CN118858320A - A Micro OLED high-precision mask macro inspection device and its use method - Google Patents

Abstract

The present application provides a Micro OLED high-precision mask macro inspection device and a method of using the same, which belongs to the technical field of mask quality inspection equipment, and includes a rectangular inspection darkroom formed by splicing a frame and a cover plate, a filter component is arranged on one side of the top of the cover plate, a flip component is arranged at the lower part of the frame, and an electrical component is arranged at the upper part of the frame. In the above scheme, by setting servo motor 1, flip frame 1, servo motor 2 and flip frame 2, the postures of mask adjustment are enriched, and flip frame 1 and flip frame 2 can both provide an adjustment range of 180°, with flexible adjustment effect to improve the comprehensiveness of mask macro inspection without dead angles.

Description

A Micro OLED high-precision mask macro inspection device and its use method

Technical Field

The present application relates to the technical field of mask quality inspection equipment, and in particular to a Micro OLED high-precision mask macro inspection device and a method for using the same.

Background Art

Micro OLED mask cleaning equipment is used to remove impurities and film materials that may exist on the wafer evaporation mask surface and then reuse it cyclically after cleaning. Therefore, it has high requirements for the mask cleaning effect, thereby preventing impurities from affecting the yield and product performance of precision display screens.

At present, with the continuous improvement of the advanced level of micro-display product manufacturing technology, the control requirements for contaminants on the surface of wafer masks are constantly increasing. At this stage, the cleaning effect of the mask needs to be tested during the cleaning process. Conventional AOI micro-inspection cannot detect large-area macro defects (such as water stains, water marks or material accumulation residues) or detect explosions, which will cause product defects to a certain extent.

Summary of the invention

In view of this, the purpose of this application is to provide a Micro OLED high-precision mask macro inspection device and its use method, so as to comprehensively and macroscopically detect defective conditions of the mask and reduce defective products that affect production line operations.

In order to solve the above technical problems, this application provides the following technical solutions:

A Micro OLED high-precision mask macro inspection device, comprising an inspection darkroom of a rectangular structure formed by splicing a frame and a cover plate, a filter component is arranged on one side of the top of the cover plate, a flip component is arranged at the lower part of the frame, and an electrical component is arranged at the upper part of the frame;

The filter assembly includes a fan installed at the opening of the cover plate, and a filter box arranged at the air outlet position of the fan;

The flip assembly includes a frame installed on the right side of the frame, one side of the frame is fixedly connected to a servo motor 1, the output end of the servo motor 1 is fixedly connected to a flip frame 1, the side wall of the flip frame 1 is fixedly connected to a servo motor 2, and the output end of the servo motor 2 is fixedly connected to a flip frame 2;

The opening of the second flip frame is provided with a slide rail, a slidable slider is provided inside the slide rail, an electric push rod is connected to the top of the slider, a clamping block is fixedly connected to the telescopic end of the electric push rod, and three continuous steps are provided on the side wall of the clamping block;

The electrical component includes a mounting frame arranged at the upper left corner of the frame, a light source controller is fixedly connected to the bottom of the mounting frame, a light source 1 located above the flip frame 1 is arranged on the side wall of the mounting frame, and a light source 2 is arranged on one side of the light source 1;

The vertical part of the frame is covered by a baffle, a control screen is arranged on the right side of the baffle, and an optical detection camera is connected to the back side of the control screen.

Preferably, a servo motor three is arranged at the end of the slide rail, and a lead screw is fixedly connected to the output end of the servo motor three, and the lead screw runs through the slide block.

Preferably, the clamping block includes a step 1 covering the top of the electric push rod, a step 2 located on one side of the step 1, and a step 3 located below the step 2;

A supporting plate is connected between two opposite steps three.

Preferably, a limit block is provided on both the first step and the second step, and the limit block includes a right-angled inner angle facing the center point of the second flip frame.

Preferably, the light source is a UV light source, the wavelength of the light source is preferably 365nm, the ultraviolet light intensity is preferably ≥72000μw/cm2, the brightness can be adjusted arbitrarily from 0-100%, the brightness uniformity is ≥95%, and autofocus is preferably configured.

Preferably, the second light source is an LED white light source, the light source brightness is ≥2000lm, the brightness can be adjusted arbitrarily from 0 to 100%, and the brightness uniformity is ≥95%.

Preferably, the installation height of the optical detection camera is consistent with the installation height of light source one.

Preferably, the fan is arranged directly above the first turning frame.

Preferably, a hollow guide plate is provided at the bottom of the frame.

On the other hand, the present application provides a method for using a Micro OLED high-precision mask macro inspection device:

S1: According to the size of the mask, place it on the clamping block, and use the electric push rod to provide clamping force to fix the mask;

S2: The servo motor drives the flip frame to flip to a suitable angle to adjust the mask posture;

S3: Use servo motor 2 to drive flip frame 2 to flip to a suitable angle and adjust the mask posture:

S4: Turn on light source 1 and light source 2 through the light source controller, set the light source type and power ratio;

S5: Inspect the mask using an optical inspection camera, take photos to record images of the affected area at different viewing angles, compare with the detailed image library, and calibrate the mask inspection results.

Compared with the prior art, this application has at least the following beneficial effects:

In the above scheme, by setting servo motor 1, flip frame 1, servo motor 2 and flip frame 2, the posture of mask adjustment is enriched. Both flip frame 1 and flip frame 2 can provide an adjustment range of 180°, with flexible adjustment effect to improve the comprehensiveness of mask macro inspection without blind spots.

By setting up servo motor three, slide rails, sliders and screw rods, two symmetrical threads are set at both ends of the screw rod. The distance between the two sliders is adjusted by the forward and reverse rotation of servo motor three to further adapt to the fixing needs of mask plates of different sizes.

By arranging the clamping block, step one, step two and step three, the size of the mask can be well adapted, the space inside the flip frame two is fully utilized, and it can be compatible with masks of various sizes, thereby improving the efficiency of the production line.

By setting light source one and light source two, we can enrich the types of light sources, improve inspection efficiency, reduce the risk of missed detection, improve detection accuracy, reduce the cost of review operations, and effectively intercept defective masks.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated herein and constitute a part of the specification, illustrate embodiments of the present disclosure and, together with the description, further serve to explain the principles of the present disclosure and to enable those skilled in the relevant art to make and use the present disclosure.

FIG1 is a schematic diagram of the overall structure of the present application;

FIG2 is a schematic diagram of the framework structure in this application;

FIG3 is a schematic diagram of the structure of a flip frame in the present application;

FIG4 is a schematic diagram of the position of the optical detection camera in this application;

FIG5 is a schematic diagram of the clamping block structure in this application;

FIG6 is a schematic diagram of the fan structure in this application;

FIG. 7 is a schematic diagram of the support plate structure in this application.

[Reference Signs]

1. Frame; 101. Baffle; 102. Guide plate; 2. Cover plate; 3. Fan; 301. Filter box; 4. Rack; 401. Servo motor one; 402. Turn frame one; 403. Servo motor two; 404. Turn frame two; 5. Slide rail; 501. Slider; 502. Electric push rod; 503. Servo motor three; 504. Screw; 6. Clamp; 601. Step one; 602. Step two; 603. Step three; 604. Support plate; 605. Limit block; 7. Mounting frame; 701. Light source controller; 702. Light source one; 703. Light source two; 8. Control screen; 9. Optical detection camera.

DETAILED DESCRIPTION

The following is a detailed description of a Micro OLED high-precision mask macro inspection device and its use method provided by the present application in combination with the accompanying drawings and specific embodiments. At the same time, it is explained here that in order to make the embodiments more detailed, the following embodiments are the best and preferred embodiments, and those skilled in the art may also adopt other alternative methods to implement some known technologies; and the accompanying drawings are only for a more specific description of the embodiments, and are not intended to specifically limit the present application.

A Micro OLED high-precision mask macro inspection device as shown in FIG. 1 to FIG. 7 , the embodiment of the present application provides an inspection darkroom having a rectangular structure formed by splicing a frame 1 and a cover plate 2, a filter component is provided on one side of the top of the cover plate 2, a flip component is provided at the lower part of the frame 1, and an electrical component is provided at the upper part of the frame 1;

The filter assembly includes a fan 3 installed at the opening of the cover plate 2, and a filter box 301 arranged at the air outlet position of the fan 3;

The flip assembly includes a frame 4 installed on the right side of the frame 1, a servo motor 401 is fixedly connected to one side of the frame 4, an output end of the servo motor 401 is fixedly connected to a flip frame 402, a servo motor 403 is fixedly connected to the side wall of the flip frame 402, and an output end of the servo motor 403 is fixedly connected to a flip frame 404;

The opening of the second flip frame 404 is provided with a slide rail 5, a slidable slider 501 is provided inside the slide rail 5, the top of the slider 501 is connected with an electric push rod 502, the telescopic end of the electric push rod 502 is fixedly connected with a clamping block 6, and the side wall of the clamping block 6 is provided with three continuous steps;

The electrical assembly includes a mounting frame 7 disposed at the upper left corner of the frame 1, a light source controller 701 is fixedly connected to the bottom of the mounting frame 7, a light source 1 702 located above the flip frame 1 402 is disposed on the side wall of the mounting frame 7, and a light source 2 703 is disposed on one side of the light source 1 702;

The vertical part of the frame 1 is covered by a baffle 101, a control screen 8 is arranged on the right side of the baffle 101, and an optical detection camera 9 is connected to the back of the control screen 8;

In actual use, according to the size of the mask, it is placed on a suitable step on the clamping block 6, the mask is supported by the step, the clamping block 6 is driven to move by the electric push rod 502, and the two clamping blocks 6 on the opposite sides are close to each other, so that the clamping block 6 can stably clamp the mask. The three steps correspond to the masks of three different sizes, so that the device as a whole has good flexibility in use.

The servo motor 1 401 with a brake drives the flip frame 1 402 to rotate, and the position and posture of the mask are adjusted. Further, the servo motor 2 403 with a brake drives the flip frame 2 404 to rotate, and the posture of the mask adjustment is enriched. The flip frame 1 402 and the flip frame 2 404 can both provide an adjustment range of 180°, and have a flexible adjustment effect.

The electric push rod 502 controls the position of the clamping block 6 to adjust the position of the mask from the length direction, and the sliding block 501 slides inside the slide rail 5 to adjust the position of the mask from the width direction, further improving the flexibility of adjusting the position of the mask.

The light source controller 701 turns on the light source 1 702 and the light source 2 703, sets the light source type and power ratio,

The mask is inspected by the optical inspection camera 9, and images are recorded in the affected areas at different viewing angles. The inspection results of the mask are calibrated by comparing the detailed image library, so as to achieve the purpose of macroscopic inspection of the mask and reduce defective products in production line operation.

In this embodiment, as shown in FIG. 3 and FIG. 6 , a servo motor 3 503 is disposed at the end of the slide rail 5 , and a screw rod 504 is fixedly connected to the output end of the servo motor 3 503 , and the screw rod 504 is disposed through the slider 501 ;

The screw rod 504 is driven to rotate by the servo motor 503 to adjust the position of the slider 501. Two symmetrical threads are provided at both ends of the screw rod 504. The distance between the two sliders 501 is adjusted by the forward and reverse rotation of the servo motor 503 to further adapt to the fixing needs of mask plates of different sizes.

As shown in FIG. 5 and FIG. 7 , the clamping block 6 includes a step 1 601 covering the top of the electric push rod 502 , a step 2 602 located on one side of the step 1 601 , and a step 3 603 located below the step 2 602 ;

A support plate 604 is connected between two opposite steps 603;

The arrangement of step 1 601, step 2 602 and step 3 603 can well adapt to the size of the mask, fully utilize the space inside the flip frame 2 404, can be compatible with masks of various sizes, and improve the production line efficiency;

The support plate 604 is provided to prevent the mask from falling.

As shown in FIG. 5 and FIG. 7 , a limit block 605 is disposed on both the step 1 601 and the step 2 602 , and the limit block 605 includes a right-angled inner angle toward the center point of the flip frame 2 404 ;

The limiting blocks 605 on the step 1 601 and the step 2 602 can effectively play a limiting role, further reducing the situation where the mask plate slides off.

As shown in FIG. 2 , light source 1 702 is a UV light source, the wavelength of the light source is preferably 365 nm, the ultraviolet light intensity is preferably ≥ 72000 μw/cm2, the brightness can be adjusted arbitrarily from 0 to 100%, the brightness uniformity is ≥ 95%, and auto focus is preferably configured;

Light source 2 703 is LED white light source, light source brightness ≥ 2000lm, brightness 0-100% can be adjusted arbitrarily, brightness uniformity ≥ 95%;

Through the cooperation of light source 1 702 and light source 2 703, the types of light sources are enriched and the inspection efficiency is improved.

As shown in FIG1 , the installation height of the optical detection camera 9 is consistent with the installation height of the light source 1 702;

This is to prevent the optical detection camera 9 from interfering with the light source 1 702 and the light source 2 703, while ensuring good imaging quality and achieving good inspection results.

As shown in FIG. 1 and FIG. 2 , the fan 3 is disposed directly above the flip frame 1 402;

The fan 3 can create a positive pressure environment in the inspection darkroom to reduce the entry of external dust. Together with the filter box 301, it can effectively control the amount of dust in the inspection darkroom, reduce the impact of dust on the mask, and improve the yield rate.

As shown in FIG2 , a hollow guide plate 102 is provided at the bottom of the frame 1;

The cover plate 2, the baffle plate 101 and the guide plate 102 close the hollow part of the frame 1 to ensure the independence of the inspection darkroom, reduce the interference of the external environment on the macro inspection process, and ensure the cleanliness of the inspection darkroom.

Furthermore, a Micro OLED high-precision mask macro inspection device is used in the following steps:

S1: according to the size of the mask, place it on the clamping block 6, and use the electric push rod 502 to provide a clamping force to fix the mask;

S2: The servo motor 401 drives the flip frame 402 to flip to a suitable angle to adjust the mask posture;

S3: The servo motor 403 drives the flip frame 404 to flip to a suitable angle, and adjusts the mask posture:

S4: Turn on the light source 1 702 and the light source 2 703 through the light source controller 701, and set the light source type and power ratio;

S5: Inspect the mask by using the optical inspection camera 9, take photos to record images of the affected area at different viewing angles, compare with the detailed image library, and calibrate the mask inspection result.

Claims (10)

1. A Micro OLED high-precision mask macro inspection device, comprising a rectangular inspection darkroom formed by splicing a frame (1) and a cover plate (2), characterized in that a filter component is arranged on one side of the top of the cover plate (2), a flip component is arranged at the lower part of the frame (1), and an electrical component is arranged at the upper part of the frame (1); The filter assembly comprises a fan (3) installed at an opening of the cover plate (2), and a filter box (301) arranged at an air outlet position of the fan (3); The flip assembly comprises a frame (4) installed on the right side inside the frame (1), one side of the frame (4) is fixedly connected to a servo motor 1 (401), the output end of the servo motor 1 (401) is fixedly connected to a flip frame 1 (402), the side wall of the flip frame 1 (402) is fixedly connected to a servo motor 2 (403), and the output end of the servo motor 2 (403) is fixedly connected to a flip frame 2 (404); The opening portion of the second flip frame (404) is provided with a slide rail (5), a slidable slider (501) is provided inside the slide rail (5), the top of the slider (501) is connected to an electric push rod (502), the telescopic end of the electric push rod (502) is fixedly connected to a clamping block (6), and the side wall of the clamping block (6) is provided with three continuous steps; The electrical component comprises a mounting frame (7) arranged at the upper left corner inside the frame (1); a light source controller (701) is fixedly connected to the bottom of the mounting frame (7); a light source one (702) located above the flip frame one (402) is arranged on the side wall of the mounting frame (7); and a light source two (703) is arranged on one side of the light source one (702); The vertical part of the frame (1) is covered by a baffle (101), a control screen (8) is arranged on the right side of the baffle (101), and an optical detection camera (9) is connected to the back of the control screen (8). 2. The Micro OLED high-precision mask macro inspection device according to claim 1 is characterized in that: a servo motor three (503) is arranged at the end of the slide rail (5), and a lead screw (504) is fixedly connected to the output end of the servo motor three (503), and the lead screw (504) is arranged through the slider (501). 3. The Micro OLED high-precision mask macroscopic inspection device according to claim 1, characterized in that: the clamping block (6) comprises a step 1 (601) covering the top of the electric push rod (502), a step 2 (602) located on one side of the step 1 (601), and a step 3 (603) located below the step 2 (602); A support plate (604) is connected between two opposite steps three (603). 4. The Micro OLED high-precision mask macro inspection device according to claim 3, characterized in that: a limit block (605) is provided on both the step 1 (601) and the step 2 (602), and the limit block (605) includes a right-angled inner angle facing the center point of the flip frame 2 (404). 5. The Micro OLED high-precision mask macro inspection device according to claim 1 is characterized in that: the light source 1 (702) is a UV light source, the wavelength of the light source is preferably 365nm, the ultraviolet light intensity is preferably ≥72000μw/cm2, the brightness is 0-100% adjustable, the brightness uniformity is ≥95%, and autofocus is preferably configured. 6. The Micro OLED high-precision mask macro inspection device according to claim 1 is characterized in that: the second light source (703) is an LED white light source, the light source brightness is ≥2000lm, the brightness can be adjusted arbitrarily from 0 to 100%, and the brightness uniformity is ≥95%. 7. The Micro OLED high-precision mask macro inspection device according to claim 1, characterized in that the installation height of the optical inspection camera (9) is consistent with the installation height of the light source 1 (702). 8. The Micro OLED high-precision mask macroscopic inspection device according to claim 1, characterized in that: the fan (3) is arranged directly above the flip frame 1 (402). 9. The Micro OLED high-precision mask macroscopic inspection device according to claim 1, characterized in that a hollow guide plate (102) is provided at the bottom of the frame (1). 10. The method for using the Micro OLED high-precision mask macro inspection device according to any one of claims 1 to 9, characterized in that: S1: placing the mask on a clamping block (6) according to its size, and providing a clamping force through an electric push rod (502) to fix the mask; S2: Using servo motor 1 (401) to drive flip frame 1 (402) to flip to a suitable angle, and adjust the mask posture; S3: The servo motor 2 (403) drives the flip frame 2 (404) to flip to a suitable angle and adjust the mask posture: S4: Turn on light source 1 (702) and light source 2 (703) through the light source controller (701), and set the light source type and power ratio; S5: Inspect the mask using an optical inspection camera (9), take photos to record images of the affected area at different viewing angles, compare with the detailed image library, and calibrate the mask inspection results.