CN118731908A - An optical device for measuring solid motion velocity based on laser Doppler effect - Google Patents
An optical device for measuring solid motion velocity based on laser Doppler effect Download PDFInfo
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Abstract
本发明属于激光测量技术领域,涉及对固体运动速度的测量装置,具体提供一种基于激光多普勒效应的固体运动速度测量光学装置,用以解决现有激光多普勒测速仪存在的窄线宽可见光激光器价格昂贵及光路结构复杂等问题。本发明提出新的光路结构,利用窄线宽的非可见光激光二极管作为光源,宽线宽的可见光激光二极管作为指示光源,实现对于运动固体表面的多普勒频率探测,并根据多普勒频率解算出固体运动的速度(转速)及长度;其中,窄线宽的非可见光激光二极管通用性强、成本低,而宽线宽的可见光激光二极管成本更是低廉,从而显著降低了测速仪系统成本,并且,本发明提供的固体运动速度测量光学装置结构简单、调适方便。
The present invention belongs to the field of laser measurement technology, and relates to a device for measuring the speed of solid motion. Specifically, it provides an optical device for measuring the speed of solid motion based on the laser Doppler effect, which is used to solve the problems of the high price of narrow-linewidth visible light lasers and the complex optical path structure in existing laser Doppler velocimeters. The present invention proposes a new optical path structure, using a narrow-linewidth non-visible light laser diode as a light source and a wide-linewidth visible light laser diode as an indicator light source to achieve Doppler frequency detection of the moving solid surface, and calculate the speed (rotation speed) and length of the solid motion according to the Doppler frequency; wherein the narrow-linewidth non-visible light laser diode has strong versatility and low cost, and the wide-linewidth visible light laser diode has even lower cost, thereby significantly reducing the cost of the velocimeter system, and the solid motion speed measurement optical device provided by the present invention has a simple structure and is easy to adjust.
Description
技术领域Technical Field
本发明属于激光测量技术领域,涉及对固体运动速度的测量装置,具体提供一种基于激光多普勒效应的固体运动速度测量光学装置。The invention belongs to the technical field of laser measurement, relates to a device for measuring solid motion speed, and specifically provides an optical device for measuring solid motion speed based on the laser Doppler effect.
背景技术Background Art
随着现代工业技术的发展,对于系统自动化的要求也在不断提高,在工业生产中,不仅对于自动化机器的工作稳定性有高要求,对其测量精度的要求也日益提高;如工业生产线上对于金属板材的长度测量、无纺布的速度测量、线材、线缆的速度和长度测量等等,都需要高精度的仪器进行监控和实时测量。而对于传统的测量方法,在高温、高速等复杂情况的工业生产线上无法满足高精度的测量要求,而基于激光多普勒效应的测速仪正好弥补了这一缺点,对于激光多普勒测速仪,具有精度高、无接触测量、测量范围大等优点,广泛运用于工业生产等领域。然而,大多数的激光多普勒测速仪采用窄线宽(<1MHz)可见光激光器作为光源,但由于国际因素,此类激光器价格昂贵(2~4万元)且难以购买,导致测速仪的成本较高,严重限制了激光多普勒测速仪的推广应用。With the development of modern industrial technology, the requirements for system automation are also increasing. In industrial production, not only are there high requirements for the working stability of automated machines, but also for their measurement accuracy. For example, the length measurement of metal sheets, the speed measurement of non-woven fabrics, the speed and length measurement of wires and cables on industrial production lines all require high-precision instruments for monitoring and real-time measurement. Traditional measurement methods cannot meet the high-precision measurement requirements on industrial production lines with complex conditions such as high temperature and high speed. The laser Doppler effect-based velocimeter just makes up for this shortcoming. The laser Doppler velocimeter has the advantages of high accuracy, non-contact measurement, and a large measurement range, and is widely used in industrial production and other fields. However, most laser Doppler velocimeters use narrow linewidth (<1MHz) visible light lasers as light sources, but due to international factors, such lasers are expensive (20,000 to 40,000 yuan) and difficult to purchase, resulting in a high cost of velocimeters, which seriously limits the promotion and application of laser Doppler velocimeters.
发明内容Summary of the invention
本发明的目的在于提供一种基于激光多普勒效应的固体运动速度测量光学装置,用以解决现有激光多普勒测速仪存在的窄线宽可见光激光器价格昂贵及光路结构复杂等问题。本发明提出新的光路结构,利用窄线宽的非可见光激光二极管作为光源,宽线宽的可见光激光二极管作为指示光源,实现对于运动固体表面的多普勒频率探测,并根据多普勒频率解算出固体运动的速度(转速)及长度;其中,窄线宽的非可见光激光二极管通用性强、成本低,而宽线宽的可见光激光二极管成本更是低廉,从而显著降低了测速仪系统成本,并且,本发明中固体运动速度测量光学装置结构简单、调适方便。The purpose of the present invention is to provide an optical device for measuring the velocity of solid motion based on the laser Doppler effect, so as to solve the problems of the existing laser Doppler velocimeter, such as the high price of the narrow line width visible light laser and the complex optical path structure. The present invention proposes a new optical path structure, using a narrow line width non-visible light laser diode as a light source and a wide line width visible light laser diode as an indicator light source, to achieve Doppler frequency detection of the moving solid surface, and to calculate the velocity (rotation speed) and length of the solid motion according to the Doppler frequency; wherein the narrow line width non-visible light laser diode has strong versatility and low cost, and the wide line width visible light laser diode has even lower cost, thereby significantly reducing the cost of the velocimeter system, and the solid motion velocity measurement optical device in the present invention has a simple structure and is easy to adjust.
为实现上述目的,本发明采用的技术方案为:To achieve the above object, the technical solution adopted by the present invention is:
一种基于激光多普勒效应的固体运动速度测量光学装置,包括:窄线宽非可见光激光二极管1、宽线宽可见光激光二极管2、非球面镜3、分光棱镜4、分光镜5、收集透镜6、光电探测器7;其特征在于:An optical device for measuring solid motion velocity based on the laser Doppler effect, comprising: a narrow line width non-visible light laser diode 1, a wide line width visible light laser diode 2, an aspherical mirror 3, a beam splitter prism 4, a beam splitter 5, a collecting lens 6, and a photodetector 7; the characteristics are:
非球面镜3的数量为两个,分别设置于窄线宽非可见光激光二极管1与宽线宽宽线宽可见光激光二极管2的前端;There are two aspherical mirrors 3, which are respectively arranged at the front ends of the narrow linewidth invisible light laser diode 1 and the wide linewidth visible light laser diode 2;
窄线宽非可见光激光二极管1发出激光经过非球面镜3进行准直后由分光棱镜4分为两束,一束光透过分光棱镜4照射到被测物体8表面,另一束光经分光棱镜4反射后入射到分光镜5上、再由分光镜5反射到被测物体8表面,两束光在被测物体8表面汇聚并进行干涉;相干光在被测物体8表面的散射光经收集透镜6收集汇聚到光电探测器7中;The laser emitted by the narrow line width non-visible light laser diode 1 is collimated by the aspheric mirror 3 and then divided into two beams by the beam splitter prism 4. One beam of light is irradiated to the surface of the object 8 to be measured through the beam splitter prism 4, and the other beam of light is reflected by the beam splitter prism 4 and then incident on the beam splitter 5, and then reflected by the beam splitter 5 to the surface of the object 8 to be measured. The two beams of light converge and interfere on the surface of the object 8 to be measured; the scattered light of the coherent light on the surface of the object 8 to be measured is collected by the collecting lens 6 and converged to the photoelectric detector 7;
宽线宽可见光激光二极管2设置于窄线宽非可见光激光二极管1以分光棱镜4为基准的90度方位上;The wide line width visible light laser diode 2 is arranged at a 90 degree position relative to the narrow line width invisible light laser diode 1 with the beam splitter prism 4 as a reference;
宽线宽可见光激光二极管2发出激光经过非球面镜3进行准直后由分光棱镜4分为两束,一束光透过分光棱镜4入射到分光镜5上、再由分光镜5反射到被测物体8表面,另一束光经分光棱镜4反射后照射到被测物体8表面,两束光同样在被测物体8表面汇聚,且与窄线宽非可见光激光二极管1发出激光在被测物体8表面所成的光点重合。The laser emitted by the wide-linewidth visible light laser diode 2 is collimated by the aspheric mirror 3 and then divided into two beams by the beam splitter prism 4. One beam of light is incident on the beam splitter 5 through the beam splitter prism 4 and then reflected by the beam splitter 5 to the surface of the object to be measured 8. The other beam of light is reflected by the beam splitter prism 4 and irradiated to the surface of the object to be measured 8. The two beams of light also converge on the surface of the object to be measured 8 and overlap with the light spot formed by the laser emitted by the narrow-linewidth invisible light laser diode 1 on the surface of the object to be measured 8.
进一步的,所述窄线宽非可见光激光二极管1采用1550nm的DFB激光二极管。Furthermore, the narrow linewidth non-visible light laser diode 1 adopts a 1550nm DFB laser diode.
进一步的,所述宽线宽可见光激光二极管2采用685nm的F-P激光二极管。Furthermore, the wide-linewidth visible light laser diode 2 adopts a 685nm F-P laser diode.
进一步的,所述分光棱镜4采用1200nm~1600nm的非偏振分光棱镜,分光比为50:50。Furthermore, the beam splitter prism 4 is a non-polarized beam splitter prism with a wavelength of 1200 nm to 1600 nm, and the beam splitting ratio is 50:50.
进一步的,所述分光镜5采用1550nm的偏振分光片。Furthermore, the beam splitter 5 uses a 1550nm polarization beam splitter.
进一步的,所述收集透镜6采用焦距50mm、直径20mm的平凸透镜,其平面朝向被测物体8、凸面朝向光电探测器7。Furthermore, the collecting lens 6 is a plano-convex lens with a focal length of 50 mm and a diameter of 20 mm, with its flat surface facing the object to be measured 8 and its convex surface facing the photodetector 7 .
从工作原理上讲:In terms of working principle:
本发明提供一种基于激光多普勒效应的固体运动速度测量光学装置,创造性的提出一种新光路结构,利用窄线宽非可见光激光二极管1作为光源,通过光外差技术可以完成对于运动固体的多普勒频率的探测,进而根据多普勒频率解算得到固体运动速度及长度;采用成本低廉(2~5千元)且广泛使用的窄线宽非可见光激光二极管代替价格昂贵(2~4万元)且难以购买的窄线宽(<1MHz)可见光激光器,能够显著降低激光多普勒测速仪的系统成本;而针对非可见光光源的不可观察的问题,本发明利用成本更加低廉(数百元)的宽线宽可见光激光二极管2作为指示光源,在窄线宽非可见光激光二极管1以分光棱镜为基准的90度方位上设置指示光源,巧妙的运用分光棱镜4与分光镜5构成的光路,使得光源与指示光源在被测物体8表面的汇聚光点一定是重合的,因此,则可通过指示光源在被测物体8表面汇聚光点指示非可见光源,即确定被测物体8的放置方位。The present invention provides an optical device for measuring the motion speed of a solid based on the laser Doppler effect. A new optical path structure is creatively proposed. A narrow line width non-visible light laser diode 1 is used as a light source. The Doppler frequency of a moving solid can be detected through optical heterodyne technology, and then the motion speed and length of the solid can be obtained according to the Doppler frequency. The low-cost (2,000 to 5,000 yuan) and widely used narrow line width non-visible light laser diode is used to replace the expensive (20,000 to 40,000 yuan) and difficult to purchase narrow line width (<1MHz) visible light laser, which can significantly reduce the laser Doppler measurement cost. The system cost of the speed meter is reduced; and in order to solve the problem that the non-visible light source cannot be observed, the present invention uses a wide-linewidth visible light laser diode 2 with a lower cost (hundreds of yuan) as an indicator light source, and sets an indicator light source at a 90-degree position based on the dichroic prism on the narrow-linewidth non-visible light laser diode 1. The optical path formed by the dichroic prism 4 and the dichroic mirror 5 is cleverly used, so that the convergent light points of the light source and the indicator light source on the surface of the measured object 8 must coincide. Therefore, the non-visible light source can be indicated by the convergent light points of the indicator light source on the surface of the measured object 8, that is, the placement orientation of the measured object 8 is determined.
综上,本发明的有益效果在于:In summary, the beneficial effects of the present invention are:
本发明提供一种基于激光多普勒效应的固体运动速度测量光学装置,创造性的提出一种新光路结构,利用窄线宽非可见光激光二极管1作为光源,利用宽线宽可见光激光二极管2作为指示光源,通过光外差技术可以完成对于运动固体的多普勒频率的探测,进而根据多普勒频率解算得到固体运动速度及长度;通过成本低廉且广泛使用的窄线宽非可见光激光二极管与宽线宽可见光激光二极管代替价格昂贵且难以购买的窄线宽可见光激光器,能够显著降低激光多普勒测速仪的系统成本,并且,具有结构简单、调节便利等优点。The present invention provides an optical device for measuring the motion speed of a solid based on the laser Doppler effect. A new optical path structure is creatively proposed. A narrow linewidth non-visible light laser diode 1 is used as a light source, and a wide linewidth visible light laser diode 2 is used as an indicator light source. The Doppler frequency of a moving solid can be detected by optical heterodyne technology, and then the motion speed and length of the solid can be obtained according to the Doppler frequency. By replacing an expensive and difficult to purchase narrow linewidth visible light laser with a low-cost and widely used narrow linewidth non-visible light laser diode and a wide linewidth visible light laser diode, the system cost of the laser Doppler velocimeter can be significantly reduced. In addition, the laser Doppler velocimeter has the advantages of simple structure, convenient adjustment, and the like.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为本发明提供的基于激光多普勒效应的固体运动速度测量光学装置的原理示意图。FIG1 is a schematic diagram showing the principle of an optical device for measuring solid motion velocity based on the laser Doppler effect provided by the present invention.
图2为本发明提供的基于激光多普勒效应的固体运动速度测量光学装置的结构示意图。FIG. 2 is a schematic diagram of the structure of an optical device for measuring solid motion velocity based on the laser Doppler effect provided by the present invention.
具体实施方式DETAILED DESCRIPTION
为使本发明的目的、技术方案与有益效果更加清楚明白,下面结合附图和实施例对本发明做进一步详细说明。In order to make the purpose, technical solution and beneficial effects of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.
实施例1Example 1
本实施例提供一种基于激光多普勒效应的固体运动速度测量光学装置,其原理如图1所示,具体包括:窄线宽非可见光激光二极管1、宽线宽可见光激光二极管2、非球面镜3、分光棱镜4、分光镜5、收集透镜6、光电探测器7;其中,This embodiment provides an optical device for measuring the velocity of solid motion based on the laser Doppler effect, the principle of which is shown in FIG1 , and specifically comprises: a narrow line width non-visible light laser diode 1, a wide line width visible light laser diode 2, an aspherical mirror 3, a beam splitter prism 4, a beam splitter 5, a collecting lens 6, and a photodetector 7; wherein,
非球面镜3的数量为两个,分别设置于窄线宽非可见光激光二极管1与宽线宽宽线宽可见光激光二极管2的前端;There are two aspherical mirrors 3, which are respectively arranged at the front ends of the narrow linewidth invisible light laser diode 1 and the wide linewidth visible light laser diode 2;
窄线宽非可见光激光二极管1发出激光经过非球面镜3进行准直后由分光棱镜4分为两束,一束光透过分光棱镜4照射到被测物体8表面,另一束光经分光棱镜4反射后入射到分光镜5上、再由分光镜5反射到被测物体8表面,两束光在被测物体8表面汇聚并进行干涉;相干光在被测物体8表面的散射光经收集透镜6收集汇聚到光电探测器7中;The laser emitted by the narrow line width non-visible light laser diode 1 is collimated by the aspheric mirror 3 and then divided into two beams by the beam splitter prism 4. One beam of light is irradiated to the surface of the object 8 to be measured through the beam splitter prism 4, and the other beam of light is reflected by the beam splitter prism 4 and then incident on the beam splitter 5, and then reflected by the beam splitter 5 to the surface of the object 8 to be measured. The two beams of light converge and interfere on the surface of the object 8 to be measured; the scattered light of the coherent light on the surface of the object 8 to be measured is collected by the collecting lens 6 and converged to the photoelectric detector 7;
宽线宽可见光激光二极管2设置于窄线宽非可见光激光二极管1以分光棱镜4为基准的90度方位上;The wide line width visible light laser diode 2 is arranged at a 90 degree position relative to the narrow line width invisible light laser diode 1 with the beam splitter prism 4 as a reference;
宽线宽可见光激光二极管2发出激光经过非球面镜3进行准直后由分光棱镜4分为两束,一束光透过分光棱镜4入射到分光镜5上、再由分光镜5反射到被测物体8表面,另一束光经分光棱镜4反射后照射到被测物体8表面,两束光同样在被测物体8表面汇聚,且与窄线宽非可见光激光二极管1发出激光在被测物体8表面所成的光点重合,用以指示非可见光,便于系统调试。The laser emitted by the wide-linewidth visible light laser diode 2 is collimated by the aspheric mirror 3 and then divided into two beams by the beam splitter prism 4. One beam of light is incident on the beam splitter 5 through the beam splitter prism 4 and then reflected by the beam splitter 5 to the surface of the object to be measured 8. The other beam of light is reflected by the beam splitter prism 4 and irradiates the surface of the object to be measured 8. The two beams of light also converge on the surface of the object to be measured 8 and overlap with the light spot formed by the laser emitted by the narrow-linewidth invisible light laser diode 1 on the surface of the object to be measured 8, so as to indicate the invisible light and facilitate system debugging.
具体而言,本实施例中,所述窄线宽非可见光激光二极管1采用1550nm的DFB激光二极管,所述宽线宽可见光激光二极管2采用685nm的F-P激光二极管;所述分光棱镜4采用1200nm~1600nm的非偏振分光棱镜,分光比为50:50;所述分光镜5采用1550nm的偏振分光片;所述收集透镜6采用焦距50mm、直径20mm的平凸透镜,其平面朝向被测物体8、凸面朝向光电探测器7;通过选择适用波长在1550nm附近的分光棱镜4与分光镜5,可以使得收集透镜6几乎只能接收1550nm的光,消除了685nm的指示光对系统的影响。在此基础上,本实施例中基于激光多普勒效应的固体运动速度测量光学装置的实物如图2所示,1550nm的DFB激光二极管与685nm的F-P激光二极管分别安装于预设的激光二极管夹持件上,并于夹持件下分别设置温控模块9,用以保证激光二极管长时间工作;非球面镜、非偏振分光棱镜、平凸透镜、偏振分光片也分别固定在对应的安装件上,同时,非球面镜下分别设置滑轨,方便进行激光的准直工作,当激光正常工作时移动非球面镜,非球面镜后光斑与被测物体8表面的光斑大小基本一致时完成激光的准直工作;并且,平凸透镜垂直于相干光在被测物体8表面的散射光设置,以提高散射光的利用率。Specifically, in this embodiment, the narrow-linewidth non-visible light laser diode 1 adopts a 1550nm DFB laser diode, and the wide-linewidth visible light laser diode 2 adopts a 685nm F-P laser diode; the beam splitter prism 4 adopts a 1200nm-1600nm non-polarizing beam splitter prism with a splitting ratio of 50:50; the beam splitter 5 adopts a 1550nm polarizing beam splitter; the collecting lens 6 adopts a plano-convex lens with a focal length of 50mm and a diameter of 20mm, with its flat surface facing the object to be measured 8 and its convex surface facing the photodetector 7; by selecting the beam splitter prism 4 and the beam splitter 5 with a suitable wavelength near 1550nm, the collecting lens 6 can almost only receive 1550nm light, eliminating the influence of the 685nm indicator light on the system. On this basis, the actual object of the solid motion velocity measurement optical device based on the laser Doppler effect in this embodiment is shown in Figure 2. The 1550nm DFB laser diode and the 685nm F-P laser diode are respectively installed on the preset laser diode clamps, and temperature control modules 9 are respectively arranged under the clamps to ensure that the laser diodes work for a long time; the aspheric mirror, non-polarizing beam splitter prism, plano-convex lens, and polarizing beam splitter are also respectively fixed on the corresponding mounting parts. At the same time, slide rails are respectively arranged under the aspheric mirror to facilitate the laser collimation work. When the laser is working normally, the aspheric mirror is moved. When the spot size behind the aspheric mirror is basically consistent with the spot size on the surface of the object 8 to be measured, the laser collimation work is completed; and the plano-convex lens is arranged perpendicular to the scattered light of the coherent light on the surface of the object 8 to be measured to improve the utilization rate of the scattered light.
进一步的,所述非偏振分光棱镜中心到偏振分光片中心的直线距离为35mm,所述非偏振分光棱镜中心到被测物体8的表面(两束激光在被测物体8表面汇聚处)的直线距离为400mm,由此,可计算得到到达被测物体8表面的两束激光的夹角θ,即:则θ≈5°;Furthermore, the straight-line distance from the center of the non-polarizing beam splitter prism to the center of the polarizing beam splitter is 35 mm, and the straight-line distance from the center of the non-polarizing beam splitter prism to the surface of the object 8 to be measured (where the two laser beams converge on the surface of the object 8 to be measured) is 400 mm. Thus, the angle θ of the two laser beams reaching the surface of the object 8 to be measured can be calculated, that is: Then θ≈5°;
基于上述光学装置,通过光外差技术可以完成对于运动固体的多普勒频率的探测,通过光电探测器输出的电流信号经过后续信号处理系统的A/D转换、频率提取等操作,获取多普勒频率fD,再根据多普勒频率与速度的关系式解算出运动物体速度,所述关系式具体为:Based on the above optical device, the Doppler frequency of moving solids can be detected by optical heterodyne technology. The current signal output by the photodetector is converted by A/D and frequency extracted by the subsequent signal processing system to obtain the Doppler frequency f D . Then, the speed of the moving object is calculated according to the relationship between the Doppler frequency and the speed. The relationship is specifically:
其中,v为被测物体的运动速度,fD为多普勒频率,λ为窄线宽非可见光激光二极管的激光波长,θ为两束光汇聚在被测物体表面的夹角;Wherein, v is the velocity of the object being measured, fD is the Doppler frequency, λ is the laser wavelength of the narrow linewidth non-visible light laser diode, and θ is the angle between the two beams of light converging on the surface of the object being measured;
再对速度进行积分则可以得到被测物体在一定时间内运动的长度,在t0内对速度进行积分得到其长度的解算公式为:By integrating the velocity, we can get the length of the measured object moving in a certain period of time. The solution formula for integrating the velocity within t0 to get its length is:
综上,本发明提供一种基于激光多普勒效应的固体运动速度测量光学装置,通过光外差技术可以完成对于运动固体的多普勒频率的探测,从而测量得到固体运动速度与长度。In summary, the present invention provides an optical device for measuring solid motion speed based on the laser Doppler effect, which can detect the Doppler frequency of a moving solid through optical heterodyne technology, thereby measuring the solid motion speed and length.
以上所述,仅为本发明的具体实施方式,本说明书中所公开的任一特征,除非特别叙述,均可被其他等效或具有类似目的的替代特征加以替换;所公开的所有特征、或所有方法或过程中的步骤,除了互相排斥的特征和/或步骤以外,均可以任何方式组合。The above description is only a specific implementation mode of the present invention. Any feature disclosed in this specification, unless otherwise stated, can be replaced by other alternative features that are equivalent or have similar purposes; all the disclosed features, or all the steps in the methods or processes, except for mutually exclusive features and/or steps, can be combined in any way.
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