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CN119012770A - Display panel, preparation method of display panel and display device - Google Patents

Display panel, preparation method of display panel and display device Download PDF

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Publication number
CN119012770A
CN119012770A CN202410949465.5A CN202410949465A CN119012770A CN 119012770 A CN119012770 A CN 119012770A CN 202410949465 A CN202410949465 A CN 202410949465A CN 119012770 A CN119012770 A CN 119012770A
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CN
China
Prior art keywords
layer
electrode
substrate
dielectric
display panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202410949465.5A
Other languages
Chinese (zh)
Inventor
王勇
杨大可
李伟华
毛帅英
范维维
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vicino Technology Co ltd
Hefei Visionox Technology Co Ltd
Original Assignee
Vicino Technology Co ltd
Hefei Visionox Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vicino Technology Co ltd, Hefei Visionox Technology Co Ltd filed Critical Vicino Technology Co ltd
Priority to CN202410949465.5A priority Critical patent/CN119012770A/en
Publication of CN119012770A publication Critical patent/CN119012770A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/805Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

本申请公开了一种显示面板、显示面板的制备方法和显示装置。显示面板包括:基板、发光功能层、第一电极层和第二电极层,发光功能层包括多个间隔设置的发光部;第一电极层包括多个间隔设置的第一电极,第一电极设置于发光部靠近基板的一侧;第二电极层包括多个间隔设置的第二电极,第二电极设置于发光部和第一电极之间,第二电极电连接第一电极和发光部,第二电极靠近第一电极的表面的部分区域与第一电极间隔设置。本申请提供的显示面板可以避免或减小由于电极损伤造成的发光部发光异常。

The present application discloses a display panel, a method for preparing a display panel, and a display device. The display panel includes: a substrate, a light-emitting functional layer, a first electrode layer, and a second electrode layer, wherein the light-emitting functional layer includes a plurality of light-emitting parts arranged at intervals; the first electrode layer includes a plurality of first electrodes arranged at intervals, and the first electrode is arranged on a side of the light-emitting part close to the substrate; the second electrode layer includes a plurality of second electrodes arranged at intervals, and the second electrode is arranged between the light-emitting part and the first electrode, and the second electrode is electrically connected to the first electrode and the light-emitting part, and a part of the surface of the second electrode close to the first electrode is arranged at intervals from the first electrode. The display panel provided by the present application can avoid or reduce the abnormal light emission of the light-emitting part caused by electrode damage.

Description

Display panel, preparation method of display panel and display device
Technical Field
The application relates to the field of display, in particular to a display panel, a preparation method of the display panel and a display device.
Background
Organic light emitting diodes (LIGHT EMITTING DISPLAY, OLED) and display panels based on light emitting diodes (LIGHT EMITTING) and other technologies have been widely used in various consumer electronic products such as mobile phones, televisions, notebook computers, and desktop computers, as they have advantages of high image quality, power saving, thin body, and wide application range. However, in the current manufacturing process of the display panel, the manufacturing steps of part of the functional layers can damage the electrode manufactured in advance, so that the light-emitting part electrically connected with the electrode emits light abnormally, and the display effect of the display panel is reduced.
Disclosure of Invention
The embodiment of the application provides a display panel, a preparation method of the display panel and a display device, aiming at solving the technical problem of abnormal light emission of a light emitting part caused by electrode damage of the related display panel.
An embodiment of a first aspect of the present application provides a display panel, including:
A substrate;
the luminous functional layer comprises a plurality of luminous parts which are arranged at intervals;
the first electrode layer comprises a plurality of first electrodes which are arranged at intervals, and the first electrodes are arranged on one side of the light-emitting part, which is close to the substrate;
The second electrode layer comprises a plurality of second electrodes which are arranged at intervals, the second electrodes are arranged between the light-emitting part and the first electrodes, the second electrodes are electrically connected with the first electrodes and the light-emitting part, and partial areas, close to the surfaces of the first electrodes, of the second electrodes are arranged at intervals with the first electrodes.
According to an embodiment of the first aspect of the present application, the display panel further comprises a dielectric layer including a plurality of spaced dielectric portions, the dielectric portions being located between the first electrode and the second electrode; the dielectric layer includes an insulating material.
According to an embodiment of the first aspect of the present application, the dielectric portion has a first through hole, and the second electrode is connected to the first electrode via hole through the first through hole.
According to an embodiment of the first aspect of the present application, the dielectric portion has a plurality of first through holes.
According to an embodiment of the first aspect of the application, an edge of the orthographic projection of the dielectric portion on the substrate surrounds the orthographic projection of the second electrode on the substrate; or alternatively
The edge of the dielectric portion is aligned with the edge of the second electrode.
According to an embodiment of the first aspect of the application, the projected area of the second electrode on the substrate is smaller than the projected area of the first electrode on the substrate.
According to an embodiment of the first aspect of the application, the orthographic projection of the second electrode on the substrate is located within the orthographic projection area of the first electrode on the substrate.
According to an embodiment of the first aspect of the present application, the display panel further includes:
and a pixel defining layer disposed on one side of the substrate, the pixel defining layer covering a portion of the surface of the first electrode and having a pixel opening exposing another portion of the surface of the first electrode, at least a portion of the second electrode and at least a portion of the light emitting portion being disposed within the pixel opening.
According to an embodiment of the first aspect of the application, the pixel defining layer comprises an inorganic material.
According to an embodiment of the first aspect of the application, the wall surface of the pixel opening is spaced apart from the edge of the second electrode in a direction parallel to the substrate.
According to an embodiment of the first aspect of the present application, a first gap is formed between the wall surface of the pixel opening and the second electrode, and a portion of the light emitting portion is disposed in the first gap.
According to an embodiment of the first aspect of the application, the pixel defining layer is spaced between adjacent first electrodes.
According to an embodiment of the first aspect of the present application, the display panel further includes a dielectric layer including a plurality of spaced dielectric portions between the first electrode and the second electrode, the dielectric portions being in contact with the wall surfaces of the pixel openings.
According to an embodiment of the first aspect of the application, a portion of the dielectric portion is located between the wall surface of the pixel opening and the edge of the first electrode.
According to an embodiment of the first aspect of the application, the dielectric layer and the pixel defining layer are of the same material.
According to an embodiment of the first aspect of the present application, the display panel further includes:
The isolation structure is arranged on one side of the pixel limiting layer, which is away from the substrate, and the isolation structure encloses a plurality of isolation openings which are communicated with the pixel openings.
According to an embodiment of the first aspect of the application, the orthographic projection of the pixel opening on the substrate is located within the orthographic projection range of the isolation opening on the substrate.
According to an embodiment of the first aspect of the application, the light emitting functional layer is at least partially arranged within the isolation opening.
According to an embodiment of the first aspect of the present application, a display panel includes:
and the third electrode is positioned on one side of the light-emitting part, which is away from the substrate.
According to an embodiment of the first aspect of the application, the isolation structure comprises a conductive structure, and the edge of the third electrode overlaps the conductive structure.
According to an embodiment of the first aspect of the present application, the isolation structure comprises a first portion and a second portion which are stacked, the first portion is disposed on a side of the second portion, which is close to the substrate, and an orthographic projection of the first portion on the substrate is located in an orthographic projection of the second portion on the substrate;
according to an embodiment of the first aspect of the application, the orthographic projection area of the surface of the second portion facing away from the substrate on the substrate is smaller than the orthographic projection area of the surface of the second portion facing closer to the substrate on the substrate;
according to an embodiment of the first aspect of the application, the orthographic projection area of the surface of the first portion facing away from the substrate on the substrate is smaller than the orthographic projection area of the surface of the second portion facing closer to the substrate on the substrate.
According to an embodiment of the first aspect of the application, the cross-sectional area of the second electrode is constant or gradually increases in a direction away from the substrate.
According to an embodiment of the first aspect of the present application, the second electrode comprises a plurality of conductive layers, which are stacked in sequence in a direction away from the substrate.
According to an embodiment of the first aspect of the application, the orthographic projection of the conductive layer close to the substrate in the adjacent conductive layer is located within the orthographic projection of the conductive layer far from the substrate in the substrate.
According to an embodiment of the first aspect of the present application, the plurality of conductive layers includes a first conductive layer, a second conductive layer, and a third conductive layer, which are sequentially stacked in a direction away from the substrate.
According to an embodiment of the first aspect of the application, the second conductive layer is a metal layer.
According to an embodiment of the first aspect of the application, the first conductive layer and the third conductive layer are doped metal oxide layers.
According to an embodiment of the first aspect of the present application, the second electrode comprises a first conductive layer, a second conductive layer and a third conductive layer stacked in sequence in a direction away from the substrate, and the first electrode comprises a fourth conductive layer, a fifth conductive layer and a sixth conductive layer stacked in sequence in a direction away from the substrate;
according to an embodiment of the first aspect of the application, the first conductive layer and the fourth conductive layer are of the same material.
According to an embodiment of the first aspect of the application, the second conductive layer and the fifth conductive layer are of the same material.
According to an embodiment of the first aspect of the application, the third conductive layer and the sixth conductive layer are of the same material.
An embodiment of a second aspect of the present application provides a display panel including:
a substrate including a pixel driving circuit;
the first electrode layer is arranged on one side of the substrate and comprises a plurality of first electrodes arranged at intervals, and the first electrodes are electrically connected with the pixel circuit;
the pixel limiting layer is arranged on one side of the first electrode layer, which is far away from the substrate, and comprises a plurality of pixel openings, and the pixel openings expose part of the surface of the corresponding first electrode;
The dielectric layer comprises a plurality of dielectric parts at intervals, and the dielectric parts are positioned in the corresponding pixel openings and are contacted with the wall surfaces of the pixel openings; the dielectric layer comprises an insulating material;
The second electrode layer comprises a plurality of second electrodes which are arranged at intervals, the second electrodes are arranged on one side of the corresponding medium parts, which is far away from the substrate, and the second electrodes are electrically connected with the corresponding first electrodes;
The light-emitting functional layer comprises a plurality of light-emitting parts, and the light-emitting parts are positioned on one side of the corresponding second electrode far away from the substrate.
According to an embodiment of the second aspect of the present application, the dielectric portion has a first through hole, and the second electrode is connected to the first electrode via hole through the first through hole.
According to an embodiment of the second aspect of the present application, the dielectric portion has a plurality of first through holes.
An embodiment of a third aspect of the present application provides a method for manufacturing a display panel, including the steps of:
Providing a substrate;
Forming a first electrode layer on one side of the substrate, wherein the first electrode layer comprises a plurality of first electrodes arranged at intervals;
Forming a pixel defining layer on one side of the substrate, the pixel defining layer covering a portion of the surface of the first electrode and having a pixel opening exposing another portion of the surface of the first electrode;
Forming a dielectric forming layer on one side of the substrate, wherein the dielectric forming layer is positioned on one side of the pixel defining layer away from the substrate and one side of the first electrode away from the substrate;
Forming a second electrode forming layer on one side of the dielectric forming layer away from the substrate;
Patterning the second electrode forming layer and the dielectric forming layer to obtain a plurality of second electrodes arranged at intervals and a plurality of dielectric parts arranged at intervals, wherein the dielectric parts are positioned between the first electrodes and the second electrodes;
And forming a light-emitting functional layer on one side of the second electrode, which is away from the substrate, wherein the light-emitting functional layer comprises a plurality of light-emitting parts, at least part of the light-emitting parts are positioned in the pixel openings, the second electrode is arranged between the light-emitting parts and the first electrode, and the second electrode is electrically connected with the first electrode and the light-emitting parts.
According to an embodiment of the third aspect of the present application, patterning the second electrode forming layer and the dielectric forming layer to obtain a plurality of second electrodes arranged at intervals and a plurality of dielectric portions arranged at intervals, includes:
A first mask layer is arranged on one side, away from the substrate, of the second electrode forming layer, and the first mask layer covers part of the second electrode forming layer;
etching the second electrode forming layer by taking the first mask layer as a mask to form a plurality of second electrodes;
Etching the dielectric forming layer by taking the first mask layer as a mask to form a plurality of dielectric parts;
according to an embodiment of the third aspect of the present application, before forming the light emitting functional layer on a side of the second electrode facing away from the substrate, the light emitting functional layer includes:
And removing the first mask layer.
According to an embodiment of the third aspect of the present application, etching the second electrode forming layer with the first mask layer as a mask, to form a plurality of second electrodes includes:
and carrying out wet etching treatment on the second electrode forming layer by taking the first mask layer as a mask to obtain a plurality of second electrodes, wherein the orthographic projection of the second electrodes on the substrate is positioned in the orthographic projection of the first mask layer on the substrate.
According to an embodiment of the third aspect of the present application, etching the dielectric forming layer with the first mask layer as a mask, to form a plurality of dielectric portions includes:
And carrying out dry etching treatment on the dielectric forming layer by taking the first mask layer as a mask to obtain a plurality of dielectric parts, wherein the orthographic projection of the dielectric parts on the substrate overlaps with the orthographic projection of the first mask layer on the substrate.
According to an embodiment of the third aspect of the present application, before forming the dielectric forming layer on one side of the substrate, the method further includes;
and forming an isolation structure on one side of the substrate, wherein the isolation structure encloses a plurality of isolation openings, and the orthographic projection of the isolation openings on the substrate at least partially overlaps with the orthographic projection of the first electrode on the substrate.
According to an embodiment of the third aspect of the present application, in the step of forming the dielectric forming layer on the one side of the substrate, the dielectric forming layer covers the isolation structure, the pixel defining layer, and the first electrode.
According to an embodiment of the third aspect of the present application, forming a pixel defining layer on one side of a substrate includes:
Sequentially forming a pixel defining formation layer and an isolation structure formation layer on one side of a substrate;
Patterning the isolation structure forming layer to obtain an isolation structure, wherein the isolation structure surrounds a plurality of isolation openings, and the part of the pixel limiting forming layer is exposed from the isolation openings;
And patterning the pixel limiting layer through the isolation opening to obtain the pixel limiting layer.
According to an embodiment of the third aspect of the present application, patterning the pixel defining layer through the isolation opening to obtain the pixel defining layer includes:
a second mask layer is arranged on one side of the isolation structure, which is away from the substrate;
And carrying out dry etching treatment on the pixel limiting forming layer by taking the second mask layer as a mask until at least part of the first electrode is exposed from the pixel opening.
According to an embodiment of the third aspect of the present application, before forming the dielectric forming layer on one side of the substrate, the method includes:
And removing the second mask layer.
An embodiment of a fourth aspect of the present application provides a method for manufacturing a display panel, including the steps of:
Providing a substrate;
Forming a first electrode layer on one side of the substrate, wherein the first electrode layer comprises a plurality of first electrodes arranged at intervals;
Forming a first protective layer on one side of the first electrode, which is away from the substrate;
Forming a pixel defining formation layer on one side of the substrate, the pixel defining formation layer covering the first protective layer;
Patterning the pixel defining layer to obtain a pixel defining layer with a pixel opening, wherein the pixel defining layer covers part of the surface of the first electrode and is provided with the pixel opening exposing the first protective layer;
Removing the first protective layer, forming a light-emitting functional layer on one side of the second electrode, which is away from the substrate, wherein the light-emitting functional layer comprises a plurality of light-emitting parts, and at least part of the light-emitting parts are positioned in the pixel openings and are overlapped with the first electrode; the first protective layer includes an organic material.
According to an embodiment of the fourth aspect of the application, the first protective layer comprises a photoresist.
An example of a fifth aspect of the present application provides a display device comprising a display panel according to any of the above embodiments, or a display panel prepared by a method according to any of the above embodiments.
According to the display panel, the preparation method of the display panel and the display device, the second electrode layer is electrically connected with the light-emitting part, so that the second electrode layer replaces the first electrode layer to be directly contacted with the light-emitting part, abnormal light emission of the light-emitting part caused by the first electrode damaged by the preparation process is reduced or avoided, the light-emitting stability of the light-emitting part is improved, and the display effect of the display panel is improved.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading the following detailed description of non-limiting embodiments, taken in conjunction with the accompanying drawings, in which like reference characters designate the same or similar features, and in which the figures are not to scale.
FIG. 1 is a partial cross-sectional view of a display panel according to an embodiment of the present application;
FIG. 2 is a partial cross-sectional view of a display panel according to an embodiment of the present application;
FIG. 3 is a partial cross-sectional view of a display panel according to an embodiment of the present application;
FIG. 4 is a partial cross-sectional view of a display panel according to an embodiment of the present application;
FIG. 5 is a partial cross-sectional view of a display panel according to an embodiment of the present application;
FIG. 6 is a partial plan view of a display panel according to an embodiment of the present application;
FIG. 7 is a cross-sectional view of a second electrode in an embodiment of the application;
FIG. 8 is a flowchart of a method for manufacturing a display panel according to an embodiment of the present application;
FIG. 9 is a process diagram of a method for manufacturing a display panel according to an embodiment of the present application;
FIG. 10 is a process diagram of a method for manufacturing a display panel according to an embodiment of the present application;
FIG. 11 is a process diagram of a method for manufacturing a display panel according to an embodiment of the present application;
FIG. 12 is a flowchart of a method for manufacturing a display panel according to another embodiment of the present application;
FIG. 13 is a process diagram of a method for manufacturing a display panel according to another embodiment of the present application;
Fig. 14 is a process diagram of a method for manufacturing a display panel according to another embodiment of the present application.
Reference numerals illustrate:
1. A substrate; 11. a substrate; 13. an array substrate; 2. an isolation structure; 21. a first portion; 22. a second portion; 23. an isolation opening; 3. a light-emitting functional layer; 31. a light emitting section; 4. a first electrode layer; 41. a first electrode; 5. a second electrode layer; 51. a second electrode; 511. a first conductive layer; 512. a second conductive layer; 513. a third conductive layer; 6. a dielectric layer; 61. a medium section; 7. a third electrode; 8. a pixel defining layer; 81. a pixel opening; 82. a first gap;
x, a first direction; y, second direction; z, third direction.
Detailed Description
Features and exemplary embodiments of various aspects of the present application will be described in detail below, and in order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be described in further detail below with reference to the accompanying drawings and the detailed embodiments. It should be understood that the specific embodiments described herein are merely configured to illustrate the application and are not configured to limit the application. It will be apparent to one skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the application by showing examples of the application.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
It will be understood that when a layer, an area, or a structure is described as being "on" or "over" another layer, another area, it can be referred to as being directly on the other layer, another area, or another layer or area can be included between the layer and the other layer, another area. And if the component is turned over, that layer, one region, will be "under" or "beneath" the other layer, another region.
In the manufacturing process of the display panel, the light emitting functional layer may be manufactured by providing an isolation structure having an isolation opening so that light emitting parts for emitting light of different colors in the light emitting functional layer are isolated by the isolation structure. The etching process is involved in the preparation process of forming the functional layers such as the isolation structure, the pixel limiting layer and the like, and the etching process can cause electrode etching damage for corresponding connection with the light-emitting part, so that the work function of the electrode corresponding to the light-emitting part prepared later is reduced, the efficiency of the light-emitting part prepared later is reduced, the service life of the light-emitting part prepared later is shortened, and the display effect of the display panel is reduced.
In order to solve the above-described problems, embodiments of the present application provide a display panel and a display device, and embodiments of the display panel and the display device will be described below with reference to the accompanying drawings.
The embodiment of the application provides a display panel, a manufacturing method of the display panel and a display device, and in the following, each embodiment of the display panel, the manufacturing method of the display panel and the display device will be described with reference to fig. 1 to 14.
Referring to fig. 1 and 2, the present application provides a display panel, which includes a substrate 1, an isolation structure 2, a light emitting functional layer 3, a first electrode layer 4 and a second electrode layer 5, wherein the light emitting functional layer 3 includes a plurality of light emitting parts 31 arranged at intervals; the first electrode layer 4 includes a plurality of first electrodes 41 disposed at intervals, and the first electrodes 41 are disposed on one side of the light emitting portion 31 near the substrate 1; the second electrode layer 5 includes a plurality of second electrodes 51 disposed at intervals, the second electrodes 51 being disposed between the light emitting portion 31 and the first electrode 41, the second electrodes 51 electrically connecting the first electrode 41 and the light emitting portion 31, and a partial region of the second electrodes 51 near the surface of the first electrode 41 being disposed at intervals from the first electrode 41.
The embodiment of the application provides a display panel which can be based on an Organic LIGHT EMITTING Diode (OLED) technology.
The substrate 1 may provide not only the supporting force for the first electrode layer 4 but also the electrical signal for the first electrode 41. There are various ways of disposing the substrate 1. In some embodiments, the substrate 1 may include a substrate 11 and an array substrate 12 disposed on the substrate 11, and the array substrate 12 may include a pixel driving circuit, a plurality of patterned conductive layers disposed in a stacked manner, and the like. The pixel driving circuit provided to the array substrate 12 includes a transistor and a storage capacitor, for example. The transistor includes an active layer, a gate, a drain, and a source. The storage capacitor includes a first plate and a second plate.
As will be appreciated by those skilled in the art, in order to realize that the display panel emits light of different colors, light emitting portions 31 emitting different colors are provided. The light emitting part 31 for emitting different colors in the present application includes a first light emitting part, a second light emitting part and a third light emitting part, wherein "first" and "second" are used only for distinction, and the light emitting functional layer 3 is not necessarily required or suggested to be composed of the light emitting parts 31 of three colors of the first light emitting part, the second light emitting part and the third light emitting part in the present application, and the present application may further include the light emitting part 31 for emitting fourth, fifth. The wavelengths of the light waves emitted by the first light emitting portion 31, the second light emitting portion, and the third light emitting portion are different, and it can be understood that the colors of the first color light emitted by the first light emitting portion, the second color light emitted by the second light emitting portion, and the third color light emitted by the third light emitting portion are different. The first, second and third light emitting parts may be used to emit red, green and blue light, respectively.
The first electrode 41 and the second electrode 51 are disposed on a side of the light emitting portion 31 near the substrate 1, the first electrode 41 may be electrically connected to the driving circuit layer, and the second electrode 51 may be electrically connected to the first electrode 41 and the light emitting portion 31, so that the driving circuit layer may provide an electrical signal to the first electrode 41, which may be transmitted to the light emitting portion 31 through the first electrode 41 and the second electrode 51, thereby driving the light emitting portion 31 to emit light. The second electrode 51 may be an anode or a cathode of the light emitting portion 31.
The materials and structures of the first electrode 41 and the second electrode 51 may be uniform. The first electrode 41 and the second electrode 51 may be independently selected from a doped metal oxide electrode, a metal elemental electrode, a graphene electrode, a carbon nanotube electrode, an alloy electrode, or a composite electrode. The material of the doped metal oxide electrode may include, but is not limited to, one or more of indium doped tin oxide (ITO), fluorine doped tin oxide (FTO), antimony doped tin oxide (ATO), aluminum doped zinc oxide (AZO), gallium doped zinc oxide (GZO), indium doped zinc oxide (IZO), magnesium doped zinc oxide (MZO), aluminum doped magnesium oxide (AMO), cadmium doped zinc oxide. The material of the elemental metal electrode may include, but is not limited to, one or more of silver (Ag), magnesium (Mg), aluminum (Al), gold (Au), gallium (Ga), nickel (Ni), platinum (Pt), iridium (Ir), copper (Cu), molybdenum (Mo), calcium (Ca), barium (Ba). Alloy electrodes include, but are not limited to, au: mg alloy electrodes or Ag: mg alloy electrodes.
In the manufacturing process, the first electrode layer 4 may be manufactured first, then the manufacturing step of the lossy first electrode 41 may be performed, and then the second electrode layer 5 may be manufactured. Since the second electrode layer 5 is not yet provided during the preparation step of the lossy first electrode 41, the second electrode layer 5 can avoid damage caused by the preparation step of the lossy first electrode 41.
After the first electrode layer 4 is prepared, a protective material may be disposed to cover the display panel to be prepared, before the second electrode layer 5 is prepared, so as to protect a partial region of the display panel to be prepared. The conductive material used for preparing the second electrode layer 5 covers the side of the protective material facing away from the substrate 1, so that after eluting the protective material or leaving the protective material, a partial area of the second electrode 51 close to the surface of the first electrode 41 is provided spaced apart from the first electrode 41.
In the scheme of the application, the second electrode layer 5 is electrically connected with the light-emitting part 31, so that the second electrode layer 5 replaces the first electrode layer 4 to be directly contacted with the light-emitting part 31, abnormal light emission of the light-emitting part 31 caused by the first electrode 41 damaged by the preparation process is reduced or avoided, the light-emitting stability of the light-emitting part 31 is improved, and the display effect of the display panel is improved.
Referring to fig. 3 in combination, in some embodiments, the display panel further includes a dielectric layer 6, the dielectric layer 6 includes a plurality of spaced dielectric portions 61, the dielectric portions 61 are located between the first electrode 41 and the second electrode 51, and the dielectric layer 6 includes an insulating material.
The material of the dielectric layer 6 is different from that of the second electrode 51, and the dielectric layer 6 may be entirely or partially made of an insulating material. The dielectric portion 61 is disposed between the first electrode 41 and the second electrode 51, so that the dielectric layer 6 is used as the protecting material to protect the functional layer on the side close to the substrate 1 during the process of preparing the second electrode 51, so that the damage of part of the functional layer in the display panel caused by the process of preparing the second electrode 51 is reduced or avoided, and the quality of the display panel is improved. For example: in fig. 3, the dielectric layer 6 may be coated on the first electrode 41, and the material used to prepare the dielectric layer 6 may be laid over the entire surface to cover other structures than the first electrode 41.
In some embodiments, the dielectric portion 61 has a first via 62, and the second electrode 51 is via-connected to the first electrode 41 through the first via 62.
The first electrode 41 and the second electrode 51 are insulated by the dielectric layer 6, and by providing the first through hole 62, the first electrode 41 and the second electrode 51 can be electrically connected.
Referring to fig. 4 in combination, in some embodiments, the dielectric portion 61 has a plurality of first through holes 62.
In order to improve the path for electrically connecting the first electrode 41 and the second electrode 51, a plurality of first through holes 62 may be provided in the same dielectric portion 61, and the first electrode 41 and the second electrode 51 may be connected via the plurality of first through holes 62, thereby improving the stability of the electrical connection between the first electrode 41 and the second electrode 51.
In some embodiments, the edge of the orthographic projection of the dielectric portion 61 on the substrate 1 surrounds the orthographic projection of the second electrode 51 on the substrate 1.
In the present application, the orthographic projection onto the substrate 1 is, unless otherwise specified, a projection onto the substrate 1 along the first direction X, which may be the thickness direction of the display panel or the direction from the substrate 1 to the light emitting portion 31.
The edge of the orthographic projection of the dielectric portion 61 on the substrate 1 corresponds to the outer edge of the dielectric portion 61. The edge of the orthographic projection of the dielectric portion 61 on the substrate 1 surrounds the orthographic projection of the second electrode 51 on the substrate 1, i.e. the surface of the dielectric portion 61 facing away from the substrate 1 and/or the surface adjacent to the substrate 1 is larger than the surface of the second electrode facing away from the substrate 1 and the surface adjacent to the substrate 1. Since the material for forming the dielectric layer 6 is first set, then the material for forming the second electrode layer 5 is set, and patterning is performed again, the dielectric portion 61 and the second electrode 51 are spaced apart, so that the orthographic projection of the outer edge of the formed dielectric portion 61 surrounds the orthographic projection of the second electrode 51.
Referring to fig. 5, in some embodiments, an edge of the dielectric portion 61 is aligned with an edge of the second electrode 51.
In obtaining the dielectric portion 61 and the second electrode 51, by adjusting the patterning process, it may be obtained that the edge of the dielectric portion 61 is aligned with the edge of the second electrode 51, i.e., the edge of the dielectric portion 61 and the edge of the second electrode 51 may be spliced to form a smooth surface extending in the first direction X.
Referring to fig. 1, 2 and 3 in combination, in some embodiments, the display panel further includes a pixel defining layer 8, the pixel defining layer 8 is disposed on one side of the substrate 1, the pixel defining layer 8 covers a portion of the surface of the first electrode 41, the pixel defining layer 8 has a pixel opening 81 exposing another portion of the surface of the first electrode 41, and at least a portion of the second electrode 51 and at least a portion of the light emitting portion 31 are located in the pixel opening 81.
In this embodiment, the pixel defining layer 8 is disposed on the substrate 1 and includes a pixel opening 81, and the light emitting functional layer 3 is at least partially disposed in the pixel opening 81, so as to implement light emitting display of the display panel. The pixel defining layers 8 are spaced between adjacent light emitting portions 31 to avoid or reduce the occurrence of a series flow between adjacent light emitting portions 31.
In some embodiments, the pixel defining layer 8 comprises an inorganic material.
When the pixel defining layer 8 is entirely or partially made of an inorganic material, an inorganic material for preparing the pixel defining layer 8 is formed on one side of the substrate 1, and the inorganic material is dry etched to obtain the pixel opening 81 exposing the first electrode 41. Etching damage is easily generated to the first electrode 41 previously prepared during the dry etching. By electrically connecting the first electrode layer 4 and the light emitting portion 31 with the second electrode 51 prepared later, abnormal light emission of the light emitting portion 31 caused by the first electrode 41 damaged by etching is reduced or avoided.
In some embodiments, the wall surface of the pixel opening 81 is spaced apart from the edge of the second electrode 51 in a direction parallel to the substrate 1.
The direction parallel to the substrate 1 may be a second direction Y perpendicular to the first direction X, and adjacent first electrodes 41 may be spaced apart along the second direction Y.
At least part of the second electrodes 51 is disposed within the pixel openings 81, and the pixel defining layer 8 is spaced between adjacent second electrodes 51 to avoid cross-talk between adjacent second electrodes 51. Adjacent second electrodes 51 are spaced apart by the pixel defining layer 8 so that a plurality of second electrodes 51 may form dot electrodes, realizing that the driving circuit layer controls the respective light emitting parts 31 to emit light, respectively.
The wall surface of the pixel opening 81 and the edge of the second electrode 51 may be additionally formed in any structure of the display panel by using a manufacturing process, or may be manufactured by selecting a gap manufacturing process according to need. For example: in the process of manufacturing the display panel, the first electrode 41 and the pixel defining layer 8 are manufactured, the material for forming the dielectric layer 6 and the material for forming the second electrode layer 5 are sequentially arranged on the side, away from the substrate 1, of the first electrode 41 and the pixel defining layer 8, and patterning processing is performed to obtain the dielectric portion 61 and the second electrode 51 which are spaced. I.e. the material used to form the dielectric layer 6 is spaced between the pixel defining layer 8 and the material used to form the second electrode layer 5 such that the walls of the formed pixel openings 81 are spaced from the edges of the second electrode 51.
In some embodiments, a first gap 82 is formed between the wall surface of the pixel opening 81 and the second electrode 51, and a portion of the light emitting portion 31 is disposed in the first gap 82.
In the case where the first gap has been formed, when the material for forming the light emitting portion 31 is provided in the pixel opening 81, a part of the material falls into the first gap 82, so that a part of the light emitting portion 31 formed is provided in the first gap 82.
In some embodiments, the pixel defining layer 8 is spaced between adjacent first electrodes 41.
At least part of the first electrodes 41 is disposed within the pixel openings 81, and the pixel defining layer 8 is spaced between adjacent first electrodes 41 to avoid cross-talk between adjacent first electrodes 41.
In some embodiments, the dielectric portion 61 is in contact with the wall surface of the pixel opening 81, so that the dielectric portion 61 is connected stably with the pixel defining layer 8.
In some embodiments, the dielectric layer 6 is the same material as the pixel defining layer 8 to simplify the manufacturing steps. Optionally, the dielectric layer 6 and the pixel defining layer 8 are SiNx. The dielectric layer 6 and the pixel defining layer 8 may be prepared by plasma enhanced chemical vapor deposition (PLASMA ENHANCED CHEMICAL vapor deposition (PECVD)).
In some embodiments, the display panel further comprises an isolation structure 2, the isolation structure 2 being located on a side of the pixel defining layer 8 facing away from the substrate 1, the isolation structure 2 enclosing a plurality of isolation openings 23, the isolation openings being in communication with the pixel openings 81.
The isolation structure 2 may be directly arranged on the side of the pixel defining layer 8 facing away from the substrate 1, the isolation structure 2 being supported by the pixel defining layer 8. The isolation structure 2 encloses to form an isolation opening 23 to define the arrangement range of the light emitting function layer 3. The number of the isolation openings 23 may be one-to-one with the number of the light emitting portions 31, and in the case where the light emitting functional layer 3 has a plurality of light emitting portions 31, the plurality of isolation openings 23 may include openings one-to-one with the plurality of light emitting portions 31.
In some embodiments, the front projection of the pixel opening 81 on the substrate 1 is within the front projection range of the isolation opening 23 on the substrate 1. The area of the isolation opening 23 is larger than that of the pixel opening 81, so that the influence of the isolation structure 2 on the light emitting visual angle of the light emitting functional layer 3 can be reduced.
In some embodiments, the light emitting functional layer 3 is at least partially disposed within the isolation opening 23.
The isolation structures 2 may be spaced between the individual light emitting portions 31 to avoid or reduce the occurrence of cross-flow between adjacent light emitting portions 31.
In some embodiments, the display panel includes a third electrode 7, the third electrode 7 being located at a side of the light emitting portion 31 facing away from the substrate 1.
The plurality of third electrodes 7 form a plurality of dot electrodes so that different electrical signals can be input to the plurality of third electrodes 7 to control whether the light emitting portion 31 in contact with the third electrodes 7 emits light and the light emitting period.
One of the second electrode 51 and the third electrode 7 may serve as an anode electrode, and the other may serve as a cathode electrode. The second electrode 51, the light emitting functional layer 3 and the third electrode 7 may be sequentially stacked in contact to realize electrical conduction of the second electrode 51, the light emitting functional layer 3 and the third electrode 7. Alternatively, the second electrode 51 is an anode electrode and the third electrode 7 is a cathode electrode.
In some embodiments, the isolation structure 2 comprises a conductive structure 25, and the edge of the third electrode 7 overlaps the conductive structure 25.
The edge of the third electrode 7 is overlapped with the conductive structure 25, so that the conductive structure 25 can supply power to the third electrode 7, and meanwhile, the adjacent third electrode 7 can be conductive, so that a whole-surface conductive surface electrode is formed, and a control circuit of the display panel is simplified.
In some embodiments, the isolation structure 2 comprises a first portion 21 and a second portion 22 arranged in a stack, the first portion 21 being arranged on a side of the second portion 22 close to the substrate 1, and an orthographic projection of the first portion 21 on the substrate 1 being located within an orthographic projection of the second portion 22 on the substrate 1.
The isolation structure 2 comprises a first portion 21 and a second portion 22 which are arranged in a stacked manner, and the orthographic projection of the first portion 21 on the substrate 1 is located in the orthographic projection of the second portion 22 on the substrate 1, so that the cross-sectional area of one end of the isolation structure 2 away from the substrate 1 is larger, and the cross-sectional area of one end of the isolation structure 2 close to the substrate 1 is smaller. The second portion 22 completely shields the first portion 21 in the direction from the isolation structure 2 to the substrate 1.
Referring to fig. 6 in combination, in an alternative embodiment, the isolation structure 2 extends in a grid shape along a third direction Z and a second direction Y, and the third direction Z and the second direction Y intersect.
The isolation structure 2 is in a grid shape, that is, the isolation structure 2 extends in the third direction Z and the second direction Y, the portion extending in the third direction Z and the portion extending in the second direction Y are cross-connected with each other, so as to form a plurality of grid spaces, the first electrode 41, the second electrode 51, and the light emitting portion 31 may be exposed from the grid spaces, and the third electrode 7 may be located in the grid spaces.
The first portion 21 and the second portion 22 may be integrally formed, and the first portion 21 and the second portion 22 may be laminated structures made of the same material or different materials.
Since the second portion 22 shields the first portion 21, the light emitting material a for preparing the light emitting portion 31 has a large drop at the edge of the second portion 22, and the light emitting material a falling in the limiting opening and the light emitting material a falling on the second portion 22 are difficult to connect, so that breakage occurs, forming the light emitting material a spaced in the adjacent isolation opening 23. The luminescent material a falling on the second portion 22, and the luminescent material a falling in the other isolation openings 23 except for the desired isolation opening 23 may be removed as needed to obtain the first light emitting portion 31 located in the isolation opening 23. And so on, the light emitting parts 31 capable of emitting light of different colors are sequentially prepared until the light emitting functional layer 3 having the plurality of light emitting parts 31 is prepared.
Therefore, compared with the preparation of the light emitting functional layer 3 by the mask evaporation in the related art, the present application can prepare the light emitting portion 31 in the isolation opening 23 without using the mask by providing the first portion 21 and the second portion 22, thereby saving the cost of preparing the mask. Compared with the method for preparing the mask plate with high precision, the method for directly preparing the isolation structure 2 with high precision is easier to realize, so that the structure of the display panel provided by the application has low requirements on the preparation process, and the prepared display panel has good consistency.
In some embodiments, the orthographic projection area of the surface of the second portion 22 facing away from the substrate 1 on the substrate 1 is smaller than the orthographic projection area of the surface of the second portion 22 facing closer to the substrate 1 on the substrate 1.
The second portion 22 extends outwards a predetermined distance with respect to the first portion 21, i.e. the area of the orthographic projection of the surface of the second portion 22 facing away from the substrate 1 on the substrate 1 is smaller than the area of the orthographic projection of the surface of the second portion 22 facing away from the substrate 1 on the substrate 1, such that the second portion 22 has an inclined ramp structure in order to define the pattern of the light emitting functional layer 3 by the second portion 22.
In some embodiments, the cross-sectional area of the second portion 22 gradually decreases in a direction away from the substrate 1.
Optionally, the cross section of the second portion 22 is trapezoidal with the bottom side facing the substrate 1, so that the second portion 22 has a sloped surface, which facilitates the breaking of the preparation material at the partition edge, forming a part of the preparation material on the second portion 22 and a part of the preparation material on the state of the partition opening 23.
In some embodiments, the orthographic projection area of the surface of the first portion 21 facing away from the substrate 1 on the substrate 1 is smaller than the orthographic projection area of the surface of the second portion 222 facing closer to the substrate 1 on the substrate 1.
In some alternative embodiments, the orthographic projection area of the surface of the second portion 22 facing the substrate 1 on the substrate 1 is larger than the orthographic projection area of the surface of the first portion 21 facing away from the substrate 1 on the substrate 1. I.e. the second portion 22 extends outwardly with respect to the first portion 21 to limit the pattern of the light emitting functional layer 3 by the second portion 22. The second portion 22 has an area larger than that of the first portion 21 and is disposed so as to entirely cover the first portion 21, and the first portion 21 is recessed with respect to the second portion 22 in a direction away from the isolation opening 23. When the light emitting portion 31 is prepared, the light emitting portion 31 generates a large drop at the edge of the isolation structure 2, and the first portion 21 is concavely disposed, and the light emitting portion 31 is difficult to connect outside the isolation structure 2, so that breakage is found, and the light emitting portion 31 isolated from each other is formed.
In some alternative embodiments, the cross-section of the first portion 21 is trapezoidal in a direction perpendicular to the plane of the substrate 1.
When the cross section of the first portion 21 is trapezoidal, on the one hand, the second portion 22 can be stably supported, and on the other hand, the contact surface area between one end of the first portion 21, which is away from the substrate 1, and the second portion 22 is smaller, so that the first portion 21 is concavely arranged relative to the second portion 22 in the direction away from the central axis of the isolation opening 23, and the light-emitting functional layer 3 is conveniently disconnected at the position of the isolation structure 2.
In these alternative embodiments, in order to obtain the first portion 21 arranged concave, during etching, the end of the first portion 21 facing away from the substrate 1 has a faster etching rate than the end of the first portion 21 facing towards the substrate 1, so that the concave first portion 21 is formed. Since the etching rate of the end of the first portion 21 facing away from the substrate 1 is faster, the waste generated by etching is more likely to enter other positions of the display panel, thereby causing adverse effects. The surface of the first part 21 facing away from the substrate 1 is arranged on the front projection of the substrate 1, the surface of the first part 21, which is close to the substrate 1, is arranged in the front projection of the substrate 1, so that one end of the first part 21 facing away from the substrate 1 can be well supported on one end of the first part 21, which is close to the substrate 1, and generated etching waste falls on one end of the first part 21, which is close to the substrate 1, and cleaning is facilitated.
Referring to fig. 7 in combination, in some embodiments, the cross-sectional area of the second electrode 51 is constant or gradually increases in a direction away from the substrate 1.
The cross-sectional area of the second electrode 51 is unchanged, i.e. the orthographic projection of the surface of the second electrode 51 facing away from the substrate 1 on the substrate 1 overlaps with the orthographic projection of the surface of the second electrode 51 adjacent to the substrate 1 on the substrate 1, the side surfaces of the second electrode 51 extending in a direction facing away from the substrate 1. The cross-sectional area of the second electrode 51 increases gradually, i.e. the orthographic projection of the second electrode 51 on the substrate 1 near the surface of the substrate 1 is located in the orthographic projection of the surface of the second electrode 51 facing away from the substrate 1 on the substrate 1.
In the process of preparing the second electrode 51 and the dielectric layer 6, the second electrode 51 may be obtained by patterning, the side surface of the second electrode 51 does not have a flat surface, the dielectric portion 61 may be obtained by dry etching later, and in the process of forming the dielectric portion 61, the side surface of the second electrode 51 is trimmed, so that the side surface of the second electrode 51 extends in a direction away from the substrate 1, thereby improving the electrode work function of the second electrode 51.
In some embodiments, the second electrode 51 includes a plurality of conductive layers stacked in sequence in a direction away from the substrate 1.
In some embodiments, the orthographic projection of the conductive layer near the substrate 1 on the substrate 1 is located within the orthographic projection of the conductive layer far from the substrate 1 on the substrate 1, among the adjacent conductive layers.
The second electrode 51 is a composite electrode, and the adjacent conductive layers can be made of different materials. The adjacent conductive layers can be formed together by etching, so that the orthographic projection of the conductive layer close to the substrate 1 on the substrate 1 is positioned in the orthographic projection of the conductive layer far from the substrate 1 on the substrate 1.
In some embodiments, the plurality of conductive layers includes a first conductive layer 511, a second conductive layer 512, and a third conductive layer 513, and the first conductive layer 511, the second conductive layer 512, and the third conductive layer 513 are stacked in order in a direction away from the substrate 1.
The first conductive layer 511, the second conductive layer 512, and the third conductive layer 513 may be made of different materials, and the thickness and the material used for each conductive layer may be adjusted to adjust the resistance and the conductivity of the second electrode 51.
In some embodiments, the second conductive layer 512 is a metal layer.
The second conductive layer 512 includes, but is not limited to, one or more of silver (Ag), magnesium (Mg), aluminum (Al), gold (Au), gallium (Ga), nickel (Ni), platinum (Pt), iridium (Ir), copper (Cu), molybdenum (Mo), calcium (Ca), and barium (Ba).
The metal layer has excellent conductive properties, and can improve the conductivity of the second electrode 51 so that current can be more effectively transmitted, thereby improving the performance and response speed of the display panel.
In some embodiments, the first conductive layer 511 and the third conductive layer 513 are doped metal oxide layers.
The first conductive layer 511 and the second conductive layer 512 include, but are not limited to, one or more of indium doped tin oxide (ITO), fluorine doped tin oxide (FTO), antimony doped tin oxide (ATO), aluminum doped zinc oxide (AZO), gallium doped zinc oxide (GZO), indium doped zinc oxide (IZO), magnesium doped zinc oxide (MZO), aluminum doped magnesium oxide (AMO), and cadmium doped zinc oxide.
The doped metal oxide layer has better stability, and the stability and durability of the first electrode 41 can be improved. The doped metal oxide layer can be used as a second protective layer to prevent the metal layer from being affected by external environment, such as oxidation, moisture, etc., thereby prolonging the service life of the second electrode 51 and improving the reliability and stability of the display panel.
The second electrode 51 may be a composite electrode, which is an electrode formed by stacking two or more layers of conductive materials, for example AZO/Ag/AZO、AZO/Al/AZO、ITO/Ag/ITO、ITO/Al/ITO、ZnO/Ag/ZnO、ZnO/Al/ZnO、TiO2/Ag/TiO2、TiO2/Al/TiO2、ZnS/Ag/ZnS、ZnS/Al/ZnS、Ca/Al、LiF/Ca、LiF/Al、BaF2/Al、CsF/Al、CaCO3/Al、BaF2/Ca/Al or the like, wherein "/" means a stacked structure, for example, ITO/Ag/ITO means a composite electrode including an ITO layer, an Ag layer, and an ITO layer stacked in this order.
In some embodiments, the second electrode 51 includes a first conductive layer 511, a second conductive layer 512, and a third conductive layer 513 stacked in order in a direction away from the substrate 1, and the first electrode 41 includes a fourth conductive layer, a fifth conductive layer, and a sixth conductive layer stacked in order in a direction away from the substrate 1.
The first electrode 41 and the second electrode 51 may be composite electrodes, each formed by stacking a plurality of layers of conductive materials. In preparing the first electrode 41 and the second electrode 51, the multiple layers of conductive material may be etched to obtain patterned first electrode 41 and second electrode 51.
In some embodiments, the first conductive layer 511 and the fourth conductive layer are the same material.
And/or the second conductive layer 512 and the fifth conductive layer are the same material.
And/or the third conductive layer 513 and the sixth conductive layer are the same material.
The first conductive layer 511 and the fourth conductive layer are made of the same material, or the second conductive layer 512 and the fifth conductive layer are made of the same material, or the third conductive layer 513 and the sixth conductive layer are made of the same material, so that the manufacturing process can be simplified, and the types of manufacturing materials to be prepared and stored can be reduced.
The second aspect of the present application further provides a display panel, referring to fig. 1 to 7, the display panel includes: the pixel display device comprises a substrate, a first electrode layer, a pixel limiting layer, a dielectric layer, a second electrode layer and a light-emitting functional layer, wherein the substrate comprises a pixel driving circuit; the first electrode layer is arranged on one side of the substrate and comprises a plurality of first electrodes arranged at intervals, and the first electrodes are electrically connected with the pixel circuit; the pixel limiting layer is arranged on one side of the first electrode layer far away from the substrate and comprises a plurality of pixel openings, and the pixel openings expose part of the surface of the corresponding first electrode; the dielectric layer comprises a plurality of dielectric parts at intervals, and the dielectric parts are positioned in the corresponding pixel openings and are contacted with the wall surfaces of the pixel openings; the dielectric layer comprises an insulating material; the second electrode layer comprises a plurality of second electrodes which are arranged at intervals, the second electrodes are arranged on one side of the corresponding medium parts, which is far away from the substrate, and the second electrodes are electrically connected with the corresponding first electrodes; the light-emitting functional layer comprises a plurality of light-emitting parts, and the light-emitting parts are positioned on one side of the corresponding second electrode far away from the substrate.
In the scheme of the application, the second electrode layer 5 is electrically connected with the light-emitting part 31, so that the second electrode layer 5 replaces the first electrode layer 4 to be directly contacted with the light-emitting part 31, abnormal light emission of the light-emitting part 31 caused by the first electrode 41 damaged by the preparation process is reduced or avoided, the light-emitting stability of the light-emitting part 31 is improved, and the display effect of the display panel is improved.
In some embodiments, the dielectric portion 61 has a first via 62, and the second electrode 51 is via-connected to the first electrode 41 through the first via 62.
The first electrode 41 and the second electrode 51 are insulated by the dielectric layer 6, and by providing the first through hole 62, the first electrode 41 and the second electrode 51 can be electrically connected.
In some embodiments, the dielectric portion 61 has a plurality of first through holes 62.
In order to improve the path for electrically connecting the first electrode 41 and the second electrode 51, a plurality of first through holes 62 may be provided in the same dielectric portion 61, and the first electrode 41 and the second electrode 51 may be connected via the plurality of first through holes 62, thereby improving the stability of the electrical connection between the first electrode 41 and the second electrode 51.
The display panel provided by the embodiment of the second aspect of the present application may have the features of the display panel of any one of the embodiments of the first aspect, so that the display panel provided by the embodiment of the second aspect of the present application has the advantages of the display panel of any one of the embodiments of the first aspect, and is not described herein again.
Referring to fig. 8 and 9, an embodiment of the second aspect of the present application further provides a method for manufacturing a display panel,
S100, providing a substrate 1;
s200, forming a first electrode layer 4 on one side of the substrate 1, the first electrode layer 4 including a plurality of first electrodes 41 arranged at intervals;
s300 of forming a pixel defining layer 8 on one side of the substrate 1, the pixel defining layer 8 covering a part of the surface of the first electrode 41 and having a pixel opening 81 exposing the other part of the surface of the first electrode 41;
S400, forming a dielectric forming layer on one side of the substrate 1, the dielectric forming layer being located on one side of the pixel defining layer 8 facing away from the substrate 1 and one side of the first electrode 41 facing away from the substrate 1;
s500, forming a second electrode forming layer on one side of the dielectric forming layer away from the substrate 1;
s600, performing patterning processing on the second electrode forming layer and the dielectric forming layer to obtain a plurality of second electrodes 51 arranged at intervals and a plurality of dielectric portions 61 arranged at intervals, wherein the dielectric portions 61 are positioned between the first electrodes 41 and the second electrodes 51;
S700, forming a light emitting functional layer 3 on a side of the second electrode 51 facing away from the substrate 1, the light emitting functional layer 3 including a plurality of light emitting portions 31, at least a portion of the light emitting portions 31 being located in the pixel openings 81, the second electrode 51 being disposed between the light emitting portions 31 and the first electrode 41, the second electrode 51 electrically connecting the first electrode 41 and the light emitting portions 31.
The method for manufacturing a display panel according to the second aspect of the present application may manufacture the display panel according to any one of the first aspect of the present application, so the method for manufacturing a display panel according to the second aspect of the present application has the beneficial effects of any one of the first aspect of the present application, and is not described herein.
In S300, the pixel defining layer is used to form the pixel defining layer 8. In S400, the dielectric forming layer is used to form the dielectric layer 6. In S500, the second electrode forming layer is used to form the second electrode 51. In S600, during the process of patterning the second electrode forming layer, the dielectric forming layer may protect a portion of the structure on the substrate 1 from being damaged during the process of patterning the second electrode forming layer.
In some embodiments, S600 comprises:
s610, a first mask layer is arranged on one side of the second electrode forming layer, which is away from the substrate 1, and covers part of the second electrode forming layer;
S620, etching the second electrode forming layer by taking the first mask layer as a mask to form a plurality of second electrodes 51;
s630, the dielectric layer is etched using the first mask layer as a mask, thereby forming a plurality of dielectric portions 61.
In S610, a layer of mask material may be disposed on the display panel to be manufactured, where the mask material may be a positive photoresist or a negative photoresist. When the mask material is negative photoresist, the first region is irradiated with light to cause exposure of the first region, the mask material of the first region is subjected to chemical reaction, and then the mask material of the unexposed region is removed by dissolution through a developing technology, so as to obtain a first mask layer positioned in the first region, wherein the first region corresponds to the second electrode 51 prepared in S620.
In S620 and S630, an appropriate etching method may be selected to perform etching according to the materials used for the dielectric forming layer and the second electrode forming layer, and the first mask layer is used as a photomask and the second protective layer, so as to obtain the second electrode 51 and the dielectric layer 6. Since the second electrode 51 does not undergo S300, the second electrode 51 has a flat outer surface, which is advantageous for improving the electrode work function of the second electrode 51 and improving the light emitting efficiency of the light emitting portion 31.
In some embodiments, prior to S700, comprising:
s800, removing the first mask layer.
The first mask layer covering one side of the second electrode 51 is removed so that the light emitting part 31 prepared in S700 is overlapped on the second electrode 51.
In some embodiments, S620 includes:
And wet etching the second electrode forming layer by taking the first mask layer as a mask to obtain a plurality of second electrodes 51, wherein the orthographic projection of the second electrodes 51 on the substrate 1 is positioned in the orthographic projection of the first mask layer on the substrate 1.
The regions of the second electrode forming layer not covered by the first mask layer are etched by an etching liquid to obtain a plurality of second electrodes 51. The region of the second electrode forming layer covered by the first mask layer is protected by the first mask layer, forming spaced second electrodes 51.
In some embodiments, S630 comprises:
Dry etching is performed on the dielectric forming layer by using the first mask layer as a mask, so as to obtain a plurality of dielectric portions 61, and the orthographic projection of the dielectric portions 61 on the substrate 1 overlaps with the orthographic projection of the first mask layer on the substrate 1.
In S620, during the wet etching of the second electrode forming layer, the side surface of the formed second electrode 51 is exposed to the etching liquid used in the wet etching, and the etching liquid will corrode a part of the layer structure of the second electrode 51 from the side surface, so that the work function of the second electrode 51 is reduced.
In S630, the first mask layer is used as a mask again, and dry etching is performed on the dielectric forming layer, so that the edges of the second electrode 51 can be etched together in the process of dry etching the dielectric forming layer, thereby improving the flatness of the side surface of the second electrode 51 and improving the work function of the second electrode 51.
In some embodiments, S400 includes, prior to:
An isolation structure 2 is formed on one side of the substrate 1, the isolation structure 2 encloses a plurality of isolation openings 23, and the orthographic projection of the isolation openings 23 on the substrate 1 at least partially overlaps with the orthographic projection of the first electrode 41 on the substrate 1.
By providing the isolation structure 2, a mask for preparing the light emitting portion 31 can be omitted in S700, and the material is evaporated into the isolation opening 23 by evaporation.
In some embodiments, in S400, the dielectric forming layer covers the isolation structure 2, the pixel defining layer 8, and the first electrode 41.
In S600, during the process of patterning the second electrode forming layer, the dielectric forming layer covering the isolation structure 2 can protect the isolation structure 2 from damaging the isolation structure 2.
In some embodiments, S300 comprises:
s310, sequentially forming a pixel limiting forming layer and an isolation structure forming layer on one side of a substrate;
s320, patterning the isolation structure forming layer to obtain an isolation structure, wherein the isolation structure encloses a plurality of isolation openings, and the part of the pixel limiting forming layer is exposed from the isolation openings;
and S330, patterning the pixel limiting layer through the isolation opening to obtain the pixel limiting layer.
The pixel defining formation layer is prepared, the isolation structure 2 is prepared, and the pixel defining formation layer exposed from the isolation opening 23 is subjected to patterning treatment so that at least a portion of the first electrode 41 is exposed from the pixel opening 81. In S330, the patterning process will damage the surface of the first electrode 41 facing away from the substrate 1, and by providing the second electrode 51 in direct contact with the light emitting portion 31, defective light emission of the light emitting portion 31 due to damage of the first electrode 41 is avoided.
In S700, the light emitting material a for preparing the light emitting part 31 may be coated on the isolation structure 2 and the second electrode 51 based on the evaporation technique. The light emitting material a includes a material for forming the light emitting portion 31, and the light emitting portion 31 may include one or more of a hole electron injection layer, an electron transport layer, a light emitting material layer, a hole blocking layer, an electron blocking layer, a hole transport layer, and a hole injection layer. The choice may be made in particular according to the particular type of light-emitting functional layer 3. In S700, a mask may be omitted, and the material may be evaporated to the isolation opening 23 by evaporation.
In some implementations, S330 includes:
a second mask layer is arranged on one side of the isolation structure 2 away from the substrate 1;
The pixel defining formation layer is subjected to a dry etching process using the second mask layer as a mask until at least a portion of the first electrode 41 is exposed from the pixel opening 81.
The second mask layer may be a positive photoresist or a negative photoresist. When the second mask layer is negative photoresist, the area corresponding to the isolation structure 2 is illuminated to cause chemical reaction of the second mask layer in the exposed area, and then the second mask layer in the unexposed area is removed by dissolution through a developing technology, so that the second mask layer is positioned on one side of the isolation structure 2 away from the substrate 1.
The second mask layer is used as a mask, i.e. the second mask layer may comprise a pixel defining layer on one side thereof, which is protected from etching, resulting in a pixel defining layer 8 with pixel openings 81.
In some embodiments, prior to S400, comprising:
And removing the second mask layer.
By removing the second mask layer, the isolation structure 2 is exposed away from the surface of the substrate 1. In S400, a dielectric forming layer covering the isolation structure 2 may be provided.
For example, referring to fig. 9 (a), in preparing the display panel, a conductive material for forming the first electrode layer 4 is now disposed on one side of the substrate 1, and patterning is performed on the conductive material to obtain a plurality of first electrodes 41 disposed at intervals, and a pixel defining layer is disposed on one side of the substrate 1, and covers the first electrodes 41; referring to fig. 9 (b), a material for preparing the isolation structure 2 is disposed on the substrate 1; referring to fig. 9 (c), patterning the material used to prepare the isolation structure 2 results in an isolation structure 2 having isolation openings 23; referring to fig. 9 (d), a second mask layer is disposed on the isolation structure 2, and dry etching is performed on the pixel defining layer; referring to fig. 9 (e), a pixel defining layer 8 having a pixel opening 81 is obtained, and the first electrode 41 is exposed from the pixel opening 81. And removing the second mask layer.
Referring to fig. 10 and 11, wherein as in fig. 10 (a), a material for preparing a dielectric layer 6 is disposed on a substrate 1 to form a dielectric forming layer, and the dielectric forming layer covers a first electrode layer 4 and an isolation structure 2; referring to fig. 10 (b), the dielectric forming layer is processed to obtain a first via hole 62 communicating with the first electrode 41; referring to fig. 10 (c), a material for preparing the second electrode 51 is disposed on the dielectric forming layer to form the second electrode forming layer, and a portion of the material for preparing the second electrode 51 is filled into the first via hole 62 to be connected to the first electrode 41; referring to fig. 10 (d), a first mask layer is disposed in a first region of the second electrode forming layer, and wet etching is performed on the second electrode forming layer; referring to fig. 11 (a), a plurality of spaced second electrodes 51 are obtained; referring to fig. 11 (b), the dielectric forming layer is dry etched to obtain a plurality of spacer dielectric portions 61, and the dielectric forming layer covering the isolation structure 2 is removed.
Specifically, the metal oxide semiconductor layer can be formed by adopting a CVD (Chemical Vapor Deposition ) process. The organic material may be made of resin or polymer organic material, and may be specifically formed by IJP (ink jet printing) process. Optionally, the first encapsulation sub-layer and the third encapsulation sub-layer are inorganic materials, and the second encapsulation sub-layer is organic materials.
In some embodiments, where the second electrode 51 is a composite electrode, the conductive material corresponding to each conductive layer is disposed on the dielectric forming layer such that the conductive material may contact and electrically connect with the first electrode 41 through a first via on the dielectric forming layer. In some embodiments, a first conductive material is placed through each of the isolation openings 23 for forming the first conductive layer 511, a second conductive material is placed through each of the isolation openings 23 on a side of the first conductive layer 511 facing away from the substrate 1 for forming the second conductive layer 512, and a third conductive material is placed through each of the isolation openings 23 on a side of the second conductive layer 512 facing away from the substrate 1 for forming the third conductive layer 513. The second electrode 51 includes a first conductive layer 511, a second conductive layer 512, and a third conductive layer 513, which are sequentially stacked in a direction away from the substrate 1.
Referring to fig. 12, 13 and 14, an embodiment of the fourth aspect of the present application further provides a method for manufacturing a display panel,
S10, providing a substrate 1;
s20, forming a first electrode layer 4 on one side of the substrate 1, the first electrode layer 4 including a plurality of first electrodes 41 arranged at intervals;
s30, forming a first protection layer on one side of the first electrode 41 away from the substrate 1;
S40, forming a pixel defining formation layer on one side of the substrate 1, the pixel defining formation layer covering the first protective layer;
S50, patterning the pixel defining layer to obtain a pixel defining layer 8 having a pixel opening 81, the pixel defining layer 8 covering a portion of the surface of the first electrode 41 and having the pixel opening 81 exposing the first protective layer;
S60, removing the first protective layer, forming a light emitting functional layer 3 on a side of the first electrode 41 facing away from the substrate 1, wherein the light emitting functional layer 3 includes a plurality of light emitting portions 31, at least part of the light emitting portions 31 are located in the pixel openings 81 and are stacked with the first electrode 41, and the first protective layer includes an organic material.
S10, S20 may be implemented with reference to S100, S200 in the foregoing implementation. The first protection layer covers the first electrode 41, and the first protection layer includes an organic material, so that when S50 is performed, the first protection layer can protect the first electrode 41, prevent the first electrode 41 from being damaged by etching, improve the stability of light emission of the light emitting portion 31, and improve the display effect of the display panel in the process of patterning the pixel defining layer. Optionally, the first protective layer comprises a photoresist.
In some embodiments, S50 is preceded by:
S70, forming an isolation structure 2 on one side of the pixel definition forming layer, which is away from the substrate 1, wherein the isolation structure 2 encloses a plurality of isolation openings 23, and the part of the pixel definition forming layer is exposed from the isolation openings 23;
s80, a second protective layer is provided to cover a side of the isolation opening 23 facing away from the substrate 1.
S70 may be implemented with reference to S320 in the foregoing implementation. The second protection layer is disposed in S80, so that the isolation structure 2 can be prevented from being damaged by etching by the second protection layer in the process of patterning the pixel defining formation layer when S50 is performed, so that the isolation structure 2 can maintain a desired shape structure. When the isolation structure 2 is provided with the conductive material to realize electric signal transmission, the second protection layer can protect the conductive material and improve the stability of the conductive material to realize electric signal transmission.
In some embodiments, S50, then comprises:
and removing the second protective layer.
After removing the second protective layer and the first protective layer, the light emitting functional layer 3 may be prepared through the isolation opening 23 by an evaporation process.
For example, referring to fig. 13 (a), in preparing the display panel, a conductive material for forming the first electrode layer 4 is disposed on one side of the substrate 1, and the conductive material is patterned to obtain a plurality of first electrodes 41 disposed at intervals; referring to fig. 13 (b), a first protective layer is disposed on a side of the first electrode 41 facing away from the substrate 1; referring to fig. 13 (c), a pixel defining formation layer and a material for preparing the isolation structure 2 are sequentially disposed on one side of the substrate 1, the pixel defining formation layer covering the first protection layer; referring to fig. 13 (d), patterning the material used to prepare the isolation structure 2 results in an isolation structure 2 having isolation openings 23; referring to fig. 14 (a), a second protective layer is disposed on the isolation structure 2, and dry etching is performed on the pixel defining formation layer; referring to fig. 14 (b), a pixel defining layer 8 having a pixel opening 81 is obtained, and the first protection layer is exposed from the pixel opening 81. Referring to fig. 14 (c), the second passivation layer and the first passivation layer are removed; referring to fig. 14 (d), the spaced light emitting portions 31 are prepared through the isolation openings 23.
Embodiments of the fifth aspect of the present application further provide a display device, including a display panel according to any of the embodiments of the first and second aspects, or including a display panel according to any of the embodiments of the third and fourth aspects. Since the display device provided in the fifth embodiment of the present application includes the display panel of any one of the embodiments of the first, second, third, and fourth aspects, the display device provided in the fifth embodiment of the present application has the beneficial effects of any one of the embodiments of the first, second, third, and fourth aspects, and is not described herein again.
The display device provided by the embodiment of the application can be applied to a mobile phone and can also be any electronic product with a display function, including but not limited to the following categories: television, notebook computer, desktop display, tablet computer, digital camera, smart bracelet, smart glasses, vehicle-mounted display, medical equipment, industrial control equipment, touch interactive terminal, etc., which are not particularly limited in this embodiment of the application.
In the foregoing, only the specific embodiments of the present application are described, and it will be clearly understood by those skilled in the art that, for convenience and brevity of description, the specific working processes of the systems, modules and units described above may refer to the corresponding processes in the foregoing method embodiments, which are not repeated herein. It should be understood that the scope of the present application is not limited thereto, and any equivalent modifications or substitutions can be easily made by those skilled in the art within the technical scope of the present application, and they should be included in the scope of the present application.
It should also be noted that the exemplary embodiments referred to in this disclosure describe some methods or systems based on a series, or arrangement. The present application is not limited to the order of the above-described steps, that is, the steps may be performed in the order mentioned in the embodiments, or may be performed in a different order from the order in the embodiments, or several steps may be performed simultaneously.

Claims (20)

1.一种显示面板,其特征在于,所述显示面板包括:1. A display panel, characterized in that the display panel comprises: 基板;Substrate; 发光功能层,包括多个间隔设置的发光部;The light-emitting functional layer includes a plurality of light-emitting parts arranged at intervals; 第一电极层,包括多个间隔设置的第一电极,所述第一电极设置于所述发光部靠近所述基板的一侧;A first electrode layer, comprising a plurality of first electrodes arranged at intervals, wherein the first electrodes are arranged on a side of the light-emitting portion close to the substrate; 第二电极层,包括多个间隔设置的第二电极,所述第二电极设置于所述发光部和所述第一电极之间,所述第二电极电连接所述第一电极和所述发光部,所述第二电极靠近所述第一电极的表面的部分区域与所述第一电极间隔设置。The second electrode layer includes a plurality of second electrodes arranged at intervals, wherein the second electrodes are arranged between the light-emitting portion and the first electrode, the second electrodes are electrically connected to the first electrode and the light-emitting portion, and a partial area of the surface of the second electrode close to the first electrode is arranged at intervals from the first electrode. 2.根据权利要求1所述的显示面板,其特征在于,所述显示面板还包括介质层,所述介质层包括多个间隔的介质部,所述介质部位于所述第一电极和所述第二电极之间;所述介质层包括绝缘材料;2. The display panel according to claim 1, characterized in that the display panel further comprises a dielectric layer, the dielectric layer comprises a plurality of spaced dielectric portions, the dielectric portions are located between the first electrode and the second electrode; the dielectric layer comprises an insulating material; 优选地,所述介质部具有第一通孔,所述第二电极通过所述第一通孔与所述第一电极过孔连接;Preferably, the dielectric portion has a first through hole, and the second electrode is connected to the first electrode via hole through the first through hole; 优选地,所述介质部具有多个所述第一通孔。Preferably, the medium portion has a plurality of the first through holes. 3.根据权利要求2所述的显示面板,其特征在于,所述介质部在所述基板上的正投影的边缘环绕所述第二电极在所述基板上的正投影;或者3. The display panel according to claim 2, wherein an edge of an orthographic projection of the dielectric portion on the substrate surrounds an orthographic projection of the second electrode on the substrate; or 所述介质部的边缘与所述第二电极的边缘对齐。An edge of the dielectric portion is aligned with an edge of the second electrode. 4.根据权利要求1所述的显示面板,其特征在于,所述第二电极在所述基板上的投影面积小于所述第一电极在所述基板上的投影面积;4. The display panel according to claim 1, wherein a projection area of the second electrode on the substrate is smaller than a projection area of the first electrode on the substrate; 优选地,所述第二电极在所述基板上的正投影位于所述第一电极在所述基板上的正投影区域内。Preferably, the orthographic projection of the second electrode on the substrate is located within the orthographic projection region of the first electrode on the substrate. 5.根据权利要求1所述的显示面板,其特征在于,所述显示面板还包括:5. The display panel according to claim 1, characterized in that the display panel further comprises: 像素限定层,设于所述基板的一侧,所述像素限定层覆盖所述第一电极的部分表面,且具有暴露所述第一电极的另一部分表面的像素开口,所述第二电极的至少部分和所述发光部的至少部分位于所述像素开口内;a pixel defining layer, disposed on one side of the substrate, the pixel defining layer covering a portion of the surface of the first electrode and having a pixel opening exposing another portion of the surface of the first electrode, at least a portion of the second electrode and at least a portion of the light-emitting portion being located within the pixel opening; 优选地,所述像素限定层包括无机材料;Preferably, the pixel defining layer comprises an inorganic material; 优选地,所述像素开口的壁面与所述第二电极的边缘在平行于所述基板的方向上间隔设置;Preferably, the wall surface of the pixel opening and the edge of the second electrode are spaced apart in a direction parallel to the substrate; 优选地,所述像素开口的壁面和所述第二电极之间形成第一间隙,所述发光部的部分设置于所述第一间隙内。Preferably, a first gap is formed between a wall surface of the pixel opening and the second electrode, and a portion of the light emitting portion is disposed in the first gap. 6.根据权利要求5所述的显示面板,其特征在于,所述显示面板还包括介质层,所述介质层包括多个间隔的介质部,所述介质部位于所述第一电极和所述第二电极之间,所述介质部与所述像素开口的壁面接触;6. The display panel according to claim 5, characterized in that the display panel further comprises a dielectric layer, the dielectric layer comprises a plurality of spaced dielectric portions, the dielectric portions are located between the first electrode and the second electrode, and the dielectric portions are in contact with a wall surface of the pixel opening; 优选地,所述介质部的部分位于所述像素开口的壁面与所述第一电极的边缘之间。Preferably, part of the dielectric portion is located between a wall surface of the pixel opening and an edge of the first electrode. 7.根据权利要求5所述的显示面板,其特征在于,所述显示面板还包括:7. The display panel according to claim 5, characterized in that the display panel further comprises: 隔离结构,设置于所述像素限定层背离所述基板的一侧,所述隔离结构围成多个隔离开口,所述隔离开口与所述像素开口连通;An isolation structure is disposed on a side of the pixel defining layer away from the substrate, the isolation structure encloses a plurality of isolation openings, and the isolation openings are connected to the pixel openings; 优选地,所述发光功能层至少部分设置于所述隔离开口内。Preferably, the light-emitting functional layer is at least partially disposed in the isolation opening. 8.根据权利要求7所述的显示面板,其特征在于,所述显示面板包括:8. The display panel according to claim 7, characterized in that the display panel comprises: 第三电极,所述第三电极位于所述发光部背离所述基板的一侧;a third electrode, the third electrode being located on a side of the light-emitting portion away from the substrate; 优选地,所述隔离结构包括导电结构,所述第三电极的边沿与所述导电结构搭接。Preferably, the isolation structure comprises a conductive structure, and an edge of the third electrode overlaps the conductive structure. 9.根据权利要求7所述的显示面板,其特征在于,所述隔离结构包括层叠设置的第一部分和第二部分,所述第一部分设置于所述第二部分靠近所述基板的一侧,所述第一部分在所述基板上的正投影位于所述第二部分在所述基板上的正投影内;9. The display panel according to claim 7, wherein the isolation structure comprises a first portion and a second portion which are stacked, the first portion is arranged on a side of the second portion close to the substrate, and an orthographic projection of the first portion on the substrate is located within an orthographic projection of the second portion on the substrate; 优选地,所述第二部分背离所述基板的表面在所述基板上的正投影面积小于所述第二部分靠近所述基板的表面在所述基板上的正投影面积;Preferably, the orthographic projection area of the surface of the second portion facing away from the substrate on the substrate is smaller than the orthographic projection area of the surface of the second portion close to the substrate on the substrate; 优选地,所述第一部分背离所述基板的表面在所述基板上的正投影面积小于所述第二部分靠近所述基板的表面在所述基板上的正投影面积。Preferably, an orthographic projection area of a surface of the first portion facing away from the substrate on the substrate is smaller than an orthographic projection area of a surface of the second portion close to the substrate on the substrate. 10.根据权利要求1所述的显示面板,其特征在于,沿背离所述基板的方向上,所述第二电极的截面面积不变或逐渐增大;10. The display panel according to claim 1, wherein the cross-sectional area of the second electrode is constant or gradually increases in a direction away from the substrate; 优选地,所述第二电极包括多个导电层,多个所述导电层沿背离所述基板的方向依次叠设;Preferably, the second electrode comprises a plurality of conductive layers, and the plurality of conductive layers are stacked in sequence in a direction away from the substrate; 优选地,相邻所述导电层中,靠近所述基板的所述导电层在所述基板的正投影位于远离所述基板的所述导电层在所述基板的正投影内;Preferably, among the adjacent conductive layers, the orthographic projection of the conductive layer close to the substrate on the substrate is located within the orthographic projection of the conductive layer far from the substrate on the substrate; 优选地,所述多个导电层包括第一导电层、第二导电层和第三导电层,所述第一导电层、所述第二导电层和所述第三导电层沿背离所述基板的方向依次叠设;Preferably, the plurality of conductive layers include a first conductive layer, a second conductive layer and a third conductive layer, and the first conductive layer, the second conductive layer and the third conductive layer are stacked in sequence in a direction away from the substrate; 优选地,所述第二导电层为金属层;Preferably, the second conductive layer is a metal layer; 优选地,所述第一导电层和所述第三导电层为掺杂金属氧化物层。Preferably, the first conductive layer and the third conductive layer are doped metal oxide layers. 11.根据权利要求1所述的显示面板,其特征在于,所述第二电极包括沿背离所述基板的方向依次叠设的第一导电层、第二导电层和第三导电层,所述第一电极包括沿背离所述基板的方向依次叠设的第四导电层、第五导电层和第六导电层;11. The display panel according to claim 1, wherein the second electrode comprises a first conductive layer, a second conductive layer and a third conductive layer stacked in sequence in a direction away from the substrate, and the first electrode comprises a fourth conductive layer, a fifth conductive layer and a sixth conductive layer stacked in sequence in a direction away from the substrate; 优选地,所述第一导电层和所述第四导电层的材料相同;Preferably, the first conductive layer and the fourth conductive layer are made of the same material; 优选地,所述第二导电层和所述第五导电层的材料相同;Preferably, the second conductive layer and the fifth conductive layer are made of the same material; 优选地,所述第三导电层和所述第六导电层的材料相同。Preferably, the third conductive layer and the sixth conductive layer are made of the same material. 12.一种显示面板,其特征在于,所述显示面板包括:12. A display panel, characterized in that the display panel comprises: 基板,包括像素驱动电路;A substrate including a pixel driving circuit; 第一电极层,设于所述基板的一侧,且包括多个间隔设置的第一电极,所述第一电极与所述像素电路电连接;A first electrode layer, disposed on one side of the substrate, and comprising a plurality of first electrodes disposed at intervals, wherein the first electrodes are electrically connected to the pixel circuit; 像素限定层,设于所述第一电极层远离所述基板的一侧,且包括多个像素开口,所述像素开口暴露对应的所述第一电极的部分表面;A pixel defining layer, disposed on a side of the first electrode layer away from the substrate, and comprising a plurality of pixel openings, wherein the pixel openings expose a portion of the surface of the corresponding first electrode; 介质层,包括多个间隔的介质部,所述介质部位于对应的所述像素开口内,且与所述像素开口的壁面接触;所述介质层包括绝缘材料;a dielectric layer, comprising a plurality of spaced dielectric portions, wherein the dielectric portions are located in the corresponding pixel openings and in contact with the wall surfaces of the pixel openings; the dielectric layer comprises insulating material; 第二电极层,包括多个间隔设置的第二电极,所述第二电极设置于对应的所述介质部远离所述基板的一侧,所述第二电极与对应的所述第一电极电连接;A second electrode layer, comprising a plurality of second electrodes arranged at intervals, wherein the second electrodes are arranged on a side of the corresponding dielectric portion away from the substrate, and the second electrodes are electrically connected to the corresponding first electrodes; 发光功能层,包括多个发光部,所述发光部位于对应的所述第二电极远离所述基板的一侧。The light-emitting functional layer comprises a plurality of light-emitting parts, wherein the light-emitting parts are located on a side of the corresponding second electrode away from the substrate. 13.根据权利要求12所述的显示面板,其特征在于,所述介质部具有第一通孔,所述第二电极通过所述第一通孔与所述第一电极过孔连接;13. The display panel according to claim 12, wherein the dielectric portion has a first through hole, and the second electrode is connected to the first electrode via hole through the first through hole; 优选地,所述介质部具有多个所述第一通孔。Preferably, the medium portion has a plurality of the first through holes. 14.一种显示面板的制备方法,其特征在于,包括以下步骤:14. A method for preparing a display panel, comprising the following steps: 提供基板;providing a substrate; 在所述基板的一侧形成第一电极层,所述第一电极层包括多个间隔设置的第一电极;forming a first electrode layer on one side of the substrate, wherein the first electrode layer includes a plurality of first electrodes arranged at intervals; 在所述基板的一侧形成像素限定层,所述像素限定层覆盖所述第一电极的部分表面,且具有暴露所述第一电极的另一部分表面的像素开口;forming a pixel defining layer on one side of the substrate, wherein the pixel defining layer covers a portion of the surface of the first electrode and has a pixel opening exposing another portion of the surface of the first electrode; 在所述基板的一侧形成介质形成层,所述介质形成层位于所述像素限定层背离所述基板的一侧、以及所述第一电极背离所述基板的一侧;forming a dielectric forming layer on one side of the substrate, wherein the dielectric forming layer is located on a side of the pixel defining layer away from the substrate and a side of the first electrode away from the substrate; 在所述介质形成层背离所述基板的一侧形成第二电极形成层;forming a second electrode forming layer on a side of the dielectric forming layer away from the substrate; 对所述第二电极形成层、所述介质形成层进行图案化处理,得到多个间隔设置的第二电极和多个间隔设置的介质部,所述介质部位于所述第一电极和所述第二电极之间;Performing patterning on the second electrode forming layer and the dielectric forming layer to obtain a plurality of second electrodes disposed at intervals and a plurality of dielectric portions disposed at intervals, wherein the dielectric portion is located between the first electrode and the second electrode; 在所述第二电极背离所述基板的一侧形成发光功能层,所述发光功能层包括多个发光部,所述发光部的至少部分位于所述像素开口内,所述第二电极设置于所述发光部和所述第一电极之间,所述第二电极电连接所述第一电极和所述发光部。A light-emitting functional layer is formed on the side of the second electrode away from the substrate, the light-emitting functional layer includes a plurality of light-emitting portions, at least part of the light-emitting portions are located in the pixel opening, the second electrode is arranged between the light-emitting portions and the first electrode, and the second electrode is electrically connected to the first electrode and the light-emitting portions. 15.根据权利要求14所述的显示面板的制备方法,其特征在于,所述对所述第二电极形成层、所述介质形成层进行图案化处理,得到多个间隔设置的第二电极和多个间隔设置的介质部,包括:15. The method for manufacturing a display panel according to claim 14, characterized in that the patterning of the second electrode forming layer and the dielectric forming layer to obtain a plurality of second electrodes disposed at intervals and a plurality of dielectric portions disposed at intervals comprises: 在所述第二电极形成层背离所述基板的一侧设置第一掩膜层,所述第一掩膜层覆盖所述第二电极形成层的部分;Disposing a first mask layer on a side of the second electrode-forming layer away from the substrate, wherein the first mask layer covers a portion of the second electrode-forming layer; 以所述第一掩膜层为掩膜,对所述第二电极形成层进行刻蚀处理,形成多个所述第二电极;Using the first mask layer as a mask, etching the second electrode forming layer to form a plurality of second electrodes; 以所述第一掩膜层为掩膜,对所述介质形成层进行刻蚀处理,形成多个所述介质部;Using the first mask layer as a mask, etching the dielectric forming layer to form a plurality of dielectric portions; 优选地,所述在所述第二电极背离所述基板的一侧形成发光功能层,之前,包括:Preferably, before forming the light-emitting functional layer on the side of the second electrode facing away from the substrate, the method comprises: 去除所述第一掩膜层;removing the first mask layer; 优选地,所述以所述第一掩膜层为掩膜,对所述第二电极形成层进行刻蚀处理,形成多个所述第二电极包括:Preferably, the step of using the first mask layer as a mask to perform etching on the second electrode forming layer to form a plurality of second electrodes comprises: 以所述第一掩膜层为掩膜,对所述第二电极形成层进行湿法刻蚀处理,得到多个所述第二电极,所述第二电极在所述基板的正投影位于所述第一掩膜层在所述基板的正投影内;Using the first mask layer as a mask, wet-etching the second electrode forming layer to obtain a plurality of second electrodes, wherein the orthographic projection of the second electrode on the substrate is located within the orthographic projection of the first mask layer on the substrate; 优选地,所述以所述第一掩膜层为掩膜,对所述介质形成层进行刻蚀处理,形成多个所述介质部包括:Preferably, the step of etching the dielectric forming layer using the first mask layer as a mask to form the plurality of dielectric portions comprises: 以所述第一掩膜层为掩膜,对所述介质形成层进行干法刻蚀处理,得到多个所述介质部,所述介质部在所述基板的正投影与所述第一掩膜层在所述基板的正投影交叠。The dielectric forming layer is dry-etched using the first mask layer as a mask to obtain a plurality of dielectric portions, wherein the orthographic projection of the dielectric portion on the substrate overlaps with the orthographic projection of the first mask layer on the substrate. 16.根据权利要求14所述的显示面板的制备方法,其特征在于,所述在所述基板的一侧形成介质形成层之前,还包括;16. The method for manufacturing a display panel according to claim 14, characterized in that before forming the dielectric forming layer on one side of the substrate, it further comprises: 在所述基板的一侧形成隔离结构,所述隔离结构围成多个隔离开口,所述隔离开口在所述基板的正投影与所述第一电极在所述基板的正投影至少部分交叠;An isolation structure is formed on one side of the substrate, wherein the isolation structure encloses a plurality of isolation openings, and an orthographic projection of the isolation opening on the substrate at least partially overlaps with an orthographic projection of the first electrode on the substrate; 优选地,所述在所述基板的一侧形成介质形成层的步骤中,所述介质形成层覆盖所述隔离结构。Preferably, in the step of forming a dielectric forming layer on one side of the substrate, the dielectric forming layer covers the isolation structure. 17.根据权利要求14所述的显示面板的制备方法,其特征在于,所述在所述基板的一侧形成像素限定层包括:17. The method for manufacturing a display panel according to claim 14, wherein forming a pixel defining layer on one side of the substrate comprises: 在所述基板的一侧依次形成像素限定形成层和隔离结构形成层;forming a pixel definition forming layer and an isolation structure forming layer in sequence on one side of the substrate; 对所述隔离结构形成层进行图案化处理,得到隔离结构,所述隔离结构围成多个隔离开口,所述像素限定形成层的部分从所述隔离开口中露出;Performing patterning on the isolation structure forming layer to obtain an isolation structure, wherein the isolation structure encloses a plurality of isolation openings, and portions of the pixel definition forming layer are exposed from the isolation openings; 通过所述隔离开口对所述像素限定形成层进行图案化处理,得到所述像素限定层;Performing patterning on the pixel definition forming layer through the isolation opening to obtain the pixel definition layer; 优选地,所述通过所述隔离开口对所述像素限定形成层进行图案化处理,得到所述像素限定层包括:Preferably, patterning the pixel definition forming layer through the isolation opening to obtain the pixel definition layer comprises: 在所述隔离结构背离所述基板的一侧设置第二掩膜层;Disposing a second mask layer on a side of the isolation structure away from the substrate; 以所述第二掩膜层为掩膜,对所述像素限定形成层进行干法刻蚀处理,直至所述第一电极的至少部分从所述像素开口中露出;Using the second mask layer as a mask, dry-etching the pixel definition forming layer until at least a portion of the first electrode is exposed from the pixel opening; 优选地,所述在所述基板的一侧形成介质形成层之前,包括:Preferably, before forming the dielectric layer on one side of the substrate, the method comprises: 去除所述第二掩膜层。The second mask layer is removed. 18.一种显示面板的制备方法,其特征在于,包括以下步骤:18. A method for preparing a display panel, comprising the following steps: 提供基板;providing a substrate; 在所述基板的一侧形成第一电极层,所述第一电极层包括多个间隔设置的第一电极;forming a first electrode layer on one side of the substrate, wherein the first electrode layer includes a plurality of first electrodes arranged at intervals; 在所述第一电极背离所述基板的一侧形成第一保护层;forming a first protective layer on a side of the first electrode facing away from the substrate; 在所述基板的一侧形成像素限定形成层,所述像素限定形成层覆盖所述第一保护层;forming a pixel definition formation layer on one side of the substrate, wherein the pixel definition formation layer covers the first protective layer; 对所述像素限定形成层进行图案化处理,得到具有像素开口的像素限定层,所述像素限定层覆盖所述第一电极的部分表面,且具有暴露所述第一保护层的像素开口;Performing patterning on the pixel definition forming layer to obtain a pixel definition layer having a pixel opening, wherein the pixel definition layer covers a portion of the surface of the first electrode and has a pixel opening exposing the first protective layer; 去除所述第一保护层,在所述第一电极背离所述基板的一侧形成发光功能层,所述发光功能层包括多个发光部,所述发光部的至少部分位于所述像素开口内并与所述第一电极叠设;所述第一保护层包括有机材料。The first protective layer is removed, and a light-emitting functional layer is formed on the side of the first electrode away from the substrate, wherein the light-emitting functional layer includes a plurality of light-emitting parts, at least part of which is located in the pixel opening and overlaps with the first electrode; the first protective layer includes an organic material. 19.根据权利要求18所述的显示面板的制备方法,其特征在于,所述第一保护层包括光刻胶。19 . The method for manufacturing a display panel according to claim 18 , wherein the first protective layer comprises photoresist. 20.一种显示装置,其特征在于,包括权利要求1-13中任一项所述的显示面板,或如权利要求14-19中任一项所述的显示面板的制备方法制备的显示面板。20. A display device, characterized in that it comprises the display panel according to any one of claims 1 to 13, or a display panel prepared by the method for preparing a display panel according to any one of claims 14 to 19.
CN202410949465.5A 2024-07-15 2024-07-15 Display panel, preparation method of display panel and display device Pending CN119012770A (en)

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