CN119275080A - Extraction suppression mechanism for ion implanters - Google Patents
Extraction suppression mechanism for ion implanters Download PDFInfo
- Publication number
- CN119275080A CN119275080A CN202411803769.7A CN202411803769A CN119275080A CN 119275080 A CN119275080 A CN 119275080A CN 202411803769 A CN202411803769 A CN 202411803769A CN 119275080 A CN119275080 A CN 119275080A
- Authority
- CN
- China
- Prior art keywords
- transmission unit
- axis
- deflection
- axis transmission
- bearing seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
Abstract
本发明公开了用于离子注入机的引出抑制机构，包括主支架；X轴传动单元，X轴传动单元与抑制极单元连接；Y轴传动单元，Y轴传动单元的驱动端与X轴传动单元连接，Y轴传动单元用于驱动X轴传动单元沿着Y轴向移动；Z轴传动单元，Z轴传动单元的驱动端与X轴传动单元连接，Z轴传动单元用于驱动X轴传动单元沿着Z轴向移动；偏转轴传动单元，偏转轴传动单元设置在主支架上，偏转轴传动单元的驱动端与X轴传动单元连接，偏转轴传动单元用于驱动X轴传动单元偏转。本发明通过在现有的三轴传动机构上增加偏转轴传动单元，实现了对离子束的三维空间精确控制，这种高精度控制确保了离子束能够准确地到达目标位置。
The invention discloses an extraction suppression mechanism for an ion implanter, comprising a main support, an X-axis transmission unit, the X-axis transmission unit is connected to a suppression electrode unit, a Y-axis transmission unit, the driving end of the Y-axis transmission unit is connected to the X-axis transmission unit, and the Y-axis transmission unit is used to drive the X-axis transmission unit to move along the Y-axis direction, a Z-axis transmission unit, the driving end of the Z-axis transmission unit is connected to the X-axis transmission unit, and the Z-axis transmission unit is used to drive the X-axis transmission unit to move along the Z-axis direction, and a deflection axis transmission unit, the deflection axis transmission unit is arranged on the main support, the driving end of the deflection axis transmission unit is connected to the X-axis transmission unit, and the deflection axis transmission unit is used to drive the X-axis transmission unit to deflect. The invention realizes precise control of the three-dimensional space of the ion beam by adding a deflection axis transmission unit to the existing three-axis transmission mechanism, and this high-precision control ensures that the ion beam can accurately reach the target position.
Description
Technical Field
The present invention relates to the field of ion implanters, and more particularly, to an extraction suppression mechanism for an ion implanter.
Background
Ion implanters are one of the common devices in the field of semiconductor device fabrication, and are mainly used for manipulating dopant ions through various electric and magnetic devices, and finally implanting the dopant ions onto substrate materials to achieve material modification. With the increasing development of science and technology, the importance of ion implantation in the semiconductor field is becoming more and more remarkable, and the requirements of ion implantation energy, dopant type, doping depth, implantation angle, etc. are more accurate, and the design requirements of ion implantation of each element are becoming more challenges.
In the prior art, the patent document with the application number of CN202310906582.9 discloses a beam shielding device and an ion implanter which are linked with an extraction electrode, wherein the device comprises an electrode connecting shaft connected with the extraction suppression electrode and the beam shielding assembly, the electrode connecting shaft is connected with a second belt wheel set through a ball screw, the extraction suppression electrode stretches along the axial direction under the driving of a driving motor, a cam is connected with the electrode connecting shaft through a deflection assembly, the second servo motor drives the deflection assembly to rotate, the electrode connecting shaft drives the extraction suppression electrode to rotate, a through hole is formed in the center of a mounting platform, guide rail sets are symmetrically arranged on two sides of the through hole and are connected with a sleeve seat, the first belt wheel set and the second belt wheel set are both arranged on the sleeve seat, the guide rail sets are connected with a first servo motor through the ball screw and a third belt wheel set, the first servo motor drives the ball screw to operate, and the guide rail sets drive the sleeve seat to realize the horizontal movement of the extraction suppression electrode.
The ion implantation process needs to precisely control parameters such as ion energy, dosage, implantation angle and the like so as to ensure that the required doping concentration and distribution are obtained, but the existing ion implanter is driven only by a three-shaft transmission mechanism and cannot precisely deflect and control, so that the problems of low beam guiding efficiency, beam divergence of an ion source, easiness in short circuit of the ion source and the like are caused.
Therefore, there is a need for an improvement in such a structure to overcome the above-mentioned drawbacks.
Disclosure of Invention
The invention aims to provide an extraction inhibition mechanism for an ion implanter, which is used for solving the problems that the existing ion implanter lacks an inhibition pole adjusting structure and cannot accurately control deflection, so that doping is uneven, depth is inaccurate or distribution is inaccurate and the like.
The technical aim of the invention is realized by the following technical scheme:
an extraction suppression mechanism for an ion implanter includes a main support for providing support and mounting space, and further includes,
The X-axis transmission unit is arranged on the main bracket and is connected with the suppression pole unit;
The Y-axis transmission unit is arranged on the main bracket, the driving end of the Y-axis transmission unit is connected with the X-axis transmission unit, and the Y-axis transmission unit is used for driving the X-axis transmission unit to move along the Y-axis direction;
the Z-axis transmission unit is arranged on the main bracket and is used for driving the X-axis transmission unit to move along the Z axis;
The deflection shaft transmission unit is arranged on the main bracket, the driving end of the deflection shaft transmission unit is connected with the X-axis transmission unit, the deflection shaft transmission unit is used for driving the X-axis transmission unit to deflect,
The main support comprises a supporting plate, and an installation space is formed in the supporting plate;
A suppression electrode I, which is arranged on the supporting plate and is used for suppressing current beams of the ion implanter to prevent the current beams from being dispersed;
The first end of the support column is connected with the support plate, the second end of the support column is sleeved with a main shaft sliding frame plate, the main shaft sliding frame plate can move along the axial direction of the main shaft, the main shaft sliding frame plate is used for providing an installation space for the X-axis transmission unit, and the first end of the X-axis transmission unit is arranged on the main shaft sliding frame plate in a penetrating mode;
The protruding flange is arranged on the supporting plate, a through hole for the end part of the X-axis transmission unit to pass through is formed in the protruding flange, and the other end of the X-axis transmission unit passes through the through hole and is connected with the suppression pole unit;
The Y-direction limiting plate is arranged on the main shaft sliding frame plate and used for limiting the main shaft sliding frame plate, the Y-axis transmission unit is arranged on the main bracket through the Y-direction limiting plate, and the Y-axis transmission unit drives the main shaft sliding frame plate to move through the Y-direction limiting plate and drives the X-axis transmission unit arranged on the main shaft sliding frame plate to synchronously move;
The Z-axis transmission unit is arranged on the main bracket through a Y-direction limiting plate, and the driving end of the Z-axis transmission unit drives the X-axis transmission unit to move along the Z-axis through the Y-direction limiting plate;
aviation plug, aviation plug integration set up in the backup pad, aviation socket is used for providing power interface.
The invention is further arranged that the X-axis transmission unit comprises,
A main shaft is arranged at the first end of the main bearing seat, the first end of the main shaft is connected with the main bearing seat, the second end of the main shaft is provided with a suppression joint, and the X-axis transmission unit is connected with the suppression pole unit through the suppression joint;
the sealing corrugated pipe is sleeved on the main shaft and is positioned between the bearing seat and the inhibition joint;
The first shaft coupling is arranged at the second end of the main bearing seat, the Z-axis linkage frame is connected with the main bearing seat through the first shaft coupling, a Z-axis limiting rod is arranged on the Z-axis linkage frame, the X-axis transmission unit is connected with the Z-axis transmission unit through the Z-axis limiting rod, the Z-axis limiting rod is used for playing a limiting role, and the Z-axis transmission unit drives the X-axis transmission unit to move through the Z-axis limiting rod;
The deflection sleeve is arranged on the main bearing seat and provided with a positioning hole;
the deflection adjusting rod is arranged on the deflection sleeve in a penetrating way through the positioning hole.
The invention is further arranged that the suppression pole unit comprises,
The suppression seat is provided with an installation space, a suppression electrode II is installed on the suppression seat, and a first installation hole is formed in the suppression seat;
the mixed flow baffle is provided with a second mounting hole matched with the first mounting hole, and is matched with the first mounting hole through the second mounting hole and locked through a connecting piece.
The invention is further arranged that the Y-axis drive unit comprises,
Y-direction linkage plates, on which Y-direction couplings are arranged;
the Y-direction bearing seat is used for providing a supporting and installing space, a transmission shaft I is arranged in the Y-direction bearing seat, and a transmission gear I is sleeved on the transmission shaft I;
the first end of the Y-direction screw rod is connected with the Y-direction linkage plate through a Y-direction coupler, and the second end of the Y-direction screw rod is arranged on the Y-direction bearing seat;
The first driving motor is arranged on the Y-direction bearing seat, the output end of the first driving motor is provided with a second transmission gear which is meshed with the first transmission gear, and the first driving motor transmits driving force to the transmission shaft through the first transmission gear and the second transmission gear and drives the Y-direction screw rod to rotate.
The invention is further arranged that the Z-axis drive unit comprises,
The Z-direction bearing seat is used for providing a supporting and installing space, a transmission shaft II is arranged in the Z-direction bearing seat, and a transmission gear III is sleeved on the transmission shaft II;
the first end of the Z-direction screw rod is arranged on the Z-direction bearing seat, and the second end of the Z-direction screw rod extends outwards;
The second driving motor is arranged on the Z-direction bearing seat, the fourth driving gear is arranged at the output end of the second driving motor and meshed with the third driving gear, and the second driving motor transmits driving force to the second driving shaft through the third driving gear and the fourth driving gear and drives the Z-direction screw rod to rotate.
The invention is further arranged in that the deflection shaft transmission unit,
The deflection bracket is provided with a deflection coupler;
the deflection bearing seat is used for providing a supporting and installing space, a transmission shaft III is arranged in the deflection bearing seat, and a transmission gear V is sleeved on the transmission shaft III;
the first end of the deflection screw rod is connected with the Y-direction linkage plate through a deflection coupler, and the second end of the deflection screw rod is arranged on the deflection bearing seat;
And the driving motor III is arranged on the deflection bearing seat, the output end of the driving motor III is provided with a transmission gear six, the transmission gear six is meshed with the transmission gear five, and the driving motor III transmits driving force to the transmission shaft III through the transmission gear III and drives the deflection screw rod to rotate.
In summary, the invention has the following beneficial effects:
1. The deflection adjustment is provided with a deflection shaft transmission unit, the deflection angle of the deflection shaft transmission unit can be set according to the angle requirement of ion implantation, and the X-axis transmission unit is driven by a driving motor three, so that the required deflection angle is achieved, and the requirement of ion implantation on angle control is met;
2. the high-precision three-dimensional control ensures that the ion beam can accurately reach the target position, thereby improving the precision and efficiency of ion implantation and accurately controlling the position and angle of the ion beam in the ion implantation process.
Drawings
Fig. 1 is a schematic perspective view of the present invention.
Fig. 2 is a front view of the present invention.
Fig. 3 is a side view of the present invention.
Fig. 4 is a top view of the present invention.
Fig. 5 is a schematic structural view of the main bracket.
Fig. 6 is a cross-sectional view of the X-axis drive unit.
Fig. 7 is a partial schematic structural view of the X-axis transmission unit.
Fig. 8 is a schematic structural view of the Y-axis transmission unit.
Fig. 9 is a schematic structural view of the suppression pole unit.
Fig. 10 is a cross-sectional view of the yaw axis transfer unit.
The number marks are a main bracket 1, a supporting plate 10, a first suppression electrode 11, a pillar 12, a main shaft pulley plate 13, a protruding flange 14, a Y-direction limiting plate 15 and an aviation plug 16;
the X-axis transmission unit 2, the main bearing seat 21, the restraining connector 22, the sealing bellows 23, the first coupler 24, the deflection sleeve 25 and the deflection adjusting rod 26;
A suppression pole unit 3, a suppression seat 31, a mixed flow baffle 32 and a suppression electrode two 33;
The Y-axis transmission unit 4, the Y-direction linkage plate 41, the Y-direction bearing seat 42, the Y-direction screw rod 43, the first transmission shaft 44, the first transmission gear 45, the second transmission gear 46, the first driving motor 47, the Y-direction coupler 48 and the Z-axis transmission unit 5;
The deflection shaft transmission unit 6, the deflection bracket 61, the deflection coupling 62, the deflection bearing seat 63, the transmission shaft III 64, the deflection screw 65 and the driving motor III 66.
Detailed Description
In order that the manner in which the above-recited features, advantages, objects and advantages of the invention are obtained, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
As shown in fig. 1 to 10, the extraction suppressing mechanism for an ion implanter according to the present invention includes a main frame 1, the main frame 1 for providing a supporting and mounting space,
The X-axis transmission unit 2 is arranged on the main support 1, the X-axis transmission unit 2 is connected with the suppression pole unit 3, supports the suppression pole, allows the suppression pole to move and deflect in three axial directions, ensures that the suppression pole can accurately reach a target position, and realizes movement and deflection through the driving of the transmission unit after being connected with the transmission unit;
The Y-axis transmission unit 4 is arranged on the main bracket 1, the driving end of the Y-axis transmission unit 4 is connected with the X-axis transmission unit 2, the Y-axis transmission unit 4 is used for driving the X-axis transmission unit 2 to move along the Y-axis direction, when the Y-axis transmission unit is used, the moving speed and the moving distance of the Y-axis transmission unit 4 are set, the transmission unit is started, and the X-axis transmission unit 2 is driven to move in the Y-axis direction;
The Z-axis transmission unit 5 is arranged on the main bracket 1, the driving end of the Z-axis transmission unit 5 is connected with the X-axis transmission unit 2, and the Z-axis transmission unit 5 is used for driving the X-axis transmission unit 2 to move along the Z-axis direction;
The deflection shaft transmission unit 6 is arranged on the main support 1, the driving end of the deflection shaft transmission unit 6 is connected with the X-axis transmission unit 2, and the deflection shaft transmission unit 6 is used for driving the X-axis transmission unit 2 to deflect.
The main bracket 1 comprises a supporting plate 10, and the supporting plate 10 is provided with an installation space; a suppression electrode I11, the suppression electrode I11 is arranged on the supporting plate 10, and the suppression electrode I11 is used for suppressing current beams of the ion implanter and preventing the current beams from being scattered; the first end of the support column 12 is connected with the support plate 10, a main shaft slide frame plate 13 is sleeved on the second end of the support column 12, the main shaft slide frame plate 13 can move along the axial direction of the main shaft, and the main shaft slide frame plate 13 is used for providing an installation space for the X-axis transmission unit 2; the X-axis transmission unit comprises a support plate 10, a protruding flange 14, a Y-direction limiting plate 15, a main support 1, a Y-direction limiting plate 15, an aviation plug 16 and an aviation plug, wherein the protruding flange 14 is arranged on the support plate 10, the protruding flange 14 is provided with a through hole for the end part of the X-axis transmission unit 2 to pass through, and the protruding flange 14 is provided with a through hole for the end part of the X-axis transmission unit 2 to pass through;
When in use, all the components of the main support 1 are assembled according to the design requirement, so that firm and reliable connection among all the components is ensured. Then, debugging work of the apparatus including power supply connection, debugging of the suppression electrode one 11, testing of the Y-axis transmission unit 4, etc. is performed, ensuring that the apparatus can normally operate, and the suppression electrode one 11 will be used to prevent the current beam from diverging during ion implantation. Meanwhile, the Y-axis transmission unit 4 drives the main shaft pulley plate 13 and the X-axis transmission unit 2 to move in the Y-axis direction through the Y-direction limiting plate 15, so that accurate control of the ion beam is realized.
The X-axis transmission unit 2 comprises a main bearing seat 21, a main shaft is arranged at a first end of the bearing seat, the first end of the main shaft is connected with the main bearing seat 21, a suppression joint 22 is arranged at a second end of the main shaft, the X-axis transmission unit 2 is connected with the suppression pole unit 3 through the suppression joint 22, a seal corrugated pipe 23 is sleeved on the main shaft, the seal corrugated pipe 23 is positioned between the bearing seat and the suppression joint 22, a first coupling 24 is arranged at a second end of the main bearing seat 21, a Z-axis linkage frame is connected with the main bearing seat 21 through the first coupling 24, a Z-axis limiting rod is arranged on the Z-axis linkage frame, the X-axis transmission unit 2 is connected with the Z-axis transmission unit 5 through the Z-axis limiting rod, the Z-axis limiting rod is used for limiting, the Z-axis transmission unit 5 drives the X-axis transmission unit 2 to move through the Z-axis limiting rod, a deflection sleeve 25 is arranged on the main bearing seat 21, a positioning hole is formed in the deflection sleeve 25, and the deflection adjusting rod 26 is arranged on the deflection sleeve 25 through the positioning hole.
The suppression pole unit 3 comprises a suppression seat 31, a mixed flow baffle 32 and a connecting piece, wherein the suppression seat 31 is provided with an installation space, the suppression seat 31 is provided with a suppression electrode II 33, the suppression seat 31 is provided with an installation hole I, the mixed flow baffle 32 is provided with an installation hole II matched with the installation hole I, and the mixed flow baffle 32 is matched with the installation hole I through the installation hole II and is locked through the connecting piece.
The Y-axis transmission unit 4 comprises a Y-axis linkage plate 41, a Y-axis coupler 48 is arranged on the Y-axis linkage plate 41, a Y-axis bearing seat 42 and a Y-axis bearing seat 42 are used for providing support and installation space, a transmission shaft I44 is arranged in the Y-axis bearing seat 42, a transmission gear I45 is sleeved on the transmission shaft I44, a Y-axis screw rod 43 is connected with the Y-axis linkage plate 41 through the Y-axis coupler 48, and the second end of the Y-axis screw rod 43 is arranged on the Y-axis bearing seat 42;
When the X-axis transmission unit is used, the first driving motor 47 is started, the first driving motor 47 transmits driving force to the Y-axis screw rod 43 through the transmission gear and drives the Y-axis screw rod 43 to rotate, and the rotation of the Y-axis screw rod 43 drives the Y-axis linkage plate 41 to move so as to drive the X-axis transmission unit 2 to move in the Y-axis direction.
The Z-axis transmission unit 5 comprises a Z-axis bearing seat, a Z-axis screw rod, a driving motor II and a driving motor III, wherein the Z-axis bearing seat is used for providing a supporting and mounting space, a transmission shaft II is arranged in the Z-axis bearing seat, and a transmission gear III is sleeved on the transmission shaft II;
when the X-axis transmission unit is used, the driving motor II is started, the driving motor II transmits driving force to the Z-axis screw rod through the transmission gear and drives the Z-axis screw rod to rotate, and the rotation of the Z-axis screw rod drives the X-axis transmission unit 2 to move in the Z-axis direction.
The deflection shaft transmission unit 6 comprises a deflection bracket 61, a deflection shaft coupler 62 is arranged on the deflection bracket 61, a deflection bearing seat 63 is used for providing support and installation space, a transmission shaft III 64 is arranged in the deflection bearing seat 63, a transmission gear V is sleeved on the transmission shaft III 63, a deflection screw rod 65, a first end of the deflection screw rod 65 is connected with the Y-direction linkage plate 41 through the deflection shaft coupler, a second end of the deflection screw rod 65 is arranged on the deflection bearing seat, a driving motor III 66 is arranged on the deflection bearing seat, a transmission gear VI is arranged on the output end of the driving motor III 66 and meshed with the transmission gear V, the driving motor III 66 transmits driving force to the transmission shaft III through the transmission gear III and drives the deflection screw rod 65 to rotate, and the deflection shaft transmission unit 6 is matched with the X-axis transmission unit 2 through a deflection adjusting rod 26.
The application principle of the invention is as follows:
Through the three axial cooperative movements, the extraction suppression pole mechanism can be flexibly changed and adjusted according to production requirements, and is suitable for different ion implantation processes and parameter requirements, the suppression electrode I11 can effectively suppress the current beam scattering in the ion implanter, and the ion implantation precision and efficiency are improved. At the same time, the design of the impurity flow baffle 32 further reduces the influence of stray current and improves the purity of ion implantation.
In conclusion, compared with the prior art, the extraction suppression pole mechanism has the advantages of high-precision control, high efficiency, flexibility, stability, reliability and obvious current beam suppression effect. The advantages lead the extraction inhibition pole mechanism to have wide application prospect and important technical value in the field of precision machining such as ion implantation and the like.
In the description of the present invention, it should be noted that, directions or positional relationships indicated by terms such as "upper", "lower", "inner", "outer", "left", "right", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in place when the inventive product is used, or are directions or positional relationships conventionally understood by those skilled in the art, are merely for convenience of describing the present invention and for simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance. In the description of the present invention, it should also be noted that, unless explicitly specified and limited otherwise, terms such as "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a detachable connection, or an integral connection, may be a mechanical connection or an electrical connection, may be a direct connection, may be an indirect connection via an intermediary, or may be a communication between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances. In this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a list of elements is included, and may include other elements not expressly listed.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (6)
1. The extraction suppressing mechanism for the ion implanter comprises a main bracket for providing support and installation space, and is characterized by further comprising,
The X-axis transmission unit is arranged on the main bracket and is connected with the suppression pole unit;
The Y-axis transmission unit is arranged on the main bracket, the driving end of the Y-axis transmission unit is connected with the X-axis transmission unit, and the Y-axis transmission unit is used for driving the X-axis transmission unit to move along the Y-axis direction;
the Z-axis transmission unit is arranged on the main bracket and is used for driving the X-axis transmission unit to move along the Z axis;
The deflection shaft transmission unit is arranged on the main bracket, the driving end of the deflection shaft transmission unit is connected with the X-axis transmission unit, the deflection shaft transmission unit is used for driving the X-axis transmission unit to deflect,
The main support comprises a supporting plate, and an installation space is formed in the supporting plate;
A suppression electrode I, which is arranged on the supporting plate and is used for suppressing current beams of the ion implanter to prevent the current beams from being dispersed;
The first end of the support column is connected with the support plate, the second end of the support column is sleeved with a main shaft sliding frame plate, the main shaft sliding frame plate can move along the axial direction of the main shaft, the main shaft sliding frame plate is used for providing an installation space for the X-axis transmission unit, and the first end of the X-axis transmission unit is arranged on the main shaft sliding frame plate in a penetrating mode;
The protruding flange is arranged on the supporting plate, a through hole for the end part of the X-axis transmission unit to pass through is formed in the protruding flange, and the other end of the X-axis transmission unit passes through the through hole and is connected with the suppression pole unit;
The Y-direction limiting plate is arranged on the main shaft sliding frame plate and used for limiting the main shaft sliding frame plate, the Y-axis transmission unit is arranged on the main bracket through the Y-direction limiting plate, and the Y-axis transmission unit drives the main shaft sliding frame plate to move through the Y-direction limiting plate and drives the X-axis transmission unit arranged on the main shaft sliding frame plate to synchronously move;
The Z-axis transmission unit is arranged on the main bracket through a Y-direction limiting plate, and the driving end of the Z-axis transmission unit drives the X-axis transmission unit to move along the Z-axis through the Y-direction limiting plate;
aviation plug, aviation plug integration set up in the backup pad, aviation socket is used for providing power interface.
2. The extraction suppression mechanism for an ion implanter according to claim 1, wherein the X-axis drive unit comprises,
A main shaft is arranged at the first end of the main bearing seat, the first end of the main shaft is connected with the main bearing seat, the second end of the main shaft is provided with a suppression joint, and the X-axis transmission unit is connected with the suppression pole unit through the suppression joint;
the sealing corrugated pipe is sleeved on the main shaft and is positioned between the bearing seat and the inhibition joint;
The first shaft coupling is arranged at the second end of the main bearing seat, the Z-axis linkage frame is connected with the main bearing seat through the first shaft coupling, a Z-axis limiting rod is arranged on the Z-axis linkage frame, the X-axis transmission unit is connected with the Z-axis transmission unit through the Z-axis limiting rod, the Z-axis limiting rod is used for playing a limiting role, and the Z-axis transmission unit drives the X-axis transmission unit to move through the Z-axis limiting rod;
The deflection sleeve is arranged on the main bearing seat and provided with a positioning hole;
the deflection adjusting rod is arranged on the deflection sleeve in a penetrating way through the positioning hole.
3. The extraction suppression mechanism for an ion implanter of claim 1, wherein the suppression pole unit comprises,
The suppression seat is provided with an installation space, a suppression electrode II is installed on the suppression seat, and a first installation hole is formed in the suppression seat;
the mixed flow baffle is provided with a second mounting hole matched with the first mounting hole, and is matched with the first mounting hole through the second mounting hole and locked through a connecting piece.
4. The extraction suppression mechanism for an ion implanter according to claim 1, wherein the Y-axis drive unit comprises,
Y-direction linkage plates, on which Y-direction couplings are arranged;
the Y-direction bearing seat is used for providing a supporting and installing space, a transmission shaft I is arranged in the Y-direction bearing seat, and a transmission gear I is sleeved on the transmission shaft I;
the first end of the Y-direction screw rod is connected with the Y-direction linkage plate through a Y-direction coupler, and the second end of the Y-direction screw rod is arranged on the Y-direction bearing seat;
The first driving motor is arranged on the Y-direction bearing seat, the output end of the first driving motor is provided with a second transmission gear which is meshed with the first transmission gear, and the first driving motor transmits driving force to the transmission shaft through the first transmission gear and the second transmission gear and drives the Y-direction screw rod to rotate.
5. The extraction suppression mechanism for an ion implanter according to claim 1, wherein the Z-axis drive unit comprises,
The Z-direction bearing seat is used for providing a supporting and installing space, a transmission shaft II is arranged in the Z-direction bearing seat, and a transmission gear III is sleeved on the transmission shaft II;
the first end of the Z-direction screw rod is arranged on the Z-direction bearing seat, and the second end of the Z-direction screw rod extends outwards;
The second driving motor is arranged on the Z-direction bearing seat, the fourth driving gear is arranged at the output end of the second driving motor and meshed with the third driving gear, and the second driving motor transmits driving force to the second driving shaft through the third driving gear and the fourth driving gear and drives the Z-direction screw rod to rotate.
6. The extraction suppression mechanism for an ion implanter according to claim 1, wherein the deflection axis drive unit,
The deflection bracket is provided with a deflection coupler;
the deflection bearing seat is used for providing a supporting and installing space, a transmission shaft III is arranged in the deflection bearing seat, and a transmission gear V is sleeved on the transmission shaft III;
the first end of the deflection screw rod is connected with the Y-direction linkage plate through a deflection coupler, and the second end of the deflection screw rod is arranged on the deflection bearing seat;
And the driving motor III is arranged on the deflection bearing seat, the output end of the driving motor III is provided with a transmission gear six, the transmission gear six is meshed with the transmission gear five, and the driving motor III transmits driving force to the transmission shaft III through the transmission gear III and drives the deflection screw rod to rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411803769.7A CN119275080B (en) | 2024-12-10 | 2024-12-10 | Extraction suppression mechanism for ion implanter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411803769.7A CN119275080B (en) | 2024-12-10 | 2024-12-10 | Extraction suppression mechanism for ion implanter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN119275080A true CN119275080A (en) | 2025-01-07 |
| CN119275080B CN119275080B (en) | 2025-03-11 |
Family
ID=94120039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202411803769.7A Active CN119275080B (en) | 2024-12-10 | 2024-12-10 | Extraction suppression mechanism for ion implanter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN119275080B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006186162A (en) * | 2004-12-28 | 2006-07-13 | Nsk Ltd | Rotation holding device |
| CN101467217A (en) * | 2006-06-13 | 2009-06-24 | 山米奎普公司 | Ion beam apparatus and method for ion implantation |
| CN212625479U (en) * | 2019-05-29 | 2021-02-26 | Ict集成电路测试股份有限公司 | Charged particle beam device, objective lens module, and electrode device |
| CN113967958A (en) * | 2021-11-29 | 2022-01-25 | 常州信息职业技术学院 | XY platform moving mechanism for laser additive manufacturing |
| CN216597489U (en) * | 2021-11-15 | 2022-05-24 | 浙江中科尚弘离子装备工程有限公司 | Injection process monitoring device of ion implanter |
| CN117038421A (en) * | 2023-07-21 | 2023-11-10 | 北京烁科中科信电子装备有限公司 | Beam shielding device linked with extraction electrode and ion implanter |
-
2024
- 2024-12-10 CN CN202411803769.7A patent/CN119275080B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006186162A (en) * | 2004-12-28 | 2006-07-13 | Nsk Ltd | Rotation holding device |
| CN101467217A (en) * | 2006-06-13 | 2009-06-24 | 山米奎普公司 | Ion beam apparatus and method for ion implantation |
| CN212625479U (en) * | 2019-05-29 | 2021-02-26 | Ict集成电路测试股份有限公司 | Charged particle beam device, objective lens module, and electrode device |
| CN216597489U (en) * | 2021-11-15 | 2022-05-24 | 浙江中科尚弘离子装备工程有限公司 | Injection process monitoring device of ion implanter |
| CN113967958A (en) * | 2021-11-29 | 2022-01-25 | 常州信息职业技术学院 | XY platform moving mechanism for laser additive manufacturing |
| CN117038421A (en) * | 2023-07-21 | 2023-11-10 | 北京烁科中科信电子装备有限公司 | Beam shielding device linked with extraction electrode and ion implanter |
Also Published As
| Publication number | Publication date |
|---|---|
| CN119275080B (en) | 2025-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN115839965B (en) | Rotary CT imaging detection equipment | |
| KR0129662B1 (en) | Moving table device | |
| CN101241314B (en) | 6 freedom degrees precision positioning station capable of compensating Z-direction position | |
| CN102756334B (en) | Cutting device | |
| CN103424578B (en) | Probe station rotary lifting mechanism | |
| CN103472680B (en) | Silicon wafer pre-alignment device | |
| US7025005B2 (en) | Stage device and angle detecting device | |
| CN111288952B (en) | Automatic centering adjusting tool for rotary transformer | |
| CN103528514B (en) | The many visual fields of machine vision work in coordination with mechanism and equipped with this mechanism measurement with detection device | |
| CN119275080B (en) | Extraction suppression mechanism for ion implanter | |
| CN111185748B (en) | Direction adjusting mechanism | |
| CN104538324B (en) | A kind of ion implantation apparatus beam horizontal direction implant angle measure and control device and investigating method | |
| CN107932450A (en) | A kind of horizontal universal adjusting device | |
| JP5544419B2 (en) | Scanning electron microscope | |
| CN106569396B (en) | Target locating set | |
| CN221101266U (en) | Lens macro-movement calibration device of direct-writing exposure machine | |
| KR20120091189A (en) | Mask holding mechanism | |
| CN117038421A (en) | Beam shielding device linked with extraction electrode and ion implanter | |
| JP6539109B2 (en) | Charged particle beam device and sample lifting device | |
| CN109224323A (en) | A kind of proton therapeutic rotary frame and its assembly method | |
| CN116794641A (en) | Novel target | |
| KR101710977B1 (en) | Electrode adjustment assembly and method for adjusting an electrode | |
| CN204254186U (en) | A kind of split type ultraprecise static air pressure single axle table | |
| JP2005005028A (en) | Intensity distribution measurement method and device for charged particles, and semiconductor manufacturing apparatus | |
| JP2602303B2 (en) | Moving table equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |