CN118188736B - Ultralow frequency vibration isolation platform based on Stewart configuration - Google Patents
Ultralow frequency vibration isolation platform based on Stewart configuration Download PDFInfo
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- CN118188736B CN118188736B CN202410502641.0A CN202410502641A CN118188736B CN 118188736 B CN118188736 B CN 118188736B CN 202410502641 A CN202410502641 A CN 202410502641A CN 118188736 B CN118188736 B CN 118188736B
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- metal spring
- frequency vibration
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- 238000002955 isolation Methods 0.000 title claims abstract description 70
- 229910052751 metal Inorganic materials 0.000 claims abstract description 40
- 239000002184 metal Substances 0.000 claims abstract description 40
- 230000001133 acceleration Effects 0.000 claims abstract description 9
- 238000013016 damping Methods 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 230000006698 induction Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 230000005389 magnetism Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Electromagnetism (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention provides a Stewart configuration-based ultralow frequency vibration isolation platform, which comprises a base, vibration isolation legs and a top plate, wherein six vibration isolation legs are arranged, each two adjacent vibration isolation legs are connected with the bottom of the top plate and the top of the base in a mutually perpendicular mode through a spherical hinge, each vibration isolation leg comprises a push rod, a transverse plate, a first metal spring and a bottom plate, a linear bearing is arranged between each push rod and a sleeve, a support rod is vertically arranged in the middle of the bottom plate, an acceleration sensor is arranged at the bottom of each push rod, a position sensor is arranged at the bottom of the top plate, and a controller is arranged at the top of the base. The system can realize the vibration control of 0.1 Hz-300 Hz in a large range, has a wider vibration isolation belt, can realize six-degree-of-freedom vibration isolation, and has accurate positioning and wide application range.
Description
Technical Field
The invention relates to the technical field of special devices for semiconductors, in particular to an ultralow frequency vibration isolation platform based on a Stewart configuration.
Background
At present, the semiconductor industry rapidly develops, the precision requirement of semiconductor production equipment is higher and higher, the equipment is sensitive to the requirements of environments such as micro-vibration and the like, the yield of the equipment is reduced by a small amount of micro-vibration, and even the equipment cannot work normally, so that the isolation of the micro-vibration is more and more important.
The Stewart platform parallel mechanism has the characteristics of high rigidity, high bearing capacity, non-accumulated position errors and the like, and is complementary with the serial mechanism in application, so that the Stewart platform parallel mechanism becomes a research hot spot of space mechanics. At present, the Stewart platform parallel mechanism has wide application in the industries of aviation, aerospace, submarine operation, underground exploitation, manufacturing and assembly and the like. The landing leg of the traditional Stewart platform is driven by a hydraulic cylinder, so that the device is heavy and has low precision and certain limitation. In order to improve the positioning accuracy, a Stewart platform using a linear motor and a piezoelectric driver as a driving device appears, and the positioning accuracy is improved, but the bearing capacity of the Stewart platform is obviously reduced, and the vibration isolation belt is narrower, so that the application range is smaller. Although a servo motor is adopted as a Stewart platform of a driving device, the positioning precision is better than that of a hydraulic cylinder, and the micro-vibration control can not be met.
Disclosure of Invention
The invention aims to provide an ultralow frequency vibration isolation platform based on a Stewart configuration so as to solve the problems in the background technology.
The technical scheme of the invention is realized as follows: the ultra-low frequency vibration isolation platform based on Stewart configuration comprises a base, vibration isolation legs and a top plate, wherein six vibration isolation legs are arranged, each two adjacent vibration isolation legs are connected with the bottom of the top plate and the top of the base through spherical hinges in a mutually perpendicular mode, each vibration isolation leg comprises a push rod, a transverse plate, a first metal spring and a bottom plate, the push rods vertically penetrate through the centers of the transverse plates and are welded and fixed with the transverse plates, the left side and the right side of the bottom of the transverse plate are respectively and vertically connected with the top of the bottom plate, a sleeve is sleeved at the lower part of the push rod, a magnetic isolation plate is vertically sleeved at the outer side of the sleeve, a second metal spring is vertically connected between the left side and the right side of the top of the magnetic isolation plate and the bottom of the transverse plate, a first permanent magnet which is in a circular ring shape is arranged at the periphery of the transverse plate bottom and the periphery of the push rods, a first electromagnetic coil which is in a circular ring shape is arranged at the position corresponding to the first permanent magnet vertically, the magnetic shield is characterized in that a third metal spring is vertically connected between the left side and the right side of the bottom of the magnetic shield and the bottom plate, a ball screw is installed at the bottom of the sleeve through a ball nut, the bottom of the ball screw is connected with the center of the bottom plate through a bearing, a second permanent magnet which is circular is installed at the top of the bottom plate and the periphery of the ball screw, a second electromagnetic coil which is circular is installed at the bottom of the magnetic shield and the periphery of the sleeve, a copper plate which is circular in structure is installed between the outer side of the ball screw, the second permanent magnet and the second electromagnetic coil, a linear bearing is installed between the push rod and the sleeve, a supporting rod is vertically installed in the middle of the bottom plate, an acceleration sensor is installed at the bottom of the push rod, a position sensor is also installed at the bottom of the top plate, and a controller is also installed at the top of the base.
Further, the cross plates and the bottom plates are made of stainless steel plates and have circular structures with the same diameter.
Further, the magnetic shield plate is made of aluminum alloy plate into a circular structure.
Further, the push rod and the ball screw are inserted into the sleeve, and a gap is reserved between the push rod and the ball screw.
Further, a first cushion block is arranged between the first metal spring and the transverse plate and between the first metal spring and the bottom plate.
Further, a second cushion block is arranged between the second metal spring and the magnetism isolating plate as well as between the second metal spring and the transverse plate.
Further, a third backing plate is arranged between the third metal spring and the magnetic isolation plate as well as between the third metal spring and the bottom plate.
Further, the controller is connected with the first electromagnetic coil, the second electromagnetic coil, the acceleration sensor and the position sensor through cables.
The beneficial effects of the invention are as follows:
The invention realizes the bearing requirement based on the traditional Stewart structure through twelve first metal springs of six orthogonal vibration isolation legs, and has larger bearing capacity; and three groups of six metal springs are arranged in each vibration isolation leg to form a series-parallel structure so as to realize three-time vibration reduction of the high-frequency vibration source, and meanwhile, an eddy current damping system with adjustable parallel connection is used for realizing four-time vibration reduction of the three-time vibration reduction of the high-frequency vibration source, so that higher vibration frequency can be reduced through four-time vibration reduction, and electromagnetic driving vibration reduction is realized by controlling the current of an electromagnetic coil when aiming at the low-frequency vibration source, so as to reduce the vibration of the low-frequency vibration source.
The system can realize the vibration control of 0.1 Hz-300 Hz in a large range, has a wider vibration isolation belt, can realize six-degree-of-freedom vibration isolation, and has accurate positioning and wide application range.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic structural view of the vibration isolation leg of the present invention.
The vibration isolation device comprises a base, 2-vibration isolation legs, 201-push rods, 202-transverse plates, 203-first metal springs, 204-bottom plates, 205-sleeves, 206-magnetic isolation plates, 207-second metal springs, 208-first permanent magnets, 209-first electromagnetic coils, 210-third metal springs, 211-second permanent magnets, 212-second electromagnetic coils, 213-ball screws, 214-ball screw nuts, 215-copper plates, 216-linear bearings, 217-bearings, 218-supporting rods, 219-acceleration sensors, 220-first cushion blocks, 221-second cushion blocks, 222-third cushion blocks, 3-top plates, 4-spherical hinges, 5-position sensors and 6-controllers.
Detailed Description
The technical solutions of the present invention will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1-2, the ultralow frequency vibration isolation platform based on Stewart configuration comprises a base, vibration isolation legs and a top plate, wherein six vibration isolation legs are arranged, each two adjacent vibration isolation legs are connected with the bottom of the top plate and the top of the base through spherical hinges in a mutually perpendicular mode, each vibration isolation leg comprises a push rod, a transverse plate, a first metal spring and a bottom plate, the push rod vertically penetrates through the center of the transverse plate and is fixedly welded with the transverse plate, the left side and the right side of the bottom of the transverse plate are respectively and vertically connected with the top of the bottom plate, a sleeve is sleeved at the lower part of the push rod, a magnetic isolation plate is vertically sleeved outside the sleeve, a first permanent magnet which is in a circular ring shape is vertically arranged at the top of the magnetic isolation plate and the periphery of the sleeve, a first electromagnetic coil which is in a circular ring shape is arranged at the periphery of the transverse plate, a third metal spring is vertically connected between the left side and the right side of the bottom of the transverse plate and the bottom plate, a ball-shaped acceleration sensor is arranged at the periphery of the ball-shaped electromagnetic coil which is in a circular ring shape, a sleeve is arranged at the periphery of the bottom plate, a ball-shaped magnetic induction coil is also arranged at the periphery of the magnetic induction plate, a ball-shaped magnetic induction device is arranged at the periphery of the ball-shaped electromagnetic coil which is arranged between the bottom of the bottom plate and the top plate, and the ball-shaped magnetic induction device is arranged at the periphery of the magnetic induction device, and the ball-shaped sensor is arranged at the periphery, the top of the base is also provided with a controller.
The transverse plate and the bottom plate are made of stainless steel plates and have circular structures with the same diameter.
The magnetic isolation plate is made of aluminum alloy plates into a circular structure.
The push rod and the ball screw are inserted into the sleeve, and a gap is reserved between the push rod and the ball screw.
And a first cushion block is further arranged between the first metal spring and the transverse plate and between the first metal spring and the bottom plate.
And a second cushion block is also arranged between the second metal spring and the magnetism isolating plate and between the second metal spring and the transverse plate.
And a third backing plate is also arranged between the third metal spring and the magnetic isolation plate and between the third metal spring and the bottom plate.
The controller is connected with the first electromagnetic coil, the second electromagnetic coil, the acceleration sensor and the position sensor through cables.
When in operation, the precise instrument is arranged on the top plate 1, and the weight of the precise instrument is mainly borne by the first metal springs 203 of the vibration isolation legs 2; the precision instrument generates vibration, collects a vibration signal of the top plate 3 through the position sensor 5 and the acceleration sensor 219, and then transmits the vibration signal to the controller 6. During high-frequency vibration source, the second metal spring 207 and the third metal spring 210 form a serial vibration isolation system, the serial vibration isolation system and the first metal spring 203 form a parallel vibration isolation system to primarily damp the high-frequency vibration source, meanwhile, the movement of the magnetic isolation plate 206 drives the movement of the ball screw nut 214 so as to enable the ball screw 213 to rotate, vertical vibration is converted into rotary motion at the moment, the copper plate 215 rotates along with the ball screw 213, due to the vertical magnetic field between the second permanent magnet 211 and the second electromagnetic coil 212, when the copper plate 215 rotates in the vertical magnetic field, an eddy current is generated, the magnetic field excited by the eddy current is opposite to the vertical magnetic field, so that a damping effect is further achieved, and the magnitude of the current of the second electromagnetic coil 212 can be controlled through the controller 6, so that the magnitude of the vertical magnetic field is controlled, and the damping magnitude of the eddy current is regulated, and the damping performance of the eddy current is regulated; at the time of low-frequency vibration source, the controller 6 controls the current of the first electromagnetic coil 209 so as to control the magnetic field between the first electromagnetic coil and the first permanent magnet 208 to realize electromagnetic driving vibration reduction.
In addition, the six vibration isolation legs 2 of the vibration isolation platform can be independently driven respectively, and six free vibration isolation can be realized up and down, front and back, left and right, around the X axis, around the Y axis and around the Z axis.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the invention.
Claims (8)
1. The ultra-low frequency vibration isolation platform based on Stewart configuration comprises a base, vibration isolation legs and a top plate, and is characterized in that six vibration isolation legs are arranged, each two adjacent vibration isolation legs are connected with the bottom of the top plate and the top of the base through spherical hinges in a mutually vertical mode, each vibration isolation leg comprises a push rod, a transverse plate, a first metal spring and a bottom plate, the push rods vertically penetrate through the center of the transverse plate and are welded and fixed with the transverse plate, the left side and the right side of the bottom of the transverse plate are respectively and vertically connected with the top of the bottom plate, a sleeve is sleeved at the lower part of the push rod, a magnetic isolation plate is vertically sleeved at the outer side of the sleeve, a second metal spring is vertically connected between the left side and the right side of the top of the magnetic isolation plate and the bottom of the transverse plate, a first permanent magnet which is in a circular ring shape is arranged at the periphery of the sleeve, the bottom of the transverse plate, the periphery of the push rod and the vertical corresponding position of the first permanent magnet are provided with a first electromagnetic coil which is in a circular ring shape, a third metal spring is vertically connected between the left side and the right side of the bottom of the magnetic isolation plate and the bottom plate, the bottom of the sleeve is provided with a ball screw through a ball nut, the bottom of the ball screw is connected with the center of the bottom plate through a bearing, the top of the bottom plate and the periphery of the ball screw are provided with a second permanent magnet which is in a circular ring shape, the periphery of the magnetic isolation plate bottom and the sleeve are provided with a second electromagnetic coil which is in a circular ring shape, a copper plate which is in a circular structure is arranged between the outer side of the ball screw and the second electromagnetic coil, a linear bearing is arranged between the push rod and the sleeve, a strut is vertically arranged in the middle of the bottom plate, the bottom of the push rod is provided with an acceleration sensor, the bottom of the top plate is also provided with a position sensor, a controller is also arranged at the top of the base;
The precise instrument is arranged on the top plate, and the weight of the precise instrument is mainly borne by the first metal springs of the vibration isolation legs; the precise instrument generates vibration, a top plate vibration signal is collected through the position sensor and the acceleration sensor, and then the vibration signal is transmitted to the controller; when the high-frequency vibration source is formed, the second metal spring and the third metal spring form a serial vibration isolation system, the serial vibration isolation system and the first metal spring form a parallel vibration isolation system to primarily damp the high-frequency vibration source, meanwhile, the movement of the magnetic isolation plate drives the ball screw nut to move, so that the ball screw rotates, vertical vibration is converted into rotary motion at the moment, the copper plate rotates along with the ball screw, due to the fact that a vertical magnetic field exists between the second permanent magnet and the second electromagnetic coil, when the copper plate rotates in the vertical magnetic field, an eddy current is generated, the magnetic field excited by the eddy current is opposite to the vertical magnetic field, damping effect is generated, further damping effect is achieved, the current of the second electromagnetic coil can be controlled through the controller, the damping size of the eddy current is further controlled, and the damping performance of the eddy current is adjusted; when the low-frequency vibration source is used, the controller controls the current of the first electromagnetic coil so as to control the magnetic field between the first electromagnetic coil and the first permanent magnet to realize electromagnetic driving vibration reduction.
2. The ultralow frequency vibration isolation platform based on the Stewart configuration according to claim 1, wherein the transverse plates and the bottom plates are made of stainless steel plates and have circular structures with the same diameter.
3. The ultralow frequency vibration isolation platform based on the Stewart configuration according to claim 1, wherein the magnetic isolation plate is made of an aluminum alloy plate into a circular structure.
4. The ultralow frequency vibration isolation platform based on the Stewart configuration according to claim 1, wherein the push rod and the ball screw are inserted into the sleeve, and a gap is reserved between the push rod and the ball screw.
5. The ultralow frequency vibration isolation platform based on the Stewart configuration according to claim 1, wherein a first cushion block is further arranged between the first metal spring and the transverse plate and between the first metal spring and the bottom plate.
6. The ultralow frequency vibration isolation platform based on the Stewart configuration according to claim 1, wherein a second cushion block is further arranged between the second metal spring and the magnetic isolation plate and between the second metal spring and the transverse plate.
7. The ultralow frequency vibration isolation platform based on the Stewart configuration according to claim 1, wherein a third backing plate is further arranged between the third metal spring and the magnetic isolation plate and between the third metal spring and the bottom plate.
8. The ultralow frequency vibration isolation platform based on the Stewart configuration according to claim 1, wherein the controller is connected with the first electromagnetic coil, the second electromagnetic coil, the acceleration sensor and the position sensor through cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410502641.0A CN118188736B (en) | 2024-04-25 | 2024-04-25 | Ultralow frequency vibration isolation platform based on Stewart configuration |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410502641.0A CN118188736B (en) | 2024-04-25 | 2024-04-25 | Ultralow frequency vibration isolation platform based on Stewart configuration |
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| CN118188736A CN118188736A (en) | 2024-06-14 |
| CN118188736B true CN118188736B (en) | 2024-10-22 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104842737A (en) * | 2014-02-15 | 2015-08-19 | 通用汽车环球科技运作有限责任公司 | Method and apparatus for suspension damping |
| CN111005973A (en) * | 2020-01-06 | 2020-04-14 | 杨凯文 | Remote sensor damping structure |
| CN116753265A (en) * | 2023-07-24 | 2023-09-15 | 大连地拓电子工程技术有限公司 | Four-degree-of-freedom vibration-proof platform based on Stewart derivative structure |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3807655A1 (en) * | 1988-03-09 | 1989-09-28 | Bosch Gmbh Robert | DEVICE FOR VIBRATION DAMPING |
| CN111075873B (en) * | 2020-01-07 | 2021-04-23 | 长沙理工大学 | Load-variable ultralow frequency vibration isolator and design method thereof |
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- 2024-04-25 CN CN202410502641.0A patent/CN118188736B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104842737A (en) * | 2014-02-15 | 2015-08-19 | 通用汽车环球科技运作有限责任公司 | Method and apparatus for suspension damping |
| CN111005973A (en) * | 2020-01-06 | 2020-04-14 | 杨凯文 | Remote sensor damping structure |
| CN116753265A (en) * | 2023-07-24 | 2023-09-15 | 大连地拓电子工程技术有限公司 | Four-degree-of-freedom vibration-proof platform based on Stewart derivative structure |
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