CN119354913A - Mid-infrared sensors for oil quality monitoring - Google Patents
Mid-infrared sensors for oil quality monitoring Download PDFInfo
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- CN119354913A CN119354913A CN202411924502.3A CN202411924502A CN119354913A CN 119354913 A CN119354913 A CN 119354913A CN 202411924502 A CN202411924502 A CN 202411924502A CN 119354913 A CN119354913 A CN 119354913A
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
本申请提供一种用于油液质量监测的中红外传感器，包括光源模块和探测器模块。光源模块包括热辐射光源和第一聚焦反射镜，第一聚焦反射镜设置在热辐射光源的出光方向。探测器模块包括热电堆探测器和第二聚焦反射镜，第二聚焦反射镜设置在热电堆探测器的入光方向。第一聚焦反射镜与第二聚焦反射镜相对设置，第一聚焦反射镜用于将热辐射光源发出的中红外光聚焦形成平行光，第二聚焦反射镜用于将穿过待测油液的平行光聚焦至热电堆探测器的接收面上。本申请的中红外传感器无需制冷系统即可获得较高的信噪比，传感器的横向尺寸被有效控制，便于安装在旁路检测管道的检测段两侧。
The present application provides a mid-infrared sensor for oil quality monitoring, including a light source module and a detector module. The light source module includes a thermal radiation light source and a first focusing reflector, and the first focusing reflector is arranged in the light emitting direction of the thermal radiation light source. The detector module includes a thermopile detector and a second focusing reflector, and the second focusing reflector is arranged in the light incident direction of the thermopile detector. The first focusing reflector and the second focusing reflector are arranged opposite to each other, and the first focusing reflector is used to focus the mid-infrared light emitted by the thermal radiation light source to form parallel light, and the second focusing reflector is used to focus the parallel light passing through the oil to be tested onto the receiving surface of the thermopile detector. The mid-infrared sensor of the present application can obtain a high signal-to-noise ratio without a refrigeration system, and the lateral size of the sensor is effectively controlled, which is convenient for installation on both sides of the detection section of the bypass detection pipeline.
Description
Technical Field
The application relates to the technical field of display, in particular to a middle infrared sensor for oil quality monitoring.
Background
Oil quality monitoring is a key link for guaranteeing safe operation of large-scale rotary mechanical equipment. At present, the mid-infrared spectrum analysis technology has become an important means for monitoring the oil quality because of being capable of detecting various characteristic components in the oil at the same time. When monitoring oil liquid flowing space such as bypass detection pipeline in real time, the traditional mid infrared sensor needs to adopt low-temperature refrigeration quantum detector and high-temperature refrigeration heat radiation light source to obtain enough signal to noise ratio due to weak characteristic absorption peak of mid infrared spectrum. The refrigeration structure not only makes the transverse size of the sensor oversized and is inconvenient to install on the bypass detection pipeline, but also makes the power consumption of the refrigeration system generally more than 10W, so that the sensor is difficult to realize long-term stable operation. In addition, the presence of the refrigeration system also increases the volume and weight of the sensor, complicating the design and fixation of the mounting bracket. Therefore, the realization of non-refrigeration and miniaturization of the mid-infrared sensor on the premise of not reducing the signal-to-noise ratio of spectrum measurement is a technical problem to be solved in the field of oil quality monitoring.
Disclosure of Invention
The application aims to provide a middle infrared sensor for monitoring oil quality, which aims to solve the technical problem that the traditional middle infrared sensor is difficult to monitor the oil quality on line in real time in a bypass detection pipeline.
The embodiment of the application provides a mid-infrared sensor for monitoring oil quality, which comprises a light source module, a detector module and a second focusing reflector, wherein the light source module comprises a thermal radiation light source and a first focusing reflector, the first focusing reflector is arranged in the light emitting direction of the thermal radiation light source, the detector module comprises a thermopile detector and the second focusing reflector is arranged in the light entering direction of the thermopile detector, the first focusing reflector is arranged opposite to the second focusing reflector, the first focusing reflector is used for focusing mid-infrared light emitted by the thermal radiation light source to form parallel light, and the second focusing reflector is used for focusing the parallel light passing through oil to be tested on the receiving surface of the thermopile detector.
In the above-mentioned mid-infrared sensor, the heat radiation light source includes unsettled film, supporting substrate and a plurality of support arm, the cavity has been seted up on the supporting substrate, unsettled film passes through a plurality of support arms unsettled setting is in cavity top, a plurality of support arms are followed the circumference of cavity evenly distributes.
In the above-mentioned mid-infrared sensor, the unsettled film includes first insulating layer, heating resistor layer and second insulating layer, the heating resistor layer presss from both sides and establishes between first insulating layer with the second insulating layer, first insulating layer with the edge of second insulating layer is passed through a plurality of support arms with support base connection.
In the above mid-infrared sensor, the heating resistor layer includes a main body portion and a lead portion, the main body portion is arranged in a central region of the suspended film in a serpentine shape, the lead portion extends to the support substrate along the plurality of support arms, and an electrode pad electrically connected with the lead portion is disposed on the support substrate.
In the above mid-infrared sensor, the thermopile detector comprises a substrate, a thermocouple array and an absorption layer, wherein a suspension area is arranged on the substrate, the thermocouple array is arranged in the suspension area, and the absorption layer covers the hot end of the thermocouple array.
In the above mid-infrared sensor, the thermocouple array includes a plurality of thermocouple units, each of the thermocouple units includes a first thermoelectric arm made of a first thermoelectric material and a second thermoelectric arm made of a second thermoelectric material, one end portions of the first thermoelectric arm and the second thermoelectric arm are connected to form the hot end, and the other end portions of the first thermoelectric arm and the second thermoelectric arm extend out of the overhanging region and are electrically connected to an extraction electrode provided on the substrate, respectively, to form a cold end.
In the above-mentioned well infrared sensor, first focusing speculum with the second focusing speculum is off-axis parabolic mirror, off-axis parabolic mirror includes base and reflecting surface, the reflecting surface sets up on the base, be equipped with on the base and be used for adjusting screw and lock nut of reflecting surface angle.
In the above-mentioned middle infrared sensor, still include slit diaphragm, slit diaphragm includes the diaphragm base plate and sets up the slit on the diaphragm base plate, the both sides of diaphragm base plate are equipped with and are used for fixing the installation department of diaphragm base plate, the installation department with middle infrared sensor's casing can dismantle the connection.
In the above-mentioned mid-infrared sensor, further comprising a narrow-band optical filter comprising a substrate layer and a multilayer dielectric film disposed on the substrate layer, the multilayer dielectric film comprising a high refractive index layer and a low refractive index layer alternately disposed, the narrow-band optical filter being mounted in the mid-infrared sensor through a fixing frame disposed at a periphery thereof.
In the above mid-infrared sensor, the emission surface center of the thermal radiation light source is located at the focal point of the first focusing mirror, the receiving surface center of the thermopile detector is located at the focal point of the second focusing mirror, and the optical axis of the first focusing mirror is collinear with the optical axis of the second focusing mirror.
The middle infrared sensor provided by the application realizes the non-refrigeration of the sensor by adopting the combination of the thermal radiation light source and the thermopile detector. The emission area of the heat radiation light source is smaller than 2mm multiplied by 2mm, the power consumption of the heat radiation light source is reduced by reducing the emission area, and meanwhile, the heat capacity of the heat radiation light source is correspondingly reduced due to the small emission area, so that the heat radiation light source can realize rapid temperature rise and stable work under lower power consumption. The receiving area of the thermopile detector is smaller than 1mm multiplied by 1mm, the reduction of the receiving area reduces the heat capacity of the thermopile detector, and the response speed and the sensitivity of the thermopile detector to weak middle infrared signals are improved. The first focusing reflector focuses the mid-infrared light emitted by the thermal radiation light source into parallel light, ensures that the mid-infrared light keeps stable optical path length when passing through the oil to be measured, improves the accuracy of spectrum measurement, and the second focusing reflector focuses the parallel light passing through the oil to be measured onto a receiving surface of the thermopile detector, improves the luminous flux reaching the detector through light beam convergence, and further improves the signal to noise ratio. By adopting the technical scheme, the middle infrared sensor can obtain higher signal to noise ratio without a refrigerating system, the transverse size of the sensor is controlled within 25mm, and the sensor can be installed in a detection hole of a standard guide bearing to perform on-line real-time monitoring of oil quality. In addition, the total power consumption of the sensor is obviously reduced due to the elimination of the refrigerating system, and the long-term stable operation of the sensor is facilitated.
The middle infrared sensor provided by the application realizes the non-refrigeration of the sensor by adopting the combination of the thermal radiation light source and the thermopile detector. The first focusing reflector focuses the mid-infrared light emitted by the thermal radiation light source into parallel light, so that the mid-infrared light can keep stable optical path length when passing through the oil to be detected in the bypass detection pipeline, the accuracy of spectrum measurement is improved, the second focusing reflector focuses the parallel light passing through the oil to be detected onto the receiving surface of the thermopile detector, and the luminous flux reaching the detector is improved through light beam convergence, so that the signal to noise ratio is improved. By adopting the technical scheme, the middle infrared sensor can obtain higher signal to noise ratio without a refrigerating system, and the transverse size of the sensor is effectively controlled and is convenient to install at two sides of the detection section of the bypass detection pipeline. In addition, the refrigerating system is omitted, so that the total power consumption of the sensor is obviously reduced, the long-term stable operation of the sensor is facilitated, and meanwhile, the design and the fixing mode of the mounting bracket are simplified.
Drawings
Fig. 1 is a schematic diagram of a mid-infrared sensor for oil quality monitoring according to an embodiment of the present application.
Fig. 2 is a schematic view of a heat radiation light source in a light source module in the mid-infrared sensor for oil quality monitoring shown in fig. 1.
Fig. 3 is a schematic view of a suspended film in the heat radiation light source shown in fig. 2.
Detailed Description
The following describes specific embodiments of the present application in detail with reference to the drawings.
The terms "first," "second," and the like, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The term "plurality" and similar words mean two or more, unless specifically defined otherwise.
The middle infrared sensor can be applied to an oil quality online monitoring system. The system comprises a main oil way pipeline, a bypass detection pipeline, an oil circulating pump and a control unit. The main oil way pipeline is used as a main flow channel of oil, the bypass detection pipeline is connected with the main oil way pipeline in parallel, and the bypass detection pipeline is provided with an oil inlet valve and an oil outlet valve for controlling the oil flow.
The detection section of the bypass detection pipeline is provided with a pair of opposite infrared transparent windows, and the infrared transparent windows are made of calcium fluoride materials and used for allowing middle infrared light to penetrate. The infrared transparent window is in sealing connection with the bypass detection pipeline through a sealing ring, and the sealing ring is made of oil-resistant rubber materials. The outside of infrared transparent window is equipped with the protection baffle, the protection baffle is opened when detecting, closes when not detecting for the protection window is prevented pollution and is damaged.
The middle infrared sensors are mounted on two sides of the detection section of the bypass detection pipeline 101 and are fixed through mounting brackets. The installing support includes fixing base and adjustment mechanism, the fixing base with bypass detection pipeline 101 welded connection, adjustment mechanism is used for adjusting infrared sensor's spatial position and angle.
The oil circulation pump is arranged on the bypass detection pipeline 101 and is used for driving oil to flow in the bypass detection pipeline 101. The oil circulating pump adopts a magnetic pump, does not need mechanical sealing, and can prevent oil leakage. The rotating speed of the oil circulating pump is adjustable and is used for controlling the oil flow speed, so that the oil flow is stable during detection. And the inlet and the outlet of the oil circulating pump are provided with damping hoses for isolating the vibration of the pump.
The control unit comprises a main controller, a data acquisition module and a communication module. The main controller is used for controlling the detection process, including controlling the start and stop of the oil circulating pump, controlling the switch of the oil inlet and outlet valve, controlling the switch of the protective baffle, etc. The data acquisition module is used for acquiring the output signal of the thermopile detector 2021, and performing signal processing and analysis. The communication module is used for transmitting the detection result to the upper computer.
The bypass detection pipeline 101 is also provided with a temperature sensor and a pressure sensor for monitoring the temperature and the pressure of the oil. Output signals of the temperature sensor and the pressure sensor are also transmitted to the data acquisition module.
And filters are arranged at the oil inlet and the oil outlet of the bypass detection pipeline 101 and are used for filtering impurities in oil. The filter adopts a multi-stage filtering structure, and comprises a coarse filter screen and a fine filter core. The shell of the filter is provided with a differential pressure indicator for indicating the blocking degree of the filter element. And a drain valve is arranged at the bottom of the filter and is used for periodically discharging the collected impurities.
The pipeline connection of the whole system adopts a flange connection mode. And the flanges are sealed by adopting metal winding gaskets. The key parts of the system are provided with a pressure gauge and a temperature gauge. The bottom of the system is provided with an oil collecting disc for collecting oil which can leak, so as to prevent environmental pollution.
As shown in fig. 1,2 and 3, the embodiment of the application provides a mid-infrared sensor for monitoring oil quality, which comprises a light source module 201 and a detector module 202, wherein the light source module 201 comprises a thermal radiation light source 2011 and a first focusing reflector 2012, the emission area of the thermal radiation light source 2011 is smaller than 2mm×2mm, the first focusing reflector 2012 is arranged in the light emitting direction of the thermal radiation light source 2011, the detector module 202 comprises a thermopile detector 2021 and a second focusing reflector 2022, the receiving area of the thermopile detector 2021 is smaller than 1mm×1mm, the second focusing reflector 2022 is arranged in the light entering direction of the thermopile detector 2021, the first focusing reflector 2012 is opposite to the second focusing reflector 2022, the first focusing reflector 2012 is used for focusing mid-infrared light emitted by the thermal radiation light source 2011 into parallel light, the second focusing reflector 2022 is used for focusing the parallel light passing through the parallel light detector 2021 to the receiving surface of the thermopile detector 2021, and the transverse dimension of the thermopile detector 25mm is smaller.
The heat radiation light source 2011 is prepared by adopting a micro-electromechanical system process, and the heat radiation light source 2011 is a micro-MEMS electromechanical integrated infrared light source. The heat radiation light source 2011 includes a silicon substrate 20116, a suspended film (heat generating film) 20113, a support substrate 20111, a plurality of support arms 20112, and a heating wire 20114 disposed on the heat generating film. The heating wire 20114 is in a reverse fold shape, and is arranged on the heating film and used for generating heat radiation. A cavity is formed between the heating film and the silicon substrate 20116 for realizing thermal isolation. The supporting base 20111 is provided with a hollow cavity 20115, the heating film is suspended above the hollow cavity 20115 through the plurality of supporting arms 20112, and the plurality of supporting arms 20112 are uniformly distributed along the circumferential direction of the hollow cavity 20115.
The supporting substrate 20111 is made of monocrystalline silicon material, the hollow cavity 20115 is formed by an etching process, the side wall of the hollow cavity 20115 is in a step shape, the step-shaped side wall comprises an upper vertical section and a lower inclined section, the depth of the upper vertical section is 5-8 micrometers, and the included angle between the lower inclined section and the horizontal plane is 20-70 degrees. The number of the plurality of support arms 20112 is four, the four support arms 20112 are arranged in a crisscross manner, and each support arm 20112 has a length of 100-200 micrometers and a width of 20-40 micrometers. The upper surface of the supporting arm 20112 is provided with a metal wiring layer for laying leads, the metal wiring layer is made of aluminum or gold, and the thickness of the metal wiring layer is 0.5-1 micrometer.
The upper surface of the support base 20111 is provided with a positioning boss, the positioning boss is disposed around the hollow cavity 20115, and the positioning boss is configured to cooperate with the support structure of the first focusing reflector 2012. The positioning boss comprises an inner ring table and an outer ring table, the inner ring table is tightly attached to the edge of the hollow cavity 20115, the outer ring table is located at the outer side of the inner ring table, an annular groove is formed between the inner ring table and the outer ring table, and the annular groove is used for accommodating the bottom of the first focusing reflector 2012 supporting structure, so that the accurate positioning of the first focusing reflector 2012 is achieved. The upper surface of the inner ring table is provided with a positioning pin hole, and the positioning pin hole is matched with a positioning pin on a supporting structure of the first focusing reflector 2012, so as to prevent the first focusing reflector 2012 from rotating in a horizontal plane. The upper surface of the outer ring stage is provided with a plurality of threaded holes for fixing the support structure of the first focusing mirror 2012.
The bottom of cavity 20115 is equipped with the radiating groove, the radiating groove includes main channel and a plurality of branch channel, main channel is followed cavity 20115's central line sets up, a plurality of branch channels follow main channel extends all around. The inner walls of the main channel and the branch channels are provided with micro grooves, and the micro grooves are used for increasing the heat dissipation area. The two ends of the main channel are provided with an air inlet and an air outlet, and the air inlet and the air outlet are respectively communicated with the external environment. The end of the branch channel is provided with a baffle plate, and the baffle plate is used for guiding the flowing direction of cooling air flow, so that the cooling air flow can fully contact the inner wall of the heat dissipation groove, and the heat dissipation efficiency is improved. The lower surface of the supporting substrate 20111 is provided with radiating fins, and the radiating fins are radially distributed. The heat radiation fins include main fins extending radially outward from a center, and sub fins disposed between adjacent main fins. And micropore arrays are arranged on the surfaces of the main fins and the auxiliary fins and are used for forming turbulence so as to enhance the convection heat exchange effect. The height of the main fin sheet gradually decreases from the center to the outside, and the main fin sheet is used for forming an airflow channel and guiding heat to spread outwards. The upper surface of the auxiliary fin is provided with an inclined surface which is used for guiding the air flow direction and preventing the formation of an air flow dead zone.
The surfaces of the plurality of support arms 20112 are provided with stress release structures, and the stress release structures comprise a plurality of serpentine bent parts, and the serpentine bent parts are used for compensating thermal stress. The snakelike kink includes main kink and secondary kink, main kink sets up along the length direction of support arm 20112, secondary kink with main kink is perpendicular. The main bending section and the corner of the secondary bending section are provided with transition arcs, and the transition arcs are used for reducing stress concentration. The surface of snakelike kink is equipped with stress buffer layer, stress buffer layer adopts elastic material to make for further absorption thermal stress.
The suspended film 20113 includes a first insulating layer 201131, a heating resistor layer 201132, and a second insulating layer 201133, the heating resistor layer 201132 is sandwiched between the first insulating layer 201131 and the second insulating layer 201133, and edges of the first insulating layer 201131 and the second insulating layer 201133 are connected to the support substrate 20111 through the plurality of support arms 20112.
The first insulating layer 201131 and the second insulating layer 201133 are made of silicon nitride materials, and the thicknesses of the first insulating layer 201131 and the second insulating layer 201133 are 200-300 nanometers. The surface roughness of the first insulating layer 201131 is less than 10 nanometers and the surface roughness of the second insulating layer 201133 is less than 5 nanometers. An adhesion layer is arranged between the first insulating layer 201131 and the heating resistor layer 201132, the adhesion layer is made of titanium dioxide material, and the thickness of the adhesion layer is 10-20 nanometers. The upper surface of the second insulating layer 201133 is provided with an anti-reflection layer, and the anti-reflection layer is composed of a plurality of dielectric films and is used for improving the emissivity of the thermal radiation light source 2011 in a 3-5 micron wave band.
The upper surface of the first insulating layer 201131 is provided with a reflective protection layer for preventing heat generated by the heating resistor layer 201132 from being conducted downward. The reflective protection layer comprises a reflective sub-layer and a heat insulation sub-layer, wherein the reflective sub-layer is positioned on the upper layer, and the heat insulation sub-layer is positioned on the lower layer. The reflective sub-layer is made of a high reflectivity material and is used for reflecting heat radiation back to the heating resistor layer 201132, so that the heat efficiency is improved. The heat insulation sub-layer is made of a porous material, and air holes in the porous material are used for blocking heat conduction. The edge area of the reflection protection layer is provided with a transition layer, and the transition layer is used for reducing thermal stress.
The upper surface of second insulating layer 201133 is equipped with the anti-reflection structure, the anti-reflection structure includes periodic micro-nano structure array, periodic micro-nano structure array is used for improving the emission efficiency of mid infrared band. The periodic micro-nano structure array comprises a main array area and a transition area, wherein the main array area is positioned at the center position, and the transition area is positioned at the edge position. The main array region includes regularly arranged tapered protrusions for achieving optical impedance matching. The transition region includes a graded microstructure for reducing edge diffraction effects.
A stress buffer layer is disposed between the first insulating layer 201131 and the second insulating layer 201133, and the stress buffer layer is used for reducing stress caused by mismatch of thermal expansion coefficients. The stress buffering layer comprises an elastic buffering layer and a stress dispersing layer, wherein the elastic buffering layer is made of a low elastic modulus material and is used for absorbing deformation energy, and the stress dispersing layer is made of a multi-layer composite material and is used for dispersing stress concentration. The edge of the stress buffer layer is provided with an elastic isolation belt, and the elastic isolation belt is used for preventing stress from being transferred to the supporting arm 20112.
The edge area of the suspended film 20113 is provided with a reinforcing rib, and the reinforcing rib is used for improving the mechanical strength of the suspended film 20113.
The reinforcing ribs comprise annular main ribs and radial auxiliary ribs, the annular main ribs are arranged along the edge of the suspended film 20113, and the radial auxiliary ribs extend inwards from the annular main ribs. The cross section of the annular main rib is I-shaped and is used for simultaneously providing supporting force in the vertical direction and the horizontal direction. The height of the radial auxiliary ribs gradually decreases from outside to inside, so as to realize uniform distribution of stress. The junction of strengthening rib with unsettled film 20113 is equipped with the transition district, the transition district is used for reducing stress concentration.
The heating resistor is made of platinum, tungsten or polysilicon, is arranged on the suspended film 20113 in a serpentine shape, has a line width of 1-10 microns, and has a spacing of 1-10 microns between adjacent wires.
When the heating resistor is made of a platinum material, the thickness of the heating resistor is 100-150 nanometers, the square resistance of the heating resistor is 2-5 ohms/square, when the heating resistor is made of a tungsten material, the thickness of the heating resistor is 80-120 nanometers, the square resistance of the heating resistor is 1-3 ohms/square, when the heating resistor is made of a polysilicon material, the thickness of the heating resistor is 300-500 nanometers, the polysilicon is doped to form an N-type or P-type semiconductor through an ion implantation process, and the square resistance of the heating resistor is 50-100 ohms/square. The total resistance value of the heating resistor is 50-200 ohms.
The serpentine wiring of the heating resistor comprises a central heating area and an edge compensation area, wherein the linear density of the central heating area is greater than that of the edge compensation area, and the serpentine wiring is used for realizing uniform distribution of a temperature field. The central heating area comprises a main heating area and an auxiliary heating area, the main heating area is located at the central position, and the auxiliary heating area is arranged around the main heating area. The main heating belt adopts a double-helix wiring mode, and the inner helix and the outer helix are alternately arranged for ensuring the uniform distribution of heat in the central area. The auxiliary heating belt adopts a comb-shaped wiring mode, and the distance between adjacent wires is gradually increased from inside to outside and is used for forming a temperature gradient decreasing from inside to outside.
The edge compensation zone includes an inner compensation zone adjacent the central heating zone and an outer compensation zone located outboard of the inner compensation zone. The inner compensation belt adopts a gradual density wiring mode, and the width and the interval of the wires are set according to the temperature field distribution and are used for compensating the edge heat dissipation effect. The outer compensation band adopts a serpentine wiring mode and is used for realizing smooth transition of a temperature field.
The corner of heating resistor is equipped with circular arc transition portion, circular arc transition portion is used for avoiding the electric current to concentrate, circular arc transition portion includes interior circular arc and outer circular arc, interior circular arc with outer circular arc is used for making current density distribution even. The two ends of the arc transition part are provided with gradual transition sections, and the width of each gradual transition section is gradually changed along the current direction and is used for reducing current distortion. And the surface of the arc transition part is also provided with a stress release groove for relieving thermal stress concentration.
The surface of heating resistor layer 201132 is equipped with passivation protection layer, passivation protection layer is used for preventing heating resistor oxidation under high temperature, passivation protection layer includes inlayer passivation film and outer passivation film. The inner passivation film is directly covered on the surface of the heating resistor and is made of compact materials and used for blocking oxygen diffusion. The outer passivation film is covered on the inner passivation film and is made of high-temperature resistant materials and used for providing mechanical protection. The edge of the passivation layer is provided with a step-shaped transition part for improving the adhesiveness of the passivation layer.
The heating resistor further comprises a temperature feedback resistor, and the temperature feedback resistor and the control circuit form a closed-loop temperature control system. The temperature feedback resistor is arranged around the central heating area and comprises a main temperature measuring resistor and a standby temperature measuring resistor. The main temperature measuring resistor adopts a four-terminal wiring mode and is used for improving temperature measuring precision. The standby temperature measuring resistor is automatically started when the main temperature measuring resistor fails, so that the reliability of the system is improved. The temperature feedback resistor is connected with the control circuit through multiple shielding wires and used for inhibiting electromagnetic interference.
The heating resistor layer 201132 includes a main body portion and a lead portion, the main body portion is arranged in a serpentine manner in a central region of the suspended film 20113, the lead portion extends along the plurality of support arms 20112 to the support substrate 20111, and an electrode pad electrically connected to the lead portion is disposed on the support substrate 20111.
The main body part comprises a plurality of heating units connected in parallel, and each heating unit comprises a heating sub-circuit and a temperature measuring sub-circuit. The heating sub-circuit adopts a symmetrical wiring mode and is used for ensuring uniform current distribution. The temperature measuring sub-circuit adopts a distributed layout and is used for realizing accurate monitoring of a temperature field, and each heating unit can be independently controlled and is used for realizing zonal heating.
The lead portion includes a power lead and a control lead for transmitting a temperature feedback signal. The power supply lead adopts a multi-layer parallel structure for improving the current carrying capacity. The control lead adopts a differential transmission mode and is used for improving the anti-interference capability of signal transmission. The lead portion is further provided with an electromagnetic shielding layer separating the power supply lead and the control lead for preventing mutual interference.
The electrode pad adopts a multi-layer metal structure and comprises an adhesion layer, a diffusion barrier layer and a conductive layer, wherein the adhesion layer is used for improving the bonding strength of the pad, and the diffusion barrier layer is used for preventing metal interdiffusion. The adhesive layer is made of a metal material having high surface energy for improving the bonding strength with the substrate. The diffusion barrier layer is made of a metal material with a compact lattice structure and is used for preventing atoms between adjacent metal layers from diffusing. The conductive layer is made of a metal material with high conductivity, and an anti-oxidation protective film is arranged on the surface of the conductive layer. And a stress buffer ring is arranged around the electrode pad and used for absorbing stress generated in the welding process.
The snake-shaped running line of the main body part comprises a plurality of parallel sections and a plurality of turning sections, the lengths of the parallel sections are 100-200 microns, the turning sections adopt arc transition, and the radius of the arc is 5-10 microns. The lead portion includes a positive electrode lead and a negative electrode lead, which extend along two opposite support arms 20112, respectively. The pad area is arranged on the supporting substrate 20111, a plurality of layers of metal are arranged in the pad area, a titanium layer, a nickel layer and a gold layer are sequentially arranged from bottom to top, the thickness of the titanium layer is 50-100 nanometers, the thickness of the nickel layer is 100-200 nanometers, and the thickness of the gold layer is 200-300 nanometers.
The thermopile detector 2021 includes a substrate on which a suspended region is provided, a thermocouple array disposed within the suspended region, and an absorber layer covering a hot end of the thermocouple array.
The thermocouple array comprises a plurality of thermocouple units, each thermocouple unit comprises a hot end and a cold end, the hot end is located in the central area of the thermocouple unit, the cold end is located in the edge area of the thermocouple unit, each thermocouple unit comprises a first thermoelectric arm and a second thermoelectric arm, the first thermoelectric arm is made of a first thermoelectric material, the second thermoelectric arm is made of a second thermoelectric material, one end parts of the first thermoelectric arm and the second thermoelectric arm are connected to form the hot end, and the other end parts of the first thermoelectric arm and the second thermoelectric arm extend out of the suspension area respectively and are electrically connected with a lead-out electrode arranged on the substrate to form the cold end.
The substrate is made of monocrystalline silicon material, the suspended area is formed through a wet etching process, and the depth of the suspended area is 100-200 microns. The thermocouple array comprises 8×8 thermocouple units, and the interval between adjacent thermocouple units is 50-100 micrometers. The absorbing layer is made of hafnium nitride material, the thickness of the absorbing layer is 100-200 nanometers, and the absorptivity of the absorbing layer in the 3-5 micrometer wave band is more than 90%.
The thermocouple array is made of P-type and N-type semiconductor materials, and the P-type and N-type semiconductor materials are connected in series through a metal interconnection layer. The P-type semiconductor material is made of polycrystalline silicon material doped with boron, the N-type semiconductor material is made of polycrystalline silicon material doped with phosphorus, and the thermoelectric conversion efficiency is maximized by optimizing the doping concentration. The metal interconnection layer comprises a lower interconnection layer and an upper interconnection layer, wherein the lower interconnection layer is used for connecting the cold end of the thermocouple, and the upper interconnection layer is used for connecting the hot end of the thermocouple. An electrical insulation layer is provided between the lower interconnect layer and the upper interconnect layer for preventing current leakage. And a passivation film is arranged on the surface of the metal interconnection layer and is used for preventing metal oxidation and corrosion.
The surface of the absorption layer is provided with a microcavity structure array which is used for enhancing the absorption of the mid-infrared light. The microcavity structure array includes a main absorption region and a transition region. The main absorption region is provided with a plurality of pyramid-shaped microcavities, and the inner wall of each microcavity is provided with a plurality of dielectric films for enhancing the absorption of light with specific wavelength. The transition region is disposed around the primary absorption region and is provided with graded microcavities for reducing edge reflection. And a plasma resonance layer is further arranged on the surface of the microcavity structure array and used for further enhancing the light absorption efficiency. The bottom of the microcavity structure is provided with a reflecting layer for secondarily absorbing light which is not absorbed.
The signal conditioning circuit is integrated on the substrate, the output end of the thermocouple array is connected with the signal processing circuit arranged on the substrate, and the signal conditioning circuit comprises a preamplifier and an analog filter. The cold end of the thermocouple array is in contact with a heat dissipation structure arranged on the substrate, and the heat dissipation structure is used for maintaining the temperature stability of the cold end.
The heat dissipation structure comprises a metal heat conduction layer, a heat dissipation substrate and a temperature stabilizer. The metal heat conduction layer is made of a material with high heat conduction coefficient and is used for rapidly conducting heat. The heat dissipation substrate is provided with a micro-channel cooling system which comprises a liquid inlet, a liquid outlet and a serpentine cooling channel. The temperature stabilizer adopts a semiconductor refrigerating sheet, is matched with a temperature feedback control circuit and is used for controlling the temperature of the cold end.
The first focusing reflector 2012 and the second focusing reflector 2022 are off-axis parabolic reflectors, the focal length of the off-axis parabolic reflectors is 5-15mm, the distance from the axis is 3-8mm, the curvature radius of the reflecting surface is 10-30mm, the off-axis parabolic reflectors comprise a base and a reflecting surface, the reflecting surface is arranged on the base, and an adjusting screw and a locking nut for adjusting the angle of the reflecting surface are arranged on the base.
The first focusing mirror 2012 and the second focusing mirror 2022 each include a substrate made of a low thermal expansion coefficient material (e.g., polished glass) and a reflective layer disposed on a curved surface of the substrate, the reflective layer being a metal layer sputtered on a surface of the substrate. The surface roughness of the substrate is smaller than lambda/20 (lambda is the working wavelength), and the surface shape accuracy of the substrate is better than lambda/10. The reflecting layer is made of gold material, the thickness of the reflecting layer is 200-300 nanometers, and the reflectivity of the reflecting layer at the wave band of 3-5 micrometers is more than 98 percent. The focal lengths of the first focusing mirror 2012 and the second focusing mirror 2022 are each 10-15 mm, and the effective apertures of the first focusing mirror 2012 and the second focusing mirror 2022 are each 8-12 mm. The first focusing mirror 2012 and the second focusing mirror 2022 are fixed by a precision optical adjustment frame having a three-dimensional angle adjustment function.
The surface of the reflecting layer is provided with a protective film, and the protective film is used for preventing the reflecting layer from being oxidized. The protective film includes an oxidation preventing layer, a stress buffering layer, and an anti-corrosion layer. The oxidation prevention layer is made of an inert metal material and is used for blocking oxygen. The stress buffer layer is made of elastic materials and is used for buffering thermal stress. The anti-corrosion layer is made of chemical resistant materials and is used for preventing environmental corrosion. And an edge sealing belt is arranged in the edge area of the protective film and used for preventing the protective film from peeling.
The back of the substrate is provided with honeycomb-shaped supporting ribs. The support ribs comprise a main support grid and a secondary support grid. The main support grids are distributed in a hexagonal shape and are used for providing main support force. The secondary support grid is positioned within the primary support grid for providing localized reinforcement. And the joint of the supporting ribs is provided with a chamfer for reducing stress concentration.
The first focusing mirror 2012 and the second focusing mirror 2022 are mounted by a flexible support structure for compensating for thermal and mechanical stresses. The supporting structure of the reflector is provided with a position mark, and the position mark is used for assisting in aligning the light path. The mirror assembly also includes a dust cover for protecting the reflective surface from contamination.
The flexible supporting structure comprises an elastic supporting arm, a shock pad and a fine adjustment mechanism. The resilient support arm includes a leaf spring. The shock pad adopts a composite damping material for absorbing vibration. The mounting seat of the flexible supporting structure is provided with a self-locking device for locking the adjusted position.
The adjusting screws are arranged in three mutually perpendicular directions of the base and are used for realizing three-dimensional angle adjustment of the first focusing reflector 2012 and the second focusing reflector 2022, and an elastic gasket is arranged between each adjusting screw in each direction and the base and is used for eliminating a mechanical gap. The lock nut is matched with the adjusting screw and used for fixing the adjusted angles of the first focusing reflector 2012 and the second focusing reflector 2022, and the inner surface of the lock nut is provided with a lock washer. A limiting boss is further disposed on the base, and is used for limiting an adjustment range of the first focusing mirror 2012 and the second focusing mirror 2022, so as to prevent the deviation of the optical path caused by excessive adjustment. And a thermal compensation gasket is arranged between the base and the reflecting mirror and is used for compensating the position deviation caused by thermal expansion.
The middle infrared sensor further comprises a slit diaphragm, the slit diaphragm comprises a diaphragm substrate and a slit arranged on the diaphragm substrate, mounting parts used for fixing the diaphragm substrate are arranged on two sides of the diaphragm substrate, and the mounting parts are detachably connected with a shell of the middle infrared sensor. The slit diaphragm is disposed in the optical path between the first focusing mirror 2012 and the second focusing mirror 2022, and has an opening width of 0.1 to 0.5mm and an opening height of 0.5 to 2mm.
The diaphragm substrate is made of stainless steel materials, and the surface of the diaphragm substrate is subjected to gold plating treatment for improving infrared reflectivity. The slit is formed by a laser cutting process, and the edges of the slit are chamfered for reducing diffraction effects. The installation department includes locating pin and elasticity buckle, the locating pin is used for guaranteeing the mounted position precision of diaphragm, elasticity buckle is used for realizing the quick assembly disassembly of diaphragm. And an anti-rotation step is further arranged on the diaphragm substrate and is matched with the shell of the middle infrared sensor. The surface of the diaphragm substrate is also provided with a marking part, and the marking part is used for indicating the installation direction of the diaphragm. And the two ends of the slit are provided with gradual transition parts which are used for inhibiting the diffraction effect of light.
The mid-infrared sensor further comprises a plurality of narrow-band optical filters, each narrow-band optical filter comprises a substrate layer and a multi-layer dielectric film arranged on the substrate layer, each multi-layer dielectric film comprises a high refractive index layer and a low refractive index layer which are alternately arranged, and each narrow-band optical filter is arranged in the mid-infrared sensor through a fixed frame arranged on the periphery of each narrow-band optical filter. The narrow-band optical filter is arranged between the second focusing reflector 2022 and the thermopile detector 2021, and the center wavelength of the narrow-band optical filter is 2800-3200nm, and the full width at half maximum is 50-200nm.
The middle infrared sensor also comprises an optical filter wheel and a driving motor. The plurality of narrow-band optical filters are uniformly arranged along the circumferential direction of the filter wheel, each filter corresponds to a specific wavelength, and the center wavelengths of the plurality of filters are respectively positioned at different positions within 3-5 mu m wave bands. The driving motor is used for driving the optical filter wheel to rotate, so that the optical filters sequentially enter the optical path.
The optical filter wheel comprises a wheel disc body, a plurality of light through holes and a plurality of fixing rings. The wheel disc body is made of aluminum alloy materials and has the characteristics of light weight and good heat dissipation. The multiple light-passing holes are uniformly formed along the circumferential direction of the wheel disc body, and the inner wall of each light-passing hole is provided with a positioning step. The fixing rings are respectively arranged in the light passing holes, matched with the positioning steps and used for fixing the optical filters. The fixing ring is made of elastic materials and can compensate thermal stress.
The substrate layer is made of potassium bromide material, and the surface of the substrate layer is polished. The high refractive index layer is made of zinc sulfide material, and the low refractive index layer is made of calcium fluoride material. The multi-layer dielectric film is prepared by an electron beam evaporation process, and the number of layers of the multi-layer dielectric film is more than fifty layers. The fixing frame is made of invar alloy and is used for reducing stress caused by temperature change. An elastic sealing ring is arranged between the fixed frame and the substrate layer and used for preventing oil from penetrating. The fixed frame is provided with an anti-rotation positioning groove which is matched with the shell of the middle infrared sensor. The surface of the narrow-band optical filter is also provided with an anti-reflection film, and the anti-reflection film is used for reducing surface reflection loss.
The emission surface center of the thermal radiation source 2011 is located at the focal point of the first focusing mirror 2012, the receiving surface center of the thermopile detector 2021 is located at the focal point of the second focusing mirror 2022, and the optical axis of the first focusing mirror 2012 is collinear with the optical axis of the second focusing mirror 2022. The distance between the thermal radiation source 2011 and the first focusing mirror 2012 is equal to the focal length of the first focusing mirror 2012, and the distance between the thermopile detector 2021 and the second focusing mirror 2022 is equal to the focal length of the second focusing mirror 2022.
The heat radiation light source 2011 is installed on a position adjusting table, and the precise position adjusting table comprises a three-dimensional moving platform and an angle adjusting seat. The three-dimensional moving platform is used for adjusting the spatial position of the heat radiation light source 2011, and the angle adjusting seat is used for adjusting the inclination angle of the heat radiation light source 2011. The thermopile detector 2021 is mounted on a flexible support for compensating thermal stresses. An auxiliary laser and a four-quadrant detector are arranged between the first focusing mirror 2012 and the second focusing mirror 2022, and are used for monitoring the light path deviation in real time.
The middle infrared sensor further comprises a protection component, wherein the protection component comprises a dust cover, an oil cover and a shock pad. The dust cover is disposed between the heat radiation light source 2011 and the first focusing mirror 2012 to prevent dust from entering the optical path. The oil shield is disposed in the light path region between the first focusing mirror 2012 and the second focusing mirror 2022 to prevent oil from splashing. The vibration-proof pad is arranged at the bottom of the middle infrared sensor and is used for reducing the influence of external vibration. The dustproof cover and the oil-proof cover are made of infrared transparent materials, and an antireflection film is arranged on the surfaces of the dustproof cover and the oil-proof cover. The oil shield comprises an upper cover plate and a lower cover plate which are connected through a sealing strip to form a closed space. The upper cover plate and the lower cover plate are both made of infrared transparent materials, and calcium fluoride crystals are selected as the materials. The sealing strip is made of fluororubber material. The edge of the oil shield is provided with an oil collecting groove and an oil drain hole for discharging splashed oil.
The vibration-proof pad is made of a plurality of layers of composite materials and comprises a metal elastic layer and a damping layer, wherein the metal elastic layer is used for supporting the sensor body, and the damping layer is used for absorbing vibration energy.
The shock pad adopts a multi-layer composite structure, and comprises an upper covering layer, a metal elastic layer, a damping layer and a lower supporting layer from top to bottom. The upper cover layer is made of wear-resistant materials, so that surface damage can be prevented. The metal elastic layer adopts a corrugated plate design, and has good elastic deformation capability. The damping layer is made of a viscoelastic material and can effectively absorb vibration energy. The lower supporting layer is made of an anti-slip material, so that friction force between the lower supporting layer and an installation plane can be increased.
The three-dimensional moving platform comprises an X-direction moving unit, a Y-direction moving unit and a Z-direction moving unit, and each moving unit comprises a linear guide rail and a micro-motion adjusting mechanism. The linear guide rail comprises a guide rail seat and a sliding part, wherein the guide rail seat is fixed on the bottom plate, and the sliding part is matched with the guide rail seat through a dovetail groove. The upper surface and the lower surface of the guide rail seat are both provided with V-shaped sliding grooves. And sliding blocks matched with the V-shaped sliding grooves are arranged on two sides of the sliding part, and are made of wear-resistant alloy materials. And a dustproof sealing belt is arranged between the guide rail seat and the sliding part, and two ends of the dustproof sealing belt are fixed on the guide rail seat.
The micro-motion adjusting mechanism comprises a driving wheel, a driven wheel, a transmission shaft and a speed reducer. The driving wheel is coaxially connected with the adjusting hand wheel, and a tooth-shaped structure is arranged on the outer circumferential surface of the driving wheel. The driven wheel is fixed at one end of the transmission shaft, and the driven wheel is meshed with the driving wheel for transmission. The other end of the transmission shaft is connected with the input end of the speed reducer, and the output end of the speed reducer is connected with the movable slide block. The transmission shaft is supported through a bearing seat, and the bearing seat is fixed on the bottom plate.
The X-direction moving unit is positioned at the lower layer, and the Y-direction moving unit is positioned at the upper layer. The guide rail seat of the X-direction moving unit is connected with the bottom plate through a fixed seat, and the fixed seat adopts an L-shaped structure. The guide rail seat of the Y-direction moving unit is connected with the sliding part of the X-direction moving unit through a connecting plate, and reinforcing ribs are arranged at two ends of the connecting plate.
The guide rail seat of the Z-direction moving unit is fixed on the sliding part of the Y-direction moving unit. The sliding part of the Z-direction moving unit is connected to a stage for mounting the heat radiation light source 2011. And a limiting block is arranged on the guide rail seat of the Z-direction moving unit and used for limiting the moving range of the sliding part.
And a locking nut is axially arranged on the adjusting hand wheel and used for locking the adjusting position. The inner surface of the lock nut is provided with a lock washer, and the lock washer adopts a tooth-shaped structure.
The upper surface of the movable sliding block is provided with a T-shaped groove for installing the connecting piece. And the side surface of the movable sliding block is provided with an adjusting screw for eliminating a gap between the movable sliding block and the guide rail.
And mounting holes are formed in the periphery of the bottom plate and are used for being fixed on a workbench. The bottom surface of bottom plate is equipped with the shock pad, the shock pad adopts metal rubber material to make.
And lubricating oil nozzles are arranged on the guide rail seats of the X-direction moving unit, the Y-direction moving unit and the Z-direction moving unit and are used for injecting lubricating oil. The lubricating nipple adopts a one-way valve design, so that the lubricating oil can be prevented from flowing back. The guide rail seat is internally provided with a lubricating oil groove for storing lubricating oil. And the sliding block is provided with a capillary oil hole for conveying lubricating oil to the friction surface.
The angle adjustment seat includes a pitch adjustment member and a horizontal rotation member. The pitch adjustment component includes a support frame, a pivot assembly, and an adjustment arm. The supporting frame adopts a U-shaped structure, and bearing seats are respectively arranged on two side walls of the supporting frame. The rotating shaft assembly comprises a main shaft and a secondary shaft, and the main shaft and the secondary shaft are respectively installed in bearing seats on two sides. The main shaft is fixedly connected with the adjusting arm, and the auxiliary shaft is connected with the balance weight. The bearing seat is internally provided with a double-row angular contact ball bearing, the inner ring of the bearing is in interference fit with the rotating shaft, and the outer ring of the bearing is in transition fit with the bearing seat.
The adjusting arm comprises a connecting part and an operating part, wherein the connecting part is connected with a main shaft key, and the operating part is provided with an anti-skid handle. The adjusting arm is provided with an arc-shaped guide groove, and a sliding block is arranged in the arc-shaped guide groove. The supporting frame is provided with a locking bolt matched with the sliding block, and the pitching angle can be fixed by screwing the locking bolt.
The horizontal rotating component comprises a base, a turntable and a transmission mechanism. The base is fixed on the three-dimensional moving platform, and an annular sliding rail is arranged on the upper surface of the base. The turntable is connected with the base through a ball supporting ring, and balls in the ball supporting ring are uniformly distributed.
The transmission mechanism comprises a worm wheel, a worm and a transmission case. The worm wheel is fixed on the periphery of the turntable, and the worm is arranged in the transmission case. The transmission case is fixed on the base, and a bearing support seat is arranged in the transmission case. One end of the worm is connected with the hand wheel, and the other end of the worm is meshed with the worm wheel.
The center of the turntable is provided with a mounting hole for fixing a supporting frame of the pitching adjusting component. And a plurality of positioning pin holes are formed around the mounting holes and used for ensuring the mounting angular positions.
The mid-infrared sensor provided by the application realizes the non-refrigeration of the sensor by adopting the combination of the thermal radiation light source 2011 and the thermopile detector 2021. The emission area of the heat radiation light source 2011 is smaller than 2mm×2mm, the power consumption of the heat radiation light source 2011 is reduced by reducing the emission area, and meanwhile, the heat capacity of the heat radiation light source 2011 is correspondingly reduced due to the small emission area, so that the heat radiation light source 2011 can rapidly heat up and stably work under lower power consumption. The receiving area of the thermopile detector 2021 is smaller than 1mm×1mm, and the reduction of the receiving area reduces the heat capacity of the thermopile detector 2021, and improves the response speed and sensitivity of the thermopile detector 2021 to weak mid-infrared signals. The first focusing reflector 2012 focuses the mid-infrared light emitted by the thermal radiation light source 2011 into parallel light, ensures that the mid-infrared light maintains stable optical path length when passing through the oil to be detected in the bypass detection pipeline 101, improves the accuracy of spectrum measurement, and the second focusing reflector 2022 focuses the parallel light passing through the oil to be detected onto the receiving surface of the thermopile detector 2021, improves the luminous flux reaching the detector through light beam convergence, and improves the signal-to-noise ratio. By adopting the technical scheme, the mid-infrared sensor can obtain higher signal-to-noise ratio without a refrigerating system, and the transverse size of the sensor is effectively controlled so as to be conveniently arranged on two sides of the detection section of the bypass detection pipeline 101. In addition, the refrigerating system is omitted, so that the total power consumption of the sensor is obviously reduced, the long-term stable operation of the sensor is facilitated, and meanwhile, the design and the fixing mode of the mounting bracket are simplified.
The foregoing describes in detail embodiments of the present application, and the description should not be construed as limiting the scope of the application.
Claims (10)
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