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CN118426127A - Device and method for improving image exposure precision - Google Patents

Device and method for improving image exposure precision Download PDF

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Publication number
CN118426127A
CN118426127A CN202410881751.2A CN202410881751A CN118426127A CN 118426127 A CN118426127 A CN 118426127A CN 202410881751 A CN202410881751 A CN 202410881751A CN 118426127 A CN118426127 A CN 118426127A
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real
vertical beam
time displacement
motor
control module
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CN118426127B (en
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陈乃奇
丘明基
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Shenzhen Anteland Technology Co Ltd
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Shenzhen Anteland Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008Production of exposure light, i.e. light sources
    • G03F7/70025Production of exposure light, i.e. light sources by lasers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058Mask illumination systems
    • G03F7/7015Details of optical elements
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

本申请实施例公开了一种提高图像曝光精度的装置及方法,装置包括:在一立板的同侧自上而下平行设置的第一水平导轨、第一传动组件、第二传动组件以及第二水平导轨;一竖直梁的上端端头设置有第一编码器,下端端头设置有第二编码器,在第一水平导轨的上端设置有第一光栅,下端设置有第二光栅;一控制模块控制竖直梁水平运动,获取竖直梁的上端的第一实时位移S1以及下端端部的第二实时位移S2,控制模块动态调整第一实时位移S1和第二实时位移S2,以使得第一实时位移S1和第二实时位移S2保持动态相等,竖直梁在水平运动过程中尽可能处于垂直状态,为位于竖直梁上呈列状分布的若干颗激光器准确曝光图像提供保障。

The embodiment of the present application discloses a device and method for improving image exposure accuracy, the device comprising: a first horizontal guide rail, a first transmission assembly, a second transmission assembly and a second horizontal guide rail arranged in parallel from top to bottom on the same side of a vertical plate; a first encoder is arranged at the upper end of a vertical beam, a second encoder is arranged at the lower end, a first grating is arranged at the upper end of the first horizontal guide rail, and a second grating is arranged at the lower end; a control module controls the horizontal movement of the vertical beam to obtain a first real-time displacement S1 of the upper end of the vertical beam and a second real-time displacement S2 of the lower end, the control module dynamically adjusts the first real-time displacement S1 and the second real-time displacement S2 to keep the first real-time displacement S1 and the second real-time displacement S2 dynamically equal, the vertical beam is in a vertical state as much as possible during the horizontal movement, and provides a guarantee for accurate exposure of the image by a plurality of lasers distributed in a column shape on the vertical beam.

Description

一种提高图像曝光精度的装置及方法Device and method for improving image exposure accuracy

技术领域Technical Field

本申请实施例属于激光直写设备领域,尤其涉及到一种提高图像曝光精度的装置及方法。The embodiments of the present application belong to the field of laser direct writing equipment, and in particular, relate to a device and method for improving image exposure accuracy.

背景技术Background technique

现有技术中,激光直写设备100的竖直梁104上呈列状安装有若干颗激光器(本申请示例性的画出4颗激光器105A~105D),竖直梁104的上端位于第一水平导轨101上,下端位于第二水平导轨102上,中部位于第一传送带106的上端,第一传送带106的一端套设在第一电机108上,另外一端套设在第一从动轮107上。第一电机108的输出轴套设有第一主动轮115,第一电机108在控制模块109的控制下带动第一主动轮115转动,第一主动轮115带动第一传送带106水平往复运动,第一传送带106带动竖直梁104在第一水平导轨101和第二水平导轨102上左右往复运动,若干颗激光器105A~105D在水平运动时出光曝光图像。In the prior art, a plurality of lasers (four lasers 105A to 105D are shown in the present application as an example) are mounted in a row on the vertical beam 104 of the laser direct writing device 100. The upper end of the vertical beam 104 is located on the first horizontal guide rail 101, the lower end is located on the second horizontal guide rail 102, and the middle part is located on the upper end of the first conveyor belt 106. One end of the first conveyor belt 106 is sleeved on the first motor 108, and the other end is sleeved on the first driven wheel 107. The output shaft of the first motor 108 is sleeved with a first driving wheel 115. The first motor 108 drives the first driving wheel 115 to rotate under the control of the control module 109. The first driving wheel 115 drives the first conveyor belt 106 to reciprocate horizontally. The first conveyor belt 106 drives the vertical beam 104 to reciprocate left and right on the first horizontal guide rail 101 and the second horizontal guide rail 102. The plurality of lasers 105A to 105D emit light to expose the image during the horizontal movement.

理论上,在任意时刻,竖直梁104上端部和下端部在运动过程中均处于水平方向的相同位置处,即竖直梁104在水平运动过程中始终处于竖直状态。例如,图1中,理论上,竖直梁104在M点到N点的行程中,一直保持和第一传送带106垂直,即竖直梁104一直处于垂直状态。然而,实际的情况却是,如图2所示,由于竖直梁104的上端部和下端部分别在第一水平导轨101和第二水平导轨102上所受阻力不同,导致经过一段时间水平运动到达N点后,竖直梁104的上端部和下端部的行程不同步,竖直梁104发生了偏转,导致竖直梁104上的若干颗激光器105A~105D也发生了偏转,造成图像的曝光精度大大降低。Theoretically, at any time, the upper end and the lower end of the vertical beam 104 are at the same position in the horizontal direction during the movement, that is, the vertical beam 104 is always in a vertical state during the horizontal movement. For example, in FIG1, in theory, the vertical beam 104 is always perpendicular to the first conveyor belt 106 during the journey from point M to point N, that is, the vertical beam 104 is always in a vertical state. However, the actual situation is that, as shown in FIG2, due to the different resistances of the upper end and the lower end of the vertical beam 104 on the first horizontal guide rail 101 and the second horizontal guide rail 102, after a period of horizontal movement to point N, the travel of the upper end and the lower end of the vertical beam 104 is not synchronized, and the vertical beam 104 is deflected, causing several lasers 105A~105D on the vertical beam 104 to also be deflected, resulting in a significant reduction in the exposure accuracy of the image.

发明内容Summary of the invention

本申请实施例提供了一种提高图像曝光精度的装置,其目的在于解决因激光器组件的竖直梁在水平运动过程中因上端部和下端部行程不同步造成竖直梁发生偏转而导致的激光器曝光图像精度低的问题。An embodiment of the present application provides a device for improving image exposure accuracy, the purpose of which is to solve the problem of low laser exposure image accuracy caused by the deflection of the vertical beam of the laser assembly due to the asynchronous travel of the upper and lower ends during the horizontal movement of the vertical beam.

一种提高图像曝光精度的装置,运用在激光直写设备上,包括:在激光直写设备的一立板的同侧自上而下平行设置的第一水平导轨、第一传动组件、第二传动组件以及第二水平导轨;A device for improving image exposure accuracy, used in a laser direct writing device, comprising: a first horizontal guide rail, a first transmission assembly, a second transmission assembly and a second horizontal guide rail arranged in parallel from top to bottom on the same side of a vertical plate of the laser direct writing device;

一竖直梁的上端可拆卸连接在第一传动组件上,下端可拆卸连接在第二传动组件上,在竖直梁的上端端头设置有第一编码器,在竖直梁的下端端头设置有第二编码器,在立板的位于第一水平导轨的上端设置有第一光栅,在立板的位于第二水平导轨的下端,设置有第二光栅;The upper end of a vertical beam is detachably connected to the first transmission assembly, and the lower end is detachably connected to the second transmission assembly. A first encoder is arranged at the upper end of the vertical beam, and a second encoder is arranged at the lower end of the vertical beam. A first grating is arranged at the upper end of the vertical plate located on the first horizontal guide rail, and a second grating is arranged at the lower end of the vertical plate located on the second horizontal guide rail.

一控制模块同时控制第一传动组件和第二传动组件分别带动竖直梁的上端部和下端部,在第一水平导轨和第二水平导轨上运动,第一编码器读取第一光栅,得到竖直梁的上端端头的第一实时位移S1,第二编码器读取第二光栅,得到竖直梁下端端头的第二实时位移S2,控制模块动态调整第一实时位移S1和第二实时位移S2,以使得:第一实时位移S1和第二实时位移S2保持动态相等,竖直梁在水平运动过程中尽可能处于垂直状态,为位于竖直梁上呈列状分布的若干颗激光器准确曝光图像提供保证;A control module simultaneously controls the first transmission component and the second transmission component to respectively drive the upper end and the lower end of the vertical beam to move on the first horizontal guide rail and the second horizontal guide rail, the first encoder reads the first grating to obtain the first real-time displacement S1 of the upper end of the vertical beam, and the second encoder reads the second grating to obtain the second real-time displacement S2 of the lower end of the vertical beam, and the control module dynamically adjusts the first real-time displacement S1 and the second real-time displacement S2 so that: the first real-time displacement S1 and the second real-time displacement S2 remain dynamically equal, and the vertical beam is in a vertical state as much as possible during the horizontal movement, so as to provide a guarantee for the accurate exposure of the image by a plurality of lasers distributed in a column shape on the vertical beam;

其中,S1和S2均为随时间变化而变化的变量,竖直梁上端部和下端部在水平方向上的初始位置相同。Among them, S1 and S2 are variables that change with time, and the initial positions of the upper end and the lower end of the vertical beam in the horizontal direction are the same.

进一步地,第一传动组件包括第一电机、第一主动轮、第一传送带和第一从动轮;第一主动轮套设在第一电机的输出轴上,第一传送带的两端分别套设在第一主动轮和第一从动轮上,竖直梁的上端可拆卸连接在第一传送带上;Further, the first transmission assembly includes a first motor, a first driving wheel, a first conveyor belt and a first driven wheel; the first driving wheel is sleeved on the output shaft of the first motor, the two ends of the first conveyor belt are sleeved on the first driving wheel and the first driven wheel respectively, and the upper end of the vertical beam is detachably connected to the first conveyor belt;

第二传动组件包括第二电机、第二主动轮、第二传送带和第二从动轮,第二主动轮套设在第二电机的输出轴上,第二传送带的两端分别套设在第二主动轮和第二从动轮上,竖直梁的下端可拆下连接在第二传送带上。The second transmission assembly includes a second motor, a second driving wheel, a second conveyor belt and a second driven wheel. The second driving wheel is sleeved on the output shaft of the second motor. The two ends of the second conveyor belt are respectively sleeved on the second driving wheel and the second driven wheel. The lower end of the vertical beam can be removed and connected to the second conveyor belt.

进一步地,控制模块动态调整第一实时位移S1和第二实时位移S2,动态调整步骤为:Furthermore, the control module dynamically adjusts the first real-time displacement S1 and the second real-time displacement S2, and the dynamic adjustment steps are:

控制模块同时接收由第一编码器发送的第一实时位移S1以及由第二编码器发送的第二实时位移S2,并比较大小:The control module simultaneously receives the first real-time displacement S1 sent by the first encoder and the second real-time displacement S2 sent by the second encoder, and compares the sizes:

若S1>S2,竖直梁向右偏转,控制模块控制第一电机的转速小于第二电机,直至经过时间t1后,第一编码器和第二编码器再次分别将S1和S2发送给控制模块,控制模块比较出S1=S2后,将第一电机的转速调整为与第二电机的转速相等;If S1>S2, the vertical beam deflects to the right, and the control module controls the speed of the first motor to be lower than that of the second motor, until after time t1, the first encoder and the second encoder send S1 and S2 to the control module again, and after the control module compares S1=S2, it adjusts the speed of the first motor to be equal to that of the second motor;

若S1=S2,竖直梁保持垂直状态,控制模块控制第一电机的转速等于第二电机的转速;If S1=S2, the vertical beam remains in a vertical state, and the control module controls the speed of the first motor to be equal to the speed of the second motor;

若S1<S2,竖直梁向左偏转,控制模块控制第一电机的转速大于第二电机,直至经过时间t2后,第一编码器和第二编码器再次分别将实时S1和S2发送给控制模块,控制模块比较出S1=S2后,将第一电机的转速调整为与第二电机的转速相等。If S1<S2, the vertical beam deflects to the left, and the control module controls the speed of the first motor to be greater than the second motor until time t2 has passed, when the first encoder and the second encoder send real-time S1 and S2 to the control module again respectively. After the control module compares S1=S2, it adjusts the speed of the first motor to be equal to that of the second motor.

进一步地,第一电机和第二电机均为伺服电机且为相同规格。Furthermore, the first motor and the second motor are both servo motors and have the same specifications.

进一步地,第一主动轮和第一从动轮均为相同规格的直齿轮;第二主动轮和第二从动轮均为相同规格的直齿轮。Furthermore, the first driving wheel and the first driven wheel are both spur gears of the same specification; the second driving wheel and the second driven wheel are both spur gears of the same specification.

进一步地,控制模块为芯片处理器。Furthermore, the control module is a chip processor.

进一步地,在竖直梁的上端设置有第一滑块,下端设置有第二滑块,竖直梁的上端通过第一滑块在第一水平导轨上水平运动,竖直梁的下端通过第二滑块在第二水平导轨上水平运动。Furthermore, a first slider is provided at the upper end of the vertical beam, and a second slider is provided at the lower end. The upper end of the vertical beam moves horizontally on the first horizontal guide rail through the first slider, and the lower end of the vertical beam moves horizontally on the second horizontal guide rail through the second slider.

本发明还公开了一种提高图像曝光精度的方法,其目的在于解决因激光器组件的竖直梁在水平运动过程中因上端部和下端部行程不同步造成竖直梁发生偏转而导致的激光器曝光图像精度低的问题,该方法包括:The present invention also discloses a method for improving image exposure accuracy, which aims to solve the problem of low laser exposure image accuracy caused by deflection of the vertical beam due to the asynchronous travel of the upper end and the lower end of the vertical beam of the laser assembly during horizontal movement. The method comprises:

控制模块获取激光直写设备的竖直梁的上端部的第一实时位移S1以及竖直梁的下端部的第二实时位移S2;The control module obtains a first real-time displacement S1 of the upper end of the vertical beam of the laser direct writing device and a second real-time displacement S2 of the lower end of the vertical beam;

控制模块比较第一实时位移S1和第二实时位移S2的大小,动态调整竖直梁上端部的速度及下端部的速度,使得第一实时位移S1和第二实时位移S2维持动态相等,为位于竖直梁上的呈列状分布的若干颗激光器精确曝光图像提供保证;The control module compares the magnitudes of the first real-time displacement S1 and the second real-time displacement S2, and dynamically adjusts the speed of the upper end portion and the speed of the lower end portion of the vertical beam, so that the first real-time displacement S1 and the second real-time displacement S2 maintain dynamic equality, thereby providing a guarantee for the accurate exposure of the image by the plurality of lasers distributed in a row on the vertical beam;

其中,S1和S2均为随时间变化而变化的变量,竖直梁上端部和下端部在水平方向上的初始位置相同。Among them, S1 and S2 are variables that change with time, and the initial positions of the upper end and the lower end of the vertical beam in the horizontal direction are the same.

进一步地,控制模块比较第一实时位移S1和第二实时位移S2的大小,调节竖直梁上端部的速度及下端部的速度,使得第一实时位移S1和第二实时位移S2维持动态相等,具体包括:Further, the control module compares the magnitudes of the first real-time displacement S1 and the second real-time displacement S2, and adjusts the speed of the upper end portion and the speed of the lower end portion of the vertical beam so that the first real-time displacement S1 and the second real-time displacement S2 maintain dynamic equality, specifically including:

控制模块同时接收由第一编码器发送的第一实时位移S1以及由第二编码器发送的第二实时位移S2,并比较大小:The control module simultaneously receives the first real-time displacement S1 sent by the first encoder and the second real-time displacement S2 sent by the second encoder, and compares the sizes:

若竖直梁向右偏转,则S1>S2,控制模块控制第一电机的转速小于第二电机,直至经过时间t1后,第一编码器和第二编码器再次分别将第一实时位移S1和第二实时位移S2发送给控制模块,控制模块比较出S1=S2后,将第一电机的转速调整为与第二电机的转速相等;If the vertical beam deflects to the right, S1>S2, and the control module controls the speed of the first motor to be lower than that of the second motor, until after time t1, the first encoder and the second encoder send the first real-time displacement S1 and the second real-time displacement S2 to the control module again, and after the control module compares S1=S2, it adjusts the speed of the first motor to be equal to that of the second motor;

若竖直梁保持垂直状态,则S1=S2,控制模块控制第一电机的转速等于第二电机的转速;If the vertical beam remains in a vertical state, then S1=S2, and the control module controls the speed of the first motor to be equal to the speed of the second motor;

若竖直梁向左偏转,则S1<S2,控制模块控制第一电机的转速大于第二电机,直至经过时间t2后,第一编码器和第二编码器再次分别将第一实时位移S1和第二实时位移S2发送给控制模块,控制模块比较出第一实时位移S1与第二实时位移S2相等后,将第一电机的转速调整为与第二电机的转速相等。If the vertical beam deflects to the left, S1<S2, and the control module controls the speed of the first motor to be greater than that of the second motor until time t2 has passed, when the first encoder and the second encoder send the first real-time displacement S1 and the second real-time displacement S2 to the control module respectively again. After the control module compares that the first real-time displacement S1 is equal to the second real-time displacement S2, the speed of the first motor is adjusted to be equal to that of the second motor.

进一步地,第一实时位移S1和第二实时位移S2通过如下途径获取:Furthermore, the first real-time displacement S1 and the second real-time displacement S2 are obtained by:

设置在竖直梁的上端端部的第一编码器,读取设置在立板上位于第一编码器上方的第一光栅,获得竖直梁的上端端部的第一实时位移S1;A first encoder disposed at the upper end of the vertical beam reads a first grating disposed on the vertical plate above the first encoder to obtain a first real-time displacement S1 of the upper end of the vertical beam;

设置在竖直梁的下端端部的第二编码器,读取设置在立板上位于第二编码器下方的第二光栅,获得竖直梁的下端端部的第二实时位移S2。The second encoder arranged at the lower end of the vertical beam reads the second grating arranged on the vertical plate below the second encoder to obtain the second real-time displacement S2 of the lower end of the vertical beam.

本发明的技术效果:本激光直写设备中,第一编码器通过读取第一光栅,得到竖直梁的上端部的第一实时位移S1;第二编码器通过读取第二光栅,得到竖直梁的下端部的第二实时位移S2。第一编码器和第二编码器分别将第一实时位移S1和第二实时位移S2发送给控制模块,控制模块判断第一实时位移S1和第二实时位移S2的大小,判断出竖直梁是否发生偏转,若发生了偏转,则向第一传动组件的第一电机和第二传动组件的第二电机发出控制信号,将第一电机的转速和第二电机的转速进行调节,使得经过一段时间后,使得第一实时位移S1再次等于第二实时位移S2,即竖直梁再次处于垂直状态。在竖直梁的后续水平运动中,若再次发生偏转,控制模块再次对竖直梁的上、下两端进行调整,使得竖直梁再次处于垂直状态。在竖直梁做整个水平运动期间,处于:垂直(初始位置时)-偏转-经调整重新垂直-偏转-经调整重新垂直的状态,使得竖直梁维持动态垂直状态,为竖直梁上的若干颗激光器精确曝光图像提供了保障。Technical effect of the present invention: In the laser direct writing device, the first encoder obtains the first real-time displacement S1 of the upper end of the vertical beam by reading the first grating; the second encoder obtains the second real-time displacement S2 of the lower end of the vertical beam by reading the second grating. The first encoder and the second encoder send the first real-time displacement S1 and the second real-time displacement S2 to the control module respectively, and the control module determines the size of the first real-time displacement S1 and the second real-time displacement S2 to determine whether the vertical beam is deflected. If deflection occurs, a control signal is sent to the first motor of the first transmission component and the second motor of the second transmission component to adjust the speed of the first motor and the speed of the second motor, so that after a period of time, the first real-time displacement S1 is equal to the second real-time displacement S2 again, that is, the vertical beam is in a vertical state again. In the subsequent horizontal movement of the vertical beam, if deflection occurs again, the control module adjusts the upper and lower ends of the vertical beam again so that the vertical beam is in a vertical state again. During the entire horizontal movement of the vertical beam, it is in the following state: vertical (initial position) - deflection - readjustment to vertical - deflection - readjustment to vertical, so that the vertical beam maintains a dynamic vertical state, providing a guarantee for the accurate exposure of images by several lasers on the vertical beam.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为理想状态下现有的激光直写设备的激光器组件的上、下两端分别在第一水平导轨和第二水平导轨上一直运行时,激光器组件的竖直梁104始终保持垂直(即不发生偏转)的示意图;FIG1 is a schematic diagram showing that in an ideal state, when the upper and lower ends of the laser assembly of the existing laser direct writing device are respectively running on the first horizontal rail and the second horizontal rail, the vertical beam 104 of the laser assembly is always kept vertical (ie, no deflection occurs);

图2为实际状态下现有的激光直写设备的激光器组件的上、下两端分别在第一水平导轨和第二水平导轨上运行一段时间后,激光器组件的竖直梁104发生偏转的示意图;FIG2 is a schematic diagram showing the deflection of the vertical beam 104 of the laser assembly of the existing laser direct writing device in actual state after the upper and lower ends of the laser assembly run on the first horizontal rail and the second horizontal rail for a period of time respectively;

图3为本申请实施例中控制模块调控激光器组件的第一种实施例的示意图;FIG3 is a schematic diagram of a first embodiment of a control module regulating a laser assembly in an embodiment of the present application;

图4为本申请实施例中控制模块调控激光器组件的第二种实施例的示意图;FIG4 is a schematic diagram of a second embodiment of a control module regulating a laser assembly in an embodiment of the present application;

图5为本申请实施例的方法步骤图。FIG5 is a diagram of the method steps of an embodiment of the present application.

具体实施方式Detailed ways

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

在本发明的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制;术语“第一”、“第二”、“第三”仅用于描述区别,而不能理解为指示或暗示相对重要性,此外,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间物体间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention; the terms "first", "second", and "third" are only used to describe the difference, and cannot be understood as indicating or implying relative importance. In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate object, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

参考图3,本发明公开的一种提高图像曝光精度的装置100i,包括:Referring to FIG. 3 , a device 100i for improving image exposure accuracy disclosed in the present invention includes:

在立板103的同侧自上而下平行设置的第一水平导轨101、第一传动组件、第二传动组件以及第二水平导轨102。在第一水平导轨101和第二水平导轨102上,竖直跨设有一竖直梁104。即竖直梁104的上端可拆卸连接在第一水平导轨101上,下端可拆卸连接在第二水平导轨102上。在竖直梁104的上端端头设置有第一编码器117,在竖直梁104的下端端头设置有第二编码器118。在立板103的位于第一水平导轨101的上端,设置有第一光栅119,在立板103的位于第二水平导轨102的下端,设置有第二光栅120。在竖直梁104上,呈列状设置有若干颗激光器(本申请示例性的列出4颗激光器105A~105D)。第一传动组件和第二传动组件在控制模块109控制下,分别带动竖直梁104的上端部和下端部,在第一水平导轨101和第二水平导轨102上水平运动。在竖直梁104带动下,第一编码器117读取第一光栅119,得到竖直梁104的上端端头的第一实时位移S1,第二编码器118读取第二光栅120,得到竖直梁104的下端端头的第二实时位移S2,控制模块109动态调整第一实时位移S1和第二实时位移S2,使得第一实时位移S1和第二实时位移S2维持动态相等,竖直梁104在水平运动过程中经动态调整后处于动态竖直状态:竖直(初始位置)-偏转-竖直-偏转-竖直,即只要竖直梁104发生了偏转,控制模块109就会将其调整,对其偏转的姿态进行纠正,经过一段时间后,竖直梁104重新恢复为竖直状态,为准确曝光图像提供了保证。The first horizontal guide rail 101, the first transmission assembly, the second transmission assembly and the second horizontal guide rail 102 are arranged in parallel from top to bottom on the same side of the vertical plate 103. A vertical beam 104 is vertically arranged on the first horizontal guide rail 101 and the second horizontal guide rail 102. That is, the upper end of the vertical beam 104 is detachably connected to the first horizontal guide rail 101, and the lower end is detachably connected to the second horizontal guide rail 102. A first encoder 117 is arranged at the upper end of the vertical beam 104, and a second encoder 118 is arranged at the lower end of the vertical beam 104. A first grating 119 is arranged at the upper end of the vertical plate 103 located at the first horizontal guide rail 101, and a second grating 120 is arranged at the lower end of the vertical plate 103 located at the second horizontal guide rail 102. On the vertical beam 104, a plurality of lasers are arranged in a row (four lasers 105A to 105D are listed in this application as an example). Under the control of the control module 109 , the first transmission assembly and the second transmission assembly respectively drive the upper end and the lower end of the vertical beam 104 to move horizontally on the first horizontal guide rail 101 and the second horizontal guide rail 102 . Driven by the vertical beam 104, the first encoder 117 reads the first grating 119 to obtain the first real-time displacement S1 of the upper end of the vertical beam 104, and the second encoder 118 reads the second grating 120 to obtain the second real-time displacement S2 of the lower end of the vertical beam 104. The control module 109 dynamically adjusts the first real-time displacement S1 and the second real-time displacement S2 to maintain dynamic equality. The vertical beam 104 is in a dynamic vertical state after dynamic adjustment during the horizontal movement: vertical (initial position)-deflection-vertical-deflection-vertical, that is, as long as the vertical beam 104 deflects, the control module 109 will adjust it and correct its deflected posture. After a period of time, the vertical beam 104 returns to a vertical state, which provides a guarantee for accurate exposure of the image.

可以理解的是,S1和S2均为随时间变化而变化的变量,而且S1和S2随着竖直梁在水平方向上的运动,并不总是相等,有可能S1>S2,也有可能S1<S2。当S1>S2或者S1<S2,竖直梁的上、下两端经过动态调节后,又维持S1=S2。需要说明的是,在初始位置时,即竖直梁104的上端部和下端部均处于水平位置的M处时,竖直梁104为竖直状态。It is understandable that both S1 and S2 are variables that change with time, and S1 and S2 are not always equal as the vertical beam moves in the horizontal direction. It is possible that S1>S2 or S1<S2. When S1>S2 or S1<S2, the upper and lower ends of the vertical beam are dynamically adjusted to maintain S1=S2. It should be noted that in the initial position, that is, when the upper and lower ends of the vertical beam 104 are both at the horizontal position M, the vertical beam 104 is in a vertical state.

参考图3,优选地,设置在立板103上的第一传动组件包括:第一电机108,第一主动轮115、第一传送带106和第一从动轮107,第一主动轮115和第一从动轮107设置在同一高度。第一主动轮115套设在第一电机108的输出轴上,第一传送带106的一端和第一主动轮115连接,另一端和第一从动轮107连接。控制模块109和第一电机108电连接。控制模块109可以向第一电机108发送各种控制指令,这些控制指令例如可以是转速、转动时间、转矩。当控制模块109向第一电机108发出驱动指令后,第一电机108转动,带动第一传送带106左右来回移动。设置在立板103上的第二传动组件包括:第二电机111,第二主动轮116、第二传送带112和第二从动轮113。第二主动轮116套设在第二电机111的输出轴上,第二传送带112的一端和第二主动轮116连接,另一端和第二从动轮107连接。第二电机111和控制模块109电连接。控制模块109可以向第二电机111发送各种控制指令,这些控制指令例如可以是转速、转动时间、转矩。当控制模块109向第二电机111发出驱动指令后,第二电机108转动,带动第二传送带112左右来回移动。Referring to FIG. 3 , preferably, the first transmission assembly arranged on the vertical plate 103 includes: a first motor 108, a first driving wheel 115, a first conveyor belt 106 and a first driven wheel 107, and the first driving wheel 115 and the first driven wheel 107 are arranged at the same height. The first driving wheel 115 is sleeved on the output shaft of the first motor 108, one end of the first conveyor belt 106 is connected to the first driving wheel 115, and the other end is connected to the first driven wheel 107. The control module 109 is electrically connected to the first motor 108. The control module 109 can send various control instructions to the first motor 108, and these control instructions can be, for example, rotation speed, rotation time, and torque. When the control module 109 sends a driving instruction to the first motor 108, the first motor 108 rotates, driving the first conveyor belt 106 to move back and forth left and right. The second transmission assembly arranged on the vertical plate 103 includes: a second motor 111, a second driving wheel 116, a second conveyor belt 112 and a second driven wheel 113. The second driving wheel 116 is sleeved on the output shaft of the second motor 111. One end of the second conveyor belt 112 is connected to the second driving wheel 116, and the other end is connected to the second driven wheel 107. The second motor 111 is electrically connected to the control module 109. The control module 109 can send various control instructions to the second motor 111, and these control instructions can be, for example, rotation speed, rotation time, and torque. When the control module 109 sends a driving instruction to the second motor 111, the second motor 108 rotates, driving the second conveyor belt 112 to move back and forth.

需要说明的是,第一传送带106和第二传送带112也可以替换为链条,用链条传动替换带传动。第一传送带106和第二传送带112可以是同为平带或者V型带。It should be noted that the first conveyor belt 106 and the second conveyor belt 112 can also be replaced by chains, and the chain drive can replace the belt drive. The first conveyor belt 106 and the second conveyor belt 112 can be both flat belts or V-belts.

具体地,控制模块109动态调整第一实时位移S1和第二实时位移S2过程如下:Specifically, the process of the control module 109 dynamically adjusting the first real-time displacement S1 and the second real-time displacement S2 is as follows:

实施例1Example 1

参考图3,竖直梁104在初始位置M时处于垂直状态,在第一传送带106向右运动过程中发生了向右偏转,即偏转方向和竖直梁104前进方向一致,定义竖直梁104的上端部位于P点,下端部位于Q点,P点较Q点靠右。第一编码器117读取第一光栅119,得到竖直梁104的上端部的从M点到P点的第一实时位移S1;第二编码器118通过读取第二光栅120,得到竖直梁104的下端部从M点到Q点的第二实时位移S2。第一编码器117和第二编码器118分别将第一实时位移S1和第二实时位移S2发送给控制模块109,控制模块109判断出第一实时位移S1大于第二实时位移S2后,发出控制信号,将第一电机108的转速调节成小于第二电机111的转速,使得第一传送带106的水平运动速度小于第二传送带112的水平运动速度。经过时间t1后,竖直梁104的上端部和下端部均到达了R处,第一编码器117通过读取到的第一光栅119,再次得到竖直梁104的上端部的第一实时位移S1;第二编码器118通过读取第二光栅120,再次得到竖直梁104的下端部的第二实时位移S2。第一编码器117和第二编码器118再次分别将第一实时位移S1和第二实时位移S2发送给控制模块109,控制模块109判断出竖直梁104的上下两端均在R处时S1=S2,再次发出控制信号,将第一电机108的转速调节成等于第二电机111的转速,使得第一传送带106的水平运动速度等于第二传送带112的水平运动速度。在后续的行程中,若竖直梁104又发生了若干次偏转(可能向右偏转或者向左偏转,若向左偏转,则控制模块对竖直梁104的调控思路详见下面的实施例2),控制模块109会再做实时调整,保证竖直梁104在最短的时间内由偏转状态恢复成处于竖直状态,即竖直梁在整个水平运动过程中,处于:竖直(初始位置)-偏转-竖直-偏转-竖直不断被调整的状态,为设置在竖直梁104上的若干颗激光器准确曝光图像提供了保证。Referring to FIG3 , the vertical beam 104 is in a vertical state at the initial position M, and deflects to the right during the rightward movement of the first conveyor belt 106, that is, the deflection direction is consistent with the forward direction of the vertical beam 104, and the upper end of the vertical beam 104 is defined to be located at point P, and the lower end is located at point Q, and point P is to the right of point Q. The first encoder 117 reads the first grating 119 to obtain the first real-time displacement S1 of the upper end of the vertical beam 104 from point M to point P; the second encoder 118 obtains the second real-time displacement S2 of the lower end of the vertical beam 104 from point M to point Q by reading the second grating 120. The first encoder 117 and the second encoder 118 send the first real-time displacement S1 and the second real-time displacement S2 to the control module 109 respectively. After the control module 109 determines that the first real-time displacement S1 is greater than the second real-time displacement S2, it sends a control signal to adjust the rotation speed of the first motor 108 to be less than the rotation speed of the second motor 111, so that the horizontal movement speed of the first conveyor belt 106 is less than the horizontal movement speed of the second conveyor belt 112. After time t1, the upper and lower ends of the vertical beam 104 both reach R. The first encoder 117 obtains the first real-time displacement S1 of the upper end of the vertical beam 104 again by reading the first grating 119; the second encoder 118 obtains the second real-time displacement S2 of the lower end of the vertical beam 104 again by reading the second grating 120. The first encoder 117 and the second encoder 118 respectively send the first real-time displacement S1 and the second real-time displacement S2 to the control module 109 again. The control module 109 determines that S1=S2 when both the upper and lower ends of the vertical beam 104 are at R, and sends a control signal again to adjust the speed of the first motor 108 to be equal to the speed of the second motor 111, so that the horizontal movement speed of the first conveyor belt 106 is equal to the horizontal movement speed of the second conveyor belt 112. In the subsequent stroke, if the vertical beam 104 deflects several times again (it may deflect to the right or to the left. If it deflects to the left, the control module's control ideas for the vertical beam 104 are detailed in Example 2 below), the control module 109 will make real-time adjustments to ensure that the vertical beam 104 recovers from the deflected state to the vertical state in the shortest time. That is, during the entire horizontal movement process, the vertical beam is in a state of vertical (initial position)-deflection-vertical-deflection-vertical, which is constantly adjusted, thereby providing a guarantee for the accurate exposure of the image by the multiple lasers arranged on the vertical beam 104.

实施例2Example 2

参考图4,竖直梁104在初始位置M时处于垂直状态,在向前行进的过程中发生了向左偏转,即偏转方向和竖直梁104前进的方向相反,此时竖直梁104的上端部位于U点,下端部位于V点,U点滞后于V点。第一编码器117读取第一光栅119,得到竖直梁104的上端部的从M点到U点的第一实时位移S1;第二编码器118通过读取第二光栅120,得到竖直梁104的下端部的从M点到V点的第二实时位移S2。第一编码器117和第二编码器118分别将第一实时位移S1和第二实时位移S2发送给控制模块109,控制模块109判断出第一实时位移S1大于第二实时位移S2后,发出控制信号,将第一电机108的转速调节成大于第二电机111的转速,因此第一传送带106的水平运动速度大于第二传送带112的水平运动速度。经过时间t2后,竖直梁104的上端部和下端部均到达了W处,第一编码器117读取第一光栅119,再次得到竖直梁104的上端部的从M点到W点的第一实时位移S1;第二编码器118读取第二光栅120,再次得到竖直梁104的下端部的从M点到W点的第二实时位移S2。第一编码器117和第二编码器118再次分别将第一实时位移S1和第二实时位移S2发送给控制模块109,控制模块109判断出S1=S2,再次发出控制信号,将第一电机108的转速调节成等于第二电机111的转速,使得第一传送带106的水平运动速度等于第二传送带112的水平运动速度。在后续的行程中,若竖直梁104又发生了若干次偏转(可能向右偏转或者向左偏转,若向右偏转,则控制模块对竖直梁104的调控思路详见上面的实施例1),控制模块109会再做实时调整,即竖直梁处于:竖直(初始位置)-偏转-竖直-偏转-竖直的不断被调整的过程中,保证了竖直梁104在最短的时间内由偏转状态恢复成处于竖直状态,为设置在竖直梁104上的若干颗激光器准确曝光图像提供了保证。Referring to FIG4 , the vertical beam 104 is in a vertical state at the initial position M, and deflects to the left during the forward movement, that is, the deflection direction is opposite to the forward direction of the vertical beam 104. At this time, the upper end of the vertical beam 104 is located at point U, and the lower end is located at point V, and point U lags behind point V. The first encoder 117 reads the first grating 119 to obtain the first real-time displacement S1 of the upper end of the vertical beam 104 from point M to point U; the second encoder 118 obtains the second real-time displacement S2 of the lower end of the vertical beam 104 from point M to point V by reading the second grating 120. The first encoder 117 and the second encoder 118 send the first real-time displacement S1 and the second real-time displacement S2 to the control module 109 respectively. After the control module 109 determines that the first real-time displacement S1 is greater than the second real-time displacement S2, it sends a control signal to adjust the speed of the first motor 108 to be greater than the speed of the second motor 111, so that the horizontal movement speed of the first conveyor belt 106 is greater than the horizontal movement speed of the second conveyor belt 112. After time t2, both the upper and lower ends of the vertical beam 104 reach W, and the first encoder 117 reads the first grating 119, and obtains the first real-time displacement S1 of the upper end of the vertical beam 104 from point M to point W again; the second encoder 118 reads the second grating 120, and obtains the second real-time displacement S2 of the lower end of the vertical beam 104 from point M to point W again. The first encoder 117 and the second encoder 118 send the first real-time displacement S1 and the second real-time displacement S2 to the control module 109 again, respectively. The control module 109 determines that S1=S2, and sends a control signal again to adjust the speed of the first motor 108 to be equal to the speed of the second motor 111, so that the horizontal movement speed of the first conveyor belt 106 is equal to the horizontal movement speed of the second conveyor belt 112. In the subsequent stroke, if the vertical beam 104 deflects several times again (it may deflect to the right or to the left. If it deflects to the right, the control module's control ideas for the vertical beam 104 are detailed in the above embodiment 1), the control module 109 will make real-time adjustments again, that is, the vertical beam is in the process of continuous adjustment of vertical (initial position)-deflection-vertical-deflection-vertical, which ensures that the vertical beam 104 recovers from the deflected state to the vertical state in the shortest time, thereby providing a guarantee for the accurate exposure of the image by the multiple lasers arranged on the vertical beam 104.

需要说明的是,在图3和图4中,由于第一实时位移S1和第二实时位移S2均为随时间变化而变化的变量,因此,图3中,竖直梁104的上端部在P处和R处时,第一实时位移均标注为S1,竖直梁104的下端部在Q处和R处时,第二实时位移均标注为S2;图4中,竖直梁104的上端部在U处和W处时,第一实时位移均标注为S1,竖直梁104的下端部在V处和W处时,第二实时位移均标注为S2。It should be noted that in Figures 3 and 4, since the first real-time displacement S1 and the second real-time displacement S2 are variables that change with time, in Figure 3, when the upper end of the vertical beam 104 is at P and R, the first real-time displacement is marked as S1, and when the lower end of the vertical beam 104 is at Q and R, the second real-time displacement is marked as S2; in Figure 4, when the upper end of the vertical beam 104 is at U and W, the first real-time displacement is marked as S1, and when the lower end of the vertical beam 104 is at V and W, the second real-time displacement is marked as S2.

参考图3和图4,第一电机108和第二电机111为同一规格的伺服电机。之所以将第一电机108和第二电机111设置为同一规格,是为了方便控制模块109调节,使得第一电机108和第二电机111的转速保持一致,第一传送带106和第二传送带112的速度保持一致,使竖直梁尽量保持竖直状态。3 and 4, the first motor 108 and the second motor 111 are servo motors of the same specification. The first motor 108 and the second motor 111 are set to the same specification to facilitate the adjustment of the control module 109 so that the rotation speeds of the first motor 108 and the second motor 111 are consistent, the speeds of the first conveyor belt 106 and the second conveyor belt 112 are consistent, and the vertical beam is kept in a vertical state as much as possible.

参考图3和图4,在一些实施例中,第一主动轮115和第一从动轮107均优选为相同规格的直齿轮;第二主动轮116和第二从动轮113均为相同规格的直齿轮。3 and 4 , in some embodiments, the first driving wheel 115 and the first driven wheel 107 are preferably spur gears of the same specification; the second driving wheel 116 and the second driven wheel 113 are spur gears of the same specification.

本申请中,控制模块109为具备数据存储、发送与处理的芯片处理器。In the present application, the control module 109 is a chip processor capable of data storage, transmission and processing.

参考图3和图4,在竖直梁104的上端设置有第一滑块121,下端设置有第二滑块122,竖直梁104的上端通过第一滑块121在第一水平导轨101上水平运动,竖直梁104的下端通过第二滑块122在第二水平导轨102上水平运动。3 and 4 , a first slider 121 is provided at the upper end of the vertical beam 104 , and a second slider 122 is provided at the lower end. The upper end of the vertical beam 104 moves horizontally on the first horizontal guide rail 101 through the first slider 121 , and the lower end of the vertical beam 104 moves horizontally on the second horizontal guide rail 102 through the second slider 122 .

参考图5,本发明还提供了一种提高图像曝光精度的方法,包括:Referring to FIG5 , the present invention further provides a method for improving image exposure accuracy, comprising:

步骤1:控制模块获取激光直写设备的竖直梁的上端部的第一实时位移S1以及竖直梁的下端部的第二实时位移S2;Step 1: The control module obtains a first real-time displacement S1 of the upper end of the vertical beam of the laser direct writing device and a second real-time displacement S2 of the lower end of the vertical beam;

步骤2:控制模块比较第一实时位移S1和第二实时位移S2的大小,动态调整竖直梁上端部的速度及下端部的速度,使得第一实时位移S1和第二实时位移S2维持动态相等,为位于所述竖直梁上的呈列状分布的若干颗激光器精确曝光图像提供保证;Step 2: The control module compares the first real-time displacement S1 and the second real-time displacement S2, and dynamically adjusts the speed of the upper end and the speed of the lower end of the vertical beam, so that the first real-time displacement S1 and the second real-time displacement S2 maintain dynamic equality, thereby providing a guarantee for the accurate exposure of the image by the multiple lasers distributed in a row on the vertical beam;

其中,S1和S2均为随时间变化而变化的变量,竖直梁上端部和下端部在水平方向上的初始位置相同。Among them, S1 and S2 are variables that change with time, and the initial positions of the upper end and the lower end of the vertical beam in the horizontal direction are the same.

具体而言,参考图3和图4,第一实时位移S1和第二实时位移S2是通过如下途径获取的:Specifically, referring to FIG. 3 and FIG. 4 , the first real-time displacement S1 and the second real-time displacement S2 are obtained by:

设置在竖直梁104的上端端部的第一编码器117,读取设置在立板103上位于第一编码器117上方的第一光栅119,获得竖直梁104的上端端部的第一实时位移S1;设置在竖直梁104的下端端部的第二编码器118,读取设置在立板103上位于第二编码器118下方的第二光栅120,获得竖直梁104的下端端部的第二实时位移S2。The first encoder 117 arranged at the upper end of the vertical beam 104 reads the first grating 119 arranged on the vertical plate 103 and located above the first encoder 117, and obtains the first real-time displacement S1 of the upper end of the vertical beam 104; the second encoder 118 arranged at the lower end of the vertical beam 104 reads the second grating 120 arranged on the vertical plate 103 and located below the second encoder 118, and obtains the second real-time displacement S2 of the lower end of the vertical beam 104.

步骤2中,控制模块比较第一实时位移S1和第二实时位移S2的大小,动态调整竖直梁上端部的速度及下端部的速度,使得第一实时位移S1和第二实时位移S2动态相等,其调控方法见前面的实施例1和实施例2,在此不再累述。In step 2, the control module compares the sizes of the first real-time displacement S1 and the second real-time displacement S2, and dynamically adjusts the speed of the upper end and the speed of the lower end of the vertical beam so that the first real-time displacement S1 and the second real-time displacement S2 are dynamically equal. The control method is shown in the previous embodiments 1 and 2, and will not be repeated here.

最后应说明的是:以上仅为本发明的优选实施例而已,并不用于限制本发明,尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims (10)

1.一种提高图像曝光精度的装置,运用在激光直写设备上,其特征在于,包括:在激光直写设备的一立板的同侧自上而下平行设置的第一水平导轨、第一传动组件、第二传动组件以及第二水平导轨;1. A device for improving image exposure accuracy, used in a laser direct writing device, characterized by comprising: a first horizontal guide rail, a first transmission assembly, a second transmission assembly and a second horizontal guide rail arranged in parallel from top to bottom on the same side of a vertical plate of the laser direct writing device; 一竖直梁的上端可拆卸连接在所述第一传动组件上,下端可拆卸连接在所述第二传动组件上,在所述竖直梁的上端端头设置有第一编码器,在所述竖直梁的下端端头设置有第二编码器,在所述立板的位于所述第一水平导轨的上端设置有第一光栅,在所述立板的位于所述第二水平导轨的下端,设置有第二光栅;The upper end of a vertical beam is detachably connected to the first transmission assembly, and the lower end is detachably connected to the second transmission assembly. A first encoder is provided at the upper end of the vertical beam, and a second encoder is provided at the lower end of the vertical beam. A first grating is provided at the upper end of the vertical plate located at the first horizontal guide rail, and a second grating is provided at the lower end of the vertical plate located at the second horizontal guide rail. 一控制模块同时控制第一传动组件和第二传动组件分别带动所述竖直梁的上端部和下端部,在所述第一水平导轨和所述第二水平导轨上运动,所述第一编码器读取所述第一光栅,得到所述竖直梁的上端端头的第一实时位移S1,所述第二编码器读取所述第二光栅,得到所述竖直梁下端端头的第二实时位移S2,所述控制模块动态调整所述第一实时位移S1和所述第二实时位移S2,A control module simultaneously controls the first transmission assembly and the second transmission assembly to respectively drive the upper end and the lower end of the vertical beam to move on the first horizontal guide rail and the second horizontal guide rail, the first encoder reads the first grating to obtain the first real-time displacement S1 of the upper end of the vertical beam, the second encoder reads the second grating to obtain the second real-time displacement S2 of the lower end of the vertical beam, and the control module dynamically adjusts the first real-time displacement S1 and the second real-time displacement S2, 以使得:第一实时位移S1和所述第二实时位移S2保持动态相等,所述竖直梁在水平运动过程中尽可能处于垂直状态,为位于所述竖直梁上呈列状分布的若干颗激光器准确曝光图像提供保证;So that: the first real-time displacement S1 and the second real-time displacement S2 remain dynamically equal, and the vertical beam is in a vertical state as much as possible during the horizontal movement, so as to provide a guarantee for the accurate exposure of the image by the plurality of lasers distributed in a column on the vertical beam; 其中,第一实时位移S1和第二实时位移S2均为随时间变化而变化的变量,所述竖直梁上端部和下端部在水平方向上的初始位置相同。The first real-time displacement S1 and the second real-time displacement S2 are variables that change with time, and the initial positions of the upper end and the lower end of the vertical beam in the horizontal direction are the same. 2.如权利要求1所述的装置,其特征在于,所述第一传动组件包括第一电机、第一主动轮、第一传送带和第一从动轮;所述第一主动轮套设在所述第一电机的输出轴上,所述第一传送带的两端分别套设在所述第一主动轮和所述第一从动轮上,所述竖直梁的上端可拆卸连接在所述第一传送带上;2. The device according to claim 1, characterized in that the first transmission assembly comprises a first motor, a first driving wheel, a first conveyor belt and a first driven wheel; the first driving wheel is sleeved on the output shaft of the first motor, the two ends of the first conveyor belt are sleeved on the first driving wheel and the first driven wheel respectively, and the upper end of the vertical beam is detachably connected to the first conveyor belt; 所述第二传动组件包括第二电机、第二主动轮、第二传送带和第二从动轮,所述第二主动轮套设在所述第二电机的输出轴上,所述第二传送带的两端分别套设在所述第二主动轮和所述第二从动轮上,所述竖直梁的下端可拆卸连接在所述第二传送带上。The second transmission assembly includes a second motor, a second driving wheel, a second conveyor belt and a second driven wheel. The second driving wheel is sleeved on the output shaft of the second motor. The two ends of the second conveyor belt are respectively sleeved on the second driving wheel and the second driven wheel. The lower end of the vertical beam is detachably connected to the second conveyor belt. 3.如权利要求2所述的装置,其特征在于,所述控制模块动态调整所述第一实时位移S1和所述第二实时位移S2,动态调整步骤为:3. The device according to claim 2, characterized in that the control module dynamically adjusts the first real-time displacement S1 and the second real-time displacement S2, and the dynamic adjustment steps are: 控制模块同时接收由所述第一编码器发送的第一实时位移S1以及由所述第二编码器发送的第二实时位移S2,并比较大小:The control module simultaneously receives the first real-time displacement S1 sent by the first encoder and the second real-time displacement S2 sent by the second encoder, and compares the sizes: 若竖直梁向右偏转,则S1>S2,控制模块控制所述第一电机的转速小于所述第二电机,直至经过时间t1后,第一编码器和第二编码器再次分别将第一实时位移S1和第二实时位移S2发送给控制模块,控制模块比较出S1=S2后,将所述第一电机的转速调整为与第二电机的转速相等;If the vertical beam deflects to the right, S1>S2, and the control module controls the speed of the first motor to be lower than that of the second motor, until after time t1, the first encoder and the second encoder send the first real-time displacement S1 and the second real-time displacement S2 to the control module again, and after the control module compares S1=S2, the speed of the first motor is adjusted to be equal to the speed of the second motor; 若S1=S2,竖直梁保持垂直状态,控制模块控制所述第一电机的转速等于第二电机的转速;If S1=S2, the vertical beam remains in a vertical state, and the control module controls the speed of the first motor to be equal to the speed of the second motor; 若竖直梁向左偏转,则S1<S2,控制模块控制所述第一电机的转速大于所述第二电机,直至经过时间t2后,第一编码器和第二编码器再次分别将S1和S2发送给控制模块,控制模块比较出S1=S2后,将所述第一电机的转速调整为与第二电机的转速相等。If the vertical beam deflects to the left, S1<S2, and the control module controls the speed of the first motor to be greater than that of the second motor until time t2 has passed, when the first encoder and the second encoder send S1 and S2 to the control module again respectively. After the control module compares S1=S2, it adjusts the speed of the first motor to be equal to that of the second motor. 4.如权利要求2所述的装置,其特征在于,所述第一电机和所述第二电机均为伺服电机且为相同规格。4. The device as claimed in claim 2, characterized in that the first motor and the second motor are both servo motors and have the same specifications. 5.如权利要求2所述的装置,其特征在于,所述第一主动轮和所述第一从动轮均为相同规格的直齿轮;所述第二主动轮和所述第二从动轮均为相同规格的直齿轮;所述第一主动轮和所述第二主动轮规格相同。5. The device as claimed in claim 2, characterized in that the first driving wheel and the first driven wheel are both spur gears of the same specifications; the second driving wheel and the second driven wheel are both spur gears of the same specifications; the first driving wheel and the second driving wheel have the same specifications. 6.如权利要求1所述的装置,其特征在于,所述控制模块为芯片处理器。The device according to claim 1 , wherein the control module is a chip processor. 7.如权利要求1所述的装置,其特征在于,在所述竖直梁的上端设置有第一滑块,下端设置有第二滑块,所述竖直梁的上端通过所述第一滑块在所述第一水平导轨上水平运动,所述竖直梁的下端通过所述第二滑块在所述第二水平导轨上水平运动。7. The device as described in claim 1 is characterized in that a first slider is provided at the upper end of the vertical beam and a second slider is provided at the lower end, the upper end of the vertical beam moves horizontally on the first horizontal guide rail through the first slider, and the lower end of the vertical beam moves horizontally on the second horizontal guide rail through the second slider. 8.一种提高图像曝光精度的方法,其特征在于,包括:8. A method for improving image exposure accuracy, comprising: 控制模块获取激光直写设备的竖直梁的上端部的第一实时位移S1以及竖直梁的下端部的第二实时位移S2;The control module obtains a first real-time displacement S1 of the upper end of the vertical beam of the laser direct writing device and a second real-time displacement S2 of the lower end of the vertical beam; 控制模块比较第一实时位移S1和第二实时位移S2的大小,动态调整竖直梁上端部的速度及下端部的速度,使得第一实时位移S1和第二实时位移S2维持动态相等,为位于所述竖直梁上的呈列状分布的若干颗激光器精确曝光图像提供保证;The control module compares the magnitudes of the first real-time displacement S1 and the second real-time displacement S2, and dynamically adjusts the speed of the upper end portion and the speed of the lower end portion of the vertical beam, so that the first real-time displacement S1 and the second real-time displacement S2 maintain dynamic equality, thereby providing a guarantee for the accurate exposure of the image by the plurality of lasers distributed in a row on the vertical beam; 其中,S1和S2均为随时间变化而变化的变量,所述竖直梁上端部和下端部在水平方向上的初始位置相同。Wherein, S1 and S2 are variables that change with time, and the initial positions of the upper end and the lower end of the vertical beam in the horizontal direction are the same. 9.如权利要求8所述的方法,其特征在于,所述控制模块比较第一实时位移S1和第二实时位移S2的大小,调节竖直梁上端部的速度及下端部的速度,使得第一实时位移S1和第二实时位移S2维持动态相等,具体包括:9. The method according to claim 8, characterized in that the control module compares the magnitudes of the first real-time displacement S1 and the second real-time displacement S2, and adjusts the speed of the upper end portion and the speed of the lower end portion of the vertical beam so that the first real-time displacement S1 and the second real-time displacement S2 maintain dynamic equality, specifically comprising: 控制模块同时接收由激光直写设备的第一编码器发送的第一实时位移S1以及由激光直写设备的第二编码器发送的第二实时位移S2,并比较大小:The control module simultaneously receives the first real-time displacement S1 sent by the first encoder of the laser direct writing device and the second real-time displacement S2 sent by the second encoder of the laser direct writing device, and compares the sizes: 若竖直梁向右偏转,S1>S2,控制模块控制激光直写设备的第一电机的转速小于激光直写设备的第二电机的转速,直至经过时间t1后,第一编码器和第二编码器再次分别将第一实时位移S1和第二实时位移S2发送给控制模块,控制模块比较出S1=S2后,将所述第一电机的转速调整为与第二电机的转速相等;If the vertical beam deflects to the right, S1>S2, the control module controls the speed of the first motor of the laser direct writing device to be lower than the speed of the second motor of the laser direct writing device, until after time t1, the first encoder and the second encoder send the first real-time displacement S1 and the second real-time displacement S2 to the control module again, and after the control module compares S1=S2, it adjusts the speed of the first motor to be equal to the speed of the second motor; 若竖直梁保持垂直状态,S1=S2,控制模块控制所述第一电机的转速等于第二电机的转速;If the vertical beam remains in a vertical state, S1=S2, the control module controls the speed of the first motor to be equal to the speed of the second motor; 若竖直梁向左偏转,S1<S2,控制模块控制所述第一电机的转速大于所述第二电机的转速,直至经过时间t2后,第一编码器和第二编码器再次分别将第一实时位移S1和第二实时位移S2发送给控制模块,控制模块比较出第一实时位移S1与第二实时位移S2相等后,将所述第一电机的转速调整为与第二电机的转速相等。If the vertical beam deflects to the left, S1<S2, the control module controls the speed of the first motor to be greater than the speed of the second motor until time t2 has passed, the first encoder and the second encoder again send the first real-time displacement S1 and the second real-time displacement S2 to the control module respectively, and after the control module compares the first real-time displacement S1 and the second real-time displacement S2 to be equal, the speed of the first motor is adjusted to be equal to the speed of the second motor. 10.如权利要求9所述的方法,其特征在于:所述第一实时位移S1和所述第二实时位移S2通过如下途径获取:10. The method according to claim 9, characterized in that: the first real-time displacement S1 and the second real-time displacement S2 are obtained by: 所述第一编码器读取设置在所述激光直写设备的立板上且位于所述第一编码器上方的第一光栅,获得所述竖直梁的上端端部的第一实时位移S1;设置在所述竖直梁的下端端部的第二编码器,读取设置在所述立板上位于第二编码器下方的第二光栅,获得所述竖直梁的下端端部的第二实时位移S2。The first encoder reads a first grating arranged on the vertical plate of the laser direct writing device and located above the first encoder to obtain a first real-time displacement S1 of the upper end portion of the vertical beam; the second encoder arranged on the lower end portion of the vertical beam reads a second grating arranged on the vertical plate and located below the second encoder to obtain a second real-time displacement S2 of the lower end portion of the vertical beam.
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CN117192918A (en) * 2023-09-27 2023-12-08 深圳市先地图像科技有限公司 Method and device for controlling movement of light emitting module of laser direct writing equipment
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JP2005092763A (en) * 2003-09-19 2005-04-07 Ricoh Co Ltd Position control method for rotator/position control device for rotator/image forming device/image reading device/storage medium
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