CN118768305A - An isolated cleaning device for metal ceramic tube shell - Google Patents

Abstract

The invention discloses an isolated cleaning device for a metal ceramic tube shell, which comprises one or more than one single-layer cleaning mechanism, wherein the single-layer cleaning mechanism comprises cleaning plates and isolated cleaning bins, the two adjacent cleaning plates are spliced up and down and are assembled and fixed, the isolated cleaning bins are distributed on the cleaning plates in an array structure, the inner wall surfaces of the isolated cleaning bins are uniformly coated with protective coatings, and the inner wall surfaces of the isolated cleaning bins are also provided with through holes. According to the invention, the isolation cleaning bins are mutually independent and integrally formed with the cleaning plate, the plurality of tube shells are separated by the isolation cleaning bins, so that damage during cleaning is avoided, meanwhile, through holes communicated with the cleaning plate and the adjacent isolation cleaning bins are formed in the inner walls of the isolation cleaning bins, the circulation of cleaning liquid, air and pollutants between the through holes is accelerated, the cleanliness and cleaning efficiency of the tube shells are improved, and protective coatings are coated on the inner walls of the isolation cleaning bins, so that the metal layers on the surfaces of the tube shells are prevented from being scratched.

Description

An isolated cleaning device for metal ceramic tube shell

Technical Field

The invention relates to the technical field of semiconductor integrated circuit packaging, in particular to an isolated cleaning device for a metal ceramic tube shell.

Background Art

The package shell is a key component in the chip packaging process. Its role is to protect, seal, dissipate heat and insulate the chip inside. As the market's requirements for circuit packaging quality and diversity continue to increase, the exploration of chip packaging shell materials and packaging methods has also emerged in an endless stream. At present, the main chip packaging methods are metal ceramic packaging and plastic packaging.

The metal ceramic package shell is a packaging material used for integration, miniaturization, and high reliability, and it plays an irreplaceable role in many fields. The chip packaging process has very high requirements for the cleanliness of the environment and packaging materials. In order to avoid the pollutants generated by the metal ceramic shell during the production and transportation process affecting the packaging quality, it is particularly important to avoid the introduction of foreign pollutants and efficiently remove pollutants from the shell before packaging. In addition, the surface of the metal ceramic shell generally needs to deposit the stable precious metal Au on the shell surface to establish a barrier layer to prevent oxidation and provide a good welding interface between the bonding wire and the chip. However, Au is relatively soft in texture. Whether the Au layer of the shell is scratched before packaging directly affects the subsequent packaging effect and is one of the key factors for the success or failure of chip packaging. For example, scratches on the shell will not only affect the overall appearance of the circuit, but also affect the airtightness of the packaged circuit.

In the prior art, there are two main ways to clean the metal ceramic shell:

1. Plasma cleaning: This method has the following disadvantages: high cost, strong ability to remove oxides, and weak ability to remove foreign pollutants;

2. Ultrasonic cleaning: This method has the following disadvantages: the vibration generated during ultrasonic cleaning causes the metal ceramic shells to collide with each other, which can easily cause secondary scratches on the shells.

Summary of the invention

The present invention provides an isolation type cleaning device for a metal ceramic tube shell which has a simple and practical structure, is flexible and convenient to operate, and effectively protects the tube shell, and can solve at least one of the above technical problems.

In order to solve the above technical problems, the present invention adopts the following technical solutions: an isolated cleaning device for a metal ceramic tube shell, comprising one or more single-layer cleaning mechanisms, wherein the single-layer cleaning mechanisms include a cleaning plate and an isolated cleaning chamber, and two adjacent cleaning plates are plugged in and assembled and fixed up and down. There are multiple isolated cleaning chambers, which are evenly distributed on the cleaning plates in an array structure. The inner wall surface of the isolated cleaning chamber is evenly coated with a protective coating for preventing collision and scratches. The inner wall surface of the isolated cleaning chamber is also provided with through holes for circulating cleaning liquid, air and pollutants.

Furthermore, the single-layer cleaning mechanism also includes positioning pins and positioning shafts. There are multiple positioning pins, which are respectively fixed at the four corners of the top surface of the cleaning plate. There are multiple positioning shafts, which are respectively fixed at the same vertical position of the four corners of the bottom surface corresponding to the cleaning plate. A limiting hole is opened inside the positioning shaft, and the positioning pin can be plugged and matched with the limiting hole.

Furthermore, two upper and lower adjacent cleaning plates are plugged and fixed via the positioning shaft and the positioning pin, and the distance between the two upper and lower adjacent cleaning plates is equal to the length of the positioning shaft.

Furthermore, the isolation cleaning chamber is opened on the top surface of the cleaning plate and is an integrated structure with the cleaning plate. Each isolation cleaning chamber is independent of each other, and a second distance is left between two adjacent isolation cleaning chambers.

Furthermore, the plurality of isolated cleaning chambers distributed in an array structure are located in the middle of the top surface of the cleaning plate, and a first spacing is left between the edges of the top surface of the cleaning plate and the isolated cleaning chambers.

Furthermore, there are multiple through holes, which are respectively distributed on the bottom surface and the side surface of the inner wall of the isolation cleaning chamber. The through holes located on the bottom surface of the inner wall of the isolation cleaning chamber are connected to the bottom surface of the cleaning plate, and the through holes located on the side surface of the inner wall of the isolation cleaning chamber are connected to the adjacent isolation cleaning chamber.

Furthermore, the single-layer cleaning mechanism also includes a handle, and the handle has two handles, which are mirror-distributed on both sides of the plate body of the cleaning plate.

Furthermore, each edge of the plate body of the cleaning plate is configured as a first chamfered edge.

Furthermore, each side of the notch of the isolation and cleaning chamber is configured as a second chamfered edge that is recessed inwards.

Furthermore, the protective coating is plated with a high-temperature resistant polyimide material.

The beneficial effects of the present invention are embodied in:

1. In the present invention, two adjacent single-layer cleaning mechanisms are plugged and fixed to each other, and a plurality of independent single-layer cleaning mechanisms are stacked and assembled to form the isolated cleaning device. The number of single-layer cleaning mechanisms is selected according to the number of tube shells to be cleaned.

2. In the present invention, multiple isolation cleaning chambers are centrally distributed on the surface of the cleaning plate in an array structure. Each isolation cleaning chamber has an inner groove structure, is independent of each other, and is integrally formed with the cleaning plate. Each tube shell that needs to be cleaned is stored separately in each isolation cleaning chamber. Multiple tube shells are separated by each isolation cleaning chamber and will not contact each other, thereby avoiding friction, scratches, scuffs, and other damages during the cleaning operation.

3. In the present invention, the inner wall of the isolation cleaning chamber is provided with a plurality of through holes connected to the cleaning plate and the adjacent isolation cleaning chambers. During the cleaning process of the tube shell, the flow of the cleaning liquid, air and pollutants between the through holes is accelerated by combining ultrasonic vibration assistance with immersion in the cleaning liquid, thereby improving the cleanliness of the tube shell and the cleaning efficiency.

4. In the present invention, a protective coating is applied to the inner wall of the isolation cleaning chamber, which can prevent the tube shell from scratching the surface metal layer due to collision with the isolation cleaning chamber during the cleaning operation, and also facilitates baking of the tube shell after cleaning and drying.

BRIEF DESCRIPTION OF THE DRAWINGS

The drawings described herein are used to provide further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute improper limitations on the present application.

FIG. 1 is a schematic diagram of the overall structure of a plurality of single-layer cleaning mechanisms after being assembled according to an embodiment of the present invention.

FIG. 2 is a front structural axonometric view of a single-layer cleaning mechanism according to an embodiment of the present invention.

FIG. 3 is a top view of a single-layer cleaning mechanism according to an embodiment of the present invention.

FIG. 4 is an axonometric view of the back structure of the single-layer cleaning mechanism according to an embodiment of the present invention.

FIG. 5 is an enlarged schematic diagram of A in FIG. 2 according to an embodiment of the present invention.

FIG. 6 is an enlarged schematic diagram of B in FIG. 4 according to an embodiment of the present invention.

The components in the accompanying drawings are marked as follows: 1. Single-layer cleaning mechanism; 2. Cleaning plate; 201. First chamfering edge; 3. Handle; 4. Isolation cleaning chamber; 401. Second chamfering edge; 5. Positioning pin; 6. Positioning shaft; 601. Limiting hole; 7. Through hole; 8. First spacing; 9. Second spacing.

DETAILED DESCRIPTION

The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. In the absence of conflict, the embodiments in this application and the features in the embodiments can be combined with each other. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

It should be noted that if there are directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention, the directional indications are only used to explain the relative positional relationship, movement, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly. In addition, if there are descriptions of "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, "multiple" refers to more than two.

Referring to Figures 1 and 5, an embodiment of the present invention provides an isolated cleaning device for a metal ceramic tube shell, including one or more single-layer cleaning mechanisms 1, wherein the single-layer cleaning mechanism 1 includes a cleaning plate 2 and an isolated cleaning chamber 4, and two adjacent cleaning plates 2 are plugged in and assembled and fixed up and down, and the isolated cleaning chamber 4 has multiple, array-like structures uniformly distributed on the cleaning plate 2, and the inner wall surface of the isolated cleaning chamber 4 is uniformly coated with a protective coating for preventing collision scratches, and the inner wall surface of the isolated cleaning chamber 4 is also provided with a through hole 7 for circulating cleaning liquid, air and pollutants.

In the present invention, two adjacent single-layer cleaning mechanisms are plugged and fixed to each other, and a plurality of independent single-layer cleaning mechanisms are stacked and assembled to form the isolated cleaning device. A plurality of isolated cleaning chambers are centrally distributed on the surface of the cleaning plate in an array structure. Each isolated cleaning chamber is in an inner groove-shaped structure, is independent of each other, and is integrally formed with the cleaning plate. Each tube shell to be cleaned is stored separately in each isolated cleaning chamber. The plurality of tube shells are separated by each isolated cleaning chamber and will not contact each other, thereby avoiding friction, scratches, scuffs, and other damages during the cleaning operation.

At the same time, the inner wall of the isolation cleaning chamber is provided with a plurality of through holes connected to the cleaning plate and the adjacent isolation cleaning chamber. During the cleaning process of the tube shell, the flow of cleaning liquid, air and pollutants between the through holes is accelerated by combining ultrasonic vibration assistance with cleaning liquid immersion, thereby improving the cleanliness and cleaning efficiency of the tube shell. A protective coating is applied to the inner wall of the isolation cleaning chamber to avoid scratching of the surface metal layer of the tube shell due to collision with the isolation cleaning chamber during the cleaning operation, and to facilitate baking of the tube shell after cleaning and drying.

Referring to Figures 5 and 6, in this embodiment, the single-layer cleaning mechanism 1 also includes a positioning pin 5 and a positioning shaft 6. There are multiple positioning pins 5, which are fixed at the four corners of the top surface of the cleaning plate 2 respectively. There are multiple positioning shafts 6, which are fixed at the same vertical position at the four corners of the bottom surface corresponding to the cleaning plate 2 respectively. A limiting hole 601 is provided inside the positioning shaft 6, and the positioning pin 5 can be plugged and matched with the limiting hole 601. With this design, the outer diameter of the positioning pin 5 of the present application is 7mm and the height is 4mm. The outer diameter of the positioning shaft 6 is 10mm and the height is 5mm. The inner diameter of the limiting hole 601 is 7mm, which is convenient for plugging and assembling multiple single-layer cleaning mechanisms 1 with each other, and then stacking and assembling the isolation cleaning device of this application as a whole;

It should be noted that the number of the stacked single-layer cleaning mechanisms 1 is not specifically limited here and can be determined based on the actual needs of the cleaning operation.

Referring to Figures 1, 5 and 6, in this embodiment, the two upper and lower adjacent cleaning plates 2 are plugged and fixed via the positioning shaft 6 and the positioning pin 5, and the spacing between the two upper and lower adjacent cleaning plates 2 is equal to the length of the positioning shaft 6. In this design, the cleaning plate 2 is made of 7050 aluminum alloy material, that is, as the overall frame structure material of the single-layer cleaning mechanism 1. The size of the cleaning plate 2 of the present application is 300×300×15mm ^3. Under the plug-in action of the positioning pin 5 and the positioning shaft 6, multiple single-layer cleaning mechanisms 1 are stacked and assembled one by one along the vertical direction to form the isolated cleaning device of the present application. The device is placed in an ultrasonic cleaning machine filled with cleaning liquid and immersed for cleaning. The spacing between the two upper and lower adjacent single-layer cleaning mechanisms 1 is to allow the cleaning liquid and air to circulate fully during the cleaning process, and to allow pollutants or foreign substances to be washed down smoothly;

It should be noted that the cleaning liquid contained in the ultrasonic cleaning machine can be alcohol cleaning agent or other solvents with bactericidal and disinfecting functions, and no specific limitation is made here.

Referring to Figures 2, 3 and 5, in this embodiment, the isolation cleaning chamber 4 is opened on the top surface of the cleaning plate 2 and is an integral structure with the cleaning plate 2. Each isolation cleaning chamber 4 is independent of each other, and a second spacing 9 is left between two adjacent isolation cleaning chambers 4. With this design, the size of the isolation cleaning chamber 4 of the present application is 15×15×5mm ³ , the thickness of the second spacing 9 is 3mm, each isolation cleaning chamber 4 is directly opened on the surface of the cleaning plate 2 in the shape of an inner groove, and is integrally formed with the cleaning plate 2. Each isolation cleaning chamber 4 stores the tubes and shells that need to be cleaned separately. Since each isolation cleaning chamber 4 is independent of each other, during the cleaning operation, there will be no contact between the tubes and shells, avoiding friction, scratches, scuffs, scrapes and other damages.

Referring to Figures 1-3, in this embodiment, the plurality of isolated cleaning chambers 4 distributed in an array structure are located in the middle of the top surface of the cleaning plate 2, and a first spacing 8 is left between the edges of the top surface of the cleaning plate 2 and the isolated cleaning chamber 4. With such a design, in this application, the plurality of isolated cleaning chambers 4 are distributed in a 14×14 array structure, and the width of the first spacing 8 is 10.5 mm. The first spacing 8 facilitates technicians to directly touch the cleaning plate 2 when carrying the single-layer cleaning mechanism 1, and avoid putting their hands into the isolated cleaning chamber 4 to contaminate the cleaning of the tube shell.

Referring to Fig. 2-4, in this embodiment, there are multiple through holes 7, which are respectively distributed on the bottom surface of the inner wall and the side surface of the inner wall of the isolation cleaning chamber 4. The through holes 7 located on the bottom surface of the inner wall of the isolation cleaning chamber 4 are connected to the bottom surface of the cleaning plate 2, and the through holes 7 located on the side surface of the inner wall of the isolation cleaning chamber 4 are connected to the adjacent isolation cleaning chamber 4. With such a design, the diameter of the through holes 7 of the present application is 2 mm, 1×3 through holes 7 are processed on the side wall of the isolation cleaning chamber 4, and 3×3 through holes 7 are processed on the bottom wall of the isolation cleaning chamber 4. The through holes 7 facilitate the circulation of cleaning liquid and air, and facilitate the volatilization of cleaning solutions such as alcohol in the later stage. At the same time, since the surface heterogeneous contaminants can be removed by combining ultrasonic vibration assistance with alcohol immersion during the shell and tube cleaning process, the fallen heterogeneous contaminants can also flow away from the through holes 7.

1-4, in this embodiment, the single-layer cleaning mechanism 1 further includes a handle 3, and the handle 3 has two handles, which are mirror-imaged and distributed on both sides of the plate body of the cleaning plate 2. In this design, the handle 3 can be grasped during operation to assist in the assembly or disassembly of the single-layer cleaning mechanism 1 of different layers, and the single-layer cleaning mechanism 1 is also convenient for transportation.

6, in this embodiment, each side of the cleaning plate 2 is set as a first chamfered edge 201. In this design, the straight edges and right-angle edges of the cleaning plate 2 are passivated, which can protect technicians from being scratched when carrying, assembling or disassembling the single-layer cleaning mechanism 1, and the design is more reasonable.

Referring to Fig. 5, in this embodiment, each side of the notch of the isolation cleaning chamber 4 is set as a second chamfered edge 401 that is recessed inward. In this design, the straight edges and right angle edges of the mouth of the isolation cleaning chamber 4 are passivated, which can protect technicians from being scratched when taking or storing tube shells, and the design is more reasonable.

Referring to Figures 2 and 5, in this embodiment, the protective coating is made of high-temperature resistant polyimide. In this design, since the isolation cleaning chamber 4 will collide with the tube shell during the cleaning process, the protective coating can avoid scratching the metal layer on the surface of the tube shell, while improving the cleanliness and cleaning efficiency of the tube shell. At the same time, the high-temperature resistant polyimide coating is also applied to facilitate baking of the tube shell after cleaning and drying.

It should be noted that the specific material of the protective coating described in this application can be polyimide material or other materials for the purpose of protecting the surface of the tube shell, which is not limited here.

The above-mentioned dimensional data are not unique and are preferably applicable to the present embodiment, and can be adaptively adjusted according to different embodiments.

In summary, in the present invention, two adjacent single-layer cleaning mechanisms are plugged and fixed to each other, and a plurality of independent single-layer cleaning mechanisms are stacked and assembled to form the isolated cleaning device. A plurality of isolated cleaning chambers are centrally distributed on the surface of the cleaning plate in an array structure. Each isolated cleaning chamber is in an inner groove-shaped structure, is independent of each other, and is integrally formed with the cleaning plate. Each tube shell to be cleaned is stored separately in each isolated cleaning chamber. The plurality of tube shells are separated by each isolated cleaning chamber and will not contact each other, thereby avoiding friction, scratches, scuffs, and other damages during the cleaning operation.

At the same time, the inner wall of the isolation cleaning chamber is provided with a plurality of through holes connected to the cleaning plate and the adjacent isolation cleaning chamber. During the cleaning process of the tube shell, the flow of cleaning liquid, air and pollutants between the through holes is accelerated by combining ultrasonic vibration assistance with cleaning liquid immersion, thereby improving the cleanliness and cleaning efficiency of the tube shell. A protective coating is applied to the inner wall of the isolation cleaning chamber to avoid scratching of the surface metal layer of the tube shell due to collision with the isolation cleaning chamber during the cleaning operation, and to facilitate baking of the tube shell after cleaning and drying.

It should be understood that the examples and implementation modes described herein are for illustrative purposes only and are not intended to limit the present invention. Those skilled in the art may make various modifications or changes based on the examples and implementation modes. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims (10)

1. An isolated cleaning device for a metal ceramic tube shell, characterized in that it comprises one or more single-layer cleaning mechanisms (1), wherein the single-layer cleaning mechanisms (1) comprise cleaning plates (2) and isolated cleaning chambers (4), wherein two adjacent cleaning plates (2) are plugged in and fixedly assembled up and down, and the isolated cleaning chambers (4) are provided with a plurality of isolated cleaning chambers (4) which are evenly distributed on the cleaning plates (2) in an array structure, and the inner wall surface of the isolated cleaning chamber (4) is evenly coated with a protective coating for preventing collision scratches, and the inner wall surface of the isolated cleaning chamber (4) is also provided with through holes (7) for circulating cleaning liquid, air and pollutants. 2. The isolated cleaning device for the metal ceramic tube shell as described in claim 1 is characterized in that the single-layer cleaning mechanism (1) also includes a positioning pin (5) and a positioning shaft (6), the positioning pin (5) has a plurality of them, which are respectively fixed at the four corners of the top surface of the cleaning plate (2), and the positioning shaft (6) has a plurality of them, which are respectively fixed at the same vertical position of the four corners of the bottom surface corresponding to the cleaning plate (2), and a limiting hole (601) is opened inside the positioning shaft (6), and the positioning pin (5) can be plugged and matched with the limiting hole (601). 3. The isolated cleaning device for the metal ceramic tube shell as described in claim 1 is characterized in that the two adjacent cleaning plates (2) are connected and fixed via the positioning shaft (6) and the positioning pin (5), and the spacing between the two adjacent cleaning plates (2) is equal to the length of the positioning shaft (6). 4. The isolated cleaning device for the metal ceramic tube shell as described in claim 1 is characterized in that the isolated cleaning chamber (4) is opened on the top surface of the cleaning plate (2) and is an integrated structure with the cleaning plate (2), each of the isolated cleaning chambers (4) is independent of each other, and a second distance (9) is left between two adjacent isolated cleaning chambers (4). 5. The isolated cleaning device for a metal ceramic tube shell as described in claim 1 is characterized in that the multiple isolated cleaning chambers (4) distributed in an array structure are located in the middle of the top surface of the cleaning plate (2), and a first distance (8) is left between the edges of the top surface of the cleaning plate (2) and the isolated cleaning chambers (4). 6. The isolated cleaning device for the metal ceramic tube shell as described in claim 1 is characterized in that there are multiple through holes (7), which are respectively distributed on the bottom surface and the side surface of the inner wall of the isolated cleaning chamber (4); the through holes (7) located on the bottom surface of the inner wall of the isolated cleaning chamber (4) are connected to the bottom surface of the cleaning plate (2); the through holes (7) located on the side surface of the inner wall of the isolated cleaning chamber (4) are connected to the adjacent isolated cleaning chamber (4). 7. The isolated cleaning device for a metal ceramic tube shell as described in claim 1 is characterized in that the single-layer cleaning mechanism (1) also includes a handle (3), and the handle (3) has two handles, which are mirror-imaged and distributed on both sides of the plate body of the cleaning plate (2). 8. The isolated cleaning device for a metal ceramic tube shell according to claim 1, characterized in that each edge of the cleaning plate (2) is configured as a first chamfered edge (201). 9. The isolated cleaning device for a metal ceramic tube shell according to claim 1, characterized in that each side of the notch of the isolated cleaning chamber (4) is configured as a second chamfered edge (401) recessed inwardly. 10. The isolated cleaning device for the metal ceramic tube shell according to claim 1, characterized in that the protective coating is plated with a high temperature resistant polyimide material.