CN117810322A - LED epitaxial structure, LED chip and light-emitting device - Google Patents
LED epitaxial structure, LED chip and light-emitting device Download PDFInfo
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
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- H—ELECTRICITY
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- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/8242—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP characterised by the dopants
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Abstract
本发明提供一种LED外延结构、LED芯片和发光装置,该LED外延结构包括自下而上叠置的衬底、第一半导体层、有源层、第二半导体层,有源层包括n对阱层与垒层的组合。阱层的结构材料为(AlX1Ga1‑X1)Y1In1‑Y1P,垒层的结构材料为(AlX2Ga1‑X2)Y2In1‑Y2P,相对于现有技术方案,本申请将阱层及垒层的In含量同步进行降低,因阱层与垒层之间仍然保持着一定的In含量差异,也就保证了阱层的压应力,不会对发光效率造成影响。同时,降低的In含量又缩减了阱层与衬底之间晶格常数的差异,减少位错等缺陷的产生,提升外延层的晶体质量。采用本申请的有源层设计后,不仅使得外延片边缘暗亮线大幅收敛,还使得LED芯片有5%‑10%的亮度提升。
The invention provides an LED epitaxial structure, an LED chip and a light-emitting device. The LED epitaxial structure includes a bottom-up stacked substrate, a first semiconductor layer, an active layer and a second semiconductor layer. The active layer includes n pairs. The combination of well layer and barrier layer. The structural material of the well layer is (Al X1 Ga 1‑X1 ) Y1 In 1‑Y1 P , and the structural material of the barrier layer is (Al Apply to reduce the In content of the well layer and barrier layer simultaneously. Since there is still a certain difference in In content between the well layer and the barrier layer, it is ensured that the compressive stress of the well layer will not affect the luminous efficiency. At the same time, the reduced In content reduces the difference in lattice constants between the well layer and the substrate, reduces the occurrence of defects such as dislocations, and improves the crystal quality of the epitaxial layer. After adopting the active layer design of this application, not only the dark and bright lines at the edge of the epitaxial wafer are greatly converged, but also the brightness of the LED chip is increased by 5%-10%.
Description
技术领域Technical Field
本发明涉及半导体发光材料技术领域,特别是涉及一种LED外延结构、LED芯片和发光装置。The present invention relates to the technical field of semiconductor light-emitting materials, and in particular to an LED epitaxial structure, an LED chip and a light-emitting device.
背景技术Background technique
发光二极管(Light Emitting Diode)是一种能将电能直接转换为光能的半导体器件,属于固态冷光源。LED固有物理特性使其能够在低电压/电流下工作,具有发光效率高、体积小、寿命长、节能等特点。因此,LED现已成为交通显示、医疗照明、军事通信等领域的核心发光器件。红光LED芯片一般由AlGaInP(铝镓铟磷)四元材料制备而成,四元系AlGaInP发光二极管具有耗电低、发光效率高、寿命长、体积小、成本低等特点,因此在照明以及光纤通信系统中有着广泛的应用。AlGaInP发光二极管的外延片通常包括衬底及依次层叠在衬底上的N型层、有源层、P型层等。有源层作为发光区域,其外延质量的好坏直接决定了LED的发光效率。Light Emitting Diode (Light Emitting Diode) is a semiconductor device that can directly convert electrical energy into light energy. It is a solid-state cold light source. The inherent physical characteristics of LEDs enable them to operate at low voltage/current, and have the characteristics of high luminous efficiency, small size, long life, and energy saving. Therefore, LED has now become the core light-emitting device in transportation display, medical lighting, military communications and other fields. Red LED chips are generally made of AlGaInP (aluminum gallium indium phosphorus) quaternary material. Quaternary AlGaInP light-emitting diodes have the characteristics of low power consumption, high luminous efficiency, long life, small size, and low cost. Therefore, they are widely used in lighting and Optical fiber communication systems have a wide range of applications. The epitaxial wafer of an AlGaInP light-emitting diode usually includes a substrate and an N-type layer, an active layer, a P-type layer, etc. sequentially stacked on the substrate. The active layer serves as the light-emitting area, and the quality of its epitaxy directly determines the luminous efficiency of the LED.
对于红光LED外延层,通过拉大有源层中阱层与垒层之间应力差异,可以提升阱层对载流子的复合能力而提亮。但是大多数设计方法都是通过增大阱的压应力,而垒应力不变的方式实现。然而,对于衬底来讲,阱层应变过大,导致晶格失配过大,易造成位错产生,尤其是外延片边缘位置自身压应力高于中心位置,基于此易造成边缘0-2mm处因应力失配进而产生暗亮线,存在品质风险。For the red LED epitaxial layer, by enlarging the stress difference between the well layer and the barrier layer in the active layer, the well layer's ability to recombine carriers can be improved and the brightness can be improved. However, most design methods are achieved by increasing the compressive stress of the well while keeping the barrier stress unchanged. However, for the substrate, the strain of the well layer is too large, resulting in excessive lattice mismatch, which can easily cause dislocations. Especially, the compressive stress at the edge of the epitaxial wafer is higher than that at the center. Based on this, it is easy to cause 0-2mm at the edge. Dark and bright lines are produced due to stress mismatch, which poses quality risks.
因此,需要对有源层的阱层与垒层重新进行设计,降低阱层与衬底之间的晶格失配,同时维持阱层与垒层之间的应力差异以提升亮度。Therefore, it is necessary to redesign the well layer and barrier layer of the active layer to reduce the lattice mismatch between the well layer and the substrate, while maintaining the stress difference between the well layer and the barrier layer to improve brightness.
发明内容Contents of the invention
鉴于以上所述现有技术的缺点,本发明的目的在于提供一种LED外延结构,用于解决现有技术中应力失配产生的暗亮线问题。In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide an LED epitaxial structure for solving the problem of dark-bright lines caused by stress mismatch in the prior art.
为实现上述目的及其他相关目的,本发明提供一种LED外延结构,所述LED外延结构包括自下而上叠置的第一半导体层、有源层、第二半导体层,所述有源层包括n个层对,每个层对包括阱层与垒层的组合;In order to achieve the above objects and other related objects, the present invention provides an LED epitaxial structure. The LED epitaxial structure includes a first semiconductor layer, an active layer, and a second semiconductor layer stacked from bottom to top. The active layer Including n layer pairs, each layer pair includes a combination of a well layer and a barrier layer;
所述阱层的结构材料为(AlX1Ga1-X1)Y1In1-Y1P,0.4≤Y1≤0.5≤1-Y1≤1;垒层的结构材料为(AlX2Ga1-X2)Y2In1-Y2P,0.4≤1-Y2≤0.5≤Y2≤0.6。The structural material of the well layer is ( AlX1Ga1 -X1 ) Y1In1 - Y1P, 0.4≤Y1≤0.5≤1-Y1≤1; the structural material of the barrier layer is ( AlX2Ga1 -X2 ) Y2In1 -Y2P , 0.4≤1-Y2≤0.5≤Y2≤0.6.
优选地,还包括衬底、以及位于衬底与第一半导体层之间的缓冲层和刻蚀截止层。Preferably, it also includes a substrate, a buffer layer and an etching stop layer located between the substrate and the first semiconductor layer.
优选地,所述第一半导体层包括叠置的N型欧姆接触层、N型电流扩展层、N型覆盖层。Preferably, the first semiconductor layer includes a stacked N-type ohmic contact layer, an N-type current spreading layer, and an N-type covering layer.
优选地,所述第二半导体层包括叠置的P型覆盖层、P型电流扩展层、P型欧姆接触层。Preferably, the second semiconductor layer includes a stacked P-type cover layer, a P-type current spreading layer, and a P-type ohmic contact layer.
优选地,0≤X1≤0.2,0.5≤X2≤1。Preferably, 0≤X1≤0.2, 0.5≤X2≤1.
优选地,5%≤((1-Y1)/Y1)-1≤20%,5%≤(Y2/(1-Y2))-1≤20%。Preferably, 5%≤((1-Y1)/Y1)-1≤20%, 5%≤(Y2/(1-Y2))-1≤20%.
优选地,1≤n≤50。Preferably, 1≤n≤50.
优选地,沿自下而上的方向,多个阱层的In含量逐步递增,多个垒层的In含量逐步递减。Preferably, along the bottom-up direction, the In content of the plurality of well layers gradually increases, and the In content of the plurality of barrier layers gradually decreases.
优选地,所述LED外延结构的衬底为GaAs,所述LED外延结构辐射红光。Preferably, the substrate of the LED epitaxial structure is GaAs, and the LED epitaxial structure radiates red light.
本发明还提供一种LED芯片,其特征在于,所述LED芯片包括:The invention also provides an LED chip, which is characterized in that the LED chip includes:
LED外延结构,所述LED外延结构包括自下而上叠置的第一半导体层、有源层、第二半导体层;所述有源层包括n个层对,每个层对包括阱层与垒层的组合;所述阱层的结构材料为(AlX1Ga1-X1)Y1In1-Y1P,0.4≤Y1≤0.5≤1-Y1≤1;垒层的结构材料为(AlX2Ga1-X2)Y2In1- Y2P,0.4≤1-Y2≤0.5≤Y2≤0.6;LED epitaxial structure, the LED epitaxial structure includes a first semiconductor layer, an active layer, and a second semiconductor layer stacked from bottom to top; the active layer includes n layer pairs, and each layer pair includes a well layer and a The combination of barrier layers ; the structural material of the well layer is ( Al 1-X2 ) Y2 In 1- Y2 P,0.4≤1-Y2≤0.5≤Y2≤0.6;
N电极和P电极,其中N电极与第一半导体层形成电连接,P电极与第二半导体层形成电连接。An N electrode and a P electrode, wherein the N electrode is electrically connected to the first semiconductor layer, and the P electrode is electrically connected to the second semiconductor layer.
优选地,0≤X1≤0.2,0.5≤X2≤1。Preferably, 0≤X1≤0.2, 0.5≤X2≤1.
优选地,5%≤((1-Y1)/Y1)-1≤20%,5%≤(Y2/(1-Y2))-1≤20%。Preferably, 5%≤((1-Y1)/Y1)-1≤20%, 5%≤(Y2/(1-Y2))-1≤20%.
优选地,1≤n≤50。Preferably, 1≤n≤50.
优选地,沿自下而上的方向,多个阱层的In含量逐步递增,多个垒层的In含量逐步递减。Preferably, along the bottom-up direction, the In content of the plurality of well layers gradually increases, and the In content of the plurality of barrier layers gradually decreases.
优选地,所述LED芯片辐射红光。Preferably, the LED chip radiates red light.
本发明还提供一种发光装置,所述发光装置包含上述的LED芯片。如上所述,本发明提供一种LED外延结构、LED芯片和发光装置,该LED外延结构包括自下而上叠置的衬底、第一半导体层、有源层、第二半导体层,有源层包括n对阱层与垒层的组合。阱层的结构材料为(AlX1Ga1-X1)Y1In1-Y1P,垒层的结构材料为(AlX2Ga1-X2)Y2In1-Y2P,作为优选方案,5%≤((1-Y1)/Y1)-1≤20%,5%≤(Y2/(1-Y2))-1≤20%。相对于现有技术方案,本申请将阱层及垒层的In含量同步进行降低,因阱层与垒层之间仍然保持着一定的In含量差异,也就保证了阱层的压应力,不会对发光效率造成影响。同时,降低的In含量又缩减了阱层与衬底之间晶格常数的差异,减少位错等缺陷的产生,提升外延层的晶体质量。采用本申请的有源层设计后,不仅使得外延片边缘暗亮线大幅收敛,还使得LED芯片有5%-10%的亮度提升。The present invention also provides a light-emitting device, which includes the above-mentioned LED chip. As mentioned above, the present invention provides an LED epitaxial structure, an LED chip and a light-emitting device. The LED epitaxial structure includes a bottom-up stacked substrate, a first semiconductor layer, an active layer, and a second semiconductor layer. The layers include n pairs of well layer and barrier layer combinations. The structural material of the well layer is (Al X1 Ga 1-X1 ) Y1 In 1-Y1 P , and the structural material of the barrier layer is ( Al (1-Y1)/Y1)-1≤20%, 5%≤(Y2/(1-Y2))-1≤20%. Compared with the existing technical solution, this application reduces the In content of the well layer and the barrier layer simultaneously. Since there is still a certain difference in In content between the well layer and the barrier layer, the compressive stress of the well layer is ensured without affecting the In content. Will affect the luminous efficiency. At the same time, the reduced In content reduces the difference in lattice constants between the well layer and the substrate, reduces the occurrence of defects such as dislocations, and improves the crystal quality of the epitaxial layer. After adopting the active layer design of this application, not only the dark and bright lines at the edge of the epitaxial wafer are greatly converged, but also the brightness of the LED chip is increased by 5%-10%.
附图说明Description of drawings
图1显示为LED外延结构的示意图。Figure 1 shows a schematic diagram of the LED epitaxial structure.
图2显示为本发明LED芯片为水平芯片的结构示意图。Figure 2 shows a schematic structural diagram of the LED chip of the present invention as a horizontal chip.
图3显示为本发明LED芯片为垂直倒装芯片的结构示意图。FIG. 3 is a schematic diagram showing the structure of a vertical flip chip LED chip of the present invention.
图4显示为本发明LED芯片为垂直正装芯片的结构示意图。Figure 4 shows a schematic structural diagram of the LED chip of the present invention as a vertically mounted chip.
图5显示为本发明发光装置的俯视结构示意图。FIG. 5 shows a schematic top structural view of the light-emitting device of the present invention.
元件标号说明Component number description
100 衬底100 substrate
101 缓冲层101 Buffer Layer
102 刻蚀截止层102 Etch cutoff layer
103 N型欧姆接触层103 N-type ohmic contact layer
104 N型电流扩展层104 N-type current expansion layer
105 N型覆盖层105 N type cover
106 有源层106 active layer
107 P型覆盖层107 P type covering
108 P型电流扩展层108 P-type current expansion layer
109 P型欧姆接触层109 P-type ohmic contact layer
1061 阱层1061 Well layer
1062 垒层1062 Layer
201 键合层201 bonding layer
202 基板202 substrate
203 P电极203 P electrode
204 N电极204 N electrode
205 DBR反射层205 DBR reflective layer
300 发光装置300 light fixtures
301 电路基板301 circuit board
302 发光单元302 lighting unit
具体实施方式Detailed ways
以下通过特定的具体实例说明本发明的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本发明的其他优点与功效。本发明还可以通过另外不同的具体实施方式加以实施或应用,本说明书中的各项细节也可以基于不同观点与应用,在没有背离本发明的精神下进行各种修饰或改变。The following describes the embodiments of the present invention through specific examples. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. Various details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.
如在详述本发明实施例时,为便于说明,表示器件结构的剖面图会不依一般比例作局部放大,而且所述示意图只是示例,其在此不应限制本发明保护的范围。此外,在实际制作中应包含长度、宽度及深度的三维空间尺寸。When describing the embodiments of the present invention in detail, for convenience of explanation, the cross-sectional views showing the device structure are not partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in actual production.
为了方便描述,此处可能使用诸如“之下”、“下方”、“低于”、“下面”、“上方”、“上”等的空间关系词语来描述附图中所示的一个元件或特征与其他元件或特征的关系。将理解到,这些空间关系词语意图包含使用中或操作中的器件的、除了附图中描绘的方向之外的其他方向。此外,当一层被称为在两层“之间”时,它可以是所述两层之间仅有的层,或者也可以存在一个或多个介于其间的层。本文使用的“介于……之间”表示包括两端点值。For convenience of description, spatial relationship words such as "below", "below", "below", "below", "above", "on", etc. may be used herein to describe an element or element shown in the drawings. The relationship of a feature to other components or features. It will be understood that these spatially relative terms are intended to encompass other orientations of the device in use or operation in addition to the orientations depicted in the figures. In addition, when a layer is referred to as being "between" two layers, it can be the only layer between the two layers, or one or more intervening layers may also be present. As used herein, "between" means including both endpoint values.
在本申请的上下文中,所描述的第一特征在第二特征“之上”的结构可以包括第一和第二特征形成为直接接触的实施例,也可以包括另外的特征形成在第一和第二特征之间的实施例,这样第一和第二特征可能不是直接接触。In the context of this application, structures described as having a first feature "on" a second feature may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features are formed between the first and second features. Embodiments between second features such that the first and second features may not be in direct contact.
需要说明的是,本实施例中所提供的图示仅以示意方式说明本发明的基本构想,遂图示中仅显示与本发明中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制,其实际实施时各组件的型态、数量及比例可为一种随意的改变,其组件布局型态也可能更为复杂。It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and therefore the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.
如图1所示,为GaAs红光LED的常见外延结构,包括自下而上的衬底100、缓冲层101、刻蚀截止层102、第一半导体层、有源层106、第二半导体层。其中,第一半导体层包括自下而上叠置的N型欧姆接触层103、N型电流扩展层104、N型覆盖层105;第二半导体层包括自下而上叠置的P型覆盖层107、P型电流扩展层108、P型欧姆接触层109。As shown in Figure 1, it is a common epitaxial structure of a GaAs red LED, including a bottom-up substrate 100, a buffer layer 101, an etching stop layer 102, a first semiconductor layer, an active layer 106, and a second semiconductor layer. . The first semiconductor layer includes an N-type ohmic contact layer 103, an N-type current spreading layer 104, and an N-type cladding layer 105 stacked from bottom to top; the second semiconductor layer includes a P-type cladding layer stacked from bottom to top. 107. P-type current expansion layer 108, P-type ohmic contact layer 109.
有源层106包括n个层对,每个层对包括阱层1061与垒层1062的组合,所述阱层1061的结构材料为(AlX1Ga1-X1)Y1In1-Y1P,0≤X1≤1,0≤Y1≤1-Y1≤1;垒层1062的结构材料为(AlX2Ga1-X2)Y2In1-Y2P,0≤X2≤1,0≤Y2≈1-Y2≤1。The active layer 106 includes n layer pairs, each layer pair includes a combination of a well layer 1061 and a barrier layer 1062, the structural material of the well layer 1061 is (Al X1 Ga 1-X1 ) Y1 In 1-Y1 P, 0≤X1≤1, 0≤Y1≤1-Y1≤1; the structural material of the barrier layer 1062 is (Al X2 Ga 1-X2 ) Y2 In 1-Y2 P, 0≤X2≤1, 0≤Y2≈1-Y2≤1.
现有的技术方案中,阱通常富In,((1-Y1)/Y1)-1≥20%,即Y1≤0.45,1-Y1≥0.55,也就是阱层1061的实际In含量大于0.55,这里设计较高的In含量是因为阱垒之间存在应力,可以提升亮度,然而阱层1061较高的In含量会增加其与衬底100之间的晶格失配。衬底GaAs的晶格常数为AlP与GaP的晶格常数为/>InP的晶格常数为阱层1061的晶格常数大致可以按照各种材料的占比进行计算,即 阱层1061的In含量较高,晶格常数大,因此会受到垒层1062的压应力,这种压应力可以提升亮度;但同时阱层1061的晶格常数又会大于衬底100的晶格常数,晶格失配大导致位错产生,尤其是外延片边缘位置0-2mm处因应力失配进而产生暗亮线,影响外延质量和后续形成的LED芯片的质量。In the existing technical solution, the well is usually rich in In, ((1-Y1)/Y1)-1≥20%, that is, Y1≤0.45, 1-Y1≥0.55, that is, the actual In content of the well layer 1061 is greater than 0.55. The higher In content is designed here because there is stress between the well barriers, which can improve the brightness. However, the higher In content of the well layer 1061 will increase the lattice mismatch between it and the substrate 100. The lattice constant of the substrate GaAs is The lattice constants of AlP and GaP are/> The lattice constant of InP is The lattice constant of the well layer 1061 can be roughly calculated according to the proportion of various materials, that is, The well layer 1061 has a high In content and a large lattice constant, and therefore will be subjected to compressive stress from the barrier layer 1062. This compressive stress can increase the brightness; but at the same time, the lattice constant of the well layer 1061 is greater than the lattice constant of the substrate 100. The large lattice mismatch leads to dislocations, especially at the edge of the epitaxial wafer at 0-2mm, where stress mismatch produces dark-bright lines, affecting the epitaxial quality and the quality of the subsequently formed LED chips.
因此,本发明提出一种设计思路,在保持阱垒之间应力的同时,减小阱层1061与衬底100之间的晶格失配,提升外延质量。Therefore, the present invention proposes a design idea to reduce the lattice mismatch between the well layer 1061 and the substrate 100 while maintaining the stress between the well barriers, and improve the epitaxial quality.
具体地,如图1所示,本发明提供一种LED外延结构,该LED外延结构包括自下而上叠置的衬底100、第一半导体层、有源层106、第二半导体层。其中,第一半导体层包括自下而上叠置的N型欧姆接触层103、N型电流扩展层104、N型覆盖层105;第二半导体层包括自下而上叠置的P型覆盖层107、P型电流扩展层108、P型欧姆接触层109。Specifically, as shown in FIG. 1 , the present invention provides an LED epitaxial structure, which includes a substrate 100 , a first semiconductor layer, an active layer 106 , and a second semiconductor layer stacked from bottom to top. The first semiconductor layer includes an N-type ohmic contact layer 103, an N-type current spreading layer 104, and an N-type cladding layer 105 stacked from bottom to top; the second semiconductor layer includes a P-type cladding layer stacked from bottom to top. 107. P-type current expansion layer 108, P-type ohmic contact layer 109.
具体地,衬底100的材料包括但不限于GaAs,在本实施例中,以GaAs为衬底100。Specifically, the material of the substrate 100 includes but is not limited to GaAs. In this embodiment, GaAs is used as the substrate 100 .
N型电流扩展层104设置于衬底100的表面上。其中,N型电流扩展层104的材料为AlGaInP,且为了提高N型电流扩展层104的电流扩展作用,在N型电流扩展层104中掺杂有一定浓度的N型杂质。The N-type current spreading layer 104 is disposed on the surface of the substrate 100 . Among them, the material of the N-type current spreading layer 104 is AlGaInP, and in order to improve the current spreading effect of the N-type current spreading layer 104, the N-type current spreading layer 104 is doped with a certain concentration of N-type impurities.
作为可选方案,在衬底100与N型电流扩展层104之间还依次设置有缓冲层101、刻蚀截止层102、N型欧姆接触层103;其中,由于缓冲层101的晶格质量相对衬底100晶格质量好,因而,在衬底100上生长缓冲层101有利于消除衬底100晶格缺陷对外延层的影响;刻蚀截止层102用于后期步骤化学刻蚀去除衬底100时的截止层,N型欧姆接触层103用于制备电极时形成良好的欧姆接触。在本实施例中,刻蚀截止层102为N型刻蚀截止层102,材料为N-GaInP,N型欧姆接触层103材料为N-GaAs。上述各个N型功能层的N型掺杂均选用硅掺杂。As an optional solution, a buffer layer 101, an etching stop layer 102, and an N-type ohmic contact layer 103 are sequentially arranged between the substrate 100 and the N-type current spreading layer 104; wherein, since the lattice quality of the buffer layer 101 is better than that of the substrate 100, growing the buffer layer 101 on the substrate 100 is conducive to eliminating the influence of the lattice defects of the substrate 100 on the epitaxial layer; the etching stop layer 102 is used as a stop layer when chemically etching and removing the substrate 100 in the later step, and the N-type ohmic contact layer 103 is used to form a good ohmic contact when preparing the electrode. In this embodiment, the etching stop layer 102 is an N-type etching stop layer 102, the material is N-GaInP, and the material of the N-type ohmic contact layer 103 is N-GaAs. The N-type doping of each of the above-mentioned N-type functional layers is silicon doping.
N型覆盖层105与P型覆盖层107则分别为N型掺杂及P型掺杂,分别用于提供电子及空穴,从而在有源层106发生复合形成辐射发光。The N-type cladding layer 105 and the P-type cladding layer 107 are N-type doped and P-type doped respectively, and are used to provide electrons and holes respectively, so that recombination occurs in the active layer 106 to form radiative emission.
P型电流扩展层108设置于P型覆盖层107的上方。可选地,P型电流扩展层108的材料为GaP,厚度介于0.8~3μm。在P型电流扩展层108的上方设置有P型欧姆接触层109,用于制备电极时形成良好的欧姆接触。上述P型覆盖层107的P型掺杂选用镁掺杂。The P-type current spreading layer 108 is disposed above the P-type cladding layer 107 . Optionally, the material of the P-type current spreading layer 108 is GaP, and the thickness ranges from 0.8 to 3 μm. A P-type ohmic contact layer 109 is provided above the P-type current spreading layer 108 to form a good ohmic contact when preparing electrodes. The P-type doping of the P-type cladding layer 107 is magnesium doping.
所述有源层106为提供电子和空穴复合提供光辐射的区域,根据发光波长的不同可选择不同的材料,包括n个层对,1≤n≤50,每个层对包括阱层1061与垒层1062的组合,垒层1062具有比阱层1061更宽的带隙,从而将电子和空穴限制在阱层1061中复合产生辐射发光。The active layer 106 is a region that provides light radiation for the recombination of electrons and holes. Different materials can be selected according to different luminescent wavelengths. The active layer 106 includes n layer pairs, 1≤n≤50. Each layer pair includes a combination of a well layer 1061 and a barrier layer 1062. The barrier layer 1062 has a wider band gap than the well layer 1061, thereby confining electrons and holes in the well layer 1061 to recombine and generate radiant light.
所述阱层1061的结构材料为(AlX1Ga1-X1)Y1In1-Y1P,0≤X1≤0.2,0.4≤Y1≤0.5≤1-Y1≤1。垒层1062的结构材料为(AlX2Ga1-X2)Y2In1-Y2P,0.5≤X2≤1,0.4≤1-Y2≤0.5≤Y2≤0.6。The structural material of the well layer 1061 is ( Al The structural material of the barrier layer 1062 is ( Al
进一步地,作为优选方案,20%≥((1-Y1)/Y1)-1≥5%,5%≤(Y2/(1-Y2))-1≤20%。计算后得到0.454≤Y1≤0.487,0.512≤Y2≤0.545;阱层1061中的In含量1-Y1为0.513≤1-Y1≤0.546,垒层1062中的In含量1-Y2为0.455≤1-Y2≤0.488。Furthermore, as a preferred solution, 20%≥((1-Y1)/Y1)-1≥5%, 5%≤(Y2/(1-Y2))-1≤20%. After calculation, we get 0.454≤Y1≤0.487, 0.512≤Y2≤0.545; the In content 1-Y1 in the well layer 1061 is 0.513≤1-Y1≤0.546, and the In content 1-Y2 in the barrier layer 1062 is 0.455≤1-Y2 ≤0.488.
相对于现有技术方案,本申请将阱层1061及垒层1062的In含量同步进行降低,因阱层1061与垒层1062之间仍然保持着一定的In含量差异,也就保证了阱层1061的压应力,不会对发光效率造成影响。同时,降低的In含量又缩减了阱层1061与衬底100之间晶格常数的差异,减少位错等缺陷的产生,提升外延层的晶体质量,保证外延片边缘暗亮线由原来的0-2mm收敛至0.5mm以内。Compared with the existing technical solutions, this application reduces the In content of the well layer 1061 and the barrier layer 1062 simultaneously. Since there is still a certain difference in In content between the well layer 1061 and the barrier layer 1062, it is ensured that the well layer 1061 The compressive stress will not affect the luminous efficiency. At the same time, the reduced In content reduces the difference in lattice constants between the well layer 1061 and the substrate 100, reduces the occurrence of defects such as dislocations, improves the crystal quality of the epitaxial layer, and ensures that the dark and bright lines at the edge of the epitaxial wafer are changed from the original 0 -2mm converges to within 0.5mm.
上述外延结构的制备方法为:The preparation method of the above epitaxial structure is:
提供衬底100;Provide a substrate 100;
在上述衬底100上依次形成缓冲层101、刻蚀截止层102、N型欧姆接触层103、N型电流扩展层104、N型覆盖层105、有源层106、P型覆盖层107、P型电流扩展层108、P型欧姆接触层109。A buffer layer 101 , an etching stop layer 102 , an N-type ohmic contact layer 103 , an N-type current spreading layer 104 , an N-type cap layer 105 , an active layer 106 , a P-type cap layer 107 , a P-type current spreading layer 108 , and a P-type ohmic contact layer 109 are sequentially formed on the substrate 100 .
其中,上述各个层均可采用化学气相沉积的方法进行沉积,对于有源层中阱层与垒层的In含量可以通过原料气体如TMIn的气体流量进行调整。Each of the above layers can be deposited by chemical vapor deposition. The In content of the well layer and barrier layer in the active layer can be adjusted by the gas flow rate of the raw material gas such as TMIn.
实施例一Embodiment 1
作为示例,本实施例将阱层1061中的In含量1-Y1选取为0.52,则阱层1061的晶格常数为垒层1062中的In含量1-Y2选取为0.46,则垒层1062的晶格常数为/>其中,衬底GaAs的晶格常数为/> As an example, in this embodiment, the In content 1-Y1 in the well layer 1061 is selected to be 0.52, then the lattice constant of the well layer 1061 is The In content 1-Y2 in the barrier layer 1062 is selected to be 0.46, then the lattice constant of the barrier layer 1062 is/> Among them, the lattice constant of the substrate GaAs is/>
由此可见,本申请将阱层1061及垒层1062的In含量同步进行降低,减小了其与衬底GaAs的晶格常数差异,提升外延质量。同时还保持了阱层1061与垒层1062的晶格常数差异,因垒层1062紧挨阱层1061且垒层1062的晶格常数小于阱层1061的晶格常数,相当于将小的模框套在大的模框上,提供给阱层1061一定的压应力,从而利于发光效率的提升。It can be seen that this application reduces the In content of the well layer 1061 and the barrier layer 1062 simultaneously, reducing the difference in lattice constants between them and the GaAs substrate, and improving the epitaxial quality. At the same time, the difference in lattice constants between the well layer 1061 and the barrier layer 1062 is maintained. Because the barrier layer 1062 is close to the well layer 1061 and the lattice constant of the barrier layer 1062 is smaller than the lattice constant of the well layer 1061, it is equivalent to converting a small mold frame into a small mold. It is placed on a large mold frame to provide a certain compressive stress to the well layer 1061, which is beneficial to improving the luminous efficiency.
经实测,采用本申请的阱、垒方案后,不仅使得外延片边缘暗亮线大幅收敛,还使得LED芯片有5%-10%的亮度提升。According to actual measurements, after adopting the well and barrier scheme of the present application, not only the dark and bright lines at the edge of the epitaxial wafer are greatly converged, but also the brightness of the LED chip is increased by 5%-10%.
实施例二Embodiment 2
在实施例一的基础上,本实施例对阱层1061、垒层1062结构继续进行改进。当有源层106中阱层1061与垒层1062的层对为多个时,沿自下而上的方向,多个阱层1061的In含量逐步递增,多个垒层1062的In含量逐步递减。Based on the first embodiment, this embodiment continues to improve the structures of the well layer 1061 and the barrier layer 1062. When there are multiple layer pairs of well layers 1061 and barrier layers 1062 in the active layer 106, along the bottom-up direction, the In content of the multiple well layers 1061 gradually increases, and the In content of the multiple barrier layers 1062 gradually decreases. .
具体地,使得靠近下方的阱层In含量相对降低,靠近下方的垒层In含量相对提高,这样可以使得下方的阱层1061与垒层1062的晶格常数更加接近衬底100的晶格常数,为上方的阱打好基础。因为电子的溢出效应,空穴相对不足而无法到达靠近下方的量子阱,换句话说,靠近P型覆盖层107的上方的量子阱为主要的发光阱。因此下方的阱无需考虑发光问题,只需要为后续阱垒打下良好晶体质量的外延基础,不需要阱垒之间的较大应力提升发光效率。而上方的量子阱作为主要的发光阱,则需要阱垒之间较大的In含量差,以提升发光效率。Specifically, the In content of the well layer near the bottom is relatively reduced, and the In content of the barrier layer near the bottom is relatively increased, so that the lattice constants of the well layer 1061 and the barrier layer 1062 below can be closer to the lattice constant of the substrate 100, laying a good foundation for the well above. Because of the overflow effect of electrons, the holes are relatively insufficient and cannot reach the quantum well near the bottom. In other words, the quantum well above the P-type cover layer 107 is the main light-emitting well. Therefore, the well below does not need to consider the light-emitting problem, but only needs to lay a good crystal quality epitaxial foundation for the subsequent well barriers, and does not require a large stress between the well barriers to improve the light-emitting efficiency. As the main light-emitting well, the quantum well above requires a large In content difference between the well barriers to improve the light-emitting efficiency.
作为一种可选方案,上述的逐步递增或递减,可以是阶梯式变化的递增或递减,例如最下方的几个阱层1061选用相同的In含量,中间的几个阱层1061选用相同的In含量,最上方的几个阱层1061选用相同的In含量。作为另一种可选方案,上述的逐步递增或递减,可以是连续变化的递增或递减,任意相邻的上下两个阱层1061,上方的阱层1061的In含量总是大于下方的阱层1061的In含量。As an alternative, the above-mentioned gradual increase or decrease can be a step-like increase or decrease. For example, the lowest well layers 1061 use the same In content, and the middle well layers 1061 use the same In content. content, the uppermost well layers 1061 use the same In content. As another alternative, the above-mentioned gradual increase or decrease can be a continuously changing increase or decrease. For any two adjacent upper and lower well layers 1061, the In content of the upper well layer 1061 is always greater than that of the lower well layer. In content of 1061.
实施例三Embodiment 3
在上述实施例的基础上,本实施例提供一种LED芯片,所述LED芯片包括上述实施例中的LED外延结构、以及N电极和P电极,其中N电极与第一半导体层形成电连接,P电极与第二半导体层形成电连接。Based on the above embodiments, this embodiment provides an LED chip, which includes the LED epitaxial structure in the above embodiments, and an N electrode and a P electrode, wherein the N electrode is electrically connected to the first semiconductor layer, and the P electrode is electrically connected to the second semiconductor layer.
在一种实施方式中,如图2所示,所述LED芯片为倒装芯片,所述LED芯片还包括基板202,基板202可以为蓝宝石基板、Cu基板、SiC基板等,本实施例中基板202为蓝宝石基板,在基板202与P型欧姆接触层109之间还设置有键合层201,用于将基板202与外延结构中的P型欧姆接触层109键合。同时,衬底100、缓冲层101及刻蚀截止层102被去除,N电极204形成于N型欧姆接触层103的表面。在LED外延结构上还刻蚀有台阶结构,该台阶结构暴露出P型欧姆接触层109的部分表面,P电极203形成于台阶显露的P型欧姆接触层109的表面。In one embodiment, as shown in Figure 2, the LED chip is a flip chip. The LED chip also includes a substrate 202. The substrate 202 can be a sapphire substrate, a Cu substrate, a SiC substrate, etc. In this embodiment, the substrate 202 is a sapphire substrate, and a bonding layer 201 is provided between the substrate 202 and the P-type ohmic contact layer 109 for bonding the substrate 202 to the P-type ohmic contact layer 109 in the epitaxial structure. At the same time, the substrate 100, the buffer layer 101 and the etching stop layer 102 are removed, and the N electrode 204 is formed on the surface of the N-type ohmic contact layer 103. A step structure is also etched on the LED epitaxial structure, which exposes part of the surface of the P-type ohmic contact layer 109. The P electrode 203 is formed on the surface of the P-type ohmic contact layer 109 exposed by the step.
具体地,可以采用机械研磨方式先对衬底100进行减薄,然后采用湿法刻蚀方式去除衬底100、缓冲层101及刻蚀截止层102,并暴露N型欧姆接触层103。P电极或N电极可采用蒸镀或者溅射金属的方式形成。Specifically, mechanical grinding may be used to thin the substrate 100 first, and then wet etching may be used to remove the substrate 100, the buffer layer 101 and the etching stop layer 102, and expose the N-type ohmic contact layer 103. The P electrode or N electrode can be formed by evaporation or sputtering of metal.
在另一种实施方式中,如图3所示,所述LED芯片为垂直倒装芯片,与水平芯片不同的地方在于,该垂直倒装芯片没有台阶结构,P电极203直接形成于基板202远离P型欧姆接触层109的表面。N电极204仍然形成于N型欧姆接触层103的表面。此时基板202为导电性基板,例如可以为硅、碳化硅或者金属基板,金属基板优选为铜、钨或者钼基板。In another embodiment, as shown in Figure 3, the LED chip is a vertical flip chip. The difference from the horizontal chip is that the vertical flip chip does not have a step structure, and the P electrode 203 is directly formed away from the substrate 202. The surface of the P-type ohmic contact layer 109 . The N electrode 204 is still formed on the surface of the N-type ohmic contact layer 103 . At this time, the substrate 202 is a conductive substrate, such as silicon, silicon carbide or a metal substrate. The metal substrate is preferably a copper, tungsten or molybdenum substrate.
在又一种实施方式中,如图4所示,所述LED芯片为垂直正装芯片,对于该垂直正装芯片的外延结构,不需要对衬底进行去除,因此不需要刻蚀截止层103,取而代之的是位于所述缓冲层101与N型欧姆接触层103之间的DBR反射层205。DBR反射层205用于防止衬底吸光。对衬底进行减薄后,N电极204直接形成于衬底100远离N型欧姆接触层103的表面;P电极203直接形成于P型欧姆接触层109的表面。In another embodiment, as shown in FIG. 4 , the LED chip is a vertical formal chip. For the epitaxial structure of the vertical formal chip, the substrate does not need to be removed, so there is no need to etch the cutoff layer 103 instead. is the DBR reflective layer 205 located between the buffer layer 101 and the N-type ohmic contact layer 103 . The DBR reflective layer 205 is used to prevent the substrate from absorbing light. After thinning the substrate, the N electrode 204 is directly formed on the surface of the substrate 100 away from the N-type ohmic contact layer 103; the P electrode 203 is directly formed on the surface of the P-type ohmic contact layer 109.
实施例四Embodiment 4
本实施例提供一种发光装置,如图5所示,该发光装置300包括电路基板301以及设置在电路基板301上的发光单元302。其中该发光单元302可以是本申请实施例三提供的LED芯片,多个发光单元302可以在电路基板301上呈阵列排布。This embodiment provides a light-emitting device. As shown in FIG. 5 , the light-emitting device 300 includes a circuit substrate 301 and a light-emitting unit 302 provided on the circuit substrate 301 . The light-emitting unit 302 may be the LED chip provided in Embodiment 3 of the present application, and the plurality of light-emitting units 302 may be arranged in an array on the circuit substrate 301 .
应当理解的是,本实施例提供的发光装置基于实施例三提供的LED芯片结构制成,因此,本实施例提供的发光装置同样具有较高的发光效率。It should be understood that the light-emitting device provided in this embodiment is made based on the LED chip structure provided in Embodiment 3. Therefore, the light-emitting device provided in this embodiment also has high luminous efficiency.
综上所述,本发明提供一种LED外延结构、LED芯片和发光装置,该LED外延结构包括自下而上叠置的衬底、第一半导体层、有源层、第二半导体层,有源层包括n对阱层与垒层的组合。阱层的结构材料为(AlX1Ga1-X1)Y1In1-Y1P,垒层的结构材料为(AlX2Ga1-X2)Y2In1-Y2P,作为优选方案,5%≤((1-Y1)/Y1)-1≤20%,5%≤(Y2/(1-Y2))-1≤20%。相对于现有技术方案,本申请将阱层及垒层的In含量同步进行降低,因阱层与垒层之间仍然保持着一定的In含量差异,也就保证了阱层的压应力,不会对发光效率造成影响。同时,降低的In含量又缩减了阱层与衬底之间晶格常数的差异,减少位错等缺陷的产生,提升外延层的晶体质量。采用本申请的有源层设计后,不仅使得外延片边缘暗亮线大幅收敛,还使得LED芯片有5%-10%的亮度提升。To sum up, the present invention provides an LED epitaxial structure, an LED chip and a light-emitting device. The LED epitaxial structure includes a substrate, a first semiconductor layer, an active layer and a second semiconductor layer stacked from bottom to top. The source layer includes n pairs of well layer and barrier layer combinations. The structural material of the well layer is (Al X1 Ga 1-X1 ) Y1 In 1-Y1 P , and the structural material of the barrier layer is ( Al (1-Y1)/Y1)-1≤20%, 5%≤(Y2/(1-Y2))-1≤20%. Compared with the existing technical solution, this application reduces the In content of the well layer and the barrier layer simultaneously. Since there is still a certain difference in In content between the well layer and the barrier layer, the compressive stress of the well layer is ensured without affecting the In content. Will affect the luminous efficiency. At the same time, the reduced In content reduces the difference in lattice constants between the well layer and the substrate, reduces the occurrence of defects such as dislocations, and improves the crystal quality of the epitaxial layer. After adopting the active layer design of this application, not only the dark and bright lines at the edge of the epitaxial wafer are greatly converged, but also the brightness of the LED chip is increased by 5%-10%.
上述实施例仅例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟悉此技术的人士皆可在不违背本发明的精神及范畴下,对上述实施例进行修饰或改变。因此,举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变,仍应由本发明的权利要求所涵盖。The above embodiments only illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the invention. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in the present invention shall still be covered by the claims of the present invention.
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