CN119075578B - A greenhouse gas treatment device based on microwave plasma - Google Patents
A greenhouse gas treatment device based on microwave plasma Download PDFInfo
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- CN119075578B CN119075578B CN202411574576.9A CN202411574576A CN119075578B CN 119075578 B CN119075578 B CN 119075578B CN 202411574576 A CN202411574576 A CN 202411574576A CN 119075578 B CN119075578 B CN 119075578B
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- 239000005431 greenhouse gas Substances 0.000 title claims abstract description 19
- 230000008878 coupling Effects 0.000 claims abstract description 50
- 238000010168 coupling process Methods 0.000 claims abstract description 50
- 238000005859 coupling reaction Methods 0.000 claims abstract description 50
- 239000007789 gas Substances 0.000 claims abstract description 49
- 230000005540 biological transmission Effects 0.000 claims abstract description 37
- 238000005507 spraying Methods 0.000 claims description 11
- 230000005672 electromagnetic field Effects 0.000 claims description 9
- 239000010453 quartz Substances 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 7
- 229910010293 ceramic material Inorganic materials 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 6
- 230000005284 excitation Effects 0.000 claims description 5
- 229910002187 La0.8Sr0.2CoO3 Inorganic materials 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 239000012670 alkaline solution Substances 0.000 claims description 3
- 229920001971 elastomer Polymers 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000005530 etching Methods 0.000 abstract description 4
- -1 fluorine ions Chemical class 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 4
- 229910052731 fluorine Inorganic materials 0.000 abstract description 2
- 239000011737 fluorine Substances 0.000 abstract description 2
- 239000007921 spray Substances 0.000 abstract 1
- 210000002381 plasma Anatomy 0.000 description 25
- 230000008859 change Effects 0.000 description 6
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 239000002912 waste gas Substances 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 4
- 238000006731 degradation reaction Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 230000002035 prolonged effect Effects 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/007—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by irradiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/30—Sulfur compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/806—Microwaves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Health & Medical Sciences (AREA)
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Abstract
本发明提供一种基于微波等离子体的温室气体处理装置及方法，包括电磁波输入和传输系统、微波耦合腔、进气系统和尾气处理系统；电磁波输入和传输系统包括两组微波磁控管和传输波导，传输波导与微波耦合腔连通；进气系统包括Ar输入管道，O2输入管道，SF6输入管道和三层式进气套管；三层式进气套管的侧方设有自动点火装置；尾气处理系统包括密闭腔、废气输送管道和喷淋装置；微波耦合腔通过功率耦合的方式不仅能提高SF6的电离效果，提高微波功率的利用率，还能提高处理大流量SF6的能力；进气装置采用三层套管，在提高处理SF6流量的同时，可以有效减少电离出的氟离子对进气管的刻蚀，提高持续工作时间。
The present invention provides a greenhouse gas treatment device and method based on microwave plasma, comprising an electromagnetic wave input and transmission system, a microwave coupling cavity, an intake system and an exhaust gas treatment system; the electromagnetic wave input and transmission system comprises two groups of microwave magnetrons and transmission waveguides, and the transmission waveguides are connected to the microwave coupling cavity; the intake system comprises an Ar input pipeline, an O2 input pipeline, an SF6 input pipeline and a three-layer intake sleeve; an automatic ignition device is arranged on the side of the three-layer intake sleeve; the exhaust gas treatment system comprises a closed chamber, an exhaust gas delivery pipeline and a spray device; the microwave coupling cavity can not only improve the ionization effect of SF6 and the utilization rate of microwave power by power coupling, but also improve the ability to treat large flow SF6 ; the intake device adopts a three-layer sleeve, which can effectively reduce the etching of the intake pipe by ionized fluorine ions while improving the processing flow of SF6 , thereby improving the continuous working time.
Description
Technical Field
The invention belongs to the field of gas degradation, and particularly relates to a greenhouse gas treatment device and method based on microwave plasma.
Background
SF 6 has very stable chemical properties, is not easy to decompose under normal conditions, and has excellent arc extinguishing performance and good insulating performance, so that SF 6 is widely used in electrical equipment such as Gas Insulated Switchgear (GIS), insulated power transmission pipelines, transformers, insulated substations and the like. And the life cycle of SF 6 reaches 3200 years and the GWP value is 8000, so that the emission of SF 6 has a great influence on the greenhouse effect. The amount of SF 6 emissions from gas leaks occurring in the power industry and equipment maintenance and retirement is about 70% of the total emissions, and in addition, the amount of SF 6 emissions from use in the semiconductor manufacturing industry is about 10% of the total. Therefore, effective management of industrial SF 6 emissions is also a very important task in the development.
In recent years, the plasma waste gas treatment technology has been widely studied, and compared with the traditional methods of high-temperature pyrolysis, chemical catalysis and the like, the plasma technology has the characteristics of high degradation rate, high energy efficiency and simple operation. Thermal arc plasmas are widely studied and used in the treatment of SF 6 gases due to the high plasma temperatures they generate. However, there are problems of the service life of the electrode, high consumption and waste of electric energy, and the like. In low temperature plasma, dielectric barrier discharge has a high electron temperature and is applied to remove SF 6 gas. However, the reaction caused by the electron inelastic collision can only occur within the pulse time, and the collision among heavy particles is mainly generated in the whole afterglow, so that the removal efficiency is reduced along with the increase of the concentration of SF 6 gas, and the large-flow SF 6 can not be treated.
Disclosure of Invention
Aiming at the problems that the traditional plasma degradation SF 6 has lower capability, SF 6 cannot be thoroughly decomposed, and large-flow SF 6 cannot be processed, and the thermal arc plasma degradation SF 6 has higher power consumption and waste, the invention provides a greenhouse gas processing device and method based on microwave plasma.
The technical scheme for solving the technical problems is as follows:
A greenhouse gas treatment device based on microwave plasma comprises an electromagnetic wave input and transmission system, a microwave coupling cavity, an air inlet system and an exhaust gas treatment system.
The electromagnetic wave input and transmission system comprises two groups of microwave magnetrons and a transmission waveguide, wherein the transmission waveguide is communicated with the microwave coupling cavity and respectively transmits electromagnetic fields generated by the two groups of microwave magnetrons into the microwave coupling cavity;
The air inlet system comprises an Ar input pipeline, an O 2 input pipeline, an SF 6 input pipeline and a three-layer air inlet sleeve, wherein the O 2 input pipeline is divided into two groups by a three-way valve, the first group of O 2 input pipelines are communicated with the outer layer of the three-layer air inlet sleeve, the second group of O 2 input pipelines are communicated with the middle layer of the three-layer air inlet sleeve after being combined with the Ar input pipeline, the SF 6 input pipeline is communicated with the inner layer of the three-layer air inlet sleeve, the three-layer air inlet sleeve penetrates through the microwave coupling cavity, and an automatic ignition device is arranged at the side of the three-layer air inlet sleeve for initial excitation;
the tail gas treatment system comprises a closed cavity, an exhaust gas conveying pipeline and a spraying device, wherein the closed cavity is connected with the three-layer type air inlet sleeve, the spraying device absorbs acid gas products by using alkaline solution, and the exhaust gas conveying pipeline is connected with the closed cavity and is provided with an exhaust fan for exhaust gas pumping.
Based on the technical scheme, the application also improves the following steps:
further, each transmission waveguide comprises a stepped gradual change portion and a compression waveguide portion, the overall wall thickness of the transmission waveguide is 5mm, the stepped gradual change portion is a three-stage gradual change waveguide, the height, width and length of the first-stage waveguide are minimum, the height, width and length of the second-stage waveguide are secondary, the height, width and length of the third-stage waveguide are maximum, the compression waveguide is connected with the third-stage waveguide, the compression waveguide compresses the height of the third-stage waveguide by a preset size, and the two groups of transmission waveguides are distributed in parallel up and down and are arranged at intervals.
Further, the microwave coupling cavity is a cuboid with a hollow inside, the microwave coupling cavity is connected with two groups of transmission waveguides, and an opening with a preset radius is formed in the position, away from the transmission waveguides, of the microwave coupling cavity.
Further, the outer layer of the three-layer type air inlet sleeve is made of quartz material, the middle layer is made of ceramic material, the inner layer is made of metal material, the wall thickness of the three layers is equal, the pipe diameter is gradually decreased from outside to inside, and the outer layer and the middle layer are respectively provided with 2 air inlets.
Further, the Ar gas pipeline and the second group of O 2 input pipelines are tangentially connected with the middle layer of the air inlet device by 60 degrees.
Further, the automatic ignition device comprises an electromagnet and an ignition needle, and the ignition needle is made of La 0.8Sr0.2CoO3.
Further, the auto-ignition device is configured such that when power is supplied, the ignition needle penetrates the three-layer air inlet sleeve to the bottom of the microwave coupling cavity and retracts when power is removed.
Further, the automatic ignition device and the three-layer air inlet sleeve are sealed by rubber parts.
Further, SF 6 is directly discharged into a closed cavity through tail gas generated by ionization of the three-layer type air inlet sleeve in the microwave coupling cavity, and the closed cavity is made of quartz.
Further, a groove is formed in the left end of the waste gas conveying pipeline.
The greenhouse gas treatment device for the atmospheric pressure microwave plasma has at least the following advantages:
① The coupling cavity can improve the ionization effect of SF 6 and the utilization of microwave power by means of power coupling, and can also improve the capability of processing large-flow SF 6;
② The air inlet device adopts a three-layer structure, the outer layer tube adopts quartz material, the middle layer tube adopts ceramic material, and the innermost layer adopts metal material, so that the etching of ionized fluoride ions to the air inlet tube can be effectively reduced while the flow rate of the SF 6 is improved, and the continuous working time is prolonged;
③ The automatic ignition device is arranged on the side of the three-layer type air inlet sleeve, manual ignition is not needed, the simplicity of the device can be improved, and meanwhile, the device can be excited again when plasma is quenched;
④ The Ar input pipeline and the O 2 input pipeline are tangentially connected with the three-layer air inlet sleeve by 60 degrees, so that the carrier gas can form vortex in the microwave coupling cavity, and the stability of plasma is improved when the atmospheric air flow SF 6 is processed;
⑤ The left end of the waste gas conveying pipeline is provided with a groove, so that ionized hot air can be effectively prevented from condensing and flowing back in the conveying pipeline.
Drawings
FIG. 1 is a schematic structural view of a greenhouse gas treatment apparatus based on microwave plasma;
FIG. 2 is a schematic diagram of a waveguide and microwave coupling cavity;
FIG. 3 is a schematic view of a three-layer air intake sleeve;
FIG. 4 is a graph of microwave coupling cavity and dual cavity superimposed intermediate electromagnetic field strength contrast;
Fig. 5 is a three-layer gas flow pattern simulation of the inlet sleeve.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention. In addition, the technical features of each embodiment or the single embodiment provided by the invention can be combined with each other at will to form a feasible technical scheme, and the combination is not limited by the sequence of steps and/or the structural composition mode, but is necessarily based on the fact that a person of ordinary skill in the art can realize the combination, and when the technical scheme is contradictory or can not realize, the combination of the technical scheme is not considered to exist and is not within the protection scope of the invention claimed.
The invention provides a greenhouse gas treatment device based on microwave plasma, which comprises an electromagnetic wave input and transmission system 10, a microwave coupling cavity 20, an air inlet system 30 and an exhaust gas treatment system 40.
The electromagnetic wave input and transmission system 10 comprises two groups of microwave magnetrons and a transmission waveguide, wherein the transmission waveguide is communicated with the microwave coupling cavity 20, and electromagnetic fields generated by the two groups of microwave magnetrons are respectively transmitted into the microwave coupling cavity 20.
The air intake system 30 includes an Ar input pipe 31, an O 2 input pipe 32, an SF 6 input pipe 33, and a three-layer air intake sleeve 34.
Wherein Ar is an initial excitation gas, O 2 is a working gas, and SF 6 is a greenhouse gas to be treated.
The O 2 input pipelines 32 are divided into two groups by the three-way valve 301, the first group of O 2 input pipelines 321 are communicated with the outer layer 341 of the three-layer air inlet sleeve 34, the second group of O 2 input pipelines 322 are communicated with the middle layer 341 of the three-layer air inlet sleeve 34 after being combined with the Ar input pipeline 31, the SF 6 input pipelines 33 are communicated with the inner layer 343 of the three-layer air inlet sleeve 34, the three-layer air inlet sleeve 34 penetrates through the microwave coupling cavity 20, and an automatic ignition device 50 is arranged on the side of the three-layer air inlet sleeve 34 and used for initial excitation.
The tail gas treatment system 40 comprises a closed cavity 41, an exhaust gas conveying pipeline 42 and a spraying device 43, wherein the closed cavity 41 is connected with the three-layer type air inlet sleeve 34, the spraying device 43 absorbs acid gas products by using alkaline solution, and the exhaust gas conveying pipeline 42 is connected with the closed cavity 41 and is provided with an exhaust fan 44 for exhausting tail gas.
The two sets of microwave magnetrons 11a, 11b and the two sets of transmission waveguides 12a, 12b are connected with the microwave coupling cavity 20 in sequence, and the connection structure of the transmission waveguides and the microwave coupling cavity 20 is schematically shown in fig. 2. An opening is arranged in the middle of the microwave coupling cavity 20, a three-layer type air inlet sleeve 34 penetrates through the microwave coupling cavity 20, an O 2 input pipeline 32 is divided into two parts at a three-way valve 301, a first group of O 2 input pipelines 321 and Ar input pipelines 31 are combined at a second three-way valve 302 and then are connected with an air inlet pipe of an intermediate layer 342 of the three-layer type air inlet sleeve 34, the other group of O 2 is connected with an air inlet pipe of an outer layer 341 of the three-layer type air inlet sleeve, an SF 6 input pipeline 33 is connected with the inner layer 343 of the three-layer type air inlet sleeve, and an automatic ignition device 50 is arranged on the left side of the three-layer type air inlet sleeve 34, see FIG. 3. The airtight cavity 41 is connected with a three-layer type air inlet sleeve, the airtight cavity 41, an exhaust gas conveying pipeline 42 and a spraying device 43 are sequentially connected, a groove 421 is formed in the exhaust gas conveying pipeline 42, and the spraying device 43 is provided with an exhaust fan 44.
The working principle is that two groups of microwave magnetrons 11a and 11b generate electromagnetic waves, the electromagnetic waves are transmitted into a microwave coupling cavity 20 through transmission waveguides 12a and 12b, ar and O 2、SF6 are respectively input into a three-layer type air inlet sleeve 34 through corresponding transmission pipelines, gas is in the microwave coupling cavity 20, and the gas is ignited and ionized by an automatic ignition device 50 under the excitation of the electromagnetic waves to form plasma. SF 6 is ionized and decomposed in the plasma, the generated tail gas is discharged into a closed cavity 41, is transmitted into a spraying device 43 through a waste gas conveying pipeline 42, and is absorbed by alkali liquor in the spraying device 13, and in the embodiment of the application, the alkali liquor is preferably saturated Ca (OH) 2 solution.
Referring to fig. 2, the transmission waveguide includes a stepped gradual change portion 121 and a compressed waveguide portion 122, the overall wall thickness of the transmission waveguide is 5mm, the stepped gradual change portion 121 is a three-stage gradual change waveguide, wherein the height, width and length of the first-stage waveguide 1211 are minimum, the height, width and length of the second-stage waveguide 1212 are secondary, the height, width and length of the third-stage waveguide 1213 are maximum, the compressed waveguide 122 is connected with the third-stage waveguide 1213, the compressed waveguide 122 compresses the height of the third-stage waveguide 1213 by a predetermined size, and two groups of transmission waveguides are distributed in parallel and are arranged at intervals.
In a specific embodiment, the first stage waveguide 1211 has a height 53.18 mm, a width 96.36 mm, a length 6 mm, the second stage waveguide 1212 has a height 58.90 mm, a width 107.79 mm, a length 39mm, the third stage waveguide 1213 has a height 64.61 mm, a width 119.22 mm, and a length 105 mm, the compression waveguide 122 is coupled to the third stage waveguide 1213 and compressed from 64.61 mm to 37.3 mm, the compression waveguide 122 has a length 90 mm, and the two sets of transmission waveguides are spaced apart by 22.21 mm.
The microwave coupling cavity 20 is a cuboid with a hollow interior, the microwave coupling cavity 20 is connected with two groups of transmission waveguides, and an opening with a predetermined radius is formed at a predetermined position of the microwave coupling cavity 20 away from the transmission waveguides. In a specific embodiment, microwave coupling cavity 20 is square in shape, hollow in interior, 130 mm a high, 119.22 mm a wide, 100 a mm a long, and 5a mm a thick wall. The microwave coupling cavity is provided with an opening with the radius of 20 mm at the position which is away from the transmission waveguide 53.5 mm.
Referring to fig. 3, in an embodiment of the present application, the outer layer 341 of the three-layer air inlet sleeve 34 is made of quartz material, the middle layer 342 is made of ceramic material, the inner layer 343 is made of metal material, the wall thickness of the three layers is equal, the pipe diameters of the three layers decrease from outside to inside in a step manner, the outer layer 341 and the middle layer 342 are respectively provided with 2 air inlets, specifically, the outer layer 341 is made of quartz material, the pipe diameter is 40 mm, the wall thickness is 2 mm, the middle layer 342 is made of ceramic material, the pipe diameter is 30 mm, the wall thickness is 2 mm, the inner layer 343 is made of metal material, the pipe diameter is 14 mm, and the wall thickness is 2 mm.
The Ar input pipeline and the O 2 input pipeline are tangentially connected with the three-layer air inlet sleeve by 60 degrees, the outer layer 341 and the middle layer 342 are respectively provided with 2 air inlets, and the pipe diameter of each air inlet is 4 mm.
Wherein, automatic ignition device 50 includes electro-magnet and ignition needle, the material of ignition needle is La 0.8Sr0.2CoO3, automatic ignition device is configured when power supply, the ignition needle penetrates three-layer formula air inlet sleeve reaches the bottom of microwave coupling chamber to withdraw when the outage.
Preferably, the auto-ignition device 50 is sealed to the three-layer air intake sleeve 34 with a rubber member.
The SF 6 is directly discharged into the closed cavity 41 through the tail gas generated by ionization of the three-layer air inlet sleeve 34 in the microwave coupling cavity 20, and the closed cavity 41 is made of quartz.
Fig. 4 is a graph showing the comparison of the intensity of the electromagnetic field between the microwave coupling cavity and the double-cavity superposition, the microwave frequency is 2.45 GHz, and the microwave power is 3 kW, wherein the solid line is the intensity of the electromagnetic field between the microwave coupling cavity, the dotted line is the intensity of the electromagnetic field between the double-cavity superposition, the ordinate is the intensity E of the electromagnetic field in the graph, and the abscissa is the longitudinal height. The comparison shows that the microwave coupling cavity is overlapped relative to the double cavities, the electromagnetic field in the cavity is more uniform, so that the ionized plasma has better theoretical stability and higher utilization rate of microwave energy.
Fig. 5 is a three-layer gas flow pattern simulation of a gas inlet sleeve, wherein the inner layer has a set gas flow rate of 5 SLM, the middle layer has a set gas flow rate of 30 SLM, and the outer layer has a set gas flow rate of 20 SLM. The gas flow lines in the three-layer type air inlet sleeve are well-defined in the figure, and are transmitted in the device by stable vortex spiral. Therefore, the etching of ionized fluorine ions to the outer layer pipe wall can be effectively reduced, the working time is prolonged, and meanwhile, the stability of plasma in the presence of atmospheric flow is ensured.
The specific implementation method comprises the following steps:
The two groups of magnetrons respectively output 1 kW power, the valve of an Ar input pipeline is opened, the Ar flow input into the middle layer 342 of the three-layer type air inlet sleeve 34 is regulated to be 10 SLM, and the automatic ignition device 50 is started to excite plasma and then is closed.
Then, the O 2 input line valve was opened, the O 2 input flow rate of the middle layer 342 was adjusted to 10 SLM, the outer layer O 2 input flow rate was 5 SLM, and then the Ar line valve was closed. The output power of the magnetron is increased to 3 kW, meanwhile, the input flow of O 2 of the middle layer 342 is regulated to 30 SLM, the input flow of O 2 of the outer layer 341 is regulated to 20 SLM, after the plasma is stabilized, an SF 6 input pipeline valve is opened, SF 6 gas 3 SLM is introduced into the inner layer 343 of the three-layer type air inlet sleeve 34, and ionized gas is discharged and then is transmitted to the spraying device 43 to be absorbed by saturated Ca (OH) 2 solution. Meanwhile, by increasing the power supply of the magnetron to 6kW, the O 2 input flow rate of the outer layer 341 of the three-layer type air inlet sleeve 34 may be increased to 50 SLM, the O 2 input flow rate of the middle layer 342 may be increased to 40 SLM, and the SF 6 input flow rate of the inner layer 343 may be increased to 10 SLM.
The invention provides a greenhouse gas treatment device for atmospheric pressure microwave plasma, which has the following beneficial effects:
1. The microwave coupling cavity can improve the ionization effect of SF 6 and the utilization of microwave power by means of power coupling, and can also improve the capability of processing large-flow SF 6;
2. The air inlet device adopts a three-layer sleeve type structure, the outer layer tube is made of quartz material, the middle layer tube is made of ceramic material, and the innermost layer is made of metal material, so that the etching of ionized fluoride ions to the air inlet tube can be effectively reduced while the flow rate of the SF 6 is improved, and the continuous working time is prolonged;
3. The three-layer air inlet sleeve 34 is laterally provided with an automatic ignition device 50, manual ignition is not needed, the simplicity of the device can be improved, and meanwhile, the device can be excited again when plasma is quenched;
The Ar gas pipeline and the O 2 pipeline are tangentially connected with the three-layer type air inlet sleeve pipe at 60 degrees, so that the vortex of carrier gas in the microwave coupling cavity can be ensured, and the stability of plasma is improved when the atmospheric air flow SF 6 is treated;
5. The left end of the waste gas conveying pipeline is provided with a groove, so that ionized hot air can be effectively prevented from condensing and flowing back in the conveying pipeline.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (8)
1. The greenhouse gas treatment device based on the microwave plasma is characterized by comprising an electromagnetic wave input and transmission system, a microwave coupling cavity, an air inlet system and an exhaust gas treatment system;
The electromagnetic wave input and transmission system comprises two groups of microwave magnetrons and a transmission waveguide, wherein the transmission waveguide is communicated with the microwave coupling cavity and respectively transmits electromagnetic fields generated by the two groups of microwave magnetrons into the microwave coupling cavity;
The air inlet system comprises an Ar input pipeline, an O 2 input pipeline, an SF 6 input pipeline and a three-layer air inlet sleeve, wherein the O 2 input pipeline is divided into two groups by a three-way valve, the first group of O 2 input pipelines are communicated with the outer layer of the three-layer air inlet sleeve, the second group of O 2 input pipelines are communicated with the middle layer of the three-layer air inlet sleeve after being combined with the Ar input pipeline, the SF 6 input pipeline is communicated with the inner layer of the three-layer air inlet sleeve, the three-layer air inlet sleeve penetrates through the microwave coupling cavity, and an automatic ignition device is arranged at the side of the three-layer air inlet sleeve for initial excitation;
the tail gas treatment system comprises a closed cavity, an exhaust gas conveying pipeline and a spraying device, wherein the closed cavity is connected with the three-layer type air inlet sleeve, the spraying device absorbs acid gas products by using alkaline solution, and the exhaust gas conveying pipeline is connected with the closed cavity and is provided with an exhaust fan for exhausting tail gas;
The outer layer of the three-layer type air inlet sleeve is made of quartz material, the middle layer is made of ceramic material, the inner layer is made of metal material, the wall thickness of the three layers is equal, the pipe diameter is gradually decreased from outside to inside, and 2 air inlets are respectively formed in the outer layer and the middle layer.
2. The microwave plasma-based greenhouse gas treatment device according to claim 1, wherein each of the transmission waveguides includes a stepped gradation portion having an overall wall thickness of 5mm and a compressed waveguide portion having a three-stage gradation waveguide, wherein a first-stage waveguide height, width and length are smallest, a second-stage waveguide height, width and length are largest, a third-stage waveguide height, width and length are largest, the compressed waveguide is connected to the third-stage waveguide, the compressed waveguide compresses the third-stage waveguide height by a predetermined size, and two sets of the transmission waveguides are arranged side by side and spaced apart.
3. The greenhouse gas treatment device based on microwave plasma according to claim 1, wherein the microwave coupling cavity is a cuboid with a hollow inside, the microwave coupling cavity is connected with two groups of transmission waveguides, and an opening with a preset radius is formed at a preset position of the microwave coupling cavity away from the transmission waveguides.
4. The microwave plasma-based greenhouse gas treatment device according to claim 1, wherein the Ar input pipe and the O 2 input pipe are tangentially connected to a middle layer of the three-layer gas inlet sleeve at 60 °.
5. The microwave plasma-based greenhouse gas treatment device according to claim 1, wherein the auto-ignition device comprises an electromagnet and an ignition needle, and the ignition needle is made of La 0.8Sr0.2CoO3.
6. The microwave plasma-based greenhouse gas treatment device of claim 5, wherein the auto-ignition device is configured such that the ignition needle penetrates the three-layer inlet sleeve to the bottom of the microwave coupling cavity when powered and withdraws when powered down.
7. The microwave plasma-based greenhouse gas treatment device according to claim 1, wherein the auto-ignition device and the three-layer air inlet sleeve are sealed with rubber members.
8. The greenhouse gas treatment device based on microwave plasma according to claim 1, wherein the tail gas generated by ionization of SF 6 in the microwave coupling cavity through the three-layer type air inlet sleeve is directly discharged into a closed cavity, and the closed cavity is made of quartz.
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| CN107617320A (en) * | 2017-10-23 | 2018-01-23 | 大连理工大学 | A kind of device using Microwave plasma treatment waste gas |
| CN212091553U (en) * | 2020-04-13 | 2020-12-08 | 四川仲测质量技术检测有限公司 | Graphite is cleared up and is ventilated and use sour gas processing apparatus |
| CN117185643A (en) * | 2023-09-18 | 2023-12-08 | 武汉市飞瓴光电科技有限公司 | Normal pressure microwave plasma equipment and process for optical fiber preform surface treatment |
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| US6620394B2 (en) * | 2001-06-15 | 2003-09-16 | Han Sup Uhm | Emission control for perfluorocompound gases by microwave plasma torch |
| CN116828685A (en) * | 2023-07-20 | 2023-09-29 | 苏州智谱蔚星智能科技有限公司 | Novel microwave plasma generation and ionization device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107617320A (en) * | 2017-10-23 | 2018-01-23 | 大连理工大学 | A kind of device using Microwave plasma treatment waste gas |
| CN212091553U (en) * | 2020-04-13 | 2020-12-08 | 四川仲测质量技术检测有限公司 | Graphite is cleared up and is ventilated and use sour gas processing apparatus |
| CN117185643A (en) * | 2023-09-18 | 2023-12-08 | 武汉市飞瓴光电科技有限公司 | Normal pressure microwave plasma equipment and process for optical fiber preform surface treatment |
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