CN119148300A - Micro-positioning platform for optical fiber coupling positioning - Google Patents
Micro-positioning platform for optical fiber coupling positioning Download PDFInfo
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- CN119148300A CN119148300A CN202411658289.6A CN202411658289A CN119148300A CN 119148300 A CN119148300 A CN 119148300A CN 202411658289 A CN202411658289 A CN 202411658289A CN 119148300 A CN119148300 A CN 119148300A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/366—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures allowing for adjustment or alignment in all dimensions, i.e. 3D microoptics arrangements, e.g. free space optics on the microbench, microhinges or spring latches, with associated microactuating elements for fine adjustment or alignment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3616—Holders, macro size fixtures for mechanically holding or positioning fibres, e.g. on an optical bench
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
本发明提供一种用于光纤耦合定位的微定位平台涉及微定位平台领域，包括底座、底座顶角处的定位平台基座、相邻两定位平台基座之间的第一驱动组件、底座中间的位移平台、位移平台上的第二驱动组件、第二驱动组件上的旋转平台和旋转平台上的光纤固定件；第一驱动组件包括压电致动器、放大部件和校正部件，放大部件包括第一柔性纵梁和通过第一柔性纵梁与位移平台连接的第一输出端梁，校正部件包括平行设置在第一输出端梁两侧的第一连接杆、活动横杆和第一直梁性柔性铰链，第一连接杆两端通过第一直梁性柔性铰链分别与第一输出端梁和活动横杆连接。该定位平台，解决了现有技术中的缺少一种行程大、运动稳定精准用于光纤耦合定位的微定位平台的问题。
The present invention provides a micro-positioning platform for optical fiber coupling positioning, which relates to the field of micro-positioning platforms, including a base, a positioning platform base at the top corner of the base, a first driving assembly between two adjacent positioning platform bases, a displacement platform in the middle of the base, a second driving assembly on the displacement platform, a rotating platform on the second driving assembly, and an optical fiber fixing member on the rotating platform; the first driving assembly includes a piezoelectric actuator, an amplifying component, and a correcting component, the amplifying component includes a first flexible longitudinal beam and a first output end beam connected to the displacement platform through the first flexible longitudinal beam, the correcting component includes a first connecting rod, a movable cross rod, and a first straight beam flexible hinge arranged in parallel on both sides of the first output end beam, and the two ends of the first connecting rod are respectively connected to the first output end beam and the movable cross rod through the first straight beam flexible hinge. The positioning platform solves the problem in the prior art of lacking a micro-positioning platform with a large stroke, stable and precise movement for optical fiber coupling positioning.
Description
Technical Field
The invention relates to the field of micro-positioning platforms, in particular to a micro-positioning platform for optical fiber coupling positioning.
Background
The micro-positioning platform is widely applied in the fields of biomedicine, precision optics, aerospace, micro-nano assembly and the like. At present, piezoelectric actuators are widely applied to micro-positioning platforms and are combined with flexible hinge transmission mechanisms to realize high-precision motion. The piezoelectric actuator has the advantages of high rigidity, high resolution, small volume, high response speed and the like, but has smaller stroke, and the stroke range is usually increased through a lever or a bridge type displacement amplifying mechanism. In the field of precision optics, the optical fiber coupling micro-positioning platform is particularly critical, and continuous innovation and development of related technologies are promoted.
At present, students at home and abroad have conducted extensive researches on the motion precision and structural stability of the students. However, little research has been done on the kinematic coupling effect between multiple degrees of freedom. In the field of optical fiber coupling positioning, space light needs to be coupled into an optical fiber through a positioning platform for micro positioning, namely, the optical fiber needs to be controlled to move up, down, left, right, front and back, the direction angle of the optical fiber axis needs to be controlled, namely, the movement in the direction of five degrees of freedom needs to be realized, although the positioning platform with five degrees of freedom exists in the prior art, and the positioning in the micron-size can be realized through a flexible transmission mode, the stroke of the positioning platform is smaller, parasitic movement exists, the movement of the platform is not stable and accurate enough, multiple times of adjustment are needed, and the movement positioning efficiency of the positioning platform is further influenced.
Disclosure of Invention
Based on the problems, the invention aims to provide a micro-positioning platform for optical fiber coupling positioning, which aims to solve the problems of the prior art that the micro-positioning platform for optical fiber coupling positioning is short in stroke and stable and accurate in movement.
The invention provides a micro-positioning platform for optical fiber coupling positioning, which comprises a base, positioning platform bases respectively arranged on four corners of the base, a first driving assembly arranged between two adjacent positioning platform bases, a displacement platform arranged in the middle of the base, a second driving assembly arranged on the displacement platform, a rotating platform arranged on the second driving assembly and an optical fiber fixing piece arranged on the rotating platform, wherein the first driving assembly is used for driving the displacement platform to move along an X axis or a Y axis, and the second driving assembly is used for driving the rotating platform to move along the Z axis and rotate along the X axis or the Y axis;
The first driving assembly comprises a piezoelectric actuator, an amplifying part connected with the piezoelectric actuator and a correcting part connected with the amplifying part, wherein the amplifying part comprises a first output end beam and a first flexible longitudinal beam, the first output end beam is connected with the displacement platform through the first flexible longitudinal beam, the correcting part comprises a first connecting rod, a movable cross rod and a first straight beam flexible hinge, the first connecting rod is arranged on two sides of the first output end beam in parallel, the movable cross rod is opposite to the first output end beam in parallel, the two ends of the first connecting rod are respectively connected with the first output end beam and the movable cross rod through the first straight beam flexible hinge, and the first output end beam, the two first connecting rods and the movable cross rod form a parallelogram structure.
According to the micro-positioning platform for optical fiber coupling positioning, the plurality of first driving components are arranged on the outer side of the displacement platform, the plurality of second driving components are arranged on the displacement platform, and the rotating platform for fixing the optical fiber is arranged on the second driving components, so that the displacement platform can be driven by the first driving components to move along the X axis or the Y axis so as to drive the optical fiber to move on the X axis or the Y axis, the movement of the optical fiber on two degrees of freedom is realized, the contact point of the rotating platform and the second driving components can move simultaneously and in the same amplitude, the movement of the optical fiber on the Z axis is realized, the contact point of the rotating platform and the second driving components can move simultaneously and in different amplitudes, the rotating platform can move around the X axis or the Y axis, and the movement of the optical fiber in other three degrees of freedom can be realized through the plurality of second driving components, and the positioning platform is realized. In addition, due to the driving of the first driving component, the piezoelectric actuator is matched with the amplifying component, so that the flexible driving is realized, the effect of precise movement is achieved, and the stroke is improved. And the two sides of the first output end beam of the amplifying component are connected with the correcting component, so that a parallelogram structure is formed by the amplifying component and the correcting component, when the first output end beam outputs, the left-right swing generated by parasitic motion can affect the output direction and amplitude of the first output end beam, and the parasitic motion is transmitted to the correcting component through the first straight beam flexible hinges on the two sides, and then the parasitic motion is buffered and absorbed through the correcting component, so that the movable cross rod can move, the motion of the first output end beam is not affected any more, and the influence of the parasitic motion is effectively reduced, so that the motion stability and the motion precision of the positioning platform are ensured. Therefore, the invention solves the problem that a micro positioning platform for optical fiber coupling positioning with large stroke and stable and accurate movement is lacking in the prior art.
In addition, the micro-positioning platform for optical fiber coupling positioning provided by the invention can also have the following additional technical characteristics:
Preferably, the amplifying component further comprises a first input end beam arranged on two sides of the piezoelectric actuator, a second connecting rod symmetrically arranged on two sides of one end of the first input end beam close to the piezoelectric actuator, and a first fixed end beam arranged on one side, adjacent to the first input end beam, of the piezoelectric actuator, wherein the first fixed end beam is used for being fixedly connected with the base, one end of the second connecting rod is connected with the first input end beam through a second straight beam flexible hinge, and the other end of the second connecting rod is connected with the first output end beam or the first fixed end beam through the second straight beam flexible hinge.
Preferably, the second driving assembly comprises a first correction amplifying part and a second correction amplifying part arranged on the outer side of the first correction amplifying part, the first correction amplifying part comprises a piezoelectric actuator, second input end beams arranged on two sides of the piezoelectric actuator, and first flexible arms symmetrically arranged on two sides of the second input end beams, one end of each first flexible arm is connected with the second input end beam, the other end of each first flexible arm is connected with the first flexible arm on the adjacent side, the connection part of each two first flexible arms is connected with the second correction amplifying part through a first flexible cross beam, and the second input end beams and the first flexible arms form a diamond structure.
Preferably, the second correction amplifying component comprises second flexible longitudinal beams symmetrically arranged on two sides of the first correction amplifying component, second fixed end beams and connecting beams which are respectively arranged on two other sides of the first correction amplifying component, and second output end beams which are arranged on the outer side of the connecting beams, wherein the second output end beams are connected with the connecting beams through curved flexible hinges, two ends of each second flexible longitudinal beam are respectively connected with the connecting beams and the second fixed end beams through second flexible arms, and the connecting beams, the second flexible longitudinal beams, the second fixed end beams and the second flexible arms form a diamond structure.
Preferably, the displacement platform is provided with three second driving assemblies, and the three second driving assemblies are distributed in an annular array around the central axis of the displacement platform.
Preferably, the rotary platform is triangle-shaped, the displacement platform is the rectangle, three apex angle department of rotary platform all is equipped with a plurality of first connecting holes, so that rotary platform three angles respectively with three the top of second drive assembly is connected, be equipped with on the displacement platform around the second connecting hole that displacement platform central axis equidistance distributes, so that the displacement platform with the bottom of second drive assembly is connected.
Preferably, the middle part of the rotary platform is provided with a mounting groove matched with the optical fiber fixing piece, the center of the optical fiber fixing piece is provided with an optical fiber fixing hole, the bottom of the mounting groove, the displacement platform and the base are respectively provided with a through hole matched with the optical fiber fixing hole and coaxially arranged, and the optical fiber fixing piece is provided with first fixing holes distributed around the axis of the optical fiber fixing hole at equal intervals in the circumferential direction, so that the optical fiber fixing piece is fixed in the mounting groove.
Preferably, the outer contour of the positioning platform base is a right triangle, and two right-angle sides of the positioning platform base are respectively connected with the outer sides of the first output end beams of the first driving assemblies at two sides through a plurality of second flexible cross beams.
Preferably, the base is provided with a plurality of positioning bosses respectively matched with the positioning platform base and the first fixed end beam, and the positioning bosses are provided with second fixing holes so that the positioning bosses are respectively connected with the positioning platform base and the first fixed end beam.
Drawings
FIG. 1 is a schematic view of a micro-positioning platform for coupling and positioning optical fibers according to an embodiment of the present invention;
FIG. 2 is an exploded view of a micropositioning stage for fiber optic coupling positioning according to one embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating an assembly of a positioning stage base, a displacement stage and a first driving assembly of a hidden piezoelectric actuator according to an embodiment of the present invention;
FIG. 4 is a schematic view of a first drive assembly concealing a piezoelectric actuator and a first flexible stringer in accordance with an embodiment of the present invention;
FIG. 5 is a schematic diagram illustrating an assembly of a second drive assembly and a rotary platform of a hidden piezoelectric actuator according to an embodiment of the present invention;
FIG. 6 is a schematic diagram illustrating a second driving assembly of a hidden piezoelectric actuator according to an embodiment of the present invention;
FIG. 7 is a schematic diagram of a rotary platform according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a base according to an embodiment of the invention.
Main structural symbol description:
the invention will be further described in the following detailed description in conjunction with the above-described figures.
Detailed Description
In order that the invention may be readily understood, a more complete description of the invention will be rendered by reference to the appended drawings. Several embodiments of the invention are presented in the figures. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "mounted" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 to 8, a micro-positioning platform for optical fiber coupling positioning according to an embodiment of the present invention is shown, including a base 10, positioning platform bases 20 disposed at four corners of the base 10, a first driving assembly 30 disposed between two adjacent positioning platform bases 20, a displacement platform 40 disposed in the middle of the base 10, a second driving assembly 50 disposed on the displacement platform 40, a rotating platform 60 disposed on the second driving assembly 50, and an optical fiber fixing member 70 disposed on the rotating platform 60, wherein the first driving assembly 30 is used for driving the displacement platform 40 to move along an X-axis or a Y-axis, and the second driving assembly 50 is used for driving the rotating platform 60 to move along a Z-axis and rotate along the X-axis or the Y-axis;
The first driving assembly 30 includes a piezoelectric actuator 31, an amplifying part 32 connected to the piezoelectric actuator 31, and a correcting part 33 connected to the amplifying part 32, wherein the amplifying part 32 includes a first output end beam 321 and a first flexible longitudinal beam 322, the first output end beam 321 is connected to the displacement platform 40 through the first flexible longitudinal beam 322, the correcting part 33 includes a first connecting rod 331 disposed parallel to two sides of the first output end beam 321, a movable cross rod 332 disposed parallel to the first output end beam 321, and a first straight beam flexible hinge 333, two ends of the first connecting rod 331 are respectively connected to the first output end beam 321 and the movable cross rod 332 through the first straight beam flexible hinge 333, and the first output end beam 321, the two first connecting rods 331, and the movable cross rod 332 form a parallelogram structure.
It can be understood that by arranging the plurality of first driving components 30 outside the displacement platform 40 and arranging the plurality of second driving components 50 on the displacement platform 40 and arranging the rotating platform 60 for fixing the optical fiber on the second driving components 50, the displacement platform 40 can be driven by the first driving components 30 to move along the X axis or the Y axis so as to drive the optical fiber to move on the X axis or the Y axis, so that the movement of the optical fiber in two degrees of freedom is realized, then the contact point of the rotating platform 60 and the second driving components 50 can be simultaneously and simultaneously moved in the same amplitude, the movement of the optical fiber in the Z axis is realized, and the contact point of the rotating platform 60 and the second driving components 50 can be simultaneously and differently moved by the plurality of second driving components 50, so that the rotating platform 60 can be moved around the X axis or the Y axis, and further the movement of the optical fiber in three other degrees of freedom can be realized by the plurality of second driving components 50, so that the positioning platform realizes the function of optical fiber coupling. In addition, due to the driving of the first driving component 30, the piezoelectric actuator 31 and the amplifying component 32 realize flexible driving, thereby achieving the effect of precise movement and improving the stroke. And the two sides of the first output end beam 321 of the amplifying component 32 are connected with the correcting component 33, so that a parallelogram structure is formed with the correcting component 33, when the first output end beam 321 outputs, the left-right swing generated by parasitic motion can affect the output direction and amplitude of the first output end beam 321, and the parasitic motion is transmitted to the correcting component 33 through the first straight beam flexible hinges 333 on the two sides, and then the parasitic motion is buffered and absorbed through the correcting component 33, so that the movable cross rod 332 can move, the motion of the first output end beam 321 is not affected any more, and therefore, the motion stability and accuracy of the positioning platform are ensured due to the effectively reduced influence of the parasitic motion. Therefore, the invention solves the problem that a micro positioning platform for optical fiber coupling positioning with large stroke and stable and accurate movement is lacking in the prior art.
In this context, the coordinates are established by taking the center point of the displacement platform as the origin, taking the vertical line from the origin to any right-angle side of the displacement platform as the X axis, taking the vertical line from the origin to the right-angle side of the displacement platform parallel to the X axis as the Y axis, taking a straight line which is perpendicular to the rotation platform and the displacement platform and passes through the origin, the straight line is the Z axis,
Specifically, the amplifying component 32 further includes a first input end beam 323 disposed on two sides of the piezoelectric actuator 31, a second connecting rod 324 symmetrically disposed on two sides of one end of the first input end beam 323 near the piezoelectric actuator 31, and a first fixed end beam 325 disposed on one side of the piezoelectric actuator 31 adjacent to the first input end beam 323, the first fixed end beam 325 is fixedly connected to the base 10, one end of the second connecting rod 324 is connected to the first input end beam 323 through a second straight beam flexible hinge 326, and the other end is connected to the first output end beam 321 or the first fixed end beam 325 through a second straight beam flexible hinge 326.
In practical implementation, voltage is applied to two ends of the piezoelectric actuator 31, the output ends of the piezoelectric actuator will displace, and then the first input end beam 323 is pushed to deform, so that one side of the piezoelectric actuator, which is close to the first output end beam 321, rotates clockwise around the second straight beam flexible hinge 326, and the displacement is transferred to the second connecting rod 324 connected with the piezoelectric actuator through the second straight beam flexible hinge 326, so that the second connecting rod 324 rotates anticlockwise around the second straight beam flexible hinge 326, and thus the first amplification of the output micro-displacement of the piezoelectric actuator 31 is realized, meanwhile, the second connecting rod 324 rotates anticlockwise around the second straight beam flexible hinge 326 at the other side connected with the second connecting rod 324, and the displacement is transferred to the first output end beam 321 through the second straight beam flexible hinge 326, so that the second amplification of the output displacement of the piezoelectric actuator 31 is realized. And, the left-right rocking displacement of the first output end beam 321 is transferred to the first connecting rod 331 through the first straight beam flexible hinge 333, and transferred to the movable cross rod 332 through the first straight beam flexible hinge 333 at the other side of the first connecting rod 331, so that the influence of parasitic movement is reduced by utilizing the parallelogram characteristic, and the movable cross rod 332 moves to absorb displacement. While other linear displacements of the first output end beam 321 are transferred to the displacement platform 40 via the first flexible longitudinal beam 322 to drive the displacement platform 40 in motion. Thus, the plurality of first driving components 30 outside the displacement platform 40 can precisely control the displacement platform 40 to perform large-stroke movement on the X axis and the Y axis, namely, realize the movement of the positioning platform in two degrees of freedom.
In addition, the second driving assembly 50 includes a first correction amplifying part 51 and a second correction amplifying part 52 disposed outside the first correction amplifying part 51, the first correction amplifying part 51 includes a piezoelectric actuator 31, second input end beams 511 disposed at both sides of the piezoelectric actuator 31, and first flexible arms 512 symmetrically disposed at both sides of the second input end beams 511, one end of each first flexible arm 512 is connected to the second input end beam 511, the other end is connected to the first flexible arm 512 at the adjacent side, and the connection part of the two first flexible arms 512 is connected to the second correction amplifying part 52 through the first flexible cross beam 513, and the second input end beam 511 and the first flexible arm 512 form a diamond structure. Further, the second correction amplifying component 52 includes second flexible longitudinal beams 521 symmetrically disposed on two sides of the first correction amplifying component 51, a second fixed end beam 522 and a connecting beam 523 disposed on the other two sides of the first correction amplifying component 51, and a second output end beam 524 disposed on the outer side of the connecting beam 523, where the second output end beam 524 is connected to the connecting beam 523 through a curved flexible hinge 525, and two ends of the second flexible longitudinal beam 521 are connected to the connecting beam 523 and the second fixed end beam 522 through second flexible arms 526, respectively, and the connecting beam 523, the second flexible longitudinal beam 521, the second fixed end beam 522, and the second flexible arms 526 form a diamond structure.
Specifically, in actual use, a voltage is applied to two ends of the piezoelectric actuator 31, the output ends thereof will displace, and then the second input end beam 511 is pushed to deform, and taking the second input end beam 511 at the top thereof as an example, the first flexible arm 512 at the lower half of the right side of the second input end beam 511 rotates clockwise, and the displacement is transferred to the first flexible cross beam 513, and then the first flexible cross beam 513 pulls the second flexible longitudinal beam 521 inwards, so that the second flexible arm 526 rotates anticlockwise due to the deformation of the second flexible longitudinal beam 521, and finally the connecting cross beam 523, the curved flexible hinge 525 and the second output end beam 524 displace upwards. When only the piezoelectric actuator 31 in one second driving unit 50 is controlled, the output ends of the remaining two second driving units 50 are not actively displaced. However, the rotating platform 60 will deflect with the curved flexible hinge 525. By controlling the different displacement outputs of the piezoelectric actuators 31 of the three second drive assemblies 50, a variety of linkage combinations of flexible beams and flexible hinges can be achieved to precisely control the rotation of the upper rotary stage 60 about the X, Y axis or translation along the Z axis, thereby effecting movement of the positioning stage in three degrees of freedom. In addition, through the diamond-shaped structure distribution of the first correction amplifying part 51, partial parasitic motion displacement of the two second input end beams 511 can be offset, and through the diamond-shaped structure distribution of the second correction amplifying part 52, the second flexible arms 526 on the second correction amplifying part 52 form a parallelogram structure to buffer and absorb the parasitic motion.
In addition, three second driving assemblies 50 are disposed on the displacement platform 40, and the three second driving assemblies 50 are distributed in an annular array around the central axis of the displacement platform 40. The second driving assembly 50 is used for driving the rotary platform 60 to move up and down and rotate around the X-axis or the Y-axis, so that external force needs to be applied to at least three places of the rotary platform 60, and because of the application scenario of the displacement platform 40, the space occupied by the displacement platform 40 needs to be as small as possible, so that three second driving assemblies 50 are most preferable. In addition, in order to ensure the stability and the precision of the movement of the rotary platform 60, the three second driving assemblies 50 are distributed in an annular array around the central axis of the displacement platform 40, so that the rotary platform 60 is uniformly stressed, and the stable and accurate displacement of the rotary platform 60 is ensured.
Specifically, the rotary platform 60 is triangular, the displacement platform 40 is rectangular, and the three top corners of the rotary platform 60 are respectively provided with a plurality of first connecting holes 61, so that the three corners of the rotary platform 60 are respectively connected with the tops of the three second driving components 50, and the displacement platform 40 is provided with second connecting holes 41 distributed around the central axis of the displacement platform 40 at equal intervals, so that the displacement platform 40 is connected with the bottoms of the second driving components 50. Through a plurality of first connecting holes 61 for the second drive assembly 50 is applyed through the multiple spot when applying the displacement to rotary platform 60, when avoiding single point to applys, and then the displacement that great parasitic motion leads to changes, and multiple spot applys, make the parasitic motion displacement in different points place have the difference, and then can appear the situation that offset each other, thereby reduce parasitic motion, and the drive motion of main direction, then all along the axis direction, multiple spot applys can not produce the situation that offsets. In addition, the plurality of first connection holes 61 at the respective top corners are symmetrically distributed and distributed in an annular array with the central axis of the rotary platform 60, thereby enhancing the fixing effect and structural stability of the rotary platform 60.
In addition, the middle part of the rotating platform 60 is provided with a mounting groove 62 adapted to the optical fiber fixing member 70, the center of the optical fiber fixing member 70 is provided with an optical fiber fixing hole, the bottom of the mounting groove 62, the displacement platform 40 and the base 10 are all provided with through holes 63 adapted to the optical fiber fixing holes 71 and coaxially arranged, and the optical fiber fixing member 70 is provided with first fixing holes 72 circumferentially and equidistantly distributed around the axis of the optical fiber fixing hole 71, so that the optical fiber fixing member 70 is fixed in the mounting groove 62. Through the porous coaxial design, symmetry and precision of the whole space micro-positioning platform in the motion process are ensured, and error accumulation is reduced. And in practice, each through hole 63 is as large as possible to reduce the overall weight, so that the piezoelectric actuator 31 can make the positioning platform move more under the condition of the same power, and the phase change increases the travel of the positioning platform.
Further, the outer contour of the positioning platform base 20 is a right triangle, and two right-angle sides of the positioning platform base 20 are respectively connected with the outer sides of the first output end beams 321 of the first driving assemblies 30 at two sides through a plurality of second flexible cross beams 21. The positioning platform base 20 is connected with the first output end beam 321 through the plurality of second flexible cross beams 21, so that the positioning platform base is used for supporting the first output beam to be suspended above the base 10, and parasitic displacement directions generated by connection of the single second flexible cross beams 21 are prevented from being consistent, and the displacement of the first output end beam 321 is influenced. In addition, in the specific implementation, the first driving assembly 30, the second driving assembly 50 and all the parts inside the first driving assembly and the second driving assembly take the central axis of the displacement platform 40 as a symmetrical axis and are uniformly arranged in an annular array, and the design effectively ensures the structural symmetry of the whole micro-positioning platform, so that the precision and the stability in the movement process are greatly improved.
Specifically, the base 10 is provided with a plurality of positioning bosses 11 respectively adapted to the positioning platform base 20 and the first fixed end beam 325, and the positioning bosses 11 are provided with second fixing holes 12, so that the positioning bosses 11 are respectively connected with the positioning platform base 20 and the first fixed end beam 325. Through setting up location boss 11 for first drive assembly 30 part structure and base 10 fixed connection, and main part suspension is in base 10 top, thereby effectively reduces the motion interference between the inside spare part of first drive assembly 30, thereby improves positioning platform's displacement precision and reduces the systematic error.
In summary, in the micro-positioning platform for coupling and positioning an optical fiber according to the above embodiment of the present invention, by arranging the plurality of first driving components 30 outside the displacement platform 40, arranging the plurality of second driving components 50 on the displacement platform 40, and arranging the rotating platform 60 for fixing the optical fiber on the second driving components 50, the displacement platform 40 can be driven by the first driving components 30 to move along the X-axis or the Y-axis so as to drive the optical fiber to move along the X-axis or the Y-axis, so as to realize the movement of the optical fiber in two degrees of freedom, and then the plurality of second driving components 50 move the contact point of the rotating platform 60 and the second driving components 50 simultaneously and with the same amplitude, so that the contact point of the rotating platform 60 and the second driving components 50 can move simultaneously and with different amplitudes, and further the rotating platform 60 can move around the X-axis or the Y-axis, and further the plurality of second driving components 50 can realize the movement of the optical fiber in three degrees of freedom, so as to realize the optical fiber coupling function of the positioning platform. In addition, due to the driving of the first driving component 30, the piezoelectric actuator 31 and the amplifying component 32 realize flexible driving, thereby achieving the effect of precise movement and improving the stroke. And the two sides of the first output end beam 321 of the amplifying component 32 are connected with the correcting component 33, so that a parallelogram structure is formed with the correcting component 33, when the first output end beam 321 outputs, the left-right swing generated by parasitic motion can affect the output direction and amplitude of the first output end beam 321, and the parasitic motion is transmitted to the correcting component 33 through the first straight beam flexible hinges 333 on the two sides, and then the parasitic motion is buffered and absorbed through the correcting component 33, so that the movable cross rod 332 can move, the motion of the first output end beam 321 is not affected any more, and therefore, the motion stability and accuracy of the positioning platform are ensured due to the effectively reduced influence of the parasitic motion. Therefore, the invention solves the problem that a micro positioning platform for optical fiber coupling positioning with large stroke and stable and accurate movement is lacking in the prior art.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing examples illustrate only a few embodiments of the invention and are described in detail herein without thereby limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (9)
1. The micro-positioning platform for optical fiber coupling positioning is characterized by comprising a base, positioning platform bases respectively arranged on four corners of the base, a first driving assembly arranged between two adjacent positioning platform bases, a displacement platform arranged in the middle of the base, a second driving assembly arranged on the displacement platform, a rotating platform arranged on the second driving assembly and an optical fiber fixing piece arranged on the rotating platform, wherein the first driving assembly is used for driving the displacement platform to move along an X axis or a Y axis, and the second driving assembly is used for driving the rotating platform to move along the Z axis and rotate along the X axis or the Y axis;
The first driving assembly comprises a piezoelectric actuator, an amplifying part connected with the piezoelectric actuator and a correcting part connected with the amplifying part, wherein the amplifying part comprises a first output end beam and a first flexible longitudinal beam, the first output end beam is connected with the displacement platform through the first flexible longitudinal beam, the correcting part comprises a first connecting rod, a movable cross rod and a first straight beam flexible hinge, the first connecting rod is arranged on two sides of the first output end beam in parallel, the movable cross rod is opposite to the first output end beam in parallel, the two ends of the first connecting rod are respectively connected with the first output end beam and the movable cross rod through the first straight beam flexible hinge, and the first output end beam, the two first connecting rods and the movable cross rod form a parallelogram structure.
2. The micro-positioning platform for optical fiber coupling positioning according to claim 1, wherein the amplifying component further comprises a first input end beam arranged at two sides of the piezoelectric actuator, a second connecting rod symmetrically arranged at two sides of one end of the first input end beam close to the piezoelectric actuator, and a first fixed end beam arranged at one side of the piezoelectric actuator adjacent to the first input end beam, wherein the first fixed end beam is fixedly connected with the base, one end of the second connecting rod is connected with the first input end beam through a second straight beam flexible hinge, and the other end of the second connecting rod is connected with the first output end beam or the first fixed end beam through the second straight beam flexible hinge.
3. The micro-positioning platform for optical fiber coupling positioning according to claim 1, wherein the second driving assembly comprises a first correction amplifying part and a second correction amplifying part arranged outside the first correction amplifying part, the first correction amplifying part comprises a piezoelectric actuator, second input end beams arranged on two sides of the piezoelectric actuator, and first flexible arms symmetrically arranged on two sides of the second input end beams, one end of each first flexible arm is connected with the second input end beam, the other end of each first flexible arm is connected with the first flexible arm on the adjacent side, the connection part of each first flexible arm is connected with the second correction amplifying part through a first flexible cross beam, and the second input end beams and the first flexible arms form a diamond structure.
4. The micro-positioning platform for optical fiber coupling positioning according to claim 3, wherein the second correction amplifying component comprises second flexible longitudinal beams symmetrically arranged on two sides of the first correction amplifying component, a second fixed end beam and a connecting beam which are respectively arranged on the other two sides of the first correction amplifying component, and a second output end beam arranged on the outer side of the connecting beam, the second output end beam is connected with the connecting beam through a curved flexible hinge, two ends of the second flexible longitudinal beam are respectively connected with the connecting beam and the second fixed end beam through second flexible arms, and the connecting beam, the second flexible longitudinal beams, the second fixed end beam and the second flexible arms form a diamond structure.
5. A micro-positioning platform for optical fiber coupling positioning according to claim 3, wherein three second driving components are arranged on the displacement platform, and the three second driving components are distributed in an annular array around the central axis of the displacement platform.
6. The micro-positioning platform for optical fiber coupling positioning according to claim 5, wherein the rotating platform is triangular, the displacement platform is rectangular, a plurality of first connecting holes are formed at three top corners of the rotating platform, so that the three corners of the rotating platform are respectively connected with the tops of the three second driving components, and second connecting holes distributed at equal intervals around the central axis of the displacement platform are formed on the displacement platform, so that the displacement platform is connected with the bottoms of the second driving components.
7. The micro-positioning platform for optical fiber coupling positioning according to claim 6, wherein an installation groove matched with the optical fiber fixing piece is formed in the middle of the rotating platform, an optical fiber fixing hole is formed in the center of the optical fiber fixing piece, through holes matched with the optical fiber fixing hole and coaxially formed in the bottom of the installation groove, the displacement platform and the base are formed in the base, and first fixing holes distributed around the axis of the optical fiber fixing hole at equal intervals in the circumferential direction are formed in the optical fiber fixing piece, so that the optical fiber fixing piece is fixed in the installation groove.
8. The micro-positioning platform for optical fiber coupling positioning according to claim 2, wherein the outer contour of the positioning platform base is a right triangle, and two right-angle sides of the positioning platform base are respectively connected with the outer sides of the first output end beams of the first driving assemblies at two sides through a plurality of second flexible cross beams.
9. The micro-positioning platform for optical fiber coupling positioning according to claim 8, wherein a plurality of positioning bosses respectively matched with the positioning platform base and the first fixed end beam are arranged on the base, and a second fixing hole is arranged on the positioning boss so that the positioning bosses are respectively connected with the positioning platform base and the first fixed end beam.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202411658289.6A CN119148300A (en) | 2024-11-20 | 2024-11-20 | Micro-positioning platform for optical fiber coupling positioning |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202411658289.6A CN119148300A (en) | 2024-11-20 | 2024-11-20 | Micro-positioning platform for optical fiber coupling positioning |
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| CN202411658289.6A Withdrawn CN119148300A (en) | 2024-11-20 | 2024-11-20 | Micro-positioning platform for optical fiber coupling positioning |
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