CN119186225A - Hydrogen-containing tail gas treatment device and method - Google Patents
Hydrogen-containing tail gas treatment device and method Download PDFInfo
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- CN119186225A CN119186225A CN202411508711.XA CN202411508711A CN119186225A CN 119186225 A CN119186225 A CN 119186225A CN 202411508711 A CN202411508711 A CN 202411508711A CN 119186225 A CN119186225 A CN 119186225A
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- 239000007789 gas Substances 0.000 title claims abstract description 138
- 239000001257 hydrogen Substances 0.000 title claims abstract description 101
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 101
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 98
- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000006243 chemical reaction Methods 0.000 claims abstract description 99
- 238000010438 heat treatment Methods 0.000 claims abstract description 55
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 57
- 230000000903 blocking effect Effects 0.000 claims description 11
- 239000006185 dispersion Substances 0.000 claims description 7
- 238000007789 sealing Methods 0.000 claims description 5
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 239000007800 oxidant agent Substances 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 230000002596 correlated effect Effects 0.000 claims description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 13
- 229910052802 copper Inorganic materials 0.000 description 13
- 239000010949 copper Substances 0.000 description 13
- 238000007254 oxidation reaction Methods 0.000 description 13
- 238000003780 insertion Methods 0.000 description 9
- 230000037431 insertion Effects 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 238000002156 mixing Methods 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 230000003197 catalytic effect Effects 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 238000004880 explosion Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 3
- 239000005751 Copper oxide Substances 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 238000002485 combustion reaction Methods 0.000 description 3
- 229910000431 copper oxide Inorganic materials 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(I) oxide Inorganic materials [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- KRFJLUBVMFXRPN-UHFFFAOYSA-N cuprous oxide Chemical compound [O-2].[Cu+].[Cu+] KRFJLUBVMFXRPN-UHFFFAOYSA-N 0.000 description 2
- 229940112669 cuprous oxide Drugs 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000036632 reaction speed Effects 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
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- 230000000295 complement effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
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- 239000002826 coolant Substances 0.000 description 1
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- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000003075 superhydrophobic effect Effects 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
本发明公开了一种含氢尾气处理装置和方法，其中含氢尾气处理装置，包括：壳体，具有反应腔；尾气进气管，用于导入含氢尾气；空气进气管；加热装置；测温装置，用于测量反应腔内预定的反应区的温度；以及控制单元，接入所述测温装置，并输出控制加热装置，以闭环的控制所述温度。依据本发明的含氢尾气处理装置结构简练，运行可靠性相对较好。
The present invention discloses a hydrogen-containing tail gas treatment device and method, wherein the hydrogen-containing tail gas treatment device comprises: a housing having a reaction chamber; a tail gas inlet pipe for introducing hydrogen-containing tail gas; an air inlet pipe; a heating device; a temperature measuring device for measuring the temperature of a predetermined reaction zone in the reaction chamber; and a control unit connected to the temperature measuring device and outputting a control heating device to control the temperature in a closed loop. The hydrogen-containing tail gas treatment device according to the present invention has a simple structure and relatively good operating reliability.
Description
Technical Field
The invention relates to a device for treating hydrogen contained in hydrogen-containing tail gas, and also relates to a method for treating hydrogen contained in hydrogen-containing tail gas.
Background
In view of the relatively complex components of the exhaust gas, the treatment of each component of the exhaust gas is often not accomplished in one exhaust gas treatment device. The semiconductor process tail gas basically contains hydrogen, and if the tail gas is improperly treated, the explosion is easily caused by the hydrogen. Hydrogen tends to be specialized in its handling because it is flammable, poorly water soluble, and poorly soluble in other solutes. Thus, for semiconductor process off-gases, it is often necessary to dispose of the hydrogen contained therein at a given stage using dedicated process equipment.
One common method of treating hydrogen in a hydrogen-containing tail gas is a combustion process, which appears to be simple and direct, but not in actual conditions. Firstly, in the application of directly taking hydrogen as fuel, the hydrogen concentration in the tail gas of the semiconductor process has higher requirement, but the hydrogen content in the tail gas of the semiconductor process cannot always meet the requirement, so that other components in the tail gas of the semiconductor process need to be treated before the tail gas containing hydrogen is burnt, and meanwhile, the tail gas containing hydrogen needs to be concentrated, so that the hydrogen content reaches the condition of being directly burnt. In addition, the burner is provided, hydrogen is ignited through relatively high temperature, and because the hydrogen is unstable in combustion under the working condition, equipment for igniting the hydrogen in the burner needs to continuously work, and the actual treatment cost is very high.
Another common method for treating hydrogen-containing tail gas is a catalytic treatment method, which is mainly applied to the treatment of hydrogen in hydrogen-containing waste gas with low concentration. In this catalytic treatment method, noble metal platinum or palladium (which is less expensive than platinum metal) is used as a catalyst, so that a relatively stable oxidation reaction of hydrogen gas at a relatively low concentration is still performed. The application of the catalytic treatment method is mainly represented by the catalytic oxidation method, and is mostly applied to the realization of the fuel cell which meets the requirement of controllable cost of noble metal, in other words, the actual treatment cost is higher if the application scene is changed to the treatment of the hydrogen-containing tail gas. In addition, catalytic treatment processes are more prone to explosion risks in the treatment of relatively open hydrogen-containing tail gas, and therefore, one often requires extremely tight temperature control of the catalytic treatment process to avoid the closed vessel for catalytic treatment reaching the explosion limit.
In some implementations, the hydrogen in the hydrogen-containing tail gas is disposed in an indirect reaction mode, special equipment is needed for assistance, the special equipment is configured into a tank structure, a reaction tank is arranged in the tank body, a fixed cylinder is arranged in the center of the reaction tank, a copper column is arranged in the fixed cylinder, ventilation holes are uniformly distributed in the fixed cylinder, and the hydrogen-containing tail gas is led into the fixed cylinder through the ventilation holes. Wherein the copper pillars are adapted with corresponding heating means to maintain the copper pillars at a predetermined temperature. At the same time, the fixed cylinder introduces air through the pipeline to oxidize the copper column surface. Copper column surface can generate copper oxide or cuprous oxide due to oxidation, and copper oxide or cuprous oxide reacts with hydrogen to generate copper and water. The removal of hydrogen contained in the hydrogen-containing tail gas can be realized at relatively low temperature through the indirect reaction. The treatment method needs to avoid the direct reaction of hydrogen and oxygen, the reaction temperature is generally lower than 550 ℃, under the condition, the oxidation reaction of copper is carried out slowly, the reaction accords with a parabolic rule, namely the initial reaction speed of the oxidation reaction is fastest, and then the reaction speed is gradually reduced, in other words, the treatment method has very low efficiency. Meanwhile, copper generated after copper oxide reacts with hydrogen, for example, is not directly attached to a copper column, but is settled, and if the copper is improperly disposed, the generated copper is deposited at the bottom of a fixed cylinder, so that the subsequent maintenance cost is very high. And the copper column can be continuously worn, and the copper column needs to be replaced regularly, so that the difficulty of subsequent maintenance is further increased.
Disclosure of Invention
The invention aims to provide a hydrogen-containing tail gas treatment device which is simple in structure and relatively good in operation reliability, and also provides a hydrogen-containing tail gas treatment method.
According to a first aspect of an embodiment of the present invention, there is provided a hydrogen-containing tail gas treatment apparatus, including:
The shell is provided with a reaction cavity, the lower end of the reaction cavity is provided with an air inlet, and the upper part of the reaction cavity is provided with an air outlet;
the tail gas inlet pipe is inserted into the reaction cavity from the gas inlet and is used for introducing hydrogen-containing tail gas;
The device comprises an air inlet pipe, an air distribution cavity, a reaction cavity, a baffle plate, a gas inlet pipe, a gas outlet pipe and a gas inlet pipe, wherein the air inlet pipe is arranged in the first configuration or the second configuration, is nested outside the tail gas inlet pipe in the first configuration and is inserted into the reaction cavity and used for guiding compressed air into the reaction cavity;
the heating device is arranged on the shell, and the heating body is positioned in the reaction cavity to heat a preset reaction area, wherein the reaction area is an exhaust area shared by the tail gas inlet pipe and the air inlet pipe;
a temperature measuring device for measuring the temperature of the reaction zone, and
And the control unit is connected with the temperature measuring device and outputs and controls the heating device to control the temperature in a closed loop.
Optionally, if the air inlet pipe is nested outside the tail gas inlet pipe, the length of the air inlet pipe which is inserted into the reaction cavity is shorter than the length of the tail gas inlet pipe which is inserted into the reaction cavity.
Optionally, a water blocking eave is obliquely arranged above the heating device so as to prevent condensed water dropping from the upper part from contacting the heating device.
Optionally, the heating device is a heating rod, and a seat of the heating rod is installed on a first side of a shell defining the reaction cavity;
Correspondingly, the water retaining eave extends from the first side to the second side in a hanging manner and inclines downwards;
the first side is opposite the second side.
Optionally, the tail end of the water retaining eave is provided with an arc-shaped part with a circle center at the lower part;
The end of the arc-shaped part is provided with a blade-shaped head.
Optionally, in the second configuration, a water outlet is formed at the bottom of the air dispersing cavity;
The water outlet is connected with a drain pipe;
The drain pipe is provided with a U-shaped water bend for water sealing.
Optionally, the air outlet is provided with an exhaust pipe, and a differential pressure meter is arranged on the exhaust pipe;
Accordingly, the exhaust pipe is connected to the suction device.
According to a second aspect of the embodiment of the present invention, there is provided a method for treating hydrogen-containing tail gas, the method comprising:
Introducing compressed air and hydrogen-containing tail gas into a closed shell, wherein the introduced compressed air and hydrogen-containing tail gas are dynamically mixed in a preset reaction zone in the shell, and the compressed air is an excessive oxidant relative to the hydrogen-containing tail gas;
the reaction zone is heated by a heating device, and the temperature of the reaction zone is maintained at 850+/-10 ℃ in a closed-loop control mode.
Optionally, the flow ratio of the compressed air to the hydrogen-containing tail gas is not less than 7:1 and not more than 13:1, and is positively correlated with the concentration of hydrogen in the hydrogen-containing tail gas.
Optionally, the gas after the reaction in the reaction zone is pumped away by adopting a forced pumping way.
In the embodiment of the invention, the provided hydrogen-containing tail gas treatment device adopts a simple structure to realize complex treatment, firstly, a reaction cavity is constructed by using a shell, the reaction cavity is provided with an air inlet and an air outlet in an adaptive mode, wherein the air inlet is used for introducing a tail gas inlet pipe and an air inlet pipe, and a heating device is arranged in a common exhaust area of the tail gas inlet pipe and the air inlet pipe so as to enable hydrogen in the tail gas and oxygen in the air to generate oxidation reaction in an environment of 850+/-10 ℃ in a heating mode before compressed air and the tail gas are excessively mixed. The reaction controllability is better by utilizing insufficient mixing, and the problem of explosion is not easy to generate. In addition, no catalyst is needed in the reaction process, no substance for providing indirect reaction is needed, the whole structure is compact, and the whole operation cost is low.
Drawings
FIG. 1 is a schematic diagram of a hydrogen-containing tail gas treatment apparatus according to an embodiment.
Fig. 2 is an enlarged view of the section I of fig. 1.
In the figure: the device comprises a tail gas inlet pipe 1, an air inlet pipe 2, an air dispersing cavity 3, a baffle plate 4, a reaction cavity 5, an upward channel 6, a water retaining eave 7, an exhaust cavity 8, an exhaust pipe 9, 10, a differential pressure meter, 11, a heat insulation shell, 12, a heating rod, 13, a thermocouple, 14, a nozzle, 15, a water bay, 16, a drain pipe, 17, a blade head, 18, a convex transition part and 19, and a water dripping surface.
Detailed Description
In the embodiment of the invention, the hydrogen in the hydrogen-containing tail gas is oxidized by adopting excessive air at a preset temperature, and the excessive air seems to have waste, but the whole treatment cost is not high compared with the traditional hydrogen-containing tail gas treatment method. It should also be appreciated that the use of excess air does not result in an increase in pollutants, nor does it thus burden subsequent tail gas treatment.
Furthermore, in embodiments of the present invention, the excess air also acts as a cooling medium, avoiding overheating of the remaining chambers except the reaction chamber reaction zone.
Since the concentration of hydrogen in the exhaust gas has a time-varying characteristic, and the oxygen content in the air is relatively stable, in other words, the chemical heat generated by the reaction is not stable, a heating device such as a heating rod 12 is used, which aims to adjust the temperature of a predetermined reaction zone in the reaction chamber according to the actual working conditions, but the temperature of the other zones except the reaction zone is not high. Therefore, the problem of the treatment of condensed water is also involved in the embodiments of the present invention.
The hydrogen-containing tail gas treatment device is mainly described below, and the hydrogen-containing tail gas treatment device is described and a hydrogen-containing tail gas treatment method is comprehensively described, so that the hydrogen-containing tail gas treatment device and the hydrogen-containing tail gas treatment method complement each other, and the hydrogen-containing tail gas treatment device can still finish the hydrogen-containing tail gas treatment under the condition that the used process equipment is relatively concise.
Based on the foregoing, in the embodiment of the present invention, the reaction of oxygen in the excessive air to hydrogen in the hydrogen-containing tail gas under the predetermined temperature condition is performed without the aid of a catalyst or an intermediate substance, but with the aid of a pure oxidation reaction, the byproduct is water, and no consumable material exists, so that the maintainability of the later stage is relatively good.
The controlled reaction is carried out in a closed vessel having a thermal insulation housing 11 in the structure illustrated in fig. 1, which may be in the shape of a tank as a whole, and upper and lower ends sealed, and for convenience of description, the parts for upper and lower sealing are respectively referred to as an upper cover and a lower cover, wherein the upper cover is provided with an air outlet, which may be referred to as an air outlet in the following embodiments by being configured in a forced air suction manner, and the corresponding pipe installed at the air outlet is an air outlet pipe 9 shown in fig. 1.
In fig. 1, the insulating housing 11 has a plurality of chambers, wherein the chamber located in the middle is a reaction chamber 5, and the oxidation reaction of hydrogen in the tail gas containing hydrogen is mainly completed in the reaction chamber 5.
Below the reaction chamber 5 is an air dispersion chamber 3, and the air inlet pipe 2 is connected to the air dispersion chamber 3 from the side, so that the compressed air is dispersed after entering the air dispersion chamber 3, and the non-uniformity of beam air supply is avoided.
The tail gas inlet pipe 1 passes through the air dispersing cavity 3 upwards from the lower end of the heat preservation shell 11 and enters the reaction cavity 5. Correspondingly, the tail gas inlet pipe 1 is connected with the lower sealing cover in an airtight manner. It will be appreciated that such an airtight connection is a static connection and that the exhaust gas inlet pipe 1 is not mechanically worn and may be secured to the lower cover using, for example, welding.
It should be further appreciated that if less consideration is given to flow resistance, for example, the exhaust gas inlet pipe 1 may be accessed from the side of the insulated housing 11 and then converted using a bent pipe into a pipe portion that circulates up and down as shown in fig. 1, such conversion being conventional in the art.
The exhaust gas inlet pipe 1 can also be detachably mounted on the lower cover, and due to the static connection, only the reaction area in the reaction chamber 5 has relatively high temperature, while the air dispersion chamber 3 shielded by the baffle plate 4 can be understood as a cooling chamber, which blocks the heat influence of the heating device such as the heating rod 12 on the lower structure, i.e. the cooperation between the exhaust gas inlet pipe 1 and the lower cover can completely use the conventional mechanical seal.
The arrangement of the exhaust gas intake pipe 1 and the air intake pipe 2 is based on the flow rate, and the flow rate ratio is not less than 7. It should be appreciated that the oxygen content in the air is about 21% (volume fraction), the hydrogen content in the semiconductor tail gas is affected by various factors such as process conditions, equipment conditions and operating parameters, and the hydrogen content in the tail gas is unstable, but for the same process equipment, a range can be approximately determined, and then the maximum value of the range is matched to determine the air feeding amount, so that the excessive air is ensured to be used, the hydrogen in the tail gas is relatively well removed, and the equipment can be safely operated.
In the structure illustrated in fig. 1, the baffle plate 4 is provided in the inner cavity of the heat-insulating housing 11, and the inner cavity of the heat-insulating housing 11 is divided into two basic chambers, the portion below the baffle plate 4 is called an air dispersion chamber 3, the portion above the baffle plate 4 is called a reaction chamber 5, and although the exhaust chamber 8 is also provided in the structure illustrated in fig. 1, the exhaust chamber 8 may be used as an exhaust port assembly of the reaction chamber 5.
In fig. 1, the baffle plate 4 is provided with a central hole, but it should be understood that the insertion hole of the baffle plate 4 for the exhaust gas inlet pipe 1 to be inserted into the reaction chamber 5 from outside does not necessarily need to be a central hole, and the position of the insertion hole is determined by the preset position of the reaction zone, and in fig. 1, the direction in which the outlet of the exhaust gas inlet pipe 1 is punched is the area in which the reaction zone is located.
In the structure illustrated in fig. 1, as previously described, the compressed air is also delivered from below to above. Accordingly, the diameter of the insertion hole is larger than the outer diameter of the exhaust gas inlet pipe 1, so when the exhaust gas inlet pipe 1 passes through the insertion hole, a gap is left between the exhaust gas inlet pipe 1 and the insertion hole, and the gap forms an upward passage for compressed air.
As is apparent from the foregoing description, the air is fed in the form of compressed air, and in the structure illustrated in fig. 1, the gap is represented as a nozzle 14 shown in the drawing, that is, the compressed air is upward in the form of injection, so that the hydrogen-containing exhaust gas introduced through the exhaust gas inlet pipe 1 is quickly diluted, and at the same time, excessive mixing is not easily generated due to its rapid flow rate.
For convenience of description, the manner of intervention of the air intake pipe 2 is divided into two, wherein the manner of intervention by means of the air dispersion chamber 3 is referred to as a second configuration, which can more advantageously avoid excessive mixing of the compressed air with the hydrogen-containing tail gas. In other embodiments, the insertion of the air inlet pipe 2 is referred to as a first configuration, in which the air inlet pipe 2 is introduced directly by means of a sleeve. Wherein the air inlet pipe 2 forms an outer pipe, the tail gas inlet pipe 1 forms an inner pipe, and a channel between the inner pipe and the outer pipe is used for conducting compressed air. In this case, the manner of inserting the sleeve may be referred to as the foregoing manner of inserting (non-insertion) the exhaust gas inlet pipe, and will not be described herein.
In some embodiments, the insertion hole and the exhaust gas inlet pipe 1 may be tightly fit (interference fit or transition fit) or connected (such as welded), and a set of ventilation holes may be disposed around the insertion hole, so as to facilitate the upward injection of the compressed air.
In addition, regarding the connection between the air inlet pipe 2 and the heat insulation shell 11, the connection is also static connection, and the seal between the two is also static seal, so that the implementation is relatively simple, and the details are not repeated here.
In an embodiment of the invention, the heating means are not provided for igniting the hydrogen gas, but rather for forming a temperature field which enables the oxidation of the hydrogen gas in air in a non-combustion manner.
The temperature field is also called a temperature field, and refers to a collection of temperatures at various points in a material system, that is, simply to say, the temperature of different areas is different, and a dominant manner for representing the different temperatures is used to represent the temperature distribution. Reference may be made to the well-known contour representation.
It can be seen that the heating device also has a comparatively pronounced temperature field for the heating of the gas mixture.
In addition, in the structure illustrated in fig. 1, the shielding of the water blocking eave 7 enables the reacted air flow to have a more stable flow direction, and the area meeting the conditions of the reaction area is more determined.
As regards the reaction zone, as previously described, the temperature parameter is used to determine, i.e. the region where the gas mixture temperature is 850±10 ℃ as previously described, in which the oxygen and hydrogen in the gas mixture produce an oxidation reaction.
If the temperature is relatively high, the oxidation reaction can be maintained, but in the embodiment of the present invention, the stable progress of the reaction is focused, in other words, the reaction is not performed too fast or too slow, but it is desirable to maintain the reaction in a relatively stable zone, so that the flow rate of the compressed air flowing through the air inlet pipe 2 can be adapted, and the flow rate of the exhaust gas inlet pipe 1 can be further adapted, so that the overall operation economy is better.
The heating device comprises a heating body which is positioned in the reaction cavity and used for heating a preset reaction zone, and the heating device takes a heat-preserving shell 11 as an installation matrix. And as previously described, the reaction zone is an exhaust zone common to the exhaust gas intake pipe 1 and the air intake pipe 2. The exhaust area may be determined based on, for example, the location of the heating body on the heating rod 12, and the desired heating range.
In the structure illustrated in fig. 1, the thermocouple 13 is used as a temperature measuring device, and in the drawing, the thermocouple 13 is positioned slightly downward, and the measured temperature is not necessarily the temperature of the reaction zone. It should be appreciated that in embodiments of the present invention, the temperature of the reaction zone may be measured indirectly by means of a temperature field. Just like the contour, when a certain temperature difference exists between the reaction area and the area where the probe of the thermocouple 13 is located, the current temperature of the low temperature area is measured and obtained, so that the current temperature of the high temperature area can be indirectly obtained.
It should be further noted that, setting the thermocouple 13 in a relatively low temperature area is beneficial to prolonging the service life of the temperature measuring device such as the thermocouple 13, and although there may be some error in indirect measurement, the influence on the measurement accuracy is generally relatively small, especially when the temperature measuring method is applied to a scheme in which the temperature field is relatively stable. And as mentioned above, by means of the temperature field, the temperature measuring device is arranged in the low temperature area, so that the temperature measuring device can be effectively protected.
It should be appreciated that in embodiments of the present invention, the temperature field also tends to stabilize under relatively steady input conditions of airflow.
Further, a control unit is provided, which is connected to the temperature measuring device at point I (input point) and outputs a control signal for controlling the heating device to control the temperature in a closed loop.
In addition, it should be appreciated that at the initial stage of the operation of the hydrogen-containing tail gas treatment device, the heating device heats the temperature of the reaction zone to a predetermined temperature, and during the steady operation, the oxidation reaction generates heat, and the heating device correspondingly cools down. Meanwhile, because the compressed air adopts an excessive input mode, a part of heat can be taken away by the excessive compressed air, and under the condition, the heating device mainly aims at adjusting the relative stability of the temperature.
As for the control unit, it is not necessarily a controller, a PLC (programmable logic controller), a single chip microcomputer, or the like, but may be a finished product temperature control device, and when the finished product temperature control device is adopted, it is often used only for temperature control, but cannot control others. For other types of control elements, such as a controller, it is also possible to control, for example, the flow rate of the exhaust gas inlet pipe 1, etc. In other words, if the flow rates of the exhaust gas and the compressed air are determined in a predetermined manner and then no longer changed during operation, the control may be embodied only in the temperature control of the reaction zone, and thus, a dedicated instrument such as a temperature controller may be selected. And when the required sampling types and control types are more, a controller, a PLC and the like are selected.
As for the degree of mixing between the compressed air and the hydrogen-containing off-gas, as described above, it is necessary to avoid excessive mixing, but it is also necessary to have a certain degree of mixing, and in the structure illustrated in fig. 1, the nozzle 14 is located at a certain distance from the outlet of the off-gas inlet pipe 1, which is referred to as the first distance. As can be seen from fig. 1, the exhaust gas inlet pipe 1 and the heating rod 12 have a second distance, which is approximately equal to the first distance, and the first distance is generally 0.8 to 1.5 times, and preferably 0.98 times, the second distance. The compressed air sprayed out of the nozzle 14 has certain diffusion before contacting with the hydrogen-containing tail gas led in by the tail gas inlet pipe 1, and has the phenomenon of wrapping the hydrogen-containing tail gas, and although the two gases which are dynamically input do not generate obvious interfaces after contacting, the phenomenon that the hydrogen-containing tail gas is exposed is not kept steady, so that the hydrogen in the hydrogen-containing tail gas can be orderly oxidized, and the hydrogen is fully oxidized under the condition of avoiding excessive mixing.
In other embodiments, in which the passages for introducing the two gases are configured in a sleeve-fitting manner, the length of the air intake pipe 2 inserted into the reaction chamber 5 is shorter than the length of the exhaust gas intake pipe 1 inserted into the reaction chamber, thereby also exhibiting the state shown in fig. 1.
As mentioned above, since the excess air is used, the air used for the reaction is only a part of it, especially the oxygen in the air at the inner layer as in fig. 1, the probability of the oxygen in the air at the outer layer participating in the oxidation reaction is lower, and the cooling effect is more exerted. In other words, although the temperature in the reaction zone is relatively high and is far higher than the boiling point of water, the reaction zone controlled in the embodiment of the present invention is relatively small, the temperature outside the reaction zone is low, the vapor generated by the reaction is liquefied by heat exchange with the relatively cold part of the excessive compressed air during the upward movement, in order to avoid the liquefied water from dropping onto the heating rod 13, for example, a water blocking eave 7 is obliquely arranged above the heating device such as the heating rod 13, and the liquid water generated by condensation flows down by the diversion of the water blocking eave 7, avoiding the heating rod 12, for example.
Because the water retaining eave 7 is arranged, the discharge distance of the reacted air flow is increased, so that the water vapor in the reacted air flow is removed, the water retaining eave 7 further influences the heating of the heating rod 12, the influence of the heat convection phenomenon is reduced, and the range control of the reaction area is more accurate.
Accordingly, in the structure illustrated in fig. 1, the seat of the heating rod 12 serving as the heating device is located at the right side of the heat-insulating housing 11, the heating body of the heating rod 12 is cantilevered leftward, and the water blocking eave 7 is also installed at the right side of the heat-insulating housing 11 and is also cantilevered leftward, the cantilevered distance is greater than the cantilevered distance of the heating rod 12, i.e., beyond the heating rod 12 leftward, so that condensed water may flow down from the left side of the water blocking eave 7.
The water retaining eave 7 is also similar to a partition plate, and only an ascending channel 6 is left on the left side of fig. 1, and the rest is sealed.
In order to better enable the condensate to flow downwards, the water retaining eave 7 is the same as the eave and has a downward inclined structure.
In addition, the water retaining eave 7 can be further provided with a coating, such as a superhydrophobic (contact angle is larger than 150 degrees, and rolling contact angle is smaller than 10 degrees) coating, so that water can flow downwards, and scale points formed by water drying forming water drops after the water retaining eave stops working are avoided.
Further, if the water blocking eave 7 is made of a single inclined plate body, even if the inclined state is adopted, a part of water is crawled upwards along the lower surface of the water blocking eave 7 due to the influence of newton boundary friction force and surface tension, therefore, in the preferred embodiment, the tail end of the water blocking eave 7 is provided with an arc-shaped part with the center of the circle being at the lower position, such as a convex transition part 18 shown in fig. 2, so as to increase the rolling angle, thereby facilitating the downward rolling of the water drops, and eliminating the phenomenon that the liquid crawls upwards along the lower surface of the water blocking eave 7.
Further, as shown in the structure of fig. 2, the tip of the convex transition portion 18 has a blade-shaped head 17, and condensed water is concentrated at the blade-shaped head 17 and drops there even if the amount is very small.
The condensed water can flow downwards through the nozzle 4, for example, a water outlet is arranged at the bottom of the air dispersing cavity 2, the water outlet is connected with a water discharge pipe 16, and in order to prevent air leakage, the water discharge pipe 16 is provided with a U-shaped water bend, such as the water bend shown in fig. 1, and a U-shaped part is arranged in the figure, so that water sealing can be realized, and air leakage is avoided.
In addition, in the structure illustrated in fig. 1, the air outlet is provided with an air outlet pipe 9, the air outlet pipe 9 is provided with a differential pressure meter 10, and correspondingly, the air outlet pipe 9 is connected with a suction device, so that the air outlet pipe 9 maintains relatively stable negative pressure, and the hydrogen is prevented from gathering in the reaction cavity 5 and generating full mixing, thereby further improving the safety.
The following briefly describes a hydrogen-containing tail gas treatment process comprising:
Introducing compressed air and hydrogen-containing tail gas into a closed shell, wherein the introduced compressed air and hydrogen-containing tail gas are dynamically mixed in a preset reaction zone in the shell, and the compressed air is an excessive oxidant relative to the hydrogen-containing tail gas;
the reaction zone is heated by a heating device, and the temperature of the reaction zone is maintained at 850+/-10 ℃ in a closed-loop control mode.
Claims (10)
1. A hydrogen-containing tail gas treatment device, comprising:
The shell is provided with a reaction cavity, the lower end of the reaction cavity is provided with an air inlet, and the upper part of the reaction cavity is provided with an air outlet;
the tail gas inlet pipe is inserted into the reaction cavity from the gas inlet and is used for introducing hydrogen-containing tail gas;
The device comprises an air inlet pipe, an air distribution cavity, a reaction cavity, a baffle plate, a gas inlet pipe, a gas outlet pipe and a gas inlet pipe, wherein the air inlet pipe is arranged in the first configuration or the second configuration, is nested outside the tail gas inlet pipe in the first configuration and is inserted into the reaction cavity and used for guiding compressed air into the reaction cavity;
the heating device is arranged on the shell, and the heating body is positioned in the reaction cavity to heat a preset reaction area, wherein the reaction area is an exhaust area shared by the tail gas inlet pipe and the air inlet pipe;
a temperature measuring device for measuring the temperature of the reaction zone, and
And the control unit is connected with the temperature measuring device and outputs and controls the heating device to control the temperature in a closed loop.
2. The hydrogen-containing exhaust gas treatment device according to claim 1, wherein if the air intake pipe is nested outside the exhaust gas intake pipe, a length of the air intake pipe that is interposed in the reaction chamber is shorter than a length of the exhaust gas intake pipe that is interposed in the reaction chamber.
3. The hydrogen-containing tail gas treatment device according to claim 1, wherein a water blocking eave is obliquely provided above the heating device to prevent condensed water dropping from above from contacting the heating device.
4. The hydrogen-containing tail gas treatment apparatus of claim 3, wherein the heating apparatus is a heating rod having a seat mounted on a first side of the housing defining the reaction chamber;
Correspondingly, the water retaining eave extends from the first side to the second side in a hanging manner and inclines downwards;
the first side is opposite the second side.
5. The hydrogen-containing tail gas treatment device according to claim 4, wherein the tail end of the water retaining eave is provided with an arc-shaped part with a circle center at the lower part;
The end of the arc-shaped part is provided with a blade-shaped head.
6. The hydrogen-containing tail gas treatment device according to any one of claims 3 to 5, wherein in the second configuration, a water outlet is provided at the bottom of the air dispersion chamber;
The water outlet is connected with a drain pipe;
The drain pipe is provided with a U-shaped water bend for water sealing.
7. The hydrogen-containing tail gas treatment device according to claim 1, wherein the gas outlet is provided with a gas exhaust pipe, and a pressure difference meter is arranged on the gas exhaust pipe;
Accordingly, the exhaust pipe is connected to the suction device.
8. A method for treating a hydrogen-containing tail gas, the method comprising:
Introducing compressed air and hydrogen-containing tail gas into a closed shell, wherein the introduced compressed air and hydrogen-containing tail gas are dynamically mixed in a preset reaction zone in the shell, and the compressed air is an excessive oxidant relative to the hydrogen-containing tail gas;
the reaction zone is heated by a heating device, and the temperature of the reaction zone is maintained at 850+/-10 ℃ in a closed-loop control mode.
9. The process of claim 8 wherein the flow ratio of compressed air to hydrogen-containing tail gas is not less than 7:1 and not greater than 13:1 and is positively correlated to the concentration of hydrogen in the hydrogen-containing tail gas.
10. The process of claim 8, wherein the gas after the reaction in the reaction zone is pumped away by forced evacuation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411508711.XA CN119186225A (en) | 2024-10-28 | 2024-10-28 | Hydrogen-containing tail gas treatment device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202411508711.XA CN119186225A (en) | 2024-10-28 | 2024-10-28 | Hydrogen-containing tail gas treatment device and method |
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| Publication Number | Publication Date |
|---|---|
| CN119186225A true CN119186225A (en) | 2024-12-27 |
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|---|---|---|---|
| CN202411508711.XA Pending CN119186225A (en) | 2024-10-28 | 2024-10-28 | Hydrogen-containing tail gas treatment device and method |
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| Country | Link |
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| CN (1) | CN119186225A (en) |
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2024
- 2024-10-28 CN CN202411508711.XA patent/CN119186225A/en active Pending
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