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CN118719448B - Uniform stick sticking equipment for silicon single crystal stick - Google Patents

Uniform stick sticking equipment for silicon single crystal stick Download PDF

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Publication number
CN118719448B
CN118719448B CN202410805991.4A CN202410805991A CN118719448B CN 118719448 B CN118719448 B CN 118719448B CN 202410805991 A CN202410805991 A CN 202410805991A CN 118719448 B CN118719448 B CN 118719448B
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China
Prior art keywords
fixed
plate
sliding
shaped
guide
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CN202410805991.4A
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Chinese (zh)
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CN118719448A (en
Inventor
严循成
王祥
何迎辉
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Jiangsu Fuxu Technology Co ltd
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Jiangsu Fuxu Technology Co ltd
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Priority to CN202410805991.4A priority Critical patent/CN118719448B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C3/00Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material
    • B05C3/20Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material for applying liquid or other fluent material only at particular parts of the work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/023Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface
    • B05C11/025Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface with an essentially cylindrical body, e.g. roll or rod
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02Means for manipulating or holding work, e.g. for separate articles for particular articles
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16BDEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B11/00Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding
    • F16B11/006Connecting constructional elements or machine parts by sticking or pressing them together, e.g. cold pressure welding by gluing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

本发明适用于硅单晶棒加工技术领域,提供了一种硅单晶棒的均匀粘棒设备,包括硅单晶棒、夹持架;夹持架上滑动设置有滑动架;滑动架上对称滑动设置有浸胶组件;固定板底面固定有U形储胶管;U形储胶管内部盛放有环氧树脂胶水;U形储胶管内部滑动设置有活塞件;U形储胶管周侧面位于导向管上方固定有导向条;导向条上滑动设置有滑动件;滑动件中滑动设置有与导向管相适配的密封塞;该装置通过控制活塞件的运动,使得U形储胶管中的环氧树脂胶水浸没硅单晶棒两端,松手后活塞件在复位过程中带动涂胶辊对粘有环氧树脂胶水的硅单晶棒两端进行滚动刮平,代替传统人工手持涂胶辊涂胶的方式,提高了涂胶的均匀性,同时提高了涂胶的效率。

The present invention is applicable to the technical field of silicon single crystal rod processing, and provides a uniform stick bonding device for silicon single crystal rods, comprising a silicon single crystal rod and a clamping frame; a sliding frame is slidably arranged on the clamping frame; a dipping assembly is symmetrically slidably arranged on the sliding frame; a U-shaped glue storage tube is fixed to the bottom surface of a fixed plate; epoxy resin glue is contained in the U-shaped glue storage tube; a piston is slidably arranged in the U-shaped glue storage tube; a guide bar is fixed on the circumferential side surface of the U-shaped glue storage tube above the guide tube; a sliding member is slidably arranged on the guide bar; a sealing plug adapted to the guide tube is slidably arranged in the sliding member; the device controls the movement of the piston member so that the epoxy resin glue in the U-shaped glue storage tube immerses the two ends of the silicon single crystal rod, and after releasing the hand, the piston member drives the glue coating roller to roll and scrape the two ends of the silicon single crystal rod adhered with the epoxy resin glue during the resetting process, thereby replacing the traditional manual glue coating method of holding the glue coating roller, thereby improving the uniformity of glue coating and the efficiency of glue coating.

Description

Uniform stick sticking equipment for silicon single crystal stick
Technical Field
The invention relates to the technical field of silicon single crystal rod processing, in particular to uniform rod sticking equipment for a silicon single crystal rod.
Background
In the manufacturing process of integrated circuit level monocrystalline silicon wafers, a multi-wire cutting technology is generally adopted for slicing large-size monocrystalline silicon rods, and the monocrystalline silicon rods are bonded to resin strips before wire cutting to perform crystal orientation positioning and position fixing; the bonding of the monocrystalline silicon rod is a first procedure of processing and manufacturing silicon wafers, has great influence on the processing and yield of subsequent products, and mainly aims to fix the monocrystalline silicon rod according to the crystal orientation, realize nondestructive clamping of the monocrystalline silicon rod during wire cutting, simultaneously keep the cutting direction and the crystal orientation fixed and avoid the adverse conditions of crystal orientation deviation, silicon wafer edge breakage, fragments and the like during cutting.
The existing gluing modes are mainly to manually hold a gluing roller containing epoxy resin glue for gluing, wherein the glue is uneven in gluing thickness, the local area of a glue layer is too thick or too thin, so that uneven adhesive strength distribution is caused, accidents of bar dropping and sheet dropping easily occur during slicing, the epoxy resin glue is exposed in the air for a long time, the quality is affected, and waste is easily caused; meanwhile, the resin strips are required to be adhered to the end parts of the monocrystalline silicon rods manually, the working efficiency is low, the coaxial lamination of the resin strips and the monocrystalline silicon rods is difficult to ensure by manual operation, the error is large, and the quality of adhesion between the monocrystalline silicon rods and the resin strips is reduced.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide uniform rod sticking equipment for a silicon single crystal rod, the movement of a piston piece is controlled to enable epoxy resin glue in a U-shaped glue storage tube to submerge two ends of the silicon single crystal rod, the piston piece drives a glue spreading roller to roll and scrape the two ends of the silicon single crystal rod adhered with the epoxy resin glue in the resetting process after loosening hands, a traditional manual glue spreading manner of holding the glue spreading roller is replaced, glue spreading uniformity is improved, and glue spreading efficiency is improved.
In order to achieve the above purpose, the present invention provides the following technical solutions:
A uniform stick sticking device of a silicon single crystal rod comprises the silicon single crystal rod and a clamping frame for clamping the silicon single crystal rod; a sliding frame is arranged on the clamping frame in a sliding manner; the sliding frame is symmetrically provided with glue dipping assemblies in a sliding manner; the gum dipping component comprises a fixed plate which is arranged on the sliding frame in a sliding way; the bottom surface of the fixed plate is fixed with a U-shaped rubber storage tube; epoxy resin glue is contained in the U-shaped rubber storage tube; a piston member is slidably arranged in the U-shaped rubber storage tube; a guide pipe matched with the silicon single crystal rod is arranged on the peripheral side surface of the U-shaped rubber storage pipe in a penetrating way; a guide strip is fixed on the peripheral side surface of the U-shaped rubber storage tube above the guide tube; a sliding piece is arranged on the guide strip in a sliding manner; a sealing plug matched with the guide pipe is slidably arranged in the sliding piece; l-shaped guide plates are symmetrically fixed on the clamping frame; an inclined guide plate is fixed on the side surface of the L-shaped guide plate upwards at a certain inclination angle; a connecting spring sleeved on the guide bar is fixed between the sliding piece and the U-shaped rubber storage tube; in the process that the clamping frame drives the silicon single crystal rod to ascend, the elastic acting force of the connecting spring is matched, so that the sliding frame is sequentially arranged on the side surfaces of the inclined guide plate and the L-shaped guide plate in a sliding mode.
The invention is further provided with: the clamping frame comprises a mounting base; the surface of the mounting base is fixedly provided with an electric push rod; the output end of the electric push rod is fixed with a U-shaped frame; a sliding plate is fixed on the U-shaped frame; the sliding plate is uniformly fixed with a mounting frame; an upper clamping plate is arranged on the mounting frame; sliding rods which are in sliding fit with the sliding plates are symmetrically fixed on the two sides of the electric push rod on the surface of the mounting base; a supporting plate is fixed between the two end parts of the sliding rod; the surface of the supporting plate is uniformly provided with a lower clamping plate; a servo motor is fixedly arranged on the bottom surface of the supporting plate; and a screw rod in threaded rotation fit with the sliding plate is fixed at the output end of the servo motor.
The invention is further provided with: a through groove is formed in the side face of the mounting base; the sliding frame comprises a U-shaped plate which is arranged in the through groove in a sliding way; an electromagnetic chuck is arranged on the side surface of the mounting frame; an ear plate is fixed on the surface of the mounting base; a reset spring is fixed between the lug plate and the U-shaped plate; and an iron block is fixedly arranged on the side surface of the U-shaped plate.
The invention is further provided with: the two L-shaped guide plates are respectively fixed on the surfaces of the two upper clamping plates at the outermost side; the surface of the guide strip is provided with a first avoiding groove which is in sliding fit with the L-shaped guide plate and the inclined guide plate; the side surfaces of the L-shaped guide plates and the inclined guide plates are respectively provided with a second avoiding groove which is communicated with each other; the sliding piece comprises a guide frame which is arranged on the guide strip in a sliding way; a fixed sleeve is fixed on the bottom surface of the guide frame; the side surface of the fixed sleeve is fixedly provided with a guide rod which is arranged in the second avoidance groove in a sliding manner; and a guide ball is fixed at the end part of the guide rod.
The invention is further provided with: the peripheral side surface of the sealing plug is fixedly provided with a sliding plate which is arranged in the fixed sleeve in a sliding way; and a mounting spring is fixed between the sliding plate and the inner top surface of the fixed sleeve.
The invention is further provided with: the inner tops of the two ends of the U-shaped rubber storage tube are fixedly connected with a first extrusion spring and a second extrusion spring respectively; the piston piece comprises a piston and a sliding block which are arranged in the U-shaped rubber storage tube in a sliding manner; the first extrusion spring and the second extrusion spring are respectively connected with the piston and the sliding block; the inner top of one end of the U-shaped rubber storage tube is provided with a sliding hole, and the inner top of the other end of the U-shaped rubber storage tube is fixedly provided with a vertical rod; a piston rod which is in sliding fit with the sliding hole is fixed on the surface of the piston; and the surface of the sliding block is provided with a limiting hole in sliding fit with the vertical rod.
The invention is further provided with: the side surface of the sliding block is rotatably provided with a glue spreading roller; a connecting rope is connected between the piston rod and the sliding plate; the fixing plate is internally provided with a rope penetrating groove, and the surface of the fixing plate is fixedly provided with an L-shaped supporting plate; the surface of the L-shaped supporting plate is fixed with supporting rods; a U-shaped rope threading pipe is fixed at the end part of the stay bar; one end of the connecting rope is fixed at the end part of the piston rod, and the other end of the connecting rope sequentially penetrates through the U-shaped rope threading pipe and the rope threading groove and is connected to the surface of the sliding block.
The invention is further provided with: the bottom of the U-shaped rubber storage tube is communicated with a liquid inlet tube; the liquid inlet pipe is provided with a one-way valve, and the end part of the liquid inlet pipe is in threaded connection with a sealing cover; screw holes are formed in one side face of the fixing plate, and positioning holes are symmetrically formed in the side face of the fixing plate, located on two sides of the screw holes; a connecting frame is fixed at one end of the U-shaped plate; a rotating rod is arranged between the inner walls of the connecting frames in a penetrating and rotating way; the end part of the rotating rod is fixedly provided with a screw rod which is in threaded rotation fit with the screw hole; positioning rods which are in sliding fit with the positioning holes are symmetrically fixed on two opposite side surfaces of the connecting frame; a driven gear is fixed on the peripheral side surface of the rotating rod; the surface of the connecting frame is provided with a driving motor; the output end of the driving motor is fixed with a driving gear engaged with the driven gear; the surface of the mounting base is provided with a controller; the output end of the controller is respectively and electrically connected with the servo motor, the electromagnetic chuck, the electric push rod and the driving motor.
The invention is further provided with: an extension plate is fixed on the peripheral side surface of the guide tube; a semi-annular plate is fixed on the side surface of the extension plate; a lower clamping plate is fixed on the inner wall of the semi-ring plate; the surface of the extension plate is rotatably provided with a screw rod, and guide rods are symmetrically fixed on the two sides of the screw rod; a mounting bar which is in threaded rotation fit with the threaded rod is arranged between the two guide rods in a sliding manner; an upper clamping plate concentric with the lower clamping plate is fixed on the side surface of the mounting strip; the semi-ring plate is internally provided with an external resin plate component which is matched with the lower clamping plate and the upper clamping plate in a clamping way.
The invention has the advantages that:
1. According to the invention, the clamping and fixing of the silicon single crystal rod are realized through the clamping frame, the stability of the operation of the subsequent gluing and rod sticking processes is ensured, the silicon single crystal rod is aligned to the guide pipes on two sides through the cooperation between the components, the two glue dipping assemblies are controlled to move synchronously and oppositely, so that the two ends of the silicon single crystal rod enter the corresponding guide pipes until the two ends of the silicon single crystal rod are abutted against the corresponding glue coating rollers, the two groups of piston members are respectively pressed down, the epoxy resin glue in the U-shaped glue storage tube submerges the two ends of the silicon single crystal rod, and the piston members drive the glue coating rollers to roll and scrape the two ends of the silicon single crystal rod adhered with the epoxy resin glue in the resetting process, so that the traditional manual glue coating roller gluing mode is replaced, the glue coating uniformity is improved, and the glue coating efficiency is improved.
2. After the two glue dipping components are uniformly glued at the two ends of the silicon single crystal rod, the two glue dipping components are separated from the two ends of the silicon single crystal rod, the electromagnetic chuck is controlled to electrically attract the iron block, the sliding frame slides along the corresponding clamping frame, the two clamped and fixed external resin plate components and the silicon single crystal rod are kept coaxially arranged, the two glue dipping components are controlled to synchronously move in opposite directions, the two external resin plate components are adhered to the two ends of the silicon single crystal rod, the stick adhering operation is finished, the error is small, the stability of the whole process is high, and the quality of the stick is improved.
3. According to the invention, in the lifting process of the fixedly clamped silicon single crystal rod, the linkage relation among all the parts is matched, so that the automatic opening and closing of the sealing plug are realized, a traditional manual gluing mode of holding a glue spreader is replaced, the epoxy resin glue is prevented from being exposed in the air for a long time, the quality is influenced, the epoxy resin glue is saved, and excessive waste is avoided.
Drawings
Fig. 1 is a schematic structural diagram of a uniform rod sticking apparatus for silicon single crystal rods according to the present invention.
Fig. 2 is an enlarged view of area a of fig. 1 in accordance with the present invention.
Fig. 3 is a schematic structural view of the clamping frame of the present invention.
Fig. 4 is a schematic structural view of the carriage of the present invention.
Fig. 5 is a schematic structural view of the dipping component of the present invention.
Fig. 6 is an enlarged view of area E of fig. 4 in accordance with the present invention.
Fig. 7 is an enlarged view of region F of fig. 4 in accordance with the present invention.
Fig. 8 is a schematic structural view of a piston member of the present invention.
Fig. 9 is a schematic structural view of a slider according to the present invention.
Fig. 10 is a schematic view of the structure of the sealing plug of the present invention.
Fig. 11 is a schematic structural view of the external resin sheet assembly of the present invention.
FIG. 12 is a schematic view showing a structure in an initial silicon single crystal rod holding state of the present invention.
Fig. 13 is a schematic view of the structure of the present invention in a state of taking out the sealing plug.
FIG. 14 is a schematic view showing a structure of a silicon single crystal rod of the present invention in a state of aligning a guide block.
Fig. 15 is an enlarged view of area B of fig. 12 in accordance with the present invention.
Fig. 16 is an enlarged view of region C of fig. 13 in accordance with the present invention.
Fig. 17 is an enlarged view of region D of fig. 14 in accordance with the present invention.
In the figure: 1. a silicon single crystal rod; 2. a clamping frame; 3. a carriage; 4. a dipping component; 5. a fixing plate; 6. u-shaped rubber storage tube; 7. epoxy resin glue; 8. a piston member; 9. a guide tube; 10. a guide bar; 11. a slider; 12. a sealing plug; 13. an L-shaped guide plate; 14. an inclined guide plate; 15. a connecting spring; 16. a mounting base; 17. an electric push rod; 18. a U-shaped frame; 19. a slide plate; 20. a mounting frame; 21. an upper clamping plate; 22. a slide bar; 23. a support plate; 24. a lower clamping plate; 25. a servo motor; 26. a screw; 27. a through groove; 28. a U-shaped plate; 29. an electromagnetic chuck; 30. ear plates; 31. a return spring; 32. iron blocks; 33. a first avoidance groove; 34. a second avoidance groove; 35. a guide frame; 36. a fixed sleeve; 37. a guide rod; 38. a guide ball; 39. a sliding plate; 40. installing a spring; 41. a first pressing spring; 42. a second pressing spring; 43. a piston; 44. a slide block; 45. a vertical rod; 46. a piston rod; 47. a limiting hole; 48. a glue spreading roller; 49. a connecting rope; 50. rope penetrating grooves; 51. an L-shaped supporting plate; 52. a brace rod; 53. u-shaped rope threading pipe; 54. a liquid inlet pipe; 55. a one-way valve; 56. sealing cover; 57. a screw hole; 58. positioning holes; 59. a connection frame; 60. a rotating rod; 61. a screw rod; 62. a positioning rod; 63. a driven gear; 64. a driving motor; 65. a drive gear; 66. a controller; 67. an extension plate; 68. a semi-annular plate; 69. a screw rod; 70. a guide rod; 71. a mounting bar; 72. a lower clamping plate; 73. an upper clamping plate; 74. an outer resin plate assembly.
Detailed Description
It should be noted that, without conflict, the embodiments of the present application and features of the embodiments may be combined with each other. The application will be described in detail below with reference to the drawings in connection with embodiments.
It is noted that all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs unless otherwise indicated.
In the present invention, unless otherwise indicated, the terms "upper" and "lower" are used generally with respect to the directions shown in the drawings, or with respect to the vertical, vertical or gravitational directions; also, for ease of understanding and description, "left, right" is generally directed to the left, right as shown in the drawings; "inner and outer" refer to inner and outer relative to the outline of the components themselves, but the above-described orientation terms are not intended to limit the present invention.
Example 1
Referring to fig. 1-17, the present invention provides the following technical solutions:
The uniform rod sticking equipment for the silicon single crystal rod comprises the silicon single crystal rod 1 and a clamping frame 2 for clamping the silicon single crystal rod 1; a sliding frame 3 is arranged on the clamping frame 2 in a sliding way; the sliding frame 3 is symmetrically provided with a dipping component 4 in a sliding way; the dipping component 4 comprises a fixed plate 5 which is arranged on the sliding frame 3 in a sliding way; the bottom surface of the fixed plate 5 is fixed with a U-shaped rubber storage tube 6; the U-shaped rubber storage tube 6 is internally provided with epoxy resin glue 7; a piston part 8 is arranged in the U-shaped rubber storage tube 6 in a sliding manner; a guide pipe 9 matched with the silicon single crystal rod 1 is arranged on the peripheral side surface of the U-shaped rubber storage pipe 6 in a penetrating way; a guide strip 10 is fixed on the side surface of the periphery of the U-shaped rubber storage tube 6 above the guide tube 9; the guide strip 10 is provided with a sliding piece 11 in a sliding manner; a sealing plug 12 matched with the guide pipe 9 is arranged in the sliding part 11 in a sliding way; l-shaped guide plates 13 are symmetrically fixed on the clamping frame 2; the side surface of the L-shaped guide plate 13 is upwards fixed with an inclined guide plate 14 at a certain inclination angle; a connecting spring 15 sleeved on the guide strip 10 is fixed between the sliding piece 11 and the U-shaped rubber storage tube 6; in the process that the clamping frame 2 drives the silicon single crystal rod 1 to ascend, the elastic acting force of the connecting spring 15 is matched, so that the sliding frame 3 is sequentially arranged on the side surfaces of the inclined guide plate 14 and the L-shaped guide plate 13 in a sliding manner.
The first working principle of this embodiment: by controlling the movement of the piston part 8, the epoxy resin glue 7 in the U-shaped glue storage pipe 6 submerges the two ends of the silicon single crystal rod 1, and after the glue is loosened, the piston part 8 drives the glue spreading roller 48 to roll and scrape the two ends of the silicon single crystal rod 1 adhered with the epoxy resin glue 7 in the resetting process, so that the traditional manual glue spreading manner of holding the glue spreading roller is replaced, the glue spreading uniformity is improved, and the glue spreading efficiency is improved; in the rising process of the silicon single crystal rod 1, through linkage cooperation among the inclined guide plate 14, the sliding frame 3 and the connecting spring 15, automatic opening and closing of the sealing plug 12 are realized, a traditional manual gluing roller gluing mode is replaced, the epoxy resin glue 7 is prevented from being exposed in the air for a long time, quality is influenced, meanwhile, the epoxy resin glue 7 is saved, and excessive waste is avoided.
Example two
Referring to fig. 1 to 17, the second embodiment is modified from the first embodiment in that the clamping frame 2 includes a mounting base 16; the electric push rod 17 is fixedly arranged on the surface of the mounting base 16; the output end of the electric push rod 17 is fixed with a U-shaped frame 18; a slide plate 19 is fixed on the U-shaped frame 18; the slide plate 19 is uniformly fixed with a mounting frame 20; the mounting frame 20 is provided with an upper clamping plate 21; sliding rods 22 which are in sliding fit with the sliding plates 19 are symmetrically fixed on the two sides of the electric push rod 17 on the surface of the mounting base 16; a supporting plate 23 is fixed between the end parts of the two sliding rods 22; the surface of the supporting plate 23 is uniformly provided with a lower clamping plate 24; A servo motor 25 is fixedly arranged on the bottom surface of the supporting plate 23; the output end of the servo motor 25 is fixed with a screw rod 26 which is in threaded rotation fit with the slide plate 19; the side surface of the mounting base 16 is provided with a through groove 27; the carriage 3 comprises a U-shaped plate 28 slidingly disposed in a through slot 27; an electromagnetic chuck 29 is arranged on the side surface of the mounting frame 20; an ear plate 30 is fixed on the surface of the mounting base 16; a return spring 31 is fixed between the ear plate 30 and the U-shaped plate 28; an iron block 32 is fixedly arranged on the side surface of the U-shaped plate 28; the two L-shaped guide plates 13 are respectively fixed on the surfaces of the two upper clamping plates 21 at the outermost side; the surface of the guide strip 10 is provided with a first avoiding groove 33 which is in sliding fit with the L-shaped guide plate 13 and the inclined guide plate 14; The side surfaces of the L-shaped guide plates 13 and the inclined guide plates 14 are respectively provided with a second avoiding groove 34 which is communicated with each other; the slider 11 includes a guide frame 35 slidably provided on the guide bar 10; a fixed sleeve 36 is fixed on the bottom surface of the guide frame 35; the side surface of the fixed sleeve 36 is fixed with a guide rod 37 which is arranged in the second avoiding groove 34 in a sliding way; a guide ball 38 is fixed at the end of the guide rod 37; a sliding plate 39 which is arranged in the fixed sleeve 36 in a sliding way is fixed on the peripheral side surface of the sealing plug 12; a mounting spring 40 is fixed between the sliding plate 39 and the inner top surface of the fixed sleeve 36; the inner tops of the two ends of the U-shaped rubber storage tube 6 are fixedly connected with a first extrusion spring 41 and a second extrusion spring 42 respectively; the piston member 8 includes a piston 43 slidably disposed in the U-shaped hose 6 and a slider 44; the first pressing spring 41 and the second pressing spring 42 are respectively connected with the piston 43 and the slide block 44; a slide hole is arranged at the top part in one end of the U-shaped rubber storage tube 6, and the other end is provided with an inner top part a vertical rod 45 is fixed; a piston rod 46 which is in sliding fit with the sliding hole is fixed on the surface of the piston 43; the surface of the sliding block 44 is provided with a limiting hole 47 which is in sliding fit with the vertical rod 45; the side surface of the sliding block 44 is rotatably provided with a glue spreader 48; a connecting rope 49 is connected between the piston rod 46 and the slide plate 19; the fixing plate 5 is internally provided with a rope penetrating groove 50, and the surface of the fixing plate is fixed with an L-shaped supporting plate 51; The surface of the L-shaped supporting plate 51 is fixed with a supporting rod 52; the end part of the stay bar 52 is fixed with a U-shaped rope threading pipe 53; one end of a connecting rope 49 is fixed at the end part of the piston rod 46, and the other end of the connecting rope sequentially passes through a U-shaped rope threading pipe 53 and a rope threading groove 50 and is connected to the surface of the sliding block 44; the bottom of the U-shaped rubber storage tube 6 is communicated with a liquid inlet tube 54; the liquid inlet pipe 54 is provided with a one-way valve 55, and the end part of the liquid inlet pipe is in threaded connection with a sealing cover 56; screw holes 57 are formed in one side face of the fixing plate 5, and positioning holes 58 are symmetrically formed in the side face of the fixing plate on two sides of the screw holes 57; a connecting frame 59 is fixed at one end of the U-shaped plate 28; a rotating rod 60 is arranged between the inner walls of the connecting frames 59 in a penetrating and rotating way; the end part of the rotating rod 60 is fixed with a screw rod 61 in threaded rotation fit with the screw hole 57; positioning rods 62 which are in sliding fit with the positioning holes 58 are symmetrically fixed on two opposite side surfaces of the connecting frame 59; a driven gear 63 is fixed on the side surface of the periphery of the rotating rod 60; the surface of the connecting frame 59 is provided with a driving motor 64; the output end of the driving motor 64 is fixed with a driving gear 65 engaged with the driven gear 63; the surface of the mounting base 16 is provided with a controller 66; the output end of the controller 66 is respectively and electrically connected with the servo motor 25, the electromagnetic chuck 29, the electric push rod 17 and the driving motor 64; an extension plate 67 is fixed on the side surface of the periphery of the guide tube 9; The side surface of the extension plate 67 is fixed with a semi-ring plate 68; a lower clamping plate 72 is fixed on the inner wall of the semi-annular plate 68; the surface of the extension plate 67 is rotatably provided with a screw rod 69, and guide rods 70 are symmetrically fixed on the surfaces of the extension plate 67 at two sides of the screw rod 69; a mounting bar 71 which is in threaded rotation fit with the threaded rod 69 is arranged between the two guide rods 70 in a sliding manner; an upper clamping plate 73 concentric with the lower clamping plate 72 is fixed on the side surface of the mounting strip 71; an outer resin plate assembly 74 is placed inside the half-ring plate 68 in snap-fit engagement with the lower clamping plate 72 and the upper clamping plate 73.
The second working principle of this embodiment: the silicon single crystal rod 1 is placed in the lower clamping plate 24, so that the lower clamping plate 24 at the middle position is placed at the bottom of the middle section of the silicon single crystal rod 1, and the servo motor 25 is controlled to be started to drive the screw 26 to rotate, so that each group of mounting frames 20 and the corresponding upper clamping plate 21 are driven to move downwards, and the silicon single crystal rod 1 is clamped and fixed; through placing two outside resin plate components 74 into corresponding semi-ring plates 68, rotate the spiro union pole 69 and drive the installation strip 71 and descend along with corresponding last cardboard 73, realize the joint to outside resin plate components 74, improve the stability of scribbling excellent, stick process.
In the initial state, the connecting spring 15 is in a stretched state, so that the sliding part 11 always has a tendency to move towards the U-shaped rubber storage tube 6, the fixing sleeve 36 is pulled towards the U-shaped rubber storage tube 6 under the elastic force of the connecting spring 15, at this time, the sealing plug 12 is inserted into the guide tube 9, and at this time, the mounting spring 40 is in a normal state.
The clamping frame 2 and the clamped silicon single crystal rod 1 are driven to ascend by controlling the starting electric push rod 17 until the inclined guide plate 14 is contacted with the guide ball 38, in the continuous ascending process of the inclined guide plate 14, the guide ball 38 is extruded to move towards the direction far away from the U-shaped rubber storage tube 6, so that the sliding piece 11 and the sealing plug 12 are driven to slide, the sealing plug 12 is separated from the guide tube 9, at the moment, the guide ball 38 is arranged on the side face of the L-shaped guide plate 13, the inclined guide plate 14 continues to ascend, the silicon single crystal rod 1 is propped against the sealing plug 12, the sliding plate 39 on the sealing plug 12 is enabled to slide and ascend along the inner wall of the fixed sleeve 36, at the moment, the mounting spring 40 is compressed until the two ends of the silicon single crystal rod 1 are coaxially arranged with the guide tube 9, and the electric push rod 17 is controlled to be closed.
The driving motor 64 is controlled to start to drive the driving gear 65 to rotate, the driven gear 63 is matched to drive the rotating rod 60 to rotate, the two screw rods 61 are in opposite screw directions, and accordingly the two gum dipping assemblies 4 on the two screw rods 61 are driven to synchronously move in opposite directions, so that the gum rolls 48 in the two U-shaped gum storage tubes 6 are abutted against the two ends of the silicon single crystal rod 1, and the driving motor 64 is controlled to be turned off.
The piston rod 46 is pressed downwards along the U-shaped rubber storage tube 6, the extrusion spring 41 is stretched in the process, the second extrusion spring 42 is compressed, the piston 43 descends along the U-shaped rubber storage tube 6, the liquid level of the epoxy resin glue 7 in the U-shaped rubber storage tube 6 at the position close to the piston 43 descends, the liquid level of the epoxy resin glue 7 in the U-shaped rubber storage tube 6 at the position close to the guide tube 9 ascends until the end part of the silicon single crystal rod 1 is immersed, meanwhile, the sliding block 44 is pulled to ascend along the vertical rod 45 under the action force of the connecting rope 49, after the hand is loosened, the piston 43 is driven to ascend and reset under the elastic reset action of the extrusion spring 41, and meanwhile, the glue spreader 48 is driven to descend to scrape the epoxy resin glue 7 at the end part of the silicon single crystal rod 1 under the elastic reset action of the second extrusion spring 42, so that glue spreading operation is completed.
After the end part of the silicon single crystal rod 1 is glued, the driving motor 64 is controlled to reversely rotate, so that the two glue dipping assemblies 4 synchronously and reversely move, the silicon single crystal rod 1 is separated from the two guide pipes 9, the electric push rod 17 is controlled to be started to descend, the silicon single crystal rod 1 is lowered and reset, and meanwhile, the sealing plug 12 is reset and inserted into the corresponding guide pipe 9.
The electromagnetic chuck 29 is controlled to electrically attract the iron block 32, the U-shaped plate 28 on the sliding frame 3 slides along the through groove 27, the two half ring plates 68 clamped with the external resin plate assemblies 74 move to the two ends of the silicon single crystal rod 1, the electric push rod 17 is controlled to be started to lift, the two external resin plate assemblies 74 and the silicon single crystal rod 1 are coaxially arranged, the driving motor 64 is controlled to rotate positively, the two dipping assemblies 4 are driven to synchronously move in opposite directions, and the two external resin plate assemblies 74 are bonded to the two ends of the silicon single crystal rod 1, so that stick bonding operation is completed.
It will be apparent that the embodiments described above are merely some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the application described herein may be implemented in sequences other than those illustrated or otherwise described herein.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.

Claims (1)

1. A uniform stick sticking device of a silicon single crystal stick, comprising a silicon single crystal stick (1) and a clamping frame (2) for clamping the silicon single crystal stick (1); the method is characterized in that:
A sliding frame (3) is arranged on the clamping frame (2) in a sliding manner; the sliding frame (3) is symmetrically provided with a gum dipping component (4) in a sliding way;
The gum dipping component (4) comprises a fixed plate (5) which is arranged on the sliding frame (3) in a sliding way; a U-shaped rubber storage tube (6) is fixed on the bottom surface of the fixed plate (5); epoxy resin glue (7) is contained in the U-shaped rubber storage tube (6); a piston member (8) is slidably arranged in the U-shaped rubber storage tube (6);
A guide pipe (9) matched with the silicon single crystal rod (1) is arranged on the peripheral side surface of the U-shaped rubber storage pipe (6) in a penetrating way; a guide strip (10) is fixed above the guide pipe (9) on the peripheral side surface of the U-shaped rubber storage pipe (6); a sliding piece (11) is arranged on the guide strip (10) in a sliding manner; a sealing plug (12) matched with the guide pipe (9) is slidably arranged in the sliding piece (11); l-shaped guide plates (13) are symmetrically fixed on the clamping frame (2); an inclined guide plate (14) is fixed on the side surface of the L-shaped guide plate (13) upwards at a certain inclination angle;
A connecting spring (15) sleeved on the guide strip (10) is fixed between the sliding piece (11) and the U-shaped rubber storage tube (6); in the process that the clamping frame (2) drives the silicon single crystal rod (1) to ascend, the elastic acting force of the connecting spring (15) is matched, so that the sliding frame (3) is sequentially arranged on the side surfaces of the inclined guide plate (14) and the L-shaped guide plate (13) in a sliding manner;
The clamping frame (2) comprises a mounting base (16); an electric push rod (17) is fixedly arranged on the surface of the mounting base (16); the output end of the electric push rod (17) is fixed with a U-shaped frame (18); a sliding plate (19) is fixed on the U-shaped frame (18); the mounting frames (20) are uniformly fixed on the sliding plate (19); an upper clamping plate (21) is arranged on the mounting frame (20); sliding rods (22) which are in sliding fit with the sliding plates (19) are symmetrically fixed on the two sides of the electric push rod (17) on the surface of the mounting base (16); a supporting plate (23) is fixed between the end parts of the two sliding rods (22); the surface of the supporting plate (23) is uniformly provided with a lower clamping plate (24); a servo motor (25) is fixedly arranged on the bottom surface of the supporting plate (23); the output end of the servo motor (25) is fixedly provided with a screw rod (26) which is in threaded rotation fit with the sliding plate (19);
A through groove (27) is formed in the side face of the mounting base (16); the sliding frame (3) comprises a U-shaped plate (28) which is arranged in the through groove (27) in a sliding way; an electromagnetic chuck (29) is arranged on the side surface of the mounting frame (20); an ear plate (30) is fixed on the surface of the mounting base (16); a return spring (31) is fixed between the lug plate (30) and the U-shaped plate (28); an iron block (32) is fixedly arranged on the side surface of the U-shaped plate (28);
The two L-shaped guide plates (13) are respectively fixed on the surfaces of the two upper clamping plates (21) at the outermost side; the surface of the guide strip (10) is provided with a first avoiding groove (33) which is in sliding fit with the L-shaped guide plate (13) and the inclined guide plate (14); the side surfaces of the L-shaped guide plates (13) and the inclined guide plates (14) are respectively provided with a second avoidance groove (34) which are communicated with each other; the sliding piece (11) comprises a guide frame (35) which is arranged on the guide strip (10) in a sliding way; a fixed sleeve (36) is fixed on the bottom surface of the guide frame (35); a guide rod (37) which is arranged in the second avoidance groove (34) in a sliding manner is fixed on the side surface of the fixed sleeve (36); a guide ball (38) is fixed at the end part of the guide rod (37);
a sliding plate (39) which is arranged in the fixed sleeve (36) in a sliding way is fixed on the peripheral side surface of the sealing plug (12); a mounting spring (40) is fixed between the sliding plate (39) and the inner top surface of the fixed sleeve (36);
The inner tops of the two ends of the U-shaped rubber storage tube (6) are fixedly connected with a first extrusion spring (41) and a second extrusion spring (42) respectively; the piston piece (8) comprises a piston (43) and a sliding block (44) which are slidably arranged in the U-shaped rubber storage tube (6); the first extrusion spring (41) and the second extrusion spring (42) are respectively connected with the piston (43) and the sliding block (44); a sliding hole is formed in the inner top of one end of the U-shaped rubber storage tube (6), and a vertical rod (45) is fixed at the inner top of the other end of the U-shaped rubber storage tube; a piston rod (46) which is in sliding fit with the sliding hole is fixed on the surface of the piston (43); a limiting hole (47) which is in sliding fit with the vertical rod (45) is formed in the surface of the sliding block (44);
A glue spreading roller (48) is rotatably arranged on the side surface of the sliding block (44); a connecting rope (49) is connected between the piston rod (46) and the sliding plate (19); a rope penetrating groove (50) is formed in the fixing plate (5), and an L-shaped supporting plate (51) is fixed on the surface of the fixing plate; the surface of the L-shaped supporting plate (51) is fixedly provided with a supporting rod (52); a U-shaped rope threading pipe (53) is fixed at the end part of the stay bar (52); one end of the connecting rope (49) is fixed at the end part of the piston rod (46), and the other end of the connecting rope sequentially passes through the U-shaped rope threading pipe (53) and the rope threading groove (50) and is connected to the surface of the sliding block (44);
The bottom of the U-shaped rubber storage tube (6) is communicated with a liquid inlet tube (54); the liquid inlet pipe (54) is provided with a one-way valve (55), and the end part of the liquid inlet pipe is in threaded connection with a sealing cover (56); screw holes (57) are formed in one side face of the fixed plate (5), and positioning holes (58) are symmetrically formed in the side face of the fixed plate, located on two sides of the screw holes (57); a connecting frame (59) is fixed at one end of the U-shaped plate (28); a rotating rod (60) is arranged between the inner walls of the connecting frames (59) in a penetrating and rotating way; a screw rod (61) in threaded rotation fit with the screw hole (57) is fixed at the end part of the rotating rod (60); positioning rods (62) which are in sliding fit with the positioning holes (58) are symmetrically fixed on two opposite side surfaces of the connecting frame (59); a driven gear (63) is fixed on the peripheral side surface of the rotating rod (60); a driving motor (64) is arranged on the surface of the connecting frame (59); the output end of the driving motor (64) is fixedly provided with a driving gear (65) engaged with the driven gear (63); a controller (66) is arranged on the surface of the mounting base (16); the output end of the controller (66) is electrically connected with the servo motor (25), the electromagnetic chuck (29), the electric push rod (17) and the driving motor (64) respectively;
An extension plate (67) is fixed on the peripheral side surface of the guide pipe (9); a semi-annular plate (68) is fixed on the side surface of the extension plate (67); a lower clamping plate (72) is fixed on the inner wall of the semi-ring plate (68); the surface of the extension plate (67) is rotatably provided with a screw rod (69), and guide rods (70) are symmetrically fixed on the two sides of the screw rod (69) on the surface of the extension plate; a mounting strip (71) in threaded rotation fit with the threaded rod (69) is slidably arranged between the two guide rods (70); an upper clamping plate (73) concentric with the lower clamping plate (72) is fixed on the side surface of the mounting strip (71); an external resin plate assembly (74) which is in clamping fit with the lower clamping plate (72) and the upper clamping plate (73) is arranged in the semi-ring plate (68).
CN202410805991.4A 2024-06-21 2024-06-21 Uniform stick sticking equipment for silicon single crystal stick Active CN118719448B (en)

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Application Number Priority Date Filing Date Title
CN202410805991.4A CN118719448B (en) 2024-06-21 2024-06-21 Uniform stick sticking equipment for silicon single crystal stick

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Application Number Priority Date Filing Date Title
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CN118719448B true CN118719448B (en) 2024-11-22

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CA2460542A1 (en) * 2004-03-10 2005-09-10 Kevin Hallett Cleaning tanks
CN106619582A (en) * 2017-02-21 2017-05-10 北京信义惠达机电设备有限公司 Gel plaster production system

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US6796970B1 (en) * 1997-06-17 2004-09-28 Novo Nordisk A/S Dose setting device
GB9820962D0 (en) * 1998-09-25 1998-11-18 English Glass Company The Limi Dispenser pumps
CN209406703U (en) * 2018-08-01 2019-09-20 厦门赢晟科技有限公司 A kind of printing packaging glue stations
CN112604900A (en) * 2020-12-09 2021-04-06 芜湖韩大防伪科技有限公司 Coiled material soaking device for non-setting adhesive die-cutting machine
CN215613598U (en) * 2021-09-30 2022-01-25 江苏宇太光伏科技有限公司 A device that strips for processing of single crystal silicon rod
CN115810683B (en) * 2022-12-19 2023-12-22 江苏福旭科技有限公司 High-efficiency light-absorbing monocrystalline silicon wafer

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CA2460542A1 (en) * 2004-03-10 2005-09-10 Kevin Hallett Cleaning tanks
CN106619582A (en) * 2017-02-21 2017-05-10 北京信义惠达机电设备有限公司 Gel plaster production system

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