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CN119044334A - Coaxial focusing ultrasonic receiving and transmitting transducer and design method thereof - Google Patents

Coaxial focusing ultrasonic receiving and transmitting transducer and design method thereof Download PDF

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Publication number
CN119044334A
CN119044334A CN202411167112.6A CN202411167112A CN119044334A CN 119044334 A CN119044334 A CN 119044334A CN 202411167112 A CN202411167112 A CN 202411167112A CN 119044334 A CN119044334 A CN 119044334A
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pdms
film
ultrasonic
concave lens
optical fiber
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邵志华
梁瑞明
乔学光
高俊杰
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Northwest University
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Northwest University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/221Arrangements for directing or focusing the acoustical waves

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  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

The invention discloses a coaxial focusing type ultrasonic transceiver transducer and a design method thereof, and belongs to the technical field of ultrasonic detection. The design method of the coaxial focusing type ultrasonic transceiver transducer comprises the steps of S100, arranging a central hole in the central position of a concave lens, S200, coating a layer of PDMS film on the concave surface of the concave lens by using a spin coating method, applying a Ti 3C2 film on the uncured PDMS film, heating the PDMS film and then waiting for natural cooling, S300, coating a layer of PDMS film on the Ti 3C2 film by using a spin coating method, heating the newly coated PDMS film and then waiting for natural cooling, thus forming a PDMS-Ti 3C2 -PDMS sandwich membrane structure, and S400, penetrating an optical fiber ultrasonic sensor through the central hole and fixing the optical fiber ultrasonic sensor on the concave lens. The design method of the coaxial focusing ultrasonic transceiver transducer can obtain the optimal signal-to-noise ratio, realize the overall miniaturization and portability of an imaging system, avoid the condition of excitation by laying photoacoustic transduction materials in a large area, and reduce the complexity of the system.

Description

Coaxial focusing ultrasonic receiving and transmitting transducer and design method thereof
Technical Field
The invention relates to the technical field of ultrasonic detection, in particular to a coaxial focusing ultrasonic transceiver transducer and a design method thereof.
Background
The ultrasonic wave has high frequency, short wavelength, small diffraction and easy realization of sound energy concentration, thereby having good penetrability and directivity. At present, ultrasonic waves are popularized in various fields of people's life, and are widely applied to occasions such as ultrasonic cleaning, flaw detection, remote control, distance measurement, imaging, underwater acoustic communication and the like.
The high-intensity focusing ultrasonic transducer proposed by the generation of et al (patent of utility model, CN 202222498390.2) adopts an energy concentrator with focusing function to regulate an ultrasonic field, can increase the ultrasonic sound pressure of a specific area, and can improve the sensitivity of the transducer for detecting the ultrasonic to a certain extent. However, the transducer has poor integration level, only has a single ultrasonic focusing and receiving function, cannot realize an ultrasonic focusing and exciting function, and has obvious defects in the aspects of signal-to-noise ratio detection, system miniaturization, flexibility and the like due to the use of an electric transducer and a plurality of groups of bolt mounting structures.
Ji n et al (APPL IED PHYS ICS B,2021,10.1007/s 00340-020-07559-5) use gold film to significantly improve the ultrasonic excitation effect on the surface of the seismic physical model, but the separate configuration of the ultrasonic excitation source and the ultrasonic detector affects the scanning efficiency and the experimental convenience, and the integration level of ultrasonic excitation and detection is low, so that the imaging speed and signal stability of the system are greatly limited. In addition, the method needs to lay a large-area photoacoustic transduction material on the surface of the physical model, has high technical cost and is not beneficial to the miniaturization of the whole system.
Arbor et al (patent of utility model, CN 202111215076.2) proposed an ultrasonic sensor based on an ultraviolet glue region for inscribing a grating. The technology utilizes the low Young's modulus characteristic of polymer waveguides, and the sensor has good ultrasonic response. The sensor is prepared by adopting a method of embedding and splicing a plurality of sections of optical fibers and polymers, and the sensor has insufficient stability and does not meet the requirements of exciting and receiving ultrasonic waves in dynamic scanning of a physical model of an earthquake.
The photoacoustic transducer based on the photoacoustic effect principle is a brand new ultrasonic transduction scheme, and presents a good development situation in the aspect of ultrasonic transduction. In photoacoustic conversion, nanosecond pulse laser energy is absorbed by a photoacoustic conversion material and converted into ultrasonic waves of wide bandwidth and high frequency by a thermoelastic effect, and the generated ultrasonic signals are detected by an ultrasonic sensor. However, in practical applications, the photoacoustic transducer is used to excite ultrasound, so that a photoacoustic transduction material needs to be laid on the surface of a detection target in a large area, the use and maintenance costs are high, and due to the separate design of the excitation and the reception of ultrasound, a complex optical module is required to achieve the coaxial focusing of photoacoustic, which greatly limits the scanning speed and the imaging range of the system, increases the complexity of the system, is unfavorable for the miniaturization of the system, and requires users to have more specialized operation capability.
Disclosure of Invention
The invention aims to overcome the problems in the prior art, and provides a design method of a coaxial focusing ultrasonic transceiver transducer, which can obtain the optimal signal-to-noise ratio, realize the overall miniaturization and portability of an imaging system, avoid the condition of excitation by paving a photoacoustic transduction material in a large area, and reduce the complexity of the system.
The invention provides a design method of a coaxial focusing type ultrasonic transceiver transducer, which comprises the following steps of S100, setting a central hole in the central position of a concave lens, S200, coating a layer of PDMS (polydimethylsiloxane) film on the concave surface of the concave lens by using a spin coating method, attaching a Ti 3C2 (titanium carbide) film on an uncured PDMS film, heating the PDMS film and waiting for natural cooling, S300, coating a layer of PDMS film on the Ti 3C2 film by using a spin coating method, heating the newly coated PDMS film and waiting for natural cooling, thereby forming a PDMS-Ti 3C2 -PDMS sandwich membrane structure, S400, penetrating an optical fiber ultrasonic sensor through the central hole, and fixing the optical fiber ultrasonic sensor on the concave lens, so that the sensing area of the optical fiber ultrasonic sensor exceeds the surface of the PDMS-Ti 3C2 -PDMS sandwich membrane structure, ensuring that the sensing part of the optical fiber ultrasonic sensor can be positioned in the anti-focusing area of the concave lens, and alleviating the influence of laser ultrasonic direct waves.
Preferably, in the step S200 and the step S300, the PDMS film is subjected to a heating treatment at 70 ℃ to 100 ℃, and naturally cooled and solidified.
Preferably, the diameter of the concave lens is 16-20 mm, the radius of curvature is 14.57-16.57 mm, and the diameter of the central hole is 350-450 μm.
Preferably, the distance between the sensing area of the optical fiber ultrasonic sensor and the surface of the PDMS-Ti 3C2 -PDMS sandwich membrane structure is 100-300 μm.
Preferably, in the step S200 and the step S300, the thickness of the PDMS film coated twice is smaller than 10 μm, and in the step S200, the thickness of the Ti 3C2 film is 5 μm to 10 μm.
A coaxial focusing ultrasonic receiving and transmitting transducer comprises a concave lens and an optical fiber ultrasonic sensor;
the optical fiber ultrasonic sensor is fixed on the concave lens and passes through the central hole, and the sensing area of the optical fiber ultrasonic sensor exceeds the surface of the PDMS-Ti 3C2 -PDMS sandwich membrane structure.
Preferably, the PDMS-Ti 3C2 -PDMS sandwich membrane structure is a layer of PDMS film coated on the concave surface of the concave lens, the PDMS film is adhered with a Ti 3C2 film, and a layer of PDMS film is coated on the Ti 3C2 film
Compared with the prior art, the invention has the beneficial effects that:
In the design method of the coaxial focusing ultrasonic transceiver, ti 3C2 is used for quickly absorbing short pulse laser energy and converting the short pulse laser energy into heat energy, PDMS absorbs the heat energy and instantaneously expands to generate broadband ultrasonic waves, a concave lens is used for focusing ultrasonic waves, an optical fiber ultrasonic sensor is used for receiving the ultrasonic waves, the short pulse laser irradiates on the coaxial focusing ultrasonic transceiver, ti 3C2 in a PDMS-Ti 3C2 -PDMS sandwich membrane structure quickly absorbs the short pulse laser energy and converts the short pulse laser energy into heat energy, PDMS absorbs the heat energy and instantaneously expands to generate broadband ultrasonic waves, the excited ultrasonic waves can be focused in a very small volume area, so that a high-intensity ultrasonic field is generated in the area, the ultrasonic waves excited by the coaxial focusing ultrasonic transceiver manufactured by the design method of the coaxial focusing ultrasonic transceiver can reflect when meeting a detection target, and the reflected ultrasonic waves can be reversely focused to the peripheral area of a central hole of the concave lens according to the geometric characteristics of the concave lens. The sensing part of the optical fiber ultrasonic sensor is accurately arranged in the anti-focusing area of the concave lens, and the influence of laser ultrasonic direct waves is reduced. The ultrasonic wave is coupled to the optical fiber ultrasonic sensor, so that the effective refractive index or the sensing length of the optical fiber ultrasonic sensor is changed, and echo information of a sample to be detected can be effectively received.
The coaxial focusing ultrasonic transceiver transducer converts ultrasonic waves in a diffusion transmission form into a focusing transmission form, enhances the penetration depth and the ultrasonic intensity of the ultrasonic waves, and transmits echo waves to the optical fiber ultrasonic sensor in an anti-focusing form. The coaxial focusing type ultrasonic transceiver transducer can obtain the optimal signal-to-noise ratio, realizes the overall miniaturization and portability of an imaging system, avoids the condition that a large-area paving of photoacoustic transduction materials is used for excitation, and reduces the complexity of the system. The coaxial focusing ultrasonic transceiver transducer has the characteristics of high integration level, high signal-to-noise ratio, miniaturization and low cost, improves the imaging speed and signal stability of the system, has stable working performance, and can meet the requirements of exciting and receiving ultrasonic waves in dynamic scanning of an earthquake physical model.
Drawings
FIG. 1 is a cross-sectional view of the present invention;
FIG. 2 is a top or bottom view of FIG. 1;
FIG. 3 is a diagram of a test system according to the present invention;
FIG. 4 is a graph of the focal length test effect of a coaxial focused ultrasound transducer;
FIG. 5 is a graph showing the ultrasound response comparison between a coaxial focused ultrasound transceiver transducer and an unfocused fiber optic sensor;
FIG. 6 is a schematic diagram of the results of a coaxial focused ultrasound transducer detecting a multi-layer structure object;
fig. 7 is a physical diagram of the coaxial focusing ultrasonic transceiver transducer.
Reference numerals illustrate:
1. Concave lens, 2 PDMS-Ti 3C2 -PDMS sandwich membrane structure, 3 optical fiber ultrasonic sensor, 4 central hole.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. It will be apparent that the described embodiments are some, but not all, embodiments of the invention. All other embodiments, which can be made by a person skilled in the art without creative efforts, based on the described embodiments of the present invention fall within the protection scope of the present invention.
Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. "inner", "outer", "upper", "lower", "far", "near", "front", "rear", etc. are used merely to denote relative positional relationships, which may also change accordingly when the absolute position of the object being described changes.
The drawings in the present invention are not necessarily to scale, and the specific dimensions and numbers of the various features may be determined according to actual needs. The drawings described in the present invention are only schematic in structure.
The design method of the coaxial focusing ultrasonic receiving and transmitting transducer comprises the following steps of S100, setting a central hole 4 at the central position of a concave lens 1, S200, coating a layer of PDMS film on the concave surface of the concave lens 1 by using a spin coating method, controlling the thickness of the PDMS film to be smaller than 10 mu m, attaching a Ti 3C2 film with the thickness of 5 mu m to 10 mu m to the uncured PDMS film, heating the PDMS film and waiting for natural cooling, S300, coating a layer of PDMS film on the Ti 3C2 film by using the spin coating method, controlling the thickness of the PDMS film to be smaller than 10 mu m, heating the newly coated PDMS film and waiting for natural cooling, so as to form a PDMS-Ti 3C2 -PDMS interlayer film structure, S400, penetrating an optical fiber ultrasonic sensor 3 through the central hole 4, and fixing the optical fiber ultrasonic sensor 3 on the concave lens 1, enabling the sensing area of the optical fiber ultrasonic sensor 3 to exceed the surface of the PDMS-Ti 3C2 -PDMS interlayer film structure 2 by a distance of 100 mu m to be 300 mu m, ensuring that the sensing part of the optical fiber ultrasonic sensor 3 can be located in a focusing area of the coaxial focusing ultrasonic receiving and transmitting transducer and receiving laser.
In the design method of the coaxial focusing ultrasonic transceiver transducer, ti 3C2 is used for quickly absorbing short-pulse laser energy and converting the short-pulse laser energy into heat energy, PDMS absorbs the heat energy and instantaneously expands to generate broadband ultrasonic waves, the concave lens 1 is used for focusing the ultrasonic waves, the optical fiber ultrasonic sensor 3 is used for receiving the ultrasonic waves, the short-pulse laser irradiates the coaxial focusing ultrasonic transceiver transducer, ti 3C2 in the PDMS-Ti 3C2 -PDMS interlayer diaphragm structure 2 quickly absorbs the short-pulse laser energy and converts the short-pulse laser energy into heat energy, PDMS absorbs the heat energy and instantaneously expands to generate broadband ultrasonic waves, the excited ultrasonic waves can be focused in a very small volume area, so that a high-intensity ultrasonic field is generated in the area, the ultrasonic waves excited by the coaxial focusing ultrasonic transceiver transducer manufactured by the design method of the coaxial focusing ultrasonic transceiver transducer can reflect when encountering a detection target, and the reflected ultrasonic waves can be reversely focused to the peripheral area of the central hole 4 of the concave lens 1 according to the geometric characteristics of the concave lens 1. The sensing part of the optical fiber ultrasonic sensor 3 is precisely positioned in the anti-focusing area of the concave lens 1, and the influence of laser ultrasonic direct wave is lightened. The ultrasonic wave is coupled to the optical fiber ultrasonic sensor 3 so that the effective refractive index or the sensing length of the optical fiber ultrasonic sensor is changed, and thus echo information of a sample to be measured can be effectively received.
The coaxial focusing ultrasonic transceiver transducer converts ultrasonic waves in a diffusion transmission form into a focusing transmission form, enhances ultrasonic penetration depth and ultrasonic intensity, and transmits echoes to the optical fiber ultrasonic sensor 3 in an anti-focusing form. The coaxial focusing type ultrasonic transceiver transducer can obtain the optimal signal-to-noise ratio, realizes the overall miniaturization and portability of an imaging system, avoids the condition that a large-area paving of photoacoustic transduction materials is used for excitation, and reduces the complexity of the system. And has the characteristics of high integration level, high signal-to-noise ratio, miniaturization and low cost.
Example 1
S100, arranging a central hole 4 at the central position of a concave lens 1, wherein the diameter of the concave lens 1 is 16mm, the curvature radius is 14.57mm, and the diameter of the central hole 4 is 350-450 mu m;
S200, coating a layer of PDMS film on the concave surface of the concave lens 1 by using a spin coating method, controlling the thickness of the PDMS film to be smaller than 10 mu m, attaching a Ti 3C2 film with the thickness of 5 mu m to the uncured PDMS film, heating the PDMS film at 70 ℃, and naturally cooling and solidifying after waiting for 30 minutes, wherein Ti 3C2 is used as a photo-thermal conversion layer to absorb laser energy and convert the laser energy into heat energy, and PDMS is used as the thermo-acoustic conversion layer to absorb the heat energy, so that thermal expansion occurs and ultrasonic waves are generated.
S300, coating a layer of PDMS film on the Ti 3C2 film by using a spin coating method, controlling the thickness of the PDMS film to be smaller than 10 mu m, heating the newly coated PDMS film at 70 ℃, waiting for 30 minutes, and naturally cooling and solidifying to form a PDMS-Ti 3C2 -PDMS sandwich film structure 2, wherein the heat energy absorptivity can be maximized by using two layers of PDMS films, and the photoacoustic conversion efficiency is improved;
S400, the optical fiber ultrasonic sensor 3 passes through the central hole 4 and is fixed on the concave lens 1, so that the distance between the sensing area of the optical fiber ultrasonic sensor 3 and the surface of the PDMS-Ti 3C2 -PDMS sandwich membrane structure 2 is 100 mu m, the sensing part of the optical fiber ultrasonic sensor 3 can be positioned in the anti-focusing area of the concave lens 1, and the influence of laser ultrasonic direct waves is reduced, so that the coaxial focusing ultrasonic transceiver transducer is formed.
Example 2
S100, arranging a central hole 4 at the central position of the concave lens 1, wherein the diameter of the concave lens 1 is 17.5mm, the radius of curvature is 15.57mm, and the diameter of the central hole 4 is 400 mu m;
S200, coating a layer of PDMS film on the concave surface of the concave lens 1 by using a spin coating method, controlling the thickness of the PDMS film to be smaller than 10 mu m, attaching a Ti 3C2 film with the thickness of 7 mu m to the uncured PDMS film, heating the PDMS film at 70 ℃, and naturally cooling and solidifying after waiting for 30 minutes, wherein Ti 3C2 is used as a photo-thermal conversion layer to absorb laser energy and convert the laser energy into heat energy, and PDMS is used as the thermo-acoustic conversion layer to absorb the heat energy, so that thermal expansion is generated and ultrasonic waves are generated.
S300, coating a layer of PDMS film on the Ti 3C2 film by using a spin coating method, controlling the thickness of the PDMS film to be smaller than 10 mu m, heating the newly coated PDMS film at 70 ℃, waiting for 30 minutes, and naturally cooling and solidifying to form a PDMS-Ti 3C2 -PDMS sandwich film structure 2, wherein the heat energy absorptivity can be maximized by using two layers of PDMS films, and the photoacoustic conversion efficiency is improved;
S400, the optical fiber ultrasonic sensor 3 passes through the central hole 4 and is fixed on the concave lens 1, so that the distance between the sensing area of the optical fiber ultrasonic sensor 3 and the surface of PDMS-Ti 3C2 -PDMS is 200 mu m, and the sensing part of the optical fiber ultrasonic sensor 3 can be positioned in the anti-focusing area of the concave lens 1 to reduce the influence of laser ultrasonic direct waves, thus forming the coaxial focusing ultrasonic transceiver transducer.
Example 3
S100, arranging a central hole 4 at the central position of a concave lens 1, wherein the diameter of the concave lens 1 is 20mm, the curvature radius is 16.57mm, and the diameter of the central hole 4 is 350-450 mu m;
S200, coating a layer of PDMS film on the concave surface of the concave lens 1 by using a spin coating method, controlling the thickness of the PDMS film to be smaller than 10 mu m, attaching a Ti 3C2 film with the thickness of 10 mu m to the uncured PDMS film, heating the PDMS film at 70 ℃, and naturally cooling and solidifying after waiting for 30 minutes, wherein Ti 3C2 is used as a photo-thermal conversion layer to absorb laser energy and convert the laser energy into heat energy, and PDMS is used as the thermo-acoustic conversion layer to absorb the heat energy, so that thermal expansion is generated and ultrasonic waves are generated.
S300, coating a layer of PDMS film on the Ti 3C2 film by using a spin coating method, controlling the thickness of the PDMS film to be smaller than 10 mu m, heating the newly coated PDMS film at 70 ℃, waiting for 30 minutes, and naturally cooling and solidifying to form a PDMS-Ti 3C2 -PDMS sandwich film structure 2, wherein the heat energy absorptivity can be maximized by using two layers of PDMS films, and the photoacoustic conversion efficiency is improved;
S400, the optical fiber ultrasonic sensor 3 passes through the central hole 4 and is fixed on the concave lens 1, so that the distance between the sensing area of the optical fiber ultrasonic sensor 3 and the surface of PDMS-Ti 3C2 -PDMS is 300 mu m, and the sensing part of the optical fiber ultrasonic sensor 3 can be positioned in the anti-focusing area of the concave lens 1, thereby reducing the influence of laser ultrasonic direct waves and forming the coaxial focusing ultrasonic transceiver transducer.
A coaxial focusing ultrasonic transceiver transducer as shown in fig. 1-2 comprises a concave lens 1 and an optical fiber ultrasonic sensor 3, wherein a central hole 4 is arranged in the central position of the concave surface of the concave lens 1, a PDMS-Ti 3C2 -PDMS sandwich membrane structure 2 is arranged on the concave surface, the optical fiber ultrasonic sensor 3 is fixed on the concave lens 1 and penetrates through the central hole 4, and the sensing area of the optical fiber ultrasonic sensor 3 exceeds the surface of the PDMS-Ti 3C2 -PDMS sandwich membrane structure 2.
In the coaxial focusing ultrasonic transceiver, ti 3C2 is used for quickly absorbing short-pulse laser energy and converting the short-pulse laser energy into heat energy, PDMS absorbs the heat energy and instantaneously expands to generate broadband ultrasonic waves, the concave lens 1 is used for focusing the ultrasonic waves, the optical fiber ultrasonic sensor 3 is used for receiving the ultrasonic waves, the short-pulse laser irradiates the coaxial focusing ultrasonic transceiver, ti 3C2 in the PDMS-Ti 3C2 -PDMS sandwich membrane structure 2 quickly absorbs the short-pulse laser energy and converts the short-pulse laser energy into heat energy, PDMS absorbs the heat energy and instantaneously expands to generate broadband ultrasonic waves, the excited ultrasonic waves are focused in a very small volume area, so that a high-intensity ultrasonic field is generated in the area, the ultrasonic waves excited by the coaxial focusing ultrasonic transceiver are reflected when encountering a detection target, and the reflected ultrasonic waves are reversely focused to the peripheral area of the central hole 4 of the concave lens 1 according to the geometric characteristics of the concave lens 1. The sensing part of the optical fiber ultrasonic sensor 3 is precisely positioned in the anti-focusing area of the concave lens 1, and the influence of laser ultrasonic direct wave is lightened. The ultrasonic wave is coupled to the optical fiber ultrasonic sensor 3 so that the effective refractive index or the sensing length of the optical fiber ultrasonic sensor is changed, and thus echo information of a sample to be measured can be effectively received.
The coaxial focusing ultrasonic transceiver transducer converts ultrasonic waves in a diffusion transmission form into a focusing transmission form, enhances ultrasonic penetration depth and ultrasonic intensity, and transmits echoes to the optical fiber ultrasonic sensor 3 in an anti-focusing form. The coaxial focusing type ultrasonic transceiver transducer can obtain the optimal signal-to-noise ratio, realizes the overall miniaturization and portability of an imaging system, avoids the condition that a large-area paving of photoacoustic transduction materials is used for excitation, and reduces the complexity of the system. And has the characteristics of high integration level, high signal-to-noise ratio, miniaturization and low cost.
In this embodiment, the PDMS-Ti 3C2 -PDMS sandwich membrane structure 2 is a layer of PDMS film coated on the concave surface of the concave lens 1, a Ti 3C2 film is adhered on the PDMS film, and a layer of PDMS film is coated on the Ti 3C2 film.
In order to verify the beneficial effects of the invention, experimental tests are carried out by adopting the coaxial focusing ultrasonic transceiver transducer prepared in the embodiment 2 of the invention, as shown in fig. 3, short pulse laser emitted by a nanosecond pulse laser irradiates the coaxial focusing ultrasonic transceiver transducer through a reflector, PDMS-Ti 3C2 -PDMS sandwich membrane structure 2 generates broadband ultrasonic waves, the broadband ultrasonic waves are focused by concave lens 1 and reflected after acting on a detection target, and the ultrasonic echoes are also focused to the peripheral area of central hole 4 of concave lens 1 and then coupled to optical fiber ultrasonic sensor 3. The tunable laser is used as a sensing laser source, and sensing laser emitted from the tunable laser enters the coaxial focusing ultrasonic transceiver transducer, and the coaxial focusing ultrasonic transceiver transducer can reflect laser with specific wavelength to form a sensing spectrum. When the ultrasonic wave acts on the coaxial focusing ultrasonic receiving and transmitting transducer, the sensing spectrum of the coaxial focusing ultrasonic receiving and transmitting transducer can drift, the drift of the spectrum under the modulation of the ultrasonic wave is a changed optical signal, the optical signal can be led into the photoelectric detector by the optical fiber circulator, the changed optical signal is converted into a changed electric signal, and finally the electric signal is collected by the oscilloscope.
The coaxial focusing ultrasonic transceiver transducer is subjected to a series of accurate sound pressure tests, and aims to evaluate performance in a specific focal length range. The sound pressure of the ultrasonic wave emitted by the coaxial focusing ultrasonic transceiver transducer is measured in detail by using the hydrophone within the range of 10mm to 30mm at intervals of 2mm as shown in fig. 4, and the sound pressure value is observed to rise gradually from the position of 10mm until the focal position of 20mm reaches the peak value and then is reduced.
The result proves that the coaxial focusing ultrasonic transceiver transducer can realize effective focusing of acoustic energy at the focus of the coaxial focusing ultrasonic transceiver transducer, which is important to enhancing the resolving power of the photoacoustic imaging technology and improving the target accuracy of detection.
To verify the ultrasonic anti-focusing function of the present coaxial focusing type ultrasonic transceiver transducer, a 1MHz PZT (piezoelectric transducer) is used to transmit pulsed ultrasonic waves, an optical fiber ultrasonic sensor 3 is mounted in the central hole 4 of the concave lens 1, the time domain result of which receives ultrasonic responses is shown in fig. 5, and the ultrasonic responses detected by the coaxial focusing type ultrasonic transceiver transducer are more than 1 time of those of the unfocused optical fiber ultrasonic sensor by comparison with those received by the unfocused optical fiber ultrasonic sensor. Therefore, the coaxial focusing structure enhances the response of the optical fiber ultrasonic sensor, and weak ultrasonic waves can be detected more sensitively. As shown in fig. 6, the coaxial focusing ultrasonic transceiver transducer is used for detecting the target with the three-layer structure, and the test result clearly shows the reflected wave with the three-layer structure, so that the accurate ultrasonic focusing detection on the target area is realized. Experimental results show that the invention improves the focusing precision and the detection sensitivity of the transducer, and realizes high-precision control of an ultrasonic field, thereby realizing high signal-to-noise ratio ultrasonic detection of a target. Due to the advantages of high sensitivity, high focusing precision and flexible and portable structure, the coaxial focusing ultrasonic transceiver transducer has wide application prospect in the fields of defect detection, rock mass engineering, marine exploration, petroleum exploration and the like.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above-described embodiments, and that the above-described embodiments and descriptions are only preferred embodiments of the present invention, and are not intended to limit the invention, and that various changes and modifications may be made therein without departing from the spirit and scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (7)

1.一种共轴聚焦型超声收发换能器的设计方法,其特征在于,包括以下步骤:1. A design method for a coaxial focused ultrasonic transceiver transducer, characterized in that it comprises the following steps: S100、在凹透镜(1)的中心位置设置中心孔(4);S100, setting a center hole (4) at the center position of the concave lens (1); S200、使用旋涂法在凹透镜(1)的凹面涂覆一层PDMS薄膜,将Ti3C2薄膜贴敷于未凝固的PDMS薄膜上,对PDMS薄膜加热后等待自然冷却;S200, coating a PDMS film on the concave surface of the concave lens (1) by spin coating, attaching the Ti 3 C 2 film to the unsolidified PDMS film, heating the PDMS film and waiting for natural cooling; S300、使用旋涂法在Ti3C2薄膜上涂覆一层PDMS薄膜,对新涂覆的PDMS薄膜加热后等待自然冷却,从而形成PDMS-Ti3C2-PDMS夹层膜片结构(2);S300, coating a PDMS film on the Ti 3 C 2 film by spin coating, heating the newly coated PDMS film and waiting for natural cooling, thereby forming a PDMS-Ti 3 C 2 -PDMS sandwich membrane structure (2); S400、将光纤超声传感器(3)穿过中心孔(4),并固定在凹透镜(1)上,使光纤超声传感器(3)的传感区域超出PDMS-Ti3C2-PDMS夹层膜片结构(2)表面,以确保光纤超声传感器(3)的传感部分能够位于凹透镜(1)的反聚焦区域,以减轻激光超声直达波的影响,组成共轴聚焦型超声收发换能器。S400, passing the optical fiber ultrasonic sensor (3) through the central hole (4) and fixing it on the concave lens (1), so that the sensing area of the optical fiber ultrasonic sensor (3) exceeds the surface of the PDMS- Ti3C2 - PDMS sandwich membrane structure (2), so as to ensure that the sensing part of the optical fiber ultrasonic sensor (3) can be located in the anti-focusing area of the concave lens (1), so as to reduce the influence of the laser ultrasonic direct wave, and form a coaxial focusing type ultrasonic transceiver transducer. 2.如权利要求1所述的共轴聚焦型超声收发换能器的设计方法,其特征在于,所述步骤S200和步骤S300中,对PDMS薄膜进行70℃~100℃加热处理,等待自然冷却凝固。2. The design method of a coaxial focusing ultrasonic transceiver transducer as described in claim 1 is characterized in that in step S200 and step S300, the PDMS film is heated at 70° C. to 100° C. and waited for natural cooling and solidification. 3.如权利要求1所述的共轴聚焦型超声收发换能器的设计方法,其特征在于,所述凹透镜(1)的直径为16mm~20mm,曲率半径为14.57mm~16.57mm,所述中心孔(4)的直径为350μm~450μm。3. The design method of a coaxial focusing ultrasonic transceiver transducer as described in claim 1 is characterized in that the diameter of the concave lens (1) is 16 mm to 20 mm, the radius of curvature is 14.57 mm to 16.57 mm, and the diameter of the center hole (4) is 350 μm to 450 μm. 4.如权利要求1所述的共轴聚焦型超声收发换能器的设计方法,其特征在于,所述光纤超声传感器(3)的传感区域超出PDMS-Ti3C2-PDMS夹层膜片结构(2)的表面的距离为100μm~300μm。4. The design method of a coaxial focusing ultrasonic transceiver transducer according to claim 1, characterized in that the sensing area of the optical fiber ultrasonic sensor (3) exceeds the surface of the PDMS- Ti3C2 - PDMS sandwich membrane structure (2) by a distance of 100 μm to 300 μm. 5.如权利要求1所述的共轴聚焦型超声收发换能器的设计方法,其特征在于,所述步骤S200和步骤S300中,两次涂覆PDMS薄膜的厚度均小于10μm,并且在S200中Ti3C2薄膜的厚度为5μm~10μm。5. The design method of a coaxial focused ultrasonic transceiver transducer according to claim 1, characterized in that in the steps S200 and S300, the thickness of the PDMS film coated twice is less than 10 μm, and in S200, the thickness of the Ti 3 C 2 film is 5 μm to 10 μm. 6.一种共轴聚焦型超声收发换能器,其特征在于,包括:6. A coaxial focusing ultrasonic transceiver transducer, comprising: 凹透镜(1),其凹面的中心位置设置有中心孔(4),所述凹面上具有PDMS-Ti3C2-PDMS夹层膜片结构(2);A concave lens (1), wherein a central hole (4) is provided at the central position of the concave surface, and a PDMS-Ti 3 C 2 -PDMS sandwich membrane structure (2) is provided on the concave surface; 光纤超声传感器(3),固定在所述凹透镜(1)上,并穿过所述中心孔(4),所述光纤超声传感器(3)的传感区域超出PDMS-Ti3C2-PDMS夹层膜片结构(2)表面。An optical fiber ultrasonic sensor (3) is fixed on the concave lens (1) and passes through the central hole (4); the sensing area of the optical fiber ultrasonic sensor (3) exceeds the surface of the PDMS-Ti 3 C 2 -PDMS sandwich membrane structure (2). 7.如权利要求6所述的共轴聚焦型超声收发换能器,其特征在于,PDMS-Ti3C2-PDMS夹层膜片结构(2)为在凹透镜(1)的凹面上涂覆的一层PDMS薄膜,PDMS薄膜上贴服有Ti3C2薄膜,Ti3C2薄膜上涂覆一层PDMS薄膜。7. The coaxial focusing ultrasonic transceiver transducer according to claim 6, characterized in that the PDMS- Ti3C2 - PDMS sandwich membrane structure (2) is a layer of PDMS film coated on the concave surface of the concave lens ( 1 ), a Ti3C2 film is adhered to the PDMS film, and a layer of PDMS film is coated on the Ti3C2 film .
CN202411167112.6A 2024-08-23 2024-08-23 Coaxial focusing ultrasonic receiving and transmitting transducer and design method thereof Pending CN119044334A (en)

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