CN119375160A - A sample detection method and device - Google Patents
A sample detection method and device Download PDFInfo
- Publication number
- CN119375160A CN119375160A CN202411933027.6A CN202411933027A CN119375160A CN 119375160 A CN119375160 A CN 119375160A CN 202411933027 A CN202411933027 A CN 202411933027A CN 119375160 A CN119375160 A CN 119375160A
- Authority
- CN
- China
- Prior art keywords
- light
- polarization state
- polarization
- beam splitter
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 27
- 230000010287 polarization Effects 0.000 claims abstract description 208
- 230000003287 optical effect Effects 0.000 claims abstract description 38
- 239000013307 optical fiber Substances 0.000 claims description 38
- 230000001902 propagating effect Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 13
- 238000005286 illumination Methods 0.000 claims description 12
- 241000276498 Pollachius virens Species 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 description 9
- 238000003384 imaging method Methods 0.000 description 9
- 239000000835 fiber Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000000887 face Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
本申请提供一种样品检测方法及装置，在配置光源、偏振分光棱镜、分束器、物镜、筒镜和探测器位于光路中时，基于目标偏振态确定光源发出的光束的传播路径。在目标偏振态为p偏振态时，基于传播路径，使光束在偏振分光棱镜中发生透射得到透射光；透射光的偏振态为p偏振态；目标偏振态为s偏振态时，基于传播路径，使光束在偏振分光棱镜中发生反射得到反射光；反射光的偏振态为s偏振态。这样，在需要利用某种偏振态的光对待测样品进行照明和检测时，通过改变光束的传播路径即可实现，使光束在偏振分光棱镜中透射出射得到p偏振态的光，反射出射得到s偏振态的光，无需手动切换线偏振片，能够快速且准确的得到所需偏振态的光，提高样品检测精度。
The present application provides a sample detection method and device. When a light source, a polarization beam splitter, a beam splitter, an objective lens, a tube lens, and a detector are configured in an optical path, the propagation path of the light beam emitted by the light source is determined based on the target polarization state. When the target polarization state is a p polarization state, based on the propagation path, the light beam is transmitted in the polarization beam splitter prism to obtain a transmitted light; the polarization state of the transmitted light is a p polarization state; when the target polarization state is an s polarization state, based on the propagation path, the light beam is reflected in the polarization beam splitter prism to obtain a reflected light; the polarization state of the reflected light is an s polarization state. In this way, when it is necessary to use light of a certain polarization state to illuminate and detect the sample to be tested, it can be achieved by changing the propagation path of the light beam, so that the light beam is transmitted in the polarization beam splitter prism to obtain light of a p polarization state, and reflected to obtain light of an s polarization state. There is no need to manually switch the linear polarizer, and the light of the desired polarization state can be obtained quickly and accurately, thereby improving the accuracy of sample detection.
Description
Technical Field
The application relates to the field of sample detection, in particular to a sample detection method and device.
Background
In semiconductor metrology apparatus, it is often necessary to use microscopic imaging techniques to perform metrology on a sample to be inspected, such as a wafer. In the high-end wafer manufacturing node, different illumination polarization states are often required to be used for illuminating the sample to be tested, so that better imaging quality is obtained, and detection precision is improved. In the related art, switching of the p-polarization state and the s-polarization state is often performed using linear polarizers of different directions, which results in low accuracy of switching positions and directions and slow switching speed.
Disclosure of Invention
Therefore, the application aims to provide a method and a device for detecting a sample, which can rapidly and accurately obtain light with a required polarization state, thereby improving the detection precision of the sample. The specific scheme is as follows:
in one aspect, the present application provides a sample detection method comprising:
when a light source (101), a polarization splitting prism (102), a beam splitter (103), an objective lens (104), a barrel lens (105) and a detector (106) are arranged in a light path, determining a propagation path of a light beam emitted by the light source (101) based on a target polarization state;
When the target polarization state is p-polarization state, based on the propagation path, the light beam is transmitted in the polarization beam splitting prism (102) to obtain transmission light, wherein the polarization state of the transmission light is the p-polarization state, and the transmission light is reflected by a sample (107) to be detected after passing through the beam splitter (103) and the objective lens (104) and enters the detector (106) for imaging through the cylindrical lens (105);
And when the target polarization state is s polarization state, reflecting the light beam in the polarization beam splitting prism (102) based on the propagation path to obtain reflected light, wherein the polarization state of the reflected light is s polarization state, and the reflected light is used for being reflected by a sample (107) to be detected after passing through the beam splitter (103) and the objective lens (104) and entering the detector (106) for imaging through the cylindrical lens (105).
In one possible implementation, there is a light splitting surface inside the polarization splitting prism (102), the polarization splitting prism (102) including a first surface (1021), a second surface (1022), and a third surface (1023);
Transmitting the light beam in the polarization splitting prism (102) based on the propagation path to obtain transmitted light when the target polarization state is p-polarization state, wherein the method comprises the following steps:
Based on the propagation path, the light beam is made to enter the light splitting surface from the first surface (1021) and is emitted from the second surface (1022) to obtain the transmission light, wherein the first surface (1021) and the second surface (1022) are two surfaces which are oppositely arranged;
when the target polarization state is s-polarization state, reflecting the light beam in the polarization beam splitter prism (102) based on the propagation path to obtain reflected light, wherein the method comprises the following steps:
The light beam is made incident on the light splitting surface from the third surface (1023) based on the propagation path, and is emitted from the second surface (1022), so that the reflected light is obtained, and the second surface (1022) and the third surface (1023) are adjacent to each other.
In one possible implementation, a first lens (108) and a first shutter (109) are disposed on a first optical path between the light source (101) and a first surface (1021) of the polarizing beam-splitting prism (102), and a second lens (110) and a second shutter (111) are disposed on a second optical path between the light source (101) and a third surface (1023) of the polarizing beam-splitting prism (102);
based on the propagation path, the light beam is made incident from the first surface (1021) to the light-splitting surface and is emitted from the second surface (1022), and the transmitted light is obtained, including:
Controlling the first shutter (109) to open and the second shutter (111) to close based on the propagation path, so that the light beam is incident on the light splitting surface from the first surface (1021) and is emitted from the second surface (1022), and the transmitted light is obtained;
Based on the propagation path, the light beam is made incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022), and the reflected light is obtained, including:
The second shutter (111) is controlled to open and the first shutter (109) is controlled to close based on the propagation path, so that the light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022) to obtain the reflected light.
In one possible implementation, the first shutter (109) is located on the light entry side of the first lens (108), and the second shutter (111) is located on the light entry side of the second lens (110).
In one possible implementation, an optical fiber (112) and an optical fiber beam splitter (113) are arranged on an optical path between the light source (101) and the polarization splitting prism (102), the optical fiber (112) is connected with the light source (101), and the optical fiber beam splitter (113) is used for splitting a light beam in the optical fiber (112) into a first light beam propagating in the first optical path and a second light beam propagating in the second optical path;
Controlling the first shutter (109) to open and the second shutter (111) to close based on the propagation path, so that the light beam is incident on the light splitting surface from the first surface (1021) and is emitted from the second surface (1022), and the transmitted light is obtained, including:
Controlling the first shutter (109) to open and the second shutter (111) to close based on the propagation path, so that the first light beam is incident on the light splitting surface from the first surface (1021) and is emitted from the second surface (1022), and the transmitted light is obtained;
Controlling the second shutter (111) to open and the first shutter (109) to close based on the propagation path, so that the light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022), and the reflected light is obtained, including:
And controlling the second shutter (111) to open and the first shutter (109) to close based on the propagation path, so that the second light beam is incident on the light splitting surface from the third surface (1023) and is emitted from the second surface (1022) to obtain the reflected light.
In one possible implementation, a kohler illumination module (114) is arranged on the light path between the polarization splitting prism (102) and the beam splitter (103).
In still another aspect, an embodiment of the present application further provides a sample detection apparatus, including:
a light source (101), a polarization beam splitter prism (102), a beam splitter (103), an objective lens (104), a cylindrical lens (105) and a detector (106);
The polarization splitting prism (102) is used for enabling light beams emitted by the light source (101) to obtain light with different polarization states under different propagation paths, when the target polarization state is p-polarization state, the polarization splitting prism (102) is used for enabling the light beams to be transmitted in the polarization splitting prism (102) to obtain transmitted light, when the transmitted light is p-polarization state, when the target polarization state is s-polarization state, the polarization splitting prism (102) is used for enabling the light beams to be reflected in the polarization splitting prism (102) to obtain reflected light, and the polarization state of the reflected light is s-polarization state;
The beam splitter (103) is used for enabling light emitted from the polarization beam splitter prism (102) to enter a sample (107) to be detected through the objective lens (104), and the detector (106) is used for imaging light reflected by the sample (107) to be detected after passing through the objective lens (104), the beam splitter (103) and the barrel lens (105).
In one possible implementation manner, a light splitting surface is arranged inside the polarization splitting prism (102), and the polarization splitting prism (102) comprises a first surface (1021), a second surface (1022) and a third surface (1023), wherein the first surface (1021) and the second surface (1022) are two surfaces which are oppositely arranged, and the second surface (1022) and the third surface (1023) are two adjacent surfaces;
When the target polarization state is p-polarization state, the first surface (1021) is used for enabling the light beam to be incident to the light splitting surface from the first surface (1021), and the second surface (1022) is used for enabling the light beam to be emergent to obtain the transmitted light;
When the target polarization state is s-polarization state, the third surface (1023) is used for enabling the light beam to enter the light splitting surface from the third surface (1023), and the second surface (1022) is used for enabling the light beam to exit, so that the reflected light is obtained.
In one possible implementation, a first lens (108) and a first shutter (109) are disposed on a first optical path between the light source (101) and a first surface (1021) of the polarizing beam-splitting prism (102), and a second lens (110) and a second shutter (111) are disposed on a second optical path between the light source (101) and a third surface (1023) of the polarizing beam-splitting prism (102).
In one possible implementation, an optical fiber (112) and an optical fiber beam splitter (113) are arranged on an optical path between the light source (101) and the polarization splitting prism (102), the optical fiber (112) is connected with the light source (101), and the optical fiber beam splitter (113) is used for splitting a light beam in the optical fiber (112) into a first light beam propagating in the first optical path and a second light beam propagating in the second optical path;
the first light beam is used for being incident to the light splitting surface from the first surface (1021) and being emitted from the second surface (1022) to obtain the transmitted light;
the second light beam is used for being incident to the light splitting surface from the third surface (1023) and being emitted from the second surface (1022) to obtain the reflected light.
The embodiment of the application provides a sample detection method and a sample detection device, wherein when a light source (101), a polarization beam splitter prism (102), a beam splitter (103), an objective lens (104), a barrel lens (105) and a detector (106) are configured in a light path, the propagation path of a light beam emitted by the light source is determined based on a target polarization state, and the target polarization state can be a p-polarization state or an s-polarization state. When the target polarization state is p-polarization state, light beams are transmitted in the polarization beam splitting prism (102) based on a transmission path to obtain transmitted light, the transmitted light is p-polarization state, the transmitted light is used for being reflected by a sample (107) to be detected after passing through the beam splitter (103) and the objective lens (104) and enters the detector (106) to image through the barrel lens (105), when the target polarization state is s-polarization state, the light beams are reflected in the polarization beam splitting prism (102) based on the transmission path to obtain reflected light, the reflected light is s-polarization state, and the reflected light is used for being reflected by the sample (107) to be detected after passing through the beam splitter (103) and the objective lens (104) and enters the detector (106) to image through the barrel lens (105). Therefore, when the light in a certain polarization state is required to be used for illumination and detection of a sample (107), the light can be realized by changing the propagation path of the light beam, the light beam is transmitted and emitted in the polarization beam splitting prism (102), the light in a p polarization state can be obtained, the light beam is reflected and emitted, the light in an s polarization state can be obtained, the linear polaroid does not need to be manually switched, the light in the required polarization state can be rapidly and accurately obtained, and the detection precision of the sample is further improved.
Drawings
In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are some embodiments of the application and that other drawings may be obtained from these drawings without inventive effort for a person skilled in the art.
Fig. 1 shows a schematic flow chart of a sample detection method according to an embodiment of the present application;
Fig. 2 is a schematic structural diagram of a sample detection device according to an embodiment of the present application.
Detailed Description
In order that the above objects, features and advantages of the application will be readily understood, a more particular description of the application will be rendered by reference to the appended drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application, but the present application may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present application is not limited to the specific embodiments disclosed below.
For easy understanding, a detailed description of a sample detection method and apparatus according to embodiments of the present application is provided below with reference to the accompanying drawings.
Referring to fig. 1, a flow chart of a sample detection method according to an embodiment of the present application is shown, and the method may include the following steps.
S101, when a light source (101), a polarization splitting prism (102), a beam splitter (103), an objective lens (104), a barrel lens (105) and a detector (106) are arranged in an optical path, a propagation path of a light beam emitted by the light source is determined based on a target polarization state.
Specifically, the light source (101) is used for emitting light beams, the polarization beam splitter PBS (102) is used for dividing the light beams entering the light source into polarization states, the beam splitter (103) is used for dividing the light beams into two light beams with different emitting directions, the sample (107) to be detected is located on the focal plane of the objective lens (104) so that the light beams are converged on the surface of the sample (107) to be detected, and the detector (106) is located on the focal plane of the barrel lens (105) so that the surface of the sample (107) to be detected is imaged.
Referring to fig. 2, a light beam emitted by a light source (101) sequentially passes through a polarization beam splitter prism (102), a beam splitter (103) and an objective lens (104) to be incident on the surface of a sample (107) to be detected, is reflected by the sample (107) to be detected, and sequentially passes through the objective lens (104), the beam splitter (103) and a barrel lens (105) to be imaged in a detector (106).
The target polarization state may be understood as a desired polarization state preset, and the target polarization state may be a p-polarization state or an s-polarization state. The propagation path of the light beam emitted by the light source (101) can be determined according to the target polarization state, different polarization states corresponding to different propagation paths of the light beam.
S102, when the target polarization state is p-polarization state, the light beam is transmitted in the polarization beam splitter prism (102) based on the propagation path to obtain transmission light.
When the target polarization state is p-polarization state, the determined propagation path can enable the light beam to transmit in the polarization beam splitting prism (102), so that transmitted light is obtained. The polarization state of the transmitted light is p-polarization. In short, the light beam emitted from the light source (101) passes through the polarization beam splitter prism (102), and then the emitted light is transmitted light.
The transmitted light is reflected by the sample (107) to be detected after passing through the beam splitter (103) and the objective lens (104) and enters the detector (106) to form an image through the barrel lens (105), that is, the transmitted light continues to be transmitted along the optical path, irradiates the surface of the sample (107) to be detected after passing through the beam splitter (103) and the objective lens (104) in sequence, and enters the detector (106) to form an image after being reflected by the sample (107) to be detected and passing through the objective lens (104), the beam splitter (103) and the barrel lens (105) in sequence, wherein the image is formed by illuminating the sample (107) to be detected by using p-polarized light beams.
S103, when the target polarization state is S polarization state, the light beam is reflected by the polarization beam splitter prism (102) based on the propagation path to obtain reflected light.
When the target polarization state is s-polarization state, the determined propagation path is different from the propagation path, and under the propagation path corresponding to the s-polarization state, the light beam can be reflected in the polarization beam splitter prism (102) to obtain the emergent light which is reflected light. The polarization state of the reflected light is s-polarized.
The reflected light is used for being reflected by a sample (107) to be detected after passing through the beam splitter (103) and the objective lens (104), and enters the detector (106) for imaging through the cylindrical lens (105). That is, the reflected light continues to transmit along the light path, irradiates the surface of the sample to be measured (107) after passing through the beam splitter (103) and the objective lens (104) in sequence, and enters the detector (106) to image after being reflected by the sample to be measured (107) and passing through the objective lens (104), the beam splitter (103) and the cylindrical lens (105) in sequence, wherein the imaging is that the sample to be measured (107) is illuminated by using the s-polarized light beam.
Thus, a corresponding propagation path can be selected according to the required polarization state (namely, the target polarization state) to obtain a light beam with the required polarization state, when the light with a certain polarization state is required to be used for illumination and detection of a sample (107) to be detected, the light beam can be realized by changing the propagation path of the light beam, the light beam is transmitted and emitted in the polarization beam splitting prism (102), the light with the p polarization state can be obtained, the light beam is reflected and emitted, the light with the s polarization state can be obtained, the linear polaroid does not need to be manually switched, the light with the required polarization state can be rapidly and accurately obtained, and the detection precision of the sample is further improved.
In one possible implementation, a light splitting surface is provided inside the polarization splitting prism (102), and the light beam can be transmitted and reflected at the light splitting surface, and the polarization splitting prism (102) further comprises a first surface (1021), a second surface (1022) and a third surface (1023).
Referring to fig. 2, the first surface (1021) is a surface of the polarization beam splitter prism (102) facing left, the second surface (1022) is a surface of the polarization beam splitter prism (102) facing right, and the third surface (1023) is a surface of the polarization beam splitter prism (102) facing back or front. The first surface (1021) and the second surface (1022) are two surfaces which are arranged oppositely, and the second surface (1022) and the third surface (1023) are two adjacent surfaces, and share the same side. The orientations of the polarizing prism (102) are all divided by the same reference, i.e., the six faces of the polarizing prism are divided into 6 different orientations.
S102, when the target polarization state is p polarization state, the light beam is transmitted in the polarization beam splitter prism (102) based on the propagation path to obtain transmission light, which may be specifically S1021.
S1021, based on the propagation path, the light beam is made incident from the first surface (1021) to the light-splitting surface and is emitted from the second surface (1022), thereby obtaining the transmitted light.
Specifically, when the target polarization state is p-polarization state, the light beam emitted by the light source (101) may be made to enter the light splitting surface from the first surface (1021), that is, the light beam enters the left surface of the polarization splitting prism (102) and exits from the right surface, that is, exits from the second surface (1022), so that the light beam penetrates the light splitting surface, and the obtained light is transmitted light.
S103, when the target polarization state is S polarization state, the light beam is reflected by the polarization beam splitter prism (102) based on the propagation path to obtain reflected light, which may be specifically S1031.
S1031, based on the propagation path, makes the light beam enter the light splitting surface from the third surface (1023) and exit from the second surface (1022), and obtains the reflected light.
Specifically, when the target polarization state is s-polarization state, the light beam emitted by the light source (101) may be made to enter the light splitting surface from the third surface (1023), that is, the light beam enters the surface of the polarization splitting prism (102) facing backward (or forward), and exits from the surface facing right, that is, exits from the second surface (1022), so that the light beam may be reflected on the light splitting surface, and the obtained light is reflected light.
Therefore, the light beam is controlled to be incident on different surfaces of the polarization beam splitting prism (102), so that the switching of the propagation path can be realized, the incident direction of the light beam is changed, the operation is simple and convenient, the light path allocation process is simplified, the linear polaroid is not required to be manually switched, the light with the required polarization state can be rapidly and accurately obtained, and the detection precision of a sample is further improved.
In one possible implementation, a first lens (108) and a first shutter (109) may be disposed on a first optical path between the light source (101) and the first surface (1021) of the polarizing beam-splitting prism (102). Specifically, an optical path between the light source (101) and the first surface (1021) of the polarization beam splitter prism (102) can be denoted as a first optical path, a first lens (108) and a first shutter (109) are arranged on the first optical path, the first lens (108) can ensure that a light beam incident on the polarization beam splitter prism (102) is parallel light, and whether light propagating in the first optical path enters the polarization beam splitter prism (102) can be controlled by controlling the opening and closing of the first shutter (109).
A second lens (110) and a second shutter (111) may be disposed on a second optical path between the light source (101) and the third surface (1023) of the polarization splitting prism (102). Specifically, an optical path between the light source (101) and the third surface (1023) of the polarization beam splitter prism (102) can be denoted as a second optical path, the second lens (110) can ensure that the light beam incident on the polarization beam splitter prism (102) is parallel light, and whether the light propagating in the second optical path enters the polarization beam splitter prism (102) can be controlled by controlling the opening and closing of the second shutter (111).
Then, based on the propagation path, S1021, the light beam is made incident on the light splitting surface from the first surface (1021) and is emitted from the second surface (1022), and the transmitted light is obtained, which may be specifically S10211.
S10211, based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the light beam enters the beam splitting surface from the first surface (1021) and exits from the second surface (1022), and obtaining the transmitted light.
Specifically, when the target polarization state is p-polarization state, the first shutter (109) can be opened, and the second shutter (111) can be closed, so that the light beam emitted by the light source (101) can only propagate along the first light path, and then is incident on the first surface (1021) of the polarization splitting prism (102), and enters the light splitting surface to be transmitted, and the transmitted light exits from the second surface (1022) to propagate backwards.
Then S1031, based on the propagation path, makes the light beam enter the beam splitting plane from the third surface (1023) and exit from the second surface (1022), and the reflected light is obtained, which may be specifically S10311.
S10311, based on the propagation path, controls the second shutter (111) to open, and controls the first shutter (109) to close, so that the light beam enters the beam splitting surface from the third surface (1023) and exits from the second surface (1022), thereby obtaining the reflected light.
Specifically, when the target polarization state is s-polarization state, the second shutter (111) may be opened, the first shutter (109) may be closed, the light beam may only propagate along the second optical path, and may be incident on the light splitting surface from the third surface (1023) and may not be incident on the first surface (1021), and since the beam splitter (103) is located on the side of the second surface (1022), the light beam needs to exit from the second surface (1022). That is, the light beam enters from the third surface (1023), exits from the second surface (1022), and the exit light is reflected light, thereby obtaining an s-polarized light beam. In addition, when both the first shutter (109) and the second shutter (111) are open, the light beam exiting from the second surface (1022) is in an unpolarized state.
Therefore, the light beam emitted by the light source (101) is divided into two beams, one beam can be incident to the first surface (1021) along the first light path, the other beam can be incident to the third surface (1023) along the second light path, the light beam can be transmitted in which light path by using two shutters, the switching between the s polarization state and the p polarization state can be realized by closing the shutters, the position of the light source (101) is not required to be moved, the light path structure is further simplified, and the switching operation of the polarization state is simpler and more convenient.
In one possible implementation manner, the first shutter (109) may be located on the light-entering side of the first lens (108), the second shutter (111) may be located on the light-entering side of the second lens (110), so that the illumination range of the parallel light emitted from the lens is prevented from being too large, when the shutter is disposed on the light-emitting side, light shielding cannot be effectively realized, light beams incident to the polarization splitting prism (102) are ensured to be incident from only one surface, effective realization of polarization state is ensured, in addition, the size of the shutter can be smaller when the shutter is disposed on the light-entering side, and the shutter can be close to the lens as much as possible.
In one possible implementation, an optical fiber (112) and an optical fiber beam splitter (113) may be disposed on an optical path between the light source (101) and the polarization splitting prism (102), where the optical fiber (112) is connected to the light source (101), so that a light beam emitted by the light source (101) may propagate in the optical fiber (112), and light loss is reduced. The optical fiber beam splitter (113) is used for splitting the light beam in the optical fiber (112) into a first light beam propagating in a first light path and a second light beam propagating in a second light path, i.e. after the optical fiber beam splitter (113) two optical fibers may be provided, which are used for propagating the first light beam and the second light beam, respectively.
S10211, based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the light beam is incident from the first surface (1021) to the beam-splitting surface and is emitted from the second surface (1022), to obtain the transmitted light, specifically, based on the propagation path, controlling the first shutter (109) to open and the second shutter (111) to close, so that the first light beam is incident from the first surface (1021) to the beam-splitting surface and is emitted from the second surface (1022), to obtain the transmitted light.
That is, after the light beam emitted from the light source (101) passes through the optical fiber beam splitter (113), the light beam propagates along the two optical fibers, and since only the first shutter (109) is opened, only the light beam in one optical fiber can be incident on the polarization splitting prism (102) and is incident from the first surface (1021), thereby obtaining the transmitted light having the p-polarization state.
S10311, based on the propagation path, controls the second shutter (111) to open, and controls the first shutter (109) to close, so that the light beam enters the beam splitting surface from the third surface (1023) and exits from the second surface (1022), and reflected light is obtained, specifically, based on the propagation path, controls the second shutter (111) to open, and controls the first shutter (109) to close, so that the second light beam enters the beam splitting surface from the third surface (1023) and exits from the second surface (1022).
Specifically, the light beams respectively propagate along the two optical fibers, and since only the second shutter (111) is opened, only the light beam in one optical fiber can be incident on the polarization splitting prism (102) and is incident from the third surface (1023), thereby obtaining the transmitted light having the s-polarization state.
Like this, through introducing optic fibre and optic fibre beam splitter, can make the place position of light source (101) unrestricted, optic fibre can make the light beam propagate more concentrated, improves the utilization ratio to light, reduces the optical loss, in addition, because the light beam that exits from optic fibre is comparatively concentrated, the shutter of setting up in the light outlet of optic fibre can block light beam to polarization beam splitter prism (102) to a greater extent, can be stricter control light beam only from polarization beam splitter prism (102) one surface incidence, guarantee the effective realization of polarization state.
In one possible implementation manner, a kohler illumination module (114) is arranged on a light path between the polarization beam splitting prism (102) and the beam splitter (103), the kohler illumination module (114) comprises a fourth lens (1141), a fifth lens (1142) and a third lens (1143), the kohler illumination module (114) can be used for providing illumination, and light rays emitted by the kohler illumination module (114) can be focused at a pupil position of the objective lens (104) so that an imaging effect is clearer.
The embodiment of the application also provides a sample detection device, referring to fig. 2, the sample detection device comprises:
a light source (101), a polarization beam splitter prism (102), a beam splitter (103), an objective lens (104), a cylindrical lens (105) and a detector (106);
The polarization splitting prism (102) is used for enabling light beams emitted by the light source (101) to obtain light with different polarization states under different propagation paths, when the target polarization state is p polarization state, the polarization splitting prism (102) is used for enabling the light beams to be transmitted in the polarization splitting prism (102) to obtain transmitted light, when the transmitted polarization state is p polarization state, the polarization splitting prism (102) is used for enabling the light beams to be reflected in the polarization splitting prism (102) to obtain reflected light, and when the target polarization state is s polarization state, the polarization state of the reflected light is s polarization state;
the beam splitter (103) is used for enabling light emitted from the polarization beam splitter prism (102) to enter the sample (107) to be detected through the objective lens (104), and the detector (106) is used for imaging the light reflected by the sample (107) to be detected after passing through the objective lens (104), the beam splitter (103) and the cylindrical lens (105).
In one possible implementation, a light splitting surface is arranged inside the polarization splitting prism (102), and the polarization splitting prism (102) comprises a first surface (1021), a second surface (1022) and a third surface (1023), wherein the first surface (1021) and the second surface (1022) are two surfaces which are oppositely arranged, and the second surface (1022) and the third surface (1023) are two adjacent surfaces;
When the target polarization state is p-polarization state, the first surface (1021) is used for enabling the light beam to be incident to the light splitting surface from the first surface (1021), and the second surface (1022) is used for enabling the light beam to be emergent to obtain transmission light;
when the target polarization state is s-polarization state, the third surface (1023) is used for enabling the light beam to enter the light splitting surface from the third surface (1023), and the second surface (1022) is used for enabling the light beam to exit, so that reflected light is obtained.
In one possible implementation, a first lens (108) and a first shutter (109) are disposed on a first optical path between the light source (101) and a first surface (1021) of the polarizing beam-splitting prism (102), and a second lens (110) and a second shutter (111) are disposed on a second optical path between the light source (101) and a third surface (1023) of the polarizing beam-splitting prism (102).
In one possible implementation, an optical fiber (112) and an optical fiber beam splitter (113) are arranged on an optical path between the light source (101) and the polarization splitting prism (102), the optical fiber (112) is connected with the light source (101), and the optical fiber beam splitter (113) is used for splitting a light beam in the optical fiber (112) into a first light beam propagating in a first optical path and a second light beam propagating in a second optical path;
The first light beam is used for being incident to the light splitting surface from the first surface (1021) and being emergent from the second surface (1022) to obtain transmitted light;
the second light beam is used for being incident on the light splitting surface from the third surface (1023) and being emitted from the second surface (1022) to obtain reflected light.
Therefore, when the light in a certain polarization state is required to be used for illumination and detection of a sample (107), the light can be realized by changing the propagation path of the light beam, the light beam is transmitted and emitted in the polarization beam splitting prism (102), the light in a p polarization state can be obtained, the light beam is reflected and emitted, the light in an s polarization state can be obtained, the linear polaroid does not need to be manually switched, the light in the required polarization state can be rapidly and accurately obtained, and the detection precision of the sample is further improved.
In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for the device embodiments, since they are substantially similar to the method embodiments, the description is relatively simple, and reference is made to the description of the method embodiments for relevant points.
The foregoing is merely a preferred embodiment of the present application, and the present application has been disclosed in the above description of the preferred embodiment, but is not limited thereto. Any person skilled in the art can make many possible variations and modifications to the technical solution of the present application or modifications to equivalent embodiments using the methods and technical contents disclosed above, without departing from the scope of the technical solution of the present application. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present application still fall within the scope of the technical solution of the present application.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411933027.6A CN119375160A (en) | 2024-12-26 | 2024-12-26 | A sample detection method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411933027.6A CN119375160A (en) | 2024-12-26 | 2024-12-26 | A sample detection method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN119375160A true CN119375160A (en) | 2025-01-28 |
Family
ID=94337981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202411933027.6A Pending CN119375160A (en) | 2024-12-26 | 2024-12-26 | A sample detection method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN119375160A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010045709A (en) * | 1999-11-06 | 2001-06-05 | 윤종용 | Reflection type projector |
| CN1354836A (en) * | 1999-05-10 | 2002-06-19 | S·R·泽德尔迈尔 | Efficient electromagnetic beam projector and its execution system and execution method |
| US20090040490A1 (en) * | 2006-07-12 | 2009-02-12 | Nikon Corporation | Illuminating optical apparatus, exposure apparatus and device manufacturing method |
| US20100182570A1 (en) * | 2007-06-28 | 2010-07-22 | Chota Matsumoto | Ophthalmic examination system |
| CN108051977A (en) * | 2018-01-17 | 2018-05-18 | 深圳市时代华影科技股份有限公司 | Stereoprojection imaging device and stereoscopic image showing system |
| CN209148138U (en) * | 2018-12-19 | 2019-07-23 | 山东神戎电子股份有限公司 | A kind of laser heterodyne interference light path system of low noise |
| CN209147927U (en) * | 2018-12-20 | 2019-07-23 | 上海微电子装备（集团）股份有限公司 | Lighting device and optical detection apparatus |
-
2024
- 2024-12-26 CN CN202411933027.6A patent/CN119375160A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1354836A (en) * | 1999-05-10 | 2002-06-19 | S·R·泽德尔迈尔 | Efficient electromagnetic beam projector and its execution system and execution method |
| KR20010045709A (en) * | 1999-11-06 | 2001-06-05 | 윤종용 | Reflection type projector |
| US20090040490A1 (en) * | 2006-07-12 | 2009-02-12 | Nikon Corporation | Illuminating optical apparatus, exposure apparatus and device manufacturing method |
| US20100182570A1 (en) * | 2007-06-28 | 2010-07-22 | Chota Matsumoto | Ophthalmic examination system |
| CN108051977A (en) * | 2018-01-17 | 2018-05-18 | 深圳市时代华影科技股份有限公司 | Stereoprojection imaging device and stereoscopic image showing system |
| CN209148138U (en) * | 2018-12-19 | 2019-07-23 | 山东神戎电子股份有限公司 | A kind of laser heterodyne interference light path system of low noise |
| CN209147927U (en) * | 2018-12-20 | 2019-07-23 | 上海微电子装备（集团）股份有限公司 | Lighting device and optical detection apparatus |
Non-Patent Citations (1)
| Title |
|---|
| 马冬林: "现代应用光学", 31 August 2020, 华中科技大学出版社, pages: 485 - 488 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2023058479A (en) | Systems for providing illumination in optical metrology | |
| US20120176673A1 (en) | Systems for fluorescence illumination using superimposed polarization states | |
| US20070035821A1 (en) | Microscope | |
| JP3885334B2 (en) | Differential interference microscope | |
| TW202020436A (en) | System and method for multiple mode inspection of a sample | |
| JP2002148557A (en) | Illumination/image forming device in plural spectral ranges and coordinate measuring instrument provided with the illumination/image forming device | |
| JP6534662B2 (en) | Microscope for evanescent illumination and point raster scan illumination | |
| JPS6088353A (en) | Refractive index measuring apparatus for liquid | |
| JP2003270524A (en) | Focus detector and microscope provided therewith, and method for detecting focus | |
| JP6733663B2 (en) | Illumination light transmission device and illumination light transmission method | |
| CN119375160A (en) | A sample detection method and device | |
| JP6945557B2 (en) | Optical scanning microscope and inspection method | |
| US5694217A (en) | Interferometer for testing forms of surface and stress and strain | |
| JPH07323013A (en) | Skin surface observation device | |
| JPH07323014A (en) | Skin surface observation device | |
| WO2023137882A1 (en) | Large field-of-view microscopic imaging method | |
| CN116519595A (en) | A Microscopic Device for Wafer Macroscopic Defect Detection | |
| CN115031629A (en) | Device and method for detecting positioning of cube beam splitter prism before gluing | |
| JPH07134242A (en) | Focus detector | |
| JPH1195112A (en) | Optical microscope | |
| KR102557305B1 (en) | Image capturing device | |
| CN119064275B (en) | Magnetic domain imaging device and method | |
| JPH09281401A (en) | Object inspecting instrument | |
| JP2000199846A (en) | Automatic focusing microscope and focusing device | |
| KR102550959B1 (en) | Image capturing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |