CN118563262A - Linear evaporation source equipment - Google Patents
Linear evaporation source equipment Download PDFInfo
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- CN118563262A CN118563262A CN202411038908.1A CN202411038908A CN118563262A CN 118563262 A CN118563262 A CN 118563262A CN 202411038908 A CN202411038908 A CN 202411038908A CN 118563262 A CN118563262 A CN 118563262A
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- Prior art keywords
- plate
- sealing
- dust collection
- assembly
- cover
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
- B08B9/027—Cleaning the internal surfaces; Removal of blockages
- B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
- B08B9/035—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing by suction
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the technical field of evaporation coating, in particular to the technical field of linear evaporation source equipment. The linear evaporation source equipment driving assembly comprises a linear evaporation source equipment driving assembly, wherein connecting mechanisms are arranged at the tops of a plurality of moving ends of the driving assembly, and an evaporation assembly and a cover plate assembly are respectively arranged in the connecting mechanisms and at the connecting ends. According to the invention, different materials can be heated and evaporated through the evaporation assemblies, the driving assembly can drive the evaporation assemblies to move along the annular guide rail to adjust the positions, and the spray head assembly can move up and down at the positions under the adjustment of the adjustment assembly, so that the spray head assembly and the evaporation assemblies can be combined one by one under the cooperation of the driving assembly and the adjustment assembly, the substrate can be plated with a plurality of different films at the positions, and the dust collection assembly can absorb the residual evaporant in the connecting pipe before the spray head assembly and the next evaporation assembly are combined, so that the mixing among different evaporant is effectively avoided, and the purity and consistency of the plated film are ensured.
Description
Technical Field
The invention relates to the technical field of evaporation coating, in particular to linear evaporation source equipment.
Background
The technical equipment such as evaporation coating, VTD and the like is characterized in that after some materials are heated and fused into liquid state, the liquid materials are evaporated into vapor, the vapor is deposited on a substrate to realize coating, one key device of the equipment is an evaporator, and in order to realize the requirements of the surface of the existing substrate on the performances superior to the substrate, such as wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation resistance, electric conduction, magnetic conduction, insulation, decoration and the like, the substrate needs to be coated for a plurality of times, and a plurality of linearly distributed evaporation source equipment is arranged to heat and evaporate different materials for coating.
The utility model provides a linear evaporation source and evaporation equipment of patent publication No. CN105296934A for reduce the emergence of nozzle jam phenomenon, improve evaporation efficiency, wherein, linear evaporation source includes: a crucible with an opening at one end, wherein a hollow cavity for accommodating evaporation materials is arranged in the crucible; a first heater surrounding the outside of the crucible for providing heat to the crucible; a top cover covering the open end of the crucible, wherein a plurality of nozzles for spraying vaporized evaporation materials to the substrate to be plated are arranged on the top cover; further comprises: a second heater for providing the same heat to each nozzle, the second heater comprising: the heating ends are in one-to-one correspondence with the nozzles and are wrapped on the outer surfaces of the corresponding nozzles.
The equipment and the like are focused on the fact that a plurality of nozzles are used for heating one by one to be matched with a plurality of subchambers for coating, uniformity of coating is guaranteed, but when different functional coating is carried out on a substrate, different materials cannot be placed in the plurality of subchambers for heating and evaporating, because different materials are different in property, and the required temperature and pressure for evaporation are different, the different subchambers cannot be effectively evaporated simply by placing the same equipment in a classified manner, the coating requirements of different functions of the substrate can be met only by arranging a plurality of same equipment, namely, the heating and the evaporating of different materials can be carried out, the next heating and the evaporating of the material can be carried out after the coating of the previous material is evaporated, and the previous material needs to be manually replaced and cleaned, so that production cost can be improved, production efficiency can be reduced, and the equipment cannot meet the requirements of rapidly carrying out the coating of different functional coatings on the substrate.
Disclosure of Invention
The present invention is directed to a linear evaporation source apparatus for solving the problems set forth in the background art described above.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a linear evaporation source equipment, includes actuating assembly, actuating assembly's a plurality of remove end top all installs coupling mechanism, and actuating assembly's inside and link are installed evaporation subassembly and apron subassembly respectively, and actuating assembly is used for driving a plurality of evaporation subassembly adjustment position, and a plurality of evaporation subassembly is used for evaporating different coating materials, and the coupling mechanism cooperation apron subassembly is used for controlling evaporation subassembly's opening and shutting, be provided with adjusting assembly in the actuating assembly, and adjusting assembly's adjusting end bottom installs dust absorption subassembly, and dust absorption subassembly one end installs the shower nozzle subassembly, and dust absorption subassembly is used for clearing up residual evaporant in the shower nozzle subassembly, and adjusting assembly's adjusting end is used for controlling shower nozzle subassembly and evaporation subassembly and carries out plug combination, evaporation subassembly includes the cylinder body, and the seal groove has been seted up to the bottom of cylinder body, and the connector has been seted up to the top inner wall of seal groove, the shower nozzle subassembly includes shell and connecting pipe, and connecting pipe outward appearance cup joint sealing block, and the connecting pipe exposes the part and is used for forming grafting cooperation with the connector, the sealing block is used for carrying out suitable interference fit with the seal groove, the outward appearance of shell sets up the screw mouth, sets up with the communicating clearance mouth, adjusting assembly includes, the adjusting assembly includes, and is used for adjusting assembly and hose joint has the hose joint in the hose joint through the swivel joint.
Still further, the drive assembly includes annular mounting panel and a plurality of remove the end, and annular guide rail is installed to the inner wall of annular mounting panel, annular guide rail's internally mounted has the ring gear, remove the end and include the sliding block, and the sliding block has been seted up the spout and has been formed sliding fit with annular guide rail, rectangular plate is installed to the top outward appearance of sliding block, and servo motor is installed to the top outward appearance one corner of rectangular plate, the gear is installed to servo motor's output shaft run through rectangular plate, and the gear forms meshing transmission with the ring gear, the other triangle of the bottom outward appearance of rectangular plate is all rotated and is connected with the retainer wheel, and retainer wheel and annular guide rail form rolling fit.
Still further, coupling mechanism still includes connecting plate and link, and connecting plate fixed mounting is on the top outward appearance of rectangular plate, L shaped plate is installed to top outward appearance one side of connecting plate, and the go-between is all installed to one end of connecting plate and the one end of L shaped plate, two go-between are used for with cylinder body fixed connection, the link includes electric putter, and electric putter is fixed in the top outward appearance one side of connecting plate, L form board is installed on electric putter's piston rod top, L form board's one side inner wall passes through the bolt and installs L shape and change the board, and two symmetric distribution's fixed column is installed to the top inner wall of L shape change the board, two fixed columns are used for with apron subassembly fixed connection.
Still further, evaporation subassembly still includes a ceramic heater, the heating chamber has been seted up to the top outward appearance of cylinder body, and a ceramic heater installs in the heating intracavity portion, and the first class flow distribution plate is installed to the bottom inner wall in heating chamber, and a class flow distribution plate is located a ceramic heater's below.
Still further, the apron subassembly includes the lid, the lid seals with the cylinder body joint, and the bottom outward appearance of lid installs the connecting rod, place the board is installed to the bottom of connecting rod, place the top outward appearance of board and placed the crucible, and the top outward appearance middle part of lid is provided with first communicating pipe, first solenoid valve is installed to the outward appearance of first communicating pipe, and top outward appearance one side of lid is provided with the second communicating pipe, the second solenoid valve is installed to the outward appearance of second communicating pipe, and temperature sensor is installed to bottom outward appearance one side of lid, pressure sensor is installed to the bottom outward appearance opposite side of lid, and temperature sensor's signal terminal and pressure sensor's signal terminal all are connected with microprocessor through the signal line.
Still further, adjusting part still includes the columnar box, and the cylinder is installed in the columnar box, and the piston rod of cylinder runs through the columnar box and is fixed with the regulating disk, and the bottom outward appearance of regulating disk installs a plurality of equidistance sealed covers, and sealed lid is used for sealing the bottom of cylinder body, and the top outward appearance fixed mounting of columnar box has the connector.
Still further, the dust absorption subassembly mainly includes the dust absorption case, and the dust absorption pump is installed to one side outward appearance of dust absorption case, the suction inlet is offered to dust absorption end and the dust absorption case intercommunication of dust absorption pump, the suction inlet is offered to the other side outward appearance bottom of dust absorption case, the internally mounted of suction inlet has the third automatically controlled valve, and the one end of third automatically controlled valve is connected with the dust absorption hose through the clamp, and the outward appearance sliding connection of dust absorption hose has the sealed cowling, the one end and the shell middle level outward appearance laminating of sealed cowling, and the one end and the shell bond, the sealed cowling is used for sealing the screw thread mouth, the bayonet socket has been offered to the one side outward appearance of dust absorption case, and the dust absorption case has the closing plate through bolted connection, closing plate and bayonet socket form joint cooperation, the active carbon adsorption net is installed to the one side outward appearance that the closing plate is located the dust absorption case, and the suction box forms the grafting cooperation, hammer is installed to the top outward appearance of dust absorption case, and the top of hammer is connected with the regulating plate, hammer one end and the outer outward appearance fixed connection of the shell of the top of hammer is connected.
Still further, the shower nozzle subassembly still includes the second ceramic heater, annular mounting mouth has been seted up to the lower floor of shell and is used for installing the second ceramic heater, and the heat preservation circle has been cup jointed to the lower floor's outer surface of shell, the fixed mouth has been seted up on the top of shell and is used for installing the connecting pipe, and first thread groove has been seted up to the bottom of shell and is used for the spiro union to connect the cover, and the inside of connecting the cover is equipped with the second thread groove, the connecting cover has the injector head through second thread groove spiro union, and the top outward appearance of connecting the cover has been seted up the round mouth, install sealed the bucket in the round mouth, the second split plate is installed to the inside top layer of sealed bucket, the top outward middle part of second split plate is installed the drainage piece, diffusion chamber has been seted up to the top outward appearance of injector head and has been seted up diffusion chamber and injector head's jet orifice intercommunication.
Furthermore, the vertical section of the annular guide rail is T-shaped, the sliding block is provided with a T-shaped groove to form sliding fit with the annular guide rail, and a plurality of mounting holes are formed in the four ends of the outer surface of the annular mounting plate and the outer surface of the top of the connector.
Furthermore, the outer surface of the dust collection hose, which is close to the dust collection head, is sleeved with a limiting plate, the limiting plate is attached to the inner wall of the sealing cover, and a sealing gasket is arranged on the outer surface of one side, which is close to the sealing cover, of the limiting plate.
Compared with the prior art, the invention has the beneficial effects that:
This linear evaporation source equipment can heat the evaporation through a plurality of evaporation subassembly to different materials, drive assembly can drive a plurality of evaporation subassembly and remove adjustment position along the annular guide rail, the shower nozzle subassembly can carry out the elevating movement down in the position under the regulation of adjustment subassembly, thereby can let shower nozzle subassembly and a plurality of evaporation subassembly make up one by one under the cooperation of drive assembly and adjustment subassembly, can let the substrate in the position not plating a plurality of different membranes, only need through the cooperation of adjustment subassembly and drive assembly, can realize the combination of shower nozzle subassembly and different evaporation subassemblies, thereby adapt to different coating film demands, unnecessary energy consumption and material waste have been reduced.
Simultaneously, through dust absorption assembly's setting, can absorb the evaporation thing that remains in the connecting pipe before shower nozzle subassembly and next evaporation subassembly combination, effectively avoided mixing between the different evaporation thing, guaranteed the pure nature and the uniformity of coating film, prevented to take place because of the condition that the coating film performance that the material mixes leads to descends, realize carrying out the high-efficient operation of different coating films to the substrate, ensured the continuity of work, and a plurality of sealed covers on the regulating disk seal the bottom of treating a plurality of evaporation subassemblies under the working condition still, help maintaining evaporation subassembly internal environment's stability, reduce the influence of external factor to the material heating process.
Drawings
FIG. 1 is a schematic diagram of the main structure of the present invention;
FIG. 2 is a schematic view of the vertical cross-section connection of the vaporization assembly, the cover plate assembly and the showerhead assembly of the present invention;
FIG. 3 is a schematic view of an enlarged vertical section connection structure of the evaporating assembly and the cover plate assembly of the present invention;
FIG. 4 is an enlarged schematic view of the vertical cross-section of the showerhead assembly of the present invention;
FIG. 5 is a schematic bottom view of the cover plate assembly of the present invention;
FIG. 6 is a schematic diagram of a driving assembly according to the present invention;
FIG. 7 is a schematic view of a bottom view of a mobile terminal according to the present invention;
FIG. 8 is a schematic view of a connecting mechanism according to the present invention;
FIG. 9 is a schematic view of the connection structure of the adjusting assembly and the dust collection assembly of the present invention;
FIG. 10 is a schematic vertical cross-sectional view of an adjustment assembly of the present invention;
FIG. 11 is a schematic view of a vertical section of a vacuum cleaner assembly according to the present invention;
FIG. 12 is a schematic view of the body structure of the showerhead assembly of the present invention.
In the figure: 1. a drive assembly; 11. an annular mounting plate; 12. an annular guide rail; 13. an inner gear ring; 14. a sliding block; 15. a rectangular plate; 16. a servo motor; 17. a gear; 18. a holding wheel; 2. a connecting mechanism; 21. a connecting plate; 22. an L-shaped plate; 23. a connecting ring; 24. an electric push rod; 25. an L-shaped plate; 26. an L-shaped replacement plate; 27. fixing the column; 3. an evaporation assembly; 31. a cylinder; 32. a connection port; 33. sealing grooves; 34. a primary flow dividing plate; 36. a first ceramic heater; 4. a cover plate assembly; 41. a connecting rod; 42. placing a plate; 43. a crucible; 44. a first communication pipe; 45. a first electromagnetic valve; 46. a second communicating pipe; 47. a second electromagnetic valve; 48. a temperature sensor; 49. a pressure sensor; 410. a cover body; 5. an adjustment assembly; 51. a columnar case; 52. a cylinder; 53. an adjusting plate; 54. sealing cover; 55. a connector; 6. a dust collection assembly; 61. a dust suction box; 62. a dust collection pump; 63. a dust collection hose; 64. a sealing cover; 65. a dust collection head; 66. a third electrically controlled valve; 67. a sealing plate; 68. an activated carbon adsorption net; 69. a hammer block; 610. a limiting plate; 7. a spray head assembly; 71. a housing; 72. a second ceramic heater; 73. a heat preservation ring; 74. a connection cover; 75. an ejection head; 76. a diffusion chamber; 77. an ejection port; 78. sealing the hopper; 79. a secondary splitter plate; 710. a drainage block; 711. a connecting pipe; 712. a threaded port; 713. a sealing block; 714. cleaning the mouth.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The linear evaporation source equipment provided by the invention can be used for rapidly plating different films on the substrate in the evaporation coating process of the existing substrate, so that the substrate has different properties and functions, the combination of the spray head assembly and different evaporation assemblies can be realized through the cooperation of the adjusting assembly and the driving assembly, so that different coating requirements are met, the annular mounting plate and the connector are fixed by the mounting bracket which are well adapted to be arranged at the required position on the production line of the vacuum transmission coating technology before the evaporation coating process is carried out by using the equipment, then the first communicating pipe and the second communicating pipe are connected with corresponding equipment or systems on the production line according to the different production technologies, for example, the first communicating pipe can be connected with an air suction nozzle of the vacuum equipment, the second communicating pipe can be connected with an air outlet pipe of the gas supply system and used for introducing reaction gas in the coating process or connecting with an air suction pipe of the air exhaust system, and the stable operation of the whole equipment is ensured.
As shown in fig. 1 to 12, the present invention provides a technical solution: a linear evaporation source device comprises a driving component 1, wherein a connecting mechanism 2 is arranged at the top of a plurality of moving ends of the driving component 1, an evaporation component 3 and a cover plate component 4 are respectively arranged in the connecting mechanism 2 and at the connecting ends, the driving component 1 is used for driving a plurality of evaporation components 3 to adjust positions, a plurality of evaporation components 3 are used for evaporating different coating materials, the connecting mechanism 2 is matched with the cover plate component 4 to control the opening and closing of the evaporation components 3, an adjusting component 5 is arranged in the driving component 1, a dust collection component 6 is arranged at the bottom of the adjusting end of the adjusting component 5, a spray head component 7 is arranged at one end of the dust collection component 6, the dust collection component 6 is used for cleaning residual evaporation materials in the spray head component 7, the adjusting end of the adjusting component 5 is used for controlling the spray head component 7 to be combined with the evaporation component 3 in a plugging and unplugging manner, the evaporation module 3 includes the cylinder body 31, and seal groove 33 has been seted up to the bottom of cylinder body 31, and connector 32 has been seted up to the top inner wall of seal groove 33, shower nozzle subassembly 7 includes shell 71 and connecting pipe 711, and connecting pipe 711 outward appearance has cup jointed sealing block 713, connecting pipe 711 exposes the part and is used for forming grafting cooperation with connector 32, sealing block 713 is used for carrying out suitable interference fit with seal groove 33, threaded opening 712 has been seted up to the outward appearance of shell 71, connecting pipe 711 outward appearance has seted up with the communicating clearance mouth 714 of threaded opening 712, adjusting part 5 includes cylinder 52, and cylinder 52 is used for lifting adjusting terminal, dust absorption subassembly 6 includes dust absorption hose 63, and dust absorption head 65 is connected with through universal rotary joint to the one end of dust absorption hose 63, and dust absorption head 65 spiro union is in threaded opening 712.
It should be noted that the number of the plurality of moving ends of the driving assembly 1 is consistent with that of the evaporating assemblies 3, the moving ends form meshed transmission with the internal gear of the annular guide rail 12 through the driving gear 17 of the servo motor 16, so that the moving ends rotate around the annular guide rail 12, the evaporating assemblies 3 and the cover plate assemblies 4 can be operated together by the connecting mechanism 2 fixed on the moving ends, the effect that the evaporating assemblies 3 displace simultaneously or independently along the annular guide rail 12 is further realized, different working requirements are met, the L-shaped replacement plates 26 and the L-shaped plates 25 of the connecting mechanism 2 can be detached, a plurality of L-shaped replacement plates 26 can be arranged for fixedly connecting the cover plate assemblies 4 matched with different technologies, and only bolts on the L-shaped replacement plates 26 are required to be disassembled in the follow-up process, the connecting mechanism 2 can automatically drive the cover plate component to separate from the cylinder body 31, and simultaneously can bring the crucible 43 out of the heating cavity of the cylinder body 31 so as to be convenient for changing materials or directly change other crucibles 43, the plurality of evaporation components 3 are used for heating and evaporating different materials, then the spray head component 7 is matched for enabling the base material to be subjected to coating work of a plurality of different films at the processing position, the adjusting component 5 is used for adjusting the dust collection component 6 and the spray head component 7 and adjusting the positions of the dust collection component 6 and the spray head component 7 in the vertical horizontal line, in order to enable the connecting pipe 711 of the spray head component 7 to be inserted with the connecting ports 32 of the plurality of evaporation components 3, the sealing block 713 is inserted with the corresponding sealing groove 33 so as to form a complete evaporation source device for working, the vertical section of the connecting port 32 is Y-shaped, the plurality of flow dividing holes of the primary flow dividing plate 34 can enable gaseous molecules to be evenly distributed, the primary flow is uniformly distributed in the Y-shaped top space of the connecting port 32 to wait for the secondary flow, then enters into the connecting pipe 711, uniformly passes through the secondary flow distribution holes of the secondary flow distribution plate 79 to finish the secondary flow distribution, then enters into the diffusion cavity 76 to be uniformly distributed, and finally is uniformly sprayed out through the spraying port 77 of the spraying head 75, so that the uniformity of the coating film is ensured.
As shown in fig. 1, 6 and 7, the driving assembly 1 comprises an annular mounting plate 11 and a plurality of moving ends, an annular guide rail 12 is mounted on the inner wall of the annular mounting plate 11, an inner gear ring 13 is mounted in the annular guide rail 12, the moving ends comprise sliding blocks 14, sliding grooves are formed in the sliding blocks 14 and form sliding fit with the annular guide rail 12, a rectangular plate 15 is mounted on the top surface of the sliding blocks 14, a servo motor 16 is mounted at one corner of the top surface of the rectangular plate 15, an output shaft of the servo motor 16 penetrates through the rectangular plate 15 and is provided with a gear 17, the gear 17 and the inner gear ring 13 form meshing transmission, retaining wheels 18 are rotatably connected with other triangles on the bottom surface of the rectangular plate 15, and the retaining wheels 18 form rolling fit with the annular guide rail 12.
It should be noted that the three retaining wheels 18 are used for forming rolling fit with the annular guide rail 12, and can be added and deleted according to requirements, and two of the three retaining wheels 18 are located at the outer side of the annular guide rail 12, and one of the three retaining wheels 18 is located at the inner side of the annular guide rail 12 and symmetrical to the gear 17, so that stability of the moving end can be ensured.
As shown in fig. 1 and 8, the connection mechanism 2 further comprises a connection plate 21 and a connection end, the connection plate 21 is fixedly mounted on the top surface of the rectangular plate 15, an L-shaped plate 22 is mounted on one side of the top surface of the connection plate 21, connection rings 23 are mounted on one end of the connection plate 21 and one end of the L-shaped plate 22, the two connection rings 23 are fixedly connected with the cylinder 31, the connection end comprises an electric push rod 24, the electric push rod 24 is fixed on one side of the top surface of the connection plate 21, an L-shaped plate 25 is mounted on the top end of a piston rod of the electric push rod 24, an L-shaped replacement plate 26 is mounted on one side inner wall of the L-shaped plate 25 through bolts, two symmetrically distributed fixing columns 27 are mounted on the top inner wall of the L-shaped replacement plate 26, and the two fixing columns 27 are fixedly connected with the cover plate assembly 4.
It should be noted that the two connecting rings 23 are symmetrically distributed for fixedly holding the upper middle portion and the lower middle portion of the cylinder 31, the electric push rod 24 is used for adjusting the height of the L-shaped replacement plate 26 and the L-shaped plate 25, that is, the height of the cover plate assembly 4, and the L-shaped plate 25 is used for connecting with the L-shaped replacement plate 26 by bolts.
As shown in fig. 1-4, the evaporating assembly 3 further includes a first ceramic heater 36, a heating cavity is formed on the top surface of the cylinder 31, the first ceramic heater 36 is installed inside the heating cavity, a first-stage splitter plate 34 is installed on the inner wall of the bottom of the heating cavity, and the first-stage splitter plate 34 is located below the first ceramic heater 36.
It should be noted that the first ceramic heater 36 is a tube with a certain height, and the crucible 43 is located in the first ceramic heater 36, so that the first ceramic heater 36 can fully heat the crucible 43, and the first-stage flow dividing plate 34 has a plurality of first-stage flow dividing holes, and the specific number can be set according to the requirement.
As shown in fig. 1 to 3 and 5, the cover plate assembly 4 includes a cover 410, the cover 410 is clamped with the cylinder 31 to seal, a connecting rod 41 is installed on the outer surface of the bottom of the cover 410, a placing plate 42 is installed at the bottom end of the connecting rod 41, a crucible 43 is placed on the outer surface of the top of the placing plate 42, a first communication pipe 44 is arranged in the middle of the outer surface of the top of the cover 410, a first electromagnetic valve 45 is installed on the outer surface of the first communication pipe 44, a second communication pipe 46 is arranged on one side of the outer surface of the top of the cover 410, a second electromagnetic valve 47 is installed on the outer surface of the second communication pipe 46, a temperature sensor 48 is installed on one side of the outer surface of the bottom of the cover 410, a pressure sensor 49 is installed on the other side of the outer surface of the bottom of the cover 410, and a signal end of the temperature sensor 48 and a signal end of the pressure sensor 49 are connected with a microprocessor through signal wires.
It should be noted that, the vertical section of the cover 410 is T-shaped and is used for being clamped with the top of the heating cavity of the cylinder 31 to achieve a sealing effect, the cover 410 is made of different materials according to the process, the first communication pipe 44 and the second communication pipe 46 are used for being connected with other devices or systems on the whole production line, corresponding communication pipes are added according to the different processes and corresponding valves are arranged, the temperature sensor 48 and the pressure sensor 49 are used for monitoring the temperature and the pressure, other monitoring devices can be added according to the requirements, so that on the basis of ensuring that the shape of the cover 410 is unchanged, a plurality of covers 410 can be arranged according to the requirements of different processes, corresponding pipelines and monitoring devices are arranged on the cover 410 according to the requirements, then the fixing columns 27 on the L-shaped replacement plates 26 are fixedly connected, the modular design can be achieved, the subsequent replacement is facilitated, and during the replacement, only the L-shaped replacement plates 26 on the cover plate assemblies 4 corresponding to the processes and the L-shaped replacement plates 25 on the connection mechanism 2 can be realized through bolts.
As shown in fig. 1 and fig. 9-10, the adjusting assembly 5 further comprises a columnar box 51, a cylinder 52 is installed in the columnar box 51, a piston rod of the cylinder 52 penetrates through the columnar box 51 to be fixed with an adjusting disc 53, a plurality of sealing covers 54 distributed at equal intervals are installed on the outer surface of the bottom of the adjusting disc 53, the sealing covers 54 are used for sealing the bottom of the cylinder body 31, and a connector 55 is fixedly installed on the outer surface of the top of the columnar box 51.
It should be noted that the adjusting end is an adjusting plate 53, the air cylinder 52 can adjust the displacement of the adjusting plate 53 on the vertical horizontal line, the number of the plurality of sealing covers 54 is one less than the number of the evaporating assemblies 3, the sealing covers 54 are used for sealing the bottom of the evaporating assemblies 3 in the working state, the interference of the surrounding environment is avoided, and the adjusting plate 53 is connected with the sealing covers 54 through an L-shaped bracket.
As shown in fig. 1, 9 and 11, the dust collection assembly 6 mainly comprises a dust collection box 61, a dust collection pump 62 is installed on the outer surface of one side of the dust collection box 61, a dust collection end of the dust collection pump 62 is communicated with the dust collection box 61, a suction port is formed on the outer bottom of the other side of the dust collection box 61, a third electric control valve 66 is installed in the suction port, one end of the third electric control valve 66 is connected with a dust collection hose 63 through a clamp, the outer surface of the dust collection hose 63 is connected with a sealing cover 64 in a sliding manner, one end of the sealing cover 64 is attached to the outer surface of a middle layer of a shell 71, one end of the sealing cover 64 is adhered to the shell 71, the sealing cover 64 is used for sealing a threaded hole 712, a bayonet is formed on one side of the dust collection box 61, the dust collection box 61 is connected with a sealing plate 67 through a bolt, the sealing plate 67 is in clamping fit with the bayonet, an activated carbon adsorption net 68 is installed on the outer surface of one side of the sealing plate 67 located in the dust collection box 61, the activated carbon adsorption net 68 is in a splicing fit with the dust collection box 61, a hammer block 69 is installed on the outer surface of the top of the dust collection box 61, the hammer block 69 is connected with one end of the hammer block 53, and the hammer block 69 is fixedly connected to the outer surface 71.
It should be noted that, the dust suction pump 62 of the dust suction assembly 6 operates to cooperate with the dust suction hose 63 and the dust suction head 65 to clean the inside of the connecting pipe 711, the dust suction assembly 6 is used for absorbing the residual evaporation material in the connecting pipe 711, the activated carbon filter screen 68 is used for absorbing and filtering the residual evaporation material, the activated carbon filter screen 68 is inclined, the internal contact area of the rest of the dust suction box (61) is increased, the activated carbon filter screen can be fixed on the sealing plate 67 through screws, and the sealing plate 67 can be detached, so that the cleaning maintenance is convenient for subsequent replacement.
As shown in fig. 1-2, fig. 4 and fig. 12, the spray head assembly 7 further comprises a second ceramic heater 72, an annular mounting opening is formed in the lower layer of the housing 71 for mounting the second ceramic heater 72, a heat insulation ring 73 is sleeved on the outer surface of the lower layer of the housing 71, a fixing opening is formed in the top end of the housing 71 for mounting a connecting pipe 711, a first thread groove is formed in the bottom end of the housing 71 for being in threaded connection with a connecting cover 74, a second thread groove is formed in the connecting cover 74, the connecting cover 74 is in threaded connection with an injection head 75 through the second thread groove, a round opening is formed in the top surface of the connecting cover 74, a sealing bucket 78 is mounted in the round opening, a secondary flow distribution plate 79 is mounted on the inner top layer of the sealing bucket 78, a drainage block 710 is mounted on the middle portion of the top surface of the secondary flow distribution plate 79, and a diffusion cavity 76 is formed in the top surface of the injection head 75 and is communicated with the injection port 77 of the injection head 75.
It should be noted that the second ceramic heater 72 is annular, and is used for heating in the dust collection process, avoiding solidification and adhesion of residual steam, ensuring smoothness of dust collection work, the heat preservation ring 73 is helpful for avoiding heat loss, the connection cover 74 and the injection head 75 are all detachable, facilitating subsequent cleaning and maintenance, the top surface of the sealing bucket 78 is contacted with the top inner wall of the first thread groove, the plurality of split holes of the secondary split plate 79 are positioned in the connection pipe 711, linear injection of the steam is ensured, the drainage block 710 is conical, and is helpful for guiding the steam in the connection pipe 711 to pass through the plurality of secondary split holes on the secondary split plate 79.
As shown in fig. 6-7, the vertical section of the annular guide rail 12 is in a T shape, the sliding block 14 is provided with a T-shaped groove to form sliding fit with the annular guide rail 12, and the four ends of the outer surface of the annular mounting plate 11 and the outer surface of the top of the connector 55 are provided with a plurality of mounting holes.
It should be noted that several mounting holes are used for fixing the annular mounting plate 11 and the connection head 55 to the required position of the whole production line by bolts, and also by welding.
As shown in fig. 11, the outer surface of the dust collection hose 63 near the dust collection head 65 is sleeved with a limiting plate 610, the limiting plate 610 is attached to the inner wall of the sealing cover 64, and a sealing gasket is arranged on the outer surface of one side of the limiting plate 610 near the sealing cover 64.
It should be noted that the limiting plate 610 limits the sealing cover 64, and then the sealing pad on one side of the limiting plate 610 can contact with the inner wall of the sealing cover 64, so as to increase the tightness of the sealing cover 64.
Working principle: the required evaporation materials are respectively placed into the crucibles 43, the electric push rod 24 of the connecting mechanism 2 can drive the crucibles 43 to enter the heating cavity, the cover plate 410 can seal the heating cavity at the same time, then the first ceramic heater 36 operates to evaporate to generate an evaporation product, then the spray head assembly 7 is matched to carry out film coating on a base material, after the first film coating is completed, the spray head assembly 7 is adjusted by the adjusting assembly 5 to be separated from the evaporation assembly at the end of working, meanwhile, the residual evaporation product in the spray head assembly 7 is absorbed and cleaned by the dust collection assembly 6, the next evaporation product assembly 3 is driven by the driving assembly 1 to enter the upper part of the spray head assembly 7, the adjusting assembly 5 continues to operate and adjust, the spray head assembly 7 and the upper evaporation product assembly 3 are spliced and combined, the next film coating work can be carried out, and the continuity of the work is ensured.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made hereto without departing from the spirit and scope of the invention as defined by the appended embodiments and equivalents thereof.
Claims (10)
1. A linear evaporation source apparatus comprising a drive assembly (1), characterized in that: the utility model discloses a vacuum cleaner, which is characterized in that a plurality of movable ends of a driving component (1) are provided with a connecting mechanism (2), the inside and the connecting end of the connecting mechanism (2) are respectively provided with an evaporation component (3) and a cover plate component (4), the driving component (1) is used for driving a plurality of evaporation components (3) to adjust positions, a plurality of evaporation components (3) are used for evaporating different coating materials, and the connecting mechanism (2) is matched with the cover plate component (4) to be used for controlling the opening and closing of the evaporation components (3), an adjusting component (5) is arranged in the driving component (1), and the bottom of the adjusting end of the adjusting component (5) is provided with a dust collection component (6), one end of the dust collection component (6) is provided with a spray head component (7), the dust collection component (6) is used for cleaning residual evaporation materials in the spray head component (7), the adjusting end of the adjusting component (5) is used for controlling the spray head component (7) to be combined with the evaporation component (3) in a plugging manner, the evaporation component (3) comprises a cylinder body (31), the bottom of the cylinder body (31) is provided with a sealing groove (33), and the top inner wall of the sealing groove (33) is provided with a connecting port (32), the bottom wall of the sealing groove (33) is provided with a connecting port (71), the connecting pipe (711) is sleeved with a connecting pipe (713), the exposed part of connecting pipe (711) is used for forming grafting cooperation with connector (32), and sealing block (713) is used for carrying out suitable interference fit with seal groove (33), screw thread mouth (712) have been seted up to the outward appearance of shell (71), and communicating clearance mouth (714) with screw thread mouth (712) have been seted up to connecting pipe (711) outward appearance, adjusting part (5) include cylinder (52), and cylinder (52) are used for lifting adjustment end, dust absorption subassembly (6) are including dust absorption hose (63), and the one end of dust absorption hose (63) is connected with dust absorption head (65) through universal rotary joint, and dust absorption head (65) spiro union in screw thread mouth (712).
2. The linear evaporation source apparatus according to claim 1, wherein: the driving assembly (1) comprises an annular mounting plate (11) and a plurality of moving ends, the annular guide rail (12) is mounted on the inner wall of the annular mounting plate (11), an inner gear ring (13) is mounted in the annular guide rail (12), the moving ends comprise sliding blocks (14), sliding grooves are formed in the sliding blocks (14) and form sliding fit with the annular guide rail (12), a rectangular plate (15) is mounted on the top surface of the sliding blocks (14), a servo motor (16) is mounted on one corner of the top surface of the rectangular plate (15), a gear (17) is mounted on an output shaft of the servo motor (16) penetrating through the rectangular plate (15), the gear (17) and the inner gear ring (13) form meshing transmission, retaining wheels (18) are connected to other triangles on the bottom surface of the rectangular plate (15) in a rotating mode, and the retaining wheels (18) and the annular guide rail (12) form rolling fit.
3. The linear evaporation source apparatus according to claim 1, wherein: coupling mechanism (2) still include connecting plate (21) and link, and connecting plate (21) fixed mounting is on the top outward appearance of rectangular plate (15), L shaped plate (22) are installed to one side of the top outward appearance of connecting plate (21), and go-between (23) are all installed to one end of connecting plate (21) and one end of L shaped plate (22), two go-between (23) are used for with cylinder body (31) fixed connection, the link includes electric putter (24), and electric putter (24) are fixed in one side of the top outward appearance of connecting plate (21), L shaped plate (25) are installed on the piston rod top of electric putter (24), L shaped change board (26) are installed through the bolt to one side inner wall of L shaped change board (26), and two symmetric distribution's fixed column (27) are used for with apron subassembly (4) fixed connection.
4. The linear evaporation source apparatus according to claim 1, wherein: the evaporation assembly (3) further comprises a first ceramic heater (36), a heating cavity is formed in the top surface of the cylinder body (31), the first ceramic heater (36) is arranged inside the heating cavity, a first-stage flow dividing plate (34) is arranged on the inner wall of the bottom of the heating cavity, and the first-stage flow dividing plate (34) is located below the first ceramic heater (36).
5. The linear evaporation source apparatus according to claim 1, wherein: the cover plate assembly (4) comprises a cover body (410), the cover body (410) is clamped with the cylinder body (31) for sealing, a connecting rod (41) is arranged on the outer surface of the bottom of the cover body (410), a placing plate (42) is arranged at the bottom end of the connecting rod (41), a crucible (43) is arranged on the outer surface of the top of the placing plate (42), a first communication pipe (44) is arranged in the middle of the outer surface of the top of the cover body (410), a first electromagnetic valve (45) is arranged on the outer surface of the first communication pipe (44), a second communication pipe (46) is arranged on one side of the outer surface of the top of the cover body (410), a second electromagnetic valve (47) is arranged on the outer surface of the second communication pipe (46), a temperature sensor (48) is arranged on one side of the outer surface of the bottom of the cover body (410), a pressure sensor (49) is arranged on the other side of the outer surface of the bottom of the cover body (410), and a signal end of the temperature sensor (48) and a signal end of the pressure sensor (49) are connected with a microprocessor through a signal wire.
6. The linear evaporation source apparatus according to claim 1, wherein: the adjusting component (5) further comprises a columnar box (51), the air cylinder (52) is arranged in the columnar box (51), the piston rod of the air cylinder (52) penetrates through the columnar box (51) to be fixed with an adjusting disc (53), a plurality of sealing covers (54) which are distributed at equal intervals are arranged on the outer surface of the bottom of the adjusting disc (53), the sealing covers (54) are used for sealing the bottom of the cylinder body (31), and a connector (55) is fixedly arranged on the outer surface of the top of the columnar box (51).
7. The linear evaporation source equipment according to claim 1, wherein the dust collection assembly (6) mainly comprises a dust collection box (61), a dust collection pump (62) is arranged on the outer surface of one side of the dust collection box (61), a dust collection end of the dust collection pump (62) is communicated with the dust collection box (61), a suction port is arranged at the bottom of the outer surface of the other side of the dust collection box (61), a third electric control valve (66) is arranged in the suction port, one end of the third electric control valve (66) is connected with a dust collection hose (63) through a clamp, the outer surface of the dust collection hose (63) is connected with a sealing cover (64) in a sliding manner, one end of the sealing cover (64) is attached to the outer surface of a middle layer of a shell (71), one end of the sealing cover (64) is attached to the shell (71), the sealing cover (64) is used for sealing a threaded port (712), one side of the dust collection box (61) is provided with a bayonet, the suction port (61) is connected with a sealing plate (67) through a bolt, the sealing plate (67) is in clamping fit with the bayonet, one side of the sealing plate (67) is arranged in the suction port, one side of the suction plate (67) located in the dust collection box (61) is provided with a charcoal suction block, the outer surface of the suction plate (67) is provided with a charcoal block (68), the suction block (69) is arranged on the outer surface of the suction box (61) is connected with a hammer block (69), the top of the suction block (69) is connected with the suction block (53) in a shape, one end of the hammer block (69) is fixedly connected with the upper outer surface of the shell (71).
8. The linear evaporation source apparatus according to claim 1, wherein: the shower nozzle subassembly (7) still includes second ceramic heater (72), annular mounting mouth has been seted up to the lower floor of shell (71) and is used for installing second ceramic heater (72), and insulating ring (73) have been cup jointed to the lower floor's outer surface of shell (71), fixed mouthful is used for installing connecting pipe (711) have been seted up on the top of shell (71), and first thread groove has been seted up in the bottom of shell (71) and is used for spiro union cover (74), and the inside of connecting cover (74) is equipped with the second thread groove, connecting cover (74) have injection head (75) through second thread groove spiro union, and the top outward appearance of connecting cover (74) has been seted up the circular opening, install sealed fill (78) in the circular opening, secondary flow distribution plate (79) are installed at the top outward appearance mid-mounting of sealed fill (78), diffusion chamber (76) are seted up with injection port (77) intercommunication of injection head (75) to the top outward appearance of injection head (75).
9. The linear evaporation source apparatus according to claim 2, wherein: the vertical section of the annular guide rail (12) is in a T shape, the T-shaped groove is formed in the sliding block (14) and is in sliding fit with the annular guide rail (12), and a plurality of mounting holes are formed in the four ends of the outer surface of the annular mounting plate (11) and the outer surface of the top of the connector (55).
10. The linear evaporation source device according to claim 1, wherein the outer surface of the dust collection hose (63) close to the dust collection head (65) is sleeved with a limiting plate (610), the limiting plate (610) is attached to the inner wall of the sealing cover (64), and a sealing gasket is arranged on the outer surface of one side of the limiting plate (610) close to the sealing cover (64).
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| CN202411038908.1A CN118563262B (en) | 2024-07-31 | 2024-07-31 | Linear evaporation source equipment |
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| CN202411038908.1A CN118563262B (en) | 2024-07-31 | 2024-07-31 | Linear evaporation source equipment |
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| US6736943B1 (en) * | 2001-03-15 | 2004-05-18 | Cierra Photonics, Inc. | Apparatus and method for vacuum coating deposition |
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| JP2012233242A (en) * | 2011-05-09 | 2012-11-29 | Hitachi High-Technologies Corp | Organic el device manufacturing apparatus and organic el device manufacturing method |
| KR101650867B1 (en) * | 2016-03-21 | 2016-08-24 | 최병호 | Painting method of receptacle for cosmetics |
| CN216274344U (en) * | 2021-11-27 | 2022-04-12 | 南京丙辰表面技术有限公司 | Evaporation device for vacuum coating machine |
| CN117144300A (en) * | 2023-08-31 | 2023-12-01 | 江苏派莱特光电科技有限公司 | High-efficient coating system of evaporation coating machine |
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2024
- 2024-07-31 CN CN202411038908.1A patent/CN118563262B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6736943B1 (en) * | 2001-03-15 | 2004-05-18 | Cierra Photonics, Inc. | Apparatus and method for vacuum coating deposition |
| CN101619446A (en) * | 2008-06-30 | 2010-01-06 | 鸿富锦精密工业（深圳）有限公司 | Coating evaporation carrier and vacuum coater using same |
| JP2012233242A (en) * | 2011-05-09 | 2012-11-29 | Hitachi High-Technologies Corp | Organic el device manufacturing apparatus and organic el device manufacturing method |
| KR101650867B1 (en) * | 2016-03-21 | 2016-08-24 | 최병호 | Painting method of receptacle for cosmetics |
| CN216274344U (en) * | 2021-11-27 | 2022-04-12 | 南京丙辰表面技术有限公司 | Evaporation device for vacuum coating machine |
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