CN118835211B - High-efficiency coating device with zirconium dioxide raw material - Google Patents

Abstract

The invention relates to the technical field of high-efficiency coating devices, in particular to a high-efficiency coating device with zirconium dioxide raw materials, which also comprises a rotary switching mechanism, a vertical rotator and a horizontal rotator, wherein each object placing table is provided with a rotatable vertical rotary rod, the high-efficiency coating device with zirconium dioxide raw materials can enable workpieces horizontally placed on the object placing table to carry out rotary coating, and simultaneously enable the workpieces to be clamped on the vertical rotary rods, the device has the advantages that the workpiece with the bottom needing to be coated can be used, the maintenance cost and the occupied area of the device are reduced, the workpiece can be pushed through the workpiece after being clamped on the push ring, the workpiece can be automatically locked, the locking process is rapid, in addition, when the workpiece is pushed, the transmission column can be clamped between the transmission column and the push column more smoothly through workers, the push column can be guaranteed to drive the transmission column to rotate, and after the clamping is completed, the clamping plate can be locked through the second baffle ring.

Description

High-efficiency film plating device with zirconium dioxide raw material

Technical Field

The invention relates to the technical field of high-efficiency coating devices, in particular to a high-efficiency coating device with zirconium dioxide raw materials.

Background

The vacuum coating material is mainly prepared by mixing silicon dioxide, zirconium dioxide, tungsten trioxide, titanate, chromium fluoride, cryolite and nitride. And then placing the vacuum coating material into a coating device, and heating to enable the gaseous coating material to enter the reaction chamber for coating.

Chinese patent publication No. CN202021412068.8 discloses a vacuum coating apparatus comprising a reaction chamber and a pipeline assembly. The reaction chamber is internally provided with a bracket for placing the workpiece to be coated, and is provided with at least one feed port and one or more extraction ports, wherein the feed port of the reaction chamber is used for adding the chemical monomer gas into the reaction chamber. The pipeline assembly comprises a vacuumizing pipeline, wherein the vacuumizing pipeline is suitable for communicating the vacuumizing hole of the reaction chamber with the vacuum pump so as to vacuumize the reaction chamber through the vacuumizing hole.

However, although the workpiece can be placed on the object placing table, the coating is realized through the contact of the coating gas and the workpiece, the contact surface between the workpiece and the object placing table cannot be coated, and the workpiece which needs to be coated at the bottom cannot be processed by the equipment. If a coating device is externally designed for the workpiece of which the bottom is required to be coated, the floor area of a factory is caused, and the device is required to be maintained frequently, so that more manpower and material resources are wasted. Therefore, a high-efficiency coating device with zirconium dioxide raw materials is required to be designed, and the device can be suitable for being used for horizontally-placed coated workpieces and workpieces needing bottom coating, and the maintenance cost and the occupied area of the device are reduced.

Disclosure of Invention

Aiming at the technical defects, the invention aims to provide the high-efficiency coating device with the zirconium dioxide raw material, which can be suitable for horizontally-placed coated workpieces and workpieces needing bottom coating, and reduces the maintenance cost and the occupied area of the device.

In order to achieve the above purpose, the present invention adopts the following technical scheme: the invention provides a high-efficiency film plating device with zirconium dioxide raw materials, which comprises a reaction chamber and a central rotating column, wherein a rotator for driving the central rotating column to rotate is fixedly arranged at the top of the reaction chamber, a plurality of hollow rotating columns capable of rotating vertically are fixedly arranged in the reaction chamber, a plurality of object placing tables are fixedly arranged on each hollow rotating column, a vacuum extraction opening and a gas injection opening are arranged on the reaction chamber, the vacuum extraction opening is used for vacuum equipment to vacuumize the interior of the reaction chamber, the gas injection opening is used for gasification equipment to inject gas required by film plating into the reaction chamber, the reaction chamber is provided with an opening and closing door opposite to the positions of the plurality of hollow rotating columns, the opening and closing door is used for a worker to place a workpiece on a placing table, the reaction chamber further comprises a rotary switching mechanism, a vertical rotator and a horizontal rotator, each placing table is provided with a rotatable vertical rotating rod, the horizontal rotator is fixedly arranged at the bottom of the inner edge of the reaction chamber, the horizontal rotator is used for transmitting the rotating force of the central rotating column to the hollow rotating column, the vertical rotator is vertically and slidably arranged on the outer edge of the central rotating column, the rotary switching mechanism is fixedly arranged on the horizontal rotator, and the rotary switching mechanism is used for jacking the vertical rotator upwards; when the rotation switching mechanism is not lifted upwards, the vertical rotator is in transmission connection with the horizontal rotator, the vertical rotator is separated from the vertical rotating rod, and when the rotation switching mechanism is lifted upwards, the vertical rotator is in transmission connection with the vertical rotating rod, and the vertical rotator is separated from the horizontal rotator.

Preferably, a plurality of clamping strips are arranged on the outer edge of the central rotating column, the vertical rotator comprises a sleeve sleeved on the outer edge of the central rotating column, a plurality of clamping grooves are formed in the inner edge of the sleeve, and the clamping grooves are clamped in the clamping strips.

Preferably, the outer fringe of perpendicular circulator is last fixedly provided with the multilayer carousel, be located the carousel of bottom and rotatory shifter's jacking end contact, all fixedly on every carousel be provided with a plurality of push rods, a plurality of push rods are along the circumferencial direction evenly distributed of carousel, the one end that perpendicular rotary rod is close to the carousel is provided with the cardboard, fixedly on the cardboard be provided with a plurality of transmission posts, a plurality of transmission posts are along the circumferencial direction evenly distributed of cardboard, after the carousel is upwards jacked by rotatory shifter, the tip of push rod will insert in the transmission post, sheathed tube outer fringe bottom is fixed and is provided with a plurality of push rods, be provided with a plurality of transmission bars on the horizontal circulator, when the sleeve pipe is in initial position, every transmission bar is all inserted and is located between two push rods, when the carousel is upwards jacked, the push rod will be taken out from between two transmission bars.

Preferably, the horizontal rotator further comprises a rotating seat, a toothed ring and a plurality of gears, wherein an avoidance hole for a sleeve to pass through is formed in the middle of the rotating seat, a transmission bar is fixedly arranged on the inner wall of the avoidance hole, the rotating seat is rotatably arranged in the reaction cavity, the toothed ring is fixedly arranged on the rotating seat, the gears are respectively and fixedly arranged on a plurality of hollow rotating columns, the gears are all meshed with the toothed ring, and rotating seats are fixedly arranged at the upper end and the lower end of the hollow rotating columns.

Preferably, still include roating seat, powerful magnet, push away the ring, outer support mechanism and card post, fixedly be provided with the pipe on the outer fringe of hollow roating post, perpendicular rotary rod and pipe sliding connection, put thing platform and locate the lid at box body top including box body and lid, the pipe is located the inside of box body, the one end fixed connection of card post and perpendicular rotary rod, powerful magnet fixed mounting is on the outer fringe of card post, the outer fringe of card post is located to the push away the ring cover, be provided with the baffle ring one that is used for blockking the work piece on the outer fringe of push away the ring, outer support mechanism fixed mounting is in the tip of card post, outer support mechanism is connected with push away the ring transmission, when pushing away the ring motion, outer support mechanism will outwards spread.

Preferably, the outer supporting mechanism comprises a cover plate, four hinging rods, four sliding blocks and four sliding rails, wherein the cover plate is fixedly arranged at the end part of the clamping column, the four sliding rails are fixedly arranged on the push ring, the sliding blocks are in sliding connection with the sliding rails, one end of each hinging rod is hinged with the sliding block, and the other end of each hinging rod is hinged with the cover plate.

Preferably, the outer fringe in the bottom of carousel is provided with keeps off ring two, keeps off ring two and carousel fixed connection through the go-between, and the cardboard is the toper structure away from one side of transmission post, and rotatory shifter's jacking end is contradicted with the go-between.

Preferably, the rotary switching mechanism comprises a plurality of jacking push rods, the jacking push rods are fixedly arranged on the rotary seat, and a ball seat is fixedly arranged at the top of each jacking push rod. The top of the ball seat is abutted against the connecting ring.

Preferably, the outer fringe cover of perpendicular rotary rod is equipped with reset spring, is fixedly provided with the third of backing ring on the outer fringe of perpendicular rotary rod, and reset spring's one end is contradicted with the pipe, and reset spring's the other end is contradicted with the third of backing ring.

The high-efficiency coating device for the zirconium dioxide raw material has the advantages that the workpiece horizontally placed on the object placing table can be subjected to rotary coating, meanwhile, the workpiece can be clamped on the vertical rotary rod, the workpiece with the bottom needing coating can be used by the device, and the maintenance cost and the occupied area of the device are reduced.

And after the work piece card is gone into on pushing away the ring, can promote through the work piece, carry out automatic locking to the work piece, locking process is rapid to when promoting, can be through the workman more smooth and easy with the transmission post with push away the joint between the post, guarantee to push away the post and can drive the transmission post and rotate, and after the joint is accomplished, can lock the cardboard through backing ring two, guarantee that the cardboard can not take place the separation when rotatory.

According to the aperture difference of every work piece, can dismantle the change between card post and the perpendicular rotary rod to make the device can be applicable to more work pieces and use.

Drawings

In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic perspective view of the present invention.

FIG. 2 is a schematic perspective view of the reaction chamber according to the present invention.

Fig. 3 is a partial cross-sectional view of the present invention.

Fig. 4 is an exploded perspective view of the central spin column and sleeve.

Fig. 5 is a partial perspective view of the vertical rotator.

Fig. 6 is a partial perspective view of the horizontal rotator.

Fig. 7 is a schematic view of a partial perspective structure of the present invention.

Fig. 8 is a partial enlarged view at a of fig. 3.

Fig. 9 is a partial schematic view of a worker pushing the vertical rotation lever.

Fig. 10 is a schematic perspective view of the outer support mechanism.

FIG. 11 is a cross-sectional view of the present invention after the drive post is snapped into place with the push post.

FIG. 12 is an exploded perspective view of the outer strut mechanism

The reference numerals are 1, a reaction chamber, 1a, a vacuum extraction opening, 1b, a gas injection opening, 1c, an opening and closing door, 2, a storage table, 2a, a vertical rotary rod, 2b, a clamping plate, 2c, a transmission column, 2d, a box body, 3, a rotator, 4, a central rotary column, 4a, clamping strips, 5, a hollow rotary column, 5a, a conduit, 6, a rotary switching mechanism, 6a, a jacking push rod, 6b, a ball seat, 7, a vertical rotary machine, 7a, a sleeve, 7a1, a clamping groove, 7a2, a push rod, 7b, a rotary table, 7c, a push column, 7d, a baffle ring II, 8, a horizontal rotary machine, 8a, a transmission strip, 8b, a rotary seat, 8c, a toothed ring, 8d, a gear, 9, a rotary seat, 10, a powerful magnet, 11, a push ring, 11a, a baffle ring I, 12, an outer support mechanism, 12a, a sliding block 12b, a sliding rail, 12c, a hinge rod, 12d, a cover plate, 13, a clamp column, 14 and a reset spring.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

The invention provides a high-efficiency film plating device with zirconium dioxide raw materials, which comprises a reaction chamber 1 and a central rotating column 4, wherein the top of the reaction chamber 1 is fixedly provided with a rotator 3 for driving the central rotating column 4 to rotate, a plurality of hollow rotating columns 5 capable of vertically rotating are fixedly arranged in the reaction chamber 1, each hollow rotating column 5 is fixedly provided with a plurality of object placing tables 2, a vacuum extraction opening 1a and a gas injection opening 1b are arranged on the reaction chamber 1, the vacuum extraction opening 1a is used for vacuum equipment to vacuumize the reaction chamber 1, the gas injection opening 1b is used for gasification equipment to inject gas required by film plating into the reaction chamber 1, the position of the reaction chamber 1 facing the plurality of hollow rotating columns 5 is provided with a door 1c, the door 1c is used for workers to place workpieces on the object placing tables 2, the vertical rotating switching mechanism 6, the vertical rotating column 7 and the horizontal rotating device 8 are respectively arranged on the object placing tables 2, the vertical rotating mechanism 8 is fixedly arranged on the reaction chamber 1, the vertical rotating column 8 is fixedly arranged on the inner edge of the rotating column 4, and the vertical rotating column 7 is arranged on the vertical rotating column 4 when the vertical rotating mechanism is arranged on the vertical rotating column 7, and the vertical rotating column 7 is rotatably driven to rotate, namely, the vertical rotating mechanism 7 is arranged on the vertical rotating column 4 in the vertical rotating column 4, and the vertical rotating mechanism is vertically arranged on the rotating column 4, when the vertical rotating mechanism is rotatably and the vertical column is rotatably arranged;

When rotation switching mechanism 6 does not jack up, vertical rotator 7 and horizontal rotator 8 transmission are connected, and vertical rotator 7 and vertical rotary rod 2a separation, when center column 4 rotated promptly, center column 4 would drive vertical rotator 7 and rotate, and vertical rotator 7 would drive horizontal rotator 8 through transmission connection and rotate, and horizontal rotator 8 can drive hollow column 5 and rotate for hollow column 5 drives a plurality of thing tables 2 and rotates, and a plurality of work pieces that make place on putting thing table 2 top surface all can be close to reaction chamber 1's inner wall one by one more for the work piece can be better by the coating film. The object placing table 2 drives the vertical rotating rod 2a to horizontally rotate, but the vertical rotating rod 2a cannot collide with the vertical rotator 7, because the vertical rotating rod 2a is not lifted upwards.

When the rotation switching mechanism 6 is lifted up, the vertical rotator 7 is in transmission connection with the vertical rotating rod 2a, and the vertical rotator 7 is separated from the horizontal rotator 8, that is, when the central rotating column 4 rotates, the central rotating column 4 drives the vertical rotating rod 2a to rotate through the vertical rotator 7. The workpiece is clamped at the end of the vertical rotating rod 2a, and when the vertical rotating rod 2a rotates, the workpiece can be driven to vertically rotate, so that the bottom of the workpiece can be coated, the workpiece can be driven to rotate after being additionally arranged, and the workpiece can be better contacted with coating gas, namely better coating can be achieved.

Through the mode, the device can be suitable for being used on a workpiece which is horizontally placed and coated with the film and a workpiece which needs to be coated with the film at the bottom, and the maintenance cost and the occupied area of the device are reduced.

In order to realize that the vertical rotator 7 can vertically slide along the central rotating column 4, and the vertical rotator 7 can be driven to rotate when the central rotating column 4 rotates, for this purpose, as shown in fig. 4, a plurality of clamping strips 4a are arranged on the outer edge of the central rotating column 4, the vertical rotator 7 comprises a sleeve 7a sleeved on the outer edge of the central rotating column 4, a plurality of clamping grooves 7a1 are formed in the inner edge of the sleeve 7a, the clamping grooves 7a1 are clamped in the clamping strips 4a, the central rotating column 4 can rotate through the central rotating column 4 by driving the sleeve 7a through the clamping grooves 7a1, and when the vertical rotator 7 is lifted upwards, the central rotating column 4 can still drive the sleeve 7a to rotate due to the fact that the clamping grooves 7a1 are still clamped with the clamping strips 4a, namely, the vertical rotator 7 always keeps rotating.

In order to realize that when the rotary switching mechanism 6 is not lifted upwards, the vertical rotator 7 is in transmission connection with the horizontal rotator 8, and when the rotary switching mechanism 6 is lifted upwards, the vertical rotator 7 is in transmission connection with the vertical rotary rod 2a, therefore, as shown in fig. 3 and 5, the multi-layer rotary table 7b is fixedly arranged on the outer edge of the vertical rotator 7, the rotary table 7b positioned at the bottommost layer is in contact with the lifting end of the rotary switching mechanism 6, when the rotary switching mechanism 6 is lifted upwards, the multi-layer rotary table 7b moves upwards by pushing the bottommost layer rotary table 7b upwards, each rotary table 7b is fixedly provided with a plurality of push columns 7c, one end, close to the rotary table 7b, of the vertical rotary rod 2a is provided with a clamping plate 2b, a plurality of transmission columns 2c are fixedly arranged on the clamping plate 2b, the plurality of transmission columns 2c are uniformly distributed along the circumferential direction of the clamping plate 2b, and after the rotary table 7b is lifted upwards by the rotary switching mechanism 6, the end of the push columns 7c are inserted into the transmission columns 2c, and the transmission columns 2c can be driven to move in a mode of rotating columns 2c by pushing the rotary columns through the rotary columns 7 c. The outer fringe bottom of sleeve pipe 7a is fixed to be provided with a plurality of push bars 7a2, is provided with a plurality of transmission bars 8a on the horizontal rotator 8, and when sleeve pipe 7a was in initial position, every transmission bar 8a all was inserted and was located between two push bars 7a2 for when sleeve pipe 7a rotated, can promote transmission bar 8a and rotate, can drive horizontal rotator 8 through transmission bar 8a and rotate. When the turntable 7b is lifted upwards, the push bar 7a2 is pulled out from between the two transmission bars 8a, so that when the sleeve 7a rotates, the sleeve 7a cannot contact the transmission bars 8a, i.e. the sleeve 7a cannot drive the horizontal rotator 8 to rotate, and the hollow rotating columns 5 cannot rotate. That is, in the above-described manner, when the rotation switching mechanism 6 is not lifted up, the center spin column 4 transmits power to the vertical rotator 7, and the horizontal rotator 8 can be driven by the pushing bar 7a2 and the driving bar 8a, so that the center spin column 5 rotates. After the rotary switching mechanism 6 is lifted upwards, the transmission bar 8a is separated from the push bar 7a2, and the push column 7c is clamped with the transmission column 2c, so that the sleeve 7a can drive the vertical rotary rod 2a to rotate when rotating. That is, when the rotation switching mechanism 6 is not lifted up, the vertical rotator 7 is in transmission connection with the horizontal rotator 8, and when the rotation switching mechanism 6 is lifted up, the vertical rotator 7 is in transmission connection with the vertical rotating rod 2 a.

In order to convert the power of the transmission bar 8a into the rotation power of the hollow rotary column 5, as shown in fig. 3, 5 and 6, the horizontal rotator 8 further comprises a rotary seat 8b, a toothed ring 8c and a plurality of gears 8d, an avoidance hole for the sleeve 7a to pass through is formed in the middle of the rotary seat 8b, the transmission bar 8a is fixedly mounted on the inner wall of the avoidance hole, the rotary seat 8b is rotatably mounted in the reaction chamber 1, the toothed ring 8c is fixedly mounted on the rotary seat 8b, the gears 8d are fixedly mounted on the hollow rotary columns 5 respectively, the gears 8d are meshed with the toothed ring 8c, and rotary seats 9 are fixedly arranged at the upper end and the lower end of the hollow rotary column 5. The transmission strip 8a is driven to rotate, so that the transmission strip 8a drives the toothed ring 8c to rotate through the swivel seat 8b, namely, the toothed ring 8c can drive the plurality of hollow rotary columns 5 to rotate simultaneously through meshing with the gear 8d, and the object placing table 2 on each hollow rotary column 5 is driven to rotate. It should be noted that, when a plurality of vertical rotating rods 2a are required to rotate, the axes of the vertical rotating rods 2a will be perpendicular to the axis of the central rotating column 4, so that the push column 7c can be in a plugging fit with the transmission column 2 c.

After the workpiece is clamped with the end part of the vertical rotating rod 2a, no blocking exists between the end part of the vertical rotating rod 2a and the workpiece, so that the workpiece is easy to throw out. If an electrically or pneumatically controlled damper is provided, this would cause the harness to wind around the device, causing the device to malfunction, since the vertical rotary lever 2a itself needs to be rotated. Therefore, it is necessary to design a device capable of replacing electric control or pneumatic control locking to fix a workpiece, and the fixing speed is required to be high, and for this purpose, as shown in fig. 6 and 7, the device further comprises a rotating seat 9, a powerful magnet 10, a push ring 11, an external bracing mechanism 12 and a clamping column 13, a guide pipe 5a is fixedly arranged on the outer edge of the hollow rotating column 5, a vertical rotating rod 2a is slidably connected with the guide pipe 5a, the object placing table 2 comprises a box body 2d and a box cover covering the top of the box body 2d, the guide pipe 5a is located inside the box body 2d, the clamping column 13 is fixedly connected with one end of the vertical rotating rod 2a, the powerful magnet 10 is fixedly installed on the outer edge of the clamping column 13, the clamping column 13 can adopt a plastic structure, the magnetic force of the powerful magnet 10 is not conducted to the clamping column 13, the push ring 11 is sleeved on the outer edge of the clamping column 13, a baffle ring 11a for blocking the workpiece is arranged on the outer edge of the push ring 11, a mounting hole of the workpiece can be sleeved on the push ring 11, and then the workpiece is pushed horizontally, the baffle ring 11a and the workpiece is pulled horizontally, so that the workpiece and the powerful magnet 11a and the powerful magnet 10 can be continuously pulled and the workpiece 2 d. The outer supporting mechanism 12 is fixedly installed at the end of the clamping column 13, the outer supporting mechanism 12 is in transmission connection with the push ring 11, when the push ring 11 moves, the outer supporting mechanism 12 diffuses outwards, namely, one side of the push ring 11 is blocked, the workpiece is prevented from being thrown out during rotation, the blocking force of the outer supporting mechanism 12 on the workpiece depends on the attraction force between the first baffle ring 11a and the powerful magnet 10, and the first baffle ring 11a can be replaced by the magnet to increase the attraction force. It should be noted that, in the case of the position shown in fig. 8, a gap is left between the first retainer ring 11a and the strong magnet 10, and the gap can prevent the strong magnet 10 from pulling the push ring 11 by magnetic force.

When the push ring 11 is attracted to the powerful magnet 10, the powerful magnet 10 is required to be pushed to attract the box 2d, and the vertical rotary rod 2a is pushed along with the push ring, as shown in fig. 3, the driving post 2c can be inserted into the push post 7c, and if the driving post 2c is in contact with the push ring, the position of the driving post 2c can be adjusted by slight rotation. Before the vertical rotation lever 2a is pushed, the turntable 7b needs to be lifted up in advance by the rotation switching mechanism 6 so that the push column 7c moves to a position where it can contact with the transmission column 2 c. Note that this position is not the final position where the turntable 7b is lifted up, as in the state shown in fig. 9. Wherein fig. 11 shows the final position in which the turntable 7b is lifted upwards.

Wherein the outer support mechanism 12 in fig. 8 is in a collapsed state and the outer support mechanism 12 in fig. 10 is in a diffused state, i.e., a state of blocking the workpiece. The diameter of the external bracing mechanism 12 in fig. 8 is smaller than the outer diameter of the push ring 11, and does not cause obstruction when the workpiece is mounted.

In order to realize that the push ring 11 is automatically blocked after being pulled, as shown in fig. 10 and 12, the outer supporting mechanism 12 comprises a cover plate 12d, four hinging rods 12c, four sliding blocks 12a and four sliding rails 12b, wherein the cover plate 12d is fixedly arranged at the end part of the clamping post 13, the four sliding rails 12b are fixedly arranged on the push ring 11, the sliding blocks 12a are in sliding connection with the sliding rails 12b, one end of the hinging rod 12c is hinged with the sliding blocks 12a, and the other end of the hinging rod 12c is hinged with the cover plate 12 d. By horizontally pulling the push ring 11, the push ring 11 pulls the sliding blocks 12a to move, and due to the fact that the cover plate 12d cannot move, the four sliding blocks 12a can be pushed outwards through the action of the hinging rod 12c, so that the four sliding blocks 12a block a workpiece, namely, after the push ring 11 is pulled, the outer supporting mechanism 12 can automatically block.

As shown in fig. 11, a second blocking ring 7d is arranged at the outer edge of the bottom of the turntable 7b, the second blocking ring 7d is fixedly connected with the turntable 7b through a connecting ring, one side, away from the transmission column 2c, of the clamping plate 2b is of a conical structure, and the jacking end of the rotary switching mechanism 6 is abutted against the connecting ring. When the rotary switching mechanism 6 rotates the final position where the turntable 7b is lifted up, the state shown in fig. 11 will be presented. The clamping plate 2b is blocked by the second baffle ring 7d, so that the clamping plate 2b cannot be pushed outwards when rotating, and the position of the clamping plate 2b is ensured, namely, the transmission column 2c can be kept engaged with the pushing column 7 c.

As shown in fig. 5 and 11, the rotary switching mechanism 6 includes a plurality of jacking push rods 6a, the jacking push rods 6a are fixedly mounted on the swivel base 8b, and a ball seat 6b is fixedly arranged at the top of each jacking push rod 6 a. The top of the ball seat 6b is abutted against the connecting ring, and the plurality of jacking push rods 6a can be enabled to jack the ball seat 6b upwards by controlling the jacking push rods 6a to work, so that the ball seat 6b can be enabled to jack the rotary table 7b upwards, namely the vertical rotator 7 integrally moves upwards. That is, the connection of the vertical rotator 7 to the horizontal rotator 8 or the vertical rotary rod 2a is switched by the rotation switching mechanism 6.

As shown in fig. 8, the outer edge of the vertical rotating rod 2a is sleeved with a return spring 14, a third baffle ring 15 is fixedly arranged on the outer edge of the vertical rotating rod 2a, one end of the return spring 14 is in contact with the guide pipe 5a, the other end of the return spring 14 is in contact with the third baffle ring 15, the third baffle ring 15 is pushed by the elastic force of the return spring 14, after the powerful magnet 10 and the box body 2d are pulled apart and separated, the return spring 14 can push the third baffle ring 15 to contact on the box body 2d, and free sliding of the vertical rotating rod 2a along the guide pipe 5a is ensured.

When the rotary device is used, the central rotary column 4 is driven to rotate by the rotator 3, and the vertical rotator 7 is driven to rotate by the central rotary column 4. When the rotary switching mechanism 6 does not lift up, the vertical rotator 7 drives the transmission bar 8a to rotate through the pushing bar 7a2, so that the toothed ring 8c can rotate, and the toothed ring 8c drives the gear 8d to rotate through meshing, so that the hollow rotating column 5 drives the plurality of object placing tables 2 to horizontally rotate.

After the rotary switching mechanism 6 pushes the vertical rotator 7 upwards to move to the position shown in fig. 9, the workpiece is clamped onto the push ring 11 by a worker, and the push ring 11 is pushed, so that the outward expansion of the outward supporting mechanism 12 can be caused to block the workpiece, and the workpiece is prevented from being thrown out. Simultaneously, the workpiece is pushed continuously, the vertical rotating rod 2a is pushed horizontally, the transmission column 2c is clamped on the pushing column 7c, and the powerful magnet 10 is attracted with the box body 2d, so that pre-locking is realized. Finally, the vertical rotator 7 is pushed upward by the rotation switching mechanism 6 to move to the final position, i.e., the position shown in fig. 11. When the vertical rotator 7 works, the pushing posts 7c are driven to rotate, so that the plurality of transmission posts 2c can be driven to rotate, namely, the workpiece clamped on the vertical rotating rod 2a is driven to vertically rotate.

This high-efficient coating device of zirconium dioxide raw materials can make the work piece of keeping flat on putting thing platform 2 carry out rotatory coating film, can also make the work piece card go into on perpendicular rotary rod 2a simultaneously for the work piece that the bottom needs the coating film also can use the device to use, reduces the maintenance cost and the area of device.

And after the work piece card is gone into on push ring 11, can promote through the work piece, carry out automatic locking to the work piece, locking process is rapid to when promoting, can be through the more smooth and easy joint with transmission post 2c with push post 7c of workman, guarantee to push post 7c can drive transmission post 2c and rotate, and after the joint is accomplished, can lock cardboard 2b through backing ring two 7d, guarantee that cardboard 2b can not take place the separation when rotatory.

According to the different aperture of every work piece, can dismantle the change between card post 13 and the perpendicular rotary rod 2a to make the device can be applicable to more work pieces and use.

It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims (5)

1. The high-efficiency film plating device with zirconium dioxide raw materials comprises a reaction chamber (1) and a central rotating column (4), wherein a rotator (3) for driving the central rotating column (4) to rotate is fixedly arranged at the top of the reaction chamber (1), a plurality of hollow rotating columns (5) capable of rotating vertically are fixedly arranged in the reaction chamber (1), a plurality of object placing tables (2) are fixedly arranged on each hollow rotating column (5), a vacuum extraction opening (1 a) and a gas injection opening (1 b) are arranged on the reaction chamber (1), the vacuum extraction opening (1 a) is used for vacuum equipment to vacuumize the interior of the reaction chamber (1), the gas injection opening (1 b) is used for gasification equipment to inject gas required by film plating into the reaction chamber (1), a plurality of opening and closing doors (1 c) are arranged at positions of the reaction chamber (1) opposite to the plurality of hollow rotating columns (5), the opening and closing doors (1 c) are used for workers to place workpieces on object placing tables (2), the vacuum extraction opening and closing doors are characterized by rotating switching mechanisms (6), the vertical rotating machines (7) and the vertical rotating machines (8) are arranged on the rotating tables (2), the rotating tables (8) are arranged on the bottom of each hollow rotating table (8) and can be fixedly arranged on the bottom of the reaction chamber (2), the horizontal rotator (8) is used for transmitting the rotating force of the central rotating column (4) to the hollow rotating column (5), the vertical rotator (7) is vertically and slidably arranged on the outer edge of the central rotating column (4), the rotary switching mechanism (6) is fixedly arranged on the horizontal rotator (8), and the rotary switching mechanism (6) is used for jacking the vertical rotator (7) upwards;

when the rotation switching mechanism (6) is not lifted upwards, the vertical rotator (7) is in transmission connection with the horizontal rotator (8), and the vertical rotator (7) is separated from the vertical rotating rod (2 a);

When the rotary switching mechanism (6) is lifted upwards, the vertical rotator (7) is in transmission connection with the vertical rotary rod (2 a), and the vertical rotator (7) is separated from the horizontal rotator (8);

The outer edge of the central rotating column (4) is provided with a plurality of clamping strips (4 a), the vertical rotator (7) comprises a sleeve (7 a) sleeved on the outer edge of the central rotating column (4), the inner edge of the sleeve (7 a) is provided with a plurality of clamping grooves (7 a 1), and the clamping grooves (7 a 1) are clamped in the clamping strips (4 a);

A plurality of push posts (7 c) are fixedly arranged on the outer edge of the vertical rotator (7), the bottom-layer turntable (7 b) is in contact with the jacking end of the rotary switching mechanism (6), a plurality of push posts (7 c) are fixedly arranged on each turntable (7 b), the push posts (7 c) are uniformly distributed along the circumferential direction of the turntable (7 b), a clamping plate (2 b) is arranged at one end, close to the turntable (7 b), of the vertical rotating rod (2 a), a plurality of transmission posts (2 c) are fixedly arranged on the clamping plate (2 b), the plurality of transmission posts (2 c) are uniformly distributed along the circumferential direction of the clamping plate (2 b), when the turntable (7 b) is jacked up by the rotary switching mechanism (6), the end parts of the push posts (7 c) are inserted into the transmission posts (2 c), a plurality of push bars (7 a 2) are fixedly arranged at the bottom of the outer edge of the sleeve (7 a), a plurality of transmission bars (8 a) are arranged on the horizontal rotator (8), and when the sleeve (7 a) is positioned at the initial position, each transmission bar (8 a) is jacked up between the two push bars (7 a) and the two transmission bars (7 a) are jacked up from the two transmission bars (8 a;

The horizontal rotator (8) further comprises a rotating seat (8 b), a toothed ring (8 c) and a plurality of gears (8 d), wherein an avoidance hole for a sleeve (7 a) to pass through is formed in the middle of the rotating seat (8 b), a transmission bar (8 a) is fixedly arranged on the inner wall of the avoidance hole, the rotating seat (8 b) is rotatably arranged in the reaction chamber (1), the toothed ring (8 c) is fixedly arranged on the rotating seat (8 b), the gears (8 d) are respectively and fixedly arranged on a plurality of hollow rotating columns (5), the gears (8 d) are all in meshed connection with the toothed ring (8 c), and rotating seats (9) are fixedly arranged at the upper end and the lower end of the hollow rotating columns (5);

Still include roating seat (9), powerful magnet (10), push away ring (11), outer support mechanism (12) and draw-in post (13), fixedly on the outer fringe of hollow roating post (5) be provided with pipe (5 a), perpendicular rotary rod (2 a) and pipe (5 a) sliding connection, put thing platform (2) including box body (2 d) and lid at box body (2 d) top, pipe (5 a) are located the inside of box body (2 d), the one end fixed connection of draw-in post (13) and perpendicular rotary rod (2 a), powerful magnet (10) fixed mounting is on the outer fringe of draw-in post (13), the outer fringe of draw-in post (13) is located to push away ring (11) cover, be provided with on the outer fringe of push away ring (11) and be used for blocking baffle ring one (11 a) to the work piece, outer support mechanism (12) fixed mounting is in the tip of draw-in post (13), outer support mechanism (12) are connected with push away ring (11) transmission, when push away ring (11) motion, outer support mechanism (12) will outwards spread.

2. The high-efficiency coating device with zirconium dioxide raw materials according to claim 1, wherein the external support mechanism (12) comprises a cover plate (12 d), four hinging rods (12 c), four sliding blocks (12 a) and four sliding rails (12 b), the cover plate (12 d) is fixedly arranged at the end part of the clamping column (13), the four sliding rails (12 b) are fixedly arranged on the push ring (11), the sliding blocks (12 a) are in sliding connection with the sliding rails (12 b), one end of the hinging rod (12 c) is hinged with the sliding blocks (12 a), and the other end of the hinging rod (12 c) is hinged with the cover plate (12 d).

3. The high-efficiency film plating device with zirconium dioxide raw materials according to claim 2, wherein a second baffle ring (7 d) is arranged at the outer edge of the bottom of the rotary table (7 b), the second baffle ring (7 d) is fixedly connected with the rotary table (7 b) through a connecting ring, one side of the clamping plate (2 b) far away from the transmission column (2 c) is of a conical structure, and the lifting end of the rotary switching mechanism (6) is abutted against the connecting ring.

4. A high-efficiency coating device with zirconium dioxide raw material as claimed in claim 3, characterized in that the rotary switching mechanism (6) comprises a plurality of jacking push rods (6 a), the jacking push rods (6 a) are fixedly arranged on the rotary seat (8 b), a ball seat (6 b) is fixedly arranged at the top of each jacking push rod (6 a), and the top of the ball seat (6 b) is abutted against the connecting ring.

5. The high-efficiency coating device with zirconium dioxide raw material according to claim 4, wherein a reset spring (14) is sleeved on the outer edge of the vertical rotating rod (2 a), a baffle ring III (15) is fixedly arranged on the outer edge of the vertical rotating rod (2 a), one end of the reset spring (14) is abutted against the guide pipe (5 a), and the other end of the reset spring (14) is abutted against the baffle ring III (15).