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CN118730330A - High-sensitivity temperature sensor based on liquid metal filling and its injection packaging process - Google Patents

High-sensitivity temperature sensor based on liquid metal filling and its injection packaging process Download PDF

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CN118730330A
CN118730330A CN202410721362.3A CN202410721362A CN118730330A CN 118730330 A CN118730330 A CN 118730330A CN 202410721362 A CN202410721362 A CN 202410721362A CN 118730330 A CN118730330 A CN 118730330A
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optical fiber
hollow
hollow optical
core optical
indium gallium
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杨欣宇
李晓飏
马一巍
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Harbin Engineering University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/32Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres

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Abstract

本发明属于温度传感器技术领域,具体涉及基于液态金属填充的高灵敏度温度传感器及其注入封装工艺,该传感器包括单模光纤、第一空心光纤以及第二空心光纤;单模光纤一端与所述第一空心光纤一端连接,第一空心光纤另一端与第二空心光纤内壁之间填充有铟镓锡合金;单模光纤的直径为10μm;单模光纤的外径为125μm,第一空心光纤的内径为20μm,第一空心光纤的外径为125μm;第二空心光纤的内径为135μm,第二空心光纤的外径为200μm;单模光纤一端、第一空心光纤以及铟镓锡合金均位于第二空心光纤一端内部,铟镓锡合金远离第一空心光纤的一侧与第二空心光纤内壁之间填充有UV固化胶。本发明应用于复杂环境中的温度测量,具有超高的灵敏度、小尺寸和高分辨率的优点。

The present invention belongs to the technical field of temperature sensors, and specifically relates to a high-sensitivity temperature sensor based on liquid metal filling and its injection packaging process, the sensor comprises a single-mode optical fiber, a first hollow-core optical fiber and a second hollow-core optical fiber; one end of the single-mode optical fiber is connected to one end of the first hollow-core optical fiber, and the other end of the first hollow-core optical fiber and the inner wall of the second hollow-core optical fiber are filled with an indium gallium tin alloy; the diameter of the single-mode optical fiber is 10 μm; the outer diameter of the single-mode optical fiber is 125 μm, the inner diameter of the first hollow-core optical fiber is 20 μm, and the outer diameter of the first hollow-core optical fiber is 125 μm; the inner diameter of the second hollow-core optical fiber is 135 μm, and the outer diameter of the second hollow-core optical fiber is 200 μm; one end of the single-mode optical fiber, the first hollow-core optical fiber and the indium gallium tin alloy are all located inside one end of the second hollow-core optical fiber, and the side of the indium gallium tin alloy away from the first hollow-core optical fiber and the inner wall of the second hollow-core optical fiber are filled with UV curing glue. The present invention is applied to temperature measurement in complex environments, and has the advantages of ultra-high sensitivity, small size and high resolution.

Description

基于液态金属填充的高灵敏度温度传感器及其注入封装工艺High-sensitivity temperature sensor based on liquid metal filling and its injection packaging process

技术领域Technical Field

本发明属于温度传感器技术领域,具体涉及基于液态金属填充的高灵敏度温度传感器及其注入封装工艺。The invention belongs to the technical field of temperature sensors, and in particular relates to a high-sensitivity temperature sensor based on liquid metal filling and an injection packaging process thereof.

背景技术Background Art

温度变化的精准在制造、食品加工、制药等领域发挥着至关重要的作用;目前传统的温度测量方法通常涉及使用热电偶、电阻温度检测器或红外辐射温度测量;然而,在热处理过程中避不开,如电磁辐射、化学腐蚀等,对于微波荡漾的影响。因此,在许多情况下,由于抗电磁干扰、结构紧凑、成本低、灵敏度高等优点,使用光纤传感器作为温度参数的测量成为最佳的选择。光纤温度传感器根据传感原理可以分为:光纤布拉格光栅(FBG)式、长周期光纤光栅(LPFG)式和干涉仪式。通常,LPFG和FBG需要使用大型仪器,例如高频CO2激光器、紫外激光器甚至飞秒激光器进行逐点书写。这些方法增加了复杂性和成本。The accuracy of temperature changes plays a vital role in manufacturing, food processing, pharmaceuticals and other fields; the current traditional temperature measurement methods usually involve the use of thermocouples, resistance temperature detectors or infrared radiation temperature measurement; however, in the heat treatment process, it is unavoidable to have the influence of electromagnetic radiation, chemical corrosion, etc. on microwave ripples. Therefore, in many cases, due to the advantages of anti-electromagnetic interference, compact structure, low cost and high sensitivity, the use of optical fiber sensors as the measurement of temperature parameters has become the best choice. According to the sensing principle, optical fiber temperature sensors can be divided into: fiber Bragg grating (FBG) type, long period fiber grating (LPFG) type and interference type. Usually, LPFG and FBG require the use of large instruments, such as high-frequency CO2 lasers, ultraviolet lasers and even femtosecond lasers for point-by-point writing. These methods increase complexity and cost.

相比之下,基于干涉的传感器,特别是Fabry-Perot(F-P)传感器,由于具有体积小、灵敏度高、响应速度快等优点,已成为研究的热点。通常,F-P干涉(FPI)传感器分为两类:本征和外在;对于外在F-P传感器,Fabry-Perot腔体由光纤端面和外部反射面组成,中间空气为介质;可以使用不同的制备工艺In contrast, interferometric sensors, especially Fabry-Perot (F-P) sensors, have become a hot topic of research due to their small size, high sensitivity, and fast response speed. Generally, F-P interferometric (FPI) sensors are divided into two categories: intrinsic and extrinsic. For extrinsic F-P sensors, the Fabry-Perot cavity consists of the fiber end face and the external reflective surface, with air in the middle as the medium. Different preparation processes can be used.

现有技术中,使用Al2O3陶瓷管与单模光纤(SMF)相结合制备了EFPI传感器;所提出的传感器可实现高温测量,在25℃和1000℃之间的最大灵敏度为0.0113nm/℃;现有技术中还通过将两段端面涂有不同反射率材料的SMFs嵌入玻璃毛细管中制备了EFPI;在25℃和55℃之间,传感器的灵敏度达到0.093nm/℃。现有技术中还使用SMF和蓝宝石衍生的纤维形成空腔来制备EFPI;然而上述腔体结构的介质都是热膨胀系数低的空气,导致灵敏度低;因此,提高灵敏度可以尝试引入具有高热膨胀系数的反射材料;现有技术中利用SMF与雪松油喷射空心纤维(HCF)拼接在一起形成EFPI;采用OPD对传感器的温度灵敏度进行解调,在25-70℃区间内达到50.93μm/℃。然而,3mm的雪松油长度超出了传感器的尺寸并限制了传感器的应用范围。In the prior art, an EFPI sensor is prepared by combining Al 2 O 3 ceramic tube with single-mode optical fiber (SMF); the proposed sensor can realize high-temperature measurement, and the maximum sensitivity between 25℃ and 1000℃ is 0.0113nm/℃; in the prior art, an EFPI is prepared by embedding two sections of SMFs coated with different reflectivity materials on the end faces into a glass capillary; between 25℃ and 55℃, the sensitivity of the sensor reaches 0.093nm/℃. In the prior art, an EFPI is prepared by forming a cavity using SMF and sapphire-derived fibers; however, the medium of the above cavity structure is air with a low thermal expansion coefficient, resulting in low sensitivity; therefore, to improve the sensitivity, an attempt can be made to introduce a reflective material with a high thermal expansion coefficient; in the prior art, an EFPI is formed by splicing SMF and cedar oil sprayed hollow fiber (HCF); the temperature sensitivity of the sensor is demodulated by OPD, reaching 50.93μm/℃ in the range of 25-70℃. However, the 3mm cedar oil length exceeds the size of the sensor and limits the application range of the sensor.

通常,大多数用于温度测量的EFPI传感器利用腔体介质的热膨胀,从而导致光程差(OPD)的变化;然而,腔体中的介质通常是热膨胀系数低的空气,导致灵敏度低,因此,提高灵敏度可以尝试引入具有高热膨胀系数的反射材料;综上现有的光纤温度传感器的灵敏度无法满足一些高精度温度检测领域的需求;因此设计一种紧凑而灵敏的光纤传感器十分必要。Typically, most EFPI sensors used for temperature measurement utilize the thermal expansion of the cavity medium, which results in a change in the optical path difference (OPD); however, the medium in the cavity is usually air with a low thermal expansion coefficient, resulting in low sensitivity. Therefore, to improve the sensitivity, one can try to introduce reflective materials with a high thermal expansion coefficient; in summary, the sensitivity of existing fiber optic temperature sensors cannot meet the needs of some high-precision temperature detection fields; therefore, it is necessary to design a compact and sensitive fiber optic sensor.

发明内容Summary of the invention

本发明的目的是提供基于液态金属填充的高灵敏度温度传感器及其注入封装工艺,该传感器由单模光纤(SMF)与空心光纤(HCF)拼接形成,并在空心光纤(HCF)内中注入铟镓锡合金。基本原理是铟镓锡合金具有良好的流动性和热导率,在温度变化过程中,铟镓锡合金的高热膨胀系数导致光学路径差发生剧烈变化,因而此传感器具有超高的温度灵敏度。同时通过结构设计,本发明的测量装置的工作温度可以在30-40℃,灵敏度达到11.3nm/℃。该技术可应用于复杂环境中的温度测量,具有超高的灵敏度、小尺寸和高分辨率的优点。The purpose of the present invention is to provide a high-sensitivity temperature sensor based on liquid metal filling and its injection packaging process. The sensor is formed by splicing a single-mode optical fiber (SMF) and a hollow-core optical fiber (HCF), and an indium gallium tin alloy is injected into the hollow-core optical fiber (HCF). The basic principle is that the indium gallium tin alloy has good fluidity and thermal conductivity. During the temperature change process, the high thermal expansion coefficient of the indium gallium tin alloy causes the optical path difference to change dramatically, so this sensor has ultra-high temperature sensitivity. At the same time, through structural design, the operating temperature of the measuring device of the present invention can be 30-40°C, and the sensitivity reaches 11.3nm/°C. This technology can be applied to temperature measurement in complex environments, and has the advantages of ultra-high sensitivity, small size and high resolution.

本发明采取的技术方案具体如下:The technical solution adopted by the present invention is as follows:

基于液态金属填充的高灵敏度温度传感器,包括单模光纤、第一空心光纤以及第二空心光纤;A high-sensitivity temperature sensor based on liquid metal filling, comprising a single-mode optical fiber, a first hollow-core optical fiber and a second hollow-core optical fiber;

所述单模光纤一端与所述第一空心光纤一端连接,所述第一空心光纤另一端设有铟镓锡合金;One end of the single-mode optical fiber is connected to one end of the first hollow-core optical fiber, and the other end of the first hollow-core optical fiber is provided with an indium gallium tin alloy;

所述单模光纤一端、所述第一空心光纤以及所述铟镓锡合金均位于所述第二空心光纤一端内部,所述铟镓锡合金远离所述第一空心光纤的一侧与第二空心光纤内壁之间填充有UV固化胶。One end of the single-mode optical fiber, the first hollow optical fiber and the InGaSn alloy are all located inside one end of the second hollow optical fiber, and UV curing glue is filled between a side of the InGaSn alloy away from the first hollow optical fiber and an inner wall of the second hollow optical fiber.

优选地,所述单模光纤的直径为10μm;所述单模光纤的外径为125μm,所述第一空心光纤的内径为20μm,所述第一空心光纤的外径为125μm;所述第二空心光纤的内径为135μm,所述第二空心光纤的外径为200μm。Preferably, the diameter of the single-mode optical fiber is 10 μm; the outer diameter of the single-mode optical fiber is 125 μm, the inner diameter of the first hollow-core optical fiber is 20 μm, and the outer diameter of the first hollow-core optical fiber is 125 μm; the inner diameter of the second hollow-core optical fiber is 135 μm, and the outer diameter of the second hollow-core optical fiber is 200 μm.

优选地,所述第一空心光纤的长度为80μm;第二空心光纤的长度为1000μm。Preferably, the length of the first hollow-core optical fiber is 80 μm; the length of the second hollow-core optical fiber is 1000 μm.

基于液态金属填充的高灵敏度温度传感器的注入封装工艺包括以下步骤:The injection packaging process of the high-sensitivity temperature sensor based on liquid metal filling includes the following steps:

步骤1:首先对所述单模光纤以及所述第一空心光纤进行焊接;Step 1: Firstly, the single-mode optical fiber and the first hollow-core optical fiber are welded;

步骤2:取出焊接好的光纤,将第一空心光纤放入光纤切割台,并切除焊点右端第一空心光纤80μm后再次放入熔接机其中一个夹具中;Step 2: Take out the welded optical fiber, put the first hollow-core optical fiber into the optical fiber cutting table, cut off 80 μm of the first hollow-core optical fiber at the right end of the welding point, and then put it into one of the fixtures of the fusion splicer again;

步骤3:将第二空心光纤用光纤切割刀切平后用火烧掉涂覆后放入熔接机另一侧的夹具中;Step 3: Cut the second hollow-core optical fiber flat with a fiber cleaver, burn off the coating with fire, and put it into the fixture on the other side of the fusion splicer;

步骤4:将熔接机调成手动模式,将两侧光纤x、y轴对准,并将第一空心光纤插入第二空心光纤100μm后焊接2-3次,使第二空心光纤塌陷并包裹住第一空心光纤;Step 4: Set the fusion splicer to manual mode, align the x and y axes of the optical fibers on both sides, insert the first hollow-core fiber into the second hollow-core fiber by 100 μm, and weld it 2-3 times to make the second hollow-core fiber collapse and wrap around the first hollow-core fiber;

步骤5:取下光纤并将第二空心光纤侧放入光纤切割刀,切1000μm后放入光纤对准台并将含铟镓锡合金针头的空心光纤注射器插入第二空心光纤内,将铟镓锡合金沿最左端焊点处注入第二空心光纤500μm;Step 5: Remove the optical fiber and place the second hollow-core optical fiber side into the optical fiber cleaver. After cutting 1000 μm, place it into the optical fiber alignment table and insert the hollow-core optical fiber injector containing the InGaSn alloy needle into the second hollow-core optical fiber. Inject the InGaSn alloy into the second hollow-core optical fiber along the leftmost solder joint for 500 μm.

步骤6:将含UV固化胶针头的空心光纤注射器插入第二空心光纤内,将UV固化胶注入铟镓锡合金右端,并用紫外灯照射密封末端。Step 6: Insert the hollow fiber syringe containing the UV curing glue needle into the second hollow fiber, inject the UV curing glue into the right end of the InGaSn alloy, and irradiate the sealed end with a UV lamp.

优选地,所述步骤1中的具体焊接步骤如下:Preferably, the specific welding steps in step 1 are as follows:

首先,取单模光纤,将其一端剥去涂覆且用光纤切割刀切平后放置于熔接机的一个夹具中;然后,取第一空心光纤,用火烧掉涂覆后用清洁布擦掉光纤上多余涂覆且用光纤切割刀切平后放置于熔接机的另一个夹具中并放电焊接。First, take a single-mode optical fiber, strip the coating on one end, cut it flat with a fiber optic cutter, and place it in a fixture of the fusion splicer; then, take the first hollow optical fiber, burn off the coating with fire, wipe off the excess coating on the optical fiber with a cleaning cloth, cut it flat with a fiber optic cutter, place it in another fixture of the fusion splicer and perform discharge welding.

优选地,所述步骤5中,需要先制作含铟镓锡合金针头的空心光纤注射器,先取直径为100μm的空心光纤剥去涂覆,且用切割刀两端切平后一端伸入注射器针头端,后用UV固化胶将针头口封住注射器的针头,然后用紫外灯固化UV固化胶;最后在注射器针头端另一侧注入铟镓锡合金,完成封装。Preferably, in step 5, a hollow optical fiber syringe containing an indium gallium tin alloy needle needs to be prepared first. First, a hollow optical fiber with a diameter of 100 μm is stripped of the coating, and the two ends are cut flat with a cutting knife, and then one end is inserted into the needle end of the syringe. Then, the needle mouth of the syringe is sealed with UV curing glue, and then the UV curing glue is cured with an ultraviolet lamp; finally, indium gallium tin alloy is injected into the other side of the needle end of the syringe to complete the packaging.

优选地,所述步骤6中,需要先制作含UV固化胶针头的空心光纤注射器,先取直径为100μm的空心光纤剥去涂覆,且用切割刀两端切平后一端伸入注射器针头端,后用UV固化胶将针头口封住注射器的针头,然后用紫外灯固化UV固化胶;最后在注射器针头端另一侧注入将UV固化胶,完成封装。Preferably, in step 6, it is necessary to first prepare a hollow optical fiber syringe containing a UV curing glue needle. First, take a hollow optical fiber with a diameter of 100 μm, strip off the coating, cut both ends flat with a cutting knife, and then insert one end into the needle end of the syringe. Then, seal the needle of the syringe with UV curing glue, and then use an ultraviolet lamp to cure the UV curing glue; finally, inject UV curing glue into the other side of the needle end of the syringe to complete the packaging.

本发明取得的技术效果为:The technical effects achieved by the present invention are:

本发明的基于液态金属填充的高灵敏度温度传感器,该传感器由单模光纤(SMF)与空心光纤(HCF)拼接形成,并在空心光纤(HCF)内注入铟镓锡合金。基本原理是铟镓锡合金具有良好的流动性和热导率,在温度变化过程中,铟镓锡合金的高热膨胀系数导致双光路的光程差发生剧烈变化,因而此传感器具有超高的温度灵敏度。同时通过结构设计,本发明的测量装置的工作温度可以在30-40℃,灵敏度达到11.3nm/℃。该技术可应用于复杂环境中的温度测量,具有超高的灵敏度、小尺寸和高分辨率的优点。The high-sensitivity temperature sensor based on liquid metal filling of the present invention is formed by splicing a single-mode optical fiber (SMF) and a hollow-core optical fiber (HCF), and an indium gallium tin alloy is injected into the hollow-core optical fiber (HCF). The basic principle is that the indium gallium tin alloy has good fluidity and thermal conductivity. During the temperature change process, the high thermal expansion coefficient of the indium gallium tin alloy causes the optical path difference of the dual optical paths to change dramatically, so this sensor has ultra-high temperature sensitivity. At the same time, through structural design, the operating temperature of the measuring device of the present invention can be 30-40°C, and the sensitivity reaches 11.3nm/°C. This technology can be applied to temperature measurement in complex environments, and has the advantages of ultra-high sensitivity, small size and high resolution.

本发明的基于液态金属填充的高灵敏度温度传感器,包括单模光纤、第一空心光纤以及第二空心光纤;单模光纤一端与所述第一空心光纤一端连接,第一空心光纤另一端与第二空心光纤内壁之间填充有铟镓锡合金;单模光纤的内径为10μm;单模光纤的外径为125μm,第一空心光纤的内径为20μm,第一空心光纤的外径为125μm;第二空心光纤的内径为135μm,第二空心光纤的外径为200μm;单模光纤一端、第一空心光纤以及铟镓锡合金均位于第二空心光纤一端内部,铟镓锡合金远离第一空心光纤的一侧与第二空心光纤内壁之间填充有UV固化胶;第一空心光纤的长度为80μm;第二空心光纤的长度为1000μm,使得本发明中的温度传感器,结构紧凑,灵敏度高。The high-sensitivity temperature sensor based on liquid metal filling of the present invention comprises a single-mode optical fiber, a first hollow-core optical fiber and a second hollow-core optical fiber; one end of the single-mode optical fiber is connected to one end of the first hollow-core optical fiber, and an indium gallium tin alloy is filled between the other end of the first hollow-core optical fiber and the inner wall of the second hollow-core optical fiber; the inner diameter of the single-mode optical fiber is 10 μm; the outer diameter of the single-mode optical fiber is 125 μm, the inner diameter of the first hollow-core optical fiber is 20 μm, and the outer diameter of the first hollow-core optical fiber is 125 μm; the inner diameter of the second hollow-core optical fiber is 135 μm, and the outer diameter of the second hollow-core optical fiber is 200 μm; one end of the single-mode optical fiber, the first hollow-core optical fiber and the indium gallium tin alloy are all located inside one end of the second hollow-core optical fiber, and a UV curing glue is filled between the side of the indium gallium tin alloy away from the first hollow-core optical fiber and the inner wall of the second hollow-core optical fiber; the length of the first hollow-core optical fiber is 80 μm; the length of the second hollow-core optical fiber is 1000 μm, so that the temperature sensor of the present invention has a compact structure and high sensitivity.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是本发明的实施例一中基于液态金属填充的高灵敏度温度传感器的整体透明结构示意图;FIG1 is a schematic diagram of the overall transparent structure of a high-sensitivity temperature sensor based on liquid metal filling in Example 1 of the present invention;

图2是本发明的实施例二中含铟镓锡合金针头的空心光纤注射器的透明结构示意图;FIG2 is a transparent structural schematic diagram of a hollow optical fiber injector containing an indium gallium tin alloy needle in Example 2 of the present invention;

图3是本发明的实施例二中含UV固化胶针头的空心光纤注射器的透明结构示意图;FIG3 is a transparent structural schematic diagram of a hollow optical fiber injector containing a UV curing adhesive needle in Example 2 of the present invention;

图4是本发明的实施例二中基于法布里-珀罗液态金属的双波束干涉示意图。FIG. 4 is a schematic diagram of dual-beam interference based on Fabry-Perot liquid metal in Embodiment 2 of the present invention.

附图中,各标号所代表的部件列表如下:In the accompanying drawings, the components represented by the reference numerals are listed as follows:

1、单模光纤;2、第一空心光纤;3、第二空心光纤;4、铟镓锡合金;5、含铟镓锡合金针头的空心光纤注射器;6、含UV固化胶针头的空心光纤注射器;7、UV固化胶。1. Single-mode optical fiber; 2. First hollow optical fiber; 3. Second hollow optical fiber; 4. Indium gallium tin alloy; 5. Hollow optical fiber injector containing Indium gallium tin alloy needle; 6. Hollow optical fiber injector containing UV curing glue needle; 7. UV curing glue.

具体实施方式DETAILED DESCRIPTION

为了使本发明的目的及优点更加清楚明白,以下结合实施例对本发明进行具体说明。应当理解,以下文字仅仅用以描述本发明的一种或几种具体的实施方式,并不对本发明具体请求的保护范围进行严格限定。In order to make the purpose and advantages of the present invention more clearly understood, the present invention is specifically described below in conjunction with embodiments. It should be understood that the following text is only used to describe one or several specific embodiments of the present invention, and does not strictly limit the scope of protection of the specific claims of the present invention.

实施例一:Embodiment 1:

如图1所示,基于液态金属填充的高灵敏度温度传感器,包括单模光纤1、第一空心光纤2以及第二空心光纤3;As shown in FIG1 , a high-sensitivity temperature sensor based on liquid metal filling includes a single-mode optical fiber 1, a first hollow-core optical fiber 2, and a second hollow-core optical fiber 3;

单模光纤1一端与所述第一空心光纤2一端连接,第一空心光纤2另一端与第二空心光纤3内壁之间填充有铟镓锡合金4。One end of the single-mode optical fiber 1 is connected to one end of the first hollow-core optical fiber 2 , and an indium gallium tin alloy 4 is filled between the other end of the first hollow-core optical fiber 2 and the inner wall of the second hollow-core optical fiber 3 .

单模光纤1的直径为10μm;单模光纤1的外径为125μm,第一空心光纤2的内径为20μm,第一空心光纤2的外径为125μm;第二空心光纤3的内径为135μm,第二空心光纤3的外径为200μm。The diameter of the single-mode optical fiber 1 is 10 μm; the outer diameter of the single-mode optical fiber 1 is 125 μm, the inner diameter of the first hollow-core optical fiber 2 is 20 μm, and the outer diameter of the first hollow-core optical fiber 2 is 125 μm; the inner diameter of the second hollow-core optical fiber 3 is 135 μm, and the outer diameter of the second hollow-core optical fiber 3 is 200 μm.

单模光纤1一端、第一空心光纤2以及铟镓锡合金4均位于第二空心光纤3一端内部,铟镓锡合金4远离第一空心光纤2的一侧与第二空心光纤3内壁之间填充有UV固化胶7。One end of the single-mode optical fiber 1, the first hollow-core optical fiber 2 and the InGaSn alloy 4 are all located inside one end of the second hollow-core optical fiber 3, and UV curing glue 7 is filled between the side of the InGaSn alloy 4 away from the first hollow-core optical fiber 2 and the inner wall of the second hollow-core optical fiber 3.

第一空心光纤2的长度为80μm;第二空心光纤3的长度为1000μm。The length of the first hollow-core optical fiber 2 is 80 μm; the length of the second hollow-core optical fiber 3 is 1000 μm.

本实施例公开的基于液态金属填充的高灵敏度温度传感器经过实验测量,工作温度可以在30-40℃,灵敏度达到了11.3nm/℃。该技术可应用于复杂环境中的温度测量,具有超高的灵敏度、小尺寸和高分辨率的优点。The high-sensitivity temperature sensor based on liquid metal filling disclosed in this embodiment has been experimentally measured to have an operating temperature of 30-40°C and a sensitivity of 11.3nm/°C. This technology can be applied to temperature measurement in complex environments and has the advantages of ultra-high sensitivity, small size and high resolution.

实施例二:Embodiment 2:

基于液态金属填充的高灵敏度温度传感器的注入封装工艺,包括以下步骤:The injection packaging process of the high-sensitivity temperature sensor based on liquid metal filling includes the following steps:

步骤1:首先取单模光纤1,将其一端剥去涂覆且用光纤切割刀切平后放置于熔接机的一个夹具中;然后,取第一空心光纤2,用火烧掉涂覆后用清洁布擦掉光纤上多余涂覆且用光纤切割刀切平后放置于熔接机的另一个夹具中并放电焊接,完成对单模光纤1以及第一空心光纤2进行焊接;Step 1: First, take a single-mode optical fiber 1, strip off the coating at one end, cut it flat with a fiber cleaver, and place it in a fixture of the fusion splicer; then, take a first hollow-core optical fiber 2, burn off the coating with fire, wipe off the excess coating on the optical fiber with a cleaning cloth, cut it flat with a fiber cleaver, place it in another fixture of the fusion splicer and perform discharge welding, thus completing the welding of the single-mode optical fiber 1 and the first hollow-core optical fiber 2;

步骤2:取出焊接好的光纤,将第一空心光纤2放入光纤切割台,并切除焊点右端第一空心光纤2的80μm后再次放入熔接机其中一个夹具中;Step 2: Take out the welded optical fiber, put the first hollow-core optical fiber 2 into the optical fiber cutting table, cut off 80 μm of the first hollow-core optical fiber 2 at the right end of the welding point, and then put it into one of the clamps of the fusion splicer again;

步骤3:将第二空心光纤3用光纤切割刀切平后用火烧掉涂覆后放入熔接机另一侧的夹具中;Step 3: Cut the second hollow-core optical fiber 3 flat with an optical fiber cutter, burn off the coating with fire, and then put it into the fixture on the other side of the fusion splicer;

步骤4:将熔接机调成手动模式,将两侧光纤x、y轴对准,并将第一空心光纤2插入第二空心光纤3的100μm后焊接2-3次,使第二空心光纤3塌陷并包裹住第一空心光纤2;Step 4: Set the fusion splicer to manual mode, align the x and y axes of the optical fibers on both sides, insert the first hollow-core optical fiber 2 into the second hollow-core optical fiber 3 by 100 μm, and then weld it 2-3 times to make the second hollow-core optical fiber 3 collapse and wrap the first hollow-core optical fiber 2;

步骤5:先制作含铟镓锡合金针头的空心光纤注射器5,先取直径为100μm的空心光纤剥去涂覆,且用切割刀两端切平后一端伸入注射器针头端,后用UV固化胶将针头口封住注射器的针头,然后用紫外灯固化UV固化胶;最后在注射器针头端另一侧注入将铟镓锡合金4,完成封装;然后取下光纤并将第二空心光纤3侧放入光纤切割刀,切1000μm后放入光纤对准台并将含铟镓锡合金针头的空心光纤注射器5插入第二空心光纤3内,将铟镓锡合金4沿最左端焊点处注入第二空心光纤3500μm;Step 5: First, make a hollow fiber injector 5 containing an indium gallium tin alloy needle. First, take a hollow fiber with a diameter of 100 μm, strip off the coating, cut both ends flat with a cutting knife, and then insert one end into the needle end of the syringe. Then, seal the needle of the syringe with UV curing glue, and then use an ultraviolet lamp to cure the UV curing glue; finally, inject indium gallium tin alloy 4 into the other side of the syringe needle end to complete the packaging; then remove the optical fiber and put the side of the second hollow fiber 3 into the optical fiber cutting knife, cut 1000 μm, put it into the optical fiber alignment table, and insert the hollow fiber injector 5 containing the indium gallium tin alloy needle into the second hollow fiber 3, and inject the indium gallium tin alloy 4 into the second hollow fiber 3 along the leftmost solder joint 3500 μm;

步骤6:先制作含UV固化胶针头的空心光纤注射器6,先取直径为100μm的空心光纤剥去涂覆,且用切割刀两端切平后一端伸入注射器针头端,后用UV固化胶将针头口封住注射器的针头,然后用紫外灯固化UV固化胶;最后在注射器针头端另一侧注入将UV固化胶,完成封装,然后将含UV固化胶针头的空心光纤注射器6插入第二空心光纤3内,将UV固化胶7注入铟镓锡合金4右端,并用紫外灯照射密封末端。Step 6: First make a hollow optical fiber syringe 6 containing a UV curing glue needle. First, take a hollow optical fiber with a diameter of 100 μm, strip off the coating, cut both ends flat with a cutting knife, and then insert one end into the needle end of the syringe. Then, seal the needle mouth of the syringe with UV curing glue, and then use an ultraviolet lamp to cure the UV curing glue; finally, inject UV curing glue into the other side of the syringe needle end to complete the packaging, and then insert the hollow optical fiber syringe 6 containing the UV curing glue needle into the second hollow optical fiber 3, inject UV curing glue 7 into the right end of the indium gallium tin alloy 4, and irradiate the sealed end with an ultraviolet lamp.

本发明的工作原理为:本发明传感器通过单模光纤SMF与空心光纤HCF拼接并嵌入注入锡化铟镓合金到较大直径的空心光纤中;EFPI(法布里-珀罗)的两个反射面是单模光纤和合金的端面,形成一个介质为空气的空腔;锡化铟镓合金由于在室温下的液态和高热膨胀系数而有利于温度测量;所提EFPI(法布里-珀罗)传感器在30-40℃的小范围内具有超高的灵敏度;本发明传感器灵敏度极高、小尺寸和高分辨率等优点,可应用于高精度温度检测领域;The working principle of the present invention is as follows: the sensor of the present invention is spliced by a single-mode optical fiber SMF and a hollow-core optical fiber HCF and embedded with an indium gallium tin alloy into a hollow-core optical fiber with a larger diameter; the two reflection surfaces of EFPI (Fabry-Perot) are the end faces of the single-mode optical fiber and the alloy, forming a cavity with air as the medium; the indium gallium tin alloy is conducive to temperature measurement due to its liquid state at room temperature and high thermal expansion coefficient; the proposed EFPI (Fabry-Perot) sensor has ultra-high sensitivity within a small range of 30-40°C; the sensor of the present invention has the advantages of extremely high sensitivity, small size and high resolution, and can be applied to the field of high-precision temperature detection;

由于本发明一方面,包括单模光纤1、内径20μm外径125μm的第一空心光纤2、内径135μm外径200μm的第二空心光纤3、铟镓锡合金4;另一方面,使用含铟镓锡合金针头的空心光纤注射器5以及含UV固化胶针头的空心光纤注射器6分别注入铟镓锡合金4以及UV固化胶7;On the one hand, the present invention comprises a single-mode optical fiber 1, a first hollow-core optical fiber 2 with an inner diameter of 20 μm and an outer diameter of 125 μm, a second hollow-core optical fiber 3 with an inner diameter of 135 μm and an outer diameter of 200 μm, and an indium gallium tin alloy 4; on the other hand, a hollow-core optical fiber injector 5 containing an indium gallium tin alloy needle and a hollow-core optical fiber injector 6 containing a UV curing glue needle are used to inject the indium gallium tin alloy 4 and the UV curing glue 7 respectively;

在实际使用中,如图4所示,本发明传感器共有三个反射区,分别是单模光纤1与第一空心光纤2焊接处的反射区、第一空心光纤2与铟镓锡合金4反射区、第一空心光纤2与单模光纤1焊接处的反射区;In actual use, as shown in FIG4 , the sensor of the present invention has three reflection areas, namely, the reflection area at the welding point between the single-mode optical fiber 1 and the first hollow-core optical fiber 2, the reflection area between the first hollow-core optical fiber 2 and the indium gallium tin alloy 4, and the reflection area at the welding point between the first hollow-core optical fiber 2 and the single-mode optical fiber 1;

需要补充的是,从单模光纤的纤芯透射的光谱的光一部分先从单模光纤1与第一空心光纤2焊接处的反射区进行第一次反射,另一部分进入第一空心光纤2内,经过第一空心光纤2另一端与铟镓锡合金4连接处反射区全部反射,还在第一空心光纤2内,然后反射至第一空心光纤2一端与单模光纤1焊接处,再进行一次反射,具体如图4所示。It should be added that part of the light spectrum transmitted from the core of the single-mode optical fiber is first reflected for the first time from the reflection area at the welding point between the single-mode optical fiber 1 and the first hollow-core optical fiber 2, and the other part enters the first hollow-core optical fiber 2, is completely reflected by the reflection area at the connection point between the other end of the first hollow-core optical fiber 2 and the indium gallium tin alloy 4, remains in the first hollow-core optical fiber 2, and then is reflected to the welding point between one end of the first hollow-core optical fiber 2 and the single-mode optical fiber 1, and is reflected again, as shown in FIG. 4 .

综上,将从单模光纤的纤芯透射的光谱的光谱反射成I1、I2、I3三个部分;由于界面空气/SMF的反射率远低于空气/LM的反射率,因此I3会迅速衰减;因此,与典型的FPI不同,In summary, the spectrum of the spectrum transmitted from the core of the single-mode fiber is reflected into three parts: I 1 , I 2 , and I 3 . Since the reflectivity of the interface air/SMF is much lower than that of air/LM, I 3 will decay rapidly. Therefore, unlike the typical FPI,

在这种结构中,多个光束之间的界面被简化为两个光束截面,输出光强可以表示为:In this structure, the interface between multiple beams is simplified to two beam cross sections, and the output light intensity can be expressed as:

其中,是初始相位,是光通过空腔时的相位变化,可以由下式给出:in, is the initial phase, is the phase change of light when it passes through the cavity, which can be given by:

其中n表示介质在腔中的折射率,L是F-P腔的折射率,λ表示入射光的波长;根据公式(1)和公式(2),两束反射光束之间的相位差满足以下条件:Where n represents the refractive index of the medium in the cavity, L is the refractive index of the F-P cavity, and λ represents the wavelength of the incident light. According to formula (1) and formula (2), the phase difference between the two reflected light beams satisfies the following conditions:

这里,是m阶干涉倾角的波长;因此,可以表示为:Here, is the wavelength of the m-order interference dip; therefore, it can be expressed as:

公式(4)表示干涉倾角随腔体长度呈线性变化;因此,在此中,通过使用高热胀系数的材料铟镓锡合金(4),并采用巧妙的设计将温度与型腔长度L相关联,使得本发明传感器对温度具有非常高的敏感性且呈线性关系;经过实验证明,该传感器由单模光纤(SMF)与空心光纤(HCF)拼接形成,并在空心光纤(HCF)内注入铟镓锡合金。基本原理是铟镓锡合金具有良好的流动性和热导率,在温度变化过程中,铟镓锡合金的高热膨胀系数导致光学路径差发生剧烈变化,因而此传感器具有超高的温度灵敏度。同时通过结构设计,本发明的测量装置的工作温度可以在30-40℃,灵敏度达到11.3nm/℃。该技术可应用于复杂环境中的温度测量,具有超高的灵敏度、小尺寸和高分辨率的优点。Formula (4) indicates that the interference inclination angle varies linearly with the cavity length; therefore, in this case, by using the material of high thermal expansion coefficient of indium gallium tin alloy (4), and adopting a clever design to associate the temperature with the cavity length L, the sensor of the present invention has a very high sensitivity to temperature and a linear relationship; it has been experimentally proved that the sensor is formed by splicing a single-mode optical fiber (SMF) and a hollow-core optical fiber (HCF), and indium gallium tin alloy is injected into the hollow-core optical fiber (HCF). The basic principle is that indium gallium tin alloy has good fluidity and thermal conductivity. During the temperature change process, the high thermal expansion coefficient of indium gallium tin alloy causes the optical path difference to change dramatically, so this sensor has ultra-high temperature sensitivity. At the same time, through structural design, the operating temperature of the measuring device of the present invention can be 30-40°C, and the sensitivity reaches 11.3nm/°C. This technology can be applied to temperature measurement in complex environments, and has the advantages of ultra-high sensitivity, small size and high resolution.

以上所述仅是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以作出若干改进和润饰,这些改进和润饰也应视为本发明的保护范围。本发明中未具体描述和解释说明的结构、装置以及操作方法,如无特别说明和限定,均按照本领域的常规手段进行实施。The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principles of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. The structures, devices and operating methods not specifically described and explained in the present invention shall be implemented according to the conventional means in the art unless otherwise specified and limited.

Claims (8)

1. High sensitivity temperature sensor based on liquid metal fills, its characterized in that: comprises a single-mode optical fiber (1), a first hollow optical fiber (2) and a second hollow optical fiber (3);
One end of the single-mode optical fiber (1) is connected with one end of the first hollow optical fiber (2), and the other end of the first hollow optical fiber (2) is provided with indium gallium tin alloy (4);
The single-mode optical fiber (1) one end, the first hollow optical fiber (2) and the indium gallium tin alloy (4) are all located inside one end of the second hollow optical fiber (3), and UV curing glue (7) is filled between one side, away from the first hollow optical fiber (2), of the indium gallium tin alloy (4) and the inner wall of the second hollow optical fiber (3).
2. The liquid metal fill-based high sensitivity temperature sensor of claim 1, wherein: the diameter of the single-mode optical fiber (1) is 10 mu m; the outer diameter of the single-mode optical fiber (1) is 125 mu m, the inner diameter of the first hollow optical fiber (2) is 20 mu m, and the outer diameter of the first hollow optical fiber (2) is 125 mu m.
3. The liquid metal fill-based high sensitivity temperature sensor of claim 1, wherein: the second hollow fiber (3) has an inner diameter of 135 μm and the second hollow fiber (3) has an outer diameter of 200 μm.
4. The liquid metal fill-based high sensitivity temperature sensor of claim 1, wherein: the length of the first hollow optical fiber (2) is 80 μm; the second hollow fiber (3) has a length of 1000 μm.
5. The injection packaging process of the high-sensitivity temperature sensor based on liquid metal filling is characterized by comprising the following steps of: the injection packaging process is applied to injection packaging the high-sensitivity temperature sensor according to any one of claims 1 to 4, and comprises the following steps:
step 1: firstly, welding the single-mode optical fiber (1) and the first hollow optical fiber (2) and cutting off redundant hollow optical fibers (2), wherein the remained hollow optical fibers (2) are 80 mu m;
Step 2: placing the structure obtained in the step 1 into a clamp at one side of an optical fiber fusion splicer;
Step 3: cutting the second hollow optical fiber (3) by an optical fiber cutting knife, burning off the cut second hollow optical fiber with fire, and putting the cut second hollow optical fiber into a clamp at the other side of the fusion splicer;
Step 4: the fusion splicer is adjusted to a manual mode, the x axis and the y axis of the two side optical fibers are aligned, and the first hollow optical fiber (2) is inserted into the second hollow optical fiber (3) for 100 mu m and then welded for 2-3 times, so that the second hollow optical fiber (3) collapses and wraps the first hollow optical fiber (2);
Step 5: taking down the optical fiber, putting the side of the second hollow optical fiber (3) into an optical fiber cutting knife, cutting 1000 mu m, putting into an optical fiber alignment table, inserting a hollow optical fiber injector (5) containing an indium gallium tin alloy needle into the second hollow optical fiber (3), and injecting the indium gallium tin alloy (4) into the second hollow optical fiber (3) along the leftmost welding point;
Step 6: a hollow optical fiber injector (6) containing a UV curing glue needle is inserted into the second hollow optical fiber (3), UV curing glue (7) is injected into the right end of the indium gallium tin alloy (4), and the sealing tail end is irradiated by an ultraviolet lamp.
6. The liquid metal fill-based high sensitivity temperature sensor of claim 5, wherein: the specific welding step in the step 1 is as follows:
Firstly, a single-mode fiber (1) is taken, one end of the single-mode fiber is stripped and coated, and is placed in a clamp of a fusion splicer after being cut flat by a fiber cutting knife; then, the first hollow optical fiber (2) is taken, after the coating is burned off by fire, the excessive coating on the optical fiber is wiped off by a cleaning cloth, and after the coating is cut flat by an optical fiber cutting knife, the optical fiber is placed in another clamp of a fusion splicer and is subjected to discharge welding.
7. The liquid metal fill-based high sensitivity temperature sensor of claim 6, wherein: in the step 5, a hollow optical fiber injector (5) containing an indium gallium tin alloy needle head is required to be manufactured, a hollow optical fiber with the diameter of 100 mu m is firstly taken for stripping and coating, two ends of a cutting knife are cut flat, one end of the cutting knife stretches into the needle head end of the injector, then a needle head opening of the injector is sealed by UV curing glue, and then the UV curing glue is cured by an ultraviolet lamp; and finally, injecting indium gallium tin alloy (4) at the other side of the needle end of the injector to finish packaging.
8. The liquid metal fill-based high sensitivity temperature sensor of claim 7, wherein: in the step 6, a hollow optical fiber injector (6) containing a UV curing glue needle head is required to be manufactured, hollow optical fibers with the diameter of 100 mu m are firstly taken for stripping and coating, two ends of each of the hollow optical fibers are cut flat by a cutting knife, one end of each of the hollow optical fibers extends into the needle head end of the injector, then a needle head opening of the injector is sealed by the UV curing glue, and then the UV curing glue is cured by an ultraviolet lamp; and finally, injecting UV curing adhesive at the other side of the needle end of the injector to complete packaging.
CN202410721362.3A 2024-06-05 2024-06-05 High-sensitivity temperature sensor based on liquid metal filling and its injection packaging process Pending CN118730330A (en)

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