CN118407009B - Fiber Bragg grating coating equipment - Google Patents
Fiber Bragg grating coating equipment Download PDFInfo
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- CN118407009B CN118407009B CN202410533536.3A CN202410533536A CN118407009B CN 118407009 B CN118407009 B CN 118407009B CN 202410533536 A CN202410533536 A CN 202410533536A CN 118407009 B CN118407009 B CN 118407009B
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- 238000000576 coating method Methods 0.000 title claims abstract description 28
- 239000011248 coating agent Substances 0.000 title claims abstract description 27
- 239000013307 optical fiber Substances 0.000 claims abstract description 121
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 34
- 239000000835 fiber Substances 0.000 claims abstract description 24
- 230000007246 mechanism Effects 0.000 claims abstract description 10
- 238000007789 sealing Methods 0.000 claims description 26
- 239000010408 film Substances 0.000 abstract description 19
- 238000004544 sputter deposition Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000010409 thin film Substances 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 26
- 230000008569 process Effects 0.000 description 22
- 150000001768 cations Chemical class 0.000 description 14
- 238000010586 diagram Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
Abstract
本发明涉及传感器生产技术领域，尤其是一种光纤光栅镀膜设备，包括底座，所述底座上固接有安装板，所述安装板上可转动的安装有圆形的壳体，所述壳体内部设有两个夹持机构以对光纤的两端进行夹持，所述安装板上设有加热器及磁控溅射耙，所述磁控溅射耙的中心点与光纤的中心点不重合，本装置通过光纤与磁控溅射耙中心点不重合的方式，能够在面积较小磁控溅射耙实现对长光纤的全面扫描，制备出均匀的薄膜，对于同样大的靶，也能够大幅度提高溅射成膜的面积。
The present invention relates to the field of sensor production technology, and in particular to a fiber grating coating device, comprising a base, a mounting plate fixedly connected to the base, a circular shell rotatably mounted on the mounting plate, two clamping mechanisms arranged inside the shell to clamp two ends of an optical fiber, a heater and a magnetron sputtering target arranged on the mounting plate, the center point of the magnetron sputtering target not coinciding with the center point of the optical fiber, and the device can achieve a comprehensive scan of a long optical fiber on a magnetron sputtering target with a relatively small area to prepare a uniform thin film by making the center points of the optical fiber and the magnetron sputtering target not coinciding with each other, and can also greatly increase the area of sputtering film formation for a target of the same size.
Description
Technical Field
The invention relates to the technical field of sensor production, in particular to fiber bragg grating coating equipment.
Background
The optical fiber grating is a diffraction grating formed by axially and periodically modulating the refractive index of an optical fiber core by a certain method, and is a passive filter device. The grating optical fiber has the advantages of small volume, small welding loss, full compatibility with optical fiber, embedding of intelligent materials and the like, and the resonance wavelength is sensitive to the change of external environments such as temperature, strain, refractive index, concentration and the like, so that the grating optical fiber is widely applied to the fields of optical fiber communication and sensing.
Because the fiber grating is easy to form an oxide layer on the surface of the fiber to influence the sensitivity of the fiber grating in the use process, the fiber grating needs to be coated with a film on the surface of the fiber in the use process so as to improve the oxidation resistance of the fiber.
Magnetron sputtering methods are commonly used to produce thin metal coatings that can form a uniform thin metal layer on the surface of a short fiber by spinning the fiber during sputtering. However, the area of the uniform region of the thin film sputtered by the existing magnetron sputtering apparatus is small, and for long optical fibers, such as TFBG or FBG, which are already manufactured, in order to sputter the thin film having a large uniform region, it is generally necessary to customize a magnetron sputtering target of a larger size, resulting in an increase in production cost.
Disclosure of Invention
The invention aims to solve the defect that the existing magnetron sputtering equipment needs to replace a large-size magnetron sputtering target when coating a long optical fiber, and provides an optical fiber grating coating equipment.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
The fiber bragg grating coating equipment comprises a base, wherein a mounting plate is fixedly connected to the base, a circular shell is rotatably mounted on the mounting plate, two clamping mechanisms are arranged inside the shell to clamp two ends of an optical fiber, a heater and a magnetron sputtering rake are arranged on the mounting plate, and the center point of the magnetron sputtering rake is not overlapped with the center point of the optical fiber.
Preferably, the base is provided with an air cylinder, the output end of the air cylinder is fixedly connected with a motor, the output shaft of the motor is fixedly connected with a sealing cover, and the shell and the motor are coaxially arranged.
Preferably, the clamping mechanism comprises a sealing plate, the sealing plate is rotatably arranged on the shell, a plurality of sliding sleeves are rotatably arranged on the sealing plate, the plurality of sliding sleeves are positioned on the same circumference, a first sliding rod and a second sliding rod are slidably matched in the sliding sleeves, a semicircular first elastic friction wheel is fixedly connected on the first sliding rod, and a semicircular second elastic friction wheel is fixedly connected on the second sliding rod.
Preferably, the minimum distance between any two first elastic friction wheels or the minimum distance between any two second elastic friction wheels is smaller than the diameter of the optical fiber.
Preferably, the first elastic friction wheel and the second elastic friction wheel are respectively provided with anti-skid stripes.
Preferably, the shell is provided with a rotating structure to drive the sliding sleeve to rotate, the rotating structure comprises an end face gear, the end face gear is fixedly connected to the mounting plate, a first ring gear is rotatably mounted on the shell, a planetary gear is fixedly connected to the sliding sleeve and is matched with the first ring gear, a second ring gear is coaxially fixedly connected to the first ring gear, and the second ring gear is matched with the end face gear.
Preferably, the housing is fixedly connected with a mounting frame, a ring member is rotatably mounted on the mounting frame, a plurality of turntables are rotatably mounted on the ring member, a first driven wheel and a second driven wheel are rotatably mounted on the turntables, and the first driven wheel and the second driven wheel are arranged on the turntables, wherein:
The first driven wheel is coaxially and fixedly connected with a first screw rod, and the first sliding rod is in threaded fit with the first screw rod;
the second driven wheel is coaxially and fixedly connected with a second screw rod, and the second sliding rod is in threaded fit with the second screw rod.
Preferably, the mounting frame is fixedly connected with an annular driving wheel, the first driven wheel and the second driven wheel are matched with the annular driving wheel, the mounting frame is fixedly connected with a fixed shaft, the fixed shaft is fixedly connected with a central gear, and the central gear is matched with the planetary gear.
The fiber bragg grating coating equipment provided by the invention has the beneficial effects that: the device can realize the comprehensive scanning of the long optical fiber in the magnetron sputtering rake with smaller area by the mode that the optical fiber is not overlapped with the center point of the magnetron sputtering rake, prepare uniform films, and greatly improve the sputtering film forming area for targets with the same size.
Drawings
Fig. 1 is a schematic structural diagram of an optical fiber grating coating device according to the present invention.
Fig. 2 is a schematic structural diagram of a housing of an optical fiber grating coating device according to the present invention.
Fig. 3 is a schematic structural diagram of the inside of a housing of an optical fiber grating coating device according to the present invention.
Fig. 4 is a schematic structural diagram of an optical fiber grating coating device according to the present invention in fig. 3.
Fig. 5 is a schematic structural diagram of a ring member of a fiber grating coating apparatus according to the present invention.
Fig. 6 is a schematic structural diagram of a first elastic friction wheel and a second elastic friction wheel of a fiber grating coating device according to the present invention for clamping an optical fiber.
Fig. 7 is a cross-sectional view of fig. 6 of a fiber grating coating apparatus according to the present invention.
Fig. 8 is a schematic structural diagram of a planetary gear and a sun gear of a fiber grating coating device according to the present invention.
Fig. 9 is a schematic diagram of a structure in which the center points of the optical fibers and the magnetron sputtering rake of the optical fiber grating coating device are not overlapped.
In the figure: 1. a base; 2. a cylinder; 3. a motor; 4. sealing cover; 5. a mounting plate; 501. a heater; 502. a magnetron sputtering rake; 6. a housing; 7. face gears; 8. a sealing plate; 9. a mounting frame; 10. a fixed shaft; 11. a sun gear; 12. a second ring gear; 13. a first ring gear; 14. a sliding sleeve; 15. a planetary gear; 16. an optical fiber; 17. a first slide bar; 18. a second slide bar; 19. a first elastic friction wheel; 20. a second elastic friction wheel; 21. an annular driving wheel; 22. a ring; 23. a turntable; 24. a first driven wheel; 25. a second driven wheel; 26. a first screw; 27. and a second screw.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments.
Example 1
Referring to fig. 1-3, a fiber bragg grating film plating device comprises a base 1, wherein a mounting plate 5 is fixedly connected to the base 1, a circular shell 6 is rotatably mounted on the mounting plate 5, two clamping mechanisms are arranged inside the shell 6 to clamp two ends of an optical fiber 16, a heater 501 and a magnetron sputtering rake 502 are arranged on the mounting plate 5, the center point of the magnetron sputtering rake 502 is not overlapped with the center point of the optical fiber 16, a cylinder 2 is mounted on the base 1, a motor 3 is fixedly connected to the output end of the cylinder 2, the shell 6 and the motor 3 are coaxially arranged, a sealing cover 4 is fixedly connected to an output shaft on the motor 3, and the sealing cover 4 is used for sealing the shell 6.
When the optical fiber 16 is coated, two ends of the optical fiber 16 are clamped on the clamping mechanism, the air cylinder 2 is started, the air cylinder 2 drives the sealing cover 4 to move downwards, the sealing cover 4 moves downwards to be abutted against the opening at the top of the shell 6 and seal the opening of the shell 6, the motor 3 is started again, the motor 3 is started to drive the sealing cover 4 to rotate, the sealing cover 4 rotates to drive the shell 6 to rotate around the X axis as shown in fig. 1, and the optical fiber 16 in the shell 6 rotates around the X axis in the process of rotation.
In the process of rotating the optical fiber 16 around the X axis, the magnetron sputtering rake 502 is electrified, the magnetron sputtering rake 502 is a cathode rake, the cathode rake is made of film materials, the sealing cover 4 is provided with an anode rake, after the electrifying, positive ions generated in a discharge mode are accelerated and bombard a target surface under the action of an electric field to cause sputtering, and the optical fiber 16 rotates around the X axis to bear the sputtered particles, so that the particles can be gathered on the surface of the optical fiber 16 to form a film.
As shown in fig. 9, the optical fiber 16 rotates around the point a as the center, the center point of the optical fiber 16 coincides with the point a, the center point of the magnetron sputtering rake 502 is the point b, and the center point of the optical fiber 16 does not coincide with the center point of the magnetron sputtering rake 502, so that the optical fibers 16 on both sides of the point a can be gathered on the surface to form a film by the particles sputtered by the magnetron sputtering rake 502 in the rotation process of the optical fiber 16 around the point a, and therefore, for the magnetron sputtering rake 502 with the same area size, the center point of the optical fiber 16 does not coincide with the center point of the magnetron sputtering rake 502 in the rotation process of the optical fiber 16, and the film forming range can be greatly improved. That is, when coating the optical fiber 16 with a larger length, the area of the magnetron sputtering rake 502 required can be greatly reduced by using the method, so as to reduce the cost of coating the magnetron sputtering rake 502.
Example 2
As shown in fig. 3-6, the clamping mechanism comprises a sealing plate 8, the sealing plate 8 is rotatably mounted on the shell 6, a plurality of sliding sleeves 14 are rotatably mounted on the sealing plate 8, the plurality of sliding sleeves 14 are positioned on the same circumference, a first sliding rod 17 and a second sliding rod 18 are slidably matched in the sliding sleeves 14, a semicircular first elastic friction wheel 19 is fixedly connected on the first sliding rod 17, and a semicircular second elastic friction wheel 20 is fixedly connected on the second sliding rod 18.
The first elastic friction wheel 19 and the second elastic friction wheel 20 are of semicircular structures with the same radius and the same center on the same straight line, so that the first elastic friction wheel 19 and the second elastic friction wheel 20 can form a complete circular friction wheel, the distance between the two elastic friction wheels on the same diameter is smaller than the diameter of the optical fiber 16, the end part of the optical fiber 16 is arranged between the two elastic friction wheels on the same diameter, the optical fiber 16 can be elastically clamped by the elastic friction wheels so as to fix the two ends of the optical fiber 16, and in addition, anti-slip stripes are arranged on the first elastic friction wheel 19 and the second elastic friction wheel 20 so as to prevent the optical fiber 16 from axially moving in the rotation process.
Example 3
As shown in fig. 3-6, a rotating structure is arranged on the shell 6 to drive the sliding sleeve 14 to rotate, the rotating structure comprises a face gear 7, the face gear 7 is fixedly connected on the mounting plate 5, a first ring gear 13 is rotatably mounted on the shell 6, a planetary gear 15 is fixedly connected on the sliding sleeve 14, the planetary gear 15 is matched with the first ring gear 13, a second ring gear 12 is coaxially fixedly connected on the first ring gear 13, the second ring gear 12 is matched with the face gear 7, a mounting frame 9 is fixedly connected on the shell 6, a fixed shaft 10 is fixedly connected on the mounting frame 9, a central gear 11 is fixedly connected on the fixed shaft 10, and the central gear 11 is matched with the planetary gear 15.
The casing 6 will drive the second ring gear 12 around the X axis rotation in the process of rotating around the X axis, because the second ring gear 12 meshes with the face gear 7, the second ring gear 12 will be driven by the face gear 7 to rotate around the X axis rotation in the process, the second ring gear 12 rotates, namely the second ring gear 12 rotates around the Y axis, the second ring gear 12 rotates to drive the first ring gear 13 to rotate, the second ring gear 12 rotates to drive the planet gear 15 to rotate, because the planet gear 15 meshes with the sun gear 11, and the sun gear 11 is in a fixed state, therefore, the planet gear 15 also revolves around the Y axis in the process of rotating, wherein:
For rotation of the planetary gear 15: the planetary gear 15 rotates to drive the sliding sleeve 14 to rotate, the sliding sleeve 14 rotates to drive the first sliding rod 17 and the second sliding rod 18 to rotate, the first sliding rod 17 and the second sliding rod 18 rotate to drive the first elastic friction wheel 19 and the second elastic friction wheel 20 to rotate, and the semicircular first elastic friction wheel 19 and the semicircular second elastic friction wheel 20 can form a complete friction wheel, so that the complete friction wheel rotates, and the optical fiber 16 is driven to rotate in the complete friction wheel rotation process, namely the complete friction wheel drives the optical fiber 16 to rotate around the Y axis;
Based on the description of embodiment 1, the optical fiber 16 rotates around the X axis, and the complete friction wheel is used to drive the optical fiber 16 to rotate around the Y axis, so that the optical fiber 16 can rotate around the Y axis and the X axis simultaneously, the whole optical fiber 16 can be overlapped with the magnetron sputtering rake 502 during the rotation of the optical fiber 16 around the X axis, and the optical fiber 16 rotates around the Y axis so that the optical fiber 16 rotates when overlapped with the magnetron sputtering rake 502, so that the cations can contact each place on the surface of the optical fiber 16, and thus the film can cover each place of the optical fiber 16, so as to prevent the uncoated place on the surface of the optical fiber 16 from being leaked.
For revolution of the planetary gear 15: the planetary gear 15 revolves around the Y axis to drive the sliding sleeve 14 to revolve around the Y axis, the sliding sleeve 14 revolves around the Y axis to drive the first sliding rod 17 and the second sliding rod 18 to revolve around the Y axis, and the first sliding rod 17 and the second sliding rod 18 can prevent the first sliding rod 17 and the second sliding rod 18 from blocking cations in a single direction due to the fact that the first sliding rod 17 and the second sliding rod 18 revolve around the Y axis at any time in the cation moving process in the shell 6 under the action of an electric field.
For example, as shown in fig. 2-3, when the axes of the two sets of first slide bar 17 and second slide bar 18 are on the same vertical plane, the vertical movement of the cations in the housing 6 is blocked, so that the first slide bar 17 and the second slide bar 18 prevent the cations from moving vertically onto the optical fiber 16, and in this embodiment, the first slide bar 17 and the second slide bar 18 can be moved away from the vertical direction during the revolution of the first slide bar 17 and the second slide bar 18 around the Y axis, so that the moving direction of the cations is abducted, so as to prevent the first slide bar 17 and the second slide bar 18 from affecting the coating operation of the optical fiber 16.
Example 4
As shown in fig. 4 to 8, a ring 22 is rotatably mounted on the mounting frame 9, an annular driving wheel 21 is fixedly connected on the mounting frame 9, a plurality of turntables 23 are rotatably mounted on the ring 22, a first driven wheel 24 and a second driven wheel 25 are rotatably mounted on the turntables 23, and the first driven wheel 24 and the second driven wheel 25 are matched with the annular driving wheel 21, wherein:
The first driven wheel 24 is coaxially and fixedly connected with a first screw rod 26, and the first slide bar 17 is in threaded fit on the first screw rod 26;
a second screw rod 27 is fixedly connected on the second driven wheel 25 in a coaxial line, and the second slide bar 18 is in threaded fit on the second screw rod 27.
Based on the description in the above embodiment 3, it is known that the first slide bar 17 and the second slide bar 18 revolve around the Y axis, and since the first driven wheel 24 is connected to the first slide bar 17 through the first screw 26 and the second driven wheel 25 is connected to the second slide bar 18 through the second screw 27, the first driven wheel 24 and the second driven wheel 25 also revolve around the Y axis during the revolution of the first slide bar 17 and the second slide bar 18 around the Y axis.
As shown in fig. 8, since the planetary gear 15 always rotates during revolution around the Y axis, the first driven wheel 24 and the second driven wheel 25 also rotate around the axis of the planetary gear 15, and during rotation of the first driven wheel 24 and the second driven wheel 25 around the axis of the planetary gear 15, the first driven wheel 24 and the second driven wheel 25 alternately contact the endless drive wheel 21, and both always keep revolving around the Y axis during contact of the first driven wheel 24 or the second driven wheel 25 with the endless drive wheel 21, and therefore, any one of the driven wheels in contact with the endless drive wheel 21 is driven to rotate by the endless drive wheel 21, wherein:
When the first driven wheel 24 contacts with the annular driving wheel 21, the corresponding first elastic friction wheel 19 is separated from the optical fiber 16;
When the second driven wheel 25 contacts the annular driving wheel 21, the corresponding second elastic friction wheel 20 is separated from the optical fiber 16.
As shown in fig. 8, the first driven wheel 24 is shown to be in contact with the annular driving wheel 21, and the first driven wheel 24 is also rotated around the Y axis at this time, so that the first driven wheel 24 will be driven by the annular driving wheel 21 to rotate, the first driven wheel 24 rotates to drive the first screw 26 to rotate, the first slide rod 17 is driven to axially move during the rotation of the first screw 26 due to the threaded engagement of the first slide rod 17, the first elastic friction wheel 19 is driven to axially move by the axial movement of the first slide rod 17, and the first elastic friction wheel 19 is separated from the optical fiber 16 at this time, so that the first elastic friction wheel 19 will not be in contact with the optical fiber 16 during the axial movement, and will not cause damage to the film forming on the surface of the optical fiber 16.
In summary, in this embodiment:
when the first elastic friction wheel 19 clamps the optical fiber 16, the second elastic friction wheel 20 is separated from the optical fiber 16, and the second driven wheel 25 corresponding to the second elastic friction wheel 20 is contacted with the annular driving wheel 21, so that the second elastic friction wheel 20 moves axially;
when the second elastic friction wheel 20 clamps the optical fiber 16, the first elastic friction wheel 19 is separated from the optical fiber 16, and the first driven wheel 24 corresponding to the first elastic friction wheel 19 is contacted with the annular driving wheel 21, so that the first elastic friction wheel 19 moves axially;
The first elastic friction wheel 19 and the second elastic friction wheel 20 alternately perform axial movement on the optical fiber 16, and in the process of clamping and fixing the optical fiber 16, the first elastic friction wheel 19 and the second elastic friction wheel 20 can alternately perform axial movement, so that the clamped part of the optical fiber 16 is unseated, the clamped part of the optical fiber 16 is not blocked by the first elastic friction wheel 19 and the second elastic friction wheel 20, and cations are accumulated in the clamped part to form a film.
And, the surface of the optical fiber 16 can not be contacted with the first elastic friction wheel 19 and the second elastic friction wheel 20 in the axial movement process, so that the surface of the optical fiber 16 or a new film just formed is prevented from being scratched in the axial movement process of the first elastic friction wheel 19 and the second elastic friction wheel 20.
Working principle and working procedure:
s1: as shown in fig. 3, when the optical fiber 16 is coated, both ends of the optical fiber 16 are clamped on the clamping mechanism, and the clamping mechanism elastically clamps the optical fiber 16 mainly through the first elastic friction wheel 19 and the second elastic friction wheel 20.
As shown in fig. 4-7, the first elastic friction wheel 19 and the second elastic friction wheel 20 have a semicircular structure with the same radius and the same center on the same straight line, so that the first elastic friction wheel 19 and the second elastic friction wheel 20 can form a complete circular friction wheel, the distance between the two elastic friction wheels on the same diameter is smaller than the diameter of the optical fiber 16, therefore, the end part of the optical fiber 16 is arranged between the two elastic friction wheels on the same diameter, the elastic friction wheels can elastically clamp the optical fiber 16 so as to fix the two ends of the optical fiber 16, and in addition, anti-slip stripes are arranged on the first elastic friction wheel 19 and the second elastic friction wheel 20 so as to prevent the optical fiber 16 from axially moving in the rotation process.
S2: after the optical fiber 16 is clamped, the air cylinder 2 is started, the air cylinder 2 drives the sealing cover 4 to move downwards, the sealing cover 4 moves downwards to be abutted against the opening at the top of the shell 6 and seal the opening of the shell 6, the motor 3 is started again, the motor 3 drives the sealing cover 4 to rotate after being started, the sealing cover 4 rotates to drive the shell 6 to rotate around the X axis, and the optical fiber 16 in the shell 6 rotates around the X axis.
In the process of rotating the optical fiber 16 around the X axis, the magnetron sputtering rake 502 is electrified, the magnetron sputtering rake 502 is a cathode rake, the cathode rake is made of film materials, the sealing cover 4 is provided with an anode rake, after the electrifying, positive ions generated in a discharge mode are accelerated and bombard a target surface under the action of an electric field to cause sputtering, and the optical fiber 16 rotates around the X axis to bear the sputtered particles, so that the particles can be gathered on the surface of the optical fiber 16 to form a film.
S3: in S2 above, the housing 6 will drive the second ring gear 12 to rotate around the X axis during rotation around the X axis, since the second ring gear 12 is meshed with the face gear 7, the second ring gear 12 will be driven to rotate around the X axis during rotation around the face gear 7, the second ring gear 12 rotates, that is, the second ring gear 12 rotates around the Y axis, the second ring gear 12 rotates to drive the first ring gear 13 to rotate, the second ring gear 12 rotates to drive the planet gear 15 to rotate, and since the planet gear 15 is meshed with the sun gear 11 and the sun gear 11 is in a fixed state, the planet gear 15 will also revolve around the Y axis during rotation, wherein:
For rotation of the planetary gear 15: the planetary gear 15 rotates to drive the sliding sleeve 14 to rotate, the sliding sleeve 14 rotates to drive the first sliding rod 17 and the second sliding rod 18 to rotate, the first sliding rod 17 and the second sliding rod 18 rotate to drive the first elastic friction wheel 19 and the second elastic friction wheel 20 to rotate, and the semicircular first elastic friction wheel 19 and the semicircular second elastic friction wheel 20 can form a complete friction wheel, so that the complete friction wheel rotates, and the optical fiber 16 is driven to rotate in the complete friction wheel rotation process, namely the complete friction wheel drives the optical fiber 16 to rotate around the Y axis;
Based on the description of embodiment 1, the optical fiber 16 rotates around the X axis, and the complete friction wheel is used to drive the optical fiber 16 to rotate around the Y axis, so that the optical fiber 16 can rotate around the Y axis and the X axis simultaneously, the whole optical fiber 16 can be overlapped with the magnetron sputtering rake 502 during the rotation of the optical fiber 16 around the X axis, and the optical fiber 16 rotates around the Y axis so that the optical fiber 16 rotates when overlapped with the magnetron sputtering rake 502, so that the cations can contact each place on the surface of the optical fiber 16, and thus the film can cover each place of the optical fiber 16, so as to prevent the uncoated place on the surface of the optical fiber 16 from being leaked.
For revolution of the planetary gear 15: the planetary gear 15 revolves around the Y axis to drive the sliding sleeve 14 to revolve around the Y axis, the sliding sleeve 14 revolves around the Y axis to drive the first sliding rod 17 and the second sliding rod 18 to revolve around the Y axis, and the first sliding rod 17 and the second sliding rod 18 can prevent the first sliding rod 17 and the second sliding rod 18 from blocking cations in a single direction due to the fact that the first sliding rod 17 and the second sliding rod 18 revolve around the Y axis at any time in the cation moving process in the shell 6 under the action of an electric field.
For example, as shown in fig. 2-3, when the axes of the two sets of first slide bar 17 and second slide bar 18 are on the same vertical plane, the vertical movement of the cations in the housing 6 is blocked, so that the first slide bar 17 and the second slide bar 18 prevent the cations from moving vertically onto the optical fiber 16, and in this embodiment, the first slide bar 17 and the second slide bar 18 can be moved away from the vertical direction during the revolution of the first slide bar 17 and the second slide bar 18 around the Y axis, so that the moving direction of the cations is abducted, so as to prevent the first slide bar 17 and the second slide bar 18 from affecting the coating operation of the optical fiber 16.
S4: based on the description in S3 above, it is known that the first and second slide bars 17 and 18 revolve around the Y axis, and since the first driven wheel 24 is connected to the first slide bar 17 through the first screw 26 and the second driven wheel 25 is connected to the second slide bar 18 through the second screw 27, the first and second driven wheels 24 and 25 also revolve around the Y axis during the revolution of the first and second slide bars 17 and 18 around the Y axis.
As shown in fig. 8, since the planetary gear 15 always rotates during revolution around the Y axis, the first driven wheel 24 and the second driven wheel 25 also rotate around the axis of the planetary gear 15, and during rotation of the first driven wheel 24 and the second driven wheel 25 around the axis of the planetary gear 15, the first driven wheel 24 and the second driven wheel 25 alternately contact the endless drive wheel 21, and both always keep revolving around the Y axis during contact of the first driven wheel 24 or the second driven wheel 25 with the endless drive wheel 21, and therefore, any one of the driven wheels in contact with the endless drive wheel 21 is driven to rotate by the endless drive wheel 21, wherein:
When the first driven wheel 24 contacts with the annular driving wheel 21, the corresponding first elastic friction wheel 19 is separated from the optical fiber 16;
When the second driven wheel 25 contacts the annular driving wheel 21, the corresponding second elastic friction wheel 20 is separated from the optical fiber 16.
As shown in fig. 8, the first driven wheel 24 is shown to be in contact with the annular driving wheel 21, and the first driven wheel 24 is also rotated around the Y axis at this time, so that the first driven wheel 24 will be driven by the annular driving wheel 21 to rotate, the first driven wheel 24 rotates to drive the first screw 26 to rotate, the first slide rod 17 is driven to axially move during the rotation of the first screw 26 due to the threaded engagement of the first slide rod 17, the first elastic friction wheel 19 is driven to axially move by the axial movement of the first slide rod 17, and the first elastic friction wheel 19 is separated from the optical fiber 16 at this time, so that the first elastic friction wheel 19 will not be in contact with the optical fiber 16 during the axial movement, and will not cause damage to the film forming on the surface of the optical fiber 16.
It is known that when the first elastic friction wheel 19 clamps the optical fiber 16, the second elastic friction wheel 20 is separated from the optical fiber 16, and the second driven wheel 25 corresponding to the second elastic friction wheel 20 is contacted with the annular driving wheel 21, so that the second elastic friction wheel 20 moves axially; when the second elastic friction wheel 20 clamps the optical fiber 16, the first elastic friction wheel 19 is separated from the optical fiber 16, and the first driven wheel 24 corresponding to the first elastic friction wheel 19 is contacted with the annular driving wheel 21, so that the first elastic friction wheel 19 moves axially.
The first elastic friction wheel 19 and the second elastic friction wheel 20 alternately perform axial movement on the optical fiber 16, and in the process of clamping and fixing the optical fiber 16, the first elastic friction wheel 19 and the second elastic friction wheel 20 can alternately perform axial movement, so that the clamped part of the optical fiber 16 is unseated, the clamped part of the optical fiber 16 is not blocked by the first elastic friction wheel 19 and the second elastic friction wheel 20, and cations are accumulated in the clamped part to form a film.
The first elastic friction wheel 19 and the second elastic friction wheel 20 are not contacted with the surface of the optical fiber 16 in the axial movement process, so that scratches on the surface of the optical fiber 16 or a new film just formed are prevented in the axial movement process of the first elastic friction wheel 19 and the second elastic friction wheel 20.
The foregoing is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art, who is within the scope of the present invention, should make equivalent substitutions or modifications according to the technical scheme of the present invention and the inventive concept thereof, and should be covered by the scope of the present invention.
Claims (6)
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202643832U (en) * | 2012-07-05 | 2013-01-02 | 中国科学院半导体研究所 | Support for assisting fiber bragg grating in rotating |
| CN109536911A (en) * | 2018-12-26 | 2019-03-29 | 北京航空航天大学 | A kind of device for optical fiber side plated film |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100342593B1 (en) * | 1999-06-01 | 2002-07-03 | 김진찬 | Apparatus for deposit of optical fiber preform |
| DE102011050717B4 (en) * | 2011-05-30 | 2018-12-27 | BAM Bundesanstalt für Materialforschung und -prüfung | Measuring system and method for validating a fiber optic sensor |
| US10648073B2 (en) * | 2016-11-29 | 2020-05-12 | National Kaohsiung University Of Science And Technology | Method of preparing fiber sensing devices through low-temperature magnetic control sputtering |
| CN212247193U (en) * | 2020-06-03 | 2020-12-29 | 南京南智先进光电集成技术研究院有限公司 | Optic fibre coating film device based on magnetron sputtering |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202643832U (en) * | 2012-07-05 | 2013-01-02 | 中国科学院半导体研究所 | Support for assisting fiber bragg grating in rotating |
| CN109536911A (en) * | 2018-12-26 | 2019-03-29 | 北京航空航天大学 | A kind of device for optical fiber side plated film |
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