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CN117806026B - High-precision light beam switching device and quick reflection mirror - Google Patents

High-precision light beam switching device and quick reflection mirror Download PDF

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Publication number
CN117806026B
CN117806026B CN202410217546.6A CN202410217546A CN117806026B CN 117806026 B CN117806026 B CN 117806026B CN 202410217546 A CN202410217546 A CN 202410217546A CN 117806026 B CN117806026 B CN 117806026B
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China
Prior art keywords
mirror
switching device
beam switching
angle measurement
angle
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CN202410217546.6A
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Chinese (zh)
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CN117806026A (en
Inventor
陆君
肖立亮
孔凡辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Ruikongxin Optoelectronic Technology Co ltd
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Anhui Ruikongxin Optoelectronic Technology Co ltd
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Priority to CN202410217546.6A priority Critical patent/CN117806026B/en
Publication of CN117806026A publication Critical patent/CN117806026A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

The invention relates to the technical field of optical devices, in particular to a high-precision light beam switching device and a quick reflection mirror, and aims to solve the problem that the existing light beam switching device is low in precision. The high-precision light beam switching device comprises a driving unit, a reflecting mirror assembly and an angle measuring assembly; the output end of the driving unit is connected with the reflecting mirror component; the angle measurement assembly comprises a rotating shaft, a detected piece, a first angle measurement unit and a second angle measurement unit, wherein the rotating shaft is connected with the mirror assembly, the detected piece is arranged on the rotating shaft, the driving unit is used for controlling the rotating speed of the mirror assembly according to the detection of the second angle measurement unit on the detected piece and controlling the mirror assembly to be positioned to a target angle according to the detection of the first angle measurement unit on the detected piece, and at least one part of the detection area of the first angle measurement unit is different from at least one part of the detection area of the second angle measurement unit. The high-precision light speed switching device can realize rotation speed control so as to accurately position to a target angle when approaching to the target angle.

Description

High-precision light beam switching device and quick reflection mirror
Technical Field
The invention relates to the technical field of optical devices, in particular to a high-precision light beam switching device and a quick reflection mirror.
Background
The fast control reflector (FAST STEERING Mirror, FSM) is a fast reflector for short, which controls the rotation of the reflector so as to control the light propagation direction with high precision and high dynamic in one-dimensional or two-dimensional direction, realize the fast and accurate pointing of the light beam in the required angle range, and is applied to the fields of laser guidance, photoelectric detection, photoelectric countermeasure, laser weapon, space detection, laser radar, laser communication and the like to realize the precise tracking, stable aiming, stable image and the like of the system. The quick reflection mirror is adopted to replace the traditional frame structure, so that the performance of the system can be improved. The above-mentioned fields generally require that the fast reflection mirror has higher working bandwidth, angular resolution, pointing accuracy and angular range, and also have high requirements on environmental adaptability of the system, etc.
In recent years, with rapid development of modern science and technology such as electronic science and internet, a quick reflection mirror is used as a precise laser micro-motion control device, and is rapidly developed and widely applied, and the working performance is affected by a slight position change, so that the existing quick reflection mirror is not high in positioning precision, for example, when rotating from 0 degrees to 90 degrees, the existing quick reflection mirror is often not rotated in place, has a certain deviation with a target 90 degrees angle, and cannot precisely control the beam direction.
In view of the above, the present invention provides a new high-precision beam switching device and a corresponding fast reflection mirror to solve the above-mentioned problems.
Disclosure of Invention
Object of the invention
The invention aims to provide a high-precision beam switching device and a quick reflection mirror, which are used for solving the problems that the existing beam switching device is low in precision, and has certain deviation from a target angle which is actually required when the existing beam switching device is positioned to the target angle, so that the positioning precision of light switching is low.
(II) technical scheme
In order to solve the above problems, a first aspect of the present invention provides a high-precision beam switching device, comprising: a drive unit, a mirror assembly and an angular assembly;
The output end of the driving unit is connected with the reflecting mirror assembly to drive the reflecting mirror assembly to rotate;
The angle measurement assembly comprises a rotating shaft, a detected piece, a first angle measurement unit and a second angle measurement unit, wherein the rotating shaft is connected with the mirror assembly, the detected piece is arranged on the rotating shaft, and the driving unit is used for controlling the rotating speed of the mirror assembly according to the detection of the detected piece by the second angle measurement unit and controlling the mirror assembly to be positioned to a target angle according to the detection of the detected piece by the first angle measurement unit;
Wherein the detection area of the first goniometer unit and the detection area of the second goniometer unit are at least partially different.
The detected piece is a spiral detecting piece made of metal;
The first angle measurement unit comprises two first eddy current sensors which are arranged at a set angle, and the second angle measurement unit comprises two second eddy current sensors which are coaxially arranged.
The high-precision beam switching device further comprises a lens protection shell and a base which are connected, the reflecting mirror assembly is arranged in the lens protection shell, and the two first eddy current sensors are arranged on the base.
The high-precision light beam switching device further comprises a shell connected with the lens protective shell, one of the two second eddy current sensors is arranged on the base, and the other is arranged on the shell.
The mirror assembly includes: the mirror support is connected with the output end of the driving unit, the rotating shaft is connected with the mirror support, three protrusions used for supporting the mirror lens are arranged on the mirror support, and the three protrusions are bonded with the mirror lens.
The reflector lens is made of beryllium aluminum alloy.
The mirror support is made of aluminum alloy.
The rotation angle of the detected piece is set to 90 degrees each time; and/or
The spiral thickness of the detected piece is 3.5mm; and/or
The pitch of the detected piece is 2.4mm.
The set angle is 120 degrees; and/or
The distance between the two second eddy current sensors is 5.3mm.
In another aspect of the present invention, a quick reflection mirror is provided, which includes the high-precision beam switching device as described above.
(III) beneficial effects
The technical scheme of the invention has the following beneficial technical effects:
According to the invention, the angle measurement assembly is arranged in the high-precision switching device, and comprises the first angle measurement unit and the second angle measurement unit, when the driving unit drives the reflecting mirror assembly to rotate, the reflecting mirror assembly can be coarsely positioned according to the second angle measurement unit to control the rotation speed of the reflecting mirror assembly, when the driving unit controls the reflecting mirror assembly to rotate to a target angle, the reflecting mirror assembly can be precisely positioned through the first angle measurement unit to gradually slow down the reflecting mirror assembly and accurately stop at the target angle position, and the rotation is prevented from not reaching the target position or overshooting (i.e. exceeding the target position), and through the arrangement, the high-precision switching device can realize precise switching of the angle of the reflecting mirror assembly through the cooperation of the coarse positioning and the precise positioning, for example, when the reflecting mirror assembly rotates 90 degrees each time, the reflecting mirror assembly can be precisely positioned to the target angle, so that light is accurately and rapidly switched, the light beam switching accuracy and the switching efficiency are improved, and the user experience is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the overall exploded construction of a high-precision beam switching device of the present invention;
fig. 2 is a schematic diagram of the structure of a driving unit of the high-precision beam switching device of the present invention;
FIG. 3 is a schematic view of the mirror assembly of the high precision beam switching apparatus of the present invention;
FIG. 4 is an overall schematic of an angular component of the high precision beam switching apparatus of the present invention;
FIG. 5 is a schematic diagram of an exploded view of an angular component of the high precision beam switching apparatus of the present invention;
fig. 6 is a schematic diagram of beam switching of the high-precision beam switching device of the present invention.
Reference numerals:
1-a driving unit; 2-a lens holder; 3-mirror lenses; 4-a lens protective shell; 5-a first goniometer unit; 51-a first eddy current sensor; 6-a second goniometer unit; 61. a second eddy current sensor; 7-rotating shaft; 8-a detected piece; 9-a base; 10-a housing; a-a first light ray incidence direction; b-a second light ray incidence direction; c-the light ray emitting direction; a-a first state position; b-second state position.
Detailed Description
The objects, technical solutions and advantages of the present invention will become more apparent by the following detailed description of the present invention with reference to the accompanying drawings. It should be understood that the description is only illustrative and is not intended to limit the scope of the invention. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present invention.
The invention provides a high-precision light beam switching device and a quick reflecting mirror, aiming at enabling a reflecting mirror component in the high-precision switching device to be accurately positioned to a target angle when rotating each time, realizing accurate and quick switching of light rays, improving light beam switching accuracy and switching efficiency and improving user experience.
As shown in fig. 1 to 5, the quick reflection mirror of the present invention includes a high-precision beam switching device including a driving unit 1, a mirror assembly, and an angle measuring assembly.
In combination with fig. 1 and 2, the output end of the driving unit 1 of the high-precision beam switching device is connected with a mirror assembly, the driving unit 1 can control the mirror assembly to rotate, the angle measuring assembly comprises a rotating shaft 7, a detected piece 8, a first angle measuring unit 5 and a second angle measuring unit 6, the rotating shaft 7 is connected with the mirror assembly, the detected piece is arranged on the rotating shaft 7, when the driving unit 1 drives the mirror assembly to rotate, the rotating shaft 7 rotates along with the mirror assembly, and the detected piece 8 rotates along with the rotating shaft 7.
In the present invention, the driving unit 1 is configured to control the rotation speed of the mirror assembly based on the detection of the detected member 8 by the second angle measuring unit 6 and to control the positioning of the mirror assembly to the target angle based on the detection of the detected member 8 by the first angle measuring unit 5, specifically, when the driving unit 1 drives the mirror assembly to rotate, the second angle measuring unit 6 can detect the position of the detected member 8, i.e., perform rough positioning on the detected member 8, the driving unit 1 controls the rotation speed of the mirror assembly based on the position information of the detected member 8 detected by the second angle measuring unit 6, when the mirror assembly rotates to the vicinity of the target position, i.e., when the target position is to be reached, the first angle measuring unit 5 can continue to detect the rotation position of the mirror assembly, and the driving unit 1 can control the mirror assembly to decelerate and accurately position to the target position based on the position information of the detected member 8 detected by the first angle measuring unit 5 (i.e., the mirror assembly is stopped when the target position is reached).
In the above, the detection area of the first goniometer 5 and the detection area of the second goniometer 6 are at least partially different. That is, the detection area of the first goniometer 5 and the detection area of the second goniometer 6 may be completely different, or may partially overlap, or partially differ. The difference between the detection area of the first goniometer unit 5 and at least a portion of the detection area of the second goniometer unit 6 can ensure that the first goniometer unit 5 and the second goniometer unit 6 perform different functional assignments for the detection area, the second goniometer unit 6 mainly performs coarse positioning on the mirror assembly, and the speed of the mirror assembly can be properly increased in the area where the second goniometer unit 6 detects the action, so as to realize fast beam switching, the first goniometer unit 5 mainly performs precise positioning on the mirror assembly, and the speed of the mirror assembly needs to be properly reduced in the area where the first goniometer unit 5 detects the action, so as to ensure the accuracy of the beam switching position.
It should be noted that the driving unit 1 may be in a form of a motor and a decelerator, for example, the motor is connected to an input end of the decelerator, and an output end of the decelerator is connected to the mirror assembly, and in addition, the driving unit 1 may also be other components capable of realizing rotational output, which may be flexibly set by those skilled in the art.
Preferably, the detected piece 8 is a spiral detecting piece made of metal, the first angle measuring unit 5 includes two first eddy current sensors 51 disposed at a set angle, and the second angle measuring unit 6 includes two second eddy current sensors 61 disposed coaxially. The spiral detecting piece made of metal can ensure that the spiral detecting piece can be detected by the two first eddy current sensors 51 and by the two second eddy current detectors 61. In one possible case, the rotation angle of the inspected piece 8 is 90 degrees each time, the spiral thickness is 3.5mm, the pitch is designed to be 2.4mm, i.e. the height of the spiral piece is increased by 1mm in the range of 150 °, so that it can be sensed by the eddy current sensor. Of course, the helical thickness, pitch exemplified above are merely exemplary, and those skilled in the art can flexibly design and adjust based on the actual use scenario. Alternatively, the two second eddy current sensors 61 are coaxial and have an intermediate distance of 5.3mm, although the above distances are merely exemplary, and a person skilled in the art can flexibly set this.
In the above, the detected member 8, the first angle measurement unit 5, and the second angle measurement unit 6 may also adopt a capacitive sensing, a resistive sensing, and a hall sensing manner, besides the above-mentioned eddy current sensing manner, which can be flexibly set by those skilled in the art.
Referring to fig. 3, the mirror assembly includes a mirror support 2 and a mirror lens 3 that are connected, the mirror support 2 and the mirror lens 3 may be connected by screwing, bonding or magnetic adsorption, or by adopting a combination of the above modes, in a preferred case, the mirror lens 3 and the mirror support 2 may be connected by adopting a bonding manner of bonding, specifically, three protrusions that are triangle-shaped may be disposed on the mirror support 2, the three protrusions may jointly support the mirror lens 3, the top side of all protrusions may bond with the back surface of the mirror lens 3, so that the three protrusions may make the mirror lens 3 and the mirror support 2 have a certain gap, and the three protrusions may avoid the uneven stress of each point of the mirror lens 3 from generating deformation, and of course, the three protrusions may also be replaced by a plurality of protrusions, which may be flexibly disposed for those skilled in the art, in addition, an annular clamping groove may be disposed on the periphery of the mirror support 2, and the outer periphery of the mirror lens 3 may be clamped and fixed by the annular clamping groove, that is, by the clamping and fixing the mirror lens 3 and the annular clamping groove may be further realized by fixing the mirror lens 3 by the plurality of the annular clamping grooves. The material of the mirror lens 3 is beryllium-aluminum alloy, and the material of the lens holder 2 is aluminum alloy.
Referring to fig. 1 and 3, the high-precision beam switching device further includes a lens protection shell 4 and a base 9 connected with each other, the mirror assembly is disposed in the lens protection shell 4, so that the overall structure of the mirror assembly can be kept stable, the mirror lens 3 can be protected from being damaged by the outside, the two first eddy current sensors 51 are all disposed in the base 9, specifically, the two first eddy current sensors 51 can be fixed on the base 9 in a threaded manner, and of course, the two first eddy current sensors can also be fixed on the base 9 in other connection manners.
As shown in fig. 3, when the mirror plate 3 is in the first state, as shown in fig. 3, the light beam is incident from the first light incident direction a and is emitted from the light emitting direction c when being inclined obliquely upward by 45 °; when the mirror plate 3 is rotated counterclockwise by 90 ° as viewed from right to left in fig. 3, the mirror plate 3 is switched to the second state, and the mirror plate 3 is tilted downward by 45 ° at this time, and the light beam is incident from the second light incident direction b and is emitted from the light emitting direction c.
Referring to fig. 4 and 5, the high-precision beam switching device of the present invention further includes a housing 10 coupled to the lens-protecting case 4, and two second eddy current sensors 61, one of which is provided on the base 9 and the other of which is provided on the housing 10. Alternatively, a receiving groove may be formed on the base 9, a receiving groove is also formed on the housing 10, one second eddy current sensor 61 is received through the receiving groove on the base 9, and another second eddy current sensor 61 is received through the receiving groove on the housing 10, however, in practical applications, the second eddy current sensor 61 may be fixed to the base 9 and the housing 10 in other manners.
Preferably, referring to fig. 3 and 6, the setting angles of the two first eddy current sensors 51 are 120 ° with respect to each other, and when the mirror plate 3 is rotated 90 ° counterclockwise from the first state position a shown in fig. 6 to the second state position B (the arrow direction shown in fig. 6 also corresponds to the switching of the mirror plate 3 from the first state shown in fig. 3 to the second state), the two second eddy current sensors 61 sense the position of the object 8 first, and the driving unit 1 controls the mirror assembly to rotate rapidly, and when the mirror plate 3 reaches the second state position B soon, i.e., the lower end of the mirror plate 3 gradually approaches the first eddy current sensor 51 located on the right side shown in fig. 6, the position of the object 8 is continuously detected by the first eddy current sensor 51, so that the driving unit 1 controls the assembly to slow down and stop accurately at the second state position B. Similarly, when the mirror plate 3 is rotated clockwise by 90 ° from the second state position B shown in fig. 6 to the first state position a (the opposite direction of the arrow shown in fig. 6 also corresponds to the mirror plate 3 being switched from the second state shown in fig. 3 to the first state), the two second eddy current sensors 61 sense the position of the object 8 first, at which time the driving unit 1 controls the mirror assembly to rotate rapidly, and when the mirror plate 3 is about to reach the first state position a, i.e., the lower end of the mirror plate 3 is gradually brought close to the first eddy current sensor 51 located on the left side shown in fig. 6, the position of the object 8 is continuously detected by the first eddy current sensor 51, so that the driving unit 1 controls the mirror assembly to decelerate and accurately stop at the first state position a. Through repeated experiments, analysis and comparison, the set angles of the two first eddy current sensors 51 are 120 degrees, the two first eddy current sensors 51 are symmetrical relative to the vertical central section of the lens protection shell 4, the rotation center of the reflector lens 3 and the two second eddy current sensors 61 are both positioned on the vertical central section, the angle between the reflector lens 3 and the first eddy current sensor 51 on the left side is 15 degrees when the reflector lens 3 is positioned at the limit position of the first state position A, the angle between the reflector lens 3 and the first eddy current sensor 51 on the right side is 15 degrees when the reflector lens 3 is positioned at the limit position of the second state position B, the rotation measurement precision of the reflector lens 3 rotating for 90 degrees each time can be greatly improved, and the detection can be optimized within the range.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explanation of the principles of the present invention and are in no way limiting of the invention. Accordingly, any modification, equivalent replacement, improvement, etc. made without departing from the spirit and scope of the present invention should be included in the scope of the present invention. Furthermore, the appended claims are intended to cover all such changes and modifications that fall within the scope and boundary of the appended claims, or equivalents of such scope and boundary.

Claims (7)

1. A high precision beam switching device, comprising: a drive unit (1), a mirror assembly and an angle measurement assembly;
The output end of the driving unit (1) is connected with the reflecting mirror assembly to drive the reflecting mirror assembly to rotate;
the angle measurement assembly comprises a rotating shaft (7), a detected piece (8), a first angle measurement unit (5) and a second angle measurement unit (6), wherein the rotating shaft (7) is connected with the mirror assembly, the detected piece is arranged on the rotating shaft (7), and the driving unit (1) is used for controlling the rotating speed of the mirror assembly according to the detection of the detected piece (8) by the second angle measurement unit (6) and controlling the mirror assembly to be positioned to a target angle according to the detection of the detected piece (8) by the first angle measurement unit (5);
wherein the detection area of the first goniometer unit (5) and the detection area of the second goniometer unit (6) are at least partially different;
The detected piece (8) is a spiral detection piece made of metal;
The first angle measurement unit (5) comprises two first eddy current sensors which are arranged at a set angle, and the second angle measurement unit (6) comprises two second eddy current sensors which are coaxially arranged;
The high-precision beam switching device further comprises a lens protection shell (4) and a base (9) which are connected, the reflecting mirror component is arranged in the lens protection shell (4), and two first eddy current sensors are arranged on the base (9);
The high-precision light beam switching device further comprises a shell (10) connected with the lens protection shell (4), one of the two second eddy current sensors is arranged on the base (9), and the other is arranged on the shell (10).
2. The high precision beam switching device of claim 1, wherein the mirror assembly comprises: the mirror support (2) and the mirror lens (3), the mirror support (2) with the output of drive unit (1) is connected, rotation axis (7) with mirror support (2) are connected, be provided with on mirror support (2) and be used for supporting three arch of mirror lens (3), three the arch with mirror lens (3) bond.
3. The high-precision beam switching device according to claim 2, wherein the material of the mirror plate (3) is beryllium aluminum alloy.
4. The high-precision beam switching device according to claim 2, wherein the material of the lens holder (2) is an aluminum alloy.
5. The high-precision beam switching device according to claim 1, wherein the rotation angle of the inspected piece (8) is set to 90 degrees each time; and/or
The spiral thickness of the detected piece (8) is 3.5mm; and/or
The pitch of the detected piece (8) is 2.4mm.
6. The high precision beam switching device of claim 1, wherein the set angle is 120 °; and/or
The distance between the two second eddy current sensors is 5.3mm.
7. A quick reflection mirror comprising the high-precision beam switching device according to any one of claims 1 to 6.
CN202410217546.6A 2024-02-28 2024-02-28 High-precision light beam switching device and quick reflection mirror Active CN117806026B (en)

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Application Number Priority Date Filing Date Title
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CN117806026B true CN117806026B (en) 2024-05-03

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CN102069859A (en) * 2011-01-07 2011-05-25 福耀玻璃工业集团股份有限公司 Device and method for installing automobile glass rearview mirror seat and bracket
JP2011112503A (en) * 2009-11-26 2011-06-09 Denso Wave Inc Object detection system
CN107367250A (en) * 2016-05-12 2017-11-21 哈尔滨工业大学 The inductance displacement sensor calibration method and device of grand micro- combination
CN108515280A (en) * 2018-03-29 2018-09-11 大族激光科技产业集团股份有限公司 laser drilling device and drilling method
CN112416023A (en) * 2020-11-04 2021-02-26 上海莘汭驱动技术有限公司 Inertial image stabilization control system based on angle measurement
WO2022111940A1 (en) * 2020-11-26 2022-06-02 Asml Netherlands B.V. A mirror spot position calibrating method, a lithographic apparatus and a device manufacturing method
CN117092779A (en) * 2023-10-19 2023-11-21 北京瑞控信科技股份有限公司 Large-caliber quick-reflecting mirror with six-degree-of-freedom locking function and control method thereof
CN117518397A (en) * 2023-12-04 2024-02-06 西安交通大学 A dual-driven fast reflector system and its adjustment method

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0420198A2 (en) * 1989-09-27 1991-04-03 Canon Kabushiki Kaisha Beam scanning apparatus and apparatus for writing image information
JP2001091865A (en) * 1999-09-24 2001-04-06 Ishikawajima Harima Heavy Ind Co Ltd Optical path switching device
TW539933B (en) * 2000-07-31 2003-07-01 Hitachi Via Mechanics Ltd Controller for optical scanner
JP2002296533A (en) * 2001-03-29 2002-10-09 Mitsubishi Electric Corp Optical deflector and laser beam machining device using the same
JP2011112503A (en) * 2009-11-26 2011-06-09 Denso Wave Inc Object detection system
CN102069859A (en) * 2011-01-07 2011-05-25 福耀玻璃工业集团股份有限公司 Device and method for installing automobile glass rearview mirror seat and bracket
CN107367250A (en) * 2016-05-12 2017-11-21 哈尔滨工业大学 The inductance displacement sensor calibration method and device of grand micro- combination
CN108515280A (en) * 2018-03-29 2018-09-11 大族激光科技产业集团股份有限公司 laser drilling device and drilling method
CN112416023A (en) * 2020-11-04 2021-02-26 上海莘汭驱动技术有限公司 Inertial image stabilization control system based on angle measurement
WO2022111940A1 (en) * 2020-11-26 2022-06-02 Asml Netherlands B.V. A mirror spot position calibrating method, a lithographic apparatus and a device manufacturing method
CN117092779A (en) * 2023-10-19 2023-11-21 北京瑞控信科技股份有限公司 Large-caliber quick-reflecting mirror with six-degree-of-freedom locking function and control method thereof
CN117518397A (en) * 2023-12-04 2024-02-06 西安交通大学 A dual-driven fast reflector system and its adjustment method

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