CN118782552A - Chip packaging structure and packaging method - Google Patents
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- CN118782552A CN118782552A CN202410863896.XA CN202410863896A CN118782552A CN 118782552 A CN118782552 A CN 118782552A CN 202410863896 A CN202410863896 A CN 202410863896A CN 118782552 A CN118782552 A CN 118782552A
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3675—Cooling facilitated by shape of device characterised by the shape of the housing
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/54—Providing fillings in containers, e.g. gas fillings
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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- H—ELECTRICITY
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3736—Metallic materials
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- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3737—Organic materials with or without a thermoconductive filler
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Abstract
本申请公开了一种芯片封装结构及封装方法。芯片封装结构包括:基板;芯片,其安装于基板上并与基板电连接;塑封体,其设置于基板上表面,并包封芯片;散热盖,其覆盖芯片和塑封体的上表面,并通过导热材料连接到芯片和塑封体的上表面。本申请通过减少塑封体包封芯片的范围,通过导热材料将散热盖连接到芯片和塑封体的上表面,使得芯片工作过程中产生的热量可以通过导热材料传递到散热盖,极大地提高了芯片和塑封体的导热效果。
The present application discloses a chip packaging structure and packaging method. The chip packaging structure includes: a substrate; a chip, which is mounted on the substrate and electrically connected to the substrate; a plastic package, which is arranged on the upper surface of the substrate and encapsulates the chip; a heat dissipation cover, which covers the upper surface of the chip and the plastic package, and is connected to the upper surface of the chip and the plastic package through a thermally conductive material. The present application reduces the range of the chip encapsulated by the plastic package, connects the heat dissipation cover to the upper surface of the chip and the plastic package through a thermally conductive material, so that the heat generated during the operation of the chip can be transferred to the heat dissipation cover through the thermally conductive material, thereby greatly improving the thermal conductivity of the chip and the plastic package.
Description
技术领域Technical Field
本申请涉及芯片封装领域,尤其涉及一种芯片封装结构及封装方法。The present application relates to the field of chip packaging, and in particular to a chip packaging structure and a packaging method.
背景技术Background Art
引线键合(Wire Bonding)是一种传统的封装技术,将芯片背面靠基板,正面朝上,即芯片上带有焊料凸点的面朝上,通过金属引线实现芯片的焊料凸点和基板上的焊盘的电气连接。Wire bonding is a traditional packaging technology that places the back of the chip against the substrate and the front side facing up, that is, the side with solder bumps on the chip faces up, and the electrical connection between the solder bumps of the chip and the pads on the substrate is achieved through metal wires.
而倒装芯片(Flip Chip)是将芯片正面朝向基板,通过芯片上的焊料凸点对准基板上的焊盘实现芯片与基板互连的技术。该技术能提供更高的I/O密度,更短的互连距离,与引线键合技术相比具有更加优越的电学性能,也有利于减少芯片封装尺寸。Flip chip is a technology that places the front of the chip facing the substrate and interconnects the chip with the substrate by aligning the solder bumps on the chip with the pads on the substrate. This technology can provide higher I/O density, shorter interconnection distance, and has better electrical performance than wire bonding technology, and is also conducive to reducing chip packaging size.
随着封装技术向小型化、高集成度方向发展。晶圆级封装(Wafer-LevelPackaging,WLP)通过在晶圆上对芯片进行整体封装,封装完成后再进行切割,可以进一步减少封装结构的尺寸。芯片尺寸封装(Chip Scale Package,CSP)指封装后的芯片尺寸尽量接近裸芯片大小,减少封装占用的空间,提高集成度。倒装芯片尺寸封装(Flip Chip ChipScale Package,缩写为FCCSP)是一种采用倒装芯片方式的芯片尺寸封装。As packaging technology develops towards miniaturization and high integration. Wafer-Level Packaging (WLP) can further reduce the size of the packaging structure by packaging the chip as a whole on the wafer and then cutting it after packaging. Chip Scale Package (CSP) refers to the size of the packaged chip as close to the size of the bare chip as possible, reducing the space occupied by the package and improving the integration. Flip Chip Chip Scale Package (FCCSP) is a chip scale package that uses a flip chip method.
在传统的封装技术中,通常采用塑封体包封芯片的方式来实现对芯片的保护。但随着市场对产品散热要求越来越高,现有的封装结构无法满足高散热要求。In traditional packaging technology, a plastic package is usually used to encapsulate the chip to protect the chip. However, as the market has higher and higher requirements for product heat dissipation, the existing packaging structure cannot meet the high heat dissipation requirements.
发明内容Summary of the invention
本申请的目的是提出一种芯片封装结构和封装方法,以解决现有的芯片封装结构无法满足高散热要求的问题。The purpose of this application is to propose a chip packaging structure and a packaging method to solve the problem that the existing chip packaging structure cannot meet high heat dissipation requirements.
本申请提供了一种芯片封装结构,包括:基板;芯片,其安装于所述基板上并与所述基板电连接;塑封体,其设置于所述基板上表面,并包封所述芯片;散热盖,其覆盖所述芯片和所述塑封体的上表面,并通过导热材料连接到所述芯片和所述塑封体的上表面。The present application provides a chip packaging structure, comprising: a substrate; a chip, which is mounted on the substrate and electrically connected to the substrate; a plastic package, which is arranged on the upper surface of the substrate and encapsulates the chip; a heat dissipation cover, which covers the chip and the upper surface of the plastic package, and is connected to the chip and the upper surface of the plastic package through a thermally conductive material.
在一些实施例中,所述导热材料包括第一导热材料和第二导热材料,所述第二导热材料的粘结力高于所述第一导热材料,所述第一导热材料的导热性高于所述第二导热材料,所述塑封体的上表面包括第一区域和第二区域,所述第一区域与所述散热盖通过第一导热材料粘接,所述第二区域与所述散热盖通过第二导热材料粘接。In some embodiments, the thermally conductive material includes a first thermally conductive material and a second thermally conductive material, the bonding force of the second thermally conductive material is higher than that of the first thermally conductive material, the thermal conductivity of the first thermally conductive material is higher than that of the second thermally conductive material, the upper surface of the plastic package includes a first area and a second area, the first area is bonded to the heat dissipation cover through the first thermally conductive material, and the second area is bonded to the heat dissipation cover through the second thermally conductive material.
在上述实施例中,所述第二区域至少部分地环绕所述第一区域,且所述第二区域位于所述塑封体的上表面的外侧。In the above embodiment, the second area at least partially surrounds the first area, and the second area is located outside the upper surface of the plastic package body.
在一些实施例中,所述芯片与所述散热盖通过所述第一导热材料粘接。In some embodiments, the chip and the heat dissipation cover are bonded together by the first thermally conductive material.
在另一些实施例中,所述导热材料包括第三导热材料和第四导热材料,所述第三导热材料为金属材料,所述芯片通过倒装方式安装于所述基板上,所述芯片的背面与所述散热盖通过所述第三导热材料焊接,所述塑封体的上表面与所述散热盖通过所述第四导热材料粘接。In other embodiments, the thermally conductive material includes a third thermally conductive material and a fourth thermally conductive material, the third thermally conductive material is a metal material, the chip is mounted on the substrate by flip-chip method, the back side of the chip is welded to the heat dissipation cover by the third thermally conductive material, and the upper surface of the plastic package is bonded to the heat dissipation cover by the fourth thermally conductive material.
在一些实施例中,所述散热盖的下表面与所述芯片连接的部位设有若干凸起部和/或凹陷部。In some embodiments, a portion where the lower surface of the heat dissipation cover is connected to the chip is provided with a plurality of protrusions and/or recesses.
在一些实施例中,所述散热盖与所述芯片连接部位以外的区域具有镂空结构,所述镂空结构的镂空部分填充有所述导热材料。In some embodiments, the area other than the connection portion between the heat dissipation cover and the chip has a hollow structure, and the hollow portion of the hollow structure is filled with the thermal conductive material.
本申请另一方面提供了一种芯片封装方法,包括:将芯片安装于基板上并与所述基板电连接;通过成型工艺在所述基板上表面形成塑封体,所述塑封体包封所述芯片;通过导热材料将散热盖连接到所述芯片和所述塑封体的上表面,且使所述散热盖覆盖所述芯片和所述塑封体的上表面。On the other hand, the present application provides a chip packaging method, including: mounting a chip on a substrate and electrically connecting the chip to the substrate; forming a plastic package on the upper surface of the substrate through a molding process, wherein the plastic package encapsulates the chip; connecting a heat dissipation cover to the chip and the upper surface of the plastic package through a thermally conductive material, and allowing the heat dissipation cover to cover the chip and the upper surface of the plastic package.
在一些实施例中,所述导热材料包括第一导热材料和第二导热材料,所述第二导热材料的粘结力高于所述第一导热材料,所述第一导热材料的导热性高于所述第二导热材料,所述塑封体的上表面包括第一区域和第二区域,通过导热材料将散热盖连接到所述芯片和所述塑封体的上表面包括:通过所述第一导热材料粘接所述散热盖与所述芯片及所述塑封体的上表面的第一区域,通过所述第二导热材料粘接所述散热盖与所述塑封体的上表面的第二区域。In some embodiments, the thermally conductive material includes a first thermally conductive material and a second thermally conductive material, the bonding force of the second thermally conductive material is higher than that of the first thermally conductive material, the thermal conductivity of the first thermally conductive material is higher than that of the second thermally conductive material, the upper surface of the plastic package includes a first area and a second area, and connecting the heat dissipation cover to the chip and the upper surface of the plastic package through the thermally conductive material includes: bonding the heat dissipation cover to the chip and the first area of the upper surface of the plastic package through the first thermally conductive material, and bonding the heat dissipation cover to the second area of the upper surface of the plastic package through the second thermally conductive material.
在上述实施例中,所述第二区域至少部分地环绕所述第一区域,且所述第二区域位于所述塑封体的上表面的边缘。In the above embodiment, the second area at least partially surrounds the first area, and the second area is located at the edge of the upper surface of the plastic packaging body.
在另一些实施例中,所述导热材料包括第三导热材料和第四导热材料,所述第三导热材料为金属材料,将芯片安装于基板上并与所述基板电连接包括:通过倒装方式将芯片安装于基板上并与所述基板电连接;通过导热材料将散热盖连接到所述芯片和所述塑封体的上表面包括:通过所述第三导热材料将所述散热盖焊接到所述芯片的背面,通过所述第四导热材料粘接所述塑封体的上表面与所述散热盖。In other embodiments, the thermally conductive material includes a third thermally conductive material and a fourth thermally conductive material, the third thermally conductive material is a metal material, and mounting the chip on the substrate and electrically connecting the chip to the substrate includes: mounting the chip on the substrate by flip-chip means and electrically connecting the chip to the substrate; connecting the heat dissipation cover to the chip and the upper surface of the plastic package body by the thermally conductive material includes: welding the heat dissipation cover to the back side of the chip by the third thermally conductive material, and bonding the upper surface of the plastic package body and the heat dissipation cover by the fourth thermally conductive material.
在一些实施例中,所述散热盖的下表面与所述芯片连接的部位设有若干凸起部和/或凹陷部。In some embodiments, a portion where the lower surface of the heat dissipation cover is connected to the chip is provided with a plurality of protrusions and/or recesses.
在一些实施例中,所述散热盖与所述芯片连接部位以外的区域具有镂空结构,通过导热材料将散热盖连接到所述芯片和所述塑封体的上表面还包括:在所述镂空结构的镂空部分填充导热材料。In some embodiments, the area outside the connection portion between the heat dissipation cover and the chip has a hollow structure, and connecting the heat dissipation cover to the chip and the upper surface of the plastic package body through the thermal conductive material further comprises: filling the hollow part of the hollow structure with thermal conductive material.
在上述实施例中,在通过导热材料将散热盖连接到所述芯片和所述塑封体的上表面之前,所述方法还包括:在所述散热盖上表面贴覆耐高温膜;在通过导热材料将散热盖连接到所述芯片和所述塑封体的上表面之后,所述方法还包括:去除所述散热盖上表面贴覆的所述耐高温膜。In the above embodiment, before the heat dissipation cover is connected to the chip and the upper surface of the plastic package body through the thermal conductive material, the method further includes: coating the upper surface of the heat dissipation cover with a high temperature resistant film; after the heat dissipation cover is connected to the chip and the upper surface of the plastic package body through the thermal conductive material, the method further includes: removing the high temperature resistant film coated on the upper surface of the heat dissipation cover.
本申请的芯片封装结构及封装方法,通过导热材料将散热盖连接到芯片和塑封体的上表面,使得芯片工作过程中产生的热量可以通过导热材料传递到散热盖,极大地提高了芯片和塑封体的导热效果,能够满足更高的芯片散热要求。本申请将散热盖设计成扁平并在背面增加若干凸起部和/或凹陷部,可以增加与导热材料的结合力;将散热盖设计成网状镂空结构可以更好吸收自身应力并减小翘曲,保证散热盖与导热材料的结合,避免散热盖的翘曲导致与导热材料分层。The chip packaging structure and packaging method of the present application connect the heat dissipation cover to the upper surface of the chip and the plastic package body through the thermal conductive material, so that the heat generated during the operation of the chip can be transferred to the heat dissipation cover through the thermal conductive material, which greatly improves the thermal conductivity of the chip and the plastic package body and can meet higher chip heat dissipation requirements. The present application designs the heat dissipation cover to be flat and adds several raised parts and/or recessed parts on the back, which can increase the bonding force with the thermal conductive material; the heat dissipation cover is designed to be a mesh hollow structure, which can better absorb its own stress and reduce warping, ensure the bonding of the heat dissipation cover and the thermal conductive material, and avoid the warping of the heat dissipation cover causing delamination with the thermal conductive material.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1示出了现有的一种FCCSP封装结构的示意图;FIG1 shows a schematic diagram of an existing FCCSP packaging structure;
图2示出了本申请的芯片封装结构1的一个实施例的剖面的示意图;FIG2 is a schematic cross-sectional view of an embodiment of a chip packaging structure 1 of the present application;
图3示出了本申请的另一个实施例的散热盖40的俯视图;FIG3 shows a top view of a heat dissipation cover 40 according to another embodiment of the present application;
图4示出了采用图3中散热盖40的芯片封装结构1的剖面的示意图;FIG4 is a schematic cross-sectional view of a chip packaging structure 1 using the heat dissipation cover 40 in FIG3 ;
图5示出了本申请的芯片封装结构1的另一个实施例的剖面的示意图;FIG5 is a schematic cross-sectional view of another embodiment of a chip packaging structure 1 of the present application;
图6示出了本申请的芯片封装结构1的又一个实施例的剖面的示意图;FIG6 is a schematic cross-sectional view of yet another embodiment of the chip packaging structure 1 of the present application;
图7示出了本申请的芯片封装方法100的一个实施例的示意图;FIG. 7 is a schematic diagram showing an embodiment of a chip packaging method 100 of the present application;
图8A-图8H示出了本申请的芯片封装方法100的各步骤的示意图;8A-8H are schematic diagrams showing various steps of the chip packaging method 100 of the present application;
图9示出了本申请的芯片封装方法100的一个可选步骤S20的示意图;FIG9 is a schematic diagram showing an optional step S20 of the chip packaging method 100 of the present application;
图10示出了本申请的芯片封装方法100的一个可选步骤S40的示意图。FIG. 10 is a schematic diagram showing an optional step S40 of the chip packaging method 100 of the present application.
具体实施方式DETAILED DESCRIPTION
下面结合具体实施例对本申请进行详细说明。以下实施例将有助于本领域的技术人员进一步理解本申请,但并非以任何形式限制本申请。应当指出的是,对本领域的普通技术人员来说,在不脱离本申请构思的前提下,还可以做出若干变形和改进。这些都属于本申请的保护范围。The present application is described in detail below in conjunction with specific embodiments. The following embodiments will help those skilled in the art to further understand the present application, but are not intended to limit the present application in any form. It should be noted that, for those of ordinary skill in the art, several variations and improvements can also be made without departing from the concept of the present application. These all belong to the protection scope of the present application.
图1示出了现有的一种FCCSP封装结构的示意图。如图所示,芯片20'正面朝下,倒装在基板10'上,芯片20'正面的金属凸点与基板10'上的焊盘形成电气连接。基板10'下表面焊接锡球11',芯片20'通过基板10'内的电路与锡球11'形成电气连接。塑封体30'设置于基板10'上表面并完全包封芯片20',从而对芯片20'进行保护,降低芯片损坏的风险,用于塑封的塑封料通常选用环氧树脂等。芯片20'正面与基板之间可以填充底部填充胶,或者直接通过塑封体30'填充。为了提高散热效果,塑封体30'上表面通常还设有散热器等辅助散热部件(图中未示出)。由于塑封体导热率较低,一般为1~3瓦/(米·开尔文),散热效果差,难以满足当前芯片越来越高的散热要求。FIG1 shows a schematic diagram of an existing FCCSP packaging structure. As shown in the figure, the chip 20' is facing down and flipped on the substrate 10'. The metal bumps on the front of the chip 20' form an electrical connection with the pads on the substrate 10'. The solder balls 11' are soldered on the lower surface of the substrate 10', and the chip 20' forms an electrical connection with the solder balls 11' through the circuit in the substrate 10'. The plastic encapsulation body 30' is arranged on the upper surface of the substrate 10' and completely encapsulates the chip 20', thereby protecting the chip 20' and reducing the risk of chip damage. The plastic encapsulation material used for plastic encapsulation is usually selected from epoxy resin and the like. The bottom filling glue can be filled between the front of the chip 20' and the substrate, or it can be filled directly through the plastic encapsulation body 30'. In order to improve the heat dissipation effect, the upper surface of the plastic encapsulation body 30' is usually provided with auxiliary heat dissipation components such as a heat sink (not shown in the figure). Since the thermal conductivity of the plastic encapsulation body is relatively low, generally 1 to 3 watts/(meter·Kelvin), the heat dissipation effect is poor, and it is difficult to meet the increasingly high heat dissipation requirements of current chips.
图1所示的FCCSP封装结构可以采用现有的FCCSP封装工艺来制作,现有的FCCSP封装工艺包括如下步骤:The FCCSP packaging structure shown in FIG1 can be manufactured using an existing FCCSP packaging process. The existing FCCSP packaging process includes the following steps:
将芯片倒装在基板正面并通过焊料凸点形成电连接;Flip the chip onto the front side of the substrate and make electrical connections through solder bumps;
使用塑封料将芯片完全包封;Use plastic encapsulation compound to completely encapsulate the chip;
在基板背面焊接锡球。Solder balls on the back side of the substrate.
FCCSP封装工艺中,在使用塑封料对芯片进行包封时,为使塑封料完全固化需要进行烘烤,温度较高。在基板背面焊接锡球时一般采用高温回流焊工艺,温度较高。由于塑封体、芯片和基板三者的材料的热膨胀系数不同,温度的变化可能会导致这三者以不同的速率和量进行膨胀或收缩,由于这三者是紧密结合在一起的,在温度上升和下降过程中,沿三者接触面方向会产生热应力不匹配的问题,可能使得封装结构产品翘曲变形,甚至导致封装结构整体或局部(比如散热盖与塑封体的部分接触面)分层异常情况,影响产品的良率。热应力是物体由于外在约束以及内部各部分之间的相互约束,在因温度的变化而膨胀或收缩时,膨胀或收缩受到阻碍而在物体内部产生的应力。In the FCCSP packaging process, when using plastic encapsulation to encapsulate the chip, it is necessary to bake the plastic encapsulation to fully solidify it, and the temperature is relatively high. When soldering solder balls on the back of the substrate, a high-temperature reflow soldering process is generally used, and the temperature is relatively high. Due to the different thermal expansion coefficients of the materials of the plastic encapsulation body, chip, and substrate, temperature changes may cause the three to expand or contract at different rates and amounts. Since the three are closely combined, during the temperature rise and fall process, thermal stress mismatch problems will occur along the contact surface direction of the three, which may cause the packaging structure product to warp and deform, and even cause abnormal delamination of the entire or partial packaging structure (such as the contact surface between the heat dissipation cover and the plastic encapsulation body), affecting the yield of the product. Thermal stress is the stress generated inside the object when the expansion or contraction is hindered due to external constraints and mutual constraints between internal parts when the object expands or contracts due to temperature changes.
针对上述问题,本申请提出了一种新的芯片封装结构,其一方面可以提高产品的散热性能,另一方面,可以改善热应力的影响。图2示出了本申请的芯片封装结构1的一个实施例的剖面的示意图。在本申请的各个实施例中,均以FCCSP为例,对本申请的芯片封装结构进行说明,但可以理解,本申请并不限定于FCCSP。In view of the above problems, the present application proposes a new chip packaging structure, which can improve the heat dissipation performance of the product on the one hand, and improve the influence of thermal stress on the other hand. FIG. 2 shows a schematic diagram of a cross-section of an embodiment of the chip packaging structure 1 of the present application. In each embodiment of the present application, FCCSP is taken as an example to illustrate the chip packaging structure of the present application, but it can be understood that the present application is not limited to FCCSP.
如图2所示,芯片封装结构1包括基板10、芯片20、塑封体30和散热盖40。As shown in FIG. 2 , the chip packaging structure 1 includes a substrate 10 , a chip 20 , a plastic package 30 and a heat dissipation cover 40 .
基板10用于承载芯片并提供电气连接,基板10的材料可以是硅材料、陶瓷材料、有机材料等。基板10上设有与芯片20的焊料凸点22相匹配的焊区、引脚或电路等(图中未示出)。The substrate 10 is used to carry the chip and provide electrical connection. The material of the substrate 10 can be silicon material, ceramic material, organic material, etc. The substrate 10 is provided with welding areas, pins or circuits (not shown in the figure) matching the solder bumps 22 of the chip 20.
芯片20安装于基板10上并与基板10电连接,芯片20可以采用各种方式安装到基板10上,比如采用引线键合或倒装芯片等方式安装。图中示出了采用倒装芯片的安装方式,将芯片20的正面21通过焊料凸点22与基板10连接,芯片的正面为芯片的有源面。在一些实施例中,为了保护焊料凸点22,保障其与基板10的电路接触良好,也可使用填充材料23如填充胶等填充在芯片正面21和基板10之间。The chip 20 is mounted on the substrate 10 and electrically connected to the substrate 10. The chip 20 can be mounted on the substrate 10 in various ways, such as wire bonding or flip chip mounting. The figure shows a flip chip mounting method, where the front side 21 of the chip 20 is connected to the substrate 10 through solder bumps 22, and the front side of the chip is the active side of the chip. In some embodiments, in order to protect the solder bumps 22 and ensure good circuit contact between the chip and the substrate 10, a filling material 23 such as a filling glue can also be used to fill between the front side 21 of the chip and the substrate 10.
塑封体30设置于基板10的上表面,并包封芯片20的周围,露出芯片的背面24,从而可以采用更加灵活有效的散热设计。在另一些实施例中,芯片采用引线键合的方式安装于基板,塑封体包封芯片及其引线。The plastic package 30 is disposed on the upper surface of the substrate 10 and encapsulates the chip 20, exposing the back side 24 of the chip, so that a more flexible and effective heat dissipation design can be adopted. In other embodiments, the chip is mounted on the substrate by wire bonding, and the plastic package encapsulates the chip and its leads.
散热盖40覆盖芯片20和塑封体的上表面31,并通过导热材料41连接到芯片20和塑封体的上表面31。其中,导热材料41的导热率大于塑封体30的导热率,例如,大于3瓦/(米·开尔文)。导热材料41可以选用环氧树脂体系胶水、有机硅树脂体系胶水等具有粘结力的导热胶。散热盖40连接到芯片20的背面,导热材料41不与芯片20的焊料凸点接触,则导热胶中可以包含固体填料,例如铝粉、三氧化二铝粉、银粉等,以提高导热性。如果散热盖40连接到芯片20的正面,则导热材料41覆盖于塑封体的上表面31,导热胶中可以包含固体填料,例如铝粉、三氧化二铝粉、银粉等,以提高导热性。另外,散热盖40具有扁平形状,以便进行更好地散热。为了使散热盖满足一定的机械强度,又具有较好的散热性能,散热盖的厚度可以设置为0.8-1.2毫米。The heat dissipation cover 40 covers the chip 20 and the upper surface 31 of the plastic package, and is connected to the chip 20 and the upper surface 31 of the plastic package through the heat conductive material 41. The heat conductivity of the heat conductive material 41 is greater than the heat conductivity of the plastic package 30, for example, greater than 3 watts/(meter Kelvin). The heat conductive material 41 can be selected from heat conductive adhesives with adhesive force such as epoxy resin system glue and silicone resin system glue. The heat dissipation cover 40 is connected to the back of the chip 20, and the heat conductive material 41 does not contact the solder bumps of the chip 20. The heat conductive adhesive can contain solid fillers, such as aluminum powder, aluminum oxide powder, silver powder, etc., to improve thermal conductivity. If the heat dissipation cover 40 is connected to the front of the chip 20, the heat conductive material 41 covers the upper surface 31 of the plastic package, and the heat conductive adhesive can contain solid fillers, such as aluminum powder, aluminum oxide powder, silver powder, etc., to improve thermal conductivity. In addition, the heat dissipation cover 40 has a flat shape for better heat dissipation. In order to ensure that the heat dissipation cover meets certain mechanical strength and has good heat dissipation performance, the thickness of the heat dissipation cover can be set to 0.8-1.2 mm.
在一些实施例中,散热盖可以选择高导热性的金属材料,比如铝、铜等。进一步地,为了增强抗氧化性能,还可以在常规金属材料上镀惰性金属,比如铜镀镍、铜镀金镍等。一些实施例中,散热盖40的外缘与塑封体30的上表面31的外缘齐平,使得芯片封装结构1的外轮廓更加整齐规则,便于切割、存储、机械臂抓取、安装等。一些实施例中,散热盖40上表面进一步连接散热器等辅助散热部件(图中未示出),以进一步提高散热效果。In some embodiments, the heat dissipation cover can be made of a metal material with high thermal conductivity, such as aluminum, copper, etc. Furthermore, in order to enhance the anti-oxidation performance, an inert metal can be plated on a conventional metal material, such as copper-plated nickel, copper-plated gold-nickel, etc. In some embodiments, the outer edge of the heat dissipation cover 40 is flush with the outer edge of the upper surface 31 of the plastic package body 30, so that the outer contour of the chip packaging structure 1 is more neat and regular, which is convenient for cutting, storage, robot arm grasping, installation, etc. In some embodiments, the upper surface of the heat dissipation cover 40 is further connected to auxiliary heat dissipation components such as a radiator (not shown in the figure) to further improve the heat dissipation effect.
在一些实施例中,散热盖40的下表面设有若干凸起部和/或凹陷部,以增加表面粗糙度,从而增强与导热材料41的结合力。凸起部和/或凹陷部可以根据需要设置为各种几何形状,例如三角形、正方形、圆形、梅花形等形状中的一种或多种。相应的,芯片20与散热盖连接的部位、塑封体的上表面31也可以通过打磨等方式增加粗糙度,从而增强与导热材料41的结合力。In some embodiments, the lower surface of the heat dissipation cover 40 is provided with a plurality of protrusions and/or depressions to increase the surface roughness, thereby enhancing the bonding force with the thermal conductive material 41. The protrusions and/or depressions can be set to various geometric shapes as required, such as one or more of triangles, squares, circles, plum blossoms, etc. Correspondingly, the portion where the chip 20 is connected to the heat dissipation cover and the upper surface 31 of the plastic package can also be increased in roughness by grinding or the like, thereby enhancing the bonding force with the thermal conductive material 41.
本申请的芯片封装结构1,通过减少塑封体包封芯片的范围,通过导热率高于塑封体30的导材料41将散热盖40连接到芯片20和塑封体30的上表面31,使得芯片工作过程中产生的热量可以经由芯片20及塑封体上表面31通过导热材料传递到散热盖,极大地提高了封装结构1的散热性能。The chip packaging structure 1 of the present application reduces the range of the chip encapsulated by the plastic package body, and connects the heat dissipation cover 40 to the chip 20 and the upper surface 31 of the plastic package body 30 through a conductive material 41 with a higher thermal conductivity than the plastic package body 30, so that the heat generated during the operation of the chip can be transferred to the heat dissipation cover via the chip 20 and the upper surface 31 of the plastic package body through the thermal conductive material, thereby greatly improving the heat dissipation performance of the packaging structure 1.
芯片封装结构1相对于现有技术而言具有更好的散热性能,但是,仍然存在因热应力不匹配导致封装结构产品翘曲变形及分层等问题。为了进一步克服封装结构产品翘曲变形及分层等问题,本申请进一步对散热盖的结构进行改进,如图3-图4所示。The chip packaging structure 1 has better heat dissipation performance than the prior art, but there are still problems such as warping and delamination of the packaging structure product due to thermal stress mismatch. In order to further overcome the problems of warping and delamination of the packaging structure product, the present application further improves the structure of the heat dissipation cover, as shown in Figures 3 and 4.
图3示出了本申请的另一个实施例的散热盖40的俯视图,图4示出了采用图3中散热盖40的芯片封装结构1的剖面的示意图。如图所示,在散热盖40设置镂空结构42,镂空结构42可以设置于与芯片20连接部位以外的区域,镂空结构42的镂空部分填充有导热材料41。镂空结构可以有各种形式,如图4所示的网格状镂空结构的网眼形状是长方形。在其他实施例中,镂空结构也可以不采用网格状,比如若干个网眼呈圆弧形排布,或不规则排布等。网眼形状可以是正方形、长方形、圆形、椭圆形、三角形、五边形、梅花形、星型中的一种或多种,网眼形状采用五边形以上的多边形、梅花形、星形等形状有利于增加其与填充的导热材料41的结合强度。FIG3 shows a top view of a heat dissipation cover 40 of another embodiment of the present application, and FIG4 shows a schematic diagram of a cross-section of a chip packaging structure 1 using the heat dissipation cover 40 in FIG3 . As shown in the figure, a hollow structure 42 is provided on the heat dissipation cover 40, and the hollow structure 42 can be provided in an area other than the connection part with the chip 20, and the hollow part of the hollow structure 42 is filled with a thermal conductive material 41. The hollow structure can have various forms, and the mesh shape of the grid-like hollow structure shown in FIG4 is a rectangle. In other embodiments, the hollow structure may not be in a grid shape, for example, a plurality of meshes are arranged in an arc shape, or arranged irregularly, etc. The mesh shape may be one or more of a square, a rectangle, a circle, an ellipse, a triangle, a pentagon, a plum blossom, and a star shape. The mesh shape using a polygonal shape, a plum blossom shape, a star shape, etc., which is more than a pentagon, is conducive to increasing the bonding strength with the filled thermal conductive material 41.
通过在散热盖40上设置镂空结构,当散热盖40因温度变化发生膨胀或收缩时,镂空部分周边的散热盖40本体可以向镂空部分方向发生形变而不会受到阻碍,使得散热盖40沿扁平方向受到的热应力可以通过镂空结构得以释放,从而可以减少散热盖40发生翘曲变形及分层等问题。By providing a hollow structure on the heat dissipation cover 40, when the heat dissipation cover 40 expands or contracts due to temperature changes, the heat dissipation cover 40 body around the hollow part can be deformed in the direction of the hollow part without being hindered, so that the thermal stress exerted on the heat dissipation cover 40 along the flat direction can be released through the hollow structure, thereby reducing the problems of warping, deformation and delamination of the heat dissipation cover 40.
进一步地,芯片20工作过程中产生的热量可以经由镂空部分的导热材料41传导到散热盖上表面设置的散热器上,而无需经过散热盖。进一步地,可以使用导热率高于散热盖的导热材料41,从而进一步提高热传导效率。图5示出了本申请的芯片封装结构1的另一个实施例的剖面的示意图。在一些实施例中,导热材料41包括第一导热材料411和第二导热材料412,第二导热材料412的粘结力高于第一导热材料411,第一导热材料411的导热性高于第二导热材料412。比如第一导热材料411可以选择膜类石墨烯、碳纤维、液态金属、相变材料等高导热但粘结力不足的导热材料,而第二导热材料412则可以选择环氧树脂体系胶水、有机硅树脂体系胶水等导热性较低但粘结力较强的导热材料。一些实施例中,塑封体30的上表面包括第一区域311和第二区域312。第一区域311与散热盖40通过第一导热材料411粘接,第二区域312与散热盖40通过第二导热材料412粘接。这样,通过合理设置第一区域311和第二区域312,比如设置第二区域312部分或者全部地环绕第一区域311,且将第二区域312设置于塑封体的上表面31的边缘(如图5所示),就可以在确保塑封体的上表面与散热盖40稳固结合的前提下,大大提升导热效果。在一些实施例中,第一区域311和第二区域312也可以采用其他设置方式,比如间隔设置等。由于芯片20位于塑封体的上表面的中间部位,为了确保芯片的散热性,在一些实施例中,芯片20和散热盖40也通过第一导热材料411粘接。当芯片与散热盖连接的部位为芯片的正面时,第一导热材料411应当选用绝缘材料。在另一些实施例中,芯片20和散热盖40还可以通过其他导热材料,比如金属材料铟片等焊接,兼具强结合力和高导热效果。Furthermore, the heat generated during the operation of the chip 20 can be conducted to the heat sink disposed on the upper surface of the heat dissipation cover via the heat conductive material 41 of the hollowed-out portion without passing through the heat dissipation cover. Furthermore, a heat conductive material 41 having a higher thermal conductivity than the heat dissipation cover can be used, thereby further improving the heat conduction efficiency. FIG. 5 shows a schematic diagram of a cross section of another embodiment of the chip packaging structure 1 of the present application. In some embodiments, the heat conductive material 41 includes a first heat conductive material 411 and a second heat conductive material 412, the bonding force of the second heat conductive material 412 is higher than that of the first heat conductive material 411, and the thermal conductivity of the first heat conductive material 411 is higher than that of the second heat conductive material 412. For example, the first heat conductive material 411 can select a heat conductive material with high thermal conductivity but insufficient bonding force, such as film graphene, carbon fiber, liquid metal, phase change material, etc., while the second heat conductive material 412 can select a heat conductive material with low thermal conductivity but strong bonding force, such as epoxy resin system glue and silicone resin system glue. In some embodiments, the upper surface of the plastic package 30 includes a first area 311 and a second area 312. The first area 311 is bonded to the heat dissipation cover 40 through the first heat conductive material 411, and the second area 312 is bonded to the heat dissipation cover 40 through the second heat conductive material 412. In this way, by reasonably setting the first area 311 and the second area 312, such as setting the second area 312 to partially or completely surround the first area 311, and setting the second area 312 at the edge of the upper surface 31 of the plastic package (as shown in FIG. 5), the heat conduction effect can be greatly improved under the premise of ensuring that the upper surface of the plastic package is firmly combined with the heat dissipation cover 40. In some embodiments, the first area 311 and the second area 312 can also be set in other ways, such as at intervals. Since the chip 20 is located in the middle of the upper surface of the plastic package, in order to ensure the heat dissipation of the chip, in some embodiments, the chip 20 and the heat dissipation cover 40 are also bonded through the first heat conductive material 411. When the part where the chip is connected to the heat dissipation cover is the front of the chip, the first heat conductive material 411 should be an insulating material. In other embodiments, the chip 20 and the heat dissipation cover 40 may also be welded by other heat-conducting materials, such as metal materials such as indium sheets, to achieve both strong bonding and high thermal conductivity.
图6示出了本申请的芯片封装结构1的又一个实施例的剖面的示意图。在该实施例中,导热材料41包括第三导热材料413和第四导热材料414,第三导热材料413为金属材料,芯片20通过倒装方式安装于基板10上,芯片20的背面24与散热盖40通过第三导热材料413焊接,塑封体30的上表面31与散热盖40通过第四导热材料414粘接。金属材料可以选用高导热的金属比如铟片等,其一面与散热盖40焊接,另一面与芯片的背面24焊接,能够提供很强的结合力和较高的导热效果。第四导热材料414可以选择环氧树脂体系胶水、有机硅树脂体系胶水等粘结力较强的导热材料,第四导热材料414环绕于第三导热材料413周围,可以防止第三导热材料413在焊接过程中发生扩散。FIG6 shows a schematic diagram of a cross section of another embodiment of the chip packaging structure 1 of the present application. In this embodiment, the heat-conducting material 41 includes a third heat-conducting material 413 and a fourth heat-conducting material 414, the third heat-conducting material 413 is a metal material, the chip 20 is mounted on the substrate 10 by flip-chip mode, the back side 24 of the chip 20 is welded with the heat dissipation cover 40 through the third heat-conducting material 413, and the upper surface 31 of the plastic package 30 is bonded with the heat dissipation cover 40 through the fourth heat-conducting material 414. The metal material can be selected from high thermal conductivity metals such as indium sheets, one side of which is welded with the heat dissipation cover 40 and the other side is welded with the back side 24 of the chip, which can provide strong bonding force and high thermal conductivity. The fourth heat-conducting material 414 can be selected from heat-conducting materials with strong bonding force such as epoxy resin system glue and silicone resin system glue. The fourth heat-conducting material 414 surrounds the third heat-conducting material 413 to prevent the third heat-conducting material 413 from diffusing during the welding process.
在一些实施例中,基板10下表面还可以包括电路、锡球、引脚等中的一种或多种,用于芯片封装结构1的安装及电路连接。图2示例性地示出了基板10下表面的锡球11。In some embodiments, the lower surface of the substrate 10 may also include one or more of circuits, solder balls, pins, etc., for installation and circuit connection of the chip packaging structure 1. FIG2 exemplarily shows solder balls 11 on the lower surface of the substrate 10.
本申请通过导热材料将散热盖连接到芯片和塑封体的上表面,从而使得芯片工作过程中产生的热量可以通过散热盖高效地散发出去,极大地提高封装结构产品的散热效果。进一步地,通过在散热盖上设置镂空结构,有利于释放应力,减轻导热材料烘烤固化或焊接工序中塑封体、芯片和散热盖热应力不匹配的问题,降低翘曲变形及分层等风险,也有利于提高散热效果。The present application connects the heat dissipation cover to the upper surface of the chip and the plastic package body through a thermally conductive material, so that the heat generated during the operation of the chip can be efficiently dissipated through the heat dissipation cover, greatly improving the heat dissipation effect of the package structure product. Furthermore, by setting a hollow structure on the heat dissipation cover, it is conducive to releasing stress, alleviating the problem of thermal stress mismatch between the plastic package body, the chip and the heat dissipation cover during the baking and curing or welding process of the thermal conductive material, reducing the risk of warping deformation and delamination, and also helping to improve the heat dissipation effect.
本申请还提供了一种芯片封装方法100,可用于制作本申请的芯片封装结构1的各个实施例。图7示出了本申请的芯片封装方法100的一个实施例的示意图,图8A-图8H示出了本申请的芯片封装方法100的各步骤的示意图。具体地,方法100包括以下步骤:The present application also provides a chip packaging method 100, which can be used to manufacture various embodiments of the chip packaging structure 1 of the present application. FIG7 shows a schematic diagram of an embodiment of the chip packaging method 100 of the present application, and FIG8A to FIG8H show schematic diagrams of various steps of the chip packaging method 100 of the present application. Specifically, the method 100 includes the following steps:
S10、将芯片安装于基板上并与基板电连接。S10, mounting the chip on the substrate and electrically connecting the chip to the substrate.
比如通过引线键合或倒装等方式安装。图8A示出了采用倒装方式安装的情况,使芯片20的正面朝向基板,使焊料凸点22与基板10上的焊区或引脚(图中未示出)连接。在其他实施例中,芯片采用引线键合方式安装于基板上,背面朝向基板,并通过金属引线实现芯片正面的焊料凸点和基板上的焊盘的电气连接。For example, the chip is mounted by wire bonding or flip-chip mounting. FIG8A shows a case where the chip 20 is mounted by flip-chip mounting, with the front side of the chip 20 facing the substrate, and the solder bumps 22 are connected to the pads or leads (not shown) on the substrate 10. In other embodiments, the chip is mounted on the substrate by wire bonding, with the back side facing the substrate, and the electrical connection between the solder bumps on the front side of the chip and the pads on the substrate is achieved by metal wires.
S30、通过成型工艺在基板上表面形成塑封体,塑封体包封芯片,露出芯片的正面或背面。S30, forming a plastic package on the upper surface of the substrate through a molding process, the plastic package encapsulating the chip to expose the front side or the back side of the chip.
成型工艺具体包括采用模具注塑等方法,如用环氧树脂等材料包裹基板10上方及芯片20周围,形成塑封体30。对于采用倒装方式安装的芯片,如图8B所示,塑封体30包封芯片20周围后,全部或部分露出芯片的背面24。在芯片采用引线键合方式安装于基板的实施例中,塑封体包封芯片的周围后,全部或部分露出芯片的正面。一些实施例中,塑封料在包封完成后,需要经过高温烘烤固化。一些实施例中,可以对塑封体的上表面31进行打磨,增加粗糙度,从而增加后续工序中与导热材料的结合力。The molding process specifically includes methods such as mold injection molding, such as wrapping the substrate 10 and the chip 20 with materials such as epoxy resin to form a plastic package 30. For chips installed in a flip-chip manner, as shown in FIG8B , after the plastic package 30 encapsulates the chip 20, the back side 24 of the chip is fully or partially exposed. In an embodiment in which the chip is installed on the substrate by wire bonding, after the plastic package encapsulates the chip, the front side of the chip is fully or partially exposed. In some embodiments, the plastic package needs to be cured by high-temperature baking after encapsulation. In some embodiments, the upper surface 31 of the plastic package can be polished to increase the roughness, thereby increasing the bonding force with the thermal conductive material in subsequent processes.
S50、通过导热材料将散热盖连接到芯片和塑封体的上表面,且使散热盖覆盖芯片和塑封体的上表面。S50, connecting the heat dissipation cover to the upper surfaces of the chip and the plastic package body through a thermally conductive material, and making the heat dissipation cover the upper surfaces of the chip and the plastic package body.
可以在散热盖40的下表面涂覆导热材料41(如图8C所示),然后连接到塑封体的上表面31和芯片20上。也可以在塑封体的上表面31和芯片20上涂覆导热材料41(如图8D所示),然后连接到散热盖40的下表面。上述两种方式均可以得到图4所示的芯片封装结构1。A heat conductive material 41 can be coated on the lower surface of the heat dissipation cover 40 (as shown in FIG. 8C ), and then connected to the upper surface 31 of the plastic package and the chip 20. A heat conductive material 41 can also be coated on the upper surface 31 of the plastic package and the chip 20 (as shown in FIG. 8D ), and then connected to the lower surface of the heat dissipation cover 40. Both of the above methods can obtain the chip packaging structure 1 shown in FIG. 4 .
导热材料41可以选择环氧树脂体系胶水、有机硅树脂体系胶水等粘结力较强的导热胶,即便涂覆足够的厚度也不易流动。导热材料41的导热率最好能大于塑封体材料的导热率,比如大于3瓦/(米·开尔文)。The thermal conductive material 41 can be selected from epoxy resin system glue, silicone resin system glue and other thermal conductive glues with strong bonding force, which are not easy to flow even if coated with sufficient thickness. The thermal conductivity of the thermal conductive material 41 is preferably greater than the thermal conductivity of the plastic package material, for example, greater than 3 W/(m·Kelvin).
在一些实施例中,散热盖40的下表面与芯片连接的部位设有若干凸起部和/或凹陷部,能够增加表面粗糙度,从而增强与导热材料41的结合力。In some embodiments, a portion of the lower surface of the heat dissipation cover 40 connected to the chip is provided with a plurality of protrusions and/or depressions, which can increase the surface roughness and thus enhance the bonding force with the thermal conductive material 41 .
在一些实施例中,散热盖40具有镂空结构42,镂空结构42的镂空部分填充导热材料41。可以先将导热材料41填充在镂空结构42的镂空部分(参见图8C)再与塑封体的上表面31和芯片20贴合,如果导热材料41采用导热胶,则在散热盖40与塑封体的上表面31和芯片20贴合后,为了固化导热胶,还需要将芯片封装结构1整体进行烘烤,烘烤温度可以选择100~200摄氏度,烘烤时间可以选择1~2小时。也可以先将导热材料41设置在塑封体的上表面31和芯片20上,再与散热盖贴合,导热材料41被挤压填充至镂空结构42的镂空部分(参见图8D),如果导热材料41采用导热胶同样需要增加烘烤固化的工序。上述两种方式均可将散热盖40连接到芯片20和塑封体的上表面31。在步骤S50的一些实施方式中,可以使用具有不同物理性质的导热材料连接散热盖与塑封体的上表面的不同区域。通过该实施方式可以得到图5所示的芯片封装结构1。In some embodiments, the heat dissipation cover 40 has a hollow structure 42, and the hollow part of the hollow structure 42 is filled with a heat conductive material 41. The heat conductive material 41 can be first filled in the hollow part of the hollow structure 42 (see FIG. 8C) and then bonded to the upper surface 31 of the plastic package and the chip 20. If the heat conductive material 41 is a heat conductive adhesive, after the heat dissipation cover 40 is bonded to the upper surface 31 of the plastic package and the chip 20, in order to cure the heat conductive adhesive, the chip packaging structure 1 needs to be baked as a whole. The baking temperature can be selected from 100 to 200 degrees Celsius, and the baking time can be selected from 1 to 2 hours. The heat conductive material 41 can also be first arranged on the upper surface 31 of the plastic package and the chip 20, and then bonded to the heat dissipation cover. The heat conductive material 41 is squeezed and filled into the hollow part of the hollow structure 42 (see FIG. 8D). If the heat conductive material 41 is a heat conductive adhesive, a baking and curing process also needs to be added. Both of the above methods can connect the heat dissipation cover 40 to the chip 20 and the upper surface 31 of the plastic package. In some implementations of step S50, thermally conductive materials with different physical properties may be used to connect the heat dissipation cover to different regions of the upper surface of the plastic package. The chip packaging structure 1 shown in FIG5 may be obtained through this implementation.
在该实施方式中,使用第一导热材料411粘接散热盖40与芯片20和塑封体的上表面的第一区域311,使用第二导热材料412粘接散热盖40与塑封体的上表面的第二区域312。其中,第二导热材料412的粘结力高于第一导热材料411,第一导热材料411的导热性高于第二导热材料412。In this embodiment, the first thermal conductive material 411 is used to bond the heat dissipation cover 40 to the chip 20 and the first area 311 on the upper surface of the plastic package, and the second thermal conductive material 412 is used to bond the heat dissipation cover 40 to the second area 312 on the upper surface of the plastic package. The second thermal conductive material 412 has a higher bonding force than the first thermal conductive material 411, and the first thermal conductive material 411 has a higher thermal conductivity than the second thermal conductive material 412.
类似的,可以先将第二导热材料412覆盖塑封体的上表面的第二区域312对应的散热盖的下表面的部位,并将第一导热材料411填充在镂空结构42的镂空部分并覆盖散热盖的下表面的其他部位(参见图8E),再与塑封体的上表面和芯片20贴合,如果导热材料中包括导热胶,还需要烘烤固化的工序。也可以先将第二导热材料412设置在塑封体的上表面的第二区域312,并将第一导热材料411设置在塑封体的上表面的第一区域311及芯片20上(参见图8F),再与散热盖贴合,第一导热材料411被挤压填充至镂空结构42的镂空部分,如果导热材料中包括导热胶,还需要烘烤固化的工序。上述两种方式均可以得到图5所示的芯片封装结构1。Similarly, the second thermally conductive material 412 can first cover the portion of the lower surface of the heat dissipation cover corresponding to the second area 312 of the upper surface of the plastic package, and the first thermally conductive material 411 can be filled in the hollow part of the hollow structure 42 and cover other portions of the lower surface of the heat dissipation cover (see FIG. 8E ), and then bonded to the upper surface of the plastic package and the chip 20. If the thermally conductive material includes thermally conductive glue, a baking and curing process is required. Alternatively, the second thermally conductive material 412 can be first arranged in the second area 312 of the upper surface of the plastic package, and the first thermally conductive material 411 can be arranged in the first area 311 of the upper surface of the plastic package and the chip 20 (see FIG. 8F ), and then bonded to the heat dissipation cover. The first thermally conductive material 411 is squeezed and filled into the hollow part of the hollow structure 42. If the thermally conductive material includes thermally conductive glue, a baking and curing process is required. Both of the above methods can obtain the chip packaging structure 1 shown in FIG. 5 .
在一些实施例中,第二区域312位于第一区域311外侧,这样可以获得更加稳定的粘结效果。在一些实施例中,第二区域312全部或部分地环绕第一区域311,且第二区域312位于塑封体的上表面的边缘(如图8F所示)。In some embodiments, the second region 312 is located outside the first region 311, so that a more stable bonding effect can be obtained. In some embodiments, the second region 312 surrounds the first region 311 in whole or in part, and the second region 312 is located at the edge of the upper surface of the plastic package (as shown in FIG. 8F ).
进一步地,在步骤S50的一些实施方式中,可以使用不同的导热材料和不同的连接方式连接散热盖与芯片和塑封体的上表面。通过该实施方式可以得到图6所示的芯片封装结构1。Furthermore, in some implementations of step S50, different heat-conducting materials and different connection methods may be used to connect the heat dissipation cover to the upper surface of the chip and the plastic package. The chip packaging structure 1 shown in FIG6 may be obtained through this implementation.
在该实施方式中,导热材料包括第三导热材料和第四导热材料,第三导热材料413选用高导热的金属,比如铟片等,第四导热材料414选用环氧树脂体系胶水、有机硅树脂体系胶水等导热胶。芯片通过倒装方式安装于基板上并与基板电连接,使用第三导热材料413焊接散热盖40与芯片的背面24,使用第四导热材料414粘接散热盖40与塑封体的上表面31。In this embodiment, the thermal conductive material includes a third thermal conductive material and a fourth thermal conductive material. The third thermal conductive material 413 is made of a metal with high thermal conductivity, such as an indium sheet, and the fourth thermal conductive material 414 is made of a thermal conductive adhesive such as an epoxy resin system glue or a silicone resin system glue. The chip is mounted on the substrate in a flip-chip manner and is electrically connected to the substrate. The third thermal conductive material 413 is used to weld the heat dissipation cover 40 to the back side 24 of the chip, and the fourth thermal conductive material 414 is used to bond the heat dissipation cover 40 to the upper surface 31 of the plastic package.
类似的,可以将第三导热材料413先行焊接到散热盖40下表面对应于芯片的背面24的位置,并将第四导热材料414填充在镂空结构42的镂空部分并覆盖散热盖40下表面的其他部位(参见图8G),再与芯片的背面24和塑封体的上表面31贴合,然后将第三导热材料413与芯片的背面24焊接,焊接方式可以为回流焊。回流焊的最高温度根据金属导热材料的熔点确定,一般在100~300摄氏度之间。因回流焊的高温环境可以一并固化第四导热材料414,故无需单独进行导热胶烘烤固化的工序。也可以先将第三导热材料413设置在芯片的背面24,在第三导热材料413两面均布置焊料(无需先行焊接),并将第四导热材料414设置在塑封体的上表面31(参见图8H),再与散热盖40贴合,第四导热材料414被挤压填充至镂空结构42的镂空部分后,再对第三导热材料413加热,同时焊接到散热盖40和芯片的背面24。上述两种方式均可以得到图6所示的芯片封装结构1。但后一种方式只需要进行一次焊接,工艺更为简单。Similarly, the third thermally conductive material 413 can be first welded to the position of the lower surface of the heat dissipation cover 40 corresponding to the back side 24 of the chip, and the fourth thermally conductive material 414 can be filled in the hollow part of the hollow structure 42 and cover other parts of the lower surface of the heat dissipation cover 40 (see Figure 8G), and then fit with the back side 24 of the chip and the upper surface 31 of the plastic package, and then the third thermally conductive material 413 can be welded to the back side 24 of the chip, and the welding method can be reflow soldering. The maximum temperature of reflow soldering is determined according to the melting point of the metal thermally conductive material, generally between 100 and 300 degrees Celsius. Because the high temperature environment of reflow soldering can cure the fourth thermally conductive material 414 at the same time, there is no need to perform a separate process of baking and curing the thermal conductive adhesive. Alternatively, the third thermally conductive material 413 may be first disposed on the back side 24 of the chip, solder may be arranged on both sides of the third thermally conductive material 413 (without prior soldering), and the fourth thermally conductive material 414 may be disposed on the upper surface 31 of the plastic package (see FIG. 8H ), and then fitted with the heat dissipation cover 40, and after the fourth thermally conductive material 414 is squeezed and filled into the hollow part of the hollow structure 42, the third thermally conductive material 413 may be heated and soldered to the heat dissipation cover 40 and the back side 24 of the chip at the same time. The above two methods can obtain the chip packaging structure 1 shown in FIG. 6 . However, the latter method only requires one soldering, and the process is simpler.
在一些实施例中,为了保护焊料凸点22与基板10的连接,避免焊料凸点22在后续工序中破裂或氧化而导致芯片20与基板10之间接触不良,在步骤S30之前,方法100还包括步骤S20,使用绝缘材料60,例如底部填充胶,填充芯片20与基板10之间的缝隙。图9示出了步骤S20的示意图。In some embodiments, in order to protect the connection between the solder bump 22 and the substrate 10 and prevent the solder bump 22 from being broken or oxidized in subsequent processes, thereby causing poor contact between the chip 20 and the substrate 10, before step S30, the method 100 further includes step S20, using an insulating material 60, such as bottom filler, to fill the gap between the chip 20 and the substrate 10. FIG9 shows a schematic diagram of step S20.
在一些实施例中,在步骤S50之前,方法100还可以包括步骤S40,以及在步骤S50之后,方法100还包括步骤S60。步骤S40中,在散热盖40上表面贴覆耐高温膜50,如图10所示。步骤S60中,去除散热盖40上表面贴覆的耐高温膜50。通过在散热盖40上表面贴膜,可以避免后续工序在镂空部分42填充的导热材料从散热盖40的上表面溢出。需要指出的是,耐高温膜50应能够耐受S50步骤中烘烤或回流焊等工序的高温环境,根据具体工艺一般至少需要耐受200摄氏度或300摄氏度以上的温度,以避免在高温环境中融化或破损。In some embodiments, before step S50, the method 100 may further include step S40, and after step S50, the method 100 may further include step S60. In step S40, a high temperature resistant film 50 is applied to the upper surface of the heat dissipation cover 40, as shown in FIG10 . In step S60, the high temperature resistant film 50 applied to the upper surface of the heat dissipation cover 40 is removed. By applying a film on the upper surface of the heat dissipation cover 40, it is possible to prevent the heat conductive material filled in the hollow part 42 in the subsequent process from overflowing from the upper surface of the heat dissipation cover 40. It should be pointed out that the high temperature resistant film 50 should be able to withstand the high temperature environment of the baking or reflow soldering process in step S50. According to the specific process, it is generally necessary to withstand a temperature of at least 200 degrees Celsius or 300 degrees Celsius to avoid melting or damage in a high temperature environment.
本申请的芯片封装结构及封装方法,减少塑封体包封芯片的范围,并使用导热率高于塑封体的导热材料将散热盖连接到芯片和塑封体的上表面上,并通过导热材料的选择与组合,充分发挥各种导热材料的优势,提高芯片和塑封体的散热效果,能够满足更高的芯片散热要求。The chip packaging structure and packaging method of the present application reduce the range of the chip encapsulated by the plastic package, and use a thermally conductive material with a higher thermal conductivity than the plastic package to connect the heat dissipation cover to the upper surface of the chip and the plastic package. By selecting and combining thermally conductive materials, the advantages of various thermally conductive materials are fully utilized to improve the heat dissipation effect of the chip and the plastic package, and can meet higher chip heat dissipation requirements.
本申请还通过在散热盖上设置镂空结构,减少了温度变化过程中因为散热盖材料的热膨胀系数和塑封体材料的热膨胀系数不同而引发的翘曲变形及分层等问题。The present application also reduces problems such as warping, deformation and delamination caused by the difference in thermal expansion coefficient between the heat dissipation cover material and the plastic package body material during temperature changes by arranging a hollow structure on the heat dissipation cover.
另外,本申请虽然以FCCSP封装结构为例对芯片封装结构1和封装方法100进行说明,但是,本领域技术人员可以理解,本申请的芯片封装结构和封装方法可以适用于采用塑封体包封芯片的其他类型的芯片封装,比如方形扁平无引脚倒装(Quad Flat No-leadFlip Chip,简称为QFNFC)封装、引线键合方式的栅格阵列(Land Grid Array,简称为LGA)封装、方型扁平式封装(Quad Flat Package)等。In addition, although the present application uses the FCCSP packaging structure as an example to illustrate the chip packaging structure 1 and the packaging method 100, those skilled in the art can understand that the chip packaging structure and packaging method of the present application can be applicable to other types of chip packaging that use a plastic package to encapsulate the chip, such as a quad flat no-lead flip chip (Quad Flat No-lead Flip Chip, referred to as QFNFC) packaging, a land grid array (LGA) packaging with a wire bonding method, a quad flat package (Quad Flat Package), etc.
本技术领域的一般技术人员可以通过阅读说明书、公开的内容及附图和所附的权利要求书,理解和实施对披露的实施方式的其他改变,包括将其结构与方法适用于其他封装类型中。在权利要求中,措辞“包括”不排除其他的元素和步骤,并且措辞“一”、“一个”不排除复数。在本申请的实际应用中,一个零件可能执行权利要求中所引用的多个技术特征的功能。权利要求中的任何附图标记不应理解为对范围的限制。A person skilled in the art can understand and implement other changes to the disclosed embodiments, including adapting the structures and methods to other packaging types, by reading the specification, the disclosed contents, the drawings and the attached claims. In the claims, the wording "comprising" does not exclude other elements and steps, and the words "a" and "an" do not exclude the plural. In the actual application of this application, a part may perform the functions of multiple technical features cited in the claims. Any figure marks in the claims should not be construed as limiting the scope.
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