CN117921104A - Spiral bevel gear mechanical vibration auxiliary chemical mechanical polishing device and method - Google Patents

Abstract

The invention discloses a spiral bevel gear mechanical vibration auxiliary chemical mechanical polishing device and a method, wherein the method completes polishing by immersing the whole spiral bevel gear into chemical mechanical polishing slurry and performing inclined planetary motion; the device comprises a mounting base, a hydraulic lifting mechanism, a supporting column, a mandrel, a bearing, a pin, an indexing member, a bolt, a connecting plate, a motor, a planetary motion mechanism, a connecting shaft and a mechanical vibration member. The method realizes high-quality and high-efficiency polishing of the complex tooth profile curved surface of the spiral bevel gear by mechanical vibration assisted chemical mechanical cooperative polishing and controlling the inclined planetary motion of the workpiece; the polishing device has the functions of lifting, tilting, planetary motion and mechanical vibration, and can realize the precise polishing of complex structural members such as spiral bevel gears and the like by combining the method.

Description

A device and method for mechanical vibration-assisted chemical mechanical polishing of spiral bevel gears

Technical Field

The invention relates to the field of gear processing and equipment, and in particular to a device and method for mechanical vibration-assisted chemical mechanical polishing of spiral bevel gears.

Background technique

Spiral bevel gears are key components of mechanical transmission devices and are widely used in engineering machinery and equipment such as vehicles and machine tools. Improving the surface accuracy of spiral bevel gears can effectively reduce noise and vibration in equipment transmission and extend the service life of equipment. Currently, gear grinding is the main finishing method for gears, which can significantly improve the gear tooth surface accuracy. However, the local temperature of gear grinding is high, which is prone to grinding burns, microcracks and other processing defects, affecting the fatigue strength and service life of gears.

Chemical mechanical polishing is a technology that achieves ultra-low damage and ultra-smooth surface finish of parts through the coupling of chemical corrosion and mechanical removal. However, this method is currently mainly used in the field of flat part polishing. There are few studies on the polishing of complex structural parts such as spiral bevel gears. In addition, due to the limitations of polishing slurry dripping and polishing pressure application in traditional chemical mechanical polishing processes, chemical mechanical polishing processes are difficult to apply to the polishing of complex structural parts. Currently, there are many polishing equipments, but the equipment for chemical mechanical polishing is almost all used for polishing flat parts. For workpieces with complex tooth profile surfaces such as spiral bevel gears, the current chemical mechanical polishing equipment cannot achieve uniform pressure on all tooth profile surfaces at one time, so it cannot be used for polishing such workpieces. Although some scholars have proposed related curved surface immersion polishing methods and equipment, they are usually only simple mechanical multi-axis rotation polishing. Patent CN 114247939 B proposes a gear load-free integral immersion chemical mechanical coupling surface polishing method. However, in the method disclosed in the patent, the workpiece only performs rotational motion, the axial removal force is weak, and it is easy to produce uneven material removal and low efficiency. Compared with the above, the present invention adds inclined planetary motion, which can not only increase the axial force on the workpiece surface, but also improve the slurry distribution on the tooth surface and the mechanical force of the abrasive particles through the planetary motion of the workpiece, thereby achieving uniform material removal.

Summary of the invention

The purpose of the present invention is to provide a method and device for mechanical vibration-assisted chemical mechanical polishing of spiral bevel gears. The method of mechanical vibration-assisted chemical mechanical polishing replaces the traditional grinding process of spiral bevel gears. The workpiece is immersed in a polishing slurry as a whole and performs an inclined planetary motion. The mechanical damage such as grinding burns, scratches, microcracks, etc. existing in traditional processing is overcome. At the same time, a polishing device design scheme matching the new polishing method is provided.

To achieve the above object, the technical solution provided by the present invention is as follows:

A chemical mechanical polishing device for mechanical vibration of spiral bevel gears comprises a mounting base, a hydraulic lifting mechanism, a support column, a mandrel, a bearing, a pin, a dividing component, a bolt, a connecting plate, a motor, a planetary motion mechanism, a connecting shaft, and a mechanical vibration component. The hydraulic lifting mechanism is mounted on the base, the output shaft is connected to the bottom end of the support column, the top end of the support column is connected to the front end of the dividing component through the mandrel, the tail end of the dividing component is connected and fixed to the connecting plate through screws, the planetary motion mechanism is mounted and fixed on the connecting plate, the input shaft of the planetary motion mechanism is connected to the motor, the output shaft is fixed to the connecting shaft, the spiral bevel gear is mounted on the bottom end surface of the connecting shaft, and the mechanical vibration mechanism is vertically located directly below the spiral bevel gear.

The hydraulic lifting mechanism is hydraulically controlled to smoothly lift and lower the support column, thereby ultimately achieving the rising and falling movement of the spiral bevel gear.

The top of the support column is U-shaped as a whole, and the inner surface is provided with inner cylindrical surface 1 and inner cylindrical surface 2 that cooperate with the indexing member, and the side end surface is symmetrically provided with a center through hole, a bearing mounting hole and a positioning hole. There are four groups of positioning holes, which are evenly distributed on the edge of the end surface, and each group includes 3 holes. The angle between the centers of adjacent positioning holes is θ;

The indexing member is in a "T" shape as a whole, and is composed of two vertically connected cylindrical parts, namely the front end of the indexing member and the rear end of the indexing member; wherein the outer cylindrical surface of the rear end of the indexing member matches the inner cylindrical surface of the supporting column, and the cylindrical end surface is provided with a threaded hole for fixing the connecting plate; the outer cylindrical surface of the front end of the indexing member matches the inner cylindrical surface of the supporting column, and the two end surfaces of the cylinder are provided with a central through hole and a positioning hole that match the supporting column, respectively used for the core shaft and the positioning pin to connect the indexing member to the supporting column, and in addition, the outer surface of this part of the cylinder is provided with a handle for manually controlling the rotation angle θ of the indexing member;

The two ends of the mandrel are provided with threads, which connect the support column with the indexing member, and the bearing is installed in the bearing mounting hole of the support column, and the nut is connected with the thread on the mandrel to fix and lock the inner ring of the bearing to ensure that the indexing member and the support column can rotate;

The connecting plate is in an "L" shape as a whole, with one end provided with a through hole, the number and size of which match the threaded hole on the end face of a cylinder in the indexing member, and the other end provided with a series of through holes for mounting the planetary motion mechanism, and a through hole for ensuring the planetary motion of the output shaft of the planetary motion mechanism;

The mechanical vibration component consists of two parts, a mechanical vibration module and a circular container, wherein the circular container is placed on the vibration module and is used to hold chemical mechanical polishing slurry, and is placed as a whole below the spiral bevel gear.

A method for mechanical vibration-assisted chemical mechanical polishing of spiral bevel gears, using the above device, comprises the following steps:

(1) Connect and fix the spiral bevel gear through the connecting shaft to complete the polishing and installation of the workpiece;

(2) Use the handle of the indexing member to adjust the inclination angle θ of the workpiece polishing rotation axis, and use the positioning pin to pass through the positioning holes of the indexing member and the supporting column to ensure that the inclination angle is fixed;

(3) Add the prepared polishing slurry into the container and immerse the entire spiral bevel gear in it;

(4) The bevel gear begins to perform inclined planetary motion in the polishing slurry, and the mechanical vibration module is turned on at the same time to drive the slurry in the container to vibrate evenly, thereby enhancing the mechanical removal force between the abrasive particles and the workpiece surface. At the same time, it ensures that the slurry is in uniform contact with all parts of the surface of the bevel gear, making the chemical reaction uniform and consistent, thereby improving the material removal efficiency and the consistency of the processed surface quality.

Beneficial effects of the present invention:

The invention provides a new polishing method and device for arc bevel gears, namely, mechanical vibration assisted chemical mechanical polishing and device. The material removal mechanism of the method is the coupling effect of chemical corrosion softening and mechanical micro-cutting, which can avoid processing defects such as scratches and micro-cracks in pure mechanical stress material removal processing in traditional machining, and realize efficient and high-quality removal of complex tooth surface materials of arc bevel gears; the processing method does not need to design special processing tools, does not have problems such as processing interference, has good processing flexibility, and can adapt to the polishing of arc bevel gears of different specifications; during the processing, the workpiece is immersed in the polishing slurry as a whole to perform inclined planetary motion, which solves the problem of polishing slurry and polishing pressure application during the chemical mechanical polishing of complex structural parts, and at the same time, under the auxiliary effect of mechanical vibration, promotes uniform contact between the polishing slurry and the tooth surface, and ensures the consistency of the tooth surface polishing quality; the designed device can realize the mechanical vibration assisted chemical mechanical polishing process of the arc bevel gear, and by designing a dividing component, the workpiece polishing tilt angle can be manually adjusted. The design of the tilt angle is to ensure that the radial and axial forces are simultaneously applied to the tooth surface of the arc bevel gear during the polishing process, so as to ensure high-quality and efficient polishing of the workpiece.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG1 is a schematic diagram of the overall structure of a spiral bevel gear mechanical vibration assisted chemical mechanical polishing device;

FIG2 is a schematic diagram of a partial structure of a support column;

FIG. 3 is a schematic structural diagram of a dividing component.

In the figure: 1 mounting base; 2 hydraulic lifting mechanism; 3 supporting column; 4 spindle; 5 bearing; 6 pin; 7 indexing member; 8 bolt; 9 connecting plate; 10 motor; 11 planetary motion mechanism; 12 connecting shaft; 13 spiral bevel gear; 14 mechanical vibration member;

3-1 supports the bottom end of the column (cooperating with the hydraulic lifting mechanism), 3-2 supports the top end of the column (cooperating with the indexing member), 3-2a supports the bearing mounting hole on the side of the column, 3-2b supports the central through hole on the side of the column, 3-2c supports the positioning hole on the side of the column, 3-2d supports the inner cylindrical surface 1 of the end face of the column, 3-2e supports the inner cylindrical surface 2 of the end face of the column, θ is the angle between the centers of adjacent positioning holes;

7-1 the tail end of the dividing member (whose cylindrical surface cooperates with the second inner cylindrical surface on the supporting column), 7-2 the front end of the dividing member (whose cylindrical surface cooperates with the first inner cylindrical surface on the supporting column), 7-1a the threaded hole on the end face of the cylinder of the dividing member, 7-2a the handle on the outer surface of the cylinder of the dividing member, 7-2b the center through hole on the end face of the cylinder of the dividing member, 7-2c the positioning hole on the end face of the cylinder of the dividing member.

Detailed ways

The specific implementation of the present invention is further described below in conjunction with the accompanying drawings and technical solutions.

As shown in Fig. 1, a mechanical vibration-assisted chemical mechanical polishing device for spiral bevel gears includes a mounting base 1, a hydraulic lifting mechanism 2, a support column 3, a mandrel 4, a bearing 5, a pin 6, a dividing member 7, a bolt 8, a connecting plate 9, a motor 10, a planetary motion mechanism 11, a connecting shaft 12, and a mechanical vibration member 14. The hydraulic lifting mechanism 2 is mounted on the base 1, the output shaft is connected to the bottom end 3-1 of the support column, the top end 3-2 of the support column is connected to the front end 7-2 of the dividing member through the mandrel 4, the tail end 7-1 of the dividing member is connected and fixed to the connecting plate 9 through the screw 8, the planetary motion mechanism 11 is mounted and fixed on the connecting plate 9, the input shaft of the planetary motion mechanism 11 is connected to the motor 10, the output shaft is fixed to the connecting shaft 12, the spiral bevel gear workpiece 13 is mounted on the bottom end surface of the connecting shaft 12, and the mechanical vibration mechanism 14 is vertically located directly below the spiral bevel gear 13.

The hydraulic lifting mechanism 2 is hydraulically controlled to make the support column 3 rise and fall smoothly, and finally realize the rising and falling movement of the spiral bevel gear 13;

As shown in FIG2 , the top end 3-2 of the support column is U-shaped as a whole, and the inner surface is provided with an inner cylindrical surface 1 3-2d and an inner cylindrical surface 2 3-2e that cooperate with the dividing member 7, and the side end surface is symmetrically provided with a central through hole 3-2b, a bearing mounting hole 3-2a and a positioning hole 3-2c. There are four groups of positioning holes 3-2c, which are evenly distributed on the edge of the end surface, and each group includes 3 holes. The angle between the centers of adjacent positioning holes 3-2c is θ;

As shown in FIG3 , the indexing member 7 is in a “T” shape as a whole, and is composed of two vertically connected cylindrical parts, namely, the front end 7-2 of the indexing member and the rear end 7-1 of the indexing member; wherein, the outer cylindrical surface of the rear end 7-1 of the indexing member matches with the inner cylindrical surface 3-2e on the supporting column 3, and the cylindrical end surface is provided with a threaded hole 7-1a for fixing the connecting plate 9; the outer cylindrical surface of the front end 7-2 of the indexing member matches with the inner cylindrical surface 3-2d on the supporting column 3, and the front end 7-2 of the indexing member is horizontally installed on the supporting column 3, and the two end surfaces of the cylinder are provided with a central through hole 7-2b and a positioning hole 7-2c that match with the supporting column 3, which are respectively used for the core shaft 4 and the positioning pin 6 to connect the indexing member 7 with the supporting column 3, and in addition, the outer surface of this part of the cylinder is provided with a handle 7-2a for manually controlling the rotation angle θ of the indexing member 7;

The two ends of the mandrel 4 are provided with threads, which connect the support column 3 with the indexing member 7, and the bearing 5 is installed in the bearing mounting hole 3-2a of the support column, and the nut is connected with the thread on the mandrel 4 to fix and lock the inner ring of the bearing to ensure that the indexing member 7 and the support column 3 can rotate;

The connecting plate 9 is generally "L"-shaped, with one end having a through hole, the number and size of which match a cylindrical end face threaded hole 7-1a in the dividing member 7, and the other end having a series of through holes for installing the planetary motion mechanism 11, and a through hole is opened to ensure the planetary motion of the output shaft of the planetary motion mechanism.

The mechanical vibration component 14 includes a mechanical vibration module 14 - 2 and a circular container 14 - 1 , wherein the circular container 14 - 1 is placed on the vibration module 14 - 2 and is used to hold chemical mechanical polishing slurry, and is placed as a whole below the spiral bevel gear.

A method for mechanical vibration-assisted chemical mechanical polishing of a spiral bevel gear comprises the following steps:

(1) Connect and fix the spiral bevel gear 13 through the connecting shaft 12 to complete the workpiece polishing and installation;

(2) Adjust the inclination angle θ of the workpiece polishing rotation axis through the indexing member handle 7-2a, and use the positioning pin 6 to pass through the positioning holes of the indexing member 7 and the supporting column 3 to ensure that the inclination angle is fixed;

(3) Add the prepared polishing slurry into the container 14-1 and immerse the entire spiral bevel gear 13 into it;

(4) The arc bevel gear 13 begins to perform inclined planetary motion in the polishing slurry, and at the same time, the mechanical vibration module 14-2 is turned on to drive the slurry in the container to vibrate evenly, thereby enhancing the mechanical removal force between the abrasive particles and the workpiece surface. At the same time, it ensures that the slurry is in uniform contact with all parts of the surface of the arc bevel gear, making the chemical reaction uniform and consistent, thereby improving the material removal efficiency and the consistency of the processed surface quality.

Claims (2)

1. The spiral bevel gear mechanical vibration auxiliary chemical mechanical polishing device is characterized by comprising a mounting base (1), a hydraulic lifting mechanism (2), a supporting upright post (3), a mandrel (4), a bearing (5), a pin (6), an indexing member (7), a bolt (8), a connecting plate (9), a motor (10), a planetary motion mechanism (11), a connecting shaft (12) and a mechanical vibration member (14); the hydraulic lifting mechanism (2) is arranged on the base (1), an output shaft is connected with the bottom end (3-1) of the supporting upright, the top end (3-2) of the supporting upright is connected with the front end (7-2) of the indexing member through the mandrel (4), the tail end (7-1) of the indexing member is fixedly connected with the connecting plate (9) through the screw (8), the planetary motion mechanism (11) is fixedly arranged on the connecting plate (9), an input shaft of the planetary motion mechanism (11) is connected with the motor (10), an output shaft is fixedly connected with the connecting shaft (12), the spiral bevel gear workpiece (13) is arranged on the bottom end surface of the connecting shaft (12), and the mechanical vibration mechanism (14) is vertically arranged under the spiral bevel gear (13);

the hydraulic lifting mechanism (2) enables the support upright post (3) to stably lift through hydraulic control, and finally the lifting and descending movement of the spiral bevel gear (13) is realized;

the top end (3-2) of the supporting upright post is U-shaped integrally, an inner cylindrical surface I (3-2 d) and an inner cylindrical surface II (3-2 e) which are matched with the indexing member (7) are arranged on the inner surface, a central through hole (3-2 b), a bearing mounting hole (3-2 a) and a positioning hole (3-2 c) are symmetrically arranged on the side end surface, the four groups of positioning holes (3-2 c) are uniformly distributed on the edge of the end surface, each group comprises 3 holes, and the included angle between the centers of the adjacent positioning holes (3-2 c) is theta;

The indexing member (7) is integrally T-shaped and consists of two cylindrical parts which are vertically connected, wherein the front end (7-2) of the indexing member and the tail end (7-1) of the indexing member are respectively arranged; wherein, the outer cylindrical surface of the tail end (7-1) of the indexing member is matched with the inner cylindrical surface II (3-2 e) on the supporting upright post (3), and the cylindrical end surface is provided with a threaded hole (7-1 a) for fixing the connecting plate (9); the outer cylindrical surface of the front end (7-2) of the indexing member is matched with the inner cylindrical surface I (3-2 d) on the supporting upright (3), the front end (7-2) of the indexing member is horizontally arranged on the supporting upright (3), the two end surfaces of the cylinder are provided with a central through hole (7-2 b) and a positioning hole (7-2 c) which are matched with the supporting upright (3), the central through hole and the positioning hole are respectively used for connecting the indexing member (7) with the supporting upright (3) through a mandrel (4) and a positioning pin (6), and in addition, the outer surface of the part of the cylinder is provided with a handle (7-2 a) for manually controlling the rotation angle theta of the indexing member (7);

threads are arranged at two ends of the mandrel (4), the support upright post (3) is connected with the indexing member (7), a bearing (5) is arranged in a bearing mounting hole (3-2 a) of the support upright post, a nut is connected with the threads on the mandrel (4), and the inner ring of the bearing is fixedly locked, so that the indexing member (7) and the support upright post (3) can rotate;

the connecting plate (9) is L-shaped integrally, one end of the connecting plate is provided with through holes, the number and the size of the through holes are matched with those of a cylindrical end face threaded hole (7-1 a) in the indexing member (7), the other end of the connecting plate is provided with a series of through holes for installing the planetary motion mechanism (11), and meanwhile, the connecting plate is provided with a through hole for ensuring the planetary motion of an output shaft of the planetary motion mechanism;

The mechanical vibration member (14) comprises a mechanical vibration module (14-2) and a circular container (14-1), wherein the circular container (14-1) is arranged above the vibration module (14-2) and is used for containing chemical mechanical polishing slurry, and the circular container is integrally arranged below the spiral bevel gear (13).

2. A spiral bevel gear mechanical vibration assisted chemical mechanical polishing method employing the polishing apparatus of claim 1, comprising the steps of:

step one: the spiral bevel gear (13) is fixedly connected through the connecting shaft (12) to finish the polishing and the installation of the workpiece;

Step two: the inclination angle theta of the polishing rotation axis of the workpiece is adjusted by the handle (7-2 a) of the indexing member, and the positioning pin (6) penetrates through the positioning holes of the indexing member (7) and the supporting upright post (3) to ensure the fixation of the inclination angle;

step three: adding the prepared polishing slurry into a container (14-1), and immersing the whole spiral bevel gear (13);

Step four: the spiral bevel gear (13) starts to perform inclined planetary motion in the polishing slurry, and simultaneously, the mechanical vibration module (14-2) is started to drive the slurry in the container to vibrate uniformly.