CN118642274B - Beam shaping device and beam shaping mirror adjustment method - Google Patents

Abstract

The present invention discloses a beam shaping device and a beam shaping mirror adjustment method, which relate to the field of laser technology. The beam shaping device includes a first optical component and a second optical component arranged opposite to the first optical component. After the light beam enters the first optical component, it passes through the first optical component and the second optical component in sequence and is emitted from the second optical component; both the first optical component and the second optical component are aspherical cylindrical mirrors; the first optical component is used to deflect the incident light so that the light beam is evenly distributed when entering the second optical component, and the second optical component is used to collimate the light beam so that the outgoing light emitted from the second optical component propagates in a straight line. The technical solution of the present invention has a small number of overall optical elements, a short system length, and is easy to integrate; and a square or rectangular flat-top beam can be directly obtained without aperture diaphragm cutting, and the light energy utilization rate is high, thereby improving the shaping quality of the laser.

Description

Beam shaping device and beam shaping mirror adjustment method

Technical Field

The present invention relates to the field of laser technology, and in particular to a beam shaping device and a beam shaping mirror adjustment method.

Background Art

Lasers are used in many technical fields such as welding, cladding, and cutting. However, the unique Gaussian intensity distribution of lasers often causes unnecessary energy loss and introduces errors in processing. Therefore, it is usually necessary to use a beam shaping device to modulate the Gaussian circular spot into a uniform spot with equal intensity distribution to meet application requirements.

At present, Gaussian beam shaping methods mainly include diffraction elements, liquid crystal spatial light modulation, aspheric mirrors, etc. Among them, the refractive aspheric lens group has attracted widespread attention due to its advantages such as high light energy utilization, good shaping effect, easy processing, and suitability for high-power lasers.

Generally speaking, refractive aspheric lens shaping devices can be divided into Galileo type and Kepler type. The Galileo type has no air ionization phenomenon because there is no beam convergence point, which is suitable for high-power laser shaping. The output spot size of the traditional Galileo aspheric mirror is much larger than the input beam size. To obtain a small-size output beam, an additional beam reduction element is required, but this will lead to an increase in the number of shaping device elements and the length of the optical system, which is not conducive to integration and application in length-limited optical systems. In addition, traditional Galileo aspheric mirrors generally output circular flat-top beams. If you want to obtain a square or rectangular beam, you need to use additional elements such as aperture diaphragms to cut the circular beam, which will not only lose part of the laser energy and reduce the utilization rate of light energy, but also produce uneven diffraction distribution at the edge of the beam, thereby destroying the uniformity of the beam.

In addition, the beam quality of high-power lasers is usually poor, and traditional Galilean aspheric mirrors are generally used for Gaussian lasers with good beam quality factors (M ² ) and M ² close to 1. For lasers with larger M ² , there is a problem of poor shaping quality.

Summary of the invention

The main purpose of the present invention is to provide a beam shaping device and a beam shaping mirror adjustment method, aiming to solve the technical problem of poor laser shaping quality for larger ^M2 in the prior art.

To achieve the above-mentioned object, the present invention provides a beam shaping device, the beam shaping device comprising a first optical component and a second optical component arranged opposite to the first optical component, after the light beam enters the first optical component, it passes through the first optical component and the second optical component in sequence and is emitted from the second optical component; the first optical component and the second optical component are both aspherical cylindrical lenses;

The first optical component is used to deflect incident light so that the light beam is evenly distributed when entering the second optical component, and the second optical component is used to collimate the light beam so that the outgoing light emitted from the second optical component propagates in a straight line.

In one embodiment, the first optical component comprises:

A first lens, wherein the first lens has a first mirror surface and a second mirror surface;

A second lens, wherein the second lens has a third mirror surface and a fourth mirror surface;

Wherein, the first mirror, the second mirror, the third mirror and the fourth mirror are arranged in sequence along the propagation direction of the light beam;

The second mirror surface and the fourth mirror surface are both convex aspherical cylindrical surfaces, and the second mirror surface and the fourth mirror surface are arranged perpendicular to each other.

In one embodiment, the second optical component comprises:

A third lens, wherein the third lens has a fifth mirror surface and a sixth mirror surface;

a fourth lens, wherein the fourth lens has a seventh mirror surface and an eighth mirror surface;

Wherein, the fifth mirror, the sixth mirror, the seventh mirror and the eighth mirror are sequentially arranged along the propagation direction of the light beam;

The fifth mirror surface and the seventh mirror surface are both concave aspherical cylindrical surfaces, and the fifth mirror surface and the seventh mirror surface are arranged perpendicular to each other.

In one embodiment, the beam shaping mirror adjustment method is applied to the beam shaping device as described above, and the beam shaping mirror adjustment method includes:

Acquire a first beam size of incident light and a second beam size of outgoing light;

The mirror shape of the first optical component and the mirror shape of the second optical component are adjusted respectively according to the first beam size and the second beam size, so that the light of the outgoing light is evenly distributed and the outgoing light is kept propagating in a straight line.

In one embodiment, the first optical component includes a first lens and a second lens, and the second optical component includes a third lens and a fourth lens;

The steps of adjusting the mirror shape of the first optical component and the mirror shape of the second optical component respectively according to the first beam size and the second beam size include:

Calculate a first surface sag of the light beam in the X-axis direction and a second surface sag of the light beam in the Y-axis direction according to the first light beam size and the second light beam size;

Adjusting the mirror shapes of the first lens and the third lens respectively according to the first surface profile sagittal height;

The mirror shapes of the second lens and the fourth lens are adjusted respectively according to the second surface sag.

In one embodiment, the step of adjusting the mirror shapes of the first lens and the third lens respectively according to the first surface sag includes:

Obtaining the coordinates of a first singular point on the first surface profile sagittal height;

Modifying the first surface profile sagitta according to the first singular point coordinates;

The mirror shapes of the first lens and the third lens are adjusted according to the modified first surface profile sagittal height.

In one embodiment, the step of modifying the first surface profile sagittal height according to the first singular point coordinates includes:

Obtain the coordinates (A, B) to be adjusted on the first surface profile sagittal height, wherein the coordinates of the first singular point are (a, b), then A＞a;

Calculate the adjusted coordinates (A', B') according to the coordinates to be adjusted and the first singular point coordinates, where A'=A, B'=b-B;

The coordinates to be adjusted on the first surface vector height are replaced by the adjustment coordinates.

In one embodiment, the step of adjusting the mirror shapes of the first lens and the third lens according to the modified first surface profile sag includes:

Obtaining a function image of the modified first surface profile sagittal height in a coordinate system;

Acquire a mirror image according to the function image;

The mirror shapes of the first lens and the third lens are adjusted according to the mirror image.

In one embodiment, the step of acquiring a mirror image according to the function image comprises:

Taking the X-axis as the axis of symmetry, draw a symmetric image of the function image;

The mirror image is made according to the function image and the symmetric image.

In one embodiment, the step of adjusting the mirror shapes of the second lens and the fourth lens respectively according to the second surface profile sag comprises:

Obtaining coordinates of a second singular point on the sagittal height of the second surface profile;

Modifying the second surface profile sagitta according to the second singular point coordinates;

The mirror shapes of the second lens and the fourth lens are adjusted according to the modified second surface profile sagittal height.

The technical solution of the present invention shapes the Gaussian distribution of the incident light into a flat-top distribution through the first optical component, and collimates the output of the outgoing light through the second optical component, thereby directly outputting a square or rectangular flat-top beam with a zoom ratio less than 1. The overall number of optical elements is small, the system length is short, and it is easy to integrate; and a square or rectangular flat-top beam can be directly obtained without aperture diaphragm cutting, with high light energy utilization and improved laser shaping quality.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

FIG1 is a schematic structural diagram of an embodiment of a beam shaping device of the present invention;

FIG2 is a schematic structural diagram of another embodiment of the beam shaping device of the present invention;

FIG3 is a schematic diagram of a first shaping effect in the beam shaping device of the present invention;

FIG4 is a schematic diagram of a second shaping effect in the beam shaping device of the present invention;

FIG5 is a schematic diagram of a third shaping effect in the beam shaping device of the present invention;

FIG6 is a schematic diagram of a fourth shaping effect in the beam shaping device of the present invention;

7 is a schematic flow chart of a first embodiment of a beam shaping mirror adjustment method according to the present invention;

FIG8 is a schematic flow chart of a second embodiment of a beam shaping mirror adjustment method according to the present invention;

9 is a schematic flow chart of a third embodiment of a method for adjusting a beam shaping mirror according to the present invention;

10 is a schematic flow chart of a fourth embodiment of a method for adjusting a beam shaping mirror according to the present invention;

FIG11 is a schematic flow chart of a fifth embodiment of a beam shaping mirror adjustment method according to the present invention;

FIG12 is a schematic flow chart of a sixth embodiment of a beam shaping mirror adjustment method according to the present invention;

FIG13 is a schematic diagram of the original surface height of the beam shaping mirror adjustment method of the present invention;

FIG. 14 is a schematic diagram of the first surface height of the beam shaping mirror adjustment method of the present invention.

Description of Figure Numbers:

The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings.

DETAILED DESCRIPTION

The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and/or" or "and/or" appears in the full text, its meaning includes three parallel solutions. Taking "A and/or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

The present invention provides a beam shaping device, which includes a first optical component 10 and a second optical component 20 arranged opposite to the first optical component 10. After the light beam enters the first optical component 10, it passes through the first optical component 10 and the second optical component 20 in sequence and is emitted from the second optical component 20; the first optical component 10 and the second optical component 20 are both aspherical cylindrical lenses; wherein the first optical component 10 is used to deflect the incident light so that the light beam is evenly distributed when entering the second optical component 20, and the second optical component 20 is used to collimate the light beam so that the outgoing light emitted from the second optical component 20 propagates along a straight line.

The light beam first passes through the first optical component 10 and then enters the second optical component 20, and then exits after passing through the second optical component 20. FIG1 shows the change in the propagation direction of the light beam after passing through the first optical component 10 and the second optical component 20 respectively when the light beam is irradiated from left to right.

It can be understood that the laser is emitted by a laser, and the light beam emitted by the laser is a Gaussian beam or a quasi-Gaussian beam, and the light beam is composed of multiple light rays.

First, a light beam as incident light enters the first optical component 10 from the left side of the first optical component 10. The right side surface of the first optical component 10 is an aspherical cylinder. When the incident light passes through the first optical component 10 and exits from the right side of the first optical component 10, the light is deflected to form multiple refracted light rays.

Since the right surface of the first optical component 10 is an aspherical cylinder, the light is refracted after passing through the first optical component 10, resulting in the light being rearranged in space. Specifically, the light in the center area of the Gaussian beam will be deflected toward its edge, and the light in the edge area of the Gaussian beam will be deflected toward its center.

The degree of light deflection is related to the size of the output flat-top beam, that is, the size of the output light. Specifically, for a larger flat-top beam, more central rays are deflected toward the edge, and for a smaller flat-top beam, more edge rays are deflected toward the center.

After the refracted light passes a distance d, the spatial light density distribution becomes uniform. It should be noted that the distance d between the first optical component 10 and the second optical component 20 can be adjusted according to the optical system length requirement and the size of the beam size to ensure that the spatial light density is uniform after passing the distance d.

Specifically, the distance d can be tested and adjusted through simulation to determine the most suitable distance that meets the system length requirements and corresponds to the beam size.

The left surface of the second optical component 20 is an aspherical cylinder. When light enters the second optical component 20 from the left side, it is refracted again when passing through the left side of the second optical component 20. Due to the refraction effect of the aspherical cylinder, the light density distribution no longer changes. The light after refraction is collimated to output a uniform flat-top beam, that is, the output light is a flat-top beam propagating along a straight line.

The technical solution of the present invention shapes the Gaussian distribution of the incident light into a flat-top distribution through the first optical component 10, and collimates the output of the outgoing light through the second optical component 20, thereby directly outputting a square or rectangular flat-top beam with a zoom ratio less than 1. The overall number of optical elements is small, the system length is short, and it is easy to integrate; and a square or rectangular flat-top beam can be directly obtained without aperture diaphragm cutting, with high light energy utilization and improved laser shaping quality.

In one embodiment, the first optical component 10 includes a first lens 11 and a second lens 12, the first lens 11 has a first mirror surface 31 and a second mirror surface 32; the second lens 12 has a third mirror surface 33 and a fourth mirror surface 34; wherein the first mirror surface 31, the second mirror surface 32, the third mirror surface 33 and the fourth mirror surface 34 are arranged in sequence along the propagation direction of the light beam; the second mirror surface 32 and the fourth mirror surface 34 are both convex aspherical cylinders, and the second mirror surface 32 and the fourth mirror surface 34 are arranged perpendicular to each other.

The second optical component 20 includes a third lens 21 and a fourth lens 22, the third lens 21 has a fifth mirror surface 35 and a sixth mirror surface 36; the fourth lens 22 has a seventh mirror surface 37 and an eighth mirror surface 38; wherein the fifth mirror surface 35, the sixth mirror surface 36, the seventh mirror surface 37 and the eighth mirror surface 38 are sequentially arranged along the propagation direction of the light beam; the fifth mirror surface 35 and the seventh mirror surface 37 are both concave aspherical cylinders, and the fifth mirror surface 35 and the seventh mirror surface 37 are arranged perpendicular to each other.

Please refer to Figure 1 and Figure 2, Figure 1 is the main perspective, and Figure 2 is the top perspective. The first lens 11, the second lens 12, the third lens 21 and the fourth lens 22 are arranged from left to right. The left side of the first lens 11 is the first mirror surface 31, and the right side is the second mirror surface 32; the left side of the second lens 12 is the third mirror surface 33, and the right side is the fourth mirror surface 34; the left side of the third lens 21 is the fifth mirror surface 35, and the right side is the sixth mirror surface 36; the left side of the fourth lens 22 is the seventh mirror surface 37 and the right side is the eighth mirror surface 38.

Among them, the first lens 11 and the second lens 12 are both plano-convex aspheric cylindrical lenses, the second mirror surface 32 and the fourth mirror surface 34 are convex aspheric cylindrical surfaces; the third lens 21 and the fourth lens 22 are both plano-concave aspheric cylindrical lenses, the fifth mirror surface 35 and the seventh mirror surface 37 are concave aspheric cylindrical surfaces. The remaining mirror surfaces are all planes.

To establish a spatial coordinate system, please refer to the axial markings in Figures 1 and 2. The first lens 11 and the second lens 12 are arranged vertically, that is, the second lens 12 rotates 90 degrees to the left or right relative to the first lens 11 with the Z axis as the rotation axis. Similarly, the third lens 21 and the fourth lens 22 are arranged vertically.

The first lens 11 and the second lens 12 are closely arranged, and the distance between them is in the micrometer level, which can be ignored in actual operation. Similarly, the third lens 21 and the fourth lens 22 are closely arranged.

The distance between the first lens 11 and the third lens 21 is d, so as to ensure that after the light beam passes through the fourth mirror 34 and travels a distance d, the spatial light is evenly distributed and incident on the fifth mirror 35. The distance between the second lens 12 and the fourth lens 22 is similarly set to d.

In this embodiment, the incident light enters the first lens 11 after passing through the first mirror surface 31 and is emitted from the second mirror surface 32. The Gaussian distribution of the incident light in the X-axis direction is shaped into a flat-top distribution by the first lens 11. The light beam continues to enter the second lens 12 from the third mirror surface 33 and is emitted from the fourth mirror surface 34. The Gaussian distribution of the incident light in the Y-axis direction is shaped into a flat-top distribution by the second lens 12.

According to the size and shape of the emitted light, the second mirror surface 32 and the fourth mirror surface 34 can be set to be the same or different. For example, when the emitted light beam needs to be square, the second mirror surface 32 and the fourth mirror surface 34 can be kept consistent.

After the light beam is emitted from the second lens 12, it reaches the fifth mirror surface 35 after a distance d, and enters the third lens 21 from the fifth mirror surface 35, and then exits from the sixth mirror surface 36 after passing through the third lens 21. The incident light is collimated and output in the X direction by the third lens 21. The light beam continues to enter the fourth lens 22 from the seventh mirror surface 37, and exits from the eighth mirror surface 38, and the incident light is collimated and output in the Y direction by the fourth lens 22. Similarly, the surface shapes of the fifth mirror surface 35 and the seventh mirror surface 37 can be set to be the same or different.

This embodiment has a simple structure and can achieve the shaping of the incident light and the collimated output of the outgoing light by only setting four lenses.

In a preferred embodiment, the incident light is an ultraviolet laser with Gaussian distribution, with a wavelength λ=343nm, a beam waist radius _w0 =1.7mm, a beam quality factor ^M2 =1, and a spacing d=300mm between the first lens 11 and the third lens 21. Referring to FIG3 , the intensity distribution result of a square flat-top beam with a half-peak width W=1mm is shown. The ratio of the half-peak width W of the output beam to the beam waist radius w0 of the incident beam is the beam scaling ratio. For the square flat-top beam of this embodiment, the scaling ratio R≈0.59.

In another preferred embodiment, a larger square flat-top beam can be output, the incident light is a Gaussian-distributed ultraviolet laser with a wavelength λ=343nm, a beam waist radius w ₀ =1.7mm, a beam quality factor M ² =1, and a distance d=300mm between the first lens 11 and the third lens 21. Referring to FIG. 4 , the intensity distribution result of a square flat-top beam with a half-peak width of W=1.2mm is shown, and the beam scaling ratio R=W/ w ₀ ≈0.71.

In another preferred embodiment, a rectangular flat-top beam can be output, the incident light is a Gaussian-distributed ultraviolet laser, the wavelength λ=343nm, the beam waist radius w ₀ =1.7mm, the beam quality factor M ² =1, the distance d=300mm between the first lens 11 and the third lens 21, and FIG5 shows the intensity distribution result of a rectangular flat-top beam with a half-peak width W _X =1.3mm in the X direction and a half-peak width W _Y =1mm in the Y direction. The X-direction beam scaling ratio _RX =W _X /w ₀ ≈0.76, and the Y-direction beam scaling ratio _RY =W _Y /w ₀ ≈0.59.

In another preferred embodiment, it can also be applied to multi-mode laser shaping with poor beam quality, and is robust to changes in M ^2. Gaussian lasers with beam quality factors M ² = 1.5, 5, and 10 are used to irradiate the same shaping device, the laser wavelength is λ = 343 nm, and the beam waist radius is w ₀ = 1.7 mm. Referring to FIG. 6 , the shaping effects of lasers with different M ² are shown. It can be seen from the figure that when M ² ≤ 10, as the beam quality deteriorates, a stable rectangular flat-top beam output can still be obtained, and the intensity distribution of the flat-top beam changes slightly. The half-peak width in the X direction is approximately equal to W _X = 1.3 mm, the half-peak width in the Y direction is approximately equal to W _Y = 1 mm, the beam scaling ratio in the X direction is _RX = W _X / w ₀ ≈ 0.76, and the beam scaling ratio in the Y direction is _RY = W _Y / w _{0 ≈} 0.59.

In addition, this embodiment is not only applicable to lasers with larger M ² , but also has robustness to laser applications with unstable beam quality.

In order to solve the above problem, the present invention further proposes a beam shaping mirror adjustment method, which is applied to the beam shaping device as described above.

Please refer to FIG. 7 , which is a flow chart of a first embodiment of a beam shaping mirror adjustment method according to the present invention. The beam shaping mirror adjustment method comprises the following steps:

Step S10: obtaining a first beam size of the incident light and a second beam size of the outgoing light;

Step S20: adjusting the mirror shape of the first optical component 10 and the mirror shape of the second optical component 20 according to the first beam size and the second beam size respectively.

In order to meet different usage requirements, the shape and size of the emitted light are different according to different usage requirements. Therefore, before use, the mirror surfaces of the first optical component 10 and the second optical component 20 need to be adjusted respectively to meet the requirement that the emitted light can form beams of various shapes and sizes.

For a Gaussian beam with a denser center intensity distribution, please refer to Figure 13. First, according to the law of conservation of energy and the ray tracing formula, the original surface vector height of the mirror corresponding to the X-axis and Y-axis directions can be obtained. The original surface vector height is the function image in Figure 13, wherein the X-axis in Figure 13 corresponds to the X-axis in Figure 1, and the Z-axis in Figure 13 corresponds to the Z-axis in Figure 1.

The mirror surfaces of the first optical component 10 and the second optical component 20 are adjusted respectively according to the original surface vector height.

It should be noted that deriving the surface elevation based on the law of conservation of energy and the ray tracing formula is a relatively mature technical method in this field and will not be elaborated here.

Further, please refer to FIG. 8 , which is a flow chart of a second embodiment of a beam shaping mirror adjustment method according to the present invention, wherein step S20 includes:

Step S21: calculating a first surface sag of the light beam in the X-axis direction and a second surface sag of the light beam in the Y-axis direction according to the first light beam size and the second light beam size respectively;

Step S22: adjusting the mirror shapes of the first lens 11 and the third lens 21 respectively according to the first surface profile sagittal height;

Step S23: adjusting the mirror shapes of the second lens 12 and the fourth lens 22 respectively according to the second surface sag. It should be noted that the mirror shapes of the first lens 12 and the fourth lens 22 correspond to different second surface sags.

It should be noted that when the surface sag is derived by the law of conservation of energy and the ray tracing formula, two different surface sags are output for the first lens 11 and the third lens 21, that is, according to the different uses of the first lens 11 and the third lens 21, two different first surface sag results are output respectively. When the mirror is actually adjusted, it can be adjusted according to the corresponding output results.

Similarly, according to the different uses of the second lens 12 and the fourth lens 22, they respectively output two different second surface profile sagittal height results. These are relatively mature technical methods in the field and will not be described in detail here.

According to the above-mentioned beam shaping device, it is easy to know that the first optical component 10 includes a first lens 11 and a second lens 12. Correspondingly, the second mirror surface 32 on the first lens 11 is adjusted according to the original surface sag corresponding to the X-axis direction, and the fourth mirror surface 34 on the second lens 12 is adjusted according to the original surface sag corresponding to the Y-axis direction. After the incident light passes through the first lens 11 and the second lens 12, its Gaussian distribution in the X-axis direction and the Y-axis direction is shaped into a flat-top distribution.

Further, please refer to FIG. 9 , which is a flow chart of a third embodiment of a beam shaping mirror adjustment method according to the present invention, wherein step S22 includes:

Step S221: obtaining the coordinates of the first singular point on the first surface profile sagittal height;

Step S222: modifying the first surface profile sagittal height according to the first singular point coordinates;

Step S223: adjusting the mirror shapes of the first lens 11 and the third lens 21 according to the modified first surface profile sagittal height.

In this embodiment, since the size of the outgoing light is smaller than the size of the incident light, there is a singular point of gradient mutation in the original surface height, which makes the processing difficulty of the aspheric mirror increased. In order to improve the processing efficiency, this embodiment further improves the original surface height.

Please refer to Figure 14, where the X-axis in Figure 14 corresponds to the X-axis in Figure 1, and the Z-axis in Figure 14 corresponds to the Z-axis in Figure 1. Take the singular point as the split point, for example, take the coordinate value of the singular point as (a, b), and then adjust the coordinates (A, B) to be adjusted on the first surface height. Among them, the X-axis coordinate value A of the coordinate to be adjusted is greater than the X-axis coordinate value a of the singular point, that is, A＞a.

The portion of the first surface vector height that is less than the X-axis coordinate value a of the singular point remains unchanged. Please refer to Figure 14 and flip the Z-axis value B in the coordinate to be adjusted downward to obtain the adjusted coordinate (A’, B’). Among them, A’=A, B’=b-B.

In this embodiment, the first lens 11 and the third lens 21 are adjusted according to the modified first surface profile sagittal height, thereby improving the processing efficiency of the mirror surface.

Further, please refer to FIG. 10 , which is a flow chart of a fourth embodiment of a beam shaping mirror adjustment method according to the present invention, wherein step S223 includes:

Step S2231: obtaining a function image of the modified first surface profile vector height in a coordinate system;

Step S2232: obtaining a mirror image according to the function image;

Step S2233: adjusting the mirror shapes of the first lens 11 and the third lens 21 according to the mirror image.

After adjusting the first surface vector height, please refer to Figure 14. Figure 14 is the function image of the first surface vector height after modification in the coordinate system. According to the function image, its X-axis corresponds to the X-axis in Figure 1, and the shape of the second mirror surface 32 is convexly polished along the Z-axis according to the lines of the function image, and the shape of the fifth mirror surface 35 is concavely polished along the Z-axis according to the lines of the function image.

Further, please refer to FIG. 11 , which is a flow chart of a fifth embodiment of a beam shaping mirror adjustment method according to the present invention, wherein step S2232 includes:

Step S22321: draw a symmetric image of the function image with the X axis as the symmetry axis;

Step S22322: Make the mirror image based on the function image and the symmetric image.

The first mirror surface 31 and the fifth mirror surface 35 are axisymmetric figures. Correspondingly, when processing the mirror surface, the X-axis is used as the symmetry axis. After processing, a mirror image formed with the X-axis as the symmetry axis is obtained. The first mirror surface 31 and the fifth mirror surface 35 are polished respectively according to the mirror image.

Further, please refer to FIG. 12 , which is a flow chart of a sixth embodiment of the beam shaping mirror adjustment method of the present invention, wherein step S23 includes:

Step S231: obtaining the coordinates of a second singular point on the sagittal height of the second surface profile;

Step S232: modifying the second surface profile sagittal height according to the second singular point coordinates;

Step S233: adjusting the mirror shapes of the second lens 12 and the fourth lens 22 according to the modified second surface profile sagittal height.

Since the surface sag heights of the first lens 11 and the second lens 12 are independently designed, corresponding to the shaping of the X-axis and the Y-axis respectively, the problem of beam distortion is prone to occur when the two are used in combination to output a rectangular flat-top beam. Therefore, after step S233, the following is also included:

Step S234: Optimizing the first surface profile sagitta and the second surface profile sagitta according to parameters such as the size of the emitted light beam and the intensity distribution, so as to further improve the shaping effect of the light beam.

The above description is only a preferred embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly/indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims (8)

1. A beam shaping device, characterized in that the beam shaping device comprises a first optical component and a second optical component arranged opposite to the first optical component, and after the light beam enters the first optical component, it passes through the first optical component and the second optical component in sequence and is emitted from the second optical component; the first optical component and the second optical component are both aspherical cylindrical lenses; The first optical component is used to deflect the incident light so that the light beam is evenly distributed when entering the second optical component, and the second optical component is used to collimate the light beam so that the outgoing light emitted from the second optical component propagates in a straight line; The first optical component comprises: A first lens, wherein the first lens has a first mirror surface and a second mirror surface; A second lens, wherein the second lens has a third mirror surface and a fourth mirror surface; Wherein, the first mirror, the second mirror, the third mirror and the fourth mirror are arranged in sequence along the propagation direction of the light beam; The second mirror surface and the fourth mirror surface are both convex aspherical cylindrical surfaces, and the second mirror surface and the fourth mirror surface are arranged perpendicular to each other; The second optical component comprises: A third lens, wherein the third lens has a fifth mirror surface and a sixth mirror surface; a fourth lens, wherein the fourth lens has a seventh mirror surface and an eighth mirror surface; Wherein, the fifth mirror, the sixth mirror, the seventh mirror and the eighth mirror are sequentially arranged along the propagation direction of the light beam; The fifth mirror surface and the seventh mirror surface are both concave aspherical cylindrical surfaces, and the fifth mirror surface and the seventh mirror surface are arranged perpendicular to each other. 2. A method for adjusting a beam shaping mirror, characterized in that the method for adjusting a beam shaping mirror is applied to the beam shaping device according to claim 1, and the method for adjusting a beam shaping mirror comprises: Acquire a first beam size of incident light and a second beam size of outgoing light; The mirror shape of the first optical component and the mirror shape of the second optical component are adjusted respectively according to the first beam size and the second beam size, so that the light of the outgoing light is evenly distributed and the outgoing light is kept propagating in a straight line. 3. The beam shaping mirror adjustment method according to claim 2, wherein the first optical component comprises a first lens and a second lens, and the second optical component comprises a third lens and a fourth lens; The steps of adjusting the mirror shape of the first optical component and the mirror shape of the second optical component respectively according to the first beam size and the second beam size include: Calculate a first surface sag of the light beam in the X-axis direction and a second surface sag of the light beam in the Y-axis direction according to the first light beam size and the second light beam size; Adjusting the mirror shapes of the first lens and the third lens respectively according to the first surface profile sagittal height; The mirror shapes of the second lens and the fourth lens are adjusted respectively according to the second surface sag. 4. The method for adjusting the beam shaping mirror surface according to claim 3, wherein the step of adjusting the mirror surface shapes of the first lens and the third lens respectively according to the first surface sag comprises: Obtaining the coordinates of a first singular point on the first surface profile sagittal height; Modifying the first surface profile sagitta according to the first singular point coordinates; The mirror shapes of the first lens and the third lens are adjusted according to the modified first surface profile sagittal height. 5. The method for adjusting a beam shaping mirror according to claim 4, wherein the step of modifying the first surface vector height according to the first singular point coordinates comprises: Obtain the coordinates (A, B) to be adjusted on the first surface elevation, wherein the coordinates of the first singular point are (a, b), then A＞a; Calculate the adjusted coordinates (A', B') according to the coordinates to be adjusted and the first singular point coordinates, where A'=A, B'=b-B; The coordinates to be adjusted on the first surface vector height are replaced by the adjustment coordinates. 6. The method for adjusting the beam shaping mirror surface according to claim 4, wherein the step of adjusting the mirror surface shapes of the first lens and the third lens according to the modified first surface profile sagittal height comprises: Obtaining a function image of the modified first surface profile sagittal height in a coordinate system; Acquire a mirror image according to the function image; The mirror shapes of the first lens and the third lens are adjusted according to the mirror image. 7. The beam shaping mirror adjustment method according to claim 6, wherein the step of obtaining the mirror image according to the function image comprises: Taking the X-axis as the axis of symmetry, draw a symmetric image of the function image; The mirror image is made according to the function image and the symmetric image. 8. The method for adjusting the beam shaping mirror surface according to claim 3, wherein the step of adjusting the mirror surface shapes of the second lens and the fourth lens respectively according to the second surface sag comprises: Obtaining coordinates of a second singular point on the sagittal height of the second surface profile; Modifying the second surface profile sagitta according to the second singular point coordinates; The mirror shapes of the second lens and the fourth lens are adjusted according to the modified second surface profile sagittal height.