CN118759349B - Multi-channel power supply board and semiconductor test system - Google Patents
Multi-channel power supply board and semiconductor test system Download PDFInfo
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- CN118759349B CN118759349B CN202411238506.6A CN202411238506A CN118759349B CN 118759349 B CN118759349 B CN 118759349B CN 202411238506 A CN202411238506 A CN 202411238506A CN 118759349 B CN118759349 B CN 118759349B
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Abstract
The application relates to the field of chip testing, in particular to a multichannel power supply board and a semiconductor testing system, wherein the multichannel power supply board comprises a main power supply channel and a plurality of auxiliary power supply channels which are connected in parallel, and the main power supply channel comprises a first loop control unit, a first output unit and a detection unit, and the first loop control unit, the first output unit and a tested device are sequentially connected. Based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to the power supply reference signal and the first power supply signal detected by the detection unit, the main power supply channel adjusts the first power supply signal based on the first control signal and then outputs a second power supply signal to the device to be tested, and each slave power supply channel outputs a third power supply signal to the device to be tested based on the first control signal. According to the application, each slave power supply channel can follow the main power supply channel, so that the output deviation among the power supply channels is ensured to be smaller, and the current flowing backwards among the power supply channels is avoided.
Description
Technical Field
The present application relates to the field of chip testing, and in particular, to a multi-channel power panel card and a semiconductor testing system.
Background
The power strip card, which employs a digital control loop, typically has voltage output FV, voltage measurement MV, current output FI, current measurement MI functions, and combinations thereof. Under some large-current application scenes, the output current of a single power supply channel cannot meet the actual demand, and the parallel connection of multiple power supply channels improves the overall current output capability, so that the method is a very practical technology.
In practical application, the current actually output by each power supply channel in the parallel mode has large deviation, and the current can flow back to each other between the power supply channels when the deviation reaches a certain limit.
Disclosure of Invention
Accordingly, it is desirable to provide a multi-channel power board and a semiconductor test system for solving the above-mentioned problems.
In a first aspect, an embodiment of the present application provides a multi-channel power board, connected to a device under test, including a main power channel and a plurality of sub power channels connected in parallel, where,
The main power supply channel comprises a first loop control unit, a first output unit and a detection unit, wherein the first loop control unit, the first output unit and the device to be detected are sequentially connected, one end of the detection unit is connected with the device to be detected, and the other end of the detection unit is connected with the first loop control unit to form a feedback loop;
Based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to a power reference signal and a first power signal detected by the detection unit and sends the corresponding first control signal to each slave power channel, the master power channel regulates the first power signal based on the first control signal and then outputs a second power signal to the device to be tested, and each slave power channel outputs a third power signal to the device to be tested based on the first control signal.
In some embodiments, the detection unit includes a first voltage detection unit, where when the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is connected to the first loop control unit to form a feedback loop, and when the mode configuration instruction is a constant voltage source mode configuration instruction, the first power signal, the second power signal, and the third power signal are all voltage signals.
In some embodiments, the detection unit includes a first current detection unit, where when the mode configuration instruction is a constant current source mode configuration instruction, the first current detection unit is connected to the first loop control unit to form a feedback loop, and where the mode configuration instruction is a constant current source mode configuration instruction, the first power signal, the second power signal, and the third power signal are all current signals.
In some embodiments, the first loop control unit generates a first control signal based on a difference between the power reference signal and the first power signal, and the first control signal controls the first output unit to output a second power signal, and sequentially performs cyclic feedback adjustment to control the difference between the second power signal received by the first loop control unit and the power reference signal to be 0.
In some embodiments, the detection unit includes a first current detection unit and a first voltage detection unit, where the first current detection unit is connected to each of the slave power channels, and after the second power signal is stably output, the first loop control unit stops sending the first control signal to each of the slave power channels, controls the first current detection unit to detect the first current signal output by the master power channel, sends the first current signal to each of the slave power channels, and obtains a stable current value after feedback output from the slave power channels.
In some embodiments, when the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is used for being connected with the device to be tested and the first loop control unit to form a feedback loop, one end of the first current detection unit is connected with the device to be tested, and the other end of the first current detection unit is connected with each slave power supply channel;
When the mode configuration instruction is a constant current source mode configuration instruction, the first voltage detection unit does not work, the first end of the first current detection unit is connected with the tested device, the second end of the first current detection unit is connected with the first loop control unit to form a feedback loop, and the third end of the first current detection unit is connected with each slave power supply channel.
In some embodiments, each slave power supply channel includes a second loop control unit, a second output unit, and a second current detection unit, where the second loop control unit, the second output unit, and the device under test are sequentially connected, and the second current detection unit, the device under test, and the second loop control unit are connected to form a feedback loop;
the first current detection units are respectively connected with the second loop control units of the slave power supply channels, and the first loop control units are respectively connected with the second output units of the slave power supply channels.
In some embodiments, the second loop control unit of each slave power supply channel generates a first current control signal based on the first current signal and a second current signal detected by a second current detection unit, adjusts the second current signal, and then outputs a third current signal, and sequentially circularly feedback-adjusts the third current signal so as to be equal to the first current signal.
In some embodiments, the second power signal reaches a stable output when the second power signal reaches a set threshold, or reaches a stable output when the amplitude of vibration of the second power signal is less than an amplitude threshold.
In some embodiments, the master power channel and each of the slave power channels receive the same clock signal, and synchronously output a power signal to the device under test based on the same clock signal.
In a second aspect, an embodiment of the present application provides a semiconductor test system, including an upper computer and a test head communicatively connected to the upper computer, where the test head includes a multichannel power board as described in the first aspect.
Compared with the prior art, the method has the advantages that based on the mode configuration instruction, the first loop control unit generates the corresponding first control signal according to the power reference signal and the first power signal detected by the detection unit and sends the first control signal to each slave power channel, the master power channel regulates the first power signal based on the first control signal and then outputs the second power signal to the device to be tested, and each slave power channel outputs the third power signal to the device to be tested based on the first control signal. Each slave power supply channel can follow the main power supply channel, so that the output deviation between the power supply channels is ensured to be smaller, and the possibility of mutual backflow current between the power supply channels is avoided.
Drawings
FIG. 1 is a schematic diagram of a multi-channel power panel according to an embodiment of the present application;
fig. 2 is a schematic connection diagram of a multi-channel power board in a constant voltage power mode according to an embodiment of the application;
fig. 3 is a schematic connection diagram of a multi-channel power board in a constant current source mode according to an embodiment of the application.
Detailed Description
The present application will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
It is apparent that the drawings in the following description are only some examples or embodiments of the present application, and it is possible for those of ordinary skill in the art to apply the present application to other similar situations according to these drawings without inventive effort. Moreover, it should be appreciated that while such a development effort might be complex and lengthy, it would nevertheless be a routine undertaking of design, fabrication, or manufacture for those of ordinary skill having the benefit of this disclosure, and thus should not be construed as having the benefit of this disclosure.
Reference in the specification to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in various embodiments of the application. The appearances of such phrases in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is to be expressly and implicitly understood by those of ordinary skill in the art that the described embodiments of the application can be combined with other embodiments without conflict.
Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs. The terms "a," "an," "the," and similar referents in the context of the application are not to be construed as limiting the quantity, but rather as singular or plural. The terms "comprises," "comprising," "includes," "including," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or modules (elements) is not limited to only those steps or elements but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus. The terms "connected," "coupled," and the like in connection with the present application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The term "plurality" as used herein means two or more. "and/or" describes the association relationship of the association object, and indicates that three relationships may exist, for example, "a and/or B" may indicate that a exists alone, a and B exist simultaneously, and B exists alone. The character "/" generally indicates that the context-dependent object is an "or" relationship. The terms "first," "second," "third," and the like, as used herein, are merely distinguishing between similar objects and not representing a particular ordering of objects.
As shown in fig. 1, an embodiment of the present application proposes a multi-channel power board, which is connected to a DUT and includes a main power channel and a plurality of sub power channels connected in parallel. The main power supply channel comprises a first loop control unit, a first output unit and a detection unit, wherein the first loop control unit, the first output unit and the detected device are sequentially connected, one end of the detection unit is connected with the detected device, the other end of the detection unit is connected with the first loop control unit to form a feedback loop, and the first loop control unit is connected with a plurality of auxiliary power supply channels.
Based on the mode configuration instruction, the first loop control unit generates a corresponding first control signal according to the power reference signal and the first power signal detected by the detection unit and sends the corresponding first control signal to each slave power channel, the master power channel regulates the first power signal based on the first control signal and then outputs a second power signal to the device to be tested, and each slave power channel outputs a third power signal to the device to be tested based on the first control signal.
Specifically, the first loop control unit generates a first control signal based on a difference value between the reference signal and the first power supply signal, and the first control signal controls the first output unit to output a second power supply signal, and the first control signal is sequentially subjected to cyclic feedback adjustment and is used for controlling the difference between the second power supply signal received by the first loop control unit and the power supply reference signal to be 0.
Each slave power supply channel does not generate a control signal, but directly generates a third power supply signal according to the first control signal acquired from the master power supply channel, and outputs the third power supply signal to the device under test. Since the master power supply channel and the slave power supply channel both generate the power supply signal based on the first control signal, the difference between the power supply signals outputted therefrom is small.
The mode configuration instruction may be a constant voltage source mode configuration instruction or a constant current source mode configuration instruction. The mode configuration instruction can be sent to the multi-channel power panel card by the upper computer. When the mode configuration instruction is a constant voltage source mode configuration instruction, the multi-channel power supply board enters a constant voltage source mode, and when the mode configuration instruction is a constant current source mode configuration instruction, the multi-channel power supply board enters a constant current source mode.
Specifically, when the mode configuration instruction is a constant voltage source mode configuration instruction, the first power supply signal, the second power supply signal and the third power supply signal are all voltage signals. At this time, the main power supply channel realizes stable output of voltage signals, each slave power supply channel can follow the voltage signals of the main power supply channel, the output voltage signal deviation between each power supply channel is ensured to be smaller, and the possibility of mutual backflow current between each power supply channel is avoided.
When the mode configuration instruction is a constant current source mode configuration instruction, the first power supply signal, the second power supply signal and the third power supply signal are all current signals. At this time, the main power supply channel realizes the stable output of the current signal, and each slave power supply channel can follow the voltage signal of the main power supply channel, so that the output voltage signal deviation between the power supply channels is ensured to be smaller, and the possibility of mutually backward current flowing between the power supply channels is avoided.
In some embodiments, the master power channel and each slave power channel receive the same clock signal, and output the power signal to the device under test based on the same clock signal, thereby ensuring the synchronism of the output signals.
In the above embodiment, based on the mode configuration instruction, the first loop control unit generates the corresponding first control signal according to the power reference signal and the first power signal detected by the detection unit, and sends the first control signal to each slave power channel, the master power channel adjusts the first power signal based on the first control signal and then outputs the second power signal to the device under test, and each slave power channel outputs the third power signal to the device under test based on the first control signal. Each slave power supply channel is connected with the main power supply channel in parallel, and each slave power supply channel is based on a first control signal sent by the main power supply channel, so that each slave power supply channel can follow the main power supply channel, the output voltage deviation between each power supply channel is ensured to be smaller, and the possibility of mutual backflow current between each power supply channel is avoided.
In the above embodiment, the slave power channels can synchronously output the power signals along with the master power channel, but there is a slight difference between the output current signals of the power channels due to the difference of hardware parameters, and the difference of hardware parameters can cause worse influence along with the increase of the number of parallel power channels.
In a further embodiment, after the second power supply signal is stably output, the master power supply channel stops sending the first control signal to each slave power supply channel, and the control detection unit detects the first current signal output by the master power supply channel, sends the first current signal to each slave power supply channel, and obtains a stable current value after the feedback output of the slave power supply channel.
Specifically, the first current signal stably output by the main power supply channel is used as a reference signal from the power supply channel, a corresponding first current control signal is generated according to the second current signal at the output end of the power supply channel, a third current signal is output after the second current signal is regulated, and the third current signal is sequentially and circularly fed back and regulated so as to be equal to the first current signal, so that the first current signal output by the main power supply channel can be ensured to follow in real time, the consistency is maintained, the power supply channels are ensured to output constant current signals, and the high-precision current signal control is realized.
In some embodiments, the second power signal reaches a stable output when the second power signal reaches a set threshold.
The multi-channel power board is in a constant voltage source mode, the power reference signal Vref is assumed to be 10V, the threshold value is set to be 9.8V, the primary power channel outputs a first control signal to the secondary power channel in an initial stage of voltage establishment when the second power signal is in the range of 0V-9.8V, rapid control of output voltage signals is achieved, the second power signal achieves stable output in a subsequent stage of voltage establishment when the second power signal is in the range of 9.8V-10V, the first control signal is stopped from being sent to each secondary power channel, and the first current detection unit is controlled to detect the first current signal output by the primary power channel to each secondary power channel, so that high-precision control of output current signals is achieved.
When the multichannel power supply board is in the constant current source mode, the current signal threshold can be set according to the same principle, and the description is omitted here.
In some embodiments, the second power signal reaches a stable output when the amplitude of the vibration of the second power signal is less than an amplitude threshold.
The multi-channel power board is in a constant voltage source mode, and the voltage amplitude threshold is 200mV, when the second power signal is greater than 200mV, the main power channel outputs a first control signal to the auxiliary power channels to realize the rapid control of the output voltage signal, when the second power signal is 0mV-200mV, the second power signal reaches stable output, the first control signal is stopped from being sent to each auxiliary power channel, and the first current detection unit is controlled to detect the first current signal output by the main power channel to each auxiliary power channel to realize the high-precision control of the output current signal.
When the multichannel power supply board is in the constant current source mode, the current amplitude threshold can be set according to the same principle, and the description is omitted here.
The structure of each power supply channel can be the same, one of the power supply channels can be selected as a main power supply channel in logic at will, and the rest of the power supply channels are used as auxiliary power supply channels.
Specifically, the main power supply channel comprises a first loop control unit, a first output unit and a detection unit, and the detection unit comprises a first voltage detection unit and a first current detection unit. The first loop control unit and the first output unit are sequentially connected with the tested device, and when the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is configured to be connected with the tested device and the first loop control unit to form a feedback loop, and meanwhile the first current detection unit and the first loop control unit are configured to be respectively connected with each slave power supply channel. Specifically, one end of the first current detection unit is connected with the device to be detected, and the other end of the first current detection unit is connected with each slave power supply channel. When the mode configuration instruction is a constant current source mode configuration instruction, the first current detection unit is configured to be connected with the device to be tested and the first loop control unit to form a feedback loop, meanwhile, the first current detection unit and the first loop control unit are configured to be respectively connected with each slave power supply channel, the first voltage detection unit can be out of operation at the moment, specifically, the first voltage detection unit is out of operation, the first end of the first current detection unit is connected with the device to be tested, the second end of the first current detection unit is connected with the first loop control unit to form a feedback loop, and the third end of the first current detection unit is connected with each slave power supply channel.
Each secondary power supply channel comprises a second loop control unit, a second output unit and a second current detection unit, the second loop control unit, the second output unit and the tested device are sequentially connected, the second current detection unit is connected with the tested device and the second loop control unit to form a feedback loop, the first current detection unit of the main power supply channel is connected with the second loop control unit of each secondary power supply channel, the first loop control unit of the main power supply channel is connected with the second output unit of each secondary power supply channel, and the second voltage detection unit of the secondary power supply channel does not work.
Of course, it is known to those skilled in the art that the main power supply channel may be designed differently from each of the slave power supply channels, that is, the main power supply channel includes a first loop control unit, a first output unit, and a detection unit, and the detection unit includes a first voltage detection unit and a first current detection unit. The first loop control unit and the first output unit are sequentially connected with the tested device, when the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is configured to be connected with the tested device and the first loop control unit to form a feedback loop, and meanwhile the first current detection unit and the first loop control unit are configured to be respectively connected with all the slave power channels, specifically, one end of the first current detection unit is connected with the tested device, and the other end of the first current detection unit is connected with all the slave power channels. When the mode configuration instruction is a constant current source mode configuration instruction, the first current detection unit is configured to be connected with the device to be tested and the first loop control unit to form a feedback loop, and meanwhile the first current detection unit and the first loop control unit are configured to be respectively connected with each slave power supply channel, the first voltage detection unit can not work at the moment, specifically, the first end of the first current detection unit is connected with the device to be tested, the second end of the first current detection unit is connected with the first loop control unit to form a feedback loop, and the third end of the first current detection unit is connected with each slave power supply channel.
The secondary power supply channel comprises a second loop control unit, a second output unit and a second current detection unit, the second loop control unit, the second output unit and the tested device are sequentially connected, the second current detection unit is connected with the tested device and the second loop control unit to form a feedback loop, the first current detection unit is connected with the second loop control unit of each secondary power supply channel, and the first loop control unit is connected with the second output unit.
Fig. 2 is a schematic connection diagram of a multi-channel power board in a constant voltage power mode according to an embodiment of the application.
The main power supply channel comprises a first loop control unit, a first output unit and a detection unit, wherein the detection unit comprises a first voltage detection unit and a first current detection unit, the first loop control unit, the first output unit and the device to be detected are sequentially connected, and the first voltage detection unit is connected with the device to be detected and the first loop control unit to form a feedback loop.
The first output unit includes, for example, a first digital-to-analog converter DAC1 and a first differential signal amplifier A1 connected in order.
The secondary power supply channel comprises a second loop control unit, a second output unit and a second current detection unit, wherein the second loop control unit, the second output unit and the device to be tested are sequentially connected, and the second current detection unit is connected with the device to be tested and the second loop control unit to form a feedback loop.
The second output unit comprises, for example, a second digital-to-analog converter DAC2, a second differential signal amplifier A2, which are connected in sequence.
The first loop control unit is also connected with the second output unit of each slave power supply channel and is used for transmitting a first control signal. The first current detection unit is also connected with the second loop control unit of each slave power supply channel and is used for sending a first current signal.
The following describes in detail the signal control process when the multi-channel power board is in the constant voltage source mode according to fig. 2.
In fig. 2, the power supply channel CH1 serves as a master power supply channel, and the other power supply channels (CH 2.) serve as slave power supply channels. The first loop control unit outputs a first power supply signal (voltage signal Vout) to the device under test DUT via the first digital-to-analog converter DAC1 and the first differential signal amplifier A1 based on the power supply reference signal Vref. The first voltage detecting unit detects a first power supply signal obtained from the output ends (two ends of the device to be detected) and sends the first power supply signal to the first loop control unit as a voltage feedback signal Vfb. The first loop control unit generates a corresponding first control signal according to the difference value between the power supply reference signal Vref and the voltage feedback signal Vfb, and sends the corresponding first control signal to the second output unit of each slave power supply channel. The first control signal controls the output signal of the first digital-to-analog converter DAC1, then the second power signal is output through the first differential signal amplifier A1, the first voltage detection unit detects the second power signal and inputs the second power signal into the first loop control unit so as to form feedback regulation again, and the feedback regulation is circulated in sequence, so that the main power channel can realize constant voltage output according to the power reference signal Vref.
The second output unit outputs a third power supply signal to the DUT based on the first control signal, and the slave power supply channels can follow the main power supply channel to output a voltage signal, so that the output voltage deviation among the power supply channels is ensured to be smaller, and the possibility of mutual backflow of current among the power supply channels is avoided.
After the voltage signal is stably output, the first loop control unit stops sending the first control signal to each slave power channel, the main power channel outputs a stable second power signal to the tested device, meanwhile, the first loop control unit controls the first current detection unit to detect the first current signal output by the main power channel and send the first current signal to the second loop control unit in each slave power channel, the second loop control unit takes the first current signal as a reference signal Iref, then generates a corresponding first current control signal according to the second current signal detected by the second current detection unit as a feedback signal, the first current control signal controls the output signal of the second digital-to-analog converter DAC2 to output a third current signal through the second differential signal amplifier A2, and the third current signal is sequentially circularly feedback-regulated so as to be equal to the first current signal, so that the current signal output by the main power channel can be ensured to follow the current signal output by the power channel in real time, the consistency is maintained, the constant current signal with equal current values output by the power channels is ensured, and high-precision current signal control is realized.
Fig. 3 is a schematic connection diagram of a multi-channel power board in a constant current source mode according to an embodiment of the application.
The main power supply channel comprises a first loop control unit, a first output unit and a first current detection unit, wherein the first loop control unit, the first output unit and the device to be tested are sequentially connected, and the first current detection unit is connected with the device to be tested and the first loop control unit to form a feedback loop. The first loop control unit is also connected with the second output unit of each slave power supply channel and is used for transmitting a first control signal.
The secondary power supply channel comprises a second loop control unit, a second output unit and a second current detection unit, wherein the second loop control unit, the second output unit and the device to be tested are sequentially connected, and the second current detection unit is connected with the device to be tested and the second loop control unit to form a feedback loop. The second loop control unit is also connected with the first current detection unit of the main power supply channel and is used for generating a corresponding first current control signal based on the stable first current signal and a second current signal obtained by detecting the output end of the first current signal.
The following describes in detail the signal control process when the multi-channel power board is in the constant current source mode according to fig. 3.
In fig. 3, the power supply channel CH1 is used as a master power supply channel, and the other power supply channels (CH 2..chn) are used as slave power supply channels. The first loop control unit outputs a first power supply signal Iout to the device under test DUT through the first digital-to-analog converter DAC1, the first differential signal amplifier A1 based on the power supply reference signal Iref. The first current detection unit detects a first power supply signal Iout obtained from an output end of the first current detection unit and sends the first power supply signal Iout to the first loop control unit as a current feedback signal Ifb. The first loop control unit generates a corresponding first control signal according to the difference value between the power supply reference signal Iref and the current feedback signal Ifb, and sends the corresponding first control signal to the second output unit of each slave power supply channel. The first output unit outputs a second power supply signal after adjusting the first power supply signal Iout based on the first control signal, namely, after the first control signal controls the output signal of the first digital-to-analog converter DAC1 to pass through the first differential signal amplifier A1, the first current detection unit detects the second power supply signal and inputs the second power supply signal into the first loop control unit, further feedback adjustment is formed, feedback adjustment is sequentially circulated, and therefore the main power supply channel can realize constant current output according to the power supply reference signal Iref. The second output unit outputs a third power supply signal to the DUT based on the first control signal, and the slave power supply channels can output voltage signals along with the main power supply channels based on the first control signal, so that the output voltage deviation among the power supply channels is ensured to be smaller, and the possibility of mutual backflow of current among the power supply channels is avoided. The power reference signal Iref, the first power signal Iout, the second power signal, and the third power signal are all current signals.
After the current signals are stably output, the first loop control unit stops sending first control signals to each slave power channel, the main power channel outputs stable second power signals to the tested device, meanwhile, the first loop control unit controls the first current detection unit to detect the first current signals output by the main power channel and send the first current signals to the second loop control unit in each slave power channel, the second loop control unit takes the first current signals as reference signals Iref, and generates corresponding first current control signals according to the second current signals at the output end of the second loop control unit as feedback signals, the first current control signals control the output signals of the second digital-to-analog converter DAC2 to output third current signals through the second differential signal amplifier A2, and the third current signals are sequentially circularly feedback-regulated to enable the third current signals to be equal to the first current signals, so that the current signals output by the main power channel can be guaranteed to follow the current signals output by the power channel in real time, consistency is maintained, the constant current signals with equal current values output by the power channels are guaranteed, and high-precision current signal control is achieved.
The embodiment of the application provides a semiconductor test system, which comprises an upper computer and a test head in communication connection with the upper computer, wherein the test head comprises the multichannel power panel card in the embodiment.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The foregoing examples illustrate only a few embodiments of the application, which are described in detail and are not to be construed as limiting the scope of the application. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the application, which are all within the scope of the application. Accordingly, the scope of protection of the present application is to be determined by the appended claims.
Claims (10)
1. A multi-channel power board card is connected with a device to be tested and is characterized by comprising a main power channel and a plurality of auxiliary power channels which are connected in parallel,
The main power supply channel comprises a first loop control unit, a first output unit and a detection unit, wherein the first loop control unit, the first output unit and the device to be detected are sequentially connected, one end of the detection unit is connected with the device to be detected, and the other end of the detection unit is connected with the first loop control unit to form a feedback loop;
Based on a mode configuration instruction, the first loop control unit generates a corresponding first control signal according to a power supply reference signal and the first power supply signal detected by the detection unit, and sends the corresponding first control signal to each slave power supply channel; the main power supply channel adjusts the first power supply signal based on the first control signal and then outputs a second power supply signal to the tested device;
The detection unit comprises a first current detection unit and a first voltage detection unit, wherein the first current detection unit is connected with each slave power supply channel, after the second power supply signal is stably output, the first loop control unit stops sending a first control signal to each slave power supply channel, controls the first current detection unit to detect the first current signal output by the main power supply channel, sends the first current signal to each slave power supply channel, and obtains a stable current value after the second power supply signal is fed back and output from the slave power supply channel.
2. The multi-channel power supply board according to claim 1, wherein when the mode configuration command is a constant voltage source mode configuration command, the first voltage detection unit is connected with the first loop control unit to form a feedback loop, and when the mode configuration command is a constant voltage source mode configuration command, the first power supply signal, the second power supply signal and the third power supply signal are all voltage signals.
3. The multi-channel power supply board according to claim 1, wherein when the mode configuration instruction is a constant current source mode configuration instruction, the first current detection unit is connected with the first loop control unit to form a feedback loop, and when the mode configuration instruction is a constant current source mode configuration instruction, the first power supply signal, the second power supply signal and the third power supply signal are all current signals.
4. The multi-channel power board of claim 1, wherein the first loop control unit generates a first control signal based on a difference between the power reference signal and the first power signal, the first control signal controls the first output unit to output a second power signal, and the first control signal is sequentially subjected to cyclic feedback adjustment to control the difference between the second power signal received by the first loop control unit and the power reference signal to be 0.
5. The multi-channel power strip card of claim 1 wherein,
When the mode configuration instruction is a constant voltage source mode configuration instruction, the first voltage detection unit is used for being connected with the tested device and the first loop control unit to form a feedback loop, one end of the first current detection unit is connected with the tested device, and the other end of the first current detection unit is connected with each slave power supply channel;
When the mode configuration instruction is a constant current source mode configuration instruction, the first voltage detection unit does not work, the first end of the first current detection unit is connected with the tested device, the second end of the first current detection unit is connected with the first loop control unit to form a feedback loop, and the third end of the first current detection unit is connected with each slave power supply channel.
6. The multi-channel power supply board according to claim 1, wherein each slave power supply channel comprises a second loop control unit, a second output unit and a second current detection unit, the second loop control unit, the second output unit and the device under test are sequentially connected, and the second current detection unit is connected with the device under test and the second loop control unit to form a feedback loop;
the first current detection units are respectively connected with the second loop control units of the slave power supply channels, and the first loop control units are respectively connected with the second output units of the slave power supply channels.
7. The multi-channel power board according to claim 6, wherein the second loop control unit of each slave power channel generates a first current control signal based on the first current signal and a second current signal detected by a second current detection unit, adjusts the second current signal, and outputs a third current signal, and sequentially performs feedback adjustment in a cyclic manner so that the third current signal is equal to the first current signal.
8. The multi-channel power strip card of claim 1, wherein the second power signal reaches a stable output when the second power signal reaches a set threshold, or wherein the second power signal reaches a stable output when the amplitude of vibration of the second power signal is less than an amplitude threshold.
9. The multi-channel power strip card of any one of claims 1 to 8, wherein the master power channel and each of the slave power channels receive the same clock signal, and output power signals to the device under test synchronously based on the same clock signal.
10. A semiconductor test system comprising a host computer and a test head in communication with the host computer, wherein the test head comprises the multi-channel power board card according to any one of claims 1 to 9.
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| CN109155590A (en) * | 2016-06-23 | 2019-01-04 | 株式会社达谊恒 | Power-supply system, power supply device, control method and control program |
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| CN209963757U (en) * | 2019-04-25 | 2020-01-17 | 康普技术有限责任公司 | Current-sharing control circuit and power supply system |
| CN112162583A (en) * | 2020-10-12 | 2021-01-01 | 北京计算机技术及应用研究所 | Current-sharing control circuit supporting overcurrent starting |
| CN215498706U (en) * | 2021-06-04 | 2022-01-11 | 深圳市鼎阳科技股份有限公司 | Power supply control system |
| CN219960389U (en) * | 2023-05-23 | 2023-11-03 | 合肥酷特安科技有限公司 | Power supply control circuit and power supply circuit |
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| CN109155590A (en) * | 2016-06-23 | 2019-01-04 | 株式会社达谊恒 | Power-supply system, power supply device, control method and control program |
| CN107591792A (en) * | 2017-10-16 | 2018-01-16 | 四川英杰电气股份有限公司 | A kind of current sharing control method and device |
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