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CN119012839A - Display panel, preparation method thereof and display device - Google Patents

Display panel, preparation method thereof and display device Download PDF

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Publication number
CN119012839A
CN119012839A CN202411004800.0A CN202411004800A CN119012839A CN 119012839 A CN119012839 A CN 119012839A CN 202411004800 A CN202411004800 A CN 202411004800A CN 119012839 A CN119012839 A CN 119012839A
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CN
China
Prior art keywords
isolation
substrate
light emitting
isolation structure
test
Prior art date
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Pending
Application number
CN202411004800.0A
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Chinese (zh)
Inventor
朱雪婧
孙小茜
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Hefei Visionox Technology Co Ltd
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Hefei Visionox Technology Co Ltd
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Filing date
Publication date
Application filed by Hefei Visionox Technology Co Ltd filed Critical Hefei Visionox Technology Co Ltd
Priority to CN202411004800.0A priority Critical patent/CN119012839A/en
Publication of CN119012839A publication Critical patent/CN119012839A/en
Pending legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H10K59/353Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels characterised by the geometrical arrangement of the RGB subpixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/121Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/123Connection of the pixel electrodes to the thin film transistors [TFT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • H10K59/1315Interconnections, e.g. wiring lines or terminals comprising structures specially adapted for lowering the resistance

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The display panel comprises a substrate, a plurality of test light emitting devices and a plurality of first isolation structures, wherein the test light emitting devices and the first isolation structures are positioned on the substrate, the first isolation structures are defined with a plurality of first isolation openings which respectively define the test light emitting devices, the first isolation structures comprise a first supporting part and a first crown part, the orthographic projection of the first supporting part on the substrate is positioned in the orthographic projection of the first crown part on the substrate, and the interval between the orthographic projection of the edge of the first supporting part on the substrate and the orthographic projection of the edge of the first crown part on the substrate is a first distance. The light-emitting colors of the at least two test light-emitting devices are the same, and the first distances of the at least two first isolation structures are not equal. The first isolation structure is designed to have a plurality of first distances, and the impedance condition between the first isolation structure and the test light emitting device can be detected under the condition of different first distances, so that the quality of the display panel is detected, and the yield of the display panel is ensured.

Description

Display panel, preparation method thereof and display device
Technical Field
The disclosure relates to the technical field of display, in particular to a display panel, a preparation method thereof and a display device.
Background
An Organic Light-Emitting Diode (OLED) is an Organic thin film electroluminescent unit, which has the advantages of simple manufacturing process, low cost, low power consumption, high brightness, wide viewing angle, high contrast ratio, and capability of realizing flexible display, and has been greatly paid attention to and widely used in electronic display products.
However, the current electronic display products are limited to the design of their own structures, and it is difficult to effectively obtain the most technological conditions while further increasing the pixel density PPI.
Disclosure of Invention
The first aspect of the present disclosure provides a display panel, the display panel includes a substrate, a plurality of test light emitting devices located on the substrate, and a plurality of first isolation structures, the first isolation structures define a plurality of first isolation openings respectively defining the test light emitting devices, the first isolation structures include a first support portion and a first crown portion, an orthographic projection of the first support portion on the substrate is located within an orthographic projection of the first crown portion on the substrate, a distance between an orthographic projection of an edge of the first support portion on the substrate and an orthographic projection of an edge of the first crown portion on the substrate is a first distance, and the first distances of the at least two first isolation structures are unequal.
In the above scheme, by setting the first isolation structure and testing the light emitting device and designing the first isolation structure to have a plurality of first distances, the impedance condition between the first isolation structure and testing the light emitting device under the condition of different first distances can be detected, thereby detecting the quality of the display panel and ensuring the yield of the display panel.
In a specific embodiment of the first aspect of the present disclosure, the light emission colors of the at least two test light emitting devices are the same, and the first distances of the at least two first isolation structures respectively defining the at least two test light emitting devices having the same light emission color are different. Thus, under the combination of the test light emitting device emitting different color light rays and the first isolation structure with different first distances, the impedance condition between the test light emitting device and the first isolation structure can be obtained, so that the optimal technological condition of the preparation process of the display area is mapped based on the detection result of the test area.
In a specific embodiment of the first aspect of the present disclosure, the display panel includes a display area and a non-display area located on at least one side of the display area, the non-display area includes a test area, the test light emitting device and the first isolation structure are located in the test area, the first isolation structure includes a first sub-isolation structure and a second sub-isolation structure opposite to each other, each of the first sub-isolation structure and the second sub-isolation structure includes a first support portion and a first crown portion, and in each of the first sub-isolation structure and each of the second sub-isolation structure, a front projection of an edge of the first support portion on the substrate and a front projection of an edge of the first crown portion on the substrate are spaced apart by a first distance.
Optionally, the first distance of the first sub-isolation structure and the first distance of the second sub-isolation structure in the same first isolation structure are the same.
Optionally, the first sub-isolation structure and the second sub-isolation structure define a first isolation opening, and an orthographic projection of the first support portion on the substrate is located within the orthographic projection of the first crown portion on the substrate.
In a specific embodiment of the first aspect of the present disclosure, the test light emitting device includes a first electrode, a first light emitting functional layer, and a second electrode sequentially stacked on the substrate, the first light emitting functional layer and the second electrode being located in the first isolation opening.
Optionally, the first supporting portion is a conductive structure, and the second electrode is electrically connected to a sidewall of the first supporting portion.
In a specific embodiment of the first aspect of the present disclosure, in each first isolation structure, a bisector of a line segment determined by a center of the first sub isolation structure and a center of the second sub isolation structure is a reference line, and the reference lines of the first isolation structures corresponding to at least two test light emitting devices with the same light emitting color are different from an included angle parallel to a first direction of a plane where the display panel is located.
In the above scheme, the combination of the test light emitting device of each color light ray and the first isolation structure with different first distances and the impedance condition between the test light emitting device and the first isolation structure under different deflection (included angles) conditions can be obtained, so that the impedance condition of the test light emitting device of each color light ray emitted from the test area and the impedance condition of the first isolation structure under various combinations can be further obtained, and the optimal technological condition of the preparation process of the display area is mapped based on the detection result of the test area.
Optionally, the non-display area includes a binding area, and a direction from the display area to the binding area is a first direction.
In a specific embodiment of the first aspect of the present disclosure, the number of the test light emitting devices with the same light emitting color is at least four, and for the first isolation structures corresponding to the test light emitting devices with the same light emitting color, the included angles of the reference lines of the at least two first isolation structures with respect to the first direction are the same, and the first distances are different, and the included angles of the reference lines of the at least two first isolation structures with respect to the first direction are different, and the first distances are the same.
In a specific embodiment of the first aspect of the present disclosure, for at least two first isolation structures corresponding to the test light emitting devices with the same light emission color and including different angles between the reference line and the first direction, the angles between the reference lines of the different first isolation structures and the first direction are multiples of a preset angle, and the multiples are different.
Alternatively, the preset angle is one of 30 degrees, 45 degrees, 60 degrees, and 90 degrees.
In a specific embodiment of the first aspect of the present disclosure, the first isolation structures corresponding to the test light emitting devices of each light emitting color are m×n, the included angles of the reference lines of the M first isolation structures with respect to the first direction are the same, the first distances are different, the included angles of the reference lines of the N first isolation structures with respect to the first direction are different, the first distances are the same, and M and N are positive integers greater than or equal to 2.
In the above scheme, for each color of light emitting device, there is a combination between the light emitting device and the first isolation structure having any first distance under any deflection angle (included angle) to improve the accuracy of the test result of the test area, thereby further improving the accuracy of the optimal process condition of the manufacturing process of the display area.
In a specific embodiment of the first aspect of the present disclosure, the display panel may further include a test circuit, wherein the test circuit is electrically connected to the first sub-isolation structure and the second sub-isolation structure, respectively.
Optionally, the test circuit is electrically connected to a central portion of the first support of the first sub-isolation structure and a central portion of the first support of the second sub-isolation structure, respectively.
In a specific embodiment of the first aspect of the present disclosure, the display panel may further include a plurality of display light emitting devices and a plurality of second isolation structures. The display light emitting device is positioned on the substrate and in the display area, the display light emitting device with the same light emitting color and the test light emitting device are arranged on the same layer and made of the same material, the second isolation structure is positioned on the substrate and in the display area, the second isolation structure is limited with a plurality of second isolation openings which respectively define the test light emitting device, and the second isolation structure comprises a second supporting part and a second crown part.
In a specific embodiment of the first aspect of the present disclosure, the first support and the second support are co-layered and co-material, and the first crown and the second crown are co-layered and co-material.
In the above scheme, the light emitting devices and the isolation structures in the display area and the test area are prepared synchronously, so that the impedance condition between each display light emitting device and the second isolation structure in the display area can be found in the test area, and the synchronously prepared test light emitting device and first isolation structure can be used as a comparative example of reaction impedance.
In a specific embodiment of the first aspect of the present disclosure, the orthographic projection of the second support portion on the substrate is located within the orthographic projection of the second crown portion on the substrate.
In a specific embodiment of the first aspect of the present disclosure, the display light emitting device includes a third electrode, a second light emitting functional layer, and a fourth electrode sequentially stacked on the substrate, the second light emitting functional layer and the fourth electrode being located in the second isolation opening.
Optionally, the second supporting portion is a conductive structure, and the fourth electrode is electrically connected to a sidewall of the second supporting portion.
In a specific embodiment of the first aspect of the present disclosure, the first isolation structure includes a first bottom portion, the first bottom portion is located between the first support portion and the substrate, the first bottom portion is a conductive structure, and an orthographic projection of the first support portion on the substrate is located within an orthographic projection of the first bottom portion on the substrate, such that a portion of a surface of the first bottom portion facing away from the substrate, which is not covered by the first support portion, is electrically connected to the second electrode; the second isolation structure comprises a second bottom, the second bottom is located between the second supporting portion and the substrate, the second bottom is of a conductive structure, and orthographic projection of the second supporting portion on the substrate is located within orthographic projection of the second bottom on the substrate, so that a portion, which is not covered by the second supporting portion, of a surface, which is away from the substrate, of the second bottom is electrically connected with the fourth electrode. The first bottom and the second bottom are layered and made of the same material.
In a specific embodiment of the first aspect of the disclosure, the display panel may further include a pixel defining layer located on the substrate, at least a portion of the pixel defining layer is located in the display area, and in the display area, the pixel defining layer includes a plurality of display pixel openings respectively corresponding to the second isolation openings, the display pixel openings define display light emitting devices, and the display pixel openings are in communication with the corresponding second isolation openings.
Optionally, the pixel defining layer is located in the display area and the test area, and in the test area, the pixel defining layer includes a plurality of test pixel openings corresponding to the first isolation openings, respectively, the test pixel openings define the test light emitting devices, and the test pixel openings are in communication with the corresponding first isolation openings.
Optionally, the pixel defining layer is an inorganic film layer.
In a specific embodiment of the first aspect of the present disclosure, the display panel may further include a first encapsulation layer covering the second isolation structure and the display light emitting device, at least a portion of the first encapsulation layer being located in the display region. In the display region, the first encapsulation layer includes display encapsulation units respectively corresponding to the display light emitting devices, and the display encapsulation units cover the second isolation openings.
Optionally, the first package layer is located in the display area and the test area, and in the test area, the first package layer further includes test package units corresponding to the test light emitting devices, respectively, and the test package units cover the first isolation openings.
A second aspect of the present disclosure provides a display panel including a substrate, and a plurality of test light emitting devices and a plurality of first isolation structures on the substrate. The first isolation structure defines a plurality of first isolation openings respectively defining the test light emitting device, the first isolation structure comprises a first sub isolation structure and a second sub isolation structure which are opposite to each other, each of the first sub isolation structure and the second sub isolation structure comprises a first supporting part and a first crown part, the orthographic projection of the first supporting part on the substrate is positioned within the orthographic projection of the first crown part on the substrate, and in each of the first sub isolation structure and the second sub isolation structure, the interval between the orthographic projection of the edge of the first supporting part on the substrate and the orthographic projection of the edge of the first crown part on the substrate is a first distance. The first distance of the first sub-isolation structures and the first distance of the second sub-isolation structures in the same first isolation structure are the same, and the first distances of at least two first isolation structures are different.
In a specific embodiment of the second aspect of the present disclosure, in each first isolation structure, a bisector of a line segment defined by a center of the first sub isolation structure and a center of the second sub isolation structure is a reference line, and the reference lines of at least two first isolation structures are different from an included angle parallel to a first direction of a plane where the display panel is located.
In a specific embodiment of the second aspect of the present disclosure, the number of the test light emitting devices is at least four, wherein the included angles of the reference lines of the at least two first isolation structures with respect to the first direction are the same and have different first distances, and the included angles of the reference lines of the at least two first isolation structures with respect to the first direction are different and have the same first distances.
A third aspect of the present disclosure provides a method for manufacturing a display panel, the method comprising: providing a substrate; forming a plurality of first electrodes on a substrate; sequentially forming a first material layer and a second material layer on the substrate provided with the first electrode, and forming a photoresist layer on the first material layer and the second material layer, wherein the etching rate of the second material layer is smaller than that of the first material layer; patterning the photoresist layer to form a photoresist pattern, wherein the photoresist pattern comprises at least two first areas and at least two second areas, the second areas are distributed on two sides of each first area, the thickness of the photoresist in the first area is larger than that of the photoresist in the second area, the thicknesses of the photoresist in at least two adjacent second areas are equal, and the thicknesses of the photoresist in at least two second areas are different; etching the first material layer and the second material layer based on the photoresist pattern, wherein the part of the first material layer corresponding to the first area is formed into a first supporting part, the part of the second material layer corresponding to the first area is formed into a first crown part, the first supporting part and the first crown part define a first isolation opening and form a first isolation structure, the first isolation opening and the first electrode are respectively corresponding, the orthographic projection of the first supporting part on the substrate is positioned in the orthographic projection of the first crown part on the substrate, and the interval between the orthographic projection of the edge of the first supporting part on the substrate and the orthographic projection of the edge of the first crown part on the substrate is a first distance; and forming a first light-emitting functional layer and a second electrode in the first isolation opening, wherein the first electrode, the first light-emitting functional layer and the second electrode in the same first isolation opening form the test light-emitting device. The first region adjacent to the second region having the greater photoresist thickness corresponds to the first distance at the first crown portion being smaller.
A fourth aspect of the present disclosure provides a display device comprising the display panel in any of the specific embodiments of the first and second aspects described above, or comprising the display panel obtained by the manufacturing method of the third aspect described above.
Drawings
Fig. 1 is a schematic plan view of a display panel according to an embodiment of the disclosure.
Fig. 2A is an enlarged view of a test area of the display panel shown in fig. 1.
FIG. 2B is a cross-sectional view of the display panel of FIG. 2A taken along line M1-N1 in one design.
Fig. 3A is an enlarged view of a region S1 of the display panel shown in fig. 1.
FIG. 3B is a cross-sectional view of the display panel of FIG. 3A along the line M2-N2 in one design.
FIG. 4A is a cross-sectional view of the display panel of FIG. 2A along M1-N1 in another design.
FIG. 4B is a cross-sectional view of the display panel of FIG. 2A along the line M2-N2 in another design.
FIG. 5A is a cross-sectional view of the display panel of FIG. 2A along M1-N1 in another design.
FIG. 5B is a cross-sectional view of the display panel of FIG. 2A along the line M2-N2 in another design.
FIG. 6A is a cross-sectional view of the display panel of FIG. 2A along M1-N1 in another design.
FIG. 6B is a cross-sectional view of the display panel of FIG. 2A along M2-N2 in another design.
Fig. 7 is a flowchart of a method for manufacturing a display panel according to an embodiment of the disclosure.
Fig. 8A to 15 are process diagrams of a manufacturing method for forming the display panel shown in fig. 5A and 5B according to an embodiment of the present disclosure.
Fig. 16 is a schematic diagram illustrating a positional relationship between a portion of a film layer of a display panel and a vapor deposition source during vapor deposition according to an embodiment of the disclosure.
Reference numerals illustrate:
11-a display area; 12-border region; 13-a test zone; 100-a substrate; 200-testing the light emitting device; 200 a-displaying a light emitting device; 210-a first electrode; 220-a first light-emitting functional layer; 221-a first functional layer; 222-a light emitting layer; 223-a second functional layer; 230-a second electrode; 210 a-a third electrode; 220 a-a second light emitting functional layer; 230 a-fourth electrode; 300-a first isolation structure; 300 a-a second isolation structure; 31-a first sub-isolation structure; 32-a second sub-isolation structure; 301-a first isolation opening; 301 a-a second isolation opening; 302-testing the pixel opening; 302 a-display pixel openings; 310-a first support; 310 a-a second support; 320-a first crown; 320 a-a second crown; 330-a pixel defining layer; 400-packaging structure; 410-a first encapsulation layer; 411-testing the packaging unit; 411 a-display packaging unit; 420-a second encapsulation layer; 430-a third encapsulation layer; 500-photoresist pattern; 510-a first region; 520-second region.
Detailed Description
The technical solutions of the embodiments of the present specification will be clearly and completely described below with reference to the drawings in the embodiments of the present specification, and it is apparent that the described embodiments are only some embodiments of the present specification, but not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are intended to be within the scope of the present disclosure.
In a display product, some functional film layers in the light emitting devices are formed in an evaporation manner, and the functional film layers in each light emitting device are various, and materials of some functional film layers (such as light emitting layers) in light emitting devices emitting different light rays (such as display light emitting devices described below) are different, so that when the functional film layers are evaporated through a mask plate (such as a fine mask plate), multiple alignment is required, in order to solve the problem of position offset caused by an alignment precision error, enough space (and a safety margin related to the alignment error) is required to be reserved between different light emitting devices, so that a certain overlapping rate between the position of an actual light emitting region of the light emitting device and a design position (design area) is ensured, which is equivalent to compressing the design area of the light emitting region of the light emitting device, not only the light emitting area of the light emitting device is limited, but also the arrangement density of the light emitting device cannot be further increased, and thus the PPI (pixel density) of the display panel is difficult to be further improved.
In the present disclosure, the functional film layers of the adjacent light emitting devices are partitioned by providing the isolation structure (for example, the second isolation structure described below) at the gap of the light emitting devices, so that in the evaporation process of the functional film layers, only the entire evaporation is required on the display panel, instead of separately preparing the functional film layers of each light emitting device by using the mask plate, the process does not need to consider the problem of alignment accuracy during evaporation, so that the gap of the light emitting device can be designed to be smaller in size to increase PPI (the principle thereof may be referred to the related description in the embodiments related to fig. 8A to 15 described below). The isolation structure is described in patent CN118251982A、202410864269.8、PCT/CN2024/098407、PCT/CN2024/102783、PCT/CN2024/098217、PCT/CN2024/099419、PCT/CN2024/099072 for reference.
In the case of vapor deposition of the functional film layer, the vapor deposition source and the display panel move relatively in a specific direction, and therefore, the planar shape (pixel shape), the deflection direction, and the like of the light emitting device affect the distribution of the vapor deposited functional film layer, which affects the impedance at the junction between the isolation structure and the light emitting device.
In the manufacturing process of the display panel, a dummy region (for example, a test region described below) may be provided, and then a light emitting device (a test light emitting device described below) and an isolation structure (a first isolation structure described below) are simultaneously formed in the dummy region, so that an impedance state between the light emitting device and the isolation structure in the display region may be evaluated by detecting an impedance state between the light emitting device and the isolation structure in the dummy region.
In the actual manufacturing process, the structural parameters (such as the first distance) of the isolation structure can affect the impedance between the isolation structure and the light emitting device, if the isolation structure with different structural parameters is added in the dummy area to be combined with the light emitting devices with different forms (such as the deflection direction), then for any type (such as different pixel arrangement modes), the light emitting device matched with the pixel type (such as the light emitting device with the substantial structure) in the display area of the display panel can be found in the dummy area, and the impedance of the connection part of the light emitting device and the corresponding isolation structure can be directly obtained, so that the optimal process condition (such as the evaporated scanning direction) that the impedance of the connection part between all the light emitting devices and the isolation structure in the display area is relatively low can be obtained only by calculating the impedance of the light emitting device and the isolation structure in various combinations in the dummy area.
At least one embodiment of the present disclosure provides a display panel, a method of manufacturing the same, and a display device to meet the above-described needs. The display panel can comprise a substrate, a plurality of test light emitting devices and a plurality of first isolation structures, wherein the plurality of test light emitting devices and the plurality of first isolation structures are positioned on the substrate, the first isolation structures are defined with a plurality of first isolation openings which respectively define the test light emitting devices, the first isolation structures comprise first supporting parts and first crowns, the orthographic projection of the first supporting parts on the substrate is positioned in the orthographic projection of the first crowns on the substrate, the interval between the orthographic projection of the edge of the first supporting parts on the substrate and the orthographic projection of the edge of the first crowns on the substrate is a first distance, and the first distances of at least two first isolation structures are unequal. In the display panel, the first isolation structure and the test light emitting device are arranged, and the first isolation structure is designed to have a plurality of first distances, so that the impedance condition between the first isolation structure and the test light emitting device under the condition of different first distances can be detected, and the quality of the display panel is detected, so that the yield of the display panel is ensured.
In at least one embodiment of the present disclosure, the at least two test light emitting devices have the same light emission color, and the first distances of the at least two first isolation structures respectively defining the at least two test light emitting devices having the same light emission color are different. Optionally, the display panel includes a display area and a non-display area located on at least one side of the display area, the non-display area includes a test area, and the test light emitting device and the first isolation structure are located in the test area. In the display panel, by arranging the first isolation structure and the test light emitting device in the test area and designing the first isolation structure to have a plurality of first distances, the impedance condition between the first isolation structure and the test light emitting device under the condition of different first distances can be detected, and thus, the impedance condition between the test light emitting device and the first isolation structure under the combination of the test light emitting device emitting different color light rays and the first isolation structure having different first distances can be obtained, thereby mapping the optimal technological condition of the manufacturing process of the display area based on the detection result of the test area.
Hereinafter, a structure of a display panel according to at least one embodiment of the present disclosure will be described in detail with reference to the accompanying drawings. In addition, in the drawings, a space rectangular coordinate system is established by taking the substrate as a reference, so that the position relation of related structures in the display panel is more intuitively presented, and in the space rectangular coordinate system, an X axis and a Y axis are parallel to the surface of the substrate, and a Z axis is perpendicular to the surface of the substrate.
As shown in fig. 1, 2A and 2B, the display panel 10 includes a display area 11 and a non-display area 11 located at least one side of the display area 11, the non-display area 11 includes a test area 13, the display panel includes a substrate 100, and a plurality of test light emitting devices 200 and a plurality of first isolation structures 300 located on the substrate 100, the test light emitting devices 200 are located on the substrate 100 and located at the test area 13, the first isolation structures 300 define a plurality of first isolation openings 301 respectively defining the test light emitting devices 200, the first isolation structures 300 include a first support portion 310 and a first crown portion 320, a front projection of the first support portion 310 on the substrate 100 is located within a front projection of the first crown portion 320 on the substrate 100, and a front projection of an edge of the first support portion 310 on the substrate 100 is spaced apart from a front projection of an edge of the first crown portion 320 on the substrate 100 by a first distance D1. The light emitting colors of the at least two test light emitting devices 200 are the same, and the first distances D1 of the at least two first isolation structures 300 respectively defining the at least two test light emitting devices 200 having the same light emitting color are different. For example, there are three kinds of test light emitting devices 200 emitting red light (R1), green light (G1), and blue light (B1), respectively. For example, the first distance D1 of the first isolation structure 300 corresponding to the light emitting devices 200 (R1) of different groups is different for the light emitting devices 200 (R1) located in the H1 row L1 column in each group. In the display panel 10, the impedance condition between the first isolation structure 300 and the test light emitting device 200 at the different first distances D1 may be detected, and thus, the impedance condition between the test light emitting device 200 and the first isolation structure 300 under the combination of the test light emitting device 200 emitting the different color light and the first isolation structure 300 having the different first distances D1 may be obtained, thereby mapping the optimal process condition of the manufacturing process of the display area 11 based on the detection result of the test area 13.
In at least one embodiment of the present disclosure, as shown in fig. 2A and 2B, the first isolation structure 300 includes a first sub-isolation structure 31 and a second sub-isolation structure 32 opposite to each other, and each of the first sub-isolation structure 31 and the second sub-isolation structure 32 includes a first support portion 310 and a first crown portion 320, and in each of the first sub-isolation structure 31 and each of the second sub-isolation structure 32, an orthographic projection of an edge of the first support portion 310 on the substrate 100 and an orthographic projection of an edge of the first crown portion 320 on the substrate 100 are spaced apart by a first distance D1.
In at least one embodiment of the present disclosure, as shown in fig. 2A and 2B, for each first isolation structure 300 and corresponding test light emitting device 200, the first sub-isolation structure 31 and the second sub-isolation structure 32 define a first isolation opening 301, the first isolation opening 301 accommodating the test light emitting device 200.
In at least one embodiment of the present disclosure, as shown in fig. 2A and 2B, the first distance D1 of the first sub-isolation structure 31 and the first distance D1 of the second sub-isolation structure 32 in the same first isolation structure 300 are the same. For example, for the test light emitting device 200 (R1) of the H1 row L1 column, the two first sub-isolation structures 31 and the second sub-isolation structures 32 defining the test light emitting device 200 (R1) are disposed substantially in parallel, and therefore, when the light emitting device 200 (R1) is formed by the vapor deposition process, the case of the film layer of the light emitting device 200 (R1) vapor deposited at the first sub-isolation structures 31 and the second sub-isolation structures 32 is substantially uniform, and therefore, the impedance at the junction of the light emitting device 200 (R1) and the first sub-isolation structures 31 and the impedance at the junction of the light emitting device 200 (R1) and the second sub-isolation structures 32 are also substantially uniform.
In at least one embodiment of the present disclosure, as shown in fig. 1, 3A and 3B, the display panel 10 may further include a plurality of display light emitting devices 200a and a plurality of second isolation structures 300a. The display light emitting device 200a is disposed on the substrate 100 and is disposed in the display area 11, the second isolation structure 300a defines a plurality of second isolation openings 301a respectively defining the test light emitting device 200, the second isolation structure 300a includes a second support portion 310a and a second crown portion 320a, and an orthographic projection of the second support portion 310a on the substrate 100 is disposed within an orthographic projection of the second crown portion 320a on the substrate 100.
In at least one embodiment of the present disclosure, the test light emitting device 200 and the display light emitting device 200a may be simultaneously prepared, and the first and second isolation structures 300 and 300a may also be simultaneously prepared, so that the impedance between each display light emitting device 200a and the second isolation structure 300a in the display region 11 may be found in the test region 13 as a comparison example of the reaction impedance.
For example, the test light emitting device 200 and the display light emitting device 200a having the same color of light are layered and made of the same material, and further, the first support portion 310 and the second support portion 310a are layered and made of the same material, and the first crown portion 320 and the second crown portion 320a are layered and made of the same material.
In at least one embodiment of the present disclosure, as shown in fig. 1, 2A, 2B, 3A and 3B, the test light emitting device 200 includes a first electrode 210, a first light emitting function layer 220 and a second electrode 230 sequentially stacked on the substrate 100, the first light emitting function layer 220 and the second electrode 230 being located in the first isolation opening 301, and accordingly, the display light emitting device 200a includes a third electrode 210a, a second light emitting function layer 220a and a fourth electrode 230a sequentially stacked on the substrate 100, and the second light emitting function layer 220a and the fourth electrode 230a being located in the second isolation opening 301 a.
In at least one embodiment of the present disclosure, both the first electrode 210 and the third electrode 210a may be provided as anodes, and both the second electrode 230 and the fourth electrode 230a may be provided as cathodes.
For example, the first light emitting functional layer 220 and the second light emitting functional layer 220a each include a first functional layer 221, a light emitting layer 222, and a second functional layer 223, and the first functional layer 221, the light emitting layer 222, and the second functional layer 223 are sequentially stacked on the first electrode 210. The first functional layer 221 may include a hole injection layer, a hole transport layer, an electron blocking layer, and the like. The second functional layer 223 may include an electron injection layer, an electron transport layer, a hole blocking layer, and the like. It should be noted that, since carriers (holes and electrons) mainly cross between adjacent display light emitting devices 200a through the first functional layer 221, the second isolation structure 300a is disposed such that the first functional layers 221 of the respective display light emitting devices 200a are electrically disconnected from each other.
In at least one embodiment of the present disclosure, the first support portion 310 is a conductive structure, and the second electrode 230 is electrically connected to a sidewall of the first support portion 310, and accordingly, the second support portion 310a is a conductive structure, and the fourth electrode 230a is electrically connected to a sidewall of the second support portion 310 a. In this manner, the electrical connection of the test light emitting device 200 and the first isolation structure 300 is realized, and the electrical connection of the display light emitting device 200a and the second isolation structure 300a is realized.
In at least one embodiment of the present disclosure, as shown in fig. 2A, 2B, 3A, and 3B, the front projection of the first support portion 310 on the substrate 100 is located within the front projection of the first crown portion 320 on the substrate 100, and correspondingly, the front projection of the second support portion 310a on the substrate 100 is located within the front projection of the second crown portion 320a on the substrate 100. As such, the first isolation structure 300 and the second isolation structure 300a each generally have a shape with a wide upper portion and a narrow lower portion, and the first functional layer 221 may be disconnected at edges of the first and second crowns 320 and 320a during evaporation, i.e., the first functional layer 221 may not be connected with a conductive portion (e.g., the second support portion 310 a) of the second isolation structure 300a to cause crosstalk between adjacent display light emitting devices 200 a.
In at least one embodiment of the present disclosure, as shown in fig. 2A, 2B, 3A and 3B, in each first isolation structure 300, a bisector of a line segment defined by a center of the first sub-isolation structure 31 and a center of the second sub-isolation structure 32 is a reference line P, and the reference line P of the first isolation structure 300 corresponding to at least two test light emitting devices 200 having the same light emission color is different from an included angle a (a deflection angle described below) parallel to a first direction F (also corresponding to a Y-axis direction) of a plane of the display panel, that is, the test light emitting devices 200 may be deflected to different degrees with respect to the first direction F. In this way, it is possible to obtain a combination of the test light emitting device 200 and the first isolation structure 300 having different first distances D1 for each color light and an impedance condition between the test light emitting device 200 and the first isolation structure 300 under different deflection (angle) conditions, thereby further obtaining impedance conditions of the test light emitting device 200 and the first isolation structure 300 emitting the respective color light in the test region 13 under the respective combinations, thereby mapping optimal process conditions of the manufacturing process of the display region 11 based on the detection result of the test region 13. For example, as shown in fig. 2A, for the test light emitting device 200 (R1) emitting red light, three test light emitting devices 200 (R1) are provided, whose deflection angles with respect to the first direction F are 0 degrees, 45 degrees, and 90 degrees, respectively, so that the impedance between the test light emitting device 200 (R1) and the second isolation structure 300a at different deflection angles can be tested.
For example, as shown in fig. 1 and 2A, the non-display area 11 includes a binding area 14, and the direction from the display area 11 to the binding area is a first direction F.
In at least one embodiment of the present disclosure, the number of the test light emitting devices 200 with the same light emission color is at least four, and for the first isolation structures 300 corresponding to the test light emitting devices 200 with the same light emission color, the included angles of the reference lines of the at least two first isolation structures 300 with respect to the first direction F are the same, and the first distances D1 are different, and the included angles of the reference lines of the at least two first isolation structures 300 with respect to the first direction F are different, and the first distances D1 are the same. For example, three groups of the structures shown in fig. 2A are disposed in the test region, and thus, 9 test light emitting devices 200 (R1) are disposed in total in the test region, it is assumed that the first distances D1 of the first isolation structures 300 corresponding to the three test light emitting devices 200 (R1) in each group are the same, and the first distances D1 of the first isolation structures 300 corresponding to the test light emitting devices 200 (R1) are different in different groups.
In at least one embodiment of the present disclosure, the first isolation structures 300 corresponding to each light emitting color of the test light emitting device 200 are m×n, the included angles of the reference lines P of the M first isolation structures 300 with respect to the first direction F are the same, the first distances D1 are different, the included angles of the reference lines of the N first isolation structures 300 with respect to the first direction F are different, the first distances D1 are the same, and both M and N are positive integers greater than or equal to 2. In this manner, for each color of the test light emitting device 200, there is a combination between the first isolation structure 300 having an arbitrary first distance D1 and an arbitrary deflection angle (included angle) to improve the accuracy of the test result of the test region 13, thereby further improving the accuracy of the optimal process condition of the manufacturing process of the display region 11.
In at least one embodiment of the present disclosure, for at least two first isolation structures 300 corresponding to the test light emitting devices 200 having the same color of emitted light and including different angles between the reference line and the first direction F, the angles between the reference lines of the different first isolation structures 300 and the first direction F are multiples of a preset angle, and the multiples are different. For example, the preset angle is one of 30 degrees, 45 degrees, 60 degrees, and 90 degrees. For example, a case where the preset angle is 45 degrees is shown in fig. 2A, and the multiples thereof are sequentially selected to be 0,1, and 2 to correspond to three deflection states of the test light emitting device 200.
In a specific embodiment of the first aspect of the present disclosure, the display panel may further include a test circuit, wherein the test circuit is electrically connected to the first sub-isolation structure 31 and the second sub-isolation structure 32, respectively. For example, the test circuit is electrically connected to the central portion of the first support portion 310 of the first sub-isolation structure 31 and the central portion of the first support portion 310 of the second sub-isolation structure 32, respectively, so that accuracy in detecting the impedance at the junction of the test light emitting device 200 and the first isolation structure 300 can be increased.
In at least one embodiment of the present disclosure, as shown in fig. 4A and 4B, the first isolation structure 300 may include a first bottom 340, the first bottom 340 is located between the first support 310 and the substrate 100, the first bottom 340 is a conductive structure, and an orthographic projection of the first support 310 on the substrate 100 is located within an orthographic projection of the first bottom 340 on the substrate 100, such that a portion of a surface of the first bottom 340 facing away from the substrate 100 that is not covered by the first support 310 is electrically connected with the second electrode 230; in addition, the second isolation structure 300a may include a second bottom 340a, the second bottom 340a is located between the second support 310a and the substrate 100, the second bottom 340a is a conductive structure, and an orthographic projection of the second support 310a on the substrate 100 is located within an orthographic projection of the second bottom 340a on the substrate 100, such that a portion of a surface of the second bottom 340a facing away from the substrate 100, which is not covered by the second support 310a, is electrically connected with the fourth electrode 230 a. The first bottom 340 and the second bottom 340a are layered and made of the same material. In this manner, the surface of the first bottom 340 facing away from the substrate 100 may be used to deposit a portion of the second electrode 230 to increase the thickness of the contact portion of the second electrode 230 with the first isolation structure 300, thereby reducing the impedance of the contact region; accordingly, the surface of the second bottom 340a facing away from the substrate 100 is used to deposit a portion of the fourth electrode 230a to increase the thickness of the contact portion of the fourth electrode 230a with the second isolation structure 300a, thereby reducing the impedance of the contact region.
In an embodiment of the present disclosure, the second isolation structure is used to communicate with the fourth electrode, in order to avoid connection of the second isolation structure with the fourth electrode, the fourth electrode may be reduced in size to be disposed at a distance from the second isolation structure, or an insulating layer may be disposed between the third electrode and the second isolation structure.
In at least one embodiment of the present disclosure, as shown in fig. 4A and 4B, the display panel may further include a pixel defining layer 330 disposed on the substrate 100, at least a portion of the pixel defining layer 330 is disposed in the display region 11, and in the display region 11, the pixel defining layer 330 includes a plurality of display pixel openings 302a corresponding to the second isolation openings 301a, respectively, the display pixel openings 302a define the display light emitting devices 200a, and the display pixel openings 302a communicate with the corresponding second isolation openings 301a to limit the display light emitting devices 200a. For example, the front projection of the display pixel opening 302a on the substrate 100 is located within the front projection of the corresponding second isolation opening 301a on the substrate 100, and the second light emitting functional layer 220a and the fourth electrode 230a fill the display pixel opening 302a2 and extend onto the surface of the pixel defining layer 330 facing away from the substrate 100.
In the case where the pixel defining layer 330 is provided in the display panel, the third electrode 210a of the test light emitting device 200a may be designed to have a large area so that it is difficult to secure an actual light emitting area of the display light emitting device 200a due to a positional deviation (error caused by process accuracy) between the third electrode 210a and the second isolation structure 300a in an actual process, thereby improving an aperture ratio (related to a light emitting area of the display light emitting device 200 a) and brightness of a display image of the display panel. For example, in the case where the pixel defining layer 330 is not provided, in order to avoid the connection of the third electrode 210a with the second isolation structure 300a, the design area of the third electrode 210a is limited, and if the position of the third electrode 210a is shifted, the light emitting area of the light emitting unit may be smaller than the design area, thereby causing the brightness of the light emitting unit to be reduced.
For example, as shown in fig. 4A and 4B, the pixel defining layer 330 is located in the display area 11 and the test area 13, and in the test area 13, the pixel defining layer 330 includes a plurality of test pixel openings 302 corresponding to the first isolation openings 301, respectively, the test pixel openings 302 define the test light emitting devices 200, and the test pixel openings 302 are in communication with the corresponding first isolation openings 301.
For example, the pixel defining layer 330 is an inorganic film layer. In the embodiment of the present disclosure, the second light emitting function layer 220a and the fourth electrode 230a of the display light emitting device 200a may be formed by evaporation based on the second isolation structure 300a, and the second isolation structure 300a may limit the second light emitting function layer 220a and the fourth electrode 230a, and thus, the pixel defining layer 330 does not need to have a thickness too large to accommodate the second light emitting function layer 220a, i.e., the pixel defining layer 330 does not need to be made of an organic material; in addition, the pixel defining layer 330 may have a smaller thickness in the case of an inorganic layer, so that the break at the edge of the pixel opening 302 may be reduced to improve the film continuity of the fourth electrode 230a thereat, so as to reduce the resistance of the fourth electrode 230 a.
In at least one embodiment of the present disclosure, as shown in fig. 6A and 6B, the display panel may further include a first encapsulation layer 410 covering the second isolation structure 300a and the display light emitting device 200a, at least a portion of the first encapsulation layer 410 being located in the display region 11. In the display region 11, the first encapsulation layer 410 includes display encapsulation units 411a corresponding to the display light emitting devices 200a, respectively, and the display encapsulation units 411a cover the second isolation openings 301a. The display light emitting device 200a may be classified as emitting different color light rays (red light R2, green light G2, blue light B2 as shown in fig. 3A), in which case the first encapsulation layer 410 may include a plurality of display encapsulation units 411a corresponding to the second isolation openings 301a, respectively, to individually encapsulate the display light emitting device 200a in each of the second isolation openings 301a.
For example, as shown in fig. 6A and 6B, the first encapsulation layer 410 is located in the display region 11 and the test region 13, and in the test region 13, the first encapsulation layer 410 further includes test encapsulation units 411 corresponding to the test light emitting devices 200, respectively, and the test encapsulation units 411 cover the first isolation openings 301.
Note that, although the display light emitting devices 200a having different emission lights are manufactured independently, a film layer (vapor deposited film layer such as a light emitting function layer) in each display light emitting device 200a is vapor deposited over the entire surface of the display panel at the time of vapor deposition. For example, the display light emitting device 200a is classified into light emitting units emitting red light (R2), green light (G2) and blue light (B2), respectively, during the manufacturing process, the display light emitting devices R2, G2, B2 are sequentially prepared, the display light emitting device R2 is formed in each of the second barrier openings 301a when the display light emitting device R2 is manufactured, the first encapsulation layer 410 is prepared on the display panel to cover the display light emitting device R2, and then a part of the first encapsulation layer 410 in the second barrier openings 301a (used for forming the light emitting units G2, B2) and the fourth electrode and the second light emitting function layer in the final product) are removed, during which the first encapsulation layer 410 is used for protecting the display light emitting device R2 in the other second barrier openings 301a (used for forming the display light emitting device R2 in the final product), and the light emitting units G2, B2 are sequentially prepared again based on this way, that is finally the first encapsulation layer 410 is prepared as shown in fig. 6A and 6B, that is, the first encapsulation layer 410 is prepared by a separate process on the entire display panel, and the first encapsulation layer 410 is also includes a plurality of encapsulation units formed at intervals.
It should be noted that, in the embodiment of the present disclosure, the order of manufacturing the three types of display light emitting devices R2, G2, and B2 is not limited, and may be designed according to the needs of an actual process, for example, the manufacturing process may be performed based on the order of the light emitting units B2, G2, and R2.
In at least one embodiment of the present disclosure, as shown in fig. 6A and 6B, the display panel may further include a second encapsulation layer 420 and a third encapsulation layer 430. The second encapsulation layer 420 is located on a side of the first encapsulation layer 410 facing away from the substrate 100 and covers the first encapsulation layer 410 and the second isolation structure 300a, and the third encapsulation layer 430 is located on a side of the second encapsulation layer 420 facing away from the substrate 100. Optionally, the second encapsulation layer 420 is a planarization layer. Optionally, the second encapsulation layer 420 is an organic film layer, and the third encapsulation layer 430 is an inorganic film layer. Optionally, the second encapsulation layer 420 and the third encapsulation layer 430 are continuous film layers. The second encapsulation layer 420 may improve the flatness of the surface of the display panel so as to provide other elements on the encapsulation layer; in addition, the second encapsulation layer 420 may have a certain flexibility to relieve the stress of the first encapsulation layer 410 and the third encapsulation layer 430, thereby improving the reliability of the display panel, and being more beneficial to the application of the display panel in the flexible display field; in addition, the third packaging layer 430 has high compactness, has a high barrier effect on water, oxygen and the like, and the third packaging layer 430 has high strength so as to be convenient for preparing other elements (such as a structure related to a touch function, an optical film layer and the like) thereon.
In at least one embodiment of the present disclosure, as shown in fig. 6A and 6B, the substrate 100 may include a substrate and a driving circuit layer on the substrate, the driving circuit layer including a plurality of pixel driving circuits in a display region, and a display function layer on the driving circuit layer. For example, the pixel driving circuit may include a plurality of transistors TFT, capacitors, and the like, for example, formed in various forms of 2T1C (i.e., 2 transistors (TFT) and 1 capacitor (C)), 3T1C, or 7T 1C. The pixel driving circuit is connected to the display light emitting device 200a to control the on-off state and the light emitting luminance of the display light emitting device 200 a.
At least one embodiment of the present disclosure provides a display panel including a substrate 100, and a plurality of test light emitting devices 200 and a plurality of first isolation structures 300 on the substrate 100. The first isolation structure 300 defines a plurality of first isolation openings 301 respectively defining the test light emitting device 200, the first isolation structure 300 includes a first sub-isolation structure 31 and a second sub-isolation structure 32 opposite to each other, each of the first sub-isolation structure 31 and the second sub-isolation structure 32 includes a first support portion 310 and a first crown portion 320, an orthographic projection of the first support portion 310 on the substrate 100 is located within an orthographic projection of the first crown portion 320 on the substrate 100, and in each of the first sub-isolation structure 31 and each of the second sub-isolation structure 32, an orthographic projection of an edge of the first support portion 310 on the substrate 100 is spaced apart from an orthographic projection of an edge of the first crown portion 320 on the substrate 100 by a first distance D1. The first distance D1 of the first sub-isolation structures 31 and the first distance D1 of the second sub-isolation structures 32 in the same first isolation structure 300 are the same, and the first distances D1 of at least two first isolation structures 300 are different. For example, further, the display panel may further include a display region 11 and a non-display region 11 located on at least one side of the display region 11, the non-display region 11 including a test region 13, the test light emitting device 200 being located on the substrate 100 and located in the test region 13, and the first isolation structure 300 being located on the substrate 100 and located in the test region 13. The technical problems, specific structures, and principles of further designing and solving the technical problems of the display panel can be referred to the related description in the foregoing embodiments, and are not repeated herein.
At least one embodiment of the present disclosure provides a method of manufacturing a display panel, including steps S110 to S160 as shown in fig. 7, as follows.
S110, providing a substrate. For example, the display area and the non-display area of the display panel may be divided at the substrate, the non-display area being located at least one side of the display area, the non-display area including the test area.
S120, forming a plurality of first electrodes on the substrate. For example, the first electrode is formed in the test region.
For example, in this step S120, the third electrode may be simultaneously prepared in the display area while the first electrode is prepared.
And S130, sequentially forming a first material layer and a second material layer on the substrate with the first electrode, and forming a photoresist layer on the first material layer and the second material layer, wherein the etching rate of the second material layer is smaller than that of the first material layer.
And S140, carrying out a patterning process on the photoresist layer to form a photoresist pattern, wherein the photoresist pattern comprises at least two first areas and at least two second areas, the second areas are distributed on two sides of each first area, the thickness of the photoresist in the first area is larger than that of the photoresist in the second area, the thicknesses of the photoresist in at least two adjacent second areas are equal, and the thicknesses of the photoresist in the at least two second areas are different.
And S150, etching the first material layer and the second material layer based on the photoresist pattern, wherein the part of the first material layer corresponding to the first area is formed into a first supporting part, the part of the second material layer corresponding to the first area is formed into a first crown part, the first supporting part and the first crown part define a first isolation opening and form a first isolation structure, the first isolation opening and the first electrode respectively correspond, the orthographic projection of the first supporting part on the substrate is positioned in the orthographic projection of the first crown part on the substrate, and the interval between the orthographic projection of the edge of the first supporting part on the substrate and the orthographic projection of the edge of the first crown part on the substrate is a first distance.
S160, forming a first light-emitting function layer and a second electrode in the first isolation opening, wherein the first electrode, the first light-emitting function layer and the second electrode in the same first isolation opening form a test light-emitting device. The first region adjacent to the second region having the greater photoresist thickness corresponds to the first distance at the first crown portion being smaller.
The specific structural design of the display panel obtained by the preparation method corresponding to the steps S110 to S160 and the arrangement relation of each element in the display panel and other elements included in the display panel can be referred to the related description in the foregoing embodiment, and will not be described herein.
Next, a method of manufacturing the display panel will be exemplarily described with reference to the display panel shown in fig. 5A and 5B.
As shown in fig. 8A and 8B, a substrate 100 is provided and first and third electrodes 210 and 210a arranged in an array are formed on the substrate 100, the first electrode 210 is formed in a display area, and the third electrode 210a is formed in a test area; depositing an insulating material film layer 330a (e.g., an inorganic material film layer) on the substrate 100 on which the first electrode 210 is formed; a first material layer 310b and a second material layer 320b are deposited on the insulating material film layer 330 a.
As shown in fig. 9A and 9B, a photoresist layer is deposited on the second material layer 320B, and the photoresist layer is exposed and developed to form a first photoresist pattern 500, and in a test region, the first photoresist pattern 500 includes at least two first regions 510 and at least two second regions 520, each of the first regions 510 has a second region 520 distributed on both sides thereof, the photoresist thickness of the first region 510 is greater than that of the second region 520, and the photoresist thicknesses of at least two adjacent second regions 520 are equal, and the photoresist thicknesses of at least two second regions 520 are different.
As shown in fig. 10A and 10B, the first material layer 310B and the second material layer 320B are subjected to a patterning process based on the first photoresist pattern 500 such that portions of the first material layer 310B and the second material layer 320B located at the test region form the first support portion 310 and the first crown portion 320, respectively, and such that portions of the first material layer 310B and the second material layer 320B located at the display region form the second support portion 310A and the second crown portion 320A, respectively, the first support portion 310 and the first crown portion 320 constitute the first isolation structure 300, and the second support portion 310A and the second crown portion 320A constitute the second isolation structure 300A.
In embodiments of the present disclosure, the patterning process may be a photolithographic patterning process, which may include, for example: a photoresist is coated on a structural layer to be patterned, the photoresist is exposed using a mask plate, the exposed photoresist is developed to obtain a photoresist pattern, the structural layer is etched (optionally wet or dry) using the photoresist pattern, and then the photoresist pattern is optionally removed. In the case where the material of the structural layer includes photoresist, the structural layer may be directly exposed to light through a mask plate to form a desired pattern.
It should be noted that, in the test region, the greater the thickness of the photoresist in the second region 520, the smaller the first distance D1 between the edges of the first support portion 310 and the first crown portion 320 at this position, and thus, the first isolation structure 300 having different first distances D1 can be obtained.
As shown in fig. 11A and 11B, the insulating material film layer 330a is subjected to a patterning process based on the first and second isolation structures 300 and 300a such that the insulating material film layer 330a is formed as a pixel defining layer 300 having a plurality of test pixel openings 302 and a plurality of display pixel openings 301.
As shown in fig. 12A and 12B, a light emitting functional material layer and a conductive material layer are evaporated on the substrate 100, the portion of the light emitting functional material layer located at the first isolation opening 301 forms the first light emitting functional layer 220, the portion located at the second isolation opening 301a forms the second light emitting functional layer 220a, the portion of the conductive material layer located at the first isolation opening 301 forms the second electrode 230, the portion located at the second isolation opening 301a forms the fourth electrode 230a, thus, a test light emitting device 200 is formed in each first isolation opening 301, and a display light emitting device 200a is formed in the second isolation opening 301a, the evaporation in this process does not use a mask, and thus the evaporated material is also deposited on the first crown 320 and the second crown 320a, it should be noted that, in an actual process, the evaporated material is deposited at the upper surface and the sidewall (not shown) of the first crown 320 and the second crown 320a away from the substrate 100.
As shown in fig. 13A and 13B, the first encapsulation film 410a is deposited to cover the test light emitting device 200, the display light emitting device 200a, the first isolation structure 300, and the second isolation structure 300a, for example, the light emitting layers in the evaporated first light emitting function layer 220 and the second light emitting function layer 220a may be emitted red light, that is, at this stage, the test light emitting device 200 emitting red light is formed in the first isolation opening 301, and the display light emitting device 200a emitting red light is formed in the second isolation opening 301 a.
As shown in fig. 14, a photoresist is formed (e.g., coated, etc.) on the substrate 100 formed with the first encapsulation film 410a, and then a patterning process is performed thereon to form a second photoresist pattern 540, the first photoresist pattern 500 covering only a portion of the first isolation opening 301 and a portion of the second isolation opening 301a.
As shown in fig. 15, the surface of the display panel is etched using the second photoresist pattern 540 as a mask, and the first encapsulation film 410a, the second electrode 230, the fourth electrode 230a, the first light emitting function layer 220 and the second light emitting function layer 220a, which are not covered by the second photoresist pattern 540, are removed; the second photoresist pattern 540 is then removed.
The above steps of fig. 8A to 15 are repeated to form the light emitting unit 200 emitting green light and the light emitting unit 200 emitting blue light in the other isolation openings 301, respectively, and to form the display panel as shown in fig. 5A and 5B.
As shown in fig. 16, in the case of performing vapor deposition on a light emitting functional layer (for example, a first functional layer thereof), if the vapor deposition source P moves to be opposite to the second isolation structure 300a, the positions of the boundaries of the vapor deposition angles thereof on the display panel are the line L1 and the line L2, that is, the region between the line L1 and the line L2 is not vapor deposited in this case, and the region on the side of the line L1 and the line L2 facing away from the second isolation structure 200a is vapor deposited regardless of the position to which the vapor deposition source P moves. That is, starting at the line L1 or the line L2 region, the thicknesses of the second light emitting functional layer and the fourth electrode are smaller as they are closer to the second isolation structure 300 a. In fig. 16, assuming that the evaporation source P is scanningly moved in the X-axis direction, if the moving direction of the evaporation source P is changed, the edge thicknesses of the second light emitting function layer and the fourth electrode and the coverage area with the isolation structure may be changed, which also approximately shows that the impedance at the junction of the light emitting device 200a and the second isolation structure 300a is changed.
At least one embodiment of the present disclosure provides a display device that may report the display panel in the above embodiments. For example, the display device may include a touch structure, an optical film (e.g., a microlens, a polarizer), a cover plate, and the like disposed on the light emitting side of the display panel.
For example, the display device may be any product or component having a display function, such as a television, a digital camera, a mobile phone, a watch, a tablet computer, a notebook computer, a navigator, and the like.
The foregoing description of the preferred embodiments is provided for the purpose of illustration only, and is not intended to limit the scope of the disclosure, since various modifications, equivalents, etc. may be made without departing from the spirit and principles of the disclosure.

Claims (20)

1.一种显示面板,其特征在于,包括:1. A display panel, comprising: 基板;Substrate; 多个测试发光器件,位于所述基板上;A plurality of test light emitting devices are located on the substrate; 多个第一隔离结构,位于所述基板上,其中,所述第一隔离结构限定有分别界定所述测试发光器件的多个第一隔离开口,所述第一隔离结构包括第一支撑部和第一冠部,所述第一支撑部在所述基板上的正投影位于所述第一冠部在所述基板上的正投影之内,且所述第一支撑部的边缘在所述基板上的正投影与所述第一冠部的边缘在所述基板上的正投影的间距为第一距离;a plurality of first isolation structures, located on the substrate, wherein the first isolation structures define a plurality of first isolation openings respectively defining the test light-emitting devices, the first isolation structures include a first support portion and a first crown portion, an orthographic projection of the first support portion on the substrate is located within an orthographic projection of the first crown portion on the substrate, and a first distance is provided between an orthographic projection of an edge of the first support portion on the substrate and an orthographic projection of an edge of the first crown portion on the substrate; 其中,至少两个所述第一隔离结构的所述第一距离不相等。Wherein, the first distances of at least two of the first isolation structures are not equal. 2.根据权利要求1所述的显示面板,其特征在于,包括显示区和位于所述显示区至少一侧的非显示区,其中,2. The display panel according to claim 1, characterized in that it comprises a display area and a non-display area located at least on one side of the display area, wherein: 所述非显示区包括测试区,所述测试发光器件和所述第一隔离结构位于所述测试区,所述第一隔离结构包括彼此相对的第一子隔离结构和第二子隔离结构,所述第一子隔离结构和所述第二子隔离结构都包括所述第一支撑部和所述第一冠部,以及The non-display area includes a test area, the test light emitting device and the first isolation structure are located in the test area, the first isolation structure includes a first sub-isolation structure and a second sub-isolation structure opposite to each other, the first sub-isolation structure and the second sub-isolation structure both include the first support portion and the first crown portion, and 在每个所述第一子隔离结构和每个所述第二子隔离结构中,所述第一支撑部的边缘在所述基板上的正投影与所述第一冠部的边缘在所述基板上的正投影的间距为所述第一距离;In each of the first sub-isolation structures and each of the second sub-isolation structures, a distance between an orthographic projection of an edge of the first support portion on the substrate and an orthographic projection of an edge of the first crown portion on the substrate is the first distance; 优选地,同一个所述第一隔离结构中的所述第一子隔离结构的所述第一距离和所述第二子隔离结构的所述第一距离相同;Preferably, the first distance of the first sub-isolation structure and the first distance of the second sub-isolation structure in the same first isolation structure are the same; 优选地,所述第一子隔离结构和所述第二子隔离结构界定所述第一隔离开口,且所述第一支撑部在所述基板上的正投影,位于所述第一冠部在所述基板上的正投影之内;Preferably, the first sub-isolation structure and the second sub-isolation structure define the first isolation opening, and the orthographic projection of the first support portion on the substrate is located within the orthographic projection of the first crown portion on the substrate; 优选地,所述测试发光器件包括在所述基板上依次叠置的第一电极、第一发光功能层和第二电极,所述第一发光功能层和所述第二电极位于所述第一隔离开口中;Preferably, the test light-emitting device comprises a first electrode, a first light-emitting functional layer and a second electrode sequentially stacked on the substrate, and the first light-emitting functional layer and the second electrode are located in the first isolation opening; 优选地,所述第一支撑部为导电结构,且所述第二电极与所述第一支撑部的侧壁电连接。Preferably, the first supporting portion is a conductive structure, and the second electrode is electrically connected to a side wall of the first supporting portion. 3.根据权利要求2所述的显示面板,其特征在于,至少两个测试发光器件的出光颜色相同,且分别界定至少两个出光颜色相同的所述测试发光器件的至少两个所述第一隔离结构的所述第一距离不同。3 . The display panel according to claim 2 , wherein at least two test light emitting devices have the same light emission color, and the first distances of at least two first isolation structures respectively defining at least two test light emitting devices having the same light emission color are different. 4.根据权利要求3所述的显示面板,其特征在于,在每个所述第一隔离结构中,所述第一子隔离结构的中心和所述第二子隔离结构的中心所确定的线段的平分线为基准线,以及4. The display panel according to claim 3, characterized in that, in each of the first isolation structures, a bisector of a line segment defined by a center of the first sub-isolation structure and a center of the second sub-isolation structure is a reference line, and 至少两个出光颜色相同的所述测试发光器件所对应的所述第一隔离结构的所述基准线,与平行于所述显示面板所在面的第一方向的夹角不同;The reference line of the first isolation structure corresponding to at least two test light-emitting devices with the same light emission color has a different angle with the first direction parallel to the surface where the display panel is located; 优选地,所述非显示区包括绑定区,所述显示区至所述绑定区的方向为所述第一方向。Preferably, the non-display area includes a binding area, and the direction from the display area to the binding area is the first direction. 5.根据权利要求4所述的显示面板,其特征在于,出光颜色相同的所述测试发光器件为至少四个,且对于与出光颜色相同的所述测试发光器件对应的所述第一隔离结构,5. The display panel according to claim 4, characterized in that there are at least four test light emitting devices with the same light emitting color, and for the first isolation structure corresponding to the test light emitting devices with the same light emitting color, 至少两个所述第一隔离结构的所述基准线相对于所述第一方向的夹角相同,且具有的所述第一距离不同,以及The reference lines of at least two of the first isolation structures have the same angle relative to the first direction and different first distances, and 至少两个所述第一隔离结构的所述基准线相对于所述第一方向的夹角不同,且具有的所述第一距离相同。The reference lines of at least two of the first isolation structures have different angles relative to the first direction and have the same first distance. 6.根据权利要求5所述的显示面板,其特征在于,对于与出光颜色相同的所述测试发光器件对应且所包括的所述基准线与所述第一方向的夹角不同的至少两个所述第一隔离结构,不同所述第一隔离结构的所述基准线相对于所述第一方向的夹角为预设角度的倍数,且倍数不同;6. The display panel according to claim 5, characterized in that, for at least two first isolation structures corresponding to the test light-emitting device with the same light emission color and including different angles between the reference line and the first direction, the angles between the reference lines of different first isolation structures and the first direction are multiples of a preset angle, and the multiples are different; 优选地,所述预设角度为30度、45度、60度和90度中的一种。Preferably, the preset angle is one of 30 degrees, 45 degrees, 60 degrees and 90 degrees. 7.根据权利要求5所述的显示面板,其特征在于,每种出光颜色的所述测试发光器件所对应的所述第一隔离结构为M*N个,以及7. The display panel according to claim 5, wherein the number of the first isolation structures corresponding to the test light-emitting devices of each light-emitting color is M*N, and M个所述第一隔离结构的所述基准线相对于所述第一方向的夹角相同,且具有的所述第一距离不同,N个所述第一隔离结构的所述基准线相对于所述第一方向的夹角不同,且具有的所述第一距离相同,The reference lines of the M first isolation structures have the same angle relative to the first direction and have different first distances, and the reference lines of the N first isolation structures have different angles relative to the first direction and have the same first distances, 其中,M和N都为大于或等于2的正整数。Wherein, M and N are both positive integers greater than or equal to 2. 8.根据权利要求2至7中任一项所述的显示面板,其特征在于,还包括测试电路,其中,所述测试电路分别与所述第一子隔离结构和所述第二子隔离结构电连接;8. The display panel according to any one of claims 2 to 7, further comprising a test circuit, wherein the test circuit is electrically connected to the first sub-isolation structure and the second sub-isolation structure respectively; 优选地,所述测试电路分别与所述第一子隔离结构的所述第一支撑部的中心部分和所述第二子隔离结构的所述第一支撑部的中心部分电连接。Preferably, the test circuit is electrically connected to a central portion of the first supporting portion of the first sub-isolation structure and a central portion of the first supporting portion of the second sub-isolation structure, respectively. 9.根据权利要求2至7中任一项所述的显示面板,其特征在于,还包括:9. The display panel according to any one of claims 2 to 7, further comprising: 多个显示发光器件,位于所述基板上且位于所述显示区,出光颜色相同的所述显示发光器件与所述测试发光器件同层且同材料;以及A plurality of display light-emitting devices are located on the substrate and in the display area, the display light-emitting devices having the same light-emitting color being in the same layer and made of the same material as the test light-emitting device; and 多个第二隔离结构,位于所述基板上且位于所述显示区,其中,所述第二隔离结构限定有分别界定所述测试发光器件的多个第二隔离开口,所述第二隔离结构包括第二支撑部和第二冠部。A plurality of second isolation structures are located on the substrate and in the display area, wherein the second isolation structures are defined with a plurality of second isolation openings respectively defining the test light-emitting devices, and the second isolation structures include a second supporting portion and a second crown portion. 10.根据权利要求9所述的显示面板,其特征在于,所述第一支撑部与所述第二支撑部同层且同材料,所述第一冠部和所述第二冠部同层且同材料。10 . The display panel according to claim 9 , wherein the first supporting portion and the second supporting portion are in the same layer and made of the same material, and the first crown portion and the second crown portion are in the same layer and made of the same material. 11.根据权利要求9所述的显示面板,其特征在于,所述第二支撑部在所述基板上的正投影,位于所述第二冠部在所述基板上的正投影之内。11 . The display panel according to claim 9 , wherein an orthographic projection of the second supporting portion on the substrate is located within an orthographic projection of the second crown portion on the substrate. 12.根据权利要求9所述的显示面板,其特征在于,所述显示发光器件包括在所述基板上依次叠置的第三电极、第二发光功能层和第四电极,所述第二发光功能层和所述第四电极位于所述第二隔离开口中;12. The display panel according to claim 9, wherein the display light emitting device comprises a third electrode, a second light emitting functional layer and a fourth electrode sequentially stacked on the substrate, and the second light emitting functional layer and the fourth electrode are located in the second isolation opening; 优选地,所述第二支撑部为导电结构,且所述第四电极与所述第二支撑部的侧壁电连接。Preferably, the second supporting portion is a conductive structure, and the fourth electrode is electrically connected to a side wall of the second supporting portion. 13.根据权利要求12所述的显示面板,其特征在于,13. The display panel according to claim 12, characterized in that: 所述第一隔离结构包括第一底部,所述第一底部位于所述第一支撑部和所述基板之间,所述第一底部为导电结构,且所述第一支撑部在所述基板上的正投影位于所述第一底部在所述基板上的正投影之内,以使得所述第一底部的背离所述基板的表面中未被所述第一支撑部覆盖的部分与所述第二电极电连接;The first isolation structure includes a first bottom portion, the first bottom portion is located between the first supporting portion and the substrate, the first bottom portion is a conductive structure, and an orthographic projection of the first supporting portion on the substrate is located within an orthographic projection of the first bottom portion on the substrate, so that a portion of a surface of the first bottom portion that is away from the substrate and is not covered by the first supporting portion is electrically connected to the second electrode; 所述第二隔离结构包括第二底部,所述第二底部位于所述第二支撑部和所述基板之间,所述第二底部为导电结构,且所述第二支撑部在所述基板上的正投影位于所述第二底部在所述基板上的正投影之内,以使得所述第二底部的背离所述基板的表面中未被所述第二支撑部覆盖的部分与所述第四电极电连接;The second isolation structure includes a second bottom portion, the second bottom portion is located between the second supporting portion and the substrate, the second bottom portion is a conductive structure, and the orthographic projection of the second supporting portion on the substrate is located within the orthographic projection of the second bottom portion on the substrate, so that a portion of a surface of the second bottom portion facing away from the substrate and not covered by the second supporting portion is electrically connected to the fourth electrode; 其中,所述第一底部和所述第二底部同层且同材料。Wherein, the first bottom and the second bottom are in the same layer and made of the same material. 14.根据权利要求9所述的显示面板,其特征在于,还包括位于所述基板上的像素界定层,所述像素界定层的至少部分位于所述显示区,且在所述显示区,14. The display panel according to claim 9, further comprising a pixel defining layer located on the substrate, wherein at least a portion of the pixel defining layer is located in the display area, and in the display area, 所述像素界定层包括与所述第二隔离开口分别对应的多个显示像素开口,所述显示像素开口界定所述显示发光器件,且所述显示像素开口与对应所述第二隔离开口连通;The pixel defining layer includes a plurality of display pixel openings respectively corresponding to the second isolation openings, the display pixel openings define the display light emitting device, and the display pixel openings are connected to the corresponding second isolation openings; 优选地,所述像素界定层位于所述显示区和所述测试区,且在所述测试区,所述像素界定层包括与所述第一隔离开口分别对应的多个测试像素开口,所述测试像素开口界定所述测试发光器件,且所述测试像素开口与对应所述第一隔离开口连通;Preferably, the pixel defining layer is located in the display area and the test area, and in the test area, the pixel defining layer includes a plurality of test pixel openings respectively corresponding to the first isolation openings, the test pixel openings define the test light-emitting device, and the test pixel openings are connected to the corresponding first isolation openings; 优选地,所述像素界定层为无机膜层。Preferably, the pixel defining layer is an inorganic film layer. 15.根据权利要求9所述的显示面板,其特征在于,还包括覆盖所述第二隔离结构和所述显示发光器件的第一封装层,所述第一封装层的至少部分位于所述显示区,以及15. The display panel according to claim 9, further comprising a first encapsulation layer covering the second isolation structure and the display light emitting device, wherein at least a portion of the first encapsulation layer is located in the display area, and 在所述显示区中,所述第一封装层包括与所述显示发光器件分别对应的显示封装单元,所述显示封装单元覆盖所述第二隔离开口;In the display area, the first encapsulation layer includes display encapsulation units corresponding to the display light-emitting devices respectively, and the display encapsulation units cover the second isolation openings; 优选地,所述第一封装层的位于所述显示区和所述测试区,在所述测试区中,所述第一封装层还包括与所述测试发光器件分别对应的测试封装单元,所述测试封装单元覆盖所述第一隔离开口。Preferably, the first encapsulation layer is located in the display area and the test area, and in the test area, the first encapsulation layer further comprises test encapsulation units respectively corresponding to the test light-emitting devices, and the test encapsulation units cover the first isolation openings. 16.一种显示面板,其特征在于,包括:16. A display panel, comprising: 基板;Substrate; 多个测试发光器件,位于所述基板上;A plurality of test light emitting devices are located on the substrate; 多个第一隔离结构,位于所述基板上且限定有分别界定所述测试发光器件的多个第一隔离开口,其中,所述第一隔离结构包括彼此相对的第一子隔离结构和第二子隔离结构,所述第一子隔离结构和所述第二子隔离结构都包括第一支撑部和第一冠部,所述第一支撑部在所述基板上的正投影位于所述第一冠部在所述基板上的正投影之内,且在每个所述第一子隔离结构和每个所述第二子隔离结构中,所述第一支撑部的边缘在所述基板上的正投影与所述第一冠部的边缘在所述基板上的正投影的间距为所述第一距离;a plurality of first isolation structures, located on the substrate and defining a plurality of first isolation openings respectively defining the test light-emitting devices, wherein the first isolation structure comprises a first sub-isolation structure and a second sub-isolation structure opposite to each other, the first sub-isolation structure and the second sub-isolation structure both comprise a first support portion and a first crown portion, an orthographic projection of the first support portion on the substrate is located within an orthographic projection of the first crown portion on the substrate, and in each of the first sub-isolation structures and each of the second sub-isolation structures, a distance between an orthographic projection of an edge of the first support portion on the substrate and an orthographic projection of an edge of the first crown portion on the substrate is the first distance; 其中,同一个所述第一隔离结构中的所述第一子隔离结构的所述第一距离和所述第二子隔离结构的所述第一距离相同,且至少两个所述第一隔离结构的第一距离不同。The first distance of the first sub-isolation structure and the first distance of the second sub-isolation structure in the same first isolation structure are the same, and the first distances of at least two first isolation structures are different. 17.根据权利要求16所述的显示面板,其特征在于,在每个所述第一隔离结构中,所述第一子隔离结构的中心和所述第二子隔离结构的中心所确定的线段的平分线为基准线,以及17. The display panel according to claim 16, wherein in each of the first isolation structures, a bisector of a line segment defined by a center of the first sub-isolation structure and a center of the second sub-isolation structure is a reference line, and 至少两个所述第一隔离结构的所述基准线,与平行于所述显示面板所在面的第一方向的夹角不同。The reference lines of at least two of the first isolation structures have different angles with a first direction parallel to the surface where the display panel is located. 18.根据权利要求17所述的显示面板,其特征在于,所述测试发光器件为至少四个,其中,至少两个所述第一隔离结构的所述基准线相对于所述第一方向的夹角相同且具有的所述第一距离不同,至少两个所述第一隔离结构的所述基准线相对于所述第一方向的夹角不同且具有的所述第一距离相同。18. The display panel according to claim 17 is characterized in that there are at least four test light-emitting devices, wherein the reference lines of at least two of the first isolation structures have the same angle with respect to the first direction and have different first distances, and the reference lines of at least two of the first isolation structures have different angles with respect to the first direction and have the same first distances. 19.一种显示面板的制备方法,其特征在于,包括:19. A method for preparing a display panel, comprising: 提供基板;providing a substrate; 在所述基板上形成多个第一电极;forming a plurality of first electrodes on the substrate; 在形成有所述第一电极的所述基板上依次形成第一材料层和第二材料层,并在所述第一材料层和所述第二材料层上形成光刻胶层,所述第二材料层的刻蚀速率小于所述第一材料层的刻蚀速率;Sequentially forming a first material layer and a second material layer on the substrate having the first electrode formed thereon, and forming a photoresist layer on the first material layer and the second material layer, wherein an etching rate of the second material layer is lower than an etching rate of the first material layer; 对所述光刻胶层进行构图工艺,以形成光刻胶图案,其中,所述光刻胶图案包括至少两个第一区域和至少两个第二区域,每个所述第一区域的两侧都分布有所述第二区域,所述第一区域的光刻胶的厚度大于所述第二区域的光刻胶的厚度,且至少两个相邻的所述第二区域的光刻胶的厚度相等,且至少两个所述第二区域的光刻胶的厚度不同;Performing a patterning process on the photoresist layer to form a photoresist pattern, wherein the photoresist pattern includes at least two first regions and at least two second regions, the second regions are distributed on both sides of each of the first regions, the thickness of the photoresist in the first region is greater than the thickness of the photoresist in the second region, the thickness of the photoresist in at least two adjacent second regions is equal, and the thickness of the photoresist in at least two second regions is different; 基于所述光刻胶图案刻蚀所述第一材料层和所述第二材料层,所述第一材料层对应所述第一区域的部分形成为第一支撑部,所述第二材料层对应所述第一区域的部分形成为第一冠部,第一支撑部和第一冠部限定第一隔离开口且构成第一隔离结构,所述第一隔离开口与所述第一电极分别对应,所述第一支撑部在所述基板上的正投影位于所述第一冠部在所述基板上的正投影之内,且所述第一支撑部的边缘在所述基板上的正投影与所述第一冠部的边缘在所述基板上的正投影的间距为第一距离;The first material layer and the second material layer are etched based on the photoresist pattern, a portion of the first material layer corresponding to the first region is formed as a first supporting portion, a portion of the second material layer corresponding to the first region is formed as a first crown portion, the first supporting portion and the first crown portion define a first isolation opening and constitute a first isolation structure, the first isolation openings correspond to the first electrodes respectively, an orthographic projection of the first supporting portion on the substrate is located within an orthographic projection of the first crown portion on the substrate, and a first distance is provided between an orthographic projection of an edge of the first supporting portion on the substrate and an orthographic projection of an edge of the first crown portion on the substrate; 在所述第一隔离开口中形成第一发光功能层和第二电极,同一个所述第一隔离开口中的所述第一电极、所述第一发光功能层和所述第二电极形成测试发光器件;forming a first light-emitting functional layer and a second electrode in the first isolation opening, and forming a test light-emitting device with the first electrode, the first light-emitting functional layer and the second electrode in the same first isolation opening; 其中,与光刻胶厚度越大的所述第二区域相邻的所述第一区域,所对应的所述第一冠部处的所述第一距离越小。The first distance at the first crown corresponding to the first region adjacent to the second region having a larger photoresist thickness is smaller. 20.一种显示装置,其特征在于,包括权利要求1至18中任一项所述的显示面板或者权利要求19所述的制备方法获得的显示面板。20. A display device, characterized by comprising the display panel according to any one of claims 1 to 18 or the display panel obtained by the preparation method according to claim 19.
CN202411004800.0A 2024-07-24 2024-07-24 Display panel, preparation method thereof and display device Pending CN119012839A (en)

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