CN117778999A - Mpcvd diamond growth equipment with temperature regulating mechanism - Google Patents
Mpcvd diamond growth equipment with temperature regulating mechanism Download PDFInfo
- Publication number
- CN117778999A CN117778999A CN202311604966.1A CN202311604966A CN117778999A CN 117778999 A CN117778999 A CN 117778999A CN 202311604966 A CN202311604966 A CN 202311604966A CN 117778999 A CN117778999 A CN 117778999A
- Authority
- CN
- China
- Prior art keywords
- ring
- gas
- air
- guide piece
- bearing table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses mpcvd diamond growth equipment with a temperature regulating mechanism, which relates to the technical field of diamond growth and comprises a main body, a bearing table, a water cooling system, a microwave system, a heating system and an air supply system, wherein a vacuum pump is arranged below the inside of the main body, a mixing pipe is arranged above the inside of the main body, a piston plate is arranged inside the mixing pipe, an air pump is arranged inside the piston plate, the bearing table is arranged below the mixing pipe, the water cooling system is arranged below the bearing table, a limiting ring is arranged outside the bearing table, and the bearing table is positioned above the inside of the limiting ring. During the working period of the invention, when the mixed gas passes through the inside of the mixing tube, various gases in the mixed gas are mutually mixed, graphite generated in the main body is cleaned in time, and the graphite powder is cleaned by matching with hydrogen ions in the air flow so as to ensure the concentration of carbon atoms in the air flow.
Description
Technical Field
The invention relates to the technical field of diamond growth, in particular to mpcvd diamond growth equipment with a temperature regulating mechanism.
Background
The quality of MPCVD synthesized diamond is dependent on a variety of factors including synthesis temperature, carbon source concentration, microwave power, cavity pressure, gas flow size, substrate table height, substrate shape, etc. Wherein the control of the synthesis temperature has a great relationship to the quality of the synthetic diamond product. Under the condition that the synthesis temperature and the carbon source concentration are determined, the higher the microwave power and the pressure of the resonant cavity, the higher the plasma particle density, and the faster the diamond synthesis rate.
As the mixed gas is continuously ionized to generate carbon simple substances, the quantity of carbon atoms settled on non-seed crystals is increased along with the time in the diamond growth process, so that the concentration of the carbon atoms in the mixed gas is continuously reduced, and the growth rate of the diamond is further influenced.
Disclosure of Invention
The present invention aims to provide mpcvd diamond growth equipment with a temperature regulating mechanism to solve the problems in the prior art.
In order to solve the technical problems, the invention provides the following technical scheme: the mpcvd diamond growth equipment with the temperature regulation mechanism comprises a main body, a bearing table, a water cooling system, a microwave system, a heating system and an air supply system, wherein a vacuum pump is arranged below the inside of the main body, a mixing pipe is arranged above the inside of the main body, a piston plate is arranged inside the mixing pipe, an air pump is arranged inside the piston plate, the bearing table is arranged below the mixing pipe, the water cooling system is arranged below the bearing table, a limiting ring is arranged outside the bearing table, and the bearing table is positioned above the inside of the limiting ring;
the mixing pipe is connected with the piston plate in a sliding way, two groups of pipelines are arranged on the outer side of the mixing pipe, and the mixing pipe is respectively communicated with the air supply system and the limiting ring through the two groups of pipelines;
an airflow heating area and an ionization area are arranged in the mixing pipe; before the equipment is used, seed crystals to be processed are required to be placed on a bearing table, then the main body is closed, a vacuum pump is started to carry out vacuum treatment on the main body, then the air pump is matched with the air supply system to pump sufficient mixed gas into the main body, and meanwhile, the microwave system and the heating system are started to ionize the pumped mixed gas.
Further, an air inlet pipe is arranged above the main body and is communicated with an air supply system, a connecting pipe is arranged above the piston plate, the connecting pipe is connected with the air inlet pipe in a sliding manner, the connecting pipe is connected with the air inlet pipe through a spring, and two groups of channels are arranged inside the piston plate; when the main body is in a low-pressure state, an air bag is arranged above the piston plate, namely the air pressure inside the air bag is larger than the air pressure below the piston plate, the piston plate is connected with the air inlet pipe through a connecting pipe, a pipeline is arranged on one side of the mixing pipe, the mixing pipe is communicated with the space in the pressure limiting ring through the pipeline, and when the connecting pipe is connected with the air inlet pipe, the outer wall of the piston plate seals the joint of the mixing pipe and the pipeline;
along with the air supply system pumps the mixed gas into the main body through the air pump, the air pressure below the piston plate is continuously increased, the piston plate rises in the mixing pipe under the action of air pressure difference until the communicating areas of the connecting pipe and the air inlet pipe are staggered, the air supply system cannot supply air into the main body through the air pump at the moment, a group of channels in the piston plate are overlapped with the connecting positions of the mixing pipe and the pipeline, and at the moment, the mixed gas in the main body circulates through the air pump.
Further, a plurality of flow dividing rings are arranged in the mixing pipe from top to bottom, the flow dividing rings are rotationally connected with the mixing pipe, a plurality of V-shaped grooves are formed in the mixing pipe, the flow dividing rings are arranged in the V-shaped grooves, mixed gas passes through the mixing pipe, and the mixed gas starts to be divided above the flow dividing rings; when mixed gas circulates in the main body, the microwave system and the heating system are started simultaneously to ionize the mixed gas in the mixed pipe, wherein the working areas of the microwave system and the heating system are areas where the flow dividing ring is located, due to the inner wall structure of the mixed pipe and the outer wall structure of the flow dividing ring, when the mixed gas passes through the areas where the flow dividing ring is located, the mixed gas is divided into two air flows along the outer wall of the flow dividing ring, one air flow moves downwards through the center of the flow dividing ring, the other air flow enters the V-shaped groove along the outer wall of the flow dividing ring, due to the structural arrangement of the V-shaped groove, the passing air flow can be guided, the movement direction of the air flow after being guided is inclined upwards, finally the downward air flow can interact with the inclined upwards air flow, and the two air flows mutually impact to achieve the mixing effect, so that the various gases in the mixed gas can be fully mixed.
Further, a plurality of diversion trenches are formed in the outer side of the diversion ring, the diversion trenches are obliquely arranged, a plurality of guide plates are arranged in the outer side of the diversion ring, and the outer wall sizes of the guide plates are matched with the inner wall sizes of the V-shaped grooves; the ionized mixed gas has the advantages that part of carbon atoms in the ionized mixed gas can be settled, a graphite layer is formed in the V-shaped groove by the settled carbon atoms, and as the diversion grooves are formed in the outer side of the diversion ring and are obliquely arranged, when the airflow passes through the outer side of the diversion ring, part of the airflow can move through the diversion grooves due to the fact that the airflow passing section of the diversion grooves is larger than that of other areas outside the diversion ring, and the diversion ring is driven to rotate under the pushing of the airflow during the airflow passes through the diversion grooves;
because the outside of the diverter ring is provided with the guide piece, the outer wall size of the guide piece is matched with the inner wall size of the V-shaped groove, the guide piece is annularly distributed on the outside of the diverter ring, the relative position of the diverter ring in an idle state is the same as the relative position of the diverter ring in a rotating state, the guide piece on the outside of the diverter ring synchronously rotates during the rotation of the diverter ring under the action of air flow, the guide piece in the rotating state cleans graphite layers generated by sedimentation in the V-shaped groove, and graphite is crushed and leaves the V-shaped groove along with the air flow after cleaning;
because the area of the flow dividing ring in the mixing tube is the working area of the microwave system and the heating system, the ionization rate of molecules and atoms in the area of the flow dividing ring is larger than the sedimentation rate, and meanwhile, hydrogen ions generated by ionization in the air flow can clean graphite, so that the graphite returns to the carbon atom state again.
Further, a gas collecting ring is arranged below the mixing pipe, the gas collecting ring is rotationally connected with the mixing pipe, a plurality of gas guide holes are formed below the gas collecting ring, the gas guide holes are annularly distributed with the central axis of the gas collecting ring as the center, and the output direction of the gas guide holes is the side where the center of the gas collecting ring is located; the gas flow pumped by the gas pump finally enters a space surrounded by the limiting ring through the gas vent, wherein the gas vent is connected with the upper split ring, the split ring drives the gas vent to synchronously rotate, the position of the gas vent is arranged, and the output direction of the gas vent is divided into a plurality of gas flows entering the gas vent, and the gas flow in the mixing pipe is guided to the side where the center of the gas vent is located due to the output direction of the gas vent, so that the gas flow radially moves along the gas vent is finally gathered at the center of the gas vent, and a plurality of gas flows are interacted at the center of the gas vent;
after the mutual impact between the air flows, the kinetic energy carried by the air flows after leaving the air guide holes is lost, and because a large amount of mixed gas exists in the limiting ring, the air flows enter the limiting ring in a multi-strand small-flow rapid mode, the kinetic energy carried by the air flows is continuously reduced until the kinetic energy disappears, and then the kinetic energy is fused with the air flows in the limiting ring, so that the mixed gas in the limiting ring exists in a low-dynamic mode, the carbon atoms in the mixed gas can be conveniently and naturally settled, and meanwhile, the aggregation point of the air flows leaving the air guide holes coincides with the center of the placement point of the seed crystal on the bearing table, so that the content of the carbon atoms naturally settled in the center is greater than the settling content of the carbon atoms in the upper edge area of the bearing table.
Further, the outer wall surface of the air guide hole is obliquely arranged, the air guide hole and the inner wall of the mixing pipe are mutually matched to form an air flow channel, and the central axis of the gas gathering ring is coincided with the central axis of the bearing table; because the gas gathering ring is connected with the shunt ring above, the shunt ring drives the gas gathering ring to synchronously rotate, and the gas guide holes are mutually matched with the inner wall of the mixing pipe to form a gas flow channel, so that the bottommost end of the gas guide holes and the inner wall of the mixing pipe generate relative motion, further the graphite layer which is settled below the inside of the mixing pipe is cleaned, and meanwhile, generated graphite is crushed and leaves the gas guide holes along with the gas flow.
Further, a connecting ring is arranged in the middle of the limiting ring, a plurality of guide pieces penetrate through the middle of the connecting ring, the lower end surfaces of the guide pieces are attached to the upper end surface of the bearing table, the outer wall sizes of the guide pieces are matched with the inner wall sizes of the connecting ring, tooth grooves are formed in the outer side of the connecting ring, the connecting ring is rotationally connected with the limiting ring, the connecting ring is connected with a driving motor through the tooth grooves and a gear, and the central axis of the bearing table is located between the guide pieces;
the guide piece consists of an upper piece and a lower piece, and the inclination angles of the upper piece and the lower piece are opposite; the driving motor drives the guide piece to move through the gear and the tooth slot, wherein the lower end surface of the guide piece is mutually attached to the upper end surface of the bearing table, the guide piece rotates under the driving of the driving motor, the guide piece cleans a graphite layer settled on the bearing table during the working period of the guide piece relative to the bearing table, meanwhile, graphite powder moves to the periphery under the centrifugal effect, and then the graphite powder enters an ionization region in the mixing tube again along with air flow through the pipeline and the air pump;
the upper inclined angle of the guide piece positioned above the seed crystal is different from the upper inclined angle of the guide piece positioned above and below the seed crystal, wherein the air flow in the pressure limiting ring is mainly acted under the rotating state of the guide piece positioned above the seed crystal, the mixed gas near the inner wall of the pressure limiting ring is pushed to the central area, namely, the mixed gas is pushed to the upper part of the middle part of the seed crystal, the graphite layer attached to the bearing table is mainly crushed and guided under the rotating state of the guide piece positioned below the seed crystal, the crushed graphite enters the ionization area in the mixing tube again and then contacts with hydrogen ions, and the graphite returns to the state of carbon atoms again, so that the carbon source provided by the mixed gas is mainly settled on the seed crystal, and the carbon atom concentration of the mixed gas is maintained.
Further, an eccentric ring is arranged on the outer side of the connecting ring, one end of the guide piece is in sliding connection with the eccentric ring, a perpendicular bisector where the circle center of the eccentric ring is located is parallel to the perpendicular bisector where the circle center of the limiting ring is located, the eccentric ring is rotationally connected with the main body, the eccentric ring and the central axis of the connecting ring are used as circle centers for rotation, and damping exists between the eccentric ring and the guide piece; because the eccentric ring is eccentrically arranged relative to the limiting ring, and one end of the guide piece is connected with the eccentric ring, and the guide piece penetrates through the connecting ring, each guide piece penetrates into the limiting ring to different lengths, the tail end of the guide piece with the shortest extending length is positioned in the connecting ring, the tail end of the guide piece with the longest extending length is positioned in a region close to the seed crystal, and the connecting ring cleans the graphite layer attached to the guide piece in the sliding process of the guide piece relative to the connecting ring;
because the eccentric ring rotates with the central axis of the connecting ring as the center of a circle, damping exists between the eccentric ring and the guide piece, and the eccentric ring is driven to rotate through the damping effect between the guide piece and the eccentric ring during the rotation of the guide piece, the eccentric ring is realized to rotate with the connecting ring as the center of a circle, and meanwhile, the rotation angular velocity of the guide piece is larger than that of the eccentric ring, so that the area where the longest guide piece is located in the connecting ring is synchronously changed in different time periods, the upper end surface of the bearing table is cleaned, and the guide piece above the seed crystal is matched, and carbon atoms are pushed to the position right above the seed crystal through driving air flow.
Compared with the prior art, the invention has the following beneficial effects:
through the arrangement of the mixing tube, a plurality of flow dividing rings are arranged in the mixing tube, the surface structures of the flow dividing rings are matched to disturb the airflow passing through the surfaces of the flow dividing rings, meanwhile, the flow dividing rings have a flow dividing effect on the airflow, and the flow dividing grooves are matched to realize the mutual mixing of various gases in the mixed gas, so that the concentration difference of carbon atoms in various areas in the mixed gas after ionization is improved;
through the arrangement of the gas collecting ring, the gas collecting ring guides the ionized mixed gas to the position right above the seed crystal, and meanwhile, a plurality of airflows are mutually impacted to realize the aggregation of the airflows right above the seed crystal, and meanwhile, the kinetic energy carried by the aggregated airflows is reduced, so that carbon atoms in the mixed gas can naturally settle, and the reduction of the contact probability between the carbon atoms in the mixed gas and the seed crystal caused by the motion of the airflows is avoided;
through limiting ring and the setting of inside mechanism, the cooperation eccentric ring realizes that the guide piece promotes the air current around the seed crystal to the one side that the seed crystal is located directly over, and the guide piece is cleared up the graphite layer near the seed crystal on the plummer simultaneously, and graphite powder after the clearance reenters into the inside ionization of mixing tube along with the air current to guarantee the inside carbon atom concentration of air current.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a schematic view of the main body of the present invention;
FIG. 2 is a schematic view of the main body of the present invention in front elevational view in full section;
FIG. 3 is a schematic view of the mixing tube of the present invention in front elevational view in full section;
FIG. 4 is an enlarged schematic view of the structure of FIG. 3A in accordance with the present invention;
FIG. 5 is a schematic view of the diverter ring according to the present invention;
FIG. 6 is an enlarged schematic view of the structure of FIG. 3B in accordance with the present invention;
FIG. 7 is a schematic view of the gas gathering ring according to the present invention;
fig. 8 is a schematic top view of the stage of the present invention.
In the figure: 1. a main body; 2. a mixing tube; 201. a shunt ring; 202. a V-shaped groove; 203. a diversion trench; 204. a guide piece; 3. a piston plate; 301. a connecting pipe; 4. a carrying platform; 5. a pressure limiting ring; 501. a guide piece; 502. a connecting ring; 6. a gas gathering ring; 601. an air guide hole; 7. an eccentric ring.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-8, the present invention provides the following technical solutions: the mpcvd diamond growth equipment with the temperature regulation mechanism comprises a main body 1, a bearing table 4, a water cooling system, a microwave system, a heating system and an air supply system, wherein a vacuum pump is arranged below the inner part of the main body 1, a mixing pipe 2 is arranged above the inner part of the main body 1, an airflow heating area and an ionization area are arranged in the mixing pipe 2, a plurality of flow dividing rings 201 are arranged inside the mixing pipe 2 from top to bottom, the flow dividing rings 201 are rotationally connected with the mixing pipe 2, a plurality of V-shaped grooves 202 are formed inside the mixing pipe 2, the flow dividing rings 201 are arranged in the V-shaped grooves 202, mixed gas passes through the mixing pipe 2, and the mixed gas starts to be divided above the flow dividing rings 201;
a plurality of diversion trenches 203 are formed in the outer side of the diversion ring 201, the diversion trenches 203 are obliquely arranged, a plurality of guide plates 204 are arranged in the outer side of the diversion ring 201, and the outer wall sizes of the guide plates 204 are matched with the inner wall sizes of the V-shaped grooves 202;
a gas collecting ring 6 is arranged below the mixing pipe 2, the gas collecting ring 6 is rotationally connected with the mixing pipe 2, a plurality of gas guide holes 601 are formed below the gas collecting ring 6, the gas guide holes 601 are annularly distributed by taking the central axis of the gas collecting ring 6 as the center, and the output direction of the gas guide holes 601 is the side where the circle center of the gas collecting ring 6 is located;
the outer wall surface of the air vent 601 is obliquely arranged, the air vent 601 and the inner wall of the mixing pipe 2 are matched with each other to form an air flow channel, and the central axis of the gas gathering ring 6 is coincident with the central axis of the bearing table 4;
a plurality of flow dividing rings 201 are arranged in the mixing tube 2, the surface structure of the flow dividing rings 201 is matched to disturb the airflow passing through the surface of the flow dividing rings 201, meanwhile, the flow dividing rings 201 have a flow dividing effect on the airflow, and the flow dividing grooves 203 are matched to realize mutual mixing of various gases in the mixed gas, so that the concentration difference of carbon atoms in each region of the inside of the ionized mixed gas is improved;
the mixing pipe 2 is internally provided with a piston plate 3, the piston plate 3 is internally provided with an air pump, an air inlet pipe is arranged above the main body 1 and communicated with an air supply system, a connecting pipe 301 is arranged above the piston plate 3, the connecting pipe 301 is in sliding connection with the air inlet pipe, the connecting pipe 301 is connected with the air inlet pipe through a spring, and two groups of channels are arranged inside the piston plate 3;
the gas collecting ring 6 guides the ionized mixed gas to the position right above the seed crystal, and meanwhile, a plurality of air flows are mutually impacted to realize the aggregation of the air flows right above the seed crystal, and meanwhile, the kinetic energy carried by the aggregated air flows is reduced, so that carbon atoms in the mixed gas can naturally subside, and the reduction of the contact probability between the carbon atoms in the mixed gas and the seed crystal caused by the movement of the air flows is avoided;
a bearing table 4 is arranged below the mixing pipe 2, a water cooling system is arranged below the bearing table 4, a limiting ring 5 is arranged on the outer side of the bearing table 4, and the bearing table 4 is positioned above the inner part of the limiting ring 5;
the mixing pipe 2 is in sliding connection with the piston plate 3, two groups of pipelines are arranged on the outer side of the mixing pipe 2, and the mixing pipe 2 is respectively communicated with the air supply system and the pressure limiting ring 5 through the two groups of pipelines;
the middle part of the limiting ring 5 is provided with a connecting ring 502, the middle part of the connecting ring 502 is penetrated with a plurality of guide plates 501, the lower end surfaces of the guide plates 501 are attached to the upper end surface of the bearing table 4, the outer wall size of the guide plates 501 is matched with the inner wall size of the connecting ring 502, tooth grooves are formed in the outer side of the connecting ring 502, the connecting ring 502 is rotationally connected with the limiting ring 5, the connecting ring 502 is connected with a driving motor through the tooth grooves and a gear, and the central axis of the bearing table 4 is positioned between the guide plates 501;
the guide piece 501 is composed of an upper piece and a lower piece, and the inclination angles of the upper piece and the lower piece of guide piece 501 are opposite;
an eccentric ring 7 is arranged on the outer side of the connecting ring 502, one end of the guide piece 501 is in sliding connection with the eccentric ring 7, a perpendicular bisector where the circle center of the eccentric ring 7 is located is parallel to a perpendicular bisector where the circle center of the limiting ring 5 is located, the eccentric ring 7 is in rotary connection with the main body 1, the eccentric ring 7 and the central axis of the connecting ring 502 are used as circle centers for rotation, and damping exists between the eccentric ring 7 and the guide piece 501;
the realization guide piece 501 promotes the air current around the seed crystal to the side that the seed crystal is located directly over, and the graphite layer near the seed crystal on the plummer 4 is cleared up to the guide piece 501 simultaneously, and graphite powder after the clearance reenters mixing tube 2 inside ionization along with the air current to guarantee the inside carbon atom concentration of air current.
The working principle of the invention is as follows: before the equipment is used, seed crystals to be processed are required to be placed on the bearing table 4, then the main body 1 is closed, a vacuum pump is started to carry out vacuum treatment on the main body 1, then the air pump is matched with the air supply system to pump sufficient mixed gas into the main body 1, and meanwhile, the microwave system and the heating system are started to ionize the pumped mixed gas;
when the inside of the main body 1 is in a low-pressure state, an air bag is arranged above the piston plate 3, namely the air pressure inside the air bag is larger than the air pressure below the piston plate 3, the piston plate 3 is connected with an air inlet pipe through a connecting pipe 301, a pipeline is arranged on one side of the mixing pipe 2, the mixing pipe 2 is communicated with the space in the pressure limiting ring 5 through the pipeline, and when the connecting pipe 301 is connected with the air inlet pipe, the connecting part between the mixing pipe 2 and the pipeline is sealed by the outer wall of the piston plate 3;
along with the fact that the air supply system continuously pumps mixed gas into the main body 1 through the air pump, the air pressure below the piston plate 3 is continuously increased, under the action of air pressure difference, the piston plate 3 ascends inside the mixing pipe 2 until the communicating areas of the connecting pipe 301 and the air inlet pipe are staggered, at the moment, the air supply system cannot supply air into the main body 1 through the air pump, a group of channels inside the piston plate 3 coincide with the connecting positions of the mixing pipe 2 and the pipeline, and at the moment, the mixed gas in the main body 1 circulates through the air pump;
when mixed gas circulates in the main body 1, a microwave system and a heating system are started at the same time to ionize the mixed gas in the mixing pipe 2, wherein the working areas of the microwave system and the heating system are areas where the flow dividing ring 201 is located, due to the inner wall structure of the mixing pipe 2 and the outer wall structure of the flow dividing ring 201, when the mixed gas passes through the area where the flow dividing ring 201 is located, the mixed gas is divided into two air flows along the outer wall of the flow dividing ring 201, one air flow moves downwards through the center of the flow dividing ring 201, the other air flow enters the V-shaped groove 202 along the outer wall of the flow dividing ring 201, due to the structural arrangement of the V-shaped groove 202, the passing air flow is guided, the movement direction of the guided air flow is inclined upwards, and finally the downward air flow interacts with the inclined upwards air flow, so that the two air flows mutually impact to achieve the mixing effect, and the mixing effect of various gases in the mixed gas is ensured;
the ionized mixed gas has the advantages that part of carbon atoms in the ionized mixed gas can be settled, a graphite layer is formed in the V-shaped groove 202 by the settled carbon atoms, the outside of the flow dividing ring 201 is provided with the flow dividing groove 203, the flow dividing groove 203 is obliquely arranged, when the air flow passes through the outside of the flow dividing ring 201, the air flow passing section of the flow dividing groove 203 is larger than the air flow passing sections of other areas outside the flow dividing ring 201, so that part of the air flow can move through the flow dividing groove 203, and the flow dividing ring 201 is driven to rotate under the pushing of the air flow during the air flow passes through the flow dividing groove 203;
since the guide piece 204 is arranged on the outer side of the diverter ring 201, the outer wall size of the guide piece 204 is matched with the inner wall size of the V-shaped groove 202, the guide piece 204 is distributed on the outer side of the diverter ring 201 in an annular mode, the fact that the relative position of the diverter ring 201 in an idle state is identical to that of the diverter ring 201 in a rotating state is achieved, during the rotation of the diverter ring 201 under the action of air flow, the guide piece 204 on the outer side of the diverter ring 201 synchronously rotates, graphite layers generated by sedimentation in the V-shaped groove 202 are cleaned by the guide piece 204 in the rotating state, and graphite is crushed and leaves the V-shaped groove 202 along with the air flow after cleaning;
because the area where the shunt ring 201 is located in the mixing tube 2 is the working area of the microwave system and the heating system, the ionization rate of molecules and atoms in the area where the shunt ring 201 is located is larger than the sedimentation rate, and meanwhile, hydrogen ions generated by ionization in the air flow can clean graphite, so that the graphite returns to the carbon atom state again;
the lowest end of the mixing pipe 2 is provided with a gas collecting ring 6, the gas flow pumped by the gas pump finally enters a space surrounded by the limiting ring 5 through a gas guide hole 601, wherein the gas collecting ring 6 is connected with a gas distribution ring 201 above, the gas distribution ring 201 drives the gas collecting ring 6 to synchronously rotate, the gas guide hole 601 is arranged, and the gas flow in the mixing pipe 2 is divided into a plurality of gas flows entering the gas guide hole 601 according to the output direction of the gas guide hole 601, and the gas flows which are guided by the gas flow and move radially along the gas collecting ring 6 are finally collected at the center of the gas collecting ring 6, and the gas flows are interacted at the center of the gas collecting ring 6;
after the mutual impact between the airflows, the kinetic energy carried by the airflows after leaving the air guide holes 601 is lost, and as a large amount of mixed gas exists in the pressure limiting ring 5, the airflows enter the pressure limiting ring 5 in a multi-strand small-flow rapid mode, the kinetic energy carried by the airflows is continuously reduced until the airflows disappear, and then the airflows are fused with the airflows in the pressure limiting ring 5, so that the mixed gas in the pressure limiting ring 5 exists in a low-dynamic mode, carbon atoms in the mixed gas are convenient to naturally settle, and meanwhile, the aggregation point of the airflows leaving the air guide holes 601 coincides with the center of the placement point of the seed crystal on the bearing table 4, so that the content of the carbon atoms naturally settled at the center is greater than the settlement content of the carbon atoms in the upper edge area of the bearing table 4;
because the gas collecting ring 6 is connected with the upper flow distributing ring 201, the flow distributing ring 201 drives the gas collecting ring 6 to synchronously rotate, and the gas guide holes 601 and the inner wall of the mixing pipe 2 are mutually matched to form a gas flow channel, so that the bottommost end of the gas guide holes 601 and the inner wall of the mixing pipe 2 generate relative motion, further, a graphite layer which is settled in the lower part of the inside of the mixing pipe 2 is cleaned, and meanwhile, generated graphite is crushed and leaves the gas guide holes 601 along with the gas flow;
the driving motor drives the guide piece 501 to move through the gear and the tooth slot, wherein the lower end surface of the guide piece 501 is mutually attached to the upper end surface of the bearing table 4, the guide piece 501 rotates under the driving of the driving motor, during the working of the guide piece 501 relative to the bearing table 4, the graphite layer settled on the bearing table 4 is cleaned, meanwhile, under the centrifugal effect, graphite powder moves to the periphery, and then the graphite powder enters an ionization region in the mixing tube 2 again through a pipeline and an air pump along with air flow;
the inclination angle of the guide piece 501 positioned above the seed crystal is different from the inclination angle of the guide piece 501 positioned above and below the seed crystal, wherein the guide piece 501 positioned above the seed crystal mainly acts on the air flow in the pressure limiting ring 5 in a rotating state, so that the mixed gas near the inner wall of the pressure limiting ring 5 is pushed to a central area, namely, the mixed gas is pushed to the upper part of the middle part of the seed crystal, the guide piece 501 positioned below the seed crystal mainly pulverizes and guides a graphite layer attached to the bearing table 4 in the rotating state, the pulverized graphite enters an ionization area in the mixing tube 2 again and then contacts with hydrogen ions, and the graphite returns to a state of carbon atoms again, so that the carbon source provided by the mixed gas is ensured to be mainly settled on the seed crystal, and the carbon atom concentration of the mixed gas is maintained;
because the eccentric ring 7 is eccentrically arranged relative to the limiting ring 5, and one end of the guide piece 501 is connected with the eccentric ring 7, and the guide piece 501 penetrates through the connecting ring 502, each guide piece 501 extends into the limiting ring 5 to different lengths, the tail end of the guide piece 501 with the shortest extending length is positioned in the connecting ring 502, the tail end of the guide piece 501 with the longest extending length is positioned in a region close to seed crystal, and the connecting ring 502 cleans graphite layers attached to the guide piece 501 in the sliding process of the guide piece 501 relative to the connecting ring 502;
because the eccentric ring 7 and the central axis of the connecting ring 502 are used as the circle center to rotate, damping exists between the eccentric ring 7 and the guide piece 501, during the rotation of the guide piece 501, the eccentric ring 7 is driven to rotate by the damping effect between the guide piece 501 and the eccentric ring 7, the eccentric ring 7 is realized to rotate by taking the connecting ring 502 as the circle center, meanwhile, the rotation angular velocity of the guide piece 501 is larger than that of the eccentric ring 7, the area where the longest guide piece 501 is located in the connecting ring 502 is synchronously changed in different time periods, the upper end surface of the bearing table 4 is cleaned, and the guide piece 501 above the seed crystal is matched, and carbon atoms are pushed to the position right above the seed crystal by driving air flow.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present invention, and the present invention is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present invention has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The mpcvd diamond growth equipment with the temperature regulating mechanism comprises a main body (1), a bearing table (4), a water cooling system, a microwave system, a heating system and an air supply system, wherein a vacuum pump is arranged below the inner part of the main body (1), and is characterized in that: the novel water cooling device is characterized in that a mixing pipe (2) is arranged above the inside of the main body (1), a piston plate (3) is arranged inside the mixing pipe (2), an air pump is arranged inside the piston plate (3), a bearing table (4) is arranged below the mixing pipe (2), a water cooling system is arranged below the bearing table (4), a limited compression ring (5) is arranged on the outer side of the bearing table (4), and the bearing table (4) is located above the inside of the limited compression ring (5);
the mixing pipe (2) is connected with the piston plate (3) in a sliding way, two groups of pipelines are arranged on the outer side of the mixing pipe (2), and the mixing pipe (2) is respectively communicated with the air supply system and the pressure limiting ring (5) through the two groups of pipelines.
2. The mpcvd diamond growth device with temperature regulating mechanism according to claim 1 where: the piston type air compressor is characterized in that an air inlet pipe is arranged above the main body (1), the air inlet pipe is communicated with an air supply system, a connecting pipe (301) is arranged above the piston plate (3), the connecting pipe (301) is connected with the air inlet pipe in a sliding mode, the connecting pipe (301) is connected with the air inlet pipe through a spring, and two groups of channels are arranged inside the piston plate (3).
3. The mpcvd diamond growth device with temperature regulating mechanism according to claim 2 where: the inside of mixing tube (2) is provided with a plurality of shunt ring (201) from top to bottom, rotate between shunt ring (201) and mixing tube (2) and be connected, a plurality of V type groove (202) have been seted up to mixing tube (2) inside, shunt ring (201) set up in V type groove (202), there is the gaseous mixture to pass through in mixing tube (2), and gaseous mixture begins the reposition of redundant personnel in shunt ring (201) top.
4. A mpcvd diamond growth device with temperature regulating mechanism according to claim 3 where: a plurality of guiding grooves (203) are formed in the outer side of the flow distribution ring (201), the guiding grooves (203) are obliquely arranged, a plurality of guiding sheets (204) are arranged in the outer side of the flow distribution ring (201), and the outer wall size of each guiding sheet (204) is matched with the inner wall size of each V-shaped groove (202).
5. An mpcvd diamond growth device with temperature regulating mechanism according to claim 4 where: the utility model discloses a mixing tube, including mixing tube (2), gas-collecting ring (6) is provided with to the below of mixing tube (2), rotate between gas-collecting ring (6) and mixing tube (2) and be connected, a plurality of gas vent (601) have been seted up to the below of gas-collecting ring (6), a plurality of gas vent (601) are annular distribution with the axis of gas-collecting ring (6) as the center, and the output orientation of gas vent (601) is the one side that is located in gas-collecting ring (6) centre of a circle.
6. The mpcvd diamond growth device with temperature regulating mechanism according to claim 5 where: the outer wall surface of the air guide hole (601) is obliquely arranged, the air guide hole (601) and the inner wall of the mixing pipe (2) are matched with each other to form an air flow channel, and the central axis of the gas gathering ring (6) is coincident with the central axis of the bearing table (4).
7. The mpcvd diamond growth device with temperature regulating mechanism according to claim 1 where: the middle part of limit ring (5) is provided with go-between (502), the middle part of go-between (502) runs through and has a plurality of guide piece (501), the lower extreme surface of guide piece (501) is laminated with the upper end surface of plummer (4), and the outer wall size of guide piece (501) matches with the inner wall size of go-between (502), there is the tooth's socket in the outside of go-between (502), rotates between go-between (502) and limit ring (5) to be connected, and go-between (502) are connected with driving motor through tooth's socket and gear, the axis of plummer (4) is located between guide piece (501);
the guide piece (501) is composed of an upper piece and a lower piece, and the inclination angles of the upper piece and the lower piece of the guide piece (501) are opposite.
8. The mpcvd diamond growth device with temperature regulating mechanism according to claim 7 where: the eccentric ring (7) is arranged on the outer side of the connecting ring (502), one end of the guide piece (501) is in sliding connection with the eccentric ring (7), a perpendicular bisector where the circle center of the eccentric ring (7) is located is parallel to a perpendicular bisector where the circle center of the limiting ring (5) is located, the eccentric ring (7) is rotationally connected with the main body (1), the eccentric ring (7) rotates with the central axis of the connecting ring (502) as the circle center, and damping exists between the eccentric ring (7) and the guide piece (501).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311604966.1A CN117778999B (en) | 2023-11-28 | 2023-11-28 | Mpcvd diamond growth equipment with temperature regulating mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311604966.1A CN117778999B (en) | 2023-11-28 | 2023-11-28 | Mpcvd diamond growth equipment with temperature regulating mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117778999A true CN117778999A (en) | 2024-03-29 |
| CN117778999B CN117778999B (en) | 2024-09-20 |
Family
ID=90388230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311604966.1A Active CN117778999B (en) | 2023-11-28 | 2023-11-28 | Mpcvd diamond growth equipment with temperature regulating mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117778999B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012158532A1 (en) * | 2011-05-13 | 2012-11-22 | Board Of Trustees Michigan State University | Improved microwave plasma reactors |
| WO2014026930A1 (en) * | 2012-08-13 | 2014-02-20 | Element Six Limited | Thick polycrystalline synthetic diamond wafers for heat spreading applications and microwave plasma chemical vapour deposition synthesis techniques |
| CN104937136A (en) * | 2012-12-12 | 2015-09-23 | 六号元素技术有限公司 | Method for making diamond layers by CVD |
| JP2017055118A (en) * | 2015-09-10 | 2017-03-16 | 国立研究開発法人産業技術総合研究所 | Microwave plasma cvd device, synthesizing method of diamond using the same, and synthesized diamond |
| US20170298515A1 (en) * | 2016-03-07 | 2017-10-19 | Ii-Vi Incorporated | Method of Manufacture of Free Standing Microwave Plasma CVD Polycrystalline Diamond Films with Major Dimensions on the Order of One Wavelength of the Utilized Microwave |
| CN219280032U (en) * | 2023-02-09 | 2023-06-30 | 天津征惟半导体科技有限公司 | Multi-cavity structure for diamond growth and MPCVD device |
| CN116926666A (en) * | 2023-07-25 | 2023-10-24 | 北京左文科技有限公司 | Microwave reaction device convenient for adjusting growth temperature |
| CN117107225A (en) * | 2023-08-08 | 2023-11-24 | 上海顺心谷半导体科技有限公司 | Diamond film production equipment based on MPCVD method |
-
2023
- 2023-11-28 CN CN202311604966.1A patent/CN117778999B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012158532A1 (en) * | 2011-05-13 | 2012-11-22 | Board Of Trustees Michigan State University | Improved microwave plasma reactors |
| WO2014026930A1 (en) * | 2012-08-13 | 2014-02-20 | Element Six Limited | Thick polycrystalline synthetic diamond wafers for heat spreading applications and microwave plasma chemical vapour deposition synthesis techniques |
| CN104812946A (en) * | 2012-08-13 | 2015-07-29 | 六号元素技术有限公司 | Thick polycrystalline synthetic diamond wafers for heat spreading applications and microwave plasma chemical vapour deposition synthesis techniques |
| CN104937136A (en) * | 2012-12-12 | 2015-09-23 | 六号元素技术有限公司 | Method for making diamond layers by CVD |
| JP2017055118A (en) * | 2015-09-10 | 2017-03-16 | 国立研究開発法人産業技術総合研究所 | Microwave plasma cvd device, synthesizing method of diamond using the same, and synthesized diamond |
| US20170298515A1 (en) * | 2016-03-07 | 2017-10-19 | Ii-Vi Incorporated | Method of Manufacture of Free Standing Microwave Plasma CVD Polycrystalline Diamond Films with Major Dimensions on the Order of One Wavelength of the Utilized Microwave |
| CN219280032U (en) * | 2023-02-09 | 2023-06-30 | 天津征惟半导体科技有限公司 | Multi-cavity structure for diamond growth and MPCVD device |
| CN116926666A (en) * | 2023-07-25 | 2023-10-24 | 北京左文科技有限公司 | Microwave reaction device convenient for adjusting growth temperature |
| CN117107225A (en) * | 2023-08-08 | 2023-11-24 | 上海顺心谷半导体科技有限公司 | Diamond film production equipment based on MPCVD method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117778999B (en) | 2024-09-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202438467U (en) | Aluminum powder grading production line | |
| CN103216450A (en) | Circulator | |
| CN117778999B (en) | Mpcvd diamond growth equipment with temperature regulating mechanism | |
| CN206406120U (en) | A kind of horizontal slicer of medicinal material | |
| CN118758080B (en) | A condensate recovery device and steam conversion and utilization humidification system | |
| CN117563385B (en) | Purification system of high-purity nitrogen | |
| CN104785444A (en) | Coarse separation tank for mica granule | |
| CN202377193U (en) | Multi-level classifying machine | |
| CN206423142U (en) | A kind of hay mover with adsorption function | |
| CN117604630B (en) | Single crystal diamond growth equipment with feed gas concentration layering control function | |
| CN212282896U (en) | Separation and purification device for organic compounds | |
| CN204823019U (en) | A device that is used for automatic molecular sieve that loads of adsorption tower | |
| CN101054133A (en) | Portable sand and dust separation device and use thereof | |
| CN217188622U (en) | Carborundum miropowder subsides device | |
| CN201807961U (en) | Dustless electric polishing machine | |
| CN210480882U (en) | Production facility of nanometer graphite alkene | |
| CN107149960A (en) | A kind of disintegrating machine | |
| CN214136610U (en) | Environment-friendly sludge regeneration building block complete equipment | |
| CN112221297A (en) | Twin-tub series-type cyclone separator | |
| CN212789822U (en) | Short-path molecular distillation equipment | |
| CN207256336U (en) | It is capable of the insulating sheet material cutter device of dedusting | |
| CN211914475U (en) | Sieving mechanism is used in calcium oxide production | |
| CN219518961U (en) | Pulverizer for coal processing | |
| CN221062019U (en) | Plate-type oil-gas separation device | |
| CN217491683U (en) | Winnowing device for grading heavy calcium powder |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |