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CN118186337A - Stainless steel surface Cr2N chromizing nitride layer and preparation method thereof - Google Patents

Stainless steel surface Cr2N chromizing nitride layer and preparation method thereof Download PDF

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CN118186337A
CN118186337A CN202410297260.3A CN202410297260A CN118186337A CN 118186337 A CN118186337 A CN 118186337A CN 202410297260 A CN202410297260 A CN 202410297260A CN 118186337 A CN118186337 A CN 118186337A
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stainless steel
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chromized
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nitride layer
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刘林涛
王少鹏
何飞
郭树炜
王培�
吕海兵
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Northwest Institute for Non Ferrous Metal Research
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C12/00Solid state diffusion of at least one non-metal element other than silicon and at least one metal element or silicon into metallic material surfaces

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Abstract

本发明公开了一种不锈钢表面Cr2N渗铬氮化层,由以Cr2N为主相的氮化层组成;本发明还公开了该渗铬氮化层的制备方法:步骤一、渗铬层的制备:将表面洁净的不锈钢基材放置于表面冶金设备中,抽真空至1.0×10‑4Pa以下,然后通入氩气制备渗铬层;步骤二、渗铬氮化层的制备:步骤一中渗铬层制备完成后,将表面冶金设备再次抽真空至1.0×10‑2Pa以下,然后通入氮气和氩气制备渗铬氮化层。本发明的制备方法通过高功率等离子体表面冶金技术制备不锈钢表面Cr2N渗铬氮化层,能有效降低反应温度、缩短反应时间,去除了包埋渗铬‑固溶渗氮技术中装粉、除粉等工序,极大缩短了生产周期,避免了粉尘污染问题,适合于工业化生产。

The invention discloses a Cr2N chromized nitriding layer on the surface of stainless steel, which is composed of a nitriding layer with Cr2N as the main phase; the invention also discloses a preparation method of the chromized nitriding layer: step one, preparation of the chromized layer: placing a stainless steel substrate with a clean surface in a surface metallurgical device, evacuating to below 1.0×10 ‑4 Pa, and then introducing argon to prepare the chromized layer; step two, preparation of the chromized nitriding layer: after the chromized layer is prepared in step one, the surface metallurgical device is evacuated again to below 1.0×10 ‑2 Pa, and then nitrogen and argon are introduced to prepare the chromized nitriding layer. The preparation method of the invention prepares the Cr2N chromized nitriding layer on the surface of stainless steel by high-power plasma surface metallurgy technology, can effectively reduce the reaction temperature, shorten the reaction time, remove the powder loading, powder removal and other processes in the embedded chromized solid solution nitriding technology, greatly shorten the production cycle, avoid the dust pollution problem, and is suitable for industrial production.

Description

一种不锈钢表面Cr2N渗铬氮化层及其制备方法A Cr2N chromized nitrided layer on stainless steel surface and preparation method thereof

技术领域Technical Field

本发明属于防护涂层制备技术领域,尤其是涉及一种不锈钢表面Cr2N渗铬氮化层及其制备方法。The invention belongs to the technical field of protective coating preparation, and in particular relates to a Cr 2 N chromized nitrided layer on the surface of stainless steel and a preparation method thereof.

背景技术Background technique

钠冷快堆的稳定运行与堆芯结构材料的特性密切相关,实践证明,奥氏体不锈钢可广泛用作钠冷快堆的套筒、围板、栅板联箱等关键结构材料。然而,钠冷快堆堆芯温度高、辐照剂量大、含杂质的液钠腐蚀性强,关键结构材料奥氏体不锈钢易发生腐蚀,部件材料相互运动时还会出现摩擦磨损和微动磨损。因此,为了保证钠冷快堆达到至少30年的运行寿命,通常需要在不锈钢表面制备厚度在80μm以上的Cr2N防护层(即渗铬氮化层),提高其耐蚀、耐磨性能,保障反应堆的长期安全运行。The stable operation of sodium-cooled fast reactors is closely related to the characteristics of core structural materials. Practice has proved that austenitic stainless steel can be widely used as key structural materials such as sleeves, enclosures, grid headers, etc. of sodium-cooled fast reactors. However, the core temperature of sodium-cooled fast reactors is high, the irradiation dose is large, and the liquid sodium containing impurities is highly corrosive. The key structural material austenitic stainless steel is prone to corrosion, and friction wear and fretting wear will occur when the component materials move against each other. Therefore, in order to ensure that the sodium-cooled fast reactor reaches an operating life of at least 30 years, it is usually necessary to prepare a Cr 2 N protective layer (i.e., chromized nitriding layer) with a thickness of more than 80μm on the stainless steel surface to improve its corrosion resistance and wear resistance, and ensure the long-term safe operation of the reactor.

目前,我国钠冷快堆中渗铬氮化层的制备方法是包埋渗铬-固溶渗氮技术,该技术存在显著的缺点:1)反应温度过高、时间过长,导致基材晶粒度严重增大,影响基材的拉伸强度、耐蚀强度等性能;2)工业生产周期在400h/炉,能耗过高,周期过长;3)劳动强度极大且粉尘污染严重。因此,目前亟需提出一种反应温度低、制备周期短的Cr2N渗铬氮化层制备方法。At present, the preparation method of chromized nitriding layer in sodium-cooled fast reactor in China is embedded chromized-solid solution nitriding technology, which has significant disadvantages: 1) the reaction temperature is too high and the time is too long, which leads to serious increase in the grain size of the substrate, affecting the tensile strength, corrosion resistance and other properties of the substrate; 2) the industrial production cycle is 400h/furnace, the energy consumption is too high and the cycle is too long; 3) the labor intensity is extremely high and the dust pollution is serious. Therefore, it is urgent to propose a preparation method of Cr 2 N chromized nitriding layer with low reaction temperature and short preparation cycle.

发明内容Summary of the invention

本发明的目的在于克服上述现有技术中的不足,提供一种不锈钢表面Cr2N渗铬氮化层的制备方法。该制备方法通过采用高功率等离子体表面冶金方法制备Cr2N渗铬氮化层,该方法能够获得瞬时超高能量的Cr、N等离子体,在较低的反应温度环境下,使Cr、N等离子体先后在不锈钢工件表面快速扩散、反应,在较短的扩渗时间内,完成不锈钢基材表面Cr2N渗铬氮化层的制备,解决了现有技术在制备Cr2N渗铬氮化层时工件反应温度高、生产周期长的问题。The purpose of the present invention is to overcome the deficiencies in the above-mentioned prior art and provide a method for preparing a Cr 2 N chromized nitriding layer on the surface of stainless steel. The preparation method prepares the Cr 2 N chromized nitriding layer by adopting a high-power plasma surface metallurgy method. The method can obtain instantaneous ultra-high energy Cr and N plasmas, and in a relatively low reaction temperature environment, the Cr and N plasmas are successively rapidly diffused and reacted on the surface of the stainless steel workpiece, and the preparation of the Cr 2 N chromized nitriding layer on the surface of the stainless steel substrate is completed in a relatively short diffusion time, thereby solving the problems of high reaction temperature of the workpiece and long production cycle when preparing the Cr 2 N chromized nitriding layer in the prior art.

本发明采用的技术方案是:一种不锈钢表面Cr2N渗铬氮化层的制备方法,其特征在于,该方法包括以下步骤:The technical solution adopted by the present invention is: a method for preparing a Cr 2 N chromized nitriding layer on the surface of stainless steel, characterized in that the method comprises the following steps:

步骤一、渗铬层的制备:将表面洁净的不锈钢基材和Cr靶材放置于高功率等离子体表面冶金设备中,抽真空至1.0×10-4Pa以下,然后通入氩气,通过氩离子轰击Cr靶材产生Cr等离子体,在电场的作用下,使Cr等离子体到达不锈钢基材表面,并发生扩渗反应,进行渗铬层的制备;Step 1: Preparation of chromized layer: Place a clean stainless steel substrate and a Cr target in a high-power plasma surface metallurgy device, evacuate to below 1.0×10 -4 Pa, then introduce argon gas, bombard the Cr target with argon ions to generate Cr plasma, and under the action of the electric field, the Cr plasma reaches the surface of the stainless steel substrate and undergoes a diffusion reaction to prepare the chromized layer;

步骤二、渗铬氮化层的制备:步骤一中渗铬层制备完成后,将高功率等离子体表面冶金设备再次抽真空至1.0×10-2Pa以下,然后通入氮气和氩气,使得高功率等离子体表面冶金设备中的不锈钢基材处于辉光放电状态,使氮气电离形成N等离子体,并在电场力的作用下,使N等离子体与不锈钢基体表面的渗铬层发生氮化反应,进行Cr2N渗铬氮化层的制备。Step 2, preparation of chromized nitriding layer: After the chromized layer is prepared in step 1, the high-power plasma surface metallurgy equipment is evacuated again to below 1.0×10 -2 Pa, and then nitrogen and argon are introduced to make the stainless steel substrate in the high-power plasma surface metallurgy equipment in a glow discharge state, so that the nitrogen is ionized to form N plasma, and under the action of the electric field force, the N plasma and the chromized layer on the surface of the stainless steel substrate undergo a nitriding reaction, thereby preparing the Cr 2 N chromized nitriding layer.

本发明中通过采用高功率等离子体表面冶金方法进行Cr2N渗铬氮化层的制备,制备过程中仅需使用高功率等离子体表面冶金设备,降低了不锈钢基材表面Cr2N渗铬氮化层的制备难度与时长。In the present invention, a high-power plasma surface metallurgy method is used to prepare the Cr 2 N chromized nitriding layer. Only high-power plasma surface metallurgy equipment is needed in the preparation process, thereby reducing the difficulty and time of preparing the Cr 2 N chromized nitriding layer on the surface of the stainless steel substrate.

需要说明的是所述高功率等离子体表面冶金设备中的高功率是指设备功率在1000W~3000W。It should be noted that the high power in the high power plasma surface metallurgy equipment refers to equipment power of 1000W to 3000W.

上述的一种不锈钢表面Cr2N渗铬氮化层的制备方法,其特征在于,步骤一中所述氩气体积纯度为99.999%,氩气流量为30sccm~50sccm。The above method for preparing a Cr 2 N chromized nitriding layer on a stainless steel surface is characterized in that the volume purity of the argon gas in step 1 is 99.999% and the flow rate of the argon gas is 30 sccm to 50 sccm.

上述的一种不锈钢表面Cr2N渗铬氮化层的制备方法,其特征在于,步骤一中所述Cr靶材质量纯度大于99.95%。The above method for preparing a Cr 2 N chromized nitrided layer on a stainless steel surface is characterized in that the mass purity of the Cr target material in step 1 is greater than 99.95%.

上述的一种不锈钢表面Cr2N渗铬氮化层的制备方法,其特征在于,步骤一中所述渗铬层制备的工艺参数为:气压5Pa~50Pa,靶材极电压600V~800V,靶材极频率50kHz~100kHz,靶材极占空比5%~30%,工件极电压420V~650V,工件极频率50kHz~100kHz,工件极占空比30%~60%,工件温度900℃~1000℃,扩渗时间3h~10h。The above-mentioned method for preparing a Cr 2 N chromized nitriding layer on a stainless steel surface is characterized in that the process parameters for preparing the chromized layer in step 1 are: air pressure 5Pa-50Pa, target pole voltage 600V-800V, target pole frequency 50kHz-100kHz, target pole duty cycle 5%-30%, workpiece pole voltage 420V-650V, workpiece pole frequency 50kHz-100kHz, workpiece pole duty cycle 30%-60%, workpiece temperature 900℃-1000℃, and diffusion time 3h-10h.

本发明渗铬层制备工艺参数的优点:将靶材极电压设置为600V~800V、频率设置为50kHz~100kHz、占空比设置为5%~30%,可使高功率等离子体表面冶金设备峰值功率达到1000W以上,等离子体密度达到每立方米1018数量级,产生离化率70%以上的Cr等离子体,提高其向内扩散驱动力和扩渗反应速率;将气压设置为5Pa~50Pa时,Cr等离子体的离子自由程较大、放电状态稳定,利于Cr等离子体接近不锈钢基材表面;将工件极电压设置为420V~650V、频率设置为50kHz~100kHz、占空比设置为30%~60%,该条件下不锈钢基材处于瞬时高能量的辉光放电状态中,使不锈钢基材温度保持在900℃~1000℃即可进行Cr等离子体的扩渗反应,避免晶粒度严重长大,同时该条件下能够产生大量的放电通道,加快Cr等离子体扩渗反应速度,扩渗时间在3h~10h就可形成80μm~140μm的渗铬层。The advantages of the chromized layer preparation process parameters of the present invention are: the target electrode voltage is set to 600V-800V, the frequency is set to 50kHz-100kHz, and the duty cycle is set to 5%-30%, which can make the peak power of high-power plasma surface metallurgy equipment reach more than 1000W, and the plasma density reaches 10 per cubic meter. 18 orders of magnitude, generating Cr plasma with an ionization rate of more than 70%, improving its inward diffusion driving force and diffusion reaction rate; when the gas pressure is set to 5Pa~50Pa, the ion free path of the Cr plasma is large and the discharge state is stable, which is conducive to the Cr plasma approaching the surface of the stainless steel substrate; the workpiece pole voltage is set to 420V~650V, the frequency is set to 50kHz~100kHz, and the duty cycle is set to 30%~60%. Under this condition, the stainless steel substrate is in an instantaneous high-energy glow discharge state, and the temperature of the stainless steel substrate is kept at 900℃~1000℃ to carry out the diffusion reaction of Cr plasma, avoiding serious growth of grain size. At the same time, a large number of discharge channels can be generated under this condition to accelerate the diffusion reaction rate of Cr plasma. A chromized layer of 80μm~140μm can be formed within a diffusion time of 3h~10h.

上述的一种不锈钢表面Cr2N渗铬氮化层的制备方法,其特征在于,步骤一中制得的渗铬层以Fe-Cr相为主相,且Fe-Cr相中的Cr质量百分含量为80%以上。The above method for preparing a Cr 2 N chromized nitrided layer on a stainless steel surface is characterized in that the chromized layer prepared in step 1 has a Fe-Cr phase as a main phase, and the mass percentage of Cr in the Fe-Cr phase is more than 80%.

上述的一种不锈钢表面Cr2N渗铬氮化层的制备方法,其特征在于,步骤二中所述氮气体积纯度为99.999%,氮气流量为10sccm~50sccm,所述氩气体积纯度为99.999%,氩气流量为10sccm~30sccm。The above method for preparing a Cr 2 N chromized nitriding layer on a stainless steel surface is characterized in that the nitrogen volume purity in step 2 is 99.999%, the nitrogen flow rate is 10 sccm-50 sccm, and the argon volume purity is 99.999%, the argon flow rate is 10 sccm-30 sccm.

上述的一种不锈钢表面Cr2N渗铬氮化层的制备方法,其特征在于,步骤二中所述Cr2N渗铬氮化层制备的工艺参数为:气压1.0×102Pa~2.0×103Pa,工件极电压320V~600V,频率50kHz~100kHz,占空比30%~60%,辅助加热系统温度300℃~600℃,工件温度700℃~1000℃,扩渗时间3h~10h。The above-mentioned method for preparing a Cr 2 N chromized nitriding layer on a stainless steel surface is characterized in that the process parameters for preparing the Cr 2 N chromized nitriding layer in step 2 are: air pressure 1.0×10 2 Pa~2.0×10 3 Pa, workpiece pole voltage 320V~600V, frequency 50kHz~100kHz, duty cycle 30%~60%, auxiliary heating system temperature 300℃~600℃, workpiece temperature 700℃~1000℃, and diffusion time 3h~10h.

本发明Cr2N渗铬氮化层制备工艺参数的优点:将气压设置在1.0×102Pa~2.0×103Pa,可保证氮气浓度充足;将频率设置为50kHz~100kHz、占空比设置为30%~60%,在高频、低占空比的条件下,获得瞬时高能放电,缩短电弧响应时间;将辅助加热系统温度设置为300℃~600℃,能够保证不锈钢基材热稳定;将工件极电压设置为320V~600V、工件温度设置为700℃~1000℃,能够保证Cr2N形成的反应能充足;经过3h~10h的充分反应,能够将不锈钢表面形成的渗铬层转化为Cr2N渗铬氮化层。The advantages of the Cr2N chromized nitriding layer preparation process parameters of the present invention are as follows: the gas pressure is set at 1.0× 102Pa -2.0× 103Pa , which can ensure sufficient nitrogen concentration; the frequency is set at 50kHz-100kHz, and the duty cycle is set at 30%-60%, and under the conditions of high frequency and low duty cycle, instantaneous high-energy discharge is obtained, and the arc response time is shortened; the temperature of the auxiliary heating system is set at 300℃-600℃, which can ensure the thermal stability of the stainless steel substrate; the workpiece pole voltage is set at 320V-600V, and the workpiece temperature is set at 700℃-1000℃, which can ensure sufficient reaction energy for the formation of Cr2N ; after a sufficient reaction of 3h-10h, the chromized layer formed on the surface of the stainless steel can be converted into the Cr2N chromized nitriding layer.

上述的一种不锈钢表面Cr2N渗铬氮化层的制备方法,其特征在于,步骤一中所述不锈钢基材粗糙度Ra不大于2.5μm,所述不锈钢基材为316不锈钢、304不锈钢或321不锈钢。The above method for preparing a Cr 2 N chromized nitriding layer on a stainless steel surface is characterized in that the roughness Ra of the stainless steel substrate in step 1 is not greater than 2.5 μm, and the stainless steel substrate is 316 stainless steel, 304 stainless steel or 321 stainless steel.

本发明设置不锈钢基材粗糙度Ra不大于2.5μm,当不锈钢基材粗糙度Ra大于2.5μm时,会影响不锈钢基材表面的放电状态,使其打火严重,影响Cr2N渗铬氮化层生成的均匀性。The present invention sets the roughness Ra of the stainless steel substrate to be no greater than 2.5 μm. When the roughness Ra of the stainless steel substrate is greater than 2.5 μm, the discharge state of the stainless steel substrate surface will be affected, causing serious sparking and affecting the uniformity of the Cr 2 N chromized nitriding layer.

同时,本发明还公开了一种上述方法制备的不锈钢表面Cr2N渗铬氮化层,其特征在于,该Cr2N渗铬氮化层为以Cr2N为主相的氮化层。Meanwhile, the present invention also discloses a Cr 2 N chromized nitriding layer on the surface of stainless steel prepared by the above method, characterized in that the Cr 2 N chromized nitriding layer is a nitriding layer with Cr 2 N as a main phase.

上述的一种不锈钢表面Cr2N渗铬氮化层,其特征在于,所述Cr2N渗铬氮化层厚度为80μm~140μm,维氏硬度为400HV5~600HV5The above-mentioned Cr 2 N chromized nitriding layer on the surface of stainless steel is characterized in that the Cr 2 N chromized nitriding layer has a thickness of 80 μm to 140 μm and a Vickers hardness of 400 HV 5 to 600 HV 5 .

本发明与现有技术相比具有以下优点:Compared with the prior art, the present invention has the following advantages:

1、本发明通过采用高功率等离子体表面冶金方法进行不锈钢基材表面的Cr2N渗铬氮化层制备,使不锈钢基材处于辉光放电状态,同时高功率等离子体表面冶金设备的峰值功率达到1000W以上,能够获得瞬时超高能量的Cr、N等离子体,且等离子体密度达到每立方米1018数量级,有效提高等离子体的向内扩散驱动力和扩渗反应速率,使得Cr、N等离子体在较低反应温度条件下,先后在不锈钢基材表面快速扩散、反应,有效缩短了制备Cr2N渗铬氮化层时的扩渗时间,去除了传统包埋渗铬-固溶渗氮技术中装粉、除粉等工序,极大的减少了Cr2N渗铬氮化层的制备工序、缩短生产周期,同时避免了粉尘污染问题,适合于工业化生产。1. The present invention adopts a high-power plasma surface metallurgy method to prepare a Cr2N chromized nitriding layer on the surface of a stainless steel substrate, so that the stainless steel substrate is in a glow discharge state. At the same time, the peak power of the high-power plasma surface metallurgy equipment reaches more than 1000W, and instantaneous ultra-high energy Cr and N plasma can be obtained, and the plasma density reaches the order of 1018 per cubic meter, which effectively improves the inward diffusion driving force and diffusion reaction rate of the plasma, so that the Cr and N plasmas can quickly diffuse and react on the surface of the stainless steel substrate under a relatively low reaction temperature condition, effectively shortening the diffusion time when preparing the Cr2N chromized nitriding layer, eliminating the powder loading and powder removal processes in the traditional embedded chromizing-solid solution nitriding technology, greatly reducing the preparation process of the Cr2N chromized nitriding layer, shortening the production cycle, and avoiding the dust pollution problem, and being suitable for industrial production.

2、本发明的Cr2N渗铬氮化层的制备方法在较低反应温度和较短反应时间的条件下,将不锈钢表面的渗铬层转化为Cr2N渗铬氮化层,避免了不锈钢基材温度过高、反应时间过长导致的不锈钢晶粒严重长大,从而使得不锈钢基材性能受损。2. The method for preparing the Cr 2 N chromized nitriding layer of the present invention converts the chromized layer on the surface of stainless steel into the Cr 2 N chromized nitriding layer under the conditions of relatively low reaction temperature and relatively short reaction time, thereby avoiding the serious growth of stainless steel grains due to excessively high temperature of the stainless steel substrate and excessively long reaction time, thereby damaging the performance of the stainless steel substrate.

3、本发明通过Cr等离子体具有较高向内扩散驱动力及较快扩渗反应速率的特性,抑制不锈钢基材中C的向外扩散,从而避免不锈钢基材表面出现Cr-C相的情况,使渗铬层的氮化反应驱动能降低,影响Cr2N渗铬氮化层的形成。3. The present invention uses the characteristics of Cr plasma with higher inward diffusion driving force and faster diffusion reaction rate to inhibit the outward diffusion of C in the stainless steel substrate, thereby avoiding the appearance of Cr-C phase on the surface of the stainless steel substrate, reducing the nitriding reaction driving energy of the chromized layer, and affecting the formation of the Cr 2 N chromized nitriding layer.

4、本发明制备的Cr2N渗铬氮化层厚度为80μm~140μm,维氏硬度为400HV5~600HV5,并与不锈钢表面冶金结合、组织致密,适合于快中子反应堆环境下的不锈钢基材,能有效提高不锈钢基材的耐蚀性能和耐磨性能,保障快中子反应堆的长期安全运行。4. The Cr 2 N chromized nitriding layer prepared by the present invention has a thickness of 80 μm to 140 μm and a Vickers hardness of 400 HV 5 to 600 HV 5 . It is metallurgically bonded to the stainless steel surface and has a dense structure. It is suitable for stainless steel substrates in a fast neutron reactor environment and can effectively improve the corrosion resistance and wear resistance of the stainless steel substrate, thereby ensuring the long-term safe operation of the fast neutron reactor.

下面通过附图和实施例,对本发明的技术方案做进一步的详细描述。The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

图1为本发明实施例1中制得的Cr2N渗铬氮化层截面微观形貌图。FIG1 is a cross-sectional microscopic morphology of a Cr 2 N chromized nitrided layer prepared in Example 1 of the present invention.

图2为本发明实施例1中制得的Cr2N渗铬氮化层XRD图谱。FIG. 2 is an XRD spectrum of the Cr 2 N chromized nitrided layer prepared in Example 1 of the present invention.

具体实施方式Detailed ways

实施例1Example 1

本实施例包括以下步骤:This embodiment includes the following steps:

步骤一、渗铬层的制备:将表面洁净、粗糙度Ra不大于2.5μm的316不锈钢基材和质量纯度大于99.95%的Cr靶材放置于高功率等离子体表面冶金设备中,抽真空至1.0×10- 4Pa以下,然后通入体积纯度为99.999%、流量为40sccm的氩气,在保持气压为10Pa、靶材极电压为700V、靶材极频率70KHz、靶材极占空比15%、工件极电压为600V、工件极频率70KHz、工件极占空比50%、工件温度为950℃的条件下进行扩渗6h,制得渗铬层;Step 1, preparation of chromized layer: a 316 stainless steel substrate with a clean surface and a roughness Ra not greater than 2.5 μm and a Cr target with a mass purity greater than 99.95% are placed in a high-power plasma surface metallurgy device, evacuated to below 1.0×10 - 4 Pa, and then introduced with argon gas with a volume purity of 99.999% and a flow rate of 40 sccm, and the chromized layer is obtained by diffusing for 6 hours under the conditions of maintaining a gas pressure of 10 Pa, a target pole voltage of 700 V, a target pole frequency of 70 KHz, a target pole duty cycle of 15%, a workpiece pole voltage of 600 V, a workpiece pole frequency of 70 KHz, a workpiece pole duty cycle of 50%, and a workpiece temperature of 950°C;

步骤二、渗铬氮化层的制备:步骤一中渗铬层制备完成后,将高功率等离子体表面冶金设备再次抽真空至1.0×10-2Pa以下,然后通入体积纯度为99.999%、流量为30sccm的氮气和体积纯度为99.999%、流量为20sccm的氩气,在保持气压1.0×103Pa、工件极电压500V、频率70kHz、占空比50%、辅助加热系统温度500℃、工件温度850℃的条件下进行扩渗5h,制得Cr2N渗铬氮化层。Step 2, preparation of chromized nitriding layer: After the preparation of chromized layer in step 1 is completed, the high-power plasma surface metallurgy equipment is evacuated again to below 1.0×10 -2 Pa, and then nitrogen with a volume purity of 99.999% and a flow rate of 30 sccm and argon with a volume purity of 99.999% and a flow rate of 20 sccm are introduced, and the chromized nitriding layer is expanded for 5 hours under the conditions of maintaining a gas pressure of 1.0×10 3 Pa, a workpiece pole voltage of 500V, a frequency of 70kHz, a duty cycle of 50%, an auxiliary heating system temperature of 500°C, and a workpiece temperature of 850°C, to obtain a Cr 2 N chromized nitriding layer.

本实施例步骤一中的316不锈钢基材还可为304不锈钢基材或321不锈钢基材。The 316 stainless steel substrate in step 1 of this embodiment may also be a 304 stainless steel substrate or a 321 stainless steel substrate.

图1为本实施例中制得的渗铬氮化层截面微观形貌图,如图1所示,本实施例制得的渗铬氮化层厚度为98.8μm;图2为本实施例中制得的渗铬氮化层XRD图谱,如图2所示,本实施例制得的渗铬氮化层主要由Cr2N组成。FIG1 is a cross-sectional microscopic morphology of the chromized nitriding layer prepared in this embodiment. As shown in FIG1 , the thickness of the chromized nitriding layer prepared in this embodiment is 98.8 μm. FIG2 is an XRD spectrum of the chromized nitriding layer prepared in this embodiment. As shown in FIG2 , the chromized nitriding layer prepared in this embodiment is mainly composed of Cr 2 N.

对本实施例中制得的渗铬氮化层进行维氏硬度测试,测得该渗铬氮化层的维氏硬度为470HV5The Vickers hardness test was performed on the chromized nitrided layer prepared in this embodiment, and the Vickers hardness of the chromized nitrided layer was measured to be 470 HV 5 .

实施例2Example 2

本实施例包括以下步骤:This embodiment includes the following steps:

步骤一、渗铬层的制备:将表面洁净、粗糙度Ra不大于2.5μm的304不锈钢基材和质量纯度大于99.95%的Cr靶材放置于高功率等离子体表面冶金设备中,抽真空至1.0×10- 4Pa以下,然后通入体积纯度为99.999%、流量为30sccm的氩气,在保持气压为5Pa、靶材极电压为600V、靶材极频率50KHz、靶材极占空比30%、工件极电压为420V、工件极频率50KHz、工件极占空比60%、工件温度为900℃的条件下进行扩渗3h,制得渗铬层;Step 1, preparation of chromized layer: a 304 stainless steel substrate with a clean surface and a roughness Ra not greater than 2.5 μm and a Cr target with a mass purity greater than 99.95% are placed in a high-power plasma surface metallurgy device, evacuated to below 1.0×10 - 4 Pa, and then introduced with argon gas with a volume purity of 99.999% and a flow rate of 30 sccm, and the chromized layer is obtained by diffusing for 3 hours under the conditions of maintaining a gas pressure of 5 Pa, a target pole voltage of 600 V, a target pole frequency of 50 KHz, a target pole duty cycle of 30%, a workpiece pole voltage of 420 V, a workpiece pole frequency of 50 KHz, a workpiece pole duty cycle of 60%, and a workpiece temperature of 900°C;

步骤二、渗铬氮化层的制备:步骤一中渗铬层制备完成后,将高功率等离子体表面冶金设备再次抽真空至1.0×10-2Pa以下,然后通入体积纯度为99.999%、流量为10sccm的氮气和体积纯度为99.999%、流量为10sccm的氩气,在保持气压1.0×102Pa、工件极电压320V、频率50kHz、占空比30%、辅助加热系统温度300℃、工件温度700℃的条件下进行扩渗3h,制得Cr2N渗铬氮化层。Step 2, preparation of chromized nitriding layer: After the preparation of chromized layer in step 1 is completed, the high-power plasma surface metallurgy equipment is evacuated again to below 1.0× 10-2 Pa, and then nitrogen with a volume purity of 99.999% and a flow rate of 10sccm and argon with a volume purity of 99.999% and a flow rate of 10sccm are introduced, and the chromized nitriding layer is expanded for 3 hours under the conditions of maintaining a gas pressure of 1.0× 102Pa , a workpiece pole voltage of 320V, a frequency of 50kHz, a duty cycle of 30%, an auxiliary heating system temperature of 300℃, and a workpiece temperature of 700℃, to obtain a Cr2N chromized nitriding layer.

本实施例步骤一中的304不锈钢基材还可为316不锈钢基材或321不锈钢基材。The 304 stainless steel substrate in step 1 of this embodiment may also be a 316 stainless steel substrate or a 321 stainless steel substrate.

对本实施例中制得的渗铬氮化层截面进行厚度测量,测得该渗铬氮化层的厚度为80.0μm;对本实施例中制得的渗铬氮化层进行维氏硬度测试,测得该渗铬氮化层的维氏硬度为400HV5The thickness of the cross section of the chromized nitriding layer prepared in this embodiment was measured, and the thickness of the chromized nitriding layer was measured to be 80.0 μm. The Vickers hardness of the chromized nitriding layer prepared in this embodiment was tested, and the Vickers hardness of the chromized nitriding layer was measured to be 400 HV 5 .

实施例3Example 3

本实施例包括以下步骤:This embodiment includes the following steps:

步骤一、渗铬层的制备:将表面洁净、粗糙度Ra不大于2.5μm的321不锈钢基材和质量纯度大于99.95%的Cr靶材放置于高功率等离子体表面冶金设备中,抽真空至1.0×10- 4Pa以下,然后通入体积纯度为99.999%、流量为50sccm的氩气,在保持气压为50Pa、靶材极电压为800V、靶材极频率100KHz、靶材极占空比5%、工件极电压为650V、工件极频率100KHz、工件极占空比30%、工件温度为1000℃的条件下进行扩渗10h,制得渗铬层;Step 1, preparation of chromized layer: a 321 stainless steel substrate with a clean surface and a roughness Ra not greater than 2.5 μm and a Cr target with a mass purity greater than 99.95% are placed in a high-power plasma surface metallurgy device, evacuated to below 1.0×10 - 4 Pa, and then introduced with argon gas with a volume purity of 99.999% and a flow rate of 50 sccm, and the chromized layer is obtained by diffusing for 10 hours under the conditions of maintaining a gas pressure of 50 Pa, a target pole voltage of 800 V, a target pole frequency of 100 KHz, a target pole duty cycle of 5%, a workpiece pole voltage of 650 V, a workpiece pole frequency of 100 KHz, a workpiece pole duty cycle of 30%, and a workpiece temperature of 1000°C;

步骤二、渗铬氮化层的制备:步骤一中渗铬层制备完成后,将高功率等离子体表面冶金设备再次抽真空至1.0×10-2Pa以下,然后通入体积纯度为99.999%、流量为50sccm的氮气和体积纯度为99.999%、流量为30sccm的氩气,在保持气压2.0×103Pa、工件极电压600V、频率100kHz、占空比60%、辅助加热系统温度600℃、工件温度1000℃的条件下进行扩渗10h,制得Cr2N渗铬氮化层。Step 2, preparation of chromized nitriding layer: After the preparation of chromized layer in step 1, the high power plasma surface metallurgy equipment is evacuated again to below 1.0×10 -2 Pa, and then nitrogen with a volume purity of 99.999% and a flow rate of 50 sccm and argon with a volume purity of 99.999% and a flow rate of 30 sccm are introduced, and the chromized nitriding layer is expanded for 10 hours under the conditions of maintaining a gas pressure of 2.0×10 3 Pa, a workpiece pole voltage of 600V, a frequency of 100kHz, a duty cycle of 60%, an auxiliary heating system temperature of 600°C, and a workpiece temperature of 1000°C to obtain a Cr 2 N chromized nitriding layer.

本实施例步骤一中的321不锈钢基材还可为316不锈钢基材或304不锈钢基材。The 321 stainless steel substrate in step 1 of this embodiment may also be a 316 stainless steel substrate or a 304 stainless steel substrate.

对本实施例中制得的渗铬氮化层截面进行厚度测量,测得该渗铬氮化层的厚度为140.0μm;对本实施例中制得的渗铬氮化层进行维氏硬度测试,测得该渗铬氮化层的维氏硬度为600HV5The thickness of the cross section of the chromized nitriding layer prepared in this embodiment was measured, and the thickness of the chromized nitriding layer was measured to be 140.0 μm. The Vickers hardness of the chromized nitriding layer prepared in this embodiment was tested, and the Vickers hardness of the chromized nitriding layer was measured to be 600 HV 5 .

以上所述,仅是本发明的较佳实施例,并非对本发明作任何限制,凡是根据本发明技术实质对以上实施例所作的任何简单修改、变更以及等效结构变换,均仍属于本发明技术方案的保护范围内。The above description is only a preferred embodiment of the present invention and does not limit the present invention in any way. Any simple modification, change and equivalent structural transformation made to the above embodiment based on the technical essence of the present invention still falls within the protection scope of the technical solution of the present invention.

Claims (10)

1. The preparation method of the Cr 2 N chromizing nitride layer on the surface of the stainless steel is characterized by comprising the following steps:
Step one, preparing a chromizing layer: placing a stainless steel substrate with clean surface and a Cr target material in high-power plasma surface metallurgical equipment, vacuumizing to less than 1.0X10 -4 Pa, then introducing argon, bombarding the Cr target material by argon ions to generate Cr plasma, enabling the Cr plasma to reach the surface of the stainless steel substrate under the action of an electric field, performing diffusion reaction, and preparing a chromizing layer;
Preparing a chromizing nitriding layer: after the chromizing layer is prepared in the first step, vacuumizing the high-power plasma surface metallurgical equipment again to below 1.0X10 -2 Pa, then introducing nitrogen and argon to enable the stainless steel substrate in the high-power plasma surface metallurgical equipment to be in a glow discharge state, ionizing the nitrogen to form N plasma, and enabling the N plasma to be subjected to nitriding reaction with the chromizing layer on the surface of the stainless steel substrate under the action of an electric field force to prepare the Cr 2 N chromizing nitride layer.
2. The method for preparing a Cr 2 N chromizing nitride layer on a stainless steel surface according to claim 1, wherein in the first step, the argon gas volume purity is 99.999%, and the argon gas flow is 30 sccm-50 sccm.
3. The method for producing a Cr 2 N chromizing nitride layer on a stainless steel surface according to claim 1, wherein the mass purity of said Cr target material in step one is greater than 99.95%.
4. The method for preparing a chromium-doped nitride layer on a stainless steel surface Cr 2 N according to claim 1, wherein the technological parameters of the preparation of the chromium-doped nitride layer in the first step are as follows: the air pressure is 5 Pa-50 Pa, the target electrode voltage is 600V-800V, the target electrode frequency is 50 kHz-100 kHz, the target electrode duty ratio is 5-30%, the workpiece electrode voltage is 420V-650V, the workpiece electrode frequency is 50 kHz-100 kHz, the workpiece electrode duty ratio is 30-60%, the workpiece temperature is 900-1000 ℃, and the diffusion time is 3-10 h.
5. The method for preparing a Cr 2 N chromizing nitride layer on a stainless steel surface according to claim 1, wherein the chromizing layer prepared in the first step uses a Fe-Cr phase as a main phase, and the mass percentage of Cr in the Fe-Cr phase is 80% or more.
6. The method for preparing a Cr 2 N chromizing nitride layer on a stainless steel surface according to claim 1, wherein in the second step, the volume purity of nitrogen is 99.999%, the flow rate of nitrogen is 10 sccm-50 sccm, the volume purity of argon is 99.999%, and the flow rate of argon is 10 sccm-30 sccm.
7. The method for preparing a Cr 2 N chromizing nitride layer on a stainless steel surface according to claim 1, wherein the technological parameters of the preparation of the Cr 2 N chromizing nitride layer in the second step are as follows: the air pressure is 1.0 multiplied by 10 2Pa~2.0×103 Pa, the workpiece electrode voltage is 320V-600V, the frequency is 50 kHz-100 kHz, the duty ratio is 30% -60%, the auxiliary heating system temperature is 300-600 ℃, the workpiece temperature is 700-1000 ℃, and the diffusion time is 3-10 h.
8. The method for preparing a Cr 2 N chromizing nitride layer on a stainless steel surface according to claim 1, wherein in the first step, the roughness Ra of the stainless steel substrate is not more than 2.5 μm, and the stainless steel substrate is 316 stainless steel, 304 stainless steel or 321 stainless steel.
9. A Cr 2 N chromizing nitride layer on the surface of stainless steel prepared by the method as claimed in any one of claims 1 to 8, wherein the Cr 2 N chromizing nitride layer is a nitride layer with Cr 2 N as the main phase.
10. The Cr 2 N chromizing nitride layer on the surface of stainless steel according to claim 9, wherein the thickness of the Cr 2 N chromizing nitride layer is 80 μm-140 μm, and the vickers hardness is 400HV 5~600HV5.
CN202410297260.3A 2024-03-15 2024-03-15 Stainless steel surface Cr2N chromizing nitride layer and preparation method thereof Pending CN118186337A (en)

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