CN119162561B - Production method of coated cutter - Google Patents
Production method of coated cutter Download PDFInfo
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- CN119162561B CN119162561B CN202411678026.1A CN202411678026A CN119162561B CN 119162561 B CN119162561 B CN 119162561B CN 202411678026 A CN202411678026 A CN 202411678026A CN 119162561 B CN119162561 B CN 119162561B
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- 198sccm
- methane
- hydrogen
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 66
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 61
- 239000010432 diamond Substances 0.000 claims abstract description 61
- 239000011248 coating agent Substances 0.000 claims abstract description 49
- 238000000576 coating method Methods 0.000 claims abstract description 49
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 230000008021 deposition Effects 0.000 claims abstract description 17
- 239000000843 powder Substances 0.000 claims abstract description 11
- 238000005530 etching Methods 0.000 claims abstract description 7
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 115
- 229910052739 hydrogen Inorganic materials 0.000 claims description 58
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 57
- 239000001257 hydrogen Substances 0.000 claims description 57
- 239000011159 matrix material Substances 0.000 claims description 35
- 238000004140 cleaning Methods 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 17
- 238000003780 insertion Methods 0.000 claims description 16
- 230000037431 insertion Effects 0.000 claims description 16
- 238000005229 chemical vapour deposition Methods 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 13
- 238000004891 communication Methods 0.000 claims description 11
- 238000007599 discharging Methods 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 238000005137 deposition process Methods 0.000 claims description 9
- 238000002955 isolation Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 8
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- 239000003513 alkali Substances 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 6
- 239000008367 deionised water Substances 0.000 claims description 6
- 229910021641 deionized water Inorganic materials 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims description 6
- FHHJDRFHHWUPDG-UHFFFAOYSA-N peroxysulfuric acid Chemical compound OOS(O)(=O)=O FHHJDRFHHWUPDG-UHFFFAOYSA-N 0.000 claims description 6
- 239000000725 suspension Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000002585 base Substances 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 5
- 238000012360 testing method Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000007517 polishing process Methods 0.000 claims description 3
- 230000000284 resting effect Effects 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 1
- 230000006911 nucleation Effects 0.000 abstract description 11
- 238000010899 nucleation Methods 0.000 abstract description 11
- 238000005260 corrosion Methods 0.000 abstract description 7
- 230000007797 corrosion Effects 0.000 abstract description 7
- 239000013078 crystal Substances 0.000 abstract description 5
- 230000007547 defect Effects 0.000 abstract description 5
- 239000000126 substance Substances 0.000 abstract description 4
- 239000011230 binding agent Substances 0.000 abstract description 3
- 230000002349 favourable effect Effects 0.000 abstract description 3
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 abstract description 3
- 238000011068 loading method Methods 0.000 abstract description 2
- 238000007373 indentation Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000000429 assembly Methods 0.000 description 5
- 230000000712 assembly Effects 0.000 description 5
- 238000000926 separation method Methods 0.000 description 4
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
本发明公开了一种涂层刀具的生产方法，首先在基体预处理工序A中，A1可彻底清除刀具基体表面的油污，A2可实现腐蚀碳化钨晶粒，使粘结剂Co完全暴露出来，A3可实现刻蚀掉表面的Co元素，A4可在刀具基体表面形成缺陷，这些缺陷是金刚石的形核的有利位置，从而增加后期金刚石形核密度，同时附着在刀具基体表面的金刚石粉末则可直接作为金刚石形核的晶核；其次在装炉工序B中，将刀具基体固定在夹持机构上，行走机构带动炉盖移动到炉体正下方，抬升机构带动炉盖向上运动后与炉体相闭合，从而将刀具基体装入到化学气象沉积炉内，反之则将经过涂层沉积后的金刚石涂层刀具去除，最终具有提高涂层沉积生产效率的作用。
The invention discloses a production method of a coated tool. Firstly, in a substrate pretreatment process A, A1 can completely remove oil stains on the surface of a tool substrate, A2 can realize corrosion of tungsten carbide grains to completely expose a binder Co, A3 can realize etching of Co elements on the surface, and A4 can form defects on the surface of the tool substrate, which are favorable positions for diamond nucleation, thereby increasing the density of diamond nucleation in the later stage, and diamond powder attached to the surface of the tool substrate can be directly used as a crystal nucleus for diamond nucleation; secondly, in a furnace loading process B, the tool substrate is fixed on a clamping mechanism, a walking mechanism drives a furnace cover to move to the bottom of a furnace body, and a lifting mechanism drives the furnace cover to move upward and then close with the furnace body, so that the tool substrate is loaded into a chemical meteorological deposition furnace, and vice versa, the diamond coated tool after coating deposition is removed, and finally the coating deposition production efficiency is improved.
Description
Technical Field
The invention relates to the technical field of cutter production, in particular to a production method of a coated cutter.
Background
The diamond coating graphite processing cutter uses hard alloy as a matrix, and is prepared by preprocessing the matrix, depositing 10-30pm polycrystalline diamond film on the surface of the working area of the hard alloy matrix by using a vapor deposition method, and polishing.
For example, chinese patent publication No. CN117165913A, publication No. 2023, 12 and 5 discloses a tool with submicron diamond coating, a preparation method and application thereof, and specifically comprises the following steps of preparing a tool matrix, carrying out soft abrasive sand blasting treatment, carrying out surface roughening, carrying out Co removal treatment and depositing a coating.
In the process of depositing the coating, the cutter is required to be placed in a chemical vapor deposition furnace for coating deposition, but the cutter is troublesome to be placed in the furnace body of the chemical vapor deposition furnace, so that the problem of lower coating deposition efficiency is caused.
Disclosure of Invention
The invention aims to provide a production method of a coated cutter, which has the effect of improving the production efficiency of coating deposition.
The production method of the coating cutter comprises a substrate pretreatment process A, a charging process B, a coating deposition process C, a quality detection process D and a polishing process E, wherein the substrate pretreatment process A comprises the following steps of (A1) firstly placing a cutter substrate into an acetone solution for cleaning for 20 minutes, then placing the cutter substrate into an absolute ethanol solution for cleaning for 10 minutes so as to remove greasy dirt on the surface of the cutter substrate, (A2) corroding the cutter substrate by using an alkali solution for 30 minutes, firstly cleaning twice in deionized water and then spraying and cleaning after corrosion is finished, wherein the alkali solution is in a proportion of K 3[Fe(CN)6]:H2 O=12g:12g:120ml, (A3) corroding the cutter substrate by using a Caro acid solution for 1 minute, firstly cleaning twice in deionized water and then spraying and cleaning after corrosion is finished, wherein the Caro acid solution is in a proportion of 98% H 2SO4:H2O2 =2.4ml:80ml, (A4) carrying out ultrasonic pre-forming on diamond suspension for 60 minutes, and the diamond suspension is in a proportion of absolute ethanol of 0-100 nm diamond powder of 4-6 nm diamond powder=0.5g and 4-5 g absolute ethanol;
the charging process B comprises the following steps of charging a plurality of cutter matrixes into a chemical vapor deposition furnace;
The coating deposition process C comprises the following steps of introducing H 2 and CH 4 into a chemical vapor deposition furnace, heating a hot wire to 2500 ℃, setting technological parameters for adjusting gas flow, hot wire current, air pressure and temperature, and enabling the surface of a cutter to deposit a diamond film with the thickness of 40um to manufacture a diamond coating cutter;
The chemical vapor deposition furnace comprises a frame, a furnace body, a furnace cover, a feeding and discharging device and a clamping mechanism, wherein the furnace body, the furnace cover, the feeding and discharging device and the clamping mechanism are arranged on the upper surface of the furnace cover and used for fixing a cutter matrix, the furnace body is arranged downwards, the feeding and discharging device comprises an extension frame arranged on the frame, a running mechanism arranged on the extension frame and used for driving the furnace cover to horizontally move, and a lifting mechanism arranged on the frame and used for driving the furnace cover moving to the position right below the furnace body to move upwards and then closing the furnace body.
By adopting the technical scheme, firstly, in the substrate pretreatment process A, A1 can thoroughly remove oil stains on the surface of a cutter substrate, A2 can realize corrosion of tungsten carbide crystal grains, so that a binder Co is completely exposed, A3 can realize etching of Co elements on the surface, A4 can form defects on the surface of the cutter substrate, the defects are favorable positions of diamond nucleation, so that the density of diamond nucleation in the later stage is increased, meanwhile, diamond powder attached to the surface of the cutter substrate can be directly used as crystal nucleus of the diamond nucleation, and A5 can clean the surface of the cutter substrate after the preformed nucleation treatment so as to remove residual impurities on the surface and diamond powder which is not embedded;
And in the charging process B, the cutter matrix is fixed on a clamping mechanism, a traveling mechanism drives a furnace cover to move to the position right below a furnace body, and a lifting mechanism drives the furnace cover to move upwards and then to be closed with the furnace body, so that the cutter matrix is filled into a chemical weather deposition furnace, otherwise, the diamond coating cutter after coating deposition is removed, and finally, the effect of improving the coating deposition production efficiency is achieved.
The walking mechanism comprises a movable disc, a walking motor, a driving gear and a driving rack, wherein the two sides of the movable disc are connected to an extension frame in a sliding mode, the walking motor is arranged on the lower surface of the movable disc, the driving gear is arranged on an output shaft of the walking motor, the driving rack is arranged on the extension frame and meshed with the driving gear, a square embedded groove is formed in the movable disc, and a square embedded part embedded in the square embedded groove is formed in the lower surface of the furnace cover; the lifting mechanism comprises two oil cylinders arranged on the frame and lifting frames which are arranged on output shafts of the two oil cylinders and are U-shaped, and inserting grooves for inserting the inserting parts on two sides of the furnace cover in the process of moving along the horizontal direction are formed in two sides of the lifting frames.
According to the technical scheme, the driving gear is driven to rotate through the travelling motor, the position where the driving gear is meshed with the driving rack is changed, so that the moving disc and the furnace cover are driven to horizontally move, in the process that the travelling mechanism drives the furnace cover to move, the furnace cover moves to the position right below the furnace body, the inserting parts on two sides of the furnace cover are inserted into inserting grooves of the lifting frame of the lifting mechanism, and then the furnace cover is driven to move upwards through the oil cylinder, and the furnace cover is driven to move upwards and then is closed with the furnace body.
The invention further provides that the clamping mechanism comprises a tray which is arranged on the furnace cover in a lifting manner and provided with the plug holes distributed in an array manner, a flexible isolation sleeve arranged in the upper end of the plug holes, a guide assembly which is arranged between the extension frame and the tray and realizes lifting in the process that the furnace cover moves towards a direction far away from the furnace body, and a plurality of clamping assemblies which are arranged on the tray and realize clamping when the tray is separated from the guide assembly, wherein a part of the cutter matrix which does not need to deposit a coating passes through the flexible isolation sleeve and then is inserted into the plug holes, and the clamping assemblies release the clamping of the cutter matrix in the process that the guide assembly drives the tray to move upwards.
Through adopting the technical scheme, after the travelling mechanism drives the furnace cover to move out towards the direction of keeping away from the furnace body, the device has the effect of conveniently disassembling the cutter matrix, at this moment, after the part of the cutter matrix which does not need to deposit a coating passes through the flexible isolation sleeve and then is inserted into the plug hole, the setting of the guide assembly enables the cutter matrix to be lifted in the moving process of the furnace cover towards the direction of keeping away from the furnace body, the clamping assembly gradually releases the clamping of the cutter matrix, at this moment, the diamond coating cutter after processing is conveniently taken down, the unprocessed cutter matrix is conveniently installed, and simultaneously, the clamping assembly automatically clamps the cutter matrix when the tray is separated from the guide assembly, the device has the effect of convenient use, and in addition, the setting of the flexible isolation sleeve can realize the covering protection of the part of the cutter matrix which does not need to deposit the coating.
The clamping assembly comprises two clamping blocks, a lifting sleeve and a linkage structure, wherein the clamping blocks are connected in the first communication groove in a sliding mode and are used for clamping the periphery of a cutter, the lifting sleeve is arranged in the first annular groove in a lifting mode, the linkage structure is arranged between the lifting sleeve and the clamping blocks and drives the two clamping blocks to move towards the direction approaching to each other in the upward movement process of the lifting sleeve, the annular rubber sealing ring is arranged at the bottom of the tray, and the lifting sleeve is upwards moved by the upward acting force of a furnace cover in the process that the tray moves downwards along the guide assembly to the separation of the tray and the guide assembly, so that the clamping is realized by driving the two clamping blocks to move towards the direction approaching to each other through the linkage structure, and the annular rubber sealing ring is finally propped between the tray and the furnace cover.
Through the technical scheme, in the process that the tray moves downwards along the guide assembly to the separation of the tray and the guide assembly, the lifting sleeve moves upwards under the upward acting force of the furnace cover so as to drive the two clamping blocks to move towards the directions approaching to each other through the linkage structure to realize clamping, and simultaneously, in the process that the guide assembly drives the tray to move upwards, the lifting sleeve moves downwards under the action of gravity so as to realize automatic release of the clamping of the diamond coating cutter.
The invention is further arranged that the linkage structure comprises a wedge-shaped block arranged at one end of the clamping block far away from the inserting groove and a wedge-shaped groove arranged at the inner ring of the lifting sleeve and used for embedding the wedge-shaped block, and the wedge-shaped groove drives the wedge-shaped block to move towards the direction close to the inserting groove in the upward movement process of the lifting sleeve.
Through adopting above-mentioned technical scheme, the linkage structure includes setting up wedge-shaped block in clamp splice one end of keeping away from the jack groove, setting up at the lift cover inner circle and supply wedge-shaped block embedded wedge groove, in the lift cover upward movement in-process, wedge-shaped block is driven to wedge-shaped block towards the direction that is close to the jack groove and moves to drive two clamp splice in-process each other to realize carrying out the centre gripping to the cutter base member.
The invention is further provided with a second annular groove in the middle of the plug hole, a second communication groove communicated with the bottom of the second annular groove is arranged at the bottom of the tray, the clamping assembly comprises a plurality of annular air bags respectively arranged in the second annular grooves, a pressing air bag arranged on the lower surface of the tray, and a plurality of communication air pipes arranged between the pressing air bag and the annular air bag and penetrating through the second communication groove, and in the process that the tray moves downwards along the guiding assembly to the separation of the tray and the guiding assembly, the pressing air bag is pressed to enable the annular air bag to be inflated and clamped.
Through adopting above-mentioned technical scheme, at the tray along the guide subassembly downstream to tray and the in-process that guide subassembly separated, press the gasbag pressurized and make annular gasbag inflation and realize the centre gripping.
The invention is further arranged that the guide assembly comprises two guide frames arranged on two sides of the extension frame and guide blocks arranged on two sides of the tray, the guide frames comprise a straight guide section and an inclined guide section, one end of the inclined guide section is connected to the straight guide section, the other end of the inclined guide section extends downwards in an inclined mode towards the direction close to the furnace body, the guide blocks on two sides of the tray are placed on the two guide frames in the moving process of the guide blocks towards the direction far away from the furnace body, and the clamping assembly releases clamping in the process that the tray is located on the straight guide section.
Through adopting above-mentioned technical scheme, guide assembly includes two guide frames, two guide blocks, and guide frame includes straight line guide section, one end is connected on straight line guide section and the other end is towards the slope guide section that is close to the direction slope downwardly extending of furnace body to at the in-process that the tray is in straight line guide section, clamping assembly releases the centre gripping.
The invention is further provided with a countersunk hole communicated with the bottom of the plug hole at the position of the bottom of the tray corresponding to the plug hole, and a height adjusting screw for abutting against the lower end of the cutter base body is connected with the countersunk hole through threads.
Through adopting above-mentioned technical scheme, with the length difference of the cutter base member of different models, through setting up height adjusting screw this moment, can realize height adjusting screw embedding at the internal degree of depth of spliced eye to realize the cutter base member of different models of adaptation and carry out the centre gripping installation.
The invention is further provided that in the coating deposition process C, a cooling process is adopted for deposition, and the cooling process is divided into the following stages:
During the stage 1:0 min, the current is 65A, the voltage is 7.6V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the stage 2:10 minutes, the current is 62A, the voltage is 7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the period of 3:20 minutes, the current is 57A, the voltage is 6.3V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
during the period of 4:30 minutes, the current is 51A, the voltage is 5.7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
at stage 5:35 min, current 50A, voltage 5.4V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
at stage 6:40 minutes, current 47A, voltage 5.1V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
during the period of 7:45 minutes, the current is 42A, the voltage is 4.9V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the stage 8:50 minutes, the current is 37A, the voltage is 4.6V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
during the period of 9:55 minutes, the current is 32A, the voltage is 3.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
At a stage of 10:60 minutes, the current is 27A, the voltage is 3.2V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
At stage 11:70 min, current 25A, voltage 3V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.33kPa;
during the stage 12:80 minutes, the current is 23A, the voltage is 2.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
at stage 13:90 minutes, current 19A, voltage 2.4V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
at a stage of 14:100 minutes, the current is 16A, the voltage is 2.2V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
at 15:120 minutes, the current is 13A, the voltage is 2.1V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the period of 16:130 minutes, the current is 10A, the voltage is 1.7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the period of 17:140 minutes, the current is 5A, the voltage is 1.3V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the stage 18:150 minutes, the current is 3A, the voltage is 0.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during stage 19:165 minutes, the current was 0A, the voltage was 0V, the hydrogen was 198sccm, the methane was 2.8sccm, and the gas pressure was 0.31kPa.
The quality detection process D further comprises the step of adopting a diamond indentation instrument to test the bonding strength, pressing a diamond pressure head of the diamond indentation instrument into the surface of the diamond coating, and observing whether the situation of cracking and falling of the diamond coating occurs around the indentation. .
Drawings
FIG. 1 is a graph showing the results of the diamond indentation test in example 1;
FIG. 2 is a schematic structural view of a part of the structure of the chemical vapor deposition furnace in example 1;
FIG. 3 is a schematic structural view of a part of the structure of the chemical vapor deposition furnace in example 1 (the structure is the same as that of FIG. 2, and the marks are different);
FIG. 4 is a schematic view of the furnace cover, the clamping mechanism and part of the feeding and discharging device in the embodiment 1;
FIG. 5 is an enlarged view of a portion of FIG. 4 at A;
FIG. 6 is a schematic view showing the structure of the furnace cover and the clamping mechanism in example 2;
fig. 7 is a partial enlarged view of fig. 6 at B.
The device comprises a frame 1, a furnace body 2, a furnace cover 3, a square embedded part 31, a 32, an inserting part 4, a feeding and discharging device 41, an extension frame 42, a travelling mechanism 421, a moving disc 4211, a square embedded groove 422, a travelling motor 423, a driving gear 424, a driving rack 43, a lifting mechanism 431, an oil cylinder 432, a lifting frame 4321, an inserting groove 5, a clamping mechanism 51, a tray 511, an inserting hole 512, a first annular groove 513, a first communicating groove 514, a second annular groove 515, a second communicating groove 516, an annular rubber sealing ring 517, a countersunk hole 518, a height adjusting screw 52, a flexible isolation sleeve 53, a guiding component 531, a guiding frame 5311, a linear guiding section 5312, an inclined guiding section 532, a guiding block 54, a clamping component 541, a clamping block 542, a lifting sleeve 543, a linkage structure 5431, a wedge-shaped block 5432, a wedge groove 544, an annular air bag 545, an annular air bag 546, an air bag and a pressure air bag 546.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Example 1A coated cutting tool production method comprises a substrate pretreatment process A, a charging process B, a coating deposition process C, a quality detection process D and a polishing process E.
The substrate pretreatment process A comprises the following steps of (A1) firstly placing a cutter substrate into an acetone solution for cleaning for 20 minutes, then placing the cutter substrate into an absolute ethyl alcohol solution for cleaning for 10 minutes to remove greasy dirt on the surface of the cutter substrate, (A2) corroding the cutter substrate by using an alkali solution for 30 minutes, firstly cleaning twice in deionized water and then spraying and cleaning after corrosion is finished, wherein the alkali solution comprises the following components of K 3[Fe(CN)6]:H2 O=12g:12g:120ml, (A3) corroding the cutter substrate by using a Caro acid solution for 1 minute, firstly cleaning twice in deionized water and then spraying and cleaning after corrosion is finished, the Caro acid solution comprises the following components of 98% of H 2SO4:H2O2 =2.4ml:80ml, (A4) carrying out ultrasonic nuclear preforming on diamond suspension for 60 minutes, wherein the diamond suspension comprises the following components of absolute ethyl alcohol, 0-100 nm diamond powder, 4-6 nm diamond powder, 80ml, 0.5g and 10 minutes by using absolute ethyl alcohol ultrasonic cleaning twice.
The charging process B comprises the following steps of charging a plurality of cutter matrixes into a chemical vapor deposition furnace.
The coating deposition process C comprises the following steps of introducing H 2 and CH 4 into a chemical vapor deposition furnace, heating a hot wire to 2500 ℃, and setting technological parameters for adjusting gas flow, hot wire current, air pressure and temperature to enable the surface of the cutter to deposit a diamond film with the thickness of 40um, so as to manufacture the diamond coating cutter.
In the coating deposition process C, a cooling process is adopted for deposition, and the cooling process is divided into the following stages:
During the stage 1:0 min, the current is 65A, the voltage is 7.6V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the stage 2:10 minutes, the current is 62A, the voltage is 7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the period of 3:20 minutes, the current is 57A, the voltage is 6.3V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
during the period of 4:30 minutes, the current is 51A, the voltage is 5.7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
at stage 5:35 min, current 50A, voltage 5.4V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
at stage 6:40 minutes, current 47A, voltage 5.1V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
during the period of 7:45 minutes, the current is 42A, the voltage is 4.9V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the stage 8:50 minutes, the current is 37A, the voltage is 4.6V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
during the period of 9:55 minutes, the current is 32A, the voltage is 3.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
At a stage of 10:60 minutes, the current is 27A, the voltage is 3.2V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
At stage 11:70 min, current 25A, voltage 3V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.33kPa;
during the stage 12:80 minutes, the current is 23A, the voltage is 2.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
at stage 13:90 minutes, current 19A, voltage 2.4V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
at a stage of 14:100 minutes, the current is 16A, the voltage is 2.2V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
at 15:120 minutes, the current is 13A, the voltage is 2.1V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the period of 16:130 minutes, the current is 10A, the voltage is 1.7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the period of 17:140 minutes, the current is 5A, the voltage is 1.3V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the stage 18:150 minutes, the current is 3A, the voltage is 0.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during stage 19:165 minutes, the current was 0A, the voltage was 0V, the hydrogen was 198sccm, the methane was 2.8sccm, and the gas pressure was 0.31kPa.
The quality detection process D comprises the following steps of adopting a diamond indentation instrument to test the bonding strength, pressing a diamond pressure head of the diamond indentation instrument into the surface of the diamond coating, and observing whether the situation of cracking and falling of the diamond coating occurs around the pressure head. The results of the indentation test are shown in fig. 1, and it can be seen that chipping and peeling of the diamond coating did not occur around the indentation, and the diamond coating was still firmly bonded to the diamond coated tool at the center of the indentation.
As shown in fig. 2, the chemical weather deposition furnace comprises a frame 1, a furnace body 2, a furnace cover 3, a feeding and discharging device 4 and a clamping mechanism 5, wherein the furnace body 2, the furnace cover 3, the feeding and discharging device 4 and the clamping mechanism 5 are arranged on the upper surface of the furnace cover 3 and used for fixing a cutter matrix, the opening of the furnace body 2 is downwards arranged, the feeding and discharging device 4 comprises an extension frame 41 arranged on the frame 1, a traveling mechanism 42 arranged on the extension frame 41 and used for driving the furnace cover 3 to horizontally move, and a lifting mechanism 43 arranged on the frame 1 and used for driving the furnace cover 3 moving to the position right below the furnace body 2 to upwards move and then be closed with the furnace body 2.
As shown in fig. 2 to 4, the traveling mechanism 42 includes a traveling plate 421 slidably coupled to the extension frame 41 on both sides, a traveling motor 422 provided on a lower surface of the traveling plate 421, a driving gear 423 provided on an output shaft of the traveling motor 422, a driving rack 424 provided on the extension frame 41 and engaged with the driving gear 423, a square insertion groove 4211 provided on the traveling plate 421, and a square insertion portion 31 inserted into the square insertion groove 4211 provided on a lower surface of the furnace cover 3. Plug-in parts 32 are arranged on two sides of the furnace cover 3 in a protruding manner. The lifting mechanism 43 comprises two oil cylinders 431 arranged on the frame 1, and a U-shaped lifting frame 432 arranged on the output shafts of the two oil cylinders 431, wherein inserting grooves 4321 for inserting the inserting parts 32 on two sides of the furnace cover 3 in the process of moving along the horizontal direction are formed in two sides of the lifting frame 432.
As shown in fig. 2 to 4, the clamping mechanism 5 comprises a tray 51 which is arranged on the furnace cover 3 in a lifting manner and provided with plug holes 511 distributed in an array manner, a flexible isolating sleeve 52 arranged in the upper end of the plug holes 511, a guide assembly 53 which is arranged between the extension frame 41 and the tray 51 and realizes lifting in the process of moving the furnace cover 3 in a direction away from the furnace body 2, and a plurality of clamping assemblies 54 which are arranged on the tray 51 and realize clamping when the tray 51 is separated from the guide assembly 53, wherein a part of a cutter matrix which does not need to deposit a coating is inserted into the plug holes 511 after passing through the flexible isolating sleeve 52, and the clamping assemblies 54 release the clamping of the cutter matrix in the process of moving the tray 51 upwards by the guide assemblies 53.
As shown in fig. 4 and 5, a first annular groove 512 surrounding the insertion hole 511 is formed at the bottom of the tray 51, two first communication grooves 513 are formed between the inner ring of the first annular groove 512 and the insertion groove 4321, the clamping assembly 54 comprises two clamping blocks 541 which are slidably connected in the first communication grooves 513 and are used for clamping on the circumference side of the cutter, a lifting sleeve 542 which is arranged in the first annular groove 512 in a lifting manner, a linkage structure 543 which is arranged between the lifting sleeve 542 and the clamping blocks 541 and drives the two clamping blocks 541 to move towards the direction approaching to each other during the upward movement of the lifting sleeve 542, an annular rubber sealing ring 516 is formed at the bottom of the tray 51, and the lifting sleeve 542 is upwards moved by the upward acting force of the furnace cover 3 during the downward movement of the tray 51 along the guide assembly 53 until the tray 51 is separated from the guide assembly 53, so that the clamping is realized by the upward acting force of the linkage structure 543 and the two clamping blocks 541 are driven towards the direction approaching to each other, and the annular rubber sealing ring 516 is finally abutted between the tray 51 and the furnace cover 3. The linkage structure 543 includes a wedge-shaped block 5431 disposed at an end of the clamping block 541 away from the insertion slot 4321, and a wedge-shaped slot 5432 disposed at an inner ring of the lifting sleeve 542 for embedding the wedge-shaped block 5431, and during the upward movement of the lifting sleeve 542, the wedge-shaped slot 5432 drives the wedge-shaped block 5431 to move towards a direction approaching the insertion slot 4321.
As shown in fig. 2 to 4, the guide assembly 53 includes two guide frames 531 provided at both sides of the extension frame 41, guide blocks 532 provided at both sides of the tray 51, the guide frames 531 including a straight guide section 5311, an inclined guide section 5312 having one end connected to the straight guide section 5311 and the other end inclined downwardly extending toward a direction approaching the furnace body 2, the guide blocks 532 at both sides of the tray 51 resting on the two guide frames 531 during movement in a direction away from the furnace body 2, and the clamping assembly 54 releasing the clamp during the tray 51 being on the straight guide section 5311.
As shown in fig. 4 and 5, a countersunk hole 517 is formed at the bottom of the tray 51 corresponding to the insertion hole 511 and is communicated with the bottom of the insertion hole 511, and a height adjusting screw 518 for abutting against the lower end of the cutter body is screwed at the countersunk hole 517.
Firstly, in the substrate pretreatment process A, A1 can thoroughly remove greasy dirt on the surface of a cutter substrate, A2 can realize corrosion of tungsten carbide crystal grains to enable a binder Co to be completely exposed, A3 can realize etching of Co elements on the surface, A4 can form defects on the surface of the cutter substrate, the defects are favorable positions of diamond nucleation, so that the density of diamond nucleation in the later stage is increased, meanwhile, diamond powder attached to the surface of the cutter substrate can be directly used as crystal nucleus of diamond nucleation, and A5 can clean the surface of the cutter substrate after the preformed nucleation treatment to remove surface residual impurities and diamond powder which is not embedded. In the loading process B, the cutter matrix is fixed on the clamping mechanism 5, the traveling mechanism 42 drives the furnace cover 3 to move to the position right below the furnace body 2, the lifting mechanism 43 drives the furnace cover 3 to move upwards and then to be closed with the furnace body 2, so that the cutter matrix is loaded into the chemical weather deposition furnace, otherwise, the diamond coating cutter after coating deposition is removed, and finally, the effect of improving the coating deposition production efficiency is achieved.
The driving gear 423 is driven to rotate by the traveling motor 422, the driving gear 423 changes the meshing position with the driving rack 424, so that the movable plate 421 and the furnace cover 3 are driven to horizontally move, and in the process that the traveling mechanism 42 drives the furnace cover 3 to move, the furnace cover 3 moves to the position right below the furnace body 2, the inserting parts 32 at the two sides of the furnace cover 3 are inserted into the inserting grooves 4321 of the lifting frames 432 of the lifting mechanism 43, and then the oil cylinder 431 drives the furnace cover 3 to move upwards, so that the furnace cover 3 is driven to move upwards and then is closed with the furnace body 2.
After the traveling mechanism 42 drives the furnace cover 3 to move and move out in a direction away from the furnace body 2, the function of conveniently disassembling the cutter matrix is achieved, at the moment, after the part of the cutter matrix which does not need to deposit a coating passes through the flexible isolation sleeve 52 and is inserted into the inserting hole 511, the guiding component 53 is arranged to enable the cutter matrix to be lifted in the moving process of the furnace cover 3 in the direction away from the furnace body 2, the clamping component 54 gradually releases the clamping of the cutter matrix, at the moment, the machined diamond coating cutter is conveniently removed, the unprocessed cutter matrix is conveniently installed, meanwhile, when the tray 51 is separated from the guiding component 53, the clamping component 54 automatically clamps the cutter matrix, the function of convenient use is achieved, and in addition, the flexible isolation sleeve 52 is arranged, the part of the cutter matrix which does not need to deposit the coating can be covered and protected.
In the process that the tray 51 moves downwards along the guide assembly 53 to the separation of the tray 51 and the guide assembly 53, the lifting sleeve 542 moves upwards under the upward acting force of the furnace cover 3 so as to drive the two clamping blocks 541 to move towards the directions approaching to each other through the linkage structure 543 to realize clamping, and meanwhile, in the process that the guide assembly 53 drives the tray 51 to move upwards, the lifting sleeve 542 moves downwards under the action of gravity so as to realize automatic release of clamping of the diamond coating cutter. The linkage structure 543 comprises a wedge-shaped block 5431 arranged at one end of the clamping block 541 away from the insertion groove 4321, and a wedge-shaped groove 5432 arranged at the inner ring of the lifting sleeve 542 and used for embedding the wedge-shaped block 5431, and the wedge-shaped groove 5432 drives the wedge-shaped block 5431 to move towards the direction approaching to the insertion groove 4321 in the upward movement process of the lifting sleeve 542, so that the clamping of the cutter matrix is realized in the mutual approaching process of the two clamping blocks 541.
Embodiment 2A production method of a coating cutter is different from embodiment 1 in that a clamping assembly 54 in a chemical vapor deposition furnace is different in structure on the basis of fig. 2 to 5, a second annular groove 514 is arranged in the middle of a plug hole 511, a second communicating groove 515 communicated to the bottom of the second annular groove 514 is arranged at the bottom of a tray 51, the clamping assembly 54 comprises a plurality of annular air bags 544 respectively arranged in the plurality of second annular grooves 514, a pressing air bag 545 arranged on the lower surface of the tray 51, a plurality of communicating air pipes 546 arranged between the pressing air bag 545 and the annular air bags 544 and penetrating through the second communicating groove 515, and the pressing air bags 545 are pressed to enable the annular air bags 544 to be inflated and clamped in the process that the tray 51 moves downwards along a guide assembly 53 to be separated from the guide assembly 53.
The implementation effect is that in the process that the tray 51 moves downwards along the guide component 53 until the tray 51 is separated from the guide component 53, the pressing air bag 545 is pressed to enable the annular air bag 544 to be inflated and clamped, and the effect of conveniently realizing or releasing the clamping is achieved.
The present embodiment is only for explanation of the present invention and is not to be construed as limiting the present invention, and modifications to the present embodiment, which may not creatively contribute to the present invention as required by those skilled in the art after reading the present specification, are all protected by patent laws within the scope of claims of the present invention.
Claims (8)
1. The production method of the coated cutting tool comprises a substrate pretreatment process A, a charging process B, a coating deposition process C, a quality detection process D and a polishing process E, and is characterized in that:
the substrate pretreatment process A comprises the following steps:
(A1) Firstly, putting a cutter matrix into an acetone solution for cleaning for 20 minutes, and then putting the cutter matrix into an absolute ethanol solution for cleaning for 10 minutes to remove greasy dirt on the surface of the cutter matrix;
(A2) Etching the cutter substrate for 30 minutes by using an alkali solution, and cleaning twice in deionized water after etching, wherein the alkali solution comprises the following components in percentage by weight of KOH, K 3[Fe(CN)6]:H2 O=12g:12g:120ml;
(A3) Etching a cutter substrate for 1 minute by using a Caro acid solution, and cleaning twice in deionized water and then spraying and cleaning after etching is finished, wherein the ratio of the Caro acid solution is 98% of H 2SO4:H2O2 = 2.4ml to 80ml;
(A4) Ultrasonic pre-forming the diamond suspension for 60 minutes, wherein the diamond suspension comprises 0-100 nm diamond powder and 4-6 nm diamond powder in proportion of absolute ethyl alcohol, 80ml, 0.5g and 0.5g;
(A5) Ultrasonically cleaning with absolute ethyl alcohol for 10 minutes twice;
the charging process B comprises the following steps of charging a plurality of cutter matrixes into a chemical vapor deposition furnace;
The coating deposition process C comprises the following steps of introducing H2 and CH4 into a chemical vapor deposition furnace, heating a hot wire to 2500 ℃, setting and adjusting technological parameters of gas flow, hot wire current, air pressure and temperature, and enabling the surface of the cutter to deposit a diamond film with the thickness of 40um to manufacture a diamond coating cutter;
The chemical vapor deposition furnace comprises a frame (1), a furnace body (2) arranged on the frame (1), a furnace cover (3), a feeding and discharging device (4) and a clamping mechanism (5) arranged on the upper surface of the furnace cover (3) and used for fixing a cutter matrix, wherein an opening of the furnace body (2) is arranged downwards, the feeding and discharging device (4) comprises an extension frame (41) arranged on the frame (1), a travelling mechanism (42) arranged on the extension frame (41) and used for driving the furnace cover (3) to move horizontally, and a lifting mechanism (43) arranged on the frame (1) and used for driving the furnace cover (3) moving to the position right below the furnace body (2) to move upwards and then be closed with the furnace body (2);
The lifting mechanism (43) comprises two oil cylinders (431) arranged on a frame (1), a driving gear (423) arranged on an output shaft of the walking motor (422) and a driving rack (424) arranged on the extending frame (41) and meshed with the driving gear (423), square embedded grooves (4211) are formed in the moving plate (421), square embedded parts (31) embedded in the square embedded grooves (4211) are formed in the lower surface of the furnace cover (3), inserting parts (32) are arranged on the two sides of the furnace cover (3) in a protruding mode, the lifting mechanism (43) comprises two oil cylinders (431) arranged on the frame (1), and a U-shaped lifting frame (432) arranged on the output shaft of the two oil cylinders (431), and inserting grooves (4321) for inserting parts (32) on the two sides of the furnace cover (3) in the horizontal direction moving process are formed in the two sides of the lifting frame (432);
The clamping mechanism (5) comprises a tray (51) which is arranged on the furnace cover (3) in a lifting mode and provided with plug holes (511) distributed in an array mode, a flexible isolation sleeve (52) arranged in the upper end of the plug holes (511), a guide component (53) which is arranged between the extension frame (41) and the tray (51) and used for lifting in the moving process of the furnace cover (3) towards the direction away from the furnace body (2), and a plurality of clamping components (54) which are arranged on the tray (51) and used for clamping when the tray (51) is separated from the guide component (53), wherein a part of a cutter matrix without a deposition coating is inserted into the plug holes (511) after passing through the flexible isolation sleeve (52), and the clamping components (54) are used for clamping the cutter matrix in the upward moving process of the guide component (53).
2. A method of manufacturing a coated tool according to claim 1, wherein a first annular groove (512) surrounding the insertion hole (511) is provided at the bottom of the tray (51), two first communication grooves (513) are provided between the inner ring of the first annular groove (512) and the insertion groove (4321), the clamping assembly (54) comprises two clamping blocks (541) slidably connected in the first communication grooves (513) and used for clamping the circumference of the tool, a lifting sleeve (542) arranged in the first annular groove (512) in a lifting manner, a linkage structure (543) arranged between the lifting sleeve (542) and the clamping blocks (541) and driving the two clamping blocks (541) to move towards each other during the upward movement of the lifting sleeve (542), an annular rubber sealing ring (516) is provided at the bottom of the tray (51), and the lifting sleeve (542) is subjected to the upward movement of the clamping sleeve (3) along the guiding assembly (53) until the tray (51) is separated from the guiding assembly (53), so as to achieve the clamping of the annular sealing ring (516) towards each other by the upward movement of the clamping sleeve (541) and the annular sealing ring (541) towards each other.
3. The method according to claim 2, wherein the linkage structure (543) comprises a wedge-shaped block (5431) arranged at one end of the clamping block (541) away from the insertion groove (4321), and a wedge-shaped groove (5432) arranged at the inner ring of the lifting sleeve (542) and used for embedding the wedge-shaped block (5431), and the wedge-shaped groove (5432) drives the wedge-shaped block (5431) to move towards a direction approaching the insertion groove (4321) during the upward movement of the lifting sleeve (542).
4. The method according to claim 1, wherein the middle part of the insertion hole (511) is provided with a second annular groove (514), the bottom of the tray (51) is provided with a second communication groove (515) communicated with the bottom of the second annular groove (514), the clamping assembly (54) comprises a plurality of annular air bags (544) respectively arranged in the plurality of second annular grooves (514), a plurality of pressing air bags (545) arranged on the lower surface of the tray (51), a plurality of communication air pipes (546) arranged between the pressing air bags (545) and the annular air bags (544) and penetrating through the second communication groove (515), and the pressing air bags (545) are pressed to enable the annular air bags (544) to be inflated and clamped in the process that the tray (51) moves downwards along the guide assembly (53) to be separated from the guide assembly (53).
5. A method of producing a coating cutter according to claim 2 or 3, wherein the guide assembly (53) comprises two guide frames (531) provided on both sides of the extension frame (41), guide blocks (532) provided on both sides of the tray (51), the guide frames (531) comprising a straight guide section (5311), an inclined guide section (5312) having one end connected to the straight guide section (5311) and the other end extending obliquely downward toward a direction approaching the furnace body (2), the guide blocks (532) on both sides of the tray (51) resting on the two guide frames (531) during movement in a direction away from the furnace body (2), and the clamping assembly (54) releasing the clamp during the tray (51) being on the straight guide section (5311).
6. The method for producing a coated cutting tool according to claim 1, wherein a countersunk hole (517) communicated with the bottom of the inserting hole (511) is arranged at the bottom of the tray (51) corresponding to the inserting hole (511), and a height adjusting screw (518) for abutting against the lower end of the tool base body is connected at the countersunk hole (517) in a threaded manner.
7. The method for producing a coated cutting tool according to claim 1, wherein in the coating deposition process C, a cooling process is adopted for deposition, and the cooling process is divided into the following stages:
During the stage 1:0 min, the current is 65A, the voltage is 7.6V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the stage 2:10 minutes, the current is 62A, the voltage is 7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the period of 3:20 minutes, the current is 57A, the voltage is 6.3V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
during the period of 4:30 minutes, the current is 51A, the voltage is 5.7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
at stage 5:35 min, current 50A, voltage 5.4V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
at stage 6:40 minutes, current 47A, voltage 5.1V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
during the period of 7:45 minutes, the current is 42A, the voltage is 4.9V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the stage 8:50 minutes, the current is 37A, the voltage is 4.6V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.32kPa;
during the period of 9:55 minutes, the current is 32A, the voltage is 3.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
At a stage of 10:60 minutes, the current is 27A, the voltage is 3.2V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
At stage 11:70 min, current 25A, voltage 3V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.33kPa;
during the stage 12:80 minutes, the current is 23A, the voltage is 2.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
at stage 13:90 minutes, current 19A, voltage 2.4V, hydrogen 198sccm, methane 2.8sccm, air pressure 0.31kPa;
at a stage of 14:100 minutes, the current is 16A, the voltage is 2.2V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
at 15:120 minutes, the current is 13A, the voltage is 2.1V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
During the period of 16:130 minutes, the current is 10A, the voltage is 1.7V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the period of 17:140 minutes, the current is 5A, the voltage is 1.3V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during the stage 18:150 minutes, the current is 3A, the voltage is 0.8V, the hydrogen is 198sccm, the methane is 2.8sccm, and the air pressure is 0.31kPa;
during stage 19:165 minutes, the current was 0A, the voltage was 0V, the hydrogen was 198sccm, the methane was 2.8sccm, and the gas pressure was 0.31kPa.
8. The method for producing a coated cutting tool according to claim 1, wherein the quality inspection step D comprises the step of testing the bonding strength by using a diamond indenter, pressing a diamond indenter of the diamond indenter into the surface of the diamond coating, and observing whether chipping and peeling of the diamond coating occur around the indenter.
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| CN203393225U (en) * | 2013-07-24 | 2014-01-15 | 广东先导稀材股份有限公司 | Chemical vapor deposition furnace |
| CN117165913A (en) * | 2023-09-20 | 2023-12-05 | 嘉兴沃尔德金刚石工具有限公司 | Cutter with submicron diamond coating and preparation method and application thereof |
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| CN207735635U (en) * | 2018-01-13 | 2018-08-17 | 东莞市欣泰丰精密五金工具有限公司 | Drill bit locking mechanism |
| CN110885968B (en) * | 2018-09-07 | 2022-06-21 | 深圳先进技术研究院 | Method for preparing diamond coating and diamond coating and cutting tool prepared therefrom |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203393225U (en) * | 2013-07-24 | 2014-01-15 | 广东先导稀材股份有限公司 | Chemical vapor deposition furnace |
| CN117165913A (en) * | 2023-09-20 | 2023-12-05 | 嘉兴沃尔德金刚石工具有限公司 | Cutter with submicron diamond coating and preparation method and application thereof |
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