CN118326386A - Heavy-duty turnover vacuum sampling device and vacuum processing system - Google Patents
Heavy-duty turnover vacuum sampling device and vacuum processing system Download PDFInfo
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- CN118326386A CN118326386A CN202310008483.9A CN202310008483A CN118326386A CN 118326386 A CN118326386 A CN 118326386A CN 202310008483 A CN202310008483 A CN 202310008483A CN 118326386 A CN118326386 A CN 118326386A
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- 238000005070 sampling Methods 0.000 title claims abstract description 153
- 230000007306 turnover Effects 0.000 title claims abstract description 18
- 238000012545 processing Methods 0.000 title claims abstract description 16
- 230000007246 mechanism Effects 0.000 claims abstract description 63
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 description 19
- 238000000576 coating method Methods 0.000 description 19
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/73—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals characterised by the process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/10—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting holders for tool or work
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The present disclosure provides a vacuum sampling device and vacuum processing system, the vacuum sampling device includes: a vacuum cylinder; the sampling mechanism is arranged outside the vacuum cylinder; a first drive shaft, a proximal end of which is disposed within the vacuum barrel, and a distal end of which is connected to the sampling mechanism; and the first driving device is coupled with the first driving shaft and used for driving the first driving shaft to rotate so as to drive the sampling mechanism to turn over.
Description
Technical Field
The disclosure relates to the technical field of vacuum equipment, and in particular relates to a heavy-duty turnover vacuum sampling device and a vacuum processing system.
Background
Sample transfer and placement in a vacuum system requires the use of a sampling mechanism. For example, in the vacuum coating process, in order to ensure the coating quality, the laser bar needs to be cleaned and passivated, the bar is sent into the vacuum processing cavity through the tray to be coated with the passivation film, but the front and the back of the bar need to be coated with the passivation film, so that the tray needs to be turned over. Most traditional mechanisms cannot complete overturning, the bars are required to be taken out and overturned and then fed again, the operation is complicated, and the bars which are not completely coated are exposed to the atmosphere, so that the quality of subsequent coating is affected.
Disclosure of Invention
The present disclosure provides a vacuum sampling device, characterized by comprising: a vacuum cylinder; the sampling mechanism is arranged outside the vacuum cylinder; a first drive shaft, a proximal end of which is disposed within the vacuum barrel, and a distal end of which is connected to the sampling mechanism; and the first driving device is coupled with the first driving shaft and used for driving the first driving shaft to rotate so as to drive the sampling mechanism to turn over.
In some embodiments, the vacuum sampling apparatus further comprises: a second drive shaft, the proximal end of which is disposed within the vacuum barrel, and the distal end of which is connected to the sampling mechanism; and the second driving device is coupled with the second driving shaft and used for driving the second driving shaft to rotate so as to drive the sampling mechanism to sample.
In some embodiments, the sampling mechanism comprises: the base is fixedly connected with the distal end of the first driving shaft; the first sliding mechanism is arranged on the base; the first sampling frame is arranged on the first sliding mechanism; the second sliding mechanism is arranged on the base; and the second sampling frame is arranged on the second sliding mechanism and matched with the first sampling frame.
In some embodiments, the first slide mechanism comprises: the first sliding rail is arranged on the base; and first slider, slide and set up on first slide rail and with first sample frame fixed connection to and second slide mechanism includes: the second sliding rail is arranged on the base; and the second sliding block is arranged on the second sliding rail in a sliding way and is fixedly connected with the second sampling frame.
In some embodiments, the first slider comprises a first rack; the second sliding block comprises a second rack, and the first rack and the second rack are oppositely arranged; and the second driving shaft further comprises a gear arranged at the far end, the gear is meshed with the first rack and the second rack and is used for driving the first rack and the second rack to move in opposite directions and driving the first sliding block and the second sliding block to move so as to drive the first sampling frame and the second sampling frame to open or close.
In some embodiments, the first slide rail includes a first cross roller disposed on a side surface, and the first slider includes a first groove in sliding engagement with the first cross roller; and/or the second slide rail comprises a second cross roller disposed on the side surface, and the second slider comprises a second groove in sliding engagement with the second cross roller.
In some embodiments, the first sampling rack comprises at least one first sampling finger comprising a first snap-fit structure for cooperating with a first positioning structure of the sample holder; and/or the second sampling rack comprises at least one second sampling finger, and the second sampling finger comprises a second clamping structure for being matched with a second positioning structure of the sample holder.
In some embodiments, the first drive shaft comprises a first transmission magnetic assembly arranged at the proximal end, the first driving device comprises a first motor and a first driving magnetic assembly arranged outside the vacuum cylinder and magnetically coupled with the first transmission magnetic assembly, and the first driving magnetic assembly is coupled with the output end of the first motor and rotates under the drive of the first motor to drive the first drive shaft to rotate so as to drive the sampling mechanism to turn over; and/or the second driving shaft comprises a second transmission magnetic component arranged at the proximal end, the second driving device comprises a second motor and a second driving magnetic component arranged outside the vacuum cylinder and magnetically coupled with the second transmission magnetic component, and the second driving magnetic component is coupled with the output end of the second motor and rotates under the driving of the second motor to drive the second driving shaft to rotate so as to drive the sampling mechanism to open or close.
In some embodiments, the first drive shaft is sleeved outside the second drive shaft, and when the first drive device drives the sampling mechanism to turn over, the second drive device cooperatively drives the second drive shaft to rotate so as to keep the sampling mechanism open or closed.
The present disclosure provides a vacuum processing system comprising: a vacuum chamber; according to the vacuum sampling device of any one of the embodiments of the present disclosure, the vacuum cylinder of the vacuum sampling device is in vacuum sealing connection with the vacuum cavity.
Vacuum sampling devices according to some embodiments of the present disclosure can provide beneficial technical effects. For example, the vacuum sampling apparatus of some embodiments of the present disclosure can solve one or more of the following problems in the conventional art: the turnover operation is complicated, the quality of the coating is affected, the coating efficiency is low, the large-scale production cannot be realized, and the technical effects of simplifying the turnover operation steps, improving the coating quality, improving the coating efficiency and being widely applicable to various samples can be realized.
Vacuum processing systems according to some embodiments of the present disclosure can provide beneficial technical effects. For example, the vacuum processing system of some embodiments of the present disclosure can address one or more of the following problems in the conventional art: the processing operation is complex, the coating quality is low, the coating efficiency is low, and the technical effects of simplifying the operation, improving the coating quality and the coating efficiency and being suitable for production can be realized.
Drawings
In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is apparent that the drawings in the following description are only one embodiment of the present disclosure, and other drawings may be obtained according to these drawings without inventive effort to those of ordinary skill in the art.
FIG. 1 illustrates a schematic diagram of a vacuum sampling apparatus according to some embodiments of the present disclosure;
FIG. 2 illustrates a schematic cross-sectional view of a vacuum sampling apparatus according to some embodiments of the present disclosure;
FIG. 3 illustrates a schematic structural view of a sampling mechanism according to some embodiments of the present disclosure;
fig. 4 illustrates a structural schematic view of a first slide rail according to some embodiments of the present disclosure;
Fig. 5 illustrates a schematic diagram of a vacuum processing system according to some embodiments of the present disclosure.
In the above drawings, each reference numeral represents:
100. vacuum sampling device
10. Vacuum cylinder
20. Sampling mechanism
21. Base seat
22. First sliding mechanism
221. First slide rail
2211A, 2211b first cross roller
222. First slider
2221A, 2221b first grooves
2221. First rack
23. Second sliding mechanism
231. Second slide rail
2311A, 2311b second cross roller
232 Second slider
2321A, 2321b second grooves
2321. Second rack
24. First sampling rack
241A, 241b, 241c, 241d first sampling finger
25 Second sampling rack
251A, 251b, 251c, 251d second sampling finger
2511A, 2511b, 2511c, 2511d second engagement structure
30. First drive shaft
31. First transmission magnetic assembly
40. First driving device
41. First motor
42. First drive magnetic assembly
50. Second drive shaft
51. Gear wheel
52. Second transmission magnetic assembly
60. Second driving device
61. Second motor
62. Second driving magnetic assembly
1000. Vacuum processing system
200. Sample of
300. Vacuum chamber
Detailed Description
Some embodiments of the present disclosure will be described below with reference to the accompanying drawings. It will be apparent that the described embodiments are merely exemplary embodiments of the present disclosure and not all embodiments.
In the description of the present disclosure, it should be noted that the positional or positional relationship indicated by the terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", "top", "bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present disclosure. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "coupled," and "coupled" are to be construed broadly, and may be either a fixed connection or a removable connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium; may be a communication between the interiors of the two elements. In the description of this disclosure, distal or distal refers to an end or side that is deep into a vacuum environment (e.g., a vacuum lumen), and proximal or proximal is an end or side opposite the distal or distal (e.g., an end or side distal from the vacuum lumen, or an end or side within the vacuum lumen proximal to a wall of the vacuum lumen, etc.). The specific meaning of the terms in this disclosure will be understood by those of ordinary skill in the art as the case may be.
Fig. 1 illustrates a schematic diagram of a vacuum sampling apparatus 100 according to some embodiments of the present disclosure. Fig. 2 illustrates a schematic cross-sectional view of a vacuum sampling apparatus 100 according to some embodiments of the present disclosure.
As shown in fig. 1 and 2, the vacuum sampling apparatus 100 may include a vacuum cartridge 10, a sampling mechanism 20, a first drive shaft 30, and a first drive apparatus 40. The sampling mechanism 20 is disposed outside the vacuum cylinder 10. The proximal end of the first drive shaft 30 is disposed within the vacuum cartridge 10, and the distal end of the first drive shaft 30 is connected to the sampling mechanism 20. The first driving device 40 is coupled to the first driving shaft 30, and can be used to drive the first driving shaft 30 to rotate, so as to drive the sampling mechanism 20 to turn over, and can turn over the sample 200. For example, in the vacuum coating process, the first driving device 40 can drive the sampling mechanism 20 to turn over, so that the sample 200 can be coated on the front and back surfaces, and the flexibility and practicality of the coating system are improved.
As shown in fig. 1 and 2, in some embodiments of the present disclosure, the vacuum sampling apparatus 100 may further include a second drive shaft 50 and a second drive apparatus 60. The proximal end of the second drive shaft 50 is disposed within the vacuum cartridge 10, and the distal end of the second drive shaft 50 is connected to the sampling mechanism 20. The second drive device 60 is coupled to the second drive shaft 50 and can be used to drive the second drive shaft 50 to rotate to drive the sampling mechanism 20 to sample.
Fig. 3 illustrates a schematic structural view of sampling mechanism 20 according to some embodiments of the present disclosure.
As shown in fig. 3, in some embodiments of the present disclosure, sampling mechanism 20 may include a base 21, a first slide mechanism 22, a second slide mechanism 23, a first sampling rack 24, and a second sampling rack 25. The base 21 is fixedly connected to the distal end of the first drive shaft 30, and the first slide mechanism 22 is provided on the base 21. The first sampling frame 24 is disposed on the first slide mechanism 22. The second slide mechanism 23 is provided on the base 21. The second sampling frame 25 is provided on the second slide mechanism 23 and cooperates with the first sampling frame 24.
As shown in fig. 3, in some embodiments of the present disclosure, the first slide mechanism 22 may include a first slide rail 221 and a first slider 222. The first slide rail 221 is disposed on the base 21. The first slider 222 is slidably disposed on the first sliding rail 221 and is fixedly connected to the first sampling frame 24. The second slide mechanism 23 may include a second slide rail 231 and a second slider 232. The second slide rail 231 is disposed on the base 21, and the second slider 232 is slidably disposed on the second slide rail 231 and fixedly connected to the second sampling frame 25.
As shown in fig. 3, in some embodiments of the present disclosure, the first slider 222 may include a first rack 2221 and the second slider 232 may include a second rack 2321, the first rack 2221 and the second rack 2321 being disposed opposite. The second drive shaft 50 may further include a gear 51 disposed at the distal end, where the gear 51 is engaged with the first rack 2221 and the second rack 2321, and can be used to drive the first rack 2221 and the second rack 2321 to move in opposite directions, so as to drive the first slider 222 and the second slider 232 to move, so as to drive the first sampling rack 24 and the second sampling rack 25 to open or close.
Fig. 4 illustrates a schematic structural view of a first rail 221 according to some embodiments of the present disclosure. In some embodiments of the present disclosure, the first sliding rail 221 and the second sliding rail 231 are similar in structure, and the first sliding rail 221 is taken as an example for illustration, and the second sliding rail 231 is not described again.
As shown in fig. 1-4, in some embodiments of the present disclosure, the first slide rail 221 includes first cross rollers (e.g., first cross roller 2211a, first cross roller 2211 b) disposed laterally. The first slider 222 includes a first cross roller (e.g., a first cross roller
2211A, first cross roller 2211 b) are a sliding fit of the first grooves (e.g., first grooves 2221a, first grooves 2221 b). The second slide rail 231 may include second cross rollers (e.g., second cross roller 2311a, second cross roller 2311 b) disposed at the side, and the second slider 232 may include second grooves (e.g., second grooves 2321a, second grooves 2321 b) that slidably mate with the second cross rollers (e.g., second cross roller 2311a, second cross roller 2311 b)
2321B) . By introducing cross rollers (e.g., first cross roller 2211a, first cross roller 2211b, second cross roller 2311a, second cross roller 2311 b) and grooves (e.g., first groove 2221a, first groove 2221b, second groove 2321a, second groove 2321 b), slides (e.g., first slide 222, second slide 232) may be made to slide more smoothly on slides (e.g., first slide 221, second slide 231), and load capacity may be increased, enabling heavy-duty flipping, sampling operations for heavier samples.
As shown in fig. 1-4, in some embodiments of the present disclosure, the first sampling shelf 24 includes at least one first sampling finger (e.g., first sampling finger 241a, first sampling finger 241b, first sampling finger 241c, first sampling finger 241 d). The first sampling fingers (e.g., first sampling finger 241a, first sampling finger 241b, first sampling finger 241c, first sampling finger 241 d) include a first engagement structure (not shown) that can be used to mate with a first positioning structure of a sample holder (shown in fig. 5) of the sample 200. The second sampling rack 25 includes at least one second sampling finger (e.g., second sampling finger 251a, second sampling finger 251b, second sampling finger 251c, second sampling finger 251 d), the second sampling finger (e.g., second sampling finger 251a, second sampling finger 251b, second sampling finger 251c, second sampling finger 251 d) including a second engagement structure (e.g., second engagement structure 2511a, second engagement structure 2511b, second engagement structure 2511c, second engagement structure 2511 d) that is operable to mate with a second positioning structure of a sample holder (shown in fig. 5) of the sample 200.
Those skilled in the art will appreciate that while in some embodiments of the present disclosure the number of first sampling fingers (e.g., first sampling finger 241a, first sampling finger 241b, first sampling finger 241c, first sampling finger 241 d) and second sampling fingers (e.g., second sampling finger 251a, second sampling finger 251b, second sampling finger 251c, second sampling finger 251 d) is four, the number of first sampling fingers and second sampling fingers may be greater than four or less than four to mate with the sample holder of sample 200. The first positioning structure or the second positioning structure of the sample holder of the sample 200 and the first engagement structure of the first sampling finger or the second engagement structure of the second sampling finger may take any suitable form. For example, as shown in fig. 3, the second snap feature may include a step and protrusion feature for mating with the sample holder edge and groove feature of the second positioning feature. The first positioning structure or the second positioning structure, and the first clamping structure or the second clamping structure may also adopt a magnetic attraction structure, a buckling structure, and the like, and the disclosure is not limited in this respect. The clamping structure on the sampling finger can be suitable for various different types of sample holders, and only similar positioning structures are required to be formed on the different types of sample holders, so that the application range of the vacuum sampling device 100 can be remarkably improved, the universality is enhanced, and the sampling process can be programmed and automated.
As shown in fig. 1-4, in some embodiments of the present disclosure, the first drive shaft 30 may include a first transmission magnet assembly 31 disposed at a proximal end. The first driving means 40 may include a first motor 41 and a first driving magnet assembly 42 disposed outside the vacuum drum 10 and magnetically coupled with the first driving magnet assembly 31. The first driving magnetic assembly 42 is coupled to an output end of the first motor 41 (e.g., coupled by a timing belt, gear engagement, etc.) and rotates under the driving of the first motor 41, so as to rotate the first driving shaft 30, thereby driving the sampling mechanism 20 to turn.
As shown in fig. 1-4, the second drive shaft 50 includes a second drive magnet assembly 52 disposed at a proximal end. The second drive means 60 may comprise a second motor 61 and a second drive magnet assembly 62 arranged outside the vacuum drum 10 and magnetically coupled to the second transmission magnet assembly 52. The second driving magnetic assembly 62 is coupled to an output end of the second motor 61 (e.g., coupled by a timing belt, gear engagement, etc.) and rotates under the driving of the second motor 61 to rotate the second driving shaft 50, so as to drive the sampling mechanism 20 to open or close.
As shown in fig. 1-4, in some embodiments of the present disclosure, the first drive shaft 30 is sleeved outside the second drive shaft 50, and the second drive device 60 cooperatively drives the second drive shaft 50 to rotate to hold the sampling mechanism 20 open or closed when the first drive device 40 drives the sampling mechanism to flip. The turning of the sample may be coordinated and automatically achieved by automatic control, enhancing the automation and intelligence of the vacuum sampling device 100.
The vacuum sampling apparatus 100 of some embodiments of the present disclosure can solve one or more of the following problems in the conventional art: the turnover operation is complicated, the quality of the coating is affected, the coating efficiency is low, the large-scale production cannot be realized, and the technical effects of simplifying the turnover operation steps, improving the coating quality, improving the coating efficiency and being widely applicable to various samples can be realized.
Fig. 5 illustrates a schematic diagram of a vacuum processing system 1000 according to some embodiments of the present disclosure.
As shown in fig. 5, the vacuum processing system 1000 may include a vacuum chamber 300 and a vacuum sampling apparatus 100. The vacuum cylinder 10 of the vacuum sampling apparatus 100 is vacuum-tightly connected to the vacuum chamber 300. The vacuum sampling device 100 grips the sample holder of the sample 200 by driving the first sampling frame 24 and the second sampling frame 25 to open and close, and then drives the first driving shaft 30 to rotate to drive the sampling mechanism 20 and the sample 200 to turn over, thereby realizing rapid gripping and turning over of the sample 200, and facilitating the treatment of the front surface and the back surface of the sample 200.
The vacuum processing system 1000 of some embodiments of the present disclosure is capable of solving one or more of the following problems in the conventional art: the processing operation is complex, the coating quality is low, the coating efficiency is low, and the technical effects of simplifying the operation, improving the coating quality and the coating efficiency and being suitable for production can be realized.
It should be noted that the foregoing is merely exemplary embodiments of the present disclosure and are not intended to limit the present disclosure, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the present disclosure are intended to be included within the scope of the present disclosure.
Claims (10)
1. A vacuum sampling apparatus, comprising:
A vacuum cylinder;
The sampling mechanism is arranged outside the vacuum cylinder;
A first drive shaft, a proximal end of which is disposed within the vacuum barrel, and a distal end of which is connected to the sampling mechanism; and
And the first driving device is coupled with the first driving shaft and is used for driving the first driving shaft to rotate so as to drive the sampling mechanism to turn over.
2. The vacuum sampling device of claim 1, further comprising:
A second drive shaft, a proximal end of which is disposed within the vacuum barrel, and a distal end of which is connected to the sampling mechanism; and
And the second driving device is coupled with the second driving shaft and is used for driving the second driving shaft to rotate so as to drive the sampling mechanism to sample.
3. The vacuum sampling apparatus of claim 2, wherein the sampling mechanism comprises:
a base fixedly connected with the distal end of the first drive shaft;
A first sliding mechanism arranged on the base;
the first sampling frame is arranged on the first sliding mechanism;
A second sliding mechanism arranged on the base; and
And the second sampling frame is arranged on the second sliding mechanism and matched with the first sampling frame.
4. A vacuum sampling apparatus according to claim 3, wherein,
The first slide mechanism includes:
The first sliding rail is arranged on the base; and
A first sliding block which is arranged on the first sliding rail in a sliding way and is fixedly connected with the first sampling frame, and
The second slide mechanism includes:
the second sliding rail is arranged on the base; and
The second sliding block is arranged on the second sliding rail in a sliding manner and is fixedly connected with the second sampling frame.
5. A vacuum sampling apparatus according to claim 4, wherein,
The first sliding block comprises a first rack;
the second sliding block comprises a second rack, and the first rack and the second rack are oppositely arranged; and
The second driving shaft further comprises a gear arranged at the far end, the gear is meshed with the first rack and the second rack and used for driving the first rack and the second rack to move in opposite directions and driving the first sliding block and the second sliding block to move so as to drive the first sampling frame and the second sampling frame to open or close.
6. A vacuum sampling apparatus according to claim 4, wherein,
The first sliding rail comprises a first cross roller arranged on the side surface, and the first sliding block comprises a first groove in sliding fit with the first cross roller; and/or
The second slide rail includes a second cross roller disposed on a side surface, and the second slider includes a second groove in sliding engagement with the second cross roller.
7. A vacuum sampling apparatus according to claim 3, wherein,
The first sampling frame comprises at least one first sampling finger, and the first sampling finger comprises a first clamping structure matched with a first positioning structure of the sample holder; and/or
The second sampling rack comprises at least one second sampling finger, and the second sampling finger comprises a second clamping structure matched with a second positioning structure of the sample holder.
8. A vacuum sampling apparatus according to claim 2, wherein,
The first driving shaft comprises a first transmission magnetic component arranged at the proximal end, the first driving device comprises a first motor and a first driving magnetic component which is arranged outside the vacuum cylinder and is magnetically coupled with the first transmission magnetic component, and the first driving magnetic component is coupled with the output end of the first motor and rotates under the driving of the first motor to drive the first driving shaft to rotate so as to drive the sampling mechanism to turn over; and/or
The second driving shaft comprises a second transmission magnetic assembly arranged at the proximal end, the second driving device comprises a second motor and a second driving magnetic assembly arranged outside the vacuum cylinder and magnetically coupled with the second transmission magnetic assembly, and the second driving magnetic assembly is coupled with the output end of the second motor and rotates under the driving of the second motor to drive the second driving shaft to rotate so as to drive the sampling mechanism to open or close.
9. A vacuum sampling apparatus according to any one of claims 2 to 8, wherein,
The first driving shaft is sleeved outside the second driving shaft, and when the first driving device drives the sampling mechanism to turn over, the second driving device cooperatively drives the second driving shaft to rotate so as to keep the sampling mechanism open or closed.
10. A vacuum processing system, comprising:
A vacuum chamber;
The vacuum sampling apparatus of any one of claims 1-9, wherein a vacuum cartridge of the vacuum sampling apparatus is in vacuum sealing connection with the vacuum chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310008483.9A CN118326386A (en) | 2023-01-04 | 2023-01-04 | Heavy-duty turnover vacuum sampling device and vacuum processing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310008483.9A CN118326386A (en) | 2023-01-04 | 2023-01-04 | Heavy-duty turnover vacuum sampling device and vacuum processing system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118326386A true CN118326386A (en) | 2024-07-12 |
Family
ID=91764821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310008483.9A Pending CN118326386A (en) | 2023-01-04 | 2023-01-04 | Heavy-duty turnover vacuum sampling device and vacuum processing system |
Country Status (1)
| Country | Link |
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| CN (1) | CN118326386A (en) |
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2023
- 2023-01-04 CN CN202310008483.9A patent/CN118326386A/en active Pending
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