CN118111306B - Electron beam size detection method, device, equipment and storage medium - Google Patents
Electron beam size detection method, device, equipment and storage medium Download PDFInfo
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Abstract
The application discloses a size detection method, device and equipment for electron beam current and a storage medium, wherein the method comprises the steps of dividing a section where the electron beam current exists into measurement areas of I rows and J columns, detecting the electron beam through a non-interception detector, acquiring multiple groups of current detection data, solving a beam current intensity I ij on each unit C ij of the measurement area through establishing an equation matrix for the multiple groups of current detection data, and fitting a distribution curve according to the beam current intensity I ij on each unit C ij to obtain the section distribution size of the beam current intensity of the electron beam. The size detection method of the electron beam current of the application detects the beam current intensity of the electron beam by adopting the non-interception detector, and the normal work of the electron beam is not affected. In addition, the size detection method of the electron beam current can obtain the transverse size of the electron beam current by detecting the electron beam once.
Description
Technical Field
The present application relates to the field of physical beam diagnosis of accelerators, and in particular, to a method, an apparatus, a device, and a storage medium for detecting a size of an electron beam.
Background
The transverse dimension of the beam is one of the basic beam parameters of the particle accelerator and the transport line, and the accelerators at home and abroad are very important to measure the transverse cross section dimension of the beam. The detection methods commonly used at present comprise an interception detection method and a non-interception detection method. The interception type detection method is to set an interception type detector on a channel of the beam, and the cross section distribution of the intensity of the beam is measured through the scanning of the detector or the array and the scintillation screen of the detector, but the interception type detection method can influence the normal work of the beam. The non-interception detection method is an optical measurement method based on synchronous light, and is most widely applied, and the corresponding methods comprise a synchronous light imaging method, a synchronous light projection method and a synchronous light interference method. However, the optical method based on the synchronous light is only suitable for fixed-point measurement of a large scientific device, is not suitable for distributed multi-point detection, can be only used for the large scientific device, cannot be used for a conventional accelerator, and has low applicability.
Content of the application
The application mainly aims to provide a size detection method, device and equipment for electron beam current and a storage medium, and aims to solve the technical problems that the conventional detection method can influence the normal operation of the current and has low applicability.
In order to achieve the above object, the present application provides a method for detecting a size of an electron beam, the method comprising the steps of:
dividing the section of the electron beam in which the beam current exists into measuring areas of I rows and J columns, wherein the measuring areas have I x J units, any one unit is C ij, and the corresponding beam current intensity is I ij;
Detecting the electron beam through a non-interception detector and acquiring a plurality of groups of current detection data, wherein the corresponding non-interception detector is set to have different detection parameters before acquiring the current detection data of different groups, and the number of the groups of the current detection data is greater than or equal to I;
Solving a beam intensity I ij on each of the cells C ij of the measurement region by building an equation matrix for a plurality of sets of the current detection data;
fitting a distribution curve according to the beam intensity I ij on each unit C ij to obtain the cross-section distribution size of the beam intensity of the electron beam.
Optionally, when the beam intensity I ij on the cell C ij located on the outer ring is below a set threshold,
After solving the beam intensity I ij on each of the cells C ij by building an equation matrix for a plurality of sets of the current detection data, the method further includes:
Establishing a refinement measurement area by taking the beam center of the electron beam as the center, wherein the refinement measurement area also comprises I.J units, any one of the units is C ij ', the beam intensity corresponding to the unit is I ij', and the refinement measurement area comprises as few units C ij which are positioned on the outer ring and have the beam intensity I ij below a set threshold value as possible;
The beam intensity I ij 'on the cell C ij' of each of the refined measurement regions is solved by building an equation matrix for a plurality of sets of the current detection data.
Optionally, the measuring area and the refinement measuring area are both rectangular, and the steps of establishing the refinement measuring area with the beam center of the electron beam as the center and solving the beam intensity I ij 'on the unit C ij' of each refinement measuring area by establishing an equation matrix for a plurality of sets of the current detection data are repeatedly performed until the refinement measuring area of the last time is solved to be an circumscribed rectangle with the smallest area corresponding to the electron beam.
Optionally, the step of detecting the electron beam by a non-interception detector and acquiring multiple sets of current detection data includes:
Uniformly distributing s non-interception detectors along the circumferential direction of the electron beam at intervals, wherein the s non-interception detectors form a detection array;
the method comprises the steps of arranging k detection arrays along the axial direction of the electron beam, wherein the distance from the non-interception type detector of one detection array to the electron beam is unequal to the distance from the non-interception type detector of the other detection array to the electron beam in any two detection arrays, and s is greater than or equal to I;
and acquiring data measured by each non-interception detector in each detection array to obtain a plurality of groups of current detection data.
Alternatively, the non-intercepting detector may employ a coil detector and/or an electrode detector.
Optionally, the beam intensity corresponding to any of the units C ij is I ij, the polar coordinates of any of the units are (r ij,θij), the current generated by each of the units on the non-intercepting detector is I skij,
When the non-intercepting detector is an electrode detector,
The current I sk generated by all the cells on electrode detector M sk is:
Wherein the angle of the s-th electrode detector is alpha s, and the radial opening angle of each electrode detector is The distance from each electrode detector to the center of the cross section where the beam current of the electron beam exists is d sk,rij which is the radius of the detector in the polar coordinate, n is a positive integer, and/or,
When the non-interception type detector adopts a coil detector, according to the basic principle of the biot-savart law, the magnetic induction intensity B sk generated by the electron beam at the distance r can be calculated by the following formula:
Wherein mu 0 is the permeability in vacuum, its value is 4pi×10Pa (-7) Tesla-m/amp, I ij is the current intensity of each current element, and r ijsk is the distance of each current element from the center of the detector.
In a varying magnetic field, the induced electromotive force E sk of the coil detector is:
the current for each coil detector is thus:
Wherein R 0 is a sampling resistor, R is a coil diameter, K b is a correction coefficient of current formed by the beam current of the electron beam on the coil detector through magnetic induction, the coefficient is related to a structure, mu 0 is magnetic permeability in vacuum through calibration, R ijsk is a distance from each current element to the center of the detector, and t is time.
In a second aspect, the present application also provides a size detection apparatus for an electron beam, the size detection apparatus for an electron beam comprising:
the dividing module is used for dividing the section where the beam current of the electron beam exists into I rows and J columns of measuring areas;
the detection module is used for carrying out non-interception detection on the electron beam and acquiring a plurality of groups of current detection data;
The operation module is used for establishing an equation matrix for a plurality of groups of the current detection data and solving the beam intensity I ij on the unit C ij of each measurement area;
And the fitting distribution module is used for fitting a distribution curve to the beam intensity I ij on each unit C ij so as to obtain the cross-section distribution size of the beam intensity of the electron beam.
Optionally, the detection device further comprises an electromagnetic shield having a cavity with an opening towards the electron beam, the detection module being mounted in the cavity.
In a third aspect, the present application also provides an apparatus for detecting the size of an electron beam, comprising a processor, a memory and a program for detecting the size of an electron beam stored in the memory, wherein the program for detecting the size of an electron beam is executed by the processor to implement the steps of the method for detecting the size of an electron beam according to the first aspect.
In a fourth aspect, the present application further provides a computer readable storage medium, on which a size detection program of an electron beam current is stored, the size detection program of the electron beam current realizing the size detection method of the electron beam current according to the first aspect when executed by a processor.
In this embodiment, the section of the electron beam is divided into i×j units to obtain i×j unknowns to be solved, and multiple sets of current detection data are obtained by non-interception detectors, where it can be understood that the sum of each unit multiplied by the corresponding coefficient is equal to the current detection data of the corresponding set of non-interception detectors. Therefore, when the number of groups of the current detection data is greater than or equal to the number of units, the beam intensity on each unit can be solved. After the beam intensity on each unit is solved, fitting is carried out on the two-dimensional distribution of the beam intensity, and the transverse size of the beam of the electron beam can be obtained. In particular, the coefficient of cell correspondence is typically related to the distance from the non-intercepting detector and is a fixed constant.
The size detection method of the electron beam current of the invention adopts the non-interception type detector to detect the beam current intensity of the electron beam, thereby not affecting the normal operation of the electron beam and ensuring the normal operation of the application equipment of the electron beam. The size detection method of the electron beam current can obtain the transverse size of the electron beam current by adopting a mathematical calculation method and only detecting the electron beam once, has no limit on the stability, the repeatability and the like of the electron beam, has high applicability and is suitable for all accelerators. For a single pulse beam cluster or a beam with unstable beam position and transverse intensity distribution along with time, the size detection method of the electron beam has the advantage of detecting the real-time detection of the electron beam data only once.
Drawings
FIG. 1 is a schematic diagram of an electronic beam current size detection information management device according to the present application;
FIG. 2 is a schematic diagram of a dimension detection device of electron beam in a hardware operation environment of the dimension detection method of electron beam according to the present application;
fig. 3 is a schematic flow chart of a first embodiment of a method for detecting the size of an electron beam current according to the present application;
FIG. 4 is a schematic view of beam intensities of units in a measurement region;
fig. 5 is a schematic flow chart of a second embodiment of a method for detecting the size of an electron beam current according to the present application;
Fig. 6 is a schematic flow chart of a third embodiment of a method for detecting the size of an electron beam current according to the present application;
FIG. 7 is a schematic diagram of beam intensity of each cell in a refined measurement region;
fig. 8 is a flowchart of a fourth embodiment of a method for detecting a size of an electron beam current according to the present application;
fig. 9 is a schematic structural diagram of a size detection device for electron beam current provided by the present application;
fig. 10 is an assembly schematic diagram of an electromagnetic shielding body and a detection module in the size detection device of the electron beam current provided by the application.
The achievement of the objects, functional features and advantages of the present application will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the application.
The following description will explain a size detection device of an electron beam current applied in the implementation of the technology of the present application:
As shown in fig. 1, the size detection device of the electron beam current may comprise a processor 1001, such as a central processing unit (Central Processing Unit, CPU), a communication bus 1002, a user interface 1003, a network interface 1004, a memory 1005. Wherein the communication bus 1002 is used to enable connected communication between these components. The user interface 1003 may include a Display, an input unit such as a Keyboard (Keyboard), and the optional user interface 1003 may further include a standard wired interface, a wireless interface. The network interface 1004 may optionally include a standard wired interface, a wireless interface (e.g., a wireless FIdelity (WI-FI) interface). The Memory 1005 may be a high-speed random access Memory (RandomAccess Memory, RAM) Memory or a stable Non-Volatile Memory (NVM), such as a disk Memory. The memory 1005 may also optionally be a storage device separate from the processor 1001 described above.
It will be appreciated by those skilled in the art that the structure shown in fig. 1 does not constitute a limitation of the size detection device of the electron beam current, and may include more or less components than illustrated, or may combine certain components, or may be arranged in different components.
As shown in fig. 1, an operating system, a data storage module, a network communication module, a user interface module, and a size detection program of an electron beam current may be included in the memory 1005 as one type of storage medium.
In the size detection device of the electron beam shown in fig. 1, the network interface 1004 is mainly used for data communication with the network server, the user interface 1003 is mainly used for data interaction with a user, and the processor 1001 and the memory 1005 in the size detection device of the electron beam can be arranged in the size detection device of the electron beam, and the size detection device of the electron beam invokes the size detection program of the electron beam stored in the memory 1005 through the processor 1001, and executes the size detection method of the electron beam provided by the embodiment of the application.
Based on the above hardware structure of the size detection device for electron beam, but not limited to the above hardware structure, the present application provides a first embodiment of a size detection method for electron beam. Referring to fig. 2, fig. 2 shows a flow chart of a first embodiment of a method for applying for size detection of electron beam current.
It should be noted that although a logical order is depicted in the flowchart, in some cases the steps depicted or described may be performed in a different order than presented herein.
Referring to fig. 2, fig. 2 is a schematic structural diagram of an electron beam size detection device in a hardware operation environment according to an embodiment of the present application.
As shown in fig. 2, the size detection device of the electron beam stream may comprise a processor 1001, such as a central processing unit (Central Processing Unit, CPU), a communication bus 1002, a user interface 1003, a network interface 1004, a memory 1005. Wherein the communication bus 1002 is used to enable connected communication between these components. The user interface 1003 may include a Display, an input unit such as a Keyboard (Keyboard), and the optional user interface 1003 may further include a standard wired interface, a wireless interface. The network interface 1004 may optionally include a standard wired interface, a wireless interface (e.g., a wireless FIdelity (WI-FI) interface). The Memory 1005 may be a high-speed random access Memory (RandomAccess Memory, RAM) Memory or a stable Non-Volatile Memory (NVM), such as a disk Memory. The memory 1005 may also optionally be a storage device separate from the processor 1001 described above.
It will be appreciated by those skilled in the art that the structure shown in fig. 2 does not constitute a limitation of the size detection device of the electron beam current, and may include more or less components than illustrated, or may combine certain components, or may be arranged in different components.
As shown in fig. 2, an operating system, a data storage module, a network communication module, a user interface module, and a size detection program of the electron beam current may be included in the memory 1005 as one type of storage medium.
In the size detection device of the electron beam, shown in fig. 2, the network interface 1004 is mainly used for data communication with a network server, the user interface 1003 is mainly used for data interaction with a user, and the processor 1001 and the memory 1005 in the size detection device of the electron beam can be arranged in the size detection device of the electron beam, and the size detection device of the electron beam invokes a size detection program of the electron beam stored in the memory 1005 through the processor 1001, and executes the size detection method of the electron beam provided by the embodiment of the application.
Based on the hardware structure of the above-mentioned apparatus for detecting the cross-sectional dimension of the electron beam, but not limited to the above-mentioned hardware structure, the present application provides a first embodiment of a method for detecting the dimension of the electron beam. Referring to fig. 3, fig. 3 shows a flow chart of a method for applying for size detection of electron beam current.
It should be noted that although a logical order is depicted in the flowchart, in some cases the steps depicted or described may be performed in a different order than presented herein.
In this embodiment, the method for detecting the size of the electron beam current of the present invention includes:
Step S100, as shown in FIG. 4, the cross section of the electron beam in which the beam current exists is uniformly divided into measuring areas of I rows and J columns, wherein the measuring areas have I x J units, any one unit is C ij, and the corresponding beam current intensity is I ij;
It is to be understood that the execution subject of this embodiment is a size detection device of electron beam current. By equally dividing the cross section into measurement areas of I rows and J columns, the beam intensity of each unit is set to be the unknown number to be solved, namely I is equal to J unknown numbers in total.
Step S200, detecting the electron beam through a non-interception detector and acquiring a plurality of groups of current detection data, wherein the set parameters of any two groups of current detection data before detection are different, and the number of the groups of current detection data is greater than or equal to I;
It can be appreciated that when X unknowns are required to be solved, more than X equations need to be set to solve each unknown. Therefore, by setting the setting parameters of any two groups of current detection data before detection to different parameters, the equation established by each group of current detection data is ensured to be different, and the beam intensity of each unit can be solved.
Step S300, solving the beam intensity I ij on each unit C ij of the measurement area by establishing an equation matrix for a plurality of groups of current detection data;
it should be understood that the method for solving the unknowns by setting a plurality of unknowns and obtaining a plurality of solutions to establish an equation matrix belongs to the prior art, and a calculation method in the prior art can be adopted as required according to actual situations.
In step S400, a fitting distribution curve is performed according to the beam intensity I ij on each unit C ij, so as to obtain the cross-sectional distribution size of the beam intensity of the electron beam.
It should be understood that, according to the two-dimensional distribution of the beam intensity I ij on each unit C ij, the size of the beam intensity transverse distribution can be obtained by fitting a distribution curve, specifically, a gaussian distribution or a double gaussian distribution fitting mode is generally adopted, and which fitting mode can be selected freely according to the actual situation is adopted.
In this embodiment, the section of the electron beam is divided into i×j units to obtain i×j unknowns to be solved, and multiple sets of current detection data are obtained by non-interception detectors, where it can be understood that the sum of each unit multiplied by the corresponding coefficient is equal to the current detection data of the corresponding set of non-interception detectors. Therefore, when the number of groups of the current detection data is greater than or equal to the number of units, the beam intensity on each unit can be solved. After the beam intensity on each unit is solved, fitting is carried out on the two-dimensional distribution of the beam intensity, and the transverse size of the beam of the electron beam can be obtained. In particular, the coefficient of cell correspondence is typically related to the distance from the non-intercepting detector and is a fixed constant.
The size detection method of the electron beam current of the invention adopts the non-interception type detector to detect the beam current intensity of the electron beam, thereby not affecting the normal operation of the electron beam and ensuring the normal operation of the application equipment of the electron beam. The size detection method of the electron beam current can obtain the transverse size of the electron beam current by adopting a mathematical calculation method and only detecting the electron beam once, has no limit on the stability, the repeatability and the like of the electron beam, has high applicability and is suitable for all accelerators. For a single pulse beam cluster or a beam with unstable beam position and transverse intensity distribution along with time, the size detection method of the electron beam has the advantage of detecting the real-time detection of the electron beam data only once.
Referring to fig. 5, fig. 5 is a flow chart of a second embodiment of the method for detecting the size of an electron beam according to the present application, and based on the first embodiment, the second embodiment of the method for detecting the size of an electron beam according to the present application is proposed. In one specific embodiment, when the beam intensity I ij on the outer ring unit C ij is below the set threshold, after the step S300 solves the beam intensity I ij on each unit C ij by establishing an equation matrix for the multiple sets of current detection data, the method further includes:
Step S301, a refined measurement area is established by taking the beam center of the electron beam as the center, wherein the refined measurement area also has I.J units, any one unit is C ij ', the beam intensity corresponding to the refined measurement area is I ij', and the refined measurement area comprises units C ij which are positioned on the outer ring and have the beam intensity I ij below a set threshold as few as possible;
in step S302, the beam intensity I ij 'on the cell C ij' of each refined measurement region is solved by building an equation matrix for the sets of current detection data.
It should be understood that, since the beam current occupies a relatively small area compared with the measurement area, the beam current intensity of most of the solved units is below the set threshold value, which is insufficient to give the accurate size of the beam current. Therefore, a new refinement measuring region is established by using the beam center, units with the outer ring beam intensity below a set threshold are removed, the coordinates of the units in each refinement measuring region are updated, and the new equation matrix is solved by adopting the detected multiple groups of current detection data. It can be understood that the sum of the beam intensity of each refined unit multiplied by the corresponding coefficient and the sum of the beam intensity of each unit with the beam intensity below the set threshold value at the outer ring multiplied by the corresponding coefficient is equal to the current detection data of a corresponding group of non-interception detectors, wherein the beam intensity of each refined unit is an unknown number, and the beam intensity of the unit with the beam intensity below the set threshold value at the outer ring is a known number. Specifically, the threshold value may be set according to the actual situation of the user, and may be set to 0 or 10% of the peak value. In addition, the beam center can be determined by weighting the beam intensity of the electron beam to obtain the minimum first moment in the prior art, and particularly, the beam center can be determined by adopting different methods according to actual conditions, which is not limited by the invention.
In this embodiment, by establishing the refinement measurement region, the units with the beam intensity of the outer ring below the set threshold are removed, and the overall region is smaller due to the unchanged number of the units, so that finer units are obtained, the data precision of the beam intensity of the units is improved, and the precision of the beam size obtained by the subsequent fitting curve is also improved.
Further, referring to fig. 6, fig. 6 is a flow chart of a third embodiment of the method for detecting the size of an electron beam current according to the present application. Specifically, the measurement area and the refinement measurement area are both rectangular, and the steps of establishing the refinement measurement area with the beam center of the electron beam as the center and solving the beam intensity I ij 'on the unit C ij' of each refinement measurement area by establishing an equation matrix for a plurality of sets of current detection data are repeatedly performed until the last refinement measurement area is solved as a circumscribed rectangle with the smallest area corresponding to the electron beam.
As shown in fig. 7, the beam size with the highest precision can be solved by multiple refinement measurement areas and multiple iterative computations until the fact that the last refinement measurement area is the circumscribed rectangle with the smallest area corresponding to the electron beam is solved. Specifically, the measurement area and the refinement measurement area are rectangular, and have the advantages of convenient area division, convenient calculation, convenient refinement and the like.
Based on the same application conception, the application also provides a fourth embodiment of the size detection method of the electron beam current. Fig. 8 is a flowchart of a fourth embodiment of a method for detecting a size of an electron beam current according to the present application.
Step S200, detecting the electron beam by the non-interception detector, and acquiring multiple sets of current detection data includes:
Step S201, uniformly distributing S non-interception type detectors along the circumferential direction of the electron beam at intervals, wherein the S non-interception type detectors form a detection array;
Step S202, setting k detection arrays along the axial direction of the electron beam, wherein the distance from the non-interception type detector of one detection array to the electron beam is unequal to the distance from the non-interception type detector of the other detection array to the electron beam in any two detection arrays, and S is greater than or equal to I J;
It should be understood that by making the distances from the non-intercepting detector of one detecting array to the electron beam unequal between the non-intercepting detectors of the other detecting array in any two detecting arrays, it is ensured that the parameters of the data obtained by each non-intercepting detector are all different, that is, that there are s×k different equations for solving the beam intensity of each unit.
In step S203, data measured by each non-interception type detector in each detection array is acquired to obtain multiple sets of current detection data.
In the embodiment, the acquisition of multiple groups of current detection data is realized by arranging a plurality of detection arrays comprising a plurality of non-interception type detectors, and the arrangement is simple, ingenious and reasonable. Moreover, it can be understood that on the premise that s×k is greater than or equal to i×j, the greater the value of s×k, the higher the accuracy of the beam intensity of each unit obtained, and the smaller the value of s×k, the fewer the number of non-interception type detectors is needed, and the lower the cost, so that the number of unit divisions for the measurement region and the number of non-interception type detectors can be flexibly set according to the actual accuracy requirement and the cost requirement.
Further, non-intercept detectors may employ coil detectors and/or electrode detectors. When the charged particles move, beam current is formed, and electric induction current or magnetic induction current can be induced on adjacent conductor electrodes or coils, so that the coil detector and/or the electrode detector cannot influence the normal operation of the electron beam, and non-interception detection of the electron beam is realized.
Further, the beam intensity corresponding to the arbitrary unit C ij is I ij, the polar coordinate of the arbitrary unit is (r ij,θij), the current generated by each unit on the non-interception type detector is I skij, and when the non-interception type detector adopts the electrode detector, the current I sk generated by all units on the electrode detector M sk is:
the angle of the s-th electrode detector is alpha s, the radial opening angle of each electrode detector is phi, and the distance from each electrode detector to the center of the section where the beam current of the electron beam exists is D sk.
It will be appreciated that, according to the basic theory of electromagnetism, the current I skij generated by the cell C ij with current I ij on the electrode probe M sk is:
The current I sk generated by the electrode detector M sk is the sum of the currents I skij generated by all the cells C ij on the electrode detector M sk, and thus summing the currents I skij generated by all the cells C ij on the electrode detector M sk yields the current I sk generated by all the cells on the electrode detector M sk as:
Since I sk is a known number obtained by looking at the electrode detector, a plurality of equation sets related to I ij can be obtained by substituting all data, and then the plurality of equation sets related to I ij can be solved to obtain the beam intensity I ij corresponding to any unit C ij, thereby obtaining the beam intensity of each unit.
In another embodiment, when the non-intercept detector employs a coil detector, the current I 'sk generated by all units on the coil detector M' sk is:
Wherein E sk is the induced electromotive force generated by the magnetic field in the coil detector, R 0 is a sampling resistor, R is the coil diameter, B sk is the average magnetic induction intensity in the coil, K b is the correction coefficient of the current formed by the beam current of the electron beam on the coil detector through magnetic induction, mu 0 is the magnetic permeability in vacuum, R ijsk is the distance from each current element to the center of the detector, and t is time.
Based on the same application conception, the application also provides a size detection device of the electron beam current. Referring to fig. 9, fig. 9 is a schematic structural diagram of an apparatus for detecting a size of an electron beam, which includes:
The dividing module is used for dividing the section where the beam current of the electron beam exists into I rows and J columns of measuring areas;
the detection module 10 is used for carrying out non-interception detection on the electron beam and acquiring a plurality of groups of current detection data;
The operation module is used for establishing an equation matrix for a plurality of groups of current detection data and solving the beam intensity I ij on the unit C ij of each measurement area;
And the fitting distribution module is used for carrying out fitting distribution curves on the beam intensity I ij on each unit C ij so as to obtain the cross-section distribution size of the beam intensity of the electron beam.
According to the technical scheme of the embodiment, the size of the electron beam current is finally obtained through the mutual matching of the functional modules.
The size detection device of the electron beam current of the invention detects the beam current intensity of the electron beam by adopting the non-interception type detector, thereby not affecting the normal operation of the electron beam and ensuring the normal operation of the application equipment of the electron beam. The size detection device of the electron beam can obtain the transverse size of the electron beam by adopting a mathematical calculation method and only detecting the electron beam once, has no limit on the stability, the repeatability and the like of the electron beam, has high applicability and is suitable for all accelerators. For a single pulse beam cluster or a beam with unstable beam position and transverse intensity distribution along with time, the size detection device of the electron beam has the advantage of detecting the real-time detection of the electron beam data only once.
Further, as shown in fig. 10, the detection device further includes an electromagnetic shield 20 having a cavity with an opening facing the electron beam, in which the detection module 10 is mounted. The electromagnetic shield 20 is used for shielding the induced electric field of the particle beam at other positions to ensure that the detected induced currents all cross the contribution of particles on the beam segment 30 at the measurement position, thereby improving the use reliability of the size detection device of the electron beam and the accuracy of the measured result.
In addition, the embodiment of the application also provides a computer storage medium, and the storage medium stores a size detection program of the electron beam current, and the size detection program of the electron beam current realizes the steps of the size detection method of the electron beam current when being executed by a processor. Therefore, a detailed description will not be given here. In addition, the description of the beneficial effects of the same method is omitted. For technical details not disclosed in the embodiments of the computer-readable storage medium according to the present application, please refer to the description of the method embodiments of the present application. As an example, the program instructions may be deployed to be executed on one computing device or on multiple computing devices at one site or distributed across multiple sites and interconnected by a communication network.
Those skilled in the art will appreciate that implementing all or part of the above-described methods may be accomplished by way of computer programs, which may be stored on a computer-readable storage medium, and which, when executed, may comprise the steps of the embodiments of the methods described above. The storage medium may be a magnetic disk, an optical disk, a Read-Only Memory (ROM), a random access Memory (RandomAccessMemory, RAM), or the like.
It should be further noted that the above-described apparatus embodiments are merely illustrative, where elements described as separate elements may or may not be physically separate, and elements shown as elements may or may not be physical elements, may be located in one place, or may be distributed over a plurality of network elements. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of this embodiment. In addition, in the drawings of the embodiment of the device provided by the application, the connection relation between the modules represents that the modules have communication connection, and can be specifically implemented as one or more communication buses or signal lines. Those of ordinary skill in the art will understand and implement the present application without undue burden.
From the above description of the embodiments, it will be apparent to those skilled in the art that the present application may be implemented by means of software plus necessary general purpose hardware, or of course by means of special purpose hardware including application specific integrated circuits, special purpose CPUs, special purpose memories, special purpose components, etc. Generally, functions performed by computer programs can be easily implemented by corresponding hardware, and specific hardware structures for implementing the same functions can be varied, such as analog circuits, digital circuits, or dedicated circuits. But a software program implementation is a preferred embodiment for many more of the cases of the present application. Based on such understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art in the form of a software product stored in a readable storage medium, such as a floppy disk, a usb disk, a removable hard disk, a Read-only memory (ROM), a random-access memory (RAM, randomAccessMemory), a magnetic disk or an optical disk of a computer, etc., including several instructions for causing a computer device (which may be a personal computer, a server, or a network device, etc.) to execute the method of the embodiments of the present application.
The foregoing description is only of the preferred embodiments of the present application, and is not intended to limit the scope of the application, but rather is intended to cover any equivalents of the structures or equivalent processes disclosed herein or in the alternative, which may be employed directly or indirectly in other related arts.
Claims (9)
1. A method for detecting the size of an electron beam stream, the method comprising:
dividing the section of the electron beam in which the beam current exists into measuring areas of I rows and J columns, wherein the measuring areas have I x J units, any one unit is C ij, and the corresponding beam current intensity is I ij;
Detecting the electron beam through a non-interception detector and acquiring a plurality of groups of current detection data, wherein the corresponding non-interception detector is set to have different detection parameters before acquiring the current detection data of different groups, and the number of the groups of the current detection data is greater than or equal to I;
Solving a beam intensity I ij on each of the cells C ij of the measurement region by building an equation matrix for a plurality of sets of the current detection data;
Fitting a distribution curve according to the beam intensity I ij on each unit C ij to obtain the cross-section distribution size of the beam intensity of the electron beam;
When the beam intensity I ij on the cell C ij located on the outer ring is below the set threshold,
After solving the beam intensity I ij on each of the cells C ij by building an equation matrix for a plurality of sets of the current detection data, the method further includes:
Establishing a refinement measurement area by taking the beam center of the electron beam as the center, wherein the refinement measurement area also comprises I.J units, any one of the units is C ij ', the beam intensity corresponding to the unit is I ij', and the refinement measurement area comprises as few units C ij which are positioned on the outer ring and have the beam intensity I ij below a set threshold value as possible;
Solving a beam intensity I ij 'on the cell C ij' of each of the refined measurement regions by building an equation matrix for a plurality of sets of the current detection data;
wherein I and J are positive integers.
2. The method of claim 1, wherein the measurement areas and the refined measurement areas are rectangular, and the steps of establishing the refined measurement areas with the beam center of the electron beam as the center and solving the beam intensity I ij 'on the unit C ij' of each of the refined measurement areas by establishing an equation matrix for a plurality of sets of the current detection data are repeated until the refined measurement area of the last time is solved as an circumscribed rectangle having the smallest area corresponding to the electron beam.
3. The method of claim 1, wherein the step of detecting the electron beam by a non-intercepting detector and acquiring a plurality of sets of current detection data comprises:
Uniformly distributing s non-interception detectors along the circumferential direction of the electron beam at intervals, wherein the s non-interception detectors form a detection array;
the method comprises the steps of arranging k detection arrays along the axial direction of the electron beam, wherein the distance from the non-interception type detector of one detection array to the electron beam is unequal to the distance from the non-interception type detector of the other detection array to the electron beam in any two detection arrays, and s is greater than or equal to I;
Acquiring data measured by each non-interception detector in each detection array to obtain a plurality of groups of current detection data;
wherein s and k are positive integers.
4. A method of dimension detection of electron beam current according to claim 3 wherein the non-intercepting detector is a coil detector and/or an electrode detector.
5. The method of claim 4, wherein the beam intensity corresponding to any of the cells C ij is I ij, the polar coordinates of any of the cells are (r ij,θij), the current generated by each of the cells on the non-intercepting detector is I skij,
When the non-intercepting detector is an electrode detector,
The current I sk generated by all the cells on electrode detector M sk is:
Wherein the angle of the s-th electrode detector is alpha s, and the radial opening angle of each electrode detector is The distance from each electrode detector to the center of the cross section where the beam current of the electron beam exists is d sk,rij which is the radius of the detector in the polar coordinate, n is a positive integer, and/or,
When the non-interception type detector adopts coil detectors, s coil detectors are uniformly distributed at intervals along the circumferential direction of the electron beam, and the current I' sk of each coil detector is as follows:
Wherein E sk is the induced electromotive force generated by the magnetic field in the coil detector, R 0 is a sampling resistor, R is the coil diameter, B sk is the average magnetic induction intensity in the coil, K b is the correction coefficient of the current formed by the beam current of the electron beam on the coil detector through magnetic induction, mu 0 is the magnetic permeability in vacuum, R ijsk is the distance from each current element to the center of the detector, and t is time.
6. A size detection apparatus for electron beam current, comprising:
the dividing module is used for dividing the section where the beam current of the electron beam exists into I rows and J columns of measuring areas;
the detection module is used for carrying out non-interception detection on the electron beam and acquiring a plurality of groups of current detection data;
The operation module is used for establishing an equation matrix for a plurality of groups of the current detection data and solving the beam intensity I ij on the unit C ij of each measurement area;
The fitting distribution module is used for carrying out fitting distribution curves on the beam intensity I ij on each unit C ij so as to obtain the cross-section distribution size of the beam intensity of the electron beam;
Wherein when the beam intensity I ij on the unit C ij positioned on the outer ring is below a set threshold,
After solving the beam intensity I ij on each of the cells C ij by building an equation matrix for a plurality of sets of the current detection data, the method further includes:
Establishing a refinement measurement area by taking the beam center of the electron beam as the center, wherein the refinement measurement area also comprises I.J units, any one of the units is C ij ', the beam intensity corresponding to the unit is I ij', and the refinement measurement area comprises as few units C ij which are positioned on the outer ring and have the beam intensity I ij below a set threshold value as possible;
Solving a beam intensity I ij 'on the cell C ij' of each of the refined measurement regions by building an equation matrix for a plurality of sets of the current detection data;
i and J are positive integers.
7. The electron beam current size detection device of claim 6, further comprising an electromagnetic shield having a cavity with an opening toward the electron beam, the detection module being mounted within the cavity.
8. An electron beam size detection device comprising a processor, a memory and an electron beam size detection program stored in said memory, which when executed by said processor, performs the steps of the electron beam size detection method according to any one of claims 1 to 5.
9. A computer-readable storage medium, wherein a size detection program of an electron beam current is stored on the computer-readable storage medium, and the size detection program of the electron beam current, when executed by a processor, implements the size detection method of the electron beam current according to any one of claims 1 to 5.
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