CN118795944B - Compact full-range high-precision flow controller and flow measurement and control method - Google Patents
Compact full-range high-precision flow controller and flow measurement and control method Download PDFInfo
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Abstract
本发明涉及流量测量、控制领域，具体涉及一种紧凑型全量程高精度流量控制器及流量测量、控制方法。控制器包括主控芯片、流体输送流路、控制阀和流量测量部件，控制阀和流量测量部件串联在流体输送流路上，流量测量部件包括配合使用的传感器和流阻结构，主控芯片分别连接传感器和控制阀；其中，传感器配置有不同量程的至少两个；和/或流阻结构配置有不同流阻的至少两个，每个流阻结构安装于流体输送流路的一个流阻支流路，各个流阻支流路相互并联，且入口处设置有流阻切换阀，主控芯片还连接流阻切换阀。本发明可以精准测量流量，从而精准控制流量，满足对小流量工艺气体的高精度的要求，满足全量程高精度流量控制，结构紧凑。
The present invention relates to the field of flow measurement and control, and specifically to a compact full-range high-precision flow controller and a flow measurement and control method. The controller includes a main control chip, a fluid conveying flow path, a control valve and a flow measurement component. The control valve and the flow measurement component are connected in series on the fluid conveying flow path. The flow measurement component includes a sensor and a flow resistance structure used in conjunction with each other. The main control chip is connected to the sensor and the control valve respectively; wherein the sensor is configured with at least two sensors of different ranges; and/or the flow resistance structure is configured with at least two sensors of different flow resistances, each flow resistance structure is installed in a flow resistance branch flow path of the fluid conveying flow path, each flow resistance branch flow path is connected in parallel with each other, and a flow resistance switching valve is provided at the inlet, and the main control chip is also connected to the flow resistance switching valve. The present invention can accurately measure the flow rate, thereby accurately controlling the flow rate, meeting the high-precision requirements for small-flow process gases, meeting the full-range high-precision flow control, and having a compact structure.
Description
Technical Field
The invention relates to the field of flow measurement and control, in particular to a compact full-range high-precision flow controller and a flow measurement and control method.
Background
A Mass Flow Controller (MFC) is a device for controlling the flow of gases and plays an important role in the semiconductor manufacturing process. The MFC can precisely control the flow rate of gas, thereby ensuring stability and repeatability in the semiconductor manufacturing process. The semiconductor manufacturing process requires the use of large amounts of gases, such as hydrogen, nitrogen, argon, oxygen, chlorine, etc., whose accuracy of flow control is critical because they directly affect the fabrication of the chip. In processes such as Chemical Vapor Deposition (CVD), the accuracy of the mass flow controller directly affects the thickness and uniformity of the deposited film. In the etching process, inaccuracy of flow control may cause uneven etching, generate residues or damage the wafer surface, and affect the performance and yield of the structure.
The pressure type mass flow controller is different from the thermal type mass flow controller, and is a high-precision device for metering and controlling the flow based on different pressure differences generated by different flows, and because of the excellent precision control capability, the pressure type MFC is widely adopted in the current semiconductor advanced process to replace the traditional thermal type MFC. The pressure type MFC still has the following drawbacks and disadvantages:
Even though the pressure type MFC has higher flow accuracy control than the thermal type MFC, the accuracy of the mass flow controller brand currently mainstream in the semiconductor industry is difficult to ensure in a small range section, such as the HORIBA D500 series MFC with the highest current ratio, and when the flow rate is set to be more than 5% f.s (FullScall), the accuracy is +/-1.0% s.p (SetPoint); when the set flow is less than or equal to 5% F.S, the precision is only +/-0.05% F.S. But excellent valve tightness allows MFC to control a minimum flow of 0.2% f.s, i.e. the valve control capability is far greater than the preset interval where flow measurement accuracy can be guaranteed.
The inventor of the present patent found that the above-mentioned drawbacks and disadvantages of the present MFC are caused by the fact that the present MFC, whether it is of a pressure type or a thermal type, generally comprises a main control circuit and a control valve and a flow measuring part which are arranged in series on a pipeline, the pressure type flow measuring part comprises a pressure type sensor and a flow resistance structure which are sequentially arranged in series on the pipeline along a fluid conveying direction, the thermal type MFC comprises a thermal type sensor and a flow resistance structure which are arranged in parallel on the pipeline, and when the flow is lower than a certain range, the calculated flow error is large due to the fact that the pressure difference or the heat generated by the gas passing through the flow measuring part is too small, so that the accuracy of the MFC in a small-range section is insufficient.
The inventor solves the problem that when a certain process gas needs to use a large flow and a small flow simultaneously, in order to ensure the flow control precision, two types of MFCs with different ranges have to be selected to respectively cope with the control of the two types of flows, and the requirement of the process on the flow precision can be met by using the small-range MFCs to compensate the precision. Therefore, when the equipment is designed, not only one more gas path is needed to be designed, the cost of all needed related parts (such as a diaphragm valve, a PT, a pressure regulating valve and the like) on the gas path is greatly increased, but also the volume of the whole gas holder is increased. With the continuous improvement of semiconductor process, the variety of process gases is continuously increased, and the equipment space is further compressed. Therefore, there is a need to design an MFC that is superior in full-scale accuracy and compact.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, and provides a compact full-range high-precision flow controller which can accurately measure flow, thereby accurately controlling flow, meeting the high-precision requirement of customers on small-flow process gas, meeting the full-range high-precision flow control and having compact structure.
In order to solve the technical problems, the technical scheme of the invention is as follows: the compact full-range high-precision flow controller comprises a main control chip, a fluid conveying flow path, a control valve and a flow measuring component, wherein the control valve and the flow measuring component are connected in series on the fluid conveying flow path, the flow measuring component comprises a sensor and a flow resistance structure which are matched for use, and the main control chip is respectively connected with the sensor and the control valve; wherein,
The sensor is provided with at least two sensors with different measuring ranges, each sensor is sequentially connected in series on the fluid conveying flow path when the sensor is a pressure type sensor, each sensor is arranged on one sensor branch flow path of the fluid conveying flow path when the sensor is a thermal type sensor, all sensor branch flow paths are mutually connected in parallel, a sensor switching valve is arranged at an inlet, and the main control chip is also connected with the sensor switching valve;
And/or the flow resistance structures are configured with at least two different flow resistances, each flow resistance structure is arranged on one flow resistance branch flow path of the fluid conveying flow path, the flow resistance branch flow paths are mutually connected in parallel, a flow resistance switching valve is arranged at the inlet, and the main control chip is also connected with the flow resistance switching valve.
Further, the sensor is configured with two of different ranges and the flow resistance structure is configured with one.
Further, the sensor is configured with one and the flow resistance structure is configured with two different flow resistances.
Further, the sensor is configured with two of different ranges, and the flow resistance structure is configured with at least two of different flow resistances.
Further, the sensor is a pressure type sensor, the flow controller further comprises an outlet pressure sensor, and the outlet pressure sensor is arranged at the outlet of the fluid conveying flow path and is connected with the main control chip.
The invention also provides a flow measurement method of the compact full-range high-precision flow controller, which comprises the following steps:
s1, selecting a working flow path and a working sensor according to a set flow value;
s2, calculating an actual flow value according to a signal fed back by the working sensor; wherein,
The step of selecting the working flow path is as follows:
Under the condition that more than one flow resistance structure is arranged, according to a preset interval where a received flow rate set value is located, selecting a flow resistance branch flow path where the flow resistance structure with corresponding flow resistance is located as a working flow path, switching a flow resistance switching valve, and only enabling the working flow path to pass through fluid;
When one flow resistance structure is configured, the flow path where the flow resistance structure is positioned is used as a working flow path;
The steps of selecting the working sensor are as follows:
When the sensor is configured with more than one sensor, selecting the sensor with a corresponding range as a working sensor according to a preset interval where a received flow set value is located, and switching the sensor switching valve when the sensor switching valve exists, so that only the sensor branch flow path where the working sensor is located has fluid passing through;
In the case where one sensor is provided, the sensor is used as an operation sensor.
Further, in the step of selecting the operation sensor, in the case where more than one sensor is provided, the smaller the upper limit of the preset section where the flow rate set value is located, the smaller the range of the selected operation sensor.
Further, in the step of selecting the working flow path, when more than one flow resistance structure is arranged, only one working flow path is selected, and the smaller the upper limit of the preset section where the flow rate set value is located, the larger the flow resistance of the flow resistance structure in the selected working flow path.
Further, in the step of selecting the working flow path, when the flow rate setting value is smaller than the threshold value, only the flow resistance branch flow path in which one flow resistance structure is located is used as the working flow path, and when the flow rate setting value is not smaller than the threshold value, at least two flow resistance branch flow paths in which the flow resistance structure is located are used as the working flow paths.
The invention also provides a flow control method of the compact full-range high-precision flow controller, which comprises the following steps:
s1, selecting a working flow path and a working sensor according to a set flow value;
s2, calculating an actual flow value according to a signal fed back by the working sensor;
s3, comparing the actual flow value with the set flow value, and adjusting the opening of the control valve.
After the technical scheme is adopted, at least two sensors with different ranges and/or at least two flow resistance structures with different flow resistances are adopted, the corresponding flow resistance structures are selected to be used according to the set flow value, and signals of the corresponding sensors are selected, so that the flow can be accurately measured, the high-precision adjustment of the opening degree of the control valve is realized, the requirements for high-precision measurement and control of high-flow process gas and low-flow process gas are met, and further the high-precision flow control is realized in the whole range. In addition, the gas cabinet can reduce one path of gas path design, reduce related components required by the gas path, such as a diaphragm valve, a PT, a pressure regulating valve and the like, achieve compact structure and reduce the volume and the space of the whole gas cabinet.
Drawings
FIG. 1 is a schematic block diagram of a first compact full-scale high-precision flow controller of the present invention;
FIG. 2 is a schematic block diagram of a second compact full-scale high-precision flow controller of the present invention;
FIG. 3 is a schematic block diagram of a third compact full-scale high-precision flow controller of the present invention;
FIG. 4 is a functional block diagram of a fourth compact full-scale high-precision flow controller of the present invention;
FIG. 5 is a schematic block diagram of a fifth compact full-scale high-precision flow controller of the present invention;
FIG. 6 is a functional block diagram of a sixth compact full-scale high-precision flow controller of the present invention;
FIG. 7 is a flow chart of a flow measurement method of the compact full-scale high-precision flow controller of the present invention;
FIG. 8 is a flow chart of a flow control method of the compact full-scale high-precision flow controller of the present invention;
In the figure, 1, a main control chip; 2. a fluid transport flow path; 3. a control valve; 4. a sensor; 4a, a pressure sensor; 4b, a thermal sensor; 5. a flow resistance structure; 6. a sensor switching valve; 7. a flow resistance switching valve; 8. an outlet pressure sensor.
Detailed Description
In order that the invention may be more readily understood, a more particular description of the invention will be rendered by reference to specific embodiments that are illustrated in the appended drawings.
As shown in fig. 1 to 6, a compact full-range high-precision flow controller comprises a main control chip 1, a fluid conveying flow path 2, a control valve 3 and a flow measuring component, wherein the control valve 3 and the flow measuring component are connected in series on the fluid conveying flow path 2, the flow measuring component comprises a sensor 4 and a flow resistance structure 5 which are matched for use, and the main control chip 1 is respectively connected with the sensor 4 and the control valve 3; wherein,
The sensors 4 are provided with at least two sensors with different measuring ranges, each sensor 4 is sequentially connected in series on the fluid conveying flow path 2 when the sensor 4 is a pressure type sensor 4a, each sensor 4 is arranged on one sensor branch flow path 21 of the fluid conveying flow path 2 when the sensor 4 is a thermal type sensor 4b, each sensor branch flow path 21 is mutually connected in parallel, a sensor switching valve 6 is arranged at an inlet, and the main control chip 1 is also connected with the sensor switching valve 6;
And/or the flow resistance structures 5 are configured with at least two different flow resistances, each flow resistance structure 5 is arranged on one flow resistance branch flow path 22 of the fluid conveying flow path 2, the flow resistance branch flow paths 22 are mutually connected in parallel, the inlet is provided with a flow resistance switching valve 7, and the main control chip 1 is also connected with the flow resistance switching valve 7.
The control valve 3 may be located in the front of the flow measuring device or in the rear of the flow measuring device.
It should be noted that in the case where the sensor 4 of the flow measuring means is a pressure sensor 4b, the sensor 4 and the flow resistance structure 5 used in combination are connected in series to the fluid transport flow path 2. In the case where the sensor 4 of the flow rate measuring means is a thermal sensor 4b, the sensor 4 and the flow resistance structure 5 used in combination are in parallel connection with the sensor branch flow path 21 in which the sensor 4 is located and the flow resistance branch flow path 22 in which the flow resistance structure 5 is located. The primary purpose of the flow resistance structure 5 is to maintain a laminar flow and to provide air resistance.
As shown in fig. 7, the flow measurement method of the compact full-scale high-precision flow controller comprises the following steps:
s1, selecting a working flow path and a working sensor according to a set flow value;
s2, calculating an actual flow value according to a signal fed back by the working sensor; wherein,
The step of selecting the working flow path is as follows:
In the case that more than one flow resistance structure 5 is configured, according to a preset interval where the received flow rate set value is located, selecting a flow resistance branch flow path 22 where the corresponding flow resistance structure 5 is located as a working flow path, switching the flow resistance switching valve 7, and allowing only the working flow path to pass through;
In the case where one flow resistance structure 5 is provided, the flow path in which the flow resistance structure 5 is located is used as a working flow path;
The steps of selecting the working sensor are as follows:
When more than one sensor 4 is arranged, according to a preset interval where a received flow set value is located, selecting the sensor 4 with a corresponding range as a working sensor, and when the sensor switching valve 6 exists, switching the sensor switching valve 6, and only allowing the sensor branch flow path 21 where the working sensor is located to pass through;
in the case where one sensor 4 is provided, the sensor 4 is used as an operation sensor.
In the step of selecting the operation sensor, if more than one sensor 4 is provided, the smaller the upper limit of the preset interval in which the flow rate set value is located, the smaller the range of the selected operation sensor.
In the step of selecting the working flow paths, when more than one of the flow resistance structures 5 is arranged, only one working flow path is selected, and the smaller the upper limit of the preset section in which the flow rate set value is located, the larger the flow resistance of the flow resistance structure 5 in the selected working flow path. Or in the case where more than one flow resistance structure 5 is arranged, only one flow resistance branch flow path 22 where the flow resistance structure 5 is located is used as the working flow path when the flow rate set value is smaller than the threshold value, and at least two flow resistance branch flow paths 22 where the flow resistance structure 5 is located are used as the working flow paths when the flow rate set value is not smaller than the threshold value.
As shown in fig. 8, the flow control method of the compact full-scale high-precision flow controller further includes, based on the flow measurement method, the steps of:
and step S3, comparing the actual flow value with the set flow value, and adjusting the opening of the control valve 3.
The following describes the embodiments in detail by way of specific examples.
Embodiment one: as shown in fig. 1, the compact full-range high-precision flow controller comprises a main control chip 1, a fluid conveying flow path 2, a control valve 3 and a flow measuring component, wherein the control valve 3 and the flow measuring component are sequentially connected in series on the fluid conveying flow path 2 along the fluid conveying direction, the flow measuring component comprises a sensor 4 and a flow resistance structure 5 which are matched, the sensor 4 is a pressure sensor 4a, two of different ranges are configured, one flow resistance structure 5 is configured, the two pressure sensors 4a and one flow resistance structure 5 are sequentially connected in series on the fluid conveying flow path 2 along the fluid conveying direction, an outlet pressure sensor 8 is mounted at an outlet of the fluid conveying flow path 2, and the main control chip 1 is respectively connected with the sensor 4, the outlet pressure sensor 8 and the control valve 3.
The control method of the compact full-range high-precision flow controller in the embodiment comprises the following steps:
the main control chip 1 receives an external flow set value;
Under the condition that the flow set value is larger than the preset value A, the main control chip 1 calculates an actual flow value according to a signal fed back by the pressure sensor 4a with a large range;
Under the condition that the flow set value is not greater than the preset value A, the main control chip 1 calculates an actual flow value according to a signal fed back by the pressure sensor 4a with a small measuring range;
The main control chip 1 adjusts the opening of the control valve 3 according to the actual flow value and the flow set value, namely, the main control chip 1 compares and calculates the actual flow value and the flow set value, adjusts the opening of the control valve 3, and enables the actual flow value to approach the external flow set value, thereby realizing closed-loop control of flow.
In this embodiment, in order to be compatible with the upper limit of the measuring range, the measuring range selected by the pressure sensor 4a with a large measuring range is relatively large, and the accuracy and repeatability of the pressure sensor in the small measuring range are relatively poor, so that the flow accuracy of the MFC in the small measuring range is finally affected. The small-range pressure sensor 4a has a smaller range, which is only a fraction of the large-range pressure sensor 4a, so that the small pressure difference has better accuracy. Typically, the preset value a may be 20% f.s.
Since the outlet of the fluid conveying flow path 2 is generally connected with the vacuum cavity or the reaction chamber, when the equipment is operated, the outlet of the fluid conveying flow path 2 is always in a vacuum state under the continuous operation of the vacuum pump. The inlet of the fluid conveying flow path 2 is generally connected to a factory air source, and is influenced by the opening change of the control valve 3, the pressures collected by the two pressure sensors 4a at the upstream are also changed continuously, and the outlet pressure sensor 8 can be arranged at the downstream (outlet) of the fluid conveying flow path 2 just because of the functional relation between the variation of the pressures and the flow, when the received flow set value is larger than the preset value A, the flow value is calculated comprehensively according to the signals of the pressure sensors 4a with large range and the outlet pressure sensor 8, and when the received flow set value is not larger than the preset value, the flow value is calculated comprehensively according to the signals of the pressure sensors 4a with small range and the outlet pressure sensor 8. By providing the outlet pressure sensor 8, the calculated flow value is prevented from being influenced by the opening of the control valve 3, thereby ensuring the accuracy of the obtained actual flow value.
It should be noted that typical pressure sensor 4a overload pressures are typically more than 3 times the nominal range and the damage pressures are typically more than 4 times the nominal range. In practical application, the opening of the control valve 3 is small, so that the inlet pressure is obviously reduced, and even if the maximum flow of the fluid conveying pipeline 2 is reached, the pressure sensor generally only reaches 70% of the range of the pressure sensor 4a with a large range. Assuming that the range of the small-range pressure sensor 4a is 50% of the range of the large-range pressure sensor 4a, the maximum gas pressure received in the whole flow range of the fluid conveying pipeline 2 does not exceed 140% of the full range of the pressure sensor, the pressure sensor is not damaged, and the accuracy in the small-range section is doubled as that of the traditional structure.
By way of specific example, the wide range pressure sensor 4a has a range of 100kpa, the small range pressure sensor 4a has a range of 50kpa, and the outlet pressure sensor 8 at the outlet end has a typical atmospheric pressure, i.e., 0kpa. When the flow reaches the maximum flow, the required pressure difference is 70kpa, and the overall flow and the pressure difference are in approximate linear relation. When the metered flow is within the preset interval range of 0-20% F.S of the flow controller, the measured value of the wide-range pressure sensor 4a is only 14kpa at maximum, namely, the range is 14%; if the data of the pressure sensor 4a with a small range is 28% of the range and is close to 1/3 of the range, the data of the pressure sensor 4a with a large range or the data of the pressure sensor 4a with a small range can be used, and the accuracy of the pressure value and the repeatability of the sensor are both better than those of the pressure sensor 4a with a large range, and the pressure sensor 4a with a large range and the pressure sensor 4a with a small range are simultaneously connected into the main control chip 1, the function threshold can be set in advance during metering, and the data of the pressure sensor 4a with a large range or the pressure sensor 4a with a small range can be selected according to the relation between the set value of the external flow and the function threshold (preset value), so that the range of the large range is ensured, and the accuracy of the small range is improved.
Embodiment two: as shown in fig. 2, the main difference between the present embodiment and the first embodiment is that the sensor 4 is a thermal sensor 4b, two sensors with different ranges are configured, each thermal sensor 4b is mounted on one sensor branch flow path 21 of the fluid conveying flow path 2, the two sensor branch flow paths 21 are connected in parallel, a sensor switching valve 6 is disposed at the connection position between the inlet of the two sensor branch flow paths 21 and the fluid conveying flow path 2, and the main control chip 1 is further connected with the sensor switching valve 6.
The control method of the compact full-range high-precision flow controller in the embodiment comprises the following steps:
the main control chip 1 receives an external flow set value;
When the flow set value is larger than the preset value B, the main control chip 1 controls the sensor switching valve 6 to switch to enable the fluid to pass through the fluid conveying flow path 2 where the wide-range thermal sensor 4B is positioned, and the control chip 1 calculates an actual flow value according to the signal fed back by the wide-range thermal sensor 4B;
Under the condition that the flow set value B is not larger than a preset value, the main control chip 1 controls the sensor switching valve 6 to switch to enable fluid to pass through the fluid conveying flow path 2 where the thermal sensor 4B with a small range is positioned, and the actual flow value is calculated by a signal fed back by the control chip 1;
the main control chip 1 adjusts the opening of the control valve 3 according to the actual flow value and the flow set value.
The preset value B may be 20% f.s.
Embodiment III: as shown in fig. 3, the main difference between the present embodiment and the first embodiment is that the sensor 4 is configured with one, two different flow resistances are configured for the pressure sensor 4a, each flow resistance structure 5 is installed on one flow resistance branch flow path 22 of the fluid conveying flow path 2, the two flow resistance branch flow paths 22 are connected in parallel, the inlet is provided with the flow resistance switching valve 7, and the main control chip 1 is further connected with the flow resistance switching valve 7. The pressure sensor 4a and the structure formed by connecting two flow-resistance branch flow paths 22 in parallel are sequentially connected in series to the fluid conveying flow path 2 in the fluid conveying direction.
The compact full-range high-precision flow controller in the embodiment has two control methods;
The first control method comprises the following steps:
the main control chip 1 receives an external flow set value;
under the condition that the flow set value is larger than the preset value C, the main control chip 1 controls the flow resistance switching valve 7 to switch to enable the fluid to pass through the flow resistance branch flow path 22 where the flow resistance structure 5 with small flow resistance is positioned;
Under the condition that the flow set value is not greater than a preset value C, the main control chip 1 controls the flow resistance switching valve 7 to switch to enable fluid to pass through only the flow resistance branch flow path 22 where the flow resistance structure 5 with large flow resistance is positioned;
The main control chip 1 calculates an actual flow value according to a signal fed back by the pressure sensor 4 a;
the main control chip 1 adjusts the opening of the control valve 3 according to the actual flow value and the flow set value.
In this control method, assuming that the full flow range of the entire compact full-range high-precision flow controller is Q fs, when the fluid passes through only the flow-resistance branch flow path 22 where the flow-resistance structure 5 with small flow resistance is located, the flow measurement range (the range of mass flow control) Q 1=Qfs of the pressure sensor 4a is assumed to be a% Q fs or more, and when the fluid passes through only the flow-resistance branch flow path 22 where the flow-resistance structure 5 with large flow resistance is located, the flow measurement range of the pressure sensor 4a is designed to be Q 2≥a%Qfs, and the region where the precision can be ensured is included within a% Q fs, the minimum controllable value of the control valve 3 should be covered.
The second difference between the control method and the first one is that, in the case that the flow rate set value is greater than the preset value C, the main control chip 1 controls the flow resistance switching valve 7 to switch to the flow resistance branch flow path 22 where the fluid passes through the flow resistance structure 5 with small flow resistance and the flow resistance structure 5 with large flow resistance at the same time.
In the control method, the full range of the mass flow control can reach Q 1+Q2, and the range of the compact full-range high-precision flow controller can be widened in this way.
Embodiment four: as shown in fig. 4, the main difference between the present embodiment and the third embodiment is that the sensor is a thermal sensor 4b, which is mounted on one sensor branch flow path 21, and the sensor branch flow path 21 is connected in parallel with a structure composed of two flow resistance branch flow paths 22 and a flow resistance switching valve 7.
The control method in this embodiment is similar to that in the third embodiment.
Fifth embodiment: as shown in fig. 5, the main difference between the present embodiment and the first embodiment is that the flow resistance structures 5 are also configured with two different flow resistances, each flow resistance structure 5 is mounted on one flow resistance branch flow path 22 of the fluid conveying flow path 2, the two flow resistance branch flow paths 22 are connected in parallel with each other, and the inlet is provided with the flow resistance switching valve 7, and the two pressure sensors 4a and the structure formed by the flow resistance switching valve 7 and the two flow resistance branch flow paths 22 are sequentially connected in series on the fluid conveying flow path 2 along the fluid conveying direction.
One control method of the compact full-scale high-precision flow controller in the embodiment is as follows:
the main control chip 1 receives an external flow set value;
When the flow set value is within the preset interval (c, d), the main control chip 1 controls the flow resistance switching valve 7 to switch to enable the fluid to pass through only the flow resistance branch flow paths 22 where the flow resistance structures 5 with small flow resistance are located or pass through the flow resistance branch flow paths 22 where the two flow resistance structures 5 are located at the same time, and the main control chip 1 calculates the actual flow according to the signals fed back by the pressure type sensors 4a with wide range;
When the flow set value is within the preset interval (b, c), the main control chip 1 controls the flow resistance switching valve 7 to switch to enable the fluid to pass through the flow resistance branch flow path 22 where the flow resistance structure 5 with small flow resistance is positioned, and the main control chip 1 calculates the actual flow according to the signal fed back by the pressure sensor 4a with small range;
Under the condition that the flow set value is in the preset interval [ a, b ], the main control chip 1 controls the flow resistance switching valve 7 to switch to enable the fluid to pass through the flow resistance branch flow path 22 where the flow resistance structure 5 with large flow resistance is located, and the main control chip 1 calculates the actual flow according to the signal fed back by the pressure sensor 4a with small range.
It should be noted that the above is only one of the control methods, and the control method is not limited thereto and may be other. The whole strategy is that the smaller the upper limit of the preset interval where the flow set value is, the smaller range of the pressure sensor 4a and/or the flow resistance structure 5 with larger flow resistance is selected. The embodiment can further improve the accuracy of fluid flow measurement and control, in particular to the accuracy of measurement and control under a small flow set value.
Example six: as shown in fig. 6, the main difference between the present embodiment and the fifth embodiment is that the two sensors 4 are thermal sensors 4b, each thermal sensor 4b is mounted on one sensor branch flow path 21 of the fluid transport flow path 2, the two sensor branch flow paths 21 are connected in parallel, a sensor switching valve 6 is provided at the junction between the inlet of the two sensor branch flow paths 21 and the fluid transport flow path 2, and the structure formed by the sensor switching valve 6 and the two sensor branch flow paths 21 and the structure formed by the flow resistance switching valve 7 and the two flow resistance branch flow paths 22 are connected in parallel to each other in the fluid transport flow path 2.
The control method in this embodiment is similar to that in the fifth embodiment.
With the above-described preferred embodiments according to the present invention as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the description, but must be determined according to the scope of claims.
Claims (10)
1. A compact full-range high-precision flow controller is characterized in that,
The device comprises a main control chip (1), a fluid conveying flow path (2), a control valve (3) and a flow measuring component, wherein the control valve (3) and the flow measuring component are connected in series on the fluid conveying flow path (2), the flow measuring component comprises a sensor (4) and a flow resistance structure (5) which are matched for use, and the main control chip (1) is respectively connected with the sensor (4) and the control valve (3); wherein,
The sensor (4) is provided with at least two sensors with different measuring ranges, each sensor (4) is sequentially connected in series on the fluid conveying flow path (2) when the sensor (4) is a pressure type sensor (4 a), each sensor (4) is mounted on one sensor branch flow path (21) of the fluid conveying flow path (2) when the sensor (4) is a thermal type sensor (4 b), each sensor branch flow path (21) is connected in parallel, a sensor switching valve (6) is arranged at an inlet, and the main control chip (1) is also connected with the sensor switching valve (6);
And/or the flow resistance structures (5) are configured with at least two different flow resistances, each flow resistance structure (5) is arranged on one flow resistance branch flow path (22) of the fluid conveying flow path (2), the flow resistance branch flow paths (22) are mutually connected in parallel, a flow resistance switching valve (7) is arranged at the inlet, and the main control chip (1) is also connected with the flow resistance switching valve (7).
2. The compact full-scale high-precision flow controller according to claim 1, wherein,
The sensor (4) is configured with two different measuring ranges and the flow resistance structure (5) is configured with one.
3. The compact full-scale high-precision flow controller according to claim 1, wherein,
The sensor (4) is configured with one and the flow resistance structure (5) is configured with two different flow resistances.
4. The compact full-scale high-precision flow controller according to claim 1, wherein,
The sensor (4) is configured with two of different measuring ranges, and the flow resistance structure (5) is configured with two of different flow resistances.
5. The compact full-scale high-precision flow controller according to claim 2, 3 or 4,
The sensor (4) is a pressure sensor (4 a), the flow controller further comprises an outlet pressure sensor (8), and the outlet pressure sensor (8) is arranged at the outlet of the fluid conveying flow path (2) and is connected with the main control chip (1).
6. A flow measurement method of a compact full-scale high-accuracy flow controller according to any one of claims 1-5,
Comprising the following steps:
s1, selecting a working flow path and a working sensor according to a set flow value;
s2, calculating an actual flow value according to a signal fed back by the working sensor; wherein,
The step of selecting the working flow path is as follows:
when more than one flow resistance structure (5) is configured, according to a preset interval where a received flow rate set value is located, a flow resistance branch flow path (22) where the corresponding flow resistance structure (5) is located is selected as a working flow path, and a flow resistance switching valve (7) is switched, so that only fluid passes through the working flow path;
when one flow resistance structure (5) is configured, the flow path where the flow resistance structure (5) is positioned is used as a working flow path;
The steps of selecting the working sensor are as follows:
When more than one sensor (4) is arranged, according to a preset interval where a received flow set value is located, selecting the sensor (4) with a corresponding measuring range as a working sensor, and when a sensor switching valve (6) exists, switching the sensor switching valve (6), and only enabling a sensor branch flow path (21) where the working sensor is located to pass through;
when one sensor (4) is provided, the sensor (4) is used as an operation sensor.
7. The method for measuring flow of a compact full-scale high-accuracy flow controller according to claim 6, wherein,
In the step of selecting the operation sensor, when more than one sensor (4) is arranged, the smaller the upper limit of the preset interval where the flow rate set value is located, the smaller the range of the selected operation sensor.
8. The method for measuring flow of a compact full-scale high-accuracy flow controller according to claim 6, wherein,
In the step of selecting the working flow paths, when more than one flow resistance structure (5) is arranged, only one working flow path is selected, and the smaller the upper limit of the preset interval where the flow rate set value is located, the larger the flow resistance of the flow resistance structure (5) in the selected working flow path is.
9. The method for measuring flow of a compact full-scale high-accuracy flow controller according to claim 6, wherein,
In the step of selecting the working flow path, when the flow resistance structure (5) is configured with more than one flow resistance branch flow path (22) where one flow resistance structure (5) is located is used as the working flow path when the flow rate set value is smaller than the threshold value, and when the flow rate set value is not smaller than the threshold value, at least two flow resistance branch flow paths (22) where the flow resistance structure (5) is located are used as the working flow paths.
10. A flow control method based on the flow measurement method of the compact full-scale high-precision flow controller according to any one of claim 6 to 9, characterized in that,
Comprising the following steps:
Obtaining an actual flow value;
and comparing the actual flow value with the set flow value, and adjusting the opening of the control valve (3).
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