CN118604409A - Probe and probe module - Google Patents

Abstract

The embodiment of the present invention provides a probe and a probe module, the probe includes a fixed part, a first connecting part, and a second connecting part; the first connecting part extends from one side of the fixed part along the action direction of the probe, and the second connecting part extends from the opposite side of the one side of the fixed part along the action direction of the probe, and the first connecting part and the second connecting part extend in opposite directions; the first connecting part includes two arms, the arrangement direction of the two arms is orthogonal to the action direction of the probe, and there is a spacing space between the two arms; the section position of at least one of the two arms includes an elastic deformation part; the ends of the two arms away from the fixed part clamp the conductive part of the product to be tested or are clamped by the conductive part of the product to be tested. The probe provided by the present invention can solve the problem that the existing probe is prone to damage the conductive part of the product to be tested and the connecting end of the probe when connected to the conductive part of the product to be tested.

Description

Probe and probe module

Technical Field

The present invention relates to the technical field of product testing, and more specifically, to a probe and a probe module.

Background Art

In the prior art, electronic products need to be tested for various performance parameters before leaving the factory. Generally, the product to be tested is connected to the test equipment through a probe, and the test equipment outputs the test signal and receives feedback information from the product to be tested to confirm whether there are any defects in the product to be tested.

However, when the existing probe is connected to the conductive part of the product to be tested, the conductive part of the product to be tested and the connecting end of the probe are easily damaged due to the strong rigidity of the connecting end of the existing probe.

Summary of the invention

In view of the above problems, according to one purpose of the present invention, a probe is provided to solve the problem that the conductive part of the product to be tested and the probe connection end are easily damaged when the existing probe is connected to the conductive part of the product to be tested.

To achieve the above object, the present invention adopts the following technical solutions:

The present invention provides a probe, comprising:

Fixed part,

a first connecting portion, and

a second connecting portion;

The first connection portion extends from one side of the fixing portion along the action direction of the probe, and the second connection portion extends from the opposite side of the fixing portion along the action direction of the probe, and the first connection portion and the second connection portion extend in opposite directions;

The first connecting portion includes two arms, the arrangement direction of the two arms is orthogonal to the action direction of the probe, and there is a spacing space between the two arms;

A section position of at least one of the two arms includes an elastic deformation portion;

The ends of the two arms away from the fixing portion clamp the conductive part of the product to be tested or are clamped by the conductive part of the product to be tested.

Preferably, the elastic deformation portion is formed by one of the following methods:

1) The elastic deformation portion is composed of an arc-shaped band;

2) The elastic deformation portion is composed of a plurality of arc-shaped bands connected end to end.

Preferably, both arms include an elastic deformation portion.

A preferred solution is that there is an escape between the elastic deformation parts of the two arms.

A preferred solution is that one of the two arms includes an elastic deformation portion, and the other arm has an avoidance structure corresponding to the elastic deformation portion.

A preferred solution is that one of the two arms has an elastic deformation portion, and the width of the other arm without the elastic deformation portion is greater than the width of the arm with the elastic deformation portion.

A preferred solution is that the fixing portion includes a first side wall and a second side wall arranged in a direction orthogonal to the action direction of the probe; the first connecting portion extends upward from the top end of the first side wall; the probe includes a cantilever extending from the bottom end of the first side wall to the second side wall; and the second connecting portion is arranged at the free end of the cantilever.

A preferred solution is that the fixing portion includes a first side wall and a second side wall arranged in a direction orthogonal to the action direction of the probe; the first connecting portion extends upward from the top end of the first side wall; the probe includes a cantilever extending from the bottom end of the second side wall to the first side wall; and the second connecting portion is arranged at the free end of the cantilever.

A preferred solution is that the end of the support arm away from the fixed portion is the first contact end, the adjacent sides of the two first contact ends are the inner wall surfaces, and the opposite sides are the outer wall surfaces; the inner wall surface and the outer wall surface on the same first contact end are retracted inward toward the free end of the first contact end; the outer wall surface and the inner wall surface of the first contact end have different inclinations.

According to another object of the present invention, the present invention further provides a probe module, which includes the probe as described above and also includes a fixing structure for accommodating and fixing the probe.

The beneficial effects of the present invention are:

The present invention provides an elastic deformation part at a section position of at least one of the two arms, so that at least one of the two arms has a weaker rigidity. When the two arms are plugged and matched with the conductive parts of the product to be tested, the elastic deformation part can effectively disperse the stress at the connection between the arms and the fixed part, avoid the risk of needle deformation and needle breakage, and extend the service life of the probe. The elastic deformation part can make the corresponding arm elastic. When connected, the reverse force of the elastic force is used to provide the arm with a pre-tightening force for the contact end to contact and connect with the product to be tested, thereby improving the connection quality and avoiding the surface of the conductive parts of the product to be tested being damaged due to the excessive rigidity of the two arms, thereby affecting the product quality.

BRIEF DESCRIPTION OF THE DRAWINGS

The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

FIG. 1 is a schematic diagram of the overall structure of a probe provided by an embodiment of the present invention.

FIG. 2 is a front view of FIG. 1 .

FIG. 3 is a schematic diagram of the overall structure of a probe provided by another embodiment of the present invention.

FIG. 4 is a schematic diagram of the cooperation between the first contact end of the probe and the first conductive member of the product to be tested provided by one embodiment of the present invention.

FIG. 5 is a schematic diagram of the cooperation between the first contact end of the probe and the second conductive member of the product to be tested provided by one embodiment of the present invention.

DETAILED DESCRIPTION

Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the relative arrangement of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless otherwise specifically stated.

The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

Techniques and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the techniques and equipment should be considered part of the specification.

In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

Conductive probe is a precision tool, which is widely used in the detection work in the fields of semiconductor, electronics and materials science. In the detection industry, the requirements for probe quality are multifaceted, including accuracy, stability, durability and adaptability. In the process of reciprocating and plugging the conductive parts of the product to be tested, the conductive probe is affected by the fatigue and stress of the probe, and the stress at the joint between the probe arm and the probe fixing part is relatively concentrated. In particular, the sheet probe structure is small and precise. After long-term use, the joint between the arm and the probe body fixing part is prone to deformation or even breakage in the thickness direction of the probe, which directly affects the connection quality, causes deviations in the test results, and affects the test effect. To this end, according to one purpose of the present application, a probe structure is provided, which can effectively avoid the occurrence of the above-mentioned problems, extend the service life of the probe, and improve the connection quality. As shown in combination with Figures 1 to 5, the probe specifically includes: a fixing portion 10, a first connecting portion, and a second connecting portion 30; the fixing portion 10 is used to fix the probe when the probe is assembled into the probe module; the first connecting portion extends from one side of the fixing portion 10 along the action direction of the probe, and the second connecting portion 30 extends from the opposite side of the one side of the fixing portion 10 along the action direction of the probe, and the first connecting portion and the second connecting portion 30 extend in opposite directions. Exemplarily, the first connecting portion is used to electrically connect to the product to be tested, and the second connecting portion 30 is used to electrically connect to the test equipment. In other schemes that can achieve the purpose of the invention of the present invention, it is optional that the second connecting portion 30 is used to electrically connect to the product to be tested, and the first connecting portion is used to electrically connect to the test equipment, and there is no limitation on this.

Further, in the present embodiment, in the direction orthogonal to the action direction of the probe, the first connecting portion includes two arms 201, 202, that is, the arrangement direction of the two arms 201, 202 is orthogonal to the action direction of the probe, and there is a spacing space between the two arms 201, 202 that can provide the two arms to approach each other. It should be noted that the action direction of the probe is defined as the X direction shown in FIG2, and the arrangement direction of the two arms 201, 202 is a direction orthogonal to the X direction, that is, the Y direction shown in FIG2. The section position of at least one of the two arms 201, 202 includes an elastic deformation portion 211; when the arm 202 has the elastic deformation portion 211, the head end of the arm 202 with the elastic deformation portion 211 can be more easily deformed to approach or move away from the head end of the arm 201 without the elastic deformation portion than the head end of the arm 201 without the elastic deformation portion. Taking the electrical contact between the two arms 201 and 202 and the product to be tested as an example, the ends of the two arms 201 and 202 away from the fixing part 10 clamp the conductive part of the product to be tested or are clamped by the conductive part of the product to be tested. Under the contact pressure, the two arms 201 and 202 can be deformed toward or away from each other to make close contact with the conductive part of the product to be tested. Specifically, the two arms 201 and 202 can be bent toward or away from each other in the Y direction to be connected with the conductive part of the product to be tested in a plug-in manner. As shown in Figures 4 and 5, the elastic deformation part 211 can make the corresponding arm elastic. When connected, the reverse force of the elastic force is used to provide the arm with a pre-tightening force for its contact end to contact the product to be tested. This can effectively prevent the occurrence of a virtual connection between the probe and the product to be tested caused by poor contact, improve the connection stability, and ensure the test effect. The elastic deformation part 211 formed at the section position of the support arm can further disperse and reduce the stress at the connection between the support arm and the fixing part 10, thereby extending the service life of the probe and preventing the connection between the support arm and the fixing part 10 from being deformed or even broken due to stress concentration, which causes the probe to be unable to continue to be used. In addition, the elastic deformation part 211 can make at least one support arm elastic to avoid damage to the contact surface of the conductive part of the product to be tested due to excessive rigidity of the two support arms, thereby affecting the product quality.

In a specific embodiment, the elastic deformation portion 211 is formed by one of the following methods:

1) The elastic deformation portion 211 is composed of an arc-shaped band; the adjacent sides of the two supporting arms 201 and 202 are the inner sides, and the separated sides are the outer sides; the arc-shaped band protrudes toward the inner sides of the two supporting arms 201 and 202.

2) The elastic deformation part 211 is composed of a plurality of arc-shaped bands connected end to end; illustratively, the elastic deformation part may be S-shaped, wavy, etc. Preferably, all the arc-shaped bands protrude inwardly of the two arms 201 and 202, which can ensure the uniformity and standardization of the outer edge of the probe as a whole, and is suitable for assembly and use in the probe module, so that probes with the same external shape specifications can be used to manufacture standard parts of the probe module, and probe modules with the same standard specifications can be used to provide the probe structure according to the embodiment of the present invention.

In a specific embodiment, both arms include elastic deformation parts, and the arc-shaped bands of the elastic deformation parts of the two arms protrude inwardly of the two arms, and there is a gap between the elastic deformation parts of the two arms to avoid interference or hard contact between the two elastic deformation parts when the two arms are in contact with the product to be tested, thereby avoiding damage to the probe. The elastic deformation parts of the two arms have the following relative position relationship: when the curvature of the arc-shaped band is relatively large, the crests and troughs of the two elastic deformation parts are staggered; when the curvature of the arc-shaped band is relatively small, the crests of the two elastic deformation parts can partially overlap or completely correspond to each other, or the crests and troughs of the two elastic deformation parts are staggered.

In a specific embodiment, one of the two arms includes an elastic deformation portion, and an avoidance structure cooperating with the elastic deformation portion is formed on the other arm. The avoidance structure can specifically be an inwardly recessed missing portion formed on the inner side wall of the other arm. The missing portion can be utilized to provide a larger avoidance space for the arm with the elastic deformation portion, thereby effectively avoiding hard contact between the two arms and causing damage.

In a specific embodiment, when one of the two arms 201, 202 has an elastic deformation portion 211, the width of the arm 201 without the elastic deformation portion is greater than the width of the arm 202 with the elastic deformation portion 211, and the direction of the arm width is the direction orthogonal to the action direction of the probe, namely the Y direction. Through the above arrangement, the deformation ability of the arm 202 with the elastic deformation portion 211 can be enhanced and its rigidity can be weakened, while the other arm 201 without the elastic deformation portion can ensure the rigidity requirement of the arm 201 without the elastic deformation portion, and optionally further improve its rigidity through size changes without losing the connection strength and body strength of the probe, so as to meet the plug-in and conduction requirements of conductive parts of different specifications.

In a specific embodiment, as shown in Figure 2, the fixing portion 10 includes a first side wall 11 and a second side wall 12 arranged in a direction orthogonal to the action direction of the probe, the first side wall 11 and the second side wall 12 are arranged along the Y direction and the first side wall 11 and the second side wall 12 both extend along the X direction; the first connecting portion extends upward from the top of the first side wall 11 along the X direction; the probe also includes a cantilever 13 extending from the bottom end of the first side wall 11 along the Y direction toward the second side wall 12; the second connecting portion 30 is arranged at the free end of the cantilever 13; the above-mentioned cantilever 13 corresponds to the second connecting portion 30 alone, the first connecting portion and the second connecting portion 30 do not affect each other, and there is no force between each other. When the conductive part of the product to be tested contacts and conducts with the first connecting portion, compared with the existing conductive structure, the crimping force of the probe provided by the present invention on the conductive part of the product to be tested becomes smaller, thereby reducing the damage to the conductive part of the product to be tested. It can be understood that the shape of the end of the second connecting portion 30 facing away from the cantilever 13 is a shape suitable for the test equipment, such as a round head, a pointed head, a flat head, a plane structure, a curved structure, a polygonal structure, and can also be any one of V-type, U-type, W-type, Y-type, T-type or any deformation of any one of them, without specific limitation.

In another optional embodiment, as shown in FIG. 3 , the fixing portion 10 includes a first side wall 11 and a second side wall 12 arranged in a direction orthogonal to the action direction of the probe, the first side wall 11 and the second side wall 12 are arranged along the Y direction and the first side wall 11 and the second side wall 12 both extend along the X direction; the first connecting portion extends upward from the top of the first side wall 11 along the X direction; the probe also includes a cantilever 13 extending from the bottom of the second side wall 12 toward the first side wall 11 along the Y direction; the second connecting portion 30 is arranged at the free end of the cantilever 13. In this embodiment, the cantilever 13 corresponds to the second connecting portion 30 alone, the first connecting portion and the second connecting portion 30 do not affect each other, and there is no force between them. When the conductive part of the product to be tested contacts and conducts with the first connecting portion, compared with the existing conductive structure, the crimping force of the probe provided by the present invention on the conductive part of the product to be tested becomes smaller, thereby reducing the damage to the conductive part of the product to be tested. In the probe structure shown in FIG. 2 and the probe structure shown in FIG. 3 , the first connecting portion and the second connecting portion 30 have different spacings in the Y direction, thereby being able to adapt to the point design of the detection equipment during detection and meet detection needs.

Furthermore, the function of the fixing part 10 of the present invention is to fix the probe as a whole to the probe module fixing structure. The first connecting part and the second connecting part 30 can respectively correspond to the conductive part of the product to be tested and the test equipment. There is no interference effect of the fixing part 10 structure itself between the two connecting parts. Through the above design, the probe module provided by the embodiment of the present invention can omit the fixing block used to fix the probe, thereby reducing the number of components of the probe module, making the assembly of the probe module simpler and faster, and effectively reducing the assembly error, improving the assembly accuracy of the probe module and the test effect on the product. And by extending the cantilever 13 in the Y direction, the length of the probe in the X direction can be shortened as a whole, thereby effectively reducing the length of the probe module in the X direction, so that the probe module is not affected by the installation height in the X direction, and is suitable for more products.

In order to stably fix the probe in the probe module fixed structure, specifically, the fixed part 10 includes a first limiting structure 41, a second limiting structure 42 and a third limiting structure 43 extending along the X direction, the first limiting structure 41 is formed at one end of the first side wall 11 away from the first connecting part, and the second limiting structure 42 and the third limiting structure 43 are respectively formed at the upper end and the lower end of the second side arm 12 along the X direction. The probe can be limited in a plane by three-point fixation through the first limiting structure 41, the second limiting structure 42 and the third limiting structure 43; the first limiting structure 41, the second limiting structure 42 and the third limiting structure 43 are used to cooperate with the fixed structure of the probe module to fix the position of the probe in the X direction and the Y direction. The limiting structure includes a card slot 44, which is used to make the fixation between the probe and the fixed structure more stable and reliable. In the drop test, the probe is not easy to fall off from the fixed structure of the probe module; the hollowing out formed in the middle position of the fixed part 10 can further reduce the weight of the probe.

In a specific embodiment, the end of the support arm away from the fixed portion 10 is the first contact end 212, the adjacent sides of the two first contact ends 212 are the inner wall surface, and the opposite sides are the outer wall surface; the inner wall surface and the outer wall surface on the same first contact end 212 are inwardly retracted toward the free end of the first contact end 212, that is, the inner wall surface and the outer wall surface of the same first contact end 212 are both arranged as inclined surfaces that are retracted toward the free end of the first contact end 212; the outer wall surface and the inner wall surface of the first contact end 212 have different inclinations, and the outer wall surface and the inner wall surface of the first contact end 212 are flat surfaces. More specifically, according to the purpose of the invention, whether it is a conductive part on the product to be tested or a conductive structure on the test equipment, it usually includes the following two structural forms, one is a first conductive part 51 with an opening facing downward and being n-shaped as shown in Figure 4, and the other is a second conductive part 52 with an opening facing upward and being U-shaped as shown in Figure 5. Regardless of the structural style of the conductive part, the outer wall surface of the first contact end 212 provided in this embodiment can be in contact and conduction with the structural style shown in the first conductive part 51 of the product to be tested, and the inner wall surface of the first contact end 212 can be in contact and conduction with the structural style shown in the second conductive part 52 of the product to be tested, which expands the scope of application of the probe, and no longer needs to design and manufacture probes that match each different type of conductive part, thereby greatly reducing the cost required for testing and saving the mold opening costs for making probes of different specifications. The probe includes but is not limited to a flat one-piece molding structure, which can simplify the structural composition and assembly process, improve its own structural strength, ensure the effectiveness of the connection, and at the same time increase the service life of the probe; it can be understood that the arm structure shown in Figures 4 and 5 above is only exemplary, for better explanation, and it does not serve as a limitation on the arm structure of the present application.

Furthermore, in a specific embodiment, as shown in FIG. 2 and FIG. 3 , the support arm further includes a vertical portion 213 connected to the first contact end; when there is an elastic deformation portion 211 on the support arm, the vertical portion 213 is located between the elastic deformation portion 211 and the first contact end 212, and when there is no elastic deformation portion on the support arm, the vertical portion 213 is located between the first contact end 212 and the fixed portion 10; a transition surface 214 is formed between the inner side wall surface of the first contact end 212 and the inner side wall surface of the vertical portion 213 for abutting and fixing with the conductive part of the product to be tested. Among them, the inner and outer side wall surfaces of the vertical portion 213 are both designed with vertical planes to reduce the material used for the probe, so that it has a smaller width and ensures the tightness of the probe. The cooperation of the above-mentioned transition surface 214 with the conductive part of the product to be tested can further improve the stability of the electrical connection between the probe and the product to be tested.

In a specific embodiment, as shown in Figures 4 and 5, the angle between the outer wall of the first contact end 212 and the outer wall of the vertical portion 213 is _θ1 , and the angle between the inner wall of the first contact end 212 and the inner wall of the vertical portion 213 is _θ2 , and angle _θ1 < angle _θ2 ; through the above arrangement, since the probe itself is small in size and the spacing distance between the two arms is limited, designing _θ1 to be a smaller angle can avoid interference between the two arms when they are close to each other, thereby affecting the conduction effect.

Furthermore, the transition surface 214 is an inclined surface, the angle between the inner wall surface of the first contact end 212 and the inner wall surface of the vertical portion 213 is θ ₂ , the angle between the transition surface 214 and the inner wall surface of the vertical portion 213 is θ ₃ , and the angle θ ₃ > the angle θ ₂ . The transition surface 214 designed in this way can be used to abut against the conductive part of the product to be tested and limit its downward insertion after the conductive part of the product to be tested is inserted between the two first contact ends 212, so as to avoid the transition bending and deformation of the two arms due to over-insertion, which may cause irreversible damage to the probe, or damage to the conductive part of the product to be tested, so that the product to be tested cannot be used any more.

In an optional embodiment, the transition surface 214 is specifically a concave arc surface, which is configured to conform to the conductive part of the product to be tested. After the conductive part of the product to be tested is inserted between the two first contact ends 212, it can fit with the plug-in angle end of the conductive part of the product to be tested, thereby increasing the contact area between the two to ensure stable contact, and can limit the insertion of the product to be tested.

The present invention also provides a probe module, which includes the probe as described above and a fixing structure for accommodating and fixing the probe. The fixing structure can be specifically a fixing seat formed with a cavity; the probe is accommodated and fixed in the cavity, and a plurality of probes are inserted in the fixing seat in parallel and at intervals. In the above embodiment, each probe includes a fixing portion 10, a first connecting portion and a second connecting portion 30, the first connecting portion and the second connecting portion 30 are respectively located at the two ends of the corresponding fixing portion 10, and in the electrically connected state, each first connecting portion and the second connecting portion 30 are respectively protruded from the fixing seat, and the probe assembly can be fixed on the fixing seat through the fixing portion 10. For the probe module provided by the present invention, since a plurality of probes are inserted in the fixing seat in parallel and at intervals, each probe is independent of each other, and each first connecting portion and the second connecting portion 30 are respectively located at the two ends of the corresponding fixing portion 10, and each first connecting portion and the second connecting portion 30 are respectively protruded from the fixing seat, so that the first connecting portion and the second connecting portion 30 of the probe can be connected to the product to be tested and the test equipment respectively.

To summarize, the present invention provides an elastic deformation portion at a section position of at least one of the two arms so that the rigidity of at least one of the two arms is weaker. When the two arms are plugged into and matched with the conductive parts of the product to be tested, the elastic deformation portion can further disperse the stress at the connection between the arm and the fixed part, thereby extending the service life of the probe and avoiding breakage of the connection between the arm and the fixed part due to stress concentration, which makes the probe unusable. In addition, the elastic deformation portion can make the corresponding arm have a certain elasticity to ensure the connection quality between the two arms and the product to be tested while avoiding damage to the conductive parts of the product to be tested due to excessive rigidity of the two arms.

Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the implementation methods of the present invention. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made on the basis of the above description. It is impossible to list all the implementation methods here. All obvious changes or modifications derived from the technical solution of the present invention are still within the protection scope of the present invention.

Claims (10)

1. A probe, comprising: Fixed part, a first connecting portion, and a second connecting portion; The first connection portion extends from one side of the fixing portion along the action direction of the probe, and the second connection portion extends from the opposite side of the fixing portion along the action direction of the probe, and the first connection portion and the second connection portion extend in opposite directions; The first connecting portion includes two arms, the arrangement direction of the two arms is orthogonal to the action direction of the probe, and there is a spacing space between the two arms; A section position of at least one of the two arms includes an elastic deformation portion; The ends of the two arms away from the fixing portion clamp the conductive part of the product to be tested or are clamped by the conductive part of the product to be tested. 2. The probe according to claim 1, wherein the elastic deformation portion is formed by one of the following methods: 1) The elastic deformation portion is composed of an arc-shaped band; 2) The elastic deformation portion is composed of a plurality of arc-shaped bands connected end to end. 3 . The probe according to claim 1 , wherein both arms include an elastic deformation portion. The probe according to claim 3 , wherein there is an escape between the elastic deformation parts of the two arms. 5 . The probe according to claim 1 , wherein one of the two arms comprises an elastic deformation portion, and the other arm comprises an avoidance structure corresponding to the elastic deformation portion. 6 . The probe according to claim 1 , wherein one of the two arms has an elastic deformation portion, and the width of the other arm without the elastic deformation portion is greater than the width of the arm with the elastic deformation portion. 7. The probe according to claim 1 is characterized in that the fixing portion includes a first side wall and a second side wall arranged in a direction orthogonal to the action direction of the probe; the first connecting portion extends upward from the top of the first side wall; the probe includes a cantilever extending from the bottom end of the first side wall to the second side wall; and the second connecting portion is arranged at the free end of the cantilever. 8. The probe according to claim 1 is characterized in that the fixing portion includes a first side wall and a second side wall arranged in a direction orthogonal to the action direction of the probe; the first connecting portion extends upward from the top end of the first side wall; the probe includes a cantilever extending from the bottom end of the second side wall to the first side wall; and the second connecting portion is arranged at the free end of the cantilever. 9. The probe according to claim 1 is characterized in that the end of the support arm away from the fixed part is a first contact end, the adjacent sides of the two first contact ends are inner wall surfaces, and the opposite sides are outer wall surfaces; the inner wall surface and the outer wall surface on the same first contact end are retracted inward toward the free end of the first contact end; the outer wall surface and the inner wall surface of the first contact end have different inclinations. 10. A probe module, characterized in that it comprises the probe according to any one of claims 1 to 9, and further comprises a fixing structure for accommodating and fixing the probe.