[go: up one dir, main page]

CN118483872B - Photosensitive resin composition and photosensitive dry film - Google Patents

Photosensitive resin composition and photosensitive dry film Download PDF

Info

Publication number
CN118483872B
CN118483872B CN202410941752.1A CN202410941752A CN118483872B CN 118483872 B CN118483872 B CN 118483872B CN 202410941752 A CN202410941752 A CN 202410941752A CN 118483872 B CN118483872 B CN 118483872B
Authority
CN
China
Prior art keywords
parts
resin composition
photosensitive resin
carbazole
bis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202410941752.1A
Other languages
Chinese (zh)
Other versions
CN118483872A (en
Inventor
肖志义
张念琦
毛灿
党泽龑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hunan Chuyuan New Materials Co ltd
Original Assignee
Hunan Chuyuan New Materials Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hunan Chuyuan New Materials Co ltd filed Critical Hunan Chuyuan New Materials Co ltd
Priority to CN202410941752.1A priority Critical patent/CN118483872B/en
Publication of CN118483872A publication Critical patent/CN118483872A/en
Application granted granted Critical
Publication of CN118483872B publication Critical patent/CN118483872B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/075Silicon-containing compounds
    • G03F7/0757Macromolecular compounds containing Si-O, Si-C or Si-N bonds

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polymerisation Methods In General (AREA)

Abstract

本发明公开了一种感光树脂组合物及感光干膜,其中所述感光树脂组合物包括如下质量份的原料组分:碱溶性树脂48‑68份、具有至少一个乙烯性不饱和键的光聚合性单体32‑52份、光聚合引发剂2.7‑4.5份、增感剂0.1‑0.3份;所述光聚合引发剂包括式Ⅰ所示的咔唑基吖啶类化合物。本发明将咔唑基吖啶类化合物、引发剂和增感剂结合使用,利用咔唑基吖啶类化合物的能量转移或电子转移的方式,将能量传递或者激发给增感剂和光聚合引发剂2,2‘‑二(2‑氯苯基)‑4,4‘,5,5’‑四苯基‑1,2‘‑二咪唑,引发光聚合,使得本发明的干膜能够兼用于触式露光机和激光描绘露光机。

The present invention discloses a photosensitive resin composition and a photosensitive dry film, wherein the photosensitive resin composition comprises the following raw material components in parts by mass: 48-68 parts of an alkali-soluble resin, 32-52 parts of a photopolymerizable monomer having at least one ethylenic unsaturated bond, 2.7-4.5 parts of a photopolymerization initiator, and 0.1-0.3 parts of a sensitizer; the photopolymerization initiator comprises a carbazolyl acridine compound shown in Formula I. The present invention combines the carbazolyl acridine compound, the initiator and the sensitizer, and utilizes the energy transfer or electron transfer of the carbazolyl acridine compound to transfer or excite energy to the sensitizer and the photopolymerization initiator 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole to initiate photopolymerization, so that the dry film of the present invention can be used in both a touch exposure machine and a laser drawing exposure machine.

Description

感光树脂组合物及感光干膜Photosensitive resin composition and photosensitive dry film

技术领域Technical Field

本发明涉及感光材料技术领域,特别地,涉及一种感光树脂组合物及感光干膜。The present invention relates to the technical field of photosensitive materials, and in particular to a photosensitive resin composition and a photosensitive dry film.

背景技术Background Art

现有曝光机有两种:激光高速移动来进行曝光的激光直接描绘露光机,以及使用汞蒸汽弧灯、高压汞灯和氙灯等有效放射紫外线的接触式露光机。接触式露光方法虽然生产效率低,但是因为考虑到特殊应用,在市场上还是必不可少的。There are two types of exposure machines: laser direct drawing exposure machines that perform exposure by moving the laser at high speed, and contact exposure machines that use mercury vapor arc lamps, high-pressure mercury lamps, xenon lamps, etc. to effectively radiate ultraviolet light. Although the contact exposure method has low production efficiency, it is still indispensable in the market because of special applications.

为应对这两种曝光方法,市场上有两种干膜:激光直描用的直描干膜和接触式露光用的普通干膜。直描干膜曝光能量低,光敏感度高,生产效率高,但是使用在接触式露光机上,容易造成干膜底部固化不足导致的空洞,附着力明显下降,所以不能使用在接触式露光机上。普通干膜光敏感度低,使用在直描机上,又出现能量极其高,生产效率极低的情况。所以,需要研发出一种直描露光机和接触式露光机兼用的干膜。To cope with these two exposure methods, there are two types of dry films on the market: direct drawing dry film for laser direct drawing and ordinary dry film for contact exposure. Direct drawing dry film has low exposure energy, high light sensitivity and high production efficiency. However, when used in a contact exposure machine, it is easy to cause voids caused by insufficient curing at the bottom of the dry film, and the adhesion is significantly reduced, so it cannot be used in a contact exposure machine. Ordinary dry film has low light sensitivity, and when used in a direct drawing machine, the energy is extremely high and the production efficiency is extremely low. Therefore, it is necessary to develop a dry film that can be used for both direct drawing exposure machines and contact exposure machines.

发明内容Summary of the invention

本发明提供了一种感光树脂组合物及感光干膜,以解决现有现有干膜不能既在接触式露光机上具有良好固化能力,又在直描露光机具有较高生产效率的技术问题。The present invention provides a photosensitive resin composition and a photosensitive dry film to solve the technical problem that the existing dry film cannot have good curing ability on a contact exposure machine and high production efficiency on a direct drawing exposure machine.

根据本发明的一个方面,提供一种感光树脂组合物,所述感光树脂组合物包括如下质量份的原料组分:碱溶性树脂48-68份、具有至少一个乙烯性不饱和键的光聚合性单体32-52份、光聚合引发剂2.7-4.5份、增感剂0.1-0.3份;所述增感剂为四乙基米氏酮;According to one aspect of the present invention, a photosensitive resin composition is provided, the photosensitive resin composition comprising the following raw material components in parts by mass: 48-68 parts of an alkali-soluble resin, 32-52 parts of a photopolymerizable monomer having at least one ethylenically unsaturated bond, 2.7-4.5 parts of a photopolymerization initiator, and 0.1-0.3 parts of a sensitizer; the sensitizer is tetraethyl Michler's ketone;

所述光聚合引发剂包括式(Ⅰ)所示的咔唑基吖啶类化合物和2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑;所述咔唑基吖啶类化合物与2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑的质量比为0.2-0.5:2.5-4;The photopolymerization initiator comprises a carbazolyl acridine compound represented by formula (I) and 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole; the mass ratio of the carbazolyl acridine compound to 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole is 0.2-0.5:2.5-4;

(Ⅰ)(I)

其中,R为烷基、烷氧基、芳基、取代芳基、取代杂芳基中的一种。Wherein, R is one of an alkyl group, an alkoxy group, an aryl group, a substituted aryl group, and a substituted heteroaryl group.

进一步地,所述感光树脂组合物包括如下质量份的原料组分:碱溶性树脂48-58份、具有至少一个乙烯性不饱和键的光聚合性单体32-42份、光聚合引发剂3-3.85份、增感剂0.15-0.2份。Furthermore, the photosensitive resin composition comprises the following raw material components in parts by mass: 48-58 parts of an alkali-soluble resin, 32-42 parts of a photopolymerizable monomer having at least one ethylenically unsaturated bond, 3-3.85 parts of a photopolymerization initiator, and 0.15-0.2 parts of a sensitizer.

进一步地,所述咔唑基吖啶类化合物与2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑的质量比为0.35-0.5:3.5-4。Furthermore, the mass ratio of the carbazole-based acridine compound to 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole is 0.35-0.5:3.5-4.

进一步地,所述咔唑基吖啶类化合物与2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑的质量比为0.35:3.5。Furthermore, the mass ratio of the carbazole-based acridine compound to 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole is 0.35:3.5.

进一步地,所述咔唑基吖啶类化合物与2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑的质量比为0.5:2.5。Furthermore, the mass ratio of the carbazole-based acridine compound to 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole is 0.5:2.5.

进一步地,所述咔唑基吖啶类化合物包括3-(9-吖啶基)-咔唑、N-乙基-3-(9-吖啶基)-咔唑、N-乙氧基-3-(9-吖啶基)-咔唑、N-苯基-3-(9-吖啶基)-咔唑和N-氯苯基-3-(9-吖啶基)-咔唑中的任意一种。Furthermore, the carbazole-based acridinium compound includes any one of 3-(9-acridinyl)-carbazole, N-ethyl-3-(9-acridinyl)-carbazole, N-ethoxy-3-(9-acridinyl)-carbazole, N-phenyl-3-(9-acridinyl)-carbazole and N-chlorophenyl-3-(9-acridinyl)-carbazole.

进一步地,所述具有至少一个乙烯性不饱和键的光聚合性单体包括2,2-二(4-(甲基)丙烯酰氧基聚乙氧基)苯基丙烷、壬基苯氧基四亚乙基氧丙烯酸酯、三甲醇丙烷乙氧酯三丙烯酸酯和聚氨酯丙烯树脂中的至少三种。Further, the photopolymerizable monomer having at least one ethylenically unsaturated bond includes at least three of 2,2-bis(4-(meth)acryloxypolyethoxy)phenylpropane, nonylphenoxytetraethyleneoxyacrylate, trimethylolpropaneethoxy triacrylate and polyurethane acrylic resin.

进一步地,所述碱溶性树脂包括甲基丙烯酸、2-甲基-2-丙烯酸甲酯、2-丙烯酸乙酯和丙烯酸-2-乙基己基酯。Furthermore, the alkali-soluble resin includes methacrylic acid, methyl 2-methyl-2-acrylate, ethyl 2-acrylate and 2-ethylhexyl acrylate.

所述碱溶性树脂酸值130mgKOH/g,GPC测得重均分子量=90000g/mol,固含42.5%。The alkali-soluble resin has an acid value of 130 mgKOH/g, a weight average molecular weight of 90,000 g/mol as measured by GPC, and a solid content of 42.5%.

进一步地,所述感光树脂组合物还包括0.1-1质量份的添加剂,所述添加剂包括孔雀绿和/或无色结晶紫。Furthermore, the photosensitive resin composition further comprises 0.1-1 parts by mass of an additive, wherein the additive comprises malachite green and/or colorless crystal violet.

根据本发明的另一方面,还提供一种感光干膜,包括基材层、感光材料层、保护膜层,所述感光材料层为上述的感光树脂组合物。According to another aspect of the present invention, a photosensitive dry film is provided, comprising a substrate layer, a photosensitive material layer, and a protective film layer, wherein the photosensitive material layer is the above-mentioned photosensitive resin composition.

本发明具有以下有益效果:The present invention has the following beneficial effects:

本发明设计的含有吖啶类的化合物结构是非对称结构,9位由不同的取代咔唑构成,9位的咔唑基团跟吖啶有较好的共轭作用,使得分子在405nm的吸收强度显著增加,同时,咔唑基团中的N由不同的烷基链,烷氧基等长链构成,可以通过它们来调节在配方中的溶解性能。咔唑基吖啶类化合物通常用于激光描绘露光机,其可在较长的波长(能量较低)条件下,只需要吸收较低的光能,就可以释放自由基。The structure of the compound containing acridine designed by the present invention is an asymmetric structure, and the 9th position is composed of different substituted carbazoles. The carbazole group at the 9th position has a good conjugation effect with acridine, so that the absorption intensity of the molecule at 405nm is significantly increased. At the same time, the N in the carbazole group is composed of different alkyl chains, alkoxyl chains and other long chains, which can be used to adjust the solubility in the formula. Carbazole-based acridine compounds are usually used in laser drawing exposure machines. They can release free radicals under longer wavelength (lower energy) conditions by absorbing lower light energy.

而引发剂2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑通常用于接触式露光机上,其光吸收较慢,需要吸收较高的光能,借助增感剂,才能释放自由基,引发光聚合。2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑需要吸收较高的光能,所以干膜底部聚合充分。The initiator 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole is usually used in contact exposure machines. It absorbs light slowly and needs to absorb higher light energy. With the help of sensitizers, it can release free radicals and initiate photopolymerization. 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole needs to absorb higher light energy, so the bottom of the dry film is fully polymerized.

因此,本发明将咔唑基吖啶类化合物、2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑和增感剂结合使用,利用咔唑基吖啶类化合物的能量转移或电子转移的方式,将能量传递或者激发给增感剂和光聚合引发剂2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑,产生初级活性种(一般是自由基),它使配方体系在光源照射下,低聚物和活性稀释剂迅速发生交联固化反应,这是光固化速率和光固化程度的重要决定因素之一,从而使得本发明的干膜能够兼用于触式露光机和激光描绘露光机。Therefore, the present invention combines carbazole-based acridine compounds, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole and sensitizers, and utilizes the energy transfer or electron transfer of carbazole-based acridine compounds to transfer or excite energy to the sensitizer and photopolymerization initiator 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole to generate primary active species (generally free radicals), which enable the formulation system to rapidly undergo cross-linking and curing reactions between oligomers and active diluents under the irradiation of light sources, which is one of the important determining factors of the photocuring rate and degree of photocuring, thereby enabling the dry film of the present invention to be used in both touch-type exposure machines and laser drawing exposure machines.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1是咔唑基吖啶类化合物在较长波长条件下的反应原理图。FIG. 1 is a schematic diagram showing the reaction principle of carbazole-based acridine compounds under longer wavelength conditions.

具体实施方式DETAILED DESCRIPTION

以下对本发明的实施例进行详细说明,但是本发明可以由下述所限定和覆盖的多种不同方式实施。The following is a detailed description of the embodiments of the present invention, but the present invention can be implemented in many different ways as defined and covered below.

本发明的一个方面,提供一种感光树脂组合物,所述感光树脂组合物包括如下质量份的原料组分:碱溶性树脂48-68份、具有至少一个乙烯性不饱和键的光聚合性单体32-52份、光聚合引发剂2.7-4.5份、增感剂0.1-0.3份;所述增感剂为四乙基米氏酮;In one aspect of the present invention, a photosensitive resin composition is provided, the photosensitive resin composition comprising the following raw material components in parts by mass: 48-68 parts of an alkali-soluble resin, 32-52 parts of a photopolymerizable monomer having at least one ethylenically unsaturated bond, 2.7-4.5 parts of a photopolymerization initiator, and 0.1-0.3 parts of a sensitizer; the sensitizer is tetraethyl Michler's ketone;

所述光聚合引发剂包括式(Ⅰ)所示的咔唑基吖啶类化合物和式(Ⅱ)所示2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑;所述咔唑基吖啶类化合物与2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑的质量比为0.2-0.5:2.5-4;The photopolymerization initiator comprises a carbazolyl acridine compound represented by formula (I) and 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole represented by formula (II); the mass ratio of the carbazolyl acridine compound to 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole is 0.2-0.5:2.5-4;

(Ⅰ)(I)

其中,R为烷基、烷氧基、芳基、取代芳基、取代杂芳基中的一种。Wherein, R is one of an alkyl group, an alkoxy group, an aryl group, a substituted aryl group, and a substituted heteroaryl group.

(Ⅱ)(II)

吖啶类化合物作为光引发剂,已经广泛应用在光固化体系中,典型的是现在常用的9-苯基吖啶,这类化合物在380-405nm波长下有较好的吸收,但是在现有的结构的化合物,在405nm处的吸收强度不高,导致引发效率和效果不好,同时,现有的结构常常具有对称性结构,导致在配方体系中溶解性不够好,容易析出,所以使用上受到限制。Acridine compounds have been widely used as photoinitiators in photocuring systems. A typical example is the commonly used 9-phenylacridine. This type of compound has good absorption at a wavelength of 380-405nm, but the absorption intensity of the compound with the existing structure at 405nm is not high, resulting in poor initiation efficiency and effect. At the same time, the existing structure often has a symmetrical structure, resulting in poor solubility in the formulation system and easy precipitation, so its use is limited.

本发明重新设计含有吖啶类的化合物结构是非对称结构,9位由不同的取代咔唑构成,9位的咔唑基团跟吖啶有较好的共轭作用,使得分子在405nm的吸收强度显著增加,同时,咔唑基团中的N由不同的烷基链、烷氧基等长链构成,可以通过它们来调节在配方中的溶解性能。The structure of the compound containing acridine is redesigned to be an asymmetric structure, wherein the 9th position is composed of different substituted carbazoles, and the carbazole group at the 9th position has a good conjugation effect with acridine, so that the absorption intensity of the molecule at 405nm is significantly increased. Meanwhile, N in the carbazole group is composed of different long chains such as alkyl chains and alkoxy groups, and the solubility performance in the formula can be adjusted by them.

该光聚合引发剂光吸收效率高,只需要吸收较低的光能,就可以释放自由基,引发光聚合,通常用在直描露光机上。因为,咔唑基吖啶类化合物光吸收较快,所以可能出现的负面影响是:干膜底部聚合不足,产生空洞。当咔唑基吖啶类遇到其他光吸收较慢的引发剂,如2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑,会发挥增感剂的作用,将能量传递或者激发给吸收较慢的引发剂,从而降低自身的光吸收效率,促进干膜底部聚合。This photopolymerization initiator has high light absorption efficiency. It only needs to absorb relatively low light energy to release free radicals and initiate photopolymerization. It is usually used in direct-drawing exposure machines. Because carbazole-based acridine compounds absorb light quickly, the negative effects that may occur are: insufficient polymerization at the bottom of the dry film and the generation of voids. When carbazole-based acridines encounter other initiators with slower light absorption, such as 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole, they will play the role of sensitizers, transferring or exciting energy to the slower absorbing initiator, thereby reducing their own light absorption efficiency and promoting polymerization at the bottom of the dry film.

咔唑基吖啶类化合物可以在较长的波长(能量较低)条件下,在吸收光能后能发生光物理过程至它的某一激发态后,发生分子内或分子间能量转移,传递至另一分子(增感剂或引发剂)产生初级活性种(一般是自由基),然后通过能量转移或电子转移的方式,将能量传递或者激发给增感剂和引发剂,产生自由基,从而使不饱和的光聚合单体发生光聚合固化反应。可有效适应现在的直描曝光需求。反应原理图如图1所示。Carbazole-based acridine compounds can undergo photophysical processes to a certain excited state after absorbing light energy under longer wavelength (lower energy) conditions, and then undergo intramolecular or intermolecular energy transfer to another molecule (sensitizer or initiator) to generate primary active species (generally free radicals), and then transfer or excite the energy to the sensitizer and initiator through energy transfer or electron transfer to generate free radicals, thereby causing the unsaturated photopolymerizable monomer to undergo photopolymerization curing reaction. It can effectively meet the current direct drawing exposure requirements. The reaction principle diagram is shown in Figure 1.

2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑的光吸收较慢,需要吸收较高的光能,借助增感剂,才能释放自由基,引发光聚合。在紫外光或激光照射下,增感剂吸收光能发生光物理过程至它的某一激发态后,发生分子内或分子间能量转移,传递至引发剂2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑,从而引发不饱和的单体发生聚合固化反应,通常用在接触式露光机上。2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑需要吸收较高的光能,所以干膜底部聚合充分。缺点是由于吸收较高的光能,曝光效率低,所以影响生产效率。本发明将两种引发剂结合使用,咔唑基吖啶类化合物光敏感度高,可以发挥增感剂的作用。它只需要吸收较低的光能(生产时,设定的露光能量低,花费时间少),就能够快速产生自由基,促进光聚合固化反应,从而解决生产效率低的问题。2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole absorbs light slowly and needs to absorb higher light energy with the help of sensitizers to release free radicals and initiate photopolymerization. Under ultraviolet light or laser irradiation, the sensitizer absorbs light energy and undergoes a photophysical process to a certain excited state, and then intramolecular or intermolecular energy transfer occurs and is transferred to the initiator 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole, thereby initiating the polymerization and curing reaction of unsaturated monomers. It is usually used in contact exposure machines. 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole needs to absorb higher light energy, so the bottom of the dry film is fully polymerized. The disadvantage is that due to the absorption of higher light energy, the exposure efficiency is low, which affects the production efficiency. The present invention uses two initiators in combination. The carbazole-based acridine compound has high photosensitivity and can play the role of a sensitizer. It only needs to absorb low light energy (during production, the exposure light energy is set to be low and the time spent is short) to quickly generate free radicals and promote the photopolymerization curing reaction, thereby solving the problem of low production efficiency.

在一些实施例中,所述的碱溶性树脂的质量份为48-68份,例如可以是48份、50份、52份、54份、56份、58份、60份、62份、64份、66份、68份等,还可以是上述数值的任意组合范围。In some embodiments, the mass fraction of the alkali-soluble resin is 48-68 parts, for example, it can be 48 parts, 50 parts, 52 parts, 54 parts, 56 parts, 58 parts, 60 parts, 62 parts, 64 parts, 66 parts, 68 parts, etc., and can also be any combination range of the above values.

在本发明的实施例中,所述的具有至少一个乙烯性不饱和键的光聚合性单体的质量份为32-52份,例如可以是32份、34份、36份、38份、40份、42份、44份、46份、48份、52份、52份等,还可以是上述数值的任意组合范围。In an embodiment of the present invention, the mass fraction of the photopolymerizable monomer having at least one ethylenically unsaturated bond is 32-52 parts, for example, it can be 32 parts, 34 parts, 36 parts, 38 parts, 40 parts, 42 parts, 44 parts, 46 parts, 48 parts, 52 parts, 52 parts, etc., and can also be any combination range of the above values.

在本发明的实施例中,所述的光聚合引发剂的质量份为2.7-4.5份,例如可以是3.0份、3.5份、4.0份、4.5份等,还可以是上述数值的任意组合范围。In an embodiment of the present invention, the mass fraction of the photopolymerization initiator is 2.7-4.5 parts, for example, it can be 3.0 parts, 3.5 parts, 4.0 parts, 4.5 parts, etc., and can also be any combination range of the above values.

在本发明的实施例中,所述的增感剂的质量份为0.1-0.25份,例如可以是0.1份、0.15份、0.2份、0.25份等,还可以是上述数值的任意组合范围。In an embodiment of the present invention, the mass fraction of the sensitizer is 0.1-0.25 parts, for example, it can be 0.1 parts, 0.15 parts, 0.2 parts, 0.25 parts, etc., and can also be any combination range of the above values.

在一种优选的实施例中,所述感光树脂组合物包括如下质量份的原料组分:碱溶性树脂48-58份、具有至少一个乙烯性不饱和键的光聚合性单体32-42份、光聚合引发剂3-3.85份、增感剂0.15-0.2份。In a preferred embodiment, the photosensitive resin composition comprises the following raw material components in parts by weight: 48-58 parts of alkali-soluble resin, 32-42 parts of photopolymerizable monomer having at least one ethylenically unsaturated bond, 3-3.85 parts of photopolymerization initiator, and 0.15-0.2 parts of sensitizer.

在一种优选的实施例中,所述咔唑基吖啶类化合物与2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑的质量比为0.2-0.5:2.5-4。In a preferred embodiment, the mass ratio of the carbazole-based acridine compound to 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole is 0.2-0.5:2.5-4.

在本发明的实施例中,所述咔唑基吖啶类化合物与2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑的质量比可以是0.35:3.5,或者0.5:2.5,或者0.2:4等。In an embodiment of the present invention, the mass ratio of the carbazole-based acridine compound to 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole can be 0.35:3.5, or 0.5:2.5, or 0.2:4, etc.

在本发明的实施例中,所述咔唑基吖啶类化合物包括3-(9-吖啶基)-咔唑、N-乙基-3-(9-吖啶基)-咔唑、N-乙氧基-3-(9-吖啶基)-咔唑、N-苯基-3-(9-吖啶基)-咔唑和N-氯苯基-3-(9-吖啶基)-咔唑中的任意一种。In an embodiment of the present invention, the carbazole-based acridinium compound includes any one of 3-(9-acridinyl)-carbazole, N-ethyl-3-(9-acridinyl)-carbazole, N-ethoxy-3-(9-acridinyl)-carbazole, N-phenyl-3-(9-acridinyl)-carbazole and N-chlorophenyl-3-(9-acridinyl)-carbazole.

在一种优选的实施例中,所述咔唑基吖啶类化合物的合成路线为:In a preferred embodiment, the synthesis route of the carbazole acridine compound is:

在一种优选的实施例中,所述咔唑基吖啶类化合物(N-乙基-3-(9-吖啶基)-咔唑)的制备方法包括以下步骤:In a preferred embodiment, the preparation method of the carbazole-based acridinium compound (N-ethyl-3-(9-acridinyl)-carbazole) comprises the following steps:

步骤(1)中间体M1的制备:Step (1) Preparation of intermediate M1:

将3-溴咔唑、硫酸二乙酯、四丁基溴化铵和甲苯混合,室温搅拌下滴加氢氧化钠水溶液,升温至84-90℃反应,降温至77-83℃后经分液、浓缩,得到中间体M1;3-bromocarbazole, diethyl sulfate, tetrabutylammonium bromide and toluene are mixed, and an aqueous sodium hydroxide solution is added dropwise under stirring at room temperature, and the temperature is raised to 84-90°C for reaction, and the temperature is lowered to 77-83°C, and then separated and concentrated to obtain an intermediate M1;

步骤(2)中间体M2的制备:Step (2) Preparation of intermediate M2:

将中间体M1和四氢呋喃混合,于(-75)-(-81)℃下滴加正丁基锂、硼酸三异丙酯,然后升温到室温,反应完毕后加入氯化铵水溶液淬灭,经分液、浓缩,得到中间体M2;The intermediate M1 and tetrahydrofuran are mixed, n-butyl lithium and triisopropyl borate are added dropwise at (-75)-(-81)°C, and then the temperature is raised to room temperature. After the reaction is completed, an aqueous ammonium chloride solution is added to quench, and the mixture is separated and concentrated to obtain the intermediate M2;

步骤(3)咔唑基吖啶类化合物的制备:Step (3) Preparation of carbazole-based acridine compounds:

将中间体M2、9-氯吖啶、碳酸钾、甲苯和水加入反应容器中,加入四(三苯基膦)钯,升温至回流搅拌反应,反应完毕后降温至77-83℃,经分液、浓缩,即得咔唑基吖啶类化合物N-乙基-3-(9-吖啶基)-咔唑。The intermediate M2, 9-chloroacridine, potassium carbonate, toluene and water are added to a reaction container, and tetrakis(triphenylphosphine)palladium is added. The temperature is raised to reflux and stirred for reaction. After the reaction is completed, the temperature is lowered to 77-83°C, and the liquid is separated and concentrated to obtain a carbazole-based acridine compound N-ethyl-3-(9-acridinyl)-carbazole.

在一种优选的实施例中,所述步骤(2)和步骤(3)的反应是在氮气气氛下进行的。In a preferred embodiment, the reactions of step (2) and step (3) are carried out under a nitrogen atmosphere.

在一种优选的实施例中,所述具有至少一个乙烯性不饱和键的光聚合性单体包括2,2-二(4-(甲基)丙烯酰氧基聚乙氧基)苯基丙烷、壬基苯氧基四亚乙基氧丙烯酸酯、三甲醇丙烷乙氧酯三丙烯酸酯和聚氨酯丙烯树脂中的至少三种。In a preferred embodiment, the photopolymerizable monomer having at least one ethylenically unsaturated bond includes at least three of 2,2-bis(4-(meth)acryloxypolyethoxy)phenylpropane, nonylphenoxytetraethylene oxide acrylate, trimethylolpropane ethoxylate triacrylate and polyurethane acrylate resin.

其中,2,2-二(4-(甲基)丙烯酰氧基聚乙氧基)苯基丙烷属双酚A系丙烯酸酯化合物,可以使光高度,清晰度,附着性以及柔韧性变得良好。Among them, 2,2-bis(4-(meth)acryloyloxypolyethoxy)phenylpropane is a bisphenol A-based acrylate compound that can improve light height, clarity, adhesion and flexibility.

壬基苯氧基四亚乙基氧丙烯酸酯具有一定的水溶性,可以提高显影性和去膜性。Nonylphenoxytetraethylene oxide acrylate has a certain water solubility and can improve the developing property and film removal property.

三甲醇丙烷乙氧酯三丙烯酸酯为多官能团单体,可以提高干膜光固化后的交联密度,提高干膜的附着性。Trimethylol propane ethoxylate triacrylate is a multifunctional monomer that can increase the crosslinking density of the dry film after light curing and improve the adhesion of the dry film.

聚氨酯丙烯树脂提高干膜的柔韧性,能够增强感光树脂聚合物与覆铜板等基材的结合能力。Polyurethane acrylate resin improves the flexibility of the dry film and can enhance the bonding ability between the photosensitive resin polymer and substrates such as copper clad laminates.

在一种优选的实施例中,所述碱溶性树脂由甲基丙烯酸、2-甲基-2-丙烯酸甲酯、2-丙烯酸乙酯、丙烯酸-2-乙基己基酯组成。In a preferred embodiment, the alkali-soluble resin is composed of methacrylic acid, methyl 2-methyl-2-acrylate, ethyl 2-acrylate, and 2-ethylhexyl acrylate.

在本申请的实施例中,碱溶性树脂作为干膜的成膜剂,用量较多,且分子量较大,使感光膜各组分粘结成膜,起骨架作用,是干膜的重要组成部分。碱溶性树脂呈现弱碱性,在未发生露光反应状态下,能在显影液中被洗掉。碱溶性树脂的使用(分子量大小,使用量)关系到感光膜的各项性能,尤其影响盖孔,附着,解析和形状。In the embodiments of the present application, the alkali-soluble resin is used as a film-forming agent of the dry film, with a large amount and a large molecular weight, so that the components of the photosensitive film are bonded to form a film, and it plays a role as a skeleton, which is an important component of the dry film. The alkali-soluble resin is weakly alkaline and can be washed away in the developer when no light reaction occurs. The use of the alkali-soluble resin (molecular weight, amount used) is related to the various properties of the photosensitive film, especially affecting the cover hole, adhesion, resolution and shape.

未露光前,具有至少一个乙烯性不饱和键的光聚合性单体,碱溶性树脂,光引发剂均匀分散混合物中。经紫外光照射,引发剂产生自由基,具有至少一个乙烯性不饱和键的光聚合性单体发生聚合交联反应,使碱溶性树脂变成非碱溶性的交联网状结构。Before exposure to light, the photopolymerizable monomer having at least one ethylenically unsaturated bond, the alkali-soluble resin, and the photoinitiator are uniformly dispersed in the mixture. After exposure to ultraviolet light, the initiator generates free radicals, and the photopolymerizable monomer having at least one ethylenically unsaturated bond undergoes polymerization and cross-linking reaction, so that the alkali-soluble resin becomes a non-alkali-soluble cross-linked network structure.

在一种优选的实施例中,所述碱溶性树脂酸值130mgKOH/g,GPC测得重均分子量=90000g/mol,固含42.5%。In a preferred embodiment, the alkali-soluble resin has an acid value of 130 mgKOH/g, a weight average molecular weight of 90,000 g/mol as measured by GPC, and a solid content of 42.5%.

在一种优选的实施例中,所述感光树脂组合物还包括0.1-1质量份的添加剂,所述添加剂包括孔雀绿和无色结晶紫。In a preferred embodiment, the photosensitive resin composition further comprises 0.1-1 parts by mass of an additive, wherein the additive comprises malachite green and colorless crystal violet.

在本申请的实施例中,孔雀绿为染料;无色结晶紫为发色助剂,帮助干膜露光后变色。In the embodiments of the present application, malachite green is a dye; and colorless crystal violet is a color development auxiliary agent to help the dry film change color after being exposed to light.

在一种优选的实施例中,所述感光树脂组合物还包括溶剂,所述溶剂为甲苯、甲醇和丙酮,其质量比为15:7:7。In a preferred embodiment, the photosensitive resin composition further comprises a solvent, and the solvent is toluene, methanol and acetone, and the mass ratio thereof is 15:7:7.

本申请第二方面的实施例还提供一种感光干膜,包括基材层、感光材料层、保护膜层,所述感光材料层为上述的感光树脂组合物。The embodiment of the second aspect of the present application further provides a photosensitive dry film, comprising a substrate layer, a photosensitive material layer, and a protective film layer, wherein the photosensitive material layer is the above-mentioned photosensitive resin composition.

所述基材层为PET层,所述保护膜层为PE保护膜。The substrate layer is a PET layer, and the protective film layer is a PE protective film.

所述感光干膜的制备工艺如下:The preparation process of the photosensitive dry film is as follows:

(1)将碱溶性树脂、具有至少一个乙烯性不饱和键的光聚合性单体、光聚合引发剂、增感剂、添加剂、溶剂按配比依次混合搅拌均匀,得到干膜溶液;(1) mixing an alkali-soluble resin, a photopolymerizable monomer having at least one ethylenically unsaturated bond, a photopolymerization initiator, a sensitizer, an additive, and a solvent in order according to a proportion and stirring them uniformly to obtain a dry film solution;

(2)将上述干膜液体胶,运用刮膜机,涂布到聚对苯二甲酸乙二醇酯薄膜上,于80℃摄氏度烘烤,使用PE作为覆盖膜进行保护,得到光敏性树脂组合层厚度为40μm的感光干膜。(2) The dry film liquid glue is coated onto a polyethylene terephthalate film using a film scraper, baked at 80°C, and protected using PE as a cover film to obtain a photosensitive dry film with a photosensitive resin composite layer thickness of 40 μm.

实施例1Example 1

本实施例提供了一种感光树脂组合物,所述感光树脂组合物包括如下质量份的原料组分:碱溶性树脂58份、具有至少一个乙烯性不饱和键的光聚合性单体42份、光聚合引发剂3.85份、增感剂0.2份、添加剂0.54份。The present embodiment provides a photosensitive resin composition, which includes the following raw material components in parts by mass: 58 parts of alkali-soluble resin, 42 parts of photopolymerizable monomer having at least one ethylenically unsaturated bond, 3.85 parts of photopolymerization initiator, 0.2 parts of sensitizer, and 0.54 parts of additives.

所述碱溶性树脂为甲基丙烯酸、2-甲基-2-丙烯酸甲酯、2-丙烯酸乙酯、丙烯酸-2-乙基己基酯,各组分以质量比为20:50:20:13的比例混合。The alkali-soluble resin is methacrylic acid, 2-methyl-2-methyl acrylate, 2-ethyl acrylate, and 2-ethylhexyl acrylate, and the components are mixed in a mass ratio of 20:50:20:13.

所述具有至少一个乙烯性不饱和键的光聚合性单体为2,2-二(4-(甲基)丙烯酰氧基聚乙氧基)苯基丙烷、壬基苯氧基四亚乙基氧丙烯酸酯、三甲醇丙烷乙氧酯三丙烯酸酯、聚氨酯丙烯树脂,各组分以25:5:5:7的比例混合。The photopolymerizable monomer having at least one ethylenically unsaturated bond is 2,2-bis(4-(methyl)acryloxypolyethoxy)phenylpropane, nonylphenoxytetraethyleneoxyacrylate, trimethylolpropaneethoxylate triacrylate, and polyurethane propylene resin, and the components are mixed in a ratio of 25:5:5:7.

所述光聚合引发剂为咔唑基吖啶类化合物和2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑,两者的质量份数分别为0.35份和3.5份。The photopolymerization initiator is a carbazole-based acridine compound and 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole, and the mass fractions of the two are 0.35 parts and 3.5 parts respectively.

所述咔唑基吖啶类化合物为3-(9-吖啶基)-咔唑,3-(9-吖啶基)-咔唑的合成步骤包括:The carbazole-based acridinium compound is 3-(9-acridinyl)-carbazole, and the synthesis steps of 3-(9-acridinyl)-carbazole include:

(1)准备原材料:3-溴咔唑(梯希爱(上海)化成工业),硫酸二乙酯(上海麦克林生化科技股份有限公司),正丁基锂(江苏昌吉利新能源科技有限公司),四(三苯基膦)钯(东莞市瓦里西化工有限公司),9-氯吖啶(上海皓鸿生物医药科技有限公司),四丁基溴化铵(江苏必胜化工有限公司)。(1) Prepare the raw materials: 3-bromocarbazole (Tianjin Ai Chemical Industry (Shanghai) Co., Ltd.), diethyl sulfate (Shanghai MacLean Biochemical Technology Co., Ltd.), n-butyl lithium (Jiangsu Changjili New Energy Technology Co., Ltd.), tetrakis(triphenylphosphine)palladium (Dongguan Varisi Chemical Co., Ltd.), 9-chloroacridine (Shanghai Haohong Biopharmaceutical Technology Co., Ltd.), tetrabutylammonium bromide (Jiangsu Bisheng Chemical Co., Ltd.).

(2)合成路线(2) Synthesis route

中间体M1的制备方法:Preparation method of intermediate M1:

称取氢氧化钠3.25g(81.27mmol),配成质量分数50%的水溶液。称取3-溴咔唑10.00g(40.63mmol)、硫酸二乙酯5.01g(32.51mmol)、四丁基溴化铵0.262g(0.812mmol)和甲苯50mL加入反应瓶中,室温搅拌下缓慢滴加氢氧化钠水溶液,完毕后升温至回流反应6h。反应完毕后降温至70℃,趁热分液,有机相水洗一遍后浓缩,残留物再用75%乙醇精制,可得产品10.20g,收率89.73%。Weigh 3.25g (81.27mmol) of sodium hydroxide and prepare a 50% aqueous solution. Weigh 10.00g (40.63mmol) of 3-bromocarbazole, 5.01g (32.51mmol) of diethyl sulfate, 0.262g (0.812mmol) of tetrabutylammonium bromide and 50mL of toluene and add them to the reaction bottle. Slowly add the sodium hydroxide aqueous solution dropwise under stirring at room temperature. After completion, heat to reflux and react for 6h. After the reaction is completed, cool to 70℃, separate the liquid while hot, wash the organic phase with water once and concentrate it, and then purify the residue with 75% ethanol to obtain 10.20g of the product with a yield of 89.73%.

中间体M2的制备方法:Preparation method of intermediate M2:

称取中间体M110.00g(35.75mmol)和四氢呋喃100mL加入反应瓶,氮气置换,冷却至-78℃,滴加2.4M正丁基锂15.64mL(37.53mmol),滴加完毕后搅拌1h,滴加硼酸三异丙酯10.08g(53.62mmol),滴加完毕后保温搅拌1h,升温到室温继续反应16h。反应完毕后加入氯化铵水溶液20mL淬灭。淬灭后蒸出溶剂,残留物加入二氯甲烷100mL和水100mL,萃取分液,有机相水洗一遍后浓缩干,得到中间体M28.00g,收率91.74%。Weigh 10.00 g (35.75 mmol) of intermediate M1 and 100 mL of tetrahydrofuran into the reaction flask, replace with nitrogen, cool to -78 °C, add 15.64 mL (37.53 mmol) of 2.4 M n-butyl lithium dropwise, stir for 1 h after the addition is complete, add 10.08 g (53.62 mmol) of triisopropyl borate dropwise, keep warm and stir for 1 h after the addition is complete, warm to room temperature and continue to react for 16 h. After the reaction is complete, add 20 mL of ammonium chloride aqueous solution to quench. After quenching, evaporate the solvent, add 100 mL of dichloromethane and 100 mL of water to the residue, extract and separate, wash the organic phase with water once and concentrate to obtain 8.00 g of intermediate M2 with a yield of 91.74%.

咔唑基吖啶类化合物的制备方法:Preparation method of carbazole acridine compounds:

称取中间体M28.00g(32.79mmol)、9-氯吖啶7.01g(32.79mmol)、碳酸钾6.80g(49.19mmol)、甲苯50mL和水10mL加入反应瓶,氮气置换,称取四(三苯基膦)钯0.379g(0.33mmol)加入反应瓶,升温至回流搅拌反应12h。反应完毕后降温至70℃,趁热分液,有机相水洗一遍后浓缩,残留物再用95%乙醇精制,可得产品10.00g,收率81.05%。Weigh 8.00g (32.79mmol) of intermediate M2, 7.01g (32.79mmol) of 9-chloroacridine, 6.80g (49.19mmol) of potassium carbonate, 50mL of toluene and 10mL of water into the reaction flask, replace with nitrogen, weigh 0.379g (0.33mmol) of tetrakis(triphenylphosphine)palladium into the reaction flask, heat to reflux and stir to react for 12h. After the reaction is completed, cool to 70℃, separate the liquid while hot, wash the organic phase with water once and concentrate, and then purify the residue with 95% ethanol to obtain 10.00g of product with a yield of 81.05%.

所述感光树脂组合物的制备方法为:将光引发剂和增感剂按照比例混合,加入添加剂和溶剂,通过搅拌机搅拌均匀,完全溶解后,按照比例依次加入碱溶性树脂和具有至少一个乙烯性不饱和键的光聚合性单体,用搅拌机搅拌至充分均匀,配置成感光树脂组合物。The preparation method of the photosensitive resin composition is as follows: a photoinitiator and a sensitizer are mixed in proportion, additives and solvents are added, and the mixture is stirred evenly by a stirrer. After the mixture is completely dissolved, an alkali-soluble resin and a photopolymerizable monomer having at least one ethylenically unsaturated bond are added in sequence in proportion, and the mixture is stirred with a stirrer until the mixture is fully uniform to prepare the photosensitive resin composition.

实施例2Example 2

本实施例与实施例1不同之处在于:将实施例1中的具有至少一个乙烯性不饱和键的光聚合性单体修改为2,2-二(4-(甲基)丙烯酰氧基聚乙氧基)苯基丙烷30份、三甲醇丙烷乙氧酯三丙烯酸酯5份、聚氨酯丙烯树脂7份。The difference between this embodiment and embodiment 1 is that the photopolymerizable monomer having at least one ethylenically unsaturated bond in embodiment 1 is modified to 30 parts of 2,2-bis(4-(meth)acryloyloxypolyethoxy)phenylpropane, 5 parts of trimethylolpropane ethoxylate triacrylate, and 7 parts of polyurethane acrylate resin.

实施例3Example 3

本实施例与实施例1不同之处在于:将实施例1中的具有至少一个乙烯性不饱和键的光聚合性单体修改为2,2-二(4-(甲基)丙烯酰氧基聚乙氧基)苯基丙烷32份、壬基苯氧基四亚乙基氧丙烯酸酯5份、三甲醇丙烷乙氧酯三丙烯酸酯5份。The difference between this embodiment and embodiment 1 is that the photopolymerizable monomer having at least one ethylenically unsaturated bond in embodiment 1 is modified to 32 parts of 2,2-bis(4-(meth)acryloxypolyethoxy)phenylpropane, 5 parts of nonylphenoxytetraethylene oxide acrylate, and 5 parts of trimethylolpropane ethoxylate triacrylate.

实施例4Example 4

本实施例与实施例1不同之处在于:将实施例1中的具有至少一个乙烯性不饱和键的光聚合性单体修改为2,2-二(4-(甲基)丙烯酰氧基聚乙氧基)苯基丙烷30份、壬基苯氧基四亚乙基氧丙烯酸酯5份、聚氨酯丙烯树脂7份。The difference between this embodiment and embodiment 1 is that the photopolymerizable monomer having at least one ethylenically unsaturated bond in embodiment 1 is modified to 30 parts of 2,2-bis(4-(meth)acryloxypolyethoxy)phenylpropane, 5 parts of nonylphenoxytetraethylene oxide acrylate, and 7 parts of polyurethane acrylic resin.

实施例5Example 5

本实施例与实施例1不同之处在于:将实施例1中的光聚合引发剂的质量份数调整为3份,其中咔唑基吖啶类化合物0.5份,2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑2.5份。The difference between this embodiment and embodiment 1 is that the mass fraction of the photopolymerization initiator in embodiment 1 is adjusted to 3 parts, including 0.5 parts of carbazole acridine compound and 2.5 parts of 2,2'-di(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole.

实施例6Example 6

本实施例与实施例1不同之处在于:将实施例1中的光聚合引发剂的质量份数调整为4.2份,其中咔唑基吖啶类化合物0.2份,2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑4份。The difference between this embodiment and embodiment 1 is that the mass fraction of the photopolymerization initiator in embodiment 1 is adjusted to 4.2 parts, including 0.2 parts of carbazole acridine compounds and 4 parts of 2,2'-di(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole.

实施例7Example 7

本实施例与实施例1不同之处在于:将实施例1中的光聚合引发剂3-(9-吖啶基)-咔唑替换为N-乙基-3-(9-吖啶基)-咔唑。The difference between this embodiment and the embodiment 1 is that the photopolymerization initiator 3-(9-acridinyl)-carbazole in the embodiment 1 is replaced by N-ethyl-3-(9-acridinyl)-carbazole.

对比例1Comparative Example 1

本对比例与实施例1不同之处仅在于:光聚合引发剂中不含咔唑基吖啶类化合物,同时,增感剂的质量份数调整为0.2份。The only difference between this comparative example and Example 1 is that the photopolymerization initiator does not contain a carbazole-based acridine compound, and the mass fraction of the sensitizer is adjusted to 0.2 parts.

对比例2Comparative Example 2

本对比例与实施例1不同之处仅在于:将光聚合引发剂中的咔唑基吖啶类化合物和2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑替换为0.3质量份的9-苯基吖啶,同时,增感剂的质量份数调整为0.2份。The only difference between this comparative example and Example 1 is that the carbazole-based acridine compound and 2,2'-di(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole in the photopolymerization initiator are replaced by 0.3 parts by mass of 9-phenylacridine, and at the same time, the mass fraction of the sensitizer is adjusted to 0.2 parts.

对比例3Comparative Example 3

本对比例与实施例1不同之处仅在于:将光聚合引发剂中的咔唑基吖啶类化合物和2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑替换为0.5质量份的9-苯基吖啶,同时,增感剂的质量份数调整为0.2份。The only difference between this comparative example and Example 1 is that the carbazole-based acridine compound and 2,2'-di(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole in the photopolymerization initiator are replaced by 0.5 parts by mass of 9-phenylacridine, and at the same time, the mass fraction of the sensitizer is adjusted to 0.2 parts.

对比例4Comparative Example 4

本对比例与实施例1不同之处仅在于:将光聚合引发剂中的咔唑基吖啶类化合物和2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑替换为2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑和0.3质量份的9-苯基吖啶,同时,增感剂的质量份数调整为0.5份。The only difference between this comparative example and Example 1 is that the carbazole-based acridine compound and 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole in the photopolymerization initiator are replaced by 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole and 0.3 parts by mass of 9-phenylacridine, and at the same time, the mass fraction of the sensitizer is adjusted to 0.5 parts.

对比例5Comparative Example 5

本对比例与实施例1不同之处仅在于:将增感剂的质量份数调整为0.1份。The only difference between this comparative example and Example 1 is that the mass fraction of the sensitizer is adjusted to 0.1 part.

将实施例和对比例的各组分用量汇总于表1中。The amounts of the components used in the examples and comparative examples are summarized in Table 1.

表1实施例1-6和对比例1-5的成分表(以质量份计)Table 1 Composition of Examples 1-6 and Comparative Examples 1-5 (in parts by mass)

其中:in:

A1:碱溶性树脂;由甲基丙烯酸、2-甲基-2-丙烯酸甲酯、2-丙烯酸乙酯、丙烯酸-2-乙基己基酯=20/50/20/13(重量比)组成,其平均分子量=90000,酸值130mgKOH/g,GPC测得重均分子量=90000g/mol,固含42.5%。A1: alkali-soluble resin; composed of methacrylic acid, 2-methyl-2-methyl methyl acrylate, 2-ethyl acrylate, 2-ethylhexyl acrylate = 20/50/20/13 (weight ratio), its average molecular weight = 90000, acid value 130mgKOH/g, GPC measured weight average molecular weight = 90000g/mol, solid content 42.5%.

B1:2,2-二(4-(甲基)丙烯酰氧基聚乙氧基)苯基丙烷(MiwonSpecialtyChemical,M2101)B1: 2,2-bis(4-(meth)acryloyloxypolyethoxy)phenylpropane (Miwon Specialty Chemical, M2101)

B2:壬基苯氧基四亚乙基氧丙烯酸酯(MiwonSpecialtyChemical,M2101)B2: Nonylphenoxytetraethylene oxide acrylate (Miwon Specialty Chemical, M2101)

B3:三甲醇丙烷乙氧酯三丙烯酸酯(MiwonSpecialtyChemical,M2101)B3: Trimethylolpropane ethoxylate triacrylate (Miwon Specialty Chemical, M2101)

B4:聚氨酯丙烯树脂(湖南初源新材料有限公司)B4: Polyurethane acrylic resin (Hunan Chuyuan New Materials Co., Ltd.)

C1:3-(9-吖啶基)-咔唑C1:3-(9-Acridinyl)-carbazole

C1’:N-乙基-3-(9-吖啶基)-咔唑C1': N-ethyl-3-(9-acridinyl)-carbazole

C2: 2,2‘-二(2-氯苯基)-4,4‘,5,5’-四苯基-1,2‘-二咪唑(常州强力电子材料)C2: 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-diimidazole (Changzhou Qiangli Electronic Materials)

C3:9-苯基吖啶(常州强力)C3:9-phenylacridine (Changzhou Qiangli)

D1:四乙基米氏酮(上海源叶生物)D1: Tetraethyl Michler's ketone (Shanghai Yuanye Biotechnology)

E1:孔雀绿E1: Malachite Green

E2:无色结晶紫E2: Colorless crystal violet

性能测试Performance Testing

将实施例和对比例制得的感光干膜通过接触式LED露光机和直描露光机进行效果测试,具体包括:The photosensitive dry films prepared in the examples and comparative examples were tested by a contact LED exposure machine and a direct drawing exposure machine, specifically including:

1)基板前处理:将18μm铜厚的基板,用研磨机进行研磨、除油,酸洗、水洗,去除基板表面油污以及锈渍等。1) Substrate pretreatment: Grind, degrease, pickle and wash the 18μm copper-thick substrate with a grinder to remove oil and rust stains on the surface of the substrate.

2)贴膜:用贴膜机将干膜压在基板上(速度1.0米/分钟,温度105度,压力1.0MPa)。2) Film lamination: Use a film laminating machine to press the dry film onto the substrate (speed 1.0 m/min, temperature 105 degrees, pressure 1.0 MPa).

3)测试:3) Testing:

A光敏感度ALight Sensitivity

将涂工好的干膜,通过压膜机压到前处理过的铜基板上,得到试验基板。The coated dry film is pressed onto the pre-treated copper substrate by a laminator to obtain a test substrate.

在上述试验基板上放置41段曝光尺,使用露光机设定不同能量,进行曝光。A 41-segment exposure ruler was placed on the above test substrate, and exposure was performed using an exposure machine with different energies set.

去除聚对苯二甲酸乙二醇酯膜,使用显影机(30度1.0%碳酸钠水溶液)对试验基板进行喷淋,除去未曝光部分后,可读取曝光尺的段数。曝光能量不同,能量段数会不一样。本实验,干膜设定最佳能量段为20段,使用的能量越低,表示光敏感度越高。Remove the polyethylene terephthalate film, use a developer (30 degrees 1.0% sodium carbonate aqueous solution) to spray the test substrate, remove the unexposed part, and read the exposure scale. The energy segment number will be different for different exposure energies. In this experiment, the best energy segment for the dry film is set to 20 segments. The lower the energy used, the higher the light sensitivity.

B附着力B Adhesion

设计线宽线距10:400-70/400曝光底片,将实验基板进行曝光(设定能量为20段能量),显影去除未露光部分,用100倍显微镜观察,将最小形成有效线宽的宽度定义为附着。Design the line width and line spacing of 10:400-70/400 to expose the film, expose the experimental substrate (set the energy to 20 energy levels), develop and remove the unexposed part, observe with a 100x microscope, and define the minimum width of the effective line width as adhesion.

C解析C Analysis

设计线宽线距1:1,不同线宽的曝光底片,将实验基板进行曝光(设定能量为20段能量),显影去除未露光部分,用100倍显微镜观察,将最小形成有效线距的宽度定义为解析。Design line width and line spacing of 1:1, expose films with different line widths, expose the experimental substrate (set the energy to 20 energy levels), develop and remove the unexposed parts, observe with a 100x microscope, and define the minimum width that forms an effective line spacing as the resolution.

D去膜:设计含有5个50mm*45mm曝光图形的曝光底片。将实验基板进行整面曝光(设定能量为20段能量),显影。按照曝光图形,将基板裁剪成5块小片,使用2.8%氢氧化钠溶液浸渍小片,记录干膜从基板上脱落的时间,5块小片取平均值作为去膜时间。D. Defilming: Design an exposure film with 5 50mm*45mm exposure patterns. Expose the entire surface of the experimental substrate (set the energy to 20 energy levels) and develop. According to the exposure pattern, cut the substrate into 5 small pieces, immerse the small pieces in 2.8% sodium hydroxide solution, record the time when the dry film falls off the substrate, and take the average value of the 5 small pieces as the defilming time.

E形状(鼠咬,倒梯形):设计线宽线距10:400-70/400曝光底片,将实验基板进行曝光(设定能量为20段能量),显影去除未露光部分,通过SEM对显影后的基板进行观测,观察干膜侧壁底部是否有空洞,干膜形状是否呈现倒梯形。E shape (mouse bite, inverted trapezoid): Design line width and line spacing 10:400-70/400 exposure film, expose the experimental substrate (set energy to 20 energy levels), develop and remove the unexposed part, observe the developed substrate through SEM, observe whether there are voids at the bottom of the dry film side wall, and whether the dry film shape is an inverted trapezoid.

F盖孔:使用48个直径6mm的圆孔的1.6mm厚的覆铜板,进行压膜,将实验基板进行曝光(设定能量为20段能量)。F cover hole: Use a 1.6mm thick copper-clad laminate with 48 circular holes of 6mm diameter for lamination, and expose the experimental substrate (set the energy to 20 levels).

考虑到该干膜厚度较厚,压膜后放置一天进行露光(设定能量为20段能量),(因为压膜后放置一天,会导致圆孔边的干膜更容易变薄,从而显影时更容易发生破孔)显影三次,观察破孔的个数,作为盖孔破孔率进行评价,盖孔破孔率越低则盖孔性能越好。Taking into account the relatively thick dry film, it was left exposed to light for one day after lamination (the energy was set to 20 energy levels). (Because the dry film at the edge of the circular hole would become thinner more easily after one day after lamination, and thus more likely to break during development) and developed three times. The number of broken holes was observed and evaluated as the hole-covering breakage rate. The lower the hole-covering breakage rate, the better the hole-covering performance.

将以上各项测试结果汇总于下表2和表3中。The above test results are summarized in Tables 2 and 3 below.

表2接触式LED露光机评价结果Table 2 Evaluation results of contact LED exposure machine

表3直描露光机评价结果Table 3 Evaluation results of direct drawing exposure machine

由上表可知,对比例1未添加C1,在接触式露光机上,光敏感度良好,但是直描露光机上,光敏感度太低。实施例1-6添加增感剂C1后,只需要吸收较低的光能,就可以引发光聚合,无论是接触式露光机还是直描露光机上,光敏感度和特性都良好。As can be seen from the table above, Comparative Example 1 has good light sensitivity on a contact exposure machine without adding C1, but has too low light sensitivity on a direct drawing exposure machine. After adding sensitizer C1 to Examples 1-6, only a relatively low light energy needs to be absorbed to initiate photopolymerization, and both the light sensitivity and properties are good on a contact exposure machine and a direct drawing exposure machine.

对比例2,单独使用C3,D1,光敏感度很高,在直描露光机上可以使用,但是由于引发剂量少,干膜底部出现固化不足,干膜和基板附着力也出现劣化。使用在接触式露光机上,则由于吸光度不够,出现严重解析不良。如果提高C3的含量,参照对比例3,虽然直描露光机上可以正常使用,但是在接触式露光机上无法正常曝光。对比例4,使用C2,C3,D1组合,虽然直描机上使用,特性上没有明显异常,但是仍然解决不了在接触式露光机上底部空洞和特性劣化的问题。从对比例5可以看出,增感剂D1对干膜附着有促进作用。增感剂少了,会降低光能到达底部的有效性,导致底部附着不够。In comparative example 2, C3 and D1 are used alone. The photosensitivity is very high and can be used on a direct drawing exposure machine. However, due to the small amount of initiator, insufficient curing occurs at the bottom of the dry film, and the adhesion between the dry film and the substrate is also deteriorated. When used on a contact exposure machine, serious poor resolution occurs due to insufficient absorbance. If the content of C3 is increased, referring to comparative example 3, although it can be used normally on a direct drawing exposure machine, it cannot be exposed normally on a contact exposure machine. In comparative example 4, a combination of C2, C3, and D1 is used. Although there is no obvious abnormality in the characteristics when used on a direct drawing machine, it still cannot solve the problem of bottom voids and characteristic degradation on a contact exposure machine. As can be seen from comparative example 5, the sensitizer D1 has a promoting effect on the adhesion of the dry film. Less sensitizer will reduce the effectiveness of light energy reaching the bottom, resulting in insufficient adhesion at the bottom.

从实施例1和3可以看出,由于B4特殊的长链结构,可以增强盖孔性能。从实施例1和2可以看出,B2亲水性较好,可以让干膜很好的溶解在去膜液中,从而增加去膜性能。从实施例1和4可以看出,B3官能度较高,可以提高交联密度。同时,由于其分子小,可以很好的提高干膜与基板的结合力,改善底部附着不足,有效改善干膜浮离的不良现象。所以,使用C1,C2,D1组合,该干膜光敏度良好,且干膜附着力较好,底部没有空洞,既可以用在直描露光机,也可以用在接触式露光机上。It can be seen from Examples 1 and 3 that due to the special long-chain structure of B4, the hole covering performance can be enhanced. It can be seen from Examples 1 and 2 that B2 has good hydrophilicity, which allows the dry film to be well dissolved in the film removal liquid, thereby increasing the film removal performance. It can be seen from Examples 1 and 4 that B3 has a high functionality and can increase the cross-linking density. At the same time, due to its small molecule, it can well improve the bonding force between the dry film and the substrate, improve the insufficient bottom adhesion, and effectively improve the undesirable phenomenon of the dry film floating off. Therefore, using the combination of C1, C2, and D1, the dry film has good photosensitivity and good dry film adhesion, and there is no void at the bottom. It can be used in both direct-drawing exposure machines and contact exposure machines.

以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims (9)

1. The photosensitive resin composition is characterized by comprising the following raw material components in parts by mass: 48-68 parts of alkali-soluble resin, 32-52 parts of photopolymerizable monomer with at least one ethylene unsaturated bond, 2.7-4.5 parts of photopolymerization initiator and 0.1-0.3 part of sensitizer; the sensitizer is tetraethyl ketone Mi;
the photopolymerization initiator comprises carbazolylacridine compounds shown in a formula (I) and 2,2 '-bis (2-chlorophenyl) -4,4',5 '-tetraphenyl-1, 2' -diimidazole; the mass ratio of the carbazolylacridine compound to the 2,2 '-bis (2-chlorophenyl) -4,4',5 '-tetraphenyl-1, 2' -diimidazole is 0.2-0.5:2.5-4;
Wherein R is one of alkyl, alkoxy, aryl and substituted aryl.
2. The photosensitive resin composition according to claim 1, wherein the photosensitive resin composition comprises the following raw material components in parts by mass: 48-58 parts of alkali-soluble resin, 32-42 parts of photopolymerisable monomer with at least one ethylene unsaturated bond, 3-3.85 parts of photopolymerization initiator and 0.15-0.2 part of sensitizer.
3. The photosensitive resin composition according to claim 1, wherein the mass ratio of the carbazolylacridine compound to 2,2 '-bis (2-chlorophenyl) -4,4',5 '-tetraphenyl-1, 2' -diimidazole is 0.35 to 0.5:3.5-4.
4. A photosensitive resin composition according to claim 3, wherein the carbazolylacridine compound 2,2 '-bis (2-chlorophenyl) -4,4',5 '-tetraphenyl-1, 2' -diimidazole has a mass ratio of 0.35:3.5.
5. The photosensitive resin composition according to claim 1, wherein the carbazolylacridine compound 2,2 '-bis (2-chlorophenyl) -4,4',5 '-tetraphenyl-1, 2' -diimidazole has a mass ratio of 0.5:2.5.
6. The photosensitive resin composition according to claim 1, wherein the carbazolylacridine compound comprises any one of 3- (9-acridinyl) -carbazole, N-ethyl-3- (9-acridinyl) -carbazole, N-ethoxy-3- (9-acridinyl) -carbazole, N-phenyl-3- (9-acridinyl) -carbazole, and N-chlorophenyl-3- (9-acridinyl) -carbazole.
7. The photosensitive resin composition according to claim 1, wherein the photopolymerizable monomer having at least one ethylenic unsaturated bond comprises at least three of 2, 2-bis (4- (meth) acryloxypolyethoxy) phenylpropane, nonylphenoxy tetraethyleneoxy acrylate, trimethylol propane ethyleneoxy triacrylate, or urethane propylene resin.
8. The photosensitive resin composition according to claim 1, further comprising 0.1 to 1 parts by mass of an additive comprising malachite green and/or leuco crystal violet.
9. A photosensitive dry film, comprising a substrate layer, a photosensitive material layer and a protective film layer, wherein the photosensitive material layer is the photosensitive resin composition according to any one of claims 1 to 8.
CN202410941752.1A 2024-07-15 2024-07-15 Photosensitive resin composition and photosensitive dry film Active CN118483872B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410941752.1A CN118483872B (en) 2024-07-15 2024-07-15 Photosensitive resin composition and photosensitive dry film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410941752.1A CN118483872B (en) 2024-07-15 2024-07-15 Photosensitive resin composition and photosensitive dry film

Publications (2)

Publication Number Publication Date
CN118483872A CN118483872A (en) 2024-08-13
CN118483872B true CN118483872B (en) 2024-11-05

Family

ID=92195980

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202410941752.1A Active CN118483872B (en) 2024-07-15 2024-07-15 Photosensitive resin composition and photosensitive dry film

Country Status (1)

Country Link
CN (1) CN118483872B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107382861A (en) * 2017-07-31 2017-11-24 长春海谱润斯科技有限公司 A kind of miscellaneous anthracene pyrene compound and its organic luminescent device
CN116413999A (en) * 2021-12-31 2023-07-11 常州强力电子新材料股份有限公司 Photosensitive resin composition, photoresist, black matrix and color filter comprising the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4020153B2 (en) * 2006-02-10 2007-12-12 東洋インキ製造株式会社 Polymerizable composition, negative resist using the same, and image pattern forming method using the same
CN105573056B (en) * 2015-12-18 2019-08-20 杭州福斯特应用材料股份有限公司 A kind of photosensitive dry film resist
CN116339074B (en) * 2023-03-01 2024-07-26 湖南五江高科技材料有限公司 A photosensitive composition containing a modified 9-phenylacridine photoinitiator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107382861A (en) * 2017-07-31 2017-11-24 长春海谱润斯科技有限公司 A kind of miscellaneous anthracene pyrene compound and its organic luminescent device
CN116413999A (en) * 2021-12-31 2023-07-11 常州强力电子新材料股份有限公司 Photosensitive resin composition, photoresist, black matrix and color filter comprising the same

Also Published As

Publication number Publication date
CN118483872A (en) 2024-08-13

Similar Documents

Publication Publication Date Title
CN1203374C (en) Photopolymerizable thermosetting resin compositions
WO2012101908A1 (en) Photosensitive resin composition, photosensitive element, method for producing resist pattern, and method for manufacturing printed wiring board
JP2020517804A (en) Fluorene oxime ester-based photoinitiator containing polymerizable group, production method and application thereof
TW201001068A (en) Photosensitive resin composition, photosensitive element, method for forming resist pattern, and method for manufacturing printed wiring board
CN102375341A (en) Manufacturing Method Of Photosensitive Resin Composite, Element And Slushing Compound Pattern, Manufacturing Method Of Lead Frame And Printed Circuit Board
CN103885290A (en) Photosensitive Resin Composition, Photosensitive Element Comprising The Same, Method Of Forming Resist Pattern, And Process For Producing Printed Wiring Board
JPWO2009147913A1 (en) Photosensitive resin composition, photosensitive element, method for producing resist pattern, and method for producing printed wiring board
JP5151446B2 (en) Photosensitive resin composition, photosensitive element, resist pattern forming method and printed wiring board manufacturing method
JP7444791B2 (en) Sulfonium salts, photoacid generators, curable compositions and resist compositions
CN104035281A (en) Photocuring Composition
CN104781730A (en) Photosensitive resin composition, photosensitive element, method for forming resist pattern, and method for manufacturing printed wiring board
TW201510647A (en) Alkali-developable photocurable thermosetting resin composition and printed wiring board using same
TW201932984A (en) Photosensitive resin laminate and method for producing resist pattern especially performing exposure after peeling of the support film and reducing the defect rate
TW201007360A (en) Photosensitive resin composition, photosensitive element wherein same is used, method for forming a resist-pattern, and method for producing a printed wiring board
JP6431747B2 (en) Photopolymerization initiator for photosensitive solder resist and photosensitive solder resist composition using the same
CN118483872B (en) Photosensitive resin composition and photosensitive dry film
CN1666149A (en) Thermally stable photocurable resin composition for dry film resist
WO2006129469A1 (en) Photosensitive resin composition, photosensitive element employing the same, method of forming resist pattern, and process for producing printed wiring board
TWI625594B (en) Photosensitive resin composition, photosensitive element using the same, method for forming photoresist pattern, and method for manufacturing
JP5488866B2 (en) Photosensitive element, resist pattern forming method using the same, and printed wiring board manufacturing method
CN104345564B (en) Printed circuit board (PCB) manufacture Photocurable composition, its solidfied material and printed circuit board (PCB)
JP5277679B2 (en) Photosensitive resin composition, photosensitive element, resist pattern forming method and printed wiring board manufacturing method
KR20170141708A (en) Pyrazoline-based sensitizer, its preparation method and its application
CN118151489A (en) Photosensitive resin composition, photosensitive dry film and application thereof
JP5673762B2 (en) Photosensitive element, resist pattern forming method using the same, and printed wiring board manufacturing method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant