CN118408639B - Infrared spectrum temperature measuring device and method - Google Patents
Infrared spectrum temperature measuring device and method Download PDFInfo
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- 238000002329 infrared spectrum Methods 0.000 title claims abstract description 39
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 42
- 238000009529 body temperature measurement Methods 0.000 claims abstract description 34
- 230000005855 radiation Effects 0.000 claims abstract description 16
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000004044 response Effects 0.000 claims description 3
- 230000005457 Black-body radiation Effects 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 6
- 230000007613 environmental effect Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 239000000779 smoke Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
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- 210000001747 pupil Anatomy 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
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Abstract
The application provides an infrared spectrum temperature measuring device and method, the infrared spectrum temperature measuring device comprises a collimating lens group, a digital micro-mirror assembly and a photoelectric conversion assembly. The collimating lens group is arranged on the radiation light path of the heat source, so that the collimating lens group can convert infrared light radiated by the heat source in multiple directions into infrared light which is emitted in parallel. The digital micro-mirror assembly is arranged on an emergent light path of the collimating lens group, different modulation patterns are loaded on the digital micro-mirror assembly to form a plurality of modulation spectrums with different center wavelengths, and the photoelectric conversion assembly is arranged on a reflecting light path of the digital micro-mirror assembly, so that the photoelectric conversion assembly can sequentially collect and process data of the modulation spectrums reflected and output by the digital micro-mirror assembly, and calculate a temperature measurement value of an output heat source. The application can improve the accuracy and reliability of the heat source temperature measurement.
Description
Technical Field
The application relates to the technical field of infrared temperature measurement, in particular to an infrared spectrum temperature measurement device and method.
Background
The infrared temperature measurement principle is a method for measuring the surface temperature of an object by utilizing the relationship between infrared radiation emitted by the object and the surface temperature of the object. The higher the surface temperature of the object, the stronger the emitted infrared radiation and vice versa. The infrared thermometer receives infrared radiation emitted by the object and converts the infrared radiation into a temperature value, so that the measurement of the surface temperature of the object is realized.
The existing high-temperature infrared thermometer generally uses a lens to focus infrared light radiated by a high-temperature object onto an infrared sensor (photoelectric tube), and then converts the voltage signal into a temperature value based on the voltage signal output by the infrared sensor for output and display. However, the existing high-temperature infrared thermometer not only can be influenced by the material (different emissivity) of a high-temperature object and the size of a light emitting surface (whether the light emitting surface of the sensor can be fully filled after focusing) so that a large error exists between the measured temperature and the actual temperature, but also can be influenced by environmental factors such as smoke dust, water vapor and the like, and the accuracy and the reliability of temperature measurement are further reduced.
Therefore, how to provide an infrared spectrum temperature measuring device and method, which can improve the accuracy and reliability of the infrared temperature measuring result when using infrared spectrum to measure the temperature of a high-temperature object, is a technical problem to be solved by the person in the art.
Disclosure of Invention
The present application aims to solve at least one of the technical problems in the related art to some extent.
Therefore, a first object of the present application is to provide an infrared spectrum temperature measuring device and method, which can utilize the infrared light radiated by a heat source to calculate and obtain the temperature measured value of the heat source in the process of detecting the temperature of the heat source, and improve the accuracy and reliability of the infrared temperature measuring result.
In order to achieve the above objective, an embodiment of a first aspect of the present application provides an infrared spectrum temperature measuring device, which includes a collimating lens group, a digital micromirror assembly and a photoelectric conversion assembly; wherein,
The collimating lens group is arranged on a radiation light path of the heat source and is used for converting infrared light radiated outwards by the heat source into infrared light which is emitted in parallel along a first direction; the collimating lens group comprises a first focusing lens and a second focusing lens which are oppositely arranged, and an aperture diaphragm arranged between the first focusing lens and the second focusing lens;
The digital micro-mirror assembly is arranged on an emergent light path of the collimating lens group, can gate and modulate parallel incident infrared light based on loaded different modulation patterns, and converges the parallel incident infrared light to form a modulation spectrum corresponding to a center wavelength, wherein the modulation patterns are an exclusive-or superposition pattern of a two-dimensional grating and a Fresnel zone plate;
The photoelectric conversion component is arranged on a reflection light path of the digital micro-mirror component and is used for receiving the modulation spectrum and calculating and obtaining a temperature measurement value of the heat source based on the modulation spectrum.
Optionally, the first focusing lens is disposed at a side close to the heat source, and a focal position between the second focusing lens and the first focusing lens coincides and is located in the pupil of the aperture stop.
Optionally, the digital micromirror assembly comprises a micromirror array and a modulation input unit, wherein the micromirror array is arranged on an emergent light path of the collimating lens group and comprises a plurality of micromirror units arranged in an array; the modulation input unit is used for outputting a corresponding control signal to each micro mirror unit so as to adjust the deflection direction of each micro mirror unit and form the modulation pattern on the micro mirror array.
Optionally, the modulation patterns are in one-to-one correspondence with the center wavelengths of the modulation spectrum.
Optionally, the parallel incident infrared light is dispersed and focused by the micromirror array to form the modulation spectrum.
Optionally, the photoelectric conversion component comprises a photoelectric sensing unit, an amplifying unit and a fitting unit; wherein,
The photoelectric sensing unit is arranged on the focus of the modulation spectrum convergence, the amplifying unit is connected with the signal output end of the photoelectric sensing unit, and the fitting unit is connected with the signal output end of the amplifying unit;
the photoelectric sensing unit converts the received modulation spectrum into an electric signal and outputs the electric signal to the amplifying unit, the amplifying unit amplifies the received electric signal and outputs the electric signal to the fitting unit, and the fitting unit outputs a temperature measurement value of the heat source based on the received electric signal.
Optionally, the modulation spectrum strip is converged at a preset position far away from the micromirror array, and the photoelectric sensing unit is disposed at the center of the modulation spectrum of the strip.
Optionally, the photoelectric sensing unit includes one of a linear array photoelectric sensor or a single-point photoelectric sensor.
In order to achieve the above object, an embodiment of the second aspect of the present application provides an infrared spectrum temperature measurement method, which includes the following steps:
S1, providing a heat source, and arranging a collimating lens group on one side of the heat source to obtain infrared light which is emitted in parallel along a first direction; the collimating lens group comprises a first focusing lens and a second focusing lens which are oppositely arranged, and an aperture diaphragm arranged between the first focusing lens and the second focusing lens;
S2, sequentially forming a plurality of different modulation patterns on the micro-mirror array by using a modulation input unit, so that the micro-mirror array can sequentially modulate infrared light which is parallel to the first direction and correspondingly form modulation spectrums with different center wavelengths, wherein the modulation patterns are the exclusive or superposition patterns of a two-dimensional grating and a Fresnel zone plate;
s3, collecting and processing different modulation spectrums sequentially through the photoelectric conversion assembly so as to fit and output an infrared spectrum curve and a temperature measured value of the heat source.
Optionally, before step S1, a step of setting up a calibration light path is further included, and a response relationship between the infrared light of the photoelectric conversion assembly at different calibration temperatures and the modulation spectrum formed by the different modulation patterns is obtained.
The infrared spectrum temperature measuring device and method provided by the application at least comprise the following beneficial effects:
the application provides an infrared spectrum temperature measuring device and method, the infrared spectrum temperature measuring device comprises a collimating lens group, a digital micro-mirror assembly and a photoelectric conversion assembly. According to the application, the collimating lens group is arranged on the radiation light path of the heat source, and the infrared light radiated by the heat source along the multiple directions is converted into the infrared light which is emitted in parallel along the fixed direction by the collimating lens group, so that the luminous flux of the infrared light to the digital micro-mirror assembly can be effectively improved, the spectral intensity of the modulation spectrum which is reflected and output is improved when the subsequent digital micro-mirror assembly modulates the incident infrared light, and the accuracy of data acquisition of the modulation spectrum by the photoelectric conversion assembly and the accuracy of the heat source temperature measurement value and the stability of temperature data acquisition which are calculated and output are further improved.
According to the application, the digital micro-mirror assembly is arranged on the emergent light path of the collimating lens group, and different modulation patterns are formed by sequentially loading the digital micro-mirror assembly, so that the digital micro-mirror assembly can correspondingly output a plurality of modulation spectrums with different center wavelengths under the condition of the same incident spectrum condition, and further, the photoelectric conversion assembly can correspondingly obtain different characteristic parameters based on the different modulation spectrums, and the accuracy of calculating the output heat source temperature measurement value is further improved.
According to the application, the infrared light radiated by the heat source is subjected to parallel collimation modulation through the collimation lens group and the central wavelength and light intensity modulation of the digital micromirror assembly, so that the output modulation spectrum can not be influenced by the emissivity of the heat source, the size of the luminous surface and the water vapor of environmental smoke, and the infrared light temperature sensor has the advantages of stability and reliability of temperature data acquisition.
Additional aspects and advantages of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the application.
Drawings
The foregoing and/or additional aspects and advantages of the application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, in which:
Fig. 1 is a schematic structural diagram of an infrared spectrum temperature measuring device according to an embodiment of the present application.
Fig. 2 is a flow chart of an infrared spectrum temperature measurement method according to an embodiment of the application.
100 Heat sources; 200 collimation lens group; 210 a first focusing lens; 220 aperture stop; 230 a second focusing lens; 300 digital micromirror assembly; 310 micromirror array; 320 modulating an input unit; 400 photoelectric conversion components; 410 a photo-sensing unit; 420 an amplifying unit; 430 fitting the cells.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative and intended to explain the present application and should not be construed as limiting the application.
According to an aspect of the present application, there is provided an infrared spectrum temperature measuring device, as shown in fig. 1, which includes a collimator lens group 200, a digital micromirror assembly 300, and a photoelectric conversion assembly 400. The collimating lens group 200 is disposed on a radiation light path of the heat source 100, the digital micromirror assembly 300 is disposed on an outgoing light path of the collimating lens group 200, and the photoelectric conversion assembly 400 is disposed on a reflection light path of the digital micromirror assembly 300.
The present application operates on the principle that, first, the collimator lens assembly 200 is disposed on the radiation path of the heat source 100, so that the collimator lens assembly can receive part of the infrared light radiated from the heat source 100, and convert the infrared light radiated from multiple directions to infrared light that is emitted in parallel along the first direction. Then, the digital micromirror assembly 300 is disposed on the outgoing light path of the collimating lens assembly 200 to receive the parallel incident infrared light, and the parallel incident infrared light is selectively reflected (gated) and converged by using the modulation pattern loaded on the digital micromirror assembly 300 to form a modulation spectrum with a specific center wavelength, and different modulation patterns are sequentially loaded on the digital micromirror assembly 300 to form a plurality of modulation spectrums with different center wavelengths, i.e. the parallel incident infrared light can be modulated for multiple times. Finally, the photoelectric conversion assembly 400 is disposed on the reflection optical path of the digital micro-mirror assembly 300, so that the photoelectric conversion assembly 400 can sequentially collect and process the modulation spectrum reflected and output by the digital micro-mirror assembly 300, and finally obtain the temperature measurement data of the heat source 100.
Therefore, the application converts the infrared light radiated by the heat source 100 along the multi-direction radiation into the infrared light which is emitted in parallel along the fixed direction by utilizing the collimating lens group 200, so that the luminous flux of the infrared light to the digital micro-mirror assembly 300 can be effectively improved, the spectrum intensity of the modulation spectrum which is reflected and output is improved when the subsequent digital micro-mirror assembly 300 modulates the incident infrared light, and further the accuracy of data acquisition of the modulation spectrum by the photoelectric conversion assembly 400 is improved, and the accuracy of the temperature measurement value of the heat source 100 which is calculated and output and the stability of the temperature data acquisition are improved.
Further, according to the application, different modulation patterns are formed by sequentially loading the digital micro-mirror assembly 300, so that the digital micro-mirror assembly 300 can correspondingly output a plurality of modulation spectrums with different center wavelengths under the condition of identical incident spectrum conditions, and further, the photoelectric conversion assembly 400 can correspondingly obtain different characteristic parameters based on different modulation spectrums, thereby further improving the accuracy of calculating the output heat source 100 temperature measurement value.
Further, the infrared light radiated by the heat source 100 is modulated by the collimating lens group 200 and the digital micromirror assembly 300, and the output modulation spectrum is not affected by the emissivity of the heat source 100, the size of the light emitting surface, and the moisture of the environmental smoke, so that the temperature data acquisition stability and reliability are provided.
In some embodiments, the collimating lens group 200 includes a first focusing lens 210, a second focusing lens 230, and an aperture stop 220. Wherein the first focusing lens 210 and the second focusing lens 230 are disposed opposite to each other, and the aperture stop 220 is disposed between the first focusing lens 210 and the second focusing lens 230.
By disposing the first focusing lens 210 on the side close to the heat source 100, the first focusing lens 210 can collect part of the infrared light radiated by the heat source 100 and converge at the focal position of the first focusing lens 210, and disposing the second focusing lens 230 on the side of the first focusing lens 210 far from the light source, and the focal positions between the second focusing lens 230 and the first focusing lens 210 coincide, so that the second focusing lens 230 can reconvert the infrared light converged at the focal position by the first focusing lens 210 into the infrared light emitted in parallel along the first direction, thereby improving the luminous flux and the spectral intensity of the infrared light incident on the digital micromirror assembly 300.
By disposing the aperture stop 220 between the first focusing lens 210 and the second focusing lens 230, and the focal point between the second focusing lens 230 and the first focusing lens 210 is disposed in the pupil of the aperture stop 220, the aperture stop 220 functions to filter the incident direction of the incident infrared light. That is, the aperture stop 220 can transmit infrared light converged from the first focusing lens 210 and passing through the focus direction, while blocking infrared light in other directions. The focal positions of the second focusing lens 230 and the first focusing lens 210 coincide, so that the infrared light incident to the second focusing lens 230 is deflected again at the second focusing lens 230 and is emitted in parallel along the first direction, and uniformity of the incident direction of the infrared light to the digital micromirror assembly 300 and uniformity of the spectrum intensity are ensured.
In some embodiments, the digital micromirror assembly 300 includes a micromirror array 310 and a modulation input unit 320, the micromirror array 310 is disposed on the outgoing light path of the second focusing lens 230, and includes a substrate and a plurality of micromirror units arrayed on the substrate.
The micromirror array 310 may be a digital micromirror device (Digital Micromirror Device, DMD), which is used as an optical switch, and can be switched by deflection between two directions with a fixed angle by using each micromirror unit, so as to switch the optical switch on or off. The modulation input unit 320 is electrically connected to the substrate to output a corresponding control signal to each micromirror unit, and controls the deflection direction of each micromirror unit, thereby loading the modulation pattern onto the micromirror array 310.
The modulation input unit 320 may be a computing device, and is electrically connected to the substrate, so as to control the deflection direction of each micromirror unit, and the micromirror array 310 selectively reflects (gate-modulates) the parallel incident infrared light based on the modulation pattern formed by the arrangement and combination of different micromirror units, and converges at a preset position to form a strip-shaped modulation spectrum. The micromirror units are arranged and combined to form different modulation patterns, and the central wavelengths of the modulation spectrums are also different. That is, each modulation pattern satisfies a one-to-one correspondence with the center wavelength of the modulation spectrum formed correspondingly, and the modulation pattern on the micromirror array 310 modulates the parallel incident infrared light, that is, modulates the center wavelength of the modulation spectrum of the reflected output.
As an example, when the central wavelength range of the infrared light radiated from the heat source 100 is between 8 μm to 14 μm, the modulation input unit 320 may form 601 modulation spectrums with 8 μm as a start central wavelength, 10nm as an interval central wavelength, and 14 μm as an end central wavelength, based on the central wavelength range of the infrared light, that is, the central wavelengths corresponding to the modulation spectrums are 8000nm, 8010nm, 8020nm, …, 13980 nm, 13990 nm, 14000nm in order. 601 modulation spectra correspond to 601 modulation patterns simultaneously. Therefore, the photoelectric conversion assembly 400 can perform fitting calculation with a temperature curve of the corresponding center wavelength at the standard temperature based on the modulation spectrums of 601 different center wavelengths, so as to improve the accuracy of the calculated and output heat source 100 temperature measurement value.
As an example, the modulation patterns corresponding to different center wavelengths are the exclusive or superposition pattern of the two-dimensional grating and the fresnel zone plate, so as to realize dispersion and focusing of the parallel incident infrared light, and form the modulation spectrum corresponding to the center wavelength.
It should be noted that, the preset position is a focal position of the micromirror array 310 for reflecting and converging the parallel incident infrared light after gating modulation, that is, a setting position of the photoelectric conversion assembly 400, and the micromirror array 310 sequentially focuses the modulation spectrums with different center wavelengths at the preset position, so that the photoelectric conversion assembly 400 calculates and outputs the temperature measurement value of the heat source 100 based on sequentially receiving the modulation spectrums.
In some embodiments, the photoelectric conversion assembly 400 includes a photoelectric sensing unit 410, an amplifying unit 420, and a fitting unit 430. The photoelectric sensing unit 410 is disposed at a focal point where the modulation spectrum converges, the amplifying unit 420 is connected to a signal output end of the photoelectric sensing unit 410, and the fitting unit 430 is connected to a signal output end of the amplifying unit 420.
The spectrum intensity of the modulation spectrum is collected in real time by disposing the photo-sensing unit 410 at the focus of the modulation spectrum convergence, for example, disposing the collection surface of the photo-sensing unit 410 at the center of the strip of the modulation spectrum in the shape of a strip. Wherein the photo-sensing unit 410 includes, but is not limited to, employing one of a linear array photo-sensor or a single-point photo-sensor to convert sequentially received different modulated spectra into different degrees of electrical signal output.
By connecting the amplifying unit 420 with the signal output end of the photoelectric sensing unit 410 and connecting the fitting unit 430 with the signal output end of the amplifying unit 420, the electric signal output by the photoelectric sensing unit 410 can be amplified by the amplifying unit 420 to meet the fitting requirement of the fitting unit 430. The fitting unit 430 is capable of outputting an infrared spectrum curve of the radiation corresponding to the heat source 100 by fitting the electric signals corresponding to the different modulation signals. Meanwhile, the fitting unit 430 further fits the infrared spectrum curve of the radiation corresponding to the heat source 100 with the planckian blackbody radiation curve, i.e., can further calculate the temperature measurement value corresponding to the output heat source 100.
It should be noted that, the wavelength setting parameter of the photo-sensor unit 410, i.e. the wavelength range of the spectrum acquisition, should correspond to the central wavelength of the modulation spectrum, i.e. the central wavelength range of the modulation spectrum should be within the range of the wavelength setting parameter of the photo-sensor unit 410.
In some embodiments, the infrared spectrum thermometry device further comprises a beam termination unit. The modulation pattern loaded on the micromirror array 310 not only performs gating modulation on the parallel incident infrared light, and forms a modulation spectrum to be incident to the photoelectric sensing unit 410, but also reflects to another direction to form an useless non-modulation spectrum, and by setting the beam termination unit on the outgoing path of the non-modulation spectrum, interference of the non-modulation spectrum on the acquisition of the modulation spectrum by the photoelectric sensing unit 410 can be avoided, so that the accuracy of data acquisition of the modulation spectrum by the photoelectric sensing unit 410 is further improved.
According to a second aspect of the present application, there is provided an infrared spectrum temperature measuring method, including using the infrared spectrum temperature measuring device according to any of the above embodiments. As shown in fig. 1 and 2, the infrared spectrum temperature measurement method specifically includes the following steps:
S1, providing a heat source 100, and disposing a collimator lens set 200 on the one side to obtain infrared light emitted in parallel along a first direction.
S2, sequentially forming a plurality of different modulation patterns on the micro mirror array 310 by using the modulation input unit 320, so that the micro mirror array 310 can sequentially modulate infrared light which is parallel to the first direction and correspondingly form modulation spectrums with different center frequencies;
s3, different modulation spectrums are sequentially collected and processed through the photoelectric conversion assembly 400 to fit the infrared spectrum curve and the temperature measurement value of the output heat source 100.
It can be understood that, by disposing the collimating lens group 200 between the heat source 100 and the micromirror array 310, the incident spectrum of the micromirror array 310 is parallel to the infrared light along the first direction, so as to ensure the uniformity of the incident spectrum to the micromirror array 310, and meanwhile, the parallel incident infrared light liquid enlarges the collection range of the incident spectrum by the micromirror array 310, so as to improve the spectrum intensity of the modulation spectrum of the reflection output. The intensity of the modulation spectrum is stronger, and the conversion efficiency and the accuracy of the photoelectric conversion process of the photoelectric conversion assembly 400 for collecting the modulation spectrum can be further improved, so that the accuracy of the temperature measured value output of the heat source 100 is further improved.
By forming a plurality of different modulation patterns on the micromirror array 310 by using the modulation input unit 320, the modulation spectrum modulated by the micromirror array 310 can have different center wavelengths, so that in the process of sequentially collecting and photoelectrically converting the modulation spectrum by the photoelectric conversion assembly 400, the more the spectral intensity characteristic values under different center wavelength conditions are correspondingly output, the higher the accuracy of the measured value of the temperature of the heat source 100 calculated by the photoelectric conversion assembly 400 is, that is, the accuracy and reliability of the measured value of the temperature of the heat source 100 calculated by the photoelectric conversion assembly 400 can be further improved by sequentially forming a plurality of different modulation patterns on the micromirror array 310.
In some embodiments, before the temperature measurement is performed on the heat source 100 by using the infrared spectrum temperature measurement method, a calibration light path is further constructed to obtain a response relationship between the infrared radiation light emitted by the photoelectric conversion assembly 400 at different calibration temperatures and the modulation spectrum of different center frequencies, so as to calibrate the temperature measurement calculated and output by the photoelectric conversion assembly 400 with the standard temperature value, or obtain a correction parameter between the temperature measurement calculated and output by the photoelectric conversion assembly 400 and the standard temperature value, so that when the temperature measurement is performed on the target heat source 100 by using the infrared spectrum temperature measurement device, accuracy and reliability of the calculated and output temperature measurement are further improved.
In summary, the present application provides an infrared spectrum temperature measuring device and method, and the infrared spectrum temperature measuring device includes a collimating lens set 200, a digital micromirror assembly 300 and a photoelectric conversion assembly 400. By arranging the collimating lens group 200 on the radiation light path of the heat source 100, the collimating lens group can convert the infrared light radiated in multiple directions by the heat source 100 into parallel emergent infrared light; the digital micro-mirror assembly 300 is arranged on the emergent light path of the collimating lens group 200, and different modulation patterns are loaded on the digital micro-mirror assembly 300 so as to form a plurality of modulation spectrums with different center wavelengths; by disposing the photoelectric conversion assembly 400 on the reflection light path of the digital micromirror assembly 300, the photoelectric conversion assembly 400 can sequentially collect and process data of the modulation spectrum reflected and output by the digital micromirror assembly 300, and calculate the temperature measurement value of the output heat source 100.
According to the application, the collimating lens group 200 is utilized to convert the infrared light radiated by the heat source 100 along the multi-direction radiation into the infrared light which is emitted in parallel along the fixed direction, so that the luminous flux of the infrared light to the digital micro-mirror assembly 300 can be effectively improved, the spectrum intensity of the modulation spectrum of the reflected output is improved when the subsequent digital micro-mirror assembly 300 modulates the incident infrared light, and further the accuracy of data acquisition of the modulation spectrum by the photoelectric conversion assembly 400 and the accuracy of the temperature measurement value of the heat source 100 and the stability of temperature data acquisition which are calculated and output are improved.
Further, according to the application, different modulation patterns are formed by sequentially loading the digital micro-mirror assembly 300, so that the digital micro-mirror assembly 300 can correspondingly output a plurality of modulation spectrums with different center wavelengths under the condition of identical incident spectrum conditions, and further, the photoelectric conversion assembly 400 can correspondingly obtain different characteristic parameters based on different modulation spectrums, thereby further improving the accuracy of the calculated and output heat source 100 temperature measurement value.
Further, the infrared light radiated by the heat source 100 is subjected to the parallel collimation modulation of the collimation lens set 200 and the central wavelength and the light intensity modulation of the digital micromirror assembly 300, so that the output modulation spectrum can not be affected by the emissivity of the heat source 100, the size of the luminous surface and the moisture of the environmental smoke, and the infrared light has the advantages of temperature data acquisition stability and reliability.
In the foregoing description of embodiments, reference has been made to the terms "one embodiment," "some embodiments," "example," "a particular example," or "some examples," etc., meaning that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present application, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
Claims (10)
1. The infrared spectrum temperature measuring device is characterized by comprising a collimating lens group, a digital micro-mirror assembly and a photoelectric conversion assembly; wherein,
The collimating lens group is arranged on a radiation light path of the heat source and is used for converting infrared light radiated outwards by the heat source into infrared light which is emitted in parallel along a first direction; the collimating lens group comprises a first focusing lens and a second focusing lens which are oppositely arranged, and an aperture diaphragm arranged between the first focusing lens and the second focusing lens;
The digital micro-mirror assembly is arranged on an emergent light path of the collimating lens group, can gate and modulate parallel incident infrared light based on loaded different modulation patterns, and converges the parallel incident infrared light to form a modulation spectrum corresponding to a center wavelength, wherein the modulation patterns are an exclusive-or superposition pattern of a two-dimensional grating and a Fresnel zone plate;
The photoelectric conversion component is arranged on a reflection light path of the digital micro-mirror component and is used for receiving the modulation spectrum and calculating and obtaining a temperature measurement value of the heat source based on the modulation spectrum.
2. The infrared spectrum temperature measuring device according to claim 1, wherein the first focusing lens is disposed on a side close to the heat source, and a focal position between the second focusing lens and the first focusing lens coincides and is located in an optical aperture of the aperture stop.
3. The infrared spectrum temperature measuring device according to claim 1, wherein the digital micromirror assembly comprises a micromirror array and a modulation input unit, the micromirror array is arranged on an outgoing light path of the collimating lens group, and comprises a plurality of micromirror units arranged in an array; the modulation input unit is used for outputting a corresponding control signal to each micro mirror unit so as to adjust the deflection direction of each micro mirror unit and form the modulation pattern on the micro mirror array.
4. An infrared spectrum temperature measuring device according to claim 1 or 3, wherein the modulation pattern corresponds to the center wavelength of the modulation spectrum one by one.
5. The infrared spectrum temperature measuring device according to claim 3, wherein the modulated spectrum is formed after the parallel incident infrared light is dispersed and focused by the micromirror array.
6. The infrared spectrum temperature measuring device according to claim 3, wherein the photoelectric conversion component comprises a photoelectric sensing unit, an amplifying unit and a fitting unit; wherein,
The photoelectric sensing unit is arranged on the focus of the modulation spectrum convergence, the amplifying unit is connected with the signal output end of the photoelectric sensing unit, and the fitting unit is connected with the signal output end of the amplifying unit;
The photoelectric sensing unit converts the received modulation spectrum into an electric signal and outputs the electric signal to the amplifying unit, the amplifying unit amplifies the received electric signal and outputs the electric signal to the fitting unit, and the fitting unit fits the electric signal with the Planckian blackbody radiation curve and outputs a temperature measurement value of the heat source.
7. The infrared spectrum temperature measuring device according to claim 6, wherein the modulation spectrum stripe is converged at a preset position away from the micromirror array, and the photo-sensing unit is disposed at a center of the modulation spectrum of the stripe.
8. The infrared spectrum temperature measuring device of claim 7, wherein the photo-sensing unit comprises one of a linear array photo-sensor or a single-point photo-sensor.
9. The infrared spectrum temperature measurement method is characterized by comprising the following steps of:
S1, providing a heat source, and arranging a collimating lens group on one side of the heat source to obtain infrared light which is emitted in parallel along a first direction; the collimating lens group comprises a first focusing lens and a second focusing lens which are oppositely arranged, and an aperture diaphragm arranged between the first focusing lens and the second focusing lens;
S2, sequentially forming a plurality of different modulation patterns on the micro-mirror array by using a modulation input unit, so that the micro-mirror array can sequentially modulate infrared light which is parallel to the first direction and correspondingly form modulation spectrums with different center wavelengths, wherein the modulation patterns are the exclusive or superposition patterns of a two-dimensional grating and a Fresnel zone plate;
s3, collecting and processing different modulation spectrums sequentially through the photoelectric conversion assembly so as to fit and output an infrared spectrum curve and a temperature measured value of the heat source.
10. The infrared spectrum temperature measurement method according to claim 9, further comprising the step of constructing a calibration light path before the step S1, and acquiring response relations between infrared light of the photoelectric conversion assembly at different calibration temperatures and modulation spectrums formed by different modulation patterns.
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