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CN119437664A - Composite MLA detection method and detection device for LED array - Google Patents

Composite MLA detection method and detection device for LED array Download PDF

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Publication number
CN119437664A
CN119437664A CN202510037933.6A CN202510037933A CN119437664A CN 119437664 A CN119437664 A CN 119437664A CN 202510037933 A CN202510037933 A CN 202510037933A CN 119437664 A CN119437664 A CN 119437664A
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sub
lens
psf
image
consistency
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CN119437664B (en
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许峰
杨浩
孙倜
曹冰
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Suzhou University
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Suzhou University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a composite MLA detection method and device for an LED array, wherein the LED array comprises a micro lens array, the micro lens array comprises a plurality of sub lenses arranged in an array mode, the detection method comprises the steps of obtaining a plurality of light spot images corresponding to each sub lens, processing the light spot images to determine consistency detection results of the sub lenses, wherein the consistency detection results comprise at least one of PSF consistency detection results, MTF consistency detection results and position consistency detection results, and the composite MLA detection results of the micro lens array are determined based on the consistency detection results of the sub lenses. The composite MLA detection method provided by the invention can detect the position of the sub lens of the MLA, PSF and MTF consistency, is used for feeding back the production process, timely adjusts the on-production products, improves the yield and reduces the quality risk.

Description

Composite MLA detection method and detection device for LED array
Technical Field
The invention relates to the technical field of lens detection, in particular to a composite MLA detection method and device for an LED array.
Background
A Microlens Array (MLA) has an important and wide application in optical systems, which has functions of converging light energy, correcting aberration and imaging, and is widely used in many fields such as infrared photodetectors, image recognition and processing, optical communication, laser medicine, and space optics because of its small size, light weight, high integration, and easy replication.
However, in the actual production process, the microlens array does not have a good detection means to determine whether it is acceptable. The main method of microlens array detection at present is to measure by a profilometer, an atomic force microscope and other devices. The method has the advantages that only the microstructure can be observed one by adopting a microscope, whether the micro lenses in the micro lens array are distorted or not on the macro scale can not be well determined, whether the array is uniform or not is not, the cost is high, the efficiency is low, the micro lens array is easy to damage and pollute the second time due to the fact that the probe is in direct contact with the surface of an object to be tested, therefore, most of enterprises on the market at present only can adopt a small batch trial production method, whether the micro lens array microstructure of the batch is qualified or not is judged through visual observation of finished products, and then mass production is organized.
In the production process of the micro-lens array, a plurality of uncertain factors exist, and if the quality of the micro-lens array can be judged only by adopting a trial-and-manufacture mode, a great risk exists for a manufacturing enterprise of the micro-lens array obviously. Therefore, development of a microlens array microstructure detecting apparatus is urgently required.
The foregoing background is only for the purpose of providing an understanding of the principles and concepts of the application and is not necessarily related to the prior art or is not necessarily taught by the present application and is not intended to be used for the purposes of assessing the novelty and creativity of the present application without express evidence that such is already disclosed prior to the filing date of this patent application.
Disclosure of Invention
The invention aims to provide a compound MLA detection method and a detection device for an LED array, which can realize the position consistency detection of sub lenses of the micro lens array, the consistency detection of a point spread function (Point Spread Function, PSF) and the consistency detection of a modulation transfer function (Modulation Transfer Function, MTF), can quantitatively and quickly judge the quality of the micro lens array in a large scale, are used for feeding back the production process, timely adjust products, improve the yield and reduce the quality risk.
On the one hand, in order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
there is provided a composite MLA detection method for an LED array including a microlens array including a plurality of sub-lenses arranged in an array, the detection method comprising:
acquiring a plurality of facula images corresponding to each sub-lens;
processing the facula image to determine a consistency detection result of the sub-lens, wherein the consistency detection result comprises at least one of a PSF consistency detection result, an MTF consistency detection result and a position consistency detection result;
The PSF consistency detection method comprises the steps of obtaining PSF images of all sub-lenses, calculating corresponding PSF similarity values based on the PSF images of all the sub-lenses, and/or calculating area difference values of corresponding light spots and theoretical light spots based on the PSF images of all the sub-lenses;
and determining a composite MLA detection result of the micro-lens array based on the consistency detection result of the sub-lenses.
Further, in the combination of any one or more of the foregoing aspects, the PSF image includes an original PSF image and a simulated PSF image, and the obtaining a PSF image of each of the sub-lenses includes determining an original PSF image of each of the sub-lenses from a plurality of spot images of each of the sub-lenses;
The determining the detection result of the PSF consistency of the sub-lens based on the PSF similarity value corresponding to the sub-lens comprises the following steps:
Determining an original PSF image of each sub-lens from a plurality of spot images of each sub-lens;
expanding the original PSF image of each sub-lens to obtain an expanded PSF image, and recording the expanded PSF image as an expanded PSF image;
obtaining a simulated PSF image of each sub-lens;
and calculating a PSF similarity value corresponding to each sub-lens based on the original PSF image, the unfolded PSF image and the simulated PSF image, and further determining a PSF consistency detection result of the sub-lenses.
Further, in any one or a combination of the foregoing aspects, the calculating the PSF similarity value corresponding to each sub-lens based on the original PSF image, the expanded PSF image, and the simulated PSF image includes:
calculating a similarity value between the original PSF image and the simulated PSF image, and recording the similarity value as a first similarity value;
Calculating a similarity value between the unfolded PSF image and the simulated PSF image, and recording the similarity value as a second similarity value;
and carrying out weighted summation on the first similarity value and the second similarity value to obtain the PSF similarity value.
Further, in the foregoing any one or combination of the foregoing aspects, the determining an original PSF image of each sub-lens from among the plurality of spot images of each sub-lens includes calculating gradient values of the plurality of spot images of each sub-lens;
And/or the expanding the original PSF image of each sub-lens comprises log expanding the original PSF image by using the following formula: wherein I is the gray matrix of the normalized original PSF image, I' is the gray matrix of the unfolded PSF image, and epsilon and delta are two weighting coefficients.
Further, in any one or a combination of the foregoing aspects, determining, based on the area difference value corresponding to the sub-lens, a result of detecting PSF uniformity of the sub-lens includes:
determining the area of a light spot in an original PSF image of each sub-lens, and recording the area as the actual light spot area of each sub-lens;
Obtaining a theoretical light spot area of the sub-lens;
And calculating the area difference between the actual light spot area and the theoretical light spot area of each sub-lens, and further determining the PSF consistency detection result of the sub-lenses.
Further, in any one or a combination of the foregoing aspects, the determining the detection result of the PSF uniformity of the sub-lens based on the PSF similarity value and/or the area difference value corresponding to the sub-lens includes:
If the PSF similarity value corresponding to the sub-lens meets the PSF consistency standard, and the area difference value corresponding to the sub-lens meets the PSF consistency standard, determining that the PSF consistency detection result of the sub-lens is qualified.
Further, any one or a combination of the foregoing technical solutions, a detection result of MTF consistency of the sub-lenses is determined by:
Determining an original PSF image of each sub-lens from the plurality of spot images of each sub-lens;
performing frequency domain transformation on the original PSF image of each sub-lens to obtain a current MTF image of each sub-lens;
acquiring a simulated MTF image of each sub-lens;
And calculating the similarity of the current MTF image of each sub-lens and the corresponding simulated MTF image to obtain an MTF similarity value of each sub-lens, and further determining the detection result of MTF consistency of the sub-lenses.
Further, in combination with any one or more of the preceding claims, the calculating a similarity between the current MTF image and the simulated MTF image of each of the sub-lenses includes:
Synchronously sampling the same point positions of the current MTF image and the simulated MTF image for a plurality of times to respectively obtain a plurality of first MTF values and corresponding second MTF values;
Calculating an average value of sampling point MTF similarity values corresponding to synchronous sampling for a plurality of times based on the plurality of first MTF values and the corresponding second MTF values, and recording the average value as the MTF similarity value of each sub-lens, wherein the sampling point MTF similarity value is related to the ratio of the first MTF value to the second MTF value at the sampling point;
and/or, the determining the detection result of the MTF consistency of the sub-lenses includes:
Judging whether the MTF similarity value of each sub-lens is larger than a preset MTF similarity threshold value, if so, determining that the detection result of the MTF consistency of the sub-lens is qualified, and if not, determining that the detection result of the MTF consistency of the sub-lens is unqualified.
Further, in any one of the foregoing technical solutions or a combination of the foregoing technical solutions, the MTF similarity value of the sub-lens is calculated by using the following formula:
wherein P is the MTF similarity value of the sub-lenses, For the first MTF value at position (Xi, yi),For the second MTF value at position (Xi, yi), N is the number of said first MTF values.
Further, any one or a combination of the foregoing, the position consistency of the sub-lenses is determined by:
selecting a most focused spot image from a plurality of spot images corresponding to each sub-lens, and recording the most focused spot image as a focused spot image;
Determining a spot centroid of a spot in the focused spot image of each sub-lens;
performing straight line fitting on the light spot centroids corresponding to all the sub-lenses in the row direction and the column direction respectively to obtain fitting straight lines corresponding to each row and each column;
Obtaining the distance from the centroid of the light spot corresponding to each sub-lens to the fitting straight line corresponding to the row and the column of the light spot corresponding to each sub-lens as the position deviation of the sub-lens, wherein the position deviation comprises row deviation and column deviation;
and determining the detection result of the position consistency of each sub-lens according to the position deviation of each sub-lens.
Further, in any one or a combination of the foregoing aspects, the determining the detection result of the position consistency of the sub-lenses according to the position deviation of each of the sub-lenses includes:
judging whether the row deviation and the column deviation of each sub-lens fall in a corresponding preset deviation range, if so, determining that the detection result of the position consistency of the sub-lenses is qualified, and if not, determining that the detection result of the position consistency of the sub-lenses is unqualified.
Further, in any one of the foregoing solutions or a combination of multiple technical solutions, the acquiring multiple spot images corresponding to each sub-lens includes:
Acquiring a plurality of array light spot images, wherein the array light spot images comprise images of light spots corresponding to each sub-lens;
Performing image definition calculation on the plurality of array spot images to select a focused array spot image from the plurality of array spot images;
filtering and denoising the focused array facula image to obtain a filtered image;
performing circular detection processing on the filtered image to obtain the center coordinates of each light spot in the focused array light spot image;
And cutting each array facula image based on the circle center coordinates to obtain a plurality of facula images of each sub-lens.
Further, the combination of any one or more of the foregoing aspects, wherein the determining the composite MLA detection result of the microlens array based on the uniformity detection result of the sub-lenses includes:
Determining the number of sub-lenses with qualified PSF consistency detection results, MTF consistency detection results and position consistency detection results;
And if the lens ratio of the number of the sub-lenses in the lens LED array reaches a preset proportion threshold, the composite MLA detection result of the LED micro-lens array is qualified.
According to another aspect of the present invention, there is provided a detection apparatus including a light source, a collimator, a stage, a microscope objective and a camera, which are sequentially disposed along a light path direction, the stage being configured to carry a microlens array to be detected, the microlens array including a plurality of sub-lenses arranged in an array, light emitted from the light source being incident to the microlens array after passing through the collimator, the microscope objective being configured to guide light at the microlens array to the camera;
The detection device further comprises a computer configured to acquire an array spot image acquired by the camera and process the array spot image to determine a composite MLA detection result of the microlens array, wherein the composite MLA detection result comprises at least one of a detection result of position consistency, a detection result of PSF consistency and a detection result of MTF consistency.
Further, according to any one or a combination of the above-mentioned aspects, the camera forms an image when a star point is used in the collimator and a light spot formed by focusing after passing through the microlens array is smaller than a diffraction limit of the detection device, the camera is adjusted to a focusing position, an optical axis distance between the camera and the objective table in this state is defined as a reference distance, the camera and/or the objective table is moved along the optical axis so that the optical axis distance of the camera and/or the objective table floats based on the reference distance, the floating distance is an integer multiple of a focal depth distance, and the camera collects corresponding array light spot images.
Further, in combination with any one or more of the foregoing aspects, the detection device further includes a peltier plate, a horizontal driving mechanism for driving the stage to move in a two-dimensional plane, and a vertical driving mechanism for driving the camera or the stage to move along an optical axis direction of an optical path, when the peltier plate Luo Ban is placed in the collimator, the horizontal driving mechanism drives the stage to move until light emitted from the collimator is incident on the microlens array, and when the camera is located at a focal plane position under the driving of the vertical driving mechanism, the peltier plate Luo Ban in the collimator is replaced with the star point;
And/or the magnification of the micro objective lens is determined by the focal length of the micro lens array to be detected, the focal length of the collimator and the pixel size of the camera;
and/or the light source is single-color incoherent light, and the wavelength of the single-color incoherent light is determined by the design wavelength of the microlens array to be detected.
Further, any one or a combination of the above, the computer is configured to perform the detection method as described above.
The technical scheme provided by the invention has the following beneficial effects:
a. By matching the components of the detection device, the computer receives images of star points formed by the microlens array sub-lenses, and detects the positions, PSF and MTF consistency of the microlens array sub-lenses.
B. The detection equipment provided by the invention can quantitatively, widely and rapidly judge the structural quality of the micro lens array, and the production process is fed back by detecting the position of the sub-lenses of the micro lens array and consistency of PSF and MTF, so that the adjustment of the on-production products is timely carried out, the yield is improved, and the quality risk is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings may be obtained according to the drawings without inventive effort to those skilled in the art.
FIG. 1 is a flow chart of a method for composite MLA detection for an LED array provided in accordance with an exemplary embodiment of the invention;
FIG. 2 is a flowchart of a method for detecting the position uniformity of sub-lenses according to an exemplary embodiment of the present invention;
FIG. 3 is a flowchart of a first method for determining PSF uniformity of a sub-lens according to an exemplary embodiment of the present invention;
FIG. 4 is a flowchart of a second method for determining PSF uniformity of a sub-lens according to an exemplary embodiment of the present invention;
FIG. 5 is a flowchart of a third method for determining PSF uniformity of a sub-lens according to an exemplary embodiment of the present invention;
FIG. 6 is a flowchart of a method for detecting MTF uniformity of a sub-lens provided in an exemplary embodiment of the present invention;
FIG. 7 is a schematic diagram of a detection device according to an exemplary embodiment of the present invention;
The device comprises a 1-light source, a 2-collimator, a 3-Perot Luo Ban, a 4-x axis precise displacement table, a 5-y axis precise displacement table, a 6-objective table, a 7-micro lens array, an 8-z axis precise displacement table, a 9-micro objective lens, a 10-camera and an 11-computer.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, apparatus, article, or device that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed or inherent to such process, method, article, or device.
In one embodiment of the present invention, there is provided a composite MLA detection method for an LED array including a microlens array including a plurality of sub-lenses arranged in an array, as shown in fig. 1, the detection method including:
s1, acquiring a plurality of facula images corresponding to each sub-lens.
The spot image may be a gray scale image. In order to acquire a plurality of spot images corresponding to each sub-lens, a camera is used to acquire an array spot image, wherein the array spot image comprises the images of spots corresponding to each sub-lens, and then the spot images of the sub-lenses are cut out from the array spot image. For example, in order to improve the image quality of the flare image of the sub-lens, N Zhang Zhenlie flare images are acquired, and N flare images of each sub-lens can be obtained by clipping.
Further, clipping requires determining the center of the spot in the spot image of each sub-lens, in this embodiment by:
And S11, performing image definition calculation on the plurality of array spot images to select a focused array spot image from the plurality of array spot images.
The definition calculation is to select an image with optimal focusing to perform circular detection and coordinate extraction of the light spot.
And S12, filtering and denoising the focused array facula image to obtain a filtered image.
In this embodiment, the filtering noise reduction firstly uses median filtering to reduce the salt and pepper noise, and then uses gaussian filtering to reduce the gaussian noise.
And S13, carrying out circular detection processing on the filtered image to obtain the center coordinates of each light spot in the focused array light spot image.
And S14, cutting each array spot image based on the center coordinates to obtain a plurality of spot images of each sub-lens.
S2, processing the light spot image to determine a consistency detection result of the sub-lens, wherein the consistency detection result comprises at least one of a PSF consistency detection result, an MTF consistency detection result and a position consistency detection result.
The PSF consistency detection result, the MTF consistency detection result and the position consistency detection result comprise qualification and disqualification.
The PSF consistency detection aims at detecting whether the consistency degree of the actual PSF index and the theoretical PSF index of a certain sub-lens meets the standard, the MTF consistency detection aims at detecting whether the consistency degree of the actual MTF index and the theoretical MTF index of the certain sub-lens meets the standard, and the position consistency detection aims at detecting whether the consistency degree of the actual position and the theoretical position of the certain sub-lens meets the standard.
And S3, determining a composite MLA detection result of the micro-lens array based on the consistency detection result of the sub-lenses.
In one embodiment, when the consistency detection result of the sub-lenses includes a detection result of position consistency, the number of sub-lenses with qualified positions can be counted, then whether the lens occupation ratio of the sub-lenses with qualified positions in the micro-lens array reaches a preset qualified occupation ratio threshold is judged, if the lens occupation ratio of the sub-lenses with qualified positions in the micro-lens array reaches the preset qualified occupation ratio threshold, the composite MLA detection result of the micro-lens array is determined to be qualified, and if the lens occupation ratio of the sub-lenses with qualified positions in the micro-lens array does not reach the preset qualified occupation ratio threshold, the composite MLA detection result of the micro-lens array is determined to be unqualified.
In another embodiment, when the consistency detection result of the sub-lenses includes a PSF consistency detection result, it may be determined whether a lens duty ratio of the sub-lenses qualified by the PSF in the micro-lens array reaches a preset qualified duty ratio threshold, if the lens duty ratio of the sub-lenses qualified by the PSF in the micro-lens array reaches the preset qualified duty ratio threshold, the composite MLA detection result of the micro-lens array is determined to be qualified, and if the lens duty ratio of the sub-lenses qualified by the PSF in the micro-lens array does not reach the preset qualified duty ratio threshold, the composite MLA detection result of the micro-lens array is determined to be unqualified.
In another embodiment, when the consistency detection result of the sub-lenses includes the detection result of the consistency of the MTF, the number of sub-lenses with qualified MTF may be counted, and then it is determined whether the proportion of the sub-lenses with qualified MTF to all the sub-lenses reaches a preset proportion threshold, and if the proportion of the sub-lenses with qualified MTF to all the sub-lenses does not reach the preset proportion threshold, the composite MLA detection result of the micro-lens array is determined to be unqualified.
In other embodiments, when the consistency detection result of the sub-lenses includes a PSF consistency detection result, an MTF consistency detection result, and a position consistency detection result, the number of sub-lenses whose PSF consistency detection result, MTF consistency detection result, and position consistency detection result are all qualified can be determined first, then it is determined whether the lens occupation ratio of the number of sub-lenses whose three detection results are qualified in the microlens array reaches a preset ratio threshold, if the lens occupation ratio of the number of sub-lenses whose qualification in the microlens array reaches the preset ratio threshold, then it is determined that the composite MLA detection result of the microlens array is qualified, and if the lens occupation ratio of the number of sub-lenses whose qualification in the microlens array does not reach the preset ratio threshold, then it is determined that the composite MLA detection result of the microlens array is unqualified.
It can be understood that if the consistency detection result only includes the PSF consistency detection result and the MTF consistency detection result, determining that the PSF consistency detection result and the MTF consistency detection result of the sub-lenses are both qualified sub-lenses, then determining whether the lens occupation ratio of the number of the sub-lenses, which are both qualified, in the micro-lens array reaches a preset proportion threshold value, determining that the composite MLA detection result of the micro-lens array is qualified if the lens occupation ratio of the number of the sub-lenses, which are both qualified, in the micro-lens array reaches the preset proportion threshold value, and determining that the composite MLA detection result of the micro-lens array is unqualified if the lens occupation ratio of the number of the sub-lenses, which are both qualified, in the micro-lens array does not reach the preset proportion threshold value.
It can be understood that when the consistency detection result of the sub-lenses includes a PSF consistency detection result, an MTF consistency detection result, and a position consistency detection result, it can also be determined whether the lens occupation ratio of the number of sub-lenses with qualified positions in the microlens array reaches a first preset ratio threshold, whether the lens occupation ratio of the number of sub-lenses with qualified PSF in the microlens array reaches a second preset ratio threshold, and whether the lens occupation ratio of the number of sub-lenses with qualified MTF in the microlens array reaches a third preset ratio threshold, if yes, determining that the composite MLA detection result of the microlens array is qualified, and if not, determining that the composite MLA detection result of the microlens array is unqualified.
Further, the preset ratio threshold and specific values of the first preset ratio threshold to the third preset ratio threshold may be set according to the specific application requirements, which is not limited in the present invention.
It is worth to say that, the composite MLA detection method for the LED array provided by the invention can quantitatively and widely judge the structural quality of the micro lens array rapidly, and the production process is fed back by detecting the position of the sub lenses of the micro lens array, PSF and MTF consistency, so that the adjustment of the on-production products can be performed timely, the yield is improved, and the quality risk is reduced.
In one embodiment of the present invention, as shown in FIG. 2, the position uniformity of the sub-lenses is determined by:
and S21a, selecting the most focused spot image from the plurality of spot images corresponding to each sub-lens, and recording the most focused spot image as a focused spot image.
Illustratively, the most focused spot image is selected from the plurality of spot images corresponding to each sub-lens by fitting a gray scale gradient curve of the plurality of spot images of each sub-lens, and taking the spot image corresponding to the maximum value of the gray scale gradient curve as the focused spot image.
Further, the fitting of the gray gradient curve is to calculate the gray gradient curve through derivation of each light spot image of each cut sub-lens, the horizontal axis is the coordinate of the gray gradient calculation direction, the vertical axis is the derivative value of the gray of the coordinate, and illustratively, the derivation is obtained by convolving a sobel operator in the horizontal direction and the vertical direction, and the sobel operator is as follows:
Wherein G x is a sobel operator in the horizontal direction, and G y is a sobel operator in the vertical direction.
And S22a, determining the spot centroid of the light spot in the focused spot image of each sub-lens.
If the spot is a standard circle, the center of the spot can be considered as the centroid of the spot, but due to processing problems, the spot of the sub-lens may not be a standard circle, and therefore the centroid coordinates of the spot are selected for straight line fitting. In one embodiment of the present invention, the spot centroid corresponding to the spot formed by each sub-lens is obtained by the following formula:
Where i and j are coordinate values in two directions of the image in the transverse direction and the longitudinal direction, respectively, m and n are the numbers of pixels in the two directions, respectively, The gray value of the pixel point (i, j), x is the coordinate value of the light spot centroid in the transverse direction of the image, and y is the coordinate value of the light spot centroid in the longitudinal direction of the image.
And S23a, performing straight line fitting on the spot centroids corresponding to all the sub-lenses in the row direction and the column direction respectively to obtain fitting straight lines corresponding to each row and each column.
And S24a, obtaining the distance from the centroid of the light spot corresponding to each sub-lens to the fitting straight line corresponding to the row and the column of the sub-lens, and taking the distance as the position deviation of the sub-lens.
And determining the detection result of the position consistency of the sub-lenses according to the position deviations of all the sub-lenses.
S25a, judging whether the position deviation of each sub-lens is within a preset deviation range, if so, judging that the detection result of the position consistency of the sub-lenses is qualified, and if not, judging that the detection result of the position consistency of the sub-lenses is unqualified.
The method comprises the steps of assuming that a micro lens array comprises m rows and n columns of sub lenses, wherein m and n are larger than 1, the ith (i is larger than or equal to 1 and is larger than or equal to m multiplied by n) sub lens is recorded as a sub lens i, judging whether the row deviation and the column deviation of the sub lens i are in a corresponding preset deviation range, determining that the detection result of the position consistency of the sub lens i is qualified if the row deviation and the column deviation of the sub lens i are in the corresponding preset deviation range, and determining that the detection result of the position consistency of the sub lens i is unqualified if the row deviation or the column deviation of the sub lens i is not in the corresponding preset deviation range.
In one embodiment of the invention, the detection result of the PSF consistency of the sub-lenses is determined by:
And S21b, acquiring PSF images of each sub-lens, wherein the PSF images comprise images of light spots corresponding to the sub-lenses.
And S22b, calculating a corresponding PSF similarity value based on the PSF image of each sub-lens, and/or calculating the area difference value of the corresponding light spot and the theoretical light spot based on the PSF image of each sub-lens.
S23b, determining a detection result of PSF consistency of the sub-lenses based on the PSF similarity value and/or the area difference value corresponding to the sub-lenses.
There are three ways to determine the PSF uniformity of the sub-lenses:
In the first mode, only the PSF similarity value is used as a PSF consistency judging standard, and if the PSF similarity value of the sub-lens reaches a preset PSF similarity threshold value, the PSF consistency detection result of the sub-lens is qualified.
And in the second mode, only the area difference value is used as a judging standard of PSF consistency, namely if the area difference value between the light spot corresponding to the sub-lens (namely the actual light spot) and the theoretical light spot does not exceed a preset area difference threshold value, the PSF consistency detection result of the sub-lens is qualified.
In the third mode, as shown in fig. 3, the PSF similarity value and the area difference value are used as PSF consistency judging standards, namely, assuming that the micro-lens array comprises m rows and n columns of sub-lenses, m and n are both larger than 1, the ith (1 is smaller than or equal to i and is smaller than or equal to m multiplied by n) sub-lens is marked as sub-lens i, if the PSF similarity value of the sub-lens i reaches a preset PSF similarity threshold value and the area difference value between a light spot corresponding to the sub-lens i (namely, an actual light spot) and a theoretical light spot does not exceed the preset area difference threshold value, the PSF of the sub-lens i is qualified, and if the PSF similarity value of the sub-lens i is smaller than the preset PSF similarity threshold value or the area difference value between the area of the light spot corresponding to the sub-lens i and the theoretical light spot is larger than the preset area difference threshold value, the PSF consistency of the sub-lens i is detected as disqualification.
As shown in fig. 4, the determination of whether the sub-lens PSF is acceptable or not by using the PSF similarity value as a criterion will be described below. The PSF image comprises an original PSF image and a simulated PSF image, and the original PSF image and the simulated PSF image comprise images of light spots corresponding to the sub lenses.
A1, determining an original PSF image of each sub-lens from a plurality of spot images of each sub-lens.
And determining the spot image with the largest gradient value in all spot images of each sub-lens as the original PSF image of the sub-lens.
A2, obtaining a simulated PSF image corresponding to each original PSF image.
The simulated PSF image may be output by optical simulation software such as Zemax.
A3, expanding the original PSF image of each sub-lens to obtain an expanded PSF image, and recording the expanded PSF image as an expanded PSF image.
For example, log expansion is performed on the original PSF image by using the following formula:
wherein I is the gray matrix of the original PSF image after normalization, I' is the gray matrix of the unfolded PSF image, and epsilon and delta are two weighting coefficients.
Taking an 8-bit picture as an example, epsilon and delta are respectively 255 and 0.04,255 which are the maximum gray values of an 8-bit picture, wherein the picture is unfolded in a bottom gray area, and 0.004 is the result of normalization of a 1-gray picture in the 8-bit picture, namely a 1/255 value, and the numerical value in ln is ensured to be larger than 0.
And A4, calculating the PSF similarity corresponding to each sub-lens based on the original PSF image, the unfolded PSF image and the simulated PSF image.
Calculating a similarity value between an original PSF image and a simulated PSF image, namely a first similarity value SSIM 1, calculating a similarity value between an expanded PSF image and the simulated PSF image, namely a second similarity value SSIM 2, and carrying out weighted summation on the first similarity value SSIM 1 and the second similarity value SSIM 2 to obtain a PSF similarity value, namely adopting the following formula:
SSIM Total (S) =α×SSIM1+β×SSIM2
Wherein SSIM Total (S) is a PSF similarity value, α is a weight value of the original PSF image, and β is a weight value of the unfolded PSF image.
A5, if the PSF similarity value SSIM Total (S) of a certain sub-lens reaches a preset PSF similarity threshold, the detection result of the PSF consistency of the sub-lens is qualified.
The method comprises the steps of assuming that a micro lens array comprises m rows and n columns of sub lenses, m and n are both larger than 1, the ith (i is larger than or equal to 1 and is smaller than or equal to m multiplied by n) sub lens is recorded as a sub lens i, judging whether a PSF similarity value of the sub lens i reaches a preset PSF similarity threshold value, if the PSF similarity value of the sub lens i reaches the preset PSF similarity threshold value, determining that a detection result of PSF consistency of the sub lens i is qualified, and if the PSF similarity value of the sub lens i does not reach the preset PSF similarity threshold value, determining that the detection result of PSF consistency of the sub lens i is not qualified.
As shown in fig. 5, the following description will be made with respect to determining whether the sub-lens PSF consistency is acceptable or not by using the difference between the areas of the actual light spot and the theoretical light spot corresponding to the sub-lens as the judgment standard:
B1, determining an original PSF image of each sub-lens from a plurality of spot images of each sub-lens.
The manner of acquiring the original PSF image is the same as above, and will not be described here again.
B2, determining the area of the light spot in the original PSF image of each sub-lens, and recording the area as the actual light spot area of each sub-lens.
And B3, acquiring the theoretical light spot area of the sub-lens.
The theoretical light spot area can be obtained through optical simulation software such as Zemax.
And B4, judging whether the difference value between the actual light spot area of the sub-lens and the corresponding theoretical light spot area is smaller than a preset area difference threshold value.
And B5, if the difference value between the actual light spot area and the corresponding theoretical light spot area is smaller than a preset area difference threshold value, the PSF consistency detection result of the sub-lens is considered to be qualified.
If the PSF similarity value corresponding to the sub-lens is based on the PSF similarity value corresponding to the sub-lens and the PSF consistency detection result of the sub-lens is determined based on the area difference value, the above-mentioned judgment standard is needed to determine whether the PSF similarity value corresponding to the sub-lens meets the PSF consistency standard or not, and whether the area difference value corresponding to the sub-lens meets the PSF consistency standard or not is determined, if both the two standards meet the PSF consistency standard, the PSF consistency detection result of the sub-lens is determined to be qualified.
In one embodiment of the present invention, as shown in fig. 6, the detection result of MTF uniformity of the sub-lenses is determined by:
And S21c, determining an original PSF image of each sub-lens from the plurality of spot images of each sub-lens.
And S22c, carrying out frequency domain transformation on the original PSF image of each sub-lens to obtain a current MTF image of each sub-lens.
S23c, acquiring simulated MTF images of the sub-lenses.
S24c, calculating the similarity between the current MTF image of each sub-lens and the corresponding simulated MTF image to obtain the MTF similarity value of each sub-lens.
The following scheme can be adopted:
And C1, synchronously sampling the same point positions of the current MTF image and the simulated MTF image for a plurality of times to respectively obtain a plurality of first MTF values and corresponding second MTF values.
And C2, calculating the average value of the MTF similarity values of sampling points corresponding to synchronous sampling for a plurality of times based on the plurality of first MTF values and the corresponding second MTF values, and recording the average value as the MTF similarity value of each sub-lens.
The sampling point MTF similarity value is related to the ratio of the first MTF value to the second MTF value at the sampling point.
Further, in one embodiment of the present invention, the MTF similarity value of the sub-lenses is calculated using the following formula:
wherein P is the MTF similarity value of the sub-lenses, For the first MTF value at position (Xi, yi),For the second MTF value at position (Xi, yi), N is the number of first MTF values.
And S25c, determining the detection result of the MTF consistency of the sub-lenses according to the MTF similarity values of all the sub-lenses.
The method comprises the steps of providing a micro lens array, wherein the micro lens array comprises m rows and n columns of sub lenses, m and n are both larger than 1, the ith (i is larger than or equal to 1 and is smaller than or equal to m multiplied by n) sub lens is recorded as a sub lens i, judging whether the MTF similarity value of the sub lens i is larger than a preset MTF similarity threshold value, if the MTF similarity value of the sub lens i is larger than the preset MTF similarity threshold value, the detection result of the MTF consistency of the sub lens i is qualified, and if the MTF similarity value of the sub lens i is smaller than or equal to the preset MTF similarity threshold value, the detection result of the MTF consistency of the sub lens i is unqualified.
In one embodiment of the present invention, there is provided a composite MLA detection device for an LED array, as shown in FIG. 7, comprising a light source 1, a collimator 2, a stage 6, a micro objective 9, and a camera 10, which are sequentially arranged in the vertical light path direction.
The stage 6 is configured to carry a microlens array 7 to be detected, the microlens array 7 includes a plurality of sub-lenses arranged in an array, light emitted from the light source 1 is incident on the microlens array 7 after passing through the collimator 2, and the micro-objective 9 is configured to guide the light at the microlens array 7 to the camera 10.
The detection device further comprises a computer 11, wherein the computer 11 is configured to acquire an array light spot image acquired by the camera and process the array light spot image so as to determine a consistency detection result of the sub-lens, and the consistency detection result comprises at least one of a position consistency detection result, a PSF consistency detection result and an MTF consistency detection result;
The computer 11 is further configured to determine a composite MLA detection of the microlens array based on the identity detection of the sub-lenses.
It is worth to say that, the compound MLA detection device for the LED array provided by the invention can quantitatively and widely judge the structural quality of the micro lens array rapidly, and the production process is fed back by detecting the position of the sub-lenses of the micro lens array, PSF and MTF consistency, so that the adjustment of the on-production products can be performed timely, the yield is improved, and the quality risk is reduced.
In one embodiment of the present invention, the camera 10 images when the collimator 2 is provided with star points and the light spot formed by focusing through the microlens array 7 is smaller than the diffraction limit of the detection device, the camera 10 is adjusted to the focusing position, the optical axis distance of the camera 10 and the stage 6 in this state is defined as the reference distance, the camera 10 and/or the stage 6 is moved along the optical axis so that the optical axis distance thereof floats based on the reference distance, the floating distance is an integer multiple of the focal depth distance, and the camera 10 collects the corresponding array light spot image.
In one embodiment of the present invention, the detection device further comprises a peltier Luo Ban, a horizontal driving mechanism for driving the stage 6 to move in a two-dimensional plane, and a vertical driving mechanism for driving the camera 10 to move along the optical axis direction of the optical path, wherein when the peltier Luo Ban 3 is placed in the collimator 2, the horizontal driving mechanism drives the stage 6 to move until the light emitted from the collimator 2 is incident on the microlens array 7, and when the camera 10 is located at the focal plane position under the driving of the vertical driving mechanism, the peltier Luo Ban 3 in the collimator 2 is replaced with a star point.
Illustratively, the horizontal driving mechanism comprises an x-axis precision displacement stage 4 and a y-axis precision displacement stage 5, the stage 6 is placed on the x-axis precision displacement stage 4 and the y-axis precision displacement stage 5, and the x-axis precision displacement stage 4 and the y-axis precision displacement stage 5 are configured to drive the stage 6 to move in a two-dimensional plane. The vertical driving mechanism is a z-axis precision displacement stage 8, the z-axis precision displacement stage 8 is connected with a camera 10, and the z-axis precision displacement stage 8 is configured to drive the camera 10 to move along the optical axis direction of the optical path so as to adjust focusing.
Furthermore, the x-axis precise displacement table 4, the y-axis precise displacement table 5, the z-axis precise displacement table 8 and the objective table 6 are all hollow-out, so that light emitted by the light source 1 can pass through.
In one embodiment of the present invention, the magnification of the micro objective 9 is determined by the focal length of the micro lens array 7 to be detected, the focal length of the collimator 2, and the pixel size of the camera 10.
In one embodiment of the present invention, the light source 1 is a monochromatic incoherent light, the wavelength of which is determined by the design wavelength of the microlens array 7 to be detected.
Illustratively, the detection apparatus of the present embodiment implements the composite MLA detection method for an LED array provided by the above embodiment, the detection method including the steps of:
s10, turning on a light source.
S20, placing the Perot Luo Ban in a collimator of the composite MLA detection device.
And S30, adjusting the position of the micro lens array on the objective table of the composite MLA detection device relative to the collimator so that the light rays emitted from the collimator are incident on the micro lens array. The normal incidence mode is preferred.
And S40, adjusting the position of the camera of the composite MLA detection device relative to the micro-lens array on the objective table so that the camera is positioned at the focal plane position.
S50, replacing the Perot Luo Ban in the collimator tube with a star point fitting, and meeting the condition that a light spot formed by focusing after passing through the micro lens array is smaller than the diffraction limit of the composite MLA detection device.
And S60, defining the current optical axis distance between the camera and the objective table as a reference distance, moving the camera and/or the objective table along the optical axis to enable the optical axis distance to float based on the reference distance, wherein the floating distance is an integral multiple of the focal depth distance, floating for a plurality of times, and collecting the flare image after each floating of the camera.
And S70, processing the plurality of light spot images to obtain a consistency detection result of the sub-lenses.
The sub-lens consistency detection result includes at least one of sub-lens position consistency, PSF consistency, and MTF consistency.
S80, determining a composite MLA detection result of the micro-lens array based on the consistency detection result of the sub-lenses.
The embodiment of determining the detection results of the position consistency, the PSF consistency, and the MTF consistency in step S70 is referred to the above embodiment of the composite MLA detection method for the LED array, and will not be described herein.
In one embodiment of the invention, a plurality of spot images are acquired, for example, a system focal depth is 10 microns, one spot image is acquired every 10 microns around a z-axis 0 point, 20 images can be acquired by taking a range that a camera floats above and below the z-axis 0 point as an example, the range is-100 microns, the spot image with each sub-lens focused most is screened out of the 20 spot images, and a gray gradient curve of the focused spot image obtained at a plurality of positions by fitting each sub-lens is taken as the spot image with the sub-lens focused most. The focal depth refers to the distance that a focal point (focal plane) is allowed to move along the optical axis of the lens on the premise of keeping the image clearer, and the calculation formula relates to wavelength, image space refractive index and aperture angle of image space edge light.
In one embodiment of the invention, the method further comprises a correction process of correcting distortion of the camera and the microscope objective 9 by using a checkerboard, correcting aberration of the microscope objective 9 by acquiring PSF images of the microscope objective 9, and correcting gamma of the camera 10.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
The foregoing is merely illustrative of the embodiments of this application and it will be appreciated by those skilled in the art that variations and modifications may be made without departing from the principles of the application, and it is intended to cover all modifications and variations as fall within the scope of the application.

Claims (17)

1.一种用于LED阵列的复合MLA检测方法，其特征在于，所述LED阵列包括微透镜阵列，所述微透镜阵列包括阵列排布的多个子透镜，所述检测方法包括：1. A composite MLA detection method for an LED array, wherein the LED array comprises a microlens array, the microlens array comprises a plurality of sub-lenses arranged in an array, and the detection method comprises: 获取每个所述子透镜对应的多张光斑图像；Acquire a plurality of light spot images corresponding to each of the sub-lenses; 对所述光斑图像进行处理，以确定所述子透镜的一致性检测结果；其中，所述一致性检测结果包括PSF一致性的检测结果、MTF一致性的检测结果以及位置一致性的检测结果中的至少一个；Processing the spot image to determine a consistency detection result of the sub-lens; wherein the consistency detection result includes at least one of a PSF consistency detection result, an MTF consistency detection result, and a position consistency detection result; 其中，通过以下方式确定所述子透镜的PSF一致性的检测结果：获取每个所述子透镜的PSF图像，所述PSF图像包括所述子透镜对应的光斑的图像；基于每个所述子透镜的PSF图像计算对应的PSF相似性值，和/或，基于每个所述子透镜的PSF图像计算对应的光斑与理论光斑的面积差值；基于所述子透镜对应的PSF相似性值和/或所述面积差值确定所述子透镜的PSF一致性的检测结果；Wherein, the detection result of the PSF consistency of the sub-lens is determined in the following manner: obtaining a PSF image of each of the sub-lens, wherein the PSF image includes an image of a light spot corresponding to the sub-lens; calculating a corresponding PSF similarity value based on the PSF image of each of the sub-lens, and/or calculating an area difference between a corresponding light spot and a theoretical light spot based on the PSF image of each of the sub-lens; determining the detection result of the PSF consistency of the sub-lens based on the PSF similarity value corresponding to the sub-lens and/or the area difference; 基于所述子透镜的一致性检测结果，确定所述微透镜阵列的复合MLA检测结果。Based on the consistency detection results of the sub-lenses, a composite MLA detection result of the microlens array is determined. 2.根据权利要求1所述的用于LED阵列的复合MLA检测方法，其特征在于，所述PSF图像包括原始PSF图像与仿真PSF图像，所述获取每个所述子透镜的PSF图像，包括：从每个所述子透镜的多张光斑图像中确定出每个子透镜的原始PSF图像；以及获取每个所述原始PSF图像对应的仿真PSF图像；2. The composite MLA detection method for LED array according to claim 1, characterized in that the PSF image includes an original PSF image and a simulated PSF image, and the obtaining of the PSF image of each sub-lens comprises: determining the original PSF image of each sub-lens from a plurality of spot images of each sub-lens; and obtaining a simulated PSF image corresponding to each original PSF image; 基于所述子透镜对应的PSF相似性值确定所述子透镜的PSF一致性的检测结果包括：The detection result of determining the PSF consistency of the sub-lens based on the PSF similarity value corresponding to the sub-lens includes: 对每个所述子透镜的原始PSF图像进行展开，得到展开后的PSF图像，记作展开PSF图像；Expanding the original PSF image of each sub-lens to obtain an expanded PSF image, which is recorded as an expanded PSF image; 基于所述原始PSF图像、所述展开PSF图像以及所述仿真PSF图像，计算每个所述子透镜对应的PSF相似性值，进而确定所述子透镜的PSF一致性的检测结果。Based on the original PSF image, the expanded PSF image and the simulated PSF image, the PSF similarity value corresponding to each of the sub-lenses is calculated, and then the detection result of the PSF consistency of the sub-lenses is determined. 3.根据权利要求2所述的用于LED阵列的复合MLA检测方法，其特征在于，所述基于所述原始PSF图像、所述展开PSF图像以及所述仿真PSF图像，计算每个子透镜对应的PSF相似性值包括：3. The composite MLA detection method for LED array according to claim 2, characterized in that the calculating the PSF similarity value corresponding to each sub-lens based on the original PSF image, the expanded PSF image and the simulated PSF image comprises: 计算所述原始PSF图像与所述仿真PSF图像之间的相似性值，记作第一相似性值；Calculating a similarity value between the original PSF image and the simulated PSF image, recorded as a first similarity value; 计算所述展开PSF图像与所述仿真PSF图像之间的相似性值，记作第二相似性值；Calculating a similarity value between the expanded PSF image and the simulated PSF image, recorded as a second similarity value; 对所述第一相似性值和第二相似性值进行加权求和，得到所述PSF相似性值。A weighted sum is performed on the first similarity value and the second similarity value to obtain the PSF similarity value. 4.根据权利要求3所述的用于LED阵列的复合MLA检测方法，其特征在于，所述从每个所述子透镜的多张光斑图像中确定出每个子透镜的原始PSF图像，包括：计算每个子透镜的多张光斑图像的梯度值；将每个所述子透镜的所有光斑图像中梯度值最大的光斑图像确定为所述子透镜的原始PSF图像；4. The composite MLA detection method for LED array according to claim 3, characterized in that the step of determining the original PSF image of each sub-lens from the multiple spot images of each sub-lens comprises: calculating the gradient values of the multiple spot images of each sub-lens; determining the spot image with the largest gradient value among all the spot images of each sub-lens as the original PSF image of the sub-lens; 和/或，所述对每个所述子透镜的原始PSF图像进行展开，包括：利用以下公式对所述原始PSF图像进行log展开：；其中，I为原始PSF图像归一化后的灰度矩阵，I’为所述展开PSF图像的灰度矩阵，ε和δ是两个加权系数。And/or, the expanding the original PSF image of each of the sub-lenses includes: performing log expansion on the original PSF image using the following formula: ; Wherein, I is the normalized grayscale matrix of the original PSF image, I' is the grayscale matrix of the expanded PSF image, ε and δ are two weighting coefficients. 5.根据权利要求1所述的用于LED阵列的复合MLA检测方法，其特征在于，基于所述子透镜对应的面积差值确定所述子透镜的PSF一致性的检测结果包括：5. The composite MLA detection method for an LED array according to claim 1, wherein the detection result of determining the PSF consistency of the sub-lens based on the area difference corresponding to the sub-lens comprises: 确定每个所述子透镜的原始PSF图像中光斑的面积，记作每个子透镜的实际光斑面积；Determine the area of the light spot in the original PSF image of each sub-lens, and record it as the actual light spot area of each sub-lens; 获取所述子透镜的理论光斑面积；Obtaining a theoretical spot area of the sub-lens; 计算每个所述子透镜的实际光斑面积与理论光斑面积的面积差值，进而确定所述子透镜的PSF一致性的检测结果。The area difference between the actual spot area and the theoretical spot area of each sub-lens is calculated, and then the detection result of the PSF consistency of the sub-lens is determined. 6.根据权利要求1至5中任一项所述的用于LED阵列的复合MLA检测方法，其特征在于，所述基于所述子透镜对应的PSF相似性值和/或面积差值确定所述子透镜的PSF一致性的检测结果，包括：6. The composite MLA detection method for an LED array according to any one of claims 1 to 5, characterized in that the detection result of determining the PSF consistency of the sub-lens based on the PSF similarity value and/or area difference value corresponding to the sub-lens comprises: 若所述子透镜对应的PSF相似性值符合PSF一致性的标准，且所述子透镜对应的面积差值符合PSF一致性的标准，则确定所述子透镜的PSF一致性的检测结果为合格。If the PSF similarity value corresponding to the sub-lens meets the PSF consistency standard, and the area difference value corresponding to the sub-lens meets the PSF consistency standard, then the PSF consistency detection result of the sub-lens is determined to be qualified. 7.根据权利要求1所述的用于LED阵列的复合MLA检测方法，其特征在于，通过以下方式确定所述子透镜的MTF一致性的检测结果：7. The composite MLA detection method for LED array according to claim 1, characterized in that the detection result of the MTF consistency of the sub-lens is determined by the following method: 从每个子透镜的多张光斑图像中确定每个子透镜的原始PSF图像；Determine an original PSF image of each sub-lens from a plurality of spot images of each sub-lens; 对每个所述子透镜的原始PSF图像进行频域变换，得到每个子透镜的当前MTF图像；Performing frequency domain transformation on the original PSF image of each sub-lens to obtain a current MTF image of each sub-lens; 获取各个子透镜的仿真MTF图像；Obtaining simulated MTF images of each sub-lens; 计算每个所述子透镜的所述当前MTF图像与相应的所述仿真MTF图像的相似度，得到每个子透镜的MTF相似度值，进而确定所述子透镜的MTF一致性的检测结果。The similarity between the current MTF image of each sub-lens and the corresponding simulated MTF image is calculated to obtain the MTF similarity value of each sub-lens, and then determine the detection result of the MTF consistency of the sub-lens. 8.根据权利要求7所述的用于LED阵列的复合MLA检测方法，其特征在于，所述计算每个所述子透镜的所述当前MTF图像与所述仿真MTF图像的相似度，包括：8. The composite MLA detection method for LED array according to claim 7, wherein the calculating the similarity between the current MTF image and the simulated MTF image of each sub-lens comprises: 对所述当前MTF图像和所述仿真MTF图像的相同点位进行多次同步采样，分别得到多个第一MTF值以及相应的第二MTF值；Performing multiple synchronous sampling on the same points of the current MTF image and the simulated MTF image to obtain multiple first MTF values and corresponding second MTF values respectively; 基于所述多个第一MTF值以及相应的第二MTF值，计算多次同步采样对应的采样点MTF相似度值的平均值，记作每个所述子透镜的MTF相似度值，其中，所述采样点MTF相似度值与采样点位处的第一MTF值与第二MTF值的比值相关；Based on the multiple first MTF values and the corresponding second MTF values, an average value of the MTF similarity values of the sampling points corresponding to the multiple synchronous samplings is calculated, and recorded as the MTF similarity value of each of the sub-lenses, wherein the MTF similarity value of the sampling point is related to the ratio of the first MTF value to the second MTF value at the sampling point; 和/或，所述确定所述子透镜的MTF一致性的检测结果，包括：And/or, the detection result of determining the MTF consistency of the sub-lens includes: 判断每个所述子透镜的MTF相似度值是否大于预设MTF相似度阈值，若是，则所述子透镜的MTF一致性的检测结果为合格，否则所述子透镜的MTF一致性的检测结果为不合格。It is determined whether the MTF similarity value of each of the sub-lenses is greater than a preset MTF similarity threshold value. If so, the detection result of the MTF consistency of the sub-lens is qualified; otherwise, the detection result of the MTF consistency of the sub-lens is unqualified. 9.根据权利要求8所述的用于LED阵列的复合MLA检测方法，其特征在于，所述子透镜的MTF相似度值采用如下公式计算得到：9. The composite MLA detection method for LED array according to claim 8, characterized in that the MTF similarity value of the sub-lens is calculated using the following formula: ； ; 其中，P为所述子透镜的MTF相似度值，为位置(Xi,Yi)处的第一MTF值，为位置(Xi,Yi)处的第二MTF值，N为所述第一MTF值的数量。Wherein, P is the MTF similarity value of the sub-lens, is the first MTF value at position ( Xi , Yi ), is the second MTF value at position ( Xi , Yi ), and N is the number of the first MTF values. 10.根据权利要求1所述的用于LED阵列的复合MLA检测方法，其特征在于，通过以下方式确定所述子透镜的位置一致性：10. The composite MLA detection method for LED array according to claim 1, characterized in that the position consistency of the sub-lenses is determined by the following method: 从每个所述子透镜对应的多张光斑图像中选取出最为聚焦的光斑图像，记作聚焦光斑图像；Selecting the most focused spot image from the multiple spot images corresponding to each sub-lens, and recording it as the focused spot image; 确定每个所述子透镜的聚焦光斑图像中光斑的光斑质心；Determine the centroid of the light spot in the focused light spot image of each sub-lens; 根据所有所述子透镜对应的光斑质心分别在行方向和列方向进行直线拟合，得到各行、各列对应的拟合直线；According to the centroids of the light spots corresponding to all the sub-lenses, straight line fitting is performed in the row direction and the column direction to obtain the fitting straight lines corresponding to each row and each column; 获取每个子透镜对应的所述光斑质心到其所在行、所在列对应的拟合直线的距离，作为所述子透镜的位置偏差；其中，所述位置偏差包括行偏差与列偏差；Obtaining the distance from the center of mass of the light spot corresponding to each sub-lens to the fitting straight line corresponding to its row and column as the position deviation of the sub-lens; wherein the position deviation includes row deviation and column deviation; 根据每个所述子透镜的位置偏差，确定所述子透镜的位置一致性的检测结果。According to the position deviation of each of the sub-lenses, a detection result of the position consistency of the sub-lenses is determined. 11.根据权利要求10所述的用于LED阵列的复合MLA检测方法，所述根据每个所述子透镜的位置偏差，确定所述子透镜的位置一致性的检测结果，包括：11. The composite MLA detection method for an LED array according to claim 10, wherein the step of determining the detection result of the position consistency of each sub-lens according to the position deviation of each sub-lens comprises: 判断每个所述子透镜的行偏差和列偏差是否均落在对应预设偏差范围内，若是，则所述子透镜的位置一致性的检测结果为合格，否则所述子透镜的位置一致性的检测结果为不合格。It is determined whether the row deviation and column deviation of each sub-lens are within the corresponding preset deviation range. If so, the detection result of the position consistency of the sub-lens is qualified; otherwise, the detection result of the position consistency of the sub-lens is unqualified. 12.根据权利要求1至5中任一项或权利要求7至11中任一项所述的用于LED阵列的复合MLA检测方法，其特征在于，所述获取每个所述子透镜对应的多张光斑图像，包括：12. The composite MLA detection method for LED array according to any one of claims 1 to 5 or any one of claims 7 to 11, characterized in that the step of acquiring a plurality of light spot images corresponding to each of the sub-lenses comprises: 获取多张阵列光斑图像，其中，所述阵列光斑图像包括每个所述子透镜对应的光斑的图像；Acquire a plurality of array spot images, wherein the array spot image includes an image of a spot corresponding to each of the sub-lenses; 对所述多张阵列光斑图像进行图像清晰度计算，以从所述多张阵列光斑图像中选出聚焦阵列光斑图像；Performing image clarity calculation on the multiple array light spot images to select a focused array light spot image from the multiple array light spot images; 对所述聚焦阵列光斑图像进行滤波降噪处理，得到滤波图像；Performing filtering and noise reduction processing on the focused array spot image to obtain a filtered image; 对所述滤波图像进行圆形检测处理，得到所述聚焦阵列光斑图像中每个光斑的圆心坐标；Performing circular detection processing on the filtered image to obtain the center coordinates of each light spot in the focusing array light spot image; 基于所述圆心坐标对每个所述阵列光斑图像进行裁剪，得到每个所述子透镜的多张光斑图像。Each of the array spot images is cropped based on the circle center coordinates to obtain multiple spot images of each sub-lens. 13.根据权利要求1至5中任一项或权利要求7至11中任一项所述的用于LED阵列的复合MLA检测方法，其特征在于，所述基于所述子透镜的一致性检测结果，确定所述微透镜阵列的复合MLA检测结果，包括：13. The composite MLA detection method for an LED array according to any one of claims 1 to 5 or any one of claims 7 to 11, characterized in that the composite MLA detection result of the microlens array is determined based on the consistency detection result of the sub-lens, comprising: 确定所述子透镜的PSF一致性的检测结果、MTF一致性的检测结果及位置一致性的检测结果均为合格的子透镜的数量；Determine the number of sub-lenses whose PSF consistency test results, MTF consistency test results, and position consistency test results are all qualified; 若所述均为合格的子透镜的数量在所述微透镜阵列中的透镜占比值达到预设的比例阈值，则所述微透镜阵列的复合MLA检测结果为合格。If the number of the qualified sub-lenses in the microlens array reaches a preset ratio threshold, the composite MLA detection result of the microlens array is qualified. 14.一种检测装置，其特征在于，包括依次沿光路方向设置的光源、平行光管、载物台、显微物镜和相机，所述载物台被配置为托载待检测的微透镜阵列，所述微透镜阵列包括阵列排布的多个子透镜，所述光源发出的光线通过所述平行光管后入射到所述微透镜阵列，所述显微物镜被配置为将所述微透镜阵列处的光线引导至所述相机；14. A detection device, characterized in that it comprises a light source, a collimator, a stage, a microscope objective lens and a camera arranged in sequence along the light path direction, the stage is configured to support a microlens array to be detected, the microlens array comprises a plurality of sub-lenses arranged in an array, the light emitted by the light source passes through the collimator and then enters the microlens array, and the microscope objective lens is configured to guide the light at the microlens array to the camera; 所述检测装置还包括计算机，其被配置为获取所述相机采集的阵列光斑图像并对所述阵列光斑图像进行处理，以确定所述子透镜的一致性检测结果；其中，所述一致性检测结果包括位置一致性的检测结果、PSF一致性的检测结果以及MTF一致性的检测结果中的至少一个；The detection device also includes a computer, which is configured to obtain the array spot image collected by the camera and process the array spot image to determine the consistency detection result of the sub-lens; wherein the consistency detection result includes at least one of the detection result of position consistency, the detection result of PSF consistency and the detection result of MTF consistency; 所述计算机还被配置为基于所述子透镜的一致性检测结果，确定所述微透镜阵列的复合MLA检测结果。The computer is further configured to determine a composite MLA detection result of the microlens array based on the consistency detection result of the sub-lenses. 15.根据权利要求14所述的检测装置，特征在于，所述相机在满足以下条件时成像：在所述平行光管内使用星点，且通过所述微透镜阵列后聚焦所形成的光斑小于所述检测装置的衍射极限；所述相机被调节至对焦位置，定义此状态下所述相机与载物台的光轴距离为基准距离；沿着光轴移动所述相机和/或所述载物台，使其光轴距离基于所述基准距离浮动，浮动的距离为焦深距离的整数倍；作多次浮动，且所述相机采集对应的阵列光斑图像。15. The detection device according to claim 14 is characterized in that the camera forms an image when the following conditions are met: a star point is used in the collimator, and the light spot formed by focusing after the microlens array is smaller than the diffraction limit of the detection device; the camera is adjusted to a focusing position, and the optical axis distance between the camera and the stage in this state is defined as a reference distance; the camera and/or the stage are moved along the optical axis so that their optical axis distance floats based on the reference distance, and the floating distance is an integer multiple of the depth of focus distance; multiple floatings are performed, and the camera captures corresponding array light spot images. 16.根据权利要求15所述的检测装置，其特征在于，所述检测装置还包括珀罗板、用于驱动所述载物台在二维平面内移动的水平驱动机构以及用于驱动所述相机或所述载物台沿光路的光轴方向移动的竖直驱动机构；当所述珀罗板置于所述平行光管内时，所述水平驱动机构驱动所述载物台移动，直至从所述平行光管出射的光线入射到所述微透镜阵列；及在所述竖直驱动机构的驱动下所述相机位于焦面位置时，将所述平行光管内的珀罗板替换为所述星点；16. The detection device according to claim 15 is characterized in that the detection device also includes a Perot plate, a horizontal driving mechanism for driving the stage to move in a two-dimensional plane, and a vertical driving mechanism for driving the camera or the stage to move along the optical axis direction of the optical path; when the Perot plate is placed in the collimator, the horizontal driving mechanism drives the stage to move until the light emitted from the collimator is incident on the microlens array; and when the camera is located at the focal plane position under the drive of the vertical driving mechanism, the Perot plate in the collimator is replaced by the star point; 和/或，所述显微物镜的放大倍率由所述待检测的微透镜阵列的焦距、所述平行光管的焦距以及所述相机的像素大小决定；And/or, the magnification of the microscope objective lens is determined by the focal length of the microlens array to be detected, the focal length of the collimator, and the pixel size of the camera; 和/或，所述光源为单色的非相干光，所述单色的非相干光的波长由所述待检测的微透镜阵列的设计波长决定。And/or, the light source is monochromatic incoherent light, and the wavelength of the monochromatic incoherent light is determined by the design wavelength of the microlens array to be detected. 17.一种检测装置，其特征在于，包括依次沿光路方向设置的光源、平行光管、载物台、显微物镜和相机，所述载物台被配置为托载待检测的微透镜阵列，所述微透镜阵列包括阵列排布的多个子透镜，所述光源发出的光线通过所述平行光管后入射到所述微透镜阵列，所述显微物镜被配置为将所述微透镜阵列处的光线引导至所述相机；17. A detection device, characterized in that it comprises a light source, a collimator, a stage, a microscope objective lens and a camera arranged in sequence along the light path direction, the stage is configured to support a microlens array to be detected, the microlens array comprises a plurality of sub-lenses arranged in an array, the light emitted by the light source passes through the collimator and then enters the microlens array, and the microscope objective lens is configured to guide the light at the microlens array to the camera; 所述检测装置还包括计算机，其被配置为执行如权利要求1至13中任一项所述的检测方法。The detection device further comprises a computer configured to execute the detection method according to any one of claims 1 to 13.
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