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CN118473184B - Planar motor and method for realizing six-degree-of-freedom feedback by combining vision and vortex - Google Patents

Planar motor and method for realizing six-degree-of-freedom feedback by combining vision and vortex Download PDF

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Publication number
CN118473184B
CN118473184B CN202410899998.7A CN202410899998A CN118473184B CN 118473184 B CN118473184 B CN 118473184B CN 202410899998 A CN202410899998 A CN 202410899998A CN 118473184 B CN118473184 B CN 118473184B
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assembly
rotor
plane
axis
degree
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CN118473184A (en
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黄安杰
李元隆
梁俊朗
霍炜彬
宋凯
柯振中
林志浩
张小倩
杨裕基
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Foshan Zengguang Intelligent Technology Co ltd
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Foshan Zengguang Intelligent Technology Co ltd
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/102Height gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K11/00Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21Devices for sensing speed or position, or actuated thereby
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/57Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention relates to the technical field of planar motors, in particular to a planar motor and a method for realizing six-degree-of-freedom feedback by combining vision and vortex, which adopt a mode of combining vision and vortex to jointly realize the feedback of six-degree-of-freedom information of a rotor assembly, and the method for acquiring the position and the posture of the rotor is simpler and more direct, is convenient to solve, has lower requirements on an assembly environment and an experimental environment and has lower cost; the pitch angle, the rolling angle and the information of the height of the central z axis of the rotor can be realized through the vortex sensor arranged below the rotor assembly; the information of x-axis displacement, y-axis displacement and deflection angle of the rotor is realized through the visual component; the two can realize six-degree-of-freedom information feedback, timely monitor and adjust the pose information of the rotor, and ensure the stable operation of the planar motor. Meanwhile, the method for realizing six-degree-of-freedom feedback by adopting the planar motor is simpler and easier to implement, and has strong practicability.

Description

Planar motor and method for realizing six-degree-of-freedom feedback by combining vision and vortex
Technical Field
The invention relates to the technical field of planar motors, in particular to a planar motor and a method for realizing six-degree-of-freedom feedback by combining vision and vortex.
Background
The planar motor is a novel motor capable of realizing planar motion by utilizing electromagnetic force; in the running process of the planar motor, the position and the posture of the rotor are required to be monitored in real time, so that the running stability of the planar motor is ensured. At present, an inertial measurement unit comprising a plurality of sensors such as a triaxial accelerometer, a triaxial gyroscope or a magnetometer is generally adopted for acquiring six-degree-of-freedom information of the mover, but in the long-time operation process, errors are generated and accumulated when the accelerometer is influenced by gravity components, drift of the gyroscope and the like, and the accurate feedback of the degree-of-freedom information is greatly influenced; or a six-degree-of-freedom laser tracker is adopted, so that the six-degree-of-freedom laser tracker is commonly used in the field of aerospace, but has high price, high requirements on assembly environment and experimental environment, and is difficult to realize application in a conventional scene; or a Hall sensor is adopted to feed back the six degrees of freedom, but the resolving method for the six degrees of freedom information is complex and difficult to operate. Therefore, based on the problems, the planar motor capable of realizing six-degree-of-freedom information feedback, and having high precision, convenient operation and low cost is researched and has important significance.
Disclosure of Invention
The invention aims to provide a planar motor and a method for realizing six-degree-of-freedom feedback by combining vision and vortex, so as to solve the problems in the prior art.
In order to solve the technical problems, the technical scheme provided by the invention is as follows:
on one hand, the application provides a planar motor for realizing six-degree-of-freedom feedback by combining vision and vortex, which comprises a stator assembly, a flexible circuit board, a vortex sensor, a vision assembly and a rotor assembly, wherein the stator assembly is arranged on a substrate, the flexible circuit board is arranged at the top end of the stator assembly, the flexible circuit board is made of transparent materials, and the vortex sensor is arranged on the flexible circuit board and is used for acquiring the pitch angle, the rolling angle and the central z-axis height of the rotor assembly; the visual assembly is arranged between the stator assembly and the rotor assembly and is used for acquiring x-axis displacement, y-axis displacement and deflection angle of the rotor assembly, and the rotor assembly is suspended above the eddy current sensor under the action of a magnetic field of the stator assembly.
On the basis of the technical scheme, the visual assembly comprises a visual camera and a coding plate, wherein the visual camera is arranged on the substrate and located at the bottom end of the flexible circuit board, and the coding plate is fixedly arranged at the bottom end of the sub-assembly.
On the basis of the technical scheme, the stator assembly is arranged into a coil array formed by uniformly arranging a plurality of electromagnetic coils, and the rotor assembly is arranged into a bearing plate made of magnetic conductive materials.
On the basis of the technical scheme, the position setting of the vision camera is based on the fact that the pattern information on the coding plate can be accurately captured in the moving range of the sub-assembly.
On the basis of the technical scheme, the plurality of electromagnetic coils in the coil array are uniformly distributed.
On the basis of the technical scheme, the vision camera is arranged at the periphery of the coil array and/or at the center of the coil array.
On the basis of the technical scheme, the eddy current sensors are uniformly distributed on the flexible circuit board.
On the other hand, the application also provides a method for realizing six-degree-of-freedom feedback by combining vision and vortex, which adopts the planar motor and comprises the following steps:
Step one: sequentially assembling the stator assembly, the vision camera, the flexible circuit board, the eddy current sensor, the coding plate and the rotor assembly in sequence; after being electrified, the rotor component and the coding plate are suspended above the eddy current sensor and are in non-contact with each other;
Step two: in the moving process of the rotor assembly, the vortex sensor captures and acquires the position information of the rotor assembly, and calculates the pitch angle, the roll angle and the rotor center z-axis height information of the rotor assembly;
Step three: synchronously with the step two, the vision camera captures and acquires pattern information on a coding plate arranged at the bottom end of the sub-assembly, and calculates the pattern information to correspondingly obtain information of x-axis displacement, y-axis displacement and deflection angle of the sub-assembly;
Step four: and (3) collecting the information in the second step and the third step, and realizing six-degree-of-freedom feedback of the sub-component.
On the basis of the technical scheme, the resolving process in the second step comprises the following steps:
Calculating the height of the center z axis of the rotor; taking the center of the stator as an origin, each eddy current sensor can identify a z-axis distance, and the average value of the z-axis readings of all the eddy current sensors is the center height of the rotor;
calculating a pitch angle and a roll angle;
S1, a rectangular coordinate system is established in a three-dimensional space by a metal plate, a plane where an eddy current sensor array is located is taken as an XY plane, and the normal direction of the metal plate is the positive direction of a Z axis;
S2, acquiring measurement data: selecting a plurality of measuring points on a metal plate, measuring the distance between each point and an XY plane by using an eddy current sensor array, and recording the position coordinates (x, y) of each measuring point and the Z-axis distance value d corresponding to each measuring point;
S3, fitting a plane equation: performing plane fitting on the measured data points (x, y, D) By using a least square method to obtain an equation ax+by+cz+d=0 of the plane where the metal plate is located; wherein A, B, C is the normal vector (nx, ny, nz) of the plane, D is a constant;
S4, calculating a pitch angle and a roll angle:
The pitch angle is the angle between the plane of the metal plate and the XY plane, tan theta = nz/sqrt (nx 2+ny^2), and theta = arctan (nz/sqrt (nx 2+ny^2)) is calculated;
The roll angle is the angle between the projection of the metal plate plane on the XY plane and the X axis, tan phi=ny/nx, and phi=arctan (ny/nx) is calculated.
The technical scheme provided by the invention has the beneficial effects that:
1. The invention provides a planar motor for realizing six-degree-of-freedom feedback by combining vision and vortex, which adopts a mode of combining vision and vortex to jointly realize the feedback of six-degree-of-freedom information of a rotor assembly, and the method for acquiring the position and the posture of the rotor is simpler and more direct, is convenient to solve, has lower requirements on assembly environment and experimental environment and has lower cost; specifically, three-degree-of-freedom feedback of the rotor can be realized through an eddy current sensor arranged below the rotor assembly, namely, the pitch angle, the roll angle and the rotor center z-axis height information are obtained through calculation; the visual component is arranged to realize the feedback of three other degrees of freedom, namely, the information of the x-axis displacement, the y-axis displacement and the deflection angle of the rotor is obtained through calculation; the two can realize six-degree-of-freedom information feedback, timely monitor and adjust the pose information of the rotor, and ensure the stable operation of the planar motor.
2. The application also provides a method for realizing six-degree-of-freedom feedback by adopting the planar motor, and the resolving method is simpler and easier to implement and has strong practicability.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a side view of the present invention;
FIG. 3 is a top view of the present invention with the flexible circuit board removed;
FIG. 4 is a schematic diagram of an arrangement of eddy current sensors on a flexible circuit board in accordance with the present invention;
fig. 5 is a schematic diagram of an arrangement of a stator assembly and a vision camera on a substrate according to the present invention.
Detailed Description
The invention is further illustrated by the following examples in conjunction with the accompanying drawings:
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present invention, it should be understood that the terms "left", "right", "front", "rear", "top", "bottom", and the like indicate an orientation or a positional relationship based on that shown in the drawings, and are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or element to be referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention.
As shown in fig. 1 to 5, a planar motor for realizing six-degree-of-freedom feedback by combining vision and eddy current comprises a stator assembly 1, a flexible circuit board 2, an eddy current sensor 3, a vision assembly and a rotor assembly 4, wherein the stator assembly 1 is arranged on a substrate 10, the flexible circuit board 2 is arranged at the top end of the stator assembly 1, the flexible circuit board 2 is made of transparent materials, and the eddy current sensor 3 is arranged on the flexible circuit board 2 and is used for acquiring the pitch angle, the rolling angle and the rotor center z-axis height of the rotor assembly 4; the vision assembly is arranged between the stator assembly 1 and the rotor assembly 4 and is used for acquiring x-axis displacement, y-axis displacement and deflection angle of the rotor assembly 4, and the rotor assembly 4 is suspended above the eddy current sensor 3 under the action of a magnetic field of the stator assembly 1.
The application provides a planar motor, which adopts a mode of combining vision and vortex to jointly realize the feedback of six-degree-of-freedom information of a rotor assembly, and the method for acquiring the position and the posture of the rotor is simpler and more direct, is convenient to solve, has lower requirements on assembly environment and experimental environment and has lower cost. Specifically, the flexible circuit board 2 is arranged and is electrically connected with the stator assembly 1, the eddy current sensor 3 and the vision assembly, so that a driving circuit is provided for the stator assembly 1, the current of the stator assembly 1 is controlled, and signal processing and the like are provided for the vision assembly and the eddy current sensor; three-degree-of-freedom feedback of the mover can be realized through the eddy current sensor 3 arranged below the mover assembly 4, namely, the pitch angle, the roll angle and the information of the center z-axis height of the mover are obtained through calculation; the visual component is arranged to realize the feedback of three other degrees of freedom, namely, the information of the x-axis displacement, the y-axis displacement and the deflection angle of the rotor is obtained through calculation; the two can realize six-degree-of-freedom information feedback, timely monitor and adjust the pose information of the rotor, and ensure the stable operation of the planar motor.
Wherein the height of the rotor center z-axis refers to the height of the rotor from the center of the stator; the x-axis displacement refers to the distance the mover moves in the x-axis direction relative to the stator; the y-axis displacement refers to the distance the mover moves in the y-axis direction relative to the stator.
On the basis of the technical scheme, the vision assembly comprises a vision camera 51 and a coding plate 52, wherein the vision camera 51 is arranged on the base plate 10 and is positioned at the bottom end of the flexible circuit board 2, and the coding plate 52 is fixedly arranged at the bottom end of the sub-assembly 4.
In this embodiment, the flexible circuit board 2 is made of a transparent material, the vision camera 51 is disposed below the transparent flexible circuit board 2 and is disposed on the substrate 10 together with the stator assembly 1, the transparent material does not affect the information capturing of the vision camera, the vision camera 51 can capture the pattern on the encoding board 52 at the bottom end of the mover assembly 4, and three degrees of freedom information of x-axis displacement, y-axis displacement and deflection angle of the mover assembly 4 are obtained; meanwhile, the assembly space of the planar motor can be saved, and the structural design is more compact and ingenious.
In a preferred embodiment, if the coding plate is an ellipse pattern, the vision camera can calculate the centroid coordinates of the ellipse through an image centroid algorithm, the centroid coordinates are xy coordinates, and then calculate the angle of the ellipse relative to the horizontal through an image second-order distance algorithm to obtain a deflection angle; the information of the x-axis displacement, y-axis displacement and deflection angle of the sub-assembly is settled.
The vision camera 51 adopts a camera with high speed Gao Zhengao resolution, namely, the pattern can be clearly captured by the coding plate 52 under the vision camera in the moving process of the sub-camera, so that the resolution is ensured, namely, the accuracy of the information output of the subsequent degree of freedom is ensured.
On the basis of the technical scheme, the stator assembly 1 is arranged into a coil array formed by uniformly arranging a plurality of electromagnetic coils 11, and the rotor assembly 4 is arranged into a bearing plate made of magnetic conductive materials.
The stator assembly 1 in the application adopts a coil array formed by a plurality of electromagnetic coils 11 which are uniformly distributed on a substrate, and generates a magnetic field after being electrified by the flexible circuit board 2 to provide driving force for a planar motor, so that the rotor assembly 4 is suspended on the planar motor and can realize multi-angle motion along a straight line or in a plane; the rotor component 4 is made of a magnetic conductive material to form a bearing plate, for example, a Halbach permanent magnet array is arranged in the rotor and used for bearing materials, and the rotor component 4 moves along a preset plane path under the action of a magnetic field generated by the stator component 1.
On the basis of the technical scheme, the position setting of the vision camera 51 is based on the fact that the pattern information on the coding plate 52 can be accurately captured within the moving range of the sub-assembly 4.
On the basis of the technical scheme, a plurality of electromagnetic coils 11 in the coil array are uniformly distributed.
On the basis of the technical scheme, the vision camera 51 is arranged at the periphery of the coil array and/or at the center of the coil array.
In a preferred embodiment, the vision camera 51 is provided with one or more; as shown in fig. 5, a plurality of vision cameras 51 are arranged at the peripheral edge positions of the coil array, or the vision cameras 51 are arranged at the central position of the coil array, and the pattern information on the coding board 52 can be accurately captured and resolved by matching with the transparent flexible circuit board 2, so that the assembly space is effectively saved, and the operation is more convenient. The number of specific vision cameras 51 is set according to the moving range of the sub-assembly 4, ensuring that the sub-assembly 4 does not deviate from the operable range and can be captured by the vision cameras 51.
On the basis of the technical scheme, the eddy current sensors 3 are uniformly distributed on the flexible circuit board 2.
Through being provided with a plurality of vortex sensor 3 on flexible circuit board 2, in time acquire and feedback the position appearance information of sub-subassembly 4, adjust in time as required, guarantee planar motor's steady operation. It will be appreciated that, as shown in fig. 3, the position of the eddy current sensor on the flexible circuit board will correspond to a position avoiding the vision camera below the flexible circuit board, so as to avoid affecting the capturing process of the vision camera.
On the other hand, the application also provides a method for realizing six-degree-of-freedom feedback by combining vision and vortex, which adopts the planar motor and comprises the following steps:
Step one: the stator assembly 1 and the vision camera 51, the flexible circuit board 2, the eddy current sensor 3, the encoder board 52 and the mover assembly 4 are assembled in this order; after being electrified, the rotor assembly 4 and the coding plate 52 are suspended above the eddy current sensor 3 and are not contacted with each other;
Step two: in the moving process of the rotor assembly 4, the vortex sensor 3 captures and acquires the position information of the rotor assembly 4 and calculates the pitch angle, the roll angle and the rotor center z-axis height information of the rotor assembly 4;
Step three: the visual camera 51 captures and obtains pattern information on a coding plate 52 arranged at the bottom end of the sub-assembly 4, and calculates information of x-axis displacement, y-axis displacement and deflection angle of the sub-assembly 4 correspondingly;
Step four: and (3) collecting the information in the second step and the third step, and realizing six-degree-of-freedom feedback of the sub-component.
On the basis of the technical scheme, the resolving process in the second step comprises the following steps:
Calculating the height of the center z axis of the rotor; taking the center of the stator as an origin, each eddy current sensor can identify a z-axis distance, and the average value of the z-axis readings of all the eddy current sensors is the center height of the rotor; specifically, assuming that xy is (0, 0) with the stator center as the origin, the mover center height z= (z1+z2+z3+ …)/n is calculated.
Calculating a pitch angle and a roll angle;
S1, a rectangular coordinate system is established in a three-dimensional space by a metal plate, a plane where an eddy current sensor array is located is taken as an XY plane, and the normal direction of the metal plate is the positive direction of a Z axis;
S2, acquiring measurement data: selecting a plurality of measuring points on a metal plate, measuring the distance between each point and an XY plane by using an eddy current sensor array, and recording the position coordinates (x, y) of each measuring point and the Z-axis distance value d corresponding to each measuring point;
S3, fitting a plane equation: performing plane fitting on the measured data points (x, y, D) By using a least square method to obtain an equation ax+by+cz+d=0 of the plane where the metal plate is located; wherein A, B, C is the normal vector (nx, ny, nz) of the plane, D is a constant;
S4, calculating a pitch angle and a roll angle:
The pitch angle is the angle between the plane of the metal plate and the XY plane, tan theta = nz/sqrt (nx 2+ny^2), and theta = arctan (nz/sqrt (nx 2+ny^2)) is calculated;
The roll angle is the angle between the projection of the metal plate plane on the XY plane and the X axis, tan phi=ny/nx, and phi=arctan (ny/nx) is calculated.
While the basic principles and main features of the present invention have been shown and described above, it will be apparent to those skilled in the art that the present invention is not limited to the details of the above-described exemplary embodiments, and thus the embodiments should be regarded as illustrative rather than restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims (6)

1. The method for realizing six-degree-of-freedom feedback by combining vision and vortex is characterized in that the adopted planar motor comprises a stator assembly (1), a flexible circuit board (2), a vortex sensor (3), a vision assembly and a rotor assembly (4), wherein the stator assembly (1) is arranged on a substrate (10), the flexible circuit board (2) is arranged at the top end of the stator assembly (1), the flexible circuit board (2) is made of transparent materials, and the vortex sensor (3) is arranged on the flexible circuit board (2) and is used for acquiring the pitch angle, the rolling angle and the rotor center z-axis height of the rotor assembly (4); the visual assembly is arranged between the stator assembly (1) and the rotor assembly (4) and is used for acquiring x-axis displacement, y-axis displacement and deflection angle of the rotor assembly (4), and the rotor assembly (4) is suspended above the eddy current sensor (3) under the action of a magnetic field of the stator assembly (1); the visual assembly comprises a visual camera (51) and a coding plate (52), wherein the visual camera (51) is arranged on the base plate (10) and is positioned at the bottom end of the flexible circuit board (2), and the coding plate (52) is fixedly arranged at the bottom end of the sub-assembly (4);
The method comprises the following steps:
Step one: sequentially assembling the stator assembly (1), the vision camera (51), the flexible circuit board (2), the eddy current sensor (3), the coding board (52) and the sub-assembly (4) in sequence; after being electrified, the rotor assembly (4) and the coding plate (52) are suspended above the eddy current sensor (3) and are in non-contact with each other;
step two: in the motion process of the rotor assembly (4), the vortex sensor (3) captures and acquires the position information of the rotor assembly (4) and calculates the pitch angle, the roll angle and the rotor center z-axis height information of the rotor assembly (4);
Step three: synchronously with the step two, the vision camera (51) captures and acquires pattern information on a coding plate (52) arranged at the bottom end of the sub-assembly (4), and calculates and correspondingly obtains information of x-axis displacement, y-axis displacement and deflection angle of the sub-assembly (4);
Step four: the information in the second step and the third step is gathered, and six-degree-of-freedom feedback of the sub-component is realized;
The resolving process in the second step comprises the following steps:
Calculating the height of the center z axis of the rotor; taking the center of the stator as an origin, each eddy current sensor can identify a z-axis distance, and the average value of the z-axis readings of all the eddy current sensors is the center height of the rotor;
calculating a pitch angle and a roll angle;
S1, a rectangular coordinate system is established in a three-dimensional space by a metal plate, a plane where an eddy current sensor array is located is taken as an XY plane, and the normal direction of the metal plate is the positive direction of a Z axis;
S2, acquiring measurement data: selecting a plurality of measuring points on a metal plate, measuring the distance between each point and an XY plane by using an eddy current sensor array, and recording the position coordinates (x, y) of each measuring point and the Z-axis distance value d corresponding to each measuring point;
S3, fitting a plane equation: performing plane fitting on the measured data points (x, y, D) By using a least square method to obtain an equation ax+by+cz+d=0 of the plane where the metal plate is located; wherein A, B, C is the normal vector (nx, ny, nz) of the plane, D is a constant;
S4, calculating a pitch angle and a roll angle:
The pitch angle is the angle between the plane of the metal plate and the XY plane, tan theta = nz/sqrt (nx 2+ny 2), and theta = arctan (nz/sqrt (nx 2+ny 2));
The roll angle is the angle between the projection of the metal plate plane on the XY plane and the X axis, tan phi=ny/nx, and phi=arctan (ny/nx) is calculated.
2. The method for achieving six-degree-of-freedom feedback by combining vision and eddy currents according to claim 1, wherein the stator assembly (1) is arranged as a coil array formed by uniformly arranging a plurality of electromagnetic coils (11), and the rotor assembly (4) is arranged as a bearing plate made of a magnetic conductive material.
3. The method for achieving six degree of freedom feedback in combination with vision and eddy current according to claim 1, wherein the position of the vision camera (51) is set based on the ability to accurately capture pattern information on the encoding plate (52) within the range of motion of the sub-assembly (4).
4. Method for achieving six degrees of freedom feedback in combination with vision and eddy currents according to claim 2, characterized in that the plurality of electromagnetic coils (11) in the coil array are evenly arranged.
5. The method of achieving six degree of freedom feedback in combination with eddy current according to claim 4, wherein the vision camera (51) is disposed around the coil array and/or at the center of the coil array.
6. The method for achieving six-degree-of-freedom feedback by combining vision and eddy currents according to claim 1, wherein the eddy current sensors (3) are uniformly arranged in a plurality on the flexible circuit board (2).
CN202410899998.7A 2024-07-05 2024-07-05 Planar motor and method for realizing six-degree-of-freedom feedback by combining vision and vortex Active CN118473184B (en)

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