CN119340254A - Wafer box storage device - Google Patents
Wafer box storage device Download PDFInfo
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- CN119340254A CN119340254A CN202411880041.4A CN202411880041A CN119340254A CN 119340254 A CN119340254 A CN 119340254A CN 202411880041 A CN202411880041 A CN 202411880041A CN 119340254 A CN119340254 A CN 119340254A
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- 235000012431 wafers Nutrition 0.000 description 52
- 238000000034 method Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 5
- 238000003825 pressing Methods 0.000 description 4
- 230000006378 damage Effects 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 208000012260 Accidental injury Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
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- 230000002028 premature Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
本发明公开了晶圆盒存放装置，包括框架和开关门系统，框架包括一个侧开口，开关门系统包括一个能上下移动以启闭侧开口的开关门，开关门系统还包括提拉组件、滑锁组件，提拉组件设置在框架上，提拉组件与开关门连接，滑锁组件包括第一滑块、第二滑块和滑轨，滑轨上设有滑动槽和锁止槽，锁止槽设有第一台阶和第二台阶，第一滑块与开关门相连接并可在滑动槽内上下滑动，第二滑块与第一滑块转动连接，第二滑块包括中心对称的卡槽和侧壁，在卡槽依次与第二台阶和第一台阶抵靠时，第二滑块偏转并可与第一台阶卡接，在侧壁依次与第二台阶和第一台阶抵靠时，第二滑块偏转并可使第二滑块能进入滑动槽。晶圆盒存放装置的开关门能够可靠地启闭。
The invention discloses a wafer box storage device, comprising a frame and a switch door system, wherein the frame comprises a side opening, the switch door system comprises a switch door that can move up and down to open and close the side opening, the switch door system further comprises a lifting assembly and a sliding lock assembly, the lifting assembly is arranged on the frame, the lifting assembly is connected to the switch door, the sliding lock assembly comprises a first slider, a second slider and a slide rail, the slide rail is provided with a sliding groove and a locking groove, the locking groove is provided with a first step and a second step, the first slider is connected to the switch door and can slide up and down in the sliding groove, the second slider is rotatably connected to the first slider, the second slider comprises a centrally symmetrical clamping groove and a side wall, when the clamping groove abuts against the second step and the first step in turn, the second slider deflects and can be clamped with the first step, when the side wall abuts against the second step and the first step in turn, the second slider deflects and can allow the second slider to enter the sliding groove. The switch door of the wafer box storage device can be opened and closed reliably.
Description
Technical Field
The invention relates to the technical field of wafer transmission equipment, in particular to a wafer box storage device.
Background
During wafer processing, the wafer cassettes need to be transported between different process stations, and an overhead travelling crane system is generally used for transporting the wafer cassettes. When a new cassette is added to the overhead travelling crane system, it is necessary to manually place the cassette on the cassette storage device, and the overhead travelling crane removes the newly added cassette from the cassette storage device. Similarly, when the wafer box in the crane system fails, the crane can place the failed wafer box on the wafer storage device, and then the fixed wafer box is manually taken away. In order to prevent the fault of the crown block system caused by the fact that a person touches the wafer box by mistake in the process of taking and placing the wafer box by the crown block, the crown block storage device is usually provided with a switch door which needs to be in a closed state when the crown block takes and places the wafer box, and needs to be in an open state when the crown block takes and places the wafer box manually. In order to prevent the switch door from influencing the wafer box transmission due to damage, how to reliably open and close the switch door is an urgent problem to be solved.
Disclosure of Invention
In order to overcome the defects, the invention aims to provide the wafer box storage device, and the opening and closing of the opening and closing door are reliable.
In order to achieve the above purpose, the wafer box storage device comprises a frame and a door opening and closing system, wherein the frame comprises a placing cavity for storing the wafer box, the placing cavity comprises a side opening, the door opening and closing system comprises a door opening and closing which can move up and down to open and close the side opening, and the door opening and closing system further comprises:
The lifting assembly is arranged on the frame and is connected with the switch door;
The sliding lock assembly comprises a first sliding block, a second sliding block and a sliding rail, wherein the sliding rail is fixed on the frame, a sliding groove extending in the vertical direction and a locking groove communicated below the sliding groove are formed in the sliding rail, a first step and a second step which are arranged up and down and are opposite in the width direction of the sliding groove are arranged in the locking groove, the first sliding block is connected with the switch door, the first sliding block is matched with the sliding groove and can slide up and down in the sliding groove, the second sliding block is rotationally connected with the first sliding block, the second sliding block comprises a pair of clamping grooves which are symmetrical with respect to the center of the rotation axis and side walls which are adjacent to the clamping grooves and are arranged on two sides of the rotation axis, and the second sliding block can slide up and down along with the first sliding block.
Further, at the clamping position of the second slider and the first step, the distance from the first angle, where the second slider is abutted to the groove wall of the sliding groove, to the rotation axis is smaller than the distance from the second angle, adjacent to the first angle, of the second slider to the rotation axis, and the curvature radius of the first angle is larger than that of the second angle.
Further, the locking groove is provided with a first groove and a second groove, the first groove and the second groove are opposite in the width direction of the sliding groove, the upper groove wall of the first groove and the groove wall of the sliding groove form a first step, the edge of the lower groove wall of the second groove, which is far away from the groove bottom of the second groove, is connected with a downward extending avoidance surface, the avoidance surface and the lower groove wall of the second groove form a second step, the groove wall of the second step opposite to the sliding groove is close to the rotating axis in the width direction of the sliding groove, the upper groove wall of the second groove extends upwards to the groove wall of the sliding groove from the upper edge of the groove bottom of the second groove, and the upper groove wall of the second groove is higher than the upper groove wall of the first groove.
Further, the upper groove wall of the first groove is in smooth transition connection with the groove wall of the sliding groove, and the included angle of the first step is an obtuse angle.
Further, the slide lock assembly further comprises a first stop piece, a second stop piece and rolling pins, the first stop piece and the second stop piece extend along the up-down direction, the cross section of the first stop piece and the second stop piece is L-shaped, the L-shaped folded edges of the first stop piece and the second stop piece and the two groove walls of the sliding groove form two first accommodating cavities with openings facing the groove bottoms of the sliding groove, the two first accommodating cavities are arranged on two sides of the width direction of the first sliding block at intervals, the rolling pins which are convenient for the first sliding block to move are accommodated in the two first accommodating cavities, and the folded edges of the wall surfaces of the accommodating cavities, the rolling pins on two sides of the width direction of the first sliding block and the groove bottoms of the sliding groove form a second accommodating cavity which limits the horizontal movement of the first sliding block.
Further, the wafer box storage device further comprises a buffer assembly, the buffer assembly comprises a sealing cover and an elastomer, the sealing cover is arranged at the upper end of the sliding rail, the sealing cover is provided with a groove with a downward opening, the size of the groove in the width direction of the sliding groove is larger than the distance between the first stop piece and the second stop piece and smaller than the distance between the two side walls of the sliding groove, and the elastomer is accommodated in a third accommodating cavity formed by the upper end face of the sliding lock assembly and the groove.
Further, the elastic body comprises a rubber block and a pressure spring, and the rubber block is pre-pressed below the pressure spring.
Further, the lifting assembly comprises lifting units which are arranged at two sides of the switch door at intervals, each lifting unit comprises two pulleys, a pull rope and a balancing weight, the two pulleys are arranged on the frame at intervals along the thickness direction of the switch door, the pull rope is wound on the two pulleys, two ends of the pull rope extend along the vertical direction, one end of the pull rope is connected with the upper end of the switch door, and the other end of the pull rope is connected with the balancing weight.
Further, the frame further includes a temporary storage chamber disposed below the placement chamber, the temporary storage chamber being closed when the switch door moves downward, and the temporary storage chamber being opened when the switch door moves upward.
Drawings
Fig. 1 is a schematic perspective view of an open/close door in an embodiment of the present invention;
Fig. 2 is a schematic perspective view of a switch door in a closed state according to an embodiment of the present invention;
FIG. 3 is a schematic view of a connection structure of a slide lock assembly and a buffer assembly according to an embodiment of the present invention;
FIG. 4 is an exploded view of a slide lock assembly and a buffer assembly in accordance with an embodiment of the present invention;
FIG. 5 is a cross-sectional view at A-A of FIG. 3;
FIG. 6 is an enlarged view of a portion of FIG. 3 at A;
FIG. 7 is a schematic diagram of a connection structure between a first slider and a second slider according to an embodiment of the present invention;
FIG. 8 is a schematic view of a sliding rail according to an embodiment of the present invention;
FIG. 9 is a partial enlarged view at B of FIG. 8;
FIG. 10 is a schematic diagram of a second slider according to an embodiment of the present invention;
FIG. 11a is a schematic view of a second slider approaching a second step during a door opening process according to an embodiment of the present invention;
FIG. 11b is a schematic view of the second slider sliding to the lowest position during the door opening process according to the embodiment of the present invention;
FIG. 11c is a schematic view of the second slider abutting against the first step during the door opening process according to the embodiment of the present invention;
FIG. 11d is a schematic diagram of the second slider clamped with the first step when the door is opened in the embodiment of the present invention;
FIG. 11e is a schematic view of the second slider abutting against the second step during the closing process of the switch door according to the embodiment of the present invention;
FIG. 11f is a schematic view of the second slider sliding to the lowest position during the closing process of the door according to the embodiment of the present invention;
FIG. 11g is a schematic view of the second slider abutting against the first step during the closing process of the switch door according to the embodiment of the present invention;
FIG. 11h is a schematic diagram of the second slider after being guided during the closing process of the door according to the embodiment of the present invention;
FIG. 12 is an enlarged view of a portion of FIG. 11d at C;
FIG. 13 is a schematic view of a connection between a pulling assembly and a switch door in an embodiment of the present invention;
Fig. 14 is a schematic structural diagram of a substrate according to an embodiment of the invention.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making clear and defining the scope of the present invention.
Referring to fig. 1 and 2, the wafer cassette storage device of the present invention includes a frame 1 and a door 5 opening and closing system, wherein the frame 1 includes a placement cavity for storing a wafer cassette 6, the placement cavity is provided with a side opening 1a at one side in a Y-direction, and the wafer cassette 6 in the placement cavity is manually taken from the side opening 1a. The door 5 opening and closing system comprises a door 5 capable of linearly and reciprocally moving in the Z direction, and the door 5 opens and closes the side opening 1a in the lifting process.
In one embodiment, referring to fig. 1, the frame 1 includes a bracket 11, a base plate 12, and a dash assembly 13, the dash assembly 13 and the base plate 12 being fixed to the frame 1, the dash assembly 13 including two side flaps, a back panel, and a bottom panel. The base plate 12 is located above the bottom wall, and the base plate 12 is used for placement of the wafer cassette 6. The substrate 12 and the two side panels are surrounded to form a placing cavity, an upper opening 1b is further arranged above the placing cavity, and the crown block takes and places the wafer box 6 on the substrate 12 from the upper opening 1 b.
Referring to fig. 13, the door opening system further includes a slide lock assembly 2 and a pull assembly 4. The lifting assembly 4 is arranged on the frame 1, and the lifting assembly 4 always provides an upward acting force F for opening and closing the door 5.
Referring to fig. 3,4, 7, 8 and 9, the slide lock assembly 2 includes a first slider 22, a second slider 23 and a slide rail 21, the slide rail 21 is fixed on the frame 1, a slide groove 211 extending in the up-down direction and a locking groove 212 communicating below the slide groove 211 are provided on the slide rail 21, a first step 212a and a second step 212b which are disposed up-down and are opposite in the width direction of the slide groove 211 are provided in the locking groove 212, the first slider 22 is connected with the switch door 5, the first slider 22 is engaged with the slide groove 211 and can slide up and down in the slide groove 211, and the second slider 23 is rotatably connected with the first slider 22. Referring to fig. 10, the second slider 23 includes a pair of catching grooves 231 which are centrally symmetrical about the rotation axis and side walls 235 which are adjacent to the catching grooves 231 and are disposed at both sides of the rotation axis, and the second slider 23 is slidable up and down with the first slider 22. When the engaging groove 231 sequentially abuts against the second step 212b and the first step 212a, the second slider 23 is deflected and can engage with the first step 212a, the first slider 22 abuts against a groove wall (second guide surface 2112) of the slide groove 211 apart from the first step, and when the side wall 235 sequentially abuts against the second step 212b and the first step 212a, the second slider 23 is deflected and can allow the second slider 23 to enter the slide groove 211.
The principle of opening and closing the door is that when the opening and closing door 5 needs to be opened, the opening and closing door 5 is pressed by external force, the external force overcomes the upward acting force of the lifting assembly 4 to enable the opening and closing door 5 to move downwards, the opening and closing door 5 drives the first sliding block 22 and the second sliding block 23 to slide along the sliding groove 211, as shown in fig. 11a, a schematic diagram when the second sliding block 23 approaches the second step 212b, and when the clamping groove wall of the clamping groove 231 of the second sliding block 23 near the second step 212b contacts the second step 212b and moves downwards continuously, the second sliding block 23 deflects anticlockwise, and fig. 11b shows a schematic diagram when the second sliding block 23 slides to the lowest position;
Then the switch door 5 is released, the switch door 5 is pulled by the pulling component 4, the deflected second slider 23 moves upwards under tension, when the clamping groove 231 of the second slider 23 is close to the clamping groove wall of the first step 212a and abuts against the first step 212a and moves upwards, the second slider 23 continues to deflect anticlockwise and is clamped with the first step 212a, the schematic diagram when the second slider 23 abuts against the first step 212a is shown in fig. 11c, and the schematic diagram when the second slider 23 is clamped with the first step 212a is shown in fig. 11d and fig. 12.
When the second slider 23 is in the position shown in fig. 11d, the rotation axis of the second slider 23 is pulled upwards by the first slider 22, the first step 212a gives the second slider 23a downward supporting force, and the second slider 23 further has a tendency to continue to deflect anticlockwise due to the horizontal separation between the pulling force and the supporting force, at this time, the groove wall (the first guiding surface 2111) of the sliding groove 211 near the first step 212a provides a supporting force for the connection part between the clamping groove 231 and the side wall 235 of the second slider 23 to prevent the second slider 23 from continuing to deflect, and the supporting force of the first guiding surface 2111 can be obtained by the abutting of the first slider 22 and the first guiding surface 2111. The first slider 22 is pressed against the first guide surface 2111, and the first slider 22 receives a large frictional force, and the second slider 23 is restricted from moving upward by the frictional force and the reaction force of the first step 212a, so that the second slider 23 is locked with the first step 212a at the position of fig. 11d, and the opening/closing door 5 connected to the first slider 22 does not continue to move upward, and at this time, the opening/closing door 5 is stably opened.
When the switch door 5 needs to be closed, the switch door 5 is pressed down, the second slider 23 is pushed down by the first slider 22, the second slider 23 is separated from the first step 212a, the first guiding surface 2111 no longer provides supporting force for the connection part of the clamping groove 231 of the second slider 23 and the side wall 235, the second guiding surface 2112 and the first slider 22 no longer press against each other, and at this time, the first slider 22 and the second slider 23 can move down.
When the second slider 23 moves downwards, the side wall 235 of the second slider 23 contacts and abuts against the second step 212b, as shown in fig. 11e, when the second slider 23 continues to move downwards, the second step 212b continues to rotate the second slider 23 anticlockwise through the side wall 235, when the second step 212b pushes the second slider 23 to enable the second slider 23 to move horizontally, the second slider 23 obtains the supporting force of the first guiding surface 2111 through the first slider 22, the first slider 22 and the first guiding surface 2111 are pressed to form a friction force, and the friction force and the supporting reaction force of the second step 212b on the second slider 23 prevent the second slider 23 from moving downwards, as shown in fig. 11f, at this time, the switch 5 does not move downwards any more.
Then, the switch door 5 is released, at this time, under the action of the pulling component 4 pulling the switch door 5, the second slider 23 is no longer subjected to the counter force of the second step 212b, meanwhile, the second slider 23 has no trend of horizontal movement, the first slider 22 and the first guiding surface 2111 are no longer pressed, and the first slider 22 and the second slider 23 can move upwards.
During the upward movement of the second slider 23, the side wall 235 of the second slider 23 contacts and abuts against the first step 212a, as shown in fig. 11g, when the second slider 23 continues to move upward, the first step 212a continues to rotate the second slider 23 counterclockwise through the side wall 235, the second slider 23 is rotated to a position suitable for entering the sliding groove 211, as shown in fig. 11h, at this time, the second slider 23 can be brought into the sliding groove 211 by the first slider 22 and continues to slide upward, and the opening and closing door 5 is closed. After the switch door 5 is closed, the side opening 1a of the wafer box storage device is closed, and the wafer box storage device at the moment can only be used for taking and placing the wafer box 6 through the upper opening 1b by the crown block.
The switch door 5 can be opened and closed by only pressing the switch door 5 without electric control in the opening and closing process, no electric appliance fault exists, and the switch door 5 is reliable in opening and closing.
When the switch door 5 is opened, the second slider 23 is abutted against the first guide surface 2111 through the first slider 22 to prevent the second slider 23 from sliding and rotating, meanwhile, the first slider 22 and the first guide surface 2111 are mutually pressed to form friction force, and the friction force and the counter force of the first step 212a limit the second slider 23 to move upwards, so that the way of limiting the upward movement of the switch door 5 through the mutual matching of the first slider 22, the second slider 23, the first step 212a and the first guide surface 2111 is stable and reliable, the second slider 23 cannot slide and rotate at the locking position due to the inertia of the switch door 5, and further the second slider 23 is locked and fails, or two corners of the second slider 23 which are not at the same clamping groove 231 position are clamped on the wall surfaces of the first guide surface 2111 and the locking groove 212, and the switch door 5 is not easy to press downwards when a person presses the switch door 5.
In one embodiment, at the position where the second slider 23 is engaged with the first step 212a, the distance from the first corner 232 of the second slider 23 abutting against the groove wall (the first guide surface 2111) of the sliding groove 211 to the rotation axis is smaller than the distance from the second corner 233 of the second slider 23 adjacent to the first corner 232 to the rotation axis, and the radius of curvature of the first corner 232 is larger than the radius of curvature of the second corner 233.
The distance from the first angle 232 to the rotation axis is smaller than the distance from the second angle 233 to the rotation axis, so that the second slider 23 can deflect by a larger angle when rotating anticlockwise, the direction of the branch reaction force of the first guide surface 2111 to the first angle 232 can act on a thicker area of the first angle 232, fatigue failure of the first angle 232 is avoided, meanwhile, the first angle 232 is easy to form a larger curvature radius, when the first angle 232 is abutted to the first guide surface 2111, the first angle 232 is not easy to generate larger stress concentration and is worn on the first angle 232 and the first guide surface 2111 relatively quickly, the second slider 23 is easy to deflect to a preset angle stably, the second slider 23 which is worn excessively is prevented from being contacted with the first guide surface 2111 which is worn excessively, the second slider 23 is prevented from exceeding the deflected preset angle, and further, two angles of the second slider 23 which are not positioned in the same clamping groove 231 are prevented from being clamped on the wall surface of the first guide surface 1 and the locking groove 212, so that a person cannot easily press down the door 2115 to open and close the door when pressing down.
The distance from the second corner 233 to the rotation axis is longer than the distance from the first corner 232 to the rotation axis, so that the groove wall of the second corner 233 corresponding to the clamping groove 231 can easily abut against the first step 212a and the second step 212b, and the second slider 23 can smoothly rotate.
In one embodiment, referring to fig. 9, the locking groove 212 has two first grooves 2121 and second grooves 2122, which are open opposite to each other in the width direction of the sliding groove 211, wherein an upper groove wall 21211 of the first groove and a groove wall (first guide surface 2111) of the sliding groove 211 form a first step 212a, a lower groove wall 21222 of the second groove is connected with a downward extending escape surface 2123 at a rim away from a groove bottom 21223 of the second groove, the escape surface 2123 and a lower groove wall 21222 of the second groove form a second step 212b, the second step 212b is adjacent to the rotation axis in the width direction of the sliding groove 211 with respect to the groove wall (second guide surface 2112), and an upper groove wall 21221 of the second groove extends obliquely upward from an upper rim of the groove bottom 21223 of the second groove to the groove wall (second guide surface 2112) of the sliding groove, the upper groove wall 21221 of the second groove being higher than the upper groove wall 11 of the first groove.
When the side wall 235 of the second slider 23 abuts against the first step 212a and deflects toward the vertical state, the second slider 23 may not be in the completely vertical state, and when the second slider 23 is slightly inclined, the first corner 232 of the second slider 23 contacts the upper groove wall 21211 of the first groove when the second slider 23 moves upward, so that the second slider 23 is reversely rotated to the vertical state, and the second slider 23 may smoothly enter the sliding groove 211.
In one embodiment, the upper groove wall 21211 of the first groove is in smooth transition with the groove wall (first guiding surface 2111) of the sliding groove, and the included angle of the first step 212a is an obtuse angle.
By smoothly transitionally connecting the upper groove wall 21211 of the first groove with the first guide surface 2111 and setting the included angle of the first step 212a to be obtuse, the first step 212a can have a larger radius of curvature, and when the second slider 23 is locked with the first step 212a, the groove wall of the clamping groove 231 of the second slider 23 abuts against the first step 212a to be stressed, so that premature damage of the second slider 23 due to stress concentration can be avoided.
As shown in fig. 5, in one embodiment, the slide lock assembly 2 further includes a first stopper 241, a second stopper 242, and a needle roller 25, wherein the first stopper 241 and the second stopper 242 extend in the up-down direction and have an L-shaped cross section, the L-shaped folded edges of the first stopper 241 and the second stopper 242 and the two groove walls of the slide groove 211 form two first accommodating chambers that open toward the groove bottom of the slide groove 211, the two first accommodating chambers are arranged at intervals on both sides of the width direction of the first slider 22, the needle roller 25 that facilitates the movement of the first slider 22 is accommodated in the two first accommodating chambers, and the folded edges of the wall surfaces of the first stopper 241 and the second stopper 242 that form the accommodating chambers, the needle roller 25 on both sides of the width direction of the first slider 22, and the groove bottom of the slide groove 211 form a second accommodating chamber that restricts the horizontal movement of the first slider 22.
When the first slider 22 moves along the sliding groove 211, the roller pin 25 rolls under the friction of the first slider 22, the friction force of the first slider 22 is small, and the person presses down the switch door 5 smoothly. When the first slider 22 slides in the sliding groove 211, the second slider 23 can be prevented from moving horizontally in the width direction of the sliding groove 211, and the first corner 232 and the second corner 233 of the second slider 23 are not easy to be clamped between the adjacent needle rollers 25, so that the second slider 23 can be prevented from being clamped when sliding in the sliding groove 211, and the switch door 5 can not be closed or the switch door can not be opened.
In one embodiment, referring to fig. 6, the wafer cassette storage device further includes a buffer assembly 3, where the buffer assembly 3 includes a cover 31 and an elastomer, the cover 31 is disposed at an upper end of the slide rail 21, the cover 31 is provided with a groove with a downward opening, the size of the groove in the width direction of the sliding groove 211 is greater than the distance between the first stopper 241 and the second stopper 242 and less than the distance between two sidewalls of the sliding groove 211, and the elastomer is accommodated in a third accommodating cavity formed by an upper end surface of the slide lock assembly 2 and the groove.
By setting the size of the groove of the cover 31 in the width direction of the sliding groove 211 to be larger than the distance between the first stopper 241 and the second stopper 242 and smaller than the distance between the two side walls of the sliding groove 211, the upward escape of the needle roller 25 from the first accommodating cavity can be avoided, and meanwhile, the elastic body can fall on the upper end surface of the sliding lock assembly 2, and the falling of the elastic body into the sliding groove 211 can be avoided.
In one embodiment, the elastomer comprises a rubber block 33 and a compression spring 32, the rubber block 33 being preloaded under the compression spring 32. When the switch door 5 is buffered through the second sliding block 23, the second sliding block 23 elastically contacts the rubber block 33 and pushes the pressure spring 32 to compress the pressure spring 32, so that the switch door 5 can realize buffering, and the vibration of the wafer box 6 on the wafer box storage device caused by the switch door 5 and the damage to wafers in the wafer box 6 are avoided.
In one embodiment, referring to fig. 13, the pulling assembly 4 includes a pulling unit disposed at two sides of the opening and closing door 5 at intervals, the pulling unit includes two pulleys 43, a pulling rope 41 and a balancing weight 42, the two pulleys 43 are disposed on the frame 1 at intervals along the thickness direction of the opening and closing door 5, the pulling rope 41 is wound on the two pulleys 43, two ends of the pulling rope 41 extend in the up-down direction, one end of the pulling rope 41 is connected with the upper end of the opening and closing door 5, and the other end of the pulling rope 41 is connected with the balancing weight 42.
The weight of the balancing weight 42 can be set according to the weight of the switch door 5, for example, when the switch door 5 adopts a light material such as a plastic plate or adopts a hollow structure to reduce the weight, the weight of the balancing weight 42 can be set lighter correspondingly, and when the switch door 5 is heavier, the balancing weight 42 needs to be set heavier correspondingly so as to meet the requirement that the switch door 5 is in a lifted state in a free state.
The two pulleys 43 of the lifting assembly 4 can guide the balancing weight 42 to one side far away from the switch door 5, so as to avoid the accidental injury of personnel storing the wafer box 6 when the balancing weight 42 moves up and down. The lifting force that balancing weight 42 provided switch door 5 is invariable, and personnel can push down with comparatively even dynamics when pushing down switch door 5, also conveniently control the speed that switch door 5 reciprocated, and the operation is comparatively convenient.
It will be appreciated that the pull assembly 4 may be replaced by a tension spring. One end of a tension spring is connected with the switch door 5, and the other end of the tension spring is connected with the frame 1.
In one embodiment, the frame 1 further comprises a temporary storage chamber arranged below the placement chamber, the temporary storage chamber being closed when the switch door 5 moves down and being opened when the switch door 5 moves up.
In one embodiment, the invention discloses a method for taking and placing a wafer cassette 6 by a wafer cassette storage device, when the wafer cassette 6 needs to be manually placed on the wafer cassette storage device, and then the wafer cassette 6 is transported by a crown block in a transporting system, the method specifically comprises:
the switch door 5 is pressed down, the switch door 5 drives the second slide block 23 to move to the bottom through the first slide block 22, and the second slide block 23 touches the second step 212b to deflect;
Releasing the switch door 5, wherein the switch door 5 is pulled by the pulling component 4, the second slider 23 moves upwards along with the switch door 5, the second slider 23 touches the first step 212a to deflect, the first slider 22 is abutted with the second guide surface 2112 to enable the second slider 23 to be blocked, the second slider 23 cannot move upwards continuously, at the moment, the switch door 5 is locked at the open position, and the side opening 1a is in the open state;
The personnel side opening 1a places the wafer cassette 6 on the substrate 12, the positioning column 121 on the substrate 12 positions the wafer cassette 6, the in-place sensor 122 detects that the wafer cassette 6 is placed in place, and the code reader 123 reads the code information of the wafer cassette 6 and feeds the information back to the crown block control system. The position of the code reader 123 is shown in fig. 14.
After the wafer box 6 is placed by a person, the switch door 5 is pressed down, the switch door 5 drives the second slider 23 to move downwards through the first slider 22, and the side wall 235 of the second slider 23 touches the second step 212b and deflects.
Releasing the switch door 5, lifting the switch door 5 through the lifting assembly 4, enabling the first sliding block 22 to drive the second sliding block 23 to move upwards along with the switch door 5, enabling the second sliding block 23 to contact the first step 212a to deflect, enabling the second sliding block 23 to move upwards continuously, enabling the second sliding block 23 to be vertical gradually, and enabling the sliding groove 211 extending in the vertical direction of the second sliding block 23 to be lifted to a position before pressing down, wherein the switch door 5 seals the side opening 1 a;
After the crown block control system receives the coding information, the crown block control system controls the crown block to take out the wafer box 6 from the upper opening 1 b.
When the crown block is required to place the wafer cassette 6 on the wafer cassette storage device and then the wafer cassette 6 is manually taken away from the wafer cassette 6 storage device, the method specifically comprises the following steps:
The side opening 1a of the coaming is closed by a switch door 5, and the crown block places the wafer cassette 6 on the wafer cassette storage device from the upper opening 1 b;
pressing down the switch door 5, and driving the first slide block 22 and the second slide block 23 to move to the bottom by the switch door 5, wherein the second slide block 23 touches the second step 212b to deflect;
Releasing the switch door 5, wherein the switch door 5 is pulled by the pulling component 4, the second slider 23 moves upwards along with the switch door 5, the second slider 23 touches the first step 212a to deflect, the first slider 22 is abutted with the second guide surface 2112 to enable the second slider 23 to be blocked, the second slider 23 cannot move upwards continuously, at the moment, the switch door 5 is locked at the open position, and the side opening 1a is in the open state;
the personnel take the wafer cassette 6 out of the wafer cassette storage device, press the switch door 5 downwards, and drive the second sliding block 23 to move downwards by the switch door 5, wherein the side wall 235 of the second sliding block 23 touches the second step 212b and deflects;
When the switch door 5 is released, the switch door 5 is pulled by the pulling component 4, the second sliding block 23 moves upwards along with the switch door 5, the second sliding block 23 contacts the first step 212a to deflect, the second sliding block 23 continues to move upwards, the second sliding block 23 is gradually vertical, then the sliding groove 211 extending along the vertical direction of the second sliding block 23 is lifted to a position before being pressed downwards, and the switch door 5 closes the side opening 1 a.
The above embodiments are only for illustrating the technical concept and features of the present invention, and are intended to enable those skilled in the art to understand the content of the present invention and to implement the same, but are not intended to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.
Claims (9)
1. The wafer box storage device comprises a frame and a door opening and closing system, wherein the frame comprises a placing cavity for storing the wafer box, the placing cavity comprises a side opening, and the door opening and closing system comprises a door which can move up and down to open and close the side opening, and is characterized in that the door opening and closing system further comprises:
The lifting assembly is arranged on the frame and is connected with the switch door;
The sliding lock assembly comprises a first sliding block, a second sliding block and a sliding rail, wherein the sliding rail is fixed on the frame, a sliding groove extending in the vertical direction and a locking groove communicated with the lower portion of the sliding groove are formed in the sliding rail, a first step and a second step which are arranged up and down and are opposite in the width direction of the sliding groove are arranged in the locking groove, the first sliding block is connected with the switch door, the first sliding block is matched with the sliding groove and can slide up and down in the sliding groove, the second sliding block is connected with the first sliding block in a rotating mode, the second sliding block comprises a pair of clamping grooves which are symmetrical with respect to the center of a rotation axis and side walls which are adjacent to the clamping grooves and are arranged on two sides of the rotation axis, and the second sliding block can slide up and down along with the first sliding block.
2. The wafer cassette storage device of claim 1, wherein a first corner of the second slider abutting a groove wall of the sliding groove at a position where the second slider engages the first step is less than a second corner of the second slider adjacent the first corner, the first corner having a radius of curvature greater than a radius of curvature of the second corner.
3. The wafer cassette storage device as set forth in claim 1 wherein the lock groove has a first groove and a second groove with two openings facing each other in a width direction of the slide groove, an upper groove wall of the first groove and a groove wall of the slide groove form a first step, an edge of a lower groove wall of the second groove away from a groove bottom of the second groove is connected with a downward extending escape surface, the escape surface and the lower groove wall of the second groove form a second step, the groove wall of the second step is adjacent to the rotation axis in the width direction of the slide groove relative to the groove wall of the slide groove, an upper groove wall of the second groove extends obliquely upward from an upper edge of the groove bottom of the second groove to the groove wall of the slide groove, and an upper groove wall of the second groove is higher than the upper groove wall of the first groove.
4. The wafer cassette storage device of claim 3 wherein the upper groove wall of the first groove is in smooth transition with the groove wall of the sliding groove, and the included angle of the first step is an obtuse angle.
5. The wafer cassette storage device of claim 1, wherein the slide lock assembly further comprises a first stopper, a second stopper and a needle roller, wherein the first stopper and the second stopper extend in the vertical direction and have L-shaped cross sections, L-shaped folded edges of the first stopper and the second stopper and two groove walls of the sliding groove form two first accommodating cavities with openings facing the groove bottom of the sliding groove, the two first accommodating cavities are arranged at intervals on two sides of the width direction of the first sliding block, the needle roller convenient for moving the first sliding block is accommodated in each of the two first accommodating cavities, folded edges of the wall surfaces of the accommodating cavities formed by the first stopper and the second stopper, and the needle roller on two sides of the width direction of the first sliding block and the groove bottom of the sliding groove form a second accommodating cavity limiting the horizontal movement of the first sliding block.
6. The wafer cassette storage device of claim 5, further comprising a buffer assembly, wherein the buffer assembly comprises a cover and an elastic body, the cover is arranged at the upper end of the sliding rail, the cover is provided with a groove with a downward opening, the size of the groove in the width direction of the sliding groove is larger than the distance between the first stop piece and the second stop piece and smaller than the distance between two side walls of the sliding groove, and the elastic body is accommodated in a third accommodating cavity formed by the upper end face of the sliding lock assembly and the groove.
7. The wafer cassette storage device of claim 6 wherein said elastomer comprises a rubber block and a compression spring, said rubber block being preloaded under said compression spring.
8. The wafer cassette storage device as set forth in any one of claims 1-7 wherein said pull-up assembly comprises pull-up units disposed at intervals on both sides of said door, said pull-up units comprising two pulleys disposed at intervals on said frame in a thickness direction of said door, a pull rope wound around said two pulleys, both ends of said pull rope extending in an up-down direction, one end of said pull rope being connected to an upper end of said door, and the other end of said pull rope being connected to said weight.
9. The wafer cassette storage device of claim 1 wherein said frame further comprises a temporary storage chamber disposed below said placement chamber, said temporary storage chamber being closed when said switch door is moved downward and said temporary storage chamber being open when said switch door is moved upward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411880041.4A CN119340254A (en) | 2024-12-19 | 2024-12-19 | Wafer box storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411880041.4A CN119340254A (en) | 2024-12-19 | 2024-12-19 | Wafer box storage device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN119340254A true CN119340254A (en) | 2025-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202411880041.4A Pending CN119340254A (en) | 2024-12-19 | 2024-12-19 | Wafer box storage device |
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| Country | Link |
|---|---|
| CN (1) | CN119340254A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09205125A (en) * | 1996-01-24 | 1997-08-05 | Shinko Electric Co Ltd | Opening and closing system for sealed container |
| KR20010036678A (en) * | 1999-10-11 | 2001-05-07 | 윤종용 | Apparatus for opening and closing the door of wafer pod |
| CN1500053A (en) * | 2000-12-13 | 2004-05-26 | 恩特格里斯开曼有限公司 | System for preventing improper insertion of foup door into foup |
| US20050230398A1 (en) * | 2004-04-20 | 2005-10-20 | Shin-Etsu Polymer Co., Ltd. | Storage container |
| CN218585942U (en) * | 2022-10-25 | 2023-03-07 | 上海鼎泰匠芯科技有限公司 | Wafer cassette and wafer loading system |
| US20230130512A1 (en) * | 2021-10-26 | 2023-04-27 | Samsung Electronics Co., Ltd. | Valve structure and substrate processing apparatus including the same |
-
2024
- 2024-12-19 CN CN202411880041.4A patent/CN119340254A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09205125A (en) * | 1996-01-24 | 1997-08-05 | Shinko Electric Co Ltd | Opening and closing system for sealed container |
| KR20010036678A (en) * | 1999-10-11 | 2001-05-07 | 윤종용 | Apparatus for opening and closing the door of wafer pod |
| CN1500053A (en) * | 2000-12-13 | 2004-05-26 | 恩特格里斯开曼有限公司 | System for preventing improper insertion of foup door into foup |
| US20050230398A1 (en) * | 2004-04-20 | 2005-10-20 | Shin-Etsu Polymer Co., Ltd. | Storage container |
| US20230130512A1 (en) * | 2021-10-26 | 2023-04-27 | Samsung Electronics Co., Ltd. | Valve structure and substrate processing apparatus including the same |
| CN218585942U (en) * | 2022-10-25 | 2023-03-07 | 上海鼎泰匠芯科技有限公司 | Wafer cassette and wafer loading system |
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