CN117849435B - Detection device for power supply loop current of electrostatic chuck and semiconductor process equipment - Google Patents
Detection device for power supply loop current of electrostatic chuck and semiconductor process equipment Download PDFInfo
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Abstract
The application discloses a detection device for power supply loop current of an electrostatic chuck and semiconductor process equipment. The device comprises a sampling resistor, an operational amplifier, a reference potential end and a power supply end, wherein the sampling resistor is connected in series with the output end of an electrostatic chuck power supply, the input positive end of the operational amplifier is connected with the input end of the sampling resistor, the input negative end of the operational amplifier is connected with the output end of the sampling resistor, the reference potential end of the operational amplifier is used for inputting a first reference voltage, the absolute voltage difference between the first reference voltage and the output voltage of the output end of the electrostatic chuck power supply is smaller than the tolerance voltage difference of the operational amplifier, the power supply end of the operational amplifier is used for inputting a first power supply voltage, the first power supply voltage is higher than the first reference voltage by a preset first voltage value, and the output end of the operational amplifier is used for outputting a voltage signal proportional to a loop current. The application adopts a common operational amplifier with non-high voltage isolation, thereby reducing the cost and improving the accuracy of current detection.
Description
Technical Field
The application belongs to the technical field of semiconductors, and particularly relates to a detection device for power supply loop current of an electrostatic chuck and semiconductor process equipment.
Background
A chuck, i.e., a support table within a process chamber for holding, supporting, or loading a wafer to be processed or a tray loaded with wafers during wafer processing performed by semiconductor processing equipment. An electrostatic chuck (Electrostatic Chuck, ESC for short), i.e., a chuck that holds a wafer or tray using the principle of electrostatic attraction. The substrate of the ESC is embedded with chuck electrodes, and the ESC power supply provides DC high voltage power for the chuck electrodes, thereby generating electrostatic force between the chuck and the wafer, and fixing the wafer or the tray on the chuck.
In order to conveniently understand the operation condition of the semiconductor process equipment and protect the equipment and personnel safety, the current of the ESC power supply loop needs to be accurately detected, and a necessary short-circuit protection circuit and the like are designed. The ESC power supply has the characteristics of high voltage output and micro current output, and brings certain difficulty for current detection.
IN the related art, as shown IN fig. 1, a sampling resistor R is connected IN series to the Output end of the electrostatic chuck power supply 10 to convert the current signal flowing through the sampling resistor R into a voltage signal, and the voltage signal is amplified by the operational amplifier 12, because the voltage HV +、HV+ -U (U is generally less than 10 v) to the Ground (GND) of the input end (IN +, IN-) of the operational amplifier 12 is all dc high voltage (generally one thousand to tens of thousands of volts), and the reference potential end of the operational amplifier 12 is Grounded (GND), so that a voltage difference of one thousand to tens of thousands of volts exists between the input end (IN +, IN-) of the operational amplifier 12 and the reference potential end, IN order to ensure the withstand voltage requirement of the operational amplifier 12, the operational amplifier 12 needs to use a high-voltage isolated operational amplifier, that is, the input end and the Output end of the operational amplifier 12 are isolated, and the isolated voltage Uiso is greater than or equal to the voltage HV + Output of the ESC power supply to the load. The magnitude of the ESC supply loop current can be calculated by detecting the voltage at the output of op amp 12 and based on the amplification ratio. However, the operational amplifier with high voltage isolation has higher cost, and the value of the isolation voltage is limited, so that when the voltage of the output end of the electrostatic chuck power supply is too large, the accuracy of current detection is poor.
Disclosure of Invention
The embodiment of the application aims to provide a detection device for loop current of an electrostatic chuck power supply and semiconductor process equipment, which are used for solving the problems that the cost of a high-voltage isolated operational amplifier in the related art is high, the value of an isolated voltage is limited, and the accuracy of current detection is poor when the voltage of the output end of the electrostatic chuck power supply is overlarge.
In order to achieve the above purpose, the embodiment of the present application adopts the following technical scheme:
In a first aspect, an embodiment of the present application provides a detection device for loop current of an electrostatic chuck power supply, including a sampling resistor, the sampling resistor is connected in series with an output end of the electrostatic chuck power supply, an operational amplifier, an input positive end of the operational amplifier is connected with an input end of the sampling resistor, an input negative end of the operational amplifier is connected with an output end of the sampling resistor, a reference potential end of the operational amplifier is used for inputting a first reference voltage, an absolute voltage difference between the first reference voltage and an output voltage of the output end of the electrostatic chuck power supply is smaller than a tolerance voltage difference of the operational amplifier, a power supply end of the operational amplifier is used for inputting a first power supply voltage, the first power supply voltage is higher than the first reference voltage by a preset first voltage value, and an output end of the operational amplifier is used for outputting a voltage signal proportional to the loop current.
In a second aspect, an embodiment of the present application provides a semiconductor process apparatus, including an electrostatic chuck, an electrostatic chuck power supply, and a detection device for an electrostatic chuck power supply loop current according to the first aspect of the present application.
The above at least one technical scheme adopted by the embodiment of the application can achieve the following beneficial effects:
In the embodiment of the application, the reference potential end of the operational amplifier is used for inputting a first reference voltage, the absolute voltage difference between the first reference voltage and the output voltage of the output end of the electrostatic chuck power supply is smaller than the tolerance voltage difference of the operational amplifier, the power supply end of the operational amplifier is used for inputting a first power supply voltage, and the first power supply voltage is higher than the first reference voltage by a preset first voltage value. The first reference voltage of the reference potential end of the operational amplifier is set to be smaller than the tolerance voltage difference of the operational amplifier with the output voltage of the output end of the electrostatic chuck power supply, so that the input end (the input positive end and the input negative end) of the operational amplifier and the ground voltage of the output end are both direct-current high voltages, but the voltage difference between any two is very low, the operational amplifier only needs to adopt a common operational amplifier which is isolated by non-high voltage, the high-voltage isolated operational amplifier is prevented from being high in cost, the value of the isolated voltage is limited, and when the high-voltage of the output end of the electrostatic chuck power supply is overlarge, the problem of poor accuracy of current detection is solved, the cost is reduced, and the accuracy of current detection is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the application and do not constitute a limitation on the application. In the drawings:
FIG. 1 is a schematic diagram of a related art detection device for detecting a power supply loop current of an electrostatic chuck;
FIG. 2 is a schematic diagram of an electrostatic chuck electrical system according to one embodiment of the present application;
FIG. 3 is a schematic diagram of a detection device for detecting a power supply loop current of an electrostatic chuck according to an embodiment of the present application;
FIG. 4 is a schematic diagram of a detecting device for detecting a power supply loop current of an electrostatic chuck according to another embodiment of the present application;
fig. 5 is a schematic structural diagram of a power supply unit according to an embodiment of the present application;
Fig. 6 is a schematic structural diagram of a power supply unit according to another embodiment of the present application;
Fig. 7 is a schematic structural diagram of a semiconductor processing apparatus according to an embodiment of the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the technical solutions of the present application will be clearly and completely described below with reference to specific embodiments of the present application and corresponding drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The terms "first," "second," and the like in this specification are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the application may be practiced otherwise than as specifically illustrated or described herein. Further, "and/or" in the present application means at least one of the connected objects, and the character "/" generally means a relationship in which the associated objects are one kind of "or". It should be noted that, the data related to the present application are all obtained on the premise of obtaining the authorization of the user.
A chuck, i.e., a support table within a process chamber for holding, supporting, or loading a wafer to be processed or a tray loaded with wafers during wafer processing performed by semiconductor processing equipment. An electrostatic chuck (Electrostatic Chuck, ESC for short), i.e., a chuck that holds a wafer or tray using the principle of electrostatic attraction. The substrate of the ESC is embedded with chuck electrodes, and the ESC power supply provides DC high voltage power for the chuck electrodes, thereby generating electrostatic force between the chuck and the wafer, and fixing the wafer or the tray on the chuck.
Fig. 2 is a schematic diagram of an electrical system of an electrostatic chuck, as shown in fig. 2, the substrate of the electrostatic chuck 23 includes a first ceramic layer 22 and a second ceramic layer 26, in which a first electrode 21 and a second electrode 25 are embedded in the first ceramic layer 22 and the second ceramic layer 26, respectively, the first electrode 21 and the second electrode 25 are made of metal, and all four sides of the substrate are wrapped by the first ceramic layer 22 and the second ceramic layer 26, and two high voltage Output terminals HV + Output and HV-Output of the electrostatic chuck power supply 10 are connected with the first electrode 21 and the second electrode 25 respectively through a first filter circuit 24 and a second filter circuit 27.
The voltage level at the two high voltage outputs of the electrostatic chuck power supply 10 is typically one thousand to tens of thousands of volts (V), and the loop current of the electrostatic chuck power supply 10 is very small because both ceramic layers are insulating materials. For example, in a coulomb type electrostatic chuck, both ceramic layers are high purity ceramic materials, typically requiring a resistance between the two electrodes and ground of greater than 1000 Ji Ou (gΩ) or requiring a loop current I <10 microamps (μa) of the electrostatic chuck power supply 10. In JR type electrostatic chucks, the two ceramic layers are doped with conductive material, and the loop current I is slightly larger, generally requiring a loop current I <200 μa.
In order to conveniently understand the operation condition of the semiconductor process equipment and protect the equipment and personnel safety, the current of the ESC power supply loop needs to be accurately detected, and a necessary short-circuit protection circuit and the like are designed. The ESC power supply has the characteristics of high voltage output and micro current output, and brings certain difficulty for current detection.
In the related art, a high-voltage isolated operational amplifier is used for detecting the loop current of the ESC power supply. However, the operational amplifier with high voltage isolation has higher cost, and the value of the isolation voltage is limited, so that when the voltage of the output end of the electrostatic chuck power supply is too large, the accuracy of current detection is poor. Therefore, the application provides a detection device for the loop current of an electrostatic chuck power supply and semiconductor process equipment, which are used for solving the problems that the cost of a high-voltage isolated operational amplifier in the related art is high, the value of an isolated voltage is limited, and the accuracy of current detection is poor when the voltage of the output end of the electrostatic chuck power supply is overlarge.
The following describes in detail the technical solutions provided by the embodiments of the present application with reference to the accompanying drawings.
Fig. 3 is a schematic structural diagram of a detection device for detecting a power supply loop current of an electrostatic chuck according to an embodiment of the application. As shown in fig. 3, the detection device for the electrostatic chuck power supply loop current according to the embodiment of the application may specifically include a sampling resistor R and a voltage detection unit 31.
Wherein, the sampling resistor R is connected in series with the output end of the electrostatic chuck power supply 10.
Here, the output terminal of the electrostatic chuck power supply 10 may be the positive output terminal of the electrostatic chuck power supply 10, or may be the negative output terminal of the electrostatic chuck power supply 10. The Output voltage of the positive Output end of the electrostatic chuck power supply 10 is HV +, the Output voltage of the negative Output end of the electrostatic chuck power supply 10 is HV-, and the voltages Output to the load are respectively denoted as HV +Output、HV- Output. For convenience of description, the following description will take the output terminal of the electrostatic chuck power supply 10 as the output positive terminal of the electrostatic chuck power supply 10 as an example.
The voltage detection unit 31 is configured to amplify the sampling voltage U across the sampling resistor R, generate a detection voltage, and output the detection voltage through an output terminal of the voltage detection unit 31. The sampling voltage U at both ends of the sampling resistor R can be calculated from the detection voltage, and then the loop current I of the electrostatic chuck power supply 10 flowing through the sampling resistor R, i=u/R, is calculated from the sampling voltage U and the resistance value R of the sampling resistor R.
The voltage detection unit 31 may specifically include an operational amplifier 12.
The input positive terminal IN + of the operational amplifier 12 is connected to the input 1 of the sampling resistor R, the input negative terminal IN - of the operational amplifier 12 is connected to the output 2 of the sampling resistor R, and the output of the operational amplifier 12 is used for outputting a voltage signal proportional to the loop current. The input voltage u=r×i of the operational amplifier 12, the operational amplifier 12 amplifies the voltage U, and the gain (amplification factor) of the operational amplifier 12 is adjustable, denoted by K 12. The voltage U 12＝K12*U＝K12*R*I,U12 c I at the output terminal of the operational amplifier 12 is converted into a voltage signal U 12 by circuit conversion.
In order to overcome the disadvantages of the high voltage isolation op amp 12 of fig. 1, the op amp 12 in the embodiment of the application adopts a common op amp, and the isolation voltage of the input terminal and the output terminal can satisfy the condition that the isolation voltage is greater than the preset voltage (e.g. 12V).
In the electric field, when the reference voltages are selected differently, the voltages at a certain point are different. In electronic circuits, the reference voltage is usually defined by a metal base plate, i.e. by the reference voltage ground in the electronic circuit, which is zero, so that a negative voltage is lower than the reference voltage and a positive voltage is higher than the reference voltage. A positive dot voltage indicates that the dot voltage is higher than the reference voltage, and a negative dot voltage indicates that the dot voltage is lower than the reference voltage. And calculating the voltage between each point and the reference voltage to obtain the voltage of each point. The voltage value of a certain point in the circuit is opposite, the reference voltage is selected differently, and the voltage of each point in the circuit is changed accordingly. The voltage value between two points in the circuit is fixed and is not changed due to the difference of the reference voltage, namely, the voltage value is irrelevant to the selection of the reference voltage. The reference voltage may be selected to be a specific voltage value.
The supply voltage VDD + =12v of the operational amplifier 12 in fig. 1, the reference potential Ground (GND) of the operational amplifier 12 in fig. 1, the corresponding reference voltage VDD - =0v, i.e. the supply voltage VDD + of the operational amplifier 12 is 12V higher than the reference voltage VDD -.
Unlike the operational amplifier 12 in fig. 1, the reference voltage terminal of the operational amplifier 12 in the embodiment of the present application is used for inputting the first reference voltage VDD1 -, the absolute voltage difference Δvd1 between the first reference voltage VDD1 - and the output voltage HV + of the output terminal of the electrostatic chuck power supply 10 is smaller than the tolerance voltage difference U1 max of the operational amplifier 12, that is, the value range of VDD1 - is (HV +-U1max,HV++U1max), for example, the reference voltage terminal of the operational amplifier 12 and the output terminal of the electrostatic chuck power supply 10 (corresponding voltage is denoted as HV +) can be connected, that is, the first reference voltage VDD1- =hv + to ground of the reference voltage terminal of the operational amplifier 12. Correspondingly, the power supply terminal of the operational amplifier 12 is used for inputting a first power supply voltage VDD1 +, and the first power supply voltage VDD1 + is higher than the first reference voltage VDD1 - by a preset first voltage value Δv1, namely, VDD1 +＝VDD1- + [ DELTA ] v1. The first voltage Deltav 1 is 3.3V-36V, for example, 12V, and is at the same time VDD1 +＝VDD1- +12V. Taking the first reference voltage VDD1 --HV+ = Δvd1 as an example, where Δvd1 is smaller than the withstand voltage difference U1 max of the operational amplifier 12, if HV + is positive 2000V, then VDD1 - is positive 2000v+Δvd1 to ground, i.e. the first reference voltage of the operational amplifier 12 is positive 2000v+Δvd1 (with respect to ground), and VDD1 + is positive 2012v+Δvd1 to ground. The voltage difference between the voltage IN + at the positive input end of the operational amplifier 12 and the first reference voltage VDD1 - is HV +-VDD1- =2000-2000- Δvd1= - [ Δvd1 ], the voltage difference between the voltage IN-at the negative input end of the operational amplifier 12 and the first reference voltage VDD 1-is HV + -U-VDD1- =2000-U-2000- Δvd1= -U- Δvd1, U is the voltage difference (i.e. the sampling voltage) across the sampling resistor R, generally U <10V, i.e. the voltage difference between the input end and the output end of the operational amplifier 12 is <10v+ [ Δvd1 ], and Δvd1 < the voltage difference U1 max of the operational amplifier 12 is adopted, so that a common non-high voltage isolated operational amplifier can be adopted, for example, the voltage difference U1 max can be selected to be 10V, and the value range of VDD1 - is (1990,2010V). IN an alternative embodiment, Δvdd1=0, IN which case the first reference voltage VDD1 -＝HV+ to ground at the reference potential end of the operational amplifier 12, that is, the first reference voltage VDD1 - is at the same potential as HV +, the first supply voltage VDD1 +＝HV+ + "Δv1, that is, the first supply voltage VDD1 + is higher than HV + by Δv1, the voltage difference between the voltage IN + at the input positive end of the operational amplifier 12 and the first reference voltage VDD1 - is 0, the voltage difference between the voltage IN - at the input negative end of the operational amplifier 12 and the first reference voltage VDD1 - is-U, and a common non-high voltage isolated operational amplifier may be used.
Further, the voltage detection unit 31 may further include a photo coupler 13.
Since the voltage HV +、HV+ -U to the ground at the input end (IN +、IN-) of the operational amplifier 12 is dc high voltage, after the amplification, the voltage U 12 at the output end of the operational amplifier 12 is also dc high voltage, and the detected voltage output by the voltage detecting unit 31 is used for the current I calculation, generally low voltage resistant equipment, so that the voltage U 12 at the output end of the operational amplifier 12 needs to be subjected to high voltage isolation processing to ensure the accuracy of current detection.
Specifically, a photo coupler 13 may be disposed between the operational amplifier 12 and the output terminal of the voltage detection unit 31, the input terminal of the photo coupler 13 is connected to the output terminal of the operational amplifier 12, and the output terminal of the photo coupler 13 is connected to the output terminal of the voltage detection unit 31.
The optocoupler 13 may in particular be a linear optocoupler, for example the ISO224 series. The photocoupler 13 comprises a light emitter T1 and a light receiver T2, no electric connection exists between the light emitter T1 and the light receiver T2, and through light intensity information transmission, the isolation voltage can be realized to be tens of thousands to tens of thousands of volts. The output voltage U 13 and the input voltage U 12 of the linear photocoupler 13 are proportional and adjustable, and the ratio is denoted as K 13, and the voltage U 13＝K13*U12＝K13*K12*U＝K13*K12*R*I,U13 oc I at the output of the photocoupler 13 converts the current signal I of the sampling resistor R into a voltage signal U 13 through circuit conversion. By detecting the voltage signal U 13, the loop current I can be calculated.
The positive input terminal of the light emitter T1 is connected to the output terminal of the operational amplifier 12, the negative input terminal and the reference potential terminal of the light emitter T1 are respectively used for inputting a second reference voltage VDD2 -, the absolute voltage difference Δvd2 between the second reference voltage VDD2 - and the output voltage HV + of the output terminal of the electrostatic chuck power supply 10 is smaller than the tolerance voltage difference U2 max of the light emitter T1, that is, the value range of VDD2 - is (HV +-U2max,HV++U2max), for example, the negative input terminal and the reference potential terminal of the light emitter T1 can be respectively connected to the output terminal (corresponding voltage is denoted as HV +) of the electrostatic chuck power supply 10, that is, the second reference voltage VDD2 -＝HV+ to the ground of the reference potential terminal of the light emitter T1. Correspondingly, the power supply terminal of the light emitter T1 is used for inputting a second power supply voltage VDD2 +, and the second power supply voltage VDD2 + is higher than the second reference voltage VDD2 - by a preset second voltage value Δv2, namely VDD2 +＝VDD2- + [ DELTA ] v2. The second voltage Deltav 2 is 3.3V-36V, for example, 12V, and is at the same time VDD2 +＝VDD2- +12V. Similarly, in an alternative embodiment, Δvd2=0.
The reference potential of the light receiver T2 is Grounded (GND), and the power supply terminal of the light receiver T2 is configured to input a third power supply voltage, where the third power supply voltage is a preset third voltage value (e.g. 12V). The output terminal of the light receiver T2 is connected to the output terminal of the voltage detection unit 31.
Further, the voltage detecting unit 31 may further include a voltage follower 14, and the photo coupler 13 is connected to an output terminal of the voltage detecting unit 31 through the voltage follower 14. The basic principle of the voltage follower 14 is to use negative feedback to achieve matching between the output voltage and the input voltage, the voltage follower 14 includes an amplifier and a feedback circuit, and the feedback circuit compares the output signal of the amplifier with the input signal and feeds the difference back to the input terminal of the amplifier to maintain the stability of the output voltage.
Specifically, an input positive terminal IN + of the voltage follower 14 is connected to an output positive terminal of the photo coupler 13 and an output terminal of the voltage follower 14, an input negative terminal IN - of the voltage follower 14 is connected to an output negative terminal of the photo coupler 13, and an output terminal of the voltage follower 14 is connected to an output terminal of the voltage detection unit.
The reference potential of the voltage follower 14 is Grounded (GND), and the power supply terminal of the voltage follower 14 is configured to input a fourth power supply voltage, which is a preset fourth voltage value (e.g., 12V). Since the voltages at the input, output and power supply of the voltage follower 14 are all within 12V (when the third voltage value and the fourth voltage value are 12V) to the ground, the voltage follower 14 may be a common non-high voltage isolated operational amplifier. The voltage U14＝U13＝K13*U12＝K13*K12*U＝K13*K12*R*I,U14∝I, at the output of the voltage follower 14 converts the current signal I of the sampling resistor R into a voltage signal U 14 by circuit conversion. By detecting the voltage signal U 14, the loop current I can be calculated.
As shown in fig. 4, in consideration of the fact that the loop current I is extremely weak, in order to improve the sampling accuracy, a tunnel magnetoresistance (Tunneling Magneto Resistive, TMR) sensor 11 may be provided before the input terminal of the operational amplifier 12 on the basis of fig. 3. The TMR sensor 11 is internally provided with an integrated coil, is designed to resist external magnetic interference, has extremely high precision, such as a TMR-MAC005 sensor, has a resolution of 150 nanoamperes (nA), and meets the micro-current sampling requirement of the ESC power supply 10.
An input positive terminal IN + of the TMR sensor 11 is connected with an input terminal IN - of the TMR sensor 11 is connected with an output terminal of the sampling resistor R, an output positive terminal Out + of the TMR sensor 11 is connected with an input positive terminal IN + of the operational amplifier 12, and an output negative terminal Out - of the TMR sensor 11 is connected with an input negative terminal IN - of the operational amplifier 12. The TMR sensor 11 is a linear sensor, the output voltage U 11 and the input voltage U of the TMR sensor 11 are proportional, and the proportion is adjustable, denoted as K 11, and the output voltage U 11＝K11 x U of the TMR sensor 11. Correspondingly, the voltage U14＝U13＝K13*U12＝K13*K12*U11＝K13*K12*K11*R*I,U14∝I, at the output of the voltage follower 14 converts the current signal I of the sampling resistor R into a voltage signal U 14 by circuit conversion. By detecting the voltage signal U 14, the loop current I can be calculated.
Similar to the operational amplifier 12, in order to overcome the disadvantage of the high voltage isolation operational amplifier 12 in fig. 1, the TMR sensor 11 in the embodiment of the present application adopts a common linear sensor, and the isolation voltage of the input terminal and the output terminal > the preset voltage (for example, 12V) can satisfy the condition.
Specifically, the reference potential end of the TMR sensor 11 is used for inputting the fifth reference voltage VDD5 -, the absolute voltage difference Δvd5 between the fifth reference voltage VDD5 - and the output voltage HV + of the output end of the electrostatic chuck power supply 10 is smaller than the tolerance voltage difference U5 max of the TMR sensor 11, that is, the value range of VDD5 - is (HV +-U5max,HV++U5max), for example, the reference potential end of the TMR sensor 11 may be connected with the output end of the electrostatic chuck power supply 10 (the corresponding voltage is denoted as HV +), that is, the reference potential end of the TMR sensor 11 is used for inputting the ground fifth reference voltage VDD5 -＝HV+, and the power supply end of the TMR sensor 11 is used for inputting the fifth power supply voltage VDD5 +, where the fifth power supply voltage VDD5 + is higher than the fifth reference voltage VDD5 - by a preset fifth voltage value Δv5, that is VDD5 +＝VDD5- + Δv5. The fifth voltage Deltav 5 is 3.3V-36V, for example, 12V, and is at the same time VDD5 +＝VDD5- +12V. Similarly, in an alternative embodiment, Δvd5=0.
If HV + is positive 2000V, then VDD5 - is positive 2000V+ΔVDD5, i.e., the fifth reference voltage for TMR sensor 11 is positive 2000V+ΔVDD5 (relative to ground), and VDD5 + is positive 2012V+ΔVDD5. The voltage difference between the voltage IN + at the positive input end of the TMR sensor 11 and the fifth reference voltage VDD5 - is HV +-VDD5- =2000-2000- Δvd5= - [ Δvd5 ], the voltage difference between the voltage IN - at the negative input end of the TMR sensor 11 and the fifth reference voltage VDD5 - is HV +-U-VDD5- =2000-U-2000- Δvd5= -U- Δvd5, U is the voltage difference (i.e. the sampling voltage) across the sampling resistor R, generally U <10V, i.e. the voltage difference between the input end and the output end of the TMR sensor 11 is <10v+ [ Δvd5 ], and Δvd1 < the tolerance voltage difference U1 max of the operational amplifier, so that a normal non-high voltage isolated linear sensor is used, for example, the tolerance voltage difference U5 max may be selected to be 12V, and VDD1 - is IN the range of (1988,2012) V.
Correspondingly, the input terminals IN +、IN- of the operational amplifier 12 are the output terminals Out + and Out - of the TMR sensor 11, and the voltage values of the first reference voltage VDD1 - and the fifth reference voltage VDD5 - are V Out+ and V Out-, respectively, corresponding to the reference voltages HV +,Out+ and Out -, respectively, the voltage difference between the voltage of the input positive terminal IN + of the operational amplifier 12 and the reference voltage VDD - thereof is V Out++HV+-VDD-＝VOut+, the voltage difference between the voltage of the input negative terminal IN - of the operational amplifier 12 and the reference voltage VDD - thereof is V Out-+HV+-VDD-＝VOut-,VOut+ and V Out-, respectively, smaller than 12V (when the power supply voltage of the TMR sensor 11 to the ground is 12V, the output voltage to the ground is 12V according to the rail-to-rail rule), namely the voltage difference between the input terminal and the output terminal of the operational amplifier 12 is 12V, although the input terminal (IN +、IN-) of the operational amplifier 12, The voltage to the ground of the output end is direct current high voltage, but the voltage difference between any two is very low, so that a common non-high voltage isolated operational amplifier is adopted.
In some alternative embodiments, the first supply voltage VDD1 + required by the op-amp, the second supply voltage VDD2 + required by the light emitter in the optocoupler, and the fifth supply voltage VDD5 + required by the TMR sensor are all equal, and the reference voltages of the op-amp, the light emitter in the optocoupler, and the TMR sensor are all equal.
Further, the detection apparatus for electrostatic chuck power supply loop current according to the embodiment of the present application may further include a power supply unit configured to output a high-voltage power supply voltage required by each device in the voltage detection unit, for example, a first power supply voltage VDD1 + required by the operational amplifier, a second power supply voltage VDD2 + required by the light emitter in the photocoupler, and a fifth power supply voltage VDD5 + required by the TMR sensor to the operational amplifier. In the case where the first power supply voltage VDD1 +, the second power supply voltage VDD2 +, and the fifth power supply voltage VDD5 + are all equal, the power supply unit is configured to output the same power supply voltage to the operational amplifier, the light emitter of the photocoupler, and the TMR sensor.
As shown in fig. 5, the power supply unit is a direct current-to-direct current (DC/DC) circuit. The power supply unit may specifically include a voltage conversion module T5. The first input terminal of the voltage conversion module T5 is configured to input a sixth supply voltage, where the sixth supply voltage is a preset sixth voltage value, for example, 24V. The second input terminal of the voltage conversion module T5 is Grounded (GND) through the chopper module IC2, the first output terminal (SGND) of the voltage conversion module T5 is connected to the output terminal of the electrostatic chuck power supply, that is, to the reference potential terminal of the operational amplifier, the photocoupler and the TMR sensor in fig. 3 and 4, the corresponding voltage is denoted as SGND, the second output terminal of the voltage conversion module T5 is used for outputting the target supply voltage (that is, the first supply voltage, the second supply voltage or the fifth supply voltage), and the voltage of the target supply voltage with respect to SGND is 12V in fig. 5, that is, the voltage with respect to Ground (GND) is (sgnd+12) V, that is, the second output terminal of the voltage conversion module T5 is connected to the supply terminals of the operational amplifier, the photocoupler and the TMR sensor in fig. 3 and 4.
The voltage conversion module T5 may be a transformer. In fig. 5, the primary side supply voltage of the transformer is 24V, the reference voltage is Ground (GND), the secondary side output voltage of the transformer is 12V, the reference voltage is sgnd=hv +, and at this time, the 12V (to SGND) to ground voltage is (HV + +12) V. If HV + is positive 2000V, i.e., SGND is positive 2000V,12V (SGND) is positive 2012V, SGND and transformer primary side Ground (GND) are at a voltage difference of 2000V. This requires that the primary and secondary side isolation voltage U iso>HV+ = 2000V of the transformer, which can be generally achieved by means of wire insulation, integral glue filling, and increasing the primary and secondary side spacing.
The power supply unit can maintain the stability of the output voltage of the power supply unit by adjusting the duty ratio of the output pulse width modulation (Pulse Width Modulation, abbreviated as PWM) of the chopper module IC 2.
The power input pin VIN (corresponding to 13 pins) of the chopper module IC2 is connected to the first input terminal of the voltage conversion module T5, the soft start pin SS (corresponding to 14 pins) of the chopper module IC2 is grounded, the switching pin SW (corresponding to 9-11 pins) of the chopper module IC2 is connected to the second input terminal of the voltage conversion module T5, and the chopper module IC2 is configured to periodically switch on or off the connection between the switching pin SW and the second input terminal of the voltage conversion module T5.
The power supply unit may further include an input circuit, through which the power input pin VIN of the chopper module IC2 is connected to the first input terminal of the voltage conversion module T5. The input circuit includes a second resistor R2 and a tenth capacitor C10, where a first end of the second resistor R2 is connected to the first input end of the voltage conversion module T5, a second end of the second resistor R2 is connected to the power input pin VIN of the chopper module IC2, a first end of the tenth capacitor C10 is connected to the power input pin VIN of the chopper module IC2, and a second end of the tenth capacitor C10 is Grounded (GND).
The power supply unit may further include an input feedback circuit including a fifth resistor R5 and a sixth resistor R6. The first end of the fifth resistor R5 is connected to the first input end of the voltage conversion module T5, the second end of the fifth resistor R5 is connected to the first end of the sixth resistor R6, and the second end of the sixth resistor R6 is connected to the compensation pin COMP (corresponding to pin 1) of the chopper module IC 2.
The power supply unit may further include a voltage stabilizing filter circuit including a fourteenth capacitor C14 and a second zener diode Z2. The first end of the fourteenth capacitor C14 is connected to the second end of the fifth resistor R5, and the second end of the fourteenth capacitor C14 is Grounded (GND). The first end of the second zener diode Z2 is connected to the second end of the fifth resistor R5, and the second end of the fourteenth capacitor C14 is Grounded (GND).
The power supply unit may further include a power supply circuit that supplies an operating voltage to the chopper module IC2, the power supply circuit including a fourth resistor R4 and a ninth resistor R9. The first end of the fourth resistor R4 is connected to the first input end of the voltage conversion module T5, the second end of the fourth resistor R4 is connected to the pin SHDN (corresponding to 3 pins) of the chopper module IC2, the first end of the ninth resistor R9 is connected to the second end of the fourth resistor R4, and the second end of the ninth resistor R9 is Grounded (GND).
The power supply unit may further include a spike absorbing circuit, where the spike absorbing circuit includes a first zener diode Z1 and a second diode D2, and the first zener diode Z1 and the second diode D2 are connected in series between the first input terminal and the second input terminal of the voltage conversion module T5.
The power supply unit may further include a slow start circuit including a fifteenth capacitor C15 and a sixteenth capacitor C16. A first end of the fifteenth capacitor C15 is connected to the soft start pin SS of the chopper module IC2, and a second end of the fifteenth capacitor C15 is Grounded (GND). A first end of the sixteenth capacitor C16 is connected to the bypass control pin BYP (corresponding to the 12 pin) of the chopper module IC2, and a second end of the sixteenth capacitor C16 is Grounded (GND).
The power supply unit may further comprise an isolation capacitor C12 for isolating the ground GND at the input of the voltage conversion module T5 from the ground SGND at the output. The first end of the isolation capacitor C12 is connected to the compensation pin COMP (corresponding to pin 1) of the chopper module IC2, and the second end of the isolation capacitor C12 is Grounded (GND).
The power supply unit may further include an RCD sink circuit. The RCD snubber circuit includes a first diode D1, a first capacitor C1, and a third resistor R3. The first end of the first diode D1 is connected to the second output end of the voltage conversion module T5, and the second end of the first diode D1 is configured to output the target supply voltage. The first end of the first capacitor C1 is connected to the second output end of the voltage conversion module T5, the second end of the first capacitor C1 is connected to the first end of the third resistor R3, and the second end of the third resistor R3 is connected to the first output end (SGND) of the voltage conversion module T5.
The power supply unit may further include a third filter capacitor C3, a first end of the third filter capacitor C3 is connected to the second end of the first diode D1, and a second end of the third filter capacitor C3 is connected to the first output end (SGND) of the voltage conversion module T5.
The power supply unit may further include a sixth filter capacitor C6, a first end of the sixth filter capacitor C6 is connected to the second end of the first diode D1, and a second end of the sixth filter capacitor C6 is connected to the first output end (SGND) of the voltage conversion module T5.
The power supply unit may further include a ninth filter capacitor C9, a first end of the ninth filter capacitor C9 is connected to the second end of the first diode D1, a second end of the ninth filter capacitor C9 is connected to the first output end (SGND) of the voltage conversion module T5, and a second end of the third resistor R3 is connected to the first output end (SGND) of the voltage conversion module T5 through the ninth filter capacitor C9.
The power supply unit may further include a second photo-coupler IC1, an input positive terminal of the second photo-coupler IC1 is connected to the first output terminal (SGND) of the voltage conversion module T5 through an eleventh capacitor C11, an input negative terminal of the second photo-coupler IC1 is connected to the first output terminal (SGND) of the voltage conversion module T5 through an output feedback circuit, an output positive terminal of the second photo-coupler IC1 is connected to the first terminal of the isolation capacitor C12, and an output negative terminal of the second photo-coupler IC1 is Grounded (GND).
The output feedback circuit includes an eighth resistor R8, a thirteenth capacitor C13, a seventh resistor R7, a tenth resistor R10, and a reference voltage source IC3. The first end of the eighth resistor R8 is connected to the negative input end of the second optocoupler IC1, the second end of the eighth resistor R8 is connected to the first output end (SGND) of the voltage conversion module T5 through the reference voltage source IC3, the first end of the thirteenth capacitor C13 is connected to the second end of the eighth resistor R8, the second end of the thirteenth capacitor C13 is connected to the first output end (SGND) of the voltage conversion module T5 through the tenth resistor R10, the first end of the seventh resistor R7 is connected to the second end of the first diode D1, and the second end of the seventh resistor R7 is connected to the first output end (SGND) of the voltage conversion module T5 through the tenth resistor R10.
Further, as shown in fig. 6, on the basis of the embodiment shown in fig. 5, the power supply unit may further include a second filter capacitor C2, a seventh filter capacitor C7 and an eighth filter capacitor C8 disposed at the input end of the voltage conversion module T5, and the interference signals with different frequencies may be filtered by selecting the combinations of the capacitors with different capacitance values and dielectric materials, so as to increase the anti-interference capability of the input end. The first ends of the second filter capacitor C2, the seventh filter capacitor C7 and the eighth filter capacitor C8 are all connected with the first input end of the voltage conversion module T5, and the second ends of the second filter capacitor C2, the seventh filter capacitor C7 and the eighth filter capacitor C8 are all Grounded (GND).
The power supply unit can further comprise a fourth filter capacitor C4 and a fifth filter capacitor C5 which are arranged at the output end of the voltage conversion module T5, interference signals with different frequencies can be filtered by selecting capacitor combinations with different capacitance values and dielectric materials, the anti-interference capacity of the output end can be increased, the stability of output voltage is ensured, and ripple waves are reduced. The fourth filter capacitor C4 and the fifth filter capacitor C5 are respectively connected in parallel with the sixth filter capacitor C6.
The power supply unit may further include a dummy load resistor R93 connected in parallel with the sixth filter capacitor C6 to ensure stability of the output voltage.
The power supply unit can also comprise an output indicating circuit, and the output indicating circuit comprises an indicator light LED1 and a first resistor R1 which are connected in series to play a role in output indication. The output indication circuit is connected in parallel with the sixth filter capacitor C6.
In summary, in the detection device for loop current of an electrostatic chuck power supply according to the embodiment of the present application, a reference potential end of an operational amplifier is connected to an output end of the electrostatic chuck power supply, and a power supply end of the operational amplifier is used for inputting a first power supply voltage, where the first power supply voltage is higher than an output voltage of the output end of the electrostatic chuck power supply by a preset first voltage value. The reference voltage of the reference potential end of the operational amplifier is set to be the output voltage of the output end of the electrostatic chuck power supply, so that the input end (the input positive end and the input negative end) of the operational amplifier and the ground voltage of the output end are both direct-current high voltages, but the voltage difference between any two is very low, therefore, the operational amplifier adopts a common operational amplifier which is not isolated by high voltage, the cost of the operational amplifier which is isolated by high voltage is high, the value of the isolated voltage is limited, when the high voltage of the output end of the electrostatic chuck power supply is overlarge, the problem that the accuracy of current detection is poor is solved, the cost is reduced, and the accuracy of current detection is improved. High-voltage isolation is realized through the photoelectric coupler 13, low-cost high-voltage isolation is realized, and the accuracy of current detection is ensured. The stability of the output detection voltage is guaranteed through the voltage follower, and the accuracy of current detection is further improved. The accuracy of current sampling is improved through the TMR sensor, and the reference voltage of the TMR sensor is improved, so that the TMR sensor with non-high-voltage isolation is adopted, and the problem of high-voltage isolation cost is avoided. The power supply unit provides the required high-voltage power supply voltage for each device in the voltage detection unit.
The embodiment of the application also provides semiconductor process equipment. As shown in fig. 7, the semiconductor processing apparatus 70 according to the embodiment of the present application includes the electrostatic chuck 23, the electrostatic chuck power supply 10, and the detection device 71 of the electrostatic chuck power supply loop current according to the above embodiment.
The system, apparatus, module or unit set forth in the above embodiments may be implemented in particular by a computer chip or entity, or by a product having a certain function. One typical implementation is a computer. In particular, the computer may be, for example, a personal computer, a laptop computer, a cellular telephone, a camera phone, a smart phone, a personal digital assistant, a media player, a navigation device, an email device, a game console, a tablet computer, a wearable device, or a combination of any of these devices.
For convenience of description, the above devices are described as being functionally divided into various units, respectively. Of course, the functions of each element may be implemented in the same piece or pieces of software and/or hardware when implementing the present application.
It will be appreciated by those skilled in the art that embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
In one typical configuration, a computing device includes one or more processors (CPUs), input/output interfaces, network interfaces, and memory.
The memory may include volatile memory in a computer-readable medium, random Access Memory (RAM) and/or nonvolatile memory, such as Read Only Memory (ROM) or flash memory (flash RAM). Memory is an example of computer-readable media.
Computer readable media, including both non-transitory and non-transitory, removable and non-removable media, may implement information storage by any method or technology. The information may be computer readable instructions, data structures, modules of a program, or other data. Examples of storage media for a computer include, but are not limited to, phase change memory (PRAM), static Random Access Memory (SRAM), dynamic Random Access Memory (DRAM), other types of Random Access Memory (RAM), read Only Memory (ROM), electrically Erasable Programmable Read Only Memory (EEPROM), flash memory or other memory technology, compact disc read only memory (CD-ROM), digital Versatile Discs (DVD) or other optical storage, magnetic cassettes, magnetic tape magnetic disk storage or other magnetic storage devices, or any other non-transmission medium, which can be used to store information that can be accessed by a computing device. Computer-readable media, as defined herein, does not include transitory computer-readable media (transmission media), such as modulated data signals and carrier waves.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises an element.
The application may be described in the general context of computer-executable instructions, such as program modules, being executed by a computer. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform particular tasks or implement particular abstract data types. The application may also be practiced in distributed computing environments where tasks are performed by remote processing devices that are linked through a communications network. In a distributed computing environment, program modules may be located in both local and remote computer storage media including memory storage devices.
In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for system embodiments, since they are substantially similar to method embodiments, the description is relatively simple, as relevant to see a section of the description of method embodiments.
The foregoing is merely exemplary of the present application and is not intended to limit the present application. Various modifications and variations of the present application will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the application are to be included in the scope of the claims of the present application.
Claims (16)
1. A device for detecting a power supply loop current of an electrostatic chuck, comprising:
the sampling resistor is connected in series with the output end of the electrostatic chuck power supply;
The positive input end of the operational amplifier is connected with the input end of the sampling resistor, the negative input end of the operational amplifier is connected with the output end of the sampling resistor, the reference potential end of the operational amplifier is used for inputting a first reference voltage, the absolute voltage difference between the first reference voltage and the output voltage of the output end of the electrostatic chuck power supply is smaller than the tolerance voltage difference of the operational amplifier, the power supply end of the operational amplifier is used for inputting a first power supply voltage, the first power supply voltage is higher than the first reference voltage by a preset first voltage value, and the output end of the operational amplifier is used for outputting a voltage signal proportional to the loop current.
2. The apparatus of claim 1, further comprising a photocoupler comprising a light emitter and a light receiver;
The input positive end of the light emitter is connected with the output end of the operational amplifier, the input negative end and the reference potential end of the light emitter are respectively used for inputting a second reference voltage, the absolute voltage difference between the second reference voltage and the output voltage of the output end of the electrostatic chuck power supply is smaller than the tolerance voltage difference of the light emitter, the power supply end of the light emitter is used for inputting a second power supply voltage, and the second power supply voltage is higher than the second reference voltage by a preset second voltage value;
The reference potential of the light receiver is grounded, and the power supply end of the light receiver is used for inputting a third power supply voltage, wherein the third power supply voltage is a preset third voltage value.
3. The apparatus as recited in claim 2, further comprising:
The input positive end of the voltage follower is respectively connected with the output positive end of the photoelectric coupler and the output end of the voltage follower, and the input negative end of the voltage follower is connected with the output negative end of the photoelectric coupler.
4. A device according to claim 3, wherein the reference potential of the voltage follower is grounded, and the power supply terminal of the voltage follower is used for inputting a fourth power supply voltage, and the fourth power supply voltage is a preset fourth voltage value.
5. The apparatus as recited in claim 1, further comprising:
The operational amplifier is connected with two ends of the sampling resistor through the tunnel magneto-resistance sensor;
The input positive end of the tunnel magnetic resistance sensor is connected with the input end of the sampling resistor, the input negative end of the tunnel magnetic resistance sensor is connected with the output end of the sampling resistor, the output positive end of the tunnel magnetic resistance sensor is connected with the input positive end of the operational amplifier, the output negative end of the tunnel magnetic resistance sensor is connected with the input negative end of the operational amplifier, the reference potential end of the tunnel magnetic resistance sensor is used for inputting a fifth reference voltage, the absolute voltage difference between the fifth reference voltage and the output voltage of the output end of the electrostatic chuck power supply is smaller than the tolerance voltage difference of the tunnel magnetic resistance sensor, and the power supply end of the tunnel magnetic resistance sensor is used for inputting a fifth power supply voltage which is higher than the fifth reference voltage by a preset fifth voltage value.
6. The apparatus according to any one of claims 1-5, further comprising:
and the power supply unit is used for outputting the first power supply voltage to the operational amplifier.
7. The apparatus of claim 6, wherein the power supply unit comprises:
The first input end of the voltage conversion module is used for inputting a sixth power supply voltage, the sixth power supply voltage is a preset sixth voltage value, the second input end of the voltage conversion module is grounded through the chopper module, the first output end of the voltage conversion module is connected with the output end of the electrostatic chuck power supply, and the second output end of the voltage conversion module is used for outputting the first power supply voltage;
The power input pin of the chopper module is connected with the first input end of the voltage conversion module, the soft start pin of the chopper module is grounded, the switching pin of the chopper module is connected with the second input end of the voltage conversion module, and the chopper module is used for periodically switching on or off the connection between the switching pin and the second input end of the voltage conversion module.
8. The apparatus of claim 7, wherein the power supply unit further comprises an input circuit, the power input pin of the chopper module being connected to the first input terminal of the voltage conversion module through the input circuit;
the input circuit includes:
The first end of the second resistor is connected with the first input end of the voltage conversion module, and the second end of the second resistor is connected with the power input pin of the chopper module;
And the first end of the tenth capacitor is connected with the power input pin of the chopper module, and the second end of the tenth capacitor is grounded.
9. The apparatus of claim 7, wherein the power supply unit further comprises an input feedback circuit and a voltage stabilizing filter circuit;
The input feedback circuit comprises a fifth resistor and a sixth resistor, wherein the first end of the fifth resistor is connected with the first input end of the voltage conversion module, the second end of the fifth resistor is connected with the first end of the sixth resistor, and the second end of the sixth resistor is connected with the compensation pin of the chopper module;
the voltage stabilizing filter circuit comprises a fourteenth capacitor and a second voltage stabilizing diode, wherein the first end of the fourteenth capacitor is connected with the second end of the fifth resistor, the second end of the fourteenth capacitor is grounded, the first end of the second voltage stabilizing diode is connected with the second end of the fifth resistor, and the second end of the fourteenth capacitor is grounded.
10. The apparatus of claim 7, wherein the power supply unit further comprises a spike absorbing circuit and a slow start circuit;
The peak absorption circuit comprises a first voltage stabilizing diode and a second diode, wherein the first voltage stabilizing diode and the second diode are connected in series between a first input end and a second input end of the voltage conversion module;
The slow start circuit comprises a fifteenth capacitor and a sixteenth capacitor, wherein a first end of the fifteenth capacitor is connected with a soft start pin of the chopping module, a second end of the fifteenth capacitor is grounded, a first end of the sixteenth capacitor is connected with a bypass control pin of the chopping module, and a second end of the sixteenth capacitor is grounded.
11. The apparatus of claim 7, wherein the power supply unit further comprises:
The RCD absorption circuit comprises a first diode, a first capacitor and a third resistor; the first end of the first capacitor is connected with the second output end of the voltage conversion module, the second end of the first capacitor is connected with the first end of the third resistor, and the second end of the third resistor is connected with the first output end of the voltage conversion module;
The first end of the third filter capacitor is connected with the second end of the first diode, and the second end of the third filter capacitor is connected with the first output end of the voltage conversion module;
the first end of the sixth filter capacitor is connected with the second end of the first diode, and the second end of the sixth filter capacitor is connected with the first output end of the voltage conversion module;
And the first end of the ninth filter capacitor is connected with the second end of the first diode, the second end of the ninth filter capacitor is connected with the first output end of the voltage conversion module, and the second end of the third resistor is connected with the first output end of the voltage conversion module through the ninth filter capacitor.
12. The apparatus of claim 11, wherein the power supply unit further comprises:
The first end of the isolation capacitor is connected with the compensation pin of the chopper module, and the second end of the isolation capacitor is grounded;
The input positive end of the second photoelectric coupler is connected with the first output end of the voltage conversion module through an eleventh capacitor, the input negative end of the second photoelectric coupler is connected with the first output end of the voltage conversion module through an output feedback circuit, the output positive end of the second photoelectric coupler is connected with the first end of the isolation capacitor, and the output negative end of the second photoelectric coupler is grounded;
The output feedback circuit comprises an eighth resistor, a thirteenth capacitor, a seventh resistor, a tenth resistor and a reference voltage source, wherein the first end of the eighth resistor is connected with the input negative end of the second photoelectric coupler, the second end of the eighth resistor is connected with the first output end of the voltage conversion module through the reference voltage source, the first end of the thirteenth capacitor is connected with the second end of the eighth resistor, the second end of the thirteenth capacitor is connected with the first output end of the voltage conversion module through the tenth resistor, the first end of the seventh resistor is connected with the second end of the first diode, and the second end of the seventh resistor is connected with the first output end of the voltage conversion module through the tenth resistor.
13. The apparatus of claim 7, wherein the power supply unit further comprises a second filter capacitor, a seventh filter capacitor and an eighth filter capacitor disposed at the input of the voltage conversion module;
the first ends of the second filter capacitor, the seventh filter capacitor and the eighth filter capacitor are all connected with the first input end of the voltage conversion module, and the second ends of the second filter capacitor, the seventh filter capacitor and the eighth filter capacitor are all grounded.
14. The apparatus of claim 11, wherein the power supply unit further comprises a fourth filter capacitor, a fifth filter capacitor and a dummy load resistor disposed at an output of the voltage conversion module;
The fourth filter capacitor, the fifth filter capacitor and the dummy load resistor are respectively connected with the sixth filter capacitor in parallel.
15. The apparatus of claim 11, wherein the power supply unit further comprises an output indication circuit;
The output indicating circuit comprises an indicating lamp and a first resistor which are connected in series, and the output indicating circuit is connected with the sixth filter capacitor in parallel.
16. Semiconductor processing apparatus comprising an electrostatic chuck, an electrostatic chuck power supply and a detection device for an electrostatic chuck power supply loop current according to any one of claims 1-15.
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| CN116613703A (en) * | 2023-05-17 | 2023-08-18 | 立讯精密工业(芜湖)有限公司 | Power isolation switch control circuit, vehicle and control method |
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