a sleeve 1023, one end of the sleeve 1023 is connected to the top wall 1022, the top wall 1022 has a circular light hole 1024, and an extension 1025 is connected to the other end of the sleeve 1023 and extends away from the sleeve 1023 along a radial direction of the sleeve 1023.

In this embodiment, the diaphragm member 101 is covered with a diaphragm cap 102. As shown in fig. 1 and 5, the diaphragm cap 102 includes a groove structure and an extension 1025. Specifically, the groove structure includes a circular top wall 1022 and a sleeve 1023 connected to the top wall 1022, a plurality of circular light holes 1024 are designed on the top wall 1022, and the number of the light holes 1024 is the same as the number of the diaphragm holes 1011, and the positions of the two holes are opposite to each other. The light transmission hole 1024 in this embodiment allows an electron beam to be irradiated onto the diaphragm member 101 below through the diaphragm cap 102. Such a design ensures that the electron beam is accurately aligned with the diaphragm aperture 1011 in the diaphragm member 101, thereby achieving accurate control of the electron beam path.

An extension 1025 on diaphragm cap 102 is connected to an end of sleeve 1023 remote from top wall 1022 and extends radially outward of sleeve 1023, away from sleeve 1023 itself. In addition, a plurality of mounting holes 1021 are provided in the extension 1025, and fasteners pass through the mounting holes 1021 to secure the diaphragm cap 102 to the worm gear 1031. The extension 1025 on the diaphragm cap 102 thus not only provides additional mechanical support for the diaphragm 101, but also serves as a connection to the worm gear 1031, enhancing the stability of the diaphragm cap 102.

The aperture cap 102 in this embodiment helps to reduce scattering and reflection of the electron beam when passing through the aperture member 101, so that the concentration of the electron beam and the definition of the image can be improved. In addition, the aperture cap 102 also has a function of shielding stray light. In the electron beam control process, stray light irradiates on the diaphragm cap 102 and then is blocked, so that only the electron beam passing through the specific diaphragm hole 1011 is ensured to participate in imaging, and the influence of the stray light on the contrast and the definition of an image is effectively prevented.

In a specific embodiment, as shown in fig. 4, the upper surface of the worm wheel 1031 has a first groove 1033 for limiting the diaphragm 101, and a second groove 1034 provided on the outer periphery of the first groove 1033 for limiting the extension 1025 on the diaphragm cap 102, and the second groove 1034 is annular.

In this embodiment, the upper surface of worm wheel 1031 is specifically configured with two grooves, a first groove 1033 and a second groove 1034, respectively. Specifically, the first groove is disposed in the middle region of the worm wheel 1031, and is mainly used for limiting the diaphragm 101, so as to prevent the diaphragm 101 from being displaced during rotation. The second groove 1034 is an annular groove located at the outer periphery of the first groove 1033. The annular groove is used to cooperate with the extension 1025 on the diaphragm cap 102 to limit the extension 1025. In addition, the second groove 1034 is further provided with an assembly position corresponding to the mounting hole 1021 of the extension 1025 for fixing a fastener passing through the mounting hole 1021.

In this embodiment, by limiting the diaphragm member 101 in the first groove 1033, the diaphragm cap 102 is limited in the second groove 1034, so that the diaphragm cap and the second groove do not deviate from a predetermined position when rotating.

The electron beam control device 100 provided by the present embodiment provides great convenience for operators with its compact design and operation flow. Firstly, the structural design of the device is simple and visual, complicated mechanical adjustment or optical calibration is not needed, the operation threshold is greatly reduced, and operators can quickly and easily finish the operation of matching the diaphragm holes. In addition, the first groove 1033 and the second groove 1034 are formed on the worm gear, so that the diaphragm member 101 and the diaphragm cap 102 can still keep good stability when facing slight vibration, and reliability of experimental results is ensured.

In some embodiments, the present application further provides an electron beam control method, where the electron beam control device described above is applied, the method includes operating the first driving device 104 to drive the worm wheel 1031 to advance or retract in the first direction, so as to align the aperture element 101 on the worm wheel 1031 with the electron beam, and operating the second driving device 105 to drive the worm 1032 to rotate, so that the worm wheel 1031 drives the aperture element 101 to rotate, and drives the aperture element to rotate by a predetermined angle.

The present solution provides an innovative electron beam control method that utilizes the electron beam control device 100 described above to achieve precise control of the electron beam. The operational flow of this method is divided into two main steps, by means of which it is ensured that the diaphragm member 101 is able to be accurately aligned with the electron beam for receiving the electron beam. The rotation angle of the worm 1032 is precisely controlled by the second step, thereby aligning the electron beam with the diaphragm aperture 1011 conforming to the imaging and analysis conditions.

Specifically, the first step is the alignment of the diaphragm 101, and the first driving device 104 is operated to drive the second end plate 1063 of the bellows assembly 106 to advance or retract in the first direction (the extending direction of the diaphragm rod), so as to drive the worm wheel 1031 to advance or retract in the first direction. During this process, the image on the scanning electron microscope is closely observed. When the image is changed from dark to bright, it is marked that the diaphragm member 101 is accurately aligned with the electron beam, and the operator has to control the first driving means 104 to stop the movement.

The second step is to align the diaphragm aperture 1011 and the electron beam to fit the imaging and analysis requirements. Specifically, the second driving device 105 is operated to drive the worm 1032 to rotate, and the rotation of the worm 1032 is transmitted through the worm wheel assembly 103, so that the worm wheel 1031 drives the diaphragm 101 to rotate, and the diaphragm is stopped after rotating by a predetermined angle.

The electron beam can now be aligned with the diaphragm aperture 1011 adapted to the imaging and analysis requirements. More specifically, the operator first determines by calculation the angle and position to which the diaphragm member 101 should be rotated, according to the specific needs of imaging and analysis. Then, by controlling the second driving device 105, the rotation angle of the worm 1032 is precisely adjusted, thereby driving the turbine to rotate, bringing the diaphragm member 101 to rotate to the calculated position. In this process, the operator can confirm whether the diaphragm aperture 1011 has been properly aligned by observing the image change of the scanning electron microscope.

It will be appreciated by those skilled in the art that if the operator initially does not determine which size of the diaphragm aperture 1011 is most suitable for the current imaging and analysis conditions, different diaphragm apertures 1011 may be tried one by stepwise rotation of the diaphragm member 101 without pre-calculating the rotation angle. During rotation, the operator can identify the diaphragm aperture 1011 that best matches the current conditions by observing the image changes of the scanning electron microscope. When the image quality reaches an optimum state, it is indicated that a suitable diaphragm aperture 1011 has been found.

By using the control method provided by the application, an operator can quickly and accurately position the position of the required diaphragm hole by accurately calculating and optimizing key parameters such as the rotation angle, the position and the like, so that the adjustment time is shortened. In addition, the method also introduces a real-time feedback mechanism, namely, the system can monitor the imaging effect in real time in the process of rotating and matching the diaphragm piece with the diaphragm hole. This immediate feedback allows the user to make the necessary adjustments and optimizations in the course of matching the diaphragm aperture according to the information provided by the system, ensuring that the optimal position of the diaphragm aperture can be found accurately.

In some embodiments, the present application provides a scanning electron microscope comprising the electron beam control device 100 described above.

In the scanning electron microscope of the present embodiment, the electron beam control device 100 is provided, so that when in use, the aperture 1011 matching with the current imaging and analysis conditions can be conveniently and rapidly found, and the efficiency is high while the operation is simple.

While various embodiments of the present application have been shown and described herein, it will be obvious to those skilled in the art that such embodiments are provided by way of example only. Numerous modifications, changes, and substitutions will occur to those skilled in the art without departing from the spirit and scope of the application. It should be understood that various alternatives to the embodiments of the application described herein may be employed in practicing the application. The appended claims are intended to define the scope of the application and are therefore to cover all equivalents or alternatives falling within the scope of these claims.

Claims (10)

1. An electron beam control device, characterized in that the electron beam control device (100) comprises:

A diaphragm member (101), wherein the diaphragm member (101) is provided with a plurality of diaphragm holes (1011) which are arranged at intervals, and the aperture sizes of the diaphragm holes (1011) are different;

A worm wheel assembly (103) comprising a worm wheel (1031) and a worm (1032) adapted to the worm wheel (1031), the diaphragm (101) being placed on an upper surface of the worm wheel (1031);

a first driving device (104) which is connected with the worm wheel (1031) and drives the worm wheel (1031) to advance or retract in a first direction which is parallel to the extending direction of the worm (1032), and

And the second driving device (105) is connected with the worm (1032) and drives the worm (1032) to rotate, so that the worm wheel (1031) drives the diaphragm (101) to rotate.

2. The electron beam control device according to claim 1, wherein the electron beam control device (100) further comprises a bellows assembly (106), the bellows assembly (106) comprising:

a bellows (1061) having a hollow cavity therein;

a first end plate (1062) fixedly connected to a first end of the bellows (1061), a first drive shaft (1043) on the first drive device (104) and a second drive shaft (1053) on the second drive device (105) passing through the first end plate (1062) and extending into the bellows (1061);

a second end plate (1063) fixedly connected to the second end of the bellows (1061), a second drive shaft (1053) passing through the second end plate (1063) and connected to the worm (1032), an extended end of the first drive shaft (1043) connected to an inner surface of the second end plate (1063), wherein the inner surface of the second end plate (1063) is disposed toward the first end plate (1062), and

And a diaphragm rod (1064) fixedly connected to an outer surface of the second end plate (1063), and the worm wheel (1031) is mounted on the diaphragm rod (1064).

3. Electron beam control device according to claim 2, characterized in that the diaphragm rods (1064) have a support shaft (1065) rotatably connected thereto, the end of the support shaft (1065) remote from the diaphragm rods (1064) being fixedly connected to the worm wheel (1031), wherein the worm wheel (1031) is arranged at a distance from the diaphragm rods (1064).

4. The electron beam control device according to claim 2, characterized in that a sealing assembly (107) is further connected to the outer surface of the second end plate (1063), the sealing assembly (107) has a through hole, and the central axis of the through hole coincides with the central axis of the through hole in the second end plate (1063).

5. The electron beam control device according to claim 4, wherein the sealing assembly (107) comprises a fixing portion (1071), a first diameter section (1072), a variable diameter section (1073) and a second diameter section (1074) which are connected in sequence and have an outer diameter which decreases in sequence.

6. Electron beam control device according to any of claims 1-5, characterized in that the diaphragm member (101) is further covered with a diaphragm cap (102), the diaphragm cap (102) comprising:

A groove structure comprising a circular top wall (1022) and a sleeve (1023), wherein one end of the sleeve (1023) is connected with the top wall (1022), and the top wall (1022) is provided with a circular light hole (1024);

and an extension part (1025), wherein the extension part (1025) is connected with the other end of the sleeve (1023) and is arranged away from the sleeve (1023) along the radial direction of the sleeve (1023).

7. The electron beam control device according to claim 6, characterized in that the upper surface of the worm wheel (1031) is provided with a first groove (1033) for limiting the diaphragm member (101), and a second groove (1034) for limiting the extension (1025) on the diaphragm cap (102) by providing the outer circumference of the first groove (1033), the second groove (1034) being ring-shaped.

8. Electron beam control device according to claim 2, characterized in that the electron beam control device (100) further comprises a connection member (108) for cooperation with a scanning electron microscope, the connection member (108) having a through hole in the middle;

The end face, close to the corrugated pipe assembly (106), of the connecting piece (108) comprises a first sealing surface (1081) and a second sealing surface (1082), and an annular limit groove (1083) extending away from the corrugated pipe assembly (106) is formed between the first sealing surface (1081) and the second sealing surface (1082);

The first sealing surface (1081) is fixedly connected with the first end plate (1062) far away from the outer surface of the second end plate (1063), the second sealing surface (1082) is abutted with a shell on the scanning electron microscope, and the annular limiting groove (1083) is clamped with a limiting piece on the scanning electron microscope.

9. An electron beam control method, applying the electron beam control device according to any one of claims 1 to 8, the method comprising:

operating the first driving means (104) to drive the worm wheel (1031) forward or backward in a first direction to align the diaphragm member (101) on the worm wheel (1031) with the electron beam;

The second driving device (105) is operated to drive the worm (1032) to rotate, so that the worm wheel (1031) drives the diaphragm (101) to rotate, and the diaphragm (101) is driven to rotate by a preset angle.

10. Scanning electron microscope, characterized in that it comprises an electron beam control device (100) according to any of claims 1-8.