CN118642334A - Exposure equipment - Google Patents

Abstract

The present application provides an exposure device, which includes a carrier and an exposure device; the carrier includes a support plate, a drive unit and a stage, the bottom of the support plate is supported and connected to the mounting surface through a foot, the drive unit is arranged on the top surface of the support plate, the stage is connected to the drive unit, and can move in a horizontal plane relative to the support plate under the drive of the drive unit; the exposure device includes a support frame and an exposure unit, the bottom of the support frame is supported and connected to the mounting surface through a foot, and the exposure unit is arranged on the support frame. The exposure device provided in the embodiment of the present application, its carrier (movable stage) and the exposure device are respectively supported on the ground, and are non-connected structures to each other, so the vibration of the movable stage can be avoided to affect the exposure device, thereby improving the accuracy of the exposure device.

Description

Exposure equipment

Technical Field

The present application relates to the technical field of electronic component manufacturing equipment, and specifically to an exposure device.

Background Art

In the technical solution of conventional exposure equipment, the movable worktable is generally fixedly connected to the main worktable, which causes the vibration generated by the movable worktable during movement to affect the exposure equipment on the main worktable, thereby affecting the accuracy of the exposure equipment.

Summary of the invention

An embodiment of the present application provides an exposure device, the exposure device comprising a loading device and an exposure device;

The loading device comprises a support plate, a driving unit and a loading platform, wherein the bottom of the support plate is supported and connected to the mounting surface through a foot, the driving unit is arranged on the top surface of the support plate, the loading platform is connected to the driving unit and can move relative to the support plate in a horizontal plane under the drive of the driving unit;

The exposure device comprises a support frame and an exposure unit. The bottom of the support frame is supported and connected to a mounting surface via feet, and the exposure unit is arranged on the support frame.

In some embodiments, the driving unit includes any one or a combination of a linear motor, a lead screw guide, a magnetically suspended planar motor, and an air-floating guide.

In some embodiments, the driving unit includes a sliding connection, an air-floating guide rail and a linear motor. The air-floating guide rail is fixed to the support plate and extends along a first direction. The sliding connection is cooperatively connected to the air-floating guide rail and can slide along the air-floating guide rail in the first direction. The stator of the linear motor is fixed to the sliding connection, and the mover of the linear motor is fixedly connected to the stage. The linear motor is used to drive the stage to slide along a second direction, wherein the first direction is perpendicular to the second direction.

In some embodiments, the sliding connector is provided with guide rails extending along the first direction at both ends in the second direction, and the support plate is provided with guide grooves cooperating with the guide rails.

In some embodiments, the exposure device further includes a main substrate and a vibration reduction unit, wherein the vibration reduction unit is disposed between the main substrate and the support frame; and the exposure unit is disposed on the main substrate.

In some embodiments, there are multiple vibration reduction units evenly distributed on the bottom edge of the main substrate, and the vibration reduction unit is any one or a combination of multiple of an elastic material block, a compression spring or an active vibration isolation element.

In some embodiments, the exposure unit includes an objective lens and a measuring component. The main substrate is provided with a connecting hole. The objective lens and the measuring component are arranged corresponding to the connecting hole and connected to the main substrate. The objective lens and the measuring component are used to observe the workpiece on the stage.

In some embodiments, the exposure unit further includes a lighting component and a mask component, wherein the lighting component is connected to the main substrate, and the mask component is disposed between the lighting component and the objective lens and the measuring component.

In some embodiments, the lighting assembly includes a lighting bracket, a light source connected to the lighting bracket, and a light guide.

In some embodiments, the exposure unit further includes a support platform, the support platform is disposed on the main substrate, and the mask assembly is disposed on the support platform.

The exposure device provided in the embodiment of the present application has a loading device (movable loading stage) and an exposure device which are respectively supported on the ground and are not connected to each other. Therefore, the influence of vibration generated by the movable loading stage on the exposure device can be avoided, thereby improving the accuracy of the exposure device.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

FIG1 is a schematic diagram of the overall structure of an exposure device according to an embodiment of the present application;

FIG2 is a schematic diagram of the disassembled structure of the exposure device in the embodiment of FIG1 ;

FIG3 is a schematic structural diagram of the object carrying device in this embodiment;

FIG4 is a schematic diagram of the structure disassembly of the object carrying device in the embodiment of FIG3 ;

FIG5 is a schematic structural diagram of a sliding connection member in this embodiment;

FIG. 6 is a schematic diagram of the structure of the loading platform in this embodiment.

DETAILED DESCRIPTION

The present application is further described in detail below in conjunction with the accompanying drawings and examples. It is particularly noted that the following examples are only used to illustrate the present application, but are not intended to limit the scope of the present application. Similarly, the following examples are only some embodiments of the present application rather than all embodiments, and all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

The terms "first", "second", and "third" in the embodiments of the present application are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined as "first", "second", and "third" can expressly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In the embodiments of the present application, all directional indications (such as up, down, left, right, front, back...) are only used to explain the relative position relationship, movement, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication also changes accordingly. The terms "including" and "having" in the embodiments of the present application and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units that are not listed, or optionally also includes other steps or components inherent to these processes, methods, products, or devices.

Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

An embodiment of the present application provides an exposure device. Please refer to Figures 1 and 2 together. Figure 1 is a schematic diagram of the overall structure of an embodiment of the exposure device of the present application, and Figure 2 is a schematic diagram of the disassembled structure of the exposure device in the embodiment of Figure 1; the exposure device in this embodiment includes but is not limited to the following structures: a carrier device 100 and an exposure device 200.

Specifically, please refer to Figures 3 and 4 together. Figure 3 is a schematic diagram of the structure of the carrying device in this embodiment, and Figure 4 is a schematic diagram of the structural disassembly of the carrying device in the embodiment of Figure 3. The carrying device 100 includes a support plate 110, a drive unit 120 and a loading platform 130. The bottom of the support plate 110 is supported and connected to a mounting surface (specifically, it can be the ground or the surface of a mounting platform, etc., which is not specifically limited here) through a foot 111. The drive unit 120 is arranged on the top surface of the support plate 110. The loading platform 130 is connected to the drive unit 120 and can move in a horizontal plane relative to the support plate 110 under the drive of the drive unit 120.

The driving unit 120 in this embodiment can be any one or a combination of a linear motor, a lead screw guide, a magnetic suspension planar motor, an air-floating guide, etc. In this embodiment, a linear motor combined with an air-floating guide structure is used as an example for description.

Optionally, the driving unit 120 in this embodiment includes a sliding connection 121, an air-floating guide rail 122, and a linear motor 123. The air-floating guide rail 122 is fixed to the support plate 110 and extends along a first direction (direction X in the figure). The sliding connection 121 is connected with the air-floating guide rail 122 and can slide in the first direction along the air-floating guide rail 122. Specifically, a matching groove 1210 is provided at the bottom of the sliding connection 121, and the matching groove 1210 is connected with the air-floating guide rail 122.

Please refer to Figures 5 and 6 together. Figure 5 is a schematic diagram of the structure of the sliding connection member in this embodiment, and Figure 6 is a schematic diagram of the structure of the stage in this embodiment. The stator 1231 of the linear motor 123 is fixedly arranged on the top of the sliding connection member 121, and the stage 130 forms a through-containment frame 1300. The mover 1232 of the linear motor 123 is fixedly connected to the stage 130 and arranged in the containment frame 1300. The linear motor 123 is used to drive the stage 130 to slide along the second direction (Y direction in the figure), wherein the first direction is perpendicular to the second direction. In this way, the displacement control of the stage 130 in the plane is realized.

Optionally, please continue to refer to Figures 3 and 5. In this embodiment, the sliding connector 121 is provided with guide rails 1211 extending along the first direction at both ends in the second direction, and the support plate 110 is provided with a guide groove 1101 that cooperates with the guide rail 1211. The guide rail 1211 cooperates with the guide groove 1101 to guide the sliding connector 121 in the second direction.

The object carrier 100 and the exposure device 200 in this embodiment are independent structures, and both can be debugged, maintained and serviced separately, thus saving manpower and time costs.

Please continue to refer to Figures 3 and 4. The loading device 100 in this embodiment may include a plurality of air cushions 150. The air cushions 150 are used to form a gap between the support plate 110 and the support surface (which may be the ground), so as to facilitate the overall removal of the loading device 100 and facilitate the maintenance and installation of the loading device 100.

Optionally, please continue to refer to FIG. 1 and FIG. 2 , the exposure device 200 in this embodiment includes a support frame 210 and an exposure unit 220, the bottom of the support frame 210 is supported and connected to a mounting surface (specifically, it can be the ground or the surface of a mounting table, etc., which is not specifically limited here) through a foot 211, and the exposure unit 220 is arranged on the support frame 210. Among them, the spacer block 102 in the figure is used for auxiliary installation and positioning between the support plate 110 of the carrier device 100 and the support frame 210 of the exposure device 200, and can be removed after the installation is completed, so that the support plate 110 of the carrier device 100 and the support frame 210 of the exposure device 200 are arranged with a spacing (non-contact).

Optionally, the exposure device 200 in this embodiment further includes a main substrate 230 and a vibration reduction unit 240, wherein the vibration reduction unit 240 is disposed between the main substrate 230 and the support frame 210; and the exposure unit 220 is disposed on the main substrate 230. Optionally, there may be a plurality of vibration reduction units 240, evenly distributed on the bottom edge of the main substrate 230, and the vibration reduction unit 230 may be a passive vibration isolation element such as an elastic material block (such as a rubber block) or a compression spring, and may also be an active vibration isolation element (such as a vibration isolator, etc.), which is not specifically limited here. The function of the vibration reduction unit 230 is to block the vibration between the main substrate 230 and the support frame 210. The parallelism between the main substrate 230 and the ground can be ensured by adjusting the foot.

Optionally, the exposure unit 220 in this embodiment may include an objective lens and measurement assembly 221, an illumination assembly 222, and a mask assembly 223. Specifically, a connection hole 2300 is provided on the main substrate 230, and the objective lens and measurement assembly 221 is arranged corresponding to the connection hole 2300 and connected to the main substrate 230. The objective lens and measurement assembly 221 and the main substrate 230 may be connected through a flange structure 2210, thereby realizing the position adjustment of the objective lens and measurement assembly 210 relative to the main substrate 230 and realizing the verticality adjustment of the objective lens and measurement assembly 221 to the ground. The objective lens and measurement assembly 221 is used to observe the workpiece on the stage 130.

The lighting assembly 222 is connected to the main substrate 230, and the mask assembly 223 is disposed between the lighting assembly 222 and the objective lens and measurement assembly 221. Optionally, the exposure unit 220 in this embodiment further includes a support table 250, the support table 250 is disposed on the main substrate 230, and the mask assembly 223 is disposed on the support table 250, which can ensure the parallelism between the mask assembly 223 and the ground, wherein the mask assembly 223 may specifically include a mask platen and a mask.

Optionally, the lighting assembly 222 in this embodiment may include a lighting bracket 2221, a light source connected to the lighting bracket 2221, and a light guide 2222, and the light source and the light guide 2222 may be arranged inside the lighting bracket 2221. In addition, a sub-supporting platform 256 may be arranged on the supporting platform 250 in this embodiment, and the sub-supporting platform 256 may be arranged on the supporting platform 250 for supporting the lighting bracket 2221. The lighting bracket 2221 supports the light source and the light guide 2222 inside, and the influence of vibration on the light source may be reduced.

The exposure device provided in the embodiment of the present application has a loading device (movable loading stage) and an exposure device which are respectively supported on the ground and are not connected to each other. Therefore, the influence of vibration generated by the movable loading stage on the exposure device can be avoided, thereby improving the accuracy of the exposure device.

The above descriptions are only some embodiments of the present application, and do not limit the protection scope of the present application. Any equivalent device or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims (10)

1. An exposure apparatus, characterized in that the exposure apparatus comprises a carrying device and an exposure device;

The object carrying device comprises a supporting plate, a driving unit and an object stage, wherein the bottom of the supporting plate is in supporting connection with a mounting surface through a foot margin, the driving unit is arranged on the top surface of the supporting plate, and the object stage is connected with the driving unit and can move in a horizontal plane relative to the supporting plate under the driving of the driving unit;

The exposure device comprises a support frame and an exposure unit, wherein the bottom of the support frame is connected with the mounting surface through a foundation, and the exposure unit is arranged on the support frame.

2. The exposure apparatus according to claim 1, wherein the driving unit includes any one or a combination of a plurality of linear motors, screw guide rails, magnetic levitation planar motors, air-levitation guide rails.

3. The exposure apparatus according to claim 2, wherein the driving unit includes a sliding connection member, an air-floating guide rail, and a linear motor, the air-floating guide rail is fixedly disposed on the support plate and extends along a first direction, the sliding connection member is connected with the air-floating guide rail in a matching manner, and is slidable along the air-floating guide rail in the first direction, a stator of the linear motor is fixedly disposed on the sliding connection member, a mover of the linear motor is fixedly connected with the stage, and the linear motor is used for driving the stage to slide along a second direction, wherein the first direction is perpendicular to the second direction.

4. An exposure apparatus according to claim 3, wherein both ends of the sliding connection in the second direction are respectively provided with guide rails extending in the first direction, and the support plate is provided with guide grooves that are fitted with the guide rails.

5. The exposure apparatus according to claim 1, wherein the exposure device further comprises a main substrate and a vibration reduction unit provided between the main substrate and the support frame; the exposure unit is arranged on the main substrate.

6. The exposure apparatus according to claim 5, wherein the vibration damping units are a plurality of and uniformly distributed on the bottom edge of the main substrate, and the vibration damping units are any one or a combination of a plurality of elastic material blocks, compression springs or active vibration isolation elements.

7. The exposure apparatus according to claim 5, wherein the exposure unit includes an objective lens and a measuring member provided with a connection hole on the main substrate, the objective lens and the measuring member being provided corresponding to the connection hole and connected to the main substrate, the objective lens and the measuring member being configured to observe a workpiece on the stage.

8. The exposure apparatus according to claim 7, wherein the exposure unit further comprises an illumination assembly connected to the main substrate and a mask assembly provided between the illumination assembly and the objective lens and the measuring assembly.

9. The exposure apparatus according to claim 8, wherein the illumination assembly includes an illumination bracket and a light source and a light guide connected to the illumination bracket.

10. The exposure apparatus according to claim 8, wherein the exposure unit further comprises a support table provided on the main substrate, the mask assembly being provided on the support table.