CN119031584A - A single-sided flip chip film with high heat dissipation and chemical etching method thereof - Google Patents
A single-sided flip chip film with high heat dissipation and chemical etching method thereof Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
- H05K1/0203—Cooling of mounted components
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- H—ELECTRICITY
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
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- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4076—Through-connections; Vertical interconnect access [VIA] connections by thin-film techniques
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Abstract
Description
技术领域Technical Field
本发明涉及覆晶薄膜制备技术领域,具体为一种高散热性单面覆晶薄膜及其化学刻蚀方法。The invention relates to the technical field of chip-on-chip film preparation, in particular to a single-sided chip-on-chip film with high heat dissipation performance and a chemical etching method thereof.
背景技术Background Art
覆晶薄膜,简称COF,是一种将集成电路(IC)固定在柔性线路板上的晶粒软膜构装技术。它运用软质附加电路板作为封装芯片载体,将芯片与软性基板电路结合,或者单指未封装芯片的软质附加电路板。覆晶薄膜技术使得产品更加轻薄短小化,满足了现代电子产品对尺寸和重量的严格要求,且线距可以做到非常精细,例如达到16μm的pitch,这增加了产品的可靠性和集成度,与传统的TAB技术相比,COF没有悬空引线易变形或折断的问题,有助于提高生产良率和降低制造成本。因此,这种技术非常适用于小尺寸面板如手机或PDA等液晶模块产品。Chip-on-film, or COF for short, is a soft film assembly technology that fixes an integrated circuit (IC) on a flexible circuit board. It uses a soft additional circuit board as a package chip carrier to combine the chip with a soft substrate circuit, or refers to a soft additional circuit board for an unpackaged chip. Chip-on-film technology makes the product thinner and lighter, meeting the strict requirements of modern electronic products on size and weight, and the line spacing can be very fine, such as a pitch of 16μm, which increases the reliability and integration of the product. Compared with traditional TAB technology, COF does not have the problem of easy deformation or breakage of hanging leads, which helps to improve production yield and reduce manufacturing costs. Therefore, this technology is very suitable for small-size panels such as liquid crystal module products such as mobile phones or PDAs.
而单面覆晶薄膜则是指在一侧(单面)柔性基板上贴装芯片的构装方式。这种方式仍然具备COF技术的主要优点,通常在不需要双面芯片布局的场景中使用。但单面覆晶薄膜由于单面构装,其集成电路的密集程度相较于双面覆晶薄膜更甚,因此,其对散热性的要求也就更高。Single-sided Flip Chip refers to a method of mounting chips on one side (single-sided) of a flexible substrate. This method still has the main advantages of COF technology and is usually used in scenarios where double-sided chip layout is not required. However, due to the single-sided assembly, the density of integrated circuits in single-sided Flip Chip is higher than that of double-sided Flip Chip, so its requirements for heat dissipation are also higher.
然而,现有的单面覆晶薄膜一般通过集成电路所在面胶贴散热片,来辅助电路元件散热,但这依旧无法满足单面覆晶薄膜的散热需求,其在工作过程中产生的热量容易出现积聚,从而导致其温度升高,不利于维持驱动芯片的稳定工作状态,还会因高温引起性能下降或损坏,缩短其使用寿命。However, the existing single-sided flip chip film generally assists the circuit components in dissipating heat by gluing a heat sink on the surface where the integrated circuit is located, but this still cannot meet the heat dissipation requirements of the single-sided flip chip film. The heat generated during operation is prone to accumulation, causing its temperature to rise, which is not conducive to maintaining the stable working state of the driver chip. It will also cause performance degradation or damage due to high temperature, shortening its service life.
因此,急需对此缺点进行改进,本发明则是针对现有的结构及不足予以研究改良,提供有一种高散热性单面覆晶薄膜及其化学刻蚀方法。Therefore, it is urgent to improve this shortcoming. The present invention studies and improves the existing structure and shortcomings, and provides a high heat dissipation single-sided flip chip film and a chemical etching method thereof.
发明内容Summary of the invention
本发明的目的在于提供一种高散热性单面覆晶薄膜及其化学刻蚀方法,以解决上述背景技术中提出的问题。The object of the present invention is to provide a single-sided flip chip film with high heat dissipation and a chemical etching method thereof to solve the problems raised in the above background technology.
为实现上述目的,本发明提供如下技术方案:To achieve the above object, the present invention provides the following technical solutions:
第一方面,提供了一种高散热性单面覆晶薄膜,所述单面线路覆晶薄膜绑定(bonding)IC, 由于IC作业会产生热能,不易散热,于是在PI的底部开设有导通孔,并且导通孔内电镀填铜,所述PI层的底部固定连接有散热片。In the first aspect, a single-sided flip chip film with high heat dissipation is provided, wherein the single-sided circuit flip chip film is bonded to an IC. Since the IC operation generates heat energy and is not easy to dissipate heat, a via hole is opened at the bottom of the PI, and the via hole is filled with copper by electroplating. A heat sink is fixedly connected to the bottom of the PI layer.
第二方面,提供了一种高散热性单面覆晶薄膜的化学刻蚀方法,应用于如上述的高散热性单面覆晶薄膜,包括以下步骤:In a second aspect, a chemical etching method for a high heat dissipation single-sided chip-on-chip film is provided, which is applied to the high heat dissipation single-sided chip-on-chip film as described above, and comprises the following steps:
S1、原材准备:选择适合的单面铜基材作为起始材料,检查材料质量,确保无缺陷,并进行必要的预处理;S1. Raw material preparation: Select a suitable single-sided copper substrate as the starting material, check the material quality to ensure there are no defects, and perform necessary pretreatment;
S2、干膜压合:精确对齐干膜和基材,使用压合机将干膜压在基材上;S2, dry film lamination: accurately align the dry film and substrate, and use a laminating machine to press the dry film onto the substrate;
S3、导通孔曝光:通过光掩模对干膜上的导通孔位置进行曝光,使曝光部分的光敏物质发生化学反应;S3, via hole exposure: the via hole position on the dry film is exposed through a photomask to cause a chemical reaction of the photosensitive material in the exposed part;
S4、导通孔显影:使用显影液去除曝光后不再需要的干膜部分,露出基材上的导通孔位置;S4, via hole development: using a developer to remove the dry film portion that is no longer needed after exposure, exposing the via hole position on the substrate;
S5、刻蚀导通孔铜面:通过化学刻蚀设备,使用刻蚀剂对铜面进行刻蚀;S5. Etching the copper surface of the via hole: etching the copper surface using an etchant through a chemical etching device;
S6、干膜剥离:使用剥离液或机械方法去除剩余的干膜;S6, Dry film stripping: Use stripping fluid or mechanical methods to remove the remaining dry film;
S7、化学刻蚀PI导通孔:通过化学刻蚀设备,对聚酰亚胺(PI)层进行化学刻蚀,以形成最终的导通孔结构;S7, chemically etching PI vias: chemically etching the polyimide (PI) layer by chemical etching equipment to form a final via structure;
S8、黑影:利用黑影剂, 成分含有独特的添加剂及导电胶状物质(石墨),附着在PI导通孔壁形成有导电层功能;S8, Black shadow: Use black shadow agent, which contains unique additives and conductive colloidal substances (graphite), attached to the wall of PI via hole to form a conductive layer function;
S9、干膜压合:对齐干膜和基材,使用压合机在一定温度和压力下使干膜牢固贴合在基材上;S9, dry film lamination: align the dry film and substrate, and use a laminating machine at a certain temperature and pressure to firmly adhere the dry film to the substrate;
S10、线路曝光:通过光掩模对干膜进行曝光,使曝光部分的光敏物质发生化学反应;S10, circuit exposure: exposing the dry film through a photomask to cause a chemical reaction in the photosensitive material of the exposed part;
S11、线路显影:使用显影液去除曝光后不再需要的干膜部分,露出基材上的铜层,形成电路图案;S11, circuit development: using a developer to remove the dry film portion that is no longer needed after exposure, exposing the copper layer on the substrate, and forming a circuit pattern;
S12、线路镀铜:使用电镀设备,控制电镀液的组成、温度和电流密度,在裸露的铜层上电镀一层铜,同时也将导通孔一起填镀铜;S12, Circuit copper plating: Use electroplating equipment to control the composition, temperature and current density of the electroplating solution, electroplate a layer of copper on the exposed copper layer, and also fill the via holes with copper plating;
S13、干膜剥离:使用剥离液或机械方法去除剩余的干膜,暴露出完整的电路图案;S13, dry film stripping: Use stripping liquid or mechanical method to remove the remaining dry film to expose the complete circuit pattern;
S14 除底铜:除去没有增层的原材料底铜,让线路成型出来;S14: Remove the bottom copper of the raw material without layer increase to form the circuit;
S15、化锡:将有线路铜面使用含锡的酸性溶液, 通过专用的化锡设备,让其化学方法在铜面上沉上一层锡, 其目的是为了IC绑定, 让其与IC的金凸块形成共晶封装;S15, Tinning: Use a tin-containing acid solution on the copper surface with circuits, and use a special tinning equipment to chemically deposit a layer of tin on the copper surface. The purpose is to bind the IC and form a eutectic package with the IC's gold bumps;
S16、防焊油墨印刷:使用丝网印刷在非邦定区域, 将电路导电区域印刷一层防焊油墨,以免该外层线路氧化或接触短路。S16, Solder mask printing: Use screen printing in the non-bonding area to print a layer of solder mask on the conductive area of the circuit to prevent the outer layer from oxidation or contact short circuit.
S17、贴散热片:使用热压方法,在基材的背面贴上散热片。S17, attaching heat sink: Use heat pressing method to attach heat sink to the back of the substrate.
本发明提供了一种高散热性单面覆晶薄膜及其化学刻蚀方法,具备以下有益效果:The present invention provides a single-sided chip-on-chip film with high heat dissipation and a chemical etching method thereof, which has the following beneficial effects:
本发明通过在PI层上,避开集成电路(IC)开设多个导通孔,利用导通孔增加PI层的散热表面积,提升散热效果的同时,也不影响集成电路(IC)的布设,并通过在导通孔内电镀填铜,利用铜材料的高导热性,将热量导至散热片,进一步提升散热效果,改进后的单面覆晶薄膜具有高散热性,能够有效地释放其在工作过程中产生的热量,防止热量积聚导致的温度升高而影响IC的工作效能,不仅有助于维持驱动芯片的稳定工作状态,还能避免因高温引起的性能下降或损坏,从而延长其使用寿命。The present invention opens a plurality of via holes on the PI layer, avoiding the integrated circuit (IC), and increases the heat dissipation surface area of the PI layer by using the via holes, thereby improving the heat dissipation effect without affecting the layout of the integrated circuit (IC). The via holes are filled with copper by electroplating, and the high thermal conductivity of the copper material is used to conduct the heat to the heat sink, thereby further improving the heat dissipation effect. The improved single-sided flip chip film has high heat dissipation, can effectively release the heat generated during the working process, and prevent the temperature increase caused by heat accumulation from affecting the working efficiency of the IC. It not only helps to maintain the stable working state of the driver chip, but also can avoid performance degradation or damage caused by high temperature, thereby extending its service life.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明一种高散热性单面覆晶薄膜的正剖视结构示意图FIG. 1 is a schematic diagram of a front cross-sectional structure of a single-sided flip chip film with high heat dissipation performance according to the present invention.
图2为本发明一种高散热性单面覆晶薄膜的现有散热技术示意图。FIG. 2 is a schematic diagram of an existing heat dissipation technology of a single-sided chip-on-film with high heat dissipation performance according to the present invention.
具体实施方式DETAILED DESCRIPTION
下面结合附图和实施例对本发明的实施方式作进一步详细描述。以下实施例用于说明本发明,但不能用来限制本发明的范围。The following embodiments of the present invention are described in further detail in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
如图1-图2所示,一种高散热性单面覆晶薄膜,单面线路覆晶薄膜绑定(bonding)IC, 由于IC作业会产生热能,不易散热,于是在PI的底部开设有导通孔,并且导通孔内电镀填铜,所述PI层的底部固定连接有散热片。As shown in Figures 1 and 2, a single-sided flip chip film with high heat dissipation performance is used. The single-sided circuit flip chip film is bonded to the IC. Since the IC operation generates heat energy and is not easy to dissipate heat, a via hole is opened at the bottom of the PI, and the via hole is electroplated with copper. A heat sink is fixedly connected to the bottom of the PI layer.
一种高散热性单面覆晶薄膜的化学刻蚀方法,应用于如上述的高散热性单面覆晶薄膜,包括以下步骤:A chemical etching method for a high heat dissipation single-sided chip-on-chip film is applied to the high heat dissipation single-sided chip-on-chip film as described above, comprising the following steps:
S1、原材准备:选择适合的单面铜基材作为起始材料(起始材料由PI层和铜面复合而成),检查材料质量,确保无缺陷,并进行必要的预处理,使用溶剂、砂纸或机械打磨的方法清洁基板表面;S1. Raw material preparation: Select a suitable single-sided copper substrate as the starting material (the starting material is composed of a PI layer and a copper surface), check the material quality to ensure that there are no defects, and perform necessary pretreatment, using solvents, sandpaper or mechanical polishing to clean the substrate surface;
S2、干膜压合:精确对齐干膜和基材,使用压合机将干膜(一种含有光敏物质的薄膜)压在基材上,为后续的图案曝光做准备;S2, dry film lamination: accurately align the dry film and substrate, and use a laminator to press the dry film (a film containing photosensitive substances) onto the substrate in preparation for subsequent pattern exposure;
S3、导通孔曝光:通过光掩模对干膜上的导通孔位置进行曝光,使曝光部分的光敏物质发生化学反应;S3, via hole exposure: the via hole position on the dry film is exposed through a photomask to cause a chemical reaction of the photosensitive material in the exposed part;
S4、导通孔显影:使用显影液去除曝光后不再需要的干膜部分,露出基材上的导通孔位置;S4, via hole development: using a developer to remove the dry film portion that is no longer needed after exposure, exposing the via hole position on the substrate;
S5、刻蚀导通孔铜面:通过化学刻蚀设备,使用刻蚀剂对铜面进行刻蚀;S5. Etching the copper surface of the via hole: etching the copper surface using an etchant through a chemical etching device;
S6、干膜剥离:使用剥离液或机械方法去除剩余的干膜;S6, Dry film stripping: Use stripping fluid or mechanical methods to remove the remaining dry film;
S7、化学刻蚀PI导通孔:通过化学刻蚀设备,对聚酰亚胺(PI)层进行化学刻蚀,以处理PI层的表面毛刺等瑕疵,以形成最终的导通孔结构;S7, chemical etching of PI vias: chemically etching the polyimide (PI) layer by chemical etching equipment to process surface defects such as burrs on the PI layer to form the final via structure;
S8、黑影:利用黑影剂, 成分含有独特的添加剂及导电胶状物质(石墨),附着在PI导通孔壁形成有导电层功能;S8, Black shadow: Use black shadow agent, which contains unique additives and conductive colloidal substances (graphite), attached to the wall of PI via hole to form a conductive layer function;
S9、干膜压合:对齐干膜和基材,使用压合机在一定温度和压力下使干膜牢固贴合在基材上;S9, dry film lamination: align the dry film and substrate, and use a laminating machine at a certain temperature and pressure to firmly adhere the dry film to the substrate;
S10、线路曝光:通过光掩模对干膜进行曝光,使曝光部分的光敏物质发生化学反应;S10, circuit exposure: exposing the dry film through a photomask to cause a chemical reaction in the photosensitive material of the exposed part;
S11、线路显影:使用显影液去除曝光后不再需要的干膜部分,露出基材上的铜层,形成电路图案;S11, circuit development: using a developer to remove the dry film portion that is no longer needed after exposure, exposing the copper layer on the substrate, and forming a circuit pattern;
S12、线路镀铜:在电镀铜前,使用化学药剂进行活化处理,并在孔壁和线路上涂覆一层导电层,使用电镀设备,控制电镀液的组成、温度和电流密度,在裸露的铜层上电镀一层铜,同时也将导通孔一起填镀铜;并在电镀完成后,将基板从电镀槽中取出并清洗,以去除表面的电镀液残留和杂质,并进行去氧化处理,去除电镀过程中产生的氧化物;S12, circuit copper plating: before copper electroplating, use chemical agents for activation treatment, and coat a conductive layer on the hole wall and the circuit. Use electroplating equipment to control the composition, temperature and current density of the electroplating solution, electroplate a layer of copper on the exposed copper layer, and also fill the conductive hole with copper plating; and after the electroplating is completed, take the substrate out of the electroplating tank and clean it to remove the electroplating solution residue and impurities on the surface, and perform deoxidation treatment to remove the oxides generated during the electroplating process;
S13、干膜剥离:使用剥离液或机械方法去除剩余的干膜,暴露出完整的电路图案;S13, dry film stripping: Use stripping liquid or mechanical method to remove the remaining dry film to expose the complete circuit pattern;
S14 除底铜:除去没有增层的原材料底铜,让线路成型出来;S14: Remove the bottom copper of the raw material without layer increase to form the circuit;
S15、化锡:将有线路铜面使用含锡的酸性溶液, 通过专用的化锡设备,让其化学方法在铜面上沉上一层锡, 其目的是为了IC绑定, 让其与IC的金凸块形成共晶封装;S15, Tinning: Use a tin-containing acid solution on the copper surface with circuits, and use a special tinning equipment to chemically deposit a layer of tin on the copper surface. The purpose is to bind the IC and form a eutectic package with the IC's gold bumps;
S16、使用丝网印刷在非邦定区域, 将电路导电区域印刷一层防焊油墨,以免该外层线路氧化或接触短路,阻焊油墨用于在电路板上形成一层保护膜,且在印刷后需要经过烘干和固化处理,以形成坚固的阻焊层,阻焊油墨按固化方式分为热固化型、紫外线硬化型和液态感光型;S16. Use screen printing to print a layer of solder resist ink on the non-bonding area of the circuit conductive area to prevent the outer layer of the circuit from oxidation or contact short circuit. The solder resist ink is used to form a protective film on the circuit board, and needs to be dried and cured after printing to form a solid solder resist layer. The solder resist ink is divided into heat curing type, UV curing type and liquid photosensitive type according to the curing method;
S17、贴散热片:使用热压方法,在基材的背面贴上散热片。S17, attaching heat sink: Use heat pressing method to attach heat sink to the back of the substrate.
本发明的实施例是为了示例和描述起见而给出的,而并不是无遗漏的或者将本发明限于所公开的形式。很多修改和变化对于本领域的普通技术人员而言是显而易见的。选择和描述实施例是为了更好说明本发明的原理和实际应用,并且使本领域的普通技术人员能够理解本发明从而设计适于特定用途的带有各种修改的各种实施例。The embodiments of the present invention are given for the purpose of illustration and description, and are not intended to be exhaustive or to limit the invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.
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JP2003282778A (en) * | 2002-03-26 | 2003-10-03 | Fujikura Ltd | Semiconductor device and printed wiring board |
JP2010141216A (en) * | 2008-12-12 | 2010-06-24 | Mitsui Mining & Smelting Co Ltd | Laminate for flexible printed wiring board, flexible printed wiring board, and method of manufacturing the same |
KR20140039921A (en) * | 2012-09-25 | 2014-04-02 | 엘지이노텍 주식회사 | Method of manufacturing printed circuit board |
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