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CN118424493A - A high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistance - Google Patents

A high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistance Download PDF

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CN118424493A
CN118424493A CN202410635758.6A CN202410635758A CN118424493A CN 118424493 A CN118424493 A CN 118424493A CN 202410635758 A CN202410635758 A CN 202410635758A CN 118424493 A CN118424493 A CN 118424493A
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temperature
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CN118424493B (en
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徐达
赵建亭
鲁云峰
屈继峰
周琨荔
施杨
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National Institute of Metrology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/30Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermal noise of resistances or conductors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K15/00Testing or calibrating of thermometers
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Abstract

The invention discloses a high-temperature superconducting quantum voltage noise thermometer based on a quantum Hall resistor, which comprises the quantum Hall resistor, a high-temperature superconducting quantum voltage pseudo noise source, a switch conversion circuit, two paths of amplifying and filtering circuits and a data acquisition and processing circuit, wherein the high-temperature superconducting quantum voltage pseudo noise source is connected with the switch conversion circuit; the input end of the switch conversion circuit is respectively and electrically connected with the output ends of the quantum Hall resistor and the superconducting quantum voltage pseudo noise source, and the output end is sequentially and electrically connected with the amplifying and filtering circuit and the data acquisition and processing circuit; the data acquisition processing circuit comprises two analog-to-digital converters and a data processing circuit, and the input end of each analog-to-digital converter is electrically connected with the output end of one amplifying and filtering circuit. The invention adopts the high-temperature superconductive quantum voltage noise source device based on the pulse-driven high-temperature superconductive Josephson array as a reference noise source, can work in a liquid nitrogen temperature region, has low refrigeration cost and small volume, adopts the quantum Hall resistor as a resistance detector, and can realize the temperature in-situ calibration in a low-temperature strong magnetic field environment.

Description

一种基于量子霍尔电阻的高温超导量子电压噪声温度计A high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistance

技术领域Technical Field

本发明涉及温度测量技术领域,具体涉及一种基于量子霍尔电阻的高温超导量子电压噪声温度计。The invention relates to the technical field of temperature measurement, and in particular to a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistance.

背景技术Background technique

温度是国际单位制中的七个基本物理量之一,在能源、冶金、制造业、电子技术、医疗卫生、国防、航空航天和科学研究等领域,精确的温度测量具有广泛应用。Temperature is one of the seven basic physical quantities in the International System of Units. Accurate temperature measurement has wide applications in energy, metallurgy, manufacturing, electronic technology, medical care, national defense, aerospace, and scientific research.

热力学温度开尔文已由玻尔兹曼常数定义,原级温度计要能够实现温度到玻尔兹曼常数的直接溯源。目前,在温度计量领域,仍缺乏能工作于低温、强磁场环境下的高准确度原级温度测量手段。传统的基于国际单位制的低温温标,最新的是ITS-90和PLTS-2000。在低温下,其主要的温度传感器有铑铁电阻、硅二极管、铂电阻、薄膜电阻、噪声温度计等。这些低温温度传感器的读数因受到强磁场影响会发生较大偏差,无法实现高准确度的原级温度测量。量子电压噪声温度计利用脉冲驱动型量子电压系统合成量子赝噪声,同时利用这种量子赝噪声标定测温电阻在不同温度下产生的热噪声,可实现高准确度原级测温。但是,用于量子电压噪声温度计测温电阻的阻值在低温、强磁场下会发生变化,同时,为了测量电阻阻值一般需要给电阻通入电流,电阻的发热会产生温度梯度,影响其温度测量精度,无法实现低温强磁场下的温度原级精确测量。对于许多重要的应用场景来说,比如粒子加速器、航空人造卫星、磁共振成像系统、低温系统和科学研究等,实现低温、强磁场环境下的原级温度高准确度测量尤其重要。Thermodynamic temperature Kelvin has been defined by the Boltzmann constant, and the primary thermometer must be able to directly trace the temperature to the Boltzmann constant. At present, in the field of temperature measurement, there is still a lack of high-accuracy primary temperature measurement methods that can work in low temperature and strong magnetic field environments. The traditional low-temperature temperature scale based on the International System of Units, the latest is ITS-90 and PLTS-2000. At low temperatures, its main temperature sensors include rhodium iron resistors, silicon diodes, platinum resistors, thin film resistors, noise thermometers, etc. The readings of these low-temperature temperature sensors will have large deviations due to the influence of strong magnetic fields, and high-accuracy primary temperature measurements cannot be achieved. The quantum voltage noise thermometer uses a pulse-driven quantum voltage system to synthesize quantum pseudonoise, and uses this quantum pseudonoise to calibrate the thermal noise generated by the temperature measuring resistor at different temperatures, which can achieve high-accuracy primary temperature measurement. However, the resistance of the temperature measuring resistor used in the quantum voltage noise thermometer will change under low temperature and strong magnetic field. At the same time, in order to measure the resistance value, it is generally necessary to pass current through the resistor. The heating of the resistor will produce a temperature gradient, which affects its temperature measurement accuracy and cannot achieve accurate primary temperature measurement under low temperature and strong magnetic field. For many important application scenarios, such as particle accelerators, aerospace satellites, magnetic resonance imaging systems, cryogenic systems and scientific research, it is particularly important to achieve high-accuracy primary temperature measurement under low temperature and strong magnetic field environment.

目前,基于量子电压噪声源的噪声温度计使用的是低温超导约瑟夫森结阵列,如Nb/NbxSi1-x/Nb约瑟夫森结等,可以实现约翰逊噪声法测量玻尔兹曼常数,相对不确定度为3×10-6,为玻尔兹曼常数的确定做出了贡献。然而,低温超导量子电压噪声温度计工作温度极低(液氦温区),设备笨重、制冷时间长、价格昂贵且功耗高,不利于量子电压噪声温度计的推广应用,且尚未用于极端条件下的温度原位标定和溯源。At present, the noise thermometer based on quantum voltage noise source uses a low-temperature superconducting Josephson junction array, such as Nb/ NbxSi1 -x /NbJosephson junction, which can realize the Johnson noise method to measure the Boltzmann constant with a relative uncertainty of 3× 10-6 , contributing to the determination of the Boltzmann constant. However, the low-temperature superconducting quantum voltage noise thermometer operates at an extremely low temperature (liquid helium temperature range), the equipment is bulky, the refrigeration time is long, the price is expensive and the power consumption is high, which is not conducive to the promotion and application of quantum voltage noise thermometers, and has not yet been used for in-situ temperature calibration and traceability under extreme conditions.

基于这一技术背景,本发明研究了一种基于量子霍尔电阻的高温超导量子电压噪声温度计。Based on this technical background, the present invention studies a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistance.

发明内容Summary of the invention

针对现有技术的不足,本发明提出一种基于量子霍尔电阻的高温超导量子电压噪声温度计,采用基于脉冲驱动的高温超导约瑟夫森阵列的高温超导量子电压噪声源器件作为参考噪声源,采用量子霍尔电阻作为电阻探测器,可工作在液氮温区,制冷成本低,体积小,制冷时间短且功耗低,实现了量子电压噪声温度计的便携化、桌面化,推动了量子电压噪声温度计在极端条件下的温度原位校准和溯源应用。In view of the shortcomings of the prior art, the present invention proposes a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor, which adopts a high-temperature superconducting quantum voltage noise source device based on a pulse-driven high-temperature superconducting Josephson array as a reference noise source, and adopts a quantum Hall resistor as a resistance detector. It can work in a liquid nitrogen temperature range, has low refrigeration cost, small size, short refrigeration time and low power consumption, thus realizing the portability and desktop nature of the quantum voltage noise thermometer, and promoting the in-situ temperature calibration and traceability application of the quantum voltage noise thermometer under extreme conditions.

为了实现上述目的,本发明提供一种基于量子霍尔电阻的高温超导量子电压噪声温度计,包括量子霍尔电阻、高温超导量子电压赝噪声源、两路开关转换电路、放大滤波电路、数据采集处理电路;In order to achieve the above-mentioned object, the present invention provides a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor, comprising a quantum Hall resistor, a high-temperature superconducting quantum voltage pseudo-noise source, a two-way switch conversion circuit, an amplification and filtering circuit, and a data acquisition and processing circuit;

所述开关转换电路的输入端分别与所述量子霍尔电阻、高温超导量子电压赝噪声源的输出端电连接,输出端依次与所述两路放大滤波电路、数据采集处理电路电连接;The input end of the switch conversion circuit is electrically connected to the output ends of the quantum Hall resistor and the high-temperature superconducting quantum voltage pseudo-noise source respectively, and the output end is electrically connected to the two-way amplification and filtering circuit and the data acquisition and processing circuit in sequence;

每路放大滤波电路包括依次电连接的前置放大器、第一低通滤波器、缓冲放大器和第二低通滤波器;Each amplification and filtering circuit includes a preamplifier, a first low-pass filter, a buffer amplifier, and a second low-pass filter which are electrically connected in sequence;

所述数据采集处理电路包括两个模数转换器和数据处理电路,每个模数转换器的输入端与一路放大滤波电路输出端电连接,输出端与所述数据处理电路电连接;The data acquisition and processing circuit includes two analog-to-digital converters and a data processing circuit, the input end of each analog-to-digital converter is electrically connected to the output end of an amplifying and filtering circuit, and the output end is electrically connected to the data processing circuit;

所述高温超导量子电压赝噪声源利用基于脉冲驱动的约瑟夫森结阵列芯片合成。The high-temperature superconducting quantum voltage pseudo-noise source is synthesized by using a Josephson junction array chip based on pulse driving.

本发明的技术效果包括:The technical effects of the present invention include:

(1)本发明提出的基于量子霍尔电阻的高温超导量子电压噪声温度计,采用基于脉冲驱动的高温超导约瑟夫森阵列的高温超导量子电压噪声源器件作为参考噪声源,采用量子霍尔电阻作为电阻探测器,可工作在液氮温区,制冷成本低,体积小,制冷时间短且功耗低,实现了量子电压噪声温度计的便携化、桌面化,推动了量子电压噪声温度计在极端条件下的温度原位校准和溯源应用。(1) The high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor proposed in the present invention adopts a high-temperature superconducting quantum voltage noise source device based on a pulse-driven high-temperature superconducting Josephson array as a reference noise source and a quantum Hall resistor as a resistance detector. It can operate in the liquid nitrogen temperature range and has low refrigeration cost, small size, short refrigeration time and low power consumption, thus realizing the portability and desktop nature of the quantum voltage noise thermometer and promoting the in-situ temperature calibration and traceability application of the quantum voltage noise thermometer under extreme conditions.

(2)本发明提出的基于量子霍尔电阻的高温超导量子电压噪声温度计,采用量子霍尔电阻作为探测器,量子霍尔电阻在宽的强磁场范围和宽的低温范围内保持不变,避免了其他电阻在低温强磁场环境下的阻值变化问题,可实现低温强磁场环境下的原级温度测量。(2) The high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor proposed in the present invention adopts quantum Hall resistor as a detector. The quantum Hall resistor remains unchanged in a wide range of strong magnetic fields and a wide range of low temperatures, avoiding the problem of resistance change of other resistors in a low-temperature and strong magnetic field environment, and can realize primary temperature measurement in a low-temperature and strong magnetic field environment.

(3)本发明提出的基于量子霍尔电阻的高温超导量子电压噪声温度计,数据采集处理电路包括两个模数转换器数据处理电路,且与两路放大滤波电路相连,通过模数转换和数据互关联处理,可降低室温读出电路的电压噪声,从而使得量子霍尔电阻噪声源的电压噪声占主导地位。(3) The high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor proposed in the present invention has a data acquisition and processing circuit including two analog-to-digital converter data processing circuits connected to two amplification and filtering circuits. Through analog-to-digital conversion and data cross-correlation processing, the voltage noise of the room temperature readout circuit can be reduced, thereby making the voltage noise of the quantum Hall resistor noise source dominant.

本发明的其它特征和优点将在随后具体实施方式部分予以详细说明。Other features and advantages of the present invention will be described in detail in the following detailed description.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

通过结合附图对本发明示例性实施方式进行更详细的描述,本发明的上述以及其它目的、特征和优势将变得更加明显,其中,在本发明示例性实施方式中,相同的参考标号通常代表相同部件。The above and other objects, features and advantages of the present invention will become more apparent through a more detailed description of exemplary embodiments of the present invention in conjunction with the accompanying drawings, wherein like reference numerals generally represent like parts throughout the exemplary embodiments of the present invention.

图1为本发明提出的基于量子霍尔电阻的高温超导量子电压噪声温度计的电路拓扑结构图。FIG1 is a circuit topology diagram of a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistance proposed by the present invention.

附图标记说明:Description of reference numerals:

1-低温强磁场环境,2-量子霍尔电阻,3-高温环境,4-高温超导量子电压赝噪声源,5-开关转换电路,6-放大滤波电路,7-数据采集处理电路,8-前置放大器,9-第一低通滤波器,10-缓冲放大器,11-第二低通滤波器,12-模数转换器,13-数据处理电路。1- low temperature and strong magnetic field environment, 2- quantum Hall resistance, 3- high temperature environment, 4- high temperature superconducting quantum voltage pseudonoise source, 5- switch conversion circuit, 6- amplifier and filter circuit, 7- data acquisition and processing circuit, 8- preamplifier, 9- first low-pass filter, 10- buffer amplifier, 11- second low-pass filter, 12- analog-to-digital converter, 13- data processing circuit.

具体实施方式Detailed ways

下面将更详细地描述本发明的优选实施方式。虽然以下描述了本发明的优选实施方式,然而应该理解,可以以各种形式实现本发明而不应被这里阐述的实施方式所限制。The preferred embodiments of the present invention will be described in more detail below. Although the preferred embodiments of the present invention are described below, it should be understood that the present invention can be implemented in various forms and should not be limited to the embodiments set forth herein.

在本发明中,在未作相反说明的情况下,使用的方位词如“上、下”通常是指装置在正常使用状态下的上和下,“内、外”是指相对于装置轮廓而言的。此外,术语“第一、第二、第三”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一、第二、第三”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In the present invention, unless otherwise specified, the directional words used, such as "upper and lower", generally refer to the upper and lower parts of the device in normal use, and "inside and outside" refer to the outline of the device. In addition, the terms "first, second, third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first, second, third" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

本发明提供一种基于量子霍尔电阻的高温超导量子电压噪声温度计,如图1所示,包括量子霍尔电阻2、高温超导量子电压赝噪声源4、开关转换电路5、两路放大滤波电路6、数据采集处理电路7;The present invention provides a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor, as shown in FIG1 , comprising a quantum Hall resistor 2, a high-temperature superconducting quantum voltage pseudo-noise source 4, a switch conversion circuit 5, a two-way amplification and filtering circuit 6, and a data acquisition and processing circuit 7;

开关转换电路5的输入端分别与量子霍尔电阻2、高温超导量子电压赝噪声源4的输出端电连接,输出端依次与两路放大滤波电路6、数据采集处理电路7电连接;The input end of the switch conversion circuit 5 is electrically connected to the output end of the quantum Hall resistor 2 and the high temperature superconducting quantum voltage pseudo noise source 4 respectively, and the output end is electrically connected to the two-way amplification and filtering circuit 6 and the data acquisition and processing circuit 7 in sequence;

每路放大滤波电路6包括依次电连接的前置放大器8、第一低通滤波器9、缓冲放大器10和第二低通滤波器11;Each amplification and filtering circuit 6 includes a preamplifier 8, a first low-pass filter 9, a buffer amplifier 10 and a second low-pass filter 11 which are electrically connected in sequence;

数据采集处理电路7包括两个模数转换器12和数据处理电路13,每个模数转换器12的输入端与一路放大滤波电路6输出端电连接,输出端与数据处理电路13电连接;The data acquisition and processing circuit 7 includes two analog-to-digital converters 12 and a data processing circuit 13. The input end of each analog-to-digital converter 12 is electrically connected to the output end of an amplifier and filter circuit 6, and the output end is electrically connected to the data processing circuit 13.

高温超导量子电压赝噪声源4利用基于脉冲驱动的约瑟夫森结阵列芯片合成。The high temperature superconducting quantum voltage pseudonoise source 4 is synthesized using a pulse-driven Josephson junction array chip.

本发明中,采用基于脉冲驱动的高温超导约瑟夫森阵列的高温超导量子电压噪声源4器件作为参考噪声源,采用量子霍尔电阻2作为电阻探测器,可工作在液氮温区,制冷成本低,体积小,制冷时间短且功耗低,实现了量子电压噪声温度计的便携化、桌面化,推动了量子电压噪声温度计在极端条件下的温度原位校准和溯源应用。In the present invention, a high-temperature superconducting quantum voltage noise source 4 device based on a pulse-driven high-temperature superconducting Josephson array is used as a reference noise source, and a quantum Hall resistor 2 is used as a resistance detector, which can work in a liquid nitrogen temperature range, has low refrigeration cost, small size, short refrigeration time and low power consumption, thereby realizing the portability and desktop nature of the quantum voltage noise thermometer, and promoting the in-situ temperature calibration and traceability application of the quantum voltage noise thermometer under extreme conditions.

根据本发明,量子霍尔电阻2处于低温强磁场环境1中;According to the present invention, the quantum Hall resistor 2 is in a low temperature and strong magnetic field environment 1;

低温强磁场环境1的温度为0-150K,磁场为0.5-40T;The temperature of low temperature and strong magnetic field environment 1 is 0-150K, and the magnetic field is 0.5-40T;

高温超导量子电压赝噪声源4处于高温环境3中;The high temperature superconducting quantum voltage pseudo-noise source 4 is in a high temperature environment 3;

高温环境3的温度为大于或等于40K。The temperature of the high temperature environment 3 is greater than or equal to 40K.

本发明中,高温环境3为相对高温,是相对于40K以下低温环境而言的,本发明的高温超导量子电压赝噪声源也可以工作在低温环境下。In the present invention, the high temperature environment 3 is a relatively high temperature relative to a low temperature environment below 40K. The high temperature superconducting quantum voltage pseudo-noise source of the present invention can also work in a low temperature environment.

根据本发明,量子霍尔电阻2的材料为单层石墨烯;According to the present invention, the material of the quantum Hall resistor 2 is a single layer of graphene;

约瑟夫森结阵列芯片的个数为1-106The number of Josephson junction array chips is 1-10 6 ;

约瑟夫森结阵列芯片在微波驱动下产生Shapiro电压台阶输出量子电压脉冲;The Josephson junction array chip generates Shapiro voltage steps and outputs quantum voltage pulses under microwave drive;

微波的频率为1-100GHz;The frequency of microwaves is 1-100 GHz;

约瑟夫森结为基于钇钡铜氧材料的高温超导约瑟夫森结。The Josephson junction is a high-temperature superconducting Josephson junction based on yttrium barium copper oxide material.

本发明中,采用量子霍尔电阻2作为探测器,量子霍尔电阻2在宽的强磁场范围和宽的低温范围内保持不变,避免了其他电阻在低温强磁场环境下的阻值变化问题,可实现低温强磁场环境下的原级温度测量。In the present invention, a quantum Hall resistor 2 is used as a detector. The quantum Hall resistor 2 remains unchanged in a wide range of strong magnetic fields and a wide range of low temperatures, avoiding the problem of resistance value changes of other resistors in a low-temperature and strong magnetic field environment, and can realize primary temperature measurement in a low-temperature and strong magnetic field environment.

本发明中,高温超导量子电压赝噪声源4使用约瑟夫森结阵列芯片合成量子电压赝噪声;约瑟夫森结阵列在微波驱动下产生Shapiro电压台阶,使得约瑟夫森结阵输出量子电压脉冲,利用任意波形合成技术合成量子电压赝噪声信号;约瑟夫森阵列中的约瑟夫森结可以是基于钇钡铜氧等材料的高温超导约瑟夫森结。In the present invention, the high-temperature superconducting quantum voltage pseudo-noise source 4 uses a Josephson junction array chip to synthesize quantum voltage pseudo-noise; the Josephson junction array generates a Shapiro voltage step under microwave drive, so that the Josephson junction array outputs a quantum voltage pulse, and the quantum voltage pseudo-noise signal is synthesized using arbitrary waveform synthesis technology; the Josephson junction in the Josephson array can be a high-temperature superconducting Josephson junction based on materials such as yttrium barium copper oxide.

优选地,开关转换电路5用于在量子霍尔电阻2和高温超导量子电压赝噪声源4之间切换;Preferably, the switch conversion circuit 5 is used to switch between the quantum Hall resistor 2 and the high temperature superconducting quantum voltage pseudo-noise source 4;

每路放大滤波电路6用于将量子霍尔电阻2的噪声信号或高温超导量子电压赝噪声源4的噪声信号读出放大并滤波;Each amplifying and filtering circuit 6 is used to read out, amplify and filter the noise signal of the quantum Hall resistor 2 or the noise signal of the high-temperature superconducting quantum voltage pseudo-noise source 4;

数据采集处理电路7用于将接收到的模拟信号进行模数转换和数据互关联处理。The data acquisition and processing circuit 7 is used to perform analog-to-digital conversion and data correlation processing on the received analog signal.

本发明中,数据采集处理电路包括两个模数转换器数据处理电路,且与两路放大滤波电路相连,通过模数转换和数据互关联处理,可降低室温读出电路的电压噪声,从而使得量子霍尔电阻噪声源的电压噪声占主导地位。In the present invention, the data acquisition and processing circuit includes two analog-to-digital converter data processing circuits, and is connected to two-way amplification and filtering circuits. Through analog-to-digital conversion and data cross-correlation processing, the voltage noise of the room temperature readout circuit can be reduced, so that the voltage noise of the quantum Hall resistance noise source is dominant.

本发明中,放大滤波电路6包括依次电连接的前置放大器8、第一低通滤波器9、缓冲放大器10和第二低通滤波器11,可降低室温读出电路的电压噪声,从而使得量子霍尔电阻2噪声源的电压噪声占主导地位。In the present invention, the amplification and filtering circuit 6 includes a preamplifier 8, a first low-pass filter 9, a buffer amplifier 10 and a second low-pass filter 11 electrically connected in sequence, which can reduce the voltage noise of the room temperature readout circuit, so that the voltage noise of the quantum Hall resistor 2 noise source dominates.

根据本发明,温度计测温所用的公式为:According to the present invention, the formula used by the thermometer to measure temperature is:

其中,T为热力学温度值,为待测量子霍尔电阻的噪声功率,<VQ 2>为高温超导量子电压赝噪声源的噪声功率,ΔM为量子电压噪声温度计测量系统的带宽,n为Shapiro台阶数,m为约瑟夫森结阵列芯片的个数,kb为玻尔兹曼常数,i为朗道能级数,e为基本电荷,f为微波的频率。Where T is the thermodynamic temperature, is the noise power of the quantum Hall resistance to be measured, <V Q 2 > is the noise power of the high-temperature superconducting quantum voltage pseudonoise source, ΔM is the bandwidth of the quantum voltage noise thermometer measurement system, n is the number of Shapiro steps, m is the number of Josephson junction array chips, k b is the Boltzmann constant, i is the Landau level number, e is the basic charge, and f is the frequency of the microwave.

本发明中,为常数,可原级测得待测噪声源的温度精确值。In the present invention, is a constant, and the precise temperature value of the noise source to be measured can be measured at the original level.

根据本发明,温度计测温所用的公式通过量子霍尔电阻2的噪声功率表达式和高温超导量子电压赝噪声源4的噪声功率表达式推导得到。According to the present invention, the formula used by the thermometer to measure temperature is derived from the noise power expression of the quantum Hall resistor 2 and the noise power expression of the high-temperature superconducting quantum voltage pseudo-noise source 4.

根据本发明,量子霍尔电阻2的噪声功率表达式为:According to the present invention, the noise power expression of the quantum Hall resistor 2 is:

其中,R为量子霍尔电阻值。Where R is the quantum Hall resistance value.

本发明中,噪声测温法的测温原理基于Nyquist方程:其中表示噪声功率,kb为玻尔兹曼常数,T为热力学温度值,R为探测器电阻值,ΔM为量子电压噪声温度计测量系统的带宽;通过测量一定带宽范围内电阻的热噪声功率及阻值,能够得到电阻探测器所处环境的热力学温度。In the present invention, the temperature measurement principle of the noise temperature measurement method is based on the Nyquist equation: in represents the noise power, kb is the Boltzmann constant, T is the thermodynamic temperature, R is the detector resistance, and ΔM is the bandwidth of the quantum voltage noise thermometer measurement system. By measuring the thermal noise power and resistance of the resistor within a certain bandwidth, the thermodynamic temperature of the environment in which the resistor detector is located can be obtained.

优选地,量子霍尔电阻的计算公式为;Preferably, the calculation formula of quantum Hall resistance is:

R=RK/i;R = R K /i;

其中,i为朗道能级数,RK为克里青常数;Where i is the Landau energy level, R K is the Klitzing constant;

克里青常数的表达式为:The expression of Klitzing constant is:

RK=h/e2R K =h/e 2 ;

其中,h为普朗克常数。Here, h is Planck's constant.

本发明中,基于量子霍尔电阻2的采用量子霍尔电阻2作为探测器电阻,采用在量子霍尔电阻2和参考电压噪声源之间切换测量的方法,消除测量系统带宽的影响。In the present invention, based on the quantum Hall resistor 2, the quantum Hall resistor 2 is used as the detector resistor, and a method of switching the measurement between the quantum Hall resistor 2 and the reference voltage noise source is adopted to eliminate the influence of the measurement system bandwidth.

根据本发明,高温超导量子电压赝噪声源噪声功率表达式为:According to the present invention, the noise power expression of the high-temperature superconducting quantum voltage pseudo-noise source is:

<VQ 2>=nmKJ -1f;<V Q 2 > = nmK J -1 f;

其中,KJ为约瑟夫森常数。Where K J is the Josephson constant.

本发明中,基于量子霍尔电阻2的量子电压噪声温度计采用量子电压噪声源作为参考电压噪声源,可合成量子电压赝噪声;基于量子霍尔电阻2的量子电压噪声温度计采用互关联技术减小室温读出电路的噪声信号。In the present invention, the quantum voltage noise thermometer based on the quantum Hall resistor 2 uses a quantum voltage noise source as a reference voltage noise source to synthesize quantum voltage pseudonoise; the quantum voltage noise thermometer based on the quantum Hall resistor 2 uses a cross-correlation technology to reduce the noise signal of the room temperature readout circuit.

根据本发明,约瑟夫森常数的表达式为:According to the present invention, the expression of the Josephson constant is:

KJ=2e/h。K J = 2e/h.

本发明中的温度计,测温范围宽,可原级测得待测噪声源的温度精确值,同时测温电路简单,降低了低温、强磁场环境下高精度测温成本。The thermometer of the present invention has a wide temperature measurement range and can measure the precise temperature value of the noise source to be measured at the original level. At the same time, the temperature measurement circuit is simple, which reduces the cost of high-precision temperature measurement in low temperature and strong magnetic field environments.

下面通过具体实施例对本发明进行更详细的说明。The present invention will be described in more detail below through specific examples.

实施例1Example 1

如图1所示,本实施例提供一种基于量子霍尔电阻的高温超导量子电压噪声温度计,包括量子霍尔电阻2、高温超导量子电压赝噪声源4、开关转换电路5、两路放大滤波电路6、数据采集处理电路7;As shown in FIG1 , this embodiment provides a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor, including a quantum Hall resistor 2, a high-temperature superconducting quantum voltage pseudo-noise source 4, a switch conversion circuit 5, a two-way amplification and filtering circuit 6, and a data acquisition and processing circuit 7;

开关转换电路5的输入端分别与量子霍尔电阻2、高温超导量子电压赝噪声源4的输出端电连接,输出端依次与两路放大滤波电路6、数据采集处理电路7电连接;The input end of the switch conversion circuit 5 is electrically connected to the output end of the quantum Hall resistor 2 and the high temperature superconducting quantum voltage pseudo noise source 4 respectively, and the output end is electrically connected to the two-way amplification and filtering circuit 6 and the data acquisition and processing circuit 7 in sequence;

每路放大滤波电路6包括依次电连接的前置放大器8、第一低通滤波器9、缓冲放大器10和第二低通滤波器11;Each amplification and filtering circuit 6 includes a preamplifier 8, a first low-pass filter 9, a buffer amplifier 10 and a second low-pass filter 11 which are electrically connected in sequence;

数据采集处理电路7包括两个模数转换器12和数据处理电路13,每个模数转换器12的输入端与一路放大滤波电路6输出端电连接,输出端与数据处理电路13电连接;The data acquisition and processing circuit 7 includes two analog-to-digital converters 12 and a data processing circuit 13. The input end of each analog-to-digital converter 12 is electrically connected to the output end of an amplifier and filter circuit 6, and the output end is electrically connected to the data processing circuit 13.

量子霍尔电阻2处于低温强磁场环境1,温度约为4.2K,磁场约为10T;采用单层石墨烯材料制作的量子霍尔电阻2作为温度传感器;通过开关转换电路5在量子霍尔电阻2和高温超导量子电压赝噪声源4之间切换;The quantum Hall resistor 2 is in a low temperature and strong magnetic field environment 1, where the temperature is about 4.2K and the magnetic field is about 10T; the quantum Hall resistor 2 made of a single-layer graphene material is used as a temperature sensor; the switch conversion circuit 5 is used to switch between the quantum Hall resistor 2 and the high temperature superconducting quantum voltage pseudo-noise source 4;

高温超导量子电压赝噪声源4处于高温环境3中,使用基于钇钡铜氧的数量约为1000个约瑟夫森结阵列芯片合成量子电压赝噪声,在70GHz微波驱动下输出量子电压脉冲,利用任意波形合成技术合成量子电压赝噪声;The high-temperature superconducting quantum voltage pseudo-noise source 4 is in a high-temperature environment 3, and uses a Josephson junction array chip with about 1000 based on yttrium barium copper oxide to synthesize quantum voltage pseudo-noise, outputs quantum voltage pulses under 70GHz microwave drive, and synthesizes quantum voltage pseudo-noise using arbitrary waveform synthesis technology;

本实施例中,约瑟夫森结阵列在微波驱动下产生Shapiro电压台阶,使得约瑟夫森结阵输出量子电压脉冲;In this embodiment, the Josephson junction array generates a Shapiro voltage step under microwave drive, so that the Josephson junction array outputs a quantum voltage pulse;

本实施例中,高温环境的温度为50K;In this embodiment, the temperature of the high temperature environment is 50K;

本实施例中,温度计测温所用的公式为:In this embodiment, the formula used by the thermometer to measure temperature is:

其中,T为热力学温度值,为待测量子霍尔电阻的噪声功率,<VQ 2>为高温超导量子电压赝噪声源的噪声功率,ΔM为量子电压噪声温度计测量系统的带宽,n为Shapiro台阶数,m为约瑟夫森结阵列芯片的个数,kb为玻尔兹曼常数,i为朗道能级数,e为基本电荷,f为微波的频率,为常数。Where T is the thermodynamic temperature, is the noise power of the quantum Hall resistance to be measured, <V Q 2 > is the noise power of the high-temperature superconducting quantum voltage pseudonoise source, ΔM is the bandwidth of the quantum voltage noise thermometer measurement system, n is the number of Shapiro steps, m is the number of Josephson junction array chips, k b is the Boltzmann constant, i is the Landau level number, e is the basic charge, f is the frequency of the microwave, is a constant.

采用本实施例的参数,可原级测得待测噪声源的温度精确值。By using the parameters of this embodiment, the precise temperature value of the noise source to be measured can be measured at the original stage.

实施例2Example 2

如图1所示,本实施例提供一种基于量子霍尔电阻的高温超导量子电压噪声温度计,包括量子霍尔电阻2、高温超导量子电压赝噪声源4、开关转换电路5、两路放大滤波电路6、数据采集处理电路7;As shown in FIG1 , this embodiment provides a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor, including a quantum Hall resistor 2, a high-temperature superconducting quantum voltage pseudo-noise source 4, a switch conversion circuit 5, a two-way amplification and filtering circuit 6, and a data acquisition and processing circuit 7;

开关转换电路5的输入端分别与量子霍尔电阻2、高温超导量子电压赝噪声源4的输出端电连接,输出端依次与两路放大滤波电路6、数据采集处理电路7电连接;The input end of the switch conversion circuit 5 is electrically connected to the output end of the quantum Hall resistor 2 and the high temperature superconducting quantum voltage pseudo noise source 4 respectively, and the output end is electrically connected to the two-way amplification and filtering circuit 6 and the data acquisition and processing circuit 7 in sequence;

每路放大滤波电路6包括依次电连接的前置放大器8、第一低通滤波器9、缓冲放大器10和第二低通滤波器11;Each amplification and filtering circuit 6 includes a preamplifier 8, a first low-pass filter 9, a buffer amplifier 10 and a second low-pass filter 11 which are electrically connected in sequence;

数据采集处理电路7包括两个模数转换器12和数据处理电路13,每个模数转换器12的输入端与一路放大滤波电路6输出端电连接,输出端与数据处理电路13电连接;The data acquisition and processing circuit 7 includes two analog-to-digital converters 12 and a data processing circuit 13. The input end of each analog-to-digital converter 12 is electrically connected to the output end of an amplifier and filter circuit 6, and the output end is electrically connected to the data processing circuit 13.

量子霍尔电阻2处于低温强磁场环境1,温度约为10K,磁场约为20T;采用单层石墨烯材料制作的量子霍尔电阻2作为温度传感器;通过开关转换电路5在量子霍尔电阻2和高温超导量子电压赝噪声源4之间切换;The quantum Hall resistor 2 is in a low temperature and strong magnetic field environment 1, where the temperature is about 10K and the magnetic field is about 20T; the quantum Hall resistor 2 made of a single-layer graphene material is used as a temperature sensor; the switch conversion circuit 5 is used to switch between the quantum Hall resistor 2 and the high temperature superconducting quantum voltage pseudo-noise source 4;

高温超导量子电压赝噪声源4处于高温环境3中,使用基于钇钡铜氧的数量约为800个约瑟夫森结阵列芯片合成量子电压赝噪声,在75GHz微波驱动下输出量子电压脉冲,利用任意波形合成技术合成量子电压赝噪声;The high-temperature superconducting quantum voltage pseudo-noise source 4 is in a high-temperature environment 3, and uses a Josephson junction array chip with about 800 yttrium barium copper oxide to synthesize quantum voltage pseudo-noise, outputs quantum voltage pulses under 75 GHz microwave drive, and uses arbitrary waveform synthesis technology to synthesize quantum voltage pseudo-noise;

本实施例中,约瑟夫森结阵列在微波驱动下产生Shapiro电压台阶,使得约瑟夫森结阵输出量子电压脉冲;In this embodiment, the Josephson junction array generates a Shapiro voltage step under microwave drive, so that the Josephson junction array outputs a quantum voltage pulse;

本实施例中,高温环境的温度为40K;In this embodiment, the temperature of the high temperature environment is 40K;

本实施例中,温度计测温所用的公式为:In this embodiment, the formula used by the thermometer to measure temperature is:

其中,T为热力学温度值,为待测量子霍尔电阻的噪声功率,<VQ 2>为高温超导量子电压赝噪声源的噪声功率,ΔM为量子电压噪声温度计测量系统的带宽,n为Shapiro台阶数,m为约瑟夫森结阵列芯片的个数,kb为玻尔兹曼常数,i为朗道能级数,e为基本电荷,f为微波的频率,为常数。Where T is the thermodynamic temperature, is the noise power of the quantum Hall resistance to be measured, <V Q 2 > is the noise power of the high-temperature superconducting quantum voltage pseudonoise source, ΔM is the bandwidth of the quantum voltage noise thermometer measurement system, n is the number of Shapiro steps, m is the number of Josephson junction array chips, k b is the Boltzmann constant, i is the Landau level number, e is the basic charge, f is the frequency of the microwave, is a constant.

采用本实施例的参数,可原级测得待测噪声源的温度精确值。By using the parameters of this embodiment, the precise temperature value of the noise source to be measured can be measured at the original stage.

实施例3Example 3

如图1所示,本实施例提供一种基于量子霍尔电阻的高温超导量子电压噪声温度计,包括量子霍尔电阻2、高温超导量子电压赝噪声源4、开关转换电路5、两路放大滤波电路6、数据采集处理电路7;As shown in FIG1 , this embodiment provides a high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor, including a quantum Hall resistor 2, a high-temperature superconducting quantum voltage pseudo-noise source 4, a switch conversion circuit 5, a two-way amplification and filtering circuit 6, and a data acquisition and processing circuit 7;

开关转换电路5的输入端分别与量子霍尔电阻2、高温超导量子电压赝噪声源4的输出端电连接,输出端依次与两路放大滤波电路6、数据采集处理电路7电连接;The input end of the switch conversion circuit 5 is electrically connected to the output end of the quantum Hall resistor 2 and the high temperature superconducting quantum voltage pseudo noise source 4 respectively, and the output end is electrically connected to the two-way amplification and filtering circuit 6 and the data acquisition and processing circuit 7 in sequence;

每路放大滤波电路6包括依次电连接的前置放大器8、第一低通滤波器9、缓冲放大器10和第二低通滤波器11;Each amplification and filtering circuit 6 includes a preamplifier 8, a first low-pass filter 9, a buffer amplifier 10 and a second low-pass filter 11 which are electrically connected in sequence;

数据采集处理电路7包括两个模数转换器12和数据处理电路13,每个模数转换器12的输入端与一路放大滤波电路6输出端电连接,输出端与数据处理电路13电连接;The data acquisition and processing circuit 7 includes two analog-to-digital converters 12 and a data processing circuit 13. The input end of each analog-to-digital converter 12 is electrically connected to the output end of an amplifier and filter circuit 6, and the output end is electrically connected to the data processing circuit 13.

量子霍尔电阻2处于低温强磁场环境1,温度约为15K,磁场约为30T;采用单层石墨烯材料制作的量子霍尔电阻2作为温度传感器;通过开关转换电路5在量子霍尔电阻2和高温超导量子电压赝噪声源4之间切换;The quantum Hall resistor 2 is in a low temperature and strong magnetic field environment 1, where the temperature is about 15K and the magnetic field is about 30T; the quantum Hall resistor 2 made of a single-layer graphene material is used as a temperature sensor; the switch conversion circuit 5 is used to switch between the quantum Hall resistor 2 and the high temperature superconducting quantum voltage pseudo-noise source 4;

高温超导量子电压赝噪声源4处于高温环境3中,使用基于钇钡铜氧的数量约为1500个约瑟夫森结阵列芯片合成量子电压赝噪声,在72GHz微波驱动下输出量子电压脉冲,利用任意波形合成技术合成量子电压赝噪声;The high-temperature superconducting quantum voltage pseudo-noise source 4 is in a high-temperature environment 3, and uses a Josephson junction array chip with about 1,500 yttrium-barium-copper-oxygen to synthesize quantum voltage pseudo-noise, outputs quantum voltage pulses under 72 GHz microwave drive, and synthesizes quantum voltage pseudo-noise using arbitrary waveform synthesis technology;

本实施例中,约瑟夫森结阵列在微波驱动下产生Shapiro电压台阶,使得约瑟夫森结阵输出量子电压脉冲;In this embodiment, the Josephson junction array generates a Shapiro voltage step under microwave drive, so that the Josephson junction array outputs a quantum voltage pulse;

本实施例中,高温环境的温度为77K;In this embodiment, the temperature of the high temperature environment is 77K;

本实施例中,温度计测温所用的公式为:In this embodiment, the formula used by the thermometer to measure temperature is:

其中,T为热力学温度值,为待测量子霍尔电阻的噪声功率,<VQ 2>为高温超导量子电压赝噪声源的噪声功率,ΔM为量子电压噪声温度计测量系统的带宽,n为Shapiro台阶数,m为约瑟夫森结阵列芯片的个数,kb为玻尔兹曼常数,i为朗道能级数,e为基本电荷,f为微波的频率,为常数。Where T is the thermodynamic temperature, is the noise power of the quantum Hall resistance to be measured, <V Q 2 > is the noise power of the high-temperature superconducting quantum voltage pseudonoise source, ΔM is the bandwidth of the quantum voltage noise thermometer measurement system, n is the number of Shapiro steps, m is the number of Josephson junction array chips, k b is the Boltzmann constant, i is the Landau level number, e is the basic charge, f is the frequency of the microwave, is a constant.

采用本实施例的参数,可原级测得待测噪声源的温度精确值。By using the parameters of this embodiment, the precise temperature value of the noise source to be measured can be measured at the original stage.

本实施例中的基于量子霍尔电阻的高温超导量子电压噪声温度计,采用基于脉冲驱动的高温超导约瑟夫森阵列的高温超导量子电压噪声源4器件作为参考噪声源,采用量子霍尔电阻2作为电阻探测器,可工作在液氮温区,制冷成本低,体积小,制冷时间短且功耗低,实现了量子电压噪声温度计的便携化、桌面化,推动了量子电压噪声温度计在极端条件下的温度原位校准和溯源应用。The high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor in this embodiment adopts a high-temperature superconducting quantum voltage noise source 4 device based on a pulse-driven high-temperature superconducting Josephson array as a reference noise source, and adopts a quantum Hall resistor 2 as a resistance detector. It can work in the liquid nitrogen temperature range, has low refrigeration cost, small size, short refrigeration time and low power consumption, and realizes the portability and desktop nature of the quantum voltage noise thermometer, and promotes the in-situ temperature calibration and traceability application of the quantum voltage noise thermometer under extreme conditions.

以上已经描述了本发明的各实施例,上述说明是示例性的,并非穷尽性的,并且也不限于所披露的各实施例。在不偏离所说明的各实施例的范围和精神的情况下,对于本技术领域的普通技术人员来说许多修改和变更都是显而易见的。The embodiments of the present invention have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments.

Claims (10)

1.一种基于量子霍尔电阻的高温超导量子电压噪声温度计,其特征在于,包括量子霍尔电阻、高温超导量子电压赝噪声源、开关转换电路、两路放大滤波电路、数据采集处理电路;1. A high-temperature superconducting quantum voltage noise thermometer based on quantum Hall resistor, characterized in that it includes a quantum Hall resistor, a high-temperature superconducting quantum voltage pseudo-noise source, a switch conversion circuit, a two-way amplification and filtering circuit, and a data acquisition and processing circuit; 所述开关转换电路的输入端分别与所述量子霍尔电阻、高温超导量子电压赝噪声源的输出端电连接,输出端依次与所述两路放大滤波电路、数据采集处理电路电连接;The input end of the switch conversion circuit is electrically connected to the output ends of the quantum Hall resistor and the high-temperature superconducting quantum voltage pseudo-noise source respectively, and the output end is electrically connected to the two-way amplification and filtering circuit and the data acquisition and processing circuit in sequence; 每路放大滤波电路包括依次电连接的前置放大器、第一低通滤波器、缓冲放大器和第二低通滤波器;Each amplification and filtering circuit includes a preamplifier, a first low-pass filter, a buffer amplifier, and a second low-pass filter which are electrically connected in sequence; 所述数据采集处理电路包括两个模数转换器和数据处理电路,每个模数转换器的输入端与一路放大滤波电路输出端电连接,输出端与所述数据处理电路电连接;The data acquisition and processing circuit includes two analog-to-digital converters and a data processing circuit, the input end of each analog-to-digital converter is electrically connected to the output end of an amplifying and filtering circuit, and the output end is electrically connected to the data processing circuit; 所述高温超导量子电压赝噪声源利用基于脉冲驱动的约瑟夫森结阵列芯片合成。The high-temperature superconducting quantum voltage pseudo-noise source is synthesized by using a Josephson junction array chip based on pulse driving. 2.根据权利要求1所述的量子电压噪声温度计,其特征在于,所述量子霍尔电阻处于低温强磁场环境中;2. The quantum voltage noise thermometer according to claim 1, characterized in that the quantum Hall resistor is in a low temperature and strong magnetic field environment; 所述低温强磁场环境的温度为0-150K,磁场为0.5-40T;The temperature of the low temperature and strong magnetic field environment is 0-150K, and the magnetic field is 0.5-40T; 所述高温超导量子电压赝噪声源处于高温环境中;The high temperature superconducting quantum voltage pseudo-noise source is in a high temperature environment; 所述高温环境的温度为大于或等于40K。The temperature of the high temperature environment is greater than or equal to 40K. 3.根据权利要求2所述的量子电压噪声温度计,其特征在于,所述量子霍尔电阻的材料单层石墨烯;3. The quantum voltage noise thermometer according to claim 2, characterized in that the material of the quantum Hall resistor is a single layer of graphene; 所述约瑟夫森结阵列芯片的个数为1-106The number of the Josephson junction array chips is 1-10 6 ; 所述约瑟夫森结阵列芯片在微波驱动下产生Shapiro电压台阶输出量子电压脉冲;The Josephson junction array chip generates a Shapiro voltage step output quantum voltage pulse under microwave drive; 所述微波的频率为1-100GHz;The frequency of the microwave is 1-100 GHz; 所述约瑟夫森结为基于钇钡铜氧材料的高温超导约瑟夫森结。The Josephson junction is a high temperature superconducting Josephson junction based on yttrium barium copper oxide material. 4.根据权利要求1所述的量子电压噪声温度计,其特征在于,所述开关转换电路用于在所述量子霍尔电阻和所述高温超导量子电压赝噪声源之间切换;4. The quantum voltage noise thermometer according to claim 1, characterized in that the switch conversion circuit is used to switch between the quantum Hall resistor and the high temperature superconducting quantum voltage pseudonoise source; 每路放大滤波电路用于将所述量子霍尔电阻的噪声信号或所述高温超导量子电压赝噪声源的噪声信号读出放大并滤波;Each amplifying and filtering circuit is used to read out, amplify and filter the noise signal of the quantum Hall resistor or the noise signal of the high-temperature superconducting quantum voltage pseudo-noise source; 所述数据采集处理电路用于将接收到的模拟信号进行模数转换和数据互关联处理。The data acquisition and processing circuit is used for performing analog-to-digital conversion and data correlation processing on the received analog signal. 5.根据权利要求3所述的量子电压噪声温度计,其特征在于,所述的量子电压噪声温度计测温所用的公式为:5. The quantum voltage noise thermometer according to claim 3 is characterized in that the formula used by the quantum voltage noise thermometer to measure temperature is: 其中,T为热力学温度值,<VT 2>为待测量子霍尔电阻的噪声功率,<VQ 2>为高温超导量子电压赝噪声源的噪声功率,ΔM为量子电压噪声温度计测量系统的带宽,n为Shapiro台阶数,m为约瑟夫森结阵列芯片的个数,kb为玻尔兹曼常数,i为朗道能级数,e为基本电荷,f为微波的频率。Wherein, T is the thermodynamic temperature value, <V T 2 > is the noise power of the quantum Hall resistance to be measured, <V Q 2 > is the noise power of the high-temperature superconducting quantum voltage pseudonoise source, ΔM is the bandwidth of the quantum voltage noise thermometer measurement system, n is the number of Shapiro steps, m is the number of Josephson junction array chips, k b is the Boltzmann constant, i is the Landau energy level number, e is the basic charge, and f is the frequency of the microwave. 6.根据权利要求5所述的量子电压噪声温度计,其特征在于,所述的量子电压噪声温度计测温所用的公式通过所述量子霍尔电阻的噪声功率表达式和所述高温超导量子电压赝噪声源的噪声功率表达式推导得到。6. The quantum voltage noise thermometer according to claim 5 is characterized in that the formula used by the quantum voltage noise thermometer to measure temperature is derived from the noise power expression of the quantum Hall resistor and the noise power expression of the high-temperature superconducting quantum voltage pseudonoise source. 7.根据权利要求6所述的量子电压噪声温度计,其特征在于,所述量子霍尔电阻的噪声功率表达式为:7. The quantum voltage noise thermometer according to claim 6, characterized in that the noise power expression of the quantum Hall resistor is: <VT 2>=4kbTRΔM;<V T 2 > = 4 k b TRΔM; 其中,R为量子霍尔电阻值。Where R is the quantum Hall resistance value. 8.根据权利要求7所述的量子电压噪声温度计,其特征在于,所述量子霍尔电阻的计算公式为;8. The quantum voltage noise thermometer according to claim 7, characterized in that the calculation formula of the quantum Hall resistance is: R=RK/i;R = R K /i; 其中,i为朗道能级数,RK为克里青常数;Where i is the Landau energy level, R K is the Klitzing constant; 所述克里青常数的表达式为:The expression of the Klitzing constant is: RK=h/e2R K =h/e 2 ; 其中,h为普朗克常数。Here, h is Planck's constant. 9.根据权利要求8所述的量子电压噪声温度计,其特征在于,所述高温超导量子电压赝噪声源噪声功率表达式为:9. The quantum voltage noise thermometer according to claim 8, characterized in that the noise power expression of the high-temperature superconducting quantum voltage pseudonoise source is: <VQ 2>=nmKJ -1f;<V Q 2 > = nmK J -1 f; 其中,KJ为约瑟夫森常数。Where K J is the Josephson constant. 10.根据权利要求9所述的量子电压噪声温度计,其特征在于,所述约瑟夫森常数的表达式为:10. The quantum voltage noise thermometer according to claim 9, characterized in that the expression of the Josephson constant is: KJ=2e/h。K J = 2e/h.
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