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CN118565386A - A large-range autocollimation device with automatic tracking function and a measuring method - Google Patents

A large-range autocollimation device with automatic tracking function and a measuring method Download PDF

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Publication number
CN118565386A
CN118565386A CN202410653050.3A CN202410653050A CN118565386A CN 118565386 A CN118565386 A CN 118565386A CN 202410653050 A CN202410653050 A CN 202410653050A CN 118565386 A CN118565386 A CN 118565386A
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China
Prior art keywords
movable support
range
angle
photoelectric sensor
auto
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Inventor
于洋
谭久彬
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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Priority to CN202410653050.3A priority Critical patent/CN118565386A/en
Publication of CN118565386A publication Critical patent/CN118565386A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00Measuring angles

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A wide-range auto-collimation device with an automatic tracking function and a measurement method relate to the field of precise small-angle measurement and solve the problems that a photoelectric auto-collimation device with a traditional structure is limited in measurement range and large in alignment difficulty, and the angle change range of a measured target in the measurement process is easy to exceed the measurement range. The device comprises a light source, a collimating objective lens, a measured reflecting mirror, a beam splitting prism, a first photoelectric sensor, a base and a supporting and posture adjusting module; and adding a posture adjusting mechanism on the auto-collimation base, adjusting the spot target at the boundary of the measuring range back to the center by adjusting the direction of the auto-collimation base, and recording the angle adjusted by the auto-collimation body in real time, so that the spot target can continuously deviate and perform angle measurement. The self-collimating device actively adjusts the self posture, enlarges the angle measurement range, and has the function of tracking measurement. The invention is suitable for angle measurement of vehicle-mounted navigation positioning and the like.

Description

Wide-range auto-collimation device with automatic tracking function and measurement method
Technical Field
The invention belongs to the field of precise small-angle measurement, and particularly relates to a large-range auto-collimation device and method with an automatic tracking function.
Background
The photoelectric auto-collimator is an ultra-precise small-angle measuring instrument based on an optical auto-collimation principle, and is one of important instruments in the field of angle measurement. The photoelectric auto-collimator has the advantages of high precision, high resolution, high speed, non-contact, small volume and the like, and has wide application in the fields of ultra-precision machining and manufacturing, precision motion control, semiconductor manufacturing, large scientific devices such as astronomical telescope installation and the like.
The range of the autocollimator is one of important indexes for angle measurement, is influenced by system parameters such as focal length, caliber, resolution and the like of an optical system, and is generally not more than +/-1000'. In the actual angle measurement task process, the optical axis of the auto-collimator is used as a zero reference for angle measurement, and the optical axis of the auto-collimator is generally immovable, so that the angle change range of a measured object can be measured only in the range of the photoelectric auto-collimator. Moreover, according to the auto-collimation principle, as the working distance increases, the practical range of the photoelectric auto-collimator is smaller, which severely limits the application of the photoelectric auto-collimator in the long-distance high-precision angle measurement requirement scenes such as bridge construction, ship assembly and large astronomical telescope attitude monitoring.
Furthermore, before starting the measurement, the electro-optical autocollimator needs to be manually adjusted and aligned with a plane mirror fixed on the object to be measured. Because the measurable angle range of the photoelectric auto-collimator is too small, the alignment process consumes long time, and the manual adjustment of the position and the posture of the photoelectric auto-collimator makes the light beam enter the measuring range more difficult, and the use is not convenient and efficient.
At present, as shown in fig. 1, the photoelectric auto-collimator with a traditional structure comprises a light source 1, a collimating objective lens 2, a measured reflecting mirror 3, a beam splitting prism 4, a first photoelectric sensor 5, a shell 6, a base and a support 7. The working principle is as follows: light emitted by the light source 1 is transmitted and collimated into parallel light beams through the beam splitting prism 4 and the collimating objective lens 2, and then is incident to the measured reflector 3; the light beam reflected by the tested reflector 3 is a measuring light beam, and is converged and imaged on a photosensitive plane of the first photoelectric sensor 5 after being transmitted by the collimating objective 2 and reflected by the beam splitting prism 4; the first photoelectric sensor 5 collects light intensity data of light spots, the position information of the light spots can be obtained through processing by a software algorithm, and the yaw angle and pitch angle of the detected reflector 3 are obtained according to an auto-collimation principle.
In summary, the conventional structure photoelectric auto-collimator has the following problems:
1. The angle measurement range of the photoelectric auto-collimator with the traditional structure is limited by the limitation of the focal length and the aperture size of an optical system, and the wide-range angle measurement is difficult to realize on a long-focus and high-resolution auto-collimation system. Meanwhile, the photoelectric autocollimator is used as a fixed angle measurement reference, and when the angle change of a measured target exceeds a measurement range, the autocollimator cannot track the angle change, so that a measurement task is interrupted.
2. The traditional photoelectric autocollimator has high angle measurement resolution, high precision and small measuring range, and in the instrument installation alignment stage, the autocollimation light beam irradiates the measured reflecting mirror and is successfully received by the autocollimator sensor by adopting manual adjustment of instrument gesture and angle change, so that the gesture adjustment range is large, the detectable area range is small, the adjustment time is long, and the high-efficiency alignment is difficult to realize.
Disclosure of Invention
The invention provides a wide-range auto-collimation device with an automatic tracking function and a method thereof, which aim at the problems that the photoelectric auto-collimation device with a traditional structure has a limited measuring range and large alignment difficulty, and the angle change range of a measured target easily exceeds the measuring range in the measuring process. Compared with the traditional photoelectric auto-collimator, the self-collimator has the capabilities of actively adjusting the self-posture, expanding the angle measurement range and realizing tracking measurement.
In order to achieve the above object, the present invention provides the following solutions:
the invention provides a wide-range auto-collimation device with an automatic tracking function, which comprises a light source, a collimation objective lens, a measured reflector, a beam splitter prism, a first photoelectric sensor, a base and a support and posture adjustment module, wherein the light source is arranged on the base;
the light emitted by the light source is projected into parallel light beams through the beam splitting prism and the collimating objective lens, reflected by the tested reflecting mirror, projected through the auto-collimating objective lens and reflected by the beam splitting prism, and converged and imaged on the photosensitive plane of the first photoelectric sensor;
the first photoelectric sensor is used for collecting light spot light intensity data, obtaining position information of light spots and sending light spot position signals to the posture adjustment module according to the position information of the light spots;
The base and the support are used for supporting the auto-collimation device;
the attitude adjusting module is used for adjusting the movable supports at the base and the bottom of the support according to the light spot position signals, so that the adjustment of the pitching angle and the yaw angle is realized.
Further, in a preferred embodiment, the first photosensor is located at a focal plane of the collimator objective.
Further, in a preferred embodiment, the base and the support include a first movable support, a second movable support, a third movable support, a base plate, and a sector rail;
The gesture adjusting module is arranged on the base flat plate;
the first movable support, the second movable support and the third movable support are arranged at the bottom of the base flat plate, and the first movable support, the second movable support and the third movable support are distributed in a triangular mode;
the first movable support and the second movable support are both disposed within the sector rail.
The attitude adjustment module is used for driving the first movable support to realize pitching angle adjustment according to the light spot position signals and driving the second movable support and the third movable support to realize yaw angle adjustment according to the light spot position signals.
Further, in a preferred embodiment, the fan-shaped track is a fan-shaped track with the first movable support as a center.
Further, in a preferred embodiment, the center of gravity of the auto-collimation device falls at the center of the triangle geometry.
Further, in a preferred embodiment, the first movable support has a double-layer cylindrical structure, and a bottom surface of the first movable support is hemispherical.
Further, in a preferred embodiment, the first photoelectric sensor is implemented by a high-precision small-range photoelectric sensor.
Further, in a preferred embodiment, the apparatus further includes a second light splitting prism and a second photosensor;
the light emitted by the light source is projected into parallel light beams through the beam splitting prism and the collimating objective lens, reflected by the measured reflecting mirror, projected through the auto-collimating objective lens, reflected by the first beam splitting prism and reflected by the second beam splitting prism, and converged and imaged on the photosensitive planes of the first photoelectric sensor and the second photoelectric sensor;
the second photoelectric sensor is used for collecting light spot light intensity data and obtaining position information of the light spots;
The attitude adjustment module is used for receiving the position information of the light spot, and driving the first movable support to adjust the pitching angle and driving the second movable support and the third movable support to adjust the yaw angle when the position information of the light spot is in a critical range.
Further, in a preferred embodiment, the second photosensor is implemented using a wide range photosensor.
The invention also provides a wide-range auto-collimation measurement method with an automatic tracking function, which is realized based on the wide-range auto-collimation measurement device with the automatic tracking function, and comprises the following steps:
S1, completing the preparation work of an auto-collimation device;
s2, after the measuring light beam is reflected by the measured reflecting mirror, the spot position information of converging imaging on the first photoelectric sensor is x11 and y11, and an initial yaw angle alpha 11 and a pitch angle beta 11 of the measured reflecting mirror taking a horizontal reference as a reference are obtained according to the spot position information;
S3, changing the posture of a measured target, changing the yaw angle and the pitch angle of a measured reflecting mirror, and converging the measuring beam on the first photoelectric sensor again to form spot position information of x12 and y12;
if the spot position information x12, y12 does not meet the set edge position information requirement, the step S4 is entered;
If the spot position information x12 and y12 meet the set edge position information requirement, calculating a yaw angle alpha 12 and a pitch angle beta 12, and entering a step S5;
S4, judging that the light spots are not positioned at the edge of the photosensitive plane of the first photoelectric sensor, and obtaining the deflection angle of the autocollimation measurement measured reflecting mirror to be alpha=α12- α11; beta=β12- β11, the next round of measurement can be performed;
S5, driving the first movable support to stretch and retract according to the yaw angle alpha 12 and the pitch angle beta 12 by the gesture adjusting module to change so as to realize the rotation angle beta 2 of the auto-collimation device in the pitch direction, enabling the second movable support and the third movable support to rotate along a sector-shaped track with the first movable support as a circle center by the rotation angle alpha 2, enabling the gesture of the auto-collimation device to change until a reference beam imaging light spot is not positioned at the edge position of a photosensitive area of the first photoelectric detector, obtaining position information x3 and y3 of the light spot at the moment, and obtaining the yaw angle alpha 3 and the pitch angle beta 3 according to the light spot position information;
s6, the deflection angle of the measured reflecting mirror measured by the auto-collimator finally relative to the initial position is alpha=alpha 3-alpha 2-alpha 11; beta = beta 3-beta 2-beta 11.
The beneficial effects of the invention are as follows:
1. The invention provides a wide-range auto-collimation measuring device with an automatic tracking function, which is characterized in that a posture adjusting structure is added on an auto-collimation base, so that when light spot position information meets the requirement of edge position information, namely, light spots are about to exceed the edge position, the posture adjusting structure drives the auto-collimation device to change according to the light spot position information meeting the requirement of the edge position information until an imaging light spot is not positioned at the edge position of a photosensitive area, namely, a light spot target at the boundary of a measuring range is adjusted to the center, the auto-collimation device actively adjusts the self posture, enlarges the angle measuring range, and has the function of tracking measurement.
Further, compared with the prior art, the three-dimensional adjustable self-collimation base structure is added, when the measured angle is close to the edge of the measuring range, the posture of the self-collimation device is adjusted, so that the current self-collimation light spot returns to the center of the photosensitive area, angle measurement values before and after posture adjustment are recorded, and the measurement task is continuously carried out, and the problems that the angle measurement range of the existing photoelectric self-collimation device with the traditional structure is limited and wide-range angle measurement cannot be realized are solved.
Furthermore, compared with the prior art, the invention realizes large-range low-precision and small-range high-precision auto-collimation measurement by introducing two photoelectric sensors with large and small photosensitive areas, expands the auto-collimation measurable range and is beneficial to realizing quick auto-collimation alignment.
2. The invention provides a wide-range auto-collimation measurement method with an automatic tracking function, which comprises the steps of firstly obtaining an initial yaw angle and a pitch angle of a measured reflecting mirror with a horizontal reference before the posture is changed, then judging whether the position of a facula after the posture is changed exceeds an edge position, and if the facula does not exceed the edge position, directly obtaining the deflection angle of the measured reflecting mirror relative to the initial position through the differences of the yaw angle and the pitch angle after the posture is changed and the initial yaw angle and the pitch angle, namely obtaining the deflection angle of a measured system; if the light spot is about to exceed the edge position, the gesture adjustment module driving device rotates a certain angle according to the light spot position until the light spot does not exceed the edge position, the yaw angle and pitch angle of the light spot which do not exceed the edge position are subtracted by the difference of the rotation angle of the device, the initial yaw angle and the pitch angle, the deflection angle of the detected reflector relative to the initial position is obtained, and the wide-range angle measurement with an automatic tracking function is realized.
The invention is suitable for angle measurement of vehicle-mounted navigation positioning and the like.
Drawings
FIG. 1 is a schematic view of a conventional structure photoelectric auto-collimator as mentioned in the background art;
FIG. 2 is a side view of a wide-range auto-collimation device with auto-tracking function according to the second embodiment;
FIG. 3 is a schematic view of a base and a support according to a third embodiment;
fig. 4 is a schematic view of a first movable support according to a sixth embodiment;
Fig. 5 is a side view of an auto-collimation device added with a second light-splitting prism and a second photosensor as described in embodiment eight.
The device comprises a 1-light source, a 2-collimating objective lens, a 3-tested reflecting mirror, a 4-beam splitter prism, a 5-first photoelectric sensor, a 6-shell, a 7-base and a support, a 71-first movable support, a 72-second movable support, a 73-third movable support, a 74-posture adjusting module, a 75-base flat plate, a 76-sector rail, an 8-second beam splitter prism and a 9-second photoelectric sensor.
Detailed Description
It should be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
The following describes in further detail the embodiments of the present invention with reference to the drawings and examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by those skilled in the art without departing from the spirit of the invention, which falls within the scope of the invention.
The first embodiment, referring to fig. 2 for describing the present embodiment, provides a wide-range auto-collimation device with an auto-tracking function, where the device includes a light source 1, a collimation objective 2, a measured reflector 3, a beam splitter prism 4, a first photoelectric sensor 5, a base and support 7, and a posture adjustment module 74;
the light emitted by the light source 1 is projected into a parallel light beam through the beam splitting prism 4 and the collimating objective lens 2, reflected by the tested reflector 3, projected through the auto-collimating objective lens 2 and reflected by the beam splitting prism 4, and focused and imaged on a photosensitive plane of the first photoelectric sensor 5;
The first photoelectric sensor 5 is used for collecting light spot light intensity data and obtaining position information of light spots, and sending light spot position signals to the posture adjustment module 74 according to the position information of the light spots;
the base and the support 7 are used for supporting the auto-collimation device;
The gesture adjusting module 74 is configured to adjust the base and the movable support at the bottom of the support 7 according to the spot position signal, so as to adjust the pitch angle and the yaw angle.
In practical application, as shown in fig. 2, the wide-range auto-collimation device with an auto-tracking function includes a light source 1, a collimating objective 2, a measured reflector 3, a beam splitter prism 4, a first photoelectric sensor 5, a base and support 7, and an attitude adjustment module 74;
the light source 1, the beam splitter prism 4, the collimator objective lens 2 and the measured reflector 3 are sequentially arranged on the same axis as shown in fig. 2, and the axis is the optical axis of the optical system of the auto-collimation device in the embodiment;
The light source 1 is positioned on the focal plane of the collimating objective 2; the reflecting surfaces of the beam splitting prism 4 and the second polarization beam splitter 8 are arranged at an angle of 45 degrees with the optical axis, and after the light beam propagating along the optical axis is reflected by the reflecting surfaces, the transmission direction of the light beam is changed by 90 degrees;
the first photoelectric sensor 5 is positioned on the focal plane of the collimating objective lens 2, the center of the first photoelectric sensor is coincident with the optical axis of the optical system, and parallel light transmitted along the optical axis is transmitted by the collimating objective lens 2 and then is just focused and imaged at the center of the sensor;
the base and the support 7 comprise a first movable support 71, a second movable support 72, a third movable support 73, a base flat plate 75 and a sector-shaped track 76 taking the first movable support 71 as a center; the first movable support 71, the second movable support 72 and the third movable support 73 are distributed in a triangular shape, and the gravity center of the auto-collimation device falls on the geometric center position of the triangle;
The posture adjustment device 74 is fixed to the base plate 75, and has a function of receiving the spot position signal of the first photosensor 5 and driving the first movable support 71, the second movable support 72, and the third movable support 73;
The sector rail 76 is a movement rail when the second movable support 72 and the third movable support 73 are adjusted in posture; the first movable support 71 is driven by the posture adjusting device 74 to adjust in the pitching angle direction, and the second movable support 72 and the third movable support 73 are driven to adjust in the yaw angle direction, so that the self-direction adjustment of the autocollimator is realized;
The light emitted by the light source 1 is projected into parallel light beams through the beam splitting prism 4 and the collimating objective lens 2, then reflected by the measured reflector 3, projected by the collimating objective lens 2, reflected by the beam splitting prism 4, and focused and imaged on the photosensitive plane of the first photoelectric sensor 5; the first photoelectric sensor 5 collects light spot light intensity data, can be processed by a software algorithm to obtain position information (x 1,y1) of a light spot, and obtains a yaw angle alpha 1 and a pitch angle beta 1 of the measured reflecting mirror 3 relative to an auto-collimation optical axis according to an auto-collimation principle, wherein f is the focal length of the collimating objective lens 2;
In the process of measuring the self-alignment angle, the posture adjustment module 74 receives the position (x 1,y1) of the light spot output by the first photoelectric sensor 5, when the light spot is located at the edge of the photosensitive plane of the first photoelectric sensor 5, that is, the position (x 1,y1) of the light spot output by the first photoelectric sensor 5 reaches a set critical range, the posture adjustment module 74 drives the first movable support 71 to change in height so as to realize the angle change of the pitching direction, and the second movable support 72 and the third movable support 73 move along the sector-shaped track 76 taking the first movable support 71 as the center of the circle so as to realize the angle change of the yaw direction, thereby adjusting the direction of the self-collimator until the imaging light spot position of the light source 1 emits the light beam moves to the center position of the photoelectric sensor 5, that is (x 1=0,y1 =0), and at this time, the angle alpha 1 and the pitch angle beta 1 of the measured reflecting mirror before the self-alignment posture adjustment are stored. When the angle of the detected reflector 3 continuously changes and the light spot deviates from the center position (x 2,y2) of the photoelectric sensor again, the deflection angle yaw angle alpha 2 and pitch angle beta 2 of the detected reflector 3 are detected by the auto-collimator in the same way;
the total change angle of the measured reflector 3 is finally obtained as follows:
α=α12
β=β12
Aiming at the problem that the photoelectric autocollimator with the traditional structure does not have a wide-range angle measurement function and is easy to exceed the range of the autocollimator in the angle measurement process, the embodiment provides the wide-range autocollimator with the automatic tracking function, and the gesture adjustment structure is added on the autocollimator base, so that when the light spot position information meets the requirement of edge position information, namely, the light spot is about to exceed the edge position, the gesture adjustment structure drives the autocollimator to change according to the light spot position information meeting the requirement of the edge position information until an imaging light spot is not positioned at the edge position of a photosensitive area, namely, the light spot target at the boundary of a measurement range is adjusted to the center, thereby realizing the active adjustment of the gesture of the autocollimator and the expansion of the angle measurement range, and having the function of realizing tracking measurement.
In the second embodiment, the position of the first photoelectric sensor 5 in the wide-range auto-collimation device with an auto-tracking function according to the first embodiment is illustrated;
The first photosensor 5 is located in the focal plane of the collimator objective 2.
In practical application, the first photoelectric sensor 5 is located on the focal plane of the collimator objective 2, the center of the first photoelectric sensor coincides with the optical axis of the optical system, and parallel light transmitted along the optical axis is transmitted by the collimator objective 2 and then focused and imaged at the center of the sensor.
A third embodiment, referring to fig. 3, illustrates the present embodiment, which is an example of a base and a support 7 in a wide-range auto-collimation device with an auto-tracking function described in the second embodiment;
The base and support 7 comprises a first movable support 71, a second movable support 72, a third movable support 73, a base plate 75 and a sector rail 76;
The posture adjustment module 74 is provided on the base plate 75;
The first movable support 71, the second movable support 72 and the third movable support 73 are all arranged at the bottom of the base flat plate 75, and the first movable support 71, the second movable support 72 and the third movable support 73 are distributed in a triangular shape;
the first movable support 72 and the second movable support 73 are each disposed within the sector-shaped track 76.
The attitude adjustment module 74 is used for driving the first movable support 71 to adjust a pitch angle according to the spot position signal, and is also used for driving the second movable support 72 and the third movable support 73 to adjust a yaw angle according to the spot position signal.
In practical application, as shown in fig. 3, the base and support 7 includes a first movable support 71, a second movable support 72, a third movable support 73, a base plate 75, and a sector-shaped track 76 centered on the first movable support 71; the first movable support 71, the second movable support 72 and the third movable support 73 are distributed in a triangular shape, and the gravity center of the auto-collimation device falls on the geometric center position of the triangle;
The posture adjustment device 74 is fixed to the base plate 75, and has a function of receiving the spot position signal of the first photosensor 5 and driving the first movable support 71, the second movable support 72, and the third movable support 73;
The sector rail 76 is a movement rail when the second movable support 72 and the third movable support 73 are adjusted in posture; the first movable support 71 is driven by the posture adjusting device 74 to adjust in the pitching angle direction, and the second movable support 72 and the third movable support 73 are driven to adjust in the yaw angle direction, so that the self-direction adjustment of the autocollimator is realized;
The attitude adjustment module 74 is configured to receive a light spot position signal of the first photoelectric sensor 5, and is further configured to drive the first movable support 71 to implement pitch angle adjustment according to the light spot position signal, and is further configured to drive the second movable support 72 and the third movable support 73 to implement yaw angle adjustment according to the light spot position signal, so as to implement adjustment of a direction of the auto-collimator itself.
The embodiment provides a wide-range auto-collimation measurement method with an automatic tracking function. And adding a posture adjusting mechanism on the auto-collimation base, adjusting the spot target at the boundary of the measuring range back to the center by adjusting the direction of the auto-collimation body, and recording the angle of the auto-collimation body in real time. The self-collimating device actively adjusts the self posture, enlarges the angle measurement range, and has the function of tracking measurement.
In the fourth embodiment, the fan-shaped track 76 in the wide-range auto-collimation device with an auto-tracking function according to the third embodiment is illustrated;
the sector-shaped track 76 is a sector-shaped track of movement centered on the first movable support 71.
In the fifth embodiment, the positions of the first movable support 71, the second movable support 72, and the third movable support 73 in the wide-range auto-collimation device with an auto-tracking function according to the fourth embodiment are illustrated;
The first movable support 71, the second movable support 72 and the third movable support 73 are distributed in a triangle, and the center of gravity of the auto-collimation device falls on the geometric center of the triangle.
A sixth embodiment, which is described with reference to fig. 4, is an example of the structure of the first movable support 72 in the wide-range auto-collimation device with an auto-tracking function described in the fifth embodiment;
the first movable support 72 has a double-layer cylindrical structure, and the bottom surface of the first movable support 72 has a hemispherical shape.
In practical application, as shown in fig. 4, the first movable support 71 has a double-layer cylindrical structure, has a certain bearing capacity, and has a hemispherical bottom surface.
In the seventh embodiment, the first photoelectric sensor 5 in the wide-range auto-collimation device with an automatic tracking function described in the sixth embodiment is illustrated;
The first photoelectric sensor 5 is realized by adopting a high-precision small-range photoelectric sensor.
In practical application, the first photoelectric sensor 5 is implemented by using a small-range CCD or QPD, but the problem of frequent adjustment of the posture of the autocollimator arises.
An eighth embodiment is described with reference to fig. 5, in which a second dichroic prism 8 and a second photoelectric sensor 9 are added to the wide-range auto-collimation device with an auto-tracking function described in the seventh embodiment;
The light emitted by the light source 1 is projected into parallel light beams through the beam splitting prism 4 and the collimating objective lens 2, reflected by the tested reflector 3, projected through the auto-collimating objective lens 2, reflected by the first beam splitting prism 4 and reflected by the second beam splitting prism 8, and focused and imaged on the photosensitive planes of the first photoelectric sensor 5 and the second photoelectric sensor 9;
The second photoelectric sensor 9 is used for collecting light spot light intensity data and obtaining position information of the light spots;
The attitude adjustment module 74 is configured to receive the position information of the light spot, and drive the first movable support 71 to implement pitch angle adjustment and drive the second movable support 72 and the third movable support 73 to implement yaw angle adjustment when the position information of the light spot is in a critical range.
In practical application, the embodiment aims to solve the problem that the first photoelectric sensor 5 is realized by adopting a high-precision small-range photoelectric sensor, and the posture of the auto-collimator needs to be frequently adjusted. The present embodiment adds the second dichroic prism 8 and the second photoelectric sensor 9 on the basis of the wide-range auto-collimation device with an auto-tracking function described in the seventh embodiment;
The light emitted by the light source 1 is projected into parallel light beams through the first beam splitting prism 4 and the collimating objective lens 2, then reflected by the measured reflector 3, projected by the collimating objective lens 2, reflected by the first beam splitting prism 4 and reflected by the second beam splitting prism 8, and focused and imaged on the photosensitive planes of the first photoelectric sensor 5 and the second photoelectric sensor 9; the second photoelectric sensor 9 collects light spot light intensity data, can be processed by a software algorithm to obtain position information (x 2,y2) of a light spot, and obtains a yaw angle alpha 2 and a pitch angle beta 2 of the measured reflecting mirror 3 relative to an auto-collimation optical axis according to an auto-collimation principle, wherein f is the focal length of the collimating objective lens 2;
In the process of measuring the self-alignment angle, when the measured reflecting mirror 3 deflects to cause the position of the self-alignment imaging light spot to deviate and exceed the photosensitive area of the first photoelectric sensor 5 until the position moves to the edge position of the photosensitive area of the second photoelectric sensor 9, the posture adjustment module 74 receives the position (x 2,y2) of the light spot output by the second photoelectric sensor 9, when the light spot is positioned at the photosensitive plane edge of the second photoelectric sensor 9, namely the position (x 2,y2) of the light spot output by the second photoelectric sensor 9 reaches a set critical range, the posture adjustment module 74 drives the first movable support 71 to change in height to realize the angle change of the pitching direction, and the second movable support 72 and the third movable support 73 to move along the sector-shaped track 76 taking the first movable support 71 as the center of a circle to realize the angle change of the yaw direction, so that the direction of the self-alignment instrument is adjusted, until the imaging light spot position of the light source 1 emits the light beam moves to the center position of the first photoelectric sensor 5, namely (x 2=0,y2 =0), and the self-alignment device records the angle of the deflection of the measured reflecting mirror before adjustment. Similarly, the light spot is located at the center of the first photoelectric sensor 5, the measured mirror 3 can continue to deflect in angle, and the auto-collimation device can measure the angle. The total deflection angle of the measured reflector 3 is the sum of the two angle measurement results before and after auto-collimation adjustment.
The second photoelectric sensor 9 is a wide-range photoelectric sensor, the measurable light spot displacement range is larger, and the problem that the gesture of the auto-collimator needs to be frequently adjusted in the seventh embodiment is solved.
The ninth embodiment and the present embodiment are illustrative examples of a second photoelectric sensor 9 in a wide-range auto-collimation device with an auto-tracking function described in the eighth embodiment;
the second photoelectric sensor 9 is realized by a wide-range photoelectric sensor.
In practical application, the second photosensor 9 is implemented by using a wide-range PSD.
An embodiment ten, the present embodiment provides a wide-range auto-collimation measurement method with an auto-tracking function, where the method is implemented based on the wide-range auto-collimation measurement device with an auto-tracking function described in any one of the first to ninth embodiments, and the method is as follows:
S1, completing the preparation work of an auto-collimation device;
s2, after the measuring light beam is reflected by the measured reflecting mirror, the spot position information of converging imaging on the first photoelectric sensor is x11 and y11, and an initial yaw angle alpha 11 and a pitch angle beta 11 of the measured reflecting mirror taking a horizontal reference as a reference are obtained according to the spot position information;
S3, changing the posture of a measured target, changing the yaw angle and the pitch angle of a measured reflecting mirror, and converging the measuring beam on the first photoelectric sensor again to form spot position information of x12 and y12;
if the spot position information x12, y12 does not meet the set edge position information requirement, the step S4 is entered;
If the spot position information x12 and y12 meet the set edge position information requirement, calculating a yaw angle alpha 12 and a pitch angle beta 12, and entering a step S5;
S4, judging that the light spots are not positioned at the edge of the photosensitive plane of the first photoelectric sensor, and obtaining the deflection angle of the autocollimation measurement measured reflecting mirror to be alpha=α12- α11; beta=β12- β11, the next round of measurement can be performed;
S5, enabling the posture of the auto-collimation device to change: according to the yaw angle alpha 12 and the pitch angle beta 12, the gesture adjusting module drives the first movable support to change the telescopic length so as to realize the rotation angle beta 2 of the auto-collimation device in the pitch direction, the second movable support and the third movable support rotate along a sector-shaped track taking the first movable support as the center of a circle by an angle alpha 2 until a reference beam imaging light spot is not positioned at the edge position of a photosensitive area of the first photoelectric detector, the position information x3 and y3 of the light spot at the moment are obtained, and the yaw angle alpha 3 and the pitch angle beta 3 are obtained according to the position information of the light spot;
s6, the deflection angle of the measured reflecting mirror measured by the auto-collimator finally relative to the initial position is alpha=alpha 3-alpha 2-alpha 11; beta = beta 3-beta 2-beta 11.
In practical application, the specific measurement method of the embodiment is as follows:
A, fixing a tested reflector 3 on a tested target, and aligning an auto-collimation device to a reflecting surface of the tested reflector 3;
Step b, starting up, working the auto-collimation device, adjusting the movable supporting structure to be in the middle position of the telescopic range and locking, and if:
(1) The autocollimator does not display the angle measurement result of the measured reflector 3, the light beam is imaged outside the photosensitive area of the photoelectric sensor, the position and the posture of the autocollimator are manually adjusted, the autocollimator displays the angle measurement result, and the step c is entered;
(2) The autocollimator displays the angle measurement result of the measured reflector 3, then the light beam is imaged in the photosensitive area of the photoelectric sensor, the angle change of the measured reflector 3 is in the range of the autocollimator, and the step c is entered;
C, after the measuring beam of the auto-collimation device is reflected by the measured reflector 3, converging and imaging the measuring beam on the first photoelectric sensor 5 to obtain position information (x 11, y 11) of an imaging light spot, wherein the measured reflector 3 uses an initial yaw angle and a pitch angle which are referenced by a horizontal reference as a reference, α11=f1 (x 11), β11=f2 (y 11), and f1 and f2 represent two functions;
Step d, when the gesture of the measured object changes, the yaw angle and pitch angle of the measured reflecting mirror 3 change, the measuring beam is focused again and imaged on the first photoelectric sensor 5, and the position information (x 12, y 12) of the imaging light spot is obtained, if:
(1) During the measurement of the autocollimator, the first photodetector 5 displays that the position information (x 12 y 12) of the light spot converged by the measuring beam does not meet the set edge position information requirement, namely, the light spot is not positioned at the photosensitive plane edge of the first photoelectric sensor 5 at the moment; step e is entered;
(2) During the measurement of the auto-collimation device, the first photoelectric detector 5 displays that the position information (x 12 y 12) of the light spot converged by the measuring light beam meets the set edge position information requirement, namely, the light spot is positioned at the edge of the photosensitive plane of the first photoelectric sensor 5; calculating the yaw angle and pitch angle at the moment, wherein α12=f1 (x 12), β12=f2 (y 12), and f1 and f2 represent two functions; step f is entered;
Step e, during measurement, the light spot is not located at the photosensitive plane edge of the first photoelectric sensor 5, i.e. the deflection angle of the autocollimation measurement plane mirror is α=α12- α11; beta=β12- β11, the next round of measurement can be performed;
Step f, driving the first movable support 71 to stretch for a certain length through the gesture adjusting module 74 according to the alpha 12 and the beta 12, so as to realize a rotation angle beta 2 in the pitching direction; the second movable support 72 and the third movable support 73 rotate by a certain angle alpha 2 along a sector-shaped track 76 taking the first movable support 71 as a circle center to enable the posture of the auto-collimation device to change until a reference beam imaging light spot is not located at the edge position of a photosensitive area of the photoelectric detector 5, position information (x 3, y 3) of the light spot at the moment is obtained, a yaw angle and a pitch angle at the moment are calculated, alpha 3 = f1 (x 3), beta 3 = f2 (y 3), and f1 and f2 represent two functions; step g is carried out;
Step g, the deflection angle of the measured reflecting mirror 3 measured finally by the autocollimator relative to the initial position is alpha=alpha 3-alpha 2-alpha 11; beta = beta 3-beta 2-beta 11.
Aiming at the problem that the photoelectric auto-collimation device with the traditional structure does not have a wide-range angle measurement function and is easy to exceed the self range of the auto-collimation device in the angle measurement process, the embodiment provides a wide-range auto-collimation measurement method with an automatic tracking function. Judging whether the spot position of the measuring beam meets the requirement of edge position information, if not, the spot does not exceed the edge position, and directly obtaining the deflection angle of the autocollimation measuring measured reflecting mirror, namely obtaining the deflection angle of the measured system; if the light spot is satisfied, the light spot is about to exceed the edge position, the self-collimation gesture is adjusted through the gesture adjusting structure to generate angle deflection until the light spot does not exceed the edge position, so that the deflection angle of the measured reflector relative to the initial position is calculated, and the wide-range angle measurement with the automatic tracking function is realized.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
The above description is only an example of the present invention and is not limited to the present invention, but various modifications and changes will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims (10)

1.一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述装置包括光源(1)、准直物镜(2)、被测反射镜(3)、分光棱镜(4)、第一光电传感器(5)、底座及支撑(7)和姿态调整模块(74);1. A large-range autocollimation device with an automatic tracking function, characterized in that the device comprises a light source (1), a collimating lens (2), a reflector to be measured (3), a beam splitter prism (4), a first photoelectric sensor (5), a base and a support (7), and a posture adjustment module (74); 所述光源(1)发出的光,经过所述分光棱镜(4)和准直物镜(2)投射成平行光束后,经被测反射镜(3)反射后,再经过所述自准直物镜(2)投射和分光棱镜(4)反射后,汇聚成像在第一光电传感器(5)的感光平面上;The light emitted by the light source (1) is projected into a parallel light beam by the beam splitter prism (4) and the collimating lens (2), then reflected by the measured reflector (3), and then projected by the self-collimating lens (2) and reflected by the beam splitter prism (4), and then converged to form an image on the photosensitive plane of the first photoelectric sensor (5); 所述第一光电传感器(5)用于采集光斑光强数据并获得光斑的位置信息,并根据光斑的位置信息向姿态调整模块(74)发送光斑位置信号;The first photoelectric sensor (5) is used to collect light spot intensity data and obtain light spot position information, and send a light spot position signal to the attitude adjustment module (74) according to the light spot position information; 所述底座及支撑(7)用于支撑所述自准直装置;The base and support (7) are used to support the self-collimation device; 所述姿态调整模块(74)用于根据光斑位置信号调整所述底座及支撑(7)底部的可动支撑,实现俯仰角度和偏航角度的调节。The attitude adjustment module (74) is used to adjust the movable support at the bottom of the base and the support (7) according to the light spot position signal, so as to adjust the pitch angle and the yaw angle. 2.根据权利要求1所述的一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述第一光电传感器(5)位于准直物镜(2)的焦平面上。2. A large-range autocollimation device with automatic tracking function according to claim 1, characterized in that the first photoelectric sensor (5) is located on the focal plane of the collimating objective lens (2). 3.根据权利要求2所述的一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述底座及支撑(7)包括第一可动支撑(71)、第二可动支撑(72)、第三可动支撑(73)、底座平板(75)和扇形轨道(76);3. A large-range autocollimation device with automatic tracking function according to claim 2, characterized in that the base and support (7) include a first movable support (71), a second movable support (72), a third movable support (73), a base plate (75) and a fan-shaped track (76); 所述姿态调整模块(74)设置在所述底座平板(75)上;The posture adjustment module (74) is arranged on the base plate (75); 所述第一可动支撑(71)、第二可动支撑(72)和第三可动支撑(73)均设置在底座平板(75)的底部,且第一可动支撑(71)和第二可动支撑(72)、第三可动支撑(73)呈三角分布;The first movable support (71), the second movable support (72) and the third movable support (73) are all arranged at the bottom of the base plate (75), and the first movable support (71), the second movable support (72) and the third movable support (73) are distributed in a triangular shape; 所述第一可动支撑(72)和第二可动支撑(73)均设置在所述扇形轨道(76)内。The first movable support (72) and the second movable support (73) are both arranged in the fan-shaped track (76). 所述姿态调整模块(74)用于根据光斑位置信号驱动第一可动支撑(71)实现俯仰角度调节,还用于根据光斑位置信号驱动第二可动支撑(72)和第三可动支撑(73)实现偏航角度的调节。The attitude adjustment module (74) is used to drive the first movable support (71) to adjust the pitch angle according to the light spot position signal, and is also used to drive the second movable support (72) and the third movable support (73) to adjust the yaw angle according to the light spot position signal. 4.根据权利要求3所述的一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述扇形轨道(76)是以第一可动支撑(71)为圆心的扇形运动轨道。4. A large-range autocollimation device with automatic tracking function according to claim 3, characterized in that the fan-shaped track (76) is a fan-shaped motion track with the first movable support (71) as the center. 5.根据权利要求3所述的一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述自准直装置的重心落在三角几何中心位置。5. A large-range autocollimation device with automatic tracking function according to claim 3, characterized in that the center of gravity of the autocollimation device falls at the triangular geometric center position. 6.根据权利要求5所述的一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述第一可动支撑(72)为双层圆柱结构,且第一可动支撑(72)的底面为半球形。6. A large-range autocollimation device with automatic tracking function according to claim 5, characterized in that the first movable support (72) is a double-layer cylindrical structure, and the bottom surface of the first movable support (72) is hemispherical. 7.根据权利要求6所述的一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述第一光电传感器(5)采用高精度小量程光电传感器实现。7. A large-range autocollimation device with automatic tracking function according to claim 6, characterized in that the first photoelectric sensor (5) is implemented by a high-precision small-range photoelectric sensor. 8.根据权利要求7所述的一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述装置还包括第二分光棱镜(8)和第二光电传感器(9);8. A large-range autocollimation device with automatic tracking function according to claim 7, characterized in that the device further comprises a second beam splitter prism (8) and a second photoelectric sensor (9); 所述光源(1)发出的光,经过所述分光棱镜(4)和准直物镜(2)投射成平行光束后,经被测反射镜(3)反射后,再经过所述自准直物镜(2)投射、第一分光棱镜4反射和第二分光棱镜(8)反射后,汇聚成像在第一光电传感器(5)和第二光电传感器(9)的感光平面上;The light emitted by the light source (1) is projected into a parallel light beam by the beam splitter prism (4) and the collimating lens (2), is reflected by the measured reflector (3), and is then projected by the self-collimating lens (2), reflected by the first beam splitter prism 4, and reflected by the second beam splitter prism (8), and is then converged to form an image on the photosensitive planes of the first photoelectric sensor (5) and the second photoelectric sensor (9); 第二光电传感器(9)用于采集光斑光强数据并获得光斑的位置信息;The second photoelectric sensor (9) is used to collect light spot intensity data and obtain position information of the light spot; 所述姿态调整模块(74)用于接收所述光斑的位置信息,并当所述光斑的位置信息为临界范围时驱动第一可动支撑(71)实现俯仰角度调节和驱动第二可动支撑(72)、第三可动支撑(73)实现偏航角度的调节。The attitude adjustment module (74) is used to receive the position information of the light spot, and when the position information of the light spot is within a critical range, drive the first movable support (71) to adjust the pitch angle and drive the second movable support (72) and the third movable support (73) to adjust the yaw angle. 9.根据权利要求8所述的一种带有自动跟踪功能的大量程自准直装置,其特征在于,所述第二光电传感器(9)采用大量程光电传感器实现。9. A large-range autocollimation device with automatic tracking function according to claim 8, characterized in that the second photoelectric sensor (9) is implemented by a large-range photoelectric sensor. 10.一种带有自动跟踪功能的大量程自准直测量方法,其特征在于,所述方法基于权利要求1-9任意一项所述的一种带有自动跟踪功能的大量程自准直测量装置实现,所述方法为:10. A large-range autocollimation measurement method with automatic tracking function, characterized in that the method is implemented based on a large-range autocollimation measurement device with automatic tracking function according to any one of claims 1 to 9, and the method is: S1、完成自准直装置的准备工作;S1. Complete the preparation work of the autocollimation device; S2、测量光束经被测反射镜反射后,在第一光电传感器上会聚成像的光斑位置信息为x11,y11,根据光斑位置信息得到测反射镜以水平基准为参考的初始偏航角α11和俯仰角β11;S2, after the measuring light beam is reflected by the measured reflector, the light spot position information of the focused image on the first photoelectric sensor is x11, y11, and the initial yaw angle α11 and pitch angle β11 of the measuring reflector with the horizontal reference as the reference are obtained according to the light spot position information; S3、被测目标姿态发生变化,被测反射镜的偏航角与俯仰角发生变化,测量光束重新在第一光电传感器上会聚成像的光斑位置信息为x12,y12;S3, the attitude of the measured target changes, the yaw angle and pitch angle of the measured reflector change, and the measuring light beam converges again on the first photoelectric sensor to form an image with the spot position information x12, y12; 若光斑位置信息x12,y12不满足设定边缘位置信息要求,进入步骤S4;If the spot position information x12, y12 does not meet the requirements of setting edge position information, go to step S4; 若光斑位置信息x12,y12满足设定边缘位置信息要求,计算出偏航角α12和俯仰角β12,进入步骤S5;If the spot position information x12, y12 meets the set edge position information requirements, the yaw angle α12 and the pitch angle β12 are calculated, and the process goes to step S5; S4、判断光斑不位于第一光电传感器的感光平面边缘,得到自准直测量被测反射镜的偏转角度为α=α12–α11;β=β12–β11,可进行下一轮测量;S4, judging that the light spot is not located at the edge of the photosensitive plane of the first photoelectric sensor, and obtaining that the deflection angle of the reflector under test in the autocollimation measurement is α=α12–α11; β=β12–β11, and the next round of measurement can be performed; S5、根据偏航角α12和俯仰角β12,姿态调整模块驱动第一可动支撑伸缩长度变化,实现自准直装置在俯仰方向上转动角度β2,第二可动支撑和第三可动支撑沿以第一可动支撑为圆心的扇形轨道转动角度α2,使自准直装置姿态发生变化,直至参考光束成像光斑不位于第一光电探测器的感光区域的边缘位置,得到此时光斑的位置信息x3,y3,根据光斑位置信息得到偏航角α3与俯仰角β3;S5. According to the yaw angle α12 and the pitch angle β12, the attitude adjustment module drives the telescopic length of the first movable support to change, so that the self-collimation device rotates by an angle β2 in the pitch direction, and the second movable support and the third movable support rotate by an angle α2 along a fan-shaped track with the first movable support as the center, so that the attitude of the self-collimation device changes, until the imaging spot of the reference beam is not located at the edge of the photosensitive area of the first photodetector, and the position information x3, y3 of the spot at this time is obtained, and the yaw angle α3 and the pitch angle β3 are obtained according to the spot position information; S6、自准直仪最终测得的被测反射镜相对初始位置的偏转角度为α=α3-α2–α11;β=β3-β2–β11。S6. The deflection angle of the measured reflector relative to the initial position finally measured by the autocollimator is α=α3-α2–α11; β=β3-β2–β11.
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* Cited by examiner, † Cited by third party
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CN119334253A (en) * 2024-12-20 2025-01-21 昆明腾洋光学仪器有限公司 Telescope reflection surface positioning measurement system and method

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