CN118999636B - Capacitive time grating linear displacement sensor - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
本发明公开了一种电容式时栅直线位移传感器，涉及直线位移测量技术领域，其技术要点包括定尺和动尺，动尺由发射模块组成；定尺由感应模块组成；当定尺和动尺发生相对运动时，发射模块和感应模块重叠面积发生变化；发射模块连接四路相位相差90度的正弦波信号，感应模块输出两路感应的电信号连接到减法器放大电路，再经整形电路整形后，进行发射模块信号相位和感应模块信号相位比较，技术效果是本传感器可与其他类型的高精度传感器进行精度对比，不用精密刻线，而是以高频时钟脉冲作为位移计量基准计算直线位移，因此结构简单，成本低，分辨率高，抗干扰能力强，易于产品化的优点。
The invention discloses a capacitive time-grating linear displacement sensor, which relates to the technical field of linear displacement measurement. Its technical key points include a fixed scale and a movable scale, the movable scale is composed of a transmitting module; the fixed scale is composed of a sensing module; when the fixed scale and the movable scale undergo relative movement, the overlapping area of the transmitting module and the sensing module changes; the transmitting module is connected to four sinusoidal wave signals with a phase difference of 90 degrees, the sensing module outputs two induced electrical signals connected to a subtractor amplifier circuit, and then after being shaped by a shaping circuit, the signal phase of the transmitting module and the signal phase of the sensing module are compared. The technical effect is that the sensor can be compared with other types of high-precision sensors for accuracy, does not require precise engraving, but uses a high-frequency clock pulse as a displacement measurement reference to calculate the linear displacement, so it has the advantages of simple structure, low cost, high resolution, strong anti-interference ability, and easy productization.
Description
Technical Field
The invention relates to the technical field of linear displacement measurement, in particular to a capacitive time grating linear displacement sensor.
Background
With the development of electronic circuits and information technologies, related applications are gradually popularized. At present, the grid linear displacement sensor is applied to the measurement and detection field sometimes, and based on a time grid measurement technology, clock pulses are used as linear displacement measurement references through space-time coordinate conversion, so that the sensor has the characteristics of high precision, high resolution, quick response and the like, and can be applied to the fields of industrial automation, robots, aerospace, weaponry, metering and detection and the like.
In order to further improve the measurement resolution and measurement accuracy of the sensor, the spatial precision scribing has extremely high requirements on processing equipment and processing environment, so that the structure of a sensor measurement system is more complex, the cost is increased, the anti-interference capability is poor, and the sensor measurement system is easily influenced by the interference of the working environment.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a time grating linear displacement sensor for linear displacement measurement, which does not need to precisely score lines, but uses high-frequency clock pulses as displacement measurement references to calculate linear displacement, so that the time grating linear displacement sensor has the advantages of simple structure, low cost, high resolution and strong anti-interference capability.
In order to achieve the aim, the invention provides the following technical scheme that the capacitive time grating linear displacement sensor comprises a fixed ruler and a movable ruler,
The movable ruler consists of a transmitting module;
the fixed length consists of an induction module;
when the fixed ruler and the movable ruler move relatively, the overlapping area of the transmitting module and the sensing module changes;
The transmitting module is connected with four paths of sine wave signals with phase difference of 90 degrees, the sensing module outputs two paths of sensed electric signals which are connected to the subtracter amplifying circuit, and after being shaped by the shaping circuit, the signal phase of the transmitting module is compared with the signal phase of the sensing module;
The phase difference of the two paths of signals is represented by the number of clock pulses in the FPGA, converted into a linear displacement value, directly transmitted to an upper computer for processing, and then displayed as linear displacement data.
Preferably, the emitting module is composed of rectangular emitting electrodes which are divided into upper and lower parts, and the sensing module is composed of sine-shaped sensing electrodes.
Preferably, the fixed ruler and the movable ruler are opposite to each other in parallel, a vertical distance is reserved between the fixed ruler and the movable ruler, and the starting points of the fixed ruler and the movable ruler are positioned at the same position and are both 0.
Preferably, the movable ruler further comprises an emitting unit in an area A, wherein the emitting unit is divided into two groups of independent emitting sheets A0 and A1, two adjacent rectangular emitting electrodes in the area A are separated by pi/2, the starting point of A1 is 0, and the starting point of A0 is 0.
Preferably, the signal transmitted by A1 is F1 (x) =sin (x), and the signal transmitted by A0 is F0 (x) =cos (x), where x=2×pi×f×t, F represents the frequency of the sine wave, and t represents time.
Preferably, the sizing device further comprises a receiving unit of a B area, wherein the receiving unit is divided into two independent receiving pieces B0 and B1, the interval between two adjacent receiving pieces of the B area is 0, the starting point of the B0 is pi/2, and the starting point of the B1 is 0.
Preferably, the B0 region receives an A0 region signal, and the B1 region receives an A1 region signal.
Preferably, the A0 region singular electrode is denoted as S4, the A0 region double electrode is denoted as S3, the A1 region singular electrode is denoted as S1, the A1 region double electrode is denoted as S2, the S4 electrode emission signal is F1 (x) =sin (x+pi/2), the S1 electrode emission signal is F2 (x) =sin (x+pi), the S3 electrode emission signal is F3 (x) =sin (x+3pi/2), and the S2 electrode emission signal is F4 (x) =sin (x).
Preferably, the A0 region singular electrode overlapping area integral S4 (p) = ≡ (2 a- (a+cos (p))) dp, the double electrode overlapping area integral S3 (p) = ≡ (2 a- (a-cos (p))) dp, the A1 region singular electrode overlapping area integral S1 (p) = multi-pole (2 a- (a-sin (p))) dp, the double electrode overlapping area integral S2 (p) = multi-pole (2 a- (a+sin (p))) dp, the synthesized signal is F1 (x) S4 (p) +f3 (x) S3 (p) - [ F2 (x) S1 (p) +f4 (x) = s2 (p) ]=2sin (x+p), wherein a represents the vertical height of the sinusoidal pattern, the phase difference p value is calculated, and the straight line displacement value y is obtained by conversion.
Compared with the prior art, the capacitive time grating linear displacement sensor has the advantages that the capacitive time grating linear displacement sensor can be compared with other types of high-precision sensors in precision, and the linear displacement is calculated by taking high-frequency clock pulses as displacement measurement references instead of precision scribing, so that the capacitive time grating linear displacement sensor has the advantages of being simple in structure, low in cost, high in resolution, strong in anti-interference capability and easy to produce.
Drawings
FIG. 1 is a diagram showing the correspondence between the positions of a moving rule and a fixed rule according to the invention;
FIG. 2 is a schematic diagram of the wiring of the electrode of the moving ruler of the invention;
FIG. 3 is a schematic view of the electrode wire connections of the invention;
FIG. 4 is a schematic diagram of an inventive signal generation and data processing system;
Fig. 5 is a graph of phase comparison of an inventive excitation signal and a composite signal.
Detailed Description
In the present invention, unless otherwise indicated, the terms "upper" and "lower" are used generally in the directions shown in the drawings or in the vertical, vertical or gravitational directions, and similarly, for convenience of understanding and description, the terms "left" and "right" are used generally in the directions shown in the drawings, and the terms "inner" and "outer" are used to refer to the inner and outer sides with respect to the outline of each component itself, but the terms of orientation are not intended to limit the present invention.
Referring to fig. 1-5, the invention provides a technical scheme of a capacitive time grating linear displacement sensor, which comprises a fixed ruler and a movable ruler,
The movable ruler consists of a transmitting module;
the fixed length consists of an induction module;
when the fixed ruler and the movable ruler move relatively, the overlapping area of the transmitting module and the sensing module changes;
The transmitting module is connected with four paths of sine wave signals with phase difference of 90 degrees, the sensing module outputs two paths of sensed electric signals which are connected to the subtracter amplifying circuit, and after being shaped by the shaping circuit, the signal phase of the transmitting module is compared with the signal phase of the sensing module;
The phase difference of the two paths of signals is represented by the number of clock pulses in the FPGA, converted into a linear displacement value, directly transmitted to an upper computer for processing and then displayed as linear displacement data, the FPGA controls a digital signal generator to generate four paths of sine signals with 90-degree phase difference to be transmitted to a transmitting electrode of a time grating sensor, the transmitting electrode and an induction electrode perform relative motion;
The transmitting module consists of rectangular transmitting electrodes which are divided into an upper part and a lower part, the sensing module consists of sinusoidal sensing electrodes, the planes of the fixed ruler and the movable ruler are opposite to each other, a vertical distance is reserved between the fixed ruler and the movable ruler, the starting points of the fixed ruler and the movable ruler are positioned at the same position and are both 0, the movable ruler also comprises a transmitting unit of an area A, the transmitting unit is divided into two groups of independent transmitting sheets A0 and A1, the interval pi/2 between two adjacent rectangular transmitting electrodes in the area A, the starting point of A1 is 0, and the starting point of A0 is 0;
The signal transmitted by A1 is F1 (x) =sin (x), and the signal transmitted by A0 is F0 (x) =cos (x);
When the moving ruler and the fixed ruler are relatively parallel in electrode pattern plane, and the moving ruler A area and the fixed ruler B area are relatively moved, the fixed ruler sensing electrode adopts a pair of sine pole pieces with 0 phase difference in spatial position, the shape of the sine pole pieces is formed by connecting a sine function curve with a coordinate axis, and then travelling wave signals are picked up through electric field coupling between the moving ruler and the fixed ruler. When the sensing electrode moves relatively to the transmitting electrode, the linear displacement between the transmitting electrode and the sensing electrode is proportional to the effective area of the capacitor. Assuming that the length of the rectangular electrode in the area A is 2d and the width is 2 pi/4, integrating the linear displacement of the moving rule moving in one time by using an area integration method to obtain delta S;
When the displacement y moves within 0-2 pi/4 ,ΔS1= d*(2π/4)+sin(p)+ cos(p);ΔS2 = d*(2π/4)-sin(p)-cos(p);ΔS3 = d*(2π/4)-sin(p) + cos(p);ΔS4 = d*(2π/4) + sin(p) - cos(p);
When the displacement y moves at 2 pi/4~4 pi/4 ,ΔS1= d*(2π/4) - sin(p) + cos(p);ΔS2=d*(2π/4)+sin(p)-cos(p);ΔS3= d*(2π/4)-sin(p)-cos(p);ΔS4=d*(2π/4)+sin(p)+cos(p);
When the displacement y moves in the range of 4pi/4 to 6pi/4 ,ΔS1= d*(2π/4)-sin(p)-cos(p);ΔS2=d*(2π/4)+sin(p)+cos(p);ΔS3 = d*(2π/4)+sin(p)-cos(p);ΔS4 =d*(2π/4)-sin(p)+cos(p);
When the displacement y moves in the range of 6 pi/4 to 8 pi/4 ,ΔS1= d*(2π/4)+sin(p)-cos(p);ΔS2=d*(2π/4)-sin(p)+cos(p);ΔS3= d*(2π/4)+sin(p)+cos(p);ΔS4 =d*(2π/4)-sin(p)-cos(p);
The S4 electrode emission signal is F1 (x) =sin (x+pi/2), the S1 electrode emission signal is F2 (x) =sin (x+pi), the S3 electrode emission signal is F3 (x) =sin (x+3pi/2), and the S2 electrode emission signal is F4 (x) =sin (x).
The fixed-length device comprises a fixed-length receiving unit, a fixed-length receiving unit and a fixed-length processing unit, wherein the fixed-length receiving unit is divided into two independent receiving sheets B0 and B1, the interval between two adjacent receiving sheets B0, the starting point of B0 is pi/2, the starting point of B1 is 0, the B0 region receives a signal of A0 region, the B1 region receives a signal of A1 region, a rectangular electrode and a double sinusoidal pattern electrode on the fixed-length are both arranged by copper paving of a printed PCB, sinusoidal electrode copper sheets marked with B1 in the B1 region are all connected to rectangular copper sheets marked with Ub1 through wiring, ub1 signals are fed back to the A1 region, sinusoidal electrode copper sheets marked with B0 in the B0 region are all connected to the rectangular copper sheets marked with Ub0 through wiring, and Ub0 signals are fed back to the A0 region;
subtracting the feedback signal received in the B1 area from the feedback signal received in the B0 area to obtain a synthesized signal delta U:
ΔU=F1(x)*S4(p)+F3(x)*S3(p)-[F2(x)*S1(p)+F4(x)*S2(p)],
When the displacement y moves at 0-2pi/4, Δu=2 [ sin (x+p) -cos (x+p) ];
When the displacement y moves at 2pi/4~4 pi/4, Δu=2 [ sin (x+p) +cos (x+p) ];
When the displacement y moves in the range of 4 pi/4 to 6 pi/4, deltaU= -2[ sin (x+p) -cos (x+p) ];
When the displacement y moves at 6 pi/4-8 pi/4, deltaU= -2[ sin (x+p) +cos (x+p) ];
When the displacement y moves in 0-2 pi, the displacement y is just a complete period, and the delta U signal and the transmitted sine signal sin (x) are compared to obtain the relative displacement y value of the movable scale and the fixed scale;
The singular electrodes in the A0 area are marked as S4, the double electrodes in the A0 area are marked as S3, the singular electrodes in the A1 area are marked as S1, the double electrodes in the A1 area are marked as S2, the rectangular electrodes in the movable ruler are all arranged by copper laying of a printed PCB, the rectangular electrodes marked with S1 are all connected together through PCB wiring by punching in the A1 area on the back of the PCB to input sin (x+pi) electric signals, the rectangular electrodes marked with S2 are all connected together through PCB wiring by punching in the A1 area on the back of the PCB to input sin (x+3pi/2) electric signals, the rectangular electrodes marked with S3 are all connected together through PCB wiring by punching in the A0 area on the back of the PCB, the method comprises the steps that A1 area is punched on the back of a PCB board, all rectangular electrodes marked with S4 are connected together through PCB wiring and input sin (x+pi/2) electric signals, signal crosstalk between the electrodes is prevented by a rectangular electrode grounding wire marked with GND, a rectangular electrode marked with Ub1 receives a feedback signal of a fixed-length B1 area and is connected to the negative end of a signal processing subtractor module, a rectangular electrode marked with Ub0 receives a feedback signal of a fixed-length B0 area and is connected to the positive end of the signal processing subtractor module, so that a composite signal is achieved, an S4 electrode emission signal is F1 (x) =sin (x+pi/2), an S1 electrode emission signal is F2 (x) =sin (x+pi/2), and an S2 electrode emission signal is F4 (x) =sin (x);
A0 region singular electrode overlapping area integral S4 (p) = ≡ (2 a- (a+cos (p))) dp, a double electrode overlapping area integral S3 (p) = ≡ (2 a- (a-cos (p))) dp, A1 region singular electrode overlapping area integral S1 (p) = multi-electrode (2 a- (a-sin (p))) dp, a double electrode overlapping area integral S2 (p) = multi-electrode (2 a- (a+sin (p))) dp, a synthesized signal is F1 (x) ×s4 (p) +f3 (x) ×s3 (p) - [ F2 (x) ×s1 (p) +f4 (x) ×s2 (p) ]=2sin (x+p), wherein a represents the vertical height of a sinusoidal pattern, a phase difference p value is calculated, and a linear displacement value y is calculated;
The line marked 1 in fig. 5 is a waveform of a sine excitation signal, and marked 2,3 and 4 are synthetic signal waveforms of 5 pi/8, 6 pi/8 and 7 pi/8 of the motion rule movement respectively, and the displacement of the relative motion between the motion rule and the fixed rule can be reflected by the difference value of the phases of the excitation signal and the synthetic signal.
The above is only a specific embodiment of the present invention, but the technical features of the present invention are not limited thereto. Any simple changes, equivalent substitutions or modifications and the like made on the basis of the present invention to solve the substantially same technical problems and achieve the substantially same technical effects are included in the scope of the present invention.
Claims (6)
1. The utility model provides a grid linear displacement sensor when capacitanc, includes scale and movable scale, its characterized in that:
the movable ruler consists of a transmitting module;
the fixed length consists of an induction module;
when the fixed ruler and the movable ruler move relatively, the overlapping area of the transmitting module and the sensing module changes;
The transmitting module is connected with four paths of sine wave signals with phase difference of 90 degrees, the sensing module outputs two paths of sensed electric signals which are connected to the subtracter amplifying circuit, and after being shaped by the shaping circuit, the signal phase of the transmitting module is compared with the signal phase of the sensing module;
the phase difference of the two paths of signals is represented by the number of clock pulses in the FPGA, converted into a linear displacement value, directly transmitted to an upper computer for processing and then displayed as linear displacement data;
The movable ruler further comprises an emitting unit in an area A, wherein the emitting unit is divided into two groups of independent emitting sheets in an area A0 and an area A1, two adjacent rectangular emitting electrodes in the area A are separated by pi/2, the starting point of A1 is 0, and the starting point of A0 is 0;
The single-number electrode of the A0 area is marked as S4, the double-number electrode of the A0 area is marked as S3, the single-number electrode of the A1 area is marked as S1, the double-number electrode of the A1 area is marked as S2, the electrode emission signal of the S4 is F1 (x) =sin (x+pi/2), the electrode emission signal of the S1 is F2 (x) =sin (x+pi), the electrode emission signal of the S3 is F3 (x) =sin (x+3pi/2), the electrode emission signal of the S2 is F4 (x) =sin (x), wherein x=2 is pi F is t, F represents the frequency of sine waves, and t represents time;
The single electrode overlapping area integral S4 (p) = ≡ (2 a- (a+cos (p))) dp, the double electrode overlapping area integral S3 (p) = ≡ (2 a- (a-cos (p))) dp, the single electrode overlapping area integral S1 (p) = multi-electrode overlapping area integral S2 (p) = multi-electrode overlapping area integral (2 a- (a+sin (p))) dp, the synthesized signal is F1 (x) ×s4 (p) +f3 (x) ×s3 (p) - [ F2 (x) ×s1 (p) +f4 (x) ×s2 (p) ]=2sin (x+p), wherein a represents the vertical height of the sinusoidal pattern, and the phase difference p= (y/8 mm) = 2×pi) is calculated and the linear displacement value y is obtained.
2. The capacitive time grating linear displacement sensor of claim 1, wherein the emitter module comprises rectangular emitter electrodes divided into upper and lower parts, and the sensor module comprises sinusoidal sensor electrodes.
3. The capacitive time grating linear displacement sensor of claim 1, wherein the fixed and movable scales are opposite to each other in parallel, a vertical distance is reserved between the fixed and movable scales, and starting points of the fixed and movable scales are located at the same position and are all 0.
4. The capacitive time-grating linear displacement sensor of claim 1, wherein the signal transmitted by A1 is F1 (x) =sin (x), and the signal transmitted by A0 is F0 (x) =cos (x), wherein x=2×pi×f×t, F represents the frequency of the sine wave, and t represents time.
5. The capacitive time grating linear displacement sensor of claim 4, wherein the fixed-length sensor further comprises a receiving unit of a B area, wherein the receiving unit is divided into two independent receiving pieces of a B0 area and a B1 area, the interval between two adjacent pieces of the B area is 0, the starting point of the B0 area is pi/2, and the starting point of the B1 area is 0.
6. The capacitive time grating linear displacement sensor of claim 5, wherein said B0 region receives an A0 region signal and said B1 region receives an A1 region signal.
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