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CN118604387A - Signal processing method of accelerometer - Google Patents

Signal processing method of accelerometer Download PDF

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Publication number
CN118604387A
CN118604387A CN202410751914.5A CN202410751914A CN118604387A CN 118604387 A CN118604387 A CN 118604387A CN 202410751914 A CN202410751914 A CN 202410751914A CN 118604387 A CN118604387 A CN 118604387A
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mems
accelerometer
adc
mems unit
signals
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向毅海
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Beijing Zesheng Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00Details of instruments
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03MCODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00Analogue/digital conversion; Digital/analogue conversion
    • H03M1/12Analogue/digital converters

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Abstract

本发明公开一种加速度计的信号处理方法,属于MEMS技术领域。先通过ADC检测加速度计中MEMS单元产生的电学变量,将电学变量转化到数字域;再将ADC检测到的变量信号进行相加或者相减,得到加速度计在相应方向的加速信号。本发明通过ADC将MEMS单元产生的电压变量转化到数字域,在数字域中进行相加或者相减提取得到x轴/y轴/z轴的信号,避免受到外部信号的干扰;并且能够测得加速度计在各方向上的信号。

The present invention discloses a signal processing method for an accelerometer, and belongs to the field of MEMS technology. First, the electrical variable generated by the MEMS unit in the accelerometer is detected by ADC, and the electrical variable is converted to a digital domain; then the variable signal detected by the ADC is added or subtracted to obtain the acceleration signal of the accelerometer in the corresponding direction. The present invention converts the voltage variable generated by the MEMS unit into a digital domain by ADC, and extracts the x-axis/y-axis/z-axis signals by addition or subtraction in the digital domain, avoiding interference from external signals; and the signals of the accelerometer in each direction can be measured.

Description

加速度计的信号处理方法Signal processing method of accelerometer

技术领域Technical Field

本发明涉及MEMS技术领域,特别涉及一种加速度计的信号处理方法。The present invention relates to the field of MEMS technology, and in particular to a signal processing method of an accelerometer.

背景技术Background Art

MEMS(Micro Electro - Mechanical System,微电子机械系统)加速度计是一种微小型惯性传感器,与传统的机械和光学传感器相比,MEMS加速度计具有成本低、体积小、功耗低的优点,可与集成电路集成,因此广泛应用于消费电子、工业制造、医疗电子、汽车电子、航空航天和军事等领域,具有巨大的发展潜力和商业价值。MEMS (Micro Electro - Mechanical System) accelerometer is a miniature inertial sensor. Compared with traditional mechanical and optical sensors, MEMS accelerometer has the advantages of low cost, small size, low power consumption, and can be integrated with integrated circuits. Therefore, it is widely used in consumer electronics, industrial manufacturing, medical electronics, automotive electronics, aerospace, and military fields, and has huge development potential and commercial value.

MEMS加速度计的工作原理是惯性效应,当物体移动时,悬浮的微结构会受到惯性力的影响,加速度计信号的变化与线性加速度成正比。目前检测加速度计信号的方法是通过模拟的方式,将两路串联的信号做成差分形式,再用放大器进行放大。这种方法只能提取一个轴的信号,并且提取出的模拟域信号容易受到外部干扰。The working principle of MEMS accelerometer is inertial effect. When an object moves, the suspended microstructure will be affected by the inertial force, and the change of accelerometer signal is proportional to the linear acceleration. The current method of detecting accelerometer signal is to make the two series signals into differential form through analog means, and then amplify them with an amplifier. This method can only extract the signal of one axis, and the extracted analog domain signal is easily affected by external interference.

发明内容Summary of the invention

本发明的目的在于提供一种加速度计的信号处理方法,以解决背景技术中的问题。The object of the present invention is to provide a signal processing method for an accelerometer to solve the problems in the background technology.

为解决上述技术问题,本发明提供了一种加速度计的信号处理方法,包括如下步骤:In order to solve the above technical problems, the present invention provides a signal processing method of an accelerometer, comprising the following steps:

通过ADC检测加速度计中MEMS单元产生的电学变量,将电学变量转化到数字域;The electrical variables generated by the MEMS unit in the accelerometer are detected by ADC and converted into the digital domain;

将ADC检测到的变量信号进行相加或者相减,得到加速度计在相应方向的加速信号。The variable signals detected by the ADC are added or subtracted to obtain the acceleration signal of the accelerometer in the corresponding direction.

在一种可实现的实施方式中,所述加速度计由若干个MEMS单元构成,并且MEMS单元两两相对应构成MEMS单元组。In a feasible implementation manner, the accelerometer is composed of a plurality of MEMS units, and the MEMS units correspond to each other in pairs to form a MEMS unit group.

在一种可实现的实施方式中,所述加速度计由N个MEMS单元组依次排列,构成2×N的MEMS单元阵列结构,N为正整数;In an achievable implementation, the accelerometer is composed of N MEMS unit groups arranged in sequence to form a 2×N MEMS unit array structure, where N is a positive integer;

每个MEMS单元组中,位于同一侧MEMS单元的悬臂梁进行级联,产生的信号接入一个ADC;位于同另一侧MEMS单元的悬臂梁进行级联,产生的信号接入另一个ADC;In each MEMS unit group, the cantilever beams of the MEMS units on the same side are cascaded, and the generated signals are connected to one ADC; the cantilever beams of the MEMS units on the other side are cascaded, and the generated signals are connected to another ADC;

或者,or,

每个MEMS单元组中,位于同一侧MEMS单元的单个悬臂梁的上下电极划分成并排的多区,对多区进行级联,产生的信号接入一个ADC;位于同另一侧MEMS单元的单个悬臂梁的上下电极划分成并排的多区,对多区进行级联,产生的信号接入另一个ADC;In each MEMS unit group, the upper and lower electrodes of a single cantilever beam of a MEMS unit on the same side are divided into multiple zones arranged side by side, the multiple zones are cascaded, and the generated signals are connected to one ADC; the upper and lower electrodes of a single cantilever beam of a MEMS unit on the other side are divided into multiple zones arranged side by side, the multiple zones are cascaded, and the generated signals are connected to another ADC;

将两个ADC检测的信号相减,得到沿着MEMS单元组中相对应两个MEMS单元方向的加速信号;Subtract the signals detected by the two ADCs to obtain acceleration signals along the directions of the two corresponding MEMS units in the MEMS unit group;

将两个ADC检测的信号相加,得到垂直于MEMS单元阵列所在平面方向上的加速信号。The signals detected by the two ADCs are added together to obtain an acceleration signal in a direction perpendicular to the plane where the MEMS unit array is located.

在一种可实现的实施方式中,所述级联的方式为串联或者并联。In a feasible implementation manner, the cascading mode is series connection or parallel connection.

在一种可实现的实施方式中,所述加速度计由N个MEMS单元组构成正多边形结构且关于所述正多边形结构呈中心对称,N为正整数;In an achievable implementation, the accelerometer is composed of N MEMS units forming a regular polygon structure and is centrally symmetric about the regular polygon structure, where N is a positive integer;

每个MEMS单元的悬臂梁分别连接一个ADC,用于检测每个MEMS单元产生的变量信号;The cantilever beam of each MEMS unit is respectively connected to an ADC for detecting the variable signal generated by each MEMS unit;

在一个MEMS单元组中,将相对应的两个MEMS单元产生的变量信号相减,得到沿着该MEMS单元组中相对应的两个MEMS单元方向的加速信号;In a MEMS unit group, variable signals generated by two corresponding MEMS units are subtracted to obtain acceleration signals along the directions of the two corresponding MEMS units in the MEMS unit group;

将全部或者部分个MEMS单元产生的变量信号相加,得到垂直于正多边形结构所在平面方向上的加速信号。The variable signals generated by all or part of the MEMS units are added together to obtain an acceleration signal in a direction perpendicular to the plane where the regular polygon structure is located.

在一种可实现的实施方式中,所述N个MEMS单元组全部或者部分处于工作状态。In a feasible implementation, all or part of the N MEMS unit groups are in working state.

在一种可实现的实施方式中,所述ADC具有高输入阻抗性能。In a feasible implementation, the ADC has high input impedance performance.

在一种可实现的实施方式中,所述ADC的输入阻抗不小于100Mohm。In a feasible implementation manner, the input impedance of the ADC is not less than 100 Mohm.

在一种可实现的实施方式中,所述MEMS单元中的悬臂梁由压电材料制成。In a feasible implementation, the cantilever beam in the MEMS unit is made of piezoelectric material.

本发明还提供另一种加速度计的信号处理方法,对加速度计中MEMS单元产生的电学变量先在模拟域用两个缓冲器分别实现相加与相减,两个缓冲器再直接输出模拟信号或者分别通过ADC进行数字化输出。The present invention also provides another signal processing method for an accelerometer, wherein the electrical variables generated by the MEMS unit in the accelerometer are first added and subtracted by two buffers in the analog domain, and the two buffers then directly output analog signals or digitize and output them through ADCs.

在一种可实现的实施方式中,所述两个缓冲器具有两路差分或单端输入,能对输入的电学变量信号进行相加或相减并放大。In a feasible implementation, the two buffers have two differential or single-ended inputs, and can add or subtract and amplify the input electrical variable signals.

本发明提供的一种加速度计的信号处理方法,先通过ADC检测加速度计中MEMS单元产生的电学变量,将电学变量转化到数字域;再将ADC检测到的变量信号进行相加或者相减,得到加速度计在相应方向的加速信号。本发明通过ADC将MEMS单元产生的电压变量转化到数字域,在数字域中进行相加或者相减提取得到x轴/y轴/z轴的信号,避免受到外部信号的干扰;并且能够测得加速度计的多轴的信号。The present invention provides a signal processing method for an accelerometer, which first detects the electrical variables generated by the MEMS unit in the accelerometer through the ADC, and converts the electrical variables into the digital domain; then the variable signals detected by the ADC are added or subtracted to obtain the acceleration signal of the accelerometer in the corresponding direction. The present invention converts the voltage variables generated by the MEMS unit into the digital domain through the ADC, and extracts the x-axis/y-axis/z-axis signals by adding or subtracting in the digital domain to avoid interference from external signals; and can measure the multi-axis signals of the accelerometer.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

图1是实施例一中加速度计的信号处理方法示意图。FIG. 1 is a schematic diagram of a signal processing method of an accelerometer in Embodiment 1. FIG.

图2是实施例一中加速度计在z轴方向有加速度的示意图。FIG. 2 is a schematic diagram of the accelerometer in the first embodiment having acceleration in the z-axis direction.

图3是实施例一中加速度计沿y轴方向有加速度的示意图。FIG. 3 is a schematic diagram of an accelerometer having acceleration along the y-axis direction in the first embodiment.

图4是实施例二中加速度计的信号处理方法示意图。FIG. 4 is a schematic diagram of a signal processing method of an accelerometer in the second embodiment.

图5是实施例三中加速度计的信号处理方法示意图。FIG. 5 is a schematic diagram of a signal processing method of an accelerometer in Embodiment 3.

图6是用双差分输入放大器实现两路差分信号相加/相减的示意图。FIG. 6 is a schematic diagram of using a dual differential input amplifier to implement addition/subtraction of two differential signals.

图7是分成两级分别实现高输入阻抗和信号相加/相减的示意图。FIG. 7 is a schematic diagram showing a two-stage circuit for realizing high input impedance and signal addition/subtraction respectively.

具体实施方式DETAILED DESCRIPTION

下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本申请的一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本申请保护的范围。The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of this application.

本申请中为部件所编序号本身,例如“第一”、“第二”等,仅用于区分所描述的对象,不具有任何顺序或技术含义。而本申请所说“连接”、“联接”,如无特别说明,并非限定于物理的或者机械的连接,而且可以包括电性的通信连接,不管是直接的还是间接的。在本申请的描述中,需要理解的是,术语“上”、“下”、“前”、“后”、“左”、“右”、“中间”、“之间”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。The serial numbers of the components in this application, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "connection" mentioned in this application, unless otherwise specified, are not limited to physical or mechanical connections, and may include electrical communication connections, whether direct or indirect. In the description of this application, it should be understood that the orientation or position relationship indicated by the terms "upper", "lower", "front", "back", "left", "right", "middle", "between", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc. are based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to this application.

在本申请中,除非另有明确的规定和限定,第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触,或第一和第二特征通过中间媒介间接接触。而且,第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方,或仅仅表示第一特征水平高度小于第二特征。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含。In the present application, unless otherwise expressly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" and "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusions.

本发明提供一种加速度计的信号处理方法,所述加速度计由若干个MEMS单元构成,并且MEMS单元两两相对应构成MEMS单元组。用ADC检测MEMS单元组中相对应两个MEMS单元产生的电学变量,将ADC检测的变量信号进行相加或者相减,以此得到加速度计在相应方向的加速信号。所述MEMS单元由悬梁臂和质量块构成,并且悬臂梁由压电材料制成。The present invention provides a signal processing method for an accelerometer, wherein the accelerometer is composed of a plurality of MEMS units, and the MEMS units correspond to each other to form a MEMS unit group. An ADC is used to detect electrical variables generated by two corresponding MEMS units in the MEMS unit group, and the variable signals detected by the ADC are added or subtracted to obtain an acceleration signal of the accelerometer in the corresponding direction. The MEMS unit is composed of a cantilever arm and a mass block, and the cantilever beam is made of piezoelectric material.

实施例一Embodiment 1

若加速度计是由2N个MEMS单元构成的2×N阵列结构(N为正整数),即有N个MEMS单元组依次排列。If the accelerometer is a 2×N array structure composed of 2N MEMS units (N is a positive integer), there are N MEMS unit groups arranged in sequence.

在本实施例中,N取3,加速度计是由3个MEMS单元组,共计6个MEMS单元构成2×3的阵列结构,其俯视图如图1所示。MEMS单元11和MEMS单元12相对应构成第一MEMS单元组,MEMS单元21和MEMS单元22相对应构成第二MEMS单元组,MEMS单元31和MEMS单元32相对应构成第三MEMS单元组。In this embodiment, N is 3, and the accelerometer is composed of 3 MEMS unit groups, a total of 6 MEMS units forming a 2×3 array structure, and its top view is shown in Figure 1. MEMS unit 11 and MEMS unit 12 correspondingly constitute a first MEMS unit group, MEMS unit 21 and MEMS unit 22 correspondingly constitute a second MEMS unit group, and MEMS unit 31 and MEMS unit 32 correspondingly constitute a third MEMS unit group.

将MEMS单元11、MEMS单元21和MEMS单元31,即每个MEMS单元组中位于一侧MEMS单元的悬臂梁级联起来,产生的信号接入一个ADC;将MEMS单元12、MEMS单元22和MEMS单元32,即每个MEMS单元组中位于另一侧MEMS单元的悬臂梁级联起来,产生的信号接入另一个ADC;The MEMS units 11, 21 and 31, i.e., the cantilever beams of the MEMS units on one side of each MEMS unit group, are cascaded, and the generated signals are connected to one ADC; the MEMS units 12, 22 and 32, i.e., the cantilever beams of the MEMS units on the other side of each MEMS unit group, are cascaded, and the generated signals are connected to another ADC;

或者存在另一种实现方式,即MEMS单元中单个悬臂梁的上下电极划分成并排的多区,每个MEMS单元组中,对位于同一侧MEMS单元的多区进行级联,产生的信号接入一个ADC;对位于同另一侧MEMS单元的多区进行级联,产生的信号接入另一个ADC。Alternatively, there is another implementation method, that is, the upper and lower electrodes of a single cantilever beam in the MEMS unit are divided into multiple zones arranged side by side. In each MEMS unit group, the multiple zones of the MEMS units on the same side are cascaded, and the generated signals are connected to one ADC; the multiple zones of the MEMS units on the other side are cascaded, and the generated signals are connected to another ADC.

其中级联方式可以为串联或者并联,ADC优选使用具有高输入阻抗性能的ADC。The cascade connection mode may be series connection or parallel connection, and the ADC preferably uses an ADC with high input impedance performance.

请继续参阅图1,在本实施例中作以下设定:沿着MEMS单元组排列的方向定义为x轴,沿着一个MEMS单元组中相对应两个MEMS单元的方向定义为y轴,垂直于x轴和y轴构成平面的方向定义为z轴。Please continue to refer to Figure 1. In this embodiment, the following settings are made: the direction along the arrangement of the MEMS unit group is defined as the x-axis, the direction along the corresponding two MEMS units in a MEMS unit group is defined as the y-axis, and the direction perpendicular to the plane formed by the x-axis and the y-axis is defined as the z-axis.

若将两个ADC的信号相加,则得到z轴方向的信号;若将两个ADC的信号相减,则得到y轴方向(即沿着相对应两个MEMS单元的方向)的信号。以此通过两个ADC的信号相加或相减,实现二轴加速度。If the signals of the two ADCs are added together, a signal in the z-axis direction is obtained; if the signals of the two ADCs are subtracted, a signal in the y-axis direction (i.e., along the direction corresponding to the two MEMS units) is obtained. In this way, two-axis acceleration can be achieved by adding or subtracting the signals of the two ADCs.

其原理如下:The principle is as follows:

如图2所示为一个MEMS单元组的剖面示意图,当z轴方向上有加速度时,两个质量块都会同时发生向上或者向下位移的变化,在悬臂梁的压电材料上形成电压信号,以此产生电学的变量,一侧的电学变量通过一个ADC检测得到,另一侧的电学变量通过另一个ADC检测得到;若将一侧所有MEMS单元产生的电学变量级联起来,可以增加信号幅值。将两个ADC检测得到的电学变量进行相加,就能得到在z轴方向的信号。As shown in Figure 2, it is a cross-sectional schematic diagram of a MEMS unit group. When there is acceleration in the z-axis direction, the two mass blocks will simultaneously change their displacement upward or downward, forming a voltage signal on the piezoelectric material of the cantilever beam, thereby generating electrical variables. The electrical variables on one side are detected by one ADC, and the electrical variables on the other side are detected by another ADC. If the electrical variables generated by all MEMS units on one side are cascaded, the signal amplitude can be increased. By adding the electrical variables detected by the two ADCs, the signal in the z-axis direction can be obtained.

如图3所示为一个MEMS单元组的剖面示意图,当y轴方向上有加速度时,一个质量块向下拱,另一个质量块向上翘,在悬臂梁的压电材料上形成电压信号,以此产生电学的变量,一侧的电学变量通过一个ADC检测得到,另一侧的电学变量通过另一个ADC检测得到;若将一侧所有MEMS单元产生的电学变量级联起来,可以增加信号幅值。将两个ADC检测得到的电学变量进行相减,就能得到在y轴方向的信号。As shown in Figure 3, it is a cross-sectional schematic diagram of a MEMS unit group. When there is acceleration in the y-axis direction, one mass block arches downward and the other mass block tilts upward, forming a voltage signal on the piezoelectric material of the cantilever beam, thereby generating electrical variables. The electrical variables on one side are detected by one ADC, and the electrical variables on the other side are detected by another ADC. If the electrical variables generated by all MEMS units on one side are cascaded, the signal amplitude can be increased. Subtracting the electrical variables detected by the two ADCs can obtain the signal in the y-axis direction.

进一步的,在y轴方向上,两个质量块会产生共模干扰,通过两个ADC检测的信号相减,可以消除共模干扰,避免对信号检测的影响;另外通过信号的相加或相减,能够将信号扩大到两倍,使检测效果更好。Furthermore, in the y-axis direction, the two mass blocks will generate common-mode interference. By subtracting the signals detected by the two ADCs, the common-mode interference can be eliminated to avoid the impact on signal detection. In addition, by adding or subtracting the signals, the signal can be amplified to twice, making the detection effect better.

当N取1、2、4、5、6...时,其工作原理同上。When N is 1, 2, 4, 5, 6..., the working principle is the same as above.

实施例二Embodiment 2

若加速度计是由2N个MEMS单元构成正多边形结构且关于所述正多边形结构呈中心对称。If the accelerometer is composed of 2N MEMS units forming a regular polygon structure and is centrally symmetric about the regular polygon structure.

在本实施例中,N取2,加速度计是由2个MEMS单元组,共计4个MEMS单元构成正四边形,其俯视图如图4所示。MEMS单元1和MEMS单元3相对应构成第一MEMS单元组,MEMS单元2和MEMS单元4相对应构成第二MEMS单元组。将MEMS单元1、MEMS单元2、MEMS单元3、MEMS单元4的悬臂梁分别连接第一ADC、第二ADC、第三ADC、第四ADC,用以检测每个MEMS单元产生的信号。其中ADC优选使用具有高输入阻抗性能的ADC。In this embodiment, N is 2, and the accelerometer is composed of two MEMS unit groups, a total of four MEMS units forming a regular quadrilateral, and its top view is shown in Figure 4. MEMS unit 1 and MEMS unit 3 form a first MEMS unit group correspondingly, and MEMS unit 2 and MEMS unit 4 form a second MEMS unit group correspondingly. The cantilever beams of MEMS unit 1, MEMS unit 2, MEMS unit 3, and MEMS unit 4 are respectively connected to the first ADC, the second ADC, the third ADC, and the fourth ADC to detect the signal generated by each MEMS unit. Among them, the ADC preferably uses an ADC with high input impedance performance.

请继续参阅图4,在本实施例中作以下设定:沿着第一MEMS单元组的方向定义为x轴,沿着第二MEMS单元组的方向定义为y轴,垂直于x轴和y轴构成平面的方向定义为z轴。Please continue to refer to FIG. 4 . In this embodiment, the following settings are made: the direction along the first MEMS unit group is defined as the x-axis, the direction along the second MEMS unit group is defined as the y-axis, and the direction perpendicular to the plane formed by the x-axis and the y-axis is defined as the z-axis.

在本实施例中,若将全部或部分的ADC的信号相加,则得到垂直于正多边形结构所在平面方向上(即z轴方向)的加速信号;若将第一ADC和第三ADC的信号相减,则得到沿着第一MEMS单元组的方向上(即x轴方向)的加速信号;若将第二ADC和第四ADC的信号相减,则得到沿着第二MEMS单元组的方向上(即y轴方向)的加速信号。以此得到x,y,z方向的三轴加速度。进一步的,在x轴和y轴方向上,两个质量块会产生共模干扰,通过两个ADC检测的信号相减,可以消除共模干扰,避免对信号检测的影响;另外通过信号的相加/相减,能够将信号扩大到四倍/两倍,使检测效果更好。In this embodiment, if all or part of the ADC signals are added together, an acceleration signal in the direction perpendicular to the plane of the regular polygon structure (i.e., the z-axis direction) is obtained; if the signals of the first ADC and the third ADC are subtracted, an acceleration signal in the direction along the first MEMS unit group (i.e., the x-axis direction) is obtained; if the signals of the second ADC and the fourth ADC are subtracted, an acceleration signal in the direction along the second MEMS unit group (i.e., the y-axis direction) is obtained. In this way, three-axis acceleration in the x, y, and z directions is obtained. Furthermore, in the x-axis and y-axis directions, the two mass blocks will generate common-mode interference. By subtracting the signals detected by the two ADCs, the common-mode interference can be eliminated to avoid the influence on the signal detection; in addition, by adding/subtracting the signals, the signal can be expanded to four times/twice, so that the detection effect is better.

在此基础上,如果关掉第一MEMS单元组,就得到只检测y轴和z轴方向的加速度;如果关掉第二MEMS单元组,就得到只检测x轴和z轴方向的加速度。On this basis, if the first MEMS unit group is turned off, only the acceleration in the y-axis and z-axis directions can be detected; if the second MEMS unit group is turned off, only the acceleration in the x-axis and z-axis directions can be detected.

实施例三Embodiment 3

进一步的,若N取3,加速度计是由3个MEMS单元组,共计6个MEMS单元构成正六边形,其俯视图如图5所示。MEMS单元1和MEMS单元4相对应构成第一MEMS单元组,MEMS单元2和MEMS单元5相对应构成第二MEMS单元组,MEMS单元3和MEMS单元6相对应构成第三MEMS单元组。将MEMS单元1、MEMS单元2、MEMS单元3、MEMS单元4、MEMS单元5、MEMS单元6的悬臂梁分别连接第一ADC、第二ADC、第三ADC、第四ADC、第五ADC、第六ADC,用以检测每个MEMS单元产生的信号。其中ADC优选使用具有高输入阻抗性能的ADC,一般不小于100Mohm。Further, if N is 3, the accelerometer is composed of 3 MEMS unit groups, a total of 6 MEMS units forming a regular hexagon, and its top view is shown in Figure 5. MEMS unit 1 and MEMS unit 4 constitute the first MEMS unit group correspondingly, MEMS unit 2 and MEMS unit 5 constitute the second MEMS unit group correspondingly, and MEMS unit 3 and MEMS unit 6 constitute the third MEMS unit group correspondingly. The cantilever beams of MEMS unit 1, MEMS unit 2, MEMS unit 3, MEMS unit 4, MEMS unit 5, and MEMS unit 6 are respectively connected to the first ADC, the second ADC, the third ADC, the fourth ADC, the fifth ADC, and the sixth ADC to detect the signal generated by each MEMS unit. Among them, the ADC preferably uses an ADC with high input impedance performance, generally not less than 100Mohm.

在本实施例中,若将全部或部分的ADC的信号相加,得到垂直于正多边形结构所在平面方向上的加速信号;若将第一ADC和第四ADC的信号相减,则得到沿着第一MEMS单元组的方向上的加速信号;若将第二ADC和第五ADC的信号相减,则得到沿着第二MEMS单元组的方向上的加速信号;若将第三ADC和第六ADC的信号相减,则得到沿着第三MEMS单元组的方向上的加速信号。进一步的,在沿着MEMS单元组方向上,该MEMS单元组中的两个质量块会产生共模干扰,通过其相连两个ADC检测的信号相减,可以消除共模干扰,避免对信号检测的影响;另外通过信号的相加/相减,能够将信号扩大到六倍/两倍,使检测效果更好。In this embodiment, if all or part of the ADC signals are added together, an acceleration signal in the direction perpendicular to the plane where the regular polygon structure is located is obtained; if the signals of the first ADC and the fourth ADC are subtracted, an acceleration signal in the direction along the first MEMS unit group is obtained; if the signals of the second ADC and the fifth ADC are subtracted, an acceleration signal in the direction along the second MEMS unit group is obtained; if the signals of the third ADC and the sixth ADC are subtracted, an acceleration signal in the direction along the third MEMS unit group is obtained. Furthermore, in the direction along the MEMS unit group, the two mass blocks in the MEMS unit group will generate common-mode interference. By subtracting the signals detected by the two connected ADCs, the common-mode interference can be eliminated to avoid the influence on the signal detection; in addition, by adding/subtracting the signals, the signal can be expanded to six times/twice, so that the detection effect is better.

当N取1、4、5、6...时,其工作原理同上。When N is 1, 4, 5, 6, ..., the working principle is the same as above.

本发明通过ADC将MEMS单元产生的电压变量转化到数字域,在数字域中进行相加或者相减提取得到多轴的加速信号,避免受到外部信号的干扰。The present invention converts the voltage variable generated by the MEMS unit into a digital domain through an ADC, performs addition or subtraction extraction in the digital domain to obtain multi-axis acceleration signals, and avoids interference from external signals.

实施例四Embodiment 4

本发明还提供了另一种加速度计的信号处理方法,即:对加速度计中MEMS单元产生的电学变量先在模拟域用两个缓冲器分别实现相加与相减,两个缓冲器再直接输出模拟信号或者分别通过ADC进行数字化输出。The present invention also provides another signal processing method for an accelerometer, namely: the electrical variables generated by the MEMS unit in the accelerometer are first added and subtracted by two buffers in the analog domain, and the two buffers then directly output analog signals or digitize them through ADCs.

所述两个缓冲器具有两路差分或单端输入,能对输入的电学变量信号进行相加或相减并放大。The two buffers have two differential or single-ended inputs and can add or subtract and amplify the input electrical variable signals.

如图6所示是用双差分输入放大器实现两路差分输入信号的相加(一路极性反过来输入即相减)与放大。As shown in FIG6 , a dual differential input amplifier is used to implement addition (one input with the polarity reversed is subtraction) and amplification of two differential input signals.

如图7所示是分成两级,第一级仪表放大器连接方式实现高输入阻抗,第二级分别实现相加/相减;进一步的,仪表放大器可以是如图7所示的单端输入或差分输入。As shown in FIG7 , it is divided into two stages. The first stage instrument amplifier connection method realizes high input impedance, and the second stage realizes addition/subtraction respectively. Furthermore, the instrument amplifier can be a single-ended input or a differential input as shown in FIG7 .

以上实施例的各技术特征可以进行任意的组合,为使描述简洁,未对上述实施例中的各个技术特征所有可能的组合都进行描述,然而,只要这些技术特征的组合不存在矛盾,都应当认为是本说明书记载的范围。The technical features of the above embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

以上实施例仅表达了本申请的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本申请构思的前提下,还可以做出若干变形和改进,这些都属于本申请的保护范围。因此,本申请专利的保护范围应以所附权利要求为准。The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims (11)

1.一种加速度计的信号处理方法,其特征在于,包括如下步骤:1. A signal processing method for an accelerometer, characterized in that it comprises the following steps: 通过ADC检测加速度计中MEMS单元产生的电学变量,将电学变量转化到数字域;The electrical variables generated by the MEMS unit in the accelerometer are detected by ADC and converted into the digital domain; 将ADC检测到的变量信号进行相加或者相减,得到加速度计在相应方向的加速信号。The variable signals detected by the ADC are added or subtracted to obtain the acceleration signal of the accelerometer in the corresponding direction. 2.如权利要求1所述的加速度计的信号处理方法,其特征在于,所述加速度计由若干个MEMS单元构成,并且MEMS单元两两相对应构成MEMS单元组。2. The signal processing method of an accelerometer as claimed in claim 1, characterized in that the accelerometer is composed of a plurality of MEMS units, and the MEMS units correspond to each other in pairs to form a MEMS unit group. 3.如权利要求2所述的加速度计的信号处理方法,其特征在于,所述加速度计由N个MEMS单元组依次排列,构成2×N的MEMS单元阵列结构,N为正整数;3. The signal processing method of the accelerometer according to claim 2, characterized in that the accelerometer is composed of N MEMS unit groups arranged in sequence to form a 2×N MEMS unit array structure, where N is a positive integer; 每个MEMS单元组中,位于同一侧MEMS单元的悬臂梁进行级联,产生的信号接入一个ADC;位于同另一侧MEMS单元的悬臂梁进行级联,产生的信号接入另一个ADC;In each MEMS unit group, the cantilever beams of the MEMS units on the same side are cascaded, and the generated signals are connected to one ADC; the cantilever beams of the MEMS units on the other side are cascaded, and the generated signals are connected to another ADC; 或者,or, 每个MEMS单元组中,位于同一侧MEMS单元的单个悬臂梁的上下电极划分成并排的多区,对多区进行级联,产生的信号接入一个ADC;位于同另一侧MEMS单元的单个悬臂梁的上下电极划分成并排的多区,对多区进行级联,产生的信号接入另一个ADC;In each MEMS unit group, the upper and lower electrodes of a single cantilever beam of a MEMS unit on the same side are divided into multiple zones arranged side by side, the multiple zones are cascaded, and the generated signals are connected to one ADC; the upper and lower electrodes of a single cantilever beam of a MEMS unit on the other side are divided into multiple zones arranged side by side, the multiple zones are cascaded, and the generated signals are connected to another ADC; 将两个ADC检测的信号相减,得到沿着MEMS单元组中相对应两个MEMS单元方向的加速信号;Subtract the signals detected by the two ADCs to obtain acceleration signals along the directions of the two corresponding MEMS units in the MEMS unit group; 将两个ADC检测的信号相加,得到垂直于MEMS单元阵列所在平面方向上的加速信号。The signals detected by the two ADCs are added together to obtain an acceleration signal in a direction perpendicular to the plane where the MEMS unit array is located. 4.如权利要求3所述的加速度计的信号处理方法,其特征在于,所述级联的方式为串联或者并联。4 . The signal processing method of an accelerometer according to claim 3 , wherein the cascade connection is in series or in parallel. 5.如权利要求2所述的加速度计的信号处理方法,其特征在于,所述加速度计由N个MEMS单元组构成正多边形结构且关于所述正多边形结构呈中心对称,N为正整数;5. The signal processing method of the accelerometer according to claim 2, characterized in that the accelerometer is composed of N MEMS units forming a regular polygon structure and is centrally symmetric about the regular polygon structure, and N is a positive integer; 每个MEMS单元的悬臂梁分别连接一个ADC,用于检测每个MEMS单元产生的变量信号;The cantilever beam of each MEMS unit is respectively connected to an ADC for detecting the variable signal generated by each MEMS unit; 在一个MEMS单元组中,将相对应的两个MEMS单元产生的变量信号相减,得到沿着该MEMS单元组中相对应的两个MEMS单元方向的加速信号;In a MEMS unit group, variable signals generated by two corresponding MEMS units are subtracted to obtain acceleration signals along the directions of the two corresponding MEMS units in the MEMS unit group; 将全部或者部分MEMS单元产生的变量信号相加,得到垂直于正多边形结构所在平面方向上的加速信号。The variable signals generated by all or part of the MEMS units are added together to obtain an acceleration signal in a direction perpendicular to the plane where the regular polygon structure is located. 6.如权利要求5所述的加速度计的信号处理方法,其特征在于,所述N个MEMS单元组全部或者部分处于工作状态。6 . The signal processing method of an accelerometer according to claim 5 , wherein all or part of the N MEMS unit groups are in working state. 7.如权利要求1所述的加速度计的信号处理方法,其特征在于,所述ADC具有高输入阻抗性能。7 . The signal processing method of an accelerometer according to claim 1 , wherein the ADC has a high input impedance performance. 8.如权利要求7所述的加速度计的信号处理方法,其特征在于,所述ADC的输入阻抗不小于100Mohm。8 . The signal processing method of an accelerometer according to claim 7 , wherein the input impedance of the ADC is not less than 100 Mohm. 9.如权利要求1-8任一项所述的加速度计的信号处理方法,其特征在于,所述MEMS单元中的悬臂梁由压电材料制成。9 . The signal processing method of an accelerometer according to claim 1 , wherein the cantilever beam in the MEMS unit is made of piezoelectric material. 10.一种加速度计的信号处理方法,其特征在于,对加速度计中MEMS单元产生的电学变量先在模拟域用两个缓冲器分别实现相加与相减,两个缓冲器再直接输出模拟信号或者分别通过ADC进行数字化输出。10. A signal processing method for an accelerometer, characterized in that the electrical variables generated by the MEMS unit in the accelerometer are first added and subtracted in the analog domain using two buffers, and the two buffers then directly output analog signals or digitize and output them through ADCs. 11.如权利要求10所述的加速度计的信号处理方法,其特征在于,所述两个缓冲器具有两路差分或单端输入,能对输入的电学变量信号进行相加或相减并放大。11. The signal processing method of an accelerometer according to claim 10, characterized in that the two buffers have two differential or single-ended inputs, and can add or subtract and amplify the input electrical variable signals.
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