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CN118424122A - Online film thickness detection method and system based on quality judgment standard - Google Patents

Online film thickness detection method and system based on quality judgment standard Download PDF

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CN118424122A
CN118424122A CN202410628478.2A CN202410628478A CN118424122A CN 118424122 A CN118424122 A CN 118424122A CN 202410628478 A CN202410628478 A CN 202410628478A CN 118424122 A CN118424122 A CN 118424122A
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film
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CN118424122B (en
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金辉
张亮
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Qidong Gaoyang Electrical And Mechanical Manufacturing Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30Computing systems specially adapted for manufacturing

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Abstract

The invention provides an online film thickness detection method and system based on a quality judgment standard, which relate to the field of film thickness detection, and the online film thickness detection method based on the quality judgment standard comprises the following steps: setting a quality judgment standard of film production based on a preset film production standard; respectively carrying out three-dimensional point cloud scanning on the upper surface and the lower surface of the film to be detected by using a laser scanner to respectively obtain upper point cloud data and lower point cloud data; respectively extracting surface profiles of the obtained upper point cloud data and lower point cloud data to obtain upper surface profile data and lower surface profile data; and respectively calculating the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and evaluating the film based on the quality judgment standard. The invention can automatically evaluate the film, reduce the interference of human factors and improve the objectivity and accuracy of the detection result.

Description

一种基于质量判定标准的在线膜厚检测方法及系统An online film thickness detection method and system based on quality judgment criteria

技术领域Technical Field

本发明涉及膜厚的检测领域,具体来说,特别涉及一种基于质量判定标准的在线膜厚检测方法及系统。The present invention relates to the field of film thickness detection, and in particular to an online film thickness detection method and system based on quality judgment criteria.

背景技术Background technique

在显示触控面板制造行业中,产品性能的需求使得多层薄膜的精确镀制在基板表面显得尤为重要。这些薄膜,包括导电薄膜、抗反射层或保护膜,不仅提升了触控反应性和显示质量,还增强了面板的耐久性和环境适应性。对于不同类型的触控面板,如电容式或电阻式,每层薄膜的厚度必须精确控制,以确保符合特定的技术和功能要求;因此,在线膜厚检测技术在确保产品质量方面发挥着至关重要的作用;通过实时监控每层薄膜的厚度,这种技术可以即时识别生产过程中的任何偏差,允许制造过程的即时调整,从而显著减少不合格产品的产生。在线膜厚检测不仅提高了生产效率,也通过减少材料浪费和提高产品一致性,帮助企业实现成本效益。此外,精确的薄膜厚度控制对于触控面板的功能性和长期稳定性至关重要。例如,电容式触控面板的导电薄膜厚度直接影响设备的灵敏度和用户的交互体验。同样,抗反射和保护膜的适当应用可以保护设备免受划伤和外界环境的侵害,延长使用寿命。In the display touch panel manufacturing industry, the demand for product performance makes the precise coating of multiple layers of thin films on the surface of the substrate particularly important. These films, including conductive films, anti-reflective layers or protective films, not only improve touch responsiveness and display quality, but also enhance the durability and environmental adaptability of the panel. For different types of touch panels, such as capacitive or resistive, the thickness of each layer of film must be precisely controlled to ensure compliance with specific technical and functional requirements; therefore, online film thickness detection technology plays a vital role in ensuring product quality; by real-time monitoring of the thickness of each layer of film, this technology can instantly identify any deviations in the production process, allowing instant adjustments to the manufacturing process, thereby significantly reducing the production of unqualified products. Online film thickness detection not only improves production efficiency, but also helps companies achieve cost-effectiveness by reducing material waste and improving product consistency. In addition, precise film thickness control is essential for the functionality and long-term stability of touch panels. For example, the thickness of the conductive film of a capacitive touch panel directly affects the sensitivity of the device and the user's interactive experience. Similarly, the proper application of anti-reflective and protective films can protect the device from scratches and external environmental damage, extending its service life.

目前,在现有的膜厚检测技术中,尽管其自动化和先进性带来了显著的效益,但这现有的膜厚检测技术也面临一系列的缺陷,现有技术需要在多个拍摄角度下获取图像,而这种图像检测依赖于照明和紫外光源的稳定性和均匀性,以确保图像质量;光源波动或分布不均会直接影响图像采集的质量,进一步影响膜厚的测量结果。At present, in the existing film thickness detection technology, although its automation and advancement have brought significant benefits, this existing film thickness detection technology also faces a series of defects. The existing technology needs to acquire images at multiple shooting angles, and this image detection relies on the stability and uniformity of the lighting and ultraviolet light source to ensure the image quality; light source fluctuations or uneven distribution will directly affect the quality of image acquisition, and further affect the measurement results of film thickness.

针对相关技术中的问题,目前尚未提出有效的解决方案。Currently, no effective solution has been proposed for the problems in the related technologies.

发明内容Summary of the invention

有鉴于此,针对相关技术中的问题,本发明提供一种基于质量判定标准的在线膜厚检测方法及系统,以解决上述提及的图像检测膜厚依赖于照明和紫外光源的稳定性和均匀性,光源波动或分布不均会直接影响图像采集的质量的问题。In view of this, and in response to the problems in the related art, the present invention provides an online film thickness detection method and system based on quality judgment standards to solve the above-mentioned problem that the film thickness detected by image depends on the stability and uniformity of the lighting and ultraviolet light source, and the fluctuation or uneven distribution of the light source will directly affect the quality of image acquisition.

为了解决上述问题,本发明采用的具体技术方案如下:In order to solve the above problems, the specific technical solutions adopted by the present invention are as follows:

根据本发明的一方面,提供了一种基于质量判定标准的在线膜厚检测方法,该基于质量判定标准的在线膜厚检测方法包括以下步骤:According to one aspect of the present invention, an online film thickness detection method based on a quality judgment standard is provided, and the online film thickness detection method based on a quality judgment standard comprises the following steps:

S1、基于预先设定的薄膜生产标准,设定薄膜生产的质量判定标准;S1. Based on the pre-set film production standards, set the quality judgment standards for film production;

S2、利用激光扫描仪分别对待检测薄膜的上下表面进行三维点云扫描,分别得到上点云数据和下点云数据;S2, using a laser scanner to perform three-dimensional point cloud scanning on the upper and lower surfaces of the film to be inspected, respectively, to obtain upper point cloud data and lower point cloud data;

S3、对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据;S3, extracting surface contours of the obtained upper point cloud data and lower point cloud data respectively to obtain upper surface contour data and lower surface contour data;

S4、根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估。S4. Calculate the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and evaluate the film based on the quality judgment standard.

优选的,对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据包括以下步骤:Preferably, surface contour extraction is performed on the obtained upper point cloud data and the lower point cloud data respectively, and obtaining the upper surface contour data and the lower surface contour data comprises the following steps:

S31、分别对上点云数据和下点云数据进行预处理,预处理包括滤波和平滑处理;S31, preprocessing the upper point cloud data and the lower point cloud data respectively, wherein the preprocessing includes filtering and smoothing;

S32、分别对预处理后的上点云数据和下点云数据中的每个数据点进行曲率值计算;S32, respectively calculating the curvature value of each data point in the preprocessed upper point cloud data and the lower point cloud data;

S33、根据每个数据点的曲率值,分别确定预处理后的上点云数据和下点云数据的离散程度,并设定曲率阈值;S33, according to the curvature value of each data point, respectively determine the discrete degree of the preprocessed upper point cloud data and the lower point cloud data, and set the curvature threshold;

S34、根据设定的曲率阈值,分别从预处理后的上点云数据和下点云数据中提取薄膜边界线;S34, extracting the film boundary line from the preprocessed upper point cloud data and the lower point cloud data respectively according to the set curvature threshold;

S35、根据预处理后的上点云数据和下点云数据的薄膜边界线,确定上表面轮廓数据和下表面轮廓数据。S35 , determining upper surface contour data and lower surface contour data according to the film boundary lines of the preprocessed upper point cloud data and lower point cloud data.

优选的,分别对预处理后的上点云数据和下点云数据中的每个数据点进行曲率值计算包括以下步骤:Preferably, respectively calculating the curvature value of each data point in the preprocessed upper point cloud data and the lower point cloud data comprises the following steps:

S321、对于预处理后的上点云数据和下点云数据中的每个数据点,计算该数据点到其他所有点的欧式距离,并选取M个距离该数据点最近的邻域点;S321, for each data point in the preprocessed upper point cloud data and the lower point cloud data, calculate the Euclidean distance from the data point to all other points, and select M neighboring points closest to the data point;

S322、对于每个数据点及其选取的M个邻域点,通过计算邻域点的协方差矩阵得到该数据点的法向量;S322, for each data point and its selected M neighboring points, obtain the normal vector of the data point by calculating the covariance matrix of the neighboring points;

S323、分别计算每个数据点法向量与其邻域点的法向量之间的夹角及计算每个数据点与其邻域点之间的位置向量,并确定每个数据点的位置向量与法向量之间的夹角;S323, respectively calculating the angle between the normal vector of each data point and the normal vector of its neighboring points and calculating the position vector between each data point and its neighboring points, and determining the angle between the position vector and the normal vector of each data point;

S324、对于每个数据点,通过法曲率计算公式计算每个数据点相对于其每个邻域点的法曲率;S324, for each data point, calculating the normal curvature of each data point relative to each of its neighboring points using a normal curvature calculation formula;

S325、基于欧拉公式,确定法曲率和主曲率之间的函数关系,并通过最小二乘法优化方法求解每个数据点第一主曲率和第二主曲率;S325. Based on the Euler formula, determine the functional relationship between the normal curvature and the principal curvature, and solve the first principal curvature and the second principal curvature of each data point by a least squares optimization method;

S326、将每个数据点第一主曲率和第二主曲率相乘,得到每个数据点的曲率值。S326. Multiply the first principal curvature and the second principal curvature of each data point to obtain the curvature value of each data point.

优选的,根据每个数据点的曲率值,分别确定预处理后的上点云数据和下点云数据的离散程度,并设定曲率阈值包括以下步骤:Preferably, determining the discreteness of the preprocessed upper point cloud data and the lower point cloud data according to the curvature value of each data point, and setting the curvature threshold comprises the following steps:

S331、根据预处理后的上点云数据和下点云数据中每个数据点的曲率值,分别计算每个数据点的离散值;S331, calculating the discrete value of each data point according to the curvature value of each data point in the preprocessed upper point cloud data and the lower point cloud data;

S332、分别对预处理后的上点云数据和下点云数据中所有数据点的离散值进行求和,并对求和值进行求平方处理,分别得到上点云数据和下点云数据的第一离散度;S332, respectively summing the discrete values of all data points in the preprocessed upper point cloud data and the lower point cloud data, and squaring the summed values to obtain first discreteness of the upper point cloud data and the lower point cloud data;

S333、分别对预处理后的上点云数据和下点云数据中所有数据点的离散值进行离散平均值计算,并对离散平均值求平方处理,分别得到上点云数据和下点云数据的第二离散度;S333, respectively calculating the discrete average values of all data points in the preprocessed upper point cloud data and the lower point cloud data, and squaring the discrete average values to obtain the second discreteness of the upper point cloud data and the lower point cloud data;

S334、分别对预处理后的上点云数据和下点云数据的第一离散度和第二离散度进行比较,若第一离散度小于第二离散度,则分别选取预处理后的上点云数据和下点云数据中数据点的最小曲率值作为曲率阈值,否则,分别选取预处理后的上点云数据和下点云数据中所有数据点的平均值作为曲率阈值。S334. Compare the first discreteness and the second discreteness of the preprocessed upper point cloud data and the lower point cloud data respectively. If the first discreteness is smaller than the second discreteness, select the minimum curvature value of the data points in the preprocessed upper point cloud data and the lower point cloud data respectively as the curvature threshold; otherwise, select the average value of all data points in the preprocessed upper point cloud data and the lower point cloud data respectively as the curvature threshold.

优选的,计算每个数据点的离散值的计算公式为:Preferably, the calculation formula for calculating the discrete value of each data point is:

式中,Fi表示数据点i的离散值;Where, Fi represents the discrete value of data point i;

Ki表示数据点i的曲率值; Ki represents the curvature value of data point i;

max(Ks)表示所有数据点中曲率的最大值和最小值。max(K s ) represents the maximum and minimum values of the curvature among all data points.

优选的,根据设定的曲率阈值,分别从预处理后的上点云数据和下点云数据中提取薄膜边界线包括以下步骤:Preferably, according to the set curvature threshold, extracting the film boundary line from the preprocessed upper point cloud data and the lower point cloud data respectively comprises the following steps:

S341、遍历预处理后的上点云数据和下点云数据中的每个数据点,对于每个数据点,检查其曲率值是否超过设定的曲率阈值;S341, traversing each data point in the preprocessed upper point cloud data and the lower point cloud data, and for each data point, checking whether its curvature value exceeds a set curvature threshold;

S342、将预处理后的上点云数据和下点云数据中曲率值超过阈值的数据点作为边界点;S342, taking data points whose curvature values exceed a threshold in the preprocessed upper point cloud data and lower point cloud data as boundary points;

S343、利用最小距离法将相邻的边界点连接起来,得到连续的边界线,并其作为薄膜的边界线。S343. Use the minimum distance method to connect adjacent boundary points to obtain a continuous boundary line, and use it as the boundary line of the film.

优选的,根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估包括以下步骤:Preferably, calculating the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and evaluating the film based on the quality judgment standard comprises the following steps:

S41、分别将上表面轮廓数据和下表面轮廓数据在预设的坐标系中进行点云数据对齐;S41, aligning the upper surface contour data and the lower surface contour data in a preset coordinate system respectively;

S42、在数据对齐后,对于上表面轮廓数据的每个数据点,找到对应下表面轮廓数据中最近的数据点,计算两个数据点对之间的垂直距离;S42, after the data are aligned, for each data point of the upper surface contour data, find the nearest data point in the corresponding lower surface contour data, and calculate the vertical distance between the two data point pairs;

S43、分别将每个数据点对的垂直距离与标准膜厚进行比较,并基于比较结果评估薄膜的质量。S43, respectively comparing the vertical distance of each data point pair with the standard film thickness, and evaluating the quality of the film based on the comparison result.

优选的,分别将上表面轮廓数据和下表面轮廓数据在预设的坐标系中进行点云数据对齐包括以下步骤:Preferably, aligning the upper surface contour data and the lower surface contour data in a preset coordinate system to perform point cloud data alignment includes the following steps:

S411、获取采集上表面轮廓数据和下表面轮廓数据的两组激光扫描仪之间的相对位置关系;S411, obtaining the relative position relationship between two groups of laser scanners that collect upper surface profile data and lower surface profile data;

S412、分别将上表面轮廓数据和下表面轮廓数据转换到预设的坐标系中;S412, converting the upper surface contour data and the lower surface contour data into a preset coordinate system respectively;

S413、根据两组激光扫描仪之间的相对位置关系,对上表面轮廓数据和下表面轮廓数据进行点云数据对齐。S413, performing point cloud data alignment on the upper surface contour data and the lower surface contour data according to the relative position relationship between the two groups of laser scanners.

优选的,分别将每个数据点对的垂直距离与标准膜厚进行比较,并基于比较结果评估薄膜的质量包括以下步骤:Preferably, comparing the vertical distance of each data point pair with the standard film thickness, and evaluating the quality of the film based on the comparison result comprises the following steps:

S431、分别计算每个数据点对的垂直距离与标准膜厚之间的差值;S431, respectively calculating the difference between the vertical distance of each data point pair and the standard film thickness;

S432、将差值与预先设定的误差范围进行比较,若差值大于预先设定的误差范围,则认为该数据点对所在位置的膜厚不符合标准,否则,则认为该数据点对所在位置的膜厚符合标准;S432, comparing the difference with a preset error range, if the difference is greater than the preset error range, it is considered that the film thickness at the location of the data point pair does not meet the standard, otherwise, it is considered that the film thickness at the location of the data point pair meets the standard;

S433、统计所有符合和不符合的数据点对数量,并根据统计结果评估薄膜的整体质量。S433, counting the number of all pairs of data points that meet and do not meet the requirements, and evaluating the overall quality of the film based on the statistical results.

根据本发明的另一方面,提供了一种基于质量判定标准的在线膜厚检测系统,该基于质量判定标准的在线膜厚检测系统包括:标准设定模块、数据获取模块、轮廓提取模块及质量评估模块,且标准设定模块、数据获取模块、轮廓提取模块及质量评估模块之间依次连接;According to another aspect of the present invention, there is provided an online film thickness detection system based on a quality judgment standard, the online film thickness detection system based on a quality judgment standard comprising: a standard setting module, a data acquisition module, a contour extraction module and a quality assessment module, and the standard setting module, the data acquisition module, the contour extraction module and the quality assessment module are sequentially connected;

标准设定模块,用于基于预先设定的薄膜生产标准,设定薄膜生产的质量判定标准;A standard setting module, used to set quality judgment standards for film production based on pre-set film production standards;

数据获取模块,用于利用激光扫描仪分别对待检测薄膜的上下表面进行三维点云扫描,分别得到上点云数据和下点云数据;A data acquisition module is used to use a laser scanner to perform three-dimensional point cloud scanning on the upper and lower surfaces of the film to be inspected, respectively, to obtain upper point cloud data and lower point cloud data;

轮廓提取模块,用于对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据;A contour extraction module is used to extract surface contours of the obtained upper point cloud data and lower point cloud data respectively to obtain upper surface contour data and lower surface contour data;

质量评估模块,用于根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估。The quality assessment module is used to calculate the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and to assess the film based on the quality judgment standard.

与现有技术相比,本发明提供了基于质量判定标准的在线膜厚检测方法及系统,具备以下有益效果:Compared with the prior art, the present invention provides an online film thickness detection method and system based on quality judgment criteria, which has the following beneficial effects:

(1)本发明通过在线检测的方式,能够在薄膜生产过程中即时获取其厚度信息,无需等待生产完成后再进行离线检测,大大提高了生产效率,并使得生产过程中的质量控制更为及时和精准,使用激光扫描仪进行三维点云扫描,无需与薄膜直接接触,从而避免了可能的物理损伤或污染,通过对点云数据进行表面轮廓提取和厚度计算,该方法能够实现自动化和智能化的检测过程;结合预设的质量判定标准,可以对薄膜进行自动评估,减少人为因素的干扰,提高检测结果的客观性和准确性。(1) The present invention can obtain the thickness information of the film in real time during the production process through online detection, without waiting for the completion of production to perform offline detection, which greatly improves the production efficiency and makes the quality control in the production process more timely and accurate. The laser scanner is used for three-dimensional point cloud scanning without direct contact with the film, thereby avoiding possible physical damage or contamination. By extracting the surface contour and calculating the thickness of the point cloud data, the method can realize an automated and intelligent detection process; combined with the preset quality judgment standard, the film can be automatically evaluated, reducing the interference of human factors, and improving the objectivity and accuracy of the detection results.

(2)本发明通过预处理步骤中的滤波和平滑处理能够去除点云数据中的噪声和异常值,提高数据的质量,通过计算每个数据点的曲率值,并根据曲率阈值提取薄膜边界线,能够精确地识别出薄膜的表面轮廓,能够有效地区分薄膜与周围环境的边界,避免误判或遗漏,根据点云数据的离散程度来设定曲率阈值,使得阈值的设定更加合理和自适应,通过比较第一离散度和第二离散度,可以选择更合适的阈值,从而更准确地提取薄膜边界线。(2) The present invention can remove noise and outliers in the point cloud data and improve the quality of the data through filtering and smoothing in the preprocessing step. By calculating the curvature value of each data point and extracting the film boundary line according to the curvature threshold, the surface contour of the film can be accurately identified, and the boundary between the film and the surrounding environment can be effectively distinguished to avoid misjudgment or omission. The curvature threshold is set according to the discrete degree of the point cloud data, so that the threshold setting is more reasonable and adaptive. By comparing the first discrete degree and the second discrete degree, a more appropriate threshold can be selected, thereby more accurately extracting the film boundary line.

(3)本发明通过上表面轮廓数据和下表面轮廓数据在预设的坐标系中进行点云数据对齐,能够确保对应的数据点准确匹配,进而得到准确的垂直距离,即薄膜的厚度,通过比较每个数据点对的垂直距离与标准膜厚,并基于比较结果评估薄膜的质量,可以对薄膜在不同位置的膜厚进行全面而细致的检查,有助于提高膜厚检测的准确性和效率,为薄膜生产的质量控制提供有力保障。(3) The present invention aligns the point cloud data of the upper surface contour data and the lower surface contour data in a preset coordinate system, thereby ensuring that the corresponding data points are accurately matched, and then obtaining an accurate vertical distance, that is, the thickness of the film. By comparing the vertical distance of each data point pair with the standard film thickness and evaluating the quality of the film based on the comparison result, the film thickness at different positions can be comprehensively and carefully inspected, which helps to improve the accuracy and efficiency of film thickness detection and provide a strong guarantee for quality control of film production.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。在附图中:In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

图1是根据本发明实施例的一种基于质量判定标准的在线膜厚检测方法的流程图;FIG1 is a flow chart of an online film thickness detection method based on a quality judgment standard according to an embodiment of the present invention;

图2是根据本发明实施例的一种基于质量判定标准的在线膜厚检测系统的原理框图;FIG2 is a principle block diagram of an online film thickness detection system based on a quality judgment standard according to an embodiment of the present invention;

图3是根据本发明实施例的一种计算机设备的结构示意图。FIG. 3 is a schematic diagram of the structure of a computer device according to an embodiment of the present invention.

图中:In the figure:

1、标准设定模块;2、数据获取模块;3、轮廓提取模块;4、质量评估模块。1. Standard setting module; 2. Data acquisition module; 3. Contour extraction module; 4. Quality assessment module.

具体实施方式Detailed ways

为了使本技术领域的人员更好地理解本申请中的技术方案,下面将结合本申请实施方式中的附图,对本申请实施方式中的技术方案进行清楚、完整地描述,显然,所描述的实施方式仅仅是本申请一部分实施方式,而不是全部的实施方式。基于本申请中的实施方式,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施方式,都应当属于本申请保护的范围。In order to enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of this application.

根据本发明的实施例,提供了一种基于质量判定标准的在线膜厚检测方法及系统。According to an embodiment of the present invention, an online film thickness detection method and system based on a quality judgment standard are provided.

现结合附图和具体实施方式对本发明进一步说明,如图1所示,根据本发明的一个实施例,提供了一种基于质量判定标准的在线膜厚检测方法,该基于质量判定标准的在线膜厚检测方法包括以下步骤:The present invention is further described in conjunction with the accompanying drawings and specific embodiments. As shown in FIG1 , according to one embodiment of the present invention, an online film thickness detection method based on a quality judgment standard is provided. The online film thickness detection method based on a quality judgment standard comprises the following steps:

S1、基于预先设定的薄膜生产标准,设定薄膜生产的质量判定标准;S1. Based on the pre-set film production standards, set the quality judgment standards for film production;

需要说明的是,预先设定的质量判定标准包括标准膜厚和误差范围;标准膜厚是薄膜生产的核心指标,它代表了薄膜的理想厚度,通常基于产品的使用要求、性能需求以及生产工艺等因素确定;误差范围则是衡量薄膜厚度波动范围的指标,它代表了实际膜厚与标准膜厚之间的允许偏差。误差范围的设定需要考虑生产工艺的稳定性、设备精度以及原材料质量等因素,以确保在实际生产过程中,薄膜厚度的波动能够控制在可接受的范围内。It should be noted that the pre-set quality judgment standards include standard film thickness and error range; standard film thickness is the core indicator of film production, which represents the ideal thickness of the film and is usually determined based on product usage requirements, performance requirements, and production processes; the error range is an indicator to measure the fluctuation range of film thickness, which represents the allowable deviation between the actual film thickness and the standard film thickness. The setting of the error range needs to take into account factors such as the stability of the production process, equipment accuracy, and raw material quality to ensure that the fluctuation of film thickness can be controlled within an acceptable range during the actual production process.

S2、利用激光扫描仪分别对待检测薄膜的上下表面进行三维点云扫描,分别得到上点云数据和下点云数据;S2, using a laser scanner to perform three-dimensional point cloud scanning on the upper and lower surfaces of the film to be inspected, respectively, to obtain upper point cloud data and lower point cloud data;

需要说明的是,对待检测薄膜的上下表面进行三维点云扫描采用两组激光扫描仪进行是扫描,且在利用激光扫描仪扫描前,需要确定两组激光扫描仪之间的位置关系。It should be noted that the three-dimensional point cloud scanning of the upper and lower surfaces of the film to be inspected is performed using two sets of laser scanners, and before scanning with the laser scanners, the positional relationship between the two sets of laser scanners needs to be determined.

S3、对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据;S3, extracting surface contours of the obtained upper point cloud data and lower point cloud data respectively to obtain upper surface contour data and lower surface contour data;

作为优选实施方式,对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据包括以下步骤:As a preferred embodiment, surface contour extraction is performed on the obtained upper point cloud data and lower point cloud data respectively, and obtaining the upper surface contour data and the lower surface contour data includes the following steps:

S31、分别对上点云数据和下点云数据进行预处理,预处理包括滤波和平滑处理;S31, preprocessing the upper point cloud data and the lower point cloud data respectively, wherein the preprocessing includes filtering and smoothing;

需要说明的是,滤波处理主要用于去除点云数据中的噪声点;这些噪声点可能来源于扫描过程中的误差、环境干扰或是设备的不稳定性;滤波处理可以通过统计方法、基于距离的方法或是基于模型的方法来实现。It should be noted that filtering is mainly used to remove noise points in point cloud data; these noise points may come from errors in the scanning process, environmental interference or equipment instability; filtering can be achieved through statistical methods, distance-based methods or model-based methods.

平滑处理则主要关注于点云数据的整体形状和连续性;由于扫描设备的精度限制或是被测物体表面的微观不平整,原始点云数据可能存在一些波动或突变;平滑处理可以通过对相邻点进行加权平均、拟合曲面或是其他数学方法,使得点云数据更加平滑,更接近真实形状。Smoothing processing focuses on the overall shape and continuity of the point cloud data. Due to the accuracy limitations of the scanning equipment or the microscopic unevenness of the surface of the object being measured, the original point cloud data may have some fluctuations or mutations. Smoothing processing can make the point cloud data smoother and closer to the actual shape by weighted averaging of adjacent points, fitting surfaces or other mathematical methods.

S32、分别对预处理后的上点云数据和下点云数据中的每个数据点进行曲率值计算;S32, respectively calculating the curvature value of each data point in the preprocessed upper point cloud data and the lower point cloud data;

作为优选实施方式,分别对预处理后的上点云数据和下点云数据中的每个数据点进行曲率值计算包括以下步骤:As a preferred implementation, respectively calculating the curvature value of each data point in the preprocessed upper point cloud data and the lower point cloud data includes the following steps:

S321、对于预处理后的上点云数据和下点云数据中的每个数据点,计算该数据点到其他所有点的欧式距离,并选取M个距离该数据点最近的邻域点;S321, for each data point in the preprocessed upper point cloud data and the lower point cloud data, calculate the Euclidean distance from the data point to all other points, and select M neighboring points closest to the data point;

需要说明的是,从预处理后的上点云数据或下点云数据中选择一个目标数据点,对于选定的数据点,计算它到点云中其他所有点的欧式距离,根据计算出的距离,通过排序距离并选择最小的M个距离。It should be noted that a target data point is selected from the preprocessed upper point cloud data or lower point cloud data. For the selected data point, the Euclidean distance from it to all other points in the point cloud is calculated. According to the calculated distance, the distances are sorted and the smallest M distances are selected.

S322、对于每个数据点及其选取的M个邻域点,通过计算邻域点的协方差矩阵得到该数据点的法向量;S322, for each data point and its selected M neighboring points, obtain the normal vector of the data point by calculating the covariance matrix of the neighboring points;

需要说明的是,对于每个数据点及其选取的M个邻域点,通过计算邻域点的协方差矩阵得到该数据点的法向量包括以下步骤:It should be noted that, for each data point and its selected M neighboring points, obtaining the normal vector of the data point by calculating the covariance matrix of the neighboring points includes the following steps:

计算数据点和它的M个邻域点的坐标均值;均值是所有数据点的坐标平均,用于确定局部点云的中心位置;Calculate the coordinate mean of the data point and its M neighboring points; the mean is the average of the coordinates of all data points and is used to determine the center position of the local point cloud;

使用均值和局部邻域点的坐标来构建协方差矩阵;协方差矩阵描述了点云在空间中分布的方向性和扩散程度;The covariance matrix is constructed using the mean and the coordinates of the local neighborhood points; the covariance matrix describes the directionality and diffusion of the point cloud in space;

对协方差矩阵进行特征值分解,找到对应的特征值和特征向量;特征向量表示了数据点集合的主方向,特征值的大小表示该方向的变异程度;Perform eigenvalue decomposition on the covariance matrix to find the corresponding eigenvalues and eigenvectors; the eigenvector represents the main direction of the data point set, and the size of the eigenvalue represents the degree of variation in that direction;

选择与最小特征值对应的特征向量作为该数据点的法向量,法向量通常是与最小特征值对应的特征向量,因为它表示数据点最少扩散的方向,即局部表面的法线方向。The eigenvector corresponding to the minimum eigenvalue is selected as the normal vector of the data point. The normal vector is usually the eigenvector corresponding to the minimum eigenvalue because it represents the direction in which the data point is least diffused, that is, the normal direction of the local surface.

S323、分别计算每个数据点法向量与其邻域点的法向量之间的夹角及计算每个数据点与其邻域点之间的位置向量,并确定每个数据点的位置向量与法向量之间的夹角;S323, respectively calculating the angle between the normal vector of each data point and the normal vector of its neighboring points and calculating the position vector between each data point and its neighboring points, and determining the angle between the position vector and the normal vector of each data point;

需要说明的是,对于每个数据点及其邻域点,使用点积和模长来计算法向量之间的夹角;位置向量表示数据点坐标与邻域点坐标之间的差。It should be noted that for each data point and its neighborhood point, the angle between the normal vectors is calculated using the dot product and the modulus; the position vector represents the difference between the coordinates of the data point and the coordinates of the neighborhood point.

S324、对于每个数据点,通过法曲率计算公式计算每个数据点相对于其每个邻域点的法曲率;S324, for each data point, calculating the normal curvature of each data point relative to each of its neighboring points using a normal curvature calculation formula;

其中,法曲率计算公式为:The calculation formula of normal curvature is:

式中,G表示数据点A相对于其邻域点B的法曲率;Where G represents the normal curvature of data point A relative to its neighborhood point B;

β表示数据点A的法向量与邻域点B的法向量之间的夹角;β represents the angle between the normal vector of data point A and the normal vector of neighboring point B;

α表示数据点A相对于其邻域点B的位置向量与数据点A的法向量之间的夹角;α represents the angle between the position vector of data point A relative to its neighborhood point B and the normal vector of data point A;

S325、基于欧拉公式,确定法曲率和主曲率之间的函数关系,并通过最小二乘法优化方法求解每个数据点第一主曲率和第二主曲率;S325, based on the Euler formula, determine the functional relationship between the normal curvature and the principal curvature, and solve the first principal curvature and the second principal curvature of each data point by the least squares optimization method;

具体而言,欧拉公式是描述任何点在曲面上的法曲率与其在该点的两个主曲率(第一主曲率k1和第二主曲率k2)之间关系的基本公式,具体为:Specifically, the Euler formula is a basic formula that describes the relationship between the normal curvature of any point on a surface and its two principal curvatures (the first principal curvature k1 and the second principal curvature k2) at that point, specifically:

G=k1cos2(θ)+k2sin2(θ);G=k1cos 2 (θ)+k2sin 2 (θ);

式中,G表示数据点A相对于其邻域点B的法曲率,k1表示第一主曲率,k2表示第二主曲率,θ表示数据点A过邻域点B的法截线的切线与主方向的夹角;In the formula, G represents the normal curvature of data point A relative to its neighborhood point B, k1 represents the first principal curvature, k2 represents the second principal curvature, and θ represents the angle between the tangent line of the normal section of data point A through neighborhood point B and the main direction;

将欧拉公式置于最小二乘法框架中,目标是最小化预测的法曲率和实际计算的法曲率之间的误差;并生成的最小二乘问题形式如下:Putting the Euler formula into the least squares framework, the goal is to minimize the error between the predicted normal curvature and the actual calculated normal curvature; and the generated least squares problem is as follows:

求解此最小二乘问题形式即可获得第一主曲率k1和第二主曲率k2。By solving this least squares problem form, the first principal curvature k1 and the second principal curvature k2 can be obtained.

S326、将每个数据点第一主曲率和第二主曲率相乘,得到每个数据点的曲率值。S326. Multiply the first principal curvature and the second principal curvature of each data point to obtain the curvature value of each data point.

S33、根据每个数据点的曲率值,分别确定预处理后的上点云数据和下点云数据的离散程度,并设定曲率阈值;S33, according to the curvature value of each data point, respectively determine the discrete degree of the preprocessed upper point cloud data and the lower point cloud data, and set the curvature threshold;

作为优选实施方式,根据每个数据点的曲率值,分别确定预处理后的上点云数据和下点云数据的离散程度,并设定曲率阈值包括以下步骤:As a preferred implementation, according to the curvature value of each data point, respectively determining the discrete degree of the preprocessed upper point cloud data and the lower point cloud data, and setting the curvature threshold comprises the following steps:

S331、根据预处理后的上点云数据和下点云数据中每个数据点的曲率值,分别计算每个数据点的离散值;S331, calculating the discrete value of each data point according to the curvature value of each data point in the preprocessed upper point cloud data and the lower point cloud data;

具体的,计算每个数据点的离散值的计算公式为:Specifically, the calculation formula for calculating the discrete value of each data point is:

式中,Fi表示数据点i的离散值;Where, Fi represents the discrete value of data point i;

Ki表示数据点i的曲率值; Ki represents the curvature value of data point i;

max(Ks)表示所有数据点中曲率的最大值和最小值。max(K s ) represents the maximum and minimum values of the curvature among all data points.

S332、分别对预处理后的上点云数据和下点云数据中所有数据点的离散值进行求和,并对求和值进行求平方处理,分别得到上点云数据和下点云数据的第一离散度;S332, respectively summing the discrete values of all data points in the preprocessed upper point cloud data and the lower point cloud data, and squaring the summed values to obtain first discreteness of the upper point cloud data and the lower point cloud data;

S333、分别对预处理后的上点云数据和下点云数据中所有数据点的离散值进行离散平均值计算,并对离散平均值求平方处理,分别得到上点云数据和下点云数据的第二离散度;S333, respectively calculating the discrete average values of all data points in the preprocessed upper point cloud data and the lower point cloud data, and squaring the discrete average values to obtain the second discreteness of the upper point cloud data and the lower point cloud data;

S334、分别对预处理后的上点云数据和下点云数据的第一离散度和第二离散度进行比较,若第一离散度小于第二离散度,则分别选取预处理后的上点云数据和下点云数据中数据点的最小曲率值作为曲率阈值,否则,分别选取预处理后的上点云数据和下点云数据中所有数据点的平均值作为曲率阈值。S334. Compare the first discreteness and the second discreteness of the preprocessed upper point cloud data and the lower point cloud data respectively. If the first discreteness is smaller than the second discreteness, select the minimum curvature value of the data points in the preprocessed upper point cloud data and the lower point cloud data respectively as the curvature threshold; otherwise, select the average value of all data points in the preprocessed upper point cloud data and the lower point cloud data respectively as the curvature threshold.

S34、根据设定的曲率阈值,分别从预处理后的上点云数据和下点云数据中提取薄膜边界线;S34, extracting the film boundary line from the preprocessed upper point cloud data and the lower point cloud data respectively according to the set curvature threshold;

作为优选实施方式,根据设定的曲率阈值,分别从预处理后的上点云数据和下点云数据中提取薄膜边界线包括以下步骤:As a preferred embodiment, according to the set curvature threshold, extracting the film boundary line from the preprocessed upper point cloud data and the lower point cloud data respectively includes the following steps:

S341、遍历预处理后的上点云数据和下点云数据中的每个数据点,对于每个数据点,检查其曲率值是否超过设定的曲率阈值;S341, traversing each data point in the preprocessed upper point cloud data and the lower point cloud data, and for each data point, checking whether its curvature value exceeds a set curvature threshold;

S342、将预处理后的上点云数据和下点云数据中曲率值超过阈值的数据点作为边界点;S342, taking data points whose curvature values exceed a threshold in the preprocessed upper point cloud data and lower point cloud data as boundary points;

S343、利用最小距离法将相邻的边界点连接起来,得到连续的边界线,并其作为薄膜的边界线。S343. Use the minimum distance method to connect adjacent boundary points to obtain a continuous boundary line, and use it as the boundary line of the film.

具体的,利用最小距离法将相邻的边界点连接起来,得到连续的边界线,并其作为薄膜的边界线包括以下步骤:Specifically, the method of connecting adjacent boundary points using the minimum distance method to obtain a continuous boundary line, and using the continuous boundary line as the boundary line of the film includes the following steps:

识别出所有曲率值超过设定阈值的边界点,并为每对边界点计算欧几里得距离;Identify all boundary points whose curvature values exceed a set threshold and calculate the Euclidean distance for each pair of boundary points;

对于每个边界点,找出距离它最近的另一个边界点,创建一个连接这两个点的线段;For each boundary point, find the other boundary point that is closest to it and create a line segment connecting the two points;

将这些最短的线段逐一连接,形成一条完整的连续边界线。Connect these shortest line segments one by one to form a complete continuous boundary line.

S35、根据预处理后的上点云数据和下点云数据的薄膜边界线,确定上表面轮廓数据和下表面轮廓数据。S35 , determining upper surface contour data and lower surface contour data according to the film boundary lines of the preprocessed upper point cloud data and lower point cloud data.

需要说明的是,根据预处理后的上点云数据和下点云数据的薄膜边界线,将薄膜边界线内的数据作为表面轮廓数据,分别得到上表面轮廓数据和下表面轮廓数据。It should be noted that, according to the film boundary line of the preprocessed upper point cloud data and lower point cloud data, the data within the film boundary line is used as surface contour data to obtain upper surface contour data and lower surface contour data respectively.

S4、根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估。S4. Calculate the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and evaluate the film based on the quality judgment standard.

作为优选实施方式,根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估包括以下步骤:As a preferred embodiment, according to the upper surface profile data and the lower surface profile data, respectively calculating the thickness of the film at different positions, and evaluating the film based on the quality judgment standard includes the following steps:

S41、分别将上表面轮廓数据和下表面轮廓数据在预设的坐标系中进行点云数据对齐;S41, aligning the upper surface contour data and the lower surface contour data in a preset coordinate system respectively;

作为优选实施方式,分别将上表面轮廓数据和下表面轮廓数据在预设的坐标系中进行点云数据对齐包括以下步骤:As a preferred implementation, aligning the upper surface contour data and the lower surface contour data in a preset coordinate system for point cloud data includes the following steps:

S411、获取采集上表面轮廓数据和下表面轮廓数据的两组激光扫描仪之间的相对位置关系;S411, obtaining the relative position relationship between two groups of laser scanners that collect upper surface profile data and lower surface profile data;

需要说明的是,首先记录每台扫描仪在实验或工作环境中的确切坐标位置,包括它们相对于一个已知参考点的X、Y、Z坐标;测量扫描仪之间的距离和角度。It should be noted that the exact coordinate position of each scanner in the experiment or working environment should be recorded first, including their X, Y, and Z coordinates relative to a known reference point; the distance and angle between the scanners should be measured.

S412、分别将上表面轮廓数据和下表面轮廓数据转换到预设的坐标系中;S412, converting the upper surface contour data and the lower surface contour data into a preset coordinate system respectively;

具体的,首先识别上表面和下表面轮廓数据当前所在的坐标系;Specifically, first identify the coordinate system where the upper surface and lower surface contour data are currently located;

确定在X、Y和Z方向上从原始坐标系到目标坐标系所需的平移距离。Determine the translation distance required in the X, Y, and Z directions from the origin coordinate system to the destination coordinate system.

确定轮廓数据从原始坐标系旋转到目标坐标系所需的角度;包括围绕X、Y和Z轴的旋转;Determine the angles required to rotate the profile data from the original coordinate system to the target coordinate system; including rotations around the X, Y, and Z axes;

使用平移向量、旋转矩阵和缩放矩阵构建齐次坐标变换矩阵;Construct a homogeneous coordinate transformation matrix using the translation vector, rotation matrix, and scaling matrix;

对每个点的坐标(x,y,z)应用变换矩阵,转换到目标坐标系中。Apply the transformation matrix to each point's coordinates (x, y, z) to transform them into the target coordinate system.

S413、根据两组激光扫描仪之间的相对位置关系,对上表面轮廓数据和下表面轮廓数据进行点云数据对齐。S413, performing point cloud data alignment on the upper surface contour data and the lower surface contour data according to the relative position relationship between the two groups of laser scanners.

具体的,通过将变换矩阵应用到其中一组点云数据上,以便将它与另一组点云数据对齐。Specifically, a transformation matrix is applied to one set of point cloud data so as to align it with the other set of point cloud data.

S42、在数据对齐后,对于上表面轮廓数据的每个数据点,找到对应下表面轮廓数据中最近的数据点,计算两个数据点对之间的垂直距离;S42, after the data are aligned, for each data point of the upper surface contour data, find the nearest data point in the corresponding lower surface contour data, and calculate the vertical distance between the two data point pairs;

需要说明的是,对于上表面轮廓数据中的每个点,使用欧几里得距离来计算当前上表面点与所有下表面点之间的距离;从计算出的距离中找出最小值,这对应的下表面点就是离当前上表面点最近的点,并确定两个数据点对之间的垂直距离。It should be noted that for each point in the upper surface contour data, the Euclidean distance is used to calculate the distance between the current upper surface point and all lower surface points; the minimum value is found from the calculated distances, and the corresponding lower surface point is the point closest to the current upper surface point, and the vertical distance between the two data point pairs is determined.

S43、分别将每个数据点对的垂直距离与标准膜厚进行比较,并基于比较结果评估薄膜的质量。S43, respectively comparing the vertical distance of each data point pair with the standard film thickness, and evaluating the quality of the film based on the comparison result.

作为优选实施方式,分别将每个数据点对的垂直距离与标准膜厚进行比较,并基于比较结果评估薄膜的质量包括以下步骤:As a preferred embodiment, respectively comparing the vertical distance of each data point pair with the standard film thickness, and evaluating the quality of the film based on the comparison result comprises the following steps:

S431、分别计算每个数据点对的垂直距离与标准膜厚之间的差值;S431, respectively calculating the difference between the vertical distance of each data point pair and the standard film thickness;

S432、将差值与预先设定的误差范围进行比较,若差值大于预先设定的误差范围,则认为该数据点对所在位置的膜厚不符合标准,否则,则认为该数据点对所在位置的膜厚符合标准;S432, comparing the difference with a preset error range, if the difference is greater than the preset error range, it is considered that the film thickness at the location of the data point pair does not meet the standard, otherwise, it is considered that the film thickness at the location of the data point pair meets the standard;

S433、统计所有符合和不符合的数据点对数量,并根据统计结果评估薄膜的整体质量。S433, counting the number of all pairs of data points that meet and do not meet the requirements, and evaluating the overall quality of the film based on the statistical results.

举例而言,分别将每个数据点对的垂直距离与标准膜厚进行比较,并基于比较结果评估薄膜的质量具体实施步骤为:For example, the vertical distance of each data point pair is compared with the standard film thickness, and the quality of the film is evaluated based on the comparison results. The specific implementation steps are:

假设有以下数据:标准膜厚为5微米,预先设定的误差范围为±1微米;Assume the following data: the standard film thickness is 5 microns, and the pre-set error range is ±1 micron;

上表面点A与下表面点A'的垂直距离为5.2微米;The vertical distance between the upper surface point A and the lower surface point A' is 5.2 microns;

上表面点B与下表面点B'的垂直距离为4.8微米;The vertical distance between the upper surface point B and the lower surface point B' is 4.8 microns;

上表面点C与下表面点C'的垂直距离为6.3微米;The vertical distance between the upper surface point C and the lower surface point C' is 6.3 microns;

对于数据点对A和A':差值=5.2微米-5微米=0.2微米;For data point pair A and A': difference = 5.2 microns - 5 microns = 0.2 microns;

由于差值0.2微米在±1微米的误差范围内,所以数据点对A和A'所在位置的膜厚符合标准。Since the difference of 0.2 microns is within the error range of ±1 micron, the film thickness at the positions of data point pair A and A' meets the standard.

对于数据点对B和B':差值=4.8微米-5微米=-0.2微米;For data point pair B and B': difference = 4.8 microns - 5 microns = -0.2 microns;

同样,差值-0.2微米也在±1微米的误差范围内,因此数据点对B和B'所在位置的膜厚也符合标准。Likewise, the difference of -0.2 microns is also within the error range of ±1 micron, so the film thickness at the locations of data point pair B and B' also meets the standard.

对于数据点对C和C':差值=6.3微米-5微米=1.3微米;For data point pair C and C': difference = 6.3 microns - 5 microns = 1.3 microns;

由于差值1.3微米超出了±1微米的误差范围,因此数据点对C和C'所在位置的膜厚不符合标准。Since the difference of 1.3 microns exceeds the error range of ±1 micron, the film thickness at the data point pair C and C' does not meet the standard.

此外,假设有100个数据点对,其中95个符合标准,5个不符合标准;Furthermore, suppose there are 100 data point pairs, 95 of which meet the criteria and 5 do not;

根据统计结果,可以评估薄膜的整体质量,在这个例子中,由于绝大多数数据点对(95%)的膜厚都符合标准,则可以认为薄膜的整体质量是良好的,尽管有少数位置(5%)的膜厚超出了误差范围。Based on the statistical results, the overall quality of the film can be evaluated. In this example, since the film thickness of the vast majority of data point pairs (95%) meets the standard, it can be considered that the overall quality of the film is good, although the film thickness of a few locations (5%) is beyond the error range.

如图2所示,根据本发明的另一个实施例,提供了一种基于质量判定标准的在线膜厚检测系统,该基于质量判定标准的在线膜厚检测系统包括:标准设定模块1、数据获取模块2、轮廓提取模块3及质量评估模块4,且标准设定模块1、数据获取模块2、轮廓提取模块3及质量评估模块4之间依次连接;As shown in FIG2 , according to another embodiment of the present invention, an online film thickness detection system based on a quality judgment standard is provided, and the online film thickness detection system based on a quality judgment standard comprises: a standard setting module 1, a data acquisition module 2, a contour extraction module 3 and a quality assessment module 4, and the standard setting module 1, the data acquisition module 2, the contour extraction module 3 and the quality assessment module 4 are connected in sequence;

标准设定模块1,用于基于预先设定的薄膜生产标准,设定薄膜生产的质量判定标准;A standard setting module 1, used for setting a quality judgment standard for film production based on a pre-set film production standard;

数据获取模块2,用于利用激光扫描仪分别对待检测薄膜的上下表面进行三维点云扫描,分别得到上点云数据和下点云数据;The data acquisition module 2 is used to use a laser scanner to perform three-dimensional point cloud scanning on the upper and lower surfaces of the film to be inspected, respectively, to obtain upper point cloud data and lower point cloud data;

轮廓提取模块3,用于对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据;The contour extraction module 3 is used to extract the surface contours of the obtained upper point cloud data and the lower point cloud data respectively, so as to obtain the upper surface contour data and the lower surface contour data;

质量评估模块4,用于根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估。The quality assessment module 4 is used to calculate the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and to assess the film based on the quality judgment standard.

图3示出了本发明的一种计算机设备的一个实施例。该计算机设备可以是服务器,该计算机设备包括通过系统总线连接的处理器、存储器和网络接口。其中,该计算机设备的处理器用于提供计算和控制能力。该计算机设备的存储器包括非易失性存储介质、内存储器。该非易失性存储介质存储有操作系统、计算机程序和数据库。该内存储器为非易失性存储介质中的操作系统和计算机程序的运行提供环境。该计算机设备的数据库用于存储静态信息和动态信息数据。该计算机设备的网络接口用于与外部的终端通过网络连接通信。该计算机程序被处理器执行时以实现上述方法实施例中的步骤。FIG3 shows an embodiment of a computer device of the present invention. The computer device may be a server, and the computer device includes a processor, a memory, and a network interface connected via a system bus. The processor of the computer device is used to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system, a computer program, and a database. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The database of the computer device is used to store static information and dynamic information data. The network interface of the computer device is used to communicate with an external terminal via a network connection. When the computer program is executed by the processor, the steps in the above method embodiment are implemented.

本领域技术人员可以理解,图3中示出的结构,仅仅是与本发明方案相关的部分结构的框图,并不构成对本发明方案所应用于其上的计算机设备的限定,具体的计算机设备可以包括比图中所示更多或更少的部件,或者组合某些部件,或者具有不同的部件布置。Those skilled in the art will understand that the structure shown in FIG. 3 is merely a block diagram of a partial structure related to the solution of the present invention, and does not constitute a limitation on the computer device to which the solution of the present invention is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine certain components, or have a different arrangement of components.

此外,本发明还提供了一种计算机设备,包括存储器和处理器,存储器中存储有计算机程序,该处理器执行计算机程序时实现上述方法实施例中的步骤。In addition, the present invention also provides a computer device, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above method embodiment when executing the computer program.

另外,本发明还提供了一种计算机可读存储介质,其上存储有计算机程序,该计算机程序被处理器执行时实现上述方法实施例中的步骤。综上所述,借助于本发明的上述技术方案,本发明通过在线检测的方式,能够在薄膜生产过程中即时获取其厚度信息,无需等待生产完成后再进行离线检测,大大提高了生产效率,并使得生产过程中的质量控制更为及时和精准,使用激光扫描仪进行三维点云扫描,无需与薄膜直接接触,从而避免了可能的物理损伤或污染,通过对点云数据进行表面轮廓提取和厚度计算,该方法能够实现自动化和智能化的检测过程;结合预设的质量判定标准,可以对薄膜进行自动评估,减少人为因素的干扰,提高检测结果的客观性和准确性;本发明通过预处理步骤中的滤波和平滑处理能够去除点云数据中的噪声和异常值,提高数据的质量,通过计算每个数据点的曲率值,并根据曲率阈值提取薄膜边界线,能够精确地识别出薄膜的表面轮廓,能够有效地区分薄膜与周围环境的边界,避免误判或遗漏,根据点云数据的离散程度来设定曲率阈值,使得阈值的设定更加合理和自适应,通过比较第一离散度和第二离散度,可以选择更合适的阈值,从而更准确地提取薄膜边界线;本发明通过上表面轮廓数据和下表面轮廓数据在预设的坐标系中进行点云数据对齐,能够确保对应的数据点准确匹配,进而得到准确的垂直距离,即薄膜的厚度,通过比较每个数据点对的垂直距离与标准膜厚,并基于比较结果评估薄膜的质量,可以对薄膜在不同位置的膜厚进行全面而细致的检查,有助于提高膜厚检测的准确性和效率,为薄膜生产的质量控制提供有力保障。In addition, the present invention also provides a computer-readable storage medium having a computer program stored thereon, which implements the steps in the above method embodiment when executed by a processor. In summary, with the aid of the above technical solution of the present invention, the present invention can obtain the thickness information of the film in real time during the film production process through online detection, without waiting for offline detection after the production is completed, which greatly improves the production efficiency and makes the quality control in the production process more timely and accurate. The laser scanner is used for three-dimensional point cloud scanning without direct contact with the film, thereby avoiding possible physical damage or contamination. By extracting the surface contour and calculating the thickness of the point cloud data, the method can realize an automated and intelligent detection process; combined with the preset quality judgment standard, the film can be automatically evaluated, reducing the interference of human factors and improving the objectivity and accuracy of the detection results; the present invention can remove noise and outliers in the point cloud data through filtering and smoothing in the preprocessing step, thereby improving the quality of the data, and by calculating the curvature value of each data point and calculating the curvature value according to the curve The curvature threshold is used to extract the boundary line of the film, which can accurately identify the surface contour of the film, effectively distinguish the boundary between the film and the surrounding environment, avoid misjudgment or omission, and set the curvature threshold according to the discrete degree of the point cloud data, so that the setting of the threshold is more reasonable and adaptive. By comparing the first discrete degree and the second discrete degree, a more appropriate threshold can be selected to more accurately extract the boundary line of the film; the present invention aligns the point cloud data of the upper surface contour data and the lower surface contour data in a preset coordinate system, which can ensure that the corresponding data points are accurately matched, and then obtain the accurate vertical distance, that is, the thickness of the film; by comparing the vertical distance of each data point pair with the standard film thickness, and evaluating the quality of the film based on the comparison result, the film thickness of the film at different positions can be comprehensively and carefully inspected, which is helpful to improve the accuracy and efficiency of film thickness detection and provide a strong guarantee for the quality control of film production.

本领域内的技术人员应明白,本发明的实施例可提供为方法、系统或计算机程序产品。因此,本发明可采用完全硬件实施例、完全软件实施例或结合软件和硬件方面的实施例的形式。而且,本发明可采用在一个或多个其中包含有计算机可用程序代码的计算机可用存储介质(包括但不限于磁盘存储器、光学存储器等)上实施的计算机程序产品的形式。It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as methods, systems or computer program products. Therefore, the present invention may take the form of a complete hardware embodiment, a complete software embodiment or an embodiment combining software and hardware. Moreover, the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, optical storage, etc.) containing computer-usable program code.

以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限定本发明的保护范围,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims (10)

1.一种基于质量判定标准的在线膜厚检测方法,其特征在于,该基于质量判定标准的在线膜厚检测方法包括以下步骤:1. An online film thickness detection method based on a quality judgment standard, characterized in that the online film thickness detection method based on a quality judgment standard comprises the following steps: S1、基于预先设定的薄膜生产标准,设定薄膜生产的质量判定标准;S1. Based on the pre-set film production standards, set the quality judgment standards for film production; S2、利用激光扫描仪分别对待检测薄膜的上下表面进行三维点云扫描,分别得到上点云数据和下点云数据;S2, using a laser scanner to perform three-dimensional point cloud scanning on the upper and lower surfaces of the film to be inspected, respectively, to obtain upper point cloud data and lower point cloud data; S3、对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据;S3, extracting surface contours of the obtained upper point cloud data and lower point cloud data respectively to obtain upper surface contour data and lower surface contour data; S4、根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估。S4. Calculate the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and evaluate the film based on the quality judgment standard. 2.根据权利要求1所述的一种基于质量判定标准的在线膜厚检测方法,其特征在于,所述对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据包括以下步骤:2. According to the online film thickness detection method based on the quality judgment standard of claim 1, it is characterized in that the surface contour extraction is performed on the obtained upper point cloud data and the lower point cloud data respectively to obtain the upper surface contour data and the lower surface contour data, which comprises the following steps: S31、分别对上点云数据和下点云数据进行预处理,所述预处理包括滤波和平滑处理;S31, preprocessing the upper point cloud data and the lower point cloud data respectively, wherein the preprocessing includes filtering and smoothing; S32、分别对预处理后的上点云数据和下点云数据中的每个数据点进行曲率值计算;S32, respectively calculating the curvature value of each data point in the preprocessed upper point cloud data and the lower point cloud data; S33、根据每个数据点的曲率值,分别确定预处理后的上点云数据和下点云数据的离散程度,并设定曲率阈值;S33, according to the curvature value of each data point, respectively determine the discrete degree of the preprocessed upper point cloud data and the lower point cloud data, and set the curvature threshold; S34、根据设定的曲率阈值,分别从预处理后的上点云数据和下点云数据中提取薄膜边界线;S34, extracting the film boundary line from the preprocessed upper point cloud data and the lower point cloud data respectively according to the set curvature threshold; S35、根据预处理后的上点云数据和下点云数据的薄膜边界线,确定上表面轮廓数据和下表面轮廓数据。S35 , determining upper surface contour data and lower surface contour data according to the film boundary lines of the preprocessed upper point cloud data and lower point cloud data. 3.根据权利要求2所述的一种基于质量判定标准的在线膜厚检测方法,其特征在于,所述分别对预处理后的上点云数据和下点云数据中的每个数据点进行曲率值计算包括以下步骤:3. The online film thickness detection method based on the quality judgment standard according to claim 2 is characterized in that the curvature value calculation of each data point in the pre-processed upper point cloud data and the lower point cloud data comprises the following steps: S321、对于预处理后的上点云数据和下点云数据中的每个数据点,计算该数据点到其他所有点的欧式距离,并选取M个距离该数据点最近的邻域点;S321, for each data point in the preprocessed upper point cloud data and the lower point cloud data, calculate the Euclidean distance from the data point to all other points, and select M neighboring points closest to the data point; S322、对于每个数据点及其选取的M个邻域点,通过计算邻域点的协方差矩阵得到该数据点的法向量;S322, for each data point and its selected M neighboring points, obtain the normal vector of the data point by calculating the covariance matrix of the neighboring points; S323、分别计算每个数据点法向量与其邻域点的法向量之间的夹角及计算每个数据点与其邻域点之间的位置向量,并确定每个数据点的位置向量与法向量之间的夹角;S323, respectively calculating the angle between the normal vector of each data point and the normal vector of its neighboring points and calculating the position vector between each data point and its neighboring points, and determining the angle between the position vector and the normal vector of each data point; S324、对于每个数据点,通过法曲率计算公式计算每个数据点相对于其每个邻域点的法曲率;S324, for each data point, calculating the normal curvature of each data point relative to each of its neighboring points using a normal curvature calculation formula; S325、基于欧拉公式,确定法曲率和主曲率之间的函数关系,并通过最小二乘法优化方法求解每个数据点第一主曲率和第二主曲率;S325, based on the Euler formula, determine the functional relationship between the normal curvature and the principal curvature, and solve the first principal curvature and the second principal curvature of each data point by the least squares optimization method; S326、将每个数据点第一主曲率和第二主曲率相乘,得到每个数据点的曲率值。S326. Multiply the first principal curvature and the second principal curvature of each data point to obtain the curvature value of each data point. 4.根据权利要求2所述的一种基于质量判定标准的在线膜厚检测方法,其特征在于,所述根据每个数据点的曲率值,分别确定预处理后的上点云数据和下点云数据的离散程度,并设定曲率阈值包括以下步骤:4. The online film thickness detection method based on the quality judgment standard according to claim 2 is characterized in that the step of determining the discrete degree of the pre-processed upper point cloud data and the lower point cloud data according to the curvature value of each data point and setting the curvature threshold comprises the following steps: S331、根据预处理后的上点云数据和下点云数据中每个数据点的曲率值,分别计算每个数据点的离散值;S331, calculating the discrete value of each data point according to the curvature value of each data point in the preprocessed upper point cloud data and the lower point cloud data; S332、分别对预处理后的上点云数据和下点云数据中所有数据点的离散值进行求和,并对求和值进行求平方处理,分别得到上点云数据和下点云数据的第一离散度;S332, respectively summing the discrete values of all data points in the preprocessed upper point cloud data and the lower point cloud data, and squaring the summed values to obtain first discreteness of the upper point cloud data and the lower point cloud data; S333、分别对预处理后的上点云数据和下点云数据中所有数据点的离散值进行离散平均值计算,并对离散平均值求平方处理,分别得到上点云数据和下点云数据的第二离散度;S333, respectively calculating the discrete average values of all data points in the preprocessed upper point cloud data and the lower point cloud data, and squaring the discrete average values to obtain the second discreteness of the upper point cloud data and the lower point cloud data; S334、分别对预处理后的上点云数据和下点云数据的第一离散度和第二离散度进行比较,若第一离散度小于第二离散度,则分别选取预处理后的上点云数据和下点云数据中数据点的最小曲率值作为曲率阈值,否则,分别选取预处理后的上点云数据和下点云数据中所有数据点的平均值作为曲率阈值。S334. Compare the first discreteness and the second discreteness of the preprocessed upper point cloud data and the lower point cloud data respectively. If the first discreteness is smaller than the second discreteness, select the minimum curvature value of the data points in the preprocessed upper point cloud data and the lower point cloud data respectively as the curvature threshold; otherwise, select the average value of all data points in the preprocessed upper point cloud data and the lower point cloud data respectively as the curvature threshold. 5.根据权利要求4所述的一种基于质量判定标准的在线膜厚检测方法,其特征在于,所述计算每个数据点的离散值的计算公式为:5. The online film thickness detection method based on the quality judgment standard according to claim 4 is characterized in that the calculation formula for calculating the discrete value of each data point is: 式中,Fi表示数据点i的离散值;Where, Fi represents the discrete value of data point i; Ki表示数据点i的曲率值; Ki represents the curvature value of data point i; max(Ks)表示所有数据点中曲率的最大值和最小值。max(K s ) represents the maximum and minimum values of the curvature among all data points. 6.根据权利要求2所述的一种基于质量判定标准的在线膜厚检测方法,其特征在于,所述根据设定的曲率阈值,分别从预处理后的上点云数据和下点云数据中提取薄膜边界线包括以下步骤:6. The online film thickness detection method based on the quality judgment standard according to claim 2 is characterized in that the step of extracting the film boundary line from the pre-processed upper point cloud data and the lower point cloud data according to the set curvature threshold comprises the following steps: S341、遍历预处理后的上点云数据和下点云数据中的每个数据点,对于每个数据点,检查其曲率值是否超过设定的曲率阈值;S341, traversing each data point in the preprocessed upper point cloud data and the lower point cloud data, and for each data point, checking whether its curvature value exceeds a set curvature threshold; S342、将预处理后的上点云数据和下点云数据中曲率值超过阈值的数据点作为边界点;S342, taking data points whose curvature values exceed a threshold in the preprocessed upper point cloud data and lower point cloud data as boundary points; S343、利用最小距离法将相邻的边界点连接起来,得到连续的边界线,并其作为薄膜的边界线。S343. Use the minimum distance method to connect adjacent boundary points to obtain a continuous boundary line, and use it as the boundary line of the film. 7.根据权利要求1所述的一种基于质量判定标准的在线膜厚检测方法,其特征在于,所述根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估包括以下步骤:7. The online film thickness detection method based on the quality judgment standard according to claim 1 is characterized in that the step of calculating the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and evaluating the film based on the quality judgment standard comprises the following steps: S41、分别将上表面轮廓数据和下表面轮廓数据在预设的坐标系中进行点云数据对齐;S41, aligning the upper surface contour data and the lower surface contour data in a preset coordinate system respectively; S42、在数据对齐后,对于上表面轮廓数据的每个数据点,找到对应下表面轮廓数据中最近的数据点,计算两个数据点对之间的垂直距离;S42, after the data are aligned, for each data point of the upper surface contour data, find the nearest data point in the corresponding lower surface contour data, and calculate the vertical distance between the two data point pairs; S43、分别将每个数据点对的垂直距离与标准膜厚进行比较,并基于比较结果评估薄膜的质量。S43, respectively comparing the vertical distance of each data point pair with the standard film thickness, and evaluating the quality of the film based on the comparison result. 8.根据权利要求7所述的一种基于质量判定标准的在线膜厚检测方法,其特征在于,所述分别将上表面轮廓数据和下表面轮廓数据在预设的坐标系中进行点云数据对齐包括以下步骤:8. The online film thickness detection method based on the quality judgment standard according to claim 7 is characterized in that the step of aligning the upper surface profile data and the lower surface profile data in a preset coordinate system comprises the following steps: S411、获取采集上表面轮廓数据和下表面轮廓数据的两组激光扫描仪之间的相对位置关系;S411, obtaining the relative position relationship between two groups of laser scanners that collect upper surface profile data and lower surface profile data; S412、分别将上表面轮廓数据和下表面轮廓数据转换到预设的坐标系中;S412, converting the upper surface contour data and the lower surface contour data into a preset coordinate system respectively; S413、根据两组激光扫描仪之间的相对位置关系,对上表面轮廓数据和下表面轮廓数据进行点云数据对齐。S413, performing point cloud data alignment on the upper surface contour data and the lower surface contour data according to the relative position relationship between the two groups of laser scanners. 9.根据权利要求7所述的一种基于质量判定标准的在线膜厚检测方法,其特征在于,所述分别将每个数据点对的垂直距离与标准膜厚进行比较,并基于比较结果评估薄膜的质量包括以下步骤:9. The method for online film thickness detection based on quality judgment criteria according to claim 7, characterized in that the step of comparing the vertical distance of each data point pair with the standard film thickness and evaluating the quality of the film based on the comparison result comprises the following steps: S431、分别计算每个数据点对的垂直距离与标准膜厚之间的差值;S431, respectively calculating the difference between the vertical distance of each data point pair and the standard film thickness; S432、将差值与预先设定的误差范围进行比较,若差值大于预先设定的误差范围,则认为该数据点对所在位置的膜厚不符合标准,否则,则认为该数据点对所在位置的膜厚符合标准;S432, comparing the difference with a preset error range, if the difference is greater than the preset error range, it is considered that the film thickness at the location of the data point pair does not meet the standard, otherwise, it is considered that the film thickness at the location of the data point pair meets the standard; S433、统计所有符合和不符合的数据点对数量,并根据统计结果评估薄膜的整体质量。S433, counting the number of all pairs of data points that meet and do not meet the requirements, and evaluating the overall quality of the film based on the statistical results. 10.一种基于质量判定标准的在线膜厚检测系统,用于实现权利要求1-9中任一项所述的基于质量判定标准的在线膜厚检测方法,其特征在于,该基于质量判定标准的在线膜厚检测系统包括:标准设定模块、数据获取模块、轮廓提取模块及质量评估模块,且所述标准设定模块、所述数据获取模块、所述轮廓提取模块及所述质量评估模块之间依次连接;10. An online film thickness detection system based on a quality judgment standard, used to implement the online film thickness detection method based on a quality judgment standard according to any one of claims 1 to 9, characterized in that the online film thickness detection system based on a quality judgment standard comprises: a standard setting module, a data acquisition module, a contour extraction module and a quality assessment module, and the standard setting module, the data acquisition module, the contour extraction module and the quality assessment module are connected in sequence; 所述标准设定模块,用于基于预先设定的薄膜生产标准,设定薄膜生产的质量判定标准;The standard setting module is used to set the quality judgment standard of film production based on the pre-set film production standard; 所述数据获取模块,用于利用激光扫描仪分别对待检测薄膜的上下表面进行三维点云扫描,分别得到上点云数据和下点云数据;The data acquisition module is used to use a laser scanner to perform three-dimensional point cloud scanning on the upper and lower surfaces of the film to be inspected, respectively, to obtain upper point cloud data and lower point cloud data; 所述轮廓提取模块,用于对得到的上点云数据和下点云数据分别进行表面轮廓提取,得到上表面轮廓数据和下表面轮廓数据;The contour extraction module is used to extract surface contours from the obtained upper point cloud data and lower point cloud data respectively to obtain upper surface contour data and lower surface contour data; 所述质量评估模块,用于根据上表面轮廓数据和下表面轮廓数据,分别计算薄膜在不同位置的厚度,并基于质量判定标准对薄膜进行评估。The quality assessment module is used to calculate the thickness of the film at different positions according to the upper surface profile data and the lower surface profile data, and to assess the film based on the quality judgment standard.
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