CN118157512A - Multi-layer piezoelectric ceramic driver with partition structure - Google Patents

Abstract

The present application is about a multilayer piezoelectric ceramic driver with a partitioned structure, which is provided with a multilayer piezoelectric ceramic sheet, including: a surface electrode, a multilayer internal electrode, the internal electrode is provided on the lower side of the surface electrode; the internal electrode is divided into a plurality of regional electrodes, and an insulating tape is provided in the middle of the regional electrodes for isolation; the internal electrode is provided with an odd-numbered electrode layer and an even-numbered electrode layer, and the odd-numbered electrode layer and the even-numbered electrode layer are stacked alternately; the multilayer odd-numbered electrode layers are connected to each other and connected to the surface electrode, and the multilayer even-numbered electrode layers are connected to each other and connected to the surface electrode; partitioned vibration is achieved by applying a driving signal to the partitioned regional electrodes. This multilayer piezoelectric ceramic driver is provided with a partitioned structure, and a driving voltage is applied to different regions. By applying multiple combinations of voltages, a multimodal vibration mode is achieved. The same multilayer piezoelectric ceramic driver can achieve the functions that can only be achieved by combining multiple multilayer piezoelectric ceramic drivers, which is convenient for miniaturization and diversified development.

Description

Multilayer piezoelectric ceramic actuator with partition structure

Technical Field

The present application relates to the technical field of piezoelectric ceramics, and in particular to a multilayer piezoelectric ceramic driver with a partitioned structure.

Background technique

In the related technology, piezoelectric ceramic material is a kind of information functional ceramic material that can convert mechanical energy and electrical energy into each other. The piezoelectric driver uses the inverse piezoelectric effect of piezoelectric ceramic materials to convert electrical energy into mechanical deformation to achieve displacement control or output thrust. Due to the advantages of fast response speed, large output torque, high linearity, etc., piezoelectric drivers have been widely used in electronics, drive, medical and other fields. With the rapid development of microelectronics technology and the further improvement of product performance, single-layer piezoelectric drivers can no longer meet the current use requirements of related applications, and multilayer piezoelectric ceramic drivers have come into being. Multilayer piezoelectric ceramic drivers use the stacked structure of piezoelectric ceramic sheets, and through circuit design, a mechanical series and circuit parallel structure is realized. It can have more precise linear displacement repeatability and larger displacement at a lower operating voltage.

Multilayer piezoelectric ceramic drivers can achieve low voltage and large displacement driving by increasing the number of piezoelectric ceramic stacks and reducing the thickness of a single layer. Existing multilayer piezoelectric ceramic drivers can only be driven by applying a single voltage, and the vibration mode generated is relatively single. It requires a combination of multiple multilayer piezoelectric ceramic drivers to achieve multi-modal vibration. Existing multilayer piezoelectric ceramic drivers have a single vibration mode and cannot achieve complex vibrations, which is not conducive to the development of miniaturization and diversification.

Summary of the invention

In order to overcome the problems existing in the related art, the present application provides a multilayer piezoelectric ceramic driver with a partitioned structure. The multilayer piezoelectric ceramic driver is provided with partitions and can be driven by applying different voltages to achieve multi-modal vibration, which is conducive to the miniaturization and diversified development of the multilayer piezoelectric ceramic driver.

The present application provides a multilayer piezoelectric ceramic driver with a partitioned structure, which is provided with a multilayer piezoelectric ceramic sheet, including: a surface electrode and a multilayer internal electrode, wherein the internal electrode is arranged on the lower side of the surface electrode; the internal electrode is divided into a plurality of regional electrodes, and an insulating tape is arranged in the middle of the regional electrodes for isolation; the internal electrode is provided with an odd-numbered layer electrode and an even-numbered layer electrode, and the odd-numbered layer electrode and the even-numbered layer electrode are stacked alternately with each other; the multilayer odd-numbered layer electrodes are connected to each other and communicated with the surface electrode, and the multilayer even-numbered layer electrodes are connected to each other and communicated with the surface electrode; partitioned vibration is achieved by applying a driving signal to the partitioned regional electrodes.

Preferably, the piezoelectric ceramic sheet has a long side dimension of L1 and a short side dimension of L2, wherein L1>L2, and side electrodes are led out on the long sides.

Preferably, when the side electrodes are led out on the long sides: L1>2*(L3+L4) or L2<2*(L3+L4); wherein L3 is the width of the side electrodes led out on the long sides, and L4 is the spacing between the side electrodes led out on the long sides.

Preferably, the arrangement of the surface electrodes needs to satisfy the following conditions: a, b, wherein a=L1-(4*L3)+(3*L4), b=L2-(2*L3)+L4.

Preferably, when the surface electrodes are arranged in a line, a≥0.

Preferably, when the surface electrodes are arranged in a rectangular manner, b≥0.

Preferably, if a≥0 and b≥0, when a＞b, the surface electrodes are arranged in a straight line; when a＜b, the surface electrodes are arranged in a rectangular shape.

Preferably, the thickness of a single piezoelectric ceramic sheet of the multilayer piezoelectric ceramic sheet is 10um to 100um, and the number of layers of the multilayer piezoelectric ceramic sheet is 4 to 100; the material of the multilayer piezoelectric ceramic sheet is one or more of PZT-4, PZT-5 or PZT-8 materials.

Preferably, the material used for the inner electrode is Ag or Cu or Ni or Ag-Pd alloy, and the thickness of the inner electrode is 1 um to 10 um _.

Preferably, the material used for the surface electrode is Ag, Cu, Ni or Au, and the thickness of the surface electrode is 1 um to 10 um.

The technical solution provided by the present application may include the following beneficial effects: the multilayer piezoelectric ceramic driver is provided with a partition structure, and different or the same voltages are applied to different areas. By applying multiple combinations of voltages, a multimodal vibration mode is achieved. The same multilayer piezoelectric ceramic driver can achieve functions that can only be achieved by combining multiple multilayer piezoelectric ceramic drivers, which facilitates the miniaturization and diversification of multilayer piezoelectric ceramic drivers.

It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, features and advantages of the present application will become more apparent through a more detailed description of exemplary embodiments of the present application in conjunction with the accompanying drawings, wherein the same reference numerals generally represent the same components in the exemplary embodiments of the present application.

FIG1 is a schematic diagram of a main viewing angle of a multilayer piezoelectric ceramic driver having a partitioned structure shown in an embodiment of the present application;

Fig. 2 is a front cross-sectional view of Fig. 1;

FIG3 is a schematic diagram of a top view of a multilayer piezoelectric ceramic driver having a partitioned structure shown in an embodiment of the present application;

FIG4 is a cross-sectional view of a multilayer piezoelectric ceramic driver having a partitioned structure shown in an embodiment of the present application from a left perspective;

FIG5 is a schematic diagram of electrodes in odd-numbered layers of a multilayer piezoelectric ceramic driver with a partitioned structure shown in an embodiment of the present application;

FIG6 is a schematic diagram of electrodes in even layers of a multilayer piezoelectric ceramic driver with a partitioned structure shown in an embodiment of the present application;

7 is a schematic diagram of the driving connection of a multilayer piezoelectric ceramic driver with a partitioned structure and a schematic diagram of the driving connection of a multilayer piezoelectric ceramic driver with a non-partitioned structure shown in an embodiment of the present application;

8 is a schematic diagram of long-side lead-out electrodes of a multilayer piezoelectric ceramic driver with a partitioned structure and a schematic diagram of short-side lead-out electrodes of a multilayer piezoelectric ceramic driver with a partitioned structure according to an embodiment of the present application;

FIG9 is a schematic diagram of a multilayer piezoelectric ceramic driver with a partitioned structure shown in an embodiment of the present application, in which surface electrodes are arranged in a straight line;

FIG. 10 is a schematic diagram of a rectangular arrangement of surface electrodes of a multilayer piezoelectric ceramic driver with a partitioned structure shown in an embodiment of the present application.

Detailed ways

The preferred embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although the preferred embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to make the present application more thorough and complete, and to fully convey the scope of the present application to those skilled in the art.

The terms used in this application are for the purpose of describing specific embodiments only and are not intended to limit this application. The singular forms of "a", "said" and "the" used in this application and the appended claims are also intended to include plural forms unless the context clearly indicates other meanings. It should also be understood that the term "and/or" used in this article refers to and includes any or all possible combinations of one or more associated listed items.

It should be understood that although the terms "first", "second", "third", etc. may be used in this application to describe various information, this information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of this application, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

The technical solution of the embodiments of the present application is described in detail below with reference to the accompanying drawings.

Referring to Figures 1 to 3, the present invention provides a multilayer piezoelectric ceramic driver with a partitioned structure, which is provided with a ceramic body composed of multiple layers of piezoelectric ceramic sheets, including surface electrodes and internal electrodes, and the internal electrodes are arranged on the lower side of the surface electrodes. The internal electrode is divided into a plurality of regional electrodes, and an insulating tape is provided in the middle of the regional electrodes for isolation. In this embodiment, as shown in Figures 4 to 6, the internal electrode is divided into two regional electrodes, a first regional electrode and a second regional electrode, which are isolated by an insulating tape in the middle. The internal electrode is provided with odd-numbered electrodes and even-numbered electrodes, and the odd-numbered electrodes and the even-numbered electrodes are stacked alternately with each other. Multiple layers of the odd-numbered electrodes are connected to each other and then connected to the surface electrodes, and multiple layers of the even-numbered electrodes are connected to each other and then connected to the surface electrodes. Multimodal vibration is achieved by applying a driving signal to the partitioned regional electrodes.

In this embodiment, as shown in FIG7 , the same or different driving signals can be applied to the two regional electrodes, namely the first regional electrode and the second regional electrode, so that a more complex vibration mode than that of ordinary piezoelectric ceramics can be realized. For example, a first driving signal is applied to the first regional electrode, and a second driving signal is applied to the second regional electrode, so that the multilayer piezoelectric ceramic driver can realize multiple different vibration modes, and the vibration modes that can only be realized by two ordinary piezoelectric ceramic drivers can be realized by using one such multilayer piezoelectric ceramic driver, making the multilayer piezoelectric ceramic driver more diversified and miniaturized.

This multilayer piezoelectric ceramic driver has two independent electrode areas, namely the first regional electrode and the second regional electrode, on a ceramic. As shown in Figures 5 and 7, independent excitation voltages A and B can be applied to the first regional electrode and the second regional electrode respectively for driving. Different combinations of A and B can achieve different modes of vibration and more complex vibration modes. The non-partitioned piezoelectric ceramic driver, that is, the ordinary multilayer piezoelectric ceramic driver, can only apply a single voltage, and the vibration mode is relatively simple. It takes two non-partitioned piezoelectric ceramic drivers to combine to achieve the function of a multilayer piezoelectric ceramic driver with a partitioned structure. In some application fields, the multilayer piezoelectric ceramic driver with a partitioned structure can achieve the functions that can only be achieved by two non-partitioned piezoelectric ceramic drivers, which can simplify the structural design and is conducive to the miniaturization of the device. As shown in Figures 4 and 7, it can be clearly seen from the left-view cross-sectional diagram that the multilayer piezoelectric ceramic driver is divided into two independent electrode areas, generating independent vibrations that do not interfere with each other. After being driven by applying excitation voltages in different combinations, a variety of vibration modes are generated to form a complex vibration mode.

Specifically, as shown in Figures 2 to 6, the piezoelectric ceramic mainly consists of a ceramic body (1), electrodes (2)(3)(4)(5) in each layer, long side electrodes (6)(7)(8)(9), and surface electrodes (10)(11)(12)(13) _; the electrodes (2)(3) of the odd-numbered layers are connected to the surface electrodes (10)(11) through the side electrodes (6)(7); the electrodes (4)(5) of the even-numbered layers are connected to the surface electrodes (12)(13) through the side electrodes (8)(9).

As shown in Figures 3 to 5, the electrodes in the odd-numbered layers are provided with a ceramic body (1), which is divided into two independent regional electrodes (2) (3) separated by an insulating tape in the middle, and side electrodes (6) (7) are respectively drawn out from the two long sides. As shown in Figure 3, the surface electrode (10) (11) (12) (13) on the surface of the ceramic body 1, and the side electrodes (6) (7) are respectively drawn out from the two long sides and connected to the surface electrodes (10) (11). As shown in Figure 6, the electrodes in the even-numbered layers are provided with a ceramic body (1), which is divided into two independent regional electrodes (4) (5) on the ceramic body (1), separated by an insulating tape in the middle, and side electrodes (8) (9) are respectively drawn out from the two long sides, and the side electrodes (8) (9) are respectively drawn out from the two long sides and connected to the surface electrodes (12) (13).

As shown in FIG2 , from the main cross-sectional view, the electrodes in the odd-numbered layers are stacked alternately with the electrodes in the even-numbered layers, and the polarization directions of the two adjacent piezoelectric ceramic sheets are opposite. Each electrode layer and each piezoelectric ceramic sheet layer can be made by alternately stacking by bonding or calcining. In this embodiment, the size and thickness of each piezoelectric ceramic layer are consistent, and the size and thickness of the electrodes are consistent. In other embodiments, they can be changed according to actual conditions. As shown in FIG1 , a side electrode (6) (8) is provided on the side of the ceramic body 1, and a side electrode (7) (9) is provided on the other side.

In another embodiment of the present application, the ceramic body is formed by stacking single-layer ceramics layer by layer, the thickness of the single-layer ceramics is 10um to 100um, and the number of ceramic layers is 4 to 100 layers; the ceramic material can be one or more of PZT-4, PZT-5, and PZT-8 materials, and the ceramic material and thickness are selected according to specific needs. For example, the thickness of the single-layer ceramic is 30um, the number of ceramic layers is 12, and the ceramic material is PZT-5 material. The inner electrode material can be Ag, Cu, Ni or Ag-Pd alloy, and the inner electrode thickness is 1um to 10um. In this example, the inner electrode is Ag-Pd alloy with a thickness of 2.5um. The surface electrode material can be Ag, Cu, Ni, Au, and the surface electrode thickness is 1 to 10um.

Preferably, as shown in FIG8 , the long side dimension of the piezoelectric ceramic sheet is L1, the short side dimension is L2, L3 is the width of the long side lead-out electrode, and L4 is the distance between the long side lead-out electrodes. The long side dimension of the piezoelectric ceramic sheet is L1, and the short side dimension is L2, wherein L1>L2, and the side electrode is led out on the long side. By leading out the side electrode on the long side, the electrode forming process is simplified compared to leading out the side electrode through the short side, and a smaller ceramic size can be achieved. L3 is the width of the long side lead-out electrode, and L4 is the distance between the long side lead-out electrodes. When the side electrode is led out on the long side, L1>2*(L3+L4) or L2<2*(L3+L4). L5 is the width of the short side lead-out electrode, and L6 is the distance between the short side lead-out electrodes. Because L1>L2, L3+L4>L5+L6, so in the long side lead-out side electrode method, the side electrode width and the side electrode distance can be made larger, which is convenient for electrode forming, especially for long strip ceramics with a large aspect ratio, this method is more advantageous. For the short-side lead-out electrode, the condition L1＞L2≥2*(L3+L4) needs to be satisfied; for the long-side lead-out electrode, it is sufficient to satisfy L1＞2*(L3+L4). Even L2＜2*(L3+L4) can be achieved, and ceramics with a smaller width (L2) can be made, which is conducive to miniaturization.

Preferably, as shown in FIG9 and FIG10, the arrangement of the surface electrodes needs to meet conditions a and b, which is convenient for miniaturized design and stable performance, wherein a＝L1-(4*L3)+(3*L4), b＝L2-(2*L3)+L4. When the surface electrodes are arranged in a straight line, a≥0. When the surface electrodes are arranged in a rectangular manner, b≥0 must be satisfied. If a≥0 and b≥0, when a＞b, the surface electrodes are arranged in a straight line; when a＜b, the surface electrodes are arranged in a rectangular manner. As shown in FIG9, the surface electrodes are arranged in a straight line, with a long side dimension of L1, an electrode width of L3, and a spacing between electrodes of L4. This arrangement of electrodes will not cause relevant interference and meet the requirements of miniaturized design. As shown in FIG10, the surface electrodes are arranged in a rectangular manner, with a short side dimension of L2, an electrode width of L3, and a spacing between electrodes of L4. This arrangement of electrodes will not cause relevant interference and meet the requirements of miniaturized design.

In this embodiment, the ceramic length L1 = 6mm, the width L2 = 0.8mm, the surface electrode width L3 ≥ 0.5mm, and the surface electrode spacing L4 ≥ 0.5mm. a = L1-(4*L3)+(3*L4) = 2.5mm, b = L2-(2*L3)+L4, so the surface electrodes are arranged in a straight line.

The present application is a multilayer piezoelectric ceramic driver with a partition structure. The multilayer piezoelectric ceramic driver is provided with partitions, and different or the same voltages are applied to different areas. By applying multiple combinations of voltages, a multi-modal vibration mode is realized. The same multilayer piezoelectric ceramic driver can realize the functions that can only be realized by combining multiple multilayer piezoelectric ceramic drivers, which is convenient for the miniaturization and diversification of multilayer piezoelectric ceramic drivers. At the same time, by leading the side electrode from the long side, the electrode is easy to form, and piezoelectric ceramics with a smaller width can be made, which is conducive to miniaturization.

The embodiments of the present application have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims (10)

1. A multi-layered piezoelectric ceramic driver of a partitioned structure provided with a multi-layered piezoelectric ceramic sheet, comprising:

The surface electrode and the multilayer inner electrode are arranged on the lower side of the surface electrode;

the inner electrode is divided into a plurality of area electrodes, and an insulating tape is arranged in the middle of each area electrode for isolation;

The inner electrode is provided with an odd-layer electrode and an even-layer electrode, and the odd-layer electrode and the even-layer electrode are mutually staggered and stacked; the even-numbered layers of electrodes are connected with each other and then communicated with the surface electrode; vibration is achieved by applying a drive signal to the segmented electrodes of the regions.

2. The zoned multilayer piezoelectric ceramic actuator according to claim 1, wherein: the long side of the piezoelectric ceramic piece is L1, the short side of the piezoelectric ceramic piece is L2, wherein L1 is more than L2, and the side electrode is led out from the long side.

3. The zoned multilayer piezoelectric ceramic actuator according to claim 2, wherein: when the side electrode is drawn out on the long side: l1 > 2 (l3+l4) or l2 < 2 (l3+l4); wherein the method comprises the steps of

L3 is the width of the long-side extraction electrode, and L4 is the pitch of the long-side extraction electrode.

4. A zoned multilayer piezoelectric ceramic actuator according to claim 3, wherein: the arrangement of the surface electrodes needs to satisfy the conditions: a. b, wherein a=l1- (4×l3) + (3×l4), b=l2- (2×l3) +l4.

5. The zoned multilayer piezoelectric ceramic actuator according to claim 4, wherein: when the surface electrodes adopt a straight arrangement mode, a is more than or equal to 0.

6. The zoned multilayer piezoelectric ceramic actuator according to claim 4, wherein: when the surface electrodes are arranged in a rectangular mode, b is more than or equal to 0.

7. The zoned multilayer piezoelectric ceramic actuator according to claim 4, wherein: if a is more than or equal to 0 and b is more than or equal to 0, when a is more than or equal to b, the surface electrodes adopt a straight arrangement mode; when a is less than b, the surface electrodes are arranged in a rectangular mode.

8. The zoned multilayer piezoelectric ceramic actuator according to claim 1, wherein: the thickness of the single-layer piezoelectric ceramic piece of the multilayer piezoelectric ceramic piece is 10 um-100 um, and the number of layers of the multilayer piezoelectric ceramic piece is 4-100; the material of the multilayer piezoelectric ceramic sheet adopts one or more of PZT-4 or PZT-5 or PZT-8 materials.

9. The zoned multilayer piezoelectric ceramic actuator according to claim 1, wherein: the material adopted by the inner electrode is Ag or Cu or Ni or Ag-Pd alloy, and the thickness adopted by the inner electrode is 1 um-10 um _.

10. The zoned multilayer piezoelectric ceramic actuator according to claim 1, wherein: the surface electrode is made of Ag, cu, ni or Au, and the thickness of the surface electrode is 1-10 um.