CN118729954A - A detector for detecting linear displacement position - Google Patents
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Abstract
Description
技术领域Technical Field
本发明涉及直线位移位置探测设备技术领域,特别涉及一种用于探测直线位移位置的探测器。The present invention relates to the technical field of linear displacement position detection equipment, and in particular to a detector for detecting linear displacement position.
背景技术Background Art
本发明普遍用于短距离直线运动元件的位置探测,通常用于光学动态聚焦系统,高精密的机械微动平台等,要求探测器具有高分辨率,高动态响应,高可靠性的应用场合。The present invention is widely used for position detection of short-distance linear motion elements, usually in optical dynamic focusing systems, high-precision mechanical micro-motion platforms, etc., where the detector is required to have high resolution, high dynamic response, and high reliability.
目前常用的直线运动元件的位置探测器主要是磁栅尺和光栅尺,磁栅尺是一种利用磁场和霍尔元件原理进行测量的长度测量系统。但是它具有以下缺点:At present, the commonly used position detectors of linear motion elements are mainly magnetic scales and grating scales. The magnetic scale is a length measurement system that uses the principle of magnetic field and Hall element for measurement. However, it has the following disadvantages:
1.成本较高:由于采用了高精度的霍尔元件,以及复杂的数字电路处理,所以成本较高。1. High cost: Due to the use of high-precision Hall elements and complex digital circuit processing, the cost is relatively high.
2.精度容易受到温度变化的影响:由于霍尔元件的灵敏度与温度有关,因此在温度变化较大的环境下,需要进行温度补偿。2. Accuracy is easily affected by temperature changes: Since the sensitivity of the Hall element is related to temperature, temperature compensation is required in an environment with large temperature changes.
光栅尺是一种利用光学原理进行测量的长度测量系统。它具有以下缺点:The grating ruler is a length measurement system that uses optical principles for measurement. It has the following disadvantages:
1.价格高:相比磁栅尺,光栅尺更加昂贵。1. High price: Compared with magnetic scale, optical scale is more expensive.
2.易受污染:光栅尺的光栅尺片表面非常精细,容易受到污染和划伤的影响,导致测量精度下降。2. Susceptible to contamination: The surface of the grating ruler is very fine and easily affected by contamination and scratches, resulting in reduced measurement accuracy.
3.安装要求高:光栅尺的安装要求较高,需要一个稳定的位置,抗震动能力差,寿命短。3. High installation requirements: The installation requirements of the grating ruler are high, requiring a stable position, poor vibration resistance and short life.
因此本发明的目的是提供一种能够适应较大温差的环境并能精确检测直线运动元件位置的光学检测器,Therefore, the object of the present invention is to provide an optical detector which can adapt to an environment with a large temperature difference and can accurately detect the position of a linear motion element.
因此本发明的另一目的是提供一种体积小,组件数量少,易于安装的低成本直线运动元件位置的光学检测器。It is therefore another object of the present invention to provide a low-cost optical detector of the position of a linear motion element which is small in size, has a small number of components, and is easy to install.
发明内容Summary of the invention
(一)解决的技术问题1. Technical issues to be solved
针对现有技术的不足,本发明提供了一种用于探测直线位移位置的探测器,解决以下技术问题。In view of the deficiencies in the prior art, the present invention provides a detector for detecting a linear displacement position to solve the following technical problems.
(二)技术方案(II) Technical solution
为实现以上目的,本发明通过以下技术方案予以实现:To achieve the above objectives, the present invention is implemented through the following technical solutions:
一种用于探测直线位移位置的探测器,包括固定底座,固定底座上设置有用于监测的探测器模块、可进行直线移动的可直线移动元件以及驱动探测器模块中部件和可直线移动元件移动的驱动模块。A detector for detecting linear displacement position comprises a fixed base on which a detector module for monitoring, a linearly movable element capable of linear movement and a driving module for driving components in the detector module and the linearly movable element are arranged.
其中,驱动模块移动端与可直线移动元件以及探测器模块中的遮光片固定连接,驱动模块带动可直线移动元件以及遮光片同时进行直线移动。The moving end of the driving module is fixedly connected to the linearly movable element and the light shielding sheet in the detector module, and the driving module drives the linearly movable element and the light shielding sheet to move linearly at the same time.
其中,测器模块包括产生一个均匀宽角度的光场的单一发射管光源以及接收光源的光传感器,单一发射管光源和光传感器处于同一竖直水平面,所述单一发射管光源和光传感器之间距离k由光源照射的发散角度θ和光传感器宽度n共同决定,具体的计算公式为:k=cotangentθ×(1/2×n),遮光片位于单一发射管光源和光传感器之间。Among them, the detector module includes a single transmitting tube light source that generates a uniform wide-angle light field and a light sensor that receives the light source. The single transmitting tube light source and the light sensor are in the same vertical plane. The distance k between the single transmitting tube light source and the light sensor is determined by the divergence angle θ of the light source and the width n of the light sensor. The specific calculation formula is: k=cotangentθ×(1/2×n), and the shading plate is located between the single transmitting tube light source and the light sensor.
其中,光传感器包括两个精确对称并面积精确相等的长方形光传感器,遮光片无法将单独一个长方形光传感器完全遮挡。The light sensor includes two rectangular light sensors that are precisely symmetrical and have exactly the same area, and the light shielding sheet cannot completely block a single rectangular light sensor.
优选的:所述可直线移动元件通过导轨组件滑动连接在固定底座上,所述固定底座的顶部位于驱动模块移动端固定有限位柱,限位柱用于限制驱动模块移动端的移动距离。Preferably: the linearly movable element is slidably connected to the fixed base via a guide rail assembly, and a limiting column is fixed on the top of the fixed base at the moving end of the driving module, and the limiting column is used to limit the moving distance of the moving end of the driving module.
优选的:所述测器模块包括外壳罩,外壳罩固定在固定底座上,外壳罩内壁底部设置有发射管支架,发射管支架与外壳罩之间固定光传感器,发射管支架顶部中心位置固定单一发射管光源,外壳罩与可直线移动元件靠近一侧开设有长方形孔,遮光片穿过长方形孔设于外壳罩内部且位于光传感器上方,所述光传感器顶部设置有窗口片,窗口片位于遮光片何光传感器之间,且遮光片与光传感器之间的空间除窗口片外没有其他遮挡物。Preferably: the detector module includes an outer shell cover, which is fixed on a fixed base, a transmitting tube bracket is arranged at the bottom of the inner wall of the outer shell cover, a light sensor is fixed between the transmitting tube bracket and the outer shell cover, a single transmitting tube light source is fixed at the center position of the top of the transmitting tube bracket, a rectangular hole is opened on one side close to the outer shell cover and the linearly movable element, a shading sheet passes through the rectangular hole and is arranged inside the outer shell cover and is located above the light sensor, a window sheet is arranged on the top of the light sensor, the window sheet is located between the shading sheet and the light sensor, and there is no other obstruction in the space between the shading sheet and the light sensor except the window sheet.
优选的:所述遮光片由硬度高、重量轻、且不透明的材料制成。Preferably, the shading sheet is made of a material that is high in hardness, light in weight, and opaque.
优选的:所述单一发射管光源底部设置有匀光片,匀光片固定在外壳罩上。Preferably, a light homogenizer is provided at the bottom of the single emitting tube light source, and the light homogenizer is fixed on the outer shell cover.
(三)有益效果(III) Beneficial effects
1、本发明通过一个独特形状的遮光片,直接与驱动模块相连,驱动模块同时与可移动元件直接相连。该遮光片被用来部分遮挡两个精确对称并且相同面积的长方形光传感器,使两个长方形光传感器的整个感光区域无法完全接收来自单一发射管光源的光。发射管光源必须能够产生均匀宽角度的光场,均匀的照射两个光传感器。当独特形状的遮光片随着可直线位移的可移动元件直线运动,它会暴露其中一侧光传感器更多的感光区域,而暴露另外一侧光传感器的感光区域相对减少。为了得到更好的线性度,可以选择在发射管光源和遮光片之间增加匀光片或菲涅尔透镜,从而得到更加均匀的光场,使检测结果更加准确。1. The present invention is directly connected to the driving module through a shading plate of a unique shape, and the driving module is also directly connected to the movable element. The shading plate is used to partially block two precisely symmetrical and identical rectangular light sensors, so that the entire photosensitive area of the two rectangular light sensors cannot fully receive light from a single transmitting tube light source. The transmitting tube light source must be able to produce a uniform wide-angle light field to evenly illuminate the two light sensors. When the shading plate of a unique shape moves linearly with the linearly displaceable movable element, it will expose more photosensitive areas of the light sensor on one side, while exposing relatively less photosensitive areas of the light sensor on the other side. In order to obtain better linearity, you can choose to add a light-homogenizing plate or a Fresnel lens between the transmitting tube light source and the shading plate to obtain a more uniform light field, making the detection result more accurate.
2、本发明在光强度恒定的情况下,光传感器的输出与光传感器暴露于光照射的面积成正比。两个光传感器的电流连接到差分放大器的正负极,以产生最终的输出。来自光传感器的最终输出表示可移动元件的直线位移。2. In the present invention, when the light intensity is constant, the output of the light sensor is proportional to the area of the light sensor exposed to the light. The currents of the two light sensors are connected to the positive and negative electrodes of the differential amplifier to produce the final output. The final output from the light sensor represents the linear displacement of the movable element.
3、整体设置组件数量少、易于安装且成本低,同时能够带来很好的检测效果。3. The overall setup has a small number of components, is easy to install and low cost, and can bring good detection results.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,并可依照说明书的内容予以实施,以下以本发明的较佳实施例并配合附图详细说明如后。The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings.
图1为发明立体结构示意图;Fig. 1 is a schematic diagram of the three-dimensional structure of the invention;
图2为发明剖面结构示意图;Fig. 2 is a schematic diagram of the cross-sectional structure of the invention;
图3为发明光传感器立体结构示意图;FIG3 is a schematic diagram of the three-dimensional structure of the invented optical sensor;
图4为发明遮光片结构示意图;FIG4 is a schematic diagram of the structure of the light shielding sheet of the invention;
图5为本发明中使用特殊形状阻挡件的传感器组件的剖面正面、侧面图,也包含遮光片与光传感器之间距离的说明图;FIG5 is a cross-sectional front and side view of a sensor assembly using a specially shaped blocking member according to the present invention, and also includes an illustration of the distance between the light shielding sheet and the light sensor;
图6为单一发射管光源和发射管支架的高度的设计说明图。图例说明:模块1、探测器模块;模块2、驱动模块;模块3、可移动元件;4、遮光片;5、导轨组件;6、限位柱;7、固定底座;8、安装孔;9、窗口片;10、光传感器;11、外罩壳;12、侧挡板;13、发射管支架;14、发射管光源;15、匀光片。Figure 6 is a design diagram for the height of a single transmitting tube light source and a transmitting tube bracket. Legend: Module 1, detector module; Module 2, drive module; Module 3, movable element; 4, light shielding sheet; 5, guide rail assembly; 6, limit column; 7, fixed base; 8, mounting hole; 9, window sheet; 10, light sensor; 11, outer cover; 12, side baffle; 13, transmitting tube bracket; 14, transmitting tube light source; 15, light homogenizer.
具体实施方式DETAILED DESCRIPTION
参考图1-图6,本申请实施例通过提供一种用于探测直线位移位置的探测器,包括固定底座7,固定底座7上设置有用于监测的探测器模块模块1、可进行直线移动的可直线移动元件模块3以及驱动探测器模块模块1中部件和可直线移动元件模块3移动的驱动模块模块2。1-6 , an embodiment of the present application provides a detector for detecting a linear displacement position, including a fixed base 7, on which is disposed a detector module 1 for monitoring, a linearly movable element module 3 capable of linear movement, and a driving module 2 for driving components in the detector module 1 and the linearly movable element module 3 to move.
其中,驱动模块模块2移动端与可直线移动元件模块3以及探测器模块模块1中的遮光片4固定连接,驱动模块模块2带动可直线移动元件模块3以及遮光片4同时进行直线移动。The moving end of the driving module 2 is fixedly connected to the linearly movable element module 3 and the light shielding sheet 4 in the detector module 1, and the driving module 2 drives the linearly movable element module 3 and the light shielding sheet 4 to move linearly at the same time.
在一部分实施案例中,为了保障更快的速度,需要更大力矩,会使用两个驱动模块2,以一推一拉的方式来进行可直线移动元件模块3的位移。In some implementation cases, in order to ensure a faster speed and require a greater torque, two driving modules 2 are used to move the linearly movable element module 3 in a push-pull manner.
所述遮光片4由硬度高、重量轻、且不透明的材料制成,避免由于急加速/减速直线运动造成的震荡或抖动。The shading sheet 4 is made of a material with high hardness, light weight, and opaqueness to avoid vibration or shaking caused by rapid acceleration/deceleration of linear motion.
其中,测器模块模块1包括产生一个均匀宽角度的光场的单一发射管光源14以及接收光源的光传感器10,单一发射管光源14和光传感器10处于同一竖直水平面,所述单一发射管光源14和光传感器10之间距离k由光源照射的发散角度θ和光传感器宽度n共同决定,具体的计算公式为:k=cotangentθ×(1/2×n),遮光片4位于单一发射管光源14和光传感器10之间。Among them, the detector module 1 includes a single emitting tube light source 14 that generates a uniform wide-angle light field and a light sensor 10 that receives the light source. The single emitting tube light source 14 and the light sensor 10 are in the same vertical plane. The distance k between the single emitting tube light source 14 and the light sensor 10 is determined by the divergence angle θ of the light source and the width n of the light sensor. The specific calculation formula is: k=cotangentθ×(1/2×n). The shading plate 4 is located between the single emitting tube light source 14 and the light sensor 10.
由此可以保障,单一发射管光源14发射出的光场可以完全均匀的覆盖两个光传感器10的全部感光面积。同时在光传感器10上覆盖的窗口片9保障了两个光传感器10露出的面积精确对称且完全相等,k值也能完全保障单一发射管光源14发射出的光场可以完全覆盖两个光传感器10在窗口片9下暴露出的感光面积,窗口片9的窗口露出的总长度n可以被单一发射管光源发射出的均匀光场完全覆盖,从而保障输出结果的有效性和准确性,也同时保障了位移探测器的安装尺寸尽可能小。This ensures that the light field emitted by the single emitting tube light source 14 can completely and evenly cover the entire photosensitive area of the two light sensors 10. At the same time, the window sheet 9 covering the light sensors 10 ensures that the exposed areas of the two light sensors 10 are precisely symmetrical and completely equal, and the k value can also fully ensure that the light field emitted by the single emitting tube light source 14 can completely cover the photosensitive areas of the two light sensors 10 exposed under the window sheet 9. The total exposed length n of the window of the window sheet 9 can be completely covered by the uniform light field emitted by the single emitting tube light source, thereby ensuring the validity and accuracy of the output results, and also ensuring that the installation size of the displacement detector is as small as possible.
单一发射管光源14是一种能产生均匀宽角度光场的类型,需要同时均匀照亮所有的光传感器10,单一发射管光源14和光传感器10之间的距离是至关重要的,根据单一LED光源14发散角和方形传感器感光面积计算得来。通过计算得来的光传感器10与单一发射管光源14的距离,能保障光传感器光照面积以及接收到的辐射强度,从而保障高质量的信号产生。同样重要的是,独特形状的阻挡件4,它必须位于与光传感器10极为接近的位置,即图5中A值,大约为0.05到0.10英寸。这样光可以尽可能的按照遮光片4的轮廓投射到光传感器10表面。The single-emission tube light source 14 is a type that can produce a uniform wide-angle light field. It is necessary to uniformly illuminate all light sensors 10 at the same time. The distance between the single-emission tube light source 14 and the light sensor 10 is crucial and is calculated based on the divergence angle of the single LED light source 14 and the square sensor photosensitive area. The calculated distance between the light sensor 10 and the single-emission tube light source 14 can ensure the light sensor illumination area and the received radiation intensity, thereby ensuring high-quality signal generation. Equally important is the unique shape of the blocking member 4, which must be located very close to the light sensor 10, that is, the A value in Figure 5 is about 0.05 to 0.10 inches. In this way, the light can be projected onto the surface of the light sensor 10 as closely as possible to the contour of the light shielding sheet 4.
其中,光传感器10包括两个精确对称并面积精确相等的长方形光传感器,遮光片4无法将单独一个长方形光传感器完全遮挡。The optical sensor 10 includes two rectangular optical sensors that are precisely symmetrical and have exactly the same area, and the light shielding sheet 4 cannot completely shield a single rectangular optical sensor.
所述可直线移动元件模块3通过导轨组件5滑动连接在固定底座7上,所述固定底座7的顶部位于驱动模块模块2移动端固定有限位柱6,限位柱6用于限制驱动模块模块2移动端的移动距离。The linearly movable element module 3 is slidably connected to the fixed base 7 through the guide rail assembly 5. The top of the fixed base 7 is located at the moving end of the driving module 2 and a limiting column 6 is fixed thereon. The limiting column 6 is used to limit the moving distance of the moving end of the driving module 2.
所述测器模块模块1包括外壳罩11,外壳罩11固定在固定底座7上,外壳罩11内壁底部设置有发射管支架13,发射管支架13与外壳罩11之间固定光传感器10,发射管支架13顶部中心位置固定单一发射管光源14,外壳罩11与可直线移动元件模块3靠近一侧开设有长方形孔,外壳罩11靠近一侧固定有侧挡板12,配合侧挡板12的安装,使得遮光片4与直线位移探测器模块中的其他安装件之间有尽量小的间隙,且各高度差之间相互遮挡外壳罩11光路,最大程度的确保外壳罩11内部均匀光场不受到外部杂散光的干扰,也能保障外壳罩11内部光场不会向外泄露造成其他干扰条件,从而保障光传感器10的输出精确,遮光片4穿过长方形孔设于外壳罩11内部且位于光传感器10上方,所述光传感器10顶部设置有窗口片9,窗口片9位于遮光片4何光传感器10之间,且遮光片4与光传感器10之间的空间除窗口片9外没有其他遮挡物。The detector module 1 includes an outer shell cover 11, which is fixed on a fixed base 7. A transmitting tube bracket 13 is provided at the bottom of the inner wall of the outer shell cover 11. A light sensor 10 is fixed between the transmitting tube bracket 13 and the outer shell cover 11. A single transmitting tube light source 14 is fixed at the top center of the transmitting tube bracket 13. A rectangular hole is provided on one side of the outer shell cover 11 and the linearly movable element module 3. A side baffle 12 is fixed on one side of the outer shell cover 11. With the installation of the side baffle 12, there is a gap as small as possible between the light shielding sheet 4 and other mounting parts in the linear displacement detector module, and The height differences mutually block the optical path of the outer shell cover 11, ensuring to the greatest extent that the uniform light field inside the outer shell cover 11 is not disturbed by external stray light, and also ensuring that the light field inside the outer shell cover 11 will not leak outward and cause other interference conditions, thereby ensuring the output accuracy of the light sensor 10. The shading sheet 4 is arranged inside the outer shell cover 11 through the rectangular hole and is located above the light sensor 10. A window sheet 9 is arranged on the top of the light sensor 10. The window sheet 9 is located between the shading sheet 4 and the light sensor 10, and there is no other obstruction in the space between the shading sheet 4 and the light sensor 10 except the window sheet 9.
单一发射管光源14、光传感器10及独特形状阻挡件4被特殊设计在了如图2所示的外壳罩11以及侧挡板12中。再通过独特形状的阻挡件设计,极大降低了外部光干扰的可能性,保障了信号输出的可靠性和稳定性The single emitting tube light source 14, the light sensor 10 and the unique shape blocking member 4 are specially designed in the outer shell 11 and the side baffle 12 as shown in FIG2. The unique shape of the blocking member design greatly reduces the possibility of external light interference and ensures the reliability and stability of the signal output.
所述单一发射管光源14底部设置有匀光片15,匀光片15固定在外壳罩11上。A light homogenizer 15 is disposed at the bottom of the single emitting tube light source 14 , and the light homogenizer 15 is fixed on the outer shell 11 .
本项发明中,利用宽角度光源特性使得可以使用单个LED光源。如果能保障光源的一致性且广场均匀,可以采用多个发射管窄角度光源的配置。通过合理计算单一发射管光源14与光传感器10的距离,单一发射管光源14能同时均匀照亮所有光传感器10接收面,这对于实现高精度的结果至关重要。随着独特形状的阻挡件4以直线运动,它会覆盖和露出新的增量光传感器区域。为了使设备的输出是线性的,新的增量区域必须产生与先前增量区域相同的信号变化。这要求光强度/密度在光传感器10上是均匀的,也就引出了本发明中使用的单一发射管光源14。In the present invention, the wide-angle light source characteristics are utilized to enable the use of a single LED light source. If the consistency of the light source can be guaranteed and the square is uniform, a configuration of multiple emitting tube narrow-angle light sources can be adopted. By reasonably calculating the distance between the single emitting tube light source 14 and the light sensor 10, the single emitting tube light source 14 can simultaneously and uniformly illuminate all light sensor 10 receiving surfaces, which is crucial to achieving high-precision results. As the uniquely shaped blocking member 4 moves in a straight line, it covers and exposes new incremental light sensor areas. In order for the output of the device to be linear, the new incremental area must produce the same signal change as the previous incremental area. This requires that the light intensity/density is uniform on the light sensor 10, which leads to the single emitting tube light source 14 used in the present invention.
由于在此应用实例:PSI动态轴模组中,可移动元件标准/最佳可移动行程为±3.5mm,在这个行程区间,能够保障良好的线性度,即最佳行程长度为7mm。可移动元件极限移动位置为小于±4mm,即极限行程为小于8mm。每一片光传感器最大长度为10mm的正方形,由于传感器的最大长度尺寸存在一定偏差,所以需要精密机械加工两个略小于10mm的窗口,来保证两个传感器的接光面一致。在这个案例当中,加工了一个包含两个长度为9.5mm窗口的窗口片。In this application example: PSI dynamic axis module, the standard/optimal movable stroke of the movable element is ±3.5mm. In this stroke range, good linearity can be guaranteed, that is, the optimal stroke length is 7mm. The limit movement position of the movable element is less than ±4mm, that is, the limit stroke is less than 8mm. Each optical sensor has a maximum length of 10mm square. Since there is a certain deviation in the maximum length of the sensor, two windows slightly smaller than 10mm need to be precisely machined to ensure that the light receiving surfaces of the two sensors are consistent. In this case, a window piece with two windows with a length of 9.5mm was processed.
窗口片分隔两个精确对称且相等的光传感器的接缝位置宽度为0.5mm,在极限位置+4mm或-4mm的时候,遮光片随之移动到达的位置如图所示,已经完全暴露出下半部分的光传感器露出部分的全部面积,此时测量结果无效。所以当可移动元件按照可移动行程范围内移动时,举例说明,当可移动元件直线位移至+3.5mm位置时-3.5mm位置时同理,遮光片所在位置下边缘距离下半部分窗口片下边缘位置9mm,即遮挡住下半部分的光传感器0.5mm,遮光片上边缘距离上半部分窗口片上边缘位置2mm(上半部分传感器露出长度总长度9.5mm-遮光片8.5mm总长度-窗口片接缝宽度0.5mm-遮光片遮住下半部分光传感器长度0.5mm。The width of the seam position of the window separating two precisely symmetrical and equal light sensors is 0.5mm. When it is at the extreme position of +4mm or -4mm, the position to which the light shield moves is shown in the figure, which has completely exposed the entire area of the exposed part of the lower half of the light sensor. At this time, the measurement result is invalid. Therefore, when the movable element moves within the movable stroke range, for example, when the movable element moves linearly to the +3.5mm position and the -3.5mm position, the lower edge of the light shield is 9mm away from the lower edge of the lower half of the window, that is, it blocks 0.5mm of the lower half of the light sensor, and the upper edge of the light shield is 2mm away from the upper edge of the upper half of the window (the total length of the exposed length of the upper half of the sensor is 9.5mm-the total length of the light shield is 8.5mm-the width of the seam of the window is 0.5mm-the length of the lower half of the light sensor covered by the light shield is 0.5mm.
最后应说明的是:显然,上述实施例仅仅是为清楚地说明本发明所作的举例,而并非对实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引申出的显而易见的变化或变动仍处于本发明的保护范围之中。Finally, it should be noted that: Obviously, the above embodiments are only examples for clearly explaining the present invention, and are not intended to limit the implementation methods. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived from this are still within the scope of protection of the present invention.
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KR102004186B1 (en) * | 2018-10-24 | 2019-07-26 | 주식회사 에이유이 | photo sensor for sensing of position variation |
CN212645640U (en) * | 2019-07-16 | 2021-03-02 | 襄阳联杰机电有限公司 | Photoelectric displacement sensor |
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US5365059A (en) * | 1993-08-06 | 1994-11-15 | Bilanx Technology, Inc. | Parallel beam force measurement apparatus having an optical light sensor means |
JPH09236406A (en) * | 1996-03-04 | 1997-09-09 | Fuji Xerox Co Ltd | Device and apparatus for detecting position |
KR102004186B1 (en) * | 2018-10-24 | 2019-07-26 | 주식회사 에이유이 | photo sensor for sensing of position variation |
CN212645640U (en) * | 2019-07-16 | 2021-03-02 | 襄阳联杰机电有限公司 | Photoelectric displacement sensor |
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